...............................................................................................................................

1
...........................................................................................................3
1.1 ....................................................................................................................3
1.2 ..................................................................................................8
1.2.1 ............................................................................9
1.2.2 .................................................................................................. 11
1.2.3 ........................................................................................... 16
1.3 ........................................................................................... 17
1.4 .................................................................................................. 20
1.5 ........................................................................................... 25
.................................................................................................... 28
2.1 ...................................................................................... 28
2.2 ................................................................................ 31
2.3 ............................................................................................................. 33
2.3.1 ...................................................................................................... 33
2.3.2 ................................................................................ 39
2.4 ............................................................................................................. 42
2.4.1 ................................................................................ 43
2.4.2 .......................................................................................................... 44
2.4.3 ....................................................................................... 47
2.5 ........................................................................................... 51
2.5.1 ...................................................................................................... 51
2.5.2 .................................................................................................. 52
2.5.3 ...................................................................................................... 53
2.5.4 ............................................................................................... 53
2.5.5 CCD .................................................................................. 53
2.6 .................................................................................................. 55
2.7 ........................................................................................... 58
2.8 ......................................................................... 62
2.9 ....................................................................................... 63
2.9.1 ......................................................................... 65
Fig. 1-18............................................................................................................ 85

 9
1

FIB
3
4 5

6
9

7
(EBSD) LVSEM/
ESEM
8

1.
2.
3.

1.1
0.1
0.1

1 1 O L S
O' AB
O'
Airy disk . 1 2
3

 a 84%

O r, r',
r O r' O'
r O
Rayleigh

19%
d
d 1 2 b
d
(Resolution).

1-2 Airy a b
d
4

 1 1
l ; a ; n
NA nsin? , (1-1)

1 2
1 2

1 1 1-2

90 NA 0.95
4000 8000 4000A n
1 ,

1 3
n=1.66 , d~1/3 l 1300

2000
2500 2000

X
1 X
X X

1 4
h 6.626 10 -34 . Plank ' s constant
m ; v
500 V , 1 4 m
m 0 m 0 9.109 10 -31 kg 0
V eV

1 5
1 4 1 5

1 6

m 0

1 6

1 7
V l ?
100-200kV

 1 8
1 4 1 8

1 9
1 9

1 10
V l c 3 10
8 m /s 1 1
1 1

(kV)

()

100

0.0370

200

0.0251

300

0.0197

1000

0.0087

100 0.037
4000~8000 10 100
~0.02 100 2
1000 1
100

7

1000

1.2

(1)

2 60
100
3

1-11
F e H

1.2.1

H z
H r
v H 1
11

V H

1-12
H 1 3
z

(1-13)
H

1-14

1-15

(1-16)

10

 1 3
1-16 P

P z E
E

1.2.2

, H H z

H r H z H r

(1-17)

H z 2n

H z 2 H(z)

=
1-18

z 2n+1

z 1

11

 z 3
r r

1 19

1 20
1 4
A P
P v v z v r ,
v z H r F
H z v r
v t
H z v t F r F r

H r v r v r H r Hz vr
v t
v t v t F r
F r
H z
z B A
v t
90

F F r
1-4
12

1-4

1-21

1-22
m V z V
1-22

+ e m H
V :

1-23
13

 H z
H z H z

1 5

1-24
1-5

1-24

a b H
a b +

14

 P B f b B P f 0

1-25
1 23 1 25

R I H z

1-26
1-26 1 25

N NI I

1-27
Hz z z 2R

1-25
15

f Hz Hz f
H f

1.2.3

Polepieces
1-6

1-6 a

1-7
Gap ,
Polepieces
bore bore-to-gap-ratio

16

1-8

/ (Sample holder

1 7

1.3

17

1-8

(1-28)
P B f M

(1-29)

18

P P M

P 2

M 1

P 2

1

250mm 0.2mm ( 0.1mm )
0.2mm

19

1.4

r dr/dE

~2 0.02

Spherical aberration

20

 1 - 9
1 9
O' O' N N

N N
N
O

M M

(1-30)

d s

< 1mm

~ 3mm

~ 0.3mm

~10 -3

2
21

 Distortion

1 - 10

1 10
110a ,


1 10b
1 10c
1 10c
1 10d ,

(Astigmatin)

22


1 11 y
O x 1 x 2
y y 1 y 2
O
x 1 x 2 y 1 y 2 y
x x yx
x 0
y 0 D f A x 0 y 0
y

1 - 11
(Chromatic aberration)

1-12 r
m f

23

1-25

(1-31)
I I

(1-32

(1-33)
f r i

(1-34)
C f
f

1-35

24


210 6

1 - 12

9.10

1.5

(1-1)

90

25

n 1 2 3 5

(1-36)

(1-37)

(1-38)

1 38

26

(1-39)

(1-40)
0.037 Cs
0.88mm r min 2 opt 10-2
f 1.7mm 34m

1000
C s ~ 3mm r min ~2.5-3
C s < 1mm r min ~1.4-1.8
1 2
1 2

~1000

~2

~2000

27

1.

2.
3.

2.1
1924 Brogliel De
1926-1927 Davission Germer
28

Thompson Reid X

1926 Bush

1931 Knoll Ruska 12-17

1931-1933
1934
500 1986
1939 100
1954 Elmiskop 10
1935 1946
EM 1944
Philips EM CM
1977 3 80

JEOL Hitachi FEI

1 TEM 100-200 JEM

2010 H-8000 CM200 FEI TECNAI20 200
1.9
2 TEM 300-400 JEM
3010 JEM 4000 H-9000 H-9500 FEI TECNAI F30 300
1.7 400 1.63

29

3 TEM 1000 JEM 1000

3000 1000
1
200 300

1949

1949 Heidenreich
Bollnan Hirsch
Hirsch

Cowley
Moodie

1nm

30

 2-1 JEM -2010F

2.2

31


2-1
2-2

2-2 JEM 2010F

32

2-1 X
EDS EELS
X

2.3
Illumination system

10 5

2.3.1
Electron Gun
2-2

2-3

33

 LaB 6
FEG Field Emission Gun

2.3.1.1
2-3 2 -4a LaB
6 2-4b LaB 6

2 3 a (b)

2 4 a LaB 6 b
34

 2-5
Filament 0.03 -0.1 V
Wehnelt
Anode

2 5

35

d 0
Gun cross-over

2.3.1.2 FEG

0.1 m
2-6 LaB 6
100 FEG
FEG

36

 2 6
FEG FEG FEG
FEG
W 310
0.3-0.5eV

FEG

1600-1800K
0.6-0.8eV FEG
FEG

2-1
2-1

FEG

W(1 FEG W(310)

ZrO/W(100)
W
(

200KV )/A ? 10 5

LaB 6
5
10 6

00)
5 10 8

5 10 8 10 8

cm -2 ? str -1
37

50
m

10

0.1 1 m

10

10
100nm

100nm

2.3

1.5

0.6 0.8

0.6

0.3

0.8 0.5

/eV

10 -3

10 -5

10 -7

10

10 -8

1,6

300

20

20

-7

/Pa

2,800

1,800

1,800

/K

00

20

100

/ 100

100

100

/h

1 /h

/h

/h

/15min

100

100

10

10

38

2.3.1.3

High voltage Cable

2-2

2.3.2

2.3.2.1

2-7
Condenser lens C1
C2 C1
Gun Cross-over C2 C2
C2
C1 C2 C1

39

 2 7
2-7 2-7
a Condenser mini-lens CM

TEM 2-7 b

1
EDS 2-7 c
2
Nano-beam Electron Diffraction NBD
EDS NBD

Covergent Beam Electron Diffraction, CBED

40

2.3.2.2
Deflection Coil
beam tilt beam shift
beam scan
2-8

2 8
2 DEF1
1 DEF2
1 2

DEF1 DEF2

DEF2

DEF1 DEF2
2

41

 2-9

2 9

2.4
(Imaging System) Objection Lens
Intermediate Lens Projector Lens Objective aperture
selective area diffraction aperture 2-10(a)

42

 2-10 a b

2.4.1

1906

2-10(b)
L
S 2 S 1 S 0 S 1 S 2

I 1 I 0 I 1 O 1 O 0 O 1

O 1
I 1

43

2.4.2

100 200

2-11

2 11 JEM 2010F

44

back focal plane 2-12

2-13
10-50m

2 12

45

 2 13

2-14 a O O ,
O i i M 0
M 0 O
D P 1 P 2
D D

2-1

46

2 1

210 -3 10? D 1

1 10?
1
2-14
b Ds

2-2
100-200 2-2
10 4 1

10 -3
5? 10 5 2 2
10000

2-14 b

2.4.3

0.2 2?
0.2mm /2? 10 6
5-10
10
47


M I 0-20

( 2 15a )

( 2-15b)

2-3
M 0 M I M P M
0 100 M I 20 M P 100 M 10020100 210 5
M 0 M P M I 1 M 1001100 10 4
1 1
M I 1 2 15a
10 4 10 5 M I 1
2 15c

48

 10 -5 ,

2-15

0-20

2-15
100
20 2-15 (a) 20
100
20
100
20

49


2-15 b

Selected Area Diffraction

SAD

10 3 210 5

<1
2-15 c
100-10000

10 6

2-16 50-100

50

 2 16

2.5

CCD

2.5.1

ZnS 450nm
550nm
51

 ZnS ZnS 50m

ZnS 10m 10-50m
5-10
50m
50m
0.5nm 10 10
X

CCD

2.5.2
25
10

4-5m
10cm 10cm 10 7
0.1-10

0.5-2

52


10m

2.5.3
Image Plate X

BaF Br I Eu 2+ [BaF(Br,I):Eu 2+ ]

2.5.4
TV Camera

500 / 1000 /
10cm 10cm
2 10 6

2.5.5 CCD
53

 CCD Charge-coupled device

2-18 YAG ythrium aluminium garnet 3Y 2 O
3 5Al 2 O 3 CCD
CCD

CCD
CCD

2 17
CCD 1K1K 1K 1024
2K2K 4K4K CCD
4K4K CCD CCD

CCD
CCD
54

 CCD
CCD

2 18 CCD

2.6
3mm
3mm

Sample holder

2-19

55

X
2-20

2-19

56

 2-20

Single-tilt holder

Double-tilt holder
X X

heating holder
Cooling holder 2-21
1300
-195.8 -180
-268.94 -250

57

 2-21

2.7

10 -7
torr 1 1 1.32 10 -3
58

 Pa 1Pa 7.5 10 -3
UHV TEM 10 -9
10 -11

2-22 JEM -2010F

Mechanical pump 10 -3

Diffusion pump 10 -3 10 -11

Turbomolecular pump ion pump

10 -9 10 -11
mechanical pump
diffusion pump
59

 (ion pump)

2 1

TEM

-10 -2 Pa

(RP: rotary

pump)

TEM

(DP: oil

diffusion

10 -1 -10 -8 Pa

pump)

TEM

(SIP:

10 -2 -10 -9 Pa

sputter ion

pump)

(TMP:

10 -2 -10 -8 Pa TEM

turbo

molecular
pump)

10 -2 -10 -13 Pa

(CP: cryo

60

pump)

2-22 FEG
JEM -2010F
SIP: sputter ion pump 15 l /s
SIP 60 l /s
3 10 8 Pa
150 l /s SIP
3 10 5 Pa
contamination
SIP

420 l /s DP oil diffusion pump

DP
RP rotary pump 3 1 TEM

10 -7

61

2.8

2-3? 1 10 -6 /
2 10 -6 /

62

 2?

vibration-free

2.9
(Alignment)

63

 1
2
3
4

5
6

1
A ;
B ;
C ;
2
A.

64

B. ;
C. ;
D.

2.9.1

2.9.1.1

LaB 6 15
m A

15 m A

B
65

 2-23 LaB 6

X,Y
2-23 LaB 6

X,Y

2.9.1.2

X,Y
X,Y

66

2.9.1.3
2,3
X,Y

X Y 2-24

2-24
a b

67

2.9.2

2.9.2.1
high voltage wobbler

X,Y
2-25

2-26

68

 2-25

2-26
2.9.2.2

69

A
10
X,Y

B
20

2-27

2 27

CCD
CCD

70

2.9.2.3

X,Y

2.9.2.4
X,Y

TV

2.9.3
A

image wobbler

71

 2-27

B
20

2-28
Scherzer
2.10

TEM

100-200kV 50-100nm
150 ? ,
72

 2-28
a b c

:
(powder)

73

 thin foil

(Replication)

thin foil

cross section
thin foil

2.10.1

3mm
grid,
, 2 29

2 30

74


3mm
2 31

2 29 grid

2 30

75

 2 31

2.10.2
3 mm
thin foil .
100-200
F 3mm
3mm 1
3mm
3mm

76

2.10.2.1

200 m m
Si, GaA 3 , NaCl, MgO Diamond
Wafering Saw 2 32 200 m m

2 32

2.10.2.2 F 3mm

mechanical punch 2 33 F 3mm

Ultrasonic drilling 2 34
3mm F 3mm

77

 2 33

2 34

2.10.2.3
/ / ,
1 2
20
(tripod polisher 2 35)
1
78

 3 1 m m 3 m m

2 35 (tripod polisher)

Dimpler 2 36

10 m m

2.10.2.4
A

79

 a b
2 36 Dimpler

2 37

2 37
0.1 0.2mm 3mm
,

80

K K a
halo ring

Hirsch P.B, et al Electron
Microscopy of Thin Crystals. London Butterworths, 1965, 455

10 20
2 38

200

81


F 3mm

2 38 6 kV

2.10.3
(Ultramicrotomy )
100nm

82

 2 39

2 39 A (B)

2.10.4

r eplication TEM
83

2 40 A

C Cr Pt
C Cr Pt (B)

TEM

B.

84


2 41
2
3

2 41
C C

TEM

2.10.5
Fig. 1-18

Cross-section specimen

,
85

2 42

2 42
2.10.6
Focused Ion Beam FIB

Ga
30kV 10A /cm 2

2 43 a FIB
2 43 b FIB Si
Si
FIB
FIB 2 43 c

FIB FIB TEM SEM

86

 FIB Ga Ga
FIB

2.10.7

10 3 10 4 Pa

2.10.8

2.10.8.1

/
TEM

87

2.10.8.2

88

(c)
2-43 (a) FIB TEM
b FIB Si c
FIB JEM-9310FIB

89

AEM

3 1

90

 3-1

3.1
1

91

 3-2


a

3 2

3 1
3 2a
q r, r q

92

 3 2

3 1 3 2
Z Z

3 3
r N A A V
Z q t 3 3
t Z V

X 10 3 10 4
X

93


X
X 10 6 10 8

X Bremsstrahlung

X-ray

3.2

X Charactreristic X-ray

94

 3-3 K L
X

X 3 3 Z
(Criticalionization energy Ec ) E c
X X EDS
EDS Z 3 4
2 Secondary Electron

(E<50eV)
510nm

STEM
STEM
95

 30kV 1nm STEM 100kV

1nm,
Fast Secondary Electron

(50200keV). X
X

(Backscattered Electron)

nm

4 (Auger Electron)
K

( 3
4)
X eV-
keV 1

AES AES
UHV Auger/STEM

5 Cathodoluminescence

3 5
96


CL
STEM

3-4 L 1 K L 2
3

6
X

97

 (EELS)

EELS
EELS X

3 .3 Beam Damage

1
2
3

98

1.
2.

3.
4.

5.

4.1
4.1.1.

(Electron Diffraction) 4 1
l d hkl hkl

4 1
Bragg , s Law 4 1 d hkl
l n=0,1,2,3
n
99

hkl n

n nh nk nl

(4-2)

4 2

4 3

X X

100

 q
100 200kV, 10 3 nm
10 1 nm 4 2 q 10 2 rad
< 1 .
4.1.2. Ewald
1
Reciprocal lattice

4 4

4 5
O * (hkl)

101

 4 6

(hkl)

4 7
2 (hkl) (hkl)

102

O 1 1/
A,O,G Ewald Sphere

O 1
(hkl) O 1 G(

G hkl
(hkl) O 1
G K 0 K g

(fcc) 100
F

4.1.3 (structure factor)

103

A O

4 8
f j r j j

4 9

4 10

4 11
104

 4 9 4 10 4 11 4 8

4 12
F hkl

4 13
F hkl =0 ,
Kinematically forbidden
reflections

(fcc)

fcc 4 0,0,0 (1/2,1/2,0)

(1/2,0,1/2) (0,1/2,1/2) 4 12

h,k,l h+k h+l k+l F

hkl =f[1+1+1+1]=4f

105

 h,k,l h+k h+l k+l

F hkl =f[1-1+1-1]=0

fcc (111) (200) (220) (311) (222)

(400) (100),(110),(210),(211), (300)

2 bcc
bcc (000),(1/2,1/2,1/2)
4 12

h+k+l
F hkl =f[1+1]=2f
h+k+l
F hkl =f[1-1]=0

bcc (110) (200) (220) (222) (400) (420)

(100),(210),(300)
, 4 12
F hkl =0

106

I=0
hkl

4.1.4

( 4 4) z
xy z N z
t=N z c c z

107

 4 14
F

(excitation error)

4 15

108

 4 16

N z c

s=0 2/(N z c)

N z c
Ewald

x y z N x N y N z

4 17

109

 4-5

4 18
s x s y s z
2/N x a 2/N y b 2/N z c

4 6

110

4.1.5

111

4 7 L
G ,O
G r

, tan2 2 ,
2dsin = ,
rd=L 4 18
d l
L
L L
camera length
4 18
L r 4
18 d 4 18
4 18

Ewald 1/ l Ewald

Ewald L

4.2
112

 Ewald

4.2.1
[uvw]
[uvw] 4 8 h 1 ,k
1 ,l 1 h 2 ,k 2 ,l 2 h 3 ,k 3 ,l 3 hkl
[uvw]

(uvw) *

(hkl)

4 19
4 19 Weiss zone
law
(uvw) * [uvw] . (uvw) * ^ [uvw]
[uvw] hkl
(uvw) * h 1 ,k 1 ,l 1 h 2 ,k 2 ,l 2 [uvw]

[uvw]

113

 4 20

4 21

(hkl) hkl [uvw]

(uvw) *
4.2.2

(uvw) *
1 hkl (uvw) *

h 1 k 1 l 1 h 2 k 2 l 2,

h 1 +h 2 k 1 +k 2 l 1 +l 2 h 1 +h 2 k 1
+k 2 l 1 +l 2 (uvw) *
2 h 1 k 1 l 1 h 2 k 2 l 2 h 1 +h 2 k
1 +k 2 l 1 +l 2

114

 ( 4 8)
(uvw) *

4 8
(3) F=0
(4) (uvw) *
h 1 k 1 l 1 h 2 k 2 l 2

90

(321) *

1 h 1 k 1 l 1 =

[321] h 2 k 2 l 2

h 2 k 2 l 2 =

h 2 k 2 l 2 =

3
115

4 9

5 (321) * 4 9

(321) *

116

4.4
4

hkl (hkl)
Ewald
( 4 15)

4 15
(4-18)
(4-18) r
d

4 23
117

 L l

4 24

4 24 r d
4 24

4 25

4 26
4 24

4 27

4 28
4 28
r 2 4 28
4 28

118


(F=0) N
fcc hkl F
hkl
(111) (200) (220) (311) (222) (400) 331 (422)
N 3 4 8 11 12
16 19 20
bcc h+k+l F
hkl
(110) (200) (211) (220) (310) 222 (321)
N 2 4 6 8 10 12
14
N 1 2 3 4 5 6
8 9 10 N 7 N 3
8 11 16 19 24
4 17
N N

4 16 N
119

(4-29)
M h 2 +k 2 , l 0 r

(4-30)

(4-31)
P h 2 +hk+k 2 , l 0
r

(4-32)

r hkl

4.4.1
120

a)

b)

c) {hkl} ASTM 4
17 d

d)

121

 4 17 TiO 2 ASTM

Fe ( ) 8.42mm

11.88mm 14.52mm 16.84mm 18.88mm, a=2.85 ?,

r(mm)

N hkl d( ?)

(mm ?)

8.42 70.90 2 110 2.01 16.92

11.88 141.1 4 200 1.42 16.87
14.52 210.8 6 211 1.17 16.99
16.84 283.6 8 220 1.01 17.01
18.88 356.5 10 310 0.9 16.99

16.96 mm ?

a)

122

b)

c)

d) d ASTM
d

17.00mm ?, 8.42mm

11.88mm 14.52mm 16.84mm 18.88mm,

r(mm)

N d( ) I/I 1 ( ) d( ) I/I 1 ( )

----------------------------------8.42 70.90 2 2.02 100 2.01 100

11.81 141.1 4 1.44 20 1.41 15
14.52 210.8 6 1.17 40 1.17 38
16.84 283.6 8 1.01
18.88 356.5 10 0.9

N bcc d=

/r d=2.0-2.5 ?, ASTM

Fe

Fe

123

4.4.2
L
L L
L
1 TlCl , a=3.842 ?
2) Au a=4.041 ?
3) (Al) a=4.041 ?

1 2 3 7.94 9.20 13.00mm

d 111 d 200 d 220

1 7.94 d 111 =18.70mm.

2 =9.20 d 200 =18. 76mm .

3 = 13.00 d 220 =18.75mm .

ASTM L l

=18.74 mm .
l L

124

4.5
4.5.1
O *
Ewald
Ewald (1/ l ) , O *
Ewald O *

Ewald
r=[uvw]=ua+vb+wc
(hkl)
[uvw] O * (uvw)
* 0 0 O * "
"(Zero Order Laue Zone ZOLZ), [uvw] (uvw) * 0
[uvw]
hu+kv+lw=0
[001] (100) (010) (110) (120)
hu+kv+lw=N(N )
N (High Order Laue Zone, HOLZ)

hu+kv+lw=0
125

4.5.2

[uvw]
(hkl)
hu+kv+lw=0
O
r d

rd=

3 ) (uvw) o *

1
2
126

1
1

P 1 P 2 P 3

2 f

3 rd=L l

4 d d ASTM
{hkl} h 1 k 1 l 1 {111},
111

11 1

1 11

5
[h 3 k 3 l 3 ]=[h 1 k 1 1 l ]+[h 2 k 2 l 2 ]

6 hkl

127

7)

8 h 1 k 1 1 l

, h 2 k 2 l 2

[uvw] *

(fcc) (a=0.3523nm) 4 18

r 1 =13.9mm r 2 =5.5mm
r 3 =14.25mm f 1 =82 f =76 ( 4 19b) L l
1.12mm nm rd= L l d :d 1 =0.0805nm d 2 =0.2038nm
d 3 =0.0784nm ASTM d {331}
111} {420}

4 18 a b c

128

 (h 2 k 2 l 2 ) (111)

(h 1 k 1 l 1 )+(h 3 k 3

l 3 )=(111) h 1 k 1 l 1 h 3 k 3 l 3

h 1 k 1 l 1 =

, (h 3 k 3 l 3 )=

4 19c [uvw]

2

P 1 P 2 P 3

rd=L l

4)
, ASTM d i
{hkl}
129

5)
6) ASTM f

7)
ASTM

r A 7.1mm r B 10.0mm r C =12.3mm D (r A

r B ) ? 90 o D (r A r C ) ? 55 o, , l L 14.1mm . 4 19

A N=2 A
{110} A

B N=4 B {200}, B 200

A B

130

 90 o A B
B (002)
A

B (002) C

,
A C 57.74 o , 55 0 C

[uvw]

[220] [220] [110] [uvw] [110]

4 19 a b
2

rd= l L
d A =1.99 ? d B =1.41 ? , d C =1.15 ?
ASTM a - Fe d
d A {110},d B ={200},d C ={211},
131

 d a - Fe a - Fe d
A B C

AB 90 o AC 54 .7 o ,
A B C a - Fe
a - Fe

[uvw] [220]

[uvw]= [110]

4 20 180

hkl ,

180 ( 4 20)
180 180 o ambiguity 180

(Burgers) 180
132

 Edington [ J.W. Edington, Monographs in practical electron microscopy in

materials science , London Macmillan (1975)]

[uvw]

[uvw]
[uvw]
[001] (100) (010) (110) (120)
[u ' v ' w ' ]
(u ' v ' w ' ) * (uvw) * (u ' v
' w ' ) *

Ewald

1 Ewald Ewald
Ewald
4 21

133

 4 21 Ewald
2)
Ewald

3)
Ewald
4)
Ewald

Ewald
s s
s s
Ewald s
134

Ewald s

4.6
4.6.1 .

135

 4-23 A B
Ewald C hkl
ADF D
E Ewald

000 000 hkl
000 hkl
4 p
hkl (hkl)
136

 Ewald

(diffused ring) ,

4.6.2 (textured specimen)

4 23

[uvw]

4.6.3

double diffraction multiple

diffraction

137

 4 24 h 1 k 1 l 1 h 2 k 2 l 2 h 3 k 3 l 3
h 1 k 1 l 1
h 2 k 2 l 2
h 3 k 3 l 3
h 1 k 1 l 1 h 1 k 1 l 1
h 1 k 1 l 1

4 24

4 25 , [001], z
000 010 100 110

138

 4 25

h 1 k 1 l 1 h 2 k 2 l 2

4.6.4
hu+kv+lw=0, Ewald
(uvw) 0 *
Ewald (uvw) * Ewald

hu+kv+lw=N N=0, 1, 2. 4 42
N=0 (Zero-Order Laue-Zone, ZOLZ )
N 1 0 Higher-Order Laue-Zone HOLZ N

139

4 26

4 26

4 27
4.6.5
140

 (1000-1500?)

(Kikuchi lines) 4 27

4.7

141

EMS (Electron Microscopy Imagine Simulation Software)

PC
Desktop Microscopist
Virtural Laboratories Macintosh

ELD (commercial package for windows)

PC CRISP

CRISP
Calidris PC TEM
FFT

DIFPACK
Gatan Macintosh Digital Micrograph

142

 Digital Micrograph
Gatan Macintosh CCD

GIF TEM
Mac Tempas
Total Resolution Macintosh ,

Mss Win32
JEOL PC

TriMerge
Calidris PC

TriView
Calidris PC TriMerge

143

1.
2.
3.

5.1

144

 5-1
a b

5.1.1

5-1 ( )
[uvw] 60 90 120 180
180
{111} (111)
{112}

145

180

hkl [HKL]

hkl T M

T hkl T (
5 2) hkl T
h t k t l t

h k l

h t k t l t (HKL) [HKL]
5 2

[HKL] HKL

[hkl]+[h t k t l t ]=n[HKL] 5 1

5 2
146

5 2
HKL=111 HKL=112

5 3
5 3 5 2 5 3

5 4
5 3 5 4

5 5

5 6
5-6 5-2 h t k t l t :

147

 5 7
(5-7) a=b=c 5 6 5
7

5 8

5 9

{111} [HKL]=[111] 5 8
5 9

148

(5-10)

a Hh+Kk+Ll=3N N=0 1 2 3

5 11

5 12

Hh+Kk+Ll=3N hkl

HKL 2N h t k t l t

5 1 HKL=111 hkl

t k t l t
149

 Hh+Kk+Ll=3N N=2 5 12

h t k t l t 600

600

Hh+Kk+Ll=3N

b Hh+Kk+Ll=6=3N 1 N=0 1 2 3
5 10

5 13
5 13
[HKL] 1/3

5 2 HKL=111 h k l =

t k t l t
Hh+Kk+Ll=1 3N 1 3N 1 N=0
5 13

150

Hh+Kk+Ll 1 3N 002

2
{112} [HKL]=[112] 5 8
5 9

5 14

a Hh+Kk+Ll=3N N=0 1 2 3

5 15
151

 hkl

N<112>

5 3 HKL=

h k l =

h t k t l t
Hh+Kk+Ll=0 3N N=0 5 15

b Hh+Kk+Ll=3N 1 N=0 1 2 3

5 16
[HKL] 1/3

5 4 HKL=

hkl (011) h

t k t l t

N=0 5 16
152

011

[HKL]
<111> <112>

1/3

5 10 5 14

[ 111
[ 112

211

] 12
121

] 16

( 5 3 )

1987

153

 5-3
(uvw) *

154

 [uvw] 5 9

5 17
HKL [uvw] [u
t v t w t ] [uvw]
HKL [u t v t w t ]
2 (uvw) * (u t v t w t )*
(u t v t w t )*
3 (uvw) * (u t v t w t )*

5.1.2
M 23 C 6 5 4 a 80
200 400
600 111 222 333
{200} {111} 54.74 80
111 200

200 5 4 b
151

5 4

155

 b <111> 5 17 , [uvw]=

[u v w ]

[HKL] [111]

[u v w ]

[HKL]=

, 5 10

hkl

600 ?

151 ?

4(d

5.1.4

156

5 9

5 18
T

5 19

157

 5 4 M 23C 6 (a, ) M 23 C 6
, (b, )

, (c, )

, (d, )M 23 C 6

5 5 024

hkl=024 HKL=

5 18 5 19

158

024

5 6

hkl=

111

HKL=111 5 18 5 19

111

1/3

5.2
5.2.1

hu+kv+lw=0

Ewald 1/ l

Ewald

159

Ewald

hkl
hu+kv+lw=N (N=0 1 2 3 )
N=0 N 1
0 N N N

5.2.2

5 5

160

 5-5

5-6 a

b c

5
6
3

5 7
M 23 C 6 M 6 C

161

Ewald

5.2.3

162

 5 8

hkl

hu+kv+lw=N (N=0 1 2 3 ) 5 20

(hkl)

5 21

5 22

5 23
163

5 24

L 5 8

5 25

5 21 5 24

5 26

164

 5 27
5 21 5 23 5 27 5 26
hkl

h // k // l //

5 28

5 28 u * v * w * uvw

5 29a 5 29b 5 29c

4 5

5 30

165

 5 31

5 29
5 30 5 31

5 32
5 28

a=b=c a = b = g =90 5 32

5 28

166

 5 33
hu+kv+lw=N
hkl uvw N

2) a=b 1 c a = b = g =90

5 34
hu+kv+lw=N

3) a 1 b 1 c a = b = g =90

5 35
hu+kv+lw=N
167

4) a 1 =a 2 =a a 3 =c

5 36

5.2.4

[uvw]

(hkl)

N
u+v+w= N= 1 2 3
u+v+w= N= 2 4 6
168

 u v w N= 2 4
6
u v w N= 1 2 3
N 1 2 3

N hkl

hu+kv+lw=N (N )

h // k // l // 5 28 hkl

h // k // l // hkl
h // k // l //

5 7 (211) *
1 (211) * (211) 0 *

hkl

(211) 0 *

(211) 0 * 5

9a

hu+kv+lw=N N hkl
169

 [211] 2h+k+l=N hkl

N 2
3) (hkl) 002 2h+k+l=2
020 002
002 5 9b
4 002 002
h // k // l //
h k l=002 u v w=211 N=2 5
33

002

5)

x y
x=2/3 y=-1/2

170

 002 (211) 0 * 5 9c

6)
002
( 5 9c )

171

 TiC [112] Mo 2 C [

[310] 1.60
5 10
5 10

5-10

5.3
5.3.1

172

1928 S. Kikuchi > 0.1 m m

Kikuchi lines
> 1000?

5 11 a P P

P
511a PQ PR P
hkl PR. PQ
R Q ( 511b)
RR' QQ' c R Q
c>1/2 5 11 b

RR' PQ

173

 5-11 a
b c
QQ' PR
(hkl)
p /2- q
Ewald q
5 11(c) I PQ >I PR , C>1/2,
I QQ' - I RR' 2c - 1 (I PQ - I PR ) > 0
QQ' RR'

5.3.2
174

 5 11(c) hkl
hkl
(hkl) (hkl)
0.1

OM 5 12
PM
PK 1 PK 2
hkl f q
R L , PM M
PK 1 PK 2 R* 5 12

5 37

q 5

38
5 37 5 38

5 39

5 40
5 39 5 40

5 41
2dsin q = l

175

(5-42)

5-12

R OM
5 42 d
5 42 f
hkl hkl

1 f 0 hkl
R=L l /d hkl

( 5 13a )

176

 2 f q hkl
hkl 000
000 hkl
( 5 13b)
3 f

4 hkl hkl

5 (hkl)

[001]
000

6
3 o ,
L= 500mm 1 o , 8.5mm
0.1 o
7

hkl

177

5-13 a =0 b =

9 0.5
0.5 1
5 14

5 15.

5.3.3

178

f 0 f q f 0

f q

R
OM 5 42 d
ASTM

[uv w]

5-14

179

 5-15
5.3.4
1

( 5-16)

5-16 a b a

180

 3
5 17 a h i k i l i (i=1, 2, 3)
A B C

h 1 k 1 l 1 h 2 k 2 l 2 B
=[uvw]

(i=1,2,3) 3-3

5-17 a 3

5-17 b f i

181

 5-18

f i

5 17 b

(5-42)
L OA OB OC 5-42
u v w

5 8 5 18
R L

{311} {422} {331} {420}

19 58
{420} {311} {422} 19.29 56.79

161 123 76 311 {422}

(311) 76

182

311 19

58

[u 1 v 1 w 1 ]

[u 2 v 2 w 2 ]

[u 3 v 3 w 3 ]
OA OB OC
f 1 f 2 f 3

183

 u ' v ' w ' u ' v ' w ' u v w [u ' v ' w ' ]

[u v w] [u ' v ' w ' ] [u v w]

a a s a
L

5 43
a

20

184

3 s
s hkl 5-19 P
P ' s P
s s
000 s 5-19

s 0 hkl
B W

hkl

s a

s a

5 19 W B
185

 a s<0 b s
0 c s>0

5 44

5 45

hkl

hkl [ hkl ]a
s s

[0001] [ 1l 1]

186

5.4
5.4.1 (superstructure)

AB

L10

B2

L12

5-20 AB
L12 L12

B2 B2

187

 f j
h+k+l F hkl h+k+l F hkl
hkl
L12 B2
f f A f B
(fcc) Ni 3 Al hkl

(superlattice reflection),
fundermental reflection .
(bcc) NiAl h+k+l
5 21
5.4.2 (Long-period superlattice)

AuCuII

5 AuCu [1/2 0

1/2] 10 10

5 22

a,

La,
L
5 23a a
c c,
[0,1/2,1/2]
4 c 4c

188

 5 23b ,
c,
1/4, 4c

5-21 A Ni 3 Al B NiAl A Ni
3 Al fcc fcc hkl

B NiAl bcc bcc h+k+l

5-22

189

 5 23 Au 3 Cd

AuCuII 5 22 a
a 10

(commensurate structure),
(incommensurate
structure)
190

 5 24 d,
6
d d <d D 6d+
d , d

5-24 6 6

5 25 5 25 a Cu 3 Pd
M a 1/6.8
6.8a . 5 25 b Tl 2 Ba 2 CaCu 2 O 8
c c 2 a a
5.9

5-25 a Cu 3 Pd
b Tl 2 Ba 2 CaCu 2 O 8

191

1.
2.
3.
4.

192

1930
1950

200? 1950 Hirsh Bollman

contrast
I 1 I 2
C

6 1
5 10

193


6-1

6 2

10

6 2A
Z
contrast image , Z 6 2B ,

>10nm <10nm

6 1 Cr Mo

194

 6 2

6 3 Si/Ge/ SiO2
6 3 A B Z contrast

195

6.1

6 4

Mass-thickness contrast

196

6 2
Z V e q
N

6 3

N 0

1cm 2 dt

dt
q 1cm 2 n dt
dn

6 4

197

 6 5
t=0 n 0 6
5 t n
6 4

6 5

6 6
I 0 Q t
I Qt
Qt=1 I=I 0 /e ? I 0 /3 t
W

6 7
t
r t
I r t Qt=1
( r t) C

6 8

198

 I 1 I 0 1 t 1 ,
Q 1 I 2 I 0
2 t 2 , Q 2
6 6 6 1

6 9
TEM 6 9

6 10

6 11

C 6 2 6 9

6 12
TEM

6 13
V q Z
t V
q q

199

6.2
6.2.1

diffraction contrast,

A B 6
6 A B A I 0
A I A =I 0
B I hkl
I B =I 0 -I hkl
A B (Bright
Field) hkl hkl
I hkl B A
(Dark Field) ( 6
7)

200

 6-6

a (b)
6 7
(hkl)

201

6.2.2

s t

6 8

202

 6 8

6.2.2 .1

I D
P 6 8
n

r n A

6 14

O A

O P

F g g

203

a( a ) A dz dz/a

6 15

6 16

6 17
P P

6 18
204

6 19
P

6 20
I g t s
6 20
t=0 ,

p /2( 6 9)

6 9

x g

q cos q ~1,
205

 6 21
x g 100V

200 x g
(1) V C V C =a 3 =(4.089?) 3 =68.36? 3 a=4.089?

(2) F g 4 000 1/2 1/2

0,1/2 0 1/2, 0 1/2 1/2

g 200 h=2 k=l=0 F 200 =f(e)(1+1+1+1)= 4f (e)

f(e)
3 f(e) sin q / l f(e)

? 1 6-10 f(e)=5.41? F g = 4f
(e)=21.64?

206

 6 10 f(e)

V=100kV l 0.037 ?

s=0

10
I g 6 20

207

 6 20

6 22

6 11 I g
s I g t
6 11

n ,

I g =0

6 20

t I g s 6-12

s 0

... I g s 0

208

n 1 2 3... I g 0

6 12 I g s

6 13a

6 13 b

209

 ( 6-14)

6 13 a
(b)

t=n

t
210

 6 14

6 15 O
B s 0 O
s s O
6 23 s 0 I g
s 0

I g 0 s

I g

I g 0
s

211

 6 15

s 0
|s|
s 0

6-16

s 0

212

 6 16 a b

6.2.2 .2
I T
I T =I 0 -I D

I T I D
I T
p /2

(extinction distance)

q cos q 1

213

6.2.3

2
3
4 Spinodals
5
6

214

 6 23

6 24

z
t

6 25

, n

a A D

A D
n n 0 invisibility
criterion

1 A D

215

//

6.3
6.3.1 stacking fault

fcc fcc{111} ? ABCABC ?

B
? ABCACABC ? ,
A B
.ABCACBCABC

fcc{111}

216

 fcc hkl a 2n
p 2/3n p n
a 2n p , exp(-i a )=1,
a 2/3n p exp(-i a ) 1 1

fcc

2/3n p

a)
6 17
6 18
g

6 17
217

 6 18 40Mn2Cr4V

b)
AB 6 19
AB 1 2

AB
AB

6 19

218

c)

d)
{111} {111}

0 2n p ,

a 120 , a 120 , a 0
360 2n p

a 0 2n p
6 20 a

2 p
0 6 20 b .

6 20 c ,

6 21

219

 6 20

6-21

t Z a

/
6 22 ,

220

 6 22
6.3.2
(dislocation)

1 (edge dislocation) Burgers

vector

221

 2 (screw dislocation)

( )

1
6 23 EF ABCD
z1 z2( 6
24), R f
z f 2 p
, R:b f :2 p ,

6-23 6-24 EF
x PP' MM'

,
222

n=0 a 0

a 1 0

n x A D

s x 6 25 s
x

D x D x~(

) s

6-25

2
223


R 1 R 2 R
3 0 hkl
D 6 26
S 0 S 0 > 0
D A C I(
)
(hkl) S ' S '
S ' > 0 S ' < 0
B S 0 + S ' > S 0 I B < I
S ' S 0 S 0 + S ' < S 0
D ' S 0 + S ' 0 I D ' =I max

S 0 < 0

224

 6-26

6 27
S '
3-10nm ,

.
,

225

 6 27
6.3.3

r O , r 0 e

226

 6-28

6 29

6 28

6 29
6.3.4
227

6 30 a
D
6-30b
6 31

6 30

6 31
228

 6 31 6 32 a

q 6 32(b) 6 32(c)

6 33

6 32

6 33 7.0%Al Ni
1 A B 2

229



6 33 B

6.4
6.4.1

180 0

180 0 f 180 0 f

6 34 MoO 3 [100]
230

f MoO 3
[001] <100> MoO 3
MoO 3 [100]
f 6 34 L f
f L 6 1
MoO 3 Philip CM200 f
C A

6 1

6.4.2

231

//

232

 (111)

<110>

6 2 {111}

0 6 2

6 35 Al a
020 D E
200

D E D

E (b) (c) 6 3

200

(020)
0

233

 6 35 Al
(a) (020); (b) (200); (c)

6.5
6 36
,

6 37

( h 1 k 1 l 1 ),

6 38 g 1 g 2
,

234

 g D D=1/g g 1 g 2
g

6 36 GaAs CoCa

6 37
1

a 0

6 39

235

 6 38

6 39
6 40

d 2

d 1

236

 6 40
(2)

a a 6 41

6 41

237

6 42

6 42
3

6 43 C

238

 6 43 (A) B C
4

6.6

1 s 1 0;
2 ;
239

s=0

t t I g
I 0

I 0 I 0

100kV

150 500 ?

s=0 t <100 ?
? 10

1/s s ? 0
?
I g

6.7

240

6 44
1
f 0 f g f 0 f g

6 26

0 6 26

dz 6 44
6 26
6 26
241

6 27
6 26

6 28

6 28

6 29
6 29
'

6 30

6 31
242

 6 30
s eff s 6 30 6 20

(6-30) (6-31)

s eff s

(
s )
2

s=0

s=0

1/s ?

6 32

s=0

s=0

243

6 33

6 33

6 33

6 34

244

1 6 13 s=0
2

6 45 b s ? 0 I g
6 45
a

6 45 a b

6 29
245

 6 35
6 26

6 36

6 37
6 36

6 38
6 38 6

38

s=0

246

247