FANUC MANUALS. LASER C2000i / C4000i / C6000i MODEL CB-70475EN - 01 - 110727

FANUC LASER C2000+-MODEL C FANUC LASER C4000+-MODEL C FANUC LASER C6000+-MODEL C
MAINTENANCE MANUAL
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No part of this manual may be reproduced in any form. All specifications and designs are subject to change without notice. The products in this manual are controlled based on Japans Foreign Exchange and Foreign Trade Law. The export from Japan may be subject to an export license by the government of Japan. Further, re-export to another country may be subject to the license of the government of the country from where the product is re-exported. Furthermore, the product may also be controlled by re-export regulations of the United States government. Should you wish to export or re-export these products, please contact FANUC for advice. In this manual we have tried as much as possible to describe all the various matters. However, we cannot describe all the matters which must not be done, or which cannot be done, because there are so many possibilities. Therefore, matters which are not especially described as possible in this manual should be regarded as impossible.
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SAFETY PRECAUTIONS
SAFETY PRECAUTIONS
This manual contains precautions which must be observed during operation and maintenance of the laser oscillator to ensure the safety of the operator and maintenance personnel and prevent damage to the oscillator. Maintenance involves a variety of risks and, therefore, must be conducted by those personnel who have sufficiently trained in maintenance and safety. Besides the laser oscillator, the laser machining system contains a machine, power magnetics cabinet, servo system, CNC, and operator's panel. This manual describes the laser oscillator. For a description of notes other than those on the oscillator, refer to the corresponding manuals, supplied by the machine tool builder and FANUC. Contents DEFINITION OF WARNING, CAUTION, AND NOTE.........................................................................s-1 WARNINGS AND CAUTIONS ON EXPOSURE ...................................................................................s-2 WARNINGS AND CAUTIONS ON MAINTENANCE...........................................................................s-3 WARNINGS AND CAUTIONS ON HANDLING ...................................................................................s-4 WARNINGS AND CAUTIONS ON MACHINING.................................................................................s-5 WARNING LABELS AND STICKERS ...................................................................................................s-6
DEFINITION OF WARNING, CAUTION, AND NOTE

To ensure the safety of maintenance personnel (referred to as users) and prevent damage to the machine, this manual indicates each precaution on safety with "Warning" or "Caution" according to its severity. Supplementary information is indicated by "Note". Read the contents of each "Warning", "Caution", and "Note" before attempting to use the oscillator.
WARNING Applied when there is a danger of the user being injured or when there is a danger of both the user being injured and the equipment being damaged if the approved procedure is not observed. CAUTION Applied when there is a danger of the equipment being damaged, if the approved procedure is not observed. NOTE Notes are used to indicate supplementary information other than Warnings and Cautions.
Read this manual carefully, and store it in a safe place.
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SAFETY PRECAUTIONS
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WARNINGS AND CAUTIONS ON EXPOSURE

1 WARNING It is extremely dangerous to expose your eyes to direct, scattered, or reflected CO2 laser light. Always wear protective glasses(over OD7 recommended) while the laser is operating. Exposure to laser light can cause blindness. If your eyes are accidentally exposed, seek medical advice immediately. Do not turn on the laser oscillator while a panel is removed or a door is open. Operating the laser with a door open or panel removed may result in the operator being directly exposed to CO2 laser radiation. Exposure to laser light can cause blindness and/or severe burns. If your eyes are accidentally exposed to laser light, seek medical advice immediately. Before turning on the power during maintenance if absolutely necessary, wear protective glasses and clothing to prevent accidents. If you wear protective glasses, dont look at the laser light directly. Surround the laser machining tool with a fence made of a material which absorbs laser light well (such as acrylic). Place appropriate warning notices on the fence. The door in the safety fence shall be fitted with an interlock switch such that opening the door stops the laser. Failure to provide such a fence exposes persons in the vicinity of the machine tool to the danger of being exposed to CO2 laser radiation and the associated risk of blindness. If a person is accidentally exposed to laser light, seek medical advice immediately. If the laser oscillator is operated with a panel open, ultraviolet radiation is emitted from the high-frequency discharge section. Gazing the discharge section for a long time can cause visual disturbances such as impaired eyesight. Always wear protective glasses during work. If you feel trouble with your eyes, seek medical advice immediately. Open beam paths should be located above or below eye level where practical. Enclose the path of the laser beam with covers. Do not leave the end of the beam path open. Place laser- absorbing material at the end of the beam path to absorb the beam's energy. A CO2 laser beam is directional and has a high energy density. Exposure to laser light can cause blindness. Flammable material may burn or explode if exposed to the laser beam. If your eyes are accidentally exposed to laser light, seek medical advice immediately. If there is a possibility of being exposed to CO2 laser radiation exceeding the maximum permissible exposure (MPE) level for skin, wear protective clothing. Otherwise, there is a danger of being burnt. The oscillator is fitted with a red semiconductor laser to indicate the approximate position of invisible CO2 laser beam. Do not look directly at the semiconductor laser beam. Otherwise, your eyes may be injured.
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NOTE 1 Warning labels are affixed to those parts of the laser oscillator where there is a danger of exposure to laser radiation. Observe the precautions given on the labels. 2 During installation or maintenance necessitating the opening of an oscillator door or the removal of a panel, only persons who have undergone maintenance training should operate the laser. In such a case, extreme caution must be exercised. 3 Laser products shall conform to the regulations laid down in the laser safety standard, including that stipulating control using a key. The oscillator start signal (RUN ON) shall be controlled with a key switch such that the oscillator cannot be turned on without a specific key. Control using a key ensures that other than the authorized personnel cannot operate the laser oscillator. It is extremely dangerous if a person who is unfamiliar with the equipment attempts to operate the laser oscillator. 4. The shutter shall be unlocked only while a beam is being output. Otherwise, keep the shutter locked to provide protection should the laser accidentally be turned on. The laser oscillator is equipped with a warning light as an option. The warning light blinks while discharge is in progress or whenever laser radiation is possible. While the warning light is blinking, pay careful attention to laser radiation and high voltages.
WARNINGS AND CAUTIONS ON MAINTENANCE

1 WARNING A high voltage of 3 to 4 kV0-p is applied to some places in the laser oscillator cabinet. Therefore, do not turn the power to the oscillator on or operate the oscillator when an oscillator panel is open. Operating the laser oscillator with a panel open can cause a touch on a high-voltage place, resulting in electric shock. Before daily inspection, the replacement of a maintenance part or maintenance, open the main circuit breaker and turn the power supply off (double power-off). To prevent the power from being inadvertently turned on, lock the circuit breaker open, and affix an indication of work in progress. Before turning on the power during maintenance if absolutely necessary, take measures for safety. The gas circulating system in the oscillator becomes very hot. Do not touch the gas pipes, turbo blower, heat exchanger, or exhaust pump, until they have cooled down sufficiently after the oscillator has been turned off. Otherwise, you may be burnt. The oscillator contains cooling fan units. Although the fan units are fitted with a finger guard, to prevent injury, keep your hands well away from the fans. Laser oscillator is equipped with the warning light, optionally. The warning light is blinking continuously during the system in the discharging mode. Please make sure that the blinking function is working properly for the safety purpose, and change immediately in case of any functional failure.
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WARNINGS AND CAUTIONS ON HANDLING

1 WARNING The oscillator output mirror and focusing lens on the machining head both have a substrate made of ZnSe (zinc selenide), a toxic substance. Therefore, do not touch the mirror or lens with your bare hands if it is damaged. ZnSe is not poison, but inhaling ZnSe dust may cause difficulty in breathing, completely stopping the breathing of the victim in the worst case. If you accidentally touch the mirror or lens with your bare hands, wash your hands well under running water. If you accidentally inhale ZnSe dust or debris, seek medical advice immediately. If the laser oscillator must be moved, entrust the work to the machine tool builder whenever possible. If performed by inexperienced personnel, the oscillator may topple or be dropped, resulting in a potentially fatal accident. When the machine tool builder is not available to move the oscillator, follow the procedure described on the hanging method label. While moving the oscillator, stand well clear and never pass under the oscillator. Do not allow any dangerous or high-pressure gas to get into the oscillator housing. The oscillator cabinet has a hermetic structure (dustproof and dripproof), it cannot be ventilated easily. 1) Flammable gases such as oxygen can cause a fire or explosion. 2) Toxic gases can harm operators during maintenance. 3) Organic gases can degrade machining performance. 4) High-pressure gases can damage a panel or the cabinet, resulting in injury from flying matters. If such a gas accidentally gets into the oscillator housing, remove a panel for ventilation. The installation room must be also well ventilated. To purge the oscillator housing, use purified, low-pressure air or nitrogen. Those who use a cardiac pacemaker must avoid maintenance and inspection work during the discharge of the oscillator because the electromagnetic waves generated during the discharge may affect the operation of the pacemaker. If you feel sick or out of condition, either immediately leave the spot or stop operation.
CAUTION 1 The oscillator is controlled according to the CNC internal parameter settings. If a numeric value different from a setting is entered and the oscillator is operated, the oscillator may malfunction. In the worst case, the oscillator may be damaged. 2 Use laser gas with the specified correct composition ratios. If you use laser gas with different specifications by mistake, performance degradation or an alarm will result. In the worst case, the oscillator may be damaged. 3 If storing the laser oscillator for a long time or leaving it unused for a long time, drain the inside of the oscillator. Otherwise, corrosion and clogging may result. Also drain the oscillator if it is likely to freeze in winter. If it freezes, the water piping and cooling system components will be damaged.
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SAFETY PRECAUTIONS
NOTE Do not discard a used output mirror or focusing lens together with regular waste. If the output mirror or focusing lens is replaced, return the original to the supplier or entrust it to a specialized disposal company.
WARNINGS AND CAUTIONS ON MACHINING

1 WARNING Do not look at the machining point without eye protection. Otherwise, your eyes may be exposed to reflected laser light, resulting in blindness. If your eyes are accidentally exposed to laser light, seek medical advice immediately. Before attempting to machine any material for the first time, consult with the manufacturer of the material. Some materials generate toxic gases when cut or drilled by a laser beam. Should you accidentally inhale any toxic gas, seek medical advice immediately. The workpiece becomes very hot during machining. Never touch the workpiece with your bare hands. Otherwise, you may be burnt. During machining, extremely hot chips are likely to be generated. Unless sufficient caution is exercised, there is a danger of the operator being burnt, or of a fire being started. Some materials may burn or explode when laser machined. Before attempting to machine any material for the first time, consult with the manufacturer of the material.
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NOTE 1 Do not place any flammable material (such as paper, cloth, or wood) near the workpiece table. 2 Keep a fire extinguisher beside the unit.
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WARNING LABELS AND STICKERS

The oscillator uses high voltages and laser beam radiation. Such hazards are indicated with warning labels attached to the positions. In addition, there are some stickers for the explanation. This section describes the warning labels, stickers and their positions. (1) Standards
Fig.S.1 (a) The positions of warning labels and stickers for C2000i-C (Short optical path length type)
Fig.S.1 (b) The positions of warning labels and stickers for C2000i-C (Short optical path length type: rear view)
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Fig.S.1(c) The positions of warning labels and stickers for C2000i-C (Long optical path length type)
Fig.S.1 (d) The positions of warning labels and stickers for C2000i-C (Long optical path length type: rear view)
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Fig.S.1 (e) The positions of warning labels and stickers for C4000i-C (Short optical path length type)
Fig.S.1 (f) : The positions of warning labels and stickers for C4000i-C (Short optical path length type: rear view)
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Fig.S.1 (g) The positions of warning labels and stickers for C4000i-C (Long optical path length type)
Fig.S.1 (h) The positions of warning labels and stickers for C4000i-C (Long optical path length type: rear view)
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Fig.S.1 (i) The positions of warning labels and stickers for C6000i-C
Fig.S.1 (i) The positions of warning labels and stickers for C6000i-C (Rear view)
(a) Warning labels Class identification label (FDA)
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Model C2000i-C C4000i-C C6000i-C Maximum output 5KW 8KW 12KW Gas composition CO2: N2: He=5:35:60% CO2: N2: He=5:35:60% CO2: N2: He=5:35:60%
Class identification label (FDA)
Model C2000i-C C4000i-C C6000i-C
Maximum output 5KW 8KW 12KW
Gas composition CO2: N2: He=5:35:60% CO2: N2: He=5:35:60% CO2: N2: He=5:35:60%
Laser mark
Aperture label
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Lifting method label
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Access label
Label inside the access panel
Discharge section label
Label for regulating the atmospheric gasses in the oscillator housing
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Ascent/Descent prohibited label
(b) Stickers Maintenance label
C2000i-C, C4000i-C
C6000i-C
Certification label
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SCCR
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C2000i-C
C4000i-C
C6000i-C
Equipment name plate
Address label
Cooling water and gas maintenance label
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SAFETY PRECAUTIONS
Inlet / outlet of water and gas
(2) CE Marking
Fig.S.1 (a) The positions of warning labels and stickers for C2000i-C (Short optical path length type)
Fig.S.1 (b) The positions of warning labels and stickers for C2000i-C (Short optical path length type: rear view)
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Fig.S.1(c) The positions of warning labels and stickers for C2000i-C (Long optical path length type)
Fig.S.1 (d) The positions of warning labels and stickers for C2000i-C (Long optical path length type: rear view)
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Fig.S.1 (e) The positions of warning labels and stickers for C4000i-C (Short optical path length type)
Fig.S.1 (f) The positions of warning labels and stickers for C4000i-C (Short optical path length type: rear view)
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Fig.S.1 (g) The positions of warning labels and stickers for C4000i-C (Long optical path length type)
Fig.S.1 (h) The positions of warning labels and stickers for C4000i-C (Long optical path length type: rear view)
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Fig.S.1 (i) The positions of warning labels and stickers for C6000i-C
Fig.S.1 (i) The positions of warning labels and stickers for C6000i-C (Rear view)
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(a) Warning labels Class identification label
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C2000i-C
C4000i-C
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C6000i-C
Laser mark
Access label
Label inside the access panel
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Lifting method label
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Aperture label
Discharge section label
Label for regulating the atmospheric gasses in the oscillator housing
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Ascent/Descent prohibited label
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PREFACE
PREFACE
Contents of the manual
This manual consists of the following chapters and appendixes: Chapter 1 : Internal Structure Chapter 1 describes the beam path, the structure, the operation and the internal connection of the laser oscillator. Chapter 2 : Installation Chapter 2 describes the installation and checking of the laser oscillator. Chapter 3 : Maintenance Chapter 3 describes daily maintenance and periodic maintenance. Chapter 4 : Troubleshooting Chapter 4 describes the actions to be applied in the event of a fault occurring in the laser oscillator. Chapter 5 : Units Chapter 5 describes how to replace and adjust internal units of the laser oscillator. Chapter 6 : Laser Software Function Chapter 6 describes the software functions for controlling the laser oscillator. Appendix A. External View of Oscillator B. Specifications C. Laser Alarm List D. Diagnosis Screen Information E. Parameter List F. Control Sequences in Laser Oscillator G. External Gas Leakage Recording Table H. Glossary
Applicable models
This manual covers the following models. The following abbreviations may be used in the text of this manual.
Model FANUC LASER C2000i-MODEL C FANUC LASER C4000i-MODEL C FANUC LASER C6000i-MODEL C Abbreviation C2000i-C C4000i-C C6000i-C
Related manuals
The following manuals are available for the FANUC LASER C2000i /C4000i /C6000i-MODEL C.
FANUC Series 30i/31i-LB DESCRIPTIONS CONNECTION MANUAL OPERATORS MANUAL MAINTENANCE MANUAL PARAMETER MANUAL OPERATORS MANUAL MAINTENANCE MANUAL (this manual) B-64492EN B-64493EN B-64494EN B-64495EN B-64500EN B-70474EN B-70475EN
FANUC LASER C2000i /C4000i /C6000i -MODEL C
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TABLE OF CONTENTS
TABLE OF CONTENTS
SAFETY PRECAUTIONS............................................................................s-1
DEFINITION OF WARNING, CAUTION, AND NOTE ............................................. s-1 WARNINGS AND CAUTIONS ON EXPOSURE ..................................................... s-2 WARNINGS AND CAUTIONS ON MAINTENANCE ............................................... s-3 WARNINGS AND CAUTIONS ON HANDLING....................................................... s-4 WARNINGS AND CAUTIONS ON MACHINING..................................................... s-5 WARNING LABELS AND STICKERS ..................................................................... s-6
PREFACE ....................................................................................................p-1 1 INTERNAL STRUCTURE........................................................................ 1

1.1 1.2 1.3 1.4 OUTLINE ....................................................................................................... 1 INTERNAL STRUCTURE .............................................................................. 2 OPTICAL PATHS IN THE OSCILLATOR ...................................................... 8 INTERNAL CONNECTION .......................................................................... 10
1.4.1 1.4.2 1.4.3 Electrical Connections............................................................................................10 Cooling Water Piping.............................................................................................16 Vacuum Gas Connection........................................................................................19
INSTALLATION .................................................................................... 20
2.1 2.2 INSTALLATION PROCEDURE ................................................................... 20 OSCILLATOR CONNECTIONS................................................................... 28
2.2.1 Laser Gas................................................................................................................28
2.2.1.1 2.2.1.2 2.2.1.3 2.2.1.4 Laser gas specification....................................................................................... 28 Gas pipe ............................................................................................................. 28 Leakage in external piping................................................................................. 29 Replacing the laser gas cylinder ........................................................................ 29 Specification of the cooling water ..................................................................... 30 Pure water supply unit ....................................................................................... 30 Anticorrosive ..................................................................................................... 30 Cleaning agent ................................................................................................... 30 Antifreezing ....................................................................................................... 31
2.2.2
Cooling Water ........................................................................................................29

2.2.2.1 2.2.2.2 2.2.2.3 2.2.2.4 2.2.2.5
2.2.3
Electrical Connections............................................................................................31 Power Supply Checking .........................................................................................40

2.3.1.1 2.3.1.2 2.3.1.3 2.3.1.4 2.3.1.5 2.3.1.6 Checking the power supply ............................................................................... 40 Phase rotation .................................................................................................... 40 Setting the frequency of the power supply of the hour meter............................ 41 Measurement of voltage of DC power supply unit............................................ 41 Checking of jumper pins on the interface PCB ................................................. 42 Checking the interface PCB signals................................................................... 43
2.3
DETAILS OF CHECKING ............................................................................ 40

2.3.1
2.3.2 2.3.3 2.3.4 2.3.5 2.3.6 2.3.7 2.3.8 2.3.9
External Laser Gas Piping Leakage Check (Clamp Test) ......................................43 Checking Cooling Water ........................................................................................44 Check for Leakage within the Oscillator................................................................44 Locating Internal Leakage......................................................................................44 Discharge Aging.....................................................................................................45 Beam Mode Check .................................................................................................46 Oscillation Characteristics......................................................................................47 Discharge Margin Check........................................................................................48
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2.3.10
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Power Supply Margin Check (Pulse Check) ..........................................................48 Packing for Transportation .....................................................................................49 Removing Cooling Water.......................................................................................50
2.4
PREPARATION PRIOR TO SHIPMENT ..................................................... 49

2.4.1 2.4.2
MAINTENANCE .................................................................................... 52
3.1 3.2 3.3 DAILY INSPECTION ................................................................................... 52 PERIODIC MAINTENANCE ........................................................................ 53 DETAILS OF MAINTENANCE..................................................................... 54
3.3.1 Turbo Blower Oil ...................................................................................................54
3.3.1.1 3.3.1.2 3.3.1.3 Check method .................................................................................................... 54 Replacement method.......................................................................................... 55 Storage and expiration date of turbo blower oil ................................................ 56 Check method .................................................................................................... 56 Replacement method.......................................................................................... 57 Replacement method.......................................................................................... 57 Cleaning and Replacing the Optical Parts ......................................................... 58 Cleaning and Replacing the Output Coupler and Rear Mirror .......................... 59 Cleaning and Replacing the Folding Mirrors .................................................... 61 Cleaning and Replacing the Beam Folding Unit ............................................... 64
3.3.2 3.3.3 3.3.4
Exhaust Pump Oil...................................................................................................56

3.3.2.1 3.3.2.2 3.3.3.1 3.3.4.1 3.3.4.2 3.3.4.3 3.3.4.4
Exhaust Pump Filter ...............................................................................................57 Laser Optical Parts .................................................................................................58
3.4
MAINTENANCE PARTS.............................................................................. 64 TROUBLESHOOTING PROCEDURE......................................................... 71 RESPONDING TO ALARM MESSAGES ON THE SCREEN ...................... 71 MAJOR FAULTS ....................................................................................... 110
4.3.1 4.3.2 4.3.3 4.3.4 4.3.5 Laser Output Just after Switch On Is Low ...........................................................110 Circuit Breaker for Cooling Fan, Solenoid Valve, and 24V Power Supply Trips110 Motor starter of Exhaust Pump Trips Thermally..................................................110 Main Breaker Trips ..............................................................................................110 Excessive Laser Gas Consumption ......................................................................111
TROUBLESHOOTING .......................................................................... 70
4.1 4.2 4.3
UNITS .................................................................................................. 112

5.1 UNIT CONFIGURATION ........................................................................... 113
5.1.1 5.1.2 5.1.3 5.1.4 C2000i-C INPUT UNIT .......................................................................................113 C4000i-C INPUT UNIT .......................................................................................115 C6000i-C INPUT UNIT .......................................................................................117 Replacement Method............................................................................................119
5.1.4.1 5.1.4.2 5.1.4.3 Breaker............................................................................................................. 119 Motor starter .................................................................................................... 120 Magnetic contactor .......................................................................................... 120
5.2
LASER POWER SUPPLY UNIT ................................................................ 121

5.2.1 Replacement Method............................................................................................121
5.2.1.1 5.2.1.2 5.2.1.3 Replacing the power supply unit ..................................................................... 121 Replacing a high-speed diode.......................................................................... 122 Replacing an RF FET PCB.............................................................................. 123 Preparation....................................................................................................... 124 Perform laser power supply automatic adjustment .......................................... 125 Check ............................................................................................................... 125 c-2
5.2.2
Adjustment Method ..............................................................................................123

5.2.2.1 5.2.2.2 5.2.2.3
5.3
MATCHING BOX ....................................................................................... 126
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5.3.1 Replacement Method............................................................................................126 Placement Numbers..............................................................................................127 Replacement Method............................................................................................127 Replacement Method............................................................................................128 Replacement Method............................................................................................129 Leakage Check and Discharge Aging ..................................................................131 Operation of the Digital Operator.........................................................................131 Replacement Method............................................................................................134
5.7.2.1 5.7.2.2 Inverter............................................................................................................. 134 Cooling Fan in the Inverter.............................................................................. 135
5.4 5.5 5.6 5.7
DISCHARGE TUBE................................................................................... 126

5.4.1 5.4.2 5.5.1 5.6.1 5.6.2 5.7.1 5.7.2
TRIGGER ELECTRODE ........................................................................... 128 TURBO BLOWER...................................................................................... 129 INVERTER................................................................................................. 131
5.8 5.9
EXHAUST PUMP ...................................................................................... 138

5.8.1 5.8.2 5.9.1 5.9.2 5.9.3 Replacement Method............................................................................................138 Parts of Exhaust Pump .........................................................................................138 Configuration .......................................................................................................138 Replacement Method............................................................................................140
5.9.2.1 5.9.2.2 5.9.3.1 5.9.3.2 5.9.3.3 5.9.3.4 Charge unit ...................................................................................................... 140 Exhaust unit ..................................................................................................... 140 Setting the gas supply pressure sensor............................................................. 141 Setting the atmospheric pressure sensor .......................................................... 141 Operating the gas supply pressure sensor and atmospheric pressure sensor ... 142 Adjusting the exhaust unit (adjusting the laser gas consumption)................... 143
GAS CONTROLLER.................................................................................. 138
Adjustment Method ..............................................................................................141
5.10
THE WATER DISTRIBUTION UNIT .......................................................... 144

5.10.1 5.10.2 5.10.3 Replacement Method............................................................................................144 Replacement of the Flow Sensor Unit..................................................................147 Adjustment of the Flow Sensor Unit ....................................................................147 Replacement Method............................................................................................148
5.11.1.1 Shutter unit ...................................................................................................... 148 5.11.1.2 Shutter mirror .................................................................................................. 149 5.11.1.3 Shutter switch (thermal and photoelectric switches) ....................................... 149
5.11
SHUTTER UNIT ........................................................................................ 148

5.11.1
5.12
BEAM ABSORBER.................................................................................... 150

5.12.1 5.12.2 Replacement Method............................................................................................150
5.12.1.1 Beam absorber ................................................................................................. 150 5.12.1.2 Beam absorber mirror ...................................................................................... 150
Adjusting the Position ..........................................................................................151 Replacement Method............................................................................................151 Adjustment Method ..............................................................................................152 Replacement of Fan..............................................................................................153 Detachment and Attachment of a Fan Unit ..........................................................153 Detachment and Attachment of Fan-assisted Radiator.........................................154 Replacement Method............................................................................................154 Adjustment Method ..............................................................................................154 Replacement Method............................................................................................155
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5.13 5.14
GUIDE LASER (SEMICONDUCTOR LASER)........................................... 151

5.13.1 5.13.2 5.14.1 5.14.2 5.14.3
FAN ........................................................................................................... 152
5.15 5.16
POWER SENSOR ..................................................................................... 154

5.15.1 5.15.2 5.16.1
THE DEW SENSOR .................................................................................. 155
TABLE OF CONTENTS 5.17

5.17.1
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PCB ........................................................................................................... 155

Replacement Method............................................................................................155
5.17.1.1 5.17.1.2 5.17.1.3 5.17.1.4 Interface PCB .................................................................................................. 155 24V power supply............................................................................................ 155 Shutter PCB ..................................................................................................... 156 Safety circuit PCB ........................................................................................... 156
5.18 5.19 5.20 5.21 5.22 5.23
OIL MIST DECOMPOSING ELEMENT ..................................................... 157

5.18.1 5.19.1 5.20.1 5.21.1 5.22.1 5.23.1 5.23.2 5.23.3 Replacement Method............................................................................................157 Cleaning ...............................................................................................................159 Replacement Method............................................................................................159 Replacement Method............................................................................................160 Replacement Method............................................................................................161 Gas Fitting ............................................................................................................162
5.23.1.1 Tightening method........................................................................................... 162 5.23.1.2 Re-installing..................................................................................................... 162
GAS DUST COLLECTION UNIT ............................................................... 159 LOW TEMPERATURE SENSOR UNIT ..................................................... 159 OXYGEN SENSOR UNIT .......................................................................... 160 WARNING LIGHT UNIT ............................................................................ 161 GAS FITTING AND WATER FITTING....................................................... 162
WATER FITTING ...............................................................................................163

5.23.2.1 Tightening method........................................................................................... 163 5.23.2.2 Re-installing..................................................................................................... 163
Fittings and Tube Ordering Information ..............................................................163 Alignment Procedure during Installation after Transportation.............................168
5.24.1.1 Preparation....................................................................................................... 168 5.24.1.2 Adjustment method.......................................................................................... 169
5.24
ALIGNMENT OF THE RESONATOR ........................................................ 166

5.24.1 5.24.2 5.24.3 5.24.4
Alignment Procedure at Mirror Cleaning Time ...................................................170

Alignment Procedure for Adjusting All Mirrors ..................................................171

Obtaining a Maximum Power ..............................................................................172

5.24.4.1 Preparation....................................................................................................... 172 5.24.4.2 Procedure ......................................................................................................... 173
5.25 5.26 5.27
POWER CALIBRATION METHOD............................................................ 175

5.25.1 Setting a Power Input Compensation Coefficient ................................................175
ALIGNMENT OF THE BEAM FOLDING UNIT (C2000i-C, C4000i-C SHORT OPTICAL PATH LENGTH TYPE).............. 175 HEAT EXCHANGER ................................................................................. 176
5.27.1 Replacement .........................................................................................................176
5.27.1.1 C2000i-C ......................................................................................................... 177 5.27.1.2 C4000i-C and C6000i-C .................................................................................. 179
LASER SOFTWARE FUNCTION........................................................ 183

6.1 MAINTENANCE SCREEN......................................................................... 183
6.1.1 6.1.2 6.1.3 Overview ..............................................................................................................183 Method of Operation ............................................................................................184 Display Information .............................................................................................184
6.1.3.1 6.1.3.2 6.1.3.3 Compensation coefficient history display........................................................ 184 Parts run time display ...................................................................................... 185 Discharge-related alarm history display .......................................................... 185 c-4
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6.1.3.4 6.1.3.5 6.1.3.6 6.1.3.7 6.1.3.8 6.1.3.9 6.1.3.10 Laser alarm history screens.............................................................................. 187 Pulse power feedback screens ......................................................................... 188 Power sensor time constant measurement screen ............................................ 188 Leak check screen............................................................................................ 189 Laser tuning screen .......................................................................................... 190 Command of running beam internally with shutter closed .............................. 192 Input and output of saved maintenance data.................................................... 192
6.2
POWER FEEDBACK FUNCTION BASED ON THE ACTUAL OUTPUT ESTIMATION METHOD ............................................................................ 193
6.2.1 6.2.2 6.2.3 6.2.4 Overview ..............................................................................................................193 Data Table ............................................................................................................193
6.2.2.1 6.2.2.2 6.2.3.1 Method of registration ..................................................................................... 193 Data table structure .......................................................................................... 194 Time constant measurement method................................................................ 195
Compensation for Power Sensor Response Speed ...............................................195 Bell-shaped Filter for Power Feedback Gain .......................................................196 Overview ..............................................................................................................197 Function................................................................................................................197 Setting...................................................................................................................198 Release of alarm ...................................................................................................199 Overview ..............................................................................................................199 Setting...................................................................................................................199 Operation of Laser Power Supply Automatic Adjustment ...................................200
6.3
OIL EXCHANGE TIME LIMIT ALARM MONITOR FOR TURBO BLOWER197

6.3.1 6.3.2 6.3.3 6.3.4
6.4
LASER POWER SUPPLY AUTOMATIC ADJUSTMENT FUNCTION ....... 199

6.4.1 6.4.2 6.4.3
6.5
TURBO BLOWER OIL ABNORMALLY TEMPERATURE DETECT FUNCTION ................................................................................................ 201

6.5.1 6.5.2 6.5.3 6.5.4 Overview ..............................................................................................................201 Setting...................................................................................................................201 Operation ..............................................................................................................201 Alarm....................................................................................................................201
6.6
SUPPORT FUNCTION FOR START-UP AFTER TURBO OIL EXCHANGE............................................................................................... 202

6.6.1 Setting...................................................................................................................202
APPENDIX A B C D EXTERNAL VIEW OF LASER OSCILLATOR .................................... 205 SPECIFICATIONS............................................................................... 208 LASER ALARM LIST .......................................................................... 209 DIAGNOSIS SCREEN INFORMATION .............................................. 212
D.1 D.2 INFORMATION DISPLAYED ON THE DIAGNOSIS SCREEN ................. 212 LASER OSCILLATOR STATUS DISPLAY ................................................ 215 PARAMETERS FOR ENABLING/DISABLING VARIOUS FUNCTIONS.... 223 PARAMETERS FOR DISCHARGE TUBE SELECTION............................ 226 PARAMETERS FOR LASER MAINTENANCE TIMING INDICATION FUNCTIONS.............................................................................................. 227 PARAMETERS FOR THE OSCILLATOR.................................................. 228
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PARAMETER LIST ............................................................................. 223

E.1 E.2 E.3 E.4
TABLE OF CONTENTS E.5 E.6 E.7 E.8 E.9 E.10 E.11 E.12
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PARAMETERS FOR DISCHARGE ........................................................... 230 PARAMETERS FOR GAS CONTROL ...................................................... 231 PARAMETERS FOR HIGHLY REFLECTIVE MATERIAL ALARMS.......... 233 PARAMETERS FOR LASER POWER / VOLTAGE DROP ....................... 233 PARAMETERS FOR POWER TABLE SETTING ...................................... 234 PARAMETERS FOR AUTOMATIC AGING FUNCTION ........................... 235 PARAMETERS FOR POWER FEEDBACK BASED ON THE ACTUAL OUTPUT ESTIMATION METHOD............................................................. 237 PARAMETERS FOR PROCESSING MODE CHANGE FUNCTION ......... 239
E.12.1 E.12.2 E.12.3 Setting for Fine Mode...........................................................................................239 Setting for Alarm Monitor (Alarm No.4125) .......................................................242 Setting for Automatic Aging Function (Fine Mode) ............................................243
E.13 E.14 E.15 E.16 E.17 E.18 E.19 E.20 E.21 E.22 E.23 E.24 E.25 E.26 E.27 E.28
PARAMETERS FOR THE GAS PRESSURE CHANGE WARM UP FUNCTION ................................................................................................ 244 PARAMETERS FOR PREHEAT FUNCTION ............................................ 245 PARAMETERS FOR POWER COMMAND ............................................... 246 PARAMETERS FOR GAS PRESSURE ANALOG MONITOR................... 248 PARAMETERS FOR TURBO BLOWER ................................................... 249 PARAMETERS FOR LASER PSU INDIVIDUAL DRIVING........................ 250 PARAMETERS FOR WATER FLOW RATE MONITOR............................ 250 PARAMETERS FOR POSITIVE PRESSURE LEAK CHECK FUNCTIONS.............................................................................................. 252 PARAMETERS FOR LASER POWER SUPPLY AUTOMATIC ADJUSTMENT........................................................................................... 252 PARAMETERS FOR GAS PRESSURE INCREASE ................................. 255 PARAMETERS FOR PREPARATION 1C ................................................. 255 PARAMETERS FOR TURBO BLOWER START....................................... 256 PARAMETERS FOR AUTOMATIC AGING 2 ............................................ 256 PARAMETERS FOR CALIBRATION AND PEPARATION ........................ 257 PARAMETERS FOR TURBO BLOWER RUN........................................... 258 PARAMETERS FOR POWER SAVING .................................................... 258 OUTLINE OF LASER OSCILLATION SEQUENCES ................................ 261 INTRA-TUBE GAS PRESSURE CONTROL SEQUENCES ...................... 263
F.2.1 F.2.2 F.2.3 RUN ON...............................................................................................................263 HV ON .................................................................................................................264 RUN OFF .............................................................................................................264
CONTROL SEQUENCES IN LASER OSCILLATOR.......................... 261

F.1 F.2
F.3 F.4
WARM UP IN START UP SEQUENCE ..................................................... 264 POWER SAVING....................................................................................... 264

F.4.1 Quick Power Saving State ....................................................................................264
F.4.1.1 F.4.1.2 F.4.1.3 Start quick power saving state ......................................................................... 264 Quick power saving state................................................................................. 264 Stop quick power saving state ......................................................................... 265 Start ECO power saving state .......................................................................... 265 ECO Power Saving State ................................................................................. 265 Stop ECO power saving state .......................................................................... 265 ECO power saving state intra-tube gas pressure ............................................. 266 c-6
F.4.2
ECO Power Saving State......................................................................................265

F.4.2.1 F.4.2.2 F.4.2.3 F.4.2.4
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G H
EXTERNAL GAS LEAKAGE RECORDING TABLE .......................... 267 GLOSSARY......................................................................................... 269
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1.INTERNAL STRUCTURE
1
1.1 1.2 1.3 1.4
INTERNAL STRUCTURE
OUTLINE .............................................................................................................................................1 INTERNAL STRUCTURE...................................................................................................................2 OPTICAL PATHS IN THE OSCILLATOR.........................................................................................8 INTERNAL CONNECTIONS............................................................................................................10
Chapter 1, INTERNAL STRUCTURE consists of the following contents:
1.1
OUTLINE
Part of Discharge power supply
Laser power supply Laser power supply
Fig. 1.1 shows an outline of the structure of the oscillator.

200 VAC
Housing
Input unit
24V PSU
Signal (to CNC)
Interface PCB
Part of Interface
Folding mirror
Matching box
Matching box
Part of Laser resonator

Discharge tube Discharge tube Discharge tube
Low Dew temperasensor ture sensor
Output mirror
Guide laser
Beam folding unit
Folding mirror
Shutter unit
Rear mirror
Power sensor
Discharge tube
Part of Pressure control

Exhaust control Hour meter
Exhaust pump
Inlet H/E
Outlet H/E
Gas dust collection unit
Beam absorber
To parts
From parts
Flow sensor
Pressure control
Turbo blower
Turbo PCB
Water distributor
Inverter
Part of Gas circulating

Exhaust gas Laser gas
Watercooled part
Fig.1.1 Outline of structure
(1) Part of Laser resonator The resonator consists of an output coupler, a rear mirror, folding mirrors, discharge tubes, a power sensor unit etc., has the function to transform the electrical energy to the optical energy which is single mode laser beam as 10.6m. Several discharge tubes are connected in series using folding mirrors, with an output coupler and a rear mirror placed at the open ends of the discharge tubes, thus sealing the tubes. The resonator is fitted with a gas pipe connecting port through which laser gas is fed into the discharge tubes. A discharge from the electrodes of the discharge tubes energizes CO2 molecules, which emit light. This light is amplified by the stimulated emission that takes place while the light travels back and forth between the output coupler and the rear mirror. The resonator is capable of converting electrical energy to optical energy (10.6-m single-wavelength laser beam).
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(2) Part of discharge power supply This consists of laser power supply and matching box. This has the function that generates the high frequency discharge in the discharge tubes, and supplies the energy to laser gas. (3) Part of gas circulating A gas circulating system is configured by connecting the resonator and the fan (turbo blower) with a circulating pipe. Laser gas runs through the discharge tubes at a high speed. Two kinds of the heat exchange are placed between the resonator and the fan (turbo blower). The one cool the laser gas heated by discharge, another cools the laser gas heated by the fan (turbo blower). (4) Part of pressure control This controls the gas pressure of the part of gas circulating from start-up to the end of laser oscillator. During the normal working, a part of laser gas is replaced to the fresh laser gas to interrupt the degradation of laser gas. (5) Part of Interface This is the input unit connecting the interface PCB and outside power supply to connect CNC. The laser oscillator is controlled by CNC through the interface PCB. The outside electrical power is supplied to some units in the oscillator through the input unit. (6) Water-cooled part This part supplies the cooling water to every unit in laser oscillator. (7) Housing The laser oscillator is covered with the metal panel, and protects the humans from exposure to a laser beam exceeding an accessible emission level or strong collateral radiation. All panels are screw-fixed and cannot be removed without an appropriate tool.
1.2
INTERNAL STRUCTURE
This section describes the internal structure of the oscillator more specifically. Fig.1.2 (a) to (f) are internal structural drawing.
(30)Short optical path length type (3) (29) (31) (4) Long optical path length type(30) (5) (7) (2) (6) Short optical path length type(28) (21)
(23) (17) (24) (25)
(20)
(34) (11)
(8)
(9)
(10) (12)
(16) (15)
(22)
Fig.1.2 (a) Internal structural drawing for C2000i-C (front view)
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(27) (18) (1)
(26)
(32)
(3)
(19)
(33)
(14)
(13)
Fig.1.2 (b) Internal structural drawing for C2000i-C (rear view)
(3)
(31)
(4)
(5)
(3)
(28)
(30)
(21) (23) (24)
(25)
(20) (34) (11) (8)
(9)
(10) (12)
(16) (17) (15)
(22)
Fig.1.2(c) Internal structural drawing for C4000i-C (front view)
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(2) (27) (18) (6) (1) (26) (29) (7) (32) (3)
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(16)
(33)
(14)
(13)
Fig.1.2 (d) Internal structural drawing for C4000i-C (rear view)
(23) (24)
(6)
(2)
(7)
(31)
(4)
(5)
(29) (3)
(27) (18) (21) (19)
(25)
(30)
(22)
(17)
(8)
(9)
(10) (12)
(11)
(16)
(15)
Fig.1.2 (e) Internal structural drawing for C6000i-C (front view)
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(1)
(26) (7)
(32)
(3)
(20)
(33)
(14) (13)
(34)
Fig.1.2 (f) Internal structural drawing for C6000i-C (rear view)
(1) Output coupler A ZnSe (zinc selenide) substrate coated with dielectric. The output coupler is a transmission-type reflecting mirror used to output the laser beam amplified inside the resonator. (2) Rear mirror A reflecting mirror consisting of a Ge (germanium) substrate, coated with dielectric. The rear mirror is used to reflect the laser beam within the resonator while transmitting part of the laser light to the outside to obtain the monitor light for laser output measurement. (3) Folding mirror A mirror with a Si (silicon) substrate coated with dielectric to reflect the laser beam. It linearly polarizes the laser beam. (4) Discharge tube A pair of electrodes is metallized on the surface of a hollow quartz glass tube. discharge between these electrodes injects electrical energy into the laser gas. A high-frequency
(5) Trigger electrode This electrode is capable of pre-discharging outside the laser oscillation area so that the laser output becomes completely zero when the beam is off. (6) Power sensor An optical sensor which detects the intensity of the laser beam, transmitted through the rear mirror, thus enabling monitoring of the laser output level. (7) Oil mist decomposing element This element is capable of decomposing the organic matter that gets into the part of laser gas circulating, with photo catalytic effect, using the ultraviolet rays generated from the discharge tubes. (8) Laser power supply This power supply outputs high-frequency power (2 MHz) according to a specified output with commands from the CNC and supplies it to the discharge tubes via the matching box. (9) Matching box The matching box contains a matching circuit, which ensures that power is effectively input to the discharge tubes.
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(10) Turbo blower This fan circulates the laser gas in the gas circulating system at high speed. It rotates at a high speed of 60,000 revolutions per minute (min-1). (11) Inverter This inverter drives the turbo blower. It is responsible for acceleration/deceleration control and issuing alarms during start and stop of the blower. (12) Gas dust collection unit This unit is a cyclone dust collector that removes dust that gets in the gas circulating system. (13) Heat exchanger (inlet) Water-cooled heat exchanger used to cool the laser gas that has been heated by discharge, before it is drawn into the turbo blower. (14) Heat exchanger (outlet) Water-cooled heat exchanger used to cool the laser gas that has been heated by compression in the turbo blower, before being forced into the discharge tubes. (15) Gas controller This gas controller constantly monitors the gas pressure in each discharge tube and supplies fresh laser gas to the part of laser gas circulating to keep the pressure constant while exhausting degraded laser gas. It also monitors the supply status of the laser gas, purge check for the part of laser gas circulating and other items and has a function of adjusting the amount of flow of the gas to be exhausted. (16) Exhaust pump This pump is used to vacuum-exhaust laser gas from the gas circulating system such that its pressure falls to that used for laser oscillation. In addition, it exhausts part of the degraded gas in the gas circulating system. (17) Hour meter The hour meter records the total number of hours that the laser oscillator has operated (how many hours the exhaust pump has operated) to indicate whether maintenance or inspection is necessary. (18) Shutter The shutter is normally closed to keep the laser beam inside, and can be opened and closed with CNC commands. It is equipped with a position sensor and a temperature sensor and constantly monitors the open/close status and the shutter mirror temperature. (19) Beam absorber To perform laser oscillation without emitting the laser beam to the outside, the laser beam is reflected on the shutter mirror and guided into the beam absorber. The absorber, which is water-cooled, absorbs the laser beam. The absorber is equipped with a temperature sensor, which allows the system to constantly monitor the temperature of the absorber. (20) Water distribution unit This unit distributes temperature-regulated external cooling water to each unit inside the laser oscillator. The unit is equipped with a flow sensor, which allows the system to constantly monitor the flow rate of the cooling water. (21) Shutter PCB This PCB relays signals collected into the shutter section, such as those from the limit switch, absorber temperature sensor, power sensor, and dew sensor, to the interface PCB.
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(22) Input unit This unit distributes the power supplied to the oscillator to each unit in the laser oscillator. It also protects each unit from overcurrents. (23) Safety circuit PCB This PCB has the relays that intercept the source of laser beam by the action of safety circuit (Emergency stop circuit etc.). This PCB also has the relay to make the contactor and the valve for AC200V to action by the command from CNC. (24) Interface PCB (IF PCB) This PCB communicates with the CNC via the FANUC I/O LINK (serial interface). (25) 24-V power supply This unit supplies DC power (24 VDC) to the interface PCB and various units. (26) Dew sensor This sensor is mounted to the output mirror holder to monitor the output mirror for condensation. It prevents faults from occurring due to condensation. (27) Guide laser (red semiconductor laser) A diode laser is overlaid on the same optical axis as a guide beam for checking the optical axis because the CO2 laser beam is invisible to the unaided eye. The guide beam is emitted in synchronization with the mechanical shutter only when the shutter is closed. The guide laser can be used for roughly adjusting the optical path of an external optical system and for obtaining a guide for the machining point. (28) Beam folding unit (C2000i-C, C4000i-C) This unit extends the optical path length by folding back the laser beam output from the output mirror in the oscillator and outputting the beam from the outlet of the oscillator. It consists of one circular polarization mirror and one zero shift mirror or of two zero shift mirrors. It is provided in an oscillator of short optical path length type; it is not provided in an oscillator of long optical path length type. (29) Low temperature sensor This sensor measures the temperature of cooling water. When the temperature in the laser oscillator is 20 or less in start-up of the oscillator, warm-up driving is executed by software. Therefore, it prevents output power decrease. (30) Oxygen sensor A sensor for measuring the concentration of oxygen in the oscillator cabinet. This oxygen sensor is placed near the beam exit to detect an inflow of oxygen from the outside. When the concentration of oxygen has increased beyond the specified value, an alarm is issued, the oscillator is stopped, and a purge operation is performed. (31) Fan unit Fan motors release the heat that is generated by discharge from the discharge tubes. (32) Radiator fan unit (resonator) The atmospheric temperature rises due to the heat generated by discharge from the discharge tubes. This water-cooled heat exchanger is used to cool the heated air before circulated in the oscillator. (33) Radiator fan unit (power supply) The heat by the laser power supply unit is exhausted to outside of the power supply unit. This water-cooled heat exchanger is used to cool the heated air before circulated in the oscillator.
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(34) Noise filter This noise filter for turbo blower reduces normal mode noise between power wires that is generated from the inverter and common mode noise between the power supply and ground.
1.3
OPTICAL PATHS IN THE OSCILLATOR
The figures below show the laser optical paths inside the oscillator.
Safety cover Discharge tube Discharge tube Safety cover
Beam For Short optical Path length type Discharge tube Discharge tube
Beam For Short optical Path length type

Fig.1.3 (a) Optical paths in the C2000i-C
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Safety cover Discharge tube Discharge tube Safety cover
Beam Beam
For Short optical Path length type For Long optical path length type
Discharge tube
Discharge tube
Beam Beam
For Short optical Path length type For Short optical Path length type
Fig.1.3 (b) Optical paths in the C4000i-C
Discharge tube Discharge tube Discharge tube Discharge tube Safety cover
Beam
Beam
Fig.1.3(c) Optical paths in the C6000i-C
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1.4
1.4.1
INTERNAL CONNECTION
Electrical Connections
The following show electrical connection diagrams of the individual models.
Fig.1.4.1 (a) Electrical connection diagram for C2000i-C (Standard)
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Fig.1.4.1 (b) Electrical connection diagram for C2000i-C (CE Marking)
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Fig.1.4.1(c) Electrical connection diagram for C4000i-C (Standard)
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Fig.1.4.1 (d) Electrical connection diagram for C4000i-C (CE Marking)
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Fig.1.4.1 (e) Electrical connection diagram for C6000i-C (Standard)
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Fig.1.4.1 (f) Electrical connection diagram for C6000i-C (CE Marking)
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1.4.2
Cooling Water Piping
The following show cooling water flow diagrams for the individual models.
Fig.1.4.2 (a) Water flow diagram for C2000i-C
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Fig.1.4.2 (b) Water flow diagram for C4000i-C
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Fig.1.4.2(c) Water flow diagram for C6000i-C
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1.4.3
Vacuum Gas Connection
The following show vacuum system diagrams for the individual models.
Fig.1, 4.3(a) Vacuum system diagram for C2000i-C and C4000i-C
Fig.1.4.3 (b) Vacuum system diagram for C6000i-C
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2.INSTALLATION
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2
3.1 3.2 3.3 3.4
INSTALLATION
INSTALLATION PROCEDURE .......................................................................................................20 OSCILLATOR CONNECTIONS.......................................................................................................28 DETAILS OF CHECKING ................................................................................................................40 PREPARATION PRIOR TO SHIPMENT .........................................................................................49
Chapter 2, INSTALLATION consists of the following contents:
2.1
INSTALLATION PROCEDURE
Use the following procedure to make adjustments and checks during installation. As soon as the oscillator is delivered, loosen the clamps of the resonator described in (3) below.
CAUTION If the clamps of the resonator are left fastened for a long time, the resonator can deform. As a result, a problem such as a failure in beam mode adjustment or insufficient laser output can arise.
(1) Check the environment at the installation location. [Environmental conditions]
1 2 3 4 5 Ambient temperature Temperature variation Humidity Vibration Atmosphere +5 to 35C without condensation 1.1C /minute maximum 75% or below (relative humidity) Acceleration not to exceed 0.05G. Vibration amplitude not to exceed 5m. Dust must be minimized. There must be no organic volatile components. There must be no flammable gas or dangerous gas such as dense oxygen.
(2) Adjust the table horizontally where the oscillator is installed, and then put the oscillator on, and fix it by the bolts. The C6000i-C has adjustable feet for fixing with bolts. Use the following procedure to install the C6000i-C.
Fig. 2.1(a) External view of C6000i-C
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2.INSTALLATION
Fixed foot (a: Its height is fixed.)
Adjustable foot (b: Its height can be fine-adjusted.) Fig. 2.1(b) Details of feet
(a) Installing the oscillator (putting the oscillator on or putting it on again after moving it) <1> Adjust the machine table horizontally. <2> Before installing the oscillator on the machine table, tighten all adjustable feet (at the three places marked with b) on the oscillator as shown below so that their height is shorter than the height of the fixed feet (at the three places marked with a).
Oscillator frame Adjustable foot Tighten Machine table
<3> Lift the oscillator by a crane using the four eyebolts on the top of the oscillator.
Lifting
<4> Keep lifting the oscillator by a crane, set the fixed feet (at the three places marked with a) on the oscillator on the machine table until they slightly touch the machine table as shown below, and attach the fixed feet using the bolts securing them temporarily.
Oscillator frame Slightly touches the machine table. Fixed foot Machine table Bolt securing the foot (M20)
Keep lifting the oscillator
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2.INSTALLATION
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NOTE When setting each fixing foot, keep lifting the oscillator by a crane and the status in which the fixing feet slightly touch the machine table (slings are strained) without securing the oscillator on the machine table completely. If the oscillator is completely secured on the machine table only with the fixed feet, the cabinet can deform.
<5> Turn each adjustable foot on the oscillator as long as it turns with hand, and then make it touch the machine table.
Loosen the foot until it touches the table. Oscillator frame Adjustable foot Machine table Turn the foot in the arrow direction.
Keep lifting the oscillator.
<6> Set down the oscillator on the machine table completely.
Set down the oscillator completely.
<7> Fully tighten the fixed and adjustable feet on the oscillator with the bolts securing them.
Oscillator frame Fixed foot Adjustable foot Machine table Bolt securing the foot (M20) Bolt securing the foot (M20)
(b) Moving the oscillator (moving the oscillator installed on the machine table) <1> Install the machine table together with the oscillator. <2> Remove the bolts securing the fixed and adjustable feet on the oscillator. <3> Lift only the oscillator by a crane using the four eyebolts on the top of the oscillator again. (The oscillator is required to be lifted just slightly off the machine table.) <4> Tighten all adjustable feet on the oscillator as shown below so that their height is shorter than the height of the fixed feet.
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2.INSTALLATION
Oscillator frame Tighten Machine table
<5> Adjust the machine table horizontally. <6> After that, follow steps <4> to <7> in (a). (3) Remove resonator and shutter clamps. The clamp locations are shown in Figs.3.1(c) to (e). Keep the detached parts for clamp
Resonator clamp
Shutter clamp
Fig. 2.1(c) Clamp locations of C2000i-C
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2.INSTALLATION
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Shutter clamp
Resonator clamp
Resonator clamp Fig. 2.1(d) Clamp locations ofC4000i-C
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2.INSTALLATION
Resonator clamp
Resonator clamp
Fig. 2.1(e) Clamp locations of C6000i-C
Shutter clamp
Shutter unit Beam cover pipe
Mirror holder
Space <2> between beam flange and beam cover pipe
Beam flange Bolt <1>
Safety cover
Beam cover pipe
Fig. 2.1(f) Safety cover for shutter unit
Fig. 2.1(g) Details of Safety cover
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(4) Check the safety cover of shutter unit The beam flange of the safety cover is fixed with a small space <2> exists between the beam cover pipe installed in output mirror holder. Check whether the interference with the beam flange and the beam cover pipe, and loosening of beam flange installation bolt <1>. When there is interference of loosening, adjust and tighten according to procedure below. (a) Before alignment, loose bolt <1>.
NOTE Loose the bolt <1> absolutely. If not, it is possible that it contaminated with the alignment.
(b) After the alignment, adjust to keep a small space <2> between the hole of beam flange and the beam cover pipe. In addition, keep a small space <2>, and fix the beam flange with bolt <1>. (5) Check the outsides of units installed in the oscillator as follows:
Check items 1 2 3 4 5 6 7 8 9 10 11 12 Check whether any printed circuit boards are loose or removed. Check whether any cables are damaged (such as damaged sheathing). Check whether any connectors are loose or detached. Check that the discharge tubes are neither cracked nor damaged. Check that the turbo blowers and other units are neither loose nor missing. Check that the power supply units and matching boxes are neither loose nor missing. Check that the input unit is neither loose nor missing. Check that the connection to the electrode of each discharge tube is not loose. Check whether any fittings part of the water piping and gas piping is loose. Check all screw terminals in the units. Check the oil level in the turbo blowers. (See Subsection 3.3.1 for details.) Check the oil level in the exhaust pump, and check for oil contamination. (See Subsection 3.3.2 for details.)
(6) Connect the power and signal lines to the oscillator. (See Subsection 2.2.3 for details.)
Check items 1 2 3 4 Oscillator power cable Ground cable of 10 or less (Class-A ground: For Japan, Protection Class 1: For foreign country) Communication cable between the CNC and oscillator (I/O Link, FSSB) Signal cables
(7) Check the input power supply voltage, frequency and phase rotation. (See Subsection 2.3.1 for details.) Set the frequency of the power supply to the hour meter. (See Subsection 2.3.1 for details.)
CAUTION In the installing, the moving or the construction of electrical facility, it is possible that the phase rotation is incorrect. Be sure to check the phase rotation, and then start the exhaust. If the gas pressure does not fall after one minute, stop the exhaust, and then check it. Check the gas pressure on PSW2 of gas controller or DGN No.905.
(8) Connect the laser gas and cooling water pipes. (See Subsections 2.2.1, 2.2.2, and 2.3.2 for details.)
Check items 1 2 3 Check the laser gas composition and purity (check whether the specifications are satisfied). Check the laser gas piping status. Check that there is no gas leakage in the external piping between the gas cylinder and oscillator.
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2.INSTALLATION
Check items
Check the quality of the cooling water (use of tap water passed through an ion exchanger).
(9) Check the supply gas pressure. Check that the secondary pressure of the gas regulator is 0.1750.025 MPa. (10) Check the parameters and setting data. A parameter table for the laser oscillator is attached to the oscillator. Some machine builders prepare a parameter table including parameters for the laser oscillator. If data sheets are not found, contact the machine tool builder. (a) On the setting screen of the CNC, set the parameter write enable state. (b) Check the parameters, and enter the same values as specified in the parameter table. (c) On the setting screen of the CNC, set the parameter write protected state, and press the reset button.
CAUTION 1 If the oscillator is started with an incorrect parameter value specified, the oscillator may fail in the worst case. Be particularly careful when entering and checking parameter values. 2 Some parameters may require modification to, for example, suit the operating state of the oscillator or enable maintenance. When parameters are modified, it is recommended that modification history (date, parameters before modification, parameters after modification, and reason for modification) be recorded so that old parameters and invalid parameters are not used. 3 Be careful not to lose the attached data sheets, and keep them safely.
(11) Check that cooling water is supplied normally, and that there is no water leakage inside the oscillator or at any external connection points. (See Subsection 2.3.3 for details.) Check that the temperature of the cooling water is set to 25 to 30C. Normally, it is recommended that the temperature be set to 27C. (12) Turn on the power and RUN switch, and then check the operation of the fan motors in the laser oscillator after SEQ1500. Note, however, that the fan motor installed in the laser power supply does not start until the oscillator sequence starts the turbo blower operation (SEQ1700). (13) Conduct an oscillator vacuum leakage test. Check the oscillator for any internal leakage. When performing the leakage check, use the automatic leakage check function. If there is internal leakage, locate the leakage according to the leakage location method described in Subsection 2.3.5. (14) Check that the laser gas pressure is controlled normally. (a) Set all bits of parameter No. 15027 to 0 because only the pressure control operation is to be checked, without causing discharge. Check that alarm Nos. 4073 and 4078 are not issued. If one of the alarms is issued, see the solution in Section 4.2, and take appropriate action. (b) After completing the checking, reset the changed parameters to their original settings. (15) Start the laser oscillator to perform discharge aging. See Subsection 2.3.6 to start the aging function. If the oscillator is left unused for two weeks or more), perform discharge aging for at least 8 hours. (16) Check the laser beam mode.
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2.INSTALLATION
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CAUTION A beam mode deviation may occur depending on the transportation method and storage condition. When installing the oscillator, be sure to perform this step. A mode deviation does not mean a failure. Perform alignment by following the procedure described in Subsection 5.24.1.
(a) Record the value of the micrometer of OC, RM and FM. (b) Take the power max by FM. referring to subsection 5.24.4. C2000i-C:FM1, C4000i-C:FM4, C6000i-C:FM1 and FM4 (c) Check the below items referring to subsection 4.3.7 (i) No difference between the taken mode and the mode attached to the oscillator. (ii) Mode shape is the circular symmetry. (iii) No fringe pattern around the mode. (d) If it is abnormal, execute the alignment referring to subsection 5.24.1. (17) Check the oscillation characteristics and output. See Subsections 2.3.8, 2.3.9, and 2.3.10 for details of the check method. (a) Check that the correction coefficient is 1100 or less. (b) Oscillation characteristic check : Check that the discharge voltage during base discharge and when a rated output is specified is within the factory-set value plus 200 V. If the correction coefficient or discharge voltage exceeds the maximum, repeat discharge aging. (c) Discharge margin check : Check that a margin is provided. (d) Voltage margin check : Check that no alarm is issued.
2.2
OSCILLATOR CONNECTIONS
The oscillator has connections for laser gas piping, cooling water piping, and power and signal cables. For details of the electrical connections for the CNC and machine, refer to the corresponding connection manual.
2.2.1
2.2.1.1
Laser Gas Laser gas specification
Supply the laser oscillator with a mixture of gases that satisfy the conditions listed below. (1) Composition ratio and accuracy (For the composition ratio, check the label and specifications of the oscillator.) CO2 50.25 : He 603(He balance) : N2 351.75 (2) Water (H2O) : 5 ppm or less (3) Hydrocarbon (CnHm) : 1 ppm or less (4) Gas purity : 99.99% or higher
2.2.1.2
Gas pipe
Observe the following cautions for piping between the laser gas cylinder and laser oscillator. (1) It is recommended that a polyethylene tube E series (E-64-Y-0100: 3/8 inches, Yellow) having an inside diameter of 6 mm or larger (manufactured by Parker Hanniffin Corporation) be used. Do not use a nylon, rubber, or urethane tube. (2) Use swage-lock vacuum fittings. Do not use a one-touch coupler, quick coupler, or hose-band fittings.
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2.INSTALLATION
(3) Minimize the length of tubing. It should be kept within 5 m. Never exceed 15 m. For a length of 15 m or more, use stainless bright-annealed piping, but do not use a copper piping. In this case, do not extend piping over 30 m. (4) Minimize the number of fittings used. Connect pipes, if necessary, using a swage-lock vacuum fittings or by TIG welding. Piping should be installed by a vacuum piping specialist. (5) Always keep the piping materials clean. Do not allow foreign matter to get in the pipe. (6) Use a regulator that has been degreased and is free from gas leakage. (7) Please set the exhaust time of external piping (parameter No.15260) long when the piping distance is 5m or more. The standard value of the parameter is two seconds every 5m. (8) The gas used by the laser oscillator is exhausted from the GAS OUT port. Though the exhausted amount of gas is very small, do not exhaust the amount of the exhausted gas in the room with airtight, Lay pipes from the GAS OUT port and exhaust laser gas to outdoors.
2.2.1.3
Leakage in external piping
After installing the piping, see Subsection 2.3.2, and be sure to conduct a clamp test to check for gas leakage. If the rate of change in primary pressure over eight hours exceeds 10%, or if the rate of change in secondary pressure over eight hours exceeds 10% for a polyethylene tube or 6% for a stainless pipe, leakage that prevents normal oscillator operation is present. Use the helium leakage detector to locate the leakage and eliminate it.
2.2.1.4
Replacing the laser gas cylinder
(1) If the primary pressure of the regulator installed in the laser gas cylinder is 1 MPa or less, replace the laser gas cylinder with new one. (2) When laser gas runs out during oscillator operation, the oscillator stops automatically. In this case, after the oscillator stops, replace the gas cylinder. (3) When replacing the gas cylinder, close the main plug of the gas cylinder, completely loosen the adjustment valve of the regulator, then remove the regulator. If the adjustment valve of the regulator is left tightened, external air will enter the piping. When the oscillator is started after the replacement of the cylinder, the external piping exhaust operates to remove gas inside the piping, and the oscillator starts in the normal sequence. When laser gas runs out during purging, a stop occurs while the inside of the piping is in the negative pressure state. If the gas cylinder is replaced in this state, the atmosphere is sucked. Therefore, be sure to loosen the adjustment valve of the regulator before removing the regulator. Before the oscillator starts, the external piping exhaust operation takes place then the automatic aging function operates to perform aging in the oscillator to prevent possible troubles from occurring if the atmosphere should be sucked.
2.2.2
Cooling Water
CAUTION To prevent that the cooling water flows in to the oscillator by the irregular driving of the chiller in the oscillator off, install the valve on the cooling water inlet of the oscillator.
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2.INSTALLATION
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2.2.2.1
Specification of the cooling water
The quality of cooling water is specified in the table below. Use pure water or tap water passed through an ion exchanger.
pH (25C) Conductivity (25C) Chlorine ion ClSulfate ion SO42M alkalinity Total hardness CaCO3 Iron Fe Sulfur ion S2Ammonia ion NH4+ Ionic silica SiO2 6.0 to 8.0 200S/cm or less 20mg/L or less 50mg/L or less 50mg/L or less 50mg/L or less 0.3mg/L or less Not to be detected 0.2mg/L or less 30mg/L or less ppm = mg/L
Standard item
Reference item
2.2.2.2
Pure water supply unit
Install a pure water supply unit (ion-exchange region) at the water inlet of the chiller. The pure water supply unit can prevent problems with the oscillator from occurring due to corrosion or a clogged pipe. Replace the water periodically after every 1,500 hours because the quality of the circulating cooling water is lowered. Product name : Pure Water Supply Cartridge Manufacturer : ORUGANO Co. Ltd. Use : Refer to the description indicated on the product.
2.2.2.3
Anticorrosive
Add the following anticorrosive to cooling water immediately after installation to prevent problems due to corroding cooling water and to decrease the frequency of replacement of cooling water. Consult the chiller manufacturer for use of the anticorrosive.
Product name 1 2 CONTLIME K-6000 Kurilex L-111 Manufacturer Mitsubishi Gas Chemical Company, Inc. Kurita Water Industries Ltd.
Use : Add the anticorrosive above to cooling water initially so that the concentration is within 1000 to 2000 ppm. (100 to 200 cc/100 liters). Monthly check the concentration of the anticorrosive using concentration check paper dedicated to anticorrosive and adds the anticorrosive to cooling water until the concentration reaches about 1000 ppm. Concentration check paper : Purchase a concentration check set (50 sheets of check paper, a dropping pipette, etc.) together with CONTLIME K-6000 (manufactured by Mitsubishi Gas Chemical Inc).
CAUTION If the above anticorrosive is added to cooling water and the concentration is controlled, also be sure to replace the cooling water every year.
2.2.2.4
Cleaning agent
To remove foreign matters such as fur that have adhered to the inside of the cooling water circulating path, wash the cooling water circulating path using the following detergent. Consult the chiller manufacturer for use of the detergent.
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2.INSTALLATION
Product name Manufacturer Mitsubishi Gas Chemical Company, Inc. Kurita Water Industries Ltd.
1 2
DESLIME Kuridine I-302
Use: Add the detergent of 10% of the amount of cooling water, circulate the water for an hour, and then drain the water. After that, rinse the cooling water circulating path thoroughly. Do not touch a stock solution of DESLIME with your bare hands because the solution is a strong chemical. If a stock solution accidentally contacts your skin, wash the stock solution off your skin well under running water. If waste water used for washing is left standing, the main ingredient, hydrogen peroxide, is decomposed. Wait until hydrogen peroxide is decomposed, or dilute wastewater with water to reduce the concentration, and then flush the wastewater down the drain.
2.2.2.5
Antifreezing
If the chiller is used in a cold district, it should be provided with an antifreezing function. When the air temperature falls, the water supply pump should be kept running. In a very cold district, incorporate a heater into the chiller to prevent the water temperature to drop too much. A chiller with a built-in heater is recommended because the water temperature must reach 20C or greater to start the oscillator.
2.2.3
Electrical Connections
Connect the cables to the laser oscillator as described below. (1) Specifications of the circuit breakers for the factory facilities and power cables The maximum current supplied to the laser oscillator are as follows: Maximum current : C2000i-C 110A C4000i-C 190A C6000i-C 255A Seeing the table below for the specifications of the circuit breakers for the factory facilities and power cables, select the appropriate them. It is recommended to use a UL cable for North America.
Model C2000i-C C4000i-C C6000i-C Circuit breaker for factory facilities Rated current: 150 or more Rated current: 225 or more Rated current: 300 or more Minimum cable size 38mm (UL cable:AWG1) 2 100mm (UL cable:AWG4/0) 2 125mm (UL cable:350MCM)
2
Allowable cable clamp diameter 31mm to 37mm 14mm to 25mm 24mm to 32mm
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2.INSTALLATION
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(2) Power cable L1(U), L2(V), L3(W) Recommended power cables (a) If placing the cable in the duct If laying the power cable by placing it in the duct between the power board and the laser oscillator, use a single-core cable.
OSC Recommendation Hitachi Cable 600V MLFC C2000i-C Furukawa 600V LMFC LAPP Multi standard single core Hitachi Cable 600V MLFC C4000i-C Furukawa 600V LMFC Hitachi Cable 600V MLFC C6000i-C Furukawa 600V LMFC 200mm2 26.9mm 304A 150mm2 200mm2 22.2mm 26.9mm 250A 304A Cross section 50mm2 50mm2 50mm2 150mm2 Diameter Max current 14.4mm 14.4mm 14mm 22.2mm 124A 124A 120A Cross section 250A Single core 3 pieces Diameter Type Layout
(b) If not placing the cable in the duct If not placing the power cable in the duct between the power board and the laser oscillator, you can use a heavy-duty power cord cable.
OSC Recommendation Hitachi cable 600 V 2PNCT C2000i-C LAPP OLFLEX 100 50mm2 100mm2 120mm2 125mm2 185mm2 34.5mm 24mm 23.8mm 26mm 28.9mm 146A 253A 219A 291A 285A Cross section Core Sheathed Portable 3 pieces Diameter Cross section 38mm
2
Diameter 34mm
Max current 124A
Type Core Sheathed Portable piece Cross section
Layout Diameter
Hitachi cable 600 V 2PNCT C4000i-C LAPP OLFLEX FD 90
Hitachi cable 600 V 2PNCT C6000i-C LAPP OLFLEX FD 90 -
(c) Recommended cable suppliers Hitachi Cable : Hitachi Cable, Ltd. Furukawa : The Furukawa electric Co., Ltd. LAPP : U.I. Lapp GmbH (d) Crimp terminal connectors Use ring crimp terminal connectors listed in the table below or their equivalents.
Model C2000i-C C4000i-C C6000i-C Size of cable 38 mm2 In case of 100 mm2 In case of 150 mm2 Manufacture JAPAN SOLDERLESS TERMINAL MFG Co., Ltd. Spec.No. of crimp terminal connector 38-S8 CB100-S8 CB150-S12 Size of terminal screw M8 M8 M12 Tightening torque for terminal 8 to 13Nm 8 to 13Nm 40 to 50Nm
(3) Ground cable Use a cable having a cross section of at least half of the cross section of the power cable that fits the size of the cable clamp. The allowable diameter for the cable clamp for the ground cable of the C6000i-C is 14 to 25 mm.
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2.INSTALLATION
Perform grounding so that the resistance is 10 or less (Class-A ground: For Japan, Protection Class 1: For foreign country) and connect the ground cable to the ground connection section (M8) on the oscillator.
Power cable Cable clamp Cable inlet Shield earth connection For only CE Marking (M4) Earth connection (M8) View A L1 L2 L3 (U) (V) (W) Power cable connection Fig. 2.2.3(a) Connection of power cable and ground cable of C2000i-C
Power cable Cable inlet Cable clamp Shield earth connection for only CE Marking (M4) Earth connection (M8) View A
L1 L2 L3 (U) (V) (W) Power cable connection
Fig. 2.2.3(b) Connection of power cable and ground cable ofC4000i-C
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2.INSTALLATION
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Power cable Cable clamp Cable inlet Shield earth connection for only CE Marking (M4) Earth connection (M8) L1 L2 L3 (U) (V) (W) Power cable connection Fig. 2.2.3(c) Connection of power cable and ground cable of C6000i-C
View A
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2.INSTALLATION
(4) Signal cables Signal cable connection with Interface PCB of laser oscillator
Laser oscillator Interface PCB JD1B I/O LINK Connection of the JD1A to I/O unit and others
JD1A
I/O LINK
Connection of the JD1B to I/O unit and others
COP10B
FSSB
Connection of the last unit for FSSB When the FSSB is used
Laser oscillator ON/OFF signalA1,A2 OFF Interlock signalOFI1,OFI2 CNL Trip signal of main breakerPF1,PF2 Shutter Interlock signalSHL1,SHL2 Guide laser Interlock signalIB1,IB2 Emergency stop signalEMS1-1,EMS1-2,EMS2-1,EMS2-2 Shutter open state signalSO1,SO2 only CE
Fig. 2.2.3(d) Connection of Signal cable
(a) When a metallic cable is used: Use a metallic cable for connections over a distance of less than 10 m. (b) When an optical fiber cable is used: It is not possible to connect an optical fiber cable directly with Interface PCB. The following optical I/O Link adaptor units are necessary. I/O Link A04B-0800-J002 IN For connection of CNC and laser oscillator A04B-0800-J003 OUTFor connection of laser oscillator and external equipment I/O Link i A04B-0800-J004 INFor connection of CNC and laser oscillator A04B-0800-J005 OUTFor connection of laser oscillator and external equipment Use the optical fiber cable with the laser oscillator for the I/O link when corresponding to either the following. When the length of connected cable is 10m or more When it is not possible to connect it with the ground cable of 5.5mm2 between the cabinet, which is install, the I/O units or between the laser oscillator and CNC control unit. When the noise might strongly influence the cable For instance, when there is a strong electromagnetic noise source such as the welding machines by the cable or when the cable is installed long in parallel with the power line, etc.
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2.INSTALLATION
When connecting with the laser oscillator of the CE specification
B-70475EN/01
Refer to the following figures for the connection of the optical fiber cable. Connect the optical fiber cable to the optical connecter COP10B on the optical I/O Link adapter unit. Connect the optical fiber cable to the optical connecter COP10B on the optical I/O Link adapter unit.
Optical I/O Link adapter unit
A04B-0800-J002 A04B-0800-J004 A04B-0800-J002 A04B-0800-J004 A04B-0800-J003 A04B-0800-J005
A04B-0800-J003 A04B-0800-J005
Connection of the optical fiber cable for COP10B
Connection of the optical fiber cable for COP10A
Fig. 2.2.3(e) Mounting location of the Optical I/O Link adapter unit of C2000i-C

A04B-0800-J003 A04B-0800-J005
Fig. 2.2.3(f) Mounting location of the high-speed I/O unit ofC4000i-C
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2.INSTALLATION
A04B-0800-J002 A04B-0800-J004

A04B-0800-J002 A04B-0800-J004

A04B-0800-J003 A04B-0800-J005
A04B-0800-J003 A04B-0800-J005
Fig. 2.2.3(g) Mounting location of the Optical I/O Link adapter of C6000i-C
(c) Other signal cables (connection to CNL)

Laser oscillator interface PCB
CNL
A1 A2 A3 A4 A5 A6 A7 A8 A9 A10 SHL1 EMS2-1 EMS1-1 24V OFI1 PF1 SO1 24V-4 IB1 B1 B2 B3 B4 B5 B6 B7 B8 B9 B10 SHL2 EMS2-2 EMS1-2 0V OFI2 PF2 SO2 24V-2 IB2
Machine
A04B-0800-K153 Tyco electronics:178289-8(housing) Tyco electronics:1-175218-2(Contact)
Fig. 2.2.3(h) CNL Signal
IB1IB2: Guide light interlock signal output The guide laser lights by the short circuit between IB1 and IB2. DC30V and 10mA or more
Interlock switch To Guide laser To LD Laser oscillator IB1 IB2
machine
Fig. 2.2.3(i) Guide laser Interlock signal
SHL1SHL2: Shutter interlock signal input The shutter opens by the short
circuit between SHL1 and SHL2.

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2.INSTALLATION
DC24V and 1.2A or more
Interlock switch To Shutter solenoid To shutter SHL1 SHL2
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Laser oscillator
machine
Fig. 2.2.3(j) Shutter Interlock signal
EMS1-1EMS1-2, EMS2-1EMS2-2: Emergency stop signal input The emergency stop signal is a doubling signal. (Dual chain) Connect the normal close signal that synchronizes with each terminal of EMS1-1 EMS1-2 and EMS2-1EMS2-2. Contact capacity: DC24V and 1.2A Connect with each terminal of EMS1-1EMS1-2 and EMS2-1EMS2-2 dividing the two signals when consisting of the emergency stop by one signal (Single chain). It doesn't operate normally in the one signal input.
Emergency stop switch DC24V To Emergency stop circuit DC24V To Emergency stop circuit EMS1-1 EMS1-2 EMS2-1 EMS2-2
Laser oscillator
machine
Fig. 2.2.3(k) Emergency stop signal
24V0V: ON/OFF signal of laser oscillator input The laser oscillator starts when DC24V that synchronizes with CNC is input between 24V and 0V. The maximum current consumption is about 100mA in the standard specification, and are a sum total of 120mA and the load current connected with SO1 and SO2 in the CE specification.
ON/OFF Switch 24V
24V To ON/OFF circuit 0V Laser oscillator
machine
0V
Fig. 2.2.3(l) Laser oscillator ON/OFF signal
OFI1OFI2: Off interlock signal output This terminal is for the interlock of power supply OFF switch. Connect with the ON/OFF circuit of an external power supply.
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2.INSTALLATION
OFF Switch OFI1
OFI2 Laser oscillator machine
Fig. 2.2.3(m) OFF Interlock signal
PF1PF2: Trip signal input for the main breaker of the laser oscillator The main breaker trips by supplying DC24V between PF1 and PF2. This power consumption is 50W.
Switch PF1 To main Breaker PF2 24V
Laser oscillator
machine
0V
Fig. 2.2.3(n) Trip signal of main breaker
SO1SO2: Shutter open signal output (only CE specification) It is a signal that outputs the shutter open form. When the shutter doesn't shut completely, DC24V is output. (Maximum current : 100mA) It is possible to output the one serial signal or two parallel signals by the connection method of the two shutter position detection switches output. The signal is output from SO1 and SO2 in parallel by connecting 24V-2 pin with 24V-4 pin. In addition, the signal is output from the SO2 pin to the serial by connecting the SO1 pin with 24V-4 pin.
24V-2 Output 1 of Shutter position detection switch Serial connection Parallel connection SO1 24V-2 Output 2 of Shutter position detection switch 24V-4 SO2 Shutter open signal
Laser oscillator
machine
Fig. 2.2.3(o) Shutter open state signal
(7) Emergency stop signal connection Connect the emergency stop signal with the laser oscillator and the I/O unit of machine cable. Refer to the connection manual of CNC to connect the emergency stop signal with the I/O unit. It is possible to automatically stop emergency by PMC signal F221#0(LARM) when some troubles occur on laser oscillator.
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2.INSTALLATION
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The specification of contact capacity between EMS1-1EMS1-2 and EMS2-1EMS2-2 is DC24V 1.2A or more.
CNC
I/O unit DC24V *ESP LARM
I/Ounit
Laser oscillator Safety circuit PCB
InterfacePCB
24V EMS1-1 EMS2-1 Relay EMS1-2 EMS2-2 Relay
Emergency Stop Switch
Relay 0V
To Guide laser
Laser PSU To shutter Solenoid 200V supply
Fig. 2.2.3(p) Emergency stop signal connection
2.3
2.3.1
2.3.1.1
DETAILS OF CHECKING
Power Supply Checking Checking the power supply
Check whether the power supply satisfies the following specifications: 200VAC+10%,-15%, 50/60Hz1Hz, 3 or 220VAC+10%,-15%, 60Hz1Hz, 3 or 230VAC+5%,-10%, 60Hz1Hz, 3
2.3.1.2
Phase rotation
Connect input terminals L1(U), L2(V), and L3(W) to R, S, and T of the phase rotation sensor, respectively, and check that the disk of the phase rotation sensor turns clockwise.
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2.INSTALLATION
Input terminal L1 L2 L3 (U) (V) (W) G Phase rotation sensor T S R
Fig. 2.3.1(a) Phase rotation sensor
Fig. 2.3.1(b) Phase rotation sensor connection
2.3.1.3
Setting the frequency of the power supply of the hour meter
Use the frequency switch on the back of the hour meter to set the frequency of the power supply. The frequency is factory set to 50 Hz.
Frequency switch
50Hz
60Hz
Fig. 2.3.1(c) Hour meter (rear view)
2.3.1.4
Measurement of voltage of DC power supply unit
Check that the DC voltages output from the interface PCB and 24-V power supply are within their allowable ranges. (1) Interface PCB : See Fig. 2.3.1(d) Specification : A16B-3100-0070 Rated output voltage
Terminal name 1R5V 3R3V 33V2 P5V 24V 24V3 P15 N15 Rated voltage +1.5V +3.3V +3.3V +5V +24V +24V +15V -15V Voltage error allowance 5% 5% 5% 5% 5% 5% 5% 5% Application Logic circuit Logic circuit Logic circuit Logic circuit Input, output signal Input, output signal Analog circuit Analog circuit
Fuse : FU1,2 :A60L-0001-0290#LM50C for AC/DC48V 5.0A (2 pieces are used.)
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2.INSTALLATION
-15V +15V
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+24V
Fuse
+24V
+5V
+1.5V
+3.3V
+3.3V
Fig. 2.3.1(d) Out line of Interface PCB
(2) 24-V power supply unit : See Fig. 3.3.1(d). This unit supplies +24 V to the Interface PCB. Specification : A20B-1005-0124 Fuse : FU :A60L-0001-0175#3.2 3.2A (2 pieces are used.)
Fuse
Fig. 2.3.1(e) 24V power supply
2.3.1.5
SH1
Checking of jumper pins on the interface PCB

Setting EXT INT When the pulse output command is used by external signal (EXTP, EXTN) Setting usually
Jumper pin
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2.INSTALLATION
2.3.1.6
Checking the interface PCB signals
The following table provides reference information for checking signals on the interface PCB: Refer to Fig. 2.3.1(d) for the check part of the signal.
Signal name COR1-8 GPC LPW LTP1 VOM1, 2 GSP AP TOL1, 2 COI GND1, , 4, 10, , 16 Signal function Command voltage 0 to 8.75V to each laser power supply Voltage of gas pressure control command 0 to 12.7V Monitoring of laser output power 0 to 10V Monitoring of pressure inside discharge tube 0 to 5V Monitoring of water flow sensor 0 to 10V Laser gas supply pressure monitor 0 to 5V Laser gas pressure (atmospheric pressure) monitor 0 to 5V Turbo Blower oil level 0 to 24V Monitor current of inverter 0 to 10V 0V
2.3.2
External Laser Gas Piping Leakage Check (Clamp Test)
When you have installed or modified laser gas piping, conduct a clamp test that checks for any leakage by sealing laser gas inside the piping and observing the pressure change after a specified period. (1) Measurement Measure and record the gas pressure as described below. For recording measured data, use the external leakage record table presented in Appendix G. (a) Stop the oscillator. At least five minutes after purging is completed, turn the secondary pressure adjustment handle of the regulator in the pressure-reducing direction to completely close the adjustment nozzle, then close the main plug of the gas cylinder. (b) Record the primary pressure (P1S), secondary pressure (P2S), and start time (tS) of the regulator connected to the cylinder. (c) When about eight hours have passed, record the primary pressure (P1E), secondary pressure (P2E), and end time (tE) of the regulator. (d) Open the main plug of the gas cylinder(Note), and measure and record the primary pressure (P1ST) of the regulator.
NOTE When opening the main plug of the gas cylinder, you should stand at an oblique position to the regulator. Never stand just in front of the pressure gauge. If significant leakage is present, opening the main plug causes an abrupt pressure to be applied to the regulator, which can damage the regulator.
(2) Determination Calculate the change ratio from measured values by using the equation below to determine the leakage state. (a) Primary pressure change ratio
Primary pressure change ratio=
If the primary pressure change ratio is 10% or less, no leakage is assumed on the primary side. When the fluctuation of air temperature is remarkable, it is possible that the primary pressure change ratio fluctuates. (b) Secondary pressure change ratio
Secondary pressure change ratio=
(P1ST - P1E) P1ST
8 hours 100 (tE - tS) hours
If the secondary pressure change ratio is not greater than the following value, no leakage is assumed on the secondary side:
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(P2S - P2E) P2S
8 hours 100 (tE - tS) hours
2.INSTALLATION
10% when a polyethylene tube is used for piping 6% when a metallic pipe such as a stainless pipe is used for piping
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2.3.3
Checking Cooling Water
(1) Turn off the main circuit breaker of the oscillator and the power supply. (2) Check that the water piping is connected to the water inlet (IN) and outlet (OUT) of the oscillator in the correct direction. (3) Completely open the water piping of the outlet to let water flow without any obstacle. Move the chiller unit manually to let cooling water to flow at a rate of about 10 liters per minute. In this condition, check for water leakage in the following: Water inlet (IN) and outlet (OUT) of the oscillator Water piping (tubes, fittings, and so on) inside the oscillator (4) If the above checking shows that there is no water leakage, feed cooling water to the oscillator at the specified flow rate. Set the output pressure of the cooling water circulating unit to 0.5 Mpa (5 bar) or less. In this condition, check for water leakage in the following: Water inlet (IN) and outlet (OUT) of the oscillator Water piping (tubes, fittings, and so on) inside the oscillator
MODEL C2000i-C C4000i-C C6000i-C Rated flow rate 75 liters/min 160 liters/min 125 liters/min x2
(5) Stop the chiller unit, and change the operation mode from manual (local) to automatic (remote). (6) If there is no water leakage, turn on the oscillator. Check that the start command from the CNC to cooling water circulating unit causes the cooling water circulating unit to operate as specified by the command. If the flow rate is insufficient, alarm No. 4121 (CHILLER WATER FLOW 1) or No. 4122 (CHILLER WATER FLOW 2) is issued soon after the chiller unit is started. If the alarm is issued, check the pipe diameter, piping route, and the circulating unit installation position, and take measures to reduce the pressure loss. (7) Check that the cooling temperature of cooling water is set to 25 to 30C. Normally, 27C is recommended. (8) Wait for the water temperature to reach 20C or higher before starting the oscillator.
2.3.4 2.3.5
Check for Leakage within the Oscillator
(1) Use the automatic leakage check function.
Locating Internal Leakage
When gas leakage is present inside the oscillator, use a helium leakage detector or liquid leakage checker to locate the leakage.
CAUTION Because the oscillator is not designed to withstand pressure increase, do not increase pressure beyond 0.08 MPa. Applying a high pressure may damage the connector, oil gage of turbo blower, and so on. To prevent the connector from being damaged, apply pressure with the cable left attached to the turbo blower.
(1) Turn on the power to the oscillator, then open the valve of the gas cylinder. (2) Set the secondary pressure of the regulator of the laser gas cylinder to 0.05 MPa (0.5kgf / cm2).
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(3) Set parameter No. 29350 to 20. Use the positive pressure leakage check function in the automatic leakage check function to make the pressure in the oscillator higher than the atmospheric pressure. (4) Apply the helium leakage detector to a possibly faulty position. If there is a leakage, the checker indicates it by display or sound. When using the liquid leakage checker, drip the liquid on a possibly faulty position. If gas leaks, bubbles appear, so you can determine the location of a leakage. After using the liquid leakage checker, wipe off the checker, and clean the position with alcohol.
2.3.6
Discharge Aging
If the oscillator is left unused for a long time (three days or more), or if the laser gas circulating system has been opened to the atmosphere (for example, to clean the mirrors or replace gas system components), aging is required. This involves warming up the discharge tubes and circulating gas by performing internal discharge to output absorbent contaminants as gas. If the laser gas circulating system has been opened to the atmosphere, perform a leakage check before attempting aging. (1) When the laser gas circulating system has been opened to the atmosphere When the laser gas circulating system has been opened to the atmosphere, perform discharge aging by using the automatic aging function. (a) Set bit 6 (EGE) of parameter No. 15008 to 1 to enable the automatic aging function. (b) Check and set the following parameters: Parameter No.15320, 29060 Laser output at power calibration Parameter No.15321, 29061 Oscillating frequency command at power calibration Parameter No.15322, 29062 Pulse duty command at power calibration Parameter No.15323, 29063 Correction time at power calibration Parameter No.15242, 29023 Gas pressure setting at power calibration Parameter No.15326, 29066 Laser output at aging Parameter No.15327, 29067 Oscillating frequency command at aging Parameter No.15328, 29068 Pulse duty command at aging Parameter No.15329, 29069 Time per operation at aging Parameter No.15330 Gas pressure setting at aging (c) Turn on the oscillator start switch (RUN) to enter the discharge ready (LRDY) state. In this state, set the number of aging operations in parameter No. 15334, and turn on the discharge start switch (HVON). Aging is then performed as many times as specified. (d) After completing aging, the power calibration coefficient is obtained, and the oscillation ready state (LSTR) is entered, which makes the system ready for processing. (2) When the oscillator is left unused for a long time (3 days to 2 weeks) When the oscillator is started with the automatic aging function, the function determines the unused period and performs aging as many times as required. (a) Set bit 6 (EGE) of parameter No. 15008 to 1 to enable the automatic aging function. (b) Turn on the oscillator start switch. (c) The automatic aging function operates to perform aging. (d) After aging is performed as many times as required, the oscillation ready state (LSTR) is entered, and automatic aging ends. (3) When the oscillator is left unused for two weeks or more Use the manual aging function to perform discharge aging for at least 8 hours.
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2.3.7
Beam Mode Check

WARNING A beam mode deviation may occur depending on the transportation method and storage condition. When installing the oscillator, be sure to perform this step. A mode deviation does not mean a failure. Perform alignment by following the procedure described in Subsection 5.24.1.
CAUTION 1 KEEP OUT on the area where the laser beam is irradiated. Make the KEEP OUT area with the plastic chain, the stand and KEEP OUT sign. 2 There are not the flammable thing or the explosive around the area where the laser beam is irradiated. 3 Set the table for mode taken or the power probe table, just behind them, put the mask for the laser beam. Put on the iron plate or the firebrick behind the acrylic resin. Fix the blower or power probe with the magnetic stand.
Acrylic resin or Power probe Laser oscillator Laser beam X-direction Fan: Stirring the air in the space passing the laser beam Iron plate Fireblick Y-direction
Blower
Mode taken table or Power probe table
(1) Make sure the optical path length for picking mode. Set the table for mode taken which has the mask (iron plate, fire brick). (2) Remove the guide pipe or the first bend mirror located between the exit of the laser beam of the oscillator and machine. (3) Start the oscillator. (4) Set to acrylic block with red guide laser. Make sure the red guide laser does not interfere with something. (5) Output a laser beam by using programmed commands with the output set to the rated output, a duty cycle set to 100%, and the output duration set to 0.1 second. At this time, blow air with a drier or the like. (6) Make sure red guide laser and burned acrylic is on same position. If it is not so, adjust it.
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CAUTION 1 First, check the beam position. Laser light, if allowed to penetrate the acrylic material because of incorrect operation, is very dangerous. The paint of the machine is also likely to be damaged. So, attach as feel plate, then an acrylic plate, about 30cm 30cm 3mm in size. If a guide laser is used, confirm that CO2 gas laser light is directed to the same spot as the guide laser. 2 Ventilate the optical path. Acrylic gas staying around the optical path can increase the mode diameter or cause shape deformation, which prevents correct mode checking.
(7) Next, attach an acrylic block (with a thickness of 30 mm or more) to the position indicated by the white acrylic mark. Ensure that the surface of the acrylic block is perpendicular to the direction of CO2 gas laser light. The perpendicularity of the acrylic block surface can be checked by adjusting the block such that the guide laser is reflected from the acrylic block surface and returns to the beam outlet. (8) Set the conditions of the beam output program as follows: Output = Rated output Duty = 100 % Duration = See the following table. Perform internal discharge with a rated output specified. If actual output Pa differs from the specified output, mode shape comparison becomes difficult. So, modify the command so that the output difference is suppressed to within 2%. Example With the C4000i-C, setting is made to output 4080 W to 3920 W.
Model C2000i-C C4000i-C C6000i-C Duration 4 sec 2.5 sec 2.5 sec
(9) Direct the drier so that it blows air at 45 to the acrylic block, then output the beam. If air is not provided correctly, the acrylic vapor will catch fire. If fire occurs, the mode depth may become shortened. The following two types of mode patterns are collected: Cold mode: A pattern is obtained after the oscillator is left in the base discharge state for at least five minutes to let the resonator cool down. Hot mode: A pattern is obtained immediately after internal discharge with the rated output is performed for two to three minutes. (10) Record the directions (up, down, right and left), output conditions, beam path length, and drier blowing direction for the burn pattern. From the hot mode pattern, check for output coupler deformation and dirt in the internal mirrors. If there is a problem, align the resonator of the oscillator, or clean or replace mirrors by following the procedure described in Section 5.24.
2.3.8
Oscillation Characteristics
(1) Modify the parameters listed below. Parameter No.15000#4(CLB): 1 (enables power calibration) (2) Turn on the oscillator start switch to place the oscillator in the discharge state. (3) When the oscillator starts discharge, power calibration is performed, and the rated output is specified automatically.
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(4) After power calibration ends, record the compensation coefficient (parameter No. 15204). (5) Record the output, discharge voltage (RFV), current (RFI), DCV, and DCI in the base discharge state when three minutes has elapsed after power calibration. (6) Specify the rated output then record the discharge voltage (RFV), current (RFI), DCV, and DCI. Compare the values measured in (4), (5), and (6) above with the values on the data sheets. If the discharge voltage (RFV) is high, check the external laser gas piping and laser gas composition, or perform discharge aging.
2.3.9
Discharge Margin Check
(1) Modify the parameters listed below. Parameter No.15000#4(CLB): 0 (disable power calibration) Parameter No.15223, No.29022: Setting value -60 (bias command value) (2) After the setting of parameter No. 15223 and No.29022 is changed, warning message "Parameter was changed" is displayed when the LRDY state is entered. Release the message by a reset operation. (3) Remove the top panel of the oscillator so that the discharge tube and trigger electrode can be checked. (4) Turn on the oscillator start switch to place the oscillator in the discharge state. (5) Check that discharge of the trigger electrode does not disappear in 5 minutes after start of discharge. (6) After checking ends, reset the parameters set in (1) to their original settings. If discharge disappears in (5), check the external laser gas piping and laser gas composition, or perform discharge aging.
2.3.10
Power Supply Margin Check (Pulse Check)

1 (Use of assist gas is disabled at beam-on.) 1 (Internal discharge is enabled in manual mode.) 0 (Automatic aging is disabled.) 1 (Internal discharge is enabled in automatic operation mode.) 0 (Power calibration is disabled.) 0 (Output feedback is turned off.) 0 (Output feedback is turned off.) 0 (Output feedback is turned off.)
(1) Modify the parameters listed below. Parameter No.15000#2(AGA): Parameter No.15000#3(BMO): PRM.No.15008#6(EGE): Parameter No.15002#0(BMA):
(2) (3)
(4) (5)
Parameter No.15000#4(CLB): Parameter No.15208 Parameter No.15209 Parameter No.29007 Parameter No.15210, No.29049 Value in Parameter No.15207 (maximum output power) Turn on the oscillator start switch to place the oscillator in the discharge state. Set the manual mode, and perform internal discharge operation under the following conditions. Output = Value in parameter No.15207, No.29048 Duty = 5% Frequency = 5Hz Check that no alarm occurs for 10 minutes after beam-on. If an alarm is issued, check the external laser gas piping and laser gas composition, or perform discharge aging. Upon the completion of the check, restore the parameters modified in step (1) to their original values.
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2.4
PREPARATION PRIOR TO SHIPMENT
For shipment and transportation, follow the steps explained below. (1) Disconnect all CNC connecting cables. (2) Disconnect the power cable and ground cable. Cover the cable inlet holes with tape or the like.
CAUTION At first, remove the terminals of the side of panel, after that, remove the terminals of the side of the oscillator. When it keeps connecting only the terminals of the side of the panel, it is possible that you get electric shock.
(3) Remove the laser gas pipes, and attach caps to the pipes to prevent dust from entering.
Caps
Fig. 2.4 Caps of gas pipes (4) Detach the cooling water piping, and remove the water. For details of how to remove the cooling water, see subsection 2.4.2.
CAUTION Any residual cooling water may result in corrosion or clogging; furthermore, if any residual cooling water freezes, a pipe or the oscillator itself may be damaged.
(5) Install the resonator clamp and shutter clamp referring to Fig.2.1(c) to (e), and fit a lid onto the beam outlet. (6) Check the security of all connectors and printed circuit boards. Install protective covers. (7) Check that all removed mounting screws are reinstalled. (8) Install the cabinet mounting panel.
2.4.1
Packing for Transportation
Prior to shipment and transportation, the packing and checking operations described below must be performed. (1) External dimensions of laser oscillator : See the Appendix A. (2) Weight of laser oscillator:
Model C2000i-C C4000i-C C6000i-C Weight Approx. 700kg Approx. 900kg Approx. 1,300kg
(3) Maximum allowable impact : 2G Note that the maximum impact in transit depends greatly on the means of transport employed, as indicated in Table 3.4.1.
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2.INSTALLATION
Table 3.4.1 Maximum impacts according to means of transport Means of transport Airplane Ship Railroad Forwards/backwards 6G 15G 12G Left/right 2.5G 12G 5G Up/down 2.5G 12G 5G
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Truck 5G 4G 4G
Direction
(4) Notes on transportation When lifting the oscillator for transportation, pass wires through the four eyebolts, and hook up the oscillator by crane.
Example of lifting
2.4.2
Removing Cooling Water
Remove cooling water according to the procedure below. (1) Open the cooling water inlet (IN) and outlet (OUT), and leave both open. (2) Once the cooling water has stopped draining, connect a compressed air hose to the cooling water inlet (IN). Check that the cooling water outlet is open. (3) Gradually supply compressed air, allowing the pressure to build up to 0.1 to 0.2 MPa. Never apply full pressure suddenly. Continue to supply compressed air at this pressure for about 5 minutes. (4) Increase the compressed air pressure to 0.3 to 0.4 MPa, and supply air until water inside the white water piping of the oscillator is completely removed. It takes about 10 minutes to remove water. For C4000i-C or C6000i-C close the orange water removal valve of the water distributor unit, and further supply compressed air for five minutes. (5) Exchange the cooling water inlet (IN) and outlet (OUT) and supply compressed air to execute steps (3) and (4). (6) When the removal of cooling water is completed, detach the compressed air hose, and attach the lids (provided with the oscillator at shipment) to the PT plugs of the cooling water inlet (IN) and outlet (OUT).
Plugs
Fig. 2.4.2(a) Plugs of water pipes
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CAUTION In addition, the cooling water should be removed from the oscillator whenever the oscillator is to be stored over the winter, when there is a danger of the cooling water freezing. The frozen cooling water may destroy the water pipes or heat exchangers.
Drain valve
Cock (Close) Cock (Open)
Fig. 2.4.2(b) External view of the water distributor unit
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3.MAINTENANCE
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MAINTENANCE
In laser oscillator, periodic inspection items have been reduced, and adjustments have been made easy. To keep the oscillator in a satisfactory operating condition over a long period, however, it is necessary to carry out periodic maintenance (including daily maintenance) described in this chapter. The oscillator is designed to maintain the same performance and reliability as it has when it is installed, provided that maintenance is carried out as prescribed. Chapter 3, MAINTENANCE consists of the following contents: 3.1 3.2 3.3 3.4 DAILY INSPECTION ........................................................................................................................52 PERIODIC MAINTENANCE ............................................................................................................53 DETAILS OF MAINTENANCE........................................................................................................54 MAINTENANCE PARTS ..................................................................................................................64
3.1
DAILY INSPECTION
Perform inspection according to the daily inspection items indicated in the table below. When parts (including oil) have been used for a prescribed period, replace them quickly.
Table 3.1 Daily inspection items Content and instruction Check the primary pressure as measured at the regulator on the laser gas cylinder. If the primary pressure is 1MPa or lower, replace the gas cylinder. Make sure that the oil level is between L (lower limit) and H (higher limit). If the level is L or below, replenish the oil by following the procedure described in Subsection 3.3.2. Make sure that no oil is leaking from the exhaust pump main body, drain valve and their periphery. If oil is leaking, immediately replace the exhaust pump filter according to Section 3.3.3, because it is likely to have been clogged. Make sure that the oil level is between L (minimum) and H (maximum) according to Fig. 3.3.1. If the oil level is below L, supply oil referring to Subsection 3.3.1. Make sure that no oil is leaking from the turbo blower main body, oil inlet, cock, and their periphery. If oil is leaking, locate the leak. If oil leaks for any reason other than a cock being open, call FANUC. If the laser output decreases within the oscillator, warning message No. 4085 is issued. If this message appears, clean or replace the mirror in the oscillator quickly. Check the discharge pressure of the chiller. If it is high, clean the water path. Wait for the water temperature to reach 20C or greater before starting the oscillator. Check the amount of cooling water in the chiller and check for contamination. If the amount of water is small, replenish the water. If the water is contaminated, clean the water path and replace the water as appropriate.
Item 1 Residual laser gas
Period Daily
Exhaust pump oil
Weekly
Exhaust pump oil leak
Weekly
Turbo blower oil
Daily
Turbo blower oil leak
Weekly
Laser output
Weekly
Daily 7 Cooling water Weekly
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3.2
PERIODIC MAINTENANCE
The laser oscillator contains consumables that must be replaced periodically. Table 3.2(a) or (b) lists such consumables and the related periodic maintenance work. Perform periodic maintenance as well as daily inspection described in Section 3.1 by using the listed periods as guidelines. Note, however, that the replacement and maintenance intervals are not guaranteed values.
Table 3.2(a) Periodic maintenance items and periods Item 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 All internal mirrors change of C2000i-C All internal mirrors change of C4000i-C and C6000i-C Exhaust pump oil change Exhaust pump filter change Exhaust pump overhaul Turbo blower oil change Turbo blower overhaul Gas controller gas filter change Discharge tube O-ring change Gas pipe O-ring replacement Discharge tube cleaning Discharge tube change Cooling water change Cleaning of interior of cooling water system Oil mist decomposing element change Fan motor change Trigger electrode O-ring Trigger electrode resin bolt Period of maintenance (operation hour) Every 3,000 to 4,000 hours Every 6,000 to 8,000 hours 2,000 hours or 1 year whichever comes first 4,000 hours or 2 years whichever comes first Every 10,000 hours 4,000 hours or 2 years at latest, whichever comes first 24,000 hours at latest Every 24,000 hours Every 6,000 hours Every 6,000 hours Every 10,000 hours Every 30,000 hours Every 1,500 hours Every 3,000 hours Every 10,000 hours Every 30,000 hours Every 6,000 hours Every 6,000 hours Remarks Change when the quality has degraded Change when the quality has degraded Change when the exhaust power has degraded Change when the exhaust power has degraded Change when the exhaust power has degraded Change when oil properties have changed Conduct when the power has degraded, dust is generated, or abnormal sound is generated Change when a pressure failure occurs Change when internal leakage occurs Change when internal leakage occurs Conduct if quartz powder adheres to mirror Change when the quality has degraded Change when cooling water properties have changed Change when water pipe has clogged Change when the power has degraded Subject to the operating environment. Change when the quality has degraded Change when the quality has degraded
NOTE 1 Turbo blower is the precision machine, featuring super high speed of 60,000 min-1. When the quality of the turbo blower oil is getting bad with long time running, it is possible that the turbo blower breaks down. So please absolutely change the oil with provided hours or less. 2 There is the laser maintenance screen to manage the periodic maintenance. So please use this function.
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3.MAINTENANCE
Model Cleaning of all internal mirrors C2000i-C C4000i-C
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C6000i-C Every 2,000 to 2,600 hours
Every 3,000 to 4,000 hours
NOTE 1 If the mirror is not change, the mirror cleaning periods are 3,000 to 4,000 hours at least. 2 The mirror cleaning periods are not guaranteed values. They are standard values in the field.
3.3
3.3.1
DETAILS OF MAINTENANCE
When opening the panels and doors during maintenance, keep the power turned off. Before replacing oil, be sure to check that purging is completed.
Turbo Blower Oil
NOTE 1 Use turbo oil kit (A04B-0800-K329#1) for turbo blower (A04B-0800-C019, C025). 2 It is possible to use turbo oil kit (A04B-0800-K329#1) for all of turbo blowers made by FANUC.
3.3.1.1
Check method
(1) Check of oil level Check the amount of oil in the turbo blower while referring to the figure below. The oil level should be between graduations H and L. This check should be made when the oscillator is at a rest. When the turbo blower is running, it is impossible to check the amount of oil correctly.
Oil gauge
Oil inlet
Oil drain valve
Fig.3.3.1(a) Turbo blower oil check points
Fig.3.3.1(b)
Oil gauge
(2) Discoloration of the new lubricant oil The new lubricant oil might discover as shown in following figure depending on the operational condition of the laser oscillator. As discoloration is usable, change it on recommended interval. If turbo blower has any damage, there are particles on the white plate of oil level window. In this case, it is necessary to change the turbo blower. If it is difficult to judge by the above method, drain out oil from the turbo blower, and confirm the drained oil. If this oil contains particles, the turbo blower might have broken down.
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Adhension of particles
Before use
Discoloration Example 1
Discoloration Example 2 Usable
Discoloration Example 3
Example of Troble Unusable
3.3.1.2
Replacement method
(1) Before replacing the oil, be sure to stop the oscillator according to the correct procedure and turn off the power. Remove the hexagonal-head screw from the oil inlet of the turbo blower with a 17 mm wrench. Be careful not to lose the O-ring on the hexagonal-head screw or contaminate it.
CAUTION If the oscillator is not stopped with the correct procedure, the pressure in the vacuum system in the oscillator becomes negative. Opening the oil inlet under such a condition lets air get in the turbo blower. This flow of gas causes oil mist to get into the vacuum system of the oscillator, resulting in contamination of internal mirrors.
(2) Get a container for oil drain on hand, and put the tip of the drain tube into the container. Turn the oil drain cock through 90 degrees, and the oil will start draining. (3) After draining all oil, return the oil drain cock and shut it. (4) Remove the inner lid from the oil bottle. Attach a new pouring tube to the nozzle then insert the nozzle into the oil inlet and pour oil. At this time, use care to prevent foreign matter from getting into the turbo blower. Pour oil while checking the oil level from the oil level window until the oil level reaches the three-quarter position from L between L and H. Either superfluous or insufficient oil can be a cause of trouble. (5) Wipe the area around the oil inlet, hexagonal-head screw on the oil inlet, and O-ring with a clean cloth or paper, and then check that there is no dust. Dust getting into oil may cause a turbo blower fault. Check that the O-ring is fit to the hexagonal-head screw on the oil inlet, and then tighten the screw (recommended torque: 800Ncm)
CAUTION If the O-ring at the inlet is damaged, gas leakage will result.
(6) If oil has spilled over, wipe it up. (7) After replacing the oil for the turbo blower, be sure to conduct Support function for start-up after turbo oil exchange .
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CAUTION If you do not conduct Support function for start-up after turbo oil exchange after replacing the oil for the turbo blower, correct discharge is not possible, which can become a cause of trouble.
3.3.1.3
Storage and expiration date of turbo blower oil
Use the turbo blower within expiration date, which is showed on sticker. Use a clean supply tube when you pour the oil and be careful not to put dust in turbo blower. Keep away from direct sunlight and keep in a cool, dry and well-ventilated place. Keep as much as possible in a clean environment.
Fig.3.3.1(c) Expiration date
Fig.3.3.1 (d) Explanation of using turbo blower oil
3.3.2
3.3.2.1
Exhaust Pump Oil

A98L-0040-0093#1.0L1
Spec. of Exhaust pump oil:
Check method
Watch the oil gauge, and check that the oil level is between graduations Low and High. Also, check whether the oil is dark. If the oil level is below L, add oil to the turbo blower or replace the oil in it. If the oil level is above H, drain until the oil level becomes below H.
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Oil inlet
H
Drain cock Drain tube Oil gauge
Fig.3.3.2 (a) Front view of exhaust pump
Fig.3.3.2 (b) Enlarged view of oil gage
3.3.2.2
Replacement method
(1) Stop the laser oscillator with the correct procedure, and turn the power off. (2) Remove the oil inlet plug. There is an O-ring on it. Be careful not to damage it. A missing or damaged O-ring can lower the exhaust capacity of the pump. (3) Insert the drain tube into a drain oil vessel, and then open the drain cock. After the oil has been drained up, close the cock. (4) Pour new oil into the oil inlet, while checking the oil gauge. (5) Attach the oil inlet plug.
3.3.3
3.3.3.1
Exhaust Pump Filter

A90L-0001-0911
Spec. of Exhaust pump filter:
Replacement method
When the operation time reaches every 4,000 hours or 2 years whichever comes first, or the exhaust capacity is lowered, replace the filter. A clogged filter may cause a whitish smoke of oil mist to come out of the pump or lower the exhaust capacity.
Stopper Exhaust filter cartridge
Spring with washer Cartridge cover
O-ring Nut Oil level gauge
Fig. 3.3.3 Exchange of exhaust pump filter
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3.MAINTENANCE
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(1) Stop the laser oscillator with the correct procedure, and turn the power off. The pump is hot immediately after it has stopped. Start the work after the pump has cooled down. (2) Remove the black nut from the exhaust pump unit, then remove the filter cover and O-ring. (3) Remove the spring and washer. (4) Pull out the exhaust filter element. (5) Check the mounting orientation of a new exhaust filter element, then insert the filter. A filter element mounted improperly may cause oil mist (whitish smoke) to come out of the gas outlet. Therefore, check again that the filter is mounted properly.
3.3.4
Laser Optical Parts
Table 3.3.4 lists the optical parts and their features.

Table 3.3.4 Optical parts and their features Substrate Color Marking Specification material (front/rear) A04B-0813-D200 A04B-0815-D202 A04B-0818-D207 A04B-0813-D201 A04B-0818-D201 A04B-0817-D202 A04B-0818-D202 0 shit mirror A98L-0001-0616#C Si ZnSe Amber (Transparent) Silver/silver 202 202 /0-45
Name 1 2 3 4 5 6 7 8 Output coupler
Application C2000i-C C4000i-C C6000i-C C2000i-C C4000i-C C6000i-C C2000i-C C4000i-C C6000i-C C2000i-C C4000i-C (Short optical path length type) C2000i-C C4000i-C (Short optical path length type)
Rear mirror
Ge
Folding mirror
Si
Gold/gray
Circular polarizer mirror
A98L-0001-0617#C
Si
/4
3.3.4.1
Cleaning and Replacing the Optical Parts
The output coupler, rear mirror, and folding mirrors of the laser oscillator must be cleaned or replaced periodically. Similarly, if the laser output or beam mode becomes abnormal, the optical parts must be cleaned or replaced. When the optical parts are cleaned or replaced, the vacuum system is open to the atmosphere. So, ensure that dust does not enter the vacuum system. Use the specified mirror cleaning liquid (A98L-0001-0856#1). Clean the mirrors according to the following procedure:
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Clean the output coupler (See Subsection 3.3.4.2)
Clean the rear mirror (See Subsection 3.3.4.2)
Leakage check (See Subsection 2.3.4) Discharge aging (See Subsection 2.3.6) Alignment (See Subsection 5.24.2)
Clean two or three folding mirrors (See Subsection 3.3.4.3)
C2000i-C
Clean two folding mirrors (See Subsection 3.3.4.3)
C6000i-C
Clean two folding mirrors (See Subsection 3.3.4.3)
C4000i-C
3.3.4.2
Cleaning and Replacing the Output Coupler and Rear Mirror
(a) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser oscillator. (b) Before starting cleaning, wipe away any foreign matter from around the mirror holder. Then, remove the mirror cover or the power sensor. (c) When the pressure of the vacuum system of the oscillator is lower than the atmospheric pressure, the output coupler or the rear mirror may be sucked, making it difficult to remove the output coupler or the rear mirror. Check that the oscillator is in the purge state, and loosen the blind joint on the top of the turbo blower to allow the internal pressure of the vacuum system to equalize with the atmospheric pressure. (d) Loosen the mirror holding screw, then remove the mirror holder from the mirror stage.
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for C2000i-C, C4000i-C for C6000i-C
Fig.3.3.4 (a) Exploded view of the output coupler or the rear mirror
(e) Remove the output coupler or the rear mirror from the mirror holder, then place the output coupler on lens cleaning paper. Check the removed O-rings. Replace an O-ring that is damaged or has lost elasticity. Proceed to step (l) to replace the mirror. (f) Gently blow clean air by using a camera blower across the mirror surface to remove dust and dirt. (g) Drip ethyl alcohol or lens cleaner onto the mirror surface, and gently wipe dirty areas by using a cotton swab moistened with the fluid. (h) Place lens cleaning paper on the mirror, then spray ethyl alcohol or lens cleaner over the paper and mirror. Then, move the lens cleaning paper horizontally to and from across the mirror. (i) Remove any fiber dust by blowing clean air with a camera blower. (j) Repeat Steps (g) through (i) until all dirt on the mirror surface is removed. Finally, clean the mirror surface with ethyl alcohol. (k) Clean the back surface of the mirror similarly. (l) Wipe the mirror holder and O-rings with ethyl alcohol. (m) An arrow mark is provided on the side of the output coupler or the rear mirror, and a line is drawn above the mark with a felt-tipped marker. If the line has disappeared, look for a mark-off line. Place the output coupler or the rear mirror on the holder. At this time, ensure that the reflecting plane (the plane indicated by the arrow on the side of the mirror) of the output coupler or the rear mirror does not face the holder but faces the opposite direction, and that the arrow on the side of the output coupler or the rear mirror is aligned with the round mark of the mirror holder. Insert the O-rings evenly so that the mirror does not float.
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Output coupler or rear mirror O-ring
Mark Mirror holder
Arrow mark
Fig.3.3.4 (b) Method of installing the mirror holder
(n) Install the mirror holder by reversing steps (b) through (d). The mark on the mirror holder is provided on the bottom for C2000i-C or C6000i-C, and is provided on the side for C4000i-C. Tighten the mirror holding screw then loosen it. Next, turn it by fingers. After feeling a resistance, retighten the screw by 30 degree. When the mirror holding screw is tough, spread the vacuum grease on O-ring as in Fig.3.3.4(a). (o) Close the main circuit breaker or turn on the power supply of the laser oscillator, then turn on the power to the CNC. Perform evacuation. When the gas pressure (DGN No.905) reaches 100 or less, retightens the mirror holding screw. (p) Perform a leakage check. (q) Install the beam cover or the power sensor. This completes cleaning and replacement work. (r) When the rear mirror is replaced, set a power input compensation coefficient (parameter No.15215) again according to Section 5.25.
3.3.4.3
Cleaning and Replacing the Folding Mirrors
(1) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser oscillator. (2) Before starting cleaning, wipe away any foreign matter from around the mirror holder. (3) Loosen the mirror holder mounting screw, and remove the mirror holder. Vacuum grease is applied to the rear of the folding mirror. Therefore, the mirror does not come off easily from its holder. Clean the folding mirror without removing it from its holder. To replace the mirror, proceed to step (9).
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Fig.3.3.4(c) Exploded view of the holding mirror
(4) Gently blow clean air by using a camera blower across the mirror surface to remove dust and dirt. (5) Drip ethyl alcohol or lens cleaner onto the mirror surface, and gently wipe dirty areas by using a cotton swab moistened with the fluid. (6) Place lens cleaning paper on the mirror, then spray ethyl alcohol or lens cleaner over the paper and mirror. Then, move the lens cleaning paper horizontally to and from across the mirror. (7) Remove any fiber dust by blowing clean air with a camera blower. (8) Repeat Steps (5) through (7) until all dirt on the mirror surface is removed. Finally, clean the mirror surface with ethyl alcohol. Proceed to step (12). (9) When replacing the mirror, first remove the mirror from its holder. Vacuum grease is applied to the rear of the mirror. So, insert the tip of a standard screwdriver into the hole on the side of the mirror holder to push up the mirror for removal. At this time, do not apply an excessive force to the mirror holder and the spring section of the mirror holder. If the mirror cannot be removed, blow warm air onto the holder to warm it by using a drier. (10) Apply a thin coat of vacuum grease (A98L-0004-0628) to the rear of a new mirror. Take care not to apply 5mm periphery of rear of a new mirror. When it is cold, vacuum grease becomes stiff. In such a case, please warm up vacuum grease by drier.
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Fig.3.3.4(d) suitable quantity of vacuum grease Fig.3.3.4(e) Method of applying vacuum grease
Fig.3.3.4(f) Before applying vacuum grease
Fig.3.3.4(g) After applying vacuum grease
(11) Place the mirror in its holder, and blow warm air onto the holder to warm it by using a drier. This will soften the vacuum grease and bond the mirror onto the holder. Check for excessive vacuum grease, if any, around the mirror. If the mirror is dirty, clean the mirror according to steps (4) through (8).
Fig.3.3.4 (h) Method of rotating mirror
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(12) By using a cotton swab moistened with ethyl alcohol, clean the part of the mounting section that touches the mirror. Flakes of coating may remain in this area. Those flakes can cause the mirror to be misaligned. (13) Install the mirror holder by reversing steps (2) through (3). At this time, insert the holder perpendicular to the alignment unit so that the mirror touches the mirror holder evenly. When tightening the fixing screws, tighten each screw evenly. (14) Turn on the main circuit breaker and the power supply of the laser oscillator, then turn on the power to the CNC. Next, make a leakage check.
3.3.4.4
Cleaning and Replacing the Beam Folding Unit
(1) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser oscillator. (2) Before starting cleaning, wipe away any foreign matter from around the mirror holder. (3) Loosen the mirror holder mounting screw, and remove the mirror holder. Do not detach the cable connected to the holder, but loosen the clamp of the cable. Vacuum grease is applied to the rear of the mirror. Therefore, the mirror does not come off easily from its holder. Clean the mirror without removing it from its holder. To replace the mirror, proceed to step (9). (4) Gently blow clean air by using a camera blower across the mirror surface to remove dust and dirt. (5) Drip ethyl alcohol or lens cleaner onto the mirror surface, and gently wipe dirty areas by using a cotton swab moistened with the fluid. (6) Place lens cleaning paper on the mirror, then spray ethyl alcohol or lens cleaner over the paper and mirror. Then, move the lens cleaning paper horizontally to and from across the mirror. (7) Remove any fiber dust by blowing clean air with a camera blower. (8) Repeat Steps (5) through (7) until all dirt on the mirror surface is removed. Finally, clean the mirror surface with ethyl alcohol. Proceed to step (12). (9) When replacing the mirror, remove the mirror by sliding it from the mirror holder. (10) Apply a thin coat of vacuum grease to the rear of a new mirror. (11) Slide the mirror into the mirror holder so that it bonds onto the holder. This will soften the vacuum grease and bond the mirror onto the holder. Check for excessive vacuum grease, if any, around the mirror. If the mirror is dirty, clean the mirror according to steps (4) through (8). (12) By using a cotton swab moistened with ethyl alcohol, clean the part of the mounting section that touches the mirror. Flakes of coating may remain in this area. Those flakes can cause the mirror to be misaligned. (13) Install the mirror holder by reversing steps (2) through (3). At this time, ensure that the mirror touches the mirror holder evenly. When tightening the fixing screws, tighten each screw evenly. (14) Ensure that, in the coil section of the water tube connected to the holder, another tube is not caught. Adjust the clamping of the cable. This completes cleaning and replacement work. (15) Adjust the optical axis according to Section 5.26 so that a beam is output at the center of the oscillator beam outlet.
3.4
MAINTENANCE PARTS
The following lists the maintenance parts with maintenance units and part specification information.
Maintenance parts [Non-repairable parts] Name Specification C2000i-C
Standard CE Marking
Qty C4000i-C
Standard CE Marking
C6000i-C
Standard CE Marking
1 2 3
Output coupler
A04B-0813-D200 A04B-0815-D202 A04B-0818-D207
1 0 0
1 0 0
0 1 0
0 1 0
0 0 1
0 0 1
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C2000i-C
Standard CE Marking
Name
Specification
Qty C4000i-C
Standard CE Marking
C6000i-C
Standard CE Marking
4 5 6 7 8 9 10 11 12 13 14 15 16 17
Rear mirror
A04B-0813-D201 A04B-0818-D201
1 0 3 0 (2) 0 2 0 2 2 2 3 0 2 DT1 DT4 2 DT2 DT3 0 8 0 (8) 0 4 4 8 2 0 0 2 1 1 2 1 1 1 1 1
1 0 3 0 (2) 0 2 0 2 2 2 3 0 2 DT1 DT4 2 DT2 DT3 0 8 0 (8) 0 4 4 8 2 0 0 2 1 1 2 1 1 1 1 1
0 1 6 0 (1) (1) 2 0 2 2 2 6 0 0
0 1 6 0 (1) (1) 2 0 2 2 2 6 0 0
0 1 0 4 0 0 0 2 2 2 2 0 4 0
0 1 0 4 0 0 0 2 2 2 2 0 4 0
Folding mirror Zero shift mirror (l/0) Retarder (l/4) O-ring for output mirror and rear mirror O-ring for folding mirror
A04B-0817-D202 A04B-0818-D202 A98L-0001-0616#C A98L-0001-0617#C A98L-0001-0619#2030 A98L-0001-0619#2031 JB-OR4D-P34 JB-OR4D-P38 JB-OR4D-P41 JB-OR4D-G55 JB-OR4D-G65 A290-4533-T001
Discharge tube 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 O-ring for discharge tube Trigger electorode O ring for Trigger electorode Bolt for Trigger electorode Oil mist decomposing element O ring for oil mist decomposing element Exhaust pump Exhaust pump filter Exhaust pump oil Nut for Exhaust pump Cartridge cover for Exhaust pump O ring for Exhaust pump Spring with washer for Exhaust pump Stopper for Exhaust pump A290-4540-T001 A290-4562-T002 A98L-0003-0004#P26S A98L-0003-0004 #P30.6S A98L-0004-0737#P26 A98L-0004-0737#P30.6 A98L-0005-0187 JB-OR4D-P10 A98L-0004-0801#4-15 A290-4523-V170 A290-4540-V170 A290-4562-V170 JB-OR4D-G45 A90L-0001-0425 A98L-0001-0911 A98L-0040-0093#1.0L1 A90L-0001-0425 #71244351 A90L-0001-0425 #71231470 A90L-0001-0425 #71237142 A90L-0001-0425 #71233500 A90L-0001-0425 #71066848
8 0 16 0 (16) 0 8 8 16 0 2 0 2 1 1 2 1 1 1 1 1
8 0 16 0 (16) 0 8 8 16 0 2 0 2 1 1 2 1 1 1 1 1
0 12 0 24 0 (24) 12 12 24 0 0 2 2 1 1 2 1 1 1 1 1
0 12 0 24 0 (24) 12 12 24 0 0 2 2 1 1 2 1 1 1 1 1
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3.MAINTENANCE
C2000i-C
Standard CE Marking
B-70475EN/01
Name
Specification
Qty C4000i-C
Standard CE Marking
C6000i-C
Standard CE Marking
39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64
Oil level gauge for Exhaust pump Turbo blower oil O-ring for TB oil inlet Dew sensor unit Temperature switch for absorber Shutter thermal switch Shutter sensor unit Flow sensor unit Low temperature sensor unit Oxygen sensor unit Micro switch for beam path unit Beam folding switch unit for beam path unit Diode laser unit Fan for shutter Fan Hour meter
A90L-0001-0425 #71231020 A04B-0800-K329#1 JB-OR4D-P10A A04B-0800-D005 A57L-0001-0095#B080 A57L-0001-0095#B090 A57L-0001-0057#090 A04B-0813-D020 A04B-0818-D033 A04B-0815-D421 A04B-0800-D004 A04B-0800-C342 A55L-0001-0225 #01CBS A04B-0800-D011 A04B-0800-D400 A90L-0001-0455 A90L-0001-0335#B A90L-0001-0396 A90L-0001-0396#T A91L-0001-0219 A60L-0001-0508 #B150BEJ1 A60L-0001-0508 #B225BEJ1 A60L-0001-0494 #B300AAA1 A60L-0001-0512 #D150EJ3 A60L-0001-0512 #D225EJ3 A60L-0001-0495 #B300AA1 A60L-0001-0464#A050 A60L-0001-0464#A040 A60L-0001-0464#B010 A60L-0001-0425#K060 A60L-0001-0464#B015 A60L-0001-0314#GBA
1 1 1 1 1 1 1 1 0 1 1 1 (2) (1) 1 1 0 16 0 1 1 QF1 0 0 0 0 0 2 QF2,3 1 QF4 1 QF5 0 0 0
1 1 1 1 1 1 1 1 0 1 1 1 (2) (1) 1 1 0 16 0 1 0 0 0 1 QF1 0 0 2 QF2,3 1 QF4 1 QF5 0 0 1 QF8
1 1 1 1 1 1 1 1 0 1 1 1 (2) (1) 1 0 1 37 0 1 0 1 QF1 0 0 0 0 4 QF2-5 1 QF6 0 0 1 QF7 0
1 1 1 1 1 1 1 1 0 1 1 1 (2) (1) 1 0 1 37 0 1 0 0 0 0 1 QF1 0 4 QF2-5 1 QF6 0 0 1 QF7 1 QF10
1 2 2 1 1 1 1 0 1 2 1 1 0 0 1 0 1 0 38 1 0 0 1 QF1 0 0 0 6 QF2-7 0 0 1 QF8 1 QF9 0
1 2 2 1 1 1 1 0 1 2 1 1 0 0 1 0 1 0 38 1 0 0 0 0 0 1 QF1 6 QF2-7 0 0 1 QF8 1 QF9 0
Breaker 65 66 67 68 69 70
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3.MAINTENANCE
C2000i-C
Standard CE Marking
Name
Specification
Qty C4000i-C
Standard CE Marking
C6000i-C
Standard CE Marking
71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104
Breaker
A60L-0001-0314#GCA A60L-0001-0389#FT
0 0 0 1 QF6 3 KM1-3 2 KM4-5 2 1 1 Z110 1 1 12 6 4 1 1 1 0 1 0 2 2 1 0 0 (1) (1) (1) 2 2 2 2 16 4
0 1 QF7 0 1 QF6 3 KM1-3 2 KM4-5 2 1 1 Z110 1 1 12 6 4 1 1 1 0 1 0 2 2 1 0 0 (1) (1) (1) 2 2 2 2 16 4
0 0 0 1 QF8 5 KM1-5 2 KM6-7 4 1 1 Z110 1 1 18 4 4 1 1 0 1 0 1 4 4 0 1 0 (1) (1) (1) 4 4 4 4 32 8
0 1 QF9 0 1 QF8 5 KM1-5 2 KM6-7 4 1 1 Z110 1 1 18 4 4 1 1 0 1 0 1 4 4 0 1 0 (1) (1) (1) 4 4 4 4 32 8
0 0 0 1 QF10 7 KM1-7 2 KM8-9 6 1 1 Z110 1 1 4 6 4 1 1 0 2 0 2 10 2 0 0 1 (1) (1) (1) 6 6 6 6 48 12
1 QF12 0 1 QF11 1 QF10 7 KM1-7 2 KM8-9 6 1 1 Z110 1 1 4 6 4 1 1 0 2 0 2 10 2 0 0 1 (1) (1) (1) 6 6 6 6 48 12
Motor starter
A60L-0001-0389#HT A60L-0001-0493#6P3
A58L-0001-0539 #BSN38B Magnetic contactor A58L-0001-0540 #BSN10BB A58L-0001-0539 Assistance #BAX202 contactor A60L-0001-0493#W1A Absorber unit Noise filter Gas filter Brass ferrule 1/4 inches Brass ferrule 3/8 inches Brass ferrule 1/2 inches Shutter mirror Shutter mirror for guide laser Heat exchanger (out) Heat exchanger (in) Heat exchanger for cabinet Beam absorber Warning light (Standard) Warning light (with pole) Warning light (with long pole) RF FET PCB1 RF FET PCB2 Step-up Trans. PCB Three-phases diode module High-speed diode module Fan for laser PSU A04B-0800-D009 A70L-0001-0103 A97L-0203-0208#A A98L-0004-0348#2-B A98L-0004-0348#3-B A98L-0004-0348#4-B A290-4516-X204 A98L-0001-0708 A97L-0201-0556#B A97L-0201-0691#B A97L-0201-0828 A97L-0201-0439#B A97L-0200-0849 A97L-0201-0588 A97L-0200-0872#E A97L-0201-0972 A97L-0203-0206#A A49L-0001-0086 A49L-0001-0086#L A49L-0001-0086#2L A20B-1007-0140 A20B-1007-0150 A20B-1008-0150 A50L-2001-0342 A50L-2001-0439 A90L-0001-0396
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3.MAINTENANCE
C2000i-C
Standard CE Marking
B-70475EN/01
Name
Specification
Qty C4000i-C
Standard CE Marking
C6000i-C
Standard CE Marking
105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122
Fan for matching box Mirror cleaning liquid Inverter
A90L-0001-0396#T A98L-0001-0857#1
2 1 1 0 1 0 4 4 0 0 1 0 1 0 1 4 1 0
2 1 1 0 1 0 4 4 1 0 1 0 1 0 1 4 1 0
4 1 1 0 1 0 8 8 0 0 1 0 1 0 1 4 0 1
4 1 1 0 1 0 8 8 1 0 1 0 1 0 1 4 0 1
6 1 0 1 0 2 9 9 0 0 0 1 0 1 1 8 0 0
6 1 0 1 0 2 9 9 0 1 0 1 0 1 1 8 0 0
A90L-0001-0574#8LF A90L-0001-0574#16LFF Fan for inverter A90L-0001-0574 #8LF-FAN A90L-0001-0574 #16LFF-FAN Water coupler for Laser PSU (Plug) A97L-0201-0927 #2P-N10 Water coupler for A97L-0201-0927 Laser PSU (Socket) #2S-N10 A04B-0815-D030 Proximity switch A04B-0818-D034 Charge unit A04B-0815-D406 (Gas controller) A04B-0818-D404 Exhaust unit A04B-0815-D405 (Gas controller) A04B-0818-D405 Pressure sensor A91L-0001-0256#200 Damping Rubber A98L-0004-0772 for Turbo blower #382ZN-60 A97L-0200-0872 #MIRROR Mirror for Beam absorber A97L-0201-0972 #MIRROR
Maintenance parts [Repairable parts] Name Specification C2000i-C

Standard CE Marking
Qty C4000i-C
Standard CE Marking
C6000i-C
Standard CE Marking
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15
Laser PSU
A14B-0082-B211 A14B-0082-B212 A14B-0082-B328 A14B-0082-B326 A14B-0082-B331 A14B-0082-B332
2 0 2 0 0 0 1 1 1 1 1 1 0 1 0
2 0 2 0 0 0 1 1 1 1 1 1 0 1 0
4 0 0 4 0 0 1 1 1 1 1 1 0 1 0
0 4 0 4 0 0 1 1 1 1 1 1 0 1 0
Matching box
Interface PCB Safety circuit PCB Shutter PCB Gas control PCB 24V PSU Power sensor Shutter unit
A16B-3100-0070 A16B-1300-0300 A16B-1700-0520 A16B-1700-0490 A20B-1005-0124 A04B-0807-D001 A04B-0809-D001 A04B-0813-C413 A04B-0818-C414
6 0 0 0 4 No.1,3 4,6 2 No.2,5 1 1 1 1 2 0 1 0 1
0 6 0 0 4 No.1,3 4,6 2 No.2,5 1 1 1 1 2 0 1 0 1
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C2000i-C
Standard CE Marking
Name
Specification
Qty C4000i-C
Standard CE Marking
C6000i-C
Standard CE Marking
16 17 18 19 20 21 22 23 24 25 26 27 28
Turbo blower Control valve Sensor base (Gas controller) Water distributor unit Water distributor unit A (OUT) Water distributor unit A (IN) Water distributor unit B (OUT) Water distributor unit B (IN) Beam folding unit
A04B-0800-C019 A04B-0800-C025 A04B-0815-D402 A290-4540-V051 A290-4562-V042 A04B-0813-C421 A04B-0815-C421 A04B-0818-C422 A290-4562-V800 A04B-0818-C423 A290-4562-V801 A04B-0813-C450 A04B-0815-C450
1 0 1 1 0 1 0 0 0 0 0 1 0
1 0 1 1 0 1 0 0 0 0 0 1 0
0 1 1 1 0 0 1 0 0 0 0 0 1
0 1 1 1 0 0 1 0 0 0 0 0 1
0 2 1 0 1 0 0 1 1 1 1 0 0
0 2 1 0 1 0 0 1 1 1 1 0 0
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4.TROUBLESHOOTING
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TROUBLESHOOTING
Chapter 4, TROUBLESHOOTING consists of the following contents: 4.1 TROUBLESHOOTING PROCEDURE .............................................................................................71 4.2 RESPONDING TO ALARM MESSAGES ON THE SCREEN ALM No.4061...................................................................................................................................72 ALM No.4063...................................................................................................................................72 ALM No.4065...................................................................................................................................75 ALM No.4066...................................................................................................................................76 ALM No.4068...................................................................................................................................77 ALM No.4069...................................................................................................................................78 ALM No.4070...................................................................................................................................79 ALM No.4071...................................................................................................................................79 ALM No.4073...................................................................................................................................80 ALM No.4074...................................................................................................................................80 ALM No.4075...................................................................................................................................81 ALM No.4076...................................................................................................................................82 ALM No.4077...................................................................................................................................83 ALM No.4078...................................................................................................................................84 ALM No.4079...................................................................................................................................85 ALM No.4080...................................................................................................................................85 ALM No.4081...................................................................................................................................87 ALM No.4082...................................................................................................................................88 ALM No.4085...................................................................................................................................88 ALM No.4087...................................................................................................................................89 ALM No.4088...................................................................................................................................89 ALM No.4089...................................................................................................................................90 ALM No.4090...................................................................................................................................91 ALM No.4094...................................................................................................................................91 ALM No.4095...................................................................................................................................91 ALM No.4099...................................................................................................................................92 ALM No.4100...................................................................................................................................93 ALM No.4101...................................................................................................................................96 ALM No.4105...................................................................................................................................96 ALM No.4106...................................................................................................................................97 ALM No.4107...................................................................................................................................98 ALM No.4108...................................................................................................................................98 ALM No.4115...................................................................................................................................98 ALM No.4116...................................................................................................................................99 ALM No.4118...................................................................................................................................99 ALM No.4119...................................................................................................................................99 ALM No.4120...................................................................................................................................99 ALM No.4121...................................................................................................................................99 ALM No.4122...................................................................................................................................99 ALM No.4125.................................................................................................................................103 ALM No.4127.................................................................................................................................104 ALM No.4128.................................................................................................................................104 ALM No.4129.................................................................................................................................104 ALM No.4132.................................................................................................................................105 ALM No.4135.................................................................................................................................105 ALM No.4400.................................................................................................................................105 ALM No.4401.................................................................................................................................105
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ALM No.4402.................................................................................................................................105 ALM No.4403.................................................................................................................................105 ALM No.4404.................................................................................................................................105 4.3 MAJOR FAULTS .............................................................................................................................110
4.1
TROUBLESHOOTING PROCEDURE
The troubleshooting procedure to be applied depends on the failure occurrence status as indicated below. Perform checking according to the items listed below. (1) Action in response to alarm screen display (See Section 4.2.) In (3) Investigation and measure, the item number with slant is for the service person or the educated person at FANUC school. User except them can execute only no slant item. If problems are solved, call our service. (2) Major faults (d) The laser output level is low immediately after the power is turned on. (See Section 4.3.1.) (f) A cooling fan circuit breaker trips. (See Section 4.3.2.) (g) The magnetic contactor for an exhaust pump causes thermal trip. (See Section 4.3.3.) (h) The main circuit breaker trips. (See Section 4.3.4.) (i) Excessive laser gas consumption. (See Section 4.3.5.) CHECKING ON FAULTS After identifying the following items, call the service center. (1) General information on a fault (a) Date and time of occurrence (b) State of operation (c) Timing of a fault (alarm) (d) Alarm number (e) How often the fault occurs (2) Other information (a) Oscillator and CNC unit names Check the attached datasheet. (b) Oscillator serial number Check the attached datasheet. (c) Machine tool builder name, machine type (c) Software series and edition indicated on the LCD screen when power is turned on Example: G4C1-01 Series Edition (e) Parameter settings; Check the current parameter settings with the corresponding values indicated on the unit, and report your finding to the service center.
4.2
RESPONDING TO ALARM MESSAGES ON THE SCREEN
Alarm numbers, as well as DGN. No. and parameter No. are those of the FS30i/31i-LB. See the conceptual diagram of alarm processing and a list of alarms in an appendix of this manual.
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4.TROUBLESHOOTING
Alarm No. 4061 Alarm message A/D CONVERTER1 Sequence of alarm detecting SEQ1000 and after
B-70475EN/01
Sequence after alarm detecting SEQ1000
(1) Content and condition of alarm This alarm is issued when the A/D converter on the Interface PCB does not return the conversion completion signal in the specified time after the start of conversion. This A/D converter is designed to read gas pressure, power data and voltage and current of laser PSU. (2) Investigation and measure
No. 1 2 3 4 5 6 Cause of trouble Short circuit of DC24V line on machine side Breaker trip Short circuit of DC24V between CNC and laser oscillator Fuse blowing Failure of I/O PCB Anomaly of Interface PCB Solution On machine side, check if there is failure of PCB which generate DC24Vk or there is short circuit on cable for DC24V Check if the breaker for DC24V trips on machine side. Check if DC24V between CNC and oscillator short-circuits. Replace the fuse. Replace I/O PCB. Replace the Interface PCB.
(3) Parameters and data DGN. No.981 Data when A/D1 conversion becomes abnormal.
Alarm No. 4063 Alarm message LASER GAS OR PSU Sequence of alarm detecting SEQ2000 and after Sequence after alarm detecting SEQ2000
(1) Content This message appears when the laser power supply unit becomes abnormal or performs protective operation. (2) Condition of alarm When alarms (DCI1, DCI2, etc.) showed below table occur on each laser power supply, DGN.No.974 change to 1, and then this alarm occurs. However, laser power supply, which is not, chose by parameter No.15027 is not checked.
Alarm Name DCI1 DCI2 DCI3 Content DC over momentary current DC over peak current (DC over power alarm) DC over average current When there is anomaly in discharge tube or matching box, this alarm is issued. This alarm is issued by overcurrent and overvoltage of power supply to control in laser power supply. Condition Upper limit 120A In discharge at CW or Pulse, when there is much DC current, this alarm is issued. 78.8A 55A Cause 1) Short circuit of the load 2) Electric break down on discharge tube 1) Short circuit of load for power supply 2) Abnormal discharge Anomaly of control circuit
RFF
RFF alarm
VC
Ref. Voltage abnormal
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4.TROUBLESHOOTING
Content 1) Condition This alarm is issued when cooling water does not flow in heatsink of laser power supply. This alarm is issued that fan motor in laser power supply or matching box stop, and temperature rises. Upper limit Cause 1) Failure of chiller 2) Water jam 3) Failure of fan motor
Alarm Name
OH
Over heat alarm
2)
60
RFV
RF over voltage alarm
RFI
RF over current alarm
1) Load infinity 2) Broken In discharging at CW or Pulse, if discharge discharge tube 5.8 to 6kV voltage is higher, this alarm is issued. 3) No connection of feeder Anomaly of In discharging at CW or Pulse, if discharge 3.78A feedback circuit current is higher, this alarm is issued.
(3) Investigation and measure (a) Check below items with power off (All breaker for power supply off)
No. 1 Check item Checking the discharge-rated alarm history display Checking parameters Cause of trouble, Solution Check the alarm code for every power supply on discharge-rated alarm history display. Refer to Subsection 6.1.3.3. Check that parameters (discharge, oscillator control, gas pressure control, laser power supply and power table) are same as parameter sheet attached to the oscillator. Un-specified laser gas is below: 1) The composition in gas cylinder is different. 2) The actual composition ratio is different from the one described on laser gas cylinder. If these laser gas is used, below phenomenon occurs, so replace to specified laser gas. a) Much N2 RF voltage of all power supply becomes high. Actual power becomes high in high power command, and low in low power command than standard. (DCI alarm) b) Much He RF voltage of all power supply becomes low, and discharge area enlarges. Actual power becomes low in high power command, and high in low power command than standard. RF voltage of all power supply becomes high, and actual laser power becomes low. (DCI alarm). RF voltage falls down by repetition of purge, and power is recovered. This phenomenon is remarkable after stopping for a long time. Check the external gas piping and leak rate, and treat it according to subsection 2.3.2 Check that the cooling water temperature is within the range from 25 to 30C. In case of OH alarm, supply water flow is shortage, so remove the water jam in water tube. In case of DCI alarm, cooling water temperature of the chiller is lower, and this alarm sometimes occurs in start-up. When the actual water temperature is different from the temperature setting of chiller, it is possible that chiller is failure. Call the chiller maker to fix. Check if there is gas leak by automatic leak check function.
Use of un-specified laser gas
Checking external gas leak
Checking the cooling water
Checking the internal gas leak
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No. 7 Check item Gas leak in the oscillator Cause of trouble, Solution
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RF voltage of all power supply becomes high, and laser power becomes low. (DCI alarm) If the purge is repeated, this state is not changed. Find the gas leak point, and treat it. 1) Check if any joints in the gas circulating system are loose. If a loose joint is found, tighten the joint firmly. 2) Check if any components of the gas circulating system are cracked. If a cracked component is found, replace that component. 3) Check that the discharge tubes are free from any hole or crack and that the O-rings are not degraded. If a cracked or damaged component is found, replace it. 4) Check if trigger electrode or O-rings of circulating system are degraded. If it is degraded, replace it. 5) Check if the mirrors are damaged. If it is damaged, replace it. 6) Check if gas tube and gas ferrule is damaged. If it is damaged, replace it. Check if there is water leak from heat exchanger or nozzle for discharge tube. If they have faulty, replace it. 1) Check if high speed diode has faulty according to subsection 5.2.1.2. If it has faulty, replace it. 2) Check if RF FET PCB has faulty according to subsection 5.2.1.3. If it has faulty, replace it. 3) Measure the resistance between phases of the terminal block for AC200V. Check if they are short-circuited. If it is so, replace laser power supply. In this case, it is possible that magnetic contactor for laser power supply is deposited, and check it. 4) If there is other faulty in laser power supply, replace it. 1) Check if fan in matching box stops. If it stops, replace it. 2) Check if coil in matching box becomes black. If it becomes black, replace matching box. 3) Check if capacitor in matching box is cracked. If it is cracked, replace matching box. 1) Check for looseness or positional deviation in the fixtures for mounting the discharge tubes, and if any problem is found, take appropriate action. Check whether the inside and outside of each discharge tube is dirty, and clean it. 2) Check if the inside and outside of each discharge tube is dirty, and clean it 3) Check each discharge tube for a crack, and replace it. 4) Check the O-ring of each discharge tube for damage, and replace it.
8 9
Water leak to vacuum system Checking of laser power supply
10
Checking of matching box
11
Checking of discharge tube
(b) Confirming operation and investigating the cause of a fault Switch on the laser oscillator. If it occurs same phenomenon again, treat it as below.
No. 1 Check item Faulty of gas pressure sensor Cause of trouble, Solution Below phenomenon occurs by abnormal output voltage from gas pressure sensor. In this case, replace gas pressure sensor. 1) Tube pressure becomes high, and RF voltage of all power supply becomes high. The actual power is high in high power command, lower than standard in low power command. (DCI alarm) 2) Tube pressure becomes low, RF voltage of all power supply becomes low, and discharge area enlarges. The actual power is low in high power command, higher than standard in low power command. Replace laser power supply.
Wrong action of alarm circuit of laser power supply
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Check item Cause of trouble, Solution Replace Interface PCB or cable between laser power supply and interface PCB
No. 3
Faulty of interface PCB or faulty of contact or short circuit of cable
(3) Parameters and data Parameters Nos.15025, 15027 DGN. No.966 DGN. No.970 DGN. No.974 Maintenance screen
Alarm No. 4065 Alarm message SHUTTER ACTION
Power supply selection Power supply unit operation status Power supply unit selection signal Power supply unit alarm display
Sequence of alarm detecting SEQ2000 and after
(1) Content Shutter action is abnormal. (2) Condition of alarm When the shutter open command DGN.No.973 does not match the shutter state DGN.No.961#4(SON) and No.961#5(SOF), this alarm is issued. However, when shutter open command changes, the alarm monitor is masked for the time set in parameter No. 15152 (default: 3000 msec). (3) Investigation and measure See the following table, and check the operation status.
[Open] command DGN. No.973 #0=1 Shutter open state signal DGN. No.961 #4 Shutter close state signal DGN. No.961 #5 Normal/Abnormal No. 1 2 Cause of trouble Shutter clamp not removed. Shutter arm section caught 1 0 O 1 1 X 0 0 X 0 1 X 1 0 X Solution Remove the shutter clamp. Eliminate the cause of the problem. If the problem cannot be solved, replace the shutter unit. Check if DC24V is added to shutter solenoid with shutter open command (DGN.No.973#0=1). If DC24V is added to it and shutter cannot open, replace shutter unit. Check the connection between connectors, if it is abnormal, replace shutter PCB. Check connection, short circuit, if it is abnormal, replace the cable. Check if output of shutter position detector by shutter open/close changes. If the voltage of connector CN231#1 and #2 changes (5V0V), it is normal. If it is not so, replace shutter position detector. [Close] command DGN. No.973 #0=0 1 1 X 0 0 X 0 1 O
Anomaly of shutter solenoid
4 5
Anomaly of shutter PCB Anomaly of connection cable to PCB
Anomaly of shutter position detector
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No. Cause of trouble Solution
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Anomaly of interface PCB
Check if DC24V is added to shutter solenoid with shutter open command. If DC24V is not added, interface PCB has faulty. If shutter position detector is normal, and open/close state signal DGN.No.961#4(SON)/ DGN.No.961#5(SON) is abnormal, interface PCB has faulty. In this case, replace interface PCB.
(4) Parameters and data DGN. No.961 #4 (SON) DGN. No.961 #5 (SOF) DGN. No.973 #0 (SOP) F220 #4 (SHTONL) F220 #3 (SHTOFL)
Alarm No. 4066
Shutter open state Shutter closed state Shutter open command Shutter ON signal Shutter OFF signal
Sequence of alarm detecting SEQ2600 and after Sequence after alarm detecting SEQ2000
Alarm message DISCHARGING
(1) Content When the HVON signal is turned on, the discharge starts. This alarm is issued if the voltage of at least one discharge tube exceeds the setting of the parameter. (2) Condition of alarm (ParameterNo.15221) > (DGN No.909(RFV1)) (ParameterNo.15221) > (DGN No.911(RFV2)) (ParameterNo.15221) > (DGN No.913(RFV3)) (ParameterNo.15221) > (DGN No.915(RFV4)) (ParameterNo.15221) > (DGN No.917(RFV5)) (ParameterNo.15221) > (DGN No.919(RFV6)) (ParameterNo.15221) > (DGN No.921(RFV7)) (ParameterNo.15221) > (DGN No.923(RFV8)) (3) Investigation and measure
No. 1 Cause of trouble Invalid parameter setting Solution Check that parameter No.15223, No.15242, No.29022, No.29023 are same as parameter sheet attached to the oscillator. Un-specified laser gas is below: 1) The composition in gas cylinder is different. 2) The actual composition ratio is different from the one described on laser gas cylinder. In this case, replace to specified laser gas. Check that the cooling water temperature is within the range from 25 to 30C. When the actual water temperature is different from the temperature setting of chiller, it is possible that chiller is failure. Call the chiller maker to fix. Check the external gas piping and leak rate, and treat it according to subsection 2.3.2 Check if there is gas leak by automatic leak check function.
or or or or or or or
Use of un-specified laser gas
Checking the cooling water
4 5
Checking external gas leak Checking the internal gas leak
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Cause of trouble Solution 1) Check if any joints in the gas circulating system are loose. If a loose joint is found, tighten the joint firmly. 2) Check if any components of the gas circulating system are cracked. If a cracked component is found, replace that component. 3) Check that the discharge tubes are free from any hole or crack and that the O-rings are not degraded. If a cracked or damaged component is found, replace it. 4) Check if trigger electrode or O-rings of circulating system are degraded. If it is degraded, replace it. 5) Check if the mirrors are damaged. If it is damaged, replace it. 6) Check if gas tube and gas ferrule is damaged. If it is damaged, replace it. Check if there is water leak from heat exchanger or nozzle for discharge tube. If they have faulty, replace it. If high speed diode and RF FET PCB are normal, and working of laser power supply is abnormal, replace laser power supply. If above items does not problem, it is anomaly of gas pressure sensor (offset and abnormal fluctuation of monitor value from gas pressure sensor). In this case, replace gas pressure sensor.
No.
Gas leak in the oscillator
7 8 9
Water leak to vacuum system Anomaly of parts in laser power supply Anomaly of gas pressure sensor
(4) Parameters and data Parameter No.15221 Parameter No.15222 Parameter No.15223, No.29022 Parameter No.15242, No.29023 DGN. Nos.909-914 G222 #7 (HVON)
Alarm No. 4068
Discharge starts check voltage Discharge waits time Bias command Tube pressure for oscillation Discharge tube voltage and current Discharge start signal
Sequence of alarm detecting SEQ3000 and after Sequence after alarm detecting SEQ3000, BEAM OFF
Alarm message BEAM REFLECTION
(1) Content This alarm is issued, if a work piece reflects laser beam more than the rating to the laser oscillator. This can happen when the laser beam is used to drill, cut, or welds materials (such as copper, brass, and aluminum) having a high reflectivity to the laser beam (10.6 m). (2) Condition of alarm When one condition of below is satisfied, alarm is issued. (a) The actual power is bigger than setting of parameter No.15226. (b) When the pulse power feedback is enable, and the reflected laser beam power which is calculated with the difference of power command and actual power after feedback is bigger than the parameter No.15265 and No.15269, this alarm is issued (c) When the pulse power feedback is enable, and the actual power is bigger than the parameter No.15265. However, when BEAM ON or power command condition is changed, the alarm monitor is masked for the time set in parameter No.15268. (2) Investigation and measure
No. 1 Cause of trouble Excessive returning beam back into the resonator Solution Lower the output specified in the command, or take an action to reduce the reflected laser beam.
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No. 2 3 4 Cause of trouble Anomaly of parameter for alarm detection Anomaly of output table parameter Anomaly of input compensation coefficient parameter Solution
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Anomaly of Time constant 1 for Power sensor response delay compensation filter
Check the values set in parameters Nos. 15265 and 15266 against the corresponding values in the parameter table attached to the unit. Check the values set in parameters Nos. 15280 to 15308 against the corresponding values in the parameter table attached to the unit. Check the value set in parameter No. 15215 against the corresponding value in the parameter table attached to the unit. After replacing the rear mirror or power sensor, it is necessary to change this parameter setting. Check the value set in parameter No. 29005 against the corresponding value in the parameter table attached to the unit. After replacing power sensor, it is necessary to change this parameter setting.
(3) Parameters and data Parameter No.15215 Power input compensation coefficient Parameter No.15265 Allowable output increase value Parameter No.15266 Output limit Parameter No.15268 Mask time for beam reflection alarm monitor Parameter No.15269 Permissible value for beam reflection warning signal Parameter No.29005 Time constant 1 for Power sensor response delay compensation filter DGN. No.906 Actual output Data table to estimate the actual power
Alarm No. 4069 Alarm message LASER IF PCB Sequence of alarm detecting SEQ1500 and after Sequence after alarm detecting SEQ1000
(1) Content When the signal watch signal, which is send to CNC, is abnormal, this alarm is issued. (2) Condition of alarm When one condition of below is satisfied, alarm is issued. (a) CNC sends gas press/power select signal DGN.No.968#7(SLO) to interface PCB via I/O Link, and watches the added gas press/power signal (toggle signal) from interface PCB. If the state of this added signal is not changed at four times continuously, this alarm is issued. (b) When DGN.No.960#4(FBD)=1 and parameter No.15018#6(FSB)=1, if the toggle signal DGN.No.960#1(WDI) from interface PCB is not changed at four times continuously, this alarm is issued. (3) Investigation and measure
No. 1 2 3 4 Cause of trouble Fuse blowing Anomaly of 24V power source unit Laser oscillator main circuit breaker abnormal Anomaly of power unit of Interface PCB Solution Correct the cause of the blown fuses, and then replace the fuse. Check the output voltage (24V 10%) of the 24V power source unit. If the allowable voltage range is exceeded, replace the unit. Check whether the main circuit breaker is conducting (ON) for all three phases. Replace the Interface PCB.
(4) Parameters and data DGN. No.960#1 (WDI) DGN. No.964#4 (FBD) DGN. No.968#7 (SLO)
Signal watch signal FSSB LSI mount Power or gas pressure select signal
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Alarm message CHILLER NOT READY Sequence of alarm detecting SEQ1500 and after Sequence after alarm detecting SEQ1000
Alarm No. 4070
(1) Content Turning on the oscillator start switch causes the system to output a chiller start request signal to the machine. After a chiller ready signal is received from the chiller unit, this signal is monitored, and if this signal is interrupted, this alarm is issued. (2) Condition of alarm G221#6(CLRDY)=0 or Power off of power supply for the chiller (3) Investigation and measure
No. 1 2 3 4 Cause of trouble No power supply to chiller unit Anomaly of chiller unit Anomaly of connection of signal cable Anomaly of PCB Solution Check if power cable is connected to chiller unit and power is supplied to it. Check that chiller unit works. If power is supplied to chiller and chiller does not work, chiller unit has faulty. Call chiller maker. If chiller works and there is not chiller ready signal, connection of cable between chiller and CNC is faulty. Check and treat it. If above items have no problem, PCB of CNC has faulty. Check it and treat it.
(4) Parameters and data G221 #6 (CLRDY) F221 #4 (CLON)

Alarm No. 4071
Chiller ready signal Chiller start request signal

Alarm message Sequence of alarm detecting SEQ3000 and after Sequence after alarm detecting SEQ3000, BEAM OFF
ASSIST GAS NOT READY
(1) Content When starting machining, the CNC monitors the assist gas ready signal from the assist gas supply unit in the machine. If this signal is interrupted, this alarm is issued. (2) Condition of alarm When G221#7(AGRDY)=0 during command of assist gas output, or when or is 0 during executing the program, this alarm is issued (3) Investigation and measure Check the PMC parameter state, and check the signal from the assist gas supply unit. If the signal is abnormal, check the assist gas supply unit. Check is 1 to 7 and is 1 to 3 in G32PQ during program execution.
No. 1 2 3 Cause of trouble Failure in assist gas supply unit Poor connection Setting failure of signal and parameter Solution Check the assist gas supply unit. Check the connection between the assist gas supply unit and CNC. Check G221#7 is 0, or that setting of flow gas and assist gas on laser setting screen is not out of range.
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(4) Parameters and data G221 #7 (AGRDY) G222 #5 (AGST) F222 #0-#2 (AG1-3)
Alarm No. 4073
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Assist gas ready signal Assist gas start signal Assist gas selection signal
Sequence of alarm detecting SEQ1500 and after Sequence after alarm detecting PURGE
Alarm message LASER GAS PRES.
(1) Content The pressure of the laser gas supplied to the laser oscillator is monitored. This alarm is issued, if this pressure is out of permissible range. (2) Condition of alarm (parameter No.29322) < (DGN.No.2503) < (parameter No.29323) But the alarm monitor is masked during open of purge valve (V2) or for 5 sec after close of V2. (3) Investigation and measure
No. 1 2 3 4 5 Cause of trouble Solution Adjust the secondary pressure at the regulator on the gas cylinder so that the Abnormal supply laser gas pressure of laser gas supplied to the laser oscillator is 0.175MPa0.025MPa pressure setting (rating) as measured at the entry of the oscillator. Empty of gas cylinder Check if the gas cylinder is empty. It is so, replace the new one. Valve close of gas cylinder To supply the laser gas, open the stop valve enough. Use of un-specified gas When diameter of gas tube/pipe is small, it is possible that this alarm is issued. tube/pipe Use specified gas tube/pipe shown subsection 2.2.1.2 Gas leak from gas tube/pipe Check if fitting for gas loosen or tube ruptures. If it is abnormal, replace it. to oscillator If below failure occurs, replace gas regulator. 1) When it is not able to adjust secondary gas pressure, the bigger gas pressure than specified is added, and gas tube and gas supply pressure sensor sometimes are damaged. Anomaly of gas regulator 2) Because of faulty of gauge of secondary gas pressure, if specified gas pressure on gauge is set, the actual gas pressure sometimes is lower than alarm level. Invalid setting of gas supply Check if parameter setting of gas supply pressure sensor is abnormal. If it is pressure sensor not correct, set parameter again according to subsection 5.9.3.1. Anomaly of gas supply If above items have no problem, gas supply pressure is failure, so replace the pressure sensor charge unit..
7 8
(4) Parameters and data Parameter No.29322 Parameter No.29323 DGN. No.2503
Upper level of the alarm of gas supply pressure Lower level of the alarm of gas supply pressure Laser gas supply pressure
NOTE If this alarm occurs in purge action, after next RUN ON, the automatic aging will be executed.
Alarm No. 4074 Alarm message OXYGEN DENSITY Sequence of alarm detecting SEQ1500 and after Sequence after alarm detecting SEQ1000
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(1) Content The oxygen density in the cabinet of the laser oscillator is monitored by sensor. When this is greater than the allowance value, the alarm occurs. (2) Condition of alarm When the oxygen density in the laser oscillator is bigger than 34%, DGN.No.961#0(OXG) becomes 0, and alarm occurs. (3) Investigation and measure
No. 1 Cause of trouble Higher oxygen density Solution Check if oxygen density is bigger than 34% by oxygen density meter flowing of assist gas (oxygen) to the cabinet of laser oscillator. If it exceeds, treat so that oxygen does not flow. Wrong action of oxygen sensor sometimes happens in the environment Wrong action of oxygen sensor where exists alcohol, Freon gas and component of sulfur. Remove the factor generated substance. Measure the oxygen density in the oscillator by oxygen density meter. When Anomaly of the oxygen sensor it shows less than 34%, check the voltage from oxygen sensor unit at connector CN216#A2-#B2 of interface PCB. If it is bigger than 370mV, unit. oxygen sensor unit is failure, so replace it. Anomaly of interface PCB If above items have no problem, replace interface PCB.
3 4
(4) Parameters and data DGN. No.961#0 (OXG)

Alarm No. 4075 Alarm message CHILL TEMP.
Oxygen density (0: Abnormal 1: Normal)

(1) Content A dew sensor is mounted to the output coupler holder in the oscillator. This alarm occurs when the sensor detects condensation. After this alarm occurs, the alarm status cannot be reset until the condensation status is released. (2) Condition of alarm When the dew sensor detects the condensation, DGN.No.961#2(WAT) becomes 0, and this alarm is issued. It is not possible to execute alarm reset until the state of condensation is released. (3) Investigation and measure
No. 1 Cause of trouble Too low cooling water temperature 1) Solution Set the water temperature near the room temperature (plus about 1C). (Maximum water temperature: 30C) 2) When the cooling water temperature is less than temperature setting of chiller, chiller has failure. Call the maker of chiller. Connecting anomaly of dew Check whether the cable is securely connected to the dew sensor. If not, sensor cable reattach the cable. Anomaly of dew sensor If the sensor operates when there is no condensation around the sensor, the sensor is abnormal. Replace the sensor. Sensor in condensation When drying the sensor that is in the condensation state, do not blow on the state sensor with hot wind whose temperature is 60C or higher.
2 3 4
(4) Parameters and data DGN. No.961#2 (WAT)
Condensation (0: Abnormal 1: Normal)
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Alarm No. 4076 Alarm message LASER POWER DOWN Sequence of alarm detecting SEQ3000 and after
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(1) Content This alarm is issued if the monitored laser output is lower than the specified laser output by at least the allowable value. (2) Condition of alarm When one condition of below is satisfied, alarm is issued. (a) The actual laser power is less than (average power (power x duty) (Parameter No.15271)) in power output, this alarm is issued. Bu the alarm monitor is masked in BEAM ON or for 3 sec after changing power command condition (b) In calibration preparation 0C, when the laser power is less than parameter No.29506, this alarm is issued. (c) In calibration preparation 0C, when the laser power is less than parameter No.29507 after aging for times of parameter No.29511. (d) In calibration preparation 1C, when the laser power is less than parameter No.29202 after gas exchanging for times of parameter No.29203 Calibration preparation 0C, 1C is one of the warm-up sequence which is automatically executed in laser start-up. (2) Investigation and measure
No. 1 Cause of trouble Solution Check that parameter No.15223, No.15242, No.29022, No.29023 are same as Invalid parameter setting parameter sheet attached to the oscillator. Un-specified laser gas is below: 1) The composition in gas cylinder is different. Use of un-specified laser 2) The actual composition ratio is different from the one described on laser gas gas cylinder. In this case, replace to specified laser gas. Check that the cooling water temperature is within the range from 25 to 30C. Checking the cooling water When the actual water temperature is different from the temperature setting of chiller, it is possible that chiller is failure. Call the chiller maker to fix. In install of oscillator or after stopping for a long time, this alarm is sometime Shortage of aging issued by shortage of aging. Execute aging enough. Check the external gas piping and leak rate, and treat it according to Checking external gas leak subsection 2.3.2 Checking the internal gas Check if there is gas leak by automatic leak check function. leak Lack of output from laser The thermocouple inside the power sensor unit may be damaged, or there may power sensor unit be a poor terminal connection. Measure the direct current resistance between the terminals of the power sensor unit, and check that the measured value falls within 200 to 800 ohms for C2000i-C and C4000i-C or 1,000 to 3,000 ohms for C6000i-C. If the measured value falls outside this range, replace the power sensor unit. 1) Check if the cable to power sensor unit is connected certainly. If it is not Connecting anomaly of the enough, connect it certainly. cable of laser power sensor 2) If output voltage from power sensor fluctuates touching to the cable, cable unit. has failure. So, replace it.
3 4 5 6
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Cause of trouble 1) Solution
No.
10
11 12
Check if the mirrors are dirty, degraded, or damaged, and clean or replace faulty mirrors. 2) Check the breakage of turbo blower. If it has failure, change it. 3) Align the mirrors. Decrease in actual output 4) Check for internal gas leak due to a damaged discharge tube or degraded level -ring for discharge tube, trigger electrode or circulating system, and replace any faulty part. 5) Check if there is water leak by parts in the gas circulating system , and if any problem is found, take appropriate action. Check the connection between connectors, if it is abnormal, replace shutter Anomaly of shutter PCB PCB. 1) If the time until it arrives parameter No.15240 is shorter or longer, gas pressure sensor has offset in monitor value. In this case, replace gas Anomaly of gas pressure pressure sensor. sensor 2) If monitor of gas pressure fluctuates, it has problem, so replace it. Anomaly of interface PCB If above items have no problem, replace interface PCB.
(3) Parameters and data Parameter No.15242, 29023 Parameter No.15271 Parameter No.29202 Parameter No.29203 Parameter No.29506 Parameter No.29507 Parameter No.29511 DGN. No.906
Alarm No. 4077
Tube pressure for oscillation Allowable output drop value Output judgment value in calibration preparation 1C Upper limit of number of repetition in calibration preparation 1C Output judgment value 2 in calibration preparation 0C Output judgment value 3 in calibration preparation 0C Upper limit of number of repetition in calibration preparation 0C Actual output
Alarm message ABSORBER TEMP.
(1) Content In the usual operation, this beam absorber is irradiated by the rated output only during the laser output compensation conducted after the start of the oscillator. (2) Condition of alarm When the temperature switch of absorber detects is bigger than 90 at the bottom of absorber or 80 at the side of absorber, DGN.No.961#7(ABT) becomes 0, and then, this alarm is issued. (3) Investigation and measure
No. 1 Cause of trouble Invalid setting of water temperature of chiller, or anomaly of chiller Shortage of water flow Anomaly of absorber Solution Check that the cooling water temperature is within the range from 25 to 30C. When the actual water temperature is higher than the temperature setting of chiller, it is possible that chiller is failure. Call the chiller maker to fix. Check if there is water jam in the water tube between distribution unit and beam absorber. If it so, replace it. 1) When cooling water is flowing, if water temperature rises, replace absorber. 2) If there is water leak from absorber, replace absorber. Temperature switch acts when temperature is higher than specified one. If it acts by lower, replace temperature switch (A57L-0001-0095#B080 and A57L-0001-0095#B090).
2 3
Anomaly of temperature switch
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No. 5 Cause of trouble Cut the cable or contact failure Anomaly of shutter PCB Anomaly of interface PCB Solution
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6 7
Check if cables between Temperature switch and shutter PCB, and between shutter PCB and interface PCB is connected certainly, if it is not so, connect it certainly. Also, check if cable is cut. Check the connection between connectors, if it is abnormal, replace shutter PCB. If above items have no problem, replace interface PCB.
(4) Parameters and data DGN.No.961#7 (ABT) DGN.No.2500, No.2501

Alarm No. 4078
Absorber temperature Cooling water temperature 1, 2

Alarm message LASER TUBE PRES.
(1) Content The gas pressure is monitored after the discharge start ready condition (SEQ2000) or eco power saving is established. (2) Condition of alarm When one condition of below is satisfied, alarm is issued. (a) When the gas pressure deviates by (Parameter No.15251) from the set gas pressure, this alarm is issued. (b) When the gas pressure exceeds the specified upper lever or lower level in eco power saving mode, on the way to or from eco power saving mode, this alarm is issued. (3) Investigation and measure
No. 1 Cause of trouble Solution Invalid setting of parameters for gas Check that parameter No.15244, No.15251, No.29403 are same as pressure control parameter sheet attached to the oscillator. Adjust the secondary pressure at the regulator on the gas cylinder so Abnormal supply laser gas pressure that the pressure of laser gas supplied to the laser oscillator is 0.175MPa0.025MPa (rating) as measured at the entry of the setting oscillator. Check the external gas piping and leak rate, and treat it according to Checking external gas leak subsection 2.3.2 Checking the internal gas leak Check if there is gas leak by automatic leak check function. 1) Check if any joints in the gas circulating system are loose. If a loose joint is found, tighten the joint firmly. 2) Check if any components of the gas circulating system are cracked. If a cracked component is found, replace that component. 3) Check that the discharge tubes are free from any hole or crack and that the O-rings are not degraded. If a cracked or damaged Gas leak in the oscillator component is found, replace it. 4) Check if trigger electrode or O-rings of circulating system are degraded. If it is degraded, replace it. 5) Check if the mirrors are damaged. If it is damaged, replace it. 6) Check if gas tube and gas ferrule is damaged. If it is damaged, replace it. Adjust the gas flow control valve to supply gas at the specified flow The gas flow control valve is closed. rate. C2000i-C, C4000i-C : 10 Litter / hC6000i-C : 20 Litter / h
3 4
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Cause of trouble Solution Measure gas pressure control voltage (0V to 12.7V at GPC check terminal) and tube pressure monitor voltage (0V to 5V at LTP check terminal) on interface PCB. When control valve is all closed, GPC=0V, and when it is all opened, approximately GPC=-12.7V. Tube pressure is 40Torr per 1V. If it is abnormal, replace interface PCB. If gas pressure control voltage GPC is always 0V or approximately 12.7V, control has problem, so replace it. If above items have no problem, replace the pressure sensor.
No.
Anomaly of interface PCB
8 9
Anomaly of control valve Anomaly of pressure sensor
(4) Parameters and data Parameter No.15244 Parameter No.15251 Parameter No.29403 DGN. No.905
Alarm No. 4079
Gas pressure control gain Maximum allowable gas pressure deviation Gas pressure limit in Power Saving Actual gas pressure
Alarm message PUSH RESET KEY
(1) Content At the same time, the shutter is closed and discharge stops (2) Condition of alarm When the emergency stop button is pressed in SEQ2000 to 3000 ,during eco power mode, on the way to or from eco power mode, this alarm is issued. (3) Investigation and measure
No. 1 2 3 4 5 6 Cause of trouble Emergency stop button is pressed. Working of safety limit switch on machine side Anomaly of emergency stop signal line on machine side Anomaly of machine Solution Remove the failure. Relies the emergency stop button, push the reset key on the panel. When you touch the limit switch on machine side, or exceed the limit during working, it is possible to issue this alarm. Work safety not to exceed limit. If there is anomaly of connection of emergency stop signal line on machine side, or cutting of line, adequately treat it. When alarm is issued on machine side, it is possible to issue this alarm. Remove the factor of machine alarm. Check if cable between machine and laser oscillator connect. If it is not connect or cut, adequately treat it.
Anomaly of emergency stop signal cable between machine and laser oscillator Anomaly of I/O unit Replace I/O unit.
(4) Parameters and data F221#0 (LARM)

Alarm No. 4080
Laser alarm signal

Alarm message Sequence of alarm detecting SEQ1500 and after Sequence after alarm detecting SEQ1000
LASER TUBE EXHAUST
(1) Content When the oscillator start switch is turned on, the exhaust pump starts evacuating the gas in the circulating system to place the oscillator in the low-pressure state. At this time, this alarm is issued if the pressure does not reach the prescribed vacuum pressure when the specified time has elapsed after the start of exhaust.
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(2) Condition of alarm When one condition of below is satisfied, alarm is issued. (a) Evacuation is started in SEQ1500 with RUN ON. After that, when the gas pressure does not arrive setting of parameter No.15240 over the time of setting of parameter No.15259, this alarm is issued. (b) When the gas pressure exceeds (parameter No.29386 + No.29387), this alarm is issued. (3) Investigation and measure
No. 1 2 Cause of trouble Invalid setting of parameter Checking the internal gas leak Solution Check parameters No.15240, No.15259. Check if there is gas leak by automatic leak check function. 1) Check if specified oil is provided at an appropriate level between H and L for gauge shown subsection 3.3.2.1. If it is not so, refill or exhaust oil. 2) Check if the exhaust filter of the pump is clogged. If it is abnormal, replace it. 3) Check whether the exhaust pump outlet is clogged to disable Abnormal of exhaust pump exhaust operation. Remove the cause of the clogging. 4) If the pump works by counter- rotation, check the connection of phases of power supply referring to subsection 2.3.1.2. If it is wrong, change phase together. 5) If above items have no problem, replace exhaust pump. 1) Check if any joints in the gas circulating system are loose. If a loose joint is found, tighten the joint firmly. 2) Check if any components of the gas circulating system are cracked. If a cracked component is found, replace that component. 3) Check that the discharge tubes are free from any hole or crack and that the O-rings are not degraded. If a cracked or damaged Gas leak in the oscillator component is found, replace it. 4) Check if trigger electrode or O-rings of circulating system are degraded. If it is degraded, replace it. 5) Check if the mirrors are damaged. If it is damaged, replace it. 6) Check if gas tube and gas ferrule is damaged. If it is damaged, replace it. When the air is charged from silencer of V3 in exhausting, Anomaly of three state valve (V3) DGN.No.905 does not fall. In this case, V3 has failure, so replace exhaust unit. 1) When exhausting is executed and DGN.No.905 does not fall, it is possible that failure of output voltage of gas pressure sensor (Example: always 10V). Check it by LTP check terminal on interface PCB, if it is abnormal, replace it. 2) If the time until it arrives parameter No.15240 is shorter or Anomaly of gas pressure sensor longer, gas pressure sensor has offset in monitor value. In this case, replace gas pressure sensor. 3) If monitor of gas pressure fluctuates, it has problem, so replace it. When exhausting is executed and DGN.No.905 does not fall, it is possible that failure of interface PCB or safety circuit PCB. Anomaly of interface PCB or safety Check if connector CN239 on interface PCB or CN240 and CP226 circuit PCB. on safety circuit PCB loosen. Check the signal in interface PCB and safety circuit PCB, if it has problem, replace PCB. When exhausting is executed and DGN.No.905 does not fall, it is Anomaly of valves on charge unit possible that failure of gas supply valve (V1), or purge valve (V2), replace charge unit.
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Evacuation completion negative pressure RUN-ON exhausts time Pressure to start turbo blower Pressure limit after turbo blower start Actual gas pressure
Sequence of alarm detecting 45 sec after SEQ1900 Sequence after alarm detecting SEQ1000
(4) Parameters and data Parameter No.15240 Parameter No.15259 Parameter No.29386 Parameter No.29387 DGN. No.905
Alarm No. 4081
Alarm message GAS PRES. CONTROL
(1) Content The pressure is monitored in 45 seconds after the start of gas pressure control. This alarm is issued if the pressure falls out of the prescribed range. (2) Condition of alarm (Parameter No.15240) 20 < (DGN.No.905) < (Parameter No.15241)+20 (3) Investigation and measure
No. 1 Cause of trouble Solution Invalid setting of parameters for gas Check that parameter No. 15000#1(LGC), 15244, 15245, 15246 are pressure control same as parameter sheet attached to the oscillator. Adjust the secondary pressure at the regulator on the gas cylinder Abnormal supply laser gas pressure so that the pressure of laser gas supplied to the laser oscillator is 0.175MPa0.025MPa (rating) as measured at the entry of the setting oscillator. 1) Check if any joints in the gas circulating system are loose. If a loose joint is found, tighten the joint firmly. 2) Check if any components of the gas circulating system are cracked. If a cracked component is found, replace that component. 3) Check that the discharge tubes are free from any hole or crack and that the O-rings are not degraded. If a cracked or damaged Gas leak in the oscillator component is found, replace it. 4) Check if trigger electrode or O-rings of circulating system is degraded. If it is degraded, replace it. 5) Check if the mirrors are damaged. If it is damaged, replace it. 6) Check if gas tube and gas ferrule is damaged. If it is damaged, replace it. Measure gas pressure control voltage (0V to 12.7V at GPC check terminal) and tube pressure monitor voltage (0V to 5V at LTP check Anomaly of interface PCB or control terminal) on interface PCB. When control valve is all closed, GPC=0V, and when it is all opened, approximately GPC=-12.7V. valve Tube pressure is 40Torr per 1V. If it is abnormal, replace interface PCB or control valve. Check the cable connection between gas controller and interface Anomaly of connection cable PCB. Anomaly of pressure sensor If the above items have no problem, replace the pressure sensor.
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(4) Parameters and data Parameter No.15241 DGN. No.905
Gas pressure at the start of discharge Actual gas pressure
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Alarm No. 4082 Alarm message TUBE PRES. SENSOR Sequence of alarm detecting SEQ1500 and after
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(1) Content This alarm appears when the signal of the pressure sensor vanishes. (2) Condition of alarm DGN.No.905 0 (3) Investigation and measure
No. 1 Cause of trouble Solution Open or poor contact in connection Check if the cable between (gas pressure sensor) (interface PCB) cable between pressure sensor and is not cut or short-circuited . If it is abnormal, replace the cable. Interface PCB Check the supply power (+15V) at the connector CN51(pin #1-#2) on gas control PCB. If this is normal, check the signal voltage from Anomaly of pressure sensor pressure sensor. If this is zero or less , pressure sensor is abnormal. Replace the pressure sensor. If the signal from the pressure sensor is normal, but the output from Anomaly of Interface PCB the Interface PCB is zero or less, the Interface PCB is faulty. Replace the Interface PCB.
(4) Parameters and data Parameter No.15252 DGN. No.905

Alarm No. 4085
Gas pressure offset Actual gas pressure

Sequence of alarm detecting SEQ3000 and after Sequence after alarm detecting -
Alarm message MIRROR CLEANING
(1) Content This alarm appears when the laser output power decreases and takes an abnormally higher calibration coefficient. This monitoring is executed at the start of the oscillator for checking for decreases in output due to contamination and degradation of optical components. (2) Condition of alarm When one condition of below is satisfied, alarm is issued. (a) When parameter No.15204, No.29020 exceeds parameter No.15203, this alarm is issued. (b) When the last laser power in internal discharge is less than parameter No.29202 after repetition of gas exchange and internal discharge for the times of parameter No.29203 in calibration preparation 1C (c) Calibration preparation 1C is executed after automatic aging and manual aging for the specified times. When the last laser power in calibration preparation 1C is less than parameter No.29202, this alarm is issued. Calibration preparation 1C is one of the warm-up sequence, which is automatically executed in laser start-up. (3) Investigation and measure
No. 1 Cause of trouble Excess of maintenance period Solution Check if the maintenance period for mirror does not exceed.
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Cause of trouble Solution
No. 2 3 4
An optical part in the laser resonator Align the laser resonator. is out of position. An optical part in the laser resonator Clean or replace the optical part. is dirty. See the solution to the problem of laser output decrease described in Other causes alarm No. 4076.
(4) Parameters and data Parameter No.15320 Command power for power calibration coefficient calculation Parameter No.29060 Laser power in normal calibration Parameter No.15203 Power calibration limit Parameter No.15204, No.29020 Power calibration coefficient Parameter No.29396 Calibration coefficient adjuster F220#6 (MWRN) Laser power down alarm signal
Alarm No. 4087 Alarm message SHUTTER OH Sequence of alarm detecting SEQ2000 and after Sequence after alarm detecting SEQ2000
(1) Content This alarm is issued when the temperature of the shutter mirror exceeds a preset maximum. (2) Condition of alarm When the temperature switch on the heatsink for shutter mirror detects it is bigger than 90, DGN.No.961#6(SHT) becomes zero, and then this alarm is issued. (3) Investigation and measure
No. 1 2 Cause of trouble Anomaly of cooling fan Contamination of shutter mirror Solution When the cooling fan stops, replace it. Clean the shutter mirror. If this alarm recurs after the shutter mirror is cleaned, replace the mirror. Anomaly of absorber sometimes causes contamination of shutter. Check absorber. Check if cables between Temperature switch and shutter PCB, and between shutter PCB and interface PCB is connected certainly, if it is not so, connect it certainly. Also, check if cable is cut. Check the connection between connectors, if it is abnormal, replace shutter PCB. Temperature switch acts when temperature is higher than specified one (90). If it acts by lower, replace temperature switch. If the above items have no problem, replace interface PCB.
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Cut the cable or contact failure Anomaly of shutter PCB Anomaly of temperature switch Anomaly of interface PCB
(4) Parameters and data DGN. No.961#6 (SHT)

Alarm No. 4088
Shutter temperature
Alarm message LASER VOLTAGE DOWN
(1) Content This alarm is issued, if the voltage applied to the discharge tube drops largely.
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(2) Condition of alarm When parameter No.29016#0(CTA) is 0 (high power mode or normal mode), (Parameter No.15270) (Parameter No.15272) > DGN.No.909 (note 1) When parameter No.29016#0(CTA) is 1 (fine mode), (Parameter No.29025) (Parameter No.15272) > DGN.No.909 (note 1)
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(Note 1) However, when No.1 laser power supply is disable with parameter No.15027, DGN is RFV of the youngest No. of laser power supply, which is, enable. (3) Investigation and measure
No. 1 Cause of trouble Invalid parameter setting Solution Check parameters No. 15242, No.15270, No.15272 and No.29023. Un-specified laser gas is below: 1) The composition in gas cylinder is different. Use of un-specified laser 2) The actual composition ratio is different from the one described on laser gas gas cylinder. In this case, replace to specified laser gas. Check if phases of AC200V terminal block of laser power supply is Anomaly of laser power short-circuited. If it is so, laser power supply has problem. Replace it. In this supply and magnetic case, it is possible that magnetic contactor for power supply is deposited. contactor If it is so, replace it. Trip of breaker for laser When breaker is tripped, turn on. power supply 1) Measure the resistance of high speed diode and RF FET PCB according to subsection 5.2.1. If it is faulty, replace it. Anomaly of parts in laser 2) If high speed diode and RF FET PCB are normal, and working of laser power supply power supply is abnormal, replace laser power supply. Anomaly of discharge tube When it is discharged, if detected voltage of discharge tube is very low, replace matching box. voltage detect circuit of matching box Anomaly of interface PCB If above items have no problem, replace interface PCB.
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(4) Parameters and data Parameter No.15242, No.29023 Parameter No.15270, No.29025 Parameter No.15272 Parameter No.29016#5 (CTA) DGN. Nos.909-924
Alarm No. 4089
Tube pressure for oscillation Discharge tube voltage in normal condition Allowable discharge tube voltage drop Processing mode 0:High power mode or normal mode 1:Fine mode Discharge tube voltage and current
Alarm message ASSIST GAS NO SELECT
(1) Content When the assist gas is not chosen or not set the condition of assist gas, this alarm is issued. (2) Condition of alarm When there are no parameters for assist gas on processing program in parameter No.15000#2(AGA)=0, this alarm is issued. (3) Investigation and measure
No. 1 Cause of trouble Failure of program Solution Check if the setting condition of assist gas exists on processing program
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(4) Parameters and data Parameter No.15000#2(AGA) F222#0 to #2 (AG1 - AG3)

Alarm No. 4090 Alarm message LASER NOT GENERATE
Assist gas preparation check with beam on Assist gas selection signal
Sequence of alarm detecting SEQ1000 and after Sequence after alarm detecting -
(1) Content This alarm is issued if an attempt is made to radiate a laser beam when the laser is not in the oscillation ready (SEQ3000) state. (2) Condition of alarm When an attempt is made to radiate a laser beam in F226#6(LSTR)=0, this alarm is issued. (3) Investigation and measure
No. 1 Cause of trouble Failure of program Solution Set the program to radiate a laser beam in F221#6(LSTR).
(4) Parameters and data F221#6 (LSTR)

Alarm No. 4094
Oscillation ready signal

Alarm message VANE PUMP Sequence of alarm detecting SEQ1500 and after Sequence after alarm detecting SEQ1000
(1) Content This alarm occurs when the thermal switch of the motor starter for the exhaust pump is tripped. (2) Condition of alarm DGN.No.972#2(RPA)=0 (3) Investigation and measure
No. Cause of trouble 1) Solution Check if specified oil is provided at an appropriate level between H and L for gauge shown subsection 3.3.2.1. If it is not so, refill or exhaust oil. 2) Check if the exhaust filter of the pump is clogged. If it is abnormal, replace it. 3) Check whether the exhaust pump outlet is clogged to disable exhaust Abnormal of exhaust pump operation. Remove the cause of the clogging. 4) If the pump works by counter- rotation, check the connection of phases of power supply referring to subsection 2.3.1.2. If it is wrong, change phase together. 5) If above items have no problem, replace exhaust pump. 1) Measure resistance of three phases. If it shows some ohm, it is normal. 2) Check if three phases is not short-circuited measuring of resistance Anomaly of exhaust pump between each phase and frame earth. If the result is abnormal, replace exhaust pump. Missing phase of three phases Check if there is no lack of contact, cutting or missing phase because of of AC200V faulty of install of cable to breaker. Check if exhaust pump normally works removing hour meter, which is Anomaly of hour meter connected to exhaust pump. If it so, hour meter has problem. Replace hour meter.
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No. 5 6 Cause of trouble Anomaly of connection cutting of cable Anomaly of interface PCB Solution or Check that connection and cutting of cable to thermal relay.
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If above items is normal and thermal relay is not tripped, interface PCB is abnormal. Replace interface PCB.
(4) Parameters and data DGN. No.972 (RPA) DGN. No.961#3 (FAL)
Alarm No. 4095
Exhaust pump start Exhaust pump alarm

Alarm message AMU ERROR
(1) Content This alarm is issued if the reading error occurs in analogue monitor unit (AMU). (2) Condition of alarm Communication state of analogue monitor unit (AMU) is watched on CNC. When CNC detects error, this alarm is issued. (3) Investigation and measure
No. 1 2 Cause of trouble Failure of cable Failure of AMU Solution Check if cable is not cut or does not have contact failure. Replace analogue monitor unit.
Alarm No. 4099
Alarm message GAS PRES. NOT REACH
(1) Content When the gas pressure does not rise after the discharge start signal (HV ON) is turned on in SEQ2700, or on the way of SEQ2600 from quick power saving , this alarm is issued. (2) Condition of alarm When one condition of below is satisfied, alarm is issued. (a) When the gas pressure rises in SEQ2700, the purge valve(V2) opens, at once, control valve (CV1) all opens. Within the time of setting of parameter No.29383) from V2 and CV1 close, when the actual gas pressure is less than ((Parameter No.29023) (Parameter No.29381)), this alarm is issued. (b) When the actual gas pressure is less than ((Parameter No.15242) (Parameter 15251)) within the setting of parameter No.29404 on the way of SEQ3000(LSTR) from quick power saving, this alarm is issued. (2) Investigation and measure
No. 1 2 Cause of trouble Invalid parameter setting Solution Check parameters Nos. 15001#3(NGC), 15247, 15248, No.15251, No.29380, No.29381 and No.29383 Abnormal supply laser gas pressure Adjust the secondary pressure at the regulator on the gas cylinder so setting that the pressure of laser gas supplied to the laser oscillator is 0.175MPa0.025MPa (rating) as measured at the entry of the oscillator. Empty of gas cylinder Check if the gas cylinder is empty. It is so, replace the new one.
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Cause of trouble Solution To supply the laser gas, open the stop valve enough.
No. 4
Valve close of gas cylinder
(3) Parameters and data Parameter No.15001#3(NGC) Specifies whether to preset the integral value of gas pressure control. Parameters Nos.15242, 29023 Parameter No.15247 Parameter No.15248 Parameter No.15251 Parameter No.29380 Parameter No.29381 Parameter No.29383 DGN. No.905
Alarm No. 4100
Setting of the pressure in the tube during oscillation Pressure control integrator element preset value Tolerable amount by which the target gas pressure is not reached Intra-tube pressure in discharge start Target difference of purge valve in SEQ2700 Target difference of pressure control valve in SEQ2700 Gas pressure increase time limit in SEQ2700 Actual gas pressure
Alarm message INVERTER 1
(1) Content If the inverter used to power the turbo blower is abnormal, this alarm is issued. When this alarm is issued, check the alarm message on the digital panel. At this time, do not turn off the power to the inverter because the alarm will be reset if the power is turned off. (2) Condition of alarm When the message shown (3) Investigation and measure is displayed on the digital panel of inverter, DGN.No.962#0(IA1) becomes zero, and then, this alarm is issued. (3) Investigation and measure When an inverter alarm is issued, a message as shown below appears on the digital panel of the inverter. The causes of the inverter alarms are listed below. Display : Exx.z Exx : Cause of alarm (Message) z : Sequence of inverter at alarm occurred Causes of inverter alarms
Message E01 E02 E03 E04 E05 E06 E07 E08 E09 Contents Overcurrent protection (during turbo blower constant-speed operation) Overcurrent protection (during turbo blower deceleration) Overcurrent protection (during turbo blower acceleration) Overcurrent protection (others) Overload protection Damping resistor overload protection Overvoltage protection EEPROM error (NOTE) Insufficient voltage (voltage drop) Inverter faulty Increased supply voltage Inverter faulty Invalid inverter setting Supply voltage drop Cause
Anomaly of turbo blower Abrupt acceleration or abrupt deceleration
Invalid inverter setting and laser gas pressure setting Anomaly of turbo blower, laser gas
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Message E10 E11 E12 E13 E14 E15 E16 E20 E21 E23 E24 E25 E30 E35 E36 E37 E38 E41 E60 to 69 E70 to 79 ---Contents CT error CPU error External trip USP error Ground protection Overvoltage protection in receiving power (supply voltage increase) Protection against instantaneous power failure Temperature increase when fan motor rotation falls Abnormal temperature Gate array communication error Protection against missing phase Abnormal main circuit IGBT error Thermistor error Abnormal brake Emergency interception Overload protection in low rotation Modbus communication error Option 1 error 1 to 9 Option 2 error 1 to 9 Standby state because of voltage shortage Inverter faulty Cause
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Turbo blower or wiring ground-fault Increased supply voltage (In stopping) Momentary loss of supply voltage Fan motor faulty Inverter faulty Higher environmental temperature Inverter faulty Missing Phase of Power supply
Inverter faulty
Invalid inverter setting or turbo blower faulty
Not powered.
NOTE If E8 (EEPROM error) occurs, check parameter settings.

Sequence of inverter when the alarm was issued
Indication 0 1 2 3 4 Reset Stopped Being decelerated. Constant speed Being accelerated. Status Indication 5 6 7 8 ---Status Operation command is frequency 0. Being started. DC current damping state Under overload control -------input with
This inverter can display information on the most recently issued six alarms as shown below. Alarm content is held if power off. The latest alarm is indicated on trip monitor 1 (d081). d081 : Trip monitor 1 d082 : Trip monitor 2 d083 : Trip monitor 3 d084 : Trip monitor 4 d085 : Trip monitor 5 d086 : Trip monitor 6 Below data <1> to <6> is recorded in every alarm monitor. <1> Cause of alarm (See the table of causes of inverter alarms given previously.) <2> Frequency (Hz) when the alarm was issued <3> Output current (A) when the alarm was issued <4> DC voltage (V) across P and N when the alarm was issued <5> Cumulative operation time (hours) when the alarm was issued <6> Cumulative power-on time (hours) when the alarm was issued
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d081 (Function/FUNC (1) E01.3 (Up/Down keys) (2) 1000 (Up/Down keys) (3) 28.0 (Up/Down keys) (4) 280 (Up/Down keys) (5) 15 (Up/Down keys) (6) 18 (Up/Down keys)
Refer to subsection 5.7.1 about display of trip monitor.
No. 1 2
Cause of trouble Invalid parameter setting
Solution
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Check parameter No. 15240, 15241, 15242 and 29023. This occurs by momentary power failure because of lightning or decline of Decline of supply power voltage three phases power voltage because of faulty of equipment. Check if to inverter. equipment has problem. Un-specified laser gas is below: 1) The composition in gas cylinder is different. 2) The actual composition ratio is different from the one described on Use of un-specified laser gas laser gas cylinder. In this case, replace to specified laser gas. Replace the turbo blower. The possible causes of the faulty turbo blower are listed below. Check them. 1) Damaged impeller 2) Failed bearing The bearing may have failed as a result of one or more of the following Anomaly of turbo blower causes: 1) Deteriorated oil 2) Foreign matter in the bearing So, always replace the oil at the recommended intervals. Anomaly of inverter fan Replace of inverter fan. Anomaly of inverter of interface If above items has no problem, it is possible that failure of inverter of PCB interface PCB. Replace inverter or interface PCB.
(4) Parameters and data Parameter No.15240 Parameter No.15241 Parameter No.15242, 29023 DGN. No.962#0 (IA1)
Negative pressure in exhaust completion Intra-tube pressure in discharge start Tube pressure for oscillation Inverter alarm
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Alarm No. 4101 Alarm message OUT OF FREQUENCY 1 Sequence of alarm detecting SEQ1500 and after
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(1) Content This alarm is issued, if a frequency reached signal is not received within the time of the parameter No.29397 + No.29388 after the turbo blower is started. (2) Condition of alarm When DGN.No.962#1(AR1) does not become 1 within the time of (Parameter No.29397 + No.29388) after turbo blower on, this alarm is issued. (3) Investigation and measure
No. 1 2 Cause of trouble Invalid parameter setting Cable connection abnormal Solution Check parameters No.29388, No.29397. Check if the cable is securely connected to the inverter. If not, reattach the cable. Replace the turbo blower. The possible causes of the faulty turbo blower are listed below. Check them. 1) Damaged impeller 2) Failed bearing The bearing may have failed as a result of one or more of the following causes: 1) Deteriorated oil 2) Foreign matter in the bearing So, always replace the oil at the recommended intervals. If above items have no problem, start-up the oscillator, and then check if it between terminal 11 and CM2 is short-circuited until it passed (parameter No.29397+ parameter No.29388) after start of turbo blower. If it is not so, inverter has problem. Replace inverter. If above items have no problem, replace interface PCB.
Anomaly of turbo blower
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Anomaly of inverter Anomaly of interface PCB
(4) Parameters and data Parameter No.29388 Parameter No.29397 DGN. No.962#1 (AR1)
Alarm No. 4105
Inverter frequency wait limit Turbo blower start up time Frequency reach signal
Alarm message BLOWER MOTOR TEMP.
(1) Content This alarm is issued, if the temperature of the turbo blower motor winding becomes higher than the permissible level. (2) Condition of alarm When the turbo blower motor winding exceeds 140, DGN.No.962#5(OH1) or No.962#4(OH2) becomes 0, this alarm is issued. (3) Investigation and measure
No. 1 Cause of trouble Solution Check that the cooling water temperature is within the range from 25 to Invalid setting of water 30C. temperature of chiller, or anomaly When the actual water temperature is higher than the temperature setting of chiller of chiller, it is possible that chiller is failure. Call the chiller maker to fix.
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Cause of trouble Solution Check if there is water jam in the water tube between distribution unit and turbo blower. . If it so, replace water tube. Check if the cable between interface PCB and turbo blower is securely connected. If not, reattach the cable. If oil is filled with specific quantity and there is no water jam in water tube, temperature sensor is abnormal. If it so, replace turbo blower because temperature sensor is installed in turbo blower. If above items have no problem, replace interface PCB.
No. 2 3 4 5
Shortage of water flow Cable connection abnormal Temperature sensor abnormal Anomaly of interface PCB
(4) Parameters and data Parameter No.15003#6 (TR1) Number of Turbo blower DGN. No.962#5 (OH1) Turbo motor winding temperature 1 DGN. No.962#4 (OH2) Turbo motor winding temperature 2
Alarm No. 4106 Alarm message BLOWER OIL TEMP. Sequence of alarm detecting SEQ1500 and after Sequence after alarm detecting SEQ1000
(1) Content When the signal from turbo blower oil sensor falls against setting, or turbo oil temperature rises, this alarm is issued. When the oil sensor signal line is cut, this alarm is issued. (2) Condition of alarm Temperature abnormal detection (DGN No.2505) < (Parameter No.29331) or (DGN No.2506) < (Parameter No.29332) Signal line cutting detection (DGN No.2505) > 2000 or (DGN No.2506) > 2000 (3) Investigation and measure
No. 1 2 3 4 5 6 Cause of trouble Invalid setting of parameter The oil level is lower than specified. Invalid setting of water temperature of chiller, or anomaly of chiller Invalid alarm level setting Solution Check parameters No.15003#6(TR1), No.29330#0(OLS), No.29331, No.29332. Replenish the turbo blower with oil until the oil level on the oil gauge is between H and L. Check that the cooling water temperature is within the range from 25 to 30C. When the actual water temperature is higher than the temperature setting of chiller, it is possible that chiller is failure. Call the chiller maker to fix. Referring to turbo oil temperature alarm detect function on section 6.5. Check if there is water jam in the water tube between distribution unit and Shortage of water flow turbo blower. . If it so, replace water tube. If oil is filled with specific quantity and there is no water jam in water tube, Temperature sensor temperature sensor is abnormal. If it so, replace turbo blower because abnormal temperature sensor is installed in turbo blower. In some cases, turbo blower is heated. 1) Turbo blower rotates in atmospheric pressure. 2) Internal gas leak becomes bigger, and internal gas pressure becomes Abnormal temperature rising higher. of turbo blower 3) Setting value of tube pressure is too high. 4) Turbo oil is degraded. Investigate above, treat it.
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No. 8 9 Cause of trouble Solution
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Check if the cable between interface PCB and turbo blower is securely Cable connection abnormal connected. If not, reattach the cable. Anomaly of interface PCB If above items have no problem, replace interface PCB.
(4) Parameters and data Parameter No.15003#6 (TR1) Number of Turbo blower Parameter No.29330#0 (OLS) Automatic sequence to set the alarm judge value of turbo blower oil temperature sensor Parameter No.29331 Judge value of turbo 1 oil temperature alarm (VA1) Parameter No.29332 Judge value of turbo 2 oil temperature alarm (VA2) DGN. No.2505 TB1 OIL TEMP. SENSOR VOLTAGE DGN. No.2506 TB2 OIL TEMP. SENSOR VOLTAGE
Alarm No. 4107 Alarm message MIRROR NOT INSTALLED Sequence of alarm detecting SEQ2000 and after Sequence after alarm detecting SEQ2000
(1) Content In an oscillator in which a beam folding unit is installed, this alarm is issued if this unit is not attached with a mirror holder. This alarm is for prevention of unnecessary laser radiation to the outside of laser oscillator. (2) Condition of alarm When one condition of below is satisfied, alarm is issued. (a) When the beam folding unit is installed, DGN.No.962#(MA) becomes 0 by dis-mount of mirror, cable cutting and failure of micro switch (b) When the beam folding unit is not installed, if the connector CN219#A1-#A3 does not short-circuited, DGN NO.962#3(MA) becomes 0 (3) Investigation and measure
No. 1 2 Cause of trouble Confirmation of mirror installation Solution Check the correct installing of mirror on the beam folding unit. Check if the cable is securely connected to connector of beam folding unit and connector CN219 of interface PCB. If not, reattach Cable connection abnormal the cable. Even if the beam folding unit is not installed, the CN219 of interface PCB should be connected by short circuit connector. Miss-treatment of CN219 on interface When beam folding unit is not installed, check if it between PCB CN219#A1 and #A3 on interface PCB is short-circuited. When micro switch is executed on and off, if terminals of micro Anomaly of micro switch switch is always open, micro switch is abnormal. Replace beam folding sensor unit. Check that connection between micro switch and CN219. If it is Cutting of cable abnormal, replace beam folding sensor unit. Anomaly of interface PCB If above items have no problem, replace interface PCB.
3 4 5 6
(4) Parameters and data DGN. No.962#3 (MA)

Alarm No. 4108
External Mirror
Sequence of alarm detecting During QPS to LSTR (SEQ7800) Sequence after alarm detecting SEQ2000
Alarm message QPS DISCHARGING
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(1) Content This alarm is issued if discharge doesnt light when the state of QPS(Quick Power Saving) is released. (2) Condition of alarm When one condition of below is satisfied, alarm is issued. (a) When the main discharge lighting judgment value which measured in sequence of the quick power saving mode off is 0 or less, this alarm is issued. (b) When the number that RFV is measured in sequence of the quick power saving mode off is bigger than setting of parameter No.29410, this alarm is issued. (3) Investigation and measure
No. 1 2 Cause of trouble Invalid parameter setting There are problems in the vacuum system of the oscillator, and discharge doesnt light easily. Solution Check parameters Nos. 29406, 29407, 29408, 29409 and 29410. Remove external factor of gas leak, water leak, temperature of cooling water and gas composition. When vacuum system is opened to atmosphere, do aging enough.
(4) Parameters and data Parameter No.29406 Parameter No.29407 Parameter No.29408 Parameter No.29409 Parameter No.29410
Alarm No. 4115
Bias command initial value Step time of bias command Step value of bias command Discharge judge value Upper limit of discharge starting detection frequency
Alarm message BLOWER PARAMETER
(1) Content This alarm issued if the number of turbo blower is not set correctly. (2) When parameter No.15003#6(TR1) is 0, if DGN No.962#4(OH2) becomes 1, it is judged as failure of number of turbo blower, and then, this alarm is issued. (3) Investigation and measure
No. 1 Cause of trouble Invalid parameter setting Solution Set the correct value to parameter No.15003#6(TR1)
(4) Parameters and data Parameter No.15003#6(TR1) DGN.No.962#4(OH2)

Alarm No. 4116 Alarm message BLOWER OIL TIM LIMIT
Number of turbo blower Turbo motor winding temperature 2

(1) Content and condition of alarm When the working time exceeds setting time (4000 hours) by 500 hour in maintenance screen, this alarm is issued.
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(2) Investigation and measure
No. 1 Cause of trouble Solution
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ACT TIME of BLOWER OIL exceeds Exchange the turbo blower oil, display Operating Time Screen, and SET TIME (4000 hours) by 500 hours set 0 at the ACT TIME of BLOWER OIL. Then push the reset key
(3) Parameters and data Parameter No.15160#2 (OAL)
Time limit of Turbo blower oil exchange
NOTE 1 When alarm is not released, it is impossible to restart. 2 When parameter No.15160#2(OAL) is 0, the alarm is not monitored. 3 SET TIME in Operation Time Screen of Laser Maintenance Screen Function is 0, the alarm is not monitored.
Alarm No. 4118 Alarm message MCC ERROR Sequence of alarm detecting SEQ1500 Sequence after alarm detecting SEQ1000
(1) Content This alarm is issued when the contact of MCC for laser power supply is closed by the deposit in RUN ON. (2) Condition of alarm When the contactor is closed at SEQ1500, DGN.No.960#2(MCE) becomes 0, and then, this alarm is issued. (3) Investigation and measure
No. 1 2 Cause of trouble Deposit of MCC Cut the cable or contact failure Solution Replace MCC. 1) Check the connection of the cable between CNL1 on interface PCB and machine, and if this cable is not cut. If it has failure, replace the cable. 2) Check the connection of the cable between CN239 on interface PCB and CN240 on safety circuit PCB, and if this cable is not cut. If it has failure, replace the cable. 3) Check the connection of the cable between CN245#1,#3 on safety circuit PCB and assistant contact of MCC for each laser power supply, and if this cable is not cut. If it has failure, replace the cable. Check if DC24V is added to assistant contact of MCC for each laser power supply. If it is not so, replace the safety circuit PCB. If there are no problem on above items, and if DGN.No.960#2(MCE)=0 at SEQ1500, replace the interface PCB.
3 4
Anomaly of Safety circuit PCB Anomaly of Interface PCB
(4) Parameters and data DGN.No.960#2(MCE)

Alarm No. 4119 Alarm message A/D CONVERTER4
MCC welding detector signal

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(1) Content and condition of alarm This alarm is issued when the A/D converter on the Interface PCB does not return the conversion completion signal in the specified time after the start of conversion. The A/D converter is designed to read gas supply pressure, air pressure, cooling water flow, turbo oil level and inverter current signal.. (2) Investigation and measure
No. 1 2 3 4 5 6 Cause of trouble Short circuit of DC24V line on machine side Breaker trip Short circuit of DC24V between CNC and laser oscillator Fuse blowing Failure of I/O PCB Anomaly of Interface PCB Solution On machine side, check if there is failure of PCB which generate DC24Vk or there is short circuit on cable for DC24V Check if the breaker for DC24V trips on machine side. Check if DC24V between CNC and oscillator short-circuits. Replace the fuse. Replace I/O PCB. Replace the Interface PCB. Sequence of alarm detecting SEQ2000 and after Sequence after alarm detecting SEQ2000
Alarm No. 4120
Alarm message EXT,BEAM FOLDING MIRROR OH
(1) Content In an oscillator in which a beam folding unit is installed, this alarm is issued when the temperature of the beam folding mirror exceeds a preset maximum. This alarm is for prevention of unnecessary laser radiation to the outside of laser oscillator. (2) Condition of alarm When one condition of below is satisfied, alarm is issued. (a) When the beam folding unit is installed, if the temperature switch on beam folding unit detects that it is bigger than 90 , if cable is cut, or if temperature switch is failure, DGN NO.962#2(MT) becomes 0 (b) When the beam folding unit is not installed, if contact #2-#3 on connector CN219 of interface PCB is not short-circuited, DGN NO.962#2(MT) becomes 0 (3) Investigation and measure
No. 1 Cause of trouble Solution Contamination on the surface of the Clean the beam folding mirror. If this alarm recurs after the beam beam folding mirror folding mirror is cleaned, replace the mirror. Check if the cable is securely connected to connector of beam folding unit and connector CN219 of interface PCB. If not, reattach the cable. Cable connection abnormal Even if the beam folding unit is not installed, the CN219 of interface PCB should be connected by short circuit connector. Miss-treatment of CN219 on When beam folding unit is not installed, check if it between CN219#B1 interface PCB and #B3 on interface PCB is short-circuited. Check if there is water jam in the water tube between distribution unit Shortage of water flow and turbo blower. . If it so, replace water tube. Temperature switch acts when temperature is higher than specified Anomaly of temperature switch one (90). If it acts by lower, replace beam folding sensor unit. Check that connection between temperature switch and CN219. If it is Cutting of cable abnormal, replace beam folding sensor unit. Anomaly of interface PCB If above items have no problem, replace interface PCB.
3 4 5 6 7
(4) Parameters and data DGN. No.962#2 (MT)
Mirror Temperature
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Alarm No. 4121
Alarm message CHILLER WATER FLOW-1
(1) Content This alarm is issued when the cooling water shortage takes place. (2) Condition of alarm (DGN No.2500) < (Flow rate of alarm setting) (3) Investigation and measure
No. 1 Cause of trouble Invalid setting of parameter Solution Check parameters NO.29340, No.29341, No.29342 1) 2 Shortage of cooling water 2) Decline of water flow due to choke of water piping cause. Therefore, Clean the piping. Check that the separation between the outside optical system and the laser oscillator is normal. Then adjust the water flow rate so that normal flow rate is supplied to the laser oscillator.
3 4 5
Anomaly of sensor cable Anomaly of adjustment of flow sensor unit Water jam in flow sensor unit or anomaly of it
Check the connection of each cable. Execute adjustment of flow sensor unit according to subsection 5.10.3. If there is water jam in flow sensor, remove it. If alarm is issued after this treatment, replace flow sensor unit.
(4) Parameters and data Parameter No.29340 WTR FLW 1 COE.A Parameter No.29341 WTR FLW 1 OFST B Parameter No.29342 WTR FLW 1 ALARM DGN.No.2500 WATER FLOW RATE 1
Alarm No. 4122 Alarm message CHILLER WATER FLOW-2 Sequence of alarm detecting SEQ1500 and after Sequence after alarm detecting SEQ1000
(1) Content This alarm is issued when the cooling water shortage takes place. (2) Condition of alarm (DGN No.2501) < (Flow rate of alarm setting) (3) Investigation and measure
No. 1 Cause of trouble Invalid setting of parameter Solution Check parameters NO.29343, No.29344, No.29345 1) Decline of water flow due to choke of water piping cause. Therefore, Clean the piping. 2) Check that the separation between the outside optical system and the laser oscillator is normal. Then adjust the water flow rate so that normal flow rate is supplied to the laser oscillator. Check the connection of each cable.
Shortage of cooling water
3 4
Anomaly of sensor cable Anomaly of adjustment of flow Execute adjustment of flow sensor unit according to subsection 5.10.3. sensor unit
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No. 5
Water jam in flow sensor unit or If there is water jam in flow sensor, remove it. If alarm is issued after this anomaly of it treatment, replace flow sensor unit.
(4) Parameters and data Parameter No.29343 WTR FLW 2 COE.A Parameter No.29344 WTR FLW 2 OFST B Parameter No.29345 WTR FLW 2 ALARM DGN.No.2500 WATER FLOW RATE 2
Alarm No. 4125 Alarm message LASER GAS SPEC/MIX Sequence of alarm detecting SEQ2600 and after Sequence after alarm detecting SEQ1000
(1) Content The composition(mixture) of laser gas is not correct for set processing mode. (2) Condition of alarm When the actual gas pressure reaches to value of parameter No.29046 in gas pressure control, if DCI (DGN.No.926 to No.940) is bigger than value of parameter No.29049, this alarm is issued. If parameter No.29046, No.29047 or No.15008#5(DCW) is zero, this alarm is not detected. (3) Investigation and measure
No. 1 Cause of trouble Invalid setting of parameter Solution Check parameters NO.15008#5(DCW), No.29046, No.29047. Un-specified laser gas is below: 1) The composition in gas cylinder is different. 2) The actual composition ratio is different from the one described Use of un-specified laser gas on laser gas cylinder. In this case, replace to specified laser gas. Check the external gas piping and leak rate, and treat it according to Checking external gas leak subsection 2.3.2 Check that the cooling water temperature is within the range from 25 to 30C. Invalid setting of water temperature of When the actual water temperature is higher than the temperature chiller, or anomaly of chiller setting of chiller, it is possible that chiller is failure. Call the chiller maker to fix. 1) Check if any joints in the gas circulating system are loose. If a loose joint is found, tighten the joint firmly. 2) Check if any components of the gas circulating system are cracked. If a cracked component is found, replace that component. 3) Check that the discharge tubes are free from any hole or crack and that the O-rings are not degraded. If a cracked or damaged Gas leak in the oscillator component is found, replace it. 4) Check if trigger electrode or O-rings of circulating system is degraded. If it is degraded, replace it. 5) Check if the mirrors are damaged. If it is damaged, replace it. 6) Check if gas tube and gas ferrule is damaged. If it is damaged, replace it.
(4) Parameters and data Parameter No.15008#5 (DCW) Parameter No.29046 Parameter No..29047
Power calibration In-tube pressure to check gas spec. DCI maximum value to check gas spec.
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4.TROUBLESHOOTING
Processing mode change function
Alarm No. 4127 Alarm message WARM UP ERROR Sequence of alarm detecting SEQ2600 and after
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(1) Content In internal discharge extension of calibration preparation 2C, when the cooling water temperature is less than 20 after executing of warm-up sequence for specified time, this alarm is issued. (2) Condition of alarm When the number of internal discharge extension of calibration preparation 2C exceeds parameter No. 29524, if cooling water temperature is less than 20, DGN.No.961#1(CAT) becomes 0, and then, this alarm is issued. Calibration preparation 2C is one of the warm-up sequence, which is automatically executed in laser start-up. (3) Investigation and measure
No. 1 2 Cause of trouble Invalid setting of water temperature of chiller Anomaly of chiller Solution Check that the cooling water temperature is within the range from 25 to 30C. When the actual water temperature is different from the temperature setting of chiller, it is possible that chiller is failure. Call the chiller maker to fix. Check if cables between low temperature sensor and interface PCB is connected certainly, if it is not so, connect it certainly. Also, check if cable is cut. When water temperature is higher than 20, if resistance of low temperature sensor exceeds 13K ohm, low temperature sensor is faulty, so replace it. If above items have no problem, replace interface PCB.
Cut the cable or contact failure
4 5
Anomaly of low temperature sensor Anomaly of interface PCB
(4) Parameters and data DGN. No. 961 #1 (CAT)

Alarm No. 4128
Cooling water temperature

Sequence of alarm detecting SEQ5100 Sequence after alarm detecting SEQ1000
Alarm message GAS LEAK RATE EXCESS
(1) Content This alarm is issued if the rise in the sampled gas pressure is bigger than leak judge value on automatic leak check function. (2) Condition of alarm (DGN.No.957) (DGN.No.954) > (Parameter No.15156) (3) Investigation and measure
No. 1 Cause of trouble Invalid parameter setting Solution Check parameter No.15156.
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Cause of trouble Solution 1) Check if any joints in the gas circulating system are loose. If a loose joint is found, tighten the joint firmly. 2) Check if any components of the gas circulating system are cracked. If a cracked component is found, replace that component. 3) Check that the discharge tubes are free from any hole or crack and that the O-rings are not degraded. If a cracked or damaged component is found, replace it. 4) Check if trigger electrode or O-rings of circulating system is degraded. If it is degraded, replace it. 5) Check if the mirrors are damaged. If it is damaged, replace it. 6) Check if gas tube and gas ferrule is damaged. If it is damaged, replace it.
No.
(4) Parameters and data Parameter No.15156 DGN. No.954 957 Automatic Leak Check Function
Alarm No. 4129 Alarm message
Leak judge value Negative pressure leak check
Sequence of alarm detecting SEQ3000
SHUTTER OPEN IN DISCHARGE
(1) Content This alarm is issued if the shutter opened during the internal discharge. (2) Condition of alarm When shutter has opened in internal discharge command by soft-key [DISC.2] on laser tuning screen, this alarm is issued. (3) Investigation and measure
No. 1 Cause of trouble Failure of interface PCB Solution Check if DC24V is added to rotary solenoid of shutter unit. If DC24V is always added, interface has the failure. Replace interface PCB.
(4) Parameters and data Maintenance screen

Alarm No. 4132 Alarm message PARAMETER WAS CHANGED Sequence of alarm detecting SEQ2000 and after Sequence after alarm detecting SEQ2000
(1) Content When parameters about discharge are changed, or processing mode is changed in power saving mode, this alarm is issued. (2) Condition of alarm When one condition of below is satisfied, alarm is issued. (a) After SEQ2000, when parameter No.15223, No.15242, No.29022, No.29023, No.29300 to No.29316 are changed, this alarm is issued. (b) In SEQ6000 to SEQ7800, when processing mode is changed, this alarm is issued.
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4.TROUBLESHOOTING
(3) Investigation and measure
No. 1 Cause of trouble Changing parameters Solution
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Before turning on the discharge start signal (HV ON), press the <RESET> key to release this alarm.
(4) Parameters and data Parameter No.15027 Power supply selection Parameter No.15223, No.29022 Bias command Parameters No.15242, No.29023 Tube pressure for oscillation Parameter No.29300#0 (PAJ) Laser power supply adjustment mode Parameters No.29301, 29303, 29305, 29307, 29309, 29311, 29313, 29315 Laser power supply offset Parameters No.29302, 29304, 29306, 29308, 29310, 29312, 29314, 29316 Laser power supply gain
Alarm No. 4135 Alarm message PULSE PFB DATA ERROR Sequence of alarm detecting SEQ1000 Sequence after alarm detecting SEQ1000
(1) Content Reading the table data of the pulse power feed back from the memory card or the reader puncher interface was stopped because of the data error. (2) Condition of alarm (3) Investigation and measure
No. 1 Cause of trouble Invalid parameter setting Solution Check parameter No.29010, No.29011, No.29012.
(4) Parameters and data Parameter No.29000#0(PFB) Pulse power feedback Parameter No.29010 Laser model applied to data table Parameter No.29011 Model code Parameter No.29012 Edition
Alarm No. 4400 Alarm message EVACUATION IMPOSSIBLE Sequence of alarm detecting SEQ5100
0: disable 1:enable
(1) Content During negative pressure leak check, or after positive pressure leak check finished, if the actual gas pressure is bigger than the value of parameter No.15242 in all valve close state, this alarm is issued. (2) Condition of alarm When F224#3(AVCL)=1, if (DGN No.905) > (Parameter No.15242), this alarm is issued. (3) Investigation and measure
No. 1 Cause of trouble Invalid parameter setting Check parameter No.15156. Solution
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Cause of trouble Solution 1) Check if any joints in the gas circulating system are loose. If a loose joint is found, tighten the joint firmly. 2) Check if any components of the gas circulating system are cracked. If a cracked component is found, replace that component. 3) Check that the discharge tubes are free from any hole or crack and that the O-rings are not degraded. If a cracked or damaged component is found, replace it. 4) Check if trigger electrode or O-rings of circulating system is degraded. If it is degraded, replace it. 5) Check if the mirrors are damaged. If it is damaged, replace it. 6) Check if gas tube and gas ferrule is damaged. If it is damaged, replace it. When exhausting is executed and DGN.No.905 does not fall, it is possible that failure of output voltage of gas pressure sensor (Example: always 10V). Check it by LTP check terminal on interface PCB, if it is abnormal, replace it. If above items have no problem, execute negative leak check removing connector CP85 and CN52 on gas control PCB. At this time, if alarm is issued, gas supply valve (V1) or purge valve (V2) is faulty. So, replace charge unit.
No.
Anomaly of gas pressure sensor
Anomaly of valves on charge unit
(4) Parameters and data Parameter No.15155 Parameter No.15242 DGN.No.905 F224#3(AVCL)
Alarm No. 4401
Evacuation time in Leak check sequence Tube pressure for oscillation Actual gas pressure Valve close signal 0:Normal state 1: All valve closed state
Alarm message POSITIVE PRES. LEAKAGE
(1) Content If leak rate in positive pressure leak check exceed the threshold, this alarm is issued. (2) Condition of alarm During positive pressure leak check, if No.29353), this alarm is issued. (3) Investigation and measure
No. 1 Cause of trouble Invalid parameter setting Solution Check parameter No.29353. 1) Check if any joints in the gas circulating system are loose. If a loose joint is found, tighten the joint firmly. 2) Check if any components of the gas circulating system are cracked. If a cracked component is found, replace that component. 3) Check that the discharge tubes are free from any hole or crack and that the O-rings are not degraded. If a cracked or damaged component is found, replace it. 4) Check if trigger electrode or O-rings of circulating system is degraded. If it is degraded, replace it. 5) Check if the mirrors are damaged. If it is damaged, replace it. 6) Check if gas tube and gas ferrule is damaged. If it is damaged, replace it.
(DGN No.2516) (DGN No.2513) > (Parameter
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4.TROUBLESHOOTING
No. 3 Cause of trouble Anomaly of valves on charge unit Solution
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If above items have no problem, remove connector CP85 and CN52 on gas control PCB during executing positive leak check At this time, if alarm is issued, gas supply valve (V1) or purge valve (V2) is faulty. So, replace charge unit.
(4) Parameters and data Parameter No.29352 Positive pressure leak judge time Parameter No.29353 Positive pressure leak judge value DGN. No.2502 laser tube pressure DGN. No.2517 to 2520 Positive pressure during leak check Automatic Leak Check Function
Alarm No. 4402 Alarm message PRESSURIZING IMPOSSIBLE Sequence of alarm detecting SEQ5300 Sequence after alarm detecting SEQ1000
(1) Content After actual gas pressure arrives atmospheric pressure in positive pressure leak check, if the time, which arrives at positive pressure setting, exceeds positive pressure time limit, this alarm is issued. (2) Condition of alarm In SEQ5300, if (Time from atmospheric pressure to positive pressure setting) > (Parameter No.29351), this alarm is issued. (3) Investigation and measure
No. 1 Cause of trouble Invalid parameter setting Solution Check parameter No.29351. 1) Check if any joints in the gas circulating system are loose. If a loose joint is found, tighten the joint firmly. 2) Check if any components of the gas circulating system are cracked. If a cracked component is found, replace that component. 3) Check that the discharge tubes are free from any hole or crack and that the O-rings are not degraded. If a cracked or damaged component is found, replace it. 4) Check if trigger electrode or O-rings of circulating system is degraded. If it is degraded, replace it. 5) Check if the mirrors are damaged. If it is damaged, replace it. 6) Check if gas tube and gas ferrule is damaged. If it is damaged, replace it. If above items have no problem, purge valve (V2) is faulty. So, replace charge unit.
Anomaly of valves on charge unit
(4) Parameters and data Parameter No.29350 Parameter No.29351 DGN. No.2502
Alarm No. 4403
Positive pressure setting Positive pressure time limit laser tube pressure
Alarm message POSITIVE PRES. LIMIT
(1) Content If the tube pressure exceeds the threshold (60kPa) in positive pressure leak check, this alarm is issued.
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(2) Condition of alarm (DGN No.2502) > 60 (3) Investigation and measure
No. 1 Cause of trouble Anomaly of valves on charge unit Solution Remove connector CP85 and CN52 on gas control PCB during executing positive leak check At this time, if alarm is issued, gas supply valve (V1) or purge valve (V2) is faulty. So, replace charge unit.
(4) Parameters and data DGN. No.2502

Alarm No. 4404
laser tube pressure

Alarm message Sequence of alarm detecting During laser power supply automatic adjustment function Sequence after alarm detecting SEQ2000
ABNORMAL LASER PSU ADJ.
(1) Content and condition of alarm This alarm is issued when laser power supply automatic adjustment function is did not end normally. (2) Investigation and measure
No. Cause of trouble Anomalous setting of laser power supply Solution When number of DGN.No2509 is 3,4,5,7,9,check for setting of VR11 and VR13 of laser power supply. If setting of laser power supply is different, adjust it again. Thereafter, when you start up the oscillator again, the values of parameters No. 29301 to 29316 are set before laser power supply automatic adjustment function. When number of DGN.No2509 is 2 or 8,check for the pressure of the laser gas is steady at the parameters No. 15242. Thereafter, when you start up the oscillator again, the values of parameters No. 29301 to 29316 are set before laser power supply automatic adjustment function. Check whether the values of parameters No. 29361, 29362, 29363, 29364, 29365, 29366, 29367, 29368, 29369, 29370, 29371, 29372, 29375, 29376, 29377 and 29378 are set as indicated in the attached parameter table. If a different value is set, set the value specified in the datasheets.
The pressure of the laser gas is not steady.
Invalid parameter setting
(4) Parameters and data Parameter No.29301 to 29316 Output command parameters to laser power supply Parameter No.29360 Laser power supply automatic adjustment 0:not execute 1:execute Parameter No.29361 to 29372, 29375 to 29378 Parameters for laser power supply automatic adjustment Parameter No.15242 Setting of the pressure in the tube during oscillation DGN.No.905 Actual gas pressure DGN.No.2509 Laser power supply adjustment status. Laser power supply automatic adjustment function
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4.3
4.3.1
MAJOR FAULTS
Laser Output Just after Switch On Is Low
(1) The cooling water temperature is not normal, although the chiller unit is operating. This phenomenon may be caused when the ambient temperature is low. In such a case, the specified temperature will be set in five to ten minutes after the unit starts. So, perform activation again. (2) Slight leakage exists in the tube between laser oscillator and gas cylinder. If the laser output in the first run after a long halt is low and becomes normal after the second run, slight leakage may be present in the tube between the laser oscillator and gas cylinder. (See Subsection 3.3.2.) Check for leakage in the gas piping system, for looseness in joints, and for any crack in the tube. If any problem exists, eliminate the leakage, additionally tighten the joint, or replace the tube.
4.3.2
Circuit Breaker for Cooling Fan, Solenoid Valve, and 24V Power Supply Trips
If a load short-circuits such as a burn-in of a fan motor coil occurs in the cooling fan, solenoid valve, or 24V power supply, the circuit breaker (NBK1) trips. Replace the component in which the load short-circuit occurred, and check the cabling to the component. Replace a cable if it is abnormal.
4.3.3
No. 1
Motor starter of Exhaust Pump Trips Thermally

Cause of trouble Anomalous setting of thermal relay Solution Check if the thermal setting of the electromagnetic contactor or motor starter for the exhaust pump is made correctly. If not so, correct it. (Setting value B= 5.5A) 1) Check if the room temperature is lower than 5 degree. If so, raise it. 2) Check the deterioration of oil, which causes the viscosity increase. If so, change it. The normal direction is counterclockwise when seen from the side of motor fan. If not so, correct it at the terminal. During pump operation, check the oil level through the oil check window. If the oil level is between L and H, the oil level is regarded as normal. Use the designated oil. Replace it. Fix it tightly. Replace the exhaust pump.
Possible causes are listed below. Take appropriate action.
Too high viscosity of oil
3 4 5 6 7 8
Reverse rotation direction of pump Excessive oil Undesignated oil is used. Exhaust filter choked. Loosened terminal of connecting cable Vane damaged
4.3.4
No. 1
Main Breaker Trips

Cause of trouble Damaged circuit breaker Solution Check for loose terminals. If the circuit breaker is burned black, replace it. Check whether the power magnetics cabinet in the oscillator is abnormal. Turn off the circuit breakers connected to the power supply and inverter sequentially to determine the unit that caused excessive current.
Beyond rated current
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Cause of trouble Solution When the circuit breaker has an electric leakage breaker function, there is an electric leakage in the oscillator. Locate the leakage, such as the power supply, turbo blower, or fan, and replace the faulty component.
No. 3
Electric leakage
4.3.5
No. 1
Excessive Laser Gas Consumption


Ascertain the following. Gas leakage between gas cylinder and 1) Anomalous mounting of regulator. 2) Anomalous connection between tube and regulator. oscillator 3) Anomalous connection of gas inlet fitting of oscillator. Make adjustments according to the adjustment method described Anomalous adjustment of gas controller in Chapter 5. When there is no gas leakage between the gas cylinder and oscillator and the laser gas consumption is still excessive even after the adjustment valve of the gas controller is completely Turbo blower abnormal closed, the turbo blower may be faulty. Replace the turbo blower.
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5.UNITS
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UNITS
This chapter explains the units inside the oscillator. The following provides information that you should bear in mind when performing replacement work.
WARNING 1 Before replacing a unit, be sure to turn off the main power supply to the control unit. In addition, perform replacement work in a safe place where there is no machine operating nearby. 2 When handling a heavy component or unit, use a support device such as a crane not to apply excessive load to the maintenance personnel. Incorrect handling can results in serious injury to the personnel. CAUTION Note that components inside the oscillator heat up. If you have to touch a heated component, wear heat-proof gloves and so forth to protect you.
Before starting work, read "SAFETY PRECAUTIONS" in this manual. Chapter 5, UNITS consists of the following contents: 5.1 UNIT CONFIGURATION ...............................................................................................................113 5.2 LASER POWER SUPPLY UNIT.....................................................................................................113 5.3 MATCHING BOX............................................................................................................................126 5.4 DISCHARGE TUBE ........................................................................................................................126 5.5 TRIGGER ELECTRODE .................................................................................................................128 5.6 TURBO BLOWER ...........................................................................................................................129 5.7 INVERTER .......................................................................................................................................131 5.8 EXHAUST PUMP ............................................................................................................................138 5.9 GAS CONTROLLER .......................................................................................................................138 5.10 THE WATER DISTRIBUTION UNIT ............................................................................................144 5.11 SHUTTER UNIT ..............................................................................................................................148 5.12 BEAM ABSORBER .........................................................................................................................150 5.13 GUIDE LASER (SEMICONDUCTOR LASER) .............................................................................151 5.14 FAN...................................................................................................................................................152 5.15 POWER SENSOR ............................................................................................................................154 5.16 THE DEW SENSOR.........................................................................................................................155 5.17 PCB ...................................................................................................................................................155 5.18 OIL MIST DECOMPOSING ELEMENT ........................................................................................157 5.19 GAS DUST COLLECTION UNIT...................................................................................................159 5.20 LOW TEMPERATURE SENSOR UNIT.........................................................................................159 5.21 OXYGEN SENSOR UNIT ...............................................................................................................160 5.22 WARNING LIGHT ..........................................................................................................................161 5.23 GAS FITTING AND WATER FITTING .........................................................................................162 5.24 ALIGNMENT OF THE RESONATOR ...........................................................................................166 5.25 POWER CALIBRATION METHOD .............................................................................................175 5.26 ALIGNMENT OF THE BEAM FOLDING UNIT (C2000i-C, C4000i-C SHORT OPTICAL PATH LENGTH TYPE) ...............................................175 5.27 HEAT EXCHANGER.......................................................................................................................176
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5.UNITS
5.1
5.1.1
UNIT CONFIGURATION
The input unit consists of power control cabinet, safety circuit PCB, and 24V power supply.
C2000i-C INPUT UNIT

QF1 QF2 QF3 QF4 KM1 KM2 KM3 QF6 KM5 Z110 QF5 KM4
Safety circuit PCB
To Laser PSU No.1 To Laser PSU No.2 To Inverter To Exhaust pump
To Fan To Gas controller To interface PCB
24V PSU
QF1
QF1: A60L-0001-0505#B150BEJ1 QF2, QF3: A60L-0001-0464#A050 QF4: A60L-0001-0464#A040 QF5: A60L-0001-0464#B010 QF6: A60L-0001-0493#6P3 KM1-KM3: A58L-0001-0539#BSN38B KM4,KM5: A58L-0001-0540#BSN10BB Assistance contactor for KM1,KM2: A58L-0001-0539#BAX202 Assistance contactor for QF6: A60L-0001-0493#W1A Z110: A04B-0800-D009 24V PSU: A20B-1005-0124 Safety circuit PCB: A16B-1300-0300 Thermal setting of QF6: 5.5A
KM1 KM2 KM3 KM4 KM5
Safety circuit PCB
24V PSU
Z110 QF2 QF3 QF4 QF5 QF6
Fig.5.1.1(a) The structure of INPUT UNIT (C2000i-C
Standard)
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5.UNITS
QF1 QF2 QF3 QF4 KM1 KM2 KM3 QF6 KM5 Z110 QF5 KM4 Z102 To Fan To Gas controller To Laser PSU No.1 To Laser PSU No.2 To Inverter To Exhaust pump
B-70475EN/01
Safety circuit PCB
QF7
TC1
QF8 To Interface PCB
24V PSU
QF1: A60L-0001-0512#D150EJ3
QF1
Safety circuit PCB
QF2, QF3: A60L-0001-0464#A050 QF4: A60L-0001-0464#A040 QF5: A60L-0001-0464#B010 QF6: A60L-0001-0493#6P3 QF7: A60L-0001-0389#FT QF8: A60L-0001-0314#GBA KM1-KM3: A58L-0001-0539#BSN38B KM4,KM5: A58L-0001-0540#BSN10BB Assistance contactor for KM1,KM2: A58L-0001-0539#BAX202 Assistance contactor for QF6: A60L-0001-0493#W1A Z110: A04B-0800-D009 Z102: A70L-0001-0064#10 TC1: A44L-0001-0162 24V PSU: A20B-1005-0124 Safety circuit PCB: A16B-1300-0300
24V PSU
Z110 QF2 QF3 QF4 QF5 QF6 QF7 QF8
KM1
KM2
KM3
KM4
KM5
Z102
TC1
Thermal setting of QF6: Thermal setting of QF7:
5.5A 1.2A
Fig.5.1.1(b) The structure of INPUT UNIT (C2000i-C
CE Marking)
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5.UNITS
5.1.2
C4000i-C INPUT UNIT

QF1 QF2 QF3 QF4 QF5 KM1 KM2 KM3 KM4 Z110 QF6 QF8 KM5 QF7 KM6
Safety circuit PCB
To Laser PSU No.1 To Laser PSU No.2 To Laser PSU No.3 To Laser PSU No.4
KM7
To Exhaust pump To Inverter To Fan To Gas controller To Interface PCB
24V PSU
QF1: A60L-0001-0508#B225BEJ1 QF2-QF5: A60L-0001-0464#A050 QF6: A60L-0001-0464#A040

QF1
Safety circuit PCB
QF7: A60L-0001-0464#B015 QF8: A60L-0001-0493#6P3 KM1-KM5: A58L-0001-0539#BSN38B KM6-KM7:A58L-0001-0540#BSN10BB

24V PSU
Assistance contactor for KM1-KM4: A58L-0001-0539#BAX202 Assistance contactor for QF8:

Z110
A60L-0001-0493#W1A Z110: A04B-0800-D009 24V PSU: A20B-1005-0124 Safety circuit PCB: A16B-1300-0300 Thermal setting of QF8: 5.5A
QF2
QF3
QF4
QF5
QF6
QF7 QF8
KM1
KM2
KM3
KM4
KM5
KM6 KM7
Standard)
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5.UNITS
QF1 QF2 QF3 QF4 QF5 KM1 KM2 KM3 KM4 Z110 QF6 QF8 KM5 QF7 KM6
Safery circuit PCB
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To Laser PSU No.1 To Laser PSU No.2 To Laser PSU No.3 To Laser PSU No.4
KM7
To Exhaust pump To Inverter To Fan To Gas controller Transformer unit QF9 TC1 QF10
24V PSU
To Interface PCB
QF1: A60L-0001-0512#D225EJ3 QF2-QF5: A60L-0001-0464#A050 QF6: A60L-0001-0464#A040

QF1
Safety circuit PCB
QF7: A60L-0001-0464#B015 QF8: A60L-0001-0493#6P3 QF9: A60L-0001-0389#FT QF10: A60L-0001-0314#GBA KM1-KM5: A58L-0001-0539#BSN38B
24V PSU
KM6-KM7:A58L-0001-0540#BSN10BB Assistance contactor for KM1-KM4: A58L-0001-0539#BAX202 Assistance contactor for QF8: A60L-0001-0493#W1A Z110: A04B-0800-D009 24V PSU: A20B-1005-0124 Safety circuit PCB: A16B-1300-0300
Z110 QF2 QF3 QF4 QF5 QF6 QF7 QF8
KM1
KM2
KM3
KM4
KM5
KM6
KM7
Thermal setting of QF8:
5.5A
CE Marking)
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TC1
TC1: A44L-0001-0162 QF9: A60L-0001-0389#FT QF10: A60L-0001-0314#GBA Thermal setting of QF9: 1.2A
QF9
QF10
Fig.5.1.2(c) The structure of Transformer unit (C4000i-C
CE Marking)
5.1.3
C6000i-C INPUT UNIT

QF1 QF2 QF3 QF4 QF5 QF6 QF7 QF8 KM1 KM2 KM3 KM4 KM5 KM6 KM7 QF10 KM8 Z110 QF9 KM9 Safety circuit PCB 24V PSU To Fan To Gas controller To Interface PCB To Laser PSU No.1 To Laser PSU No.2 To Laser PSU No.3 To Laser PSU No.4 To Laser PSU No.5 To Laser PSU No.6 To Inverter To Exhaust pump
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QF2 QF3 QF4 QF5 QF6 QF7 QF8 QF9
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QF1: A60L-0001-0494#B300AAA1 QF2-QF7: A60L-0001-0464#A050 QF8: A60L-0001-0425#K060 QF9: A60L-0001-0464#B015

QF1
QF10: A60L-0001-0493#6P3 KM1-KM7: A58L-0001-0539#BSN38B KM8, KM9:A58L-0001-0540#BSN10BB Assistance contactor for KM1-KM6: A58L-0001-0539#BAX202 Assistance contactor for QF10: A60L-0001-0493#W1A Z110: A04B-0800-D009 Thermal setting of QF10: 5.5A
KM1
KM2
KM3
KM4
KM5
KM6
KM7 QF10
Z110 KM8 KM9
Standard)
QF1
QF2 QF3 QF4 QF5 QF6 QF7 QF8
KM1 KM2 KM3 KM4 KM5 KM6 KM7 QF10 KM8 Z110
To Laser PSU No.1 To Laser PSU No.2 To Laser PSU No.3 To Laser PSU No.4 To Laser PSU No.5 To Laser PSU No.6 To Inverter To Exhaust pump
QF9
KM9 Safety circuit PCB
To Fan To Gas controller
QF11
TC1
QF12 To Interface PCB
24V PSU
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5.UNITS
QF4 QF5 QF6 QF7 QF8 QF9
QF2
QF3
QF1: A60L-0001-0494#B300AA1 QF2-QF7: A60L-0001-0464#A050 QF8: A60L-0001-0425#K060 QF9: A60L-0001-0464#B015

QF1
QF10: A60L-0001-0493#6P3 QF11: A60L-0001-0389#HT QF12: A60L-0001-0314#GCA KM1-KM7: A58L-0001-0539#BSN38B KM8, KM9:A58L-0001-0540#BSN10BB Assistance contactor for KM1-KM6: A58L-0001-0539#BAX202 Assistance contactor for QF10: A60L-0001-0493#W1A Z110: A04B-0800-D009 TC1: A44L-0001-0161 Thermal setting of QF10: 5.5A Thermal setting of QF11: 1.2A
KM1
KM2
KM3
KM4
KM5
KM6
KM7 QF10
Z110 QF12 QF11 KM8 KM9
TC1
CE Marking)
24V PSU:A20B-1005-0124 Safety circuit PCB: A16B-1300-0300

24V PSU
Safety circuit PCB
24V PSU
Fig.5.1.3(c) The structure of INPUT UNIT2 (C6000i-C
Standard, CE Marking)
5.1.4
5.1.4.1
(5) (6) (7) (8)
Replacement Method Breaker
Stop the laser oscillator with normal procedure, and turn off the main circuit breaker. Remove the cables connected to the breaker. Remove the breaker from the rail, pulling down the knob under the breaker with the screw drivers Install a new breaker on the rail with below procedure. (a) Insert the groove of the breaker to the rail seeing Fig.5.1.4.1. (b) Attach the groove of the breaker to the rail, pulling down the knob under the breaker with the screwdrivers. (9) Connect the removed cables in (2) to a new breaker.
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5.UNITS
Knob
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Groove
Pull down
(a) (b) Fig.5.1.4.1 Replacement of the breaker (c)
5.1.4.2
Motor starter
(1) Stop the laser oscillator with normal procedure, and turn off the main circuit breaker. (2) Remove the cables connected to the motor starter. (3) Remove the motor starter from the rail, pulling down the knob under the motor starter with the screw drivers (4) Install a new motor starter on the rail with below procedure (a) Insert the groove of the motor starter to the rail seeing Fig.5.1.4.2. (b) Attach the groove of the motor starter to the rail, pulling down the knob under the motor starter with the screwdrivers. (5) Connect the removed cables in (2) to a new motor starter.
Knob
Pull down
(a) (b)
Fig.5.1.4.2 Replacement of the motor starter
5.1.4.3
Magnetic contactor
(1) Stop the laser oscillator with normal procedure, and turn off the main circuit breaker. (2) Remove the cables connected to the magnetic contactor. (3) Remove the magnetic contactor from the rail, pulling down the knob under the magnetic contactor with the screw drivers (4) Install a new magnetic contactor on the rail with below procedure. (a) Insert the groove of the magnetic contactor to the rail seeing Fig.5.1.4.3. (b) Attach the groove of the magnetic contactor to the rail, pulling down the knob under the magnetic contactor with the screwdrivers. (5) Connect the removed cables in (2) to a new magnetic contactor.
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Knob
Pull down
(a) (b)
Fig.5.1.4.3 Replacement of the magnetic contactor
5.2
LASER POWER SUPPLY UNIT

A14B-0082-B211 C2000i-C, C4000i-C (Standard) C6000i-C (Standard) A14B-0032-B212 C4000i-C (CE Marking) C6000i-C (CE Marking)
Spec. No. of Laser power supply unit:
5.2.1
5.2.1.1
Replacement Method Replacing the power supply unit
(1) Turn off the power to the CNC, and turn off the main circuit breaker of the oscillator. Turn off the power to the chiller unit. (2) Remove the water fittings, and power and signal cables.
Water fitting
XT21 CP73 Ground
CP51
XT22
LED Water coupler (Plug): A97L-0201-0927#2P-N10
Water fitting
Bolts Water coupler (Socket): A97L-0201-0927#2S-N10
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(3) Remove the bolts for mounting the power supply unit, and pull out the power supply unit while sliding it right and left. (4) After replacing the power supply unit with a new one, tighten the mounting bolts, and attach the water fittings and the power and signal cables. When attaching the water fittings, loosen portion A shown in the figure, determine the orientation of the fittings, tighten portion A by your fingers, and then additionally tighten the portion by 60 with a wrench.
(5) Then, make power supply adjustments. (See Subsection 5.2.2.)
5.2.1.2
Replacing a high-speed diode
(1) Turn off the power to the CNC, and turn off the main circuit breaker of the oscillator. (2) Remove the water fittings, and power and signal cables. (3) Remove the mounting screws on the top plate of the laser power supply unit, and remove the top plate. (4) As shown in Fig. 5.2.1, you can see the two RF FET PCBs and the diode unit. (5) Check for a damaged element, and replace it. (a) Checking the high-speed diode Measure the resistance across the anode and cathode of the diode with a tester. If the resistance is several ohms, the diode is regarded as being damaged. (The resistance of a normal diode is several mega-ohms.) To measure the resistance of a diode, touch the positive probe of the tester to the cathode of the diode, and touch the negative probe to the anode. (b) Remove the damaged diode, and replace it. (6) After diode replacement, power supply adjustment is unnecessary.
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RF FET PCB 1: A20B-1007-0140 SD 4 D2 2 3 1
RF FET PCB2: A20B-1007-0150 SD
Diode unit D2 D1 2 4 1 3
Diode unit D1
Cathode K1 K2
Anode A1 A2
DS
Connector side
DS
High speed diode module:
STEPUP TRANS PCB: A20B-1008-0150 Fig. 5.2.1 Layout of diodes and RF FET PCBs
A50L-2001-0439
5.2.1.3
Replacing an RF FET PCB
(1) Turn off the power to the CNC, and turn off the main circuit breaker of the oscillator. (2) Remove the water fittings, and power and signal cables. (3) Remove the mounting screws on the top plate of the laser power supply unit, and remove the top plate. (4) As shown in Fig. 5.2.1, you can see the two RF FET PCBs and the diode unit. (5) Check for a damaged element, and replace it. (a) Checking an RF FET PCB Measure the resistance across check pins D and S shown in Fig. 5.2.1. If the resistance is several kilo-ohm, the PCB is regarded as being damaged. (The resistance of a normal RF FET PCB is several tens kilo-ohms to several mega-ohms.) (6) After PCB replacement, power supply adjustment is unnecessary.
5.2.2
Adjustment Method
Laser power supply is adjusted by laser power supply automatic adjustment function. The sequences of laser power supply automatic adjustment function consist of two steps (The base adjustment and The power supply output (DCW) adjustment). For the base adjustment, it finds the offset parameter of laser power supply where the trigger discharge is maintained for the discharge beginning. For the power supply output (DCW) adjustment, it finds the gain parameter of laser power supply where the power supply output (DCW) come to adjustment target value (parameter No.29374), when laser power command is parameter No.29373.
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5.2.2.1
Preparation
To adjust the laser power supply by the automatic adjustment function, the initial setting of VR11 for the base discharge adjustment and VR13 for he maximum power supply output adjustment are necessary beforehand. When the laser power supply is shipped, it is set usually. The laser power supply is adjusted according to the following procedures if not set.
(1) Prepare the following tools: (a) A cable to be connected to CN18 to measure RFI. (Cable specification: A04B-0800-K147) * See NOTE1 (b) Precise screwdriver for trimmer adjustments (c) Digital tester (2) Check that S2 jumper pin setting (setting of the VR13 adjustment range) is B201. (3) Check that S5 jumper pin setting (setting of the matching box temperature sensor) is USUAL. * The S2 and S5 settings are initialized at the shipment of the laser power supply (4) Connect the cable for measuring RFI to CN18. (5) Rewrite the following parameters: (After the end of adjustment, return the parameters to the original values.)
1 2 3 4 5 6 7 8 9 10 11 12
CNC parameters Parameter No.15000#4(CLB), parameter No.15201 (Output compensation disable) Parameter No.15000#3(BMO) Beam on only with beam off is valid Parameter No.15006#5(PCN) Rewrites the power calibration factor with 1024 when power calibration is not performed. Parameter No.15208 (Laser power feedback disable) Settings
0
1 0
0
Parameters No.15308
Parameters No.15207, 15210, 15212(Maximum output power clamp) Parameter No.15223 (Bias command value) Parameter No.15213 (Enhanced pulse disable) Parameter No.29000#0 (PFB) (Pulse power feedback control function is disable) Parameter No.29016#0 (CTA) (High power mode) Parameter No.29395#0 (PWC) (Laser power check disable) Parameter No. 29301,29303,29305,29307,29309,29311,29313,29315 Offset of Laser power supply Parameter No.29302,29304,29306,29308,29310,29312,29314,29316 Gain of Laser power supply
2850 32000 0 0
0 2048 1561
The offset and gain parameter change only the corresponding the laser power supply.
(6) Start up to the state of the base discharge of sequence 3000(LSTR). (7) Turn Trimmer VR11 of the corresponding laser power supply and adjust RFI to 700mA. (8) Perform internal discharge with the laser power command of parameter No.15308 and duty 100%. (9) Turn Trimmer VR13 of the corresponding laser power supply and adjust RFI to 1600mA. (10) Disconnect the cable.
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5.2.2.2
Perform laser power supply automatic adjustment
(1) Set the parameter in the following table. Sets parameter No.29360 to 1 in the adjusted power supply. For the power supply output (DCW) adjustment, the laser power command is set to parameter No.29373, and the target DCW set to parameter No.29374 (As for this parameter, the value of the data sheet is set usually). When DCW cannot be adjusted by the maximum power supply output by the situation of the discharge tubes and laser power supply, the setting can be arbitrarily changed, But DCW must not over the maximum power supply output in the following table.
CNC parameters C2000i-C C4000i-C C6000i-C
Parameter No.15000#4 (CLB) Parameter No.15008#6 (EGE) Parameter No.15223 Parameter No.15242 Parameter No.29395#0 (PWC) Parameter No.29360 Parameter No.29373 Parameter No.29374
0(Output compensation disable) 0(Automatic aging disable) 2850(Bias command) 920 1030 820 0(Laser power check disable) 1(Only the adjusted power supply) Parameter No.15308 Parameter No.15308 Parameter No.15307 8800W(Maximum power 8800W(Maximum power 7900W(Maximum power supply output) supply output) supply output)
DCW is adjusted from parameter No.29377 between parameter No.29378 for parameter No.29374 of the adjustment target DCW value.
(2) When turn on the discharge start signal (HV ON), the laser power supply automatic adjustment function is enable. This function end normally, and state of base discharge of laser sequence 3000. The progress of this function is displayed on DGN. No.2509 by the value from 1 to 10. The following tables show the state number from 1 to 10 and the relation of the operation content.
DGN.No.2509 ADJUSTMENT STATUS 1 2 3 4 5 6 7 8 9 10 Content of laser power supply automatic adjustment
Laser sequence 2000(LRDY) to sequence 3000(LSTR) Check the stability of the gas pressure before the base adjustment Measure the judgment value of the discharge beginning of the base adjustment Detect the discharge beginning state of the base adjustment Adjust the base discharge Prepare the adjustment of the power supply output Increase the power command gradually Warm-up and Check the stability of the gas pressure Adjust the power supply output End the laser power supply automatic adjustment function
(3) The parameter No.15000#4 (CLB), No.15008#6 (EGE), No.29395#0 (PWC) is returned to original value. For the parameter No.29360, it is written 0 by the automatic after this function ends.
5.2.2.3
Check
(1) Check trigger electrode discharge Turn off the discharge start signal (HV OFF), then set parameter No.15223 to 2650. Check that trigger electrode discharge in the base discharge state. (2) Pulse output test Set the parameter No.29000#0 (PFB) to 0, perform the pulse test internal discharge by outputting on the pulse test power command (power (Parameter No.15308), frequency 5 Hz and duty 5%) for 10 min.
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Check that no alarm is issued. If alarm is issued, there is possibility of the power supply adjustment mistake or the damage of the laser power supply unit. When it is necessary, the laser power supply is adjusted again.
NOTE 1 Measuring method of power supply monitor If the CNC monitor is located in a place distant from the oscillator, record and adjust the monitor voltage value on the CN17, CN18 connector for RFV, RFI, DCV, DCI monitoring on the power supply unit instead of the displayed on DGN.No.909 to 948. Use the conversion formula presented. (a) DCW(Power supply output)=DCIDCV DCI= (Voltage between DCI-N and DCI-P of CN17)5, DCV= (Voltage between DCV-N and DCV-P of CN17)30 (b) RFI= (Voltage between RFI-N and RFI-P of CN18)/2, RFV= (Voltage between RFV-N and RFV-P of CN18)1000 2 ALM.4132 processing When parameters No.15223, No.15242 and No.29301 to No.29316 is changed, the ALM.4132 is issued. Reset the alarm, and turn on the discharge start signal (HV ON). 3 ALM.4404 processing When ALM.4404 is issued, check DGN.No.2509. If this number is 2 or 4, check for the pressure of the laser gas is steady at the parameters No. 15242. If this number is 3,4,5,7,9, check for the parameters No.29301 to No.29316. This parameter is about 0 or 4095 due to set mistake of adjusting the base discharge with trimmer VR11 and adjusting the maximum power supply output with trimmer VR13. Adjust it again. Thereafter, when you start up the laser oscillator again after generating this alarm, the values of parameters No. 29301 to 29316 are set before laser power supply automatic adjustment function.
5.3
MATCHING BOX
A14B-0082-B328 A14B-0082-B326 A14B-0082-B331 A14B-0082-B332 C2000i-C C4000i -C C6000i -C (No.1, 3, 4, 6) C6000i -C (No.2, 5)
Spec. No. of the matching box:
5.3.1
Replacement Method
(1) Turn off the power to the CNC, then turn off the power to the laser oscillator. In addition, open the main circuit breaker for the laser oscillator. (2) Disconnect the power, signal, and fan cables from the matching box. (3) Remove the resonator fan unit, and remove the rod or cable attached to the matching box. (4) Remove the two mounting screws, and remove the matching box by slightly pulling it toward you while swinging it right and left. (5) Mount a new matching box by reversing steps (4) to (2).
5.4
DISCHARGE TUBE
A290-4533-T001 A290-4540-T001
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Spec. No. of discharge tube:
C2000i-C (DT1, 4) C2000i-C (DT2, 3) , C4000i -C
B-70475EN/01
5.UNITS
A290-4562-T002 C6000i -C
5.4.1
Placement Numbers
The identification numbers of the discharge tubes when viewed from the maintenance side of the oscillator are indicated below.
DT2 DT1
DT3
DT4
Fig.5.4.1 (a) Identification numbers (C2000i-C)
DT7
DT8
DT6
DT5
DT2
DT1
DT3
DT4
Fig.5.4.1 (b) Identification numbers (C4000i-C)
DT4 DT5 DT12
DT3 DT6 DT11
DT2 DT7 DT10
DT1 DT8 DT9
Fig.5.4.1(c) Identification numbers (C6000i-C)
5.4.2
Replacement Method
(1) Turn off the power to the CNC, then turn off the power to the laser oscillator. (2) Remove the top cover of the oscillator. (3) Detach the cable and feeder connecting the discharge tube with the matching box, by loosening the thumbscrew. Remove all the screws from the flange, which secures the discharge tube. (4) Move the discharge tube toward the output, rear, and folding mirrors, while rotating it. If the O-ring is too tight to allow the discharge tube to be moved, lubricate the O-ring with alcohol. Before attempting to move the discharge tube, however, move the flange to the center of the tube. Then, hold the supported end of the discharge tube, leaving a gap of 5 mm, and then push the discharge tube while rotating it. At this time, be careful not to damage the end of the discharge tube.
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(5) Move the O-ring to the center of the discharge tube, then remove the discharge tube. If the O-ring is at the end of the discharge tube, the end of discharge tube may be damaged while it is being removed. (6) Remove the copper plate (or feeder) from the removed discharge tube, then mount it on a new discharge tube. (7) Mount the flange onto the new discharge tube, then mount a new O-ring. Before mounting the O-ring, wipe it with alcohol. A Teflon O-ring is hard, and must be expanded slightly (by hand) before being mounted. (8) Insert the new discharge tube into the discharge tube holder by reversing step (4), then perform assembly by reversing steps (3) and (5). (9) Attach the cable or feeder between the matching box and discharge tube. Note that the cable or feeder must not be placed closely to other cables, feeders, and metal plates. (10) After the replacement, start the oscillator, check for leakage, and perform discharge aging. If the discharge area of the new discharge tube greatly differs from those of the other discharge tubes, adjust the power supply.
5.5
TRIGGER ELECTRODE
A98L-0005-0187 JB-OR4D-P10 A98L-0004-0801#4-15
Spec. No. of Trigger electrode: Spec. No. of O-ring: Spec. No. of Resin bolt:
5.5.1
Replacement Method
(1) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser oscillator. (2) Remove the cable connected to the trigger electrode. (3) The mounting bolts of the trigger electrode are made of resin. With a 3-mm non-ball-point hexagonal wrench, remove the screw. If the screw head is damaged, use needle-nose pliers to loosen the screw. (4) Replace the O-ring with a new one, and mount a new trigger electrode with the attached screw. Replace the O-ring or a resin bolt if damaged. Never use a metal screw. (5) Tighten the resin bolts with a tightening torque of 0.5 Nm. If you cannot prepare a torque wrench, use a small L wrench (64 mm 23 mm). Hold the shorter side, and tighten the bolt as far as you do not feel a pain in your fingers. Use a wrench having a hexagonal end; never use a ballpoint type wrench. (6) Fix the cable to the trigger electrode with a tightening torque of 1.3 Nm. (7) After the replacement, start the oscillator, check for leakage, and perform discharge aging.
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Cable
Resin bolt
5.6
TURBO BLOWER
When the turbo blower is replaced, the gas circulating system is open to the atmosphere for a long time. Pay particular attention to the immediate surroundings to ensure that dust and other contaminants do not enter the gas circulating system. Clean the flanges of the turbo blower and the pipe flanges before replacing the turbo blower. Do not incline the turbo blower while transporting and installing it. If the turbo blower is tilted, it is possible for the lubricating oil to enter to the laser gas circulating system, and to contaminate the laser gas circulating system and optical mirrors. In this case, the turbo blower can no longer be used. Spec. No. of Turbo blower: A04B-0800-C019 A04B-0800-C025 C2000i-C C4000i-C, C6000i-C
5.6.1
Replacement Method
(1) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser oscillator. Turn off the power to the chiller unit. (2) Drain the cooling water from the oscillator, disconnect the cooling water tube, gas tube, power cable connector, and ground cable from the turbo blower, then, drain the oil from the turbo blower. (3) For C4000i-C or C6000i-C, remove the conduit cable for the power supply. (4) Detach the gas tube (gas dust collector) from the turbo blower outlet. Cover the openings of the removed gas tube and the turbo blower with masking tape to prevent foreign matter from entering them. (5) Detach all the tubes connected to the piping on the inlet side of the turbo blower, and then remove the piping. (If piping is difficult to remove, remove only the top screws, and remove piping together with the turbo blower.) (6) Remove the hexagon headed bolt, which secures the turbo base, and remove the turbo blower together with the turbo base. The turbo blower weighs about 30 kg, so special care should be taken. (7) Remove the two metal brackets from the removed turbo blower, and mounts them on a new turbo blower, then mount the new turbo blower on the turbo base with the damping rubber. Also, remove the filter from the inlet of the old turbo blower, and attach the filter to the new turbo blower. (8) Mount the turbo blower on the oscillator. Fasten the turbo base temporarily. Then, secure the gas tube temporarily. Be careful not to damage the O-ring, and be sure to insert the O-ring. Adjust the position of the turbo blower not to apply excessive force to the bellows pipe.
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(9) Fasten the turbo base and secure the piping. (10) Attach the cooling water tube, gas tube, cable connector, and ground cable. For C4000i-C and C6000i-C, connect the conduit cable for the power supply. Connect the cooling water tube, gas tube, power cable connector, and ground cable. If the sleeve or ferrule of the cooling water tube or gas tube is deformed, replace it with the attached sleeve or ferrule. (11) Supply turbo blower oil.
Water tube Gas tube
Damping rubber (A98L-0004-0772#38ZN-60 Hexagon headed bolt (A30L-0010-0083)
Metal bracket
Power cable
Turbo base
Connection of TB
Damping rubber assembly
Inlet pipe
Dust collector
Dust collector
PSU output cables
Maintenance Side
Back Side
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Filter
Inlet side
Fig.5.6.1 Turbo blower
5.6.2
Leakage Check and Discharge Aging
(1) See the oil window of the turbo blower to check whether the oil level is in the 3/4 positions between Hi and Low. (2) Check for leakage. (3) Perform discharge aging. (4) When the turbo blower is changed, the consumption of laser gas varies. Adjust the consumption of laser gas referring to subsection 5.9.3.4. (5) Adjust the detect signal using The turbo blower temperature abnormally detect function, referring to Section 6.5 (a) Set the parameter No.29330#0(OLS) to 1 to the automatic sequence to set the turbo blower temperature abnormal alarm judgment value start. (b) When the discharging starts, that sequence is automatically starts. (c) The internal discharge last for 15 minutes with the power for power calibration, and then the judging value for alarm, and that sequence ends.
NOTE In this function the internal discharge is executed with the power for power calibration, so it is necessary to execute the gas leakage check and the discharge aging.
5.7
5.7.1
INVERTER
Operation of the Digital Operator
It is possible to check the detail of the inverters alarm with the digital operator. Operate the digital operator with the power to the oscillator turned on. The parameters of an inverter purchased by FANUC are set before shipment from the factory. Therefore, usually, the parameters need not be changed.
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(1) Names and descriptions of the digital operator
Name
Description
Monitor RUN (operation) lamp Program lamp POWER lamp ALARM lamp Monitor lamp Operation command indication lamp Operation key
Displays settings such frequency and output current values. Turned on when the inverter is running. Turned on when the monitor displays the setting of each function. Blinks when a warning is given (when a setting is incorrect). Power lamp of the control circuit Turned on when the inverter trips Lamp for indicating the display status of the monitor. Hz: Frequency, V: Voltage, A: Current, kW: Power, %: Ratio Turned on when the operation command destination is set to the operator. Key for stopping the motor. This key, however, is enabled only when the operation command destination is set to the operator. (Check that the operation command indication lamp is on.) Used to stop the motor or reset an alarm. Used to enter the monitor mode, basic setting mode, extended function mode, and function mode. Used to store set values. (Be sure to press this key when changing set values.) Used to change the extended function mode, function mode, or set values.
STOP/RESET key FUNC (function) key STR (store) key Up/down key
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(2) Method of operation

Pressing the (1) key or (2) key scrolls the code when the code No. is displayed. When the data is displayed, pressing the (1) key increases the value and pressing the (2) key decreases it. Press the (1) or (2) key to correspond to the target code or data. When the key is kept pushing, the monitor is fast-forwarded. Monitor mode When the code No. is displayed, the monitor of the code is displayed by pressing the (FUNC) key.
FUNC
FUNC
STR
Display of monitor *Note 1
When the monitor of the code is displayed, the code No. is displayed by pressing the (FUNC) key or (STR) key. In the initial state, 0.00 is played on the 4-digits-LED. At this time, pressing the (FUNC) key displays d001 on it. Function / Extended function mode When the code No. is displayed, the monitor of the code is displayed by pressing the (FUNC) key. (Display of data) *Note 1, *Note 2 Data setting Upper limit Pressing the (1) key increases the value and pressing the (2) key decreases it. When the data is displayed, pressing the (STR) key stores the value and displays the code No.. When the data is displayed, pressing the (FUNC) key does not store the value and displays the code No..
FUNC
FUNC
STR
Lower limit Note 1) The different content is displayed depending on the parameter setting. Note 2) Press the (STR) key in case of the data changing.
(3) Monitor mode

Code d001 d002 d003 d004 Name of function Output frequency monitor Output current monitor Rotation direction monitor PID feedback monitor Remarks Hz A F (forward rotation)/o (stop)/r (reverse rotation)
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Code d005 d006 Name of function Intelligent input monitor Intelligent output monitor Frequency conversion monitor Real Frequency conversion monitor Torque command monitor Torque bias monitor Output torque monitor Output voltage monitor Input power monitor Integrated power monitor Cumulative run time monitor Power ON time monitor Cooling fan temperature monitor Motor temperature monitor Life time diagnosis monitor Program counter Program No. monitor User monitor 0 User monitor 1 User monitor 2 Pulse counter monitor Position command monitor Current position monitor Trip count monitor Trip history monitor 1 Trip history monitor 2 Trip history monitor 3 Trip history monitor 4 Trip history monitor 5 Trip history monitor 6 Warning monitor DC voltage monitor BRD load factor monitor Electric thermal load factor monitor Remarks
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d007 d008 d009 d010 d012 d013 d014 d015 d016 d017 d018 d019 d022 d023 d024 d025 d026 d027 d028 d029 d030 d080 d081 d082 d083 d084 d085 d086 d090 d102 d103 d104
Hz % % % V kW hr

Times Cause, frequency (Hz), current (A), voltage (V), run time (hr), power ON time (hr)
5.7.2
Replacement Method
A90L-0001-0574#8LF A90L-0001-0574#16LFF C2000i-C, C4000i-C C6000i-C
Spec. No. of Inverter:
5.7.2.1
Inverter
Exchange the inverter according to the following procedures. Figure 5.7.2 shows outside view of the inverter. This figure is A90L-0001-0574#8LF. The exchange method is the same for A90L-0001-0574#16LFF. (1) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser oscillator. Start work when 10 minutes or more has elapsed after the power is turned off. Otherwise, an electric shock can occur. (2) Detach the cable (outside) connected to the connector (CN138) located under the inverter. Detach connector CN138 (inside) from the plate. Take care not to damage the housing by the edge when you remove the connector from the plate. (3) Remove the front cover (by removing 2 set screws), then detach the cables from the terminal block of the main circuit.
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The following cables are connected to the terminal block of the main circuit: The following cables are connected to the inverter: R, S, and T : Main power supply input U, V, and W : Inverter output G : Ground (4) Remove the inverter (by removing the four set screws). (5) Detach the signal cable (inside) connected with the control circuit terminal block from the detached inverter. Terminal block Terminal symbol 1 : Reset signal Terminal symbol 2 : Soft lock signal Terminal symbol 8 : Drive command signal Terminal symbol 11 : Frequency arrival signal Terminal symbol 14 : Fan lifetime signal Terminal symbol 15 : Capacitor lifetime signal Terminal symbols AL0, AL1 : Alarm output (relay contact output: Normal if ON) Terminal symbol AM : Output current analog monitor signal Terminal symbol L : Analog common Terminal symbol CM1,CM2 : Common (6) The cover of the new inverter is removed, and connects the signal cable (inside) to the control circuit terminal block. (7) Install the new inverter in the laser oscillator. (8) Install connector CN138 of the signal cable (inside) in the plate under the inverter. (9) Connect the cable with the main circuit terminal block. (10) Install the cover, and connect the cable to the connector (CN138).
Terminal block of the control circuit
Terminal block of the main circuit CN138 Terminal Cover
Cover set screw M48: 2 place
Signal Cable(outside)
Signal Cable(inside)
Fig.5.7.2 Inverter
5.7.2.2
Cooling Fan in the Inverter

A90L-0001-0574#8LF-FAN A90L-0001-0574#16LFF-FAN C2000i-C, C4000i-C C6000i-C
Spec.No. of Inverter fan:
Exchange the cooling fan according to the following procedures. Figure 5.7.3 shows details of fan exchange. Figure is A90L-0001-0574#8LF. The exchange method is the same as # 8LF though the inverter has two cooling fan in A90L-0001-0574#16LFF.
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(1) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser oscillator. Begin working after ten minutes or more have passed since it shut off because there is danger of the electric shock. (2) Remove the inverter from the oscillator referring to 5.7.2 (3) Remove the cooling fan with the procedure below: (a) Detach the terminal cover. (M4:1 screw) (b) Detach the digital operators panel and the spacer. (c) Detach the front cover. (M4:2 screws) (d) Detach up the cooling fan holder plate while pressing the tabs on both side of the cooling fan holder plate. (e) Detach the connector (#8LF:J21, #16LFF;J21, J22) from the power PCB. Pull out the connector to the direction of figure. At this time, do not pull the cable. (f) Detach the cooling fan from the cooling fan holder plate. Remove the cable clamp when it has adhered (4) Install the new cooling fan with the procedure below: (a) Install the new cooling fan in the cooling fan holder plate. Confirm the wind direction. (Cooler fan's label side is direction of the vomit.) (b) Connect the fan connector to (#8LF:J21, #16LFF;J21, J22) on the power PCB. (c) Fix the cooling fan holder plate to the inverter main body. (d) Install the front cover. (M4:2 screws) (e) Install the digital operators panel and the spacer. (f) Install the terminal cover. (M4:2 screws) (5) Install the inverter to the oscillator referring to 5.7.2
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Digital operators panel Front cover
Terminal cover
Spacer
Screw 2
Screw 2
Tab
Cooling fan holder plate
Power PCB
ConnectorJ21
Label side of Cooling fan
Fig.5.7.3 Cooling fan replacement
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5.8
5.8.1
EXHAUST PUMP
A90L-0001-0425
Spec.No. of Exhaust pump:
Replacement Method
(1) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser oscillator. Turn off the power to the chiller unit. (2) Drain the cooling water from the oscillator, then disconnects the two water tubes. (3) Disconnect the tubes from the pump outlet and inlet. Then, disconnect the heavy-duty power cables from the terminal block on the side of the pump. (4) Remove the bolts securing the exhaust pump unit, then remove the pump unit. Remove the bolts securing the pump to the mounting plate, and then remove the pump. (5) Position the new exhaust pump on the mounting plate, then secure the pump unit by reversing steps (2) to (4). The new pump may not be fitted with gas and water fittings. Remove them from the old pump, bind seal tape on the threaded part, and install them in the original positions. (6) Pumps are shipped without lubricating oil. Add oil to the pumps. Operating the pump without lubricating oil will cause the thermal switch to trip, and will ultimately damage the pump. (7) Start the oscillator, perform leakage tests for the laser oscillator, and check the operation of the exhaust pump. When the power is first turned on, check that gas is output from the gas outlet of the oscillator. The pump starts after gas has been discharged from the external pipes for a few seconds. If no gas is discharged, or the pump sounds abnormally, the pump turns reversely. Check the cabling.
5.8.2
Parts of Exhaust Pump

Name Specification Remark
Each part can be replaced. The table below indicates the specifications of the parts.
Nut Cartridge cover O-ring Spring with washer Stopper Oil level gauge A90L-0001-0425#71244351 A90L-0001-0425#71231470 A90L-0001-0425#71237142 A90L-0001-0425#71233500 A90L-0001-0425#71066848 A90L-0001-0425#71231020
With O-ring For cartridge cover With O-ring With O-ring and screws
Replace each part by using the same procedure as described in Subsection 3.3.3.1. (See Fig. 3.3.3.)
5.9
GAS CONTROLLER
A04B-0815-D406 A04B-0818-D404 A04B-0815-D405 A04B-0818-D405 A91L-0001-0256#200 A04B-0816-D402 A97L-0203-0208#A A16B-1700-0490 C2000i-C, C4000i-C C6000i-C C2000i-C, C4000i-C C6000i-C
Spec.No. of Charge unit: Spec.No. of Exhaust unit: Spec.No. of Pressure sensor: Spec.No. of Pressure control valve: Spec.No. of Gas filter: Spec.No. of Gas control PCB:
5.9.1
Configuration
The gas controller consists of a charge unit, an exhaust unit, pressure sensors, and so on. Fig. 5.9 shows an installation photo of the gas controller. The following outlines the functions of components shown in the figure:
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(1) Pressure sensor This sensor monitors the pressure in the pipe on the turbo blower inlet side. (2) Atmospheric pressure sensor This sensor monitors whether the pressure in the oscillator has reached atmospheric pressure. (3) Filter This filter prevents impurities from entering the oscillator. (4) Gas supply pressure sensor This sensor continuously monitors the pressure of the laser gas supplied from an external source (gas cylinder). (5) Purge valve When the machine operation stops, this valve supplies laser gas to the oscillator until the pressure in the oscillator reaches atmospheric pressure. (6) External pipe exhaust valve When the oscillator starts, this valve opens for a certain period to allow laser gas in the laser gas pipe between the oscillator and gas cylinder to escape. (7) Gas supply valve When the machine is operating, this value opens to supply laser gas to the oscillator. (8) Pressure control valve According to the command issued from the CNC, this valve controls the flow rate of the laser gas supply to maintain a specified laser gas pressure in the oscillator. (9) Exhaust flow rate adjustment valve This valve adjusts the flow rate of laser gas released from the oscillator during normal operation. (10) Exhaust valve When the oscillator starts, this valve opens to allow laser gas to escape from the oscillator. During normal operation, this valve is closed, and a constant amount of gas escapes through the exhaust flow rate adjustment valve connected in parallel. (11) Three way valve This valve connects the exhaust pump to the oscillator to discharge laser gas from the oscillator during exhaust pump operation. When the exhaust pump is stopped, this valve switches to the atmosphere to open the exhaust pump to atmospheric pressure. (12) Bypass valve This valve connects the motor chamber of the turbo blower to the exhaust pump. When the oscillator starts, this valve opens to release laser gas from the motor section. During normal operation, this valve is closed, and a constant amount of gas is released through the orifice connected in parallel.
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Gas supply Purge valve(V2) pressure sensor(PSW1) Pressure sensor (PS) Charge unit Gas control PCB External pipe exhaust valve(V6) Gas supply valve(V1)
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Exhaust unit
Atmospheric pressure sensor (PSW2) Pressure control valve (CV1) Filter(F1)
Silencer Bypass valve(V5) Exhaust flow rate adjustment valve (CV2) Three way valve(V3) Exhaust valve(V4)
Fig.5.9 Installation of the gas controller
5.9.2
5.9.2.1
Replacement Method Charge unit
(1) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser oscillator. (2) Close the valve of the external laser gas supply (for example, a gas cylinder). (3) Disconnect tubes and cables from the charge unit. Pressurized laser gas may remain in the control unit. Discharge this gas by loosening the nut on the fittings. (4) Remove the unit securing screws, then remove the unit. (5) Mount a new unit by reversing steps (3) and (4). (6) Adjust the charge unit by following the adjustment procedure described in Subsection 5.9.3. (7) Turn on the oscillator, then perform a gas leakage check and discharge aging.
5.9.2.2
Exhaust unit
(1) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser oscillator. (2) Disconnect the tubes and cables from the exhaust unit. (3) Remove the screws that secure the unit, and remove the unit to replace it with a new one. (4) Mount a new unit by reversing steps (2) and (3). (5) Turn on the oscillator, then perform a gas leakage check and discharge aging. (6) Perform all settings as described in Subsection 5.9.3.4, and then check the operation.
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5.9.3
5.9.3.1
Adjustment Method Setting the gas supply pressure sensor
The gas supply pressure sensor is a sensor labeled PSW1 in the gas controller. (1) Turn on the main circuit breaker and power supply, then turn on the power to the CNC. Then, power is supplied to the sensor. Never turn on the gas pressure control start signal (RUN).
CAUTION Be sure to pull out the key switch beforehand so that the oscillator start signal (RUN) is not turned on.
(2) Remove the gas tube connected to the gas supply pressure sensor. This causes the gas supply pressure sensor detect the atmospheric pressure. (3) For how to operate the sensor, see the procedure described in Subsection 5.9.3.3. Set to the unlock mode, and then enter settings. To clear the initial offset value of the sensor, press the UP() and DOWN() button simultaneously more than 1 second. Moreover, adjust DGN. No. 2503 for the parameter No. 29321 set to be 01 kPa. (4) Attach and secure the removed gas tube again. (5) Adjust the secondary pressure of the regulator of the external laser gas supply unit (gas cylinder, for example) to 0.1 MPa. (6) Check that DGN No. 2503 shows a value of the secondary pressure of the regulator 12 kPa. (7) After the check described in (6), set the lock mode again.
5.9.3.2
Setting the atmospheric pressure sensor
The gas supply pressure sensor is a sensor labeled PSW2 in the gas controller. (1) Turn on the main circuit breaker and power supply, then turn on the power to the CNC. Then, power is supplied to the sensor. Never turn on the gas pressure control start signal (RUN).
CAUTION Be sure to pull out the key switch beforehand so that the gas pressure control start signal (RUN) is not turned on.
(2) Remove the gas tube connected to the gas pressure sensor and the atmospheric pressure sensor. This causes the atmospheric pressure sensor to detect the atmospheric pressure. (3) For how to operate the sensor, see the procedure described in Subsection 5.9.3.3. Set to the unlock mode, and then enter settings. To clear the initial offset value of the sensor, press the UP() and DOWN() button simultaneously more than 1 second. Moreover, adjust DGN. No. 2502 for the parameter No. 29325 set to be 01 kPa. (4) Attach and secure the removed gas tube again. (5) Turn on the gas pressure control start signal (RUN), and check that DGN. No. 2502 display a negative value after the exhaust pump starts exhaust operation. (6) After the check described in (5), set the lock mode again.
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5.9.3.3
Operating the gas supply pressure sensor and atmospheric pressure sensor
The sensors operate in one of four modes. In the measurement mode, a pressure value being measured is indicated. In the function setting mode, basic parameters are set. In the pressure setting mode, switching pressures are set. In the key lock mode, key operation is locked. Moreover, the sensors have a zero-clear function for canceling an initial offset value. For mode switching, press or hold down the SET key as indicated below. (When the power is turned on, the measurement mode is set.)
Measurement mode SET (< 2 seconds) Pressure setting mode SET
SET ( 2 seconds)
Function setting mode
SET
SET ( 5 seconds)
Key lock mode
SET
Note) Zero-clear operation is performed in the measurement mode.
M easurement mode
Pressure setting mode (disuse)
Function setting mode (disuse)
Key lock mode
CAUTION Be sure to set to RUN OFF state for setting pressure sensor.
(1) Names of Components
Fig.5.9.3.3 Details of the gas supply pressure sensor and the atmospheric pressure sensor
Indicator section: Indicates a measured pressure value, settings, and error code. UP ( ) and DOWN ( ) buttons: Used to change the mode and settings. SET button: Used to change the mode and set a value finally. The indicator section of the sensor indicates a pressure value as a gauge pressure in MPa (the gas supply pressure sensor) and kPa (the atmospheric pressure sensor). If the pressure value is beyond the pressure range, "---" appears in the indicator.
Sensor name Unit Range (Gauge unit) Example
Gas supply pressure sensor Atmospheric pressure sensor
[MPa] [kPa]
-0.1MPa to 1.0 MPa -100.0kPa to 100.0kPa
0.175 -50.0
0.175MPa -0.05MPa
175kPa -50kPa
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(2) Zero clear

Zero clear modifies the initial offset value of the sensor. This setting can be made in the measurement mode. Remove the gas tube connected to the gas supply pressure sensor or the atmospheric pressure sensor. This causes the sensor to detect the atmospheric pressure. Press the UP() and DOWN() button simultaneously more than 1 second. Then a measurement value of the atmospheric pressure set to be zero. Attach and secure the removed gas tube again.
(3) Key lock mode

Key lock mode consists of two modes, the unlock mode (display: UnL) and the lock mode (display: LoC). In the unlock mode, parameters of the sensor can change. The lock mode protects against an inadvertent modification to the setting of the sensor. This setting is common to the gas supply pressure sensor and the atmospheric pressure sensor. The key lock mode is set by holding down the SET key for 5 seconds or more in the measurement mode. Set to the lock mode, after the setting of the sensor is finished.
SET button (5 sec.) button
M easurement mode
UnLock mode
Lock mode
5.9.3.4
Adjusting the exhaust unit (adjusting the laser gas consumption)
(1) Detach the tube from the filter of the gas controller, and attach a gas flow meter with laser gas specifications. (2) Set 30 in parameter No. 15260, and start the oscillator. Air entered when the oscillator is open to the atmosphere in (1) above is released. After 30 seconds, turn off the oscillator start switch (RUN). (3) Restart the laser oscillator, and place the oscillator in the oscillation ready state (LSTR). (4) Perform internal discharge with a low output level specified first. Increase the output command level gradually to the rated output. If the discharge voltage is high, perform purging, then, increase the output command level again. (5) While observing the flow rate on the gas flow meter when internal discharge is performed with the rated output, turn the exhaust flow rate adjustment valve to adjust the flow rate to the setting. (6) Purge the oscillator. (7) Detach the gas flow meter, and attach the tube again. Perform the operation described in (2) to replace gas in the tube. (8) Reset the modified parameter to its original value. Predetermined flow rate
Oscillator model C2000i-C, C4000i-C C6000i-C Flow rate
10 liters/hour (0.166 liters/minute) 20 liters/hour (0.332 liters/minute)
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5.10
5.10.1
THE WATER DISTRIBUTION UNIT

Replacement Method
Replace the water distributor unit as follows. (1) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser oscillator. Turn off the power to the chiller unit. (2) See Subsection 2.4.2, and remove water from the oscillator by supplying compressed air. (3) Mark the water pipes connected to the distribution unit, then disconnects the pipes. (4) Remove the bolts securing the distribution unit, then remove the unit. (5) Mount a new distribution unit by reversing steps (3) and (4). Connect the water pipes correctly, noting the alignment marks. (6) Operate the chiller unit manually to circulate the cooling water. Check that no water leaks from the fittings that were disconnected during the replacement. After checking, restore the original chiller setting. Check the amount of water in the chiller unit, and add water if necessary. Spec.No. of Distribution unit: A04B-0813-C421 C2000i-C
Fig.5.10 (a) Detail of water distributor unit (C2000i-C)
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A04B-0815-C421 C4000i-C
Spec.No. of Distribution unit:
Cock (close) Removing water
Cock (open) Normal
Fig.5.10 (b) Detail of water distributor unit (C4000i-C)
Spec.No. of Distribution unit:
A04B-0818-C422 A290-4562-V800 A04B-0818-C423 A290-4562-V801
C6000i-C (Distribution unit A C6000i-C (Distribution unit A C6000i-C (Distribution unit B C6000i-C (Distribution unit B
OUT side) IN side) OUT side) IN side)
Fig.5.10(c) Detail of water distributor unit (C6000i-C)
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Cock (close) Removing water
Cock (open) Normal
Fig.5.10 (d) Detail of water distributor unit A (C6000i-C)
Fig.5.10 (e) Detail of water distributor unit B (C6000i-C) Table 5.10 Spec.No. Spec.No. of water fittings of distribution unit Quantity Mark C6000i-C C2000i-C C4000i-C Distribution unit A
C6000i-C Distribution unit B
1 2 3 4 5 6 7 8 9 10
A97L-0200-0651#N-16D-B A97L-0200-0651#N-12C-B A97L-0200-0651#N-10B-B A97L-0200-0651#N-08A-B A97L-0200-0651#N-06A-B A97L-0200-0651#L-16D-B A97L-0200-0651#L-12C-B A97L-0200-0651#L-10B-B A97L-0200-0651#L-08A-B A97L-0200-0651#L-06A-B
a b c d e f g h i j
0 3 4 1 2 0 3 4 3 2
3 1 3 0 0 3 7 5 0 0
2 1 0 0 0 2 7 4 2 0
2 1 0 0 0 2 7 2 2 0
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5.10.2
Replacement of the Flow Sensor Unit

A04B-0815-D421 A04B-0813-C421-KA A04B-0815-C421-KA A04B-0818-C422-KA C2000i-C C4000i-C C6000i-C/1unit
Spec.No. of Flow sensor unit: Spec.No. of Tube kit:
NOTE Never push the internal of flow sensor with thin sticks in checking water jam. If it is done, the detector is destroyed.
Detector
Karman vortex generator
Fig. 5.10(e) Flow sensor unit
For replacement, use the procedure below. (1) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser oscillator. Turn off the power to the chiller unit. (2) Remove the cooling water in the oscillator with the supply compressed air, referring to subsection 2.4.2. (3) Disconnect the tubes and cables from the flow sensor unit. (4) Remove the screws that secure the unit, and remove the unit to replace it with a new one. (5) Mount a new unit by reversing steps (3) and (4). Be careful of the arrow direction (points upward). (6) Operate the chiller unit manually to circulate cooling water then check for water leakage. Upon completion of checking, return the setting of the chiller unit to the original one. Check the water level of the chiller unit and add water if necessary. (7) Adjust the flow sensor unit by following the adjustment procedure described in Subsection 5.10.3.
5.10.3
Adjustment of the Flow Sensor Unit
(1) Turn the CNC on. Never turn on the oscillator start signal (RUN) at this stage. Therefore, drive the chiller unit in the manual operation. (2) Adjust the flow rate of cooling water flowing into the oscillator to an alarm setting flow rate. Use a flow meter with a proper and accurate rated flow rate. Adjust the setting parameter to the value that the display of flow rate shows a same value of a flow meter (accuracy 5L/min).
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Model Alarm setting flow rate Rated flow rate Setting parameter
B-70475EN/01
Flow rate [0.1L/min]
C2000i-C C4000i-C C6000i-C (A: Rear side) C6000i-C (B: Maintenance side)
55 L/min 120 L/min 95 L/min 95 L/min
75 L/min 160 L/min 125 L/min 125 L/min
No.29340 No.29340 No.29340 No.29343
DGN.2500 DGN.2500 DGN.2500 DGN.2501
(3) Check that the display of flow rate shows a value of a flow meter rate 5L/min at an alarm setting flow rate. (4) Check that the display of flow rate shows a value of a flow meter rate 5L/min at a rated flow rate. If the flow sensor unit cannot adjust correctly by above adjustment procedure, or lose parameters, adjust the unit by following the adjustment procedure. (5) Input following temporary setting parameters.
Model C2000i-C C4000i-C C6000i-C (A: Rear side) C6000i-C (B: Maintenance side) Setting parameter A Input value A Setting parameter B Input value B
No.29340 No.29340 No.29340 No.29343
3000 3000 3000 3000
No.29341 No.29341 No.29341 No.29344
0 0 0 0
(6) Measure the flow rates (DNG. 2500 or DGN. 2501) and flow meter rates at an alarm setting flow rate and rated flow rate. (7) Adjustment of setting parameters uses four-measured value. Calculate corrected setting parameters by following equations.
Correction coefficient
C = ( x1 x 2) /( y1 y 2)
X1flow meter rate(1) X2flow meter rate(2)
(0.1L/min) (0.1L/min) (0.1L/min) (0.1L/min)
Corrected setting parameters
A' = C A B' = x 2 C y 2 + C B
Y1flow rate(1) Y2flow rate(2)
(8) Check that the display of flow rate shows a value of a flow meter rate 5L/min at an alarm setting flow rate. (9) Check that the display of flow rate shows a value of a flow meter rate 5L/min at a rated flow rate.
5.11
5.11.1
SHUTTER UNIT
A04B-0813-C413 A04B-0818-C414 C2000i-C, C4000i-C C6000i-C
Spec.No. of Shutter unit:
Replacement Method
5.11.1.1 Shutter unit

(1) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser oscillator. (2) Disconnect the cables from the shutter PCB. (3) Remove the bolts, which secure the unit, then remove the unit.
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(4) Mount a new unit by reversing steps (2) and (3). (5) After the shutter unit is replaced, the CO2 laser beam and guide laser beam may be misaligned with each other. In such a case, align the CO2 laser beam and guide laser beam with each other according to Subsection 5.13.2.
Shutter temperature switch Screws to fix shutter mirror Shutter mirror
Wiring to shutter temperature switch
Photo switch
Fig.5.11 External view of shutter unit
5.11.1.2 Shutter mirror

Spec.No. of Shutter mirror: A290-4516-X204 For C2000i-C and C4000i-C, remove the shutter unit referring to Subsection 5.11.1.2 Replace the shutter mirror as follows. Be careful not to leave fingerprints on the shutter mirror. (1) Remove the thermal switch from the heat sink. (2) For C2000i-C and C4000i-C, remove the three bolts on the side of the heatsink. For C6000i-C, remove the three bolts from the reflective surface side of the shutter mirror. Then, you can remove the shutter mirror with the heat sink to which the shutter mirror is attached. (3) Apply a minute amount of thermal compound (Ryosan Company 910-50) to the rear of a new shutter mirror, then mount the new shutter mirror by reversing steps (1) to (2).
5.11.1.3 Shutter switch (thermal and photoelectric switches)

Spec.No. of Shutter sensor unit: A04B-0813-D020 A04B-0818-D033 C2000i-C, C4000i-C C6000i-C
(1) Remove connector CN249 from shutter PCB, then disconnect its cable. (2) The shutter thermal switch and photoelectric switch are integrated into a sensor unit. So, remove both switches. (3) Install a new sensor unit. At this time, ensure that the wire mark of the photoelectric switch matches the label indication (OPEN, CLOSE) of the shutter unit. The replacement is completed by reconnecting to shutter PCB
NOTE To prevent stress caused by shutter open/close operation from being imposed on the cable, the cable must be run with a sufficient allowance as shown in Fig. 5.11.
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5.12
BEAM ABSORBER
A97L-0200-0872#E A97L-0201-0972 A97L-0203-0206#A A97L-0200-0872#MIRROR A97L-0201-0972#MIRROR C2000i-C C4000i-C C6000i-C C2000i-C C4000i-C
Spec.No. of Beam absorber:
Spec.No. of Beam absorber mirror:
5.12.1
Replacement Method
5.12.1.1 Beam absorber

(1) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser oscillator. Turn off the power to the chiller unit. (2) Drain the cooling water from the oscillator, then disconnects the water pipes. (3) Remove the safety cover. (4) Disconnect the temperature sensor Fasten terminal. (5) Remove the bolts, then remove the absorber. Before removing the absorber, mark the position of the absorber or mounting metal bracket. If the position of the absorber is shifted because of the replacement, the laser beam is not directed to the center of the absorber. In such a case, the absorber must be adjusted. (6) Mount a new absorber, aligning it with the marked position. (7) Connect the water tubes and temperature sensor cable. (8) Operate the chiller unit manually to circulate the cooling water. Check that no water leaks from the fittings that were disconnected during the replacement. After checking, restore the original chiller setting. (9) Start the oscillator, and check the absorber position as described in the next subsection. (10) Install the safety cover according to (4) of Section 2.1 after absorber position adjustment.
5.12.1.2 Beam absorber mirror

(1) Execute (1) to (4) of Subsection 5.12.1.2. (2) Remove the four bolts of mirror, and then remove the beam absorber mirror. If it is necessary to remove the beam absorber to remove the absorber mirror, mark at the position of the absorber or the plate.
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Check burning in tube inside
Beam Temperature Switch
Four bolts
Mirror Fig.5.12(a) Beam absorber Fig.5.12(b) Beam absorber mirror Fig.5.12(c) mirror attached direction
(3) Make sure that there is not the burning in the tube inside or the peeling of the coating. If they exist, change the beam absorber. (4) Install the mirror to the beam absorber with four bolts. Refer to Fig.5.12(c) about the direction of the mirror. (5) Install the absorber noting the position to fit. (6) Execute the subsection 5.12.1.1(7) to (10).
5.12.2
Adjusting the Position
(1) Draw a cross on an acrylic plate, then fix the plate such that the center of the cross is aligned with the center of the absorber aperture. (2) Provide a flow of cooling air to the acrylic plate, using a drier, for example. (3) Start the oscillator, and turn on the discharge start switch (HV ON). As soon as the output starts increasing on the output display screen, turn off the discharge start switch (HV ON). Laser oscillation starts, and a round beam mark is left on the acrylic plate. (4) Adjust the absorber such that the mark on the acrylic plate is aligned with the center of the absorber. (5) Repeat step (3), then check the position of the absorber. If the mark is still not aligned with the center of the absorber, adjust the absorber again. (6) In step (3), soot from the burnt acrylic plate may adhere to the shutter mirror. Check whether the shutter mirror has been contaminated with soot or other particles, and clean the mirror if necessary.
5.13
5.13.1
GUIDE LASER (SEMICONDUCTOR LASER)

A04B-0800-D400
Spec.No. of Guide laser:
Replacement Method
(1) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser oscillator. (2) Remove connector CN248 from shutter PCB, then disconnect the cable. (3) Remove the three screws securing the laser unit, then replace the laser unit with a new one. (4) Insert the cable of the guide laser into the connector on shutter PCB, then secure the cable.
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CN248
Fig. 5.13.1 Guide laser
5.13.2
Adjustment Method
Make an adjustment so that the center of the CO2 laser beam is aligned with the center of the guide laser beam. (1) Attach an acrylic plate at about 3 to 10 m away from the beam outlet of the laser oscillator, and collect the burn pattern of the CO2 laser beam (rated output, CW, irradiation period of 0.1 second). Do not attempt to touch the acrylic plate after beam pattern collection. (2) By turning the X-axis and Y-axis adjustment screws, align the guide laser beam with the center of the burn pattern obtained in step (1). Turn the adjustment screws using a 2-mm hexagon wrench. (3) Compare the optical axis of the guide laser beam with the center of the burn pattern of the CO2 laser beam, obtained approximately 1 m from the laser oscillator outlet. If the difference between the two beam centers is within 2 mm, the optical axis adjustment can be regarded as being successful. (4) If an optical axis mismatch is detected in step (3), adjust the optical axis of the guide laser beam by moving the plate and stage of the guide laser unit. Then, repeat the adjustment procedure from step (2).
Fig.5.13.2 Guide laser adjustment position
5.14
FAN
This section describes the replacement of the fan on the fan unit. (See Subsection 5.14.1) If it is necessary to remove the fan unit from the laser oscillator in changing discharge tubes, remove and attach it referring to Subsection 5.14.2 or 5.14.3. Spec.No. of Fan motor: A90L-0001-0396 C2000i-C, C4000i-C A90L-0001-0396#T C6000i-C
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5.14.1
Finger guard
Replacement of Fan
Screw Remove the cables pushing this part
Fan
Cable
Cable Fig.5.14.1 (a) Fan
Terminal block Fig.5.14.1 (b) Terminal block
(1) Turn off the power to the CNC, and then turn off the main circuit breaker and power supply for the laser oscillator. (2) Remove the power cable for fan from the terminal block for C2000i-C and C4000i-C. Remove the power cable from the fan. It is not necessary to remove it from terminal block for C6000i-C. (3) Remove screws, and then, remove fan, finger guard and earth cable. (4) Cut the cable which attached to new fan with same length as old one, and treat the end for C2000i-C and C4000i-C Attach the original cable to a new fan for C6000i-C. (5) Attach the earth cable to the new fan, and fix the fan and the finger guard at the original place. (6) Close the main circuit breaker, turn on the power to the oscillator, and then turn on the power to the CNC. Then, check that the fans rotate.
5.14.2
Detachment and Attachment of a Fan Unit
(1) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser oscillator. (2) Detach the power supply cable connected to the connector and disconnect the ground cable. (3) Remove the fan unit from the oscillator. (4) Mount a new fan unit, then secure it by tightening the screws. (5) Attach the power supply cable to the connector and connect the ground cable. (6) Close the main circuit breaker, turn on the power to the oscillator, then turn on the power to the CNC. Then, check that the fans rotate.
Power supply cable connected to the connector

Fig.5.14.2 Fan unit cable connection
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5.14.3
Detachment and Attachment of Fan-assisted Radiator
(1) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser oscillator. Turn off the power to the chiller unit. (2) Cooling water is passed through the radiator of the fan unit. Drain the cooling water from the radiator, and then disconnect the water pipes. (3) Detach the power supply cable connected to the connector and disconnect the ground cable. (4) Remove the fan unit from the oscillator. At this time, the radiator may still contain water. Therefore, plug the radiator fittings with rag to prevent water being spilled on the other units. (5) Mount a new fan unit, then secure it by tightening the screws. (6) Connect the water tubes. (7) Attach the power supply cable to the connector and connect the ground cable. (8) Operate the chiller unit manually to circulate the cooling water. Check that no water leaks from the fittings that were disconnected during the replacement. After checking, restore the original chiller setting. (9) Close the main circuit breaker, turn on the power to the oscillator, then turn on the power to the CNC. Then, check that the fans rotate.
Power supply cable connected to the connector

Fig.5.14.3 Fan-assisted radiator cable connection
5.15
POWER SENSOR
Be careful not to touch or apply force to the black, light-sensitive surface. Also, ensure that no dust enters the sensor. Spec.No. of Power sensor: A04B-0807-D001 A04B-0809-D001 C2000i-C, C4000i-C C6000i-C
5.15.1
Replacement Method
(1) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser oscillator. (2) Disconnect the coaxial cable from the power sensor unit. (3) Remove the mounting screws of the power sensor unit, and remove the unit. (4) Mount a new unit by reversing steps (2) and (3). (5) Turn on the laser, and then check that the laser output indication appears.
5.15.2
Adjustment Method
See the setting of the power input compensation coefficient in Section 8.5, and check the compensation coefficient.
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5.16
5.16.1
THE DEW SENSOR

A04B-0800-D005
Spec.No. of Dew sensor:
Replacement Method
(1) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser oscillator. (2) Disconnect the dew sensor cable from the connector. (3) Remove the screws securing the dew sensor, then replace the sensor with a new one. (4) Connect the dew sensor cable to the connector. (5) After the replacement, no adjustment is needed.
Fig. 5.16.1 Dew Sensor
5.17
5.17.1
PCB
Replacement Method
5.17.1.1 Interface PCB

Spec.No. of Interface PCB: A16B-3100-0070 (1) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser oscillator. (2) Disconnect all cables from the interface PCB. (3) Remove the screws or edge supports, then remove the interface PCB. (4) Mount a new PCB by reversing steps (2) and (3). Connect the cables, noting the alignment marks. Ensure that no terminals are loose. Check that the connectors are connected firmly. (5) Set the jumper pins SH1 to the same status as present before the replacement. (5) After the replacement, no adjustment is needed.
SH1
Fig. 5.17.1 Interface PCB
5.17.1.2 24V power supply

Spec.No. of 24V Power Supply: A20B-1005-0124
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(1) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser oscillator. (2) Remove the interface PCB. (3) Disconnect all cables from the 24V power supply. (4) Remove the four edge supports, then remove the 24V power supply. (5) Mount a new 24V power supply by reversing steps (2) and (4). Connect the cables, noting the alignment marks. Ensure that no terminals are loose. (6) After the replacement, no adjustment is needed.
Fig. 5.17.2 24V power Supply
5.17.1.3 Shutter PCB

Spec.No. of Shutter PCB: A16B-1700-0520 (1) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser oscillator. (2) Detach all cables connected with shutter PCB. (3) Remove the four screws or four edge supports, and remove shutter PCB. (4) Install new PCB in the order of (3)(2). Confirm the mark of the cable, and connect the cable. (5) After it exchanges shutter PCB, it is not necessary to adjust it.
Fig. 5.17.3 Shutter PCB
5.17.1.4 Safety circuit PCB

Spec.No. of Safety circuit PCB: A16B-1300-0300 (1) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser oscillator. (2) Detach interface PCB. (3) Detach all cables connected with safety circuit PCB. (4) Remove six edge supports, and remove safety circuit PCB. (5) Install new PCB in the order of (3)(2). Confirm the mark of the cable, and connect the cable. (6) After it exchanges safety circuit PCB, it is not necessary to adjust it.
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Fig. 5.17.4 Safety Circuit PCB
5.18
OIL MIST DECOMPOSING ELEMENT

A290-4523-V170 A290-4540-V170 A290-4562-V170 C2000i-C C4000i-C C6000i-C
Spec.No. of Oil Mist Decomposing Element:
5.18.1
Replacement Method
(1) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser oscillator. (2) Remove the mounting screws, pull out the element while tilting it. (3) Insert a new element in the reverse orders, and fastens it with the screws. (4) Check for leakage, and perform aging. * Pay attention to the installation orientation of the oil mist decomposing element.
Mounting location (Output coupler side)
Mounting location (Rear mirror side)
Fig.5.18.1(a) Mounting locations of oil mist decomposing elements (C2000i-C)
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Rear mirror holder S Mounting location (Rear mirror side) S S
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Output coupler holder
Mounting location (Output coupler side)
Fig.5.18.1(b) Mounting locations of oil mist decomposing elements (C4000i-C)
Mounting location (Near output coupler or Rear mirror)
Fig.5.18.1(c) Mounting locations of oil mist decomposing elements (C6000i-C)
Oil mist decomposing element
Bolts
Output coupler or Rear mirror
Discharge tube
Fig.5.18.2 Mounting orientation of oil mist decomposing element (section S-S)
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Fig.5.18.1(e) oil mist decomposing element
5.19
5.19.1
GAS DUST COLLECTION UNIT

Cleaning
(1) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser oscillator. (2) Remove the mounting screws, and remove the dust box. (3) Detach the dust box slits and wipe them with a clean clothe moistened with alcohol. Also, clean the inside of the dust box. (4) The slit on the maintenance side differs from the slit on the rear side. If these blades are installed on these sides reversely, the dust collection capability lowers. The slits and the dust collector have the marking A or B, and match the markings each other. (5) Check for leakage, and perform discharge aging.
Bolt 2 pieces Bolt 6 pieces
Dust box
Slit
Fig. 7.19 Gas dust collection unit
5.20
5.20.1
LOW TEMPERATURE SENSOR UNIT

Replacement Method
(1) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser oscillator. (2) Disconnect the cable from the connector on the unit.
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(3) Remove the screws securing the unit, then replace the unit with a new one. (4) Connect the cable the connector. (5) After the replacement, no adjustment is needed.
B-70475EN/01
Screw
Low temperature sensor

Fig. 7.20 Low temperature sensor unit
5.21
5.21.1
OXYGEN SENSOR UNIT

Replacement Method
(1) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser oscillator. (2) Remove the cover on the shutter PCB for C2000i-C(Short optical path length type and CE Marking). (3) Detach the cable from the connector (XS30) installed at the top of the oxygen sensor. (4) Remove the screws at the four locations shown in the figure below. (5) Install a new oxygen sensor. (6) Attach the cable to the connector (XS30). (7) Install the cover on the shutter PCB.
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Connector (XS30) Connector (XS30)
Screws (M410)
Screws (M410) * Fixed from the back
C4000i-C, C6000i-C
Fig. 5.21 Oxygen sensor unit
C2000i-C
5.22
WARNING LIGHT UNIT
The warning light unit is composed of the warning light and the plate for installation. Therefore, maintain by exchanging only warning lights. Spec.No. of Warning light unit: A49L-0001-0086 A49L-0001-0086#L A49L-0001-0086#2L Standard with pole with long pole
5.22.1
Replacement Method
Exchange the warning light according to the following procedures. Figure 5.22 shows out view of the warning light. This figure is a standard type. The exchange method is the same with pole type and the long pole type. (1) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser oscillator. (2) Remove the four screws (M4) fixed the warning light unit. Disconnect the cable from the connector (CN255), and detach the warning light unit from the oscillator. (3) Remove the four screws (M5) fixed the warning light, and detach the warning light from the plate. (4) Install a new warning light on the plate removed by (3) with packing and the attached screws. (Put on the attached spring washer, washer and O ring to the screws.) (5) Fix the cable to connector (CN255) and fix the warning light unit. In that case, install the warning light unit so that the volume adjustment lever may turn inside of the oscillator. (6) After it exchanges warning light unit, it is not necessary to adjust it.
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Volume lever (not sound) M54 (attachment)

Spring washer(attachment) washer(attachment)
packing(attachment) M44
O ring(attachment)
Plate Connector
Fig.5.22 Warning light unit (Standard)
5.23
5.23.1
GAS FITTING AND WATER FITTING

Gas Fitting
5.23.1.1 Tightening method

(1) Cut the end face of the tube at right angles, then installs a box nut, back ferrule, and front ferrule on the tube as shown below. At this time, pay attention to their directions. (2) Insert the tube through the fittings all the way through, then tightens the box nut until you feel a resistance with fingers. Next, tighten the box nut further by one and a quarter turns with a wrench.
Back ferrule Front ferrule
Gas tube
Nut
Fig.5.23.1 Gas tube and Fitting
Fitting
(3) After the work above, mark the box nut and the main fittings as shown in the figure.
5.23.1.2 Re-installing
(1) Before removing the tube, provide marks so that the positions of the box nut and the main fittings can be identified. (2) Remove the tube.
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(3) When installing the tube, ensure that the mark on the box nut of the fittings matches the position marked in step (1). (4) If the same marked position is reached just by gently turning the box nut by fingers, cut the tube area where the old ferrule was installed, then install a new ferrule according to the procedure described in Subsection 5.23.1.1.
5.23.2
WATER FITTING
5.23.2.1 Tightening method

(1) Cut the end face of the tube at right angles, then installs a box nut and sleeve on the tube as shown below. At this time, pay attention to their directions. (2) Insert the tube through the fittings all the way through, then tightens the box nut until you feel a resistance with fingers. Next, tighten the nut further by one and a half turns with a wrench.
Nut Sleeve
Water tube
Water fitting
Fig.5.23.2 Water tube and Fitting
(3) After the work above, mark the box nut and the main fittings as shown in the figure.
5.23.2.2 Re-installing
(1) Before removing the tube, provide marks so that the positions of the box nut and the main fittings can be identified. (2) Remove the tube. (3) When installing the tube, ensure that the mark on the box nut of the fittings matches the position marked in step (1). (4) If the same marked position is reached just by gently turning the box nut by fingers, cut the tube area where the old sleeve was installed, then install a new sleeve according to the procedure described in Subsection 5.23.2.1.
5.23.3
Fittings and Tube Ordering Information
The ordering information of the fittings, ferrules, sleeve, and box nut is provided below. (A sleeve and box nut is delivered together with fittings.)
Table 5.23.3 (a) Gas fittings Tube diameter Screw section
Ordering information
1/4 Nipple 3/8 1/2
1/4 3/8 1/4 3/8 3/8 1/2
A97L-0200-0648#H-2B-B A97L-0200-0648#H-2C-B A97L-0200-0648#H-3B-B A97L-0200-0648#H-3C-B A97L-0200-0648#H-4C-B A97L-0200-0651#N-16D-B
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Tube diameter Screw section
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Ordering information
1/4 Elbow 3/8 1/2 Ferrule (Brass) Box nut 1/4 3/8 1/2 1/4 3/8 1/2
1/4 3/8 1/4 3/8 3/8 1/2 Table 5.23.3 (b) Gas tube
A97L-0200-0648#L-2B-B A97L-0200-0648#L-2C-B A97L-0200-0648#L-3B-B A97L-0200-0648#L-3C-B A97L-0200-0648#L-4C-B A97L-0200-0648#L-4D-B A98L-0004-0348#2-B A98L-0004-0348#3-B A98L-0004-0348#4-B A97L-0200-0648#UN-2-B A97L-0200-0648#UN-3-B A97L-0200-0648#UN-4-B
Diameter
Color
Material
Ordering information (x: Specifies a length not longer than 10 m in steps of 1 m.)
1/4
3/8 1/2
Yellow Blue Transparent Yellow Blue Transparent Transparent
Polyethylene Polyethylene PFA Polyethylene Polyethylene PFA PFA
A98L-0004-0261#4-Y-x A98L-0004-0261#4-BU-x A98L-0004-0435#8-x A98L-0004-0261#6-Y-x A98L-0004-0261#6-BU-x A98L-0004-0435#4-x A98L-0004-0435#5-x
Table 5.23.3 (c) Water fittings (Material: Brass) Tube diameter Screw section Ordering information
6mm 8mm Nipple 10mm 12mm 16mm 6mm 8mm Elbow 10mm 12mm 16mm 6mm 8mm 10mm 12mm 16mm
Union
1/8 1/4 1/4 3/8 1/4 3/8 1/2 3/8 1/2 1/2 1/8 1/4 1/4 3/8 1/4 3/8 1/2 3/8 1/2 1/2 -
A97L-0200-0651#N-06A-B A97L-0200-0651#N-06B-B A97L-0200-0651#N-08B-B A97L-0200-0651#N-08C-B A97L-0200-0651#N-10B-B A97L-0200-0651#N-10C-B A97L-0200-0651#N-10D-B A97L-0200-0651#N-12C-B A97L-0200-0651#N-12D-B A97L-0200-0651#N-16D-B A97L-0200-0651#L-06A-B A97L-0200-0651#L-06B-B A97L-0200-0651#L-08B-B A97L-0200-0651#L-08C-B A97L-0200-0651#L-10B-B A97L-0200-0651#L-10C-B A97L-0200-0651#L-10D-B A97L-0200-0651#L-12C-B A97L-0200-0651#L-12D-B A97L-0200-0651#L-16D-B A97L-0200-0651#U-06-B A97L-0200-0651#U-08-B A97L-0200-0651#U-10-B A97L-0200-0651#U-12-B A97L-0200-0651#U-16-B
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Tube diameter Screw section Ordering information
Union elbow
Sleeve
Box nut
6mm 8mm 10mm 12mm 16mm 6mm 8mm 10mm 12mm 16mm 6mm 8mm 10mm 12mm 16mm
A97L-0200-0651#LU-06-B A97L-0200-0651#LU-08-B A97L-0200-0651#LU-10-B A97L-0200-0651#LU-12-B A97L-0200-0651#LU-16-B A97L-0200-0651#S-06 A97L-0200-0651#S-08 A97L-0200-0651#S-10 A97L-0200-0651#S-12 A97L-0200-0651#S-16 A97L-0200-0651#UN-06-B A97L-0200-0651#UN-08-B A97L-0200-0651#UN-10-B A97L-0200-0651#UN-12-B A97L-0200-0651#UN-16-B
Diameter
Color
Table 5.23.3 (d) Water tube Ordering information Material (x: Specifies a length not longer than 10 m in steps of 1 m.)
6mm 8mm 10mm 12mm 16mm
White Black White Black White Black White Black White Black
Nylon Nylon Nylon Nylon Nylon Nylon Nylon Nylon Nylon Nylon
A98L-0004-0263#8-W-x A98L-0004-0263#8-BA-x A98L-0004-0263#3-W-x A98L-0004-0263#3-BA-x A98L-0004-0263#4-W-x A98L-0004-0263#4-BA-x A98L-0004-0263#5-W-x A98L-0004-0263#5-BA-x A98L-0004-0263#6A-W-x A98L-0004-0263#6A-BA-x
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5.24
ALIGNMENT OF THE RESONATOR
The theory of alignment is such that while monitoring the laser output signal with a tester, you adjust the angle of each mirror to obtain a maximum output power. Once this adjustment is made, all mirrors are set for maximum output. So, if a mirror is cleaned or replaced, the original state or original beam mode can be restored by adjusting only that mirror to maximize its output power.
Fig.5.24(a) Position of adjustment micrometer for alignment (C2000i-C)
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Fig.5.24(b) Position of adjustment micrometer for alignment (C4000i-C)
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Fig.5.24(c) Position of adjustment micrometer for alignment (C6000i-C)
5.24.1
Alignment Procedure during Installation after Transportation
Misalignment can occur due to transportation or storage state (as in the case where a clamp is not removed). Be sure to make an alignment according to the procedure described in this subsection at the first installation.
5.24.1.1 Preparation
(1) Record the adjustment screw readings of the output coupler (O.C.), rear mirror (R.M.), and folding mirrors (F.M.). (2) Obtain a maximum power with the folding mirrors. C2000i-C: FM1, C4000i-C: FM4, C6000i-C: FM1 and FM4
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(3) Collect a burn pattern, and use it as the start state for alignment. Near (3m) : Cold mode or Hot mode (Internal discharge for three minutes) Far : Cold mode or Hot mode (Internal discharge for three minutes) (4) If the mode is finally good, end this procedure. If it is not so, perform Subsection 5.24.1.2
5.24.1.2 Adjustment method

(1) For C2000i-C (a) Obtain a maximum power based on FM1 by using O.C. as the reference. (b) Obtain a maximum power based on FM1 by using R.M. as the reference. (c) Collect a burn pattern. If the mode is good, end this procedure. If not, start all over again from step (a). At this time, collect a burn pattern in each step.
FM1 FM2 FM3 RM OC
(2) For C4000i-C (a) Obtain a maximum power based on FM4 by using R.M. as the reference. (b) Obtain a maximum power based on FM4 by using O.C. as the reference. (c) Obtain a maximum power based on FM2 by using O.C. as the reference. (d) Obtain a maximum power based on FM6 by using R.M. as the reference. (e) Collect a burn pattern. If the mode is good, end this procedure. If not, start all over again from step (a). At this time, collect a burn pattern in each step. If the mode is finally good, end this procedure.
FM6 FM5 FM1 FM2 OC FM3 RM FM4
(3) For C6000i-C (a) Obtain a maximum power based on FM1 by using FM4 as the reference. (b) Obtain a maximum power based on FM1 by using O.C. as the reference. (c) Obtain a maximum power based on FM4 by using R.M. as the reference. (d) Collect a burn pattern. If the mode is good, end this procedure. If not, start all over again from step (a). At this time, collect a burn pattern in each step. If the mode is finally good, end this procedure.
FM1 FM2 RM
OC FM3 FM4
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5.24.2
Alignment Procedure at Mirror Cleaning Time
When cleaning or replacing mirrors of a laser oscillator already adjusted using the maximum power method, use the alignment procedure described in this subsection. All folding mirrors need not be cleaned each time.
(1) Record the adjustment screw readings of the output coupler (O.C.), rear mirror (R.M.), and folding mirrors (F.M.). (2) Collect a burn pattern. This is used for checking mirror dirt. If the mode is good, end the adjustment. Near (3m) : Cold mode or Hot mode (Internal discharge for three minutes) Far : Cold mode or Hot mode (Internal discharge for three minutes)

(1) For C2000i-C (a) Clean the O.C. and R.M. mirrors. (b) Obtain a maximum power based on O.C. by using R.M. as the reference. (c) Clean the FM1, FM2, and FM3 mirrors. (d) Obtain a maximum power based on FM1.
FM1 FM2 FM3
OC
RM
(2) For C4000i-C (a) Clean the O.C. and R.M. mirrors. (b) Obtain a maximum power based on O.C. by using R.M. as the reference. (c) Clean the FM3 and FM4 mirrors. (d) Obtain a maximum power based on FM4. (e) Clean the FM1, FM2, FM5, and FM6 mirrors. (f) Obtain a maximum power based on FM6 by using FM2 as the reference.
(3) For C6000i-C (a) Clean the O.C. and R.M. mirrors. (b) Obtain a maximum power based on O.C. by using R.M. as the reference. (c) Clean the FM1 and FM2 mirrors. (d) Obtain a maximum power based on FM1. (e) Clean the FM3 and FM4 mirrors. (f) Obtain a maximum power based on FM4.
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FM1 FM2 RM OC FM3 FM4
5.24.3
Alignment Procedure for Adjusting All Mirrors
This subsection describes the procedure for readjusting a laser oscillator already installed and adjusted using an old method, to restore its maximum output state. Use this procedure in the following cases: To adjust an existing oscillator that has not been adjusted using the maximum power method When an oscillator is disassembled because of a failure When all mirrors are cleaned or replaced at a time For cleaning or replacing the mirrors, follow the procedure described in Subsection 3.3.4.1. Do not remove all mirrors at a time inadvertently.
(1) Record the adjustment screw readings of the output coupler (O.C.), rear mirror (R.M.), and folding mirrors (F.M.). (2) Collect a burn pattern, and use it as the start state for alignment. Near (3m) : Cold mode or Hot mode (internal discharge for three minutes) Far : Cold mode or Hot mode (internal discharge for three minutes)

(1) For C2000i-C (a) Obtain a maximum power based on O.C. by using the R.M. as the reference. (b) Obtain a maximum power based on FM1 by using the O.C. as the reference. (c) Obtain a maximum power based on FM1 by using the R.M. as the reference. (d) Collect a burn pattern. If the mode is good, end this procedure. If not, start all over again from step (a). At this time, collect a burn pattern in each step. If the mode is finally good, end this procedure.
FM1 FM2 FM3
OC
RM
(2) For C4000i-C (a) Obtain a maximum power based on O.C. by using the R.M. as the reference. (b) Obtain a maximum power based on FM4 by using the R.M. as the reference. (c) Obtain a maximum power based on FM4 by using the O.C. as the reference. (d) Obtain a maximum power based on FM2 by using the O.C. as the reference. (e) Obtain a maximum power based on FM6 by using the R.M. as the reference. (f) Collect a burn pattern. If the mode is good, end this procedure. If not, start all over again from step (a). At this time, collect a burn pattern in each step. If the mode is finally good, end this procedure.
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(3) For C6000i-C (a) Obtain a maximum power based on O.C. by using the R.M. as the reference. (b) Obtain a maximum power based on FM1 by using the O.C. as the reference. (c) Obtain a maximum power based on FM4 by using the R.M. as the reference. (d) Adjust FM1 to obtain a maximum power based on FM4. (f) Collect a burn pattern. If the mode is good, end this procedure. If not, start all over again from step (a). At this time, collect a burn pattern in each step. If the mode is finally good, end this procedure.
FM1 FM2 RM OC FM3 FM4
5.24.4
Obtaining a Maximum Power
(1) Using the conditions Pc = rated output, Duty cycle = 15%, and Frequency = 100 Hz, adjust the duty cycle to determine the actual conditions for internal discharge. Maximum value of Duty is 25% for C2000i-C, 20% for C4000i-C and 13% for C6000i-C. If a large output is used, the mode present when a maximum power is obtained is not always the best due to thermal distortion of each mirror. A capability of detecting an output variation due to base output fluctuation, tester resolution, chiller temperature, and so forth is required. If the discharge area is narrow, the output variation dependent on a shift of the internal optical axis becomes small. (2) Connect the tester to the BNC terminal CN59 of shutter PCB. (3) Start internal discharge. Start adjustment when the output becomes stable after 5 minutes.
Output terminal(CN59) for Alignment
Fig.5.24.4 External view of shutter PCB
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5.24.4.2 Procedure
By using two mirrors A and B with mirror A used as the reference, find a position where a maximum power is obtained based on mirror B. While turning mirror A in one direction in steps of an interval of the micrometer, for example, 1 division (10 m) or 2 divisions (20 m), adjust mirror B for each division, and obtain a maximum power at each point of mirror A. Graph the data at each point of A, and determine a mirror A position representing a maximum power. Then, by aligning mirror A at such a position, adjust mirror B to obtain a maximum power. Two micrometers are provided for each mirror. So, be sure to obtain a maximum power with one axis, then obtain a maximum power with the other axis. Do not move the X-axis and Y-axis at the same time.
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5 15 10 5 Power Initial setting of A = 7.590
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Clockwise
B is adjusted to obtain a maximum power.
(1)
(2) (3)
(4)
(5) Same state as (1) In (3), the power is decreased, indicating that the direction is wrong. So, in (5), the adjustment screw is returned to the original position.
A maximum power is obtained based on B. A=7.580 Power Counterclockwise A=7.570 A=7.590
B is adjusted to obtain a maximum power.
(7) (6) (1) A=7.590
(8)
(9) (10)
A maximum power is obtained based on B. A=7.600 A=7.610 A=7.620 A=7.630 A=7.640
Do not determine the maximum power position of A at the actual maximum power point (peak point). Instead, find the first position (1)' with the same power after a peak, and set a position halfway between (1) and (1)'. Adjust B to obtain a maximum power at that position. Power Maximum power position of A = (7.590+7.638) / 2 (7) (6) (1) (10) (8) (9) (1) = 7.614
20% below peak
A=7.590
A=7.614
A=7.638
A=7.650
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5.25
5.25.1
POWER CALIBRATION METHOD

Setting a Power Input Compensation Coefficient
After replacing the rear mirror of the laser oscillator or replacing the power sensor unit, check and set the power input compensation coefficient. A laser beam is directly measured. So, be sure to strictly observe the safety precautions related to a laser beam. (1) Set the following parameters: Parameter No.15208 4096 (For C4000i-C or C6000i-C), 6144 (For C2000i-C) Parameter No.15209 200 (For C2000i-C), 400 (For C4000i-C), 600 (For C6000i-C) (2) By collecting the mode, check if the mirrors of the oscillator are aligned correctly. If the mode is incorrect, make a readjustment. (3) Perform internal discharge at the rated output for 1 minute or more, run the program below in the automatic mode, and place a power probe in the middle of the optical path to measure the output value Pr of a laser beam irradiated outside. At this time, it is recommended to make a measurement at the beam outlet. Record the actual output value Pa displayed on the laser setting screen simultaneously with this measurement. G32 P1 Q1 ; G24 S1800 Q100 R20000 ; G32 P0 ; (irradiation for 20 seconds) M30
CAUTION 1) When the rated output laser beam is irradiated to the probe, the maximum allowable laser beam strength of the probe is exceeded, resulting in a probe surface destruction. So, when making a measurement, decrease the output to prevent the probe surface from being destructed. 2) If dust or dirt is attached to the probe surface, the probe surface may be destructed by a decreased output.
(4) If power input compensation coefficient K is set correctly in parameter No.15215, Pa = Pr' should result. If the value of Pa differs from Pr' by 5% or more, set power input compensation coefficient K (parameter No.15215) again according to the following expression: K (new value) = Pr' (probe-converted value)/Pa K (old value) (5) Make a measurement again as described in step (3) above to check that Pa = Pr'.
5.26
ALIGNMENT OF THE BEAM FOLDING UNIT (C2000i-C, C4000i-C SHORT OPTICAL PATH LENGTH TYPE)
The beam folding unit has two mirrors. One mirror is fixed, on which laser beams from the output coupler are reflected first. The other is movable. (1) Start the oscillator and make sure that laser beams can be irradiated. (2) Attach an acrylic plate at about 3 m away from the beam outlet of the oscillator, then collect the burn pattern of the CO2 gas laser beam (rated output, CW, irradiation period of 0.1 second). Do not touch the acrylic plate after beam pattern collection. (3) Check if the CO2 gas laser beam and the guide laser beam are aligned with each other. If not, make an adjustment according to Section 5.13.
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(4) Adjust the adjustment screw of the beam folding unit so that the center of the oscillator laser beam matches the center of the guide laser beam. Do not touch the screws at the support points. The spacing of support points of the mirror holder is adjusted to 3 mm.
Fig.5.26(a) Beam folding unit adjustment position (C2000i-C)
A slant movement can be made with the adjustment screws.
Fig.5.26(b) Beam folding unit adjustment position (C4000i-C)
5.27
HEAT EXCHANGER
A97L-0201-0556#B A97L-0201-0691#B A97L-0201-0828 A97L-0201-0439#B C2000i-C C4000i-C, C6000i-C C2000i-C C4000i-C, C6000i-C
Spec.No. of Heat exchanger (OUT): Spec.No. of Heat exchanger (IN):
5.27.1
Replacement
NOTE 1) Be careful not to damage the discharge tubes and the cooling water tubes in exchanging the heat exchanger. 2) Put on gloves not to injure your hands in touching the heat exchanger. 3) Be careful for the cooling water in the heat exchanger not to scatter.
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5.27.1.1 C2000i-C
Figures show maintenance side of C2000i-C. (1) Replace method of inlet side heat exchanger (a) Check gas leak rate by automatic leak check function. (b) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser oscillator. Turn off the power to the chiller unit. (c) Drain the cooling water from the laser oscillator. (refer to subsection 2.4.2) Disconnect the cooling water tubes and fittings from the inlet side heat exchanger.
Gas pipe 2A Water fitting for inlet side heat exchanger Fan unit Outlet side heat exchanger Water fitting for outlet side heat exchanger Inlet side heat exchanger Cooling water tube
Fig.5.27.1(a) Surround of heat exchanger of C2000i-C
Spring nut (M6)
Spring nut (M6)
(d) Disconnect all the gas tubes from joint 1D. Cover the openings of the removed gas tubes with masking tape.
Gas pipe 1C
Joint 1D
Fig.5.27.1(b) Surround of Gas pipe 1C of C2000i-C
(e) Mark to locate and detach a pair of the gas pipe 2A, the joint 1D and the gas pipe 1C. Cover the openings of the removed the gas pipe 2A, the joint 1D and the gas pipe 1C with masking tape. (f) Detach the inlet side heat exchanger removing four spring nuts (M6) referring to Fig.5.27.1(a), for the inlet side heat exchanger not to fall. (The inlet side heat exchanger is not likely to fall by using the jack or the spacer, shown in Fig.5.27.1(h)) (g) Attach the new inlet side heat exchanger with four spring nuts. (It is smooth to attach the inlet side heat exchanger by using the jack or the spacer.)
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NOTE Use the torque wrench not to damage the stud bolt on the inlet side heat exchanger in tightening spring nuts in connection with gas pipe 2A.(M6 spring nut tightening torque: 5.88Nm[60kgfcm])
(h) Detach the masking tape from and attach a pair of the gas pipe 2A, the joint 1D and the gas pipe 1C.
NOTE Use the torque wrench not to damage the stud bolt on the inlet side heat exchanger in tightening spring nuts.(M6 spring nut tightening torque: 5.88N m[60kgfcm])
(i) Attach the cooling water tubes and fitting to the inlet side heat exchanger. (j) Check gas leak rate by automatic leak check function, and make sure that it is almost same as before exchanging. (2) Replace method of outlet side heat exchanger (a) Check gas leak rate by automatic leak check function. (b) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser oscillator. Turn off the power to the chiller unit. (c) Drain the cooling water from the laser oscillator. (refer to Subsection 2.4.2) Disconnect the cooling water tubes and fittings from the outlet side heat exchanger. (d) Detach the fan unit and the fan-assisted radiator from the laser oscillator. (refer to Section 5.14 and Fig.5.27.1(a)) (e) Mark to locate and detach a pair of the gas dust collector. Cover the openings of the removed the gas dust collection with masking tape (f) Remove the spring nut and detach joint 2A from the outlet side heat exchanger, not to damage discharge tubes. Cover the openings of the removed the joint 2A with masking tape. (shown in Fig.5.27.1(c))
Joint 2A Spring nut (M6)
Fig.5.27.1(c) Surround of outlet side heat exchanger after detaching fan unit of C2000i-C (g) Detach the outlet side heat exchanger removing four spring nuts (M6) referring to Fig.5.27.1(a), for the outlet side heat exchanger not to fall. (The outlet side heat exchanger is not likely to fall by using the jack or the spacer, shown in Fig.5.27.1(h)) (h) Attach the new outlet side heat exchanger with four spring nuts. (It is smooth to attach the outlet side heat exchanger by using the jack or the spacer.)
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NOTE Use the torque wrench not to damage the stud bolt on the outlet side heat exchanger in tightening spring nuts. (M6 spring nut tightening torque: 5.88N m[60kgfcm])
(i) Detach the masking tape and attach the joint 2A to the outlet side heat exchanger with four spring nuts (M6), not to damage discharge tubes.
NOTE Use the torque wrench not to damage the stud bolt on the outlet side heat exchanger in tightening spring nuts in connection with joint 2A.(M6 spring nut tightening torque: 5.88Nm[60kgfcm])
(j) Detach the masking tape and attach a pair of the gas dust collector according to marking.
NOTE Use the torque wrench not to damage the stud bolt on the outlet side heat exchanger in tightening spring nuts in connection with gas dust collector.(M6 spring nut tightening torque: 5.88Nm[60kgfcm])
(k) Attach the fan unit and the fan-assisted radiator. (refer to subsection 5.14) (l) Attach the cooling water tubes and fitting to the outlet side heat exchanger. (m) Check gas leak rate by automatic leak check function, and make sure that it is almost same as before exchanging.
5.27.1.2 C4000i-C and C6000i-C

Figures show maintenance side of C4000i-C. (1) Replace method of inlet side heat exchanger (a) Check gas leak rate by automatic leak check function. (b) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser oscillator. Turn off the power to the chiller unit. (c) Drain the cooling water from the laser oscillator. (refer to subsection 2.4.2) Disconnect the cooling water tubes and fittings from the inlet side heat exchanger. (refer to Fig.5.27.1(d))
Gas pipe 2A Water fitting for inlet side heat exchanger Fan unit Cooling water tube for inlet side heat exchanger Water fitting for outlet side heat exchanger Cooling water tube for outlet side heat exchanger
Fig.5.27.1(d) Surround of heat exchanger of C4000i-C
(d) Disconnect all the gas tubes from joint 1C. Cover the openings of the removed gas tubes with masking tape.(refer to Fig.5.27.1(d))
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Gas pipe 1C
Gas tube
Fig.5.27.1(e) Surround of gas pipe 1C of C4000i-C
(e) Mark to locate and detach a pair of the gas pipe 2A and the gas pipe 1C. Cover the openings of the removed the gas pipe 2A and the gas pipe 1C with masking tape. (f) Detach the inlet side heat exchanger, removing the six hexagon socket head cap screw (M516) and loosening the four hexagon socket head cap screw (M630) and lower the inlet side heat exchanger gradually, for the inlet side heat exchanger not to fall. (shown in Fig.5.27.1(e)) (The inlet side heat exchanger is not likely to fall by using the jack or the spacer, shown in Fig.5.27.1(h))
M516
M630
Fig.5.27.1(f) Position of hexagon socket head cap screw to fasten inlet side heat exchanger.
(g) Attach the plate of the old inlet side heat exchanger to the new inlet side heat exchanger.
NOTE Be careful not to damage the stud bolt on the inlet side heat exchanger in tightening spring nuts in attaching the plate.
(h) Adjust the height of the new inlet side heat exchanger by tightening the four hexagon socket head cap screw (M630) to attach a pair of the gas pipe 2A to the new inlet side heat exchanger. (i) Fasten the new inlet side heat exchanger with the six hexagon socket head cap screw (M516). (It is smooth to attach the inlet side heat exchanger by using the jack or the spacer.) (j) Detach the masking tape from and attach a pair of the gas pipe 2A and the gas pipe 1C.
NOTE Use the torque wrench not to damage the stud bolt on the inlet side heat exchanger in tightening spring nuts in connection with gas pipe 2A.(M6 spring nut tightening torque: 5.88Nm[60kgfcm])
(k) Attach the cooling water tubes and fitting to the inlet side heat exchanger. (l) Check gas leak rate by automatic leak check function, and make sure that it is almost same as before exchanging.
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(2) Replace method of outlet side heat exchanger (a) Check gas leak rate by automatic leak check function. (b) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser oscillator. Turn off the power to the chiller unit. (c) Drain the cooling water from the laser oscillator. (refer to Subsection 2.4.2) Disconnect the cooling water tubes and fittings from the outlet side heat exchanger. (d) Detach the fan unit and the fan-assisted radiator from the laser oscillator. (refer to Section 5.14 and Fig.5.27.1(d)) (e) Mark to locate and detach a pair of the gas dust collector. Cover the openings of the removed the gas dust collection with masking tape (f) Remove the four hexagon headed bolt (M820) and detach the joint 2A from the outlet side heat exchanger, not to damage discharge tubes. Cover the openings of the removed the joint 2A with masking tape. (shown in Fig.5.27.1(g))
Joint 2A M 820
Spring nut (M10)
Fig.5.27.1(g) Surround of outlet side heat exchanger of C4000i-C
(g) Detach the outlet side heat exchanger, removing the four spring nuts (M10) on the four corners of the outlet side heat exchanger (refer to Fig.5.27.1(g)), for the outlet side heat exchanger not to fall. (The outlet side heat exchanger is not likely to fall by using the jack or the spacer, shown in Fig.5.27.1(h)) (h) Attach the new outlet side heat exchanger with four spring nuts (M10). (It is smooth to attach the outlet side heat exchanger by using the jack or the spacer.)
NOTE Be careful not to damage the stud bolt on the outlet side heat exchanger in tightening spring nuts.
(i) Detach the masking tape from and attach the joint 2A to the outlet side heat exchanger with the four spring nuts, not to damage discharge tubes. (n) Detach the masking tape and attach a pair of the gas dust collector according to marking.
NOTE Use the torque wrench not to damage the stud bolt on the outlet side heat exchanger in tightening spring nuts in connection with gas dust collector.(M6 spring nut tightening torque: 5.88Nm[60kgfcm])
(j) Attach the fan unit and the fan-assisted radiator. (refer to subsection 5.14) (k) Attach the cooling water tubes and fitting to the outlet side heat exchanger. (l) Check gas leak rate by automatic leak check function, and make sure that it is almost same as before exchanging.
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Jack
Plate
Fig.5.27.1(h) Use of Jack
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6.LASER SOFTWARE FUNCTION
LASER SOFTWARE FUNCTION
Chapter 6, LASER SOFTWARE FUNCTION consists of the following contents: 6.1 MAINTENANCE SCREEN .............................................................................................................183 6.2 POWER FEEDBACK FUNCTION BASED ON THE ACTUAL OUTPUT ESTIMATION METHOD..........................................................................................................................................193 6.3 OIL EXCHANGE TIME LIMIT ALARM MONITOR FOR TURBO BLOWER..........................197 6.4 LASER POWER SUPPLY AUTOMATIC ADJUSTMENT FUNCTION .....................................199 6.5 TURBO BLOWER OIL ABNORMALLY TEMPERATURE DETECT FUNCTION...................201 6.6 SUPPORT FUNCTION FOR START-UP AFTER TURBO OIL EXCHANGE.............................202
6.1
6.1.1
MAINTENANCE SCREEN
Overview
The laser maintenance screen function can display maintenance information for the preventive maintenance and failure investigation, and operate data so that the decrease of failure rate and the efficiency of work. The laser maintenance screen is composed of the following screens.
Name of screen 1 2 3 4 5 6 7 8 Screens for power calibration coefficient history Screens for parts working time History screens of alarm related to electrical discharge Laser alarm history screens Pulse power feedback screens Power sensor time constant measurement screen Leak check screen Laser tuning screen Function History of Power calibration coefficient and RF voltage No.1 can be referred. Working time for the parts needed periodical maintenance is counted and displayed. When the alarms related to the electrical discharge are generated, the related data can be logged and referred later. Laser alarms and warnings are logged and can be referred later. Table data for the pulse power feedback by actual power presumption method can be read into CNC and edited. The time constant of laser power sensor can be measured. Leak of laser oscillator can be checked. The data used at maintenance are displayed and operated in 1 screen. It is possible to command running beam internally with shutter closed.
It has another function below:

Function 1 Output of the saved maintenance data to the memory card Input the table data for pulse power feedback from the memory card
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6.1.2
Method of Operation
(1) Set bit 0 (MNT) of parameter No. 15160 to 1 to enable maintenance screen display.
#7 15160 #6 #5 #4 #3 #2 #1 MDS #0 MNT
MNT 0: 1: MDS 0: 1: Disables data input on the laser maintenance screen. Enables data input on the laser maintenance screen. Does not display the laser maintenance screen. Displays the laser maintenance screen.
(2) Press the "Setting" operation key on the CNC. Then, press the soft keys at the bottom of the CNC screen as follows:
POWER SET DATA 3D.TRN
STATUS MAINT.
PW.CLB ACT TM DISCH.
L ALM
PWR FB
PS TC
LEAK
TUNE
6.1.3
6.1.3.1
Display Information Compensation coefficient history display
When the power calibration coefficient setting function is operated, a power calibration coefficient and the current RFV1 value and date/time are preserved. Up to 30 items of data can be recorded. If this limit is exceeded, the oldest data is deleted to record new data.
Pressing the [PW.OFS] soft key displays the power calibration coefficient history screen. This screen consists of three pages. One page displays ten compensation coefficients. Data with younger dates is displayed in upper fields on the screen. When a new compensation coefficient is registered, it is displayed on the top line of the first page.
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To switch pages, use the "PAGE " and PAGE " keys on the MDI panel. The preserved compensation coefficient data cannot be edited.
6.1.3.2
Parts run time display
Pressing the [ACT.TM] soft key causes the operation time display screen to be displayed. To switch pages, use the "PAGE " and PAGE " keys on the MDI panel.
If you enter a limit time in a set time field in advance, the operation time display will turn red when the operation time exceeds 90% of the set time. If it exceeds the set time, the operation time display in red reverse video. If working time is over the limit time for any item, warning signal (F226#0) is output to PMC. And if the following items are over the limit time, the signal (F226 #1 to #7) is output corresponding to the each item. Please use these signals in case warning lamps are equipped on an operators panel. Turbo-blower overhaul F226#1 Blower oil change F226#2 Inner mirror cleaning F226#3 Mirror cleaning of optical compensation unit F226#4 Chiller coolant change F226#5 The set time and the operation time are in 0.1-hour units. Methods of entering a set time and resetting an operation time In this normal state, this screen prohibits the entry of data so that data such as operation times is not deleted by mistake. To enter data, first set bit 1 of parameter No. 15610 (MDS) to 1. To enter a set time or reset an operation time, position the cursor on the desired field, using the arrow keys as appropriate, enter a setting from the MDI unit, and press the <INPUT> key. No special soft keys such as all clear are not available. To reset an operation time, set 0.
6.1.3.3
Discharge-related alarm history display
When the CNC detects any of the following alarms, the CNC automatically preserves data such as power supply operation state and displays such data on the discharge-related alarm history screen:
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- ALM.4063 R/F power supply error - ALM.4066 Abnormal discharge start - ALM.4076 Decreased laser power - ALM.4088 Abnormal discharge tube voltage If alarms subject to data preservation are issued, up to five data items can be preserved. If an alarm is issued besides the existing five alarms, the oldest data is deleted to preserve the new data. In addition to five data items preserved for issued alarms, one data item collected at the end of normal power calibration operation is preserved as normal data. Thus, data for an alarm issued can be compared with normal data.
Alarm code 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Content of alarm RFF DCI2 DCI1 DCI3 RFV OH Vc RFI RFF other DCI other DCI1 other DCI3 other RFV other OH other Vc other RFI other Comment
Single alarm
Plural alarm
Pressing the [ALARM] soft key displays the discharge-related alarm history screen. This screen consists of six pages. The first page displays data collected at the end of normal power calibration, and the second through the sixth pages display data for alarms issued. To switch pages, use the "PAGE " and PAGE " keys on the MDI panel. The discharge-related alarm history screen allows data to be referenced only. The discharge-related alarm history screen does not allow preserved data to be modified and deleted. The CNC preserves the data below when an alarm mentioned above is issued and when power calibration ends. (1) Data preserved at the end of normal compensation operation Compensation end date Compensation end time Output conditions (output, frequency, duty cycle) Actual output Power calibration coefficient Power supply data (RFV, RFI, DCV, DCI, DCW)
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(2) Data preserved when an alarm is issued Alarm issue date Alarm issue time Issued alarm number Sequence number at the time of alarm issue Elapsed time after switching to a sequence number at the time of alarm issue Output conditions (output, frequency, duty cycle) Actual output Power calibration coefficient
6.1.3.4
Laser alarm history screens
The history of only Laser alarms and warnings are displayed. Following data can be logged 50 in all. The oldest datum is deleted and new one is logged in case of exceeding 50 items. Laser warning Laser alarm (1) Laser warning Information for maintenance is logged as laser warning. The information is only logged. So, message or PMC signal is not output. Laser warning is only following information now.
Warning No. Message Meaning 0001 PURGE INCOMPLETE CNC is powered off before completing purge.
(2) Reference of logged laser alarms Pushing soft-key [L ALARM] makes displaying laser alarm history screen (9 inch CRT image). Five Laser alarms and warnings are logged in one page and total 10 pages are included. PAGE and PAGE keys on MDI panel should be used to change the pages. Logged data cannot be deleted.
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6.1.3.5
Pulse power feedback screens
Table data for actual power presumption that are used for pulse power feedback by actual power presumption method can be referred and input. Pushing soft-key [PWR.FB] with setting 1 to parameter No.29000#1(PTB) makes displaying pulse power feedback screen.
6.1.3.6
Power sensor time constant measurement screen
A time constant of laser power sensor can be automatically measured in power sensor time constant measurement screen. Pushing soft-key [PW SNS] with setting 1 to parameter No.2900#2 (PTC) makes displaying power sensor measurement screen. CNC measures an actual delay time by measuring a power sensor output with output laser and sets the time to the parameter as a time constant. In practical, beam stops after running beam with shutter closed for a set time by a set power and CNC measures the time that a monitored power of power sensor is down. The measured time is set in parameter No.29005 as the time constant of linear delay filter. (1) Sequence of time constant measurement Pushing soft-key [STRT] in time constant measurement screen or setting PMC signal PTCMR to 1 makes start of measuring.
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Push soft-key [QUIT] or set PMC signal PTCMR to 0 in order to quit the measurement. Pushing soft-key [(OPRT)] in time constant measurement screen makes displaying soft-key [STRT] and [QUIT]. A peak laser power should be set in parameter No.29003 because of a rated power is different for each type of oscillator. In addition, beam output time should be set in parameter No.29004. A beam is internally run with shutter closed in case of satisfying following conditions. Laser sequence No. (Diagnose No.908) is 3000. Shutter lock is ON. (*SHTLC signal is 0.) Shutter is closed. Beam is not output. Alarm does not occur.
Present status can be confirmed in power sensor time constant measurement screen.
6.1.3.7
Leak check screen
It is possible to set parameters for leak check and confirm leak check result by leak check screen. Pushing soft-key [leak] makes displaying leak check screen. Switching off gas control start signal G222#6 (RUN) after setting parameters for leak check causes starting leak check. (1) Switching bit to select leak check enable or disable Status of parameter No.15153#0 (LCK) is displayed and it is possible to set the parameter in leak check screen. 0 : Leak check disable 1 : Leak check enable (2) Leak check judgment time Setting value of leak check judgment time (parameter No.15154) is displayed and it is possible to input a value to the parameter in the screen. (3) Status The status of leak checks operation is displayed. The following contents are displayed. STAND BY GAS PRES CHECK 1ST LAS PRES CHECK 2ND GAS PRES CHECK 3RD
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(4) Time remaining The estimated time to leak check end is displayed when all the valves are shut after completion of evacuation. The displayed time is deducted by passage time. The displayed time is not guaranteed because it is rough estimated. (5) Leak check result Laser gas pressure 1 to 4 (Diagnose No.954 to 957) read during leak check are displayed. The data are only displayed and cannot be reset or operated. The data are displayed by Torr and kilo-Pascal (kPa).
6.1.3.8
Laser tuning screen
Parameters and diagnoses that are often used at maintenance are displayed in a mass. Parameters can be set from the screen. Running beam internally with shutter closed can be commanded from the screen (1) Displayed data Pushing soft-key [TUNE] makes displaying laser tuning screen (9 inch CRT image). Laser tuning screen is composed of three pages. PAGE and PAGE keys on MDI panel should be used to change the pages. Data displayed each page are as follows.
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Page 1
Data name Command power for running beam internally Pulse Frequency for running beam internally Pulse duty for running beam internally Power calibration coefficient Actual laser power Laser gas pressure Laser sequence status RF voltage RF current DC voltage DC current DC wattage Assist gas enable Beam on enable with shutter closed Power calibration enable Evacuation enable at RUN-OFF DCV,DCI,DCW display enable Power calibration command at all tubes use Power calibration coefficient Upper limit of power command Laser power feedback gain Maximum power command Minimum power command Upper limit of power command for duty unclamped Power input calibration coefficient Wait time for starting discharge Bias command Laser gas pressure at oscillating(50Hz) Laser gas pressure at oscillating(60Hz) Permission range for power down Power table data for all tubes use 6 Power table data for all tubes use 7
Message PC: FR: DU: COE: PA: TP: SEQ. RFV (PSU1-PSU8) RFI (PSU1-PSU8) DCV (PSU1-PSU8) DCI (PSU1-PSU8) DCW (PSU1-PSU8) AGA BMO CLB GVW (DCW) POWER CALIB. 4 PWR-CALIB. COE PWR-COMAND LIMIT FEEDBACK GAIN MAXIMUM POWER MINIMUM POWER UNCLMP PC CMD-LMT PWR-INPUT CALIB. WAIT DISCHARGE BIAS COMMAND INT. PRES. OSCIL INT. PRES. OSCIL POWER DEC. LIMIT (POWER TBL ALL 6) (POWER TBL ALL 7)
Type WRK WRK WRK PRM DGN DGN DGN DGN DGN DGN DGN DGN PRM PRM PRM PRM PRM PRM PRM PRM PRM PRM PRM PRM PRM PRM PRM PRM PRM PRM PRM PRM
No.
Notice
15204 906 905 908 90991092592694115000#2 15000#3 15000#4 15003#2 15008#5 15201 15204 15207 15208 15210 15211 15212 15215 15222 15223 15242 15243 15271 15306 15307
(Note)
(Note) It is not possible to set by this screen. Type) WRK: Special parameter(Writable) PRM: Parameter(Writable) DGN: Diagnose(Only display)
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Remark)
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Please set 1 to parameter No.15160#1(MDS) in case of writing special parameter and parameter.
6.1.3.9
Command of running beam internally with shutter closed
It is possible to command running beam internally with shutter closed in laser tuning screen. Pushing soft-key [(OPRT)] in laser tuning screen makes displaying soft-key [DISCH.], [DISC.2] and [CAN]. (Refer to figure on the previous page.) Pushing soft-key [DISCH.] or [DISC.2] with satisfying following conditions causes running beam internally with shutter closed Parameter No.15160#1(MDS) is set 1. Laser sequence No. (Diagnose No.908) is 30. Shutter lock is ON. Beam output is not commanded. Laser alarm does not occur.
Pushing soft-key [CAN] during running beam internally causes stopping beam. When soft-key [DISCH.] is pushed, the beam output condition is determined only by the command power, the pulse frequency, and the pulse duty in the laser tuning screen. The power calibration coefficient, the power feedback and each override-command are invalid. When soft-key [DISC.2] is pushed, above three functions are valid.
NOTE The running beam internally does not stop even if the RESET ( ) key or BEAM OFF switch is pushed in case of commanding the running beam internally on the laser tuning screen. In addition, the running beam internally stops when the switch of the emergency stop or HV-OFF is pushed.
6.1.3.10 Input and output of saved maintenance data

The saved data can be output to memory card or other external device via reader puncher interface (RS-232C). In addition, some kind of the data can be input. The format of the output data is almost the same as the display of LCD, but the comment is output only in English. The data that can be input and output are as follows.
Data Power calibration coefficient history data Parts running time data Alarm related to discharging data Laser alarm history data Power feedback table data Output OK OK OK OK OK Input NG NG NG NG OK
(1) Output the data to memory card with operating the each maintenance screen (a) The I/O channel should be switched to the memory card by setting 4 to parameter No.0020. (b) After switching the operation mode to "EDIT", data are output by pushing the soft-key as follows. [OPER] -> [PUNCH] -> [EXEC] (c) The output data are saved as a text file and the file is named as follows.
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Data File name PW-OFS.DAT P-ACT.DAT LSALM-H.DAT LSRALMHT.DAT LPPFBDT.DAT
Power calibration coefficient history data Parts running time data Alarm related to discharging data Laser alarm history data Power feedback table data
(2) Data Input from and output to external device via reader puncher interface with operating the each maintenance screen (a) HANDY-FILE should be connected with CNC. In addition, HANDY-FILE should be communicated with CNC by setting communication conditions such as I/O channel, baud rate, etc to CNC parameters. (b) Select the screen of desired data and push soft-key [(OPRT)] after switching the operation mode to "EDIT",. (c) Push soft-key [PUNCH] in case of data output and push soft-key [READ] in case of data input. In addition, push soft-key [EXEC], then data can be output or input. (d) The file name should be set by the receiver (HANDY-FILE). (3) Data Input from and output to memory card with operating ALL-IO screen (a) The I/O channel should be switched to the memory card by setting 4 in the parameter (No.0020). (b) After switching the operation mode to "EDIT", ALL-IO screen should be selected, and push the soft-key corresponding to the desired data. (c) Push soft-key [OPER], and soft-key [PUNCH] and [F READ] are displayed. Push soft-key [PUNCH] in case of data output. Push soft-key [F READ] in case of data input. (d) Set an arbitrary file name set and push soft-key [EXEC].
Data Power calibration coefficient history data Parts running time data Alarm related to discharging data Laser alarm history data Power feedback table data Soft-key [PW.OFS] [ACT.TM] [DISCH.] [L ALM] [PWR FB]
6.2
6.2.1
POWER FEEDBACK FUNCTION BASED ON THE ACTUAL OUTPUT ESTIMATION METHOD

Overview
Based on specified output conditions, this function estimates an actual output by using the data table in which the relationships between the specified output conditions and actual outputs are registered, and exercises feedback control, aiming at the estimated value. Necessary data needs to be registered beforehand in the data table. The feedback gain and compensation clamp value are the same as used with the conventional feedback control function. (A feedback gain is set in parameter No. 15208, and a compensation clamp value is set in parameter No. 15209.)
6.2.2
6.2.2.1
Data Table Method of registration
(1) Set bit 0 (MNT) of parameter No. 15160 and bit 1 (PTB) of parameter No. 29000 to 1 to enable display of the data table screen for actual output estimation.
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#7 15160 #6 #5 #4 #3 #2 #1
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#0 MNT
MNT 0: 1:
29000
Does not display the laser maintenance screen. Displays the laser maintenance screen.
#7 #6 #5 #4 #3 #2 #1 PTB #0 PFB
PFB Pulse power feedback control based on the actual output estimation method is: 0 : Not used. 1 : Used. PTB On the data table screen for actual output estimation, data input is: 0 : Disabled. 1 : Enabled. When this parameter is set to 0, the screen is not displayed, and data cannot be input. Usually, set this parameter to 0 to prevent the data from being modified inadvertently. (2) Press the operation key "Setting" of the CNC. Then, press the soft keys displayed at the bottom of the CNC screen as shown below.
STATUS MAINT.
L ALM
PWR FB
PS TC
LEAK
TUNE
Data table for actual output estimation
6.2.2.2
Data table structure
This function creates a table for each of eight specified peak powers. For one peak power, eight frequencies and six duty cycles can be set. Frequencies and duty cycles need not be set at equal intervals.
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Data table for actual output estimation

Peak power Frequency 1 Frequency 2 Frequency 3 Frequency 4 Frequency 5 Frequency 6 Frequency 7 Frequency 8 Duty 1 Actual output 1 Actual output 2 Actual output 3 Actual output 4 Actual output 5 Actual output 6 Actual output 7 Actual output 8 Duty 2 Actual output 9 Actual output 10 Actual output 11 Actual output 12 Actual output 13 Actual output 14 Actual output 15 Actual output 16 Duty 3 Actual output 17 Actual output 18 Actual output 19 Actual output 20 Actual output 21 Actual output 22 Actual output 23 Actual output 24 Duty 4 Actual output 25 Actual output 26 Actual output 27 Actual output 28 Actual output 29 Actual output 30 Actual output 31 Actual output 32 Duty 5 Actual output 33 Actual output 34 Actual output 35 Actual output 36 Actual output 37 Actual output 38 Actual output 39 Actual output 40 Duty 6 Actual output 41 Actual output 42 Actual output 43 Actual output 44 Actual output 45 Actual output 46 Actual output 47 Actual output 48
Eight tables are prepared (for peak powers 1 to 8). Data to be registered needs to satisfy the following conditions: Peak power 1 < Peak power 2 < Peak power 3 . . < Peak power 8 Frequency 1 < Frequency 2 < Frequency 3 . . . < Frequency 8 Duty 1 < Duty 2 < Duty 3 . . < Duty 6
6.2.3
Compensation for Power Sensor Response Speed
To improve the response delay of the power sensor, the monitored value of the power sensor to be returned in response to an output command value is estimated, and feedback control is exercised according to the deviation between the estimated value and the monitored value of the power sensor. Estimation processing is based on the primary delay filter to which an output command value is input. Therefore, a time constant needs to be set beforehand.
6.2.3.1
Time constant measurement method
(1) Set bit 2 (PTC) of parameter No. 29000 to 1 to enable display of the data table screen for actual output estimation. The rated output depends on the oscillator model. So, set a measured peak power in parameter No. 29003 actually. In addition, set a beam output time in parameter No. 29004.
#7 29000 #6 #5 #4 #3 #2 PTC #1 #0
PTC On the time constant measurement screen, time constant measurement is: 0 : Disabled. 1 : Enabled. When this parameter is set to 0, the screen is not displayed, and time constant measurement is disabled. However, a time constant measurement can be made using an external signal. Usually, set this parameter to 0 to prevent the time constant measurement function from being started inadvertently.
29003 Peak power in power sensor time constant measurement
[Data type] Word

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[Unit of data] W [Valid data range] 0 to 32767 Set a peak power in measurement of the time constant of the power sensor. Usually, set the rated output of the oscillator.
29004 Beam output time in power sensor time constant measurement
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[Data type] Word [Unit of data] msec [Valid data range] 0 to 32767 Set a period of time for which a beam is output to measure the time constant of the power sensor. (2) Press the operation key "Setting" of the CNC. Then, press the soft keys displayed at the bottom of the CNC screen as shown below.
STATUS MAINT.
L ALM
PWR FB
PS TC
LEAK
TUNE
Time constant measurement screen
(3) Start a measurement by pressing the [START] soft key on the dedicated time constant measurement screen. Perform internal discharge at the rated output for a certain time, then stop the beam command. Next, measure the time required until the monitored value of the power sensor becomes lower than 36.8% of the rated output. Set the measured time in parameter No. 29005 as the time constant of the primary delay filter.
29005 Power sensor time constant
[Data type] Word [Unit of data] msec [Valid data range] 0 to 32767 Set a time constant for the power sensor.
6.2.4
Bell-shaped Filter for Power Feedback Gain
To suppress output command value variation due to power feedback at the time of output command value switching, a bell-shaped filter can be applied to the power feedback gain. (1) Filter setting method Set parameter No. 29001 and parameter No. 29002.
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Time constant 1 (T1) for bell-shaped filter for power feedback gain
[Data type] Word [Unit of data] msec [Valid data range] 0 to 32767 Set a time constant for a linear section. When 0 is set in this parameter, the bell-shaped filter is not used.
29002 Time constant 2 (T2) for bell-shaped filter for power feedback gain
[Data type] Word [Unit of data] msec [Valid data range] 0 to 32767 Set a time constant for a round section. A bell-shaped filter can be specified by setting two time constants: one for the linear section T1 (parameter No. 29001) and the other for the round section T2 (parameter No. 29002).
Gain
t T2 T1
6.3
6.3.1
OIL EXCHANGE TIME LIMIT ALARM MONITOR FOR TURBO BLOWER

Overview
Turbo blower acting time is monitored to prevent the turbo blower from breaking down. In addition, alarm occurs and laser oscillator is shut down to status before oscillator starts (It is purged and stops) if turbo blower acting time exceeds time limit of oil change by 500 hours without changing the oil in the turbo blower. Laser oscillator cannot be started up until the oil is exchanged and the alarm is cleared.
6.3.2
Function
When ACT TIME of BLOWER OIL in Operation Time Screen of Laser Maintenance Screen Function exceeds SET TIME by 500 hours, alarm No.4116 occurs. However, the alarm does not occur during cycle start lamp signal F000#5 (STL) is. After the signal becomes 0, the alarm occurs. When the alarm occurs, the laser status is returned to status of purge completion (status before oscillator starts). Moreover, if the alarm is not released, the oscillator cannot be started up again. When the parameter No.15160#2(OAL) is 0, the alarm is not generated.
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When the value at SET TIME of BLOWER OIL in Operation Time Screen is 0, the alarm is not generated.
6.3.3
Setting
Please set the exchange cycle of the oil in the turbo blower to "SET TIME" of BLOWER OIL in the Operation Time Screen of Laser Maintenance Screen Function. Operation Time Screen can be displayed according to the following procedures. (1) (2) (3) (4) (5) (6) (7) (8) Set parameter No.15160#0 (MNT) to "1" Set parameter No.15160#1 (MDS) to "1" Set parameter No.15160#2 (OAL) to "1" Push the MDI key "OFFSET" several times, and the laser screen is displayed. Push the right edge soft key (continuance menu key), and the page is changed. Push soft key "MAINT.", and the screen related to the laser maintenance is displayed. Push soft key "ACT.TM", and operation time screen is displayed. Push the MDI key " PAGE", and the item of the blower oil is displayed.
[Transition chart of soft key ]

STATUS MAINT.
PW.OFS ACT.TM DISCH.
L ALM
Operation time screen
[Operation time screen , Page-2 ]

[ CHANGE ] NO. 1 2 3 4 5 6 7 8 9 10 ITEM VANE PUMP OIL VANE PUMP FILTER GAS FILTER CHILLER WATER BLOWER OIL O RING(DISC.TUBE) O RING(VENTILAT.) WARNING LAMP SET TIME 12345678 12345678 12345678 12345678 12345678 0 12345678 0 2/3 ACT TIME 12345678 12345678 12345678 12345678 12345678 0 12345678 0
The units of SET TIME and ACT TIME are 0.1 hours. The count of the operation time (ACT TIME) starts when a value is input at "SET TIME". The display at ACT TIME reddens when ACT TIME exceeds 90% at SET TIME. When ACT TIME exceeds SET TIME, the display at ACT TIME becomes a reversing display of red.
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The alarm No.4116 occurs and the laser sequence returns to status of purge completion (status before oscillator starts) when the operation time exceeds set time by 500 hours. However, the alarm does not occur when Cycle Start Lamp signal F000#5 (STL) is. The alarm does not occur until Cycle Start Lamp signal becomes 0 Please set parameter No.15160#1 (MDS) to 0 to prevent set time being mis-input when the setting of the alarm monitor ends. The input to SET TIME is prohibited when MDS is 0.
6.3.4
Release of Alarm
Please exchange the oil in the turbo blowers when the alarm occurs. After the oil is exchanged, please display Operating Time Screen and set 0 at the ACT TIME of BLOWER OIL. Then push the reset key.
6.4
6.4.1
LASER POWER SUPPLY AUTOMATIC ADJUSTMENT FUNCTION

Overview
Laser power supply is adjusted by automatic adjustment function. The sequences of laser power supply automatic adjustment function consist of 2 steps (The base adjustment and The power supply output (DCW) adjustment). For the base adjustment, it finds the offset parameter of laser power supply where the trigger discharge is maintained for the breakdown voltage. For the power supply output (DCW) adjustment, it finds the gain parameter of laser power supply where the power supply output (DCW) come to adjustment target value (parameter No.29374), when laser power command is parameter No.29373.
6.4.2
Setting
Set bit 4 (CLB) of parameter No.15000 to 0 to disable the Power calibration

#7 15000 #6 #5 #4 CLB #3 #2 #1 #0
CLB Power calibration is 0 : Disabled 1 : Enabled Set bit 6 (EGE) of parameter No. 15008 to 0 to disable the automatic aging function.
#7 15008 #6 EGE #5 #4 #3 #2 #1 #0
EGE Automatic aging function is 0 : Disabled 1 : Enabled Set bit 0 (PWC) of parameter No.29395 to 0 to disable the output conformation.
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#7 29395 #6 #5 #4 #3 #2 #1
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PWC When the power calibration is disabled, the output confirmation by the calibration 1C is 0 : Disabled 1 : Enable Set bits 0 to 7 (PA1 to PA7) of parameter No.29360 to 1 for the power supply where the laser power supply automatic adjustment is performed.
#7 29360 PA8 #6 PA7 #5 PA6 #4 PA5 #3 PA4 #2 PA3 #1 PA2 #0 PA1
PA1 to PA8
0 : Does not perform the laser power supply automatic adjustment. 1 : Perform the laser power supply automatic adjustment.Laser power supply
6.4.3
Operation of Laser Power Supply Automatic Adjustment
(1) When you set parameter No.29360 and turn on the discharge start signal (HV ON), the laser power supply automatic adjustment function begins. PSU ADJ" is displayed on the CNC screen during the laser power supply automatic adjustment. This function end normally, and state of base discharge of laser sequence 3000. The progress of this function is displayed on DGN. No.2509 by the value from 1 to 10. The following tables show the state number from 1 to 10 and the relation of the operation content.
DGN.No.2509 ADJUSTMENT STATUS 1 2 3 4 5 6 7 8 9 10 Content of laser power supply automatic adjustment Laser sequence 2000(LRDY) to sequence 3000(LSTR) Check the stability of the gas pressure before the base adjustment Measure the discharge beginning judgment value of the base adjustment Detect the discharge beginning state of the base adjustment Adjust the base discharge Prepare the adjustment of the power supply output Increase the power command gradually Warm-up and Check the stability of the gas pressure Adjust the power supply output End the laser power supply automatic adjustment function
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6.5
6.5.1
TURBO BLOWER OIL ABNORMALLY TEMPERATURE DETECT FUNCTION

Overview
This function adjusts the turbo oil temperature sensor automatically in the replacement of turbo blower. This detects the abnormal rising of turbo oil temperature, or detects cut of the line on turbo oil temperature sensor circuit.
6.5.2
Setting
Set the parameter No.29330#0 (OLS) to 1.

#7 15000 #6 #5 #4 #3 #2 #1 #0 OLS
OLS Automatic sequence to set the alarm judge value for the turbo oil temperature sensor is 0: Not executed. 1: Executed.
6.5.3
Operation
When the laser sequence starts setting the parameter No.29330#0 (OLS) to 1, below automatic sequence is executed at LSTR (Sequence No.3000). (1) Internal discharge on power calibration command (Parameter No.15320) is executed for 15 minutes. (2) The voltage to measure the resistance of oil temperature sensor is detected. VLD1: DGN No.2505 VLD2: DGN No.2506 Multiply these values by the coefficient 0.778, and then store the parameters. VA1=VLD1 x 0.778 : Parameter No.29331 VA2=VLD2 x 0.778 : Parameter No.29332 (3) After the internal discharge, 1 is set to the parameter No.29330#0 (OLS)
6.5.4
Alarm
When easily below one condition is satisfied, it is issued alarm No.4106 (BLOWR OIL TEMP.). VLD1 < VA1 or VLD2 < VA2 Abnormal temperature detect VLD1 > 2000 or VLD2 > 2000 Cut of line detect
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6.6
SUPPORT FUNCTION FOR START-UP AFTER TURBO OIL EXCHANGE
This function performs negative gas leak check, positive gas leak check and exhausting with RUN ON. After that, discharge aging is performed. Next, power calibration is performed, and it is possible to use normally.
6.6.1
Setting
Set 1 to Parameter No.29330#0 (ATO).

#7 29330 #6 #5 #4 #3 #2 #1 ATO #0
[Data type] Bit ATO Automatic sequence after turbo oil exchange is 0 : Not executed. 1 : Executed.
29333 Number of aging in start-up after turbo oil exchange
[Data type] Word [Unit of data] 10mV [Valid data range] 0 to 127 This parameter sets the number of aging in start-up after turbo oil exchange. Standard setting 2
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APPENDIX
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APPENDIX
A.EXTERNAL VIEW OF LASER OSCILLATOR
EXTERNAL VIEW OF LASER OSCILLATOR
Fig. A(a) External view of laser oscillator (C2000i-C : short optical path length type)
Fig. A(b) External view of laser oscillator (C2000i-C : long optical path length type)
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A. EXTERNAL VIEW OF LASER OSCILLATOR
APPENDIX
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Fig. A(c) External view of laser oscillator (C4000i-C : short optical path length type)
Fig. A(d) External view of laser oscillator (C4000i-C : long optical path length type)
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APPENDIX
A.EXTERNAL VIEW OF LASER OSCILLATOR
Fig. A(e) External view of laser oscillator (C6000i-C)
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B.SPECIFICATIONS
APPENDIX
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SPECIFICATIONS
Item Type Method Structure Rated laser output C2000i-C C2000i-C C4000i-C C4000i-C C6000i-C (Short optical (Long optical (Short optical (Long optical path length) path length) path length) path length) C2000i-C C4000i-C C6000i-C High-speed axial CO2 laser by high-frequency discharge excitation Integrated type (Oscillator and power supply) 2,000 W 4,000 W 6,000W 2,500 W 4,000 W 6,000W Continuously variable output range of 100W or greater 2,700W 4,000W 7,000W At duty less than For 500Hz or less and a duty cycle of 50% or less 85% in 6000W or more 1% 2% For rated output and eight continuous operation during output feedback control 10.6m Low order one Approximately Approximately Approximately Approximately Approximately 27mm or less 24mm or less 27mm or less 24mm or less 28mm or less Circular 90 linear polarization 45 linear polarization polarization 2 mrad or less 5 to 32,767 Hz 0 to 100% Mixture of CO2:He:N2N2 balance Composition ratio 50.25% : 603.00% : 351.75% 0.1750.025 MPa (0.15 to 0.20 MPa) measured on a gauge About 10 liters/h About 20 liters/h 125 liters/min or 75 liters/min or more 160 liters/min or more more for each of paths A and B 20 to 30C 1C (for laser output stability of 1%) 2C (for laser output stability of 2%)
Maximum laser output
Pulse peak value
Output stability Laser wavelength Beam mode Beam diameter (at outlet) Polarization Angel of beam divergence (full angle) Pulse output command frequency Pulse output command duty factor Laser gas Composition Gas pressure Consumption Amount Temperature Stability of water temperature Circulating water pressure
Recommended cooling capacity
Cooling water
0.5 MPa or less on a gauge 22kW or more 44kW or more 66kW or more
Power requirements Required input power Maximum current Hour meter Electric shutter Warning lamp Mass
200VAC +10%, -15%, 50/60 Hz1Hz or 220VAC +10%, -15%, 60 Hz1Hz or 230VAC +5%,-10%, 60Hz1Hz 33 kVA 55 kVA 75 kVA 110A 190A 255A Total operation hours of the exhaust pump Provided Blinks while discharge is in progress. (option) About 700 kg About 900 kg About 1,300 kg
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APPENDIX
C.LASER ALARM LIST
C
Number 4061 4063 4065 4066 4068 4069
LASER ALARM LIST

Message A/D CONVERTER1 LASER GAS OR PSU SHUTTER ACTION DISCHARGING BEAM REFLECTION LASER IF PCB Content This alarm is issued when the A/D converter on the Interface PCB does not return the conversion completion signal in the specified time after the start of conversion. This message appears when the laser power supply unit becomes abnormal or performs protective operation. Shutter action is abnormal. When the HVON signal is turned on, the discharge starts. This alarm is issued if the voltage of at least one discharge tube exceeds the setting of the parameter. This alarm is issued, if a work piece reflects laser beam more than the rating to the laser oscillator. When the signal watch signal, which is send to CNC, is abnormal, this alarm is issued. Turning on the oscillator start switch causes the system to output a chiller start request signal to the machine. After a chiller ready signal is received from the chiller unit, this signal is monitored, and if this signal is interrupted, this alarm is issued. When starting machining, the CNC monitors the assist gas ready signal from the assist gas supply unit in the machine. If this signal is interrupted, this alarm is issued. The pressure of the laser gas supplied to the laser oscillator is monitored. This alarm is issued, if this pressure is out of permissible range. The oxygen density in the cabinet of the laser oscillator is monitored by sensor. When this is greater than the allowance value, the alarm occurs. This alarm occurs when the sensor detects condensation. This alarm is issued if the monitored laser output is lower than the specified laser output by at least the allowable value. This alarm is issued if the temperature absorber exceeds the allowable value. This alarm is issued, if the monitored gas pressure deviates by (Parameter No.15251) from the set gas pressure. If the emergency stop button is pressed, this alarm is issued. This alarm is issued if the pressure does not reach the prescribed vacuum pressure when the specified time has elapsed after the start of exhaust. This alarm is issued if the pressure falls out of the prescribed range. This alarm appears when the signal of the pressure sensor vanishes. This alarm appears when the laser output power decreases and takes an abnormally higher calibration coefficient. This alarm is issued when the temperature of the shutter mirror exceeds a preset maximum. This alarm is issued, if the voltage applied to the discharge tube drops largely. When the assist gas is not chosen or not set the condition of assist gas, this alarm is issued. This alarm is issued if an attempt is made to radiate a laser beam when the laser is not in the oscillation ready (SEQ3000) state. This alarm occurs when the thermal switch of the motor starter for the exhaust pump is tripped.
4070
CHILLER NOT READY
4071
ASSIST GAS NOT READY
4073
LASER GAS PRES.
4074 4075 4076 4077 4078 4079 4080 4081 4082 4085 4087 4088 4089 4090 4094
OXYGEN DENSITY CHILL TEMP. LASER POWER DOWN ABSORBER TEMP. LASER TUBE PRES. PUSH RESET KEY LASER TUBE EXHAUST GAS PRES. CONTROL TUBE PRES. SENSOR MIRROR CLEANING SHUTTER OH LASER VOLTAGE DOWN ASSIST GAS NO SELECT LASER NOT GENERATE VANE PUMP
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C.LASER ALARM LIST

Number 4095 4099 4100 4101 4105 4106 4107 4108 4115 4116 4118 4119 Message AMU ERROR GAS PRES. NOT REACH INVERTER-1 OUT OF FREQUENCY-1 BLOWER MOTOR TEMP. BLOWER OIL TEMP. MIRROR NOT INSTALLED QPS DISCHARGING BLOWER PARAMETER BLOWER OIL TIM LIMIT MCC ERROR A/D CONVERTER-4 EXT.BEAM FOLDING MIRROR OH CHILLER WATER FLOW-1 CHILLER WATER FLOW-2 LASER GAS SPEC/MIX WARM UP ERROR GAS LEAK RATE EXCESS SHUTTER OPEN IN DICHARGE PARAMETER IS CHANGED PULSE PFB DATA ERROR
APPENDIX
Content
B-70475EN/01
4120 4121 4122 4125 4127 4128 4129 4132 4135
This alarm is issued if the reading error occurs in analogue monitor unit (AMU) When the gas pressure does not rise after the discharge start signal (HV ON) is turned on in SEQ2700, or on the way of SEQ2600 from quick power saving, this alarm is issued. If the inverter used to power the turbo blower is abnormal, this alarm is issued. This alarm is issued, if a frequency reached signal is not received within the time of the parameter No.29397 + No.29388 after the turbo blower is started. This alarm is issued, if the temperature of the turbo blower motor winding becomes higher than the permissible level. When the signal from turbo blower oil sensor falls against setting, or turbo oil temperature rises, this alarm is issued. When the oil sensor signal line is cut, this alarm is issued. In an oscillator in which a beam folding unit is installed, this alarm is issued if this unit is not attached with a mirror holder. This alarm is issued if discharge doesnt light when the state of QPS (Quick Power Saving) is released. This alarm issued if the number of turbo blower is not set correctly. When the working time exceeds setting time(4000 hours) by 500 hour in maintenance screen, this alarm is issued This alarm is issued when the contact of MCC for laser power supply is closed by the deposit in RUN ON. This alarm is issued when the A/D converter on the Interface PCB does not return the conversion completion signal in the specified time after the start of conversion. In an oscillator in which a beam-folding unit is installed, this alarm is issued when the temperature of the beam folding mirror exceeds a preset maximum. This alarm is issued when the cooling water shortage takes place. This alarm is issued when the cooling water shortage takes place. The composition (mixture) of laser gas is not correct for set processing mode. In internal discharge extension of calibration preparation 2C, when the cooling water temperature is less than 20 after executing of warm-up sequence for specified time, this alarm is issued. This alarm is issued if the rise in the sampled gas pressure is bigger than leak judge value on automatic leak check function. This alarm is issued if the shutter opened during the internal discharge. When parameters about discharge are changed, or processing mode is changed in power saving mode, this alarm is issued. Reading the table data of the pulse power feed back from the memory card or the reader puncher interface was stopped because of the data error. During negative pressure leak check, or after positive pressure leak check finished, if the actual gas pressure is bigger than the value of parameter No.15242 in all valve close state, this alarm is issued. If leak rate in positive pressure leak check exceed the threshold, this alarm is issued. After actual gas pressure arrives atmospheric pressure in positive pressure leak check, if the time, which arrives at positive pressure setting, exceeds positive pressure time limit, this alarm is issued. If the tube pressure exceeds the threshold (60kPa) in positive pressure leak check, this alarm is issued.
4400 4401 4402 4403
EVACUATION IMPOSSIBLE POSITIVE PRES. LEAKAGE PRESSURIZING IMPOSSIBLE POSITIVE PRES. LIMIT
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B-70475EN/01
APPENDIX
Message ABNORMAL LASER PSU ADJ. Content
C.LASER ALARM LIST
Number 4404
This alarm is issued when laser power supply automatic adjustment function is did not end normally.
SQ1000(PURGE)
Purge completion state
RESET
ALARM?
MONITOR
RUN ON
SQ2000(LRDY)
ALARM MONITOR 1 ALARM MONITOR 2 RESET
Discharge start prepared state
ALARM? HV ON= ON
MONITOR
SQ3000(LSTR) Oscillation ready state

Alarm treatment of FANUC LASER C series
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D.DIAGNOSIS SCREEN INFORMATION APPENDIX
B-70475EN/01
DIAGNOSIS SCREEN INFORMATION
If a fault occurs, it is necessary to determine in which of the CNC, machine, and laser oscillator the fault occurred. In cases other than faults in which the machine seems to be faulty because it does not operate due to an external signal waiting state, it is useful if the internal state of the CNC, the states of the interfaces of the PMC and the laser oscillator, and other information can be confirmed easily. This section describes the data display items of the self-diagnosis function of the CNC that indicate the states of the faults that can occur inside the laser oscillator. For a description of the data display items of the self-diagnosis function that are related to the states of the faults that can occur inside the CNC, PMC, and machine, refer to the FANUC Series 30/31i-LB Maintenance Manual. Appendix D, DIAGNOSIS SCREEN INFORMATION consists of the following contents: D.1 INFORMATION DISPLAYED ON THE DIAGNOSIS SCREEN .................................................212 D.2 LASER OSCILLATOR STATUS DISPLAY ..................................................................................215
D.1
INFORMATION DISPLAYED ON THE DIAGNOSIS SCREEN
With the diagnosis function, the information below can be displayed.
[CNCPMC status display]

#7 G220 #6 #5 #4 *DU16 #3 *DU8 #2 *DU4 #1 *DU2 #0 *DU1
*DU1 to *DU16 Duty override signals

#7 G221 AGRDY #6 CLRDY #5 #4 #3 #2 #1 #0
CLRDY Chiller prepared signal AGRDY Assist gas prepared signal

#7 G222 HVON #6 RUN #5 AGST #4 BEMON #3 SHTON #2 SCLON #1 *BEMLC #0 *SHTLC
*SHTLC *BEMLC SCLON SHTON BEMON AGST RUN HVON

G223
Shutter lock signal Beam lock signal Guide light on signal Shutter open signal Beam on signal Assist gas start signal Oscillator start signal Discharge start signal
#7 POV7 #6 POV6 #5 POV5 #4 POV4 #3 POV3 #2 POV2 #1 POV1 #0 POV0
POV7 to POV0 Power override signals
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B-70475EN/01 #7 G224 #6 #5
APPENDIX D.DIAGNOSIS SCREEN INFORMATION

#4 #3 PWCLB #2 LCKON #1 #0
LCKON Leakage check signal PWCLB Power calibration request signal

#7 G228 *FOV7 #6 *FOV6 #5 *FOV5 #4 *FOV4 #3 *FOV3 #2 *FOV2 #1 *FOV1 #0 *FOV0
*FOV7 to *FOV0 Frequency override signal

#7 G488 #6 #5 #4 #3 #2 #1 PTCMR #0
PTCMR Power sensor time constant measure signal

#7 G491 ATO #6 #5 #4 PRHT #3 #2 #1 #0
PRHT This external signal can activate preheat 0 : Not activated 1 : Preheat activated ATO Support function for start-up after turbo oil exchange
#7 G494 #6 #5 #4 #3 #2 #1 #0 QPSS
QPSS Quick power saving state start/release signal 0 : Release 1 : Start
[CNCPMC status display]

#7 F220 #6 MWRN #5 #4 SHTONL #3 SHTOFL #2 #1 #0
SHTOFL Shutter off state signal SHTONL Shutter on state signal MWRN Laser power down alarm signal
#7 F221 BEAM #6 LSTR #5 RFHV #4 CLON #3 WAIT #2 PURGE #1 LRDY #0 LARM
LARM LRDY PURGE WAIT CLON RFHV LSTR BEAM

F222
Laser alarm signal Discharge start prepared signal Purge completed signal Gas pressure in-controlling signal Chiller start request signal Base in-discharging signal Oscillation ready signal Beam on signal
#7 #6 CW #5 PULSE #4 #3 #2 AG3 #1 AG2 #0 AG1
AG1 to AG3 Assist gas select signals

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PULSE Pulse mode state output signal CW Continuous wave mode state output signal
#7 F224 #6 AGING #5 #4 #3 AVCL #2 LCKMD #1
B-70475EN/01
#0
LCKMD Leakage check mode signal 0 : Normal sequence 1 : Leakage check mode AVCL Valve close signal 0 : Normal state 1 : All valve closed state AGING Automatic aging in progress signal
#7 F226 #6 #5 LSMCW #4 LSMBM #3 LSMIM #2 LSMTO #1 LSMTM #0 LSMNT
LSMNT Item that working time is over limit time exists or not 0 : Not exits 1 : Exist LSMTM Request signal for turbo-blower overhaul LSMTO Request signal for turbo-blower oil change LSMIM Request signal for inner mirror cleaning LSMBM Request signal for optical compensation unit mirror LSMCW Request signal for chiller coolant change.
#7 F487 WMUP #6 CLNT #5 #4 #3 #2 #1 #0
CLNT Coolant water temperature 0 : Normal level 1 : Lower level WMUP Laser warm-up driving 0 : Discontinued 1 : Continuing
#7 F488 BMRF #6 #5 #4 #3 PTCMM #2 #1 #0
PTCMM Power sensor time constant measure-in-process signal BMRF The reflected beam power is 0 : less than the permissible value (Parameter No.15269). 1 : larger than the permissible value (Parameter No.15269).
#7 F489 #6 #5 #4 #3 #2 #1 #0 LGCG
LGCG Processing mode signal 0 : High power mode or normal mode (parameter No.29016#0(CTA)=0) 1 : Fine mode (parameter No.29016#0(CTA)=1)
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B-70475EN/01 #7 F490 LRE #6 LRN #5

#4 PRHTL #3 #2 #1 #0
PRHTL Posts the operation status of preheat function 0: Not during preheat 1: During preheat LRN 0: 1 : Leak rate is normal LRE 0: 1 : Leak rate is excess
#7 F491 ATOF #6 ATOM #5 #4 #3 #2 #1 QPS #0
QPS Quick power saving state signal ATOF Start-up after turbo oil exchange in progress signal ATOM Normal completion signal of start-up after turbo oil exchange
D.2
900
LASER OSCILLATOR STATUS DISPLAY

LASER POWER COMMAND
Displays a value specified in a laser output power command and sent to the D/A converter.
901 LASER BIAS COMMAND
Displays a value specified in a base discharge command and sent to the D/A converter.
902 PULSE ON TIME
Displays the ON time of an output power command pulse signal.

903 PULSE OFF TIME
Displays the OFF time period of an output power command pulse signal.
904 GAS PRES. CONTROL
Displays a value specified in a pressure command for the pressure controller that controls pressure inside the discharge tube, and sent to the D/A converter.
905 LASER TUBE PRES.
Displays the pressure inside the discharge tube. Unit: 0.1Torr (13.3Pa)
906 LASER POWER
Displays monitored laser output power values. Unit : W
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907 GAP DATA
B-70475EN/01
Displays a value that analog signal from gap sensor is converted by A/D converter.
908 LASER SEQUENCE
Sequence No. 1000 1200 1400 1500 1600 1700 1800 1900 2000 2300 2600 2700 2800 2900 2970 3000 4900 5100 5200 5300 6000 6300 6800 7000 7200 7700 7800
909 910 911 912 913 914 915 916 917 918 919 920 921 922 923 924
State Purge completion state Purge being executed 75 sec wait During evacuation preparation Wait gas pressure down to the gas pressure in starting turbo blower rotate Wait until specified turbo rotation is reached Wait that gas pressure reaches to evacuation completion pressure (Leak check) During gas pressure adjusting Discharge preparation completion state LRDY (discharge start ready signal waiting) During decompression from gas pressure in oscillation to gas pressure in start of discharge Start of discharge in progress During gas pressure rising after start of discharge During power calibration executing or during internal discharge During minute power calibration executing During Oscillation preparation check Oscillation preparation completion state (LSTR) RUN-OFF time evacuation in progress During negative leakage check During gas filling in the positive pressure leakage check Judging positive pressure leakage check Eco power saving state Transition from the quick power saving state to the eco power saving state Transition from the eco power saving state to the quick power saving state Quick power saving state Transition from LSTR to the quick power saving state During gas pressure rising in the transition from quick power saving state to LSTR During discharge start executing in the transition from quick power saving state to LSTR
RF VOLTAGE 1 RF CURRENT 1 RF VOLTAGE 2 RF CURRENT 2 RF VOLTAGE 3 RF CURRENT 3 RF VOLTAGE 4 RF CURRENT 4 RF VOLTAGE 5 RF CURRENT 5 RF VOLTAGE 6 RF CURRENT 6 RF VOLTAGE 7 RF CURRENT 7 RF VOLTAGE 8 RF CURRENT 8
Voltage applied to discharge tube from No. 1 to No. 8 (power supply unit, precisely) and current Voltage (unit: V) Current (unit: mA)
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B-70475EN/01 925 926 927 928 929 930 931 932 933 934 935 936 937 938 939 940

DC VOLTAGE 1 DC CURRENT 1 DC VOLTAGE 2 DC CURRENT 2 DC VOLTAGE 3 DC CURRENT 3 DC VOLTAGE 4 DC CURRENT 4 DC VOLTAGE 5 DC CURRENT 5 DC VOLTAGE 6 DC CURRENT 6 DC VOLTAGE 7 DC CURRENT 7 DC VOLTAGE 8 DC CURRENT 8
Injection voltage and current of power supplies 1 to 8 (valid when bit 5 of parameter No. 15008 is 1). Voltage (unit: 0.1 V) Current (unit: 0.1 A)
941 942 943 944 945 946 947 948 DCW 1 DCW 2 DCW 3 DCW 4 DCW 5 DCW 6 DCW 7 DCW 8
Injection power of power supplies 1 to 8 (valid when bit 5 of parameter No. 15008 is 1). Unit : W
954 955 956 957 LCKMD INT. PRES. 1 LCKMD INT. PRES. 2 LCKMD INT. PRES. 3 LCKMD INT. PRES. 4
In automatic leakage check function, gas tube press (DGN No.905) is saved to DGN No.954 in 30 minutes after all valves closed. Then, it is saved to DGN No.955 to DGN No.957 in interval of Parameter No.15154/3. These data are not erased even if power is off. Unit: 0.1Torr (1=13 Pa) Display range: 0 to 1800
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#7 960 #6 #5 #4 FBD #3 #2 MCE #1 WDI
B-70475EN/01 #0 ENB
ENB Laser Interface PCB enable signal 0 : Abnormal 1 : Normal WDI Signal watch signal 0 : Abnormal 1 : Normal MCE MCC welding detector signal 0 : Abnormal 1 : Normal FBD FSSB LSI mount 0 : Not installed 1 : Installed
#7 961 ABT #6 SHT #5 SOF #4 SON #3 FAL #2 WAT #1 CAT #0 OXG
OXG Oxygen concentration 0 : Abnormal 1 : Normal CAT Cooling water temperature is 0 : Abnormal 1 : Normal WAT Condensation 0 : Abnormal 1 : Normal FAL Exhaust pump alarm 0 : Abnormal 1 : Normal SON Open shutter The shutter is open when this bit is set to 1. SOF Closed shutter The shutter is closed when this bit is set to 1. SHT Shutter temperature 0 : Abnormal 1 : Normal ABT Absorber temperature 0 : Abnormal 1 : Normal
#7 962 IVF #6 IVC #5 OH1 #4 OH2 #3 MA #2 MT #1 AR1 #0 IA1
IA1 Inverter alarm 0 : Abnormal 1 : Normal AR1 Frequency signal 0 : Mismatch 1 : Match MT Mirror temperature 0 : Abnormal 1 : Normal
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B-70475EN/01
MA External mirror 0 : Mirror not mounted 1 : Normal OH2 Turbo motor winding temperature 2 0 : Abnormal 1 : Normal OH1 Turbo motor winding temperature 1 0 : Abnormal 1 : Normal IVC Inverter capacitor lifetime premonition 0: Normal 1: Lifetime is run. IVF Inverter fan lifetime premonition 0: Normal 1: Lifetime is run.
#7 966 *PSA08 #6 *PSA07 #5 *PSA06 #4 *PSA05 #3 *PSA04 #2 *PSA03 #1 *PSA02 #0 *PSA01
*PSA01 to *PSA08 Displays the operating states of power supply units No. 1 to 8. 0: Abnormal 1: Normal
#7 967 #6 PC4 #5 PC3 #4 PC2 #3 PC1 #2 PI3 #1 PI2 #0 PI1
PI1-PI3 Power supply unit that alarm issued. PC1-PC4 Content of the power supply unit alarm 0: Abnormal 1: Normal
#7 968 SLO #6 ACS #5 #4 #3 SL3 #2 SL2 #1 SL1 #0 SL0
SL0-SL3 Select signal for discharge tube monitor data ACS Signal that it is possible to select all power supply unit 0: Disable 1: Enable SLO Power or gas pressure select signal 0: Laser gas pressure 1: Laser power
#7 970 RP8 #6 RP7 #5 RP6 #4 RP5 #3 RP4 #2 RP3 #1 RP2 #0 RP1
RP1-RP8Laser power unit No.1 to 8 select signal 0 : Not selected 1 : Selected

#7 971 #6 #5 AO3 #4 AO2 #3 AO1 #2 PO3 #1 PO2 #0 PO1
PO1-PO3 Power supply unit that alarm issued AO1-AO3 Analog monitor select
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#7 972 TWV #6 BPV #5 PTL #4 GRY #3 VEN #2 RPA #1 PWS
B-70475EN/01
#0 PUG
PUG Purge valve (V2) 0 : Closed 1 : Open PWS All MCC for the laser PSU is 0 : OFF 1 : ON RPA Exhaust pump activation 0 : Stopped 1 : Started VEN Exhaust valve (V4) 0 : Closed 1 : Open GRY Laser gas supply valve (V1) 0 : Closed 1 : Open PTL Warning light 0 : Off 1 : On BPV Bypass valve (V5) 0 : Closed 1 : Open TWV Three-way valve (V3) 0 : Air release 1 : Open
#7 973 #6 FAN #5 OPV #4 FW #3 IB #2 PCL #1 OFS #0 SOP
SOP Shutter open command 0 : Closed 1 : Open OFS Off sequence 0 : at sequence 1000 1 : after sequence 1000 PCL DC24V to the laser Power supply unit is 0 : Not supplied 1 : Supplied IB Semiconductor laser-on command 0 : OFF 1 : ON FW Inverter start signal 0 : Stopped 1 : Started OPV External piping exhaust valve (V6) 0 : Closed 1 : Open FAN Cooling fan 0 : OFF 1 : ON
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B-70475EN/01 #7 974 PSAR8 #6 PSAR7 #5

#4 PSAR5 #3 PSAR4 #2 PSAR3 #1 PSAR2 #0 PSAR1 PSAR6
PSAR1 to PSAR8 Power supply unit that alarm has occurred 0 : Normal 1 : Abnormal
980 GAS PRES. SENSOR ALM
When alarm No.4078(LASER TUBE PRESS.) is issued, gas pressure data at that time is stored and displayed. Unit: 0.1Torr (1=13Pa) Display range: -32767 to 32767
983 VOLTAGE DOWN
When alarm No.4088(LASER VOLTAGE DOWN) is issued, discharge tube voltage at that time is stored and displayed. Unit: V Display range: -32767 to 32767
984 POWER DOWN
When alarm No.4076(LASER POWER DOWN) is issued, power sensor monitor value at that time is stored and displayed. Unit: W Display range: -32767 to 32767
985 BEAM REFLECTION
When alarm No.4068(BEAM REFLECTION) is issued, power sensor monitor value at that time is stored and displayed. Unit: W Display range: -32767 to 32767
2500 WATER FLOW RATE 1
Display the flow rate of laser oscillator. Unit: 0.1L/min

2501 WATER FLOW RATE 2
Display the flow rate of laser oscillator. Unit: 0.1L/min

2502 LASER TUBE PRESURE(KPA
Display the gas pressure in the oscillator. Unit: 0.1L/min

2503 LASER GAS SUPPLY PRESSURE
Display the gas pressure to supply to the oscillator Unit: kPa

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2504 TB INVERTER CURRENT
B-70475EN/01
Display the output voltage of inverter to drive the turbo blower. Unit: 10mA Display range: -32768 to 32767
2505 TB1 OIL TEMP. SENSOR VOLTAGE
Display the voltage of turbo blower oil temperature sensor. Unit:: 10mV Display range: -2048 to 2047
2506 TB2 OIL TEMP. SENSOR VOLTAGE
Display the voltage of turbo blower oil temperature sensor. Unit:: 10mV Display range: -2048 to 2047
2508 TARGET GAS PRESSURE
Display the target gas pressure for stand-by function. Unit: 0.1Torr (1=13Pa) Display range: 0 to 32767
2509 PSU ADJUSTMENT SEQUENCE
Display the sequence No. for automatic power supply adjustment.

2513 2514 2515 2516 NEGATIVE PRS LEAK CHECK 1 NEGATIVE PRS LEAK CHECK 2 NEGATIVE PRS LEAK CHECK 3 NEGATIVE PRS LEAK CHECK 4
In automatic negative leakage function, gas tube press (DGN No.905) is saved to DGN No.2513 in 30 minutes after all valves closed. Then, it is saved to DGN No.2513 to DGN No.2514 in interval of Parameter No.15154/3. These data are not erased even if power is off. Unit: 0.1Torr(1=13Pa Display range: 1 to 1800
2517 2518 2519 2520 POSITIVE PRS LEAK CHECK 1 POSITIVE PRS LEAK CHECK 2 POSITIVE PRS LEAK CHECK 3 POSITIVE PRS LEAK CHECK 4
In automatic positive leakage function, gas tube press (DGN No.905) is saved to DGN No.2517 to DGN No.2520. These data are not erased even if power is off. Unit: 0.1kPa Display range: 1 to 1000
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B-70475EN/01
APPENDIX
E.PARAMETER LIST
PARAMETER LIST
In this chapter, parameters for only oscillator maintenance are mentioned. Refer to Parameter manual for other parameters. Appendix E, PARAMETER LIST consists of the following contents: E.1 PARAMETERS FOR ENABLING/DISABLING VARIOUS FUNCTIONS..................................223 E.2 PARAMETERS FOR DISCHARGE TUBE SELECTION..............................................................226 E.3 PARAMETERS FOR LASER MAINTENANCE TIMING INDICATION FUNCTIONS.............227 E.4 PARAMETERS FOR THE OSCILLATOR .....................................................................................228 E.5 PARAMETERS FOR DISCHARGE................................................................................................230 E.6 PARAMETERS FOR GAS CONTROL...........................................................................................231 E.7 PARAMETERS FOR HIGHLY REFLECTIVE MATERIAL ALARMS .......................................233 E.8 PARAMETERS FOR LASER POWER / VOLTAGE DROP..........................................................233 E.9 PARAMETERS FOR POWER TABLE SETTING .........................................................................234 E.10 PARAMETERS FOR AUTOMATIC AGING FUNCTION............................................................235 E.11 PARAMETERS FOR POWER FEEDBACK BASED ON THE ACTUAL OUTPUT ESTIMATION METHOD ................................................................................................................237 E.12 PARAMETERS FOR PROCESSING MODE CHANGE FUNCTION...........................................239 E.13 PARAMETERS FOR THE GAS PRESSURE CHANGE WARM UP FUNCTION ......................244 E.14 PARAMETERS FOR PREHEAT FUNCTION ...............................................................................245 E.15 PARAMETERS FOR POWER COMMAND ..................................................................................246 E.16 PARAMETERS FOR GAS PRESSURE ANALOG MONITOR.....................................................248 E.17 PARAMETERS FOR TURBO BLOWER .......................................................................................249 E.18 PARAMETERS FOR LASER PSU INDIVIDUAL DRIVING .......................................................250 E.19 PARAMETERS FOR WATER FLOW RATE MONITOR .............................................................250 E.20 PARAMETERS FOR POSITIVE LEAK CHECK FUNCTIONS ...................................................252 E.21 PARAMETERS FOR LASER POWER SUPPLY AUTOMATIC ADJUSTMENT .......................252 E.22 PARAMETERS FOR GAS PRESSURE INCREASE .....................................................................255 E.23 PARAMETERS FOR PREPARATION 1C .....................................................................................255 E.24 PARAMETERS FOR TURBO BLOWER START .........................................................................256 E.25 PARAMETERS FOR AUTOMATIC AGING 2..............................................................................256 E.26 PARAMETERS FOR CALIBRATION AND PREPARATION .....................................................257 E.27 PARAMETERS FOR TURBO BLOWER RUN..............................................................................258 E.28 PARAMETERS FOR POWER SAVING ........................................................................................258
E.1
15000
PARAMETERS FOR ENABLING/DISABLING VARIOUS FUNCTIONS

#7 #6 #5 #4 CLB #3 BMO #2 AGA #1 LGC #0
[Data type] Bit LGC Two stage gain selection of intra-tube pressure control is 0 : Invalid 1 : Valid (standard) (When this bit is 1, parameter No. 15245 becomes valid.) AGA Assist gas preparation check with beam on is 0 : Valid (standard) 1 : Invalid (for maintenance)
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E.PARAMETER LIST
APPENDIX
B-70475EN/01
BMO Beam on only with beam off is 0 : Invalid (standard) 1 : Valid (for manual only and maintenance) CLB Power calibration is 0 : Disabled 1 : Enabled (standard)
#7 15001 #6 LHC #5 #4 #3 NGC #2 #1 #0
[Data type] Bit NGC 0 : Presets an integral gas pressure control value. 1 : Does not preset an integral gas pressure control value. LHC 0 : Does not control the oscillator with external signals (standard). 1 : Controls the oscillator with external signals. In the automatic operation mode, external signals are used to turn on and off the shutter and beam output.
#7 15002 #6 #5 #4 #3 #2 #1 #0 BMA
[Data type] Bit BMA 0 : Disables beam output with the shutter closed in the automatic operation mode (standard). 1 : Enables beam output with the shutter closed in the automatic operation mode (for maintenance).
#7 15003 #6 #5 #4 #3 #2 GVW #1 #0
[Data type] Bit GVW 0 : Disables evacuation when RUN is turned off (for maintenance). 1 : Enables evacuation when RUN is turned off (standard).
#7 15004 #6 #5 #4 #3 #2 #1 STC #0
[Data type] Bit STC 0 : Controls the shutter with a G code. 1 : Controls the shutter with an external signal.
#7 15005 #6 #5 #4 #3 BPV #2 #1 #0
[Data type] Bit BPV 0: Opens the bypass valve during power calibration. 1: Closes the bypass valve during power calibration..
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B-70475EN/01 #7 15006 #6 #5
APPENDIX
#4 #3 #2 PCN
E.PARAMETER LIST
#1 #0
[Data type] Bit PCN 0 : Rewrites the power calibration factor with 1024 when power calibration is not performed. 1 : Does not rewrite the power calibration factor and retains the previous value when power calibration is not performed.
#7 15008 #6 EGE #5 DCW #4 #3 #2 #1 #0
[Data type] Bit DCW 0: 1: EGE 0: 1:

15010
Does not display the DCV, DCI, and DCW values on the diagnostic display. Displays the DCV, DCI, and DCW values on the diagnostic display. Disables the automatic aging function. Enables the automatic aging function.
#7 #6 #5 TRG #4 #3 #2 #1 #0
[Data type] Bit TRG 0 : Disables the trigger pulse command control function. 1 : Enables the trigger pulse command control function.
#7 15011 OPV #6 #5 #4 #3 #2 #1 #0
[Data type] Bit OPV 0 : The external piping exhaust valve operates only once after power-on. (standard) 1 : The external piping exhaust valve always operates when RUN is turned on.
#7 15013 #6 #5 #4 #3 #2 #1 #0 IVA
[Data type] Bit IVA Evacuation is performed: 0 : Only when RUN is turned off after the LSTR state is set (standard). 1 : At all times when RUN is turned off.
#7 15014 BOV #6 #5 GAG #4 MAG #3 #2 #1 #0
[Data type] Bit MAG In automatic aging function setting screen, 0 : Only Page 1 can be displayed and only item Manual mode can be set. 1 : All the items of all the pages can be displayed.
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E.PARAMETER LIST
APPENDIX
B-70475EN/01
GAG In re-starting after Alarm No.4073 on Purge sequence, 0 : No executing the automatic aging 1 : Executing the automatic aging at two times. BOV In piercing, override function (power override, pulse frequency override, pulse duty override) of beam output condition is 0 : Invalid (standard) 1 : Effective
#7 15015 #6 #5 #4 #3 #2 #1 TPS #0
[Data type] Bit TPS Low temperature sensor is 0 : Not installed. 1 : Installed. Regularly set to 1.
#7 15016 #6 #5 #4 GG8 #3 #2 #1 #0
[Data type] Bit GG8 In the laser gas pressure control, the difference of gas pressure is magnified eight times 0 : Between starting gas pressure control and arriving at parameter No.15242, 15243. 1 : Always
#7 15018 #6 FSB #5 #4 #3 #2 #1 #0
[Data type] Bit FSB Laser power control function with FSSB I/O is 0 : Invalid 1 : Effective
E.2
15025
PARAMETERS FOR DISCHARGE TUBE SELECTION

#7 PS8 #6 PS7 #5 PS6 #4 PS5 #3 PS4 #2 PS3 #1 PS2 #0 PS1
[Data type] Bit PS1 to PS8 Power supply selection when the minute laser output control function is used Set the bit for each power supply to be used for the minute laser output control function to 1, and set the other bits to 0. Power supply, which is set to 0, keeps base discharge in the minute laser output control.
#7 15027 PS8 #6 PS7 #5 PS6 #4 PS5 #3 PS4 #2 PS3 #1 PS2 #0 PS1
[Data type] Bit PS1 to PS8 Power supply selection when the discharge tubes are used in normal diving. Set the bit for each discharge tube to be used to 1, and set the other bits to 0. Power supply, which is set to 0, does not discharge. Parameter No.15028 is for expansion of quantity of discharge tube in the future, and is not used at present. So, set to 0 at the all bit.
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APPENDIX
E.PARAMETER LIST
E.3
15152
PARAMETERS FOR LASER MAINTENANCE TIMING INDICATION FUNCTIONS

Shutter alarm mask time
[Data type] Word [Unit of data] msec [Valid data range] 0 to 32767 Set a time from when shutter operation is directed until shutter alarm monitoring starts.
#7 15153 #6 #5 #4 #3 #2 #1 #0 LCK
[Data type] Bit LCK 0 : Disables the automatic leakage check function. 1 : Enables the automatic leakage check function.
15154 Leakage judgment time
[Data type] Word [Unit of data] sec [Valid data range] 3 to 65535 In automatic leak check function, set the time during which the valve is closed and the internal pressure of a discharge tube is kept for leakage check. The internal pressure of a discharge tube is measured four times within the specified time. If a value of 0 to 2 is set, the automatic leakage check function does not operate.
15155 Evacuation time in Leak check sequence
[Data type] Word [Unit of data] sec [Valid data range] 0 to 32767 (standard setting 600) Evacuation time when the oscillator start signal is turned off in Leak check sequence is set in this parameter. When a set value is 0. Evacuation time operates as 600(10 minutes). In edition to which this parameter is not added, Evacuation is operated according to the parameter No.15256.
15156 Leak judge value
[Data type] Word [Unit of data] 0.1Torr (1=13Pa) [Valid data range] 1 to 8 (standard setting 4) The value to judge whether leak or not is set in this parameter. When a set value is 0, Leak judge value operates as 4 (0.4Torr). When leak rate is judged as normal, the leak judge value is changed to (gas pressure at the 4th time gas pressure at the 1st time + 0.1Torr)
#7 15160 #6 #5 #4 #3 #2 OAL #1 MDS #0 MNT
[Data type] Bit

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E.PARAMETER LIST
MNT
APPENDIX
B-70475EN/01
0 : Does not display the laser maintenance screen. 1 : Displays the laser maintenance screen. When the value indicating that the laser maintenance screen is not displayed is specified, the compensation factor is also stored and the cumulative operating time is set. You can display the laser maintenance screen to check the data when required. MDS Data input on laser maintenance screen 0 : For user mode. 1 : For service mode. Data input on the laser maintenance screen is disabled to prevent the end user from entering data such as the operating time unintentionally. (The data can only be referenced.) Setting this parameter to 1 enables data input. On laser tuning screen, internal discharge is enable when MDS is set to 1. OAL Specifies whether Oil exchange time limit alarm monitor for turbo blower is enabled or disabled. 0 : Disabled 1 : Enabled
E.4
15203
PARAMETERS FOR THE OSCILLATOR

Power calibration limit
[Data type] Word [Unit of data] [Valid data range] 0 to 32767 If the power calibration factor exceeds this value, the low output alarm signal (F220#6 MWRN) is output to notify the user of the time to clean or replace the mirror.
15204 Power calibration coefficient
[Data type] Word [Unit of data] [Valid data range] 0 to 32767 This is to calibrate command power for real power. This parameter is automatically set at power calibration after the oscillator start signal (G222#6 RUN) is turned on.
15206 Time constant for the power sensor input filter
[Data type] Word [Unit of data] msec [Valid data range] 8 to 32767 This time constant is used when the laser power monitor value input from the power sensor is multiplied by the primary delay filter. When the setting value is lower than 8, this value is regarded as 8.
15207 Maximum specifiable power
[Data type] Word [Unit of data] W [Valid data range] 0 to 32767 If the power setting after power calibration or power feedback addition exceeds this value, the power output is clamped to this value.
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APPENDIX
E.PARAMETER LIST
15208
Laser power feedback gain
[Data type] Word [Unit of data] [Valid data range] 0 to 32767 Set the laser power feedback gain.
15209 Power feedback clamp
[Data type] Word [Unit of data] [Valid data range] 0 to 32767 This clamp value is used to prevent the excess power setting from being made during power feedback.
15210 Maximum command power
[Data type] Word [Unit of data] W [Valid data range] 0 to 7000 This is power clamp when peak power command is greater than this value. This is clamped to the value that override worked.
15211 Minimum command power
[Data type] Word [Unit of data] W [Valid data range] 0 to 7000 This is power clamp when power command is smaller than this value. This is clamped to the value that override worked.
15212 Maximum specifiable power when the duty ratio is not clamped
[Data type] Word [Unit of data] W [Valid data range] 0 to 7000 If parameter No. 15213 does not clamp the duty ratio to the value of parameter No.15226, and a specified power after power calibration and power feedback processing exceeds the setting in this parameter, the power is clamped to the setting. If a value of 0 is set, the setting of parameter No. 15207 is set.
15213 Duty ratio clamp criterion
[Data type] Word [Unit of data] W [Valid data range] 0 to 7000 When a specified power multiplied by an override value exceeds the value set in this parameter, the duty ratio is clamped to the value of parameter No.15226, and the peak value is clamped to the value set in parameter No. 15210. If a value of 0 is set, the setting of parameter No. 15210 is set.
15215 Power input calibration coefficient
[Data type] Word

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E.PARAMETER LIST
APPENDIX
B-70475EN/01
[Unit of data] W [Valid data range] 102(0.1210) to 10240(10210) (If 0 is specified, 1024 (1210) is assumed.) Set the power input compensation factor.
15216 Power display filter time constant
[Data type] Word [Unit of data] msec [Valid data range] 0 to 32767 This is the filter time constant with which fluctuation in power display is suppressed.
E.5
15221
PARAMETERS FOR DISCHARGE

Discharge start decision voltage
[Data type] Word [Unit of data] V [Valid data range] 0 to 32767 This parameter is set the voltage of discharge starting. If the discharge voltage is not lower than this voltage after discharge waiting time (Parameter No.15222), it is issued Alarm No.4066 (Discharging).
15222 Discharge waiting time
[Data type] Word [Unit of data] 10msec [Valid data range] 0 to 32767 Set a wait time after the specification of the start of discharge until the discharge start command value is set.
15223 Bias command
[Data type] Word [Unit of data] mV [Valid data range] 0 to 32767 Set a bias command value for the oscillation preparation completion state (LSTR).
15224 Modulation voltage
[Data type] Word [Unit of data] mV [Valid data range] 0 to 3000 Set the voltage to which the normal bias value is lowered during modulation by the base modulation function.
15225 Modulation time
[Data type] Word [Unit of data] 10msec [Valid data range] 0 to 32767 Set a time required usually to decrease the bias value with the base modulation function at the time of modulation.
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B-70475EN/01 15226
APPENDIX
E.PARAMETER LIST
Clamped duty ratio for the enhanced pulse function
[Data type] Word [Unit of data] % [Valid data range] 0 to 65535 (range of valid settings: 0 to 100) If the setting is 0, internal processing assumes the value to be 50. If it is 100 or more, internal processing assumes the value to be 100.
E.6
15240
PARAMETERS FOR GAS CONTROL

Negative pressure in exhaust completion
[Data type] Word [Unit of data] 0.1Torr (1=13Pa) [Valid data range] 0 to 32767 This pressure is used for evacuating the discharge tubes in laser start-up sequence.
15241 Intra-tube pressure in discharge start
[Data type] Word [Unit of data] 0.1Torr (1=13Pa) [Valid data range] 0 to 32767 Internal gas pressure of the discharge tubes at the start of discharge
15242 Tube pressure for oscillation
[Data type] Word [Unit of data] 0.1Torr (1=13Pa) [Valid data range] 0 to 32767 Internal gas pressure of the discharge tubes during laser oscillation.
15244 Gas pressure control gain
[Data type] Word [Unit of data] [Valid data range] 0 to 32767 This is the gain to feedback control the intra-tube laser gas pressure.
15245 Intra-tube pressure control gain 2
[Data type] Word [Unit of data] [Valid data range] 0 to 32767 Set the gas pressure control gain during base discharge. When bit 1 of parameter No.15000 (LGC) is 1, this parameter is valid.
15246 Pressure control integration gain
[Data type] Word [Unit of data] [Valid data range] 0 to 32767 This is feedback integration gain for gas pressure control.
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E.PARAMETER LIST
15247
APPENDIX
Pressure control integral element preset value
B-70475EN/01
[Data type] Word [Unit of data] [Valid data range] -32768 to 32767 Integral element preset value for gas pressure control This is enable when parameter No.15001#3(NGC) is set to 1.
15251 Maximum allowable gas pressure deviation
[Data type] Word [Unit of data] 0.1Torr (1=13Pa) [Valid data range] 0 to 200 If the difference between the tube pressure for oscillation and actual pressure is greater than this setting, laser tube pressure alarm (No.4078) is issued. When setting value is set to 0, this is regarded as 50.
15252 Gas pressure offset
[Data type] Word [Unit of data] 0.1Torr (1=13Pa) [Valid data range] -50 to +50 Add this offset value to actual gas pressure from gas pressure sensor. Standard value is 0.
15255 RUN ON evacuation time
[Data type] Word [Unit of data] sec [Valid data range] 0 to 32767 Set an evacuation time to be applied at oscillator start time (RUN).
15256 RUN OFF evacuation time
[Data type] Word [Unit of data] sec [Valid data range] 0 to 32767 When bit 2 of parameter No. 15003 (GVW) is set 1 and the oscillator start signal (G222#6 RUN) is set to "0," evacuation is performed according to this time setting.
15258 Time constant of the filter used for laser gas pressure variation suppression
[Data type] Word [Unit of data] msec [Valid data range] 17 to 32767 (If a value less than 16 is specified, the filter does not function.) Set this parameter when the monitored gas pressure fluctuation of laser gas pressure grows bigger.
15259 Exhaust time when RUN is ON
[Data type] Word [Unit of data] sec [Valid data range] 0 to 32767 Set an exhaust time to be applied at oscillator start time (RUN).
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B-70475EN/01 15260
APPENDIX
E.PARAMETER LIST
Period when the exhaust value of the external pipe is open
[Data type] Byte [Unit of data] sec [Valid data range] 0 to 60 (When a time beyond 60 sec is specified, the time is clamped to 60 sec.) Set the time the exhaust valve of the external pipe is open.
E.7
15265
PARAMETERS FOR HIGHLY REFLECTIVE MATERIAL ALARMS

Maximum allowable power increase
[Data type] Word [Unit of data] W [Valid data range] 0 to 32767 If the difference between the specified power and actual output power is greater than this value, beam reflection error alarm (No.4068) is issued.
15266 Maximum allowable power
[Data type] Word [Unit of data] W [Valid data range] 0 to 32767 If the actual output exceeds this value, beam reflection error alarm (No.4068) is issued.
15268 Mask time for beam reflection error alarm
[Data type] Word [Unit of data] msec [Valid data range] 0 to 32767 The mask time for monitoring beam reflection alarm (No.4068) and warning signal (F488#7) when beam is started to output or average command power is changed is set in this parameter. This parameter is used when pulse power feedback by actual power presumption method. Mask time works as 5000msec when setting value is 0.
15269 Threshold for generating the beam reflection error warning signal
[Data type] Word [Unit of data] W [Valid data range] 0 to 32767 When the difference between power command and actual power is bigger than this parameter, beam reflection warning signal (F488#7) is output to PMC. This parameter is used when pulse power feedback by actual power presumption method is enabled (Parameter No.29000#0(PFB)=1).
E.8
15270
PARAMETERS FOR LASER POWER / VOLTAGE DROP

Discharge tube voltage in normal operation
[Data type] Word [Unit of data] V [Valid data range] 0 to 32767

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E.PARAMETER LIST
APPENDIX
B-70475EN/01
Set the discharge tube voltage during normal base discharge. This parameter is automatically rewritten after the discharge start signal (G222#7 HVON) is turned on.
15271 Power decrease limit
[Data type] Word [Unit of data] W [Valid data range] 0 to 32767 If the difference between the specified output and actual output is greater than this setting, laser power down alarm (No.4076) is issued.
15272 Discharge tube voltage decrease limit
[Data type] Word [Unit of data] V [Valid data range] 0 to 32767 If the difference between the discharge tube voltage during use of the laser and that at the start-up of the laser is greater than this setting, laser voltage down alarm (No.4088) is issued.
E.9
15280 15281
PARAMETERS FOR POWER TABLE SETTING

Table interval when the minute laser output control is used Table interval when normal driving is done
[Data type] Word [Unit of data] [Valid data range] 0 to 32767 [Standard setting value] Refer to the parameter data sheet delivered with the machine. Set the increment in watts used for the setting in the output command. h
15290 15291 15292 15293 15294 15295 15296 15297 15298 Power command 0 when the minute laser output control is used Power command 1 when the minute laser output control is used Power command 2 when the minute laser output control is used Power command 3 when the minute laser output control is used Power command 4 when the minute laser output control is used Power command 5 when the minute laser output control is used Power command 6 when the minute laser output control is used Power command 7 when the minute laser output control is used Power command 8 when the minute laser output control is used
[Data type] Word [Unit of data] [Valid data range] 0 to 32767

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APPENDIX
E.PARAMETER LIST
[Standard setting value] Refer to the parameter data sheet delivered with the machine. Sequentially set the output setting starting from 0 for each table interval when the minute laser output control is used.
15300 15301 15302 15303 15304 15305 15306 15307 15308 Power command 0 when normal driving is done Power command 1 when normal driving is done Power command 2 when normal driving is done Power command 3 when normal driving is done Power command 4 when normal driving is done Power command 5 when normal driving is done Power command 6 when normal driving is done Power command 7 when normal driving is done Power command 8 when normal driving is done
[Data type] [Unit of data] [Valid data range] [Standard setting value]
Word W 0 to 32767 Refer to the parameter data sheet delivered with the machine. Sequentially set the output setting starting from 0 for each table interval when normal driving is done.
E.10
15320
PARAMETERS FOR AUTOMATIC AGING FUNCTION

Command power for power calibration coefficient calculation
[Data type] Word [Unit of data] W [Valid data range] 0 to 7000 This parameter sets command power for getting power coefficient value.
15321 Oscillation frequency command for power calibration coefficient
[Data type] Word [Unit of data] Hz [Valid data range] 5 to 32767 This parameter sets pulse frequency command for getting power calibration coefficient.
15322 Pulse duty cycle command for power calibration coefficient
[Data type] Word [Unit of data] % [Valid data range] 0 to 100 This parameter sets pulse duty command for getting power calibration coefficient.
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E.PARAMETER LIST
15323
APPENDIX
Command time for power calibration coefficient calculation
B-70475EN/01
[Data type] Word [Unit of data] sec [Valid data range] 0 to 32767 This parameter sets command time for getting power calibration coefficient.
15326 Power command when aging is performed with the automatic aging
[Data type] Word [Unit of data] W [Valid data range] 0 to 7000 This is power command in aging with automatic aging function.
15327 Oscillation frequency command for aging
[Data type] Word [Unit of data] Hz [Valid data range] 5 to 32767 This is pulse frequency command in aging with automatic aging function.
15328 Pulse duty cycle command for aging
[Data type] Word [Unit of data] % [Valid data range] 0 to 100 This is pulse duty command in aging with automatic aging function.
15329 Power command time for aging
[Data type] Word [Unit of data] sec [Valid data range] 0 to 32767 This is command time per one aging in aging with automatic aging function.
15330 Gas pressure setting (50 Hz) for aging
[Data type] Word [Unit of data] 0.1Torr (1=13Pa) [Valid data range] 0 to 32767 This parameter sets gas pressure in aging with automatic aging function.
15334 Number of aging operations
[Data type] Word [Unit of data] [Valid data range] 0 to 32767 (Automatically set by the CNC) This is the number for execution of aging. When automatic aging function is enable, set the value(0 or 2 to 7) automatically according to stop time.
15335 Time data 1 when the HV is turned off after LSTR
[Data type] 2-word [Unit of data] Year

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E.PARAMETER LIST
[Valid data range] 0 to 99999999 (Automatically set by the CNC) When automatic aging function is enabled, last HVOFF Year is recorded.
[Data type] 2-word [Unit of data] Month [Valid data range] 1 to 12 (0 to 99999999) (Automatically set by the CNC) When automatic aging function is enabled, last HVOFF Month is recorded.
[Data type] 2-word [Unit of data] Day [Valid data range] 1 to 31 (0 to 99999999) (Automatically set by the CNC) When automatic aging function is enabled, last HVOFF Day is recorded.
[Data type] 2-word [Unit of data] Hour [Valid data range] 0 to 24 (0 to 99999999) (Automatically set by the CNC) When automatic aging function is enabled, last HVOFF Hour is recorded.
15339 Stop time for the oscillator requiring aging operation
[Data type] Word [Unit of data] hour [Valid data range] 0 to 32767 (range of valid settings: 30 to 120) If the setting is less than 30, internal processing assumes the value to be 60. If the setting is bigger than 121, internal processing assumes the value to be 120.
15340 Number of manual aging operations
[Data type] Word [Unit of data] [Valid data range] 2 to 255 This parameter set number of aging for manual. When parameter No.15014#4(MAG) is 0, this is set to 2 automatically. When parameter No.15014#4(MAG) is 1, 2 to 255 are enabled.
E.11
29000
PARAMETERS FOR POWER FEEDBACK BASED ON THE ACTUAL OUTPUT ESTIMATION METHOD
#7 #6 #5 #4 #3 FGB #2 PTC #1 PTB #0 PFB
[Data type] Bit PFB Power feedback control based on the actual output estimation method is: 0 : Disabled. 1 : Enabled.
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E.PARAMETER LIST
APPENDIX
B-70475EN/01
PTB On the data table screen for actual output estimation, data input is: 0 : Disabled. 1 : Enabled. When this parameter is set to 0, the cursor is not displayed on the screen, and data input is disabled. PTC On the time constant measurement screen, time constant measurement is: 0 : Disabled. 1 : Enabled. When this parameter is set to 0, no time constant measurement is made even when the [EXEC] soft key is pressed. However, a time constant measurement can be started by using an external signal. FGB On the pulse power feedback function, this parameter changes the calculating method of the calibration of the power feedback. 0 : Gain x (feedback target value - power monitor value) 1 : Gain x (feedback target value power monitor value)
NOTE If it is set 1 to parameter No.29000#3(FGB), the controllability is improved. However, power command sometimes oscillates when the difference between command peak power and estimated real output power is bigger.
[Data type] Word [Unit of data] msec [Valid data range] 0 to 32767 Set a time constant for a linear section. When 0 is set in this parameter, the bell-shaped filter is not used.
[Data type] Word [Unit of data] msec [Valid data range] 0 to 32767 Set a time constant for a round section.
29003 Peak power in power sensor time constant measurement
[Data type] Word [Unit of data] W [Valid data range] 0 to 32767 Set a peak power in measurement of the time constant of the power sensor. Usually, set the rated output of the oscillator.
29004 Beam output time in power sensor time constant measurement
[Data type] Word [Unit of data] msec [Valid data range] 0 to 65534 Set a period of time for which a beam is output to measure the time constant of the power sensor.
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B-70475EN/01 29005
APPENDIX
E.PARAMETER LIST
Time constant 1 for Power sensor response delay compensation filter
[Data type] Word [Unit of data] msec [Valid data range] 0 to 32767 The time constant to compensate for the response delay of the power sensor should be set. This parameter is used with the parameter No.29006. The value to the parameter No.29005 should be set with using the time constant measurement screen usually. The compensation operation is not executed in case of 0 in this parameter.
29006 Time constant 2 for Power sensor response delay compensation filter
[Data type] Word [Unit of data] msec [Valid data range] 0 to 32767 The time constant to compensate for the response delay of the power sensor should be set. This parameter is used with the parameter No.29005. The compensation operation is not executed when the value of parameter No.29005 is less than the value of this parameter. The standard value for each model of the laser should be used usually. Refer to the data sheet attached to the laser oscillator for standard value.
29007 Laser power feedback gain in pulse wave mode
[Data type] Word [Unit of data] 1/1024 (1024=1 time) [Valid data range] 0 to 32767 The laser power feedback gain in the pulse wave mode should be set. Parameter No.15208 is used in the continuous wave mode (pulse duty =100%). Parameter No.15208 is used at the pulse wave if this parameter is 0. This parameter is also invalid when the pulse power feedback by actual power presumption method is invalid. The standard value for each model of the laser should be used usually. Refer to the data sheet attached to the laser oscillator for standard value.
E.12
E.12.1
29016
PARAMETERS FOR PROCESSING MODE CHANGE FUNCTION

Setting for Fine Mode
#7 CCM #6 #5 FTN #4 #3 #2 #1 #0 CTA
[Data type] Bit CTA The processing mode of laser oscillator is : 0 : High power mode or normal mode. 1 : Fine mode. FTN For the parameter No.29016#0=0, on the setting screen of the processing mode change function 0 : High power mode is displayed. 1 : Normal mode is displayed.
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E.PARAMETER LIST
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B-70475EN/01
CCM Processing mode change function is : 0 : Not available. 1 : Available.
NOTE Parameter CTA can't be turned on when parameter CCM is off. Even if CTA is set to 1 in case of CCM=0, the setting of CTA returns to zero. If parameter CCM is turned off in case of CTA=1, CTA returns to zero and thus processing mode is changed. To prevent unexpected operation, parameter CCM should be set when laser oscillator is in PURGE state. Dont set parameter CCM except for PURGE state
29020 Power calibration coefficientFine mode
[Data type] Word [Unit of data] [Valid data range] 0 to 32767 The coefficient is used to calibrate the specified power according to the actual power. This parameter is automatically specified during power calibration.
29022 Bias valueFine mode
[Data type] Word [Unit of data] mV [Valid data range] 0 to 32767 Specify a bias value.
29023 In-tube pressure during oscillation(Fine mode)
[Data type] Word [Unit of data] 0.1Torr (1=13Pa) [Valid data range] 0 to 32767 The discharge tube has the gas pressure during laser oscillation
29025 Normal discharge tube voltageFine mode
[Data type] Word [Unit of data] V [Valid data range] 0 to 32767 Specify a discharge tube voltage in normal reference discharge. This parameter is automatically rewritten after the discharge start signal (G222#7/HVON) turned ON.
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B-70475EN/01 29026 29027 29028 29029 29030 29031 29032 29033 29034
APPENDIX
E.PARAMETER LIST
Power command 0 when the minute laser output control is used(Fine mode) Power command 1 when the minute laser output control is used(Fine mode) Power command 2 when the minute laser output control is used(Fine mode) Power command 3 when the minute laser output control is used(Fine mode) Power command 4 when the minute laser output control is used(Fine mode) Power command 5 when the minute laser output control is used(Fine mode) Power command 6 when the minute laser output control is used(Fine mode) Power command 7 when the minute laser output control is used(Fine mode) Power command 8 when the minute laser output control is used(Fine mode)
[Data type] Word [Unit of data] W [Valid data range] 0 to 32767 Refer to the parameter data sheet delivered with the machine. In fine mode, sequentially set the output setting starting from 0 for each table interval when the minute laser output control is used.
29037 29038 29039 29040 29041 29042 29043 29044 29045
Power command 0 when normal discharge is done(Fine mode) Power command 1 when normal discharge is done(Fine mode) Power command 2 when normal discharge is done(Fine mode) Power command 3 when normal discharge is done(Fine mode) Power command 4 when normal discharge is done(Fine mode) Power command 5 when normal discharge is done(Fine mode) Power command 6 when normal discharge is done(Fine mode) Power command 7 when normal discharge is done(Fine mode) Power command 8 when normal discharge is done(Fine mode)
[Data type] Word [Unit of data] W [Valid data range] 0 to 32767 Refer to the parameter data sheet delivered with the machine. In fine mode, Sequentially set the output setting starting from 0 for each table interval when normal driving is done.
29048 Upper limit on powerFine mode
[Data type] Word [Unit of data] W [Valid data range] 0 to 32767 When the specified power value exceeds this setting after power calibration and power feedback addition, the actual power is clamped to this setting.
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E.PARAMETER LIST
29049
APPENDIX
Maximum peak powerFine mode
B-70475EN/01
[Data type] Word [Unit of data] W [Valid data range] 0 to 7000 When a peak power higher than this setting is specified, the actual power is clamped to this setting. (The value obtained by applying power override is clamped.)
29050 Upper limit on power when the duty ratio is not clampedFine mode
[Data type] Word [Unit of data] W [Valid data range] 0 to 7000 When the duty ration is not clamped to 50% according to parameter No.29051 and when the specified power exceeds this setting after power calibration and power feedback addition, the actual power is clamped to this setting. When 0 is specified, the value of parameter No.29048 is assumed.
29051 Criterion for clamping the duty ratioFine mode
[Data type] Word [Unit of data] W [Valid data range] 0 to 7000 If the value obtained by multiplying the specified peak power value by the power override value is greater than the value set in this parameter, the duty ratio is clamped at 50% (fixed value), and the specified peak power value is clamped at the value set in parameter No.29049. When 0 is specified, the value of parameter No.29049 is assumed.
E.12.2
Setting for Alarm Monitor (Alarm No.4125)
Alarm No.4125 is not detected, when Parameter No.15008#5(DCW)=0, or No.29045 or No.29407. If it is necessary to detect the alarm, set parameter No.15008#5(DCW) to 1 and No.29046 or No.29047 to proper value.
29046 In-tube pressure to check gas spec.
[Data type] Word [Unit of data] 0.1Torr (1=13Pa) [Valid data range] 0 to 32767 In the laser oscillator start up sequence, alarm No.4125 happens if DCI value of laser power supply is equal to or higher than parameter No.29047 when in-tube pressure reaches this parameter value after HVON(G222#7)=1. Alarm No.4125 cant be monitored if this parameter value is zero.
29047 DCI maximum value to check gas spec.
[Data type] Word [Unit of data] 0.1A [Valid data range] 0 to 32767 In the laser oscillator start up sequence, alarm No.4125 happens if DCI value of laser power supply is equal or higher than this parameter value when in-tube pressure reaches parameter No.29046 after HVON(G222#7)=1. Alarm No.4125 cant be monitored if this parameter value is zero
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APPENDIX
E.PARAMETER LIST
E.12.3
29060
Setting for Automatic Aging Function (Fine Mode)

Laser power in normal calibrationFine mode
[Data type] Word [Unit of data] W [Valid data range] 0 to 7000 Set the power specified for obtaining the power calibration coefficient.
NOTE When manually performing the aging operation by changing the setting, set the same value in parameter No.29060 and No.15201
29061 Oscillation frequency in normal calibrationFine mode
[Data type] Word [Unit of data] Hz [Valid data range] 5 to 32767 Set the frequency specified for obtaining the power calibration coefficient.
NOTE When manually performing the aging operation by changing the setting, set the same value in parameter No.29061 and No.29072.
29062 Pulse duty ration in normal calibrationFine mode
[Data type] Word [Unit of data] % [Valid data range] 0 to 100 Set the pulse duty specified for obtaining the power calibration coefficient.
29063 Calibration time of normal calibrationFine mode
[Data type] Word [Unit of data] sec [Valid data range] 0 to 32767 Set the time specified for obtaining the power calibration coefficient.
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E.13
29202
PARAMETERS FOR THE GAS PRESSURE CHANGE WARM UP FUNCTION

Power calibration value in calibration preparation 1
[Data type] Word [Unit of data] W [Valid data range] 0 to 32767 In calibration preparation 1, after the gas pressure rises, if the laser power at the determined point during internal discharge is lower than this setting, discharge is stopped. The gas pressure is reduced and internal discharge is repeated.
29203 Maximum number of repetitions in calibration preparation 1
[Data type] Word [Unit of data] [Valid data range] 0 to 255 Maximum number of repetitions in calibration preparation 1
29204 Internal discharge value 1 in calibration preparation 2
[Data type] Word [Unit of data] W [Valid data range] 0 to 32767 Internal discharge value at the first level in calibration preparation 2. The upper limit value is the setting of parameter No. 15201. If the setting is 0, the setting of parameter No. 15201 is assumed.
[Data type] Word [Unit of data] W [Valid data range] 0 to 32767 Internal discharge value at the second level in calibration preparation 2. The upper limit value is the setting of parameter No. 15201. If the setting is 0, the setting of parameter No. 15201 is assumed
[Data type] Word [Unit of data] W [Valid data range] 0 to 32767 Internal discharge value at the third level in calibration preparation 2. The upper limit value is the setting of parameter No. 15201. If the setting is 0, the setting of parameter No. 15201 is assumed
29207 Internal discharge period in calibration preparation 2
[Data type] Word [Unit of data] sec [Valid data range] 0 to 900
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APPENDIX
E.PARAMETER LIST
Internal discharge period at the first, second, and three levels in calibration preparation 2. At each level, internal discharge is performed for the period set for this parameter. When the setting is 0, a value of 5 is assumed. The upper value is 900.
29208 Maximum number of repetitions in calibration preparation 2
[Data type] Word [Unit of data] [Valid data range] 0 to 255 Maximum number of repetitions of extension in calibration preparation 2. If the number of repetitions exceeds this setting, alarm No. 4127 is issued. When the setting is 0, a value of 240 is assumed.
29210 Internal discharge period in calibration operation B
[Data type] Word [Unit of data] sec [Valid data range] 0 to 900 Internal discharge period in calibration operation B. When the setting is 0, a value of 100 is assumed. The upper value is 900.
29211 Number of repetitions in calibration operation B
[Data type] Word [Unit of data] [Valid data range] 0 to 255 Number of repetitions of calibration operation B when the warm-up period is extended in calibration preparation 2. Warm-up operation is performed and the calibration coefficient is not calculated in the repeated calibration operation B other than the last one. The calibration coefficient is calculated in the last calibration operation B. If a large value is set for this parameter, the accuracy of the laser power is degraded, but the oscillator is started quickly when it is started in a low-temperature environment.
E.14
29016
PARAMETERS FOR PREHEAT FUNCTION

#7 #6 #5 #4 #3 #2 #1 #0 PRH
[Data type] Bit PRH Laser preheat function is : 0 : Disable 1 : Enable

29221 Peak power during preheating
[Data type] Word [Unit of data] W [Valid data range] 0 to 7000 Set the peak power of the beam output during preheating.
29222 Pulse frequency during preheating
[Data type] Word [Unit of data] Hz

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E.PARAMETER LIST
APPENDIX
B-70475EN/01
[Valid data range] 5 to 32767 Set the pulse frequency of the beam output during preheating.
29223 Pulse duty during preheating
[Data type] Word [Unit of data] % [Valid data range] 0 to 100 Set the pulse duty of the beam output during preheating.
E.15
29300
PARAMETERS FOR POWER COMMAND

#7 #6 #5 #4 #3 #2 #1 #0 PAJ
[Data type] Bit PAJ 0 : Laser power supply unit adjustment mode. ALM4132 is issued when offset and gain parameter is changed. 1 : Displays the laser maintenance screen. ALM4132 is not issued when offset and gain parameter is changed.
29301 LSR PSU1 OFFSET
[Data type] Word [Unit of data] [Valid data range] 0 to 4095 Set offset value of laser power supply No.1.
29302 LSR PSU1 GAIN
[Data type] Word [Unit of data] [Valid data range] 0 to 4095 Set gain value of laser power supply No.1.
29304 LSR PSU2 GAIN
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B-70475EN/01
APPENDIX
E.PARAMETER LIST
29306
LSR PSU3 GAIN
29308 LSR PSU4 GAIN
29310 LSR PSU5 GAIN
29312 LSR PSU6 GAIN
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E.PARAMETER LIST
29314
APPENDIX
LSR PSU7 GAIN
B-70475EN/01
29316 LSR PSU8 GAIN
E.16
29320
PARAMETERS FOR GAS PRESSURE ANALOG MONITOR

GAS SUPPLY PRESSURE CONVERSION COEFFICIENT A
[Data type] Word [Unit of data] 1/1000 [Valid data range] 0 to 32767 This is a parameter to change the monitor value from gas supply pressure sensor to the gas pressure.
29321 GAS SUPPLY PRESSURE CONVERSION COEFFICIENT B
[Data type] Word [Unit of data] [Valid data range] -32767 to 32767 This is a parameter to change the monitor value from gas supply pressure sensor to the gas pressure.
29322 UPPER LEVEL OF THE ALARM OF GAS SUPPLY PRESSURE
[Data type] Word [Unit of data] kPa [Valid data range] 0 to 32767 If the gas supply pressure is bigger than the value of this parameter, alarm occurs
29323 LOWER LEVEL OF THE ALARM OF GAS SUPPLY PRESSURE
[Data type] Word [Unit of data] kPa [Valid data range] 0 to 32767 If the gas supply pressure is smaller than the value of this parameter, alarm occurs
29324 GAS TUBE PRESSURE CONVERSION COEFFICIENT A
[Data type] Word

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B-70475EN/01
APPENDIX
E.PARAMETER LIST
[Unit of data] 1/1000 [Valid data range] 0 to 32767 This is a parameter to change the monitor value from atmospheric pressure sensor to the gas pressure.
29325 GAS TUBE PRESSURE CONVERSION COEFFICIENT B
[Data type] Word [Unit of data] [Valid data range] -32767 to 32767 This is a parameter to change the monitor value from atmospheric pressure sensor to the gas pressure.
E.17
15003
PARAMETERS FOR TURBO BLOWER

#7 #6 TR1 #5 #4 #3 #2 #1 #0
[Data type] Bit TR1 Number of turbo blower 0 : Two turbo blowers 1 : One turbo blower
29327 Conversion coefficient of inverter output current
[Data type] Word [Unit of data] [Valid data range] 0 to 8191

29328 Time constant for display filter of inverter output current
[Data type] Word [Unit of data] sec [Valid data range] 0 to 32767 This parameter is the time constant of the primary delay filter of the inverter output current. This prevents for the flicker of the display. When 0 is set, the primary delay filter is invalid.
#7 29330 #6 #5 #4 #3 #2 #1 ATO #0 OLS
[Data type] Bit OLS Automatic sequence to set the alarm judge value of turbo blower oil temperature sensor is 0 : Not executed. 1 : Executed. ATO Automatic sequence after turbo oil exchange is 0 : Not executed. 1 : Executed.
29331 Judge value of turbo 1 oil temperature alarm (VA1)
[Data type] Word [Unit of data] 10mV [Valid data range] 700 to 2047
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E.PARAMETER LIST
APPENDIX
B-70475EN/01
This parameter is to judge whether the oil temperature of turbo blower 1 is normal or not. When the output voltage VL1 of oil temperature sensor is less than this parameter, alarm occurs. When the automatic sequence to set the alarm judge value stopped abnormally, this parameter set to 800.
29332 Judge value of turbo 2 oil temperature alarm (VA2)
[Data type] Word [Unit of data] 10mV [Valid data range] 700 to 2047 This parameter is to judge whether the oil temperature of turbo blower 2 is normal or not. When the output voltage VL2 of oil temperature sensor is less than this parameter, alarm occurs. When the automatic sequence to set the alarm judge value stopped abnormally, this parameter set to 800.
29333 Number of aging in start-up after turbo oil exchange
[Data type] Word [Unit of data] 10mV [Valid data range] 0 to 127 This parameter sets the number of aging in start-up after turbo oil exchange. Standard setting 2
E.18
29337
PARAMETERS FOR LASER PSU INDIVIDUAL DRIVING

POWER COMMAND MUXIMUM VALUE
[Data type] Word [Unit of data] W [Valid data range] 0 to 32767 If the power command is bigger than the value of this parameter added power calibration and power feedback, the power command is cramped with this parameter.
29338 POWER COMMAND MUXIMUM VALUE (FINE MODE)
[Data type] Word [Unit of data] W [Valid data range] 0 to 32767 If the power command is bigger than the value of this parameter added power calibration and power feedback, the power command is cramped with this parameter.
E.19
29340
PARAMETERS FOR WATER FLOW RATE MONITOR

CONVERSION COEFFICIENT A FOR WATER FLOW METER 1
[Data type] Word [Unit of data] [Valid data range] 0 to 32767 When DI select signal is 000, data is converted to water flow rate(L/min). When no use, set to 0.
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B-70475EN/01 29341
APPENDIX
E.PARAMETER LIST
CONVERSION COEFFICIENT B FOR WATER FLOW METER 1
29342 ALARM SETTING VALUE FOR WATER FLOW METER 1
[Data type] Word [Unit of data] [Valid data range] 0 to 32767 This parameter sets the alarm setting value for water flow meter 1. If the monitor value is less than alarm setting, alarm issues.
29343 CONVERSION COEFFICIENT A FOR WATER FLOW METER 2
29344 CONVERSION COEFFICIENT B FOR WATER FLOW METER 2
29345 ALARM SETTING VALUE FOR WATER FLOW METER 2
[Data type] Word [Unit of data] [Valid data range] 0 to 32767 This parameter sets the alarm setting value for water flow meter 2. If the monitor value is less than alarm setting, alarm issues.
29346 TIME CONSTANT OF SCREEN FILTER OF WATER FLOW METER
[Data type] Word [Unit of data] msec [Valid data range] 16 to 32767 This parameter sets the time constant of screen filter of water flow meter
29347 RE-CHECK TIME OF WATER FLOW RATE
[Data type] Word [Unit of data] msec [Valid data range] 0 to 32767 Each flow rate is checked again after that either flow rate was less than alarm setting. This parameter is time until check is done again. If either flow rate is less than alarm setting again, alarm issues. Default setting 5000(msec) If 0 is set, it is regarded as 5000msec.
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E.PARAMETER LIST
APPENDIX
B-70475EN/01
E.20
29350
PARAMETERS FOR POSITIVE PRESSURE LEAK CHECK FUNCTIONS

Positive pressure leak check pressure
[Data type] Word [Unit of data] kPa [Valid data range] 0 to 50 Defines the pressure where positive pressure leak check starts. If this parameter is set larger than 50, it compulsory be set to 50. If this parameter is set smaller than 0, it compulsory is set to 0.
29351 Increase pressure time limit
[Data type] Word [Unit of data] sec [Valid data range] 0 to 32767 Defines time limit between the start of pressure increase just before the positive pressure leak check, and termination of pressure increase.
29352 Positive pressure leak judge time
[Data type] Word [Unit of data] sec [Valid data range] 0 to 32767 Define time to hold valves close, when positive pressure leak. If set in the range:0 to 2, the positive pressure leak check will not be executed.
29353 Positive pressure threshold
[Data type] Word [Unit of data] kPa [Valid data range] 0 to 50 Defines a standard value to check leak.
E.21
29360
PARAMETERS FOR LASER POWER SUPPLY AUTOMATIC ADJUSTMENT

#7 PA8 #6 PA7 #5 PA6 #4 PA5 #3 PA4 #2 PA3 #1 PA2 #0 PA1
[Data type] Bit PA1 to PA8 0 : Does not perform the laser power supply automatic adjustment. 1 : Perform the laser power supply automatic adjustment.
29361 WAIT TIME AT OFFSET PRE-ADJ.
[Data type] Word [Unit of data] sec [Valid data range] 0 to 32767 Set of the gas pressure stability judgment time before the base adjustment.
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APPENDIX
E.PARAMETER LIST
29362
PRS.JUDGE VALUE
[Data type] Word [Unit of data] 0.1Torr (1=13Pa) [Valid data range] 0 to 32767 Set judgment value of the gas pressure stability before the base adjustment.
29363 OFFSET INCREMENT
[Data type] Word [Unit of data] mV [Valid data range] 0 to 4095 Set the offset increment value.
29364 DISCHARGE JUDGE VALUE
[Data type] Word [Unit of data] [Valid data range] 1 to 99 Set the discharge beginning judgment value
29365 PSU1 OFFSET ADJ.
[Data type] Word [Unit of data] [Valid data range] -4095 to 4095 Set the offset parameter adjustment value for laser power supply unit No.1.
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E.PARAMETER LIST
29370
APPENDIX
PSU6 OFFSET ADJ.
B-70475EN/01
29373 PWR CMD AT GAIN ADJ.
[Data type] Word [Unit of data] W [Valid data range] 0 to 32767 Set power command at gain parameter adjustment.
29374 TARGET DCW AT GAIN ADJ.
[Data type] Word [Unit of data] W [Valid data range] 0 to 32767 Set target power supply output (DCW) at gain parameter adjustment.
29375 GAIN INCREMENT
[Data type] Word [Unit of data] [Valid data range] 0 to 4095 Set the gain parameter increment value.
29376 WAIT TIME AT GAIN ADJ.
[Data type] Word [Unit of data] sec [Valid data range] 0 to 32767 Set a wait time before gain parameter adjustment.
29377 MIN. DCW AT GAIN ADJ.
[Data type] Word [Unit of data] W [Valid data range] 0 to 32767 Set lower limit value of target power supply output (DCW) at gain parameter adjustment.
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B-70475EN/01 29378
APPENDIX
MAX. DCW AT GAIN ADJ.
E.PARAMETER LIST
[Data type] Word [Unit of data] W [Valid data range] 0 to 32767 Set upper limit value of target power supply output (DCW) at gain parameter adjustment.
E.22
29380
PARAMETERS FOR GAS PRESSURE INCREASE

Target difference of purge valve in SEQ2700
[Data type] Word [Unit of data] 0.1Torr (1=13Pa) [Valid data range] 0 to 1000 In SEQ 2700, after the purge valve opens and pressure control valve opens fully, gas pressure goes up. When the gas pressure reach (target gas pressure - this parameter), purge valve will be closed. The target gas pressure is the gas pressure set in No.15242 or No.29023.
29381 Target difference of pressure control valve in SEQ2700
[Data type] Word [Unit of data] 0.1Torr (1=13Pa) [Valid data range] 0 to 1000 In SEQ 2700, after the purge valve opens and pressure control valve opens fully, gas pressure goes up. When the gas pressure reach (target gas pressure - this parameter), pressure control valve will be closed. The target gas pressure is the gas pressure set in No.15242 or No.29023.
29382 Wait after pressure control valve close in SEQ2700
[Data type] Word [Unit of data] 0.1sec [Valid data range] 0 to 30 In SEQ 2700, the gas pressure control will restart after the pressure control valve closed and the time defined by this parameter has passed.
29383 Gas pressure increase time limit in SEQ2700
[Data type] Word [Unit of data] sec [Valid data range] 0 to 255 In SEQ 2700, after the purge valve opens and pressure control valve opens fully. From this point, if the gas pressure does not reach (target gas pressure - parameter No.29381), in the time defined by this parameter, alarm (No.4099) occurs.
E.23
29384
PARAMETERS FOR PREPARATION 1C

Power in Preparation 1C
[Data type] Word [Unit of data] W [Valid data range] 0 to 7000

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E.PARAMETER LIST
APPENDIX
B-70475EN/01
Defines internal discharge power in Preparation 1C, after the gas pressure goes up.
29385 Preparation 1C power judge time
[Data type] Word [Unit of data] sec [Valid data range] 0 to 255 Defines internal discharge time in Preparation 1C, after the gas pressure goes up.
E.24
29386
PARAMETERS FOR TURBO BLOWER START

Pressure to start turbo blower
[Data type] Word [Unit of data] 0.1Torr (1=13Pa) [Valid data range] 0 to 32767 Defines a pressure to start turbo blower in SEQ 1600.
29387 Pressure limit after turbo blower start
[Data type] Word [Unit of data] 0.1Torr (1=13Pa) [Valid data range] 0 to 32767 Between turbo blower start in SEQ 1600 and the gas pressure reach parameter (No.15240), if the gas pressure exceed [parameter (No.29386)+this parameter], an alarm No.4080 occurs.
29388 Inverter frequency wait limit
[Data type] Word [Unit of data] sec [Valid data range] 0 to 255 If a frequency reached signal is not received after the desired time and the time defined by this parameter have passed, alarm No. 4101 occurs.
E.25
29389
PARAMETERS FOR AUTOMATIC AGING 2

Minimum repeat before automatic aging 2
[Data type] Word [Unit of data] [Valid data range] 0 to 255 In automatic aging, minimum internal discharge time to go into step 2 is defined by this parameter.
29390 Threshold to automatic aging 2
[Data type] Word [Unit of data] W [Valid data range] 0 to 32767 In automatic aging, minimum power at Preparation 1C to go into step 2 is defined by this parameter.
- 256 -
B-70475EN/01 29391
APPENDIX
Power in automatic aging 2
E.PARAMETER LIST
[Data type] Word [Unit of data] W [Valid data range] 0 to 7000 This parameter is referred no matter which processing mode is selected.
29392 Frequency in automatic aging 2
[Data type] Word [Unit of data] Hz [Valid data range] 5 to 32767 This parameter is referred no matter which processing mode is selected.
29393 Duty in automatic aging 2
[Data type] Word [Unit of data] % [Valid data range] 0 to 100 This parameter is referred no matter which processing mode is selected.
29394 RFV to terminate aging
[Data type] Word [Unit of data] V [Valid data range] 0 to 32767 Defines the RF voltage threshold to terminate automatic aging. The RF voltage of smallest number of PSUs is referred among some PSUs.
E.26
29395
PARAMETERS FOR CALIBRATION AND PEPARATION

#7 #6 #5 #4 #3 #2 #1 D2C #0 PWC
[Data type] Bit PWC When power calibration is not performed, output power check in Calibration 1C is , 0 : Disabled. 1 : Enabled. D2C Internal discharge extension in Preparation 2C is, 0 : Disabled. 1 : Enabled.
29396 Calibration coefficient adjuster
[Data type] Word [Unit of data] 0.1% [Valid data range] 500 to 2000 This parameter defines how much the calibration coefficient is adjusted. The calibration coefficient =1024 laser output power command value [Duty(%) / 100] (this parameter / 1000) / the laser output power when calibration is finished.
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E.PARAMETER LIST
APPENDIX
B-70475EN/01
E.27
29397
PARAMETERS FOR TURBO BLOWER RUN

Turbo blower start up time
[Data type] Word [Unit of data] sec [Valid data range] 0 to 255 Input the turbo blower start up time set on the inverter.
29398 Turbo blower stop time
[Data type] Word [Unit of data] sec [Valid data range] 0 to 255 Input the turbo blower stop up time set on the inverter.
29399 Turbo blower stop wait
[Data type] Word [Unit of data] sec [Valid data range] 0 to 255 Defines how long to wait after turbo blower stop command. The wait limit is (Parameter No.29398 + this parameter)
E.28
29400
PARAMETERS FOR POWER SAVING

Power Saving gas pressure ratio
[Data type] Word [Unit of data] [Valid data range] 1024 to 2048 (The gas pressure in Eco Power Saving state) = (The gas pressure in Quick Power Saving state) (this parameter) / 1024
29401 Pressure difference of Quick Power Saving (Normal mode or High power mode)
[Data type] Word [Unit of data] 0.1Torr (1=13Pa) [Valid data range] 0 to 255 (The gas pressure in Quick Power Saving state (Normal mode or High power mode)) =(No.15242) (this parameter)
29402 Pressure difference of Quick Power Saving (Fine mode)
[Data type] Word [Unit of data] 0.1Torr (1=13Pa) [Valid data range] 0 to 255 (The gas pressure in Quick Power Saving state (Fine mode)) =(No.29023) (this parameter)
29403 Gas pressure limit in Power Saving
[Data type] Word

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APPENDIX
E.PARAMETER LIST
[Unit of data] 0.1Torr (1=13Pa) [Valid data range] 0 to 255 Defines the gas pressure lower limit both in Quick Power Saving state and Eco Power Saving state.
29404 Time limit of pressure adjustment after Quick Power Saving
[Data type] Word [Unit of data] 0.1sec [Valid data range] 0 to 255 Defines time limit of gas pressure adjustment after Quick Power Saving state.
29405 Base command rise time
[Data type] Word [Unit of data] 10ms [Valid data range] 0 to 32767 The rise time of the base command is set.
29406 Bias command initial value
[Data type] Word [Unit of data] mV [Valid data range] 0 to 32767 Set the bias command initial value when discharge starting is detected.
29407 Step time of bias command
[Data type] Word [Unit of data] msec [Valid data range] 0 to 32767 Set the step time of bias command when discharge starting is detected.
29408 Step value of bias command
[Data type] Word [Unit of data] mV [Valid data range] 0 to 32767 Set the step value of bias command when discharge starting is detected.
29409 Discharge judge value
[Data type] Byte [Unit of data] % [Valid data range] 1 to 99 Set the discharge judge value.
29410 Upper limit of discharge starting detection frequency
[Data type] Byte [Unit of data] [Valid data range] 1 to 99 Set upper limit value of number in which discharge starting is detected.
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E.PARAMETER LIST
29411
APPENDIX
Fan operation time in Eco Power Saving
B-70475EN/01
[Data type] Word [Unit of data] sec [Valid data range] 300 to 32767 Set fan operation time after Eco Power saving mode signal is 1 (EPS=1).
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APPENDIX
F.CONTROL SEQUENCES IN LASER OSCILLATOR
F
F.1 F.2 F.3 F.4
CONTROL SEQUENCES IN LASER OSCILLATOR

OUTLINE OF LASER OSCILLATION SEQUENCES ..................................................................261 INTRA-TUBE GAS PRESSURE CONTROL SEQUENCES .......................................................263 WARM UP IN START UP SEQUENCE .......................................................................................264 POWER SAVING.............................................................................................................................264
Appendix F, CONTROL SEQUENCES IN LASER OSCILLATOR consists of the following contents:
F.1
OUTLINE OF LASER OSCILLATION SEQUENCES
This section describes sequence of oscillator start up and set down. The laser oscillation sequences can be divided roughly into five steps. SEQ 1000Initial state (purge completion state) After power is turned on, the oscillator comes into this state. SEQ 2000Discharge preparation completion state (LRDY) When the oscillator start signal (RUN) is turned from 0 to 1, evacuation is carried and turbo blower will start after the gas pressure become lower than Pressure to start turbo blower. Then gas pressure control begins. When the gas pressure reaches the set pressure, the discharge preparation completion state (LRDY) is set to enable the discharge start HVON. When the oscillator start signal (RUN) is turned to 0, the oscillator will go to SEQ1000. SEQ 3000Oscillation preparation completion state (LSTR) When the discharge start signal (HVON) turned from 0 to 1, a high voltage is applied to the discharge tube to start discharge. Next, the intra-tube gas pressure is controlled at the pressure at oscillation time, and a calibration coefficient is set. Then, the base discharge state is set, and the oscillation preparation completion state is set. When the oscillator start signal (RUN) is turned to 0, the oscillator will go to SEQ1000. When the discharge start signal (HVON) is turned to 0, the oscillator will go to SEQ2000. SEQ 6000Eco Power Saving state No discharge with stopped turbo blower. When the oscillator start signal (RUN) is turned to 0, the oscillator will go to SEQ1000. SEQ 7000Quick Power Saving state No discharge with running turbo blower. When the oscillator start signal (RUN) is turned to 0, the oscillator will go to SEQ1000. When the discharge start signal (HVON) is turned to 0, the oscillator will go to SEQ2000.
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F. CONTROL SEQUENCES IN LASER OSCILLATOR
APPENDIX
B-70475EN/01
SEQ1000 Initial state SEQ1400, SEQ1200, SEQ4900, SEQ5100, SEQ5200, SEQ5300 RUN=0 SEQ6000 Eco Power Saving state (EPS) EPSS=0 EPSS=0 SEQ6300 SEQ6800 SEQ1400 SEQ1200 RUN=1 SEQ4900 SEQ5100 SEQ5200 SEQ5300
RUN=01
SEQ1500 SEQ1600 SEQ1700 SEQ1800 SEQ1900
EPSS=1 HVON=0 or RUN=0 SEQ7000 Quick Power Saving state (QPS) SEQ QPSS=0 & EPSS=0 & HVON=1 2300 SEQ7700 SEQ7800
RUN=0 SEQ2000 Discharge preparation completion state (LRDY) HVON=01 HVON=0 or RUN=0 SEQ2600 SEQ2700 SEQ2800 SEQ2900 SEQ2970
SEQ7200 QPSS=1 or EPSS=1 QPSS=1 or EPSS=1
HVON=0 or RUN=0
SEQ 2300 HVON=0 or RUN=0
SEQ3000 Oscillation preparation completion state (LSTR)

QPSSEQuick power saving state start/release signal EPSS: Eco power saving state start/release signal Fig. F.1 (a) Sequence
The sequences for starting the oscillator are as follows:

Sequence number 1000 1500 1600 1700 1800 1900 2000 2600 2700 2800 2900 2970 3000 Meaning Initial state (purge completed state) Exhaust pump being started State waiting for the pressure is low enough to start turbo blower. State waiting for the turbo blower frequency arrival signal (AR) to be turned on State waiting for a negative pressure to be reached upon completion of exhaust operation Adjusting gas pressure. Discharge preparation completion state (LRDY) (waiting for discharge to be started) Discharge being started State waiting for the base discharge state to be set after the start of discharge Power calibration being performed Minute Laser Output calibration. Checking oscillation. Oscillation preparation completion state (LSTR)
The sequences for stopping the oscillator are as follows:

Sequence number 3000 2300 2000 1400 1200 1000 Meaning Oscillation preparation completion state (LSTR) State waiting for setting from gas pressure during laser oscillation to discharge start time gas pressure Discharge preparation completion state (LRDY) (waiting for discharge to be started) Stopping turbo blower Purge operation being performed Initial state (purge completed state)
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B-70475EN/01
APPENDIX

Meaning
The sequences for Power Saving are as follows:

Sequence number 6000 7000 6300 6800 7200 7700 7800 Eco Power Saving state (EPS) Quick Power Saving state (QPS) Transition from Quick Power Saving state to Eco Power Saving state Transition from Eco Power Saving state to Quick Power Saving state Transition from LSTR to Quick Power Saving state Transition from Quick Power Saving state to LSTR Transition from Quick Power Saving state to LSTR, starting discharge
In addition, the following sequences are used:

Sequence number 4900 5100 5200 5300 Meaning Vacuum being drawn with RUN turned off Negative leak check Increasing pressure for positive leak check Positive leak check
F.2
F.2.1
INTRA-TUBE GAS PRESSURE CONTROL SEQUENCES

RUN ON
When the oscillator start signal (RUN) is turned to 1 in sequence 1000, the oscillator executes pumping, starting turbo blower, gas pressure check, power sensor calibration and reach sequence 2000(LRDY). SEQ1000 RUN ON SEQ1500 RUN OFF SEQ1700 SEQ2300 SEQ1400 SEQ1800 SEQ1200 SEQ1900 Atmospheric SEQ1000 SEQ2000 pressure
Parameter No.15242 Parameter No.29023 1000Hz Parameter No.15241
Parameter No.15240 Gas pressure
SEQ2800 HVON SEQ2800 SEQ3000

Fig. F.2.1 (a) Gas pressure (RUN ON, HV ON and RUN OFF)
Turbo blower inverter 0Hz frequency (broken line)
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APPENDIX
B-70475EN/01
F.2.2
HV ON
In sequence 2000(LRDY), when the discharge start signal (HVON) is changed from 0 to 1, HV ON sequence will start, if with the original parameters as shipment and power calibration has not been executed, the Start up sequence will start. In the Start up sequence, the oscillator executes aging or warm up, in case of necessity, and reach sequence 3000(LSTR).
F.2.3
RUN OFF
When the oscillator start signal (RUN) is turned to 0, the oscillator executes stopping turbo blower, pumping, purge and reach sequence 1000.
F.3
WARM UP IN START UP SEQUENCE
In Start up sequence, if get started in cold condition, warm up internal discharge is automatically executed if necessary until it get enough performance. It follows that for example ambient temperature is lowest of the specification, no alarm occur, and after the Start up sequence finished, the calibration coefficient will be calculated properly.
NOTE If the cooling water temperature is less than 20, it takes times until start-up sequence finishes because of automatic warm up sequence. For quick start-up, please keep proper water temperature with warm-up function of the chiller.
The letters WARM UP on CNC screen indicates that warm up is underway. At the same time, the warm up signal F487#7(WMUP) is 1.
F.4
F.4.1
F.4.1.1
POWER SAVING
Powers saving functions are for saving power in waiting condition. There is Quick Power Saving state and Eco Power Saving state.
Quick Power Saving State
In Quick Power Saving state, both 0W laser PSU emission and no discharge is kept.
Start quick power saving state
Input 1 to Quick power saving state start/release signal (QPSS), in order to go to Quick Power Saving state from LSTR. If both Quick power saving state start/release signal (QPSS) and Eco power saving state start/release signal (EPSS) are 1, Eco power saving state start/release signal (EPSS) has a priority.
F.4.1.2
Quick power saving state
The letters QPS will appear on CNC screen. It indicates Quick Power Saving state. At that time, Quick Power Saving state signal F491#1(QPS) is 1.
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B-70475EN/01
APPENDIX
F.4.1.3
Stop quick power saving state
When Quick power saving state start/release signal (QPSS) is changed from 1 to 0, Quick Power Saving state will be finished, and it go to LSTR. After LSTR, the letters QPS on CNC screen will disappear, and Quick Power Saving state signal F491# 1 (QPS) will be 0.
F.4.2
ECO Power Saving State
In Eco Power Saving state, both 0W laser PSU emission and no discharge is kept. Turbo blower will be stopped.
F.4.2.1
Start ECO power saving state
Input 1 to Eco power saving state start/release signal (EPSS), in order to go to Eco Power Saving state. The turbo blower frequency will decrease. After it stops, the oscillator will reach Eco Power Saving state. If both Quick power saving state start/release signal (QPSS) and Eco power saving state start/release signal (EPSS) are 1, Eco power saving state start/release signal (EPSS) has a priority.
F.4.2.2
ECO power saving state
The letters EPS will appear on CNC screen. It indicates Eco Power Saving state. At that time, Eco Power Saving state signal F491# 3(EPS) is 1.
F.4.2.3
Stop ECO power saving state
When Eco power saving state start/release signal (EPSS) is changed from 1 to 0, Eco Power Saving state will be finished and the turbo blower will start. After the frequency reach, if Quick power saving state start/release signal (QPSS) is 0, it will go to LSTR, else (Quick power saving state start/release signal (QPSS) is 1) go to Quick Power Saving state.
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APPENDIX
B-70475EN/01
F.4.2.4
ECO power saving state intra-tube gas pressure
Intra-tube gas pressure in Eco power saving state is shown below. SEQ3000 EPSS=1 SEQ6300 SEQ6000 EPSS=0 SEQ6800 SEQ3000
Parameter No.15242
1000Hz
Gas pressure
Fig. F.4.2.4 (a) Gas pressure
Turbo blower 0Hz inverter frequency (broken line)
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B-70475EN/01
APPENDIX
H.EXTERNAL GAS LEAKAGE RECORDING TABLE
EXTERNAL GAS LEAKAGE RECORDING TABLE

External Gas Leakage Recording Table
Date: / / Customer Name Customer Staff in Charge Record necessary data according to the procedure below.
Secondary pressure gage (D) Primary pressure gage (C) Main cylinder valve (B)
To laser oscillator
Gas cylinder Secondary pressure adjustment handle (A)
Fig. H Gas regulator
Recording procedure
<1> Stop the oscillator, and complete purging. Then, turn off the power. <2> When 5 minutes or more has elapsed after the power is turned off, turn the secondary pressure adjustment handle (A) of the gas regulator in the depressurization direction, and close the main cylinder valve (B) after closing all adjustment nozzles. <3> Record the readings of the primary pressure gauge (C) and secondary pressure gauge (D) together with start time and ambient temperature data.
Primary pressure gauge (C1) (kgf/cm2,MPa) Secondary pressure gauge (D1) (kgf/cm2,MPa) Start time (t1) Day hours minutes Ambient temperature C
(After recording the data above, leave the oscillator for 8 hours as it is, then record the data below.)
<4> Record the readings of the primary pressure gauge (C) and secondary pressure gauge (D) together with start time and ambient temperature data after a certain time (8 hours as standard, but desirably a period of time a little bit longer than 8 hours).
Primary pressure gauge (C2) (kgf/cm2,MPa) Secondary pressure gauge (D2) (kgf/cm2,MPa)
(Note)
End time (t2) Day hours minutes
Ambient temperature C
<5> Open the main cylinder valve (B) slowly reading of the primary pressure gauge (C).
. After the main cylinder valve is fully opened, record the
Primary pressure gauge (C3) (kgf/cm2,MPa)
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H. EXTERNAL GAS LEAKAGE RECORDING TABLE
APPENDIX
B-70475EN/01
NOTE When opening the main cylinder valve, do not stand in front of the regulator but stand slantwise relative to the regulator. When the main cylinder valve is opened if there is a large amount of leakage, the regulator may be destructed because an abrupt pressure is applied to the regulator, and broken pieces can scatter.
<6> End of measurement
Decision
Whether there is a leakage can be determined from the results of measurement as described below. If you send your recording table via FAX to the FANUC service center, the service center will check if there is a leakage. (1) Leakage on the primary piping Calculate the primary pressure variation rate according to the expression below to determine the leakage state. The unit of t1 and t2 is the hour.
Primary pressure variation rate (%)= C3 C2 C3 8 t2 t1 100
If the calculated primary pressure variation rate is 10% or less, the presence of no leakage is determined. When the fluctuation of air temperature is remarkable, it is possible that the primary pressure change ratio fluctuates. (2) Leakage on the secondary piping Calculate the secondary pressure variation rate according to the expression below to determine the leakage state. The unit of t1 and t2 is the hour.
Secondary pressure variation rate (%)= D1 D2 D1 8 t2 t1 100
The presence of no leakage is determined if the calculated primary pressure variation rate is as follows: - 10% or less when the piping is a polyethylene tube - 6% or less when the piping is a stainless tube
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B-70475EN/01
APPENDIX
H.GLOSSARY
GLOSSARY
Name Meaning Part of the protective housing or enclosure that, when removed or moved, will permit exposure to laser radiation or collateral radiation beyond an allowable value. Maximum accessible emission level set up for each class of laser products Optical axis adjustment Iris, or stop Aggregate of unidirectional, diverging, or conversing rays Defined as the distance between two symmetrical points on a beam cross section at which the power per unit area is 1/e2 of the maximum power per unit area. At FANUC, however, the diameter measured with an acrylic burn pattern. Angle through which a beam spreads Laser beam mode pattern generated on a plate such as an acrylic plate for confirmation purposes Polarization in which a plane of polarization rotates about the axis along which the light progresses and does not have directivity; an electric or magnetic field based on circular polarization has a constant intensity. Laser that uses a carbon dioxide gas as a laser medium Continuously radiated laser output An electric insulator. Realization of inverted population by means of discharge Greatly amplified peak output of a pulse Transition of atoms or molecules to a higher energy level by supplying them with external energy Duration through which laser radiation is emitted Laser in which gas flows rapidly in the same direction as the laser beam Control in which the controlled amount is compared with the target value through feedback and corrective operation is performed to make them match. Device for generating light by stimulated emission Area in which activities are controlled or monitored for protection from hazards resulting from laser radiation Laser that uses a semiconductor as an exciting medium Reflecting mirror used in a laser resonator Person having sufficient knowledge about evaluation and management of hazards of lasers and in charge of safety management of lasers Standard to protect human bodies from hazards resulting from laser beams in view of use of lasers and about laser products for sale Polarization in which a plain of polarization is at a constant angle with the axis along which the light progresses Action taken by a user to preserve normal operation of a product, such as adjustment or other measures specified in documents created by the manufacturer for users If power is to be transmitted by connecting two different electric circuits, maximum power can be sent by setting the circuits to appropriate conditions. A matching circuit is a circuit that sets the circuits to appropriate conditions. Maximum radiation power or maximum radiation energy per pulse that a laser product outputs in all directions where there is a hazard of exposure in view of operational capacity in every area at any point of time after the production of the laser product State of a resonant system in which an electromagnetic field has a specific distribution Maximum laser radiation level that can be radiated onto human bodies without harmful influence to them in an ordinary environment Optical density This means the transmittance of light. Over OD7 means that the transmittance of light is below 1/107.
Access panel AEL : Accessible Emission Limit Alignment Aperture Beam Beam diameter Beam divergence Burn pattern Circular polarization CO2 laser CW : Continuous wave dielectric Discharge excitation Enhanced pulse Excitation Exposure time Fast axial flow laser Feedback control Laser Laser controlled area Laser Diode Laser mirror Laser safety officer Laser safety standard Linear polarization Maintenance Matching circuit
Maximum output Mode MPE : Maximum Permissible Exposure OD
- 269 -
H.GLOSSARY
Name Operation Optical resonator Parameter Phase Power density Protective housing Pulse duration Pulse duty Pulse frequency Pulse laser Pulse output Radian Radiant energy Safety interlock Sequence Stimulated emission Target Threshold
APPENDIX
Meaning
B-70475EN/01
Laser product's action covering all intended functions, not including maintenance or service. Device in which stimulated emission of light is used for a laser and which consists of a pair of reflecting mirrors facing each other Variable that is assigned a given value for a specific purpose and indicates that purpose Amount representing a positional relationship between two adjacent highest or lowest points on a wave Energy per unit area Laser product housing or its part designed to protect humans from exposure to a laser beam exceeding an accessible emission level or strong collateral radiation The time from the rise half-value point of a pulse to the fall half-value point. Ratio (%) of a duration in which a pulsating laser output is on, to its entire cycle Repetition frequency at which pulsating laser beams are radiated from an oscillator Laser that outputs energy in the form of a single pulse or a pulse train Laser output radiated in the form of a pulse train Measurement unit of angle; 1 radian equals 360/2p Energy emitted, transmitted, or received (measured in joules, or J) Device combined with the protective housing of a laser product to stop its operation automatically when part of the housing is removed A succession of steps carried out in a prescribed order The emission of light by atoms and molecules at a certain energy level, induced by incident light, at the same frequency, in the same phase, and in the same polarized state, thereby shifting the atoms and molecules to a lower energy level. Jig used to radiate and position a laser beam Physical quantity necessary to generate laser beams
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B-70475EN/01
INDEX
INDEX
<Number>
24V power supply ........................................................155 Compensation for Power Sensor Response Speed .......195 Configuration ...............................................................138 CONTROL SEQUENCES IN LASER OSCILLATOR261 Cooling Fan in the Inverter ..........................................135 Cooling Water................................................................29 Cooling Water Piping.....................................................16
<A>
Adjusting the exhaust unit (adjusting the laser gas consumption) ............................................................143 Adjusting the Position ..................................................151 Adjustment Method............ 123,141,152,154,169,170,171 Adjustment of the Flow Sensor Unit ............................147 Alarm ...........................................................................201 ALIGNMENT OF THE BEAM FOLDING UNIT (C2000i-C, C4000i-C SHORT OPTICAL PATH LENGTH TYPE)......................................................175 ALIGNMENT OF THE RESONATOR.......................166 Alignment Procedure at Mirror Cleaning Time ...........170 Alignment Procedure during Installation after Transportation ..........................................................168 Alignment Procedure for Adjusting All Mirrors ..........171 Anticorrosive..................................................................30 Antifreezing ...................................................................31
<D>
DAILY INSPECTION ...................................................52 Data Table....................................................................193 Data table structure ......................................................194 DEFINITION OF WARNING, CAUTION, AND NOTE ........................................................................ s-1 Detachment and Attachment of a Fan Unit ..................153 Detachment and Attachment of Fan-assisted Radiator.154 DETAILS OF CHECKING ...........................................40 DETAILS OF MAINTENANCE...................................54 DIAGNOSIS SCREEN INFORMATION ...................212 Discharge Aging ............................................................45 Discharge Margin Check................................................48 DISCHARGE TUBE ...................................................126 Discharge-related alarm history display.......................185 Display Information .....................................................184
<B>
BEAM ABSORBER ....................................................150 Beam absorber mirror...................................................150 Beam Mode Check.........................................................46 Bell-shaped Filter for Power Feedback Gain ...............196 Breaker.........................................................................119
<E>
ECO Power Saving State .............................................265 ECO power saving state intra-tube gas pressure ..........266 Electrical Connections ..............................................10,31 Excessive Laser Gas Consumption ..............................111 EXHAUST PUMP .......................................................138 Exhaust Pump Filter.......................................................57 Exhaust Pump Oil ..........................................................56 Exhaust unit .................................................................140 EXTERNAL GAS LEAKAGE RECORDING TABLE267 External Laser Gas Piping Leakage Check (Clamp Test) ....................................................................................43 EXTERNAL VIEW OF LASER OSCILLATOR ........205
<C>
C2000i-C......................................................................177 C2000i-C INPUT UNIT...............................................113 C4000i-C and C6000i-C...............................................179 C4000i-C INPUT UNIT...............................................115 C6000i-C INPUT UNIT...............................................117 Charge unit...................................................................140 Check ...........................................................................125 Check for Leakage within the Oscillator........................44 Check method ...........................................................54,56 Checking Cooling Water................................................44 Checking of jumper pins on the interface PCB ..............42 Checking the interface PCB signals ...............................43 Checking the power supply ............................................40 Circuit Breaker for Cooling Fan, Solenoid Valve, and 24V Power Supply Trips ..........................................110 Cleaning .......................................................................159 Cleaning agent................................................................30 Cleaning and Replacing the Beam Folding Unit ............64 Cleaning and Replacing the Folding Mirrors .................61 Cleaning and Replacing the Optical Parts ......................58 Cleaning and Replacing the Output Coupler and Rear Mirror .........................................................................59 Command of running beam internally with shutter closed........................................................................192 Compensation coefficient history display ....................184
<F>
FAN .............................................................................152 Fittings and Tube Ordering Information ......................163 Function .......................................................................197
<G>
GAS CONTROLLER ..................................................138 GAS DUST COLLECTION UNIT ..............................159 Gas Fitting....................................................................162 GAS FITTING AND WATER FITTING ....................162 Gas pipe .........................................................................28 GLOSSARY ................................................................269 GUIDE LASER (SEMICONDUCTOR LASER) ........151
<H>
HEAT EXCHANGER .................................................176 HV ON.........................................................................264
i-1
INDEX
<I>
INFORMATION DISPLAYED ON THE DIAGNOSIS SCREEN...................................................................212 Input and output of saved maintenance data ................192 INSTALLATION...........................................................20 INSTALLATION PROCEDURE ..................................20 Interface PCB...............................................................155 INTERNAL CONNECTION .........................................10 INTERNAL STRUCTURE...........................................1,2 INTRA-TUBE GAS PRESSURE CONTROL SEQUENCES...........................................................263 INVERTER...........................................................131,134
B-70475EN/01
Oscillation Characteristics .............................................47 OSCILLATOR CONNECTIONS..................................28 OUTLINE ........................................................................1 OUTLINE OF LASER OSCILLATION SEQUENCES261 Overview.......................................... 183,193,197,199,201 OXYGEN SENSOR UNIT ..........................................160
<P>
Packing for Transportation.............................................49 PARAMETER LIST ....................................................223 PARAMETERS FOR AUTOMATIC AGING 2 .........256 PARAMETERS FOR AUTOMATIC AGING FUNCTION..............................................................235 PARAMETERS FOR CALIBRATION AND PEPARATION .........................................................257 PARAMETERS FOR DISCHARGE ...........................230 PARAMETERS FOR DISCHARGE TUBE SELECTION ............................................................226 PARAMETERS FOR ENABLING/DISABLING VARIOUS FUNCTIONS .........................................223 PARAMETERS FOR GAS CONTROL ......................231 PARAMETERS FOR GAS PRESSURE ANALOG MONITOR ...............................................................248 PARAMETERS FOR GAS PRESSURE INCREASE.255 PARAMETERS FOR HIGHLY REFLECTIVE MATERIAL ALARMS............................................233 PARAMETERS FOR LASER MAINTENANCE TIMING INDICATION FUNCTIONS ....................227 PARAMETERS FOR LASER POWER / VOLTAGE DROP .......................................................................233 PARAMETERS FOR LASER POWER SUPPLY AUTOMATIC ADJUSTMENT ...............................252 PARAMETERS FOR LASER PSU INDIVIDUAL DRIVING .................................................................250 PARAMETERS FOR POSITIVE PRESSURE LEAK CHECK FUNCTIONS .............................................252 PARAMETERS FOR POWER COMMAND..............246 PARAMETERS FOR POWER FEEDBACK BASED ON THE ACTUAL OUTPUT ESTIMATION METHOD.................................................................237 PARAMETERS FOR POWER SAVING....................258 PARAMETERS FOR POWER TABLE SETTING.....234 PARAMETERS FOR PREHEAT FUNCTION...........245 PARAMETERS FOR PREPARATION 1C.................255 PARAMETERS FOR PROCESSING MODE CHANGE FUNCTION ............................................239 PARAMETERS FOR THE GAS PRESSURE CHANGE WARM UP FUNCTION.........................244 PARAMETERS FOR THE OSCILLATOR ................228 PARAMETERS FOR TURBO BLOWER...................249 PARAMETERS FOR TURBO BLOWER RUN .........258 PARAMETERS FOR TURBO BLOWER START .....256 PARAMETERS FOR WATER FLOW RATE MONITOR ...............................................................250 Parts of Exhaust Pump .................................................138 Parts run time display...................................................185 PCB..............................................................................155 Perform laser power supply automatic adjustment ......125
<L>
Laser alarm history screens ..........................................187 LASER ALARM LIST ................................................209 Laser Gas .......................................................................28 Laser gas specification ...................................................28 Laser Optical Parts .........................................................58 LASER OSCILLATOR STATUS DISPLAY..............215 Laser Output Just after Switch On Is Low ...................110 LASER POWER SUPPLY AUTOMATIC ADJUSTMENT FUNCTION ...................................199 LASER POWER SUPPLY UNIT ................................121 LASER SOFTWARE FUNCTION..............................183 Laser tuning screen ......................................................190 Leak check screen ........................................................189 Leakage Check and Discharge Aging ..........................131 Leakage in external piping .............................................29 Locating Internal Leakage..............................................44 LOW TEMPERATURE SENSOR UNIT ....................159
<M>
Magnetic contactor.......................................................120 Main Breaker Trips ......................................................110 MAINTENANCE ..........................................................52 MAINTENANCE PARTS .............................................64 MAINTENANCE SCREEN ........................................183 MAJOR FAULTS ........................................................110 MATCHING BOX.......................................................126 Measurement of voltage of DC power supply unit.........41 Method of Operation ....................................................184 Method of registration..................................................193 Motor starter.................................................................120 Motor starter of Exhaust Pump Trips Thermally..........110
<O>
Obtaining a Maximum Power ......................................172 OIL EXCHANGE TIME LIMIT ALARM MONITOR FOR TURBO BLOWER ..........................................197 OIL MIST DECOMPOSING ELEMENT....................157 Operating the gas supply pressure sensor and atmospheric pressure sensor .....................................142 Operation......................................................................201 Operation of Laser Power Supply automatic adjustment ................................................................200 Operation of the Digital Operator ................................131 OPTICAL PATHS IN THE OSCILLATOR....................8
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B-70475EN/01
INDEX
Start ECO power saving state ......................................265 Start quick power saving state......................................264 Stop ECO power saving state.......................................265 Stop quick power saving state......................................265 Storage and expiration date of turbo blower oil .............56 SUPPORT FUNCTION FOR START-UP AFTER TURBO OIL EXCHANGE ......................................202
PERIODIC MAINTENANCE .......................................53 Phase rotation.................................................................40 Placement Numbers .....................................................127 POWER CALIBRATION METHOD ..........................175 POWER FEEDBACK FUNCTION BASED ON THE ACTUAL OUTPUT ESTIMATION METHOD ......193 POWER SAVING........................................................264 POWER SENSOR........................................................154 Power sensor time constant measurement screen.........188 Power Supply Checking .................................................40 Power Supply Margin Check (Pulse Check) ..................48 PREFACE .................................................................... p-1 Preparation ....................................... 124,168,170,171,172 PREPARATION PRIOR TO SHIPMENT.....................49 Procedure .....................................................................173 Pulse power feedback screens ......................................188 Pure water supply unit....................................................30
<T>
THE DEW SENSOR....................................................155 THE WATER DISTRIBUTION UNIT........................144 Tightening method ................................................ 162,163 Time constant measurement method............................195 TRIGGER ELECTRODE ............................................128 TROUBLESHOOTING .................................................70 TROUBLESHOOTING PROCEDURE ........................71 TURBO BLOWER ......................................................129 Turbo Blower Oil ...........................................................54 TURBO BLOWER OIL ABNORMALLY TEMPERATURE DETECT FUNCTION................201
<Q>
Quick Power Saving State............................................264
<R>
Re-installing ..........................................................162,163 Release of alarm...........................................................199 Removing Cooling Water...............................................50 Replacement.................................................................176 Replacement method ...... 55,57,119,121,126,127,128,129, .....134,138,140,144,148,150,151,154,155,157,159,160, ..................................................................................161 Replacement of Fan......................................................153 Replacement of the Flow Sensor Unit..........................147 Replacing a high-speed diode ......................................122 Replacing an RF FET PCB ..........................................123 Replacing the laser gas cylinder.....................................29 Replacing the power supply unit ..................................121 RESPONDING TO ALARM MESSAGES ON THE SCREEN.....................................................................71 RUN OFF.....................................................................264 RUN ON ......................................................................263
<U>
UNIT CONFIGURATION ..........................................113 UNITS..........................................................................112
<V>
Vacuum Gas Connection................................................19
<W>
WARM UP IN START UP SEQUENCE ....................264 WARNING LABELS AND STICKERS ...................... s-6 WARNING LIGHT UNIT ...........................................161 WARNINGS AND CAUTIONS ON EXPOSURE....... s-2 WARNINGS AND CAUTIONS ON HANDLING ...... s-4 WARNINGS AND CAUTIONS ON MACHINING .... s-5 WARNINGS AND CAUTIONS ON MAINTENANCE ................................................................................... s-3 WATER FITTING .......................................................163
<S>
Safety circuit PCB........................................................156 SAFETY PRECAUTIONS ...........................................s-1 Setting ..................................................... 198,199,201,202 Setting a Power Input Compensation Coefficient ........175 Setting for Alarm Monitor (Alarm No.4125) ...............242 Setting for Automatic Aging Function (Fine Mode) ....243 Setting for Fine Mode ..................................................239 Setting the atmospheric pressure sensor.......................141 Setting the frequency of the power supply of the hour meter...........................................................................41 Setting the gas supply pressure sensor .........................141 Shutter mirror ...............................................................149 Shutter PCB..................................................................156 Shutter switch (thermal and photoelectric switches) ....149 SHUTTER UNIT .........................................................148 Specification of the cooling water..................................30 SPECIFICATIONS ......................................................208
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Revision Record
FANUC LASER C2000i/C4000i/C6000i-MODEL C MAINTENANCE MANUAL (B-70475EN)
01
Sep., 2010
Edition
Date
Contents
Edition
Date
Contents
Revision of the Maintenance Manual for FANUC LASER C series
1.Type of applied technical documents
Name Spec.No./Ed.
FANUC LASER C2000i/C4000i/C6000i -MODEL C MAINTENANCE MANUAL B-70475EN/01
2.Summary of Change
Group Basic Function Optional Function Unit Maintenance Parts Notice
Name/Outline
New, Add Correct, Del
Applicable Date
Correction
The optical connector name of I/O Link described in section 2.2.3(4) is corrected as follows. BeforeCOP10A After COP1A BeforeCOP10B After COP1B
Correct
Immediately
Another
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P36bWhen an optical fiber cable is used: Correct the description of Refer to the following figures for the connection of the optical fiber cable. as follows. BeforeRefer to the following figures for the connection of the optical fiber cable. Connect the optical fiber cable to the optical connecter COP10B on the optical I/O Link adapter unit. Connect the optical fiber cable to the optical connecter COP10B on the optical I/O Link adapter unit. AfterRefer to the following figures for the connection of the optical fiber cable. Connect the optical fiber cable to the optical connecter COP1B on the optical I/O Link adapter unit. Connect the optical fiber cable to the optical connecter COP1A on the optical I/O Link adapter unit.
P36, P37 figure 2.2.3(e), 2.2.3(f), 2.2.3(g) Correct the figure 2.2.3(e), 2.2.3(f), 2.2.3(g) as follows.

A04B-0800-J003 A04B-0800-J005
Fig. 2.2.3(e) Mounting location of the Optical I/O Link adapter unit of C2000i-CBefore
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A04B-0800-J003 A04B-0800-J005
Fig. 2.2.3(f) Mounting location of the high-speed I/O unit ofC4000i-CBefore
A04B-0800-J002 A04B-0800-J004

A04B-0800-J002 A04B-0800-J004
A04B-0800-J003 A04B-0800-J005
A04B-0800-J003 A04B-0800-J005
Fig. 2.2.3(g) Mounting location of the Optical I/O Link adapter of C6000i-CBefore
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True

COP1A
A04B-0800-J003 A04B-0800-J005
Fig. 2.2.3(e) Mounting location of the Optical I/O Link adapter unit of C2000i-CAfter

COP1A
A04B-0800-J003 A04B-0800-J005
Fig. 2.2.3(f) Mounting location of the Optical I/O Link adapter of C4000i-CAfter
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A04B-0800-J002 A04B-0800-J004

A04B-0800-J002 A04B-0800-J004
A04B-0800-J003 A04B-0800-J005
COP1A
A04B-0800-J003 A04B-0800-J005
Fig. 2.2.3(g) Mounting location of the Optical I/O Link adapter of C6000i-CAfter
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Name Spec.No./Ed.
2.Summary of Change
FANUC LASER C2000i/C4000i/C6000i -MODEL C MAINTENANCE MANUAL B-70475EN/01
Group Basic Function Optional Function Unit Maintenance Parts Notice Correction Another
Name/Outline Parameter 29412 is added to appendix E.28. The description is added to appendix F.4.1.3 about the transition from sequence 7000(Quick Power Saving state) to sequence 3000(LSTR).
New, Add Applicable Correct, Del Date Add

Immediately
TITLE
Addition of the Maintenance Manual for FANUC LASER C series 01

Edit
11.1.18
Date
Ikemoto
Design
New registration
Description
Andou
DRAW.NO.
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FANUC LTD
E.28
PARAMETER FOR POWER SAVING
29412
Gas pres down DCI value
[Data type] Word [Unit of data] 0.1A [Valid data range] 032767 When the DC current(DCI) of the laser power supply becomes more than the value of this parameter when transiting from sequence 7000(Quick Power Saving state) to sequence 3000(LSTR), the discharge is light after reducing the gas pressure.
Note) Only the name of this parameter changed since software G4C1-03 and G3C1-03. The operation of this function doesn't change.
F.4.1.3
Stop quick power saving state
When Quick Power Saving start/release signal(QPSS) is changed from 1 to 0, sequence 7000(Quick Power Saving state) will be stopped, and it transit sequence 3000(LSTR). After sequence 3000(LSTR), the letters QPS on CNC screen is disappeared, and Quick Power Saving state signal F491#1(QPS) is 0. When transiting from sequence 7000(Quick Power Saving state) to sequence 3000(LSTR), the discharge is light safely after reducing the gas pressure if the DC current of the laser power supply is the value of parameter 29412 or more. Therefore, the transition time becomes long. Though the transition time is 20.5 seconds when the DC current of the laser power supply is smaller than the value of parameter 29412, the transition time becomes long ten times or more when the oscillator extremely gets cold and the DC current of the laser power supply is the value of parameter 29412 or more.
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Edit
Date
Design
Description
FANUC LTD
Power consumption monitor for FANUC LASER C series
Name Spec. No. /Ed.
FANUC LASER C2000i/C4000i/C6000i-MODEL C MAINTENANCE MANUAL B-70475EN/01
2.Summary of Change
Group Basic Function Optional Function Unit Maintenance Parts Notice
Name/Outline The following function was added Power consumption monitor
New, Add Correct, Del Add
Applicable Date Immediately
Applied software version FS30i-LBG3C1 Version 3.0 or later G3D1 Version 3.0 or later FS31i-LBG4C1 Version 3.0 or later
Correction Another
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Power consumption monitor

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1. General
This function is for displaying the power consumption and integral power consumption of laser oscillator C2000i/C4000i/C6000i-MODEL C for FANUC series 30i/31i-LB. Moreover, this function can save the integral power consumption in the parameter.
2. Diagnosis data
Diagnosis data for power consumption is as follows. Present power consumption of laser oscillator Diagnosis 2523 LASER ELECTRIC PWR CONSUMPTION [Data type] 2-word [Unit of data] 0.001kW [Valid data range] 0 to 99999999 The power consumption of laser oscillator is displayed.
Integral power consumption of laser oscillator Diagnosis 2524 INTEGRAL POWER CONSUMPTION [Data type] 2-word [Unit of data] 0.001kW [Valid data range] 0 to 999999999 The integral power consumption of laser oscillator is displayed. This value is saved in the PRM29466 (SAVED INTEGRAL PWR CONSUMPTION) every 60 seconds when PRM29465#6 (SPC) is 1. When 1 is input to PRM29465#7 (IPC), this value is reset. NOTE The calculation of this value starts after the CNC control power is turned on.
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3. Parameter
Parameter for power consumption is as follows. #7 #6 #5 #4 #3 #2 #1 #0 No.29465 IPC SPC FRQ [Data type] Bit FRQ#0Frequency of the applied power supply is 050Hz 160Hz Please set this bit according to frequency of the applied power supply of laser oscillator. SPC#6The value of integral power consumption is 0not saved. 1saved. The value of DGN2524 (INTEGRAL POWER CONSUMPTION) is saved in the PRM29466 (SAVED INTEGRAL PWR CONSUMPTION) every 60 seconds when this bit is 1. When this bit is 0, PRM29466 is not updated. IPC#7When 1 is input to this bit, the value of DGN2524 (INTEGRAL POWER CONSUMPTION) and PRM29466 (SAVED INTEGRAL PWR CONSUMPTION) are reset. After reset, this bit becomes 0 automatically. No.29466 SAVED INTEGRAL PWR CONSUMPTION [Data type] 2-word [Unit of data] 0.001kW [Valid data range] 0 to 999999999 The value of DGN2524 (INTEGRAL POWER CONSUMPTION) is saved in this parameter every 60 seconds when PRM29465#6 (SPC) is 1. When the CNC control power is turned on, the value of this parameter is displayed in DGN2524. And the value of DGN2524 is updated from the value.
4.
Application
Series FS30i-LB FS31i-LB System G3C1 G3D1 G4C1 Version Version 3.0 or later Version 3.0 or later
This function is applied from the following software.
TITLE

01 EDIT 100117 DATE S.Kagiwada DESIG. First issue DESCRIPTION
DRAW.NO.
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SHEET
CUST.
3/3
Laser oscillator control sequence
1.Type of applied technical documents FANUC LASER C2000i/C4000i/C6000i-MODEL C MAINTENANCE MANUAL B-70475EN/01 New, Add Applicable Correct, Del Date Add, Correct Immediately
Name Spec. No. /Ed.
Group Basic Function Optional Function Unit Maintenance Parts
Name/Outline E.29 PARAMETERS FOR POWER CALIBRATION is added to Appendix E. Appendix F.2.2 and F.3 are corrected.
Applied software version Notice -FS30i-LB -FS31i-LB Correction Another G3C1 Version 6.0 or later G3D1 Version 6.0 or later G4C1 Version 6.0 or later
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E.29
29500
PARAMETERS FOR POWER CALIBRATION

#7 #6 #5 #4 #3 #2 S0C #1 TAS #0 QCA
[Input type] Parameter input [Data type] Bit #0 QCA Aging in power calibration sequence is 0 : Disabled. 1 : Enabled. #1 TAS The function of setting the number of aging operations by the halt period of the laser is 0 : Disabled. 1 : Enabled. If Disabled, power calibration after automatic aging will not be performed. If Enabled, power calibration after automatic aging will be performed as a rule. #2 S0C The function of setting parameters for warm up 0C judging in power calibration sequence is 0 : Disabled. 1 : Enabled. If Enabled, actual laser power will get recorded in Power Calibration Preparation 0C. Parameter No.29508 is calculated as described in parameter No.29509. Besides, parameter No.29523 will be set after power calibration coefficient is determined. Lastly, this parameter will be set to zero. This parameter is set to zero just after CNC start up.
29501 Power Calibration Preparation 0C power command
[Input type] [Data type] [Unit of data] [Valid data range]
Parameter input Word path W 0 7000 This parameter is referred no matter which processing mode is selected.
Power Calibration Preparation 0C frequency command
29502
Parameter input Word path Hz 5 32767 This parameter is referred no matter which processing mode is selected.
Power Calibration Preparation 0C duty command
29503
Parameter input Word path % 0 100 This parameter is referred no matter which processing mode is selected.
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29504
Power Calibration Preparation 0C internal discharge time
Parameter input Byte path sec 0 255 Defines internal discharge time in Power Calibration Preparation 0C.
Power Calibration Preparation 0C power reference value
29505
Parameter input Word path W 0 32767 In Power Calibration Preparation 0C, if actual laser power is lower than this parameter, internal discharge will get continued (warm up 0C), gas will get replaced and Power Calibration Preparation 0C will be executed. Parameter No.29507 will be applied as a judgment value, instead of this parameter, only when warm up 0C is repeated by parameter No.29511 times.
Power Calibration Preparation 0C power decrease judgment value
29506
Parameter input Word path W 0 32767 In Power Calibration Preparation 0, if actual laser power is lower than this parameter, alarm (DS4076) will be active.
Power Calibration Preparation 0C last time power reference value
29507
Parameter input Word path W 0 32767 When warm up 0C is repeated by parameter No.29511 times, in Power Calibration Preparation 0, if actual laser power is lower than parameter No.29507, alarm (DS4076) will be active.
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29508
Power Calibration Preparation 0C comparative power reference value
Parameter input Word path W 0 32767 This must be set to zero. This defines the comparative power judgment value. In Power Calibration Preparation 0, if actual laser power is lower than the comparative power judgment value, which is calculated by this parameter, as a general rule, internal discharge will get continued (warm up 0C), gas pressure will get reduced, and internal discharge Power Calibration Preparation 0C will get repeated. The comparative power judgment value =this parameter [Parameter No.29523 / the latest power calibration coefficient]
Calculation coefficient of Power Calibration Preparation 0C comparative power reference value
29509
[Input type] Parameter input [Data type] Word path [Unit of data] [Valid data range] 500 1000 Defines how the Power Calibration Preparation 0C comparative power judgment value [parameter No.29508] is automatically calculated. If parameter No.29500#2 equals one, by actual laser power in Power Calibration Preparation 0C, the parameter No.29508 will be set automatically. The calculation is as follows. No.29508=actual laser power in Power Calibration Preparation 0C No.29509/1000
29510 Warm up 0C internal discharge time
Parameter input Word path sec 0 32767 Defines how long warm up 0C internal discharge is performed.
Warm up 0C upper limit of repetition
29511
[Input type] Parameter input [Data type] Byte path [Unit of data] [Valid data range] 0 255 Defines warm up 0C repeat upper limit.
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29512
Warm up 1C internal discharge time
Parameter input Word path sec 0 32767 Defines how long warm up 1C internal discharge is performed.
Reference regulation of Power Calibration coefficient (Power calibration termination condition 1)
29513
[Input type] Parameter input [Data type] Word path [Unit of data] [Valid data range] -200 200 If the difference between power calibration coefficient (this time) and power calibration coefficient (the medium of latest five times) is not more than the ratio set by parameter No.29513, power calibration will be terminated. [power calibration coefficient (this time) - power calibration coefficient (the medium of latest five times)] / power calibration coefficient (the medium of latest five times) parameter No.29513 / 1000
29514
Power difference in Power Calibration (Power calibration termination condition 2)
[Input type] Parameter input [Data type] Word path [Unit of data] [Valid data range] 0 500 After warm up 3C is performed, meeting the following condition is Power calibration termination condition 2. The last actual laser power of internal discharge in power calibration - The last actual laser power of internal discharge in previous power calibration [parameter No.29514 /1000]Power calibration 4C power command [Power calibration 4C Duty command(%) / 100] Where the difference ratio of Power calibration coefficient must be inside the range designated by parameter No. 29515. The last actual laser power of internal discharge in power calibration stands for the last actual laser power of the latest internal discharge in power calibration. The last actual laser power of internal discharge in previous power calibration stands for the last actual laser power of the latest power calibration internal discharge before Warm up 3C.
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29515
Reference regulation 2 of Power Calibration coefficient (Power calibration termination condition 2)
[Input type] Parameter input [Data type] Word path [Unit of data] [Valid data range] -200 200 The following condition is necessary condition of Power calibration termination condition 2. [power calibration coefficient (this time) - power calibration coefficient (the medium of latest five times)] / power calibration coefficient (the medium of latest five times) parameter No.29513 / 1000 Where the possible power calibration coefficient get calculated by the actual laser power at the last of power calibration.
29516 Power calibration 3C power command (Normal mode or High power mode)
Parameter input Word path W 0 7000 In Power calibration 3C, an internal discharge is perfumed by this parameter.
Power calibration 3C power command (Fine mode)
29517
Parameter input Word path W 0 7000 In Power calibration 3C, an internal discharge is perfumed by this parameter.
Power calibration 3C power reference value (Normal mode or High power mode)
29518
Parameter input Word path W 0 32767 At the last of Power calibration 3C, if actual laser power is lower than this parameter, warm up 3C will be executed.
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29519
Power calibration 3C power reference value (Fine mode)
Parameter input Word path W 0 32767 At the last of Power calibration 3C, if actual laser power is lower than this parameter, warm up 3C will be executed.
Power calibration 3C internal discharge time
29520
Parameter input Word path sec 0 32767 Defines Power calibration 3C internal discharge time.
Warm up 3C upper limit of repetition
29521
[Input type] Parameter input [Data type] Byte path [Unit of data] [Valid data range] 0 255 Defines warm up 3C repeat time upper limit.
29522 Warm up 3C internal discharge time
Parameter input Word path sec 0 32767 Defines warm up 3C internal discharge time.
Power Calibration coefficient for Power Calibration Preparation 0C comparative power reference value
29523
[Input type] Parameter input [Data type] Word path [Unit of data] [Valid data range] 0 32767 The comparative power judgment value in Power Calibration Preparation 0C is calculated as follows. The comparative power judgment value =parameter No.29508 [parameter No.29523 /the power calibration coefficient at the previous time]
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29524
Power Calibration Preparation 2C upper limit of repetition
[Input type] Parameter input [Data type] Word path [Unit of data] [Valid data range] 3 32767 The upper limit repeat time of Power Calibration Preparation 2C, if the repeat time exceed this, the alarm (DS4127) will be active.
F.2.2 Discharge start (HV ON)

In SEQ2000, when the discharge start signal (HVON) is changed from 0 to 1, discharge will start, if with the original parameters as shipment, the oscillator executes Power Calibration Preparation 1C, Power Calibration Preparation 2C, Power Calibration 3C, and Power Calibration 4C, then calculate Power Calibration coefficient, and reach SEQ3000. These , Power Calibration Preparation 1C, Power Calibration Preparation 2C, Power Calibration 3C, and Power Calibration 4C are internal discharges. At , Power Calibration Preparation 1C, Power Calibration 3C, and Power Calibration 4C, actual laser power will be judged by each power reference value. If actual laser power is low, warm up will be executed.
HV ON Power Calibration Preparation

Power judge, and warm up in Power Calibration Preparation
1C 2C
Gas replacement Power Calibration

Power judge, and efficient warm up in Power Calibration
3C 4C
Termination of start up
Fig. F.2.2 (a) Discharge start (HV ON)
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F.3 WARM UP IN START UP LASER OSCILLATOR CONTROL

SEQUENCE
In laser oscillator control sequence, if get started in cold condition or after long unused time, warm up internal discharge is automatically executed if necessary until it get enough actual laser power. It follows that for example ambient temperature is lowest of the specification, no alarm will be active, and after the laser oscillator control sequence finished, the Power Calibration coefficient will be calculated properly.
NOTE If the cooling water temperature is less than 20 , it takes time until laser oscillator control sequence finishes because of automatic warm up sequence. For quick start-up, please keep proper water temperature with anti-freeze function or warm-up function of the chiller.
After Power Calibration Preparation 1C, if actual laser power is lower than reference value, Warm up 1C and gas replacement will be repeated. The letters WARM UP on CNC screen indicates that warm up is underway.
HV ON
Power Calibration Preparation Power judge, and warm up in Power Calibration Preparation
1C
WARMUP
2C
Warm up 1C
Discharge
Gas replacement
Gas replacement Power Calibration
Actual laser power <parameter No.29202
Fig. F.3 (a) Warm up 1C
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In Power Calibration Preparation 2C, if the resonator plate temperature is lower than standard, Warm up 2C will be extended until the temperature reaches the standard. Then Warm up 2.1C will be executed designated times and go on Power Calibration.
HV ON
Power Calibration Preparation Resonator Temperature <20 degree C
1C
WARMUP
2C Gas replacement 3C
Warm up 2C
Warm up
Gas replacement Warm up 2.1C Gas replacement No.29211 times
4C
Power Calibration
Power Calibration
Fig. F.3 (b) Warm up 2C
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If actual laser power is lower than reference value in Power Calibration 3C or Power Calibration 4C, Warm up 3C will be repeated. If actual laser power is very low, Power Calibration Preparation will be executed.
HV ON Power Calibration Preparation

Power monitor during Power Calibration and warm up
Gas replacement 3C
Condition 1
Condition 3
4C
Condition 2
WARMUP Discharge
Power Calibration
Warm up 3C
Internal discharge time No. 29522
Fig. F.3 (c) Warm up 3C
Condition 1: If actual laser power is lower than parameter Mo.29518. Condition 2: If the Power Calibration coefficient is higher than, the medium of latest five Power Calibration coefficient records X 1.053. Condition 3: If the actual laser power goes lower than, power command minus allowance (parameter No.15271).
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11/11

FANUC MANUALS. LASER C2000i / C4000i / C6000i MODEL CB-70475EN - 01 - 110727

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FANUC LASER C2000+-MODEL C FANUC LASER C4000+-MODEL C FANUC LASER C6000+-MODEL C

DEFINITION OF WARNING, CAUTION, AND NOTE

WARNINGS AND CAUTIONS ON EXPOSURE

WARNINGS AND CAUTIONS ON MAINTENANCE

WARNINGS AND CAUTIONS ON HANDLING

WARNINGS AND CAUTIONS ON MACHINING

WARNING LABELS AND STICKERS

(a) Warning labels Class identification label (FDA)

Class identification label (FDA)

Model C2000i-C C4000i-C C6000i-C

Maximum output 5KW 8KW 12KW

Label inside the access panel

Discharge section label

Label for regulating the atmospheric gasses in the oscillator housing

Ascent/Descent prohibited label

(b) Stickers Maintenance label

Equipment name plate

Cooling water and gas maintenance label

Inlet / outlet of water and gas

Label inside the access panel

Discharge section label

Label for regulating the atmospheric gasses in the oscillator housing

Ascent/Descent prohibited label

FANUC LASER C2000i /C4000i /C6000i -MODEL C

PREFACE ....................................................................................................p-1 1 INTERNAL STRUCTURE........................................................................ 1

Cooling Water ........................................................................................................29

Electrical Connections............................................................................................31 Power Supply Checking .........................................................................................40

DETAILS OF CHECKING ............................................................................ 40

2.3.2 2.3.3 2.3.4 2.3.5 2.3.6 2.3.7 2.3.8 2.3.9

PREPARATION PRIOR TO SHIPMENT ..................................................... 49

3.3.2 3.3.3 3.3.4

Exhaust Pump Oil...................................................................................................56

Exhaust Pump Filter ...............................................................................................57 Laser Optical Parts .................................................................................................58

UNITS .................................................................................................. 112

LASER POWER SUPPLY UNIT ................................................................ 121

Adjustment Method ..............................................................................................123

MATCHING BOX ....................................................................................... 126

5.4 5.5 5.6 5.7

DISCHARGE TUBE................................................................................... 126

EXHAUST PUMP ...................................................................................... 138

GAS CONTROLLER.................................................................................. 138

Adjustment Method ..............................................................................................141

THE WATER DISTRIBUTION UNIT .......................................................... 144

SHUTTER UNIT ........................................................................................ 148

BEAM ABSORBER.................................................................................... 150

GUIDE LASER (SEMICONDUCTOR LASER)........................................... 151

FAN ........................................................................................................... 152

POWER SENSOR ..................................................................................... 154

THE DEW SENSOR .................................................................................. 155

TABLE OF CONTENTS 5.17

PCB ........................................................................................................... 155

5.18 5.19 5.20 5.21 5.22 5.23

OIL MIST DECOMPOSING ELEMENT ..................................................... 157

WATER FITTING ...............................................................................................163

ALIGNMENT OF THE RESONATOR ........................................................ 166

Alignment Procedure at Mirror Cleaning Time ...................................................170

Alignment Procedure for Adjusting All Mirrors ..................................................171

Obtaining a Maximum Power ..............................................................................172

5.25 5.26 5.27

POWER CALIBRATION METHOD............................................................ 175

LASER SOFTWARE FUNCTION........................................................ 183

OIL EXCHANGE TIME LIMIT ALARM MONITOR FOR TURBO BLOWER197

LASER POWER SUPPLY AUTOMATIC ADJUSTMENT FUNCTION ....... 199