Nyquist / Haghighi

ABE 601

ANSYS Tutorial Performing a Harmonic Response Analysis

This tutorial demonstrates the steps involved in performing a harmonic response analysis. A Micro Electro-Mechanical System (MEMS) resonant micro fan is used for fluidic transport. The fan consists of a thin plate of polysilicon supported by two torsional support arms and suspended over a ground plate. The fan oscillates when the electric field created by an AC voltage source forces the fan toward and away from the ground plate at the natural frequency of its first mode shape. A mechanical load (4.92e-5 MPa), which is of equivalent magnitude to the electrostatic loading, will be applied to the model to represent the electrostatic loading. The dimensions and material properties for the fan are shown below.

Table 1: Material Properties for polysilicon.

Polysilicon Youngs Modulus Poissons Ratio Density

169 GPa 0.22 2320 kg/m3

120 25 1.5 100 All dimensions are in m. 600 100

Figure 1: Dimensions of the resonant micro fan.

Nyquist / Haghighi

ABE 601

The following is the step-by-step procedure for the beam deflection problem using the ANSYS GUI (Graphic User Interface) environment. Using the left button of the mouse, click on everything that is typed bold and type everything that is italicized below. (GoTo Utility Menu) PlotCtrls Numbering (Go to Lines and click) OFF (then OFF will be toggled to ON) (Go to Areas and click) OFF (then OFF will be toggled to ON) OK (Go to Main Menu) Preprocessor Element Type Add/Edit/Delete Add Coupled-Field & Scalar Brick 5 & OK Material Props Material Models Structural Linear Elastic Isotropic EX = 169e3 PRXY = 0.22 Density Density = 2320e-18 & OK Modeling Create Volumes Block By Dimensions (Click X1 box) -300 (Click X2 box) 300 (Click Y1box) 0 (Click Y2 box) 25 (Click Z1box) 0 (Click Z2 box) 1.5 & Apply (Click X1 box) -300 (Click X2 box) 300 (Click Y1box) 25 (Click Y2 box) 145 (Click Z1box) 0 (Click Z2 box) 1.5 & Apply (Click X1 box) -300 (Click X2 box) -350 (Click Y1box) 0 (Click Y2 box) 25 (Click Z1box) 0 (Click Z2 box) 1.5 & Apply (Click X1 box) 300 (Click X2 box) 350 (Click Y1box) 0 (Click Y2 box) 25 (Click Z1box) 0 (Click Z2 box) 1.5 & Apply

Nyquist / Haghighi

ABE 601

(Click X1 box) -350 (Click X2 box) -400 (Click Y1box) 0 (Click Y2 box) 25 (Click Z1box) 0 (Click Z2 box) 1.5 & Apply (Click X1 box) 350 (Click X2 box) 400 (Click Y1box) 0 (Click Y2 box) 25 (Click Z1box) 0 (Click Z2 box) 1.5 & OK Operate Booleans Glue Volumes Pick All & OK Meshing Mesh Tool Click on the Lines Set button Pick All SIZE = 25 & OK Shape: Select the Hex and Mapped options Click the Mesh Button Pick All & OK Solution Analysis Type New Analysis Static & OK Analysis Options Stress stiffness or prestress: Select Prestress ON OK

Nyquist / Haghighi

ABE 601

(Go to Utility Menu) Select Entities Select Areas Select By Location Select Z coordinates Min, Max: 0 OK

Nyquist / Haghighi

ABE 601

Plot Areas (Go to Main Menu) Solution Define Loads Apply Structural Displacement On Areas Pick areas 49 & 53 & OK Select All DOFs Value = 0 & OK (Go to Utility Menu) Select Entities Select Areas Select By Location Select Z coordinates Min, Max: 1.5 OK
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Nyquist / Haghighi

ABE 601

Plot Areas (Go to Main Menu) Solution Define Loads Apply Structural Pressure On Areas Pick areas 2 & 38 & OK Value: 4.92e-5 & OK (Go to Utility Menu) Select Everything (Go to Main Menu) Solution Solve Current LS Ignore the 3 warnings & Yes Close the /Status Command window & Solution Done window Analysis Type New Analysis Modal & OK Analysis Options Select Block Lanczos No. of modes to extract: 3 Expand mode shapes: click to check Yes No. of modes to expand: 3 Incl prestress effects?: click to check Yes OK

Nyquist / Haghighi

ABE 601

FREQB Start Frequency: 0 FREQE End Frequency: 100000 OK

Nyquist / Haghighi

ABE 601

Solve Current LS Ignore 3 warnings & Yes General PostProc Results Summary

These are the frequencies for the first 3 mode shapes of the fan (the actual values may differ slightly). Read Results By Pick Select Set 1 & Read & Close (Go to Right Side of Display Window) Click on the Isometric View Button

Nyquist / Haghighi

ABE 601

(Go to Utility Menu) PlotCtrls Animate Mode Shape DOF Solution & Deformed Shape & OK

(Go to Main Menu) Solution Analysis Type New Analysis Harmonic & OK Analysis Options OK

Nyquist / Haghighi

ABE 601

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Nyquist / Haghighi

ABE 601

Incl prestress effects?: click to check Yes OK

Load Step Opts Time/Frequency Freq and Substeps Harmonic freq range: 0 and 26000 Number of substeps: 26 Stepped or ramped b.c.: select Stepped OK

Solve Current LS Ignore the 3 warnings & Yes Close the /Status Command window & Solution Done window

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Nyquist / Haghighi

ABE 601

(Go to Main Menu) General Postproc Results Summary

Close this window

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Nyquist / Haghighi

ABE 601

(Go to Main Menu) TimeHist Postpro Time History Variables Window appears: Add Data Button Graph Data Button

Click Add Data button Add Time-History Variable Window Appears Choose Nodal Solution DOF Z-component of displacement & OK

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Nyquist / Haghighi

ABE 601

Input node 243 & Enter & OK

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Nyquist / Haghighi

ABE 601

Click Graph Data button

This plot shows the displacement in the z-direction for node 243 (the node corresponding to x=0, y=145, z=1.5) as a function of the frequency. The natural frequency at the fans first mode shape is 17604 Hz.

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