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Bi ging K Thut Cm Bin (sensors)

Hoang Si Hong

----2011---Faculty of Electrical Eng., Hanoi Univ. of Science and Technology (HUST), Hanoi, VietNam

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Ngun tham kho

Note: Bi ging mn hc ny c tham kho, trch dn v lc dch t cc ngun sau: Sch K thut o lng cc i lng in tp 1, 2- Phm Thng Hn, Nguyn Trng Qu. Cc b cm bin trong o lng-L Vn Doanh Cc b cm bin-Nguyn Tng Ph o lng in v cc b cm bin: Ng.V.Ho v Hong S Hng Sensor technology handbook (edited by JON WILSON) Elements of Electronic Instrumentation and Measurement (Prentice-Hall Company) Sch gii thch n v o lng hp php ca Vit Nam Bi ging v website: Bi ging k thut cm bin-Hong S Hng-BKHN(2005) Bi ging Cm bin v k thut o:P.T.N.Yn, Ng.T.L.Hng BKHN (2010) Bi ging MEMs ITIMS BKHN Mt s bi ging v cm bin v o lng t cc trng i hc KT khc Vit Nam Website: sciendirect/sensors and actuators A and B

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Ni dung mn hc v mc ch
Ni dung
Chapter 1: Khi nim chung v Cm bin (2b) Chapter 2: Cm bin in tr (2b) Chng 3: Cm bin o nhit (2b) Chng 4: Cm bin quang (2b) Chng 5: Cm bin tnh in (2b) Chng 6: Cm bin Hall v ho in Chng 6: Cm bin v PLC(1b) Mc ch: nm c cu to, nguyn l hot ng v ng dng ca cc loi cm bin thng dng trong cng nghip v i sng. Nm c xu th pht trin chung ca cng ngh cm bin trn th gii.

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Chng 3: Cm bin quang

Ni dung
Khi nim chung v nh sng v ngun sng Quang in tr, t bo quang in v b nhn quang in Photodiode Phototranzito T bo quang in

Ngun sng hay ngun thu nh sng?

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Cc khi nim chung v nh sng

nh sng l mt sng in t, vng nh sng nhn thy c c bc sng t 0.4 n 0.75m. nh sng c tnh cht sng v ht. Vn tc nh sng trong chn khng v = 299792 km/s Vn tc nh sng trong mi trng vt cht c chit sut n l v = c/n Mi lin h gia bc sng nh sng v tn s nh sau: = c/ (chn ko) v = v/

-Ultraviolet (t ngoi). Infrared (hng ngoi)

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Cc khi nim chung v nh sng

Tnh cht ht th hin qua s tng tc ca n vi vt cht. nh sng l cc ht phton mang nng lng Ept= h. Trong h l hng s planck = 6,6256.10-34 J.s

- Khi dng nh sng xuyn qua mt cht no c th b hp th hoc tn x

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Nguyn l chung
-Bc sng ln nht ca nh sng c th gy nn hin tng gii phng in t vi iu kin nng lng photon Ept > Edt nng lng lin kt ca in t max = h.c/Edt -Nh vy iu kin gii phng in t ph thuc vo kiu nh sng v bn cht vt liu b chiu sng - Hin tng gii phng cc ht dn di tc dng ca nh sng do hiu ng quang in s gy nn s thay i tnh cht in ca vt liu. l nguyn l c bn ca cc cm bin quang in - S in t c gii phng trong mt giy G = (1-R) /h.c -:Hiu sut, R: h s phn x v thng lng nh sng

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Cc n v o
-Nng lng bc x Q : l nng lng pht x, lan truyn hoc hp th di dng bc x c o bng Jun (J) -Quang thng : l cng sut pht x lan truyn hoc hp th, o bng ot (W) v l i lng c trng cho ngun sng: = dQ/dt - Cng sng I: l quang thng pht ra theo mt hng di mt n v gc khi, c n v l W/steradian: I = d/d - chi nng lng L: l t s gia cng sng pht ra bi mt phn t b mt dI theo mt hng xc nh v din tch hnh chiu vung gc ca phn t b mt dAn, c n v l W/steradian.m2 :L = dI/dAn - ri E: l t s gia quang thng thu c bi mt phn t b mt v din tch ca phn t , c n v l W/m2 :E=d/dA n v th gic /v nng lng - Thng lng lumen (lm) oat (W) - Cng candela (cd) oat/sr (W/Sr) - chi cd/m2 W/Sr.m2 - ri lumen/m2 (lux) W/m - Nng lng lm.s - nhy ca mt ngi cc i vi bc sng =0,555 micromet
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Cc n v o
-Nng lng bc x Q : l nng lng pht x, lan truyn hoc hp th di dng bc x c o bng Jun (J) -Quang thng : l cng sut pht x lan truyn hoc hp th, o bng ot (W) v l i lng c trng cho ngun sng: = dQ/dt - Cng sng I: l quang thng pht ra theo mt hng di mt n v gc khi, c n v l W/steradian: I = d/d - chi nng lng L: l t s gia cng sng pht ra bi mt phn t b mt dI theo mt hng xc nh v din tch hnh chiu vung gc ca phn t b mt dAn, c n v l W/steradian.m2 :L = dI/dAn - ri E: l t s gia quang thng thu c bi mt phn t b mt v din tch ca phn t , c n v l W/m2 :E=d/dA n v th gic /v nng lng - Thng lng lumen (lm) oat (W) - Cng candela (cd) oat/sr (W/Sr) - chi cd/m2 W/Sr.m2 - ri lumen/m2 (lux) W/m - Nng lng lm.s - nhy ca mt ngi cc i vi bc sng =0,555 micromet
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Cc ngun sng c bn
n si t

n ne-on

Led

Laser

LCD ?

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n si t
L bng thu tinh cha kh him hoc halogen v si t lm bng vonfram. Pht ra nh sng nhn thy c u im: thng lng nh sng ln, di ph rng, c th thay i c thng lng nh sng Nhc im: thi gian s dng ngn hn so vi led, d v, qun tnh ln tungsten filament Very thin metal wire emitting light rays when an electric current passes though it

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n Led (LIGHT EMITTING DIODE)

- Nguyn l: nng lng (quang nng) c gii phng khi c s ti hp cp t-l trng phn tip gip p-n v pht sinh ra cc phton. - u im ca led v led 7 thanh: + Tn s hot ng cao, bn tt, tin cy cao, tui th cao (10 nm). + Cng sut tiu th b, khng gy st p khi bt u hot ng + Khi tng nhit v dng cung cp cho led khng i th cng sng s gim trung bnh khong 1.5 n 2 mV/ oC + Kch thc b c th ghp ni din tch rng + Cng sng ph thuc vo dng in i qua, do c th iu khin c cng sng thch hp + Mu sc nh sng ph thuc vo vt liu v d: GaAs: , GaAsP hoc vng, GaP hoc xanh. + Kh nng chuyn mch nhanh ( 1 ns) + in p st trn led ph thuc vo mu vi dng thun cung cp c 20 mA + Bc x ca led l n sc
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How does it work?

Recombination produces light!!
g = hc/Eg

Junction is biased to produce even more e-h and to inject electrons from n to p for recombination to happen

P-n junction

Electrical Contacts

A typical LED needs a p-n junction There are a lot of electrons and holes at the junction due to excitations Electrons from n need to be injected to p to promote recombination
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Visible LED
Definition: LED which could emit visible light, the band gap of the materials that we use must be in the region of visible wavelength = 390- 770nm. This coincides with the energy value of 3.18eV- 1.61eV which corresponds to colours as stated below:

Colour of an LED should emits Led Led Led Led Led

Violet Blue Green Yellow Orange Red

~ 3.17eV ~ 2.73eV ~ 2.52eV ~ 2.15eV ~ 2.08eV ~ 1.62eV

The band gap, Eg that the semiconductor must posses to emit each light

in p st p khong 1.6 n 2 V da cam in p st p khong 2.2 n 3 V l cy in p st p khong 2.7 n 3.2 V vng in p st p khong 2.4 n 3 V xanh da tri in p st p khong 3 n 5 V
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LED 7 thanh

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Laser
Laser (c l la-de) l tn vit tt ca cm t Light Amplification by StimulatedEmission of Radiation trong ting Anh, v c ngha l "khuch i nh sng bng pht x kch thch". Electron tn ti cc mc nng lng ring bit trong mt nguyn t. Cc mc nng lng c th hiu l tng ng vi cc qu o ring bit ca electron xung quanh ht nhn. Electron bn ngoi s c mc nng lng cao hn nhng electron pha trong. Khi c s tc ng vt l hay ha hc t bn ngoi, cc ht electron ny cng c th nhy t mc nng lng thp ln mc nng lng cao hay ngc li. Cc qu trnh ny c th sinh ra hay hp th cc tia sng (photon) theo gi thuyt ca Albert Einstein. Bc sng (do mu sc) ca tia sng ph thuc vo s chnh lch nng lng gia cc mc. C nhiu loi laser khc nhau, c th dng hn hp kh, v d He-Ne, hay dng cht lng, song c bc x ln nht vn l tia laser to bi cc thnh phn t trng thi cht rn. http://vi.wikipedia.org/wiki/Laser

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Laser
Mt v d v c ch hot ng ca laser c th c miu t cho laser thch anh. Di s tc ng ca hiu in th cao, cc electron ca thch anh di chuyn t mc nng lng thp ln mc nng lng cao to nn trng thi o nghch mt ca electron. mc nng lng cao, mt s electron s ri ngu nhin xung mc nng lng thp, gii phng ht nh sng c gi l photon. Cc ht photon ny s to ra nhiu hng khc nhau t mt nguyn t, va phi cc nguyn t khc, kch thch eletron cc nguyn t ny ri xung tip, sinh thm cc photon cng tn s, cng pha v cng hng bay, to nn mt phn ng dy chuyn khuych i dng nh sng. Cc ht photon b phn x qua li nhiu ln trong vt liu, nh cc gng tng hiu sut khuch i nh sng. Mt s photon ra ngoi nh c gng bn m ti mt u http://vi.wikipedia.org/wiki/Laser ca vt liu. Tia sng i ra chnh l tia laser.
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Tnh cht Laser v an ton

- nh hng cao: tia laser pht ra hu nh l chm song song do kh nng chiu xa hng nghn km m khng b phn tn. - Tnh n sc rt cao: chm sng ch c mt mu (hay mt bc sng) duy nht. Do vy chm laser khng b tn x khi i qua mt phn cch ca hai mi trng c chit sut khc nhau. y l tnh cht c bit nht m khng ngun sng no c. - Tnh ng b ca cc photon trong chm tia laser. - C kh nng pht xung cc ngn: c mili giy (ms), nano giy, pico giy, cho php tp trung nng lng tia laser cc ln trong thi gian cc ngn.
Laser vi cng thp, ch l vi miliwatt, cng c th nguy him vi mt ngi. Ti bc sng m gic mc mt v thy tinh th c th tp trung tt, nh tnh ng nht v s nh hng cao ca laser, mt cng sut nng lng ln c th tp trung vo mt im cc nh trn vng mt. Kt qu l mt vt chy tp trung ph hy cc t bo mt vnh vin trong vi giy, thm ch c th nhanh hn. an ton ca laser c xp t I n IV. Vi I, tia laser tng i an ton. Vi IV, thm ch chm tia phn k c th lm hng mt hay bng da. Cc sn phm laser cho dn dng nh my chi CD v bt laser dng trong lp hc c xp hng an ton t I, II, hay III. (Xem thm an ton laser)

http://vi.wikipedia.org/wiki/Laser
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http://vi.wikipedia.org/wiki/Laser

u im v ng dng

- Tnh cht ny cho php laser c th lu tr vi gigabyte thng tin trn cc rnh ca DVD. Cng l iu kin cho php laser vicng sut nh vn c th tp trung cng sng cao v dng ct, t v c th lm bc hi vt liu trong k thut ct bng laser. u c CD v DVD hot ng theo cng c ch, duy ch c iu DVD cha c lng d liu nhiu hn bi s dng tia laser bc sng ngn hn (650 nano-mt so vi 780 nano-mt ca CD). Bc sng ngn hn cho php tng tn sut va chm, sn sinh photon v tng ng vi n l d liu. D kin, th h quang mi da trn cng ngh ghi a laser xanh (vi bc sng khong 405 nano-mt), c kh nng lu tr nhng b phim cht lng cao (High Definition- HD). -My o khong cch bng laser trong qun s l loi thit b quan trng -Rada laser c chnh xc cao hn rada thng thng, c th hng dn hai tu v tr ghp ni chnh xc trn khng gian. Tuy nhin, nhng thit b laser u chu nh hng ca thi tit, tri m hoc ma th khong cch o b gim i nhiu. - My in laser, xo vt xm, y t -u im: Ngun n sc, chi ln, bc sng xc nh, thng lng ln, chm tia mnh, i nh hng cao v truyn i xa
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Lu v cu hi

Cn tip phn 5-2 !!!

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