MAXTRON PERSADA INDONESIA www.maxtronpersada.

com

DRY FILM PHOTORESIST

Process Parameter Detail / Notes oven @ 110C5C Dry-film Laminator 21 step, variable neutral density wedge energy density in miliJoules per square centimeter (350 - 420 nm) Thinker & Tinker UV Source Kit initial - glossy light blue after exposure - glossy blue the total hold time between lamination and development should not exceed 8 hours the image should appear to be 100% developed to the naked eye. bubble assisted developers spray developers anhydrous sodium carbonate (soda ash, weight%) (4) sodium carbonate monohydrate (weight %) 100C5C NaOH (sodium hydroxide) @ room temp. 15 min.(2) Range 15 - 20 min. 115C5C 3 - 6 ft./min 10 - 12 150-300 mJ/cm2 calibrate each roll Optimum 15 min. 110C 4 ft./min. (1) 11

Pre-lamination drying time Lamination temperature speed Stouffer Step energy Exposure time

calibrate each roll

color

Post-exposure hold time

time

0.25 - 8 hours

breakpoint

50 - 65% of 60% of total total dev. time dev. time (3) 29C6C 31C2C 26C 31C

temperature Development

chemistry

0.80 - 0.90% 0.95 - 1.05%

0.85% 1.0%

Pre-etch drying Stripping

time chemistry

1.5% - 3%

5 min. 1.5%