Micro-electromechanical Systems

MICRO-ELECTROMECHANICAL SYSTEMS

A Technical paper
Submitted by
TECHNICAL SEMINAR 2004

Ajay Kumar Patra ROLL:EI200117303

National Institute Of Science And Technology

Under the guidance of

Ms. Suchilipi Nepak

National Institute of Science & Technology

Palur Hills, Berhampur

Ajay Kumar Patra EI200117303 [1]

 Micro-electromechanical Systems

What is MEMS?
A process technology used to create
TECHNICAL SEMINAR 2004

tiny integrated devices or systems

that combineNational
mechanical andAnd Technology
Institute Of Science

electrical components.
 Have the ability to sense, control
and actuate on the micro scale, and
generate effects on the macro scale.

Ajay Kumar Patra EI200117303 [2]

 Micro-electromechanical Systems

Schematic diagram of MEMS

TECHNICAL SEMINAR 2004

National Institute Of Science And Technology

Ajay Kumar Patra EI200117303 [3]

 Micro-electromechanical Systems

MST(microsystems technology)
TECHNICAL SEMINAR 2004

National Institute Of Science And Technology

Ajay Kumar Patra EI200117303 [4]

 Micro-electromechanical Systems

Classification of MEMS
•Sensor-device that measures information
TECHNICAL SEMINAR 2004

from a surrounding environment and

provides an electrical output signal in
National Institute Of Science And Technology
response to the parameter it measured.
•Transducer-device that transforms one
form of signal or energy into another
form.
•Actuator-device that converts an
electrical signal into an action

Ajay Kumar Patra EI200117303 [5]

 Micro-electromechanical Systems

MEMS Applications
BioMEMS
TECHNICAL SEMINAR 2004

MOEMS
National Institute Of Science And Technology

RF MEMS

Ajay Kumar Patra EI200117303 [6]

 Micro-electromechanical Systems

DENSO Micro-car
TECHNICAL SEMINAR 2004

National Institute Of Science And Technology

Ajay Kumar Patra EI200117303 [7]

 Micro-electromechanical Systems

Effect of miniaturization on surface and volume

TECHNICAL SEMINAR 2004

National Institute Of Science And Technology

Ajay Kumar Patra EI200117303 [8]

 Micro-electromechanical Systems

MEMS Fabrication methods

Photolithography
TECHNICAL SEMINAR 2004

Bulk micromachining
Surface micromachining
National Institute Of Science And Technology
High-aspect-ratio micromachining
LIGA
Laser micromachining
Computer aided design
MEMCAD

Ajay Kumar Patra EI200117303 [9]

 Micro-electromechanical Systems

MEMS Packaging
TECHNICAL SEMINAR 2004

National Institute Of Science And Technology

Ajay Kumar Patra EI200117303 [10]

 Micro-electromechanical Systems

MEMS Transducers

 mechanical
TECHNICAL SEMINAR 2004

sensor
actuator
National Institute Of Science And Technology
 radiation
sensor
actuator
 thermal
sensor
actuator

Ajay Kumar Patra EI200117303 [11]

 Micro-electromechanical Systems

Mechanical Transducer
Mechanical sensor
piezoresistive
TECHNICAL SEMINAR 2004

piezoelectric
National Institute Of Science And Technology
capacitive
resonant
Mechanical actuator
electrostatic
piezoelectric
Ajay Kumar Patra EI200117303 [12]
 Micro-electromechanical Systems

Radiation Transducer
Radiation sensor
photodiodes
TECHNICAL SEMINAR 2004

charge-coupled devices
National Institute Of Science And Technology
pyroelectric sensors

Radiation actuator

Ajay Kumar Patra EI200117303 [13]

 Micro-electromechanical Systems

Thermal Transducers

Thermal sensors
TECHNICAL SEMINAR 2004

thermo-mechanical
National Institute Of Science And Technology
thermo resistive
thermocouples
Thermal actuators
shape memory alloy actuation

Ajay Kumar Patra EI200117303 [14]

 Micro-electromechanical Systems

Industry
Challenges
•Access to foundries
TECHNICAL SEMINAR 2004

•Design, simulation and modeling

National Institute Of Science And Technology
•Packaging and testing
•Standardization
•Education and training

Ajay Kumar Patra EI200117303 [15]

 Micro-electromechanical Systems

CONCLUSION
•Despite MEMS being an enabling technology, it
is facing challenges in developing and
TECHNICAL SEMINAR 2004

manufacturing because of different set of

National Institute Of Science And Technology
capabilities and competencies to implement it.
•For true commercialization of MEMS, foundries
must overcome the critical technological
bottlenecks.

Ajay Kumar Patra EI200117303 [16]

 Micro-electromechanical Systems
TECHNICAL SEMINAR 2004

THANK YOU
National Institute Of Science And Technology

Ajay Kumar Patra EI200117303 [17]