-

SCANNI NG ELECTRON MICROSCOPE WITH ENERGY

DISPERSIVE X-RAY SPECTROMETER (SEM-EDAX)
.
.. ..
.
...

(SEM/EDAX)

/

I.
1 .
(Scanning Electron Microscopy, SEM)

.

1000x 0.2 m.
30
(, .) 10,000 x.

. (TEM,
Transmission Electron Microscope)
(SEM, Scanning
Electron Microscope).



, .

(.. ).
.

.
(secondary) (backscattered) .

. SEM
.

, .
SEM
.

2 .

.

.

4
1:

.
1) (emission current)
2) (spot size)
3) / (accelerating voltage)
4) ( )




2 :

1) (Charging)
(

2: -

2)
( , )
E0
e
E1

3)
( , )
E0
e
E1

4)
2 . 1
(Elastically scattered primary
electrons) .

(Backscattered Electrons)
30 KeV
.

 .
( )
( 50 80% ).

180

(Backscattered electrons,
BSE).

.

,
.

3:

~6% ~50%.
S .
.

.


(solid state semiconductor) donut,
.

.

2 . 2
(Inelastically scattered electrons),

(Secondary electrons,
SE)

4:

 . (
).

.
(50eV)
,
.
.

.

.
.


(+100V)

.
.
(CRT),
.
.

2 . 3

(X-Rays):

(Bremsstahlung)

(Characteristic)
Auger


,
( )

5:

 Bremsstahlung.
.
.

.
,

.
.

6: K L

( )
.
, ,
eV (Multi Channel
Analyzer). (Look Up Table)
.

,
.

.
Auger
Auger

.

7: Auger

3 .
SEM

:
1)

2)

8:

3)
.
.

3.1
( ),
.
(filament current). ,

1-30 KV (accelerating voltage).
.
,
.
,
. (filament
saturation). ,

 , .
,

.

(emission current 100 ).

(filament

tip)

(Wehnelt
cap

9:

aperture).

(condenser lens)
( ).
(spot size).

.

:

() ().

. ,

:

,
10:

f .
, . ,

 ,
.

3.2
SEM,
.
.
2e-3 Pa.

3.3

(--).

Everhart Thornley (ETD), (Large Field
Detector, LFD), (Gaseous Electron Dtector GED),
(Solid State Electron Detector, SSED)
(BSE),
(SiLi), - (Energy Dispersive
Spetrometer, EDS).

4 .

.
, , ,
, , , , , , , , .
,

SEM .

. SEM XRD
,
, ,
.

.
SEM.

10

 .
1.

. ,

.

,
,
. ,
.
,
,
.
,
,
.

, .
,
, .
, .

2 .
Quanta 200 FEI
-EDAX.
Quanta 200 100,000x
6 nm.
Quanta 200

:

(High Vacum 2e-3 Pa)

(Low Vacum 3-12 Pa)

(ESEM, Environmental Scanning Electron Microscopy)

11


- .
, 2cm 5cm
x,y,z .
(
): Everhart Thornley (ETD), Large Field Detector
(LFD), Gaseous Electron Dtector (GED),
Solid State Electron Detector (SSED)
(EDX).

:

EDAX Genesis.


.

.
.



.

12

. .
.

.


.

,
.

13


1. Principles of Instrumental Analysis

Skoog, Holler, Nilman, Harcourt College

Publishers, 1998
2. Analytical Chemistry R.Kellner, J.M.Mermet, M.Otto, H.M.Widmer, Wiley-VCH,
1997
3. mse.iastate.edu/microscopy/home.html
4. www.mos.org/sln/SEM/
5. science.nasa.gov/newhome/headlines/ast05mar98_3.htm
6. www.sciencemuseum.org.uk/on-line/electron/section4/sem.asp
7. acept.la.asu.edu/PiN/rdg/elmicr/elmicr.html
8. www.wiley.com/cp/mmr/mmrsampl.htm

14