Inductively Coupled Plasma-Atomic Emission

Spectrometry
ICP-AES

1965-69: Greenfield , Fassel

1975:
: 6000 ICP-AES

48 LOD
1-100ppb

ICP-OES, ICP-AES, ICP

E -

,

6.000-10.000 o

 ICP-AES:

,

 ICP
N+
1 (2 . me . k.T)3/2 Q+ e- IP/kT

No
ne . h 3/2 . Qo

+=
=
ne=
me= e
k, h=Boltzmann, Planck
P=

(T=7500 oC ne = 1X1015/cm3)


1. / ()
2. /
3. (/)

4. /

 ICP-OES

3600 /mm
= 0.006nm

(simultaneous)
= 0.0286nm

Paschen-Runge
Rowland 48
=
48

 ICP
X
mm

mm

pm

Rs

2400

110

0.9

260.000

3600

110

0.6

390.000

2400

110

0.45

520.000


echelle


Echelle ( )


ICP-OES
A (Axial) ICP
/
(CD detectors)

A/
ICP-ES

 ICP

1.
2.
3.
4.
5.

(Simplex Optimization max S/N )

 ICP
1.
175-800nm (10s)
2.

(background)
3.

H/Y

 ICP
1. ICP
( r, ,
Simplex)
2. E .. max S/N (S=,
=)
3.
4. ..
5.
6. (
, 242.3 nm)

1.

: > 5%

2.

(matrix) :

3.

: ..

(
, 242.3 nm)


ICP-OES

 ICP-OES
X :1-100 ppb
I : RSD: 1-2%
: , P, B,
W, Nb, Ta
A AAS: S, J
(multi-element analysis)
:
10 6

S

 ICP-OES
:

 CP-OES
1.
A
( )
2.

3.

( Mo, Nb, Ta, W, B, Zr, P, S
AAS
4.

(.. )
5.

(.. )
6.

(.. P, Ca, Mg, K
)

ICP-OES
I : RSD: 12%

:
, P, B, W, Nb, Ta
A
AAS: S, J

(multi-element
analysis)

:

10 6


S
X :1-100
ppb

AS
70 LOD 0.01-10
ppm

Zr, Hf, Nb, Ta,
Ti, U


,
LODs,


(As, Hg, Sb, Sn, Te)