Ultra sensitive optical MEMS sensor

Basic Principle of working:

Fabry Perot interference placed on a micro machined rectangular silicon membrane as pressure
sensitive element
Disadvantages of previous methods:
Difficulty in dealing with externally mounted piezo electric transducer : EMI degrades signal to
noise ratio and multipath interference introduces difficulty in locating PD.
Characteristics of sensor to be mounted inside:
1. Electrically and chemically neutral
2. Low EMI
3. Small in size
Operating Principle
PD generates acoustic waves which are mechanical waves when these waves incident upon the
diaphragm of sensor