17-1 Sentaurus Process

[2]

Sentaurus Process

17-1-1

[3]

Sentaurus Process

Sentaurus Process Synopsys Inc. TCAD

Sentaurus Process
Sentaurus Process
ULSI

Sentaurus Process Avanti TSUPREM Taurus

Process ISE Dios

1.PDB
2.
InspectTecplot SVInspect
Tecplot SV
Sentaurus Process
Crystal-TRIM
Monte Carlo

Sentaurus Process

396

Sentaurus Process
Sentaurus Process
Sentaurus Process
Synopsys Inc. Sentaurus Process

Sentaurus Process
Sentaurus Process Unix

Linux Sentaurus Process

Synopsys Inc.

Sentaurus Process

Sentaurus Process
Sentaurus Process license PC
Sentaurus Process Linux
Sentaurus Process Unix
sprocess
Sentaurus Process
Sentaurus Process
Sentaurus Process

.cmd
Sentaurus Process
Sentaurus Process
sprocess

sprocess

nmos.cmd

nmos.cmd
2

Sentaurus Process
Sentaurus Process Unix Linux

gedit Sentaurus Process

397

2
$
3
\

4
!

5parameter=string
value
6parameter= {item1
item2} parameter= item1item2

7Sentaurus Process for while if/else

switch
3

Sentaurus Process
Sentaurus Process

Sentaurus Process
Sentaurus Process

3.1

Sentaurus Process
Sentaurus Process

help

Sentaurus Process

fcontinue

load

Logfile

Sentaurus Process

mater

exit

Sentaurus Process

398

fbreak

fexec

init

interface

mgoals

MGOALS

tclsel

3.2 Sentaurus Process

Sentaurus Process Sentaurus Process

region

line

grid

substrate_profile

polygon

3.3

point

doping

profile

refinebox

MGOALS

bound

contact

transform

Sentaurus Process
Sentaurus Process

deposit

diffuse

photo

mask

etch

strip

implant

stress

3.4 Sentaurus Process

399


Arrhenius

Arrhenius Arrhenius

Arrhenius
beam

equation

gas_flow

kmc

math

mechdata

pdbDelayDouble

pdbDelayDouble
pdbDelayDouble

pdbDopantLike

pdbDopantLike
pdbDopantLike

pdbGet

pdbGet

pdbNewMaterial

pdbSet

pdbGet pdbSet

pdbSet

pdbUnSetString pdbUnSetDouble

SetDFISEList

DF-ISE

SetDiosEquilibriumModelMode SetDiosPairModelMode
Dios ISE
DiosISE
SetFastMode

SetTDRList

TDR

SetTemp

SetTS4MechanicsMode
Tsuprem-4
solution

strain_profile

temp_ramp

400

term

update_substrate

reaction

3.5 Sentaurus Process

Sentaurus Process
alias

color

Tecplot
Sv

contour

graphics

Sentaurus Process

layers

print.1d

plot.1d

plot.2d

plot.tec

Sentaurus ProcessTecplot SV

plot.xy

point.xy

point.xy

print.data

xyz

SetPlxList

WritePlx

WritePlx

select

slice

struct

SheetResistance p-n
Sentaurus Process

Sentaurus Process

401

Sentaurus Process
1Sentaurus Process *.cmd
17-1-1 Sentaurus Process
Sentaurus Process Sentaurus Process

Sentaurus Process

Sentaurus Process (*.cmd

Linux gedit
2Sentaurus Processs *.log
Sentaurus Processs Sentaurus Processs
Sentaurus Processs

Sentaurus Process
3

Sentaurus Process

4TDR (*_bnd.tdr
TDR Sentaurus Process
TDR Mesh,
Noffset3D Sentaurus Mesh Tecplot SV
DF-ISE *_mdr.bnd
Mesh Noffset2D/3D
5 TDR *_fps.tdr
TDR
TDR Sentaurus Process
Tecplot SV TDR DF-ISE
.grd .dat
Tecplot SV
6DF-ISE (*_msh.cmd)

402

Sentaurus Process
Sentaurus Device
Sentaurus Process
7DF-ISE *.plx
DF-ISE
Inspect
17-1-2

Sentaurus Process

Sentaurus Process ISE

Sentaurus Process
Sentaurus
Process MGOALS Sentaurus Structure Editor

STI
STI

Sentaurus Process

Sentaurus Process

Fourier
TDR

Sentaurus Process
Sentaurus Process
1Sentaurus Process

BiCMOS ULSI-
CMOS

2Sentaurus Process

403

3Sentaurus Process
LOCOSLOCal Oxidation Separate
SWAMISideWAll Masked Isolation
DTIDeep Trench IsolationSTIShallow Trench Isolation

4Sentaurus Process
shadowing
PAI
PreAmorphization Implant
5Sentaurus Process
OED
TED

6Sentaurus Process

7Sentaurus Process MOS

C-V
8 Sentaurus Process

Sentaurus Process
Tsuprem- IC Sentaurus Process

PDBPDB
Sentaurus Process PDB
Sentaurus Process
PDB PDB
PDB

Alagator
17.1.1 Sentaurus Process PDB

404

 17.1.1Sentaurus Process
17.1.1

[SurfDiffLimit Oxide_Silicon Si Vac 0.0] Tcl

Sentaurus
Process
3

Sentaurus Process
1

Inspect

[4]

Sentaurus Process InspectInspect

Inspect
Sentaurus Process
Inspect
SetPlxList WritePlx
.plx DF-ISE Inspect
17.1.2 Inspect

405

 17.1.2 Inspect

Tsuprem-
Inspect

[5]
2 Tecplot SV
Sentaurus Process
Tecplot SV
struct tdrdfise ise.mdraw TDR DF-ISE
Tecplot SV
17.1.3 Tecplot SV

17.1.3Tecplot_SV
17.1.3 Tecplot_SV
Sentaurus Process

406

Sentaurus Process
Tecplot_SV

Tecplot SV

17-1-3

Sentaurus Process

Sentaurus Process

Sentaurus Process
MC

Sentaurus Process

Sentaurus Process

Sentaurus Process
[6]
MC

Hobler
MC
MC
MC

implant <dopant> [energy=<n>] [dose=<n>] [tilt=<n>] [rotation=<n>]

Crytal-TRIM
implant <dopant> [energy=<n>] [dose=<n>] [tilt=<n>] [rotation=<n>] [crystaltrim]
Taurus MC
implant <dopant> [energy=<n>] [dose=<n>] [tilt=<n>] [rotation=<n>] [taurus.mc]
Sentaurus Process
implant <dopant> [energy=<n>] [dose=<n>] [tilt=<n>] [rotation=<n>] [load.mc]
[file=<c>]

407

Sentaurus Process
Beam dose
controlEffective channeling suppression
[7]
Profile ReshapingPreAmorphization implants
PAI

Sentaurus Process beam.dose

range.sheff.channeling.supress
profile.reshapingPAI

Sentaurus Process

Sentaurus Process

Sentaurus Process diffuse

Sentaurus Process

100

Sentaurus Process Flash or laser anneal

model
Sentaurus
Process
408


Sentaurus Process
five-stream{311}SMICs

Sentaurus Process

Sentaurus Process 1
2
3

Sentaurus Process
4Sentaurus Process

Sentaurus Process
SiGe
MOS

[8]

Sentaurus

Process SiCGaN
AlGaNSentaurus Process

409

Sentaurus Process

Sentaurus Process
KMC

100nm

MCMC

KMC

Sentaurus Process

Sentaurus Process
1.
2. H2OO2
3.

SiSiO21

Sentaurus Process
PDE
Sentaurus Process

Sentaurus Process

410