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Article history:
Received 13 May 2014
Accepted 30 June 2014
Available online 8 July 2014
Keywords:
UV plasmonics
Aluminum concaves
Anodization
Copper
Silver
Reectivity spectra
a b s t r a c t
UV plasmonics is of particular interest because of large variety of applications, where the higher energy
plasmon resonances would advance scientic achievements, including surface-enhanced Raman scattering (SERS) with UV excitation, ultrasensitive label-free detection of important biomolecules absorbing
light in the UV, or the possibility for exerting control over photochemical reactions. Despite its potential,
UV plasmonics is still in its infancy, mostly due to difculties in fabrication of reproducible nanostructured materials operating in this high energy range. Here, we present a simple electrochemical method to
fabricate regular arrays of aluminum concaves demonstrating plasmonic properties in UV/violet region.
The method enables the preparation of concaves with well-controlled geometrical parameters such as
interpore distance (Dc ), and therefore, well controllable plasmon resonances. Moreover, the patterning
is suitable for large scale production. The UV/violet properties of Al concaves can be further ne-tuned
by Ag and Cu metals. The refractive index sensitivity (RIS) increases after the metals deposition as compared to RIS of pure Al nanohole arrays. The highest RIS of 404 nm/RIU was obtained for Cu coated Al
nanoconcaves with the Dc = 460.8 nm, which is similar or better than the RIS values previously reported
for other nanohole arrays, operating in visible/near IR range.
2014 Published by Elsevier B.V.
1. Introduction
The interest in understanding of light interaction with ordered
arrays of nanoholes in thin metal lms has been a topic of research
for number of years [14]. Surface plasmons (SPs) are essentially
the coupled oscillations of light and free electrons at the interface
between a metal, which has a negative dielectric constant, and a
positive dielectric material. They are classied as surface plasmon
polaritons (SPPs) [5,6] and localized surface plasmons (LSPs) [7].
While in metal nanoparticles of different size and shape only LSPs
is present [810], tunable and regular metal nanovoids can support
both types of resonances depending on their truncation [1114]. It
was observed that rectangular holes are considerably better than
circles or squares due to larger LSPs contribution [15].
Optimal plasmonic properties (the strongest and narrowest
resonances) are provided by metals with small imaginary part
of the dielectric constant [1618]. Most of the metals possess
808
H
W1/2 n
(1)
where n is the number of pores on the analyzed image, H the maximal intensity value of the FFT intensity prole, and W1/2 is the width
of the intensity prole at half of its height. Interpore distance was
estimated as an inverse of the FFTs radial average. The average
interpore distance (Dc ) was estimated from three FE-SEM images
for each sample. Pore diameter (Dd ) of the analyzed nanostructures
was estimated from three FE-SEM images for each operating conditions, using NIS-Elements software provided by Nikon Company.
Pores density (number of pores per 1 m2 ) was evaluated based
on six FE-SEM images for a given set of experimental conditions.
Detailed information on the FFTs image analysis can be found in
refs. [53,54].
The Ag, and Cu coating of as prepared Al concaves was done
by vacuum evaporation technique under high vacuum of 106 kPa
using resistively heated tungsten crucibles. The evaporation process was performed in the same experimental conditions for all
samples: the weights of metals were kept constant, the distance
from the crucibles to the substrates was always the same. The time
of the metals deposition lasted till the crucible was empty.
Reectivity measurement was performed using CCD spectrometer with ber-optics reection probe (Avantes) and deuterium/halogen light source (Ocean Optics Inc.). The probe was
set up at normal angle to measured sample. All reectance spectra
were collected at 2001100 nm wavelength range. Electropolished
Al coupon was used as a reference sample with 100% reection.
2. Experimental
3. Results and discussion
High-purity aluminum foil (99.9995% Al, Puratronic, AlfaAesar) with a thickness of about 0.25 mm was cut into coupons
(2 cm 2 cm). Before the anodization process the Al foils were
degreased in acetone and ethanol and subsequently electropolished in a 1:4 mixture of 60% HClO4 , and ethanol at 10 C, constant
current density of 0.5 A/cm2 , for 1 min. Next, the samples were
rinsed with distilled water, ethanol and dried. As prepared Al
coupons were insulated at the back and the edges with acid resistant tape. A Pt grid was used as a cathode, and the distance between
both electrodes was kept constant (ca. 1 cm). A two-electrode electrochemical cell with a Pt grid cathode was used in the anodizing
809
Fig. 1. SEM micrographs (accelaration voltage of 3 kV) of the sample produced at 120 V (A) and 195 V (B), coated with Ag (C and D) and Cu (E and F) metals, respectively. The
scale bar applies to all images.
(Ag) and copper (Cu) metals were coated. Fig. 1(C) and (D) show
the top view SEM images of the sputtered Ag lm, demonstrating
that thin Ag lm is composed of tiny Ag nanoparticles which are dispersed on the cavities and the edges of the apertures of the concave
arrays. The thin Cu layer seems to uniformly cover the entire surface
of the concave arrays. In addition, some texture of the layer is visible
on the sample anodized at 195 V (Fig. 1E and F). The compositional
contrast of the samples conrmed the above observations (Fig. 1S in the Supplementary data). The sample covered with Ag shows
bright contrast coming from higher atomic number Ag, which corresponds to the Ag nanoparticles scattered on lower atomic number
Al nanoconcaves. On the other hand, there is no compositional contrast visible in the sample covered with Cu, giving indication that
the Al material is evenly coated by the Cu. The components of the Ag
and Cu coated Al nanobowl arrays are conrmed by energy dispersive X-ray spectroscopy (EDS) measurements (Fig. 2). In addition
to Al, Ag, and Cu elements, the presence of C and O were detected.
Oxygen comes from partial oxidation of the samples, which were
kept in air. The aluminum oxide with a thickness of 2.53.0 nm is
formed on the Al surface within few hours after exposure to air [41].
The process is self-limiting and its negative effect was not noticed
for the Al nanoholes arrays previously investigated [40,42]. The role
of Al2 O3 becomes important for very small nanoparticles (>10 nm).
It was observed that the Al2 O3 tends to red-shift the position of
SPRs in those tiny nanoparticles, but is rather undisruptive for the
extinction efciency [39,41]. Like aluminum, copper is prone to oxidation. However, some advantages of Cu surface oxidation, such as
enhancement of plasmonic response, were also noticed [55].
Fig. 2. EDS measurements for the samples coated with Ag (A), and with Cu (B). The analysis presents the results obtained for the Al concaves synthesized at 120 V.
810
Fig. 3. Lower magnication SEM micrographs (accelaration voltage of 20 kV) of the sample produced at 120 V (A) and 195 V (B) along with their respective FFT images (in
the upper, right corners).
Table 1
Pores diameter (Dp ), interpores distance (Dc ), regularity ratio (RR), and pores density
values for the samples anodized at 120 V and 195 V as determined by FFTs analysis.
120 V
195 V
Dp
Dc
RR
Pores density
188.3 16.4
356.6 27.0
238.2 0.1
460.8 11.6
1.84 0.29
1.60 0.40
14.8 1.4
4.2 0.2
The resulting pores diameter (Dd ) and interpores distance (Dc ) determined by FFTs analysis are: 188.3 16.4 nm
and 238.2 0.1 nm for the sample anodized at 120 V, and
356.6 27.0 nm and 460.8 11.6 for the sample anodized at 195 V,
respectively. The increase of Dc is accompanied by the decrease
of pores density (number of pores per 1 m2 ): it decreases from
14.8 1.4 for sample anodized at 120 V down to 4.2 0.2 for the
sample anodized at 195 V (Table 1).
Investigations of plasmonic properties of materials usually
proceed by monitoring a dip in reectance (R), when an evanescent
light eld travels through a metal thin lm and excites SPs at the
metaldielectric interface. As a result, the normal reectivity of the
metal surface is greatly reduced on resonance due to optical absorption by the metal [2]. In Fig. 4 the reectivity spectra of the studied
samples are given. The overall reectivity of the patterned sample is
much lower than that of the continuous Al lm. At the same time in
the reectivity spectra pronounced minima are observed, the most
distinct one at a photon wavelength of 254 nm and 395 nm, for
the sample with Dc = 238.2 nm and Dc = 460.8 nm, respectively. The
reection intensity measured at the centre of the minima drops
down to 12.5% for the sample anodized at 120 V and to 2.7% for
the sample anodized at 195 V as compared to 100% reectivity of
unstructured Al (Table 2).
The minima are signatures of SPPs excitations, which are directly
connected to the symmetry of the lattice and the optical constants
of Al. At normal incidence, coupling photons of a given energy with
2-dimensional hexagonal periodic array gives SP resonances (SPRs)
at the following wavelength (Eq. (2)) [3,22]:
=
a0
4 2
(i
3
+ j2
+ ij)
m d
m + d
(2)
811
Fig. 4. Reectivity spectra of Al concaves fabricated at 120 V (A) and at 195 V (B) pure (red dashed lines) and coated with Ag (blue dotted lines) and Cu (magenta dash dot
lines) metals. For comparison, the reectivity of unstructured Al in also provided (black lines). The insets show larger magnication of the reectivity spectra demonstrating
the minima shift after the metals deposition. (For interpretation of the color information in this gure legend, the reader is referred to the web version of the article.)
Table 2
Position of reectivity minima ((0,1) SPR mode), reectance intensity at the (0,1) and refractive index sensitivity (RIS) values for the samples anodized at 120 V and 195 V.
Al concaves
Al concaves with Ag
Al concaves with Cu
120 V
(0,1) [nm]
Reectance at (0,1) [%]
RIS [nm/RIU] (the correlation coefcient)
254
12.5
189 (R2 = 0.9964)
259
6.2
191 (R2 = 0.9973)
262
1.7
199 (R2 = 0.9988)
195 V
(0,1) [nm]
Reectance at (0,1) [%]
RIS [nm/RIU] (the correlation coefcient)
395
2.7
296 (R2 = 0.9984)
407
7.1
399 (R2 = 0.9953)
425
2.2
404 (R2 = 0.9985)
necessary to obtain signicant reection drop, especially if the surface is resonantly corrugated [61]. The lm thickness formed by Ag
and Cu on the Al concaves can be considered as optically thin and,
therefore, plasmonic sensing performance of the combined metals
is basically determined by the aluminum nanoconcaves. Similar
results were obtained for hybrid plasmonic nanoparticles systems:
plasmonic resonances of copper- [62] and gold-shell [26] coated silver nanoparticles were only slightly shifted to longer wavelength
with respect to pure Ag NPs. Furthermore, thicker coating induced
stronger red-shift of LSPR peak. In contrast, dielectric coremetallic
shell spheroid nanoparticle demonstrated the LSPR shift to shorter
wavelength with the increase of the shell thickness [10]. Simulation results showed that various plasmonic resonance modes of
nanohole arrays in metallic lms (such as Ag, Al, Cu) are shifted
within 35 nm after coating them with Au thin layer (10 nm) [49],
which is in agreement with the results obtained in this work.
The intensity at the reectivity minima is further reduced after
the metals deposition (Table 2). For the Cu coated Al concaves
with Dc = 238.2 nm the reectivity as low as 1.7% is obtained, as
compared to unstructured, pure Al. These excellent antireecting
properties of regular, hexagonally arranged Al nanoconcaves can
be, thus, considered for applications in solar photovoltaics. In order
to increase absorption in silicon thin lms, texturing of the active
layer itself or application of various structures, including plasmonic
structures, have been widely investigated [6366].
SPR sensitivity of the coated and pure Al nanoconcave arrays was
measured as resonance wavelength shift per refractive index unit
(RIU). After immersing the samples in liquids with different refractive index the reectivity dips shift to longer wavelengths (Fig. 3-S
in the Supplementary data). In Fig. 5 (0,1) as a function of refractive index is presented, and refractive index sensitivity (RIS) values
are determined from the slope of linear t to the points measured
at the centre of the reectivity minima (Table 2). It can be seen
812
Fig. 5. Reectivity dips ((0,1) ) as Figs. 4 and 5 will appear in black and white in print and in color on the web. Based on this, the respective gure captions have been updated.
Please check, and correct if necessary a function of refractive index for Al concaves synthesized at 120 V (A), and at 195 V (B), pure (squares) and Ag (circles) and Cu (diamonds)
coated, along with the respective sensitivities predicted by SP theory (Eq. (2)) (black, dotted lines). The red, blue, and green lines represent linear ts to the measured data
to obtain refractive index sensitivity (RIS) values. (For interpretation of the color information in this gure legend, the reader is referred to the web version of the article.)
nite-difference time-domain (FDTD) calculations, the optical pattern at the transmission peak showed extensive surface plasmons
eld near the aperture edges (so-called short-range SPR), which
resulted in a small sensitivity, much smaller than the theoretical
one. Since in this work the sensitivity was determined from the
reection dips (because they were better discernible), the wavelength sensitivity was mainly constituted by the short-range SPR.
As an effect, lower than theoretically expected RIS was obtained for
both samples. The experimental RIS becomes closer to the theoretical one after the deposition of Ag and Cu metals. Particularly for Cu
coated Al concaves with Dc = 460.8 nm it increases up to 404 nm/RIU
as compared to 296 nm/RIU determined for pure Al holes arrays.
This indicates that the metals coating has a positive effect on plasmonic eld enhancement and can be used for tailoring of plasmonic
performance of Al concave arrays in UV region.
The RIS values evaluated in this work are comparable or even
better than previously determined for various nanohole arrays
operating in visible/near IR range. The RIS of 252 nm/RIU was
measured for Ag nanohole arrays prepared by colloidal lithography [32], 167 nm/RIU and 286 nm/RIU for periodic Au nanohole
arrays fabricated by EBL [27] and soft interference lithography
[69], respectively, and 212 nm/RIU for Ag nanoparticles prepared
by nano-sphere lithography [8]. Au nanohole arrays with the
lattice parameter (periodicities) of 590 nm demonstrated RIS of
400 nm/RIU [25], whereas RIS 409 nm/RIU was obtained for 500nm-period Au nanhole arrays [23].
It is anticipated that upon optimization of electrochemical process performed at high voltages the sensitivity performance of
the Al nanoconcave arrays, particularly those fabricated at 195 V
with the pitch size of 500 nm, will be better. As an example, Al
nanohole square arrays with similar periodicity fabricated by EBL
and nanoimprint lithography (NIL) techniques provided more regular nanohole arrays, which, in turn, resulted in higher RIS values:
487 and 516 nm/RIU, respectively [40,42]. Perfect Al concaves
arrangement is also possible by application of imprinting or pretexturing techniques prior to anodization [50]. On the other hand, the
electrochemical synthesis of Al nanoconcaves with smaller pitches
gives better pores arrangements and SPRs at lower wavelengths
(higher energies). Owing to the proportionality of the resonance
wavelength to the pitch size (Eq. (2)), plasmonic sensitivity is
consequently lower in the Al concaves with the smaller Dc , but
the material is very promising with respect to many important
applications in UV range, such as improvement of blue/UV light
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