‘SM36
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AEG rroctace sidortian Scanning Microscope
Multipurpose Digital Analytical SEMContents
Foreword
Features of the Multipurpose Digital Analytical SEM
Electron Probe Current and its Verious Applications
Comparison of Electron Guns
Zoom Condenser Lens and CF Mini-lens (Objective)
Large-sized Eucentric Goniometer Stage
Basic Construction of the Multipurpose Digital Anelytical SEM
Selection of the Preferred User Interface
Operating Conditions Memory
Image Accumulation by TV or SR (Super Rapid) or Slow Scan
Histogram and Look-up Tables (LUT) for Acquired Images
Image Division, Calculation between Images, and Text Overlays
Removable Disk and Video Printer
External CPU Cont of the Instrument
Backscattered Electron Imaging
Functional Expandability
DP-0P High-speed Cascade System
History of JEOL’s EPMAs and SEMs
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2Foreword
‘The scanning electron microscope (SEM) is an instrument that scans a finely focused electron beam
across a specimen surface deflecting the beam in two directions (X and Y). The instrument detects
the signals generated from illumination points and displays the difference between the amounts of
signals on a CRT by brightness modulation. ‘The SEM is now commonly used worldwide, as it allows
the surface observation of bulk specimens in the magnification range from that of a magnifying glass
to more than x 100,000 while maintaining a large depth of focus.
‘The history of the SEM began in 1935 when Knoll reported its principle. After World War II, a
group centered around Oatley had continued research on the SEM at Cambridge University since 1948
and manufactured the first instrument at the university in 1953. A commercial instrument based on
the research at Cambridge University was marketed in 1965 by Cambridge Instruments (Britain), and
another by JEOL (Japan) in 1966. ‘The SEMS in those days had a resolution of about SO nm. After
that, many manufacturers continued their efforts to produce SEMs with higher resolution. At present,
SEMs having a resolution of 0.5 to 0.7 nm have made their debut.
It was a field emission electron gun (abbreviated to FEG) announced by Crewe at Chicago
University in 1968 that made a great contribution to improving the resolution of the SEM
We at JEOL Ltd. have developed a series of extremely easy-to-use multipurpose digital FE SEMs,
by introducing new gun technology and digitalizing the basic SEM
On the other hand, we have developed a multipurpose digital analytical SEM series that can be used
for a wide range of applications and that can meet the requirements for the analytical SEM
Development History of JEOL’s Large-sized SEMs
1965
= JSM4 Commercialization of SEM
Development of goniometer stage, TV scan/CRU
1970
Employment of ICs for electric circuitry
Development of FE SEM
1975
=< ISM-FT/FIS Development of economy-type FE SEM
“ Jsm-ascrass Development of large-wafer SEM
1980 “A SM-3sCF Improvement of condenser/objective lenses
(Zoom condenser lens/CF tens)
— ssm8s0
= Jsmsasisas
1985] —~< JSM-880 Development of inlens SEM
ISM-6400 Development of multipurpose digital SEM
—< JSM-890/840F Development of in-lens FE SEM
1990 | = JSM.63008/6400F/6600F Multipurpose digital FE SEM
= ISM-6300 Development of multipurpose digital analytical SEM
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Resolution