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ICFABRICATION VENKATESHPRASAD

DAY1

01/07/09

CMOSFABRICATIONTECHNOLOGY

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RVVLSIConfidential

BASICPROCESSINGSTEPS

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PHOTORESIST

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PHOTORESIST

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BASICPROCESSINGSTEPS

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BASICPROCESSINGSTEPS

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MAKINGOFACMOSDEVICE1

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MAKINGOFACMOSDEVICE2

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MAKINGOFACMOSDEVICE3

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CMOSnWELLPROCESS

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CMOSnWELLPROCESS

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CMOSnWELLPROCESS

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CMOSnWELLPROCESS

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INTERCONNECTIONMATERIALS

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CMOSnWELLPROCESS

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FINALCIRCUITCMOSINVERTER

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CMOSnWELLPROCESS

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ADVANCEDCMOSTECHNOLOGIES

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ADVANCEDCMOSTECHNOLOGIES

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NEWCONCEPTSINTHISLECTURE

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METALLAYERS

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METALPARASITICS:R

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METALPARASITICS:C

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METALPARASITICS:L

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METAL:CURRENTCAPACITY

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VIAS

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CLASSIFYINGAFAB tsmc_c130lv_052
Fabname Cmos process technology Low voltage Nometal layers&TT

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ICFABRICATIONPROCESS PROCESSSTACK

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INTRODUCTIONTOCONCEPTOFMASKS
VDD

Via Nwell ntype Metal Active ptype Contact Poly

VSS
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INTRODUCTIONTOCONCEPTOFMASKS

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INTRODUCTIONTOCONCEPTOFMASKS

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INTRODUCTIONTOCONCEPTOFMASKS

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INTRODUCTIONTOCONCEPTOFMASKS

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INTRODUCTIONTOCONCEPTOFMASKS

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INTRODUCTIONTOCONCEPTOFMASKS

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INTRODUCTIONTOCONCEPTOFMASKS

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INTRODUCTIONTOCONCEPTOFMASKS

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VIRTUOSOLAYOUTEDITOR

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LSWSELECTEDLAYERSAREVISIBLE

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LSWALLLAYERSAREVISIBLE

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HIERARCHYOFLAYOUT

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DONE

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