MICRO-ELECTROMICRO-ELECTROMECHANICAL SYSTEMS

Shashank Uttarwar S.E Electronics Atul Jethmalani T.E Mechanical

Aim of the presentation



Introduction to MEMS Introduction to MEMS Technology Study its advantages, disadvantages and applications

What MEMS Means ?



Micro - Small size, micro fabricated structures. Electro - Electrical control signal (in/op) Mechanical - Mechanical functionality (op/in) Systems - Structures and devices.

MEMS


MEMS is integration of mechanical and electronic elements. Fabrication of Electronic components. Mechanical components.

 a. b.

MEMS Technology


It is based on tools and methodologies that are used to form small devices. It comprises of three basic tools.

Building Blocks
1.

Ability to deposit thin film on substrate. Apply patterned mask on top of film. Etch film selective to mask.

MEMS DEVICES

2.

1. DEPOSITION

2. LITHOGRAPHY

3. ETCHING

3.

EXAMPLE OF MEMS
Micro Sensors
Electronic Circuits Mechanical Actuators Desired OUTPUT

Advantages And Disadvantages

Advantages Minimizes use of energy and material.


Disadvantages High initial investment.

Low cost and space. Improved performance. Very vital technology.

Design includes complex procedure.



Prior knowledge required.



Applications


Biotechnology PCR, STM are some examples. Communication Improvising the electronic components. Accelerometers Low cost accelerometers can be manufactured.

Conclusion


MEMS promises to revolutionize each and every product. Few fields will benefit greatly from MEMs. So MEMS is future of modern era.

References
IEEE Explore: http://ieee.org/Xplore/DynWel.jsp  PDF files: http://www.scribd.com/mems  Introduction to micro engineering: http://www.dbanks.demon.co.uk/ueng  Mems clearing house: http://www.memsnet.org/