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    This document contains figures and diagrams related to scanning electron microscopy (SEM). Figure 7.3A shows the basic components of an SEM system. Figure 7.3B diagrams the vacuum system of an SEM, including valves and gauges. Figure 7.3C provides a more detailed look at the column of an SEM, highlighting its major internal components.

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    EM

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    This document contains figures and diagrams related to scanning electron microscopy (SEM). Figure 7.3A shows the basic components of an SEM system. Figure 7.3B diagrams the vacuum system of an SEM, including valves and gauges. Figure 7.3C provides a more detailed look at the column of an SEM, highlighting its major internal components.

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    12 views1 page

    Page 207

    Uploaded by

    02arid28
    This document contains figures and diagrams related to scanning electron microscopy (SEM). Figure 7.3A shows the basic components of an SEM system. Figure 7.3B diagrams the vacuum system of an SEM, including valves and gauges. Figure 7.3C provides a more detailed look at the column of an SEM, highlighting its major internal components.

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    Figure7.3A SchematicdiagramofSEMshowingbasiccomponentsmakingupthecompletesystem.

    Figure7.3B Schematicdiagramofvacuumsystem. A13=valves,E1,2=airadmittance valves,IG=ionizationgauge.(Courtesyof HitachiScientificInstruments.)

    Figure7.3C MoredetaileddiagramofcolumnofstandardSEMshowingmajorcomponents. (CourtesyofHitachiScientificInstruments.)

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