Catalog

1
Nanopositioning Systems
Product Catalog 700-N
April 2, 2012
Sensor
Technology
2
www.madcitylabs.com sales@madcitylabs.com phone: 608-298-0855 fax: 608-298-9525
Mad City Labs, Inc.
Superior Technical Support
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Our sales and technical staf are experienced scientists and engineers with extensive
experience in many facets of R&D, not just nanopositioning systems.
Got a question?
Pick up the phone and talk to our friendly support staf.
Custom Nanopositioning Systems
Our R&D center has provided many unique, innovative nanopositioner designs
for specialized applications and custom requirements.
Standard Nanopositioning Systems
Our broad range of products and continuous development of new designs makes
Mad City Labs a leading supplier of high precision nanopositioning systems.
OEM Designs
Design fexibility and competitive pricing - call us with your requirements.
Competitive Pricing
Complete in-house design and manufacturing provides a level of fexibility and control
which enables Mad City Labs to compete successfully on a worldwide basis. In most
cases, modifcations to existing designs for specialized applications can be ofered
at little or no additional cost.
3
Important Note to Purchaser
All technical information and recommendations related to
Mad City Labs, Inc. products made in this catalog are based on information believed
to be reliable. Before utilizing the product, the users should determine the suitability
of the product for its intended use. The user assumes all risks and liability whatsoever
in connection with such use.
4
Table of Contents
Product Selection Tables - -- -- -- -- -- -- -- -- -- -pages 6-9
Single-Axis Nanopositioners
Nano-Mini -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 10-11
Nano-P Series - -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 12-13
Nano-OP Series - -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 14-15
Nano-OPH Series-- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 16-17
Nano-SPMZ (with micropositioning) -- -- -- -- pages 18-19
Nano-LR200 -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 20-21
Nano-YT500 -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 22-23
Nano-HL Series - -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 24-25
Single Z-Axis Nanopositioners
Nano-HSZ -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 26-27
Nano-MZ - -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 28-29
Nano-CZ200 -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 30-31
Nano-CZ500 -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 32-33
Nano-Z Series -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 34-35
Nano-Z500-- -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 36-37
Nano-Z50HS -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 38-39
XY-Axis Nanopositioners
Nano-HS Series - -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 40-41
Nano-M250 - -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 42-43
Nano-SPM200 -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 44-45
Nano-Max50-- -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 46-47
Nano-H Series -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 48-49
Nano-Bio Series - -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 50-51
Nano-BioS Series-- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 52-53
Nano-PDQ Series-- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 54-55
Nano-T Series - -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 56-57
XYZ-Axis Nanopositioners
Nano-HS Series - -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 40-41
Nano-M350 - -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 58-59
Nano-3D200 -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 60-61
Nano-3D500 -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 62-63
Nano-LP Series-- -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 64-65
Nano-LPS Series -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 66-67
Nano-LPQ -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 68-69
Rotational (
Z
) Nanopositioners
Nano-Theta - -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 70-71
Nano-ThetaH - -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 72-73
Z-Axis,
X
,
Y
Nanopositioners
(Z-axis Linear + Tip + Tilt)
Nano-M3Z -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 74-75
Nano-Align3 Series-- -- -- -- -- -- -- -- -- -- -- -- -- pages 76-77
XYZ-Axis,
X
,
Y
Nanopositioners
(3-axis Linear + Tip + Tilt)
Nano-Man5 - -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 78-79
XYZ-Axis,
X
,
Y
,
Z
Nanopositioners
(3-axis Linear + Tip+ Tilt + Rotation)
Micropositioning Stages - XY-Axis
Manual MicroStage Series - -- -- -- -- -- -- -- -- -- pages 84-85
Manual MicroStage-LT Series -- -- -- -- -- -- -- -- pages 86-87
Manual MicroStage-BX Series - -- -- -- -- -- -- -- pages 88-89
MicroStage Series - -- -- -- -- -- -- -- -- -- -- -- -- -- pages 90-91
Integrated Nano / Micropositioning Stages
Nano-SPMZ - -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 18-19
Nano-View
/M Series-- -- -- -- -- -- -- -- -- -- -- -- pages 92-93

Nano-View
Series -- -- -- -- -- -- -- -- -- -- -- -- -- pages 94-95

Microscopy Applications
Nano-Z Series -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 34-35
Nano-Z500-- -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 36-37
Nano-Bio Series - -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 50-51
Nano-BioS Series-- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 52-53
Nano-LP Series-- -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 64-65
Nano-LPS Series -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 66-67
Nano-LPQ -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 68-69
Manual MicroStage Series - -- -- -- -- -- -- -- -- -- pages 84-85
Manual MicroStage-LT Series -- -- -- -- -- -- -- -- pages 86-87
Manual MicroStage-BX Series - -- -- -- -- -- -- -- pages 88-89
MicroStage Series - -- -- -- -- -- -- -- -- -- -- -- -- -- pages 90-91
Nano-View
/M Series-- -- -- -- -- -- -- -- -- -- -- -- pages 92-93

Nano-View
Series -- -- -- -- -- -- -- -- -- -- -- -- -- pages 94-95

Nano-F Series - -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 96-97
Nano-F25HS -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 98-99
Nano-F450-- -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 100-101
Nano-F3D -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 102-103
C-Focus - -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 104-105
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Active Optics Applications
High Speed Lens Positioners -- -- -- -- -- -- -- -- -- -- page 15
Nano-3D200 -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 60-61
Nano-3D500 -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 62-63
Nano-F Series - -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 96-97
Nano-F25HS -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 98-99
Nano-F450-- -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 100-101
Nano-F3D -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 102-103
C-Focus - -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 104-105
Nano-MTA Series-- -- -- -- -- -- -- -- -- -- -- -- -- pages 106-107
Nano-Theta - -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 70-71
UHV (bakeable) Applications
Note: Nearly all standard systems can be modifed for vacuum
applications to 10
-8
Torr if baking is not necessary.
Nano-UHV50-- -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 108-109
Nano-UHV100 -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 110-111
Nano-UHV200 -- -- -- -- -- -- -- -- -- -- -- -- -- -- pages 112-113
Nanometer Measuring
Nano-Gauge Series -- -- -- -- -- -- -- -- -- -- -- pages 114-115
Nanopositioner Controllers
Nano-Drive
Series -- -- -- -- -- -- -- -- -- -- -- -- pages 116-117

Software
Nano-Route
3D - -- -- -- -- -- -- -- -- -- -- -- -- -- pages 118-119
LabVIEW, MetaMorph, Image-Pro, Mgr - -- pages 120-121
Accessories
Microscope mounting adapters - -- -- -- -- -- -- -- - page 122
Biological sample holders - -- -- -- -- -- -- -- -- -- -- - page 123
Objective lens extender tubes -- -- -- -- -- -- -- -- - page 124
Rack mount kits -- -- -- -- -- -- -- -- -- -- -- -- -- -- -- - page 124
Joystick controls (nano & micropositioning) - -- - page 125
Custom Solutions -- -- -- -- -- -- -- -- -- -- pages 126-127
OEM Partnerships -- -- -- -- -- -- -- -- -- -- pages 128-129
Notes on Nanopositioning-- -- -- -- -- -- pages 130-131
Worldwide Sales-- -- -- -- -- -- -- -- -- -- -- -- -- - page 132
Terms and Conditions of Sale- -- -- -- -- -- -- page 133
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Product Selection Tables
Single X-Axis Nanopositioners
Range of Motion Aperture Overall Dimensions (inches) Special Features Model
10 m No 1.5 x 1.0 x 0.375 Smallest 1-axis stage Nano-Mini
15 m to 70 m No 0.787 diameter x 1.3 to 3.1 Unique tubular design Nano-P Series
30 m to 100 m No 2.0 x 0.5 x 2.75 to 4.8 Fast, small, versatile Nano-OP Series
30 m to 100 m Optional up to 1.3 diameter 2.5 x 0.5 x 3.5 to 6 Fast with aperture Nano-OPH Series
200 m No 4.25 x 3.0 x 0.7 Lowest out of plane motion Nano-LR200
500 m 0.39 x 2.56 3.39 x 4.72 x 0.6 Long range motion Nano-YT500
50 m to 200 m No 6.0 x 4.5 x 1.96 Heavy load capability Nano-HL Series
Single Z-Axis Nanopositioners
10 m No 2.0 x 2.0 x 1.27 Compact size, highest speed Nano-HSZ
25 m 0.25 diameter 2.5 x 2.2 x 0.8 Compact size with aperture Nano-MZ
50 m 1.75 diameter 5 x 4 x 0.77 High speed Nano-Z50HS
200 m No 2.5 x 2.5 x 1.06 Long range motion Nano-CZ200
500 m 0.5 diameter 5 x 5 x 1.285 Long range motion Nano-CZ500
100 m to 200 m 2.6 x 2.6 5.25 x 5.0 x 0.8 Large aperture for microscopy Nano-Z Series
500 m 4.0 x 6.0 8.25 x 7.0 x 0.75 Holds multiwell plates Nano-Z500
XY-Axis Nanopositioners
Range of Motion Aperture Overall Dimensions
(inches)
Special Features Model
10 m (XY) none 2.0 x 2.0 x 1.15 Fast, high resolution Nano-HS Series
50 m (XY) 0.5 dia. 2.1 x 2.1 x 1.1 Smallest 2-axis stage with aperture Nano-M250
200 m (XY) none 2.5 x 2.5 x 1.2 Designed specically for SPM Nano-SPM200
50 m (XY) 3.5 x 3.5 8.9 x 8.9 x 1.25 Large load capacity (5 kg) Nano-Max50
50 m (XY) to 100 m (XY) 2.0 x 2.0 4.0 x 4.0 x 1.28 Compact size with aperture Nano-H Series
50 m (XY) to 200 m (XY) 2.6 x 2.6 4.75 x 4.75 x 0.5 Low prole, aperture, Invar or Ti Nano-Bio2M
50 m (XY) to 75 m (XY) 2.6 x 2.6 4.5 x 4.5 x 1.1 High speed, large aperture Nano-PDQ Series
100 m (XY) to 200 m (XY) 2.6 x 2.6 5.0 x 5.0 x 1.3 Economical with large aperture Nano-T Series
100 m (XY) to 200 m (XY) 2.6 x 2.6 6.0 x 6.0 x 0.6 Low prole with large aperture Nano-Bio Series
100 m (XY) to 300 m (XY) 3.3 x 2.1 6.0 x 8.0 x 0.6 Low prole, aperture for 3 slides Nano-BioS Series
7
XYZ-Axis Nanopositioners
(inches)
10 m (XYZ) none 2.0 x 2.0 x 2.0 Fast, high resolution Nano-HS Series
50 m x 50 m x 25 m 0.25 dia. 2.5 x 2.2 x 1.9 Smallest 3-axis stage with aperture Nano-M350
200 m (XYZ) none 2.5 x 2.5 x 2.05 Compact, long range, low cost Nano-3D200
500 m (XYZ) 0.5 dia. 5.125 x 5.0 x 2.21 Compact, very long range Nano-3D500
50 m (XY) x 50 m (Z) 2.6 x 2.6 6.25 x 4.5 x 1.35 High speed, large aperture Nano-PDQ350
75 m (XY) x 50 m (Z) 2.6 x 2.6 6.25 x 4.5 x 1.35 High speed, large aperture Nano-PDQ375
75 m (XY) x 50 m (Z) 2.6 x 2.6 6.0 x 7.5 x 0.865 High speed, low prole Nano-LPQ
100 m (XY) x 20 m (Z)
to 200 m (XY) x 50 m (Z)
2.6 x 2.6 6.5 x 5.0 x 1.5 Economical with large aperture Nano-T Series
100 m (XYZ) to 300 m (XYZ) 2.6 x 2.6 7.5 x 6.0 x 0.8 Low prole with large aperture Nano-LP Series
100 m (XYZ) to 300 m (XYZ) 3.3 x 2.1 6.0 x 8.7 x 0.8 Low prole, aperture for 3 slides Nano-LPS Series
Z-Axis,
X
,
Y
Nanopositioners (Z-axis Linear + Tip + Tilt)
25 m x 1 mrad x 1 mrad 0.25 diameter 2.5 x 2.2 x 0.8 Smallest Z,
X
,

Y
stage Nano-M3Z
100 m x 2 mrad x 2 mrad 2.6 x 2.6 5.25 x 5.0 x 0.8 Low prole, large aperture Nano-Align3-100
200 m x 4 mrad x 4 mrad 2.6 x 2.6 5.25 x 5.0 x 0.8 Low prole, large aperture Nano-Align3-200
XYZ-Axis,
X
,
Y
Nanopositioners (3-axis Linear + Tip + Tilt)
(inches)
50 m (XY) x 25 m (Z)
x 1 mrad x 1 mrad
0.25 diameter 2.5 x 2.2 x 1.9 Smallest X, Y, Z,
X
,

Y
stage Nano-Man5
100 m (XYZ) x 1.2 mrad x
1.5 mrad
2.6 x 2.6 6.0 x 7.5 x 0.8 Large aperture
Low prole
Nano-Align5-100
3.0 mrad
Low prole
Nano-Align5-200
4.5 mrad
Low prole
Nano-Align5-300
Rotational (
Z
) Nanopositioners
2 mrad none 2.0 x 1.25 x 0.5 Small, accessible rotation axis Nano-Teta
5 mrad 1.378 diameter 5.0 x 5.0 x 0.5 Low prole, large aperture Nano-TetaH
8
Product Selection Tables
Micropositioning Stages - XY Axis
Range of Motion Step Size Linear Encoder Resolution Special Features Model
25 mm (XY) NA NA Manual micrometers with 1um verniers Manual MicroStage
up to 50mm (XY) NA NA Allows rotation of microscope nosepiece Manual MicroStage-LT
25mm (XY) NA NA Designed for Olympus upright BX series Manual MicroStage-BX
25 mm (XY) 95 nm (XY) 20 nm (XY) Integrated high resolution linear encoder MicroStage
Integrated Nanopositioning / Micropositioning Stages
MicroStage (XY)
Ranges of Motion
MicroStage Step Size (stepper motor)
or Vernier (manual micrometer)
Nanopositioner (XY or XYZ)
Ranges of Motion
Aperture
Size
Model
25mm single axis 95 nm step sizes with
20 nm position encoder
30 m None Nano-SPMZ
25 mm (XY) manual micrometers (XY)
10 m graduations, 1 m vernier
2-axis or 3-axis ranges up to
300 m (XY) or (XYZ)
2.1 x 3.3 Nano-View/M Series
25 mm (XY) 95 nm step sizes (XY) with
20 nm position encoders (XY)
2-axis or 3-axis ranges up to
300 m (XY) or (XYZ)
2.1 x 3.3 Nano-View Series
UHV (bakeable) Nanopositioners
Note: Nearly all standard systems can be modifed for vacuum applications to 10
-8
Torr if baking is not necessary.
50 m (XY) 1 diameter 2.5 x 2.5 x 1.29 Vacuums to 10
-10
Torr, bakeable to 120 C. Nano-UHV50
100 m (XY) 2.6 x 2.6 5.5 x 5.5 x 1.12 Vacuums to 10
-10
200 m (XYZ) 2.0 x 2.0 5.3 x 7.5 x 1.4 Vacuums to 10
-10
XYZ-Axis,
X
,
Y
,
Z
Nanopositioners (3-axis Linear + Tip + Tilt + Rotation)
(inches)
1.5 mrad x 5mrad
1.378 diameter 6.0 x 7.5 x 1.3 6 axis motion with aperture Nano-Align6-100
3.0 mrad x 5mrad
1.378 diameter 6.0 x 7.5 x 1.3 6 axis motion with aperture Nano-Align6-200
9
Active Optics and Rotational Nanopositioners
Range of Motion Resolution Overall Dimensions
(inches)
Applications Model
25 m 0.05 nm 1.7 x 2.0 x 2.77 Objective lens focusing element Nano-F25HS
100 m 0.2 nm 1.7 x 1.6 x 2.64 Objective lens focusing element Nano-F100S
100 m 0.2 nm 2.2 x 1.7 x 3.05 Objective lens focusing element Nano-F100W
200 m 0.4 nm 2.2 x 1.7 x 2.64 Objective lens focusing element Nano-F200S
200 m 0.4 nm 2.2 x 1.7 x 3.05 Objective lens focusing element Nano-F200W
450 m 0.9 nm 2.55 x 4.46 x 1.0 Objective lens focusing element Nano-F450
100 m (XYZ) 0.2 nm 4.0 x 4.0 x 1.3 3-axis objective lens motion Nano-F3D
100 m 0.2 nm 1.7 x 1.6 x 2.64 Automatic microscope focus drift correction C-Focus
30 - 100 m 0.06 - 0.2 nm Variety of custom designs High speed lens focusing elements Nano-OP Series
2 mradian 4.0 nradian 1.0 diameter x 1.27 High speed, single axis laser beam steering Nano-MTA
5 mradian 10 nradian 1.0 diameter x 1.27 High speed, single axis laser beam steering Nano-MTAX
2 mrad x 2 mrad 4.0 nrad x 4.0 nrad 2.1 x 2.0 x 1.7 High speed, 2-axis laser beam steering Nano-MTA2
5 mrad x 5 mrad 10 nrad x 10 nrad 2.1 x 2.0 x 1.7 High speed, 2-axis laser beam steering Nano-MTA2X
2 mradian 4.0 nradian 2.0 x 1.25 x 0.5 Single axis beam steering Nano-Teta
5 mradian 10 nradian 5.0 x 5.0 x 0.5 Rotational motion with aperture Nano-TetaH
NEED HELP?
Contact Mad City Labs technical sales engineers at 608-298-0855 or sales@madcitylabs.com for
help choosing the best nanopositioner for your application or advice on customizing a design to
better suit your needs. Sales o ces outside the United States are listed at the end of this catalog.
What we dont have:
No voice mail - you will immediately talk to a real person!
No please wait to hear all the options phone tree - we hate those things!
No long waits for email responses - emails are read and answered immediately by real people!
What we do have:
Experienced physicists and engineers who are more than happy to help!
10
Product Description
Features Typical Applications
Te Nano-Mini is one of the smallest exure guided
nanopositioning stages available. Designed for optimum
performance on a small footprint, this stage uses an
innovative mini-cross section multilayer piezo ceramic
which allows for a sti stage to translate 10 microns with
picometer precision. Tis unique design makes it ideal
for applications in precision metrology and microscopy.
Nano-Mini constructed from titanium.
Internal position sensors utilizing proprietary --------
technology provide absolute, repeatable position mea-
surement with picometer accuracy under closed loop
control. Available in titanium or invar.
Nano-Mini
Ultra small footprint: 1" x 1.5"
Stackable for XY motion
Closed loop control
Titanium or invar construction
sensor technology
Optical ber alignment
Optical positioning
Interferometry
Actual Size
Examples, tutorial, and
Nano-Route
3D supplied
with Nano-Drive
USB
interfaces.
LabVIEW Compatible
USB Interfaces
11
Technical Specifcations
Range of motion .................................................. 10 m
Resolution ......................................................... 0.02 nm
Resonant Frequency ................................ 1.5 kHz 20%
Resonant Frequency (50g load) ................ 650 Hz 20%
Stiness ................................................ 1.0 N/m 20%
roll
,
pitch
(typical) ............................................... 1 rad
yaw
(typical) ...................................................... 2 rad
Recommended max. load (horizontal)* .................0.5 kg
Recommended max. load (vertical)* ....................0.15 kg
Body Material .................................... Titanium or Invar
Controller .................................................. Nano-Drive
*
Larger load requirements should be discussed with our engineering staff.
1.500
on a 1.25" x 0.75" rect.
4 x C-bored for #2 SHCS
on a 0.50" square
4 x 2-56 UNC 0.172
1.000
0.500
0.500
0.750
1.250
Cable exit point
0.020
0.375
0.375
Note: All Dimensions in Inches
12
Product Description
Te Nano-P Series are piezo actuated, closed loop, linear
translators that incorporate a unique exure hinge design.
Te exure hinge is machined entirely from a single block
of high strength titanium using an advanced electrical
discharge machining process. Tis hinge, available for
the rst time on a tubular nanopositioner, ensures the
highest degree of repeatability and load capability. Un-
like similar looking products on the market, the Nano-P
Series does not have internal Belleville springs. Belleville
springs are not frictionless and therefore cannot provide
the high degree of repeatability of a true nanopositioner.
Nano-P15 (actual size) constructed from invar and titanium.
Nano-P70 (actual size) constructed from invar and titanium.
Te guiding mechanism of the Nano-P Series is a true
exure spring - eliminating mechanical friction and stic-
tion. Te Nano-P Series is constructed from invar and
titanium for the best combination of thermal stability
and mechanical strength, making it ideal for the most
demanding positioning and metrology applications. Te
Nano-P Series is available in three standard ranges of
motion with integrated position sensors utilizing propri-
etary -------- technology to provide absolute, repeatable
position measurement with picometer accuracy under
closed loop control. Custom systems available.
Nano-P Series
Compact tubular design
True exure guided motion
Position sensors, closed loop control
Up to 70 m motion
Invar and titanium construction
sensor technology
Closed loop control
Single axis positioning
Surface analysis
Metrology
Nano-Route
3D supplied
with Nano-Drive
USB
interfaces.
LabVIEW Compatible
USB Interfaces
13
Range of motion (Nano-P15) ............................... 15 m
Resolution (15/35/70 m) ............... 0.03/0.07/0.14 nm
Recommended max. load* .....................................0.2 kg
Body Material .................................. Invar and Titanium
*
0.787in
20mm
M3x0.5 0.200
2 x M3x0.5 0.120
0.400
0.787in
20mm
1.335
(Nano-P15)
2.080
(Nano-P35)
3.130
(Nano-P70)
Cable Exit
Point
14
Product Description
Te Nano-OP Series is a versatile group of compact
nanopositioners which can be congured to t into a
wide variety of applications. Individual, single axis stages
may be combined to form multi-axis systems. Te Nano-
OP Series are available with 30, 65, and 100 micron
ranges of motion. Tey can be constructed from alumi-
num, invar, or titanium and can be customized to suit
unique requirements. Internal position sensors utilizing
proprietary -------- technology provide absolute, repeat-
able position measurement with picometer resolution
under closed loop control.
Nano-OP Series
High speed, direct drive
Stackable for multi-axis motion
30, 65, and 100 m ranges of motion
sensor technology
Closed loop control
Interferometry
Nanomanipulation
High speed lens focusing
Fiber optics
NSOM
Stacked Nano-OP30s (2-axis) constructed from aluminum.
Nano-OP65 (1-axis) constructed from aluminum.
Nano-Route
3D supplied
with Nano-Drive
USB
interfaces.
LabVIEW Compatible
USB Interfaces
P d D i i
Nano-OP30 with M6 mounting
holes on a 50mm square. Designed to
mount directly to a metric optical table.
Nano-OP30 (1-axis) constructed from aluminum.
15
High speed focusing device composed of a
Nano-OP30 with objective lens brackets
and integrated manual coarse positioning.
Nano-OP High Speed
Lens Positioners
Range of motion (Nano-OP30) ........................... 30 m
Range of motion (Nano-OP65) ........................... 65 m
Range of motion (Nano-OP100) ....................... 100 m
Resolution (30/65/100 m) ............... 0.06/0.13/0.2 nm
Resonant Frequency ................................... 4 kHz 20%
Resonant Frequency (100g load) ................ 2 kHz 20%
Stiness ................................................ 3.0 N/m 20%
Two Nano-OP25s combined to
form an ultra high speed objective
lens focusing device.
brackets
s
br br brr b ac a kets
sitio ioni n ng.
Nano-OP100 with custom bracket
congured to position an objective
lens in a high speed optical scanner.
0.500
on a 1.60" x 2.10" rect.
4 x 8-32 UNC 0.100
on a 0.875" square
2.750
(Nano-OP30)
0.250
2.000
3.900
(Nano-OP65)
4.800
(Nano-OP100)
Cable Exit Point
0.500
roll
,
pitch
(typical) ............................................... 1 rad
yaw
(typical) ...................................................... 2 rad
Recommended max. load (vertical)* ......................0.5 kg
Body Material ............................... Al, Invar or Titanium
*
Low Position Noise
Nano-OP30
Standard (non-metric) Nano-OP dimensions
16
Product Description
Like the Nano-OP Series, the Nano-OPH Series is a
versatile group of compact single axis nanopositioners
which can be congured to t into a wide variety of ap-
plications. Te addition of a 1.3 inch diameter aperture
through the stage makes the Nano-OPH especially useful
for precise motion in optical experiments. Individual,
single axis stages may be combined to form multi-axis
systems. Te Nano-OPH Series are available with 30,
65, and 100 micron ranges of motion. Tey can be
Nano-OPH Series
Stackable for multi-axis motion
30, 65, and 100 m ranges of motion
sensor technology
Closed loop control
Interferometry
Nanomanipulation
High speed lens focusing
Fiber optics
NSOM
Stacked Nano-OPH30s (2-axis) constructed from aluminum.
Nano-Route
3D supplied
with Nano-Drive
USB
interfaces.
LabVIEW Compatible
USB Interfaces
constructed from aluminum, invar, or titanium and can
be customized to suit unique requirements. Internal
position sensors utilizing proprietary -------- technology
provide absolute, repeatable position measurement with
picometer resolution under closed loop control.
Nano-OPH65 (1-axis) with 1.3 inch
diameter aperture constructed from aluminum.
Nano-OPH30 (1-axis) constructed from aluminum.
17
Range of motion (Nano-OPH30) ........................ 30 m
Range of motion (Nano-OPH65) ........................ 65 m
Range of motion (Nano-OPH100) .................... 100 m
Resolution (30/65/100 m) ............... 0.06/0.13/0.2 nm
Resonant Frequency (100g load) ............. 1.5 kHz 20%
Stiness ................................................ 3.0 N/m 20%
roll
,
pitch
(typical) ............................................... 1 rad
yaw
(typical) ...................................................... 2 rad
*
1.300
on a 2.10" x 2.85" rect.
2.850
2.100
1.150
1.150 2.500
3.500 (Nano-OPH30)
3.250
on a 1.15" square
4 x tapped 4-40
1.500
6.050 (Nano-OPH100)
4.650 (Nano-OPH50)
cable exit
3.500 (Nano-OPH30)
0.500
4.650 (Nano-OPH50)
6.050 (Nano-OPH100)
0.500
2.500
18
Product Description
Te Nano-SPMZ integrates single axis microposition-
ing and high resolution nanopositioning into a compact
unit which is compatible with optical tables and standard
mounting accessories. Stepper motor driven coarse posi-
tioning over 25mm can produce a minimum step size of
95nm. An optional high resolution linear encoder incor-
porated into the coarse positioning stage continuously
monitors positions down to 20nm. Nanopositioning
over 30 microns provides the ultimate positioning reso-
lution of 60 picometers with the stability of the propri-
etary position feedback sensors. Te USB digital
interface provides direct PC control of the microposi-
tioner and nanopositioner as well as access to the linear
encoder and position sensor inside the nanopositioner.
Nano-SPMZ
Single axis Micro and Nanopositioning
25mm coarse motion with hi-res encoder
30 micron nanopositioning
position sensor technology
Closed loop control
Nanoindenting
Nanomanipulation
Nano-SPMZ constructed from aluminum.
Nano-Route
3D supplied
with Nano-Drive
USB
interfaces.
LabVIEW Compatible
USB Interfaces
19
Range of motion (micropositioner) ..................... 25 mm
Micropositioning step size .................................... 95 nm
Maximum speed .............................................. 4 mm/sec
Motion Prole
Motion >500 steps ........... Automatic accel/decel control
Motion 500 steps ........................... Constant 1 step/ms
Linear encoder resolution ..................................... 20 nm
Body Material ............................................... Aluminum
Controller .................................................Micro-Drive
Computer interface ............................ Bidirectional USB
*
Range of motion (nanopositioner) ........................ 30 m
Maximum resolution (nanopositioner) .............. 0.06 nm
Resonant frequency (nanopositioner) .......... 4kHz 20%
Resonant Frequency (100g load) ................ 2 kHz 20%
Stiness ................................................ 3.0 N/m 20%
Computer interface ................................................. USB
Nanopositioner Micropositioner
3.500 3.000
1.846
on 1.00" spacing
8x C-Bored for 1/4-20 SHCS
for mounting from reverse
6x Tapped 1/4-20 0.500
on a 0.875" square
4 x Tapped 8-32 0.100
1.000 1.000
0.500
0.750
1.352
0.812
4.770
Nano-OP30
1.386
1.710
1.790
1.290
1.250
20
Product Description
Te Nano-LR200 is designed to provide long range,
single axis translation with an absolute minimum of
out-of-axis motion. Te unique design of the Nano-
LR200 produces less than 5 nm of out-of-plane motion;
measured over the entire moving platform throughout
the 200 m range of motion. Te Nano-LR200 sets the
highest level of single axis precision and positioning per-
formance. Internal position sensors utilizing proprietary
-------- technology provide absolute, repeatable posi-
Nano-LR200 (1-axis) constructed from aluminum.
Nano-LR200
Long range single axis motion: 200 m
Less than 5 nm out of plane motion
Low prole design
sensor technology
Closed loop control
Surface metrology
Wafer scanning and alignment
Optical alignment
Nano LR2200 (1 axis) constructed from alumiinum
tion measurement with sub-nanometer accuracy under
closed loop control. Te Nano-LR200 is ideally suited
for applications that require extreme parallelism, such as
metrology, AFM and MEMS.
Nano-Route
3D supplied
with Nano-Drive
USB
interfaces.
LabVIEW Compatible
USB Interfaces
21
Range of motion (X) .......................................... 200 m
Resolution ........................................................... 0.4 nm
Resonant Frequency ................................. 500 Hz 20%
Resonant Frequency (100g load) .............. 200 Hz 20%
Stiness ...........................................................0.2 N/m
roll
,
pitch
(typical) ............................................ 0.3 rad
yaw
(typical) ................................................... 0.3 rad
Body Material .............................................................Al
*
3.000
4.250
1.638
1.443
0.250
on a 2.60" x 3.85" rect.
4 x C-Bored for #8 SHCS
on a 0.625" square
4 x 4-40 UNC 0.300
Cable Exit Point
0.700
0.700
22
Product Description
Te Nano-YT500 is a long range, single axis, precision
nanopositioning system with a central aperture well
suited for optical scanning of samples. Internal position
sensors utilizing proprietary -------- technology provide
absolute, repeatable position measurement with nano-
meter resolution under closed loop control. True exure
guided motion of the Nano-YT500 minimizes the end-
to-end dierences in travel across the aperture to less
than 1m over the full 500m range of motion (0.2%).
Te Nano-YT500 can be operated in any orientation
and has been tested for reliability over 1,000,000 full
cycles (1000m total travel per cycle).
Nano-YT500
Single axis motion
Long range - 500m
Compact size
Rectangular aperture
Closed loop control
sensor technology
Long range scanning
Inspection, quality control
Nano-YT500 constructed from aluminum.
Nano-Route
3D supplied
with Nano-Drive
USB
interfaces.
LabVIEW Compatible
USB Interfaces
23
Range of motion ................................................ 500 m
Resolution ........................................................... 1.0 nm
Stiness ...........................................................0.8 N/m
*
3.386
4.724
0.394 0.867 1.083 2.000
4.000
0.299
0.362
4 x tapped M2.5x0.45 0.400
2.559
3.071
1.102
R0.098
0.600
24
Product Description
Te Nano-HL Series single axis stages are heavy duty
nanopositioners designed to carry loads weighing up to
10kg. Build from a single block of aluminum nearly 2
inches (50mm) thick, the Nano-HL has enough physical
rigidity to counteract large o-axis loads while continuing
to produce precise, high resolution movements. Internal
sub-nanometer resolution under closed loop control.
Te Nano-HL Series stages can be operated in any
orientation and may be customized to t specic instal-
lations and special mounting requirements.
Nano-HL Series
Heavy load capacity - up to 10kg
Single axis motion
Long range motion - up to 200m
Closed loop control
sensor technology
Precise positioning of heavy optics or
sensor assemblies
Off-axis loading with high positional
stability
Nano-HL200 constructed from aluminum.
Nano-Route
3D supplied
with Nano-Drive
USB
interfaces.
LabVIEW Compatible
USB Interfaces
25
Range of motion (Nano-HL50) ........................... 50 m
Range of motion (Nano-HL100) ....................... 100 m
Range of motion (Nano-HL200) ....................... 200 m
Resolution (50/100/200 m) ................. 0.1/0.2/0.4 nm
Stiness ...........................................................1.0 N/m
Recommended max. load (horizontal)* ..................10 kg
Recommended max. load (vertical)* .......................10 kg
*
4.500
6.000
4.000
5.500
3.000
2.000
0.125
on a 3.00" x 2.00" rect
4 x Tapped 8-32 0.330
on a 5.50" x 4.00" rect
4 x C-Bored for 1/4"-20 SHCS
2.820
Cable Exit Point
1.960
26
Product Description
Te Nano-HSZ is a high speed single axis (Z-axis) preci-
sion nanopositioning system. Internal position sensors
utilizing proprietary -------- technology provide absolute,
repeatable position measurement with picometer accuracy
under closed loop control. Te Nano-HSZ oers a com-
pact footprint, ultra low noise characteristics, and a reso-
nant frequency greater than 7 kHz. Tese characteristics
make it ideal for applications that require noise oors
less than 10 picometers and/or high speed performance.
With the step response time of the Nano-HSZ set to
less than 1 millisecond for extremely high speed applica-
tions, scan frequencies up to 500Hz can be achieved.
Nano-HSZ
Single axis (Z) motion
Step response less than 1 millisecond
Scans up to 500 Hz
Closed loop control
Combine with Nano-OP Series for
multi-axis congurations
sensor technology
High speed, high resolution positioning
Metrology
Interferometry
Nano-HSZ constructed from aluminum.
Nano-HSZ (shown actual size) combined with two Nano-OP Series
stages for high speed, high resolution, 3-axis motion (XYZ).
The 3-axis Nano-HS3 (pages 36-37) provides similar high speed,
high resolution performance in an integrated package.
Nano-Route
3D supplied
with Nano-Drive
USB
interfaces.
LabVIEW Compatible
USB Interfaces
27
Range of motion (Z) ............................................ 10 m
Resolution ......................................................... 0.01 nm
Scanning Speed ......................................... up to 500 Hz
Stiness ............................................................12 N/m
*
2.000
0.700
0.700
on a 1.60" square
4 x 2-56 UNC 0.100
on a 0.44" square
2.000
Cable Exit Point
1.270
1.270
Ultra Low Position Noise
28
Product Description
Te Nano-MZ is a compact Z-axis nanopositioning
system with a small center aperture designed to be easily
integrated into existing instrumentation where space is
restricted. Internal position sensors utilizing proprietary
-------- technology provide absolute, repeatable position
measurement with picometer accuracy under closed loop
control. A related model, the Nano-M3Z, includes
additional tip and tilt motions (
X
,
Y
) to the linear
motion in the Z-axis. Te Nano-MZ can also be used as
a building block with other systems to form complex
nanopositioning assemblies with multi-axis motion - see
the Nano-M350 and the Nano-Man5.
Nano-MZ
Compact design
Low prole: 0.8"
Center aperture: 0.25 diameter
Closed loop control
sensor technology
High resolution Z-axis alignment
AFM
Metrology
Nano-MZ (actual size) constructed from aluminum.
Nano-Route
3D supplied
with Nano-Drive
USB
interfaces.
LabVIEW Compatible
USB Interfaces
29
Resolution ......................................................... 0.05 nm
Resonant Frequency ............................... 1100 Hz 20%
Stiness ...........................................................1.0 N/m
Body Material .................................. Aluminum or Invar
*
2.500
2.200 1.400
2.250
0.250 THRU
1.960
1.960
on a 1.40" x 2.25" rect.
4x C-bored for #2 SHCS
on a 1.20" square
4x tapped 4-40 UNC 0.200
1.200
Cable Exit Point
0.800
0.050
30
Product Description
Te Nano-CZ200 is a compact, long range, single axis
(Z-axis) precision nanopositioning system. Internal
sub-nanometer resolution under closed loop control.
Te Nano-CZ200 can be operated in any orientation
and is ideally suited for precision alignment of optical
elements or other components with limited size and
weight.
Nano-CZ200
Long range motion - 200m
Compact size
Closed loop control
sensor technology
Precision optical alignment and mirror

positioning
High resolution probe positioning
Metrology
Nano-CZ200 constructed from aluminum.
Nano-Route
3D supplied
with Nano-Drive
USB
interfaces.
LabVIEW Compatible
USB Interfaces
31
Range of motion (Z) .......................................... 200 m
Resolution ........................................................... 0.4 nm
Stiness ...........................................................1.0 N/m
*
2.500
2.500
0.750
2.250 1.000
for #6 SHCS on 2.25" square
4x 0.141 THRU ALL
on 1.00" square
4-40 UNC 0.224
4 x tapped
Cable Exit Point
1.060
0.040
32
Product Description
Te Nano-CZ500 is a compact, long range, single axis
(Z-axis) precision nanopositioning system. Internal
nanometer resolution under closed loop control. An
optional center aperture up to 0.5 inches in diameter
provides an optical pathway through the stage. Te
Nano-CZ500 can be operated in any orientation and
is well suited for static alignment and moderate speed,
long range scanning applications.
Nano-CZ500
Long range motion - 500m
Compact size
Closed loop control
sensor technology
Precision optical alignment and mirror

positioning
High resolution probe positioning
Metrology
Nano-CZ500 constructed from aluminum.
Nano-Route
3D supplied
with Nano-Drive
USB
interfaces.
LabVIEW Compatible
USB Interfaces
33
Resolution ........................................................... 1.0 nm
Stiness ...........................................................1.0 N/m
*
5.000
5.000
1.350 1.350
1.350
4.440
4.440 4.700
4.700
4 x 0.150 THRU ALL
on 1.35" grid spacing
8 x tapped 4-40 0.220
0.500 THRU
1.350
Cable Exit Point
1.145
0.335
34
Product Description
Te Nano-Z Series are single axis (Z-axis) nanoposition-
ing systems with a low prole design, allowing it to be
easily retrot into existing instrumentation where space
is restricted. With a large center aperture, the Nano-Z
Series is ideal for confocal imaging and microscopy ap-
plications which require long range travel and fast, repeat-
able positioning. Combined with the high output power
Nano-Z100 (1-axis) constructed from aluminum.
Nano-Drive85, the Nano-Z Series is capable of a 3-4
ms step response - ideal for high speed, high precision
applications. Internal position sensors utilizing propri-
etary -------- technology provide absolute, repeatable
position measurement with picometer resolution under
closed loop control. Nano-Z Series stage dimensions
can be customized to t into OEM applications.
Nano-Z Series
Engineered to retrot to most microscopes
Low prole: 0.8"
Large aperture: 2.6 x 2.6
Long range motion: 100 m or 200 m
Closed loop control
sensor technology
Optical microscopy
High speed confocal imaging
High speed auto focus
Super resolution microscopy
Nano-Z100 with re-entrant slide holder. Re-entrant slide
holders are often used with an oil immersed objective lens.
Nano-Z100 with top surface slide holder.
Compatible Software Packages
USB and analog
motion control
USB and analog motion
control
USB motion control
Nano-Route
3D sup-
plied with Nano-Drive

USB interfaces.
Analog motion control,
1 or 2 axes.
35
Range of motion (Nano-Z100) .......................... 100 m
Range of motion (Nano-Z200) .......................... 200 m
Resolution (100/200 m) ..............................0.2/0.4 nm
Resonant Frequency (100 m) ................. 600 Hz 20%
Resonant Frequency (200 m) ................. 450 Hz 20%
Stiness ...........................................................1.0 N/m
Body Material .................................. Aluminum or invar
Controller ......................... Nano-Drive/Nano-Drive85
*
2.600
2.600
5.000
5.250
on a 4.70" square
12 x 4-40 UNC 0.200
on a 2.85" square
1.000
Cable Exit Point
0.070
0.800
0.800
Low Position Noise
Nano-Z100
36
Product Description
Te Nano-Z500 is a long range, Z-axis nanopositioner
specically designed to hold multiwell plates used in
biomedical research. High-throughput single cell uo-
rescence microscopy and high speed, high resolution
confocal imaging can be accomplished while simultane-
ously adjusting the Z-axis position to remove the eects
of multiwell plate irregularities. Te Nano-Z500 has
true exure guided motion and contains internal posi-
tion sensing. Utilizing proprietary -------- technology,
the position sensors provide absolute, repeatable posi-
tion measurement for closed loop control with a resolu-
tion of better than 1 nm over the full 500 micron travel
range. In addition to high resolution spatial imaging, the
Nano-Z500s 15 ms step response allows entire Z-section
acquisitions with minimal photo bleaching.
Nano-Z500
Super long range (500 m) Z-axis motion
Multiwell plate sized aperture (4.3" x 6.3")
Closed loop control
Low prole, easy to retrot
sensor technology
High speed confocal microscopy
High throughput uorescence microscopy
Nano-Z500 constructed from aluminum.
Nano-Z500 with multi-well plate.
USB and analog
motion control
control
USB motion control
Nano-Route
3D sup-

USB interfaces.
1 or 2 axes.
37
Resolution .............................................................. 1 nm
*
or M6 SHCS
4 x C-bored for 1/4"-20 SHCS
7.000
9.125
8.250
4.000
1.000
5.000
1.000
5.910
1.575
1.575
6.100
0.375
6x tapped 2-56 THRU ALL
R
0
.
1
9
7
4.330
Cable Exit Point
0.775
0.600 (ledge depth)
38
Product Description
Te Nano-Z50HS is a single axis (Z-axis) nanoposition-
ing system designed to move a microscopy sample up
to 50 microns at the fastest possible positioning speeds.
Te Nano-Z50HS is derived from the 3-axis, high
speed, Nano-LPQ nanopositioning system but contains
only the Z-axis piezo mechanisms. Te resulting com-
pact size allows the Nano-Z50HS to easily retrot onto
existing microscopes or t into custom experimental set-
Nano-Z50HS constructed from aluminum with integrated 3 inch slide holder.
ups. Since the only moving part is the integated sample
holder, moving mass is minimized. Sample holders for
slides, coverslips, and petri dishes are available. Custom
sample holders can also be provided. Internal position
absolute, repeatable position measurement with picom-
eter resolution under closed loop control.
Nano-Z50HS
High speed Z-axis motion
Low prole: 0.77"
Integrated sample holder
50 m motion
Closed loop control
sensor technology
Optical microscopy
Up to 150Hz sinewave motion
USB and analog
motion control
control
USB motion control
Nano-Route
3D sup-

USB interfaces.
1 or 2 axes.
Nano-Z50HS with re-entrant 3 inch slide holder.
39
5.000
4.000 3.500
3.900
3.010
1.050
1.750
4.500
on a 4.50" x 3.50" rect.
2.600
8 x tapped 2-56 THRU ALL
2.600
0.773
0.690
0.733 to slide plane
Range of motion .................................................. 50 m
Resolution ........................................................... 0.1 nm
Resonant Frequency ............................... 1000 Hz 20%
Stiness ...........................................................1.0 N/m
Recommended max. load (horizontal)* ................. 200 g
Controller .............................................. Nano-Drive85
*
Nano-Z50HS with top mounted slide holder
40
Product Description
Te Nano-HS Series is a high speed, multi-axis, precision
nanopositioning system with picometer positioning reso-
lution. Oering maximum versatility, the Nano-HS can
be congured to provide XY or XYZ motion. Internal
provide absolute, repeatable position measurement under
closed loop control. Te compact footprint, ultra-low
noise characteristics, and a Z-axis resonant frequency
of 5kHz make it ideal for metrology applications that
require noise oors less than 10 picometers and/or high
speed performance.
Nano-HS Series
High speed, multi-axis
XY and XYZ congurations
Z-axis step response time down to 2ms
Z-axis scans up to 300 Hz
Closed loop control
Picometer positioning resolution
High stability
sensor technology
High speed, high resolution positioning
Metrology
AFM
SPM
Nano-HS3 (XYZ motion)
constructed from aluminum.
Nano-HS2 (XY motion)
Nano-Route
3D supplied
with Nano-Drive
USB
interfaces.
LabVIEW Compatible
USB Interfaces
41
Range of motion (XYZ) ....................................... 10 m
Resolution ......................................................... 0.01 nm
XY (HS2) Resonant Frequency ................ 1.5 kHz 20%
XY (HS3) Resonant Frequency ................ 1.0 kHz 20%
Z (HS3) Resonant Frequency .................. 5.0 kHz 20%
Stiness (Z-axis) .................................................8 N/m
*
Nano-HS2
(XY axes)
Nano-HS3
(XYZ axes)
2.000
2.000 1.750
1.750
0.500
0.500
on 0.50" spacing
9 x tapped 4-40 0.250
on a 1.75" square
4 x Clearance for #6 SHCS
1.150
2.000
0.250
2.000
2.000 1.750
1.750
0.800
0.800
1.000
1.000
1.000
1.000
5 x tapped 4-40 0.250
on a 1.75" square
2.000
0.250
2.000
Cable Exit Points
Low Position Noise
Nano-HS3
X Axis
Z Axis
Y Axis
42
Product Description
Te Nano-M250 is a compact, two axis nanopositioning
system constructed from titanium or invar. Te small
dimensions of the Nano-M250 allow it to be easily inte-
grated into existing instrumentation for applications such
as nanolithography and SEM. Te 0.5 center aperture
provides a convienent optical pathway or feedthrough for
probe assemblies. Internal position sensors utilizing pro-
Nano-M250 (actual size) constructed from titanium.
prietary -------- technology provide absolute, repeatable
position measurement with picometer accuracy under
closed loop control. Te Nano-M250 is also available in
high vacuum and ultra high vacuum compatible models.
Nano-M250
Compact size
Two axis motion
50 m x 50 m ranges of motion
0.5 inch aperture
Closed loop control
sensor technology
Alignment
Nanolithography
Scanning microscopy
Nano-Route
3D supplied
with Nano-Drive
USB
interfaces.
LabVIEW Compatible
USB Interfaces
43
Range of motion (XY) ............................ 50 m x 50 m
Resolution ........................................................... 0.1 nm
Resonant Frequency (X) .......................... 1.0 kHz 20%
Resonant Frequency (Y) ........................... 700 Hz 20%
Stiness ...........................................................1.0 N/m
roll
,
pitch
(typical) ............................................... 1 rad
yaw
(typical) ...................................................... 3 rad
Body Material .................................... Invar or Titanium
*
2.100
2.100
1.000
1.000
0.625
on a 1.80" x 1.40" rect.
0.500
aperture
4 x 2-56 UNC 0.200
on a 0.75" square
Cable Exit Points
1.100
1.100
0.500
44
Product Description
Te Nano-SPM200 is a compact two axis (XY) nano-
positioning system constructed from aluminum. Te
compact design of the Nano-SPM200 makes it ideal for
integration into scanning probe microscopy systems.
Internal position sensors combined with the closed loop
Nano-Drive controller to provide sub-nanometer posi-
tioning resolution and long term stability. Independent
exure guided motion for each axis provides mechanical
isolation and ensures minimum cross-talk between axes.
Samples can be mounted in any location on the at top
surface and secured with the four threaded mounting
holes. Te Nano-SPM200 is the ideal XY scanning stage
for use with the MadPLL system.
Nano-SPM200
Compact size
200 m two axis motion (XY)
Closed loop control
Large sample mounting area
AFM, NSOM and other types
of scanning probe microscopy
XY precision alignment
Nanofabrication
Nano-SPM200 made from aluminum.
Nano-Route
3D supplied
with Nano-Drive
USB
interfaces.
LabVIEW Compatible
USB Interfaces
Nano-SPM200 shown with micrometer XY coarse positioning stage.
45
Ranges of motion (XY) ....................................... 200 m
Resolution ........................................................... 0.4 nm
Resonant Frequency (X) ........................... 300 Hz 20%
Stiness ...........................................................1.0 N/m
*
1.500
1.500 2.500 2.250
2.250
2.500
on 1.50" square
4 x tapped 4-40 0.220
4 x 0.150 THRU ALL
Cable Exit
1.200
0.180
1.200
46
Product Description
Te Nano-Max50 is a heavy duty, two axis nanoposition-
ing stage designed to carry heavy experimental assemblies.
With a load capacity of 5 kg, the Nano-Max50 to be used
in applications such as precision positioning of cryostats
for low temperature optical microscopy. Te low prole
and extra large aperture allows the Nano-Max50 to be
integrated into existing optical microscopes. Internal
Nano-Max50 (2-axis) constructed from aluminum.
picometer accuracy under closed loop control. Special
Nano-Max systems can be built with ranges of motion
that exceed the standard 50 microns.
Nano-Max50
Large load capacity
Two axis motion
Extra large aperture
Closed loop control
sensor technology
Precision cryostat positioning
Low temperature optical microscopy
Quantum dot research
High load positioning
Nano-Route
3D supplied
with Nano-Drive
USB
interfaces.
LabVIEW Compatible
USB Interfaces
47
Range of motion (X) ............................................ 50 m
Range of motion (Y) ............................................ 50 m
Resolution ........................................................... 0.1 nm
Resonant Frequency (Y) .......................... 1.0 kHz 20%
Stiness ...........................................................5.0 N/m
roll
,
pitch
(typical) ............................................... 1 rad
yaw
(typical) ...................................................... 3 rad
Recommended max. load (horizontal)* ....................5 kg
Body Material .............................................................Al
Controller ......................... Nano-Drive/Nano-Drive85
*
3.500
3.500
7.500
0.300
1.100
3.000
3.300
1.100
8 x 6-32 UNC 0.300
on a 4.30" square
7.800
on a 4.50" x 6.50" rect.
2.000
1.250
1.250
0.700
48
Product Description
Te Nano-H Series is a compact 2-axis positioning stage
which provides excellent positioning performance at an
economical price. Te large center aperture makes the
Nano-H Series ideal for applications requiring transmit-
ted beams, or the mounting of bulky components such
as multiple bers, optics, and metrology probes. Internal
Nano-H100 (2-axis)
provide absolute, repeatable position measurement and
picometer resolution when operated with the Nano-
Drive controller. Te Nano-H Series is available in
custom ranges of motion and can be constructed from
aluminum, invar or titanium.
Nano-H Series
Aperture for microscopy: 2" x 2"
Two axis motion
100 m or 50 m ranges of motion
Compact size
Economical
sensor technology
Closed loop control
Optical microscopy
AFM
Fluorescence imaging
Optical trapping
N H100 (2 i )
m..
Nano-H100 with re-entrant microscope slide holder.
High strength magnets hold the slide in place.
Magnets
USB and analog
motion control
control
USB motion control
Nano-Route
3D sup-

USB interfaces.
1 or 2 axes.
49
Range of motion (Nano-H100) .......... 100 m x 100 m
Range of motion (Nano-H50) ................ 50 m x 50 m
Resolution (Nano-H100) .................................... 0.2 nm
Resolution (Nano-H50) ...................................... 0.1 nm
Stiness ...........................................................1.0 N/m
roll
,
pitch
(typical) ............................................... 1 rad
yaw
(typical) ...................................................... 3 rad
*
4.000
4.000 2.000
2.000
8 x 4-40 UNC 0.250
on a 2.30" square
mounting on a 3.60" square
and threaded for 10-32 reverse
0.125
1.150
Cable Exit Point
1.285
50
Product Description
Te Nano-Bio Series are ultra low prole, two axis
nanopositioning systems. Te low prole design allows
the Nano-Bio Series to be easily integrated into existing
inverted microscopes, AFMs and other instrumenta-
tion where space is limited. Te large center aperture
allows the Nano-Bio to accommodate the lenses of all
major microscope manufacturers. Te Nano-Bio Series
includes internal position sensors with proprietary ------
technology to provide absolute, repeatable position
Nano-Bio200 (2-axis) constructed from aluminum.
measurement and picometer accuracy under closed loop
feedback control. Te Nano-Bio100, Nano-Bio200, and
Nano-Bio300 are constructed from aluminum and are
ideal for optical microscopy. Te invar Nano-Bio2M has
increased thermal stability, reduced overall size, and is
an easily implemented closed-loop scanner upgrade for
instruments using Veeco NanoScope controllers (needs a
Nano-Drive controller with the AR-10 option).
See the Nano-LP Series for a low prole, 3-axis stage.
Nano-Bio Series
Lowest prole 2-axis nanopositioner available
Large aperture
50 m, 100 m, 200 m, or 300 m ranges
of motion
sensor technology
Closed loop control, high stability
Optical microscopy, easy to retrot
Closed-loop AFM scanner
Nanolithography
Optical tweezers
Low prole (0.6) of the Nano-Bio200.
Nano-Bio200 with re-entrant slide holder (left), petri dish holder (center), and top surface slide holder (right).
USB and analog
motion control
control
USB motion control
Nano-Route
3D sup-

USB interfaces.
1 or 2 axes.
51
Range of motion (Nano-Bio2M) ............ 50 m x 50 m
Range of motion (Nano-Bio100)........ 100 m x 100 m
Resolution (50/100/200/300 m) .... 0.1/0.2/0.4/0.6 nm
Resonant Frequencies (Nano-Bio100, 200, and 300)
X axis (100/200/300 m) ...........450/400/260 Hz 20%
Y axis (100/200/300 m) ...........350/300/200 Hz 20%
Resonant Frequencies (Nano-Bio2M)
X axis ....................................................... 500 Hz 20%
Y axis ........................................................ 400 Hz 20%
Stiness ...........................................................1.0 N/m
roll
,
pitch
(typical) ............................................... 1 rad
yaw
(typical) ...................................................... 3 rad
Body Material** ............................ Al, Invar or Titanium
*
** Material is aluminum for Nano-Bio300.
4.750
4.750 1.800
1.800
0.125
4 x 4-40 UNC 0.200
on a 2.00" square
on a 4.45" square
Cable Exit Points
0.500
0.500
6.000
6.000 2.600
2.600
on a 5.50" square
12 x 4-40 UNC 0.250
on a 3.00" square
1.125
Cable Exit Points
0.600
0.600
Nano-Bio100
Nano-Bio200
Nano-Bio300
Nano-Bio2M
(invar or titanium)
Nano-Bio200
Low Position Noise
52
Product Description
Like the popular Nano-Bio Series, the new Nano-BioS
Series are ultra low prole, two axis nanopositioning sys-
tems designed to be easily integrated into existing invert-
ed microscopes, AFMs and other instrumentation where
space is limited. Te large, rectangular center aperture al-
lows the Nano-BioS to hold re-entrant sample holders for
standard 3 inch slides and other similar sized biological
samples such as Lab-Tek chamber slides. Te Nano-BioS
Series stages include internal position sensors with propri-
etary -------- technology to provide absolute, repeatable
position measurement and picometer resolution under
closed loop feedback control. Te Nano-BioS stages are
constructed from anodized aluminum and are oered in
three ranges of motion: 100m, 200m, and 300m. If
motion in all three axes is needed, the Nano-LPS Series
is a similar sized microscopy stage which is also able to
move in the Z-axis for focusing operations.
Nano-BioS Series
Large rectangular aperture for slides
100 m x 100 m, 200 m x 200 m, or
sensor technology
Closed loop control, high stability
Aperture sized for 3 inch slides
Nanolithography
Optical tweezers
i
Nano-BioS300 (2-axis) constructed from aluminum.
Nano-BioS300 with re-entrant slide holder (shown with Lab-Tek chamber slide).
Re-entrant coverslip holder.
Re-entrant petri dish holder.
USB and analog
motion control
control
USB motion control
Nano-Route
3D sup-

USB interfaces.
1 or 2 axes.
53
Range of motion (Nano-BioS100) ...... 100 m x 100 m
Resolution (100/200/300 m) ............... 0.2/0.4/0.6 nm
Resonant Frequencies
X axis (100/200/300 m) ...........400/350/300 Hz 20%
Y axis (100/200/300 m) ...........280/230/180 Hz 20%
Stiness ...........................................................1.0 N/m
roll
,
pitch
(typical) ............................................... 1 rad
yaw
(typical) ...................................................... 3 rad
*
** Material is aluminum for Nano-BioS300.
6.000
3.300
2.100
0.125
6.700
5.300
1.125
on a 3.70" x 2.50" rect.
12 x Tapped 4-40 0.224
on a 6.70" x 5.30" rect.
8.000
Cable Exit Points
0.600
54
Product Description
Te Nano-PDQ Series are high speed multi-axis precision
nanopositioning systems. Te Nano-PDQ Series oers
a compact footprint with a large center aperture while
still oering fast performance and a resonant frequency
greater than 2kHz. Te Nano-PDQ Series are ideal for
applications that demand high scan rates or large load ca-
pacities. When used with the Nano-Drive85 controller
(model numbers with the HS su x) step response times
down to 2 milliseconds are achievable, nearly 10 times
Nano-PDQ250 (2-axis) constructed from aluminum.
the speed of comparable systems! Te Nano-PDQ Series
features parallel, uncoupled motion in up to three axes
and fully integrated position sensors utilizing proprietary
------ technology to provide absolute, repeatable posi-
tion measurement and picometer accuracy under closed
loop control.
Another system to consider: the new low prole Nano-
LPQ has similar 3-axis, high speed positioning perfor-
mance but is sized to be more convenient when used on
inverted research microscopes.
Nano-PDQ Series
Two or three axis motion
Large aperture
Large load capacity
sensor technology
Closed loop control
Fast multi-axis scanning
Optical trap calibration
Particle tracking
Nano-PDQ350 (3-axis)
Nano-PDQ350 (3-axis)
USB and analog
motion control
control
USB motion control
Nano-Route
3D sup-

USB interfaces.
1 or 2 axes.
55
Range of motion (X) .................................50 m/75 m
Range of motion (Y) .................................50 m/75 m
Resolution (50/75 m) ................................0.1/0.15 nm
Resonant Frequency (Y) .......................... 1.5 kHz 20%
Resonant Frequency (Z) .......................... 1.0 kHz 20%
Stiness ...........................................................3.0 N/m
roll
,
pitch
(typical) ............................................... 1 rad
yaw
(typical) ...................................................... 3 rad
Controller ..................... Nano-Drive or Nano-Drive85
2-Axis
Nano-PDQ250
Nano-PDQ250HS
Nano-PDQ275
Nano-PDQ275HS
3-Axis
Nano-PDQ350
Nano-PDQ350HS
Nano-PDQ375
Nano-PDQ375HS
*
4.500
1.350
0.750
6.250
4.500
2.600
2.600
on a 4.20" x 5.95" rect.
4 x C-bored for #6 SHCS 6 x 4-40 UNC 0.250
on a 2.90" x 1.50" rect.
0.125 0.750
Cable Exit Points
1.350
4.500
4.500
0.125
2.600
2.600
on a 4.20" square
0.750
6 x 4-40 UNC 0.250
on a 2.90" x 1.50" rect.
Cable Exit Points
1.100
1.100
56
Product Description
Te Nano-T Series are economical, multi-axis nanoposi-
tioning systems which are available in a variety of con-
gurations. Te Nano-T Series have up to 200 microns
range of motion in X and Y, and up to 50 microns in Z.
Te large center aperture accomodates lenses and probes
without compromising performance. Internal position
Nano-T115 (3-axis) constructed from aluminum.
absolute, repeatable position measurement and picom-
eter resolution under closed loop control. Te Nano-T
Series is well suited to applications in which precise
positioning is required but the overall stage height is not
critical. If extremely low prole systems are required,
the Nano-Bio Series and Nano-BioS Series (XY) or the
Nano-LP Series and Nano-LPS Series (XYZ) should be
considered.
Nano-T Series
Economical multi-axis nanopositioner
Two or three axis motion
100 m or 200 m XY ranges of motion
20 m or 50 m Z range of motion
Large aperture
sensor technology
Closed loop control
Multi-axis alignment
Nano-T11 (2-axis) constructed from aluminum.
USB and analog
motion control
control
USB motion control
Nano-Route
3D sup-

USB interfaces.
1 or 2 axes.
57
Range of motion (X, Y) .........................100 m/200 m
Range of motion (Z) .................................20 m/50 m
Resolution XY (100/200 m) ........................0.2/0.4 nm
Resolution Z (20/50 m) ............................0.04/0.1 nm
X axis (100/200 m) ......................... 450/400 Hz 20%
Y axis (100/200 m).......................... 250/200 Hz 20%
Z axis (20/50 m) ............................. 450/350 Hz 20%
Stiness ...........................................................1.0 N/m
roll
,
pitch
(typical) ............................................... 1 rad
yaw
(typical) ...................................................... 3 rad
Body Material ............................................... Al or Invar
2-Axis
Nano-T11
Nano-T22
3-Axis
Nano-T112
Nano-T115
Nano-T222
Nano-T225
*
5.000
5.000
0.125
2.600
2.600
on a 4.70" square
on a 3.00" square
12 x 4-40 UNC 0.200
1.150
Cable Exit Points
1.100 (Invar)
1.300 (Al)
1.100 (Invar)
1.300 (Al)
6.500
5.000
2.600
2.600
on a 6.10" x 4.60" rect.
on a 3.00" square
12 x 4-40 UNC 0.200
1.150
Cable Exit Points
1.300 (Invar)
1.500 (Al)
1.300 (Invar)
1.500 (Al)
0.780
58
Product Description
Te Nano-M350 is a compact three axis (X, Y, Z)
nanopositioning system constructed from aluminum
combined with titanium or constructed completely from
invar for the highest degree of thermal stability. Te
compact design of the Nano-M350 allows it to be easily
integrated into existing instrumentation for applications
Nano-M350 (actual size) constructed from aluminum and titanium.
such as nanolithography, SEM. Internal position sensors
utilizing proprietary -------- technology provide absolute,
repeatable position measurement with picometer ac-
curacy under closed loop control. Te Nano-M350 is
also available in high vacuum (non-bakeable) compatible
models.
Nano-M350
Compact size
Three axis motion (XYZ)
50 m x 50 m x 25 m ranges of motion
Center aperture: 0.25"
Closed loop control
sensor technology
Alignment
MEMS
Nanolithography
SEM
Nano-Route
3D supplied
with Nano-Drive
USB
interfaces.
LabVIEW Compatible
USB Interfaces
59
Resolution (25/50 m) ................................0.05/0.1 nm
Resonant Frequency (X) ............................. 1 kHz 20%
Resonant Frequency (Z) ........................... 700 Hz 20%
Stiness ...........................................................1.0 N/m
roll
,
pitch
(typical) ............................................... 1 rad
yaw
(typical) ...................................................... 3 rad
Body Material ....................... Al and Titanium, or Invar
*
2.500
2.200
1.100
1.250
0.250
aperture
on a 1.40" x 2.25" rect.
on a 0.75" square
Cable Exit Points
1.900
1.900
0.750
1.280
60
Product Description
Te Nano-3D200 is a compact three axis (XYZ) nano-
positioning system constructed from aluminum. Te
compact design of the Nano-3D200 allows it to be easily
integrated with coarse positioning stages and standard
optical xturing accessories. Internal position sensors
combine with the closed loop controller to provide
absolute, repeatable position measurement and long
term stability. Independent exure guided motion for
each axis provides mechanical isolation and ensures that
alignment adjustments can be done with minimum cross-
talk between axes. A wireless 3-axis joystick controller is
available as a convenience for fast, precise manual align-
ment without computer programming.
Nano-3D200
Compact size
Low cost
200 m three axis motion (XYZ)
Closed loop control
Hybrid positioning systems
Nanofabrication
Nano-3D200 combined with a coarse XY positioner is ideal for optical alignment applications.
Nano-3D200 constructed from aluminum
with top surface alignment grooves for optical
accessories.
Nano-Route
3D supplied
with Nano-Drive
USB
interfaces.
LabVIEW Compatible
USB Interfaces
Nano-3D200 constructed from aluminum
i h f li f i l
61
Ranges of motion (XYZ) .................................... 200 m
Resolution .............................................................. 1 nm
Stiness ...........................................................1.0 N/m
*
2.500
2.500
1.000
1.000
2.250
on 2.25" square
on 1.00" square
4 x tapped 4-40
2.063
0.180
Cable Exit Points
2.500
2.500 2.250
2.250
1.575in
40mm
0.591in
15mm
0.591
1.575
8 x Tapped 6-32
on a 2.25" square
0.118in
3mm
2.090
0.065
0.180
Cable Exit Points
62
Product Description
Te Nano-3D500 is a long range, three axis (XYZ)
nanopositioning system constructed from aluminum.
Ideally suited for optical alignment applications and
high precision static positioning, the Nano-3D500
uses unique internal exures to produce independent,
isolated movement in all axes. High resolution posi-
tion sensors combine with the closed loop controller to
provide absolute, repeatable position measurement and
long term stability. Te 0.5 inch diameter center aper-
ture provides a potentially useful optical path through
the stage. A wireless 3-axis joystick controller is avail-
able as a convenience for fast, precise manual alignment
without computer programming.
Nano-3D500
Compact size
500 m three axis motion (XYZ)
Closed loop control
Hybrid positioning systems
Micromachining
Micromanipulation
Nano-3D500 constructed from aluminum.
Nano-Route
3D supplied
with Nano-Drive
USB
interfaces.
LabVIEW Compatible
USB Interfaces
63
Ranges of motion (XYZ) .................................... 500 m
Resolution .............................................................. 1 nm
Stiness ...........................................................1.0 N/m
*
5.000 4.700
0.500 aperture
1.350
1.350
1.350 1.350
on a 2.70" square
8 x tapped 4-40
4.440
5.000
4.700
0.125
on a 4.70" square
Cable Exit Points
2.210
0.452
2.210
64
Product Description
Te Nano-LP Series are ultra-low prole, three axis
nanopositioning systems with 100, 200, and 300 micron
ranges of motion in all three axes. Te low height of
the Nano-LP Series allows it to be easily integrated into
existing inverted optical microscopes. With its extended
ranges of motion, the Nano-LP Series is ideal for demand-
ing microscopy applications which require long range
Nano-LP100 (3-axis) constructed from aluminum.
travel, fast scan rates, and three axes of motion. Te Nano-
LP Series internal position sensors utilize proprietary
-------- technology to provide absolute, repeatable position
measurement with picometer accuracy under closed loop
control. Another stage to consider, the Nano-LPS, has
similar positioning performance and a rectangular aper-
ture sized for 3 inch slides.
Nano-LP Series
Large aperture
100 m, 200 m, and 300 m ranges of motion (XYZ)
sensor technology
Closed loop control
High stability
Optical trapping experiments
Alignment
Single molecule spectroscopy
Low prole (0.8) of the Nano-LP Series.
Nano-LP100 with top surface slide holder (left), re-entrant slide holder (center), and petri dish holder (right).
USB and analog
motion control
USB and analog
motion control
USB motion control
Nano-Route
3D sup-

USB interfaces.
65
Range of motion (Nano-LP100) .....100 x 100 x 100 m
Resolution (100/200/300 m) ............... 0.2/0.4/0.6 nm
X axis (100/200/300 m) ...........450/400/350 Hz 20%
Y axis (100/200/300 m) ...........350/300/250 Hz 20%
Z axis (100/200/300 m) ...........450/350/250 Hz 20%
Stiness ...........................................................1.0 N/m
*
** Material is aluminum for Nano-LP300.
Custom Nano-LP Series
Nano-LP100 with custom frame for vertical mounting.
Low Position Noise
roll
,
pitch
(typical) ............................................... 1 rad
yaw
(typical) ...................................................... 3 rad
Nano-LP200
6.000
2.600
2.600
on a 5.50" square
on a 3.00" square
1.125
7.500
0.125
5.500
5.500
Cable Exit Points
0.800
66
Product Description
Te Nano-LPS Series are ultra-low prole, three axis
nanopositioning systems with 100, 200, and 300 micron
ranges of motion in all three axes. Te low height of the
Nano-LPS Series allows it to be easily integrated into
existing inverted optical microscopes. Like the related
Nano-LP Series, the Nano-LPS Series is ideal for de-
Nano-LPS100 (3-axis) constructed from aluminum.
manding microscopy applications which require long
range travel, fast scan rates, and three axes of motion.
Uniquely suited for biological samples, the Nano-LPS
has a large center aperture which is large enough to hold
full size 3 inch (75mm) standard slides. Precise and
repeatable motion is made possible through closed loop
control combined with position sensors.
Nano-LPS Series
Large aperture for standard 3" slides
100 m, 200 m, and 300 m ranges of motion (XYZ)
sensor technology
Closed loop control
High stability
Alignment
Nano-LPS100 with re-entrant slide holder.
Re-entrant slide holder with coverslip adapter.
USB and analog
motion control
USB and analog
motion control
USB motion control
Nano-Route
3D sup-
USB interfaces.
Nano-LPS100 with re-entrant slide holder.
Re-entrant slide holder with coverslip adapter.
67
Range of motion (Nano-LPS100) ...100 x 100 x 100 m
Resolution (100/200/300 m) ............... 0.2/0.4/0.6 nm
X axis (100/200/300 m) ...........400/350/300 Hz 20%
Y axis (100/200/300 m) ...........400/350/300 Hz 20%
Z axis (100/200/300 m) ...........400/300/200 Hz 20%
Stiness ...........................................................1.0 N/m
*
** Material is aluminum for Nano-LPS300.
roll
,
pitch
(typical) ............................................... 1 rad
yaw
(typical) ...................................................... 3 rad
8.700
6.000 5.300
6.700
3.300
2.100
1.125
on a 6.70" x 5.30" rect.
on a 3.70" x 2.50" rect.
12 x Tapped 4-40 0.220
0.125
Cable Exit Points
0.800
68
Product Description
Te Nano-LPQ is an ultra-low prole, high speed, three
axis nanopositioning system with 75 microns of travel
in XY and 50 microns in Z. Designed to minimize the
moving mass, lightweight sample holders are integrated
into the stage and represent the only moving component.
Tis unusual design allows the three axes of motion to
have matched resonant frequencies and step response
times. Equal 3-axis speed is particularly useful for applica-
tions like 3D particle tracking. Te Nano-LPQ uses inter-
nal position sensors utilizing proprietary -------- technol-
ogy to provide absolute, repeatable position measurement
with sub-nanometer resolution under closed loop control.
Another system to consider: the Nano-PDQ Series stages
oer similar high speed positioning performance with a
larger sample mounting area and higher load capacity.
Nano-LPQ
Low prole, high speed, XYZ motion
Built-in sample holders
Equal speeds on all three axes
sensor technology
Closed loop control
High stability
Particle tracking
Nano-LPQ375HS with built-in slide holder.
USB and analog
motion control
USB and analog
motion control
USB motion control
Nano-Route
3D sup-

USB interfaces.
69
Range of motion (XYZ) ........................75 x 75 x 50 m
Resolution (X/Y/Z) ................................ 0.2/0.2/0.1 nm
Resonant Frequencies (XYZ) .................. 1000 Hz 20%
Stiness ...........................................................1.0 N/m
roll
,
pitch
(typical) ............................................... 1 rad
yaw
(typical) ...................................................... 3 rad
Recommended max. load (vertical)* ...................... 100 g
*
7.500
6.700
6.000 5.300
3.900
3.010
2.600
1.750
1.050
8 x tapped 2-56THRU ALL
on a 6.70" x 5.30" rect.
2.600
Cable Exit Points
0.690
0.793
0.753 to slide plane
70
Product Description
Te Nano-Teta is a unique piezo-actuated rotational
stage having 2 milliradians of total motion. With nano-
radian resolution, the Nano-Teta is designed for appli-
cations in lithography, optical disk manufacturing, and
laser beam tracking or scanning. Te innovative design
of the Nano-Teta incorporates a readily accessible and
Nano-Theta (actual size) constructed from aluminum.
well-dened axis of rotation which allows a mirror
to be mounted so that it is co-planar with the axis of
rotation. Internal position sensors utilizing proprietary
measurement with nanoradian accuracy under closed
loop control.
Nano-Theta
Precision rotation: 2 mradians range
Accessible and well dened axis of rotation
Mount in any orientation
High resolution: 4 nanoradians
sensor technology
Closed loop control
Laser beam scanning
Lithography
FBG writing
Interferometry
Side view
Nano-Route
3D supplied
with Nano-Drive
USB
interfaces.
LabVIEW Compatible
USB Interfaces
71
Range of motion ........................................ 2.0 mradians
Resolution ...................................................... 4 nradians
Resonant Frequency (unloaded) ................. 2 kHz 20%
Body Material ............................................... Al or Invar
2.000
1.250
0.775
0.475
0.725
1.025
0.625
on a 1.00" x 1.75" rect.
3 x 2-56 UNC 0.250
0.020
0.500
0.500
72
Product Description
Te Nano-Teta/H is a unique, high precision rotational
stage which provides 5 milliradians of total motion and
a large center aperture for optical access. Te innovative
design of the Nano-Teta/H allows it to be combined
with other multi-axis nanopositioning stages for the
ultimate exibility in sample alignment - see the Nano-
Nano-Theta-H constructed from aluminum.
Align6 Series. Internal position sensors utilizing the
proprietary -------- technology provide absolute, repeat-
able position measurement with nanoradian resolution
Nano-Theta/H
Precision rotation: 5 mradians range
Large center aperture
High resolution: 10 nanoradians
sensor technology
Closed loop control
Precision alignment
Lithography
FBG writing
Polarized nanoscopy
Nano-Route
3D supplied
with Nano-Drive
USB
interfaces.
LabVIEW Compatible
USB Interfaces
73
Range of motion ........................................ 5.0 mradians
Resolution .................................................... 10 nradians
Resonant Frequency (unloaded) ................ 300Hz 20%
5.000
5.000 4.600
4.600
1.378 THRU
2.500
2.500
on a 1.70" square
4 x Tapped 4-40
0.850
0.850
on a 4.60" square
1.500
0.250
Cable Exit Point
0.500
0.500
*
74
Product Description
Te Nano-M3Z is a compact, three axis (Z,
X
,
Y
)
nanopositioning system with a 0.25 center aperture.
Te compact design of the Nano-M3Z allows it to be
integrated into existing instrumentation where space
is restricted. Te Nano-M3Z is ideal for demanding
applications which require precise alignment capa-
bilities. Internal position sensors utilizing proprietary
measurement with picometer and nanoradian accuracy
under closed loop control. Te center aperture provides
an optical path for laser interferometry or tracking.
Nano-M3Zs can be constructed from aluminum or
from invar to reduce themal expansion eects. A related
model, the Nano-Man5, adds linear X and Y motion to
the the Z-axis capabilities of the Nano-M3Z.
Nano-M3Z
Compact design
Three axis motion (Z
X
Y
)
Low prole: 0.8"
Center aperture: 0.25 diameter
sensor technology
Closed loop control
Z-axis plus tip/tilt alignment
Nanolithography
Metrology
Nano-alignment
Nano-M3Z (actual size) constructed from aluminum.
Nano-Route
3D supplied
with Nano-Drive
USB
interfaces.
LabVIEW Compatible
USB Interfaces
75
Range of motion (
X
) ..................................... 1 mradian
Range of motion (
Y
) ..................................... 1 mradian
Resolution (Z) ................................................... 0.05 nm
Resolution (
X
) ................................................ 2 nradian
Resolution (
Y
) ................................................ 2 nradian
Stiness ...........................................................1.0 N/m
Body Material .................................. Aluminum or Invar
*
0.350
0.250
aperture
1.100
1.250
2.500
1.400
0.200
3 x 2-56 UNC 0.125
2.200
on a 1.40" x 2.25" rect.
1.800
Cable Exit Points
0.800
0.800
76
Product Description
Te Nano-Align3 is a three axis (Z,
X
,
Y
) nanoposition-
ing system with a large center aperture. Te low prole
design of the Nano-Align3 allows it to be integrated into
existing instrumentation where space is restricted. Te
center aperture makes the Nano-Align3 ideal for demand-
ing microscopy alignment applications which require
long range travel and high precision. Internal position
picometer and nanoradian precision under closed loop
control.
Nano-Align3 Series
Low prole: 0.8"
Three axis motion (Z
X
Y
)
Large center aperture: 2.6" x 2.6"
Long range: 100 m or 200 m (Z),
2mradians or 4mradians (
X
Y
)
sensor technology
Closed loop control
Z-axis plus tip/tilt alignment
Nanolithography
Microscopy
MEMS
Nano-Align3 constructed from aluminum.
Nano-Route
3D supplied
with Nano-Drive
USB
interfaces.
LabVIEW Compatible
USB Interfaces
77
Ranges of motion (Nano-Align3-100)
Z axis ................................................................................ 100 m
X
and
Y
....................................................................... 2 mradian
Ranges of motion (Nano-Align3-200)
Z axis ................................................................................ 200 m
X
and
Y
....................................................................... 4 mradian
Resolution (Nano-Align3-100) ...........................0.2nm/ 4 nradian
Resolution (Nano-Align3-200) ...........................0.4nm/ 8 nradian
Resonant Frequency (Nano-Align3-100) ................. 600 Hz 20%
Resonant Frequency (Nano-Align3-200) ................. 450 Hz 20%
Stiness ......................................................................... 1.0 N/m
Recommended max. load (horizontal)* ............................... 0.5 kg
Recommended max. load (vertical)* .................................... 0.2 kg
Body Material ............................... Aluminum, Titanium, or Invar
Controller ....................................... Nano-Drive/ Nano-Drive85
*
5.000
5.250 2.600
2.600
1.000
on a 4.70" square
12 x 4-40 UNC 0.200
on a 2.85" square
Cable Exit Points
0.800
0.800
78
Product Description
Te Nano-Man5 is a ve axis (X, Y, Z,
X
,
Y
) nanopo-
sitioning system with a 0.25 diameter center aperture.
Te compact design of the Nano-Man5 allows it to be
easily integrated into existing instrumentation for appli-
cations such as nanolithography, SEM. Te Nano-Man5
is ideal for alignment applications which require three
linear axes of motion combined with tip and tilt
(
X
Y
). Internal position sensors utilizing proprietary
Nano-Man5 (actual size) constructed from aluminum and titanium.
measurement with picometer and nanoradian accuracy
under closed loop control. Te Nano-Man5 is also
available in high vacuum (non-bakeable) compatible
models. Similar to the Nano-Man5, the Nano-M350
shares the same physical dimensions but has only three
axes (XYZ) of motion.
Nano-Man5
Compact size
Five axis motion (XYZ
X
Y
)
50 m x 50 m x 25 m x 1mrad x 1mrad
ranges of motion
Center aperture: 0.25"
Closed loop control
sensor technology
Alignment
MEMS
Nanolithography
SEM
LabVIEW Compatible
USB Interfaces
Nano-Route
3D supplied
with Nano-Drive
USB
interfaces.
79
Range of motion (
X
) ..................................... 1 mradian
Range of motion (
Y
) ..................................... 1 mradian
Resolution (X) ..................................................... 0.1 nm
Resolution (Y) ..................................................... 0.1 nm
Resolution (Z) ................................................... 0.05 nm
Resolution (
X
) ................................................ 2 nradian
Resolution (
Y
) ................................................ 2 nradian
*
Resonant Frequency (X) ............................. 1 kHz 20%
Stiness ...........................................................1.0 N/m
Body Material ....................... Al and Titanium, or Invar
2.500
1.250
1.100
2.200
0.250
aperture
on a 1.40" x 2.25" rect.
on a 0.75" square
4 x 2-56 UNC 0.200
Cable Exit Points
1.900
1.900
0.800
1.300
80
Product Description
Te Nano-Align5 is a ve axis (X, Y, Z,
X
,
Y
) nano-
positioning system with a large center aperture. Te
Nano-Align5 is ideal for alignment applications which
require three linear axes of motion (X, Y, Z) combined
with tip and tilt (
X
Y
). Te large center aperture
provides excellent access for microscopy optics, sample
holders, and probe placement. Te Nano-Align5 in-
cludes internal sensors with proprietary -------- technol-
ogy for absolute position measurement and picometer/
nanoradian accuracy under closed loop control. Te
Nano-Align5 can be combined with the MicroStage and
Manual MicroStage for long range micropositioning.
Nano-Align5 Series
Low prole
Five axis motion (XYZ
X
Y
)
100 m, 200 m, or 300 m motion in

XYZ
Up to 3.3mrad motion in
X
, and up to
4.5 mrad motion in
Y
Center aperture: 2.6" x 2.6"
Closed loop control
sensor technology
Alignment
MEMS
Nanolithography
Metrology
Nano-Route
3D supplied
with Nano-Drive
USB
interfaces.
LabVIEW Compatible
USB Interfaces
Nano-Align5 combined with Manual MicroStage for microscopy work.
81
Ranges of motion (Nano-Align5-100) ....................................... 100 x 100 x 100 m x 1.1 mrad (
X
) x 1.5 mrad (
Y
)
X
) x 3.0 mrad (
Y
)
X
) x 4.5 mrad (
Y
)
Resolution (Nano-Align5-100) ................................................................. 0.2 nm (XYZ), 2.2 nrad (
X
), 3.0 nrad (
Y
)
X
), 6.0 nrad (
Y
)
X
), 9.0 nrad (
Y
)
X axis (100/200/300 m) .......................................................................................................450/400/350 Hz 20%
Y axis (100/200/300 m) .......................................................................................................350/300/250 Hz 20%
Z axis (100/200/300 m) .......................................................................................................450/350/250 Hz 20%
Stiness ....................................................................................................................................................... 1.0 N/m
Recommended max. load (horizontal)* .............................................................................................................0.5 kg
Recommended max. load (vertical)* ..................................................................................................................0.2 kg
Body Material ...........................................................................................................................................Al or Invar
Controller ...............................................................................................................................................Nano-Drive
*
7.500
6.000
2.600
2.600
on a 5.500" square
4 X C-Bored for #8 SHCS
0n a 3.000" square with 1.250" spacing
12 x 4-40 UNC 0.25
0.125
0.125
Cable exit points
0.800
82
Product Description
Te Nano-Align6 is a six axis (X, Y, Z,
X
,
Y
,
Z
) nano-
positioning system with a large center aperture. Te
Nano-Align6 is ideal for alignment applications which
require three linear axes of motion (X, Y, Z) combined
with rotational motion about each axis. Te large
aperture provides excellent access for microscopy optics,
sample holders, and probe placement. Te Nano-Align6
includes internal sensors on every axis using Mad City
Labs proprietary -------- technology for absolute posi-
tion measurement and picometer/nanoradian accuracy
Nano-Align6 Series
Low prole
Six axis motion (XYZ
X
Z
)
100 m x 100 m x 100 m x 1.1 mrad x
1.5 mrad x 5 mrad ranges of motion
200 m x 200 m x 200 m x 2.3 mrad x
3.0 mrad x 5 mrad ranges of motion
Center aperture: 35mm diameter
Closed loop control
sensor technology
Alignment
MEMS
Nanolithography
Metrology
Nano-Route
3D supplied
with Nano-Drive
USB
interfaces.
LabVIEW Compatible
USB Interfaces
83
Ranges of motion (Nano-Align6-100) ................. 100 x 100 x 100 m x 1.1 mrad (
X
) x 1.5 mrad (
Y
) x 5 mrad (
Z
)
Ranges of motion (Nano-Align6-200) ................. 200 x 200 x 200 m x 2.3 mrad (
X
) x 3.0 mrad (
Y
) x 5 mrad (
Z
)
Resolution (Nano-Align6-100) ............................................0.2 nm (XYZ), 2.2 nrad (
X
), 3.0 nrad (
Y
), 10 nrad (
Z
)
Resolution (Nano-Align6-200) ............................................0.4 nm (XYZ), 4.6 nrad (
X
), 6.0 nrad (
Y
), 10 nrad (
Z
)
X axis (Nano-Align6-100/Nano-Align6-200) ................................................................................ 450/400 Hz 20%
Y axis (Nano-Align6-100/Nano-Align6-200) ................................................................................ 350/300 Hz 20%
Z axis (Nano-Align6-100/Nano-Align6-200) ................................................................................ 450/350 Hz 20%
Recommended max. load (horizontal)* .............................................................................................................0.5 kg
Recommended max. load (vertical)* ..................................................................................................................0.2 kg
Body Material ............................................................................................................Aluminum, Titanium, or Invar
Controller ...............................................................................................................................................Nano-Drive
*
7.500
6.000
0.250
5.500
5.500
1.378in
aperture
35mm
0.850 0.850
0.850
0.850
on a 1.70" square
4 x Tapped 4-40
5.000
on a 5.50" square
Cable Exit Point
1.300
5.000
0.800
1.300
5.500
84
Product Description
Manual MicroStage Series
Coarse positioning for high resolution
nanopositioning stages
Direct replacement for standard, non-
locking microscopy stages
Te Manual MicroStage is a high precision, low prole,
XY stage with integrated position locking for use with
all standard inverted optical microscopes or customized
for other mounting requirements. Designed specically
as a coarse positioning base for use with high resolution
nanopositioners, the Manual MicroStage provides 25mm
of travel on each axis combined with micrometers with
1m vernier graduations for precise adjustments. An
internal pre-load force of 10 N built into each axis en-
sures that the Manual MicroStage is continuously locked
securely in position and is able to resist forces transmit-
ted by high speed nanopositioners mounted to the top
surface of the stage. Standard microscope stages, without
position locking, often drift out of position as a result of
acceleration forces produced by a nanopositioning stage
as it moves through a scanning sequence. Elimination
of drift is critical to proper sample imaging and raster
scan alignment. An optional breadboard assembly with
threaded mounting holes (
1
/4-20 on a 1 inch pattern or
M6 on a 25mm pattern) is available to provide a conve-
nient mounting surface for probes or other experimental
assemblies. Standard Manual MicroStages are oered
for the following inverted microscopes: Olympus IX/
IX2 Series, Nikon TE2000/Ti Series, Leica DMI Series,
and Zeiss Axiovert/Axio Observer Series. Manual Mi-
croStages designed to t other setups, including direct
mounting to optical tables, may also be requested.
Manual MicroStage shown with the Nano-LP100
3-axis nanopositioner (silver colored in picture) and
optional breadboard assembly.
Manual MicroStage (2-axis) constructed from aluminum.
25mm total motion on XY axes
Manual micrometer position adjustment
1 m vernier scales
Integrated, continuous position locking
Fits inverted microscopes and can be
customized for other optical setups
Highly stable
85
Axes of motion .......................................................... XY
Ranges of motion (XY) ......................................... 25mm
Graduations ......................................................... 10 m
Vernier graduations ................................................ 1 m
2.600
3.100
11.375
location dependent on
model of nanopositioner
4 x 8-32 UNC 0.330
Manual
Micrometer
Manual
Micrometer
0.790
0.790
0.250
microscope model or
Mount holes and
base dimensions are
dependent on
requested mounting
dimensions
NOTE:
For extended XY motion (to 50mm) combined with
a design that allows microscope objective nosepiece
rotation, see the Manual MicroStage-LT.
86
Product Description
Manual MicroStage-LT Series
Te Manual MicroStage-LT is the long travel version
of Mad City Labs popular micrometer coarse position-
ing stages developed for use with high resolution nano-
positioners. Two design changes distinguish the Manual
MicroStage-LT from the standard version: longer XY
travel (up to 50mm) and an aperture design which allows
rotation of the microscopes objective nosepiece. Like
the standard model, continuous internal position lock-
ing combined with excellent stability makes this stage an
ideal base for high resolution nanopositioning stages.
While not as low prole as the standard Manual Mi-
croStage, the LT version has been carefully dimensioned
to locate the top surface of the stage within the micro-
scopes focal range. Nanopositioning stages with re-en-
trant sample holders can be used on top of the Manual
MicroStage-LT while maintaining the ability to change
objective lenses. Mounting is available for all popular
inverted research microscopes.
Manual MicroStage-LT (2-axis, 25mm travel)
shown with optional adjustable breadboard.
Manual MicroStage-LT (2-axis, 50mm travel)
50mm total motion on XY axes
Allows objective nosepiece rotation
1 m vernier scales
Fits inverted microscopes and can be
customized for other optical setups
Highly stable
LT
adju
M
con
PProduct Description
Manual MicroStage-L
shown with optional a
M
c
87
Axes of motion .......................................................... XY
Ranges of motion (XY) ................................up to 50mm
Graduations ......................................................... 10 m
12.902
microcsope model
Mounting holes
and base dimensions
dependent on
4.331
1.575
1.575
7.480
11.417
5.905
on 3.15" x 6.10" rect.
3 x tapped 2-56
for Nano-LPS/BioS/LPQ
on 5.30" x 6.70" rect.
4 x tapped 6-32
for Nano-LP/Bio
on 5.50" square
4 x tapped 8-32
6.102
4.000
8.250
5.000
for Nano-Z500
4 x tapped 1/4"-20
Optical
Axis
Manual Micrometer
Manual Micrometer
on microscope model
Height dependent
88
Product Description
Manual MicroStage-BX Series
Te Manual MicroStage-BX ts onto Olympus upright
BX microscopes and uses manual micrometers to control
XY motion. Total XY range of motion is 25mm. Con-
tinuous internal position locking combined with excel-
lent stability makes this stage an ideal base for Mad City
Labs high resolution nanopositioning stages. Standard,
non-locking, manual microscope stages suer from posi-
tion drift if used as a coarse positioner for a fast moving
nanopositioning stage. Constructed from anodized
aluminum, the Manual MicroStage-BX has a specialized
mounting arrangement which mates directly with the
Olympus BX Series microscopes (see picture above). No
additional hardware or brackets are necessary.
Olympus BX51 upright
research microscope
25mm travel on XY axes
1 m vernier scales
Fits Olympus BX upright microscopes
Highly stable
Sub-stage mounting surface compatible
with Manual MicroStage-BX
Olympus part number: AV619700
Manual MicroStage-BX (2-axis) constructed from aluminum.
Note: The stage can also be constructed with micrometers located
on the left side if left-handed operation is desired.
89
Axes of motion .......................................................... XY
Ranges of motion (XY) ........................................ 25 mm
Graduations ......................................................... 10 m
7.340
11.375
3.750
2.600 5.500 5.300 3.000 4.200
on 3.00" x 2.25" rect.
4 x tapped 4-40
for Nano-LP/Bio
on 5.50" square
4 x tapped 8-32
for Nano-LPS/BioS/LPQ
on 6.70" x 5.30" rect.
4 x tapped 6-32
for Nano-PDQ series
on 5.95" x 4.20" rect
4 x tapped 6-32
5.500
6.700
2.250
5.950
Manual
Micrometer
0.914
Manual
Micrometer
90
Product Description
Te MicroStage is a precision, stepper motor driven, mi-
cropositioning system for inverted optical microscopes
or customized for special mounting requirements. Long
range (25 mm) linear positioning is provided in two
axes (XY) with high resolution and excellent repeatabil-
ity. Stepper motors are completely shut down between
commanded motions to minimize heat induced position
drift. Optional high resolution (20nm) linear encod-
ers provide real-time feedback of the actual stage posi-
tion. Te included MicroDrive controller connects to a
PC via a standard USB port. Motion commands from
the PC are translated into the nal stepper motor drive
signals. Signals from the two linear encoders are condi-
tioned and are available for USB transfer into the PC.
Te MicroDrive controller is LabVIEW compatible and
the system is provided with a basic LabVIEW motion
control routine for positioning in XY. Optional wireless
joystick control is also available. MicroStages are oered
for the following inverted microscopes: Olympus IX/IX2
Series, Nikon TE2000/Ti Series, Leica DMI Series, and
Zeiss Axiovert/Axio Observer Series. MicroStages de-
signed to t other experimental setups, including direct
mounting to optical tables, are also available.
MicroStage Series
XY motion: 25mm
Optional encoders: 20 nm resolution
Easily retrot to inverted microscopes or
customize for other optical setups
Microscope lens rotation is possible
LabVIEW compatible
USB interface
Complex, programmed motion control
Optical microscopy
Micropositioning with high resolution
position feedback
Examples supplied for the
Micro-Drive controller
USB motion control
USB motion control
E
M
LabVIEW compatible
USB interface
MicroStage with optional breadboards for mounting probes or
other accessories. Breadboard position is easily adjusted and
breadboards can be removed if not needed.
Slide holder with coverslip/
petri dish adapter.
MicroStage (2-axis) constructed from aluminum.
91
Range of motion (X) ........................................... 25 mm
Range of motion (Y) ........................................... 25 mm
Encoder Resolution (optional).............................. 20 nm
Step Size ............................................................... 95 nm
Maximum Speed ............................................. 4 mm/sec
Motion Prole
Motion 100 steps ........... Automatic accel/decel control
Motion <100 steps ............................ Constant 5ms/step
Recommended max. load* ........................................5 kg
Micro-Drive controller used to operate the MicroStage. A standard
USB port allows direct connection of the Micro-Drive controller to a
PC. LabVIEW compatible.
*
Mi D i t ll d t p t th Mi St A t d d
2.102
5.905
1.331
1 x lapped -32
or a 5.30 x .Z0 recl.
lor Naro-LP3/8|o3/LP0
8.Z50
.102
1.5Z5
1.5Z5
Vourl|rg ro|es
ard oase d|rers|ors
deperderl or
r|croscope rode|
1 x lapped 8-32
or a 5.50 square
lor Naro-LP/8|o
1 x lapped 1/1-20
lor Naro-Z500
18 x lapped 1/1-20
or 1.00 spac|rg
1.000
x lapped 2-5
or a 3.15 x .10 recl.
le|grl deperderl
or r|croscope rode|
MicroStage stability after two 150m motions.
92
Product Description
Te Nano-View/M is a fully integrated positioning
system for use with inverted optical microscopes. Easy to
operate and aordable, the Nano-View/M combines a
manual micrometer driven, two axis, linear motion stage
with high resolution, long range nanopositioners - either
ultra-low prole or ultra-high speed. A stable blocking
force of 10 N built into each axis of the coarse position-
ing stage provides a secure base for precision nanoposi-
tioning. Te overall height of the Nano-View/M with
the low prole nanopositioners is only slightly more than
standard manual XY stages. An optional breadboard
assembly with threaded mounting holes (
1
/4-20 on a 1
inch pattern or M6 on a 25mm pattern) is a convenient
mounting surface for probes. Nanopositioner ranges of
motion extend up to 300 microns per axis (X,Y and Z).
Internal position sensors utilizing proprietary -------- tech-
nology provide absolute, repeatable position measurement.
Te Nano-View/M system includes the Nano-Drive
controller and is compatible with user written LabVIEW
software. Standard Nano-View/M systems are oered
Zeiss Axiovert/Axio Observer Series. Nano-View/M sys-
tems designed to t other setups, including direct mount-
ing to optical tables, may also be requested.
Nano-View
/M

Series
Manual micropositioning with nanopositioning
1" (25mm) 2-axis coarse positioning
2-axis or 3-axis nanopositioning
Large aperture
Retrot to inverted microscopes
sensor technology
Closed loop control
Confocal imaging
Particle tracking
Nanomanipulation
STORM and PALM imaging
Re-entrant slide holder.
Re-entrant coverslip/petri dish holder.
Nano-View
/M systems include
re-entrant sample holders.
USB and analog
motion control
control
USB motion control
Nano-Route
3D sup-

USB interfaces.
1 or 2 axes.
Nano-View
/M 100-3 System with optional breadboard assembly.

3-axis nanopositioning
2-axis micropositioning
93
Axes of motion ..............................................XY or XYZ
Ranges of motion (XY or XYZ) ........... 100/200/300 m
Resolution (100/200/300 m) ............... 0.2/0.4/0.6 nm
X axis (100/200/300 m) ...........400/350/300 Hz 20%
Y axis (100/200/300 m) ...........400/350/300 Hz 20%
Z axis (100/200/300 m) ...........400/300/200 Hz 20%
Stiness ...........................................................1.0 N/m
roll
,
pitch
(typical) ............................................... 1 rad
yaw
(typical) ...................................................... 3 rad
Low Profle Nanopositioners
Micropositioning Stage
Axes of motion .......................................................... XY
Ranges of motion (XY) ......................................... 25mm
Graduations ......................................................... 10 m
High Speed Nanopositioner
Axes of motion ........................................................ XYZ
Ranges of motion (XY) ......................................... 75 m
Resolution (50/75 m) ................................0.1/0.15 nm
Resonant Frequency (XYZ) .................... 1000 Hz 20%
Stiness ...........................................................1.0 N/m
roll
,
pitch
(typical) ............................................... 1 rad
yaw
(typical) ...................................................... 3 rad
*
Note: Additional information
regarding the built-in nano-
positioning systems can be
found on the catalog pages
which describe the Nano-LPS
Series, the Nano-BioS Series,
and the Nano-LPQ.
Vourl|rg ro|es
ard oase d|rers|ors
deperderl or
r|croscope rode|
3.300
2.100
1.125
12 x lapped 1-10 uNC 0.220
or a 3.Z0 x 2.50 recl.
Cao|e Ex|l
Varua|
V|croreler
re|grl deperds
or r|croscope
Varua|
V|croreler
*
94
Product Description
Te Nano-View is a fully integrated positioning system
for use with inverted optical microscopes. Te Nano-
View combines a long range, motor driven, XY linear
motion stage with an ultra-low prole, high resolution
nanopositioning system. Te micropositioning stage has
integrated linear encoders and provides 25 mm of travel
per axis with an encoder resolution of 20 nm. Minimum
step size is 95 nm with a step repeatability of 50 nm. Te
nanopositioning systems built into the Nano-View have
the lowest prole available and have ranges of motion
extending up to 300 microns per axis (X,Y,Z). Internal
sub-nanometer resolution under closed loop control. A
Nano-View system includes the Nano-Drive control-
ler and the Micro-Drive controller which connects to a
PC using a standard USB computer interface. Te Micro-
Drive is fully compatible with user written LabVIEW
software and the system is provided with a basic LabVIEW
motion control routine for positioning in XY. Optional
wireless joystick control is also available. Stepper motors
are completely shut down between commanded motions
to minimize heat induced position drift. Te Nano-View
is the complete nanometer positioning system for single
molecule spectroscopy and high resolution microscopy
applications. Standard Nano-View systems are oered
Zeiss Axiovert/Axio Observer Series. Nano-View systems
designed to t other setups, such as direct mounting to
optical tables, may also be requested.
Nano-View

Series
Integrated micropositioning and nanopositioning
1" (25mm) 2-axis micropositioning with encoders
2-axis or 3-axis nanopositioning up to 300 m
Large aperture - ts 3 inch slides
Retrot to inverted microscopes
sensor technology
Closed loop control
Confocal imaging
Nanomanipulation
Re-entrant slide holder.
Re-entrant coverslip/petri dish holder.
Nano-View
systems include
re-entrant sample holders.
USB and analog
motion control
control
USB motion control
Nano-Route
3D sup-

USB interfaces.
1 or 2 axes.
Nano-View
300-3 mounted on a Nikon inverted microscope. Optional bread-

board for mounting of probes and accessories is also shown.
95
Axes of motion ..............................................XY or XYZ
Ranges of motion (XY or XYZ) ........... 100/200/300 m
Resolution (100/200/300 m) ............... 0.2/0.4/0.6 nm
X axis (100/200/300 m) ...........400/350/300 Hz 20%
Y axis (100/200/300 m) ...........400/350/300 Hz 20%
Z axis (100/200/300 m) ...........400/300/200 Hz 20%
Stiness ...........................................................1.0 N/m
roll
,
pitch
(typical) ............................................... 1 rad
yaw
(typical) ...................................................... 3 rad
*
Nanopositioners
Micropositioner
MicroStage-20E
Step size ............................................................... 95 nm
Encoder resolution ............................................... 20 nm
Axes of motion .......................................................... XY
Range of motion (XY) .......................................... 25mm
Step repeatability .................................................. 50 nm
Micro-Drive
TM
controller used to operate the micropositioning portion of the
Nano-View
system. A standard USB port allows direct connection of the

Micro-Drive
TM
controller to a PC. The Nano-Drive
controller (see Nano-

Drive
section of catalog) operates the nanopositioning portion of the Nano-

View
system. Both controllers are LabVIEW compatible.

Note: Additional information regarding the built-
in nanopositioning systems can be found on the
catalog pages which describe the Nano-LPS Series,
the Nano-BioS Series, and the Nano-LPQ.
High Speed Nanopositioner
Axes of motion ........................................................ XYZ
Ranges of motion (XY) ......................................... 75 m
Resolution (50/75 m) ................................0.1/0.15 nm
Resonant Frequency (XYZ) .................... 1000 Hz 20%
Stiness ...........................................................1.0 N/m
roll
,
pitch
(typical) ............................................... 1 rad
yaw
(typical) ...................................................... 3 rad
.000
3.300
2.100
Vourl|rg ro|es ard
oase d|rers|ors deperderl
or r|croscope rode|
2.102
1.125
12 x lapped 1-10
or a 3.Z0 x 2.50 recl.
le|grl deperderl
or r|croscope rode|
0.800 (3-ax|s)
0.00 (2-ax|s)
*
96
Product Description
Te Nano-F Series are nanopositioner focusing elements
with 100 or 200 microns of travel. Internal position
absolute, repeatable position measurement for precise
closed loop control. Extensive computer modeling
(FEA) of the Nano-F Series mechanical structures has
resulted in designs with very low o-axis motion (see
runout specications) - which means that microscope
images will remain stable throughout the entire range of
motion. Te Nano-F Series can be used as stand-alone
systems or in conjunction with other Mad City Labs
nanopositioning stages. Quick mount adapters thread
directly into the microscope turret and the nanoposi-
tioner can then be clamped onto the adapter without
having to rotate the entire assembly with the attached
cable. A variety of quick mount adapter threads allow
the Nano-F Series to be used on all microscopes. Te
desired threads on the quick mount adapter are specied
for each system when it is ordered. Extra adapters can
be ordered separately.
Nano-F Series
Compact objective lens focusing element
Interchangeable, quick mount adapters
Compatible with all microscopes
Closed loop control
sensor technology
Microscope focusing element
Confocal imaging
Auto focus
Quick mount adapters allow the Nano-F Series to be
used with a variety of microscopes and lenses. Threaded
adapters include RMS, M25, M26, M27 and M32
(Nano-F100W and F200W for M27 and M32).
Nano-F100S constructed
from aluminum.
Nano-F200S constructed
from aluminum.
USB and analog
motion control
control
USB motion control
Nano-Route
3D sup-

USB interfaces.
1 or 2 axes.
97
2.000
1.850
1.000
1.600
Cable exit point
2.000
1.000
1.700
0.500
1.850
0.100
Microscope threads user specified
(RMS, M25, or M26) Detachable quick mount
adapter fits into microscope
Location of set screw
for adapter
Objective lens maximum
diameter 1.550" [39mm]
Range of motion (Nano-F100S and F100W) ..... 100 m
Range of motion (Nano-F200S and F200W) ..... 200 m
Resolution (100/200 m) ............................0.2 / 0.4 nm
Resonant Frequency (100 and 200 m) .... 500 Hz 20%
Runout (
X
) ................. 6 rad (100 and 200 m ranges)
Runout (
Y
) ...........10 rad (100 m), 25 rad (200 m)
Stiness ...........................................................1.0 N/m
Body Material ............................................. Al and Brass
Treaded Adapters
Nano-F100S and F200S .................RMS, M25, M26
Nano-F100W and F200W ....................... M27, M32
*
Note: See page 15 for custom high speed lens
positioning systems.
Nano-F100S
Low Position Noise
1.000
2.000
2.050
2.000
Cable Exit Point
1.000
2.000
1.700
1.700
0.100
0.500
2.050
Objective lens maximum
diameter 1.950 inches
M27 or M32 microscope
thread
Detachable quick mount
adapter fits into microscope
for adapter
Nano-F200S with RMS, M25, or M26 adapters
Nano-F100W and F200W with M27 or M32 adapters
1.250
0.625
1.850
1.600
0.900
0.500 1.000
on 0.90" x 0.50" rect.
4 x tapped 4-40 UNC Cable Exit Point
1.600
1.700
0.625
0.500
1.700
1.850
0.100
Objective lens Maximum
for quick mount adapter
(RMS, M25, or M26)
adapter screws into
microscope nosepiece
Nano-F100S with RMS, M25, or M26 adapters
98
Product Description
Te Nano-F25HS is a high speed nanopositioner focus-
ing element with 25 microns of travel. Twice as fast as
standard longer range objective lens nanopositioners, the
Nano-F25HS uses a compact direct drive exure design
to reduce the step response time while maintaining a
size that easily adapts to microscopes or other optical
systems. Internal position sensors utilizing proprietary
measurement for precise closed loop control. Te Nano-
F25HS can be used as stand-alone system or in conjunc-
tion with other Mad City Labs nanopositioning stages.
Quick mount threaded adapters are available for RMS,
M25, and M26 lens threads. Adapter threads are speci-
ed when the system is ordered. Customized mounting
arrangements can also be provided for non-microscope
installations.
Nano-F25HS
High speed objective lens focusing element
25 m range of motion
Closed loop control
sensor technology
Confocal imaging
Auto focus
Nano-F25HS constructed
from aluminum.
Nano-F25HS constructed from aluminum.
Nano-F25HS constructed
from aluminum.
USB and analog
motion control
control
USB motion control
Nano-Route
3D sup-

USB interfaces.
1 or 2 axes.
99
Range of motion .................................................. 25 m
Resolution ......................................................... 0.05 nm
Resonant Frequency
Unloaded ........................................... 1.2 kHz 20%
Loaded with 200g lens ........................ 450 Hz 20%
Runout (
X
) ......................................................... 2 rad
Runout (
Y
) .......................................................... 2 rad
Stiness ...........................................................1.5 N/m
Treaded Adapters ...............................RMS, M25, M26
*
Nano-F25HS with RMS, M25, or M26 adapters
R1.000
1.772
2.000
Cable Exit Point
0.500
1.772
1.700
0.900
Objective lens
Maximum diameter
1.55 inches
Microscope threads
user specified
adapter screws into microscope
nosepiece
2.000
0.500
1.700
1.000
Low Position Noise
100
Product Description
the adapter without having to rotate the entire assembly
with the attached cable. Compatible with RMS, M25,
and M26 quick mount threaded adapters, the Nano-
F450 can be used on many dierent microscopes. Te
desired threads on the quick mount adapter are specied
for each system when it is ordered. Extra adapters can
be ordered separately.
Nano-F450
450 m travel - long range objective lens
focusing element
Closed loop control
sensor technology
Confocal imaging
Auto focus
Nano-F450 constructed from aluminum.
Quick mount threaded adapters allow the
Nano-F450 to be used with RMS, M25,
and M26 lens threads.
Te Nano-F450 is the longest travel range piezo focus-
sing element available for research microscopy. Ideally
suited to high speed, long range confocal imaging, the
Nano-F450 utilizes proprietary -------- position sensor
technology for absolute, repeatable position measure-
ment and precise closed loop control. Te Nano-F450
can be used as stand-alone system or in conjunction with
other Mad City Labs nanopositioning stages. Quick
mount adapters thread directly into the microscope tur-
ret, allowing the lens nanopositioner to be clamped onto
USB and analog
motion control
control
USB motion control
Nano-Route
3D sup-

USB interfaces.
1 or 2 axes.
101
0.990
0.520
2.230
Objective lens
maximum diameter 1.40 inch
Detachable quick-mount adapter
mounts to microscope nosepiece
4.460
2.550 1.446
2.230
1.275
Microscope threads
user specified
Cable exit point
0.990
1.275
Range of motion ................................................ 450 m
Resolution ........................................................... 0.9 nm
Resonant Frequency (no load) .................. 240 Hz 20%
Resonant Frequency (with 150 g lens) ...... 160 Hz 20%
Resonant Frequency (with 250 g lens) ...... 130 Hz 20%
Stiness ...........................................................1.0 N/m
*
Nano-F450 with RMS, M25, or M26 adapters
102
Product Description
to provide feedback for closed loop control. Compat-
ible with RMS, M25, M26, and M27 lens threads, the
Nano-F3D can be used with most commercially avail-
able objective lenses. Treaded adapters are specied for
each system when it is ordered. Extra adapters can be
ordered separately.
Nano-F3D
XYZ objective lens positioning
100 m range of motion in all 3 axes
Interchangeable threaded lens adapters
Closed loop control
sensor technology
Custom microscope scanning
4Pi microscopy
Optical inspection
Nano-F3D with M25 objective lens threaded adapter.
Adapters for RMS and M26 lens threads are also available.
Te Nano-F3D is an objective lens nanopositioner
designed to provide the unique capability of moving a
lens in all three axes (XYZ). Simultaneous, three axis
motions of up to 100 microns can be accomplished
with sub-nanometer positioning resolution. As with all
Mad City Labs nanopositioning systems, the Nano-F3D
uses proprietary position sensors on each axis
USB and analog
motion control
control
USB motion control
Nano-Route
3D sup-

USB interfaces.
1 or 2 axes.
Nano-F3D with M25 objective lens threaded adapter.
103
Ranges of motion (X,Y,Z) .................................. 100 m
Resolution ........................................................... 0.2 nm
Resonant Frequencies (X/Y/Z) ...300/200/400 Hz 20%
Stiness ...........................................................1.0 N/m
*
3.750
3.750
4.000
4.000
1.920
2.080
0.090
0.090
on 3.75" square
for reverse mounting
for #6 SHCS and tapped 8-32
4 x 0.136 THRU ALL
Cable exit point
Microscope threads
user specified
(RMS, M25, M26)
0.055
1.325
0.400
1.325
104
Product Description
C-Focus systems provide an automatic means to
eliminate microscope focus drift over long time periods.
Unlike autofocus systems which require use of advanced
microscopes with internal focus correction or external
devices which track video signals or reected laser beams,
the C-Focus simply corrects for microscope focus
drift by using a high resolution (5nm) sensor system to
measure the lens/sample spacing and make the neces-
sary adjustments. Te C-Focus system has no eect
on standard manual focusing and can be retrot to any
microscope. After focus is established, simply push-
ing the focus lock button starts the C-Focus opera-
tion. Objective lens motions are accomplished with a
lens nanopositioner (the Nano-F100S) which is easily
connected to the objective lens and microscope with
standard threaded adapters. In addition to the unique
C-Focus operation, lens nanopositioner motion can
also be directly commanded by digital (16-bit USB)
or analog signals and can be used for high speed, high
resolution confocal imaging and other imaging tasks
with demanding focus requirements. Te C-Focus lens
positioning system contains the same proprietary, low
noise position sensors used in the Nano-F100S
and is capable of sub-nanometer positioning resolution.
Te 16-bit USB digital computer interface is included
with all C-Focus controllers.
C-Focus
System
Microscope automatic focus drift correction
100 m range of motion
Compatible with inverted microscopes
Closed loop control
sensor technology
Maintain constant microscope focus
Ultra-ne focus adjustments
Drift correction
Single button to maintain focus.
Single button to move lens into the starting position.
C-Focus
nanopositioner with 5nm optical sensor system

removes the effects of microscope focus drift.
E
a
s
y

t
o

U
s
e
USB and analog
motion control
control
USB motion control
Nano-Route
3D sup-

USB interfaces.
1 or 2 axes.
105
Range of motion (Nano-F100S) ......................... 100 m
Resolution ........................................................... 0.2 nm
Stiness ...........................................................1.0 N/m
Controller ....................................................... C-Focus
*
Nano-F100S
Nano-F100S objective lens nanopositioner is included with the
C-Focus
system. Microscope focus drift is corrected by moving

the objective lens in response to feedback from the C-Focus

sensor system.
20 minute exposure without C-Focus
.
20 minute exposure with C-Focus
.
Both Images:
MutS protein imaged with Cy3 via Prism TIRF
Olympus IX71, 60x 1.45NA Oil, 1.6x magnication

Courtesy:
Biomolecular & Cellular Dynamics Lab
Dept of Physics/IBIO, POSTECH South Korea
1.250
0.625
1.850
1.600
0.900
0.500 1.000
on 0.90" x 0.50" rect.
4 x tapped 4-40 UNC Cable Exit Point
1.600
1.700
0.625
0.500
1.700
1.850
0.100
Objective lens Maximum
for quick mount adapter
(RMS, M25, or M26)
adapter screws into
microscope nosepiece
106
Product Description
Te Nano-MTA Series are single axis and two axis piezo-
electric mirror tip/tilt actuators. With nanoradian reso-
lution, the Nano-MTA Series is ideal for applications
involving laser beam steering, tracking, and scanning.
Internal position sensors utilizing proprietary -------- tech-
nology provide absolute, repeatable position measurement
under closed loop control. Te Nano-MTA Series is com-
patible with either the Nano-Drive or Nano-Drive85
controllers. Both controllers include sensor electronics,
proportional integral feedback control, and 150V ampli-
ers. When used with the high power Nano-Drive85
controller, the Nano-MTA Series is capable of continu-
ous, high speed scans at 400 Hz and step response times
down to 2 milliseconds.
Nano-MTA Series
400 Hz high speed scans
One or two axis motion
2 mrad or 5 mrad ranges of motion
sensor technology
Closed loop control
High Stability
High speed laser beam steering
Optical trapping
Interferometry
FBG writing
Optical disk manufacturing
Astronomy
Active optics
Nano-MTA (actual size) constructed from aluminum.
Nano-MTA2 (actual size)
constructed from invar and titanium.
Nano-MTA2X (extended range)
Nano-MTA2 (actual size)
Nano-Route
3D supplied
with Nano-Drive
USB
interfaces.
LabVIEW Compatible
USB Interfaces
107
Range of motion (per axis) .......................... 2.0 mradian
Resolution .................................................... 4.0 nradian
Range of motion (extended) ........................ 5.0 mradian
Resolution ..................................................... 10 nradian
Resonant Frequency - (with 25mm diameter x 3mm
thick glass mirror)
X axis (2mrad/5mrad) ......... 3.2kHz/2.8kHz 20%
Y axis (2mrad/5mrad)......... 1.25kHz/800Hz 20%
Optics ............... 25mm diameter mirror mounting area*
Body Material ......................... Al or Invar and Titanium
Controller ..................... Nano-Drive or Nano-Drive85
Measured position noise of the Nano-MTA2 shows the systems exceptional stability.
Ultra Low Position Noise
0.700
2.000
1.285
(Nano-MTA2)
0.125
(Nano-MTA2)
1.635
(Nano-MTA2X)
0.375
(Nano-MTA2X)
1" diameter mirror
attached here
2.000
2.000
on a 1.70" square
Cable Exit Points
1.000
1.000
1.200
1.700
Nano-MTA2
*
Mirrors can be attached to the Nano-MTA2 using Milbond adhesive available from
Edmund Optics - stock number NT53-288.
108
Product Description
Te Nano-UHV50 is a two axis UHV compatible nano-
positioning system constructed from titanium or invar.
Made entirely from UHV compatible materials, the
Nano-UHV50 is bakeable to 100C for vacuum applica-
tions in the 10
-10
Torr range. A 1 inch (25mm) center
aperture provides an optical pathway or access for sample
holders. Internal position sensors utilizing proprietary
Nano-UHV50 constructed from titanium. Cables have Kapton insulation and silver plated copper shielding. The
15-pin, sub-D, vacuum compatible PEEK connector is wired to be compatible with vacuum feedthrough anges.
measurement with picometer accuracy. Cable lengths
and connectors are customized for the actual installation.
Connector wiring is compatible with Accu-Glass Prod-
ucts electrical feedthrough anges - compatibility with
other types of anges may be requested.
Note: Customized UHV stages are always welcome - just
email or call to discuss your special requirements.
Nano-UHV50
UHV compatible construction
Two axis (XY)
Bakeable to 100 C
sensor technology
Closed loop control
X-ray, VUV, and optical microscopy
Surface metrology
UHV atomic scale microscopy
Special designs - just contact us
with your requirements
Nano-Route
3D supplied
with Nano-Drive
USB
interfaces.
LabVIEW Compatible
USB Interfaces
109
Resolution (XY) .................................................. 0.1 nm
Stiness ...........................................................0.5 N/m
roll
,
pitch
(typical) ............................................... 1 rad
yaw
(typical) ...................................................... 3 rad
*
2.750
0.125
1.000
on a 1.00" x 2.00" rect.
4 x 8-32 UNC through holes
provide mounting from below
4 x 6-32 UNC 0.250
on a 1.00" square
1.250
1.250
2.750
1.290
1.290
0.600
110
Product Description
Te Nano-UHV100 is a two axis UHV compatible
nanopositioning stage constructed from titanium or
invar. Made entirely from UHV compatible materials,
the Nano-UHV100 can be baked to 100C for vacuum
applications in the 10
-10
Torr range. Te large (2.6 x
2.6) center aperture makes the Nano-UHV100 ideal
for vacuum microscopy applications. Internal posi-
tion sensors utilizing proprietary -------- technology
Nano-UHV100 constructed from titanium. Cables have Kapton insulation and silver plated copper shielding. The
15-pin, sub-D, vacuum compatible PEEK connector is wired to be compatible with vacuum feedthrough anges.
picometer accuracy. Cable lengths and connectors are
customized for the actual installation. Connector wir-
ing is compatible with Accu-Glass Products electrical
feedthrough anges - compatibility with other types of
anges may be requested.
Nano-UHV100
Two axis (XY), large aperture
Bakeable to 100 C
sensor technology
Closed loop control
Surface metrology
Nano-Route
3D supplied
with Nano-Drive
USB
interfaces.
LabVIEW Compatible
USB Interfaces
111
Range of motion (Y) .......................................... 100 m
Resolution (XY) .................................................. 0.2 nm
Stiness ...........................................................1.0 N/m
roll
,
pitch
(typical) ............................................... 1 rad
yaw
(typical) ...................................................... 3 rad
*
5.250
5.000
0.125
0.250 0.125
2.600
2.600
8 x 6-32 UNC 0.350
on a 3.00" square
4 x 8-32 UNC 0.350
on a 2.00" x 4.25" rect.
1.500
1.125
1.125
112
Product Description
Te Nano-UHV200 is a three axis UHV compatible
nanopositioning system constructed from titanium and
316 stainless steel. Made entirely from non-magnetic
UHV compatible materials, the Nano-UHV200 is
bakeable to 100C for vacuum applications in the
10
-10
Torr range. A 2 inch x 2 inch center aperture
provides an optical pathway or access for sample hold-
ers. Internal position sensors utilizing proprietary
------- technology provide absolute, repeatable position
measurement with picometer accuracy. Cable lengths
and connectors are customized for the actual installa-
tion. Connector wiring is compatible with Accu-Glass
Products electrical feedthrough anges - compatibility
with other types of anges may be requested.
Nano-UHV200
Three axis (XYZ)
200 m x 200 m x 200 m motion
Bakeable to 100 C
Titanium and 316SS construction
sensor technology
Closed loop control
Surface metrology
Nano-UHV200 constructed from titanium and 316SS. Cables have Kapton insulation and silver plated copper shielding.
The 19-pin, MIL-C-26482, vacuum compatible PEEK connector is wired to be compatible with vacuum feedthrough anges.
Nano-Route
3D supplied
with Nano-Drive
USB
interfaces.
LabVIEW Compatible
USB Interfaces
113
Range of motion (Y) .......................................... 200 m
Resolution (XYZ) ................................................ 0.4 nm
Stiness ..............................................................2 N/m
roll
,
pitch
(typical) ............................................... 1 rad
yaw
(typical) ...................................................... 3 rad
Body Material ............................... Titanium and 316 SS
*
5.300
2.000
2.000
1.000
for mounting on a 4.98" x 6.93" rect.
4 x 8-32 UNC through holes
10 x 6-32 UNC 0.250
on a 2.40" square
9 x 8-32 UNC for mounting
accessories on 1.00" centers
additional 7 x 8-32 UNC
for mounting accessories
on a 1.00" centers
Cable Exit Points
7.500
4.960
1.400
0.850
1.400
114
Product Description
Te Nano-Gauge
is an ultra high precision, single axis,

displacement measuring instrument capable of resolving
dimensions down to 1.5 nanometers (0.06 microinches)
over a full scale range of 25mm (1 inch). Combining
ease-of-use and small physical size, the Nano-Gauge

can be quickly adapted to a wide variety of precision
measurement situations without lengthy or complex
setup procedures. A standard USB Plug & Play digital
interface connects the Nano-Gauge
controller to a PC
for a real-time display of measure-
ment values. Laptop PCs with USB ports can be used
to bring the Nano-Gauge
into the eld for on-site

measurements. An on-screen zeroing button provides
a simple means to accomplish relative measurements
and makes the Nano-Gauge
as easy to use as standard

machinists digital calipers. A displayed up/down
Nano-Gauge
5 measurement system
measurement rate selector determines the data acquisi-
tion time spacing. Measurement rates range from 50
ms/data value to 1 minute/data value. Available probe
tips include hardened steel, sapphire, and silicon nitride
balls. Probes can also be provided with threaded holes
for direct connection to moving components or custom-
ized for specic applications. Te pictured Nano-Gauge

mounting is designed to t standard optical table bread-
boards - custom mounting for unique applications may
be specied. Probe tip loading is user adjustable via
internal springs. Probe loading may be eliminated by use
of magnetically coupled steel tipped probes. Te extreme
precision and resolution of the Nano-Gauge
makes it
ideal for transducer design and calibration, development
of nanoindentation systems, and materials testing.
Nano-Gauge
Series
1.5nm or 5nm linear displacement measurement
25mm total range of measurement
USB output to PC
Optional probe types
Compact sensor head
Easy to use
Nanopositioner calibration
Transducer calibration
Alignment
Position creep measurements
pption
Nano-Gauge
5 measurement system
LabVIEW Compatible
USB Interface
115
Range of measurement ........................... 25mm (1 inch)
Measurement resolution (Nano-Gauge
1) ........... 1.5 nm
Measurement resolution (Nano-Gauge
5) ........... 5.0 nm
Measurement rate ...............................50 ms to 1 minute
Probe loading ..................................... 1 lb/in to 10 lb/in
Probe diameter ...................................0.25 mm to 8 mm
Probe tip ...................................... hardened steel ball or
optional sapphire or silicon nitride precision balls
Overall Dimensions ....................... 2.50 x 3.12 x 1.69
2.500 2.000
2.000
1.250
Mounting Slots for
0.25" diameter bolts
1.450
0.725
0.500
1.185
1.690
1.002
Cable Exit Point
116
Product Description
Features
Te Nano-Drive
Series of controllers are complete

electronic packages for sub-nanometer positioning. All
Nano-Drive
controllers include low noise, low drift

ampliers, absolute position control, bandwidth selec-
tion, and closed loop feedback. Closed loop feedback
ensures that the displacement as a function of input volt-
age is highly linear and free of positioning errors caused
by inherent creep and hysteresis in the piezo actuators.
Nano-Drive
3
(3-axis) control system.
All Nano-Drive
models provide standard analog control

inputs (0-10V) via front panel BNCs. Optional 16-bit
or 20-bit USB digital control interfaces may also be in-
cluded to provide true Plug & Play connectivity. Both
single and multi-axis versions of the Nano-Drive
allow
the user to switch select a reduced system bandwidth
- providing an extra margin of stability for high load
setups. Front panel output BNCs provide access to the
Nano-Drive

Series
Closed loop servo/drivers for all Mad City Labs nanopositioning systems
Proportional-Integral feedback
Analog or digital (USB) positioning control
High power models available for continuous high speed scanning
CE compliant
emm.
Nano-Drive
2
Nano-Drive
1
USB and analog
motion control
control
USB motion control
Examples, tutorial,
and Nano-Route
TM
3D
supplied with Nano-
Drive
TM
USB interfaces.
1 or 2 axes.
117
Nano-Drive
Options
real-time position sensor signal and the actuator drive
signal (HV/10). Te standard analog position com-
mand signal is congured for a 0-10V input with other
ranges available upon request (see options). Te Nano-
Drive
is also available in circuit board form for OEM or

custom applications.
Nanopositioners combined with a Nano-Drive
control-
ler form a calibrated system which is individually adjust-
ed and optimized for the specic motions requested by
the customer. Factors such as load (sample mass), type
of motion (steps, scanning, etc.), and required position-
ing speed are all factored into the customized setup.
A high power version, the Nano-Drive
85, is available
for applications which demand continuous, high speed
scanning and fast step response motions.
USB16x 16-bit USB interface (x denotes the number
of axes) for moderate resolution, user
friendly Plug & Play control.
USB20x 20-bit USB interface (x denotes the number
of axes) for maximum resolution, user
friendly Plug & Play control.
AR-10 -10V to +10V analog input control voltage
range. Compatible with the Veeco Nano
Scope/Bioscope - may require the VBOB
option if high voltage control signals are
used (see below). Compatible with
computer interface USB20x but not
compatible with USB16x.
range. Compatible with computer interface
USB20x but not compatible with USB16x.
range. Compatible with computer interface
USB20x but not compatible with USB16x.
ISS Image scan sync - provides TTL compatible
pixel clock, line clock, and frame clock.
Compatible with Becker & Hickl and Pico
Quant TCSPC modules (Time Correlated
Single Photon Counting). Te ISS option
requires either the 16-bit or 20-bit USB
interface option (above) in order to function.
Nano-View
and Nano-View
/M systems
include the ISS option.
SO Scan oset potentiometer for the Nano-
Drive
.
OCL Front panel open loop / closed loop switch.
VBOB Veeco Breakout Box. Reduces Veeco
NanoScope/Bioscope controller high
voltage output signals to +/-10V. May be
needed with the AR-10 option.
CBOB Custom Breakout Box. Specied by
customer to provide compatibility with
external instrumentation.
RM Rackmount for Nano-Drive
controller.
USB Computer Interfaces
Plug & Play 16-bit and 20-bit digital USB interfaces
areWindows XP, Vista, and 7 compatible, for both
32-bit and 64-bit PCs. USB drivers are included. 20-
bit resolution is required to access the maximum avail-
able resolution of the nanopositioner. 16-bit resolution
is su cient for most optical microscopy applications
LabVIEW compatible: example VIs, an extensive
LabVIEW tutorial, and Nano-Route
3D (an open source

LabVIEW based motion control program) are provided
with every USB enabled Nano-Drive
controller.
Easily synchronize the nanopositioning system with
other external instrumentation.
Computer waveform generation and position data log-
ging with internal memory for up to 10,000 positions.
USB interfaces can be retrot into existing Nano-
Drive
controllers.
Custom rmware available upon request.
118
Software
Nano-Route
3D
5m x 6m XY raster scan. XY plot shows the actual travel path of the nanopositioning stage
in which a single scan line increments in Y axis position after each scan across the X axis.
Mad City Labs Nano-Route
3D is a LabVIEW
based program designed to direct the motion of
nanopositioning stages with minimal program-
ming input. Nano-Route
3D is provided at no
charge with all USB interface enabled nanopositioning
systems. Programming details associated with control
of a nanopositioner are handled internally and the on-
screen displays are used to set the essential parameters
which dene the desired motion - including complex
multi-axis routines. Routes can be generated via simple
go to commands or more sophisticated point or time
based functions. Motion commands to the Nano-Drive

contoller can be issued via the single point write mode
or the waveform generation mode (single download
and storage of all data points) depending on application
requirements. A graphical display previews the generated
command route and may be edited before the route is
run. During execution of a route, Nano-Route
3D re-
tains position sensor data retrieved from the Nano-Drive

controller and displays this data graphically in a separate
Nano-Route
3D Examples
window. The graphical representation can be customized
and the data can be exported for further analysis. For
experienced LabVIEW programmers, Nano-Route
3D
can be used as a starting point for specialized control
requirements. Mad City Labs programming staff is also
available to provide modied versions of Nano-Route
3D
- contact sales@madcitylabs.com for further information
and pricing estimates. Nano-Route
3D is compatible
with Windows based PCs (XP, Vista, 7) and requires a
USB interface on the Nano-Drive
controller.
Features
LabVIEW based - open source
Easy to use graphical interface
Live position tracking
Point and time based functions
Complex multi-axis route creation
Control of pixel, line, and frame hardware clock
pulses (the Nano-Drive
TM
ISS option)
Route preview window
Graphical display of executed route (commanded posi
tions and actual position sensor data)
Position sensor data fully exportable
119
Path generation screen showing accepted path denition (green), path preview (red),
and current boundary between accepted and preview portions of the path (dot).
Path run screen showing the commanded path (green) and the actual path (blue) for a
nanopositioner doing a high speed step followed by a pause at each new position.
120
Software
Confocal image of cortical microtubules in Arabidopsis cells.
Image courtesy of Dr. Sidney L. Shaw, IUB Light Micros-
copy Imaging Center
National Instruments LabVIEW is an established graph-
ical programming language specically designed for sci-
entic measurement and control applications. Mad City
Labs USB computer interfaces are LabVIEW compatible
and come with examples which illustrate the operation of
nanopositioning stages under computer control. Often,
the LabVIEW examples are enough to allow experienced
programmers to move ahead into more complex control
schemes for specic nanopositioning applications. First
time and infrequent users of LabVIEW will nd Mad
City Labs LabVIEW tutorial a very helpful resource
to quickly understand the essential concepts and start
creating useful control software. Both the LabVIEW ex-
amples and tutorial are provided free of charge with every
USB enabled nanopositioning system.
Mad City Labs programmers are available to write cus-
tom LabVIEW vis for specic applications. Contact our
sales engineers to discuss the technical requirements of
your ideal nanopositioning control software.
LabVIEW - Examples and Tutorial
Sinewave generator vi is created in the LabVIEW tutorial.
Molecular Devices MetaMorph is an industry standard
software package for microscope automation and im-
age analysis. MetaMorph provides direct control of
Mad City Labs nanopositioning stages using Mad City
Labs digital USB computer interface in addition to the
standard analog control signals. MetaMorph integrates
high resolution nanopositioning with image acquisition
and analysis. Direct programming control of the nano-
positioning stage is handled in MetaMorph - making
knowledge of specic nanopositioning control com-
mands unnecessary.
MetaMorph
121
MediaCybernetics Scope-Pro microscope control mod-
ule works within the Image-Pro family of image acquis-
tion and analysis software to form an integrated micros-
copy software package. Scope-Pro directly controls Mad
City Labs nanopositioning systems through standard
analog control signals as well as the optional Nano-
Drive
USB digital computer interfaces.

Image-Pro with Scope-Pro
Manager is a widely accepted open source software
package for controlling microscopes and for image
acquisition. Manager combined with ImageJ, a popu-
lar open source image processing and analysis package,
forms a powerful and adaptable research tool with an
active community of users. Mad City Labs contributed
adapters (specialized control software) to Manager to
provide direct control of Mad City Labs nanoposition-
ing and micropositioning stages. All software can be
downloaded directly from the Manager and ImageJ
websites:
http://www.micro-manager.org/
http://rsbweb.nih.gov/ij/
Manager & ImageJ
Confocal image of pancreatic islet cell.
Image courtesy of Dr. David Piston and Dr. Steven Head,
Vanderbilt University
Intelligent Imaging Innovations (3i) latest digital
microscopy software, Slidebook 5.0, provides analog
motion control signals for single axis and XY-axis
nanopositioning systems.
Slidebook 5.0
With all USB enabled Nano-Drive controllers, Mad
City Labs provides full access to Madlib.dll, a language
independent DLL which implements an API for com-
municating with all Nano-Drive
products. It may be
used by any programming environment that has support
for importing C functions; e.g. C++, Matlab, Python;
and gives the user the ability to customize their instru-
mentation control. A basic example is provided which
demonstrates how to access Madlib.dll.
C Based Programming Support
122
Accessories
Sample holders - standard models for typical biological samples or custom designed for unique applications.
Stage mounting - standard mounting plates for microscopes as well as custom mounting for vertical and
horizontal orientations.
Work directly with Mad City Labs' design engineers to create the accessories needed for your experimental
setup at minimal additional cost.
Avoid in-house machine shop delays
Microscope Mounting Adapters
Mount nanopositioners directly onto microscopes without a
coarse positioning stage
Olympus IX inverted microscope series mount for the
Nano-LP Series and Nano-Bio Series
Olympus IX series, Zeiss Axiovert, and Leica DMI inverted microscope mount for the
Nano-LP Series, Nano-Bio Series, and 2-axis Nano-T Series.
Olympus IX inverted microscope series mount for the Nano-H Series
123
Biological Sample Holders
Re-entrant coverslip holder
Re-entrant 2 inch slide or coverslip holder
Re-entrant petri dish holder
3 inch slide holder
Compatible with 2.6 x 2.6 aperture stages
Compatible with the Nano-Z500
Note: These designs can be modifed to ft other stages
35mm petri dish adapter
Coverslip adapter
Multiwell plate holder
Top mount 3 inch slide holder
Compatible with Nano-BioS
and Nano-LPS Series stages
Re-entrant 3 inch (75mm) slide holder
Re-entrant 35mm petri dish holder
124
More Accessories
Objective Lens Extender Tubes
Te position of the microscope objective lens relative to
the sample is quite important. Adding a nanoposition-
ing stage to an existing microscope may raise the sample
location if a re-entrant sample holder is not used (see Ac-
cessories pages). In some situations it may be preferable
to raise the objective lens to match the new sample loca-
tion. Mad City Labs oers standard lens extender tubes
with both RMS (Olympus, Zeiss, Leica) and M25-0.75
(Nikon) threads. RMS standard lengths are 10mm and
20mm. M25 standard lengths are 6.34mm (0.25 inch)
and 12.67mm (0.5 inch).
RMS threaded lens extender tubes.
M25-0.75 threaded lens extender tubes.
Nano-Drive and Micro-Drive Rack Mount Kits
Nano-Drive and Micro-Drive controllers can be
mounted into standard equipment racks by attaching
optional rack mount kits. All Mad City Labs controllers
t into the industry standard 2U height (3.47 inches).
Multi-axis Nano-Drive controllers and the Micro-
Drive controllers are the full rack width and can be
mounted with narrow brackets. Single axis Nano-Drive
controllers are one half rack width and use extended
mounting brackets. Rack mount kits are optional ac-
cessories that can be ordered with complete systems or
purchased separately by contacting Mad City Labs.
125
Joystick Nanopositioner Control
NanoControl, a new LabVIEW based program written
by Mad City Labs, provides manual motion control of
multi-axis nanopositioning stages using a Logitech wire-
less gamepad. Gamepad joysticks and buttons are user
congurable and can be setup to suit the nanoposition-
ing application. Te nanopositioners rate of accelera-
tion is easily set with an on-screen control knob. On-
screen position readouts show the stage location in every
axis of motion. Communication with the Nano-Drive
controller takes place over its USB interface. NanoCon-
trol is an executable LabVIEW program that operates
on any Windows based PC and is available at no charge
with every USB enabled nanopositioning system.
Joystick MicroStage Control
Te new LabVIEW based program, MicroControl, pro-
vides manual motion control of Mad City Labs motor-
ized MicroStage by use of a Logitech wireless gamepad.
Gamepad joysticks and buttons are user congurable and
can be chosen to suit the specic application. An on-
screen control panel shows the stage position as measured
by the MicroStage high resolution linear encoders. Stage
speed of motion can also be easily set with the Micro-
Control displayed parameters. For precise displacements,
specic stage motions can also be input numerically -
bypassing the joystick controller. MicroControl source
code is provided for experienced LabVIEW program-
mers who may wish to modify the vi code. MicroCon-
trol is also provided as an executable program for users
who do not own LabVIEW. MicroControl is compat-
ible with all Windows based PCs and is available at no
charge for all USB enabled Micro-Stage systems.
126
Custom Systems
From simple modications of existing designs to com-
pletely custom projects, Mad City Labs engineering team
has the capability to quickly provide unique nanoposi-
tioning systems for specialized requirements. In-house
research scientists with extensive experience in UHV
instrumentation, optical spectroscopy, and nanotechnol-
ogy can provide the real-world advice and assistance to
move a project from concept to reality. Generally, this
work is done without NRE charges and without any re-
quirements for multiple unit orders. Whether you need
a special physical conguration, expanded or reduced
range of motion, compatibility with environmental con-
ditions, or special materials, a short discussion with our
technical sales sta and engineers will quickly reveal the
feasibility of a custom solution.
Custom Solutions
Fast delivery without added design costs
Interface with staff scientists who have direct research experience
In-house CNC fabrication under direct control of designers
Specialty materials
UHV expertise
OEM designs with customized or board level controllers
127
Design Parameters
Axes of motion needed?
Range of motion for each axis?
Required speed of motion?
Dimensional limitations?
Center aperture?
Environmental conditions (UHV, magnetic elds, etc.)?
USB computer interface needed?
Coarse positioning needed?
Mass of attached components which must be moved?
128
OEM Systems
Mad City Labs has proven expertise in designing and
producing custom nanopositioning systems for integra-
tion into a wide variety of technical products. In-house
design physicists with extensive technical instrumentation
experience combined with in-house CNC machining and
assembly allow Mad City Labs to go from concept to rst
prototype in approximately 30 days. In some situations,
custom rmware and dlls developed by Mad City Labs
programming sta can speed up nal product develop-
ment by incorporating special motion proles into the
OEM Nano-Drive controller. Although this catalog
gives an overview of the types of nanopositioning systems
commonly produced by Mad City Labs - please keep in
mind that 50% or more of our production is dedicated to
OEM designs which are sold under other company names
and are not shown on our catalog pages. Whether you
have an annual requirement for hundreds of systems or
only a few, Mad City Labs can provide a prompt quota-
tion and immediate help with custom nanopositioners
designed to t the application.
OEM Partnerships
Custom, proprietary designs without engineering charges
Prototype systems available for performance testing
Brand labeling and custom controller packaging available at no extra charge
Annual blanket order discount pricing with scheduled monthly deliveries
Board level OEM controllers available for integration into larger systems.
Custom system rmware and dll's can be provided for specialized USB digital control
Examples
Note: OEM agreements prevent use of nanopositioner photographs
Z-axis stage inserts

100m, 200m, 500m ranges of motion

Customized dimensions and mounting

Custom aperture sizes

Custom sample holders
Heavy duty, single axis nanopositioners

100m, 200m, 500m ranges of motion

Move loads up to 20 kg

Withstands of-axis torque loading

Sensor head and machine tool positioning

129
More Examples
Note: OEM agreements prevent use of nanopositioner photographs
High speed, high resolution laser scanners

2 milliradians to 10 milliradians of motion

Mirrors up to 2 diameter can be mounted

Objective lens nanopositioners

100m, 200m, and 450m ranges of motion

Higher resolution and lower cost than competition

FEA designed to produce exceptionally low of-axis errors
Long range, single axis nanopositioners

Up to 500m range of motion

High resolution

Highly linear motion, low of-axis errors

Long range, multi-axis nanopositioners for microscopy

Ranges of motion up to 300m

High resolution

Low height stages for convenient sample placement

130
Notes on Nanopositioning
General Application
Nanopositioning systems are useful for any application
which demands precision and reproducibility at the nano-
meter or even sub-nanometer level. These applications
include numerous types of microscopy, nano-alignment,
and optical positioning.
Piezo Actuator
Nanopositioning systems are driven by multilayered piezo
actuators. These actuators are made from PZT ceramic
which expands in proportion to the applied voltage. The
expansion is nearly linear, but hysteresis (~8%) and creep
(~1%) are problems. As the PZT expands, it also twists
and corkscrews. These sources of positioning errors must
be eliminated by use of exure stages, integrated position
sensors and closed loop control systems.
True Flexure Guided Motion
To overcome the problems associated with PZT actuators,
all Mad City Labs nanopositioning systems use electri-
cal discharge machined exure stages. Flexure stages are
unique in that they provide frictionless motion restricted
to a single axis. This effectively decouples the unwanted
motions in the PZT actuators and results in a pure linear
translation. Mad City Labs uses nite element analysis in
the design process to ensure proper exure performance.
Resolution
Since there is no quantum principle affecting the lat-
tice spacing in PZT actuators, the step resolution of our
nanopositioning stages is dependent only on the resolu-
tion of the input voltage to the Nano-Drive
limited
by the combined position sensor and driver electronics
noise level. See Precision on next page.
Closed Loop vs. Open Loop
In open loop mode, the driver determines the motion
of the nano-stage simply by amplifying the input volt-
age. The position of the nanopositioning stage includes
errors due to creep and hysteresis. In closed loop mode,
the input voltage is compared to the output voltage from
a position sensor. Using a proportional-integral feed-
back loop, the driver output is continuously adjusted
so that the sensor signal matches the input signal to the
driver. Since the sensor signal is proportional to the
absolute position, the position of the stage is linear with
respect to the driver input voltage. The effects of creep
and hysteresis are eliminated.
Piezoresistive Position Sensors
All Mad City Labs nanopositioning systems use ultra
sensitive, temperature compensated, piezoresistive net-
works for position measurement. Called the Mad City
Labs sensor technology, this proprietary design
provides step resolutions down to 0.01nm and a posi-
tioning linearity of better than 0.05% without correc-
tions. See Precision on the next page.
Response and Speed
Mad City Labs nanopositioning systems are designed
to operate at a variety of speeds. The usable bandpass is
typically 1/10 of the stages specied resonant frequency.
Load Capacity
The load capacities listed in the catalog are conservative.
Much larger loads can be moved but special care must
be taken since the added moving mass effectively lowers
the resonant frequency of the stage. If your application
requires a large moving load it would be benecial to
discuss the details with our engineering staff.
the design process to ensure proper exure performance.
Finite element analysis of a basic exure design showing
areas of high stress during stage motion.
131
Measured non-linearity is less than 0.05%. Nonlinearity
correction techniques such as look up tables and high order
polynomial ts are not needed to produce highly linear mo-
tion with Mad City Labs systems.
Precision
The accuracy and reproducibility of any piezo actua-
tor driven nanopositioning stage depends primarily on
the linearity and sensitivity of the stage. The linearity
and sensitivity of a stage are different depending on
the operation mode, open or closed loop. When oper-
ated in the open loop mode, the hysteresis and creep of
the piezo actuator determine the non-linearity, which
is typically 8% or more. This non-linearity is due to
uncorrected hysteresis in the piezoactuator. Linearity
is greatly improved when operating in the closed loop
mode. In closed loop operation, a control circuit com-
pares the input signal to a signal from a position sensi-
tive detector. The control circuit continuously adjusts
the driver voltage to ensure that the input signal matches
the position signal. The linearity of a nanopositioning
stage, when operated in closed loop mode depends on
the linearity of the position sensitive detector - not the
piezo actuator. Mad City Labs nanopositioning stages
use semiconductor piezoresistive networks for position
sensing. These detectors have a linearity of better than
0.05%. The closed loop linearity of a Mad City Labs
nanopositioning stage is shown below. The measured
linearity matches that of the sensors and is better than
0.05%.
Linearity
Linearity of Piezo Resistive Sensor
0
0.01
0.02
0.03
0.04
0.05
0.06
0.07
0 20 40 60 80 100
Position (microns)
N
o
n

L
i
n
e
a
r
i
t
y

(
%
)
Reverse Forward
Newly developed tests show that Mad City Labs closed
loop nanopositioning systems are capable of providing
picometer level positioning. Position noise, the lower
limit on controllable motions, can be thought of as
the true positioning resolution of a nanopositioning
system. Position noise is the sum of all unwanted
(but unavoidable) noise in the complete system - the
electronic control system as well as the position sensors
inside the stage. While the overall concept is simple,
actual experimental determination of picometer level
position noise requires an indirect approach. Mad
City Labs test procedure uses the nanopositioners own
internal position sensors to provide the necessary noise
data. Since the internal piezoresistive position sensors
provide analog signals which track the real-time position
of the stage, it is possible to compare a calibrated motion
created by a reference signal to the general background
resulting from system noise. An FFT plot of the position
sensor signal clearly shows a spike which matches the
frequency of the sinewave reference input and low
amplitude background noise which is the summation
of all system noise sources. Since the amplitude of the
reference signal is known, the amplitude of the position
noise can be easily computed.
Position noise plot for the X-axis of a Nano-LP100 nanoposi-
tioning system. The reference sinewave input is 3.5nm peak-
to-peak at 7 Hz, the noise oor is 0.03nm (30 picometers).
132
Worldwide Sales
Main Ofce
United States & countries without listed
sales representation
Mad City Labs, Inc.
2524 Todd Drive
Madison, WI 53713
Tel: 608 298 0855
Fax: 608 298 9525
Email: sales@madcitylabs.com
www.madcitylabs.com
Sales Representatives
Australia & New Zealand
Lastek Pty Ltd.
Freecall: 1 800 88-2215 or 61 (0)8 8443-8668
NZ Freecall: 0 800 441 005
Fax: 61 (0)8 8443-8427
Email: sales@lastek.com.au
www.lastek.com.au
China
Beijing Oplan Science and Technology
Development Co. Ltd.
Tel: 86 (10) 6262 3871
Mobile: 1 300 118 4981
Other: 1 361 119 6791
Fax: 86 (10) 6261 6041
Email: oplan@263.net
France
Optoprim
Tel: +33 (0) 1 4190 6180
Fax: +33 (0) 1 4190 6189
Email: info@optoprim.com
www.optoprim.com
Israel
PAZAM-TECH (1991) Ltd
Tel: 972 2 583 2511
Fax: 972 2 583 2512
Email: pazam-tech@pobox.com
www.pazam-tech.co.il
Italy
FLAMAR
Tel: +39 (0) 2 3652 4556
Fax: +39 (0) 2 3652 5244
Email: claudio_bellotti@fastwebnet.it
www.amarweb.it
Japan
E&T Corporation
Tel: 81-22-239-3404
Fax: 81-22-290-9296
Email: sales@eandt.jp
www.eandt.jp/2_nanopositioners.htm
Korea
Solupam
Tel: +82 42 824 8580
Fax: +82 42 367 0680
Email: pam@solupam.com
www.solupam.com
Mexico & South America
Valley Research Corporation
Tel: +1 512 453 0310
Fax: +1 512 453 0547
Email: rodolfo@valleyresearch.com
www.valleyresearch.com
Singapore
Acexon Technologies Pte. Ltd.
Tel: 65 6565 7300
Fax: 65 6565 7005
Email: sales@acexon.com
www.acexon.com
Spain & Portugal
Valley Research Iberica
Tel: +34 91 377 5432
Fax: +34 91 377 5432
Email: pablo@valleyresearch.com
www.valleyresearch.com
Taiwan
Pretek Co., Ltd.
Tel: 886 2 8941 1372
Fax: 886 2 2945 3987
Email: pretek@ms67.hinet.net
United Kingdom & Ireland
Elliot Scientic, Ltd.
Tel: +44 1582 766300
Fax: +44 1582 766340
Email: sales@elliotscientic.com
www.elliotscientic.com
European Ofce
All European countries except those with sales
representatives listed below
Mad City Labs GmbH
Balz Zimmermann-Str. 7
CH-8302 Kloten
Switzerland
Tel: +41 43 813 30 25
Email: sales@madcitylabs.eu
www.madcitylabs.eu
133
1. Price. Quoted prices on the products are exclusive of all sales, excise and other taxes, and
exclusive of freight, installation, handling and storage charges, any or all of which, as appli-
cable will be added to the invoice as a separate charges to be paid by the Buyer or otherwise
charged as indicated in these Terms and Conditions. Prices are effective for all purchase
orders received from Buyer within 30 days of the date of Mad City Labs, Inc.s formal price
quotation, and thereafter subject to changes. Mad City Labs, Inc. reserves the right to
increase prices in cases where modications requested by the Buyer give rise to additional
costs. Verbal price estimates are not binding.
2. Payment Terms. Buyer agrees to pay the total amount shown as due on each invoice
within 30 days after the date of such invoice notwithstanding any repairs, corrections or
adjustments that may have to be made. Special (custom) orders for products pursuant to
Buyer specications, are subject to payment of 50% of quoted price at time of acceptance
of purchase order. Invoices will be dated as of date of shipment except if products are
stored at Buyers request for more than 30 days beyond completion of their manufacture,
in which case, invoices will be dated as of the date of product completion. Mad City Labs,
Inc. shall reserve the right to charge interest at a rate not in excess of 18% per annum (but
in no event more than the amount permitted by applicable law) upon any sum not paid by
the due date. Mad City Labs, Inc. shall be entitled to collect from Buyer for all expenses of
collection, including attorneys fees.
3. Delivery. Terms shall be FOB Mad City Labs, Inc. premises, Madison, Wisconsin, for
delivery by Federal Express (or similar carrier) with all freight charges, including special
handling charges of carrier, paid by Buyer. Buyer shall bear all risk or loss or damage upon
delivery of products to carrier at point of shipment, Madison Wisconsin.
4. Delays. Mad City Labs, Inc. is not liable for any delay in the performance of orders or
contracts, or in the delivery or shipment of products, or any damages suffered by Buyer by
reason of such delay, when such delay is , directly or indirectly, caused by or in any manner
arises from, res, oods, earthquakes, accidents, Acts of God, governmental interference
or embargoes, strikes, labor difculties, shortage of labor, fuel, power, materials or sup-
plies, transportation delays or any other cause or caused beyond its control. All orders or
contracts are given and accepted with the understanding that they are subject to Mad City
Labs, Inc.s ability to obtain materials from manufacturers and suppliers and are subject to
manufacturing schedules and government regulations that may be in effect from time to
time. Failure to meet a delivery date shall not give cause to either cancellation of the order,
or liability on the part of Mad City Labs, Inc. Mad City Labs, Inc. may elect to make
partial shipments.
5. Title. Upon issuance of Buyers purchase order and Mad City Labs, Inc. acceptance
thereof, Buyer thereby shall be considered to have granted to Mad City Labs, Inc. a security
interest in all products delivered to secure the payment of invoiced amounts due. Buyer
agrees to execute and deliver to Mad City Labs, Inc., upon request, UCC nancing state-
ments and other documents reasonably requested by Mad City Labs, Inc. to perfect its
security interest in the products.
6. Cancellations and Change Orders. Accepted purchase orders can be cancelled or
changed only with Mad City Labs, Inc.s written consent and upon terms that will
indemnify Mad City Labs, Inc. against all losses, costs and damages it sustains directly or
indirectly related to the cancellation or change. All special orders are non-cancellable and
non-changeable. A restocking fee of 100% of the purchase price is applicable to all invoiced
orders.
7. Inspection and Rejection. All products shall be examined by Buyer upon receipt of
Buyer. If products are damaged upon receipt or do not conform to agreed specications,
products shall not be moved from point of delivery, and a written claim must be led with
Mad City Labs, Inc. within 5 business days of date of delivery. Upon receipt of a written
claim for damaged or nonconforming products, Mad City Labs, Inc. will notify Buyer in
writing if products are to be returned, or if products will be repaired or if a credit will be
issued. Whether products are returned or repaired or whether a credit is issued, is within
Mad City Labs, Inc.s full and complete discretion, subject to the limited warranty set forth
below, and shall be Buyers sole remedy at law or equity.
8. Limited Warranty: Disclaimer. Mad City Labs, Inc. warrants that for a period of 1 year
following the date of delivery to Buyer Mad City Labs, Inc. products shall conform to the
specications, drawings or other written descriptions contained in any purchase order and
shall be free from defects in material and workmanship. This limited warranty applies to
the initial purchaser only and may be acted upon only by the initial purchaser. Buyers sole
remedy and Mad City Labs, Inc.s exclusive liability for a breach of this limited warranty
shall be, at Mad City Labs, Inc.s option, the repair or replacement of the nonconforming
product or part thereof. This limited warranty does not cover normal wear and tear and
shall not apply to any product which has been damaged or misused or modied, altered or
repaired by any party other than an authorized representative of Mad City Labs, Inc.
Terms and Conditions of Sale
THE FOREGOING LIMITED WARRANTY IS IN LIEU OF ANY OTHER WARRANTY,
WHETHER EXPRESS OR IMPLIED, WRITTEN OR ORAL (INCLUDING ANY WAR-
RANTY OF MERCHANTABILITY, FITNESS FOR A PARTICULAR PURPOSE, TITLE
OR NON-INFRINGEMENT.)
9. IN NO EVENT SHALL MAD CITY LABS, INC. BE LIABLE TO BUYER FOR
SPECIAL, INCIDENTAL, CONSEQUENTIAL, EXEMPLARY, PUNITIVE, OR OTHER
INDIRECT DAMAGES, OR FOR LOSS OF PROFITS, LOSS OF DATA OR LOSS OF
USE DAMAGES, ARISING OUT OF THE MANUFACTURE, SALE, SUPPLYING OR
FAILURE OR DELAY IN SUPPLYING OF THE PRODUCTS OR THE SERVICES
RELATED THERETO, WHETHER BASED UPON WARRANTY, CONTRACT, TORT,
STRICT LIABILITY OR OTHERWISE, SHALL NOT EXCEED THE PRICE PAID FOR
THE PRODUCT.
10. Controlling Provisions. To the extent there is a conict between these Terms and
Conditions of Sale and Buyers purchase order, these Terms and Conditions of Sale shall be
controlling.
11. Termination. Each purchase order issued by Buyer in connection with Mad City Labs,
Inc.s quotation is subject to acceptance by Mad City Labs, Inc. If Buyer defaults in the
payment of any sum due Mad City Labs, Inc. or commits any other breach of any of the
terms or conditions herein or if there is a material change in the ownership or nancial
conditions of the Buyer which is considered unsatisfactory to Mad City Labs, Inc., then
Mad City Labs, Inc. may, without prejudice to any other rights which may have accrued
or which may accrue to it, whether under contract or at law or equity, refuse to accept any
purchase order and may terminate any order immediately.
12. Governing Law. Any contract between the parties shall be construed and governed in
accordance with the laws of the State of Wisconsin.
13. Mad City Labs, Inc.s Property. All specications, drawings, tools, jigs, dies, xtures,
materials, equipment and other items furnished by Mad City Labs, Inc., or the cost of
which is charged against this order shall be condential and shall be and remain the prop-
erty of Mad City Labs, Inc.. The sale of products by Mad City Labs, Inc. to Buyer shall not
be construed as a license of any trade secret right, trademark, patent or copyright.
14. Patents. The Buyer agrees to defend, indemnify and hold Mad City Labs, Inc. and
its distributors and dealers in, and users of the products of Mad City Labs, Inc. harmless
against any and all losses, damages or liabilities arising out of any demand, claim, action,
litigation or judgement (each, a Claim) involving infringement or alleged infringement of
the U.S. and/or foreign patent by any product furnished hereunder.
15. Patent Rights. Patent rights to all improvements embodied in products, designs, tools,
patterns, drawings, information and equipment supplied by Mad City Labs, Inc. under this
contract and exclusive rights for the use and reproduction thereof are reserved by Mad City
Labs, Inc.
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Labs, Inc., related documentation, specications and any other papers accompanying
purchase orders as the condential information (Condential Information) of Mad City
Labs, Inc. and shall not disclose such Condential Information other than to its employees
and agents who need to know such information and who are informed of the condential
nature of such information. In addition, Buyer agrees not to incorporate or permit its
afliates to incorporate any features of design or construction peculiar to the products sup-
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resale of any product furnished under this Agreement that violates any third partys trade
secrets, proprietary information, trademark, copyright or patent rights.
18. Errors. Any stenographic or clerical errors contained on the face hereof are subject to
correction by Buyer.

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Series -- -- -- -- -- -- -- -- -- -- -- -- -- pages 94-95

Series -- -- -- -- -- -- -- -- -- -- -- -- pages 116-117

/M 100-3 System with optional breadboard assembly.

300-3 mounted on a Nikon inverted microscope. Optional bread-

system. A standard USB port allows direct connection of the

controller (see Nano-

section of catalog) operates the nanopositioning portion of the Nano-

system. Both controllers are LabVIEW compatible.

nanopositioner with 5nm optical sensor system

system. Microscope focus drift is corrected by moving

is an ultra high precision, single axis,

into the eld for on-site

as easy to use as standard

Series of controllers are complete

controllers include low noise, low drift

models provide standard analog control

is also available in circuit board form for OEM or

3D (an open source

USB digital computer interfaces.

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