Optical Measuring

MICROSCOPE UNITS AND OBJECTIVES

( UV, NUV, VISIBLE & NIR REGION )

CATALOG No. E4191-378

Microscope viewing units and objectives for practically every application

Many of todays ultra-microscopic manufacturing technologies require sub-micron accuracy. Mitutoyo produces microscope systems with advanced features that combine optical and precision measurement technologies developed by us over a long period of time. Mitutoyo microscopes can be integrated into manufacturing systems, research and development equipment, and product inspection lines. Contact your nearest Mitutoyo Sales Office for further details on standard product specifications as well as custom-designed microscopes to best fit your application.

Ref.: Microbio-World Ver.7, (http://elfe.miyakyo-u.ac.jp/opac/2008/03/cd_2.html)

A wealth of Applications

System with digital camera

Digital microscopic system using VMU-V

System for IR analysis/inspection

By installing a digital camera on a microscope the VMU provides a simple and compact system which allows microphotography and simultaneous external monitor observations. The VMU can be used in vertical and inverted positions according to your application requirements. > Microphotography and observation of metallic, resinous and printed surfaces > Micro-fluid analysis > Cell and microorganism observation/analysis Dual-camera systems featuring high and low magnification and differential interference observation are also available.

Optical systems using Mitutoyo M Plan Apo NIR objectives that cover a wide range of wavelength from visible to infrared are providing solutions on the production line and in the laboratory. Nondestructive inspection is made possible by using an infrared source. > Micro-fluid analysis > Thickness measurement of LCD thin-film and silicon board film > Internal inspection/analysis and 3D evaluation of MEMS devices > Internal observation of IC packages, void inspection/evaluation of wafer junctions, spectral characteristics analysis using infrared >Femtosecond laser applications

Systems for laser applications

System for dual-camera (high & low magnification) observation

2/3 Camera (low magnication) 1/2 Camera (high magnication)

Flaking of polyimide membrane

UV laser application using VMU-L4B

By mounting two Cameras on VMU-L you can observe the same area at different magnifications simultaneously.
SEM photograph of IC surface after removing upper layer

System for analysis

UV laser application using FS70L4

Color filter working

Microscope unit and objectives compatible with YAG lasers (1064nm, 532nm, 355nm and 266nm) allow high precision and quality working. > Peeling off protective films and organic thin-films > Cutting of IC wiring (Au, Al) and exposure of lower layer pattern > FPD defects repair > Photomask repair > Marking, trimming, patterning, spot annealing and scribing
Ref: V Technology Co., Ltd.

Probe (positioner tip)

The Mitutoyo M Plan Apo objectives provide a long working distance. This allows you to design an optical system for defects evaluation of semiconductor integrated circuits and precise repair with YAG lasers. The optical system for direct observation is also available.
4

Contents
Video Microscope Unit VMU 6 Fine Scope Unit

FS70

10

Zoom Video Microscope Unit VM-ZOOM 14 Objectives for Bright Field (long working distance) M Plan Apo/M Plan Apo HR 16 Objectives for Bright Field (ultra-long working distance) M Plan Apo SL 17 Objectives for Bright Field (with glass-thickness compensation) G Plan Apo 17 Objectives for Bright/Dark Field (long working distance) BD Plan Apo/BD Plan Apo HR 18 Objectives for Bright/Dark Field (ultra-long working distance) BD Plan Apo SL 19

M Plan Apo NIR/M Plan Apo NIR HR

Near-infrared Objectives for Bright Field

20

Near-infrared Objectives for Bright Field (with glass-thickness compensation) LCD Plan Apo NIR 20 Near-ultraviolet Objectives for Bright Field

M Plan Apo NUV/M Plan Apo NUV HR 21

Near-ultraviolet Objectives for Bright Field (with glass-thickness compensation) LCD Plan Apo NUV 21

M Plan UV

Ultraviolet Objectives for Bright Field

22

Tube lens MT 23

ML/CF

Objectives for Measuring Microscopes

24

Wide field of view Eyepieces & Reticles WF/UWF 25 Optional accessories of VMU, FS70 and VM-Zoom

Stand Stage Illumination Unit 26 Dimensions 27 Glossary 30

Video Microscope Unit VMU

VMU-V

VMU-H

VMU-LB

VMU-L4B
*Objectives shown mounted on tubes are optional.

Features

> Small, lightweight microscope unit designed for a camera observation system Suitable for observing a wide range of objects: metal, resin, printed surfaces, minute mechanisms, etc. > Compatible with YAG lasers (1064nm, 532nm, 355nm and 266nm) Suitable for cutting, trimming, repair and marking of IC wiring (Au, Al), removing and processing thin-film (insulating film) and repair of color filters (defects repair). > Compatible with infrared optical system Available for internal observation of IC packages and spectral characteristics analysis using an infrared source and camera. > Standard of telecentric reflective illumination system with aperture diaphragm This is the best illumination system for image processing applications (e.g. dimension measurement, form inspection and positioning) which require even lighting. > Extending the VMU series with high rigidity/performance VMU-LB and VMU-L4B models. > Available for dual-camera (high & low magnification) observation (VMU-LB and VMU-L4B).

Specifications
Model No. Order No. Camera mounting orientation Observation Optical features Camera port Mount Tube lens (correction range) Optical tube Optical features Laser port Mount Suitable YAG laser type*2 Polarizer*1 For observation Suitable objective (optional) For laser cutting VMU-V 378-505 Vertical BF, erect image VMU-H VMU-LB VMU-L4B 378-506 378-513 378-514 Horizontal Vertical (rotatable) Vertical (rotatable) BF, inverted image BF, erect image Magnification: 1X; Wavelength (): visible radiation C-mount with centering and parfocal adjustment and green filter C-mount (centering and parfocal adjustment) switch 1X (visible - NIR) 1X (NUV - visible - NIR) 1X (UV - visible - NIR) Magnification: 1X Magnification: 1X : 355/532/1064m : 226/355/532/1064m With parfocal adjustment Fundamental, second and third- Fundamental and second, third harmonic mode and fourth-harmonic mode Available for observation and Available for observation and Available for observation laser applications laser applications M Plan Apo/HR/SL, G Plan Apo M/LCD Plan Apo NIR, M/LCD Plan Apo NIR, M/LCD Plan Apo NUV, M/LCD Plan Apo NUV M Plan UV 2/3 or smaller C-mount compatible type Telecentric reflective with aperture diaphragm 12V/100W (378-700D), 12V/150W (178-316D) 650g 750g 1270g 1300g

Suitable camera Optical system illumination Fiber-optic illuminator (optional) Mass (Dimensions: Refer to page 27.)

*1: M Plan Apo 1X objective should be used together with the polarizer (378-710 or 378-715). *2: When mounting a laser, ensure all safety precautions are observed and be aware of laser output power, beam energy density and the unit's weight. Please consult Mitutoyo if in doubt.

System diagram

C-mount compatible analog camera or digital camera Example: ImageX PRO 3000 Third-party YAG lasers*5 Fixed-magnication monitoring camera mount (378-087) P.8 *4

2X TV adapter unit (378-703)

0.5X TV adapter unit *1 (378-704) P.8

VMU-V (378-505)

VMU-H (378-506)

VMU-LB (378-513)

VMU-L4B (378-514)

Polarizer (378-710) P.8

Manual turret nosepiece unit (for BF) *2 (378-707) P.8 Quad

Self-aligning motorized turret nosepiece unit (for BF) *3 (378-713) P.8 Quintuple

Polarizer (378-715) P.8

Fiber-optic illumination unit 100W (378-700) Objectives M Plan Apo series (for observation): All types on P.16 to 17 G Plan Apo series (for observation): All types on P.17 M/LCD Plan Apo NIR series on P.20 (for fundamental/second harmonic laser machining): Used for LB (for near-infrared observation): Used for V/H/L M/LCD Plan Apo NUV series on P.21 (for second/third harmonic laser machining): Used for LB M Plan UV series on P.22 (for second/fourth harmonic laser machining): Used for L4B Focusing unit A (378-705) P.8 Focusing unit B *2 (378-706) P.8

150W (176-316) P.26 Filters (for ber-optic illumination unit No.378-700) 12AAB251 12AAB252 12BAA583 12BAA584 ND2 ND8 GIF LB80

Transmitted light unit (378-736) P.26

Simple stand (378-730) P.26

Fiber-optic illumination unit 100W (378-700)

X-Y stage (5050mm) (378-020)

Third-party motorized X-Y stages (5050mm)*6

*1: Compatible with 1/2-inch or less C-mount cameras. *2: Use focusing unit B (378-706) if the distance between the mounting position and VMU main unit is desired to be as small as possible. If the manual turret nosepiece unit (378-707) is used concurrently, mount the unit in front of the VMU main unit. For details on mounting position, refer to the gures on page 9. *3: This turret nosepiece unit cannot be used with focusing unit B (378-706). For details on mounting position, refer to the gures on page 9. *4: Use this mount when mounting a C-mount camera using the laser port. Use this mount for 2/3-inch or smaller cameras. *5: Mitutoyo does not handle these lasers. Consult Mitutoyo for more information. *6: An adapter may be required when mounting any of these stages. Consult Mitutoyo for more information.

150W (176-316) P.26 Filters (for ber-optic illumination unit No.378-700) 12AAB251 12AAB252 12BAA583 12BAA584 ND2 ND8 GIF LB80

P.26

Optional Accessories for VMU

Manual turret
Has 4-objective mounts and can be fixed in the desired position relative (inward, outward, etc.) to the mounting surface.

Power turret
Has 5 objective mounts and can be fixed in the desired position relative (inward, outward, etc.) to the mounting surface.

Order No. Observation method No. of objective mounts Mass

378-707 Bright field 4 780g

Console box

Installed on VMU-V with optional objectives Installed on VMU-V with optional objectives

Focus unit A and B

Manual focus units for the VMU. An optional stand (378-730) and XY stage (378-020) are provided to be used in combination. A power focus unit is also available. Refer to page 12.
Focus unit A mounted on VMU-V with an optional objective

Order No. Observation method No. of objective mounts View field adjustment Positioning accuracy Durability (life-time) Drive method Power supply Output interface Cable length Dimensions (WxHxD) and mass

378-713 Bright field 5, with centering adjustment 0.5mm 2=3m 1 million repositioning operations DC motor AC100V - 240V, 10W RS-232C* for external PC control 3m Turret: 130x47x186mm, 1.8kg, Console box: 108x63x176mm, 810g

*Optional RS-232C Cable: 12AAA807

Polarizer
Provides simplified polarized light observation. Also enhances contrast of low-magnification objectives. 378-710: For VMU-V and VMU-H 378-715: For VMU-LB and VUM-L4B

Order No. Travel range Coarse/fine feed Loading capacity Mass

Focus unit A 378-705

Focus unit B 378-706

50mm Coarse: 3.8mm/rev., Fine: 0.1mm/rev. Approx. 17.4kg Approx. 17.7kg 2.9kg 2.7kg

TV adapter unit
C-mount adapters for changing to a higher or lower magnification.

No.378-710

No.378-715

Installed on VMU-L4B

2X TV adapter unit

0.5X TV adapter unit

Order No. Order No.

378-710 378-715

VMU-V VMU-H VMU-LB VMU-L4B

Order No. Magnification Suitable camera Mass

2X TV adapter unit 378-703 2X 2/3 or smaller type 25g

0.5X TV adapter unit 378-704 0.5X 1/2 or smaller type 25g

Camera mount
Can be attached to the laser mount (VMU-LB and VMU-L4B) for dual-camera system. It is compatible with 2/3 or smaller C-mount cameras.
378-087 Mass: 180g

Dimensions of Optional Accessories for VMU Series

27 27

Manual turret
distance) 27 95 (Parfocal95 (Parfocal distance) 76 27 27 27 76 32 32

MAX 130* 76.5 MAX 130* 27 76.5 27

MAX 78* MAX 78* 27 95 76 95 76 (Parfocal(Parfocal 27 27 27 27 distance)distance) 27

Power turret
M200.5 76
(Parfocal distance) 32

27 27

27 27 27 27 76
(Parfocal distance)

27
(Parfocal distance)

M200.5 76
Workpiece surface

27 95

53.7

Mount unit Mount unit Workpiece

surface Workpiece surface

(Parfocal distance) 32

76

95

95

Workpiece surface

* Where M Plan Apo 100X (378-815) is used

53.7

88.6

Workpiece When mounting the turret on VMU-V or VMU-H surface

88.6

Note 1: The lens mount * Where M Plan Apo 100X (378-815) is used must be removed from VMU. Note 2: The turret can be fixed in the desired position relative (inward, outward, etc.) to the MAX 77* MAX 126* mounting surface. (VMU-H only) 108 78
MAX 126* 78 27
distance) 76 95 (Parfocal95 (Parfocal distance) 27 27 27 27 76 32 32

When mounting the

Note 1: The lens mount must be removed from VMU. Note 2: The turret can be fixed in the desired position relative (inward, outward, etc.) to the mounting surface. (VMU-H only)
27 27 27 27 41.5 27 M200.5
(Parfocal distance) 32

136 87 Workpiece surface MAX78* MAX130* * Where M Plan Apo 100X (378-815) is used 136 87 Workpiece surface MAX78* MAX130* turret on VMU-V or VMU-H * Where M Plan Apo 100X (378-815) is used

MAX 77*

95

Workpiece surface

108

27
27 27 27 27 76 76
(Parfocal distance) (Parfocal distance)

27 27 27 27 27 76 27

27

27 27

27 41.5 27 41.5 27

76 M200.5 53.7

distance) 76 95 (Parfocal 95 (Parfocal distance)

Workpiece surface

Intermediate lens tube Mount unit Intermediate lens tube * Where M Plan Apo NIR HR100X (378-864-5) isunit Mount used * Where M Plan Apo NIR HR100X (378-864-5) is used

(Parfocal distance) 32

95

95

53.7

Workpiece surface Workpiece surface

Workpiece surface

88.6

88.6

Workpiece surface

When mounting the turret on VMU-LB or VMU-L4B

Note 1: The middle optical tube and lens mount must be removed from VMU. Note 2: The turret can be fixed at 45 intervals around the optical axis.

When mounting the turret on VMU-LB or VMU-L4B

Note 1: The middle optical tube and lens mount must be removed from VMU. Note 2: The turret can be fixed in the desired position relative to the optical axis.

Focus unit A and B

117 Vertical travel 25 25 27 27 4.5

(37)

(4)

Hole positions for mounting onto the main unit 5-M4 screw holes, depth 8 229 63.5 56

Polarizer and Analyzer

28
28 Vertical illumination Vertical illumination unit with aperture aperture unit with diaphragmdiaphragm

Main body body Main 152.5 76 247.5 27 27 152.5 76 27 27 Illuminated Illuminated lens tube tube lens

70 69

126.5 140 144

89.5

Analyzer Analyzer 41.5 15

41.5 15 247.5

149

87.6 Vertical travel 25 25 149 27 27 4.5 89.5

(37)

Hole positions for mounting onto the main unit 5-M4 screw holes, depth 8 229 (4) 63.5

56

Installing the polarizer and analyzer on VMU-V or VMU-H

126.5 140 144

Note: The analyzer is installed by opening the main body mirror head. The polarizer is installed by removing the illumination tube.

70 69

23.5 26.5 50

73

1 Focusing unit B

63.5 94 102

(4)

27 27

Vertical illumination Vertical illumination aperture Analyzer Analyzer tube with tube with aperture diaphragmdiaphragm

95 (Parfocal distance) 95 (Parfocal distance)

23.5 56.5 80

Focusing unit A

20.5

Polarizer Polarizer

20.5

73

63.5 94 102

(4)

7.5

Workpiece Workpiece surface surface

Main body body Main

27 27 76

TV adapter unit
17.5 Intermediate image position C mount 2X adapter lens unit 170.7
(Difference in dimension from the case where no adapter lens unit is used: 18.2mm) (Difference in dimension from the case where no adapter lens unit is used: 0mm)

Camera mount
Intermediate image position C mount 0.5X adapter lens unit

41.5 27

68.5 20.5

68.5 20.5

41.5 27

75 Cover ring Cover ring Intermediate image position 17.5

17.5

7.5

152.5

60.5

64.2

Workpiece Workpiece surface surface

Dimensions with the 2X TV adapter unit mounted

Dimensions with the 0.5X TV adapter unit mounted

38+0.05 0 56

When installing the polarizer on VMU-LB or VMU-L4B

Note 1: The analyzer is installed by loosening the cover ring. The polarizer is installed by removing the illumination tube.

95 (Parfocal distance) 95 (Parfocal distance)

Polarizer Polarizer

76

95

Workpiece surface

Mount Intermediate unit Workpiece lens tube surface 87 136 Mount unit MAX126* MAX77* Workpiece surface * Where M Plan Apo NIR HR100X (378-864-5) is used 87 136 MAX126* MAX77* * Where M Plan Apo NIR HR100X (378-864-5) is used

95

Intermediate lens tube

41.5 27

76

Microscope Unit FS70 Series

Features

FS70Z

FS70L

FS70L4
*Objectives and eyepieces shown mounted are optional.

> Compact microscope unit with trinocular eyepiece tube Suitable for observation of many different types of object: metal surfaces, semiconductors, LCDs, resins, etc. > Compatible with YAG lasers (1064nm, 532nm, 355nm and 266nm) Suitable for cutting, trimming, repair and marking of IC wiring (Au, Al), removing and processing thin-films (insulating film) and repair of color filters (defects repair). Also ideal as the microscope unit of a prober station for semiconductor substrates. > Compatible with infrared optical systems Available for inner observation of silicon package and spectral characteristics analysis by using infrared light source and camera. > Available for various observations in bright field, dark field*, simplified polarized and differential interference contrast (DIC).
*Made-to-order

> Telecentric reflective illumination system with aperture diaphragm. > High operability due to the inward turret design and long-working-distance objectives.

Specifications
Standard head type (w/short focus unit) Tilting head type Observation Applicable eyepiece (optional) Field number Puiple distance Tilt angle Trinocular Optical pass ratio tube Camera mount Optical tube Protective filter Tube lens (correction range) Model No. Order No. Model No. Order No. FS70Z (FS70Z-S) 378-165-1 (-2) FS70Z-TH 378-165-3 BF/simplified polarized/DIC, erect image FS70ZD (FS70ZD-S) FS70L (FS70L-S) FS70L4 (FS70L4-S) Made-to-order 378-166-1 (-2) 378-167-1 (-2) FS70ZD-TH FS70L-TH FS70L4-TH Made-to-order 378-166-3 378-167-3 BF/DF/simplified polarized/DIC, BF/simplified polarized, erect image erect image 10X (field number 24), 15X (field number 16), 20X (field number 12), 24 Siedentopf type, adjustment range: 51 to 76mm 0 to 20, displacement of eye point: 114mm (only for tilting head type) Eyepiece: Camera mount = 50%: 50% (fixed) Eyepiece: Camera mount = 100%: 0% or 0%: 100% (switchable) C-mount with parfocal adjustment* C-mount with parfocal adjustment and green filter switch*
*In combination with an optional adapter B *Only for FS70-L4, L4-S and L4-TH

Laser cutting filter 1X (NUV - visible - NIR) 1X (UV - visible) Magnification: 1X Magnification: 1X Optical features : 355/532/1064m : 226/532m Laser port Fundamental and second and Second and fourth-harmonic Suitable YAG third-harmonic waves waves laser type*2 Coarse/fine feed Coaxial feeding knob (right and left), Coarse feed: 3.8mm/rev., Fine feed: 0.1mm/rev. Focus unit Travel range 50mm 4-mount manual or 5-mount 4-mount manual or 4-mount Suitable turret (optional) 4-mount manual or 5-mount power turret power turret power turret For observation*1 M Plan Apo/HR/SL, G Plan Apo BD Plan Apo/HR/SL M Plan Apo/HR/SL, G Plan Apo Suitable objective M/LCD Plan Apo NIR, (optional) For laser cutting M Plan UV M/LCD Plan Apo NUV Optical system of illumination Koehler reflective illumination with aperture diaphragm Fiber-optic illuminator (optional) 12V/100W (378-700D), 12V/150W (178-316D) Loading capacity of camera mount Approx. 14kg (tilting head type: 13.2kg) Approx. 13kg (tilting head type: 13.1kg) Mass (Dimension: Refer to page 28.) 6.6kg (tilting head type: 7.4kg) 6.7kg (tilting head type: 7.5kg) Mass 6.6kg (-TH: 7.4kg) 6.7kg (-TH: 7.5kg)
*1: M Plan Apo 1x objective should be used together with the polarizer (378-092 or 378-094). *2: When mounting a laser, ensure all safety precautions are observed and be aware of laser output power, beam energy density and the unit's weight. Please consult Mitutoyo if in doubt.

1- 2X zoom (visible)

10

System diagram

C-mount compatible analog camera or digital camera Example: ImageX PRO 3000

Third-party YAG lasers*3

0.5X TV adapter unit (375-054) P.12

Differential interference contrast unit (378-076, 378-078, 378-079, 378-080) P.12 Polarizer*2 (378-092) P.12 Polarizer*1 (378-094) P.12

Eyepieces P.25 WF10/24 (378-856) WF15/16 (378-857) WF20/12 (378-858)

Adapter B (378-042) P.12

FS70ZD

FS70Z (378-165-1)

FS70L (378-166-1)

FS70L4 (378-167-1)

FS70ZD-TH

FS70Z-TH (378-165-3)

FS70L-TH (378-166-3)

FS70L4-TH (378-167-3)

Motorized focusing unit (378-061) P.12 Manual turret nosepiece unit (for BF/DF) (176-211) P.12 Quad Motorized turret nosepiece unit (for BF/DF) (176-210) P.12
A B C D

Simple stand (378-730) P.26

Self-aligning motorized turret nosepiece unit (for BF) (378-018) P.12 Quad

Self-aligning motorized turret nosepiece unit (for BF) Quad (378-016) Quintuple (378-116) P.12 Quintuple Transmitted light unit (378-736) P.26

Quad

Fiber-optic illumination unit 100W (378-700)

Objectives BD Plan Apo series (for observation): P.18 to 19

Objectives M Plan Apo series (for observation): P.16 to 17 G Plan Apo series (for observation): P.17 M/LCD Plan Apo NIR series on P.20 (for fundamental/second harmonic laser machining): Used for L (for near-infrared observation): Used for L M/LCD Plan Apo NUV series on P.21 (for second/third harmonic laser machining): Used for L M Plan UV series on P.22 (for second/fourth harmonic laser machining): Used for L4

Link cable 0.6m (12AAB283) Fiber-optic illumination unit 100W (378-700) X-Y stage (5050mm) (378-020) 150W (176-316) P.26 Filters (for ber-optic illumination unit No.378-700) 12AAB251 12AAB252 12BAA583 12BAA584 ND2 ND8 GIF LB80 P.26 Third-party motorized X-Y stages (5050mm) *4

150W (176-316) P.26 Filters (for ber-optic illumination unit No.378-700) 12AAB251 12AAB252 12BAA583 12BAA584 ND2 ND8 GIF LB80

*1: This unit is only applied to 1/2-inch or less CCD cameras. *2: Focusing unit A (378-705) can be attached to the simple stand (378-730). *3: Mitutoyo does not handle these lasers. Consult Mitutoyo for more information. *4: An adapter may separately be required when mounting any of these stages. Consult Mitutoyo for more information.

11

Optional Accessories for FS70

Manual turret

Power turret

Order No. Observation method No. of objective mounts View field adjustment Parfocal adjustment Mass

378-018 378-211 Bright field Bright/dark field 4, with centering and parfocal adjustment (378-018) 0.5mm 0.5mm 1.9kg 1.2kg

Console box 378-016

Order No. Observation method No. of objective mounts View field adjustment Positioning accuracy Durability (life-time) Drive method Power supply Output interface Cable length Dimensions (WxHxD) and mass

Polarizer
For simplified polarized-light observation. Also suitable for enhancing contrast of low-magnification objectives.

For FS70Z 378-092

For FS70L FS70L4 378-094

DIC unit
Used for differential interference contrast observation in conjunction with the polarizer.
Order No. 378-076 378-078 378-079 378-080 Magnification 100X, SL80X, SL50X 50X, SL20X 20X 10X, 5X

378-016 378-210 Bright field Bright/dark field 5, with centering 4 4 adjustment 0.5mm 2=3m 1 million 1 million repositioning repositioning operations operations DC motor AC100V - 240V, 10W RS-232C* for external PC control 3m Turret: 164x65x137mm, 1.4kg (378-116: 130x47x186mm, 1.8kg) Console box: 108x72x193mm, 810g (378-116: 108x63x176mm, 810g)

378-116

*Optional RS-232C Cable: 12AAA807

Power focusing unit

This unit is provided with a handy console box that is capable of external PC control. The power focus device is also retrofitable for the focus unit A/B for VMU series.

Adapter B
Used for mounting a C-mount camera.
45 Intermediate image position 17.5

0.5X TV adapter unit

Allows observation over a wide field of view on the monitor (2X wide) due to the 0.5X relay optics. It is used in conjunction with the optional adapter B.
45 23

Console box

62.1

Power focus device mounted on FS70Z with optional objectives

67.3

38 +0.05 0 54 74.1 378-042 Mass: 170g

Order No. Minimum travel Feeding speed Driving method Power supply Output interface Cable length Dimensions (WxHxD) and mass
*Optional RS-232C Cable: 12AAA807 12

378-054 View field of image: 11mm Mass: 300g

378-061 0.2m 1.6mm/sec Stepping motor, jog-shuttle controls AC100V - 240V, 6W RS-232C* for external PC control 3m Focus unit: 69xL99mm, 620g Console box: 108x87x201mm, 2.4kg

122.6

Dimensions of Optional Accessories for FS70

Manual turret
378-018

Power turret
378-116

111

(50.7) 176-211 176-210 (130)

108

48

Optional objective adapter: 378-026-1

This objective adapter allows mounting the bright field objective on the bright/dark field turret (176-211 and 176-210) while maintaining the focus position (parfocal). Suitable bright field objectives: M Plan Apo/SL, G Plan Apo, M Plan Apo NIR, M Plan Apo NUV and M Plan UV

(164)

Focus point adjust shim set

Order No. 378-089 378-090 For bright field turret For bright/dark field turret The focus point adjust shim set includes 50m, 30m and 20m thickness SUS rings

Tilting head type

Short focus unit type

324 154 324 154

(65) 153 Manual focusing unit S mounting dimensions 68 (89.5) (126.5) (157.5) (293.5) 1

451 154 Intermediate image position Vertical travel 25 25 31.5 79.6 153

Standard focusing unit mounting dimensions 93.4 212

355

Objective mounting surface 95 (Parfocal distance) 82

MAX130 153 (Mounting 1 surface) 154

13

89.5

126.5 293.5

(47)

50
50

Zoom Video Microscope Unit VM-ZOOM

Features
> Microscope unit with the high-zoom function Capable of continuous zooming from 100X to 4000X on a monitor (15). > Equipped with a unique sliding turret, to which an additional objective (optional) for laser applications, as well as the standard high-resolution objective (M Plan Apo HR 10X), can be attached. > Compatible with YAG lasers (1064nm, 532nm, 355nm and 266nm) Available for cutting, trimming, repair and marking of IC wiring (Au, Al), removing and processing thin-film (insulating film) and repair of color filter (defects repair). Also ideal as the microscope unit of a prober station for semiconductor substrates. > Compatible with infrared system Available for internal observation of silicon packages and spectral characteristics analysis using an infrared source and camera. > Available for simplified polarized and dif ferential interference contrast (DIC)*. *Made-to-order > Telecentric reflective illumination system with aperture diaphragm.

*Shown with optional stand and XY stage

Specifications
Without binocular unit type With binocular unit type Radiation range Zoom type Observation Main unit magnification Total magnification Observation range Suitable eyepiece Suitable objective Focusing unit Turret Optical system of illumination Fiber-optic illuminator (optional) Camera mount Suitable camera Mass, *with binocular unit type (Dimension: Refer to page 29.) For observation For laser working (optional) Coarse/fine feed Travel range BF, erect image Model No. Order No. Model No. Order No. VMZ40M 378-171 VMZ40M-B 378-172 Manual BF/DF/simplified polarized/DIC, erect image VMZ40M-L VMZ40R 378-173 378-175 VMZ40M-BL VMZ40R-B 378-174 378-176 NUV - visible - NIR VMZ40R-L 378-177 VMZ40R-BL 378-178 Power drive BF/simplified polarized, erect image VMZ40R-L4 378-181 VMZ40R-BL4 378-182 UV - visible

0.25X to 10X (zoom ratio: 40) 100X to 4000X (when using standard 10X objective, 1/2 camera and 15 monitor) 1/2 camera: 2.56x1.92mm to 0.064x0.048mm, WF10X/24 eyepiece: 3.2mm to 0.08mm (when using standard 10X objective) 10X (standard), 15X (optional), 20X (optional), Standard: M Plan Apo HR 10X (NA: 0.42, WD: 15mm), Optional*1: M Plan Apo, G Plan Apo M/LCD Plan Apo NIR, M/LCD Plan Apo NIR, M Plan UV M/LCD Plan Apo NUV M/LCD Plan Apo NUV Coaxial feeding knob (right and left), Coarse feed: 3.8mm/rev., Fine feed: 0.1mm/rev. 50mm 2-mount with centering 2-mount with centering 2-mount with centering 1-mount 1-mount adjustment adjustment adjustment Koehler reflective illumination with aperture diaphragm 12V/100W (378-700D), 12V/150W (178-316D) C-mount with centering and parfocal adjustment and green filter switch:* *Only for VMZ40R-L4 and BL4 1/2 or smaller camera (C-mount compatible) 6.5kg/7.0kg* 7.5kg/8.0kg* 7.0kg/7.5kg* 8.0kg/8.5kg* 7.5kg (8.5kg)

*1: Recommended magnification of objective: 2X to 50X

14

System diagram
VM-ZOOM40
VMZ40M series VMZ40R series
Visible/ ultraviolet light correction

Polarizer
For simplified polarized observation.

Camera mount
Can be attached to the laser mount for a dual-camera system. It is compatible with a 2/3 or smaller C-mount camera.
75 Intermediate image position

Near-infrared/visible/near-ultraviolet light correction Main unit No illumination unit installed (optional) Objective M Plan Apo HR 10 Binocular tube Laser port Main unit Remote controller
(with built-in illumination light source)

Main unit (with laser port) Remote controller

(with built-in illumination light source)

Objective M Plan Apo HR 10 Binocular tube Laser port

Objective M Plan Apo HR 10 Binocular tube

(with eyepiece WF10X/24)

(with eyepiece WF10X/24)

(with eyepiece WF10X/24)

378-069 Mass: 115g 378-087 Mass: 180g

17.5

60.5

38 +0.05 0 56

Objectives M Plan Apo series (for observation) G Plan Apo series (for observation)
* Compatible with all types on P.16 to 17. * Compatible with all types on P.17.

Eyepieces WF15/16 * 378-857 P.25

1

WF20/12 *1 378-858 P.25

Fiber-optic illumination unit 100W 378-700 150W 176-316 P.26 (VMZ40M series) Filters (for ber-optic illumination unit No.378-700)
12AAB251 12AAB252 12BAA583 12BAA584 ND2 ND8 GIF LB80

C-mount compatible analog or digital camera

Camera mount for xed-magnication observation *3

Polarizer 378-069

Simple stand 378-730 P.26 X-Y stage (5050mm) 378-020 P.26

M/LCD Plan Apo NIR series *2

(for fundamental/second harmonic laser machining) P.20

M/LCD Plan Apo NUV series *2

(for second/third harmonic laser machining) P.21

indicates common specications. indicates model-specic specications. indicates optional specications.

M Plan UV series (for 40R-L4/BL4) *2

(for second/fourth harmonic laser machining) P.22

*1: Compatible with models equipped with a binocular tube. *2: Compatible with VMZ40 - L types (models equipped with a YAG laser). These types are recommended to use an objective with a magnication of 20X or 50X. *3: The current position of a workpiece being observed with a camera on the zoom side can be checked by using a laser optical system (with a built-in 1X tube lens). This camera mount is compatible with VMZ40 - L types (models equipped with a YAG laser oscillator). Use a 2/3-inch or less analog or digital camera (with a C mount).

15

64.2

Objectives for Bright Field Observation (long working distance)

M Plan Apo / M Plan Apo HR

VMU FS70 MF-U Hyper MF-U FS300 FS110 VM-ZOOM

Features

> Infinity corrected > Bright field observation > Long working distance > Plan-Apochromat

Dimensions
M Plan Apo 1X
34 34 39 (Working distance) 11 1/4 Retardation plate

M Plan Apo 10X

(Working distance) 33.5 2.2 32.2 25 24

M Plan Apo HR 10X

(Working distance) 15 26 5 80 95 (Parfocal distance) 37 32.2 32.2

38

41

84 95 (Parfocal distance)

61.5 95 (Parfocal distance)

M Plan Apo 2X
34 (Working distance) 1.6 34 32.2 27.5 24.5

M Plan Apo 20X

34

25.2

23.8

32.2

34

(Working distance) 20 4.4

M Plan Apo HR 50X

(Working distance) 1 5.2 19 5 89.8 95 (Parfocal distance)

61 95 (Parfocal distance)

75 95 (Parfocal distance)

M Plan Apo 5X
34

34

34

(Working distance) 34 1.6 32.2 22 25

M Plan Apo 50X

(Working distance) 13 4.6 25.2 21.5 32.2

M Plan Apo HR 100X

(Working distance) 1.3 1.2 10.4 5 93.7 95 (Parfocal distance)

61 95 (Parfocal distance)

82 95 (Parfocal distance) (Working distance) 6 25.2 32.2 17.5

M Plan Apo 7.5X

34

32.2

22

25

60 95 (Parfocal distance)

Specifications
Order No. 378-800-3* 378-801-6*2 378-802-6 378-807-3 378-803-3 378-804-3 378-805-3 378-806-3 378-788-4*3 378-814-4 378-815-4
1

34

(Working distance) 35 1.6

M Plan Apo 100X

4.5

89 95 (Parfocal distance)

Mag. 1X 2X 5X 7.5X 10X 20X 50X 100X 10X 50X 100X

N.A. 0.025 0.055 0.14 0.21 0.28 0.42 0.55 0.70 0.42 0.75 0.90

W.D. (mm) 11.0 34.0 34.0 34.0 34.0 20.0 13.0 6.0 15.0 5.2 1.3

f (mm) (=550nm) 200 100 40 26.67 20 10 4 2 20 4 2

R (m) (=550nm) 11.0 5.0 2.0 1.3 1.0 0.7 0.5 0.4 0.7 0.4 0.3

DOF (m) 440 91 14.0 6.2 3.5 1.6 0.9 0.6 1.60 0.49 0.34

Real FOV (mm) 24 eyepiece 1/2 camera 24 4.8x6.4 12 2.4x3.2 4.8 0.96x1.28 3.6 0.64x0.85 2.4 0.48x0.64 1.2 0.24x0.32 0.48 0.10x0.13 0.24 0.05x0.06 2.4 0.48x0.64 0.48 0.10x0.13 0.24 0.05x0.06

Mass (g) 300 220 230 240 240 270 290 320 460 400 410

*1: It should be used together with an appropriate polarizer for the microscope used. *2: It is recommended to be used together with the 1/4 wavelength plate A (02ALN370) and appropriate polarizer for the microscope used. (W.D.: 95.5mm, f: 30.0mm) *3: The specifications of this objective are as in the use with VM-ZOOM. N.A.: Numerical aperture W.D.: Working distance f: Focal length R: Resolving power DOF: Depth of field FOV: Real field of view

16

Objectives for Bright Field Observation (Ultra-long working distance)

M Plan Apo SL
VMU FS70 MF-U Hyper MF-U FS300 FS110 VM-ZOOM

Features

> Infinity corrected > Bright field observation > Ultra-long working distance > Plan-Apochromat

Dimensions
M Plan Apo SL20X
34 34 39 (Working distance) 30.5 1.2 25.2 23.5 32.2

M Plan Apo SL80X

(Working distance) 2.5 15 25.2 21.6 32.2

M Plan Apo SL200X

(Working distance) 0.5 13 29.4 27 37

64.5 95 (Parfocal distance)

80 95 (Parfocal distance)

82 95 (Parfocal distance)

M Plan Apo SL50X

34

34

(Working distance) 3.9 20.5 32.2 24.2 25.2

M Plan Apo SL100X

(Working distance) 13 4.6 25.2 32.2 22

74.5 95 (Parfocal distance)

82 95 (Parfocal distance)

Specifications
Order No. 378-810-3 378-811-3 378-812-3 378-813-3 378-816-3 Mag. 20X 50X 80X 100X 200X N.A. 0.28 0.42 0.50 0.55 0.62 W.D. (mm) 30.5 20.5 15.0 13.0 13.0 f (mm) (=550nm) 10 4 2.5 2 1 R (m) (=550nm) 1.0 0.7 0.6 0.5 0.4 DOF (m) 3.5 1.6 1.1 0.9 0.7 Real FOV (mm) 24 eyepiece 1/2 camera 1.2 0.24x0.32 0.48 0.10x0.13 0.3 0.06x0.08 0.24 0.05x0.06 0.12 0.025x0.03 Mass (g) 240 280 280 290 490

Objectives for Bright Field Observation (with glass-thickness compensation)

G Plan Apo
VMU FS70 MF-U Hyper MF-U FS300 FS110 VM-ZOOM

Features

> Infinity corrected > Bright field observation > Ultra-long working distance > Plan-Apochromat > Designed to observe a specimen through glass 3.5mm thick.

Dimensions

G Plan Apo 20X

34

32.2

34

(Working distance) : Glass thickness 3.5mm 30.6 1.58 25 24

G Plan Apo 50X

(Working distance) : Glass thickness 3.5mm 1.6 15.08 32.2 23 25 Glass

Specifications
Order No. 378-847 378-848-3 Mag./glass thickness (mm) 20X/t3.5 50X/t3.5

65.59 96.19

Glass 5

81.11 96.19

N.A. 0.28 0.50

W.D. (mm) 29.42 13.89

f (mm) (=550nm) 10 4

R (m) (=550nm) 1.0 0.6

DOF (m) 3.5 1.1

Real FOV (mm) 24 eyepiece 1/2 camera 1.2 0.24x0.32 0.48 0.10x0.13

Mass (g) 270 320

N.A.: Numerical aperture W.D.: Working distance f: Focal length R: Resolving power DOF: Depth of field FOV: Real field of view

17

Objectives for Bright/Dark Field Observation (long working distance)

BD Plan Apo / BD Plan Apo HR

FS70 MF-U Hyper MF-U FS300 FS110

Features

> Infinity corrected > Bright/dark field observation Suited to the observation of scratches, concavity and convexity on a surface > Long working distance > Plan-Apochromat

Dimensions
BD Plan Apo 2X
44 44 44 (Working distance) 4 34

BD Plan Apo 10X

(Working distance) 34 4

BD Plan Apo 100X

8.5

(Working distance) 6

31.5 5 89 95 (Parfocal distance)

42

40

42

40

61 95 (Parfocal distance)

37

61 95 (Parfocal distance)

BD Plan Apo 5X
44

44

42

40

42

44

(Working distance) 4 34

BD Plan Apo 20X

37

(Working distance) 20 7

BD Plan Apo HR 50X

4.8

(Working distance) 5.2

40 40 40

40

37

32

61 95 (Parfocal distance)

75 95 (Parfocal distance)

89.9 95 (Parfocal distance)

BD Plan Apo 7.5X

44 (Working distance) 4 34

BD Plan Apo 50X

44

40

42

42

44

(Working distance) 13 7

BD Plan Apo HR 100X

(Working distance) 4.7 1.3

32 5 93.7 95 (Parfocal distance)

37

40

61 95 (Parfocal distance)

82 95 (Parfocal distance)

Specifications
Order No. 378-831-7* 378-832-7 378-830-7 378-833-7 378-834-7 378-835-7 378-836-7 378-845-7 378-846-7
1

32

Mag. 2X 5X 7.5X 10X 20X 50X 100X 50X 100X

N.A. 0.055 0.14 0.21 0.28 0.42 0.55 0.70 0.75 0.90

W.D. (mm) 34.0 34.0 34.0 34.0 20.0 13.0 6.0 5.2 1.3

f (mm) (=550nm) 100 40 26.67 20 10 4 2 4 2

R (m) (=550nm) 5.0 2.0 1.3 1.0 0.7 0.5 0.4 0.4 0.3

DOF (m) 91 14.0 6.2 3.5 1.6 0.9 0.6 0.49 0.34

Real FOV (mm) 24 eyepiece 1/2 camera 12 2.4x3.2 4.8 0.96x1.28 3.6 0.64x0.85 2.4 0.48x0.64 1.2 0.24x0.32 0.48 0.10x0.13 0.24 0.05x0.06 0.48 0.10x0.13 0.24 0.05x0.06

Mass (g) 340 350 350 350 400 440 460 530 545

*1: Recommended to be used together with the 1/4 wavelength plate A (02ALN380) and appropriate polarizer for the microscope used. (W.D.: 95.5mm, f: 30.0mm) N.A.: Numerical aperture W.D.: Working distance f: Focal length R: Resolving power DOF: Depth of field FOV: Real field of view

18

32

42

42

42

Objectives for Bright/Dark Field Observation (Ultra-long working distance)

BD Plan Apo SL
FS70 MF-U Hyper MF-U FS300 FS110

Features

> Infinity corrected > Bright/dark field observation Suited to the to observation of scratches, concavity and convexity on a surface > Ultra-long working distance > Plan-Apochromat

Dimensions
BD Plan Apo SL20X
44 (Working distance) 7.5 30.5

BD Plan Apo SL80X

44

(Working distance) 13 8.5

42

40 40

40

64.5 95 (Parfocal distance)

31

82 95 (Parfocal distance)

BD Plan Apo SL50X

44 (Working distance) 8 20

BD Plan Apo SL100X

44 (Working distance) 13 8.5

32 5 82 95 (Parfocal distance)

75 95 (Parfocal distance)

Specifications
Order No. 378-840-7 378-841-7 378-842-7 378-843-7 Mag. 20X 50X 80X 100X N.A. 0.28 0.42 0.50 0.55 W.D. (mm) 30.5 20.5 15.0 13.0 f (mm) (=550nm) 10 4 2.5 2 R (m) (=550nm) 1.0 0.7 0.6 0.5 DOF (m) 3.5 1.6 1.1 0.9 Real FOV (mm) 24 eyepiece 1/2 camera 1.2 0.24x0.32 0.48 0.10x0.13 0.3 0.06x0.08 0.24 0.05x0.06 Mass (g) 350 410 430 440

32

40

42

19

32

42

42

Near-infrared radiation range objectives for bright field observation

M Plan Apo NIR

VMU FS70 FS300 FS110 VM-ZOOM

Features

> Infinity corrected > Suitable for bright field observation and laser applications > Long working distance > Plan-Apochromat > Wavelength correction from visible to near-infrared (1800nm) > Available high-power type (M Plan Apo NIR HR)
M Plan Apo NIR 20X
32.2 34

Dimensions
M Plan Apo NIR 5X
34 (Working distance) 0.4 37.5 24.6 25 (Working distance) 20 0.6 24.8 32.2 24.4

M Plan Apo NIR 100X

34

(Working distance) 0.5 12 24.6 32.2 25 28

57.5 95 (Parfocal distance) (Working distance) 30.5 1 25.2 32.2 24.6

75 95 (Parfocal distance) (Working distance) 0.4 17 32.2 24.4 25

83 95 (Parfocal distance) (Working distance) 0.3 10 27.6

M Plan Apo NIR 10X

34

M Plan Apo NIR 50X

34

M Plan Apo NIR HR 50X/100X

39

64.5 95 (Parfocal distance)

78 95 (Parfocal distance)

85 95 (Parfocal distance)

Specifications
Order No. 378-822-5 378-823-5 378-824-5 378-825-5 378-826-5 378-863-5 378-864-5 Mag. 5X 10X 20X 50X 100X 50X 100X N.A. 0.14 0.26 0.40 0.42 0.50 0.65 0.70 W.D. (mm) 37.5 30.5 20.0 17.0 12.0 10.0 10.0

Note: If the wavelength used is 1100nm or longer, the focal point may deviate slightly from that in visible radiation.

f (mm) (=550nm) 40 20 10 4 2 4 2

R (m) (=550nm) 2.0 1.1 0.7 0.7 0.6 0.4 0.4

DOF (m) 14.0 4.1 1.7 1.6 1.1 0.7 0.6

Real FOV (mm) 24 eyepiece 1/2 camera 4.8 0.96x1.28 2.4 0.48x0.64 1.2 0.24x0.32 0.48 0.10x0.13 0.24 0.05x0.06 0.48 0.10x0.13 0.24 0.05x0.06

Mass (g) 220 250 300 315 335 450 450

Near-infrared radiation range objectives for bright field observation (with glass-thickness compensation)

LCD Plan Apo NIR

Features Dimensions
LCD Plan Apo NIR 20X (t1.1)
(Working distance) 0.6 20.35 24.6 34

VMU

FS70

FS300

FS110

VM-ZOOM

> Infinity corrected > Suitable for bright field observation and laser applications > Long working distance > Plan-Apochromat > Performance optimized for visible to near-infrared (1800nm) wavelengths > Designed to observe a specimen through glass 1.1mm or 0.7mm thick.
LCD Plan Apo NIR 50X (t1.1) / (t0.7)
(Working distance) 0.5 17.5 24.4 34 32.2

LCD Plan Apo NIR 100X (t1.1) / (t0.7)

(Working distance) 0.6/1 12.5/12 34 24.4 32.2

32.2

25

25

75.02 95.37

77.87/77.74 95.37/95.24

82.87/83.24 95.37/95.24

Specifications

Order No. 378-827-5 378-829-5 378-725-5* 378-754-5

Mag./glass thickness (mm) 20X/t1.1 50X/t0.7 100X/t1.1 100X/t0.7

N.A. 0.40 0.42 0.50 0.50

W.D. (mm) 19.98 17.26 12.13 11.76

f (mm) (=550nm) 10 3.9 2 2

R (m) (=550nm) 0.7 0.7 0.6 0.6

DOF (m) 1.7 1.6 1.1 1.1

Real FOV (mm) Mass (g) 24 eyepiece 1/2 camera 1.2 0.24x0.32 305 0.48 0.10x0.13 320 0.24 0.05x0.06 335 0.24 0.05x0.06 335

*Made-to-order N.A.: Numerical aperture W.D.: Working distance f: Focal length R: Resolving power DOF: Depth of field FOV: Real field of view

20

25

37

Near-ultraviolet radiation range objectives for bright field observation

M Plan Apo NUV

VMU FS70 VM-ZOOM

Features

> Infinity corrected > Suitable for bright field observation and laser applications > Long working distance > Plan-Apochromat > Performance optimized for near-ultraviolet (355nm) to visible > High-power type available (M Plan Apo NUV HR)

Dimensions
M Plan Apo NUV 10X
34 34 32.2 39 (Working distance) 0.5 30.5 25.2 32.2

M Plan Apo NUV 50X

(Working distance) 2.6 15 24.4 25

M Plan Apo NUV HR 50X

(Working distance) 0.3 10 27.6 5 85 95 (Parfocal distance)

64.5 95 (Parfocal distance)

80 95 (Parfocal distance)

M Plan Apo NUV 20X

34

(Working distance) 1.6 17 32.2 24 25

M Plan Apo NUV 100X

34

(Working distance) 1.7 11 24.4 23.4 32.2

78 95 (Parfocal distance)

84 95 (Parfocal distance)

Specifications
Order No. 378-809-5 378-817-4 378-818-4 378-819-4 378-888-4 Mag. 10X 20X 50X 100X 50X N.A. 0.28 0.40 0.42 0.50 0.65 W.D. (mm) 30.5 17.0 15.0 11.0 10.0 f (mm) (=550nm) 20 10 4 2 4 R (m) (=550nm) 1 0.7 0.7 0.6 0.42 DOF (m) 3.5 1.7 1.6 1.1 0.65 Real FOV (mm) 24 eyepiece 1/2 camera 2.4 0.48x0.64 1.2 0.24x0.32 0.48 0.10x0.13 0.24 0.05x0.06 0.48 0.10x0.13 Mass (g) 255 340 350 380 500

Near-ultraviolet radiation range objectives for bright field observation (with glass-thickness compensation)

LCD Plan Apo NUV

Features Dimensions

VMU

FS70

VM-ZOOM

> Infinity corrected > Suitable for bright field observation and laser applications > Long working distance > Plan-Apochromat > Wavelength correction from near-ultraviolet (355nm) to visible > Designed to observe a specimen through glass 1.1mm or 0.7mm thick.
LCD Plan Apo NUV 50X (t1.1) / (t0.7)
34 (Working distance) 2.6 14.9/15 24.4 32.2

LCD Plan Apo NUV 100X (t1.1)

34 1.5 11.4 23.4 24.4 32.2

80.47/80.2 95.37/95.2 (Parfocal distance)

25

83.97 95.37 (Parfocal distance)

Specifications
Order No. 378-753-4* 378-820-4 378-751-4* Mag./glass thickness (mm) 50X/t1.1 50X/t0.7 100X/t1.1 N.A. 0.42 0.42 0.50 W.D. (mm) 14.53 14.76 11.03 f (mm) (=550nm) 4 4 2 R (m) (=550nm) 0.7 0.7 0.6 DOF (m) 1.6 1.6 1.1 Real FOV (mm) 24 eyepiece 1/2 camera 0.48 0.10x0.13 0.48 0.10x0.13 0.24 0.05x0.06 Mass (g) 310 310 380

*Made-to-order N.A.: Numerical aperture W.D.: Working distance f: Focal length R: Resolving power DOF: Depth of field FOV: Real field of view

21

28

37

Ultraviolet radiation range objectives for bright field observation

M Plan UV
VMU FS70 VM-ZOOM

Features

> Infinity corrected > Suitable for bright field observation and laser applications > Long working distance > Plan-Apochromat > Performance optimized for ultraviolet (266nm) and visible wavelengths > High-transmittance in the ultraviolet range
M Plan UV 10X
23 15 32.2 34

Dimensions

M Plan UV 50X
23 15 32.2 5 83 95 (Parfocal distance) 34 34

75 95 (Parfocal distance)

20 (Working distance)

12 (Working distance)

M Plan UV 20X
23 15 32.2 34

M Plan UV 80X
23 15 32.2 5 85 95 (Parfocal distance)

80 95 (Parfocal distance)

15 (Working distance)

10 (Working distance)

Specifications
Order No. 378-844-5 378-837-5 378-838-5 378-839-5 Mag. 10X 20X 50X 80X N.A. 0.25 0.36 0.40 0.55 W.D. (mm) 20.0 15.0 12.0 10.0 f (mm) (=266nm) 20 10 4 2.5 f (mm) (=550nm) 20.3 10.4 4.5 2.9 R (m) (=550nm) 1.1 0.8 0.7 0.5 DOF (m) 4.4 2.1 1.7 0.9 Real FOV (mm) 24 eyepiece 1/2 camera 2.4 0.48x0.64 1.2 0.24x0.32 0.48 0.10x0.13 0.3 0.05x0.08 Mass (g) 310 330 400 380

Note: When projecting a mask image on a specimen by using a YAG laser system mounted on a Mitutoyo microscope unit, the mask image will be scaled by the factor f/200 times (f=200mm, Mitutoyo tube lens). Since the focal length (f) in ultraviolet radiation (=266nm) is slightly smaller than that in visible radiation ((=550nm) as above, the working area in ultraviolet radiation also becomes slightly smaller than the mask image in visible radiation.

Reference: Transmission of Mitutoyo Objectives

Mitutoyos long working-distance objectives are grouped by working wavelength range: ultraviolet, near-ultraviolet, visible, and near-infrared. The M Plan UV series (for ultraviolet), M Plan Apo NUV series (for near-ultraviolet), and M Plan Apo NIR series (for near-infrared) are designed especially for YAG laser working applications in cutting thin films. Each series is designed for optimal spectral transmission factor within its respective wavelength range. M (BD) Plan Apo series: Wavelength range 436nm to 656nm M Plan Apo NIR series: Wavelength range 480nm to 1800nm M Plan Apo NUV series: Wavelength range 355nm to 620nm M Plan UV series: Optimized for wavelengths of 266nm and 550nm
100 80 60 40 20 0 300 600 900 1200 Wavelength (nm) 1500 1800

Spectral transmission characteristics of 100X objective

M Plan Apo NIR 100x M Plan Apo SL 100x M Plan Apo NUV 100x

Spectral transmission factor (%)

Spectral transmission factor (%)

100 80 60 40 20

Spectral transmission characteristics of M Plan UV 80X

0 200 266 300

400

500 550 600 Wavelength (nm)

700

800

N.A.: Numerical aperture W.D.: Working distance f: Focal length R: Resolving power DOF: Depth of field FOV: Real field of view

22

Tube Lens MT
Aberration correction range Dimensions
MT-1
16.4
36
3-2.4 throu mm gh ho les Intermediate separated at 12 0) image position
(evenly

MT-1, 2, 40: Visible wavelength range (435.8 656.3nm) MT-L: Near-ultraviolet (355nm) to near-infrared (1064nm) MT-L4: Ultraviolet (266nm) to visible (620nm).
MT-40 MT-L MT-L4

MT-2
36
3-2.4 throu mm gh ho les Intermediate separated at 12 0) image position
(evenly

16.4

26 threads 36 Refer to JIS B7141.

Intermediate image position

Intermediate image position Mounting ring

Intermediate image position Mounting ring

240.2

240.2

170

21

M3 20.5

M3 20.5

35

35

176.4

29.5

12.5 1.5

33g 6

0.009 0.025

33g 6

0.009 0.025

28

3.5

3.5 Main unit

15

2.5

95 (Parfocal distance)

26 threads 36 Refer to JIS B7141.

243.31

95 (Parfocal distance)

Main unit

166.4

Half-reecting mirror (for reected illumination) Objective mounting position (see below) Workpiece surface

Half-reecting mirror (for reected illumination) 704.2 Objective mounting position (see below) Workpiece surface Workpieces side focal position

76.5

76.5

134

35

95 (Parfocal distance)

95 (Parfocal distance)

95 (Parfocal distance)

225.8

134

35

3.5 23.6 Objective mounting position (see below) Workpiece surface Workpieces side focal position

4.5

3.5

25

30

-0.01 -0.05

30

-0.01 -0.05

34

3 226.5

Workpieces side focal position

Objective mounting position (see below) Workpiece surface

Workpiece surface Workpieces side focal position

Specifications
Order No. 970208 970209 378-010 378-008 378-009

Workpieces side focal position

Focal length (mm) Magnification (tube lens) 200 1X 400 2X 200 1X 200 1X 200 1X

Image field (mm) 30 30 24 24 24

Effective lens dia. (mm) 24.0 18.0 11.2 22.0 23.0

Dimensions (mm) 40x32.5 40x32.0 34x27.5 35x32.0 35x30.6

Mass (g) 43 42 45 30 30

Note: A distance of 76.5mm in 970208 and 970209 drawings is for an image field of 30 (without vignetting). For an image field of 24 or 11 (the latter is the image field of a 2/3-inch camera), use the formula (1) and (2) below to calculate the distance.

Reference: Placement of Objective and Tube Lens

Mitutoyos long working-distance objective lenses are designed to cover a field of view of up to 30mm (24mm), when the tube lens 970208 or 970209 (378-008, 378-009 or 378-010) is placed at the specified distance from the objective. However, use the following formula to calculate the approximate distance, when a distance other than that as specified is required in order to insert your own optical system or other optical elements: = (2 1) f2 / [mm] (1) 1 = 2 f N.A. [mm] (2) 1 : Objective exit pupil diameter (mm) 2 : Effective diameter of tube lens (mm) f2 : Focal length of tube lens : Image field diameter
Tube lens 2 f2 Image eld

Example: What is the distance (L), when using M Plan Apo 10X* (378-803-3) and tube lens** (970208) to cover an image field of 24?
*f=20mm, N.A.=0.28 (Refer to page 15.) **2=24mm, f2=200mm (Refer to the above chart.)

From formula (2): 1=2x20x0.28 =11.2 (mm) From formula (1): L=(2411.2)x200/24 =106.6 (mm) Therefore a distance (L) up to 106mm can cover an image field of 24 without shading. In other words a distance (L) smaller than the specification does not affect optical performance. Contact Mitutoyo for detailed information.
23

1 Objective f1

NA Workpiece surface

176.4

Objectives for Measuring Microscopes ML

MF Hyper MF

Features
ML 1X
30 16.5

> Finite-correction (image-object distance: 280mm, parfocal length: 110mm) > Bright field observation > Long working distance > Telecentric for lenses lower than 10X magnification

Dimensions
ML 5X
31.5 30 17 25 28

ML 20X
39 33

ML 100X
39 33 104 110 (Parfocal distance) 6

49 10

61 (Working distance) 10

49

61 (Working distance) 14.5

110 (Parfocal distance)

110 (Parfocal distance)

90 110 (Parfocal distance)

20 14.1

ML 3X
30 18 25 28

ML 10X
30 14.5 30

ML 50X
39 33 97 110 (Parfocal distance) 13

33 10

77 (Working distance) 110 (Parfocal distance) 10

59

51 (Working distance) 14.7

110 (Parfocal distance)

Specifications
Order No. 375-036-2 375-037-1 375-034-1 375-039 375-051 375-052 375-053 Mag. 1X 3X 5X 10X 20X 50X 100X N.A. 0.03 0.09 0.13 0.21 0.42 0.55 0.70 W.D. (mm) 61.0 77.0 61.0 51.0 20.0 13.0 6.0 R (m) (=550nm) 9.2 3.06 2.12 1.31 0.65 0.5 0.4 DOF (m) 306 34 16.3 6.2 1.6 0.9 0.6 Real FOV (mm) 24 eyepiece 1/2 camera 24 4.8x6.4 8 1.6x2.1 4.8 0.96x1.28 2.4 0.48x0.64 1.2 0.24x0.32 0.48 0.10x0.13 0.24 0.05x0.06 Mass (g) 80 55 60 95 310 350 380

Objectives for Centering Microscopes CF

CF

Features
CF 1X
30 26

> Finite-correction (image-object distance: 280mm, parfocal length: 110mm) > Bright field observation > Long working distance > Available zoom type
CF 2X
25 25 30 22

Dimensions
CF 3X
30 25

CF Zoom 1X - 5X
34 21.5 25 37.2 60 11.5 50 (Working distance) 110 (Parfocal distance)

36.3 5

73.7 (Working distance) 110 (Parfocal distance) 12

18

92 (Working distance) 110 (Parfocal distance) 5

32.2

77.8 (Working distance) 110 (Parfocal distance)

Specifications
Order No. 375-031 375-032 375-033 375-038 (zoom lens) Mag. 1X 2X 3X 1X 3X 5X N.A. 0.03 0.06 0.07 0.04 0.1 0.1 W.D. (mm) 73.7 92.0 77.8 50.0 R (m) (=550nm) 9.2 4.6 3.9 6.9 2.75 2.75 DOF (m) 306 76 56 171 27 27 Real FOV (mm) 24 eyepiece 1/2 camera 24 4.8x6.4 12 2.4x3.2 8 1.6x2.1 24 4.8x6.4 8 1.6x2.1 4.8 0.96x1.28 Mass (g) 45 35 35 200

N.A.: Numerical aperture W.D.: Working distance R: Resolving power DOF: Depth of field FOV: Real field of view

24

Wide Field of View Eyepieces and Reticles WF / UWF

MF MF-U Hyper MF Hyper MF-U FS70 FS300 FS110

Features

> Wide field of view, especially the UWF 10X type (30 field number) > External focusing system* allows installing an optional reticle. *Except for UWF 10X

Dimensions
UWF 10X/30
Diopter adjustment range 10 4 3.5 Eye point Intermediate image position 35 -0.05
-0.02

WF 10X/24
Eye point 41.4
WF 10/24

WF 15X/16
Intermediate image position 30 38 Eye point
WF 15/16

WF 20X/12
Eye point
WF 20/12

10

10

Intermediate image position 30 38

10

Intermediate image position

35

32

30 17

43.9 10X eyepiece

17

22.2

17

14.6

10X eyepiece

15X eyepiece

20X eyepiece

Specifications
Order No. (2pcs.) 378-851 378-856 378-857 378-858 Magnification 10X 10X 15X 20X Field number 30 24 16 12 Visibility adjustment -8D to +4D -10D to +5D -8D to +5D -8D to +5D Eye point High eye point High eye point Normal Normal Reticle Available Available Available Mass (g) 250 45 35 35

Reticles
FS70 FS300 FS110

Features

> Fitted to the eyepiece at the intermediate image position for simple measurement. > Outside diameter of 25mm and thickness of 1mm > Reticle line widths: 10m (516577: 7m)

*Not available for UWF 10X

Dimensions
No.516848 No.516576 No.516578 No.516577 No.516849 No.516850 No.516851

Specifications
Order No. Remarks

516848
90 full lines

516576
90, 60 chain lines

516578
Crosshairs, one line graduated (P=0.1/20mm)

516577
Concentric circles with crosshairs (P=1.2/1.2 - 18mm)

516849
Graduation marks (P=0.1/10mm)

516850
Graduation marks (P=0.05/5mm)

516851
Grids (P=1mm/10mm square)

25

38

Optional Accessories for VMU, FS70 and VM-ZOOM

Stand
For mounting the VMU, FS70, or VM-ZOOM microscope unit. Can be combined with an XY stage, stage illumination unit and fiber-optic illuminator to work as a compact microscope for surface observation.

XY stage
110 70 4-5mm through holes, countersunk 8 4-M4 screw holes, depth 10

110 70

40 96 152 120

Order No. Mass

378-730 6.7kg
47

96 180

32 59

13 7 6.5 3

Order No. Travel range Handle feed Mass

378-020 50x50mm 34mm/rev. 3.3kg

Stand with XY stage and stage illumination unit mounted on FS70Z with optional objectives and eyepieces
346 156

58

108

T-groove detailed drawing

95 132

95 200

Stage illumination unit

Attaches to the stand to provide contour illumination in conjunction with a fiber-optic illuminator (100W or 150W).

437 452

Order No. Mass

378-736 0.8kg

Stage glass top 185 135 23 25 76.4 Fiber-optic cable inlet

15

114

328 361

Fiber-optic illuminator (100W)

39 21 53 25 1500 7 10 10 7

15

Fiber-optic illuminator (150W)

10

245

76

44

10

25 35.2

120

39

Order No. Light source Light guide Brightness LB80 ND2 Filter (optional) ND8 GIF

378-700D 12V/100W parabolic-type halogen bulb (517181), 100h service life Fiber-optic cable (1.5m length, 5mm dia.) Adjustable by volumn Color temperature conversion filter (12BAA584) For 1/2 light intensity (12AAB251) For 1/8 light intensity (12AAB252) Green filter (12BAA253)

15

227 257

15

60

97 120

176-316D 15V/100W parabolic-type halogen bulb (12BAJ076), 500h service life Light source 15V/100W parabolic-type halogen bulb (12BAJ075), High-brightness type 50h service life Light guide Fiber-optic cable (1.5m length, 5mm dia.) Brightness Adjustable by rotary control Order No. Long-life type

26

110

Dimensions

VMU series
VMU-V
17.5 Intermediate image position 50 59.5 43.5 19 3 47 17.5 C mount 35
27

VMU-H
63 50 27 59.5 43.5

(equal numbers of holes at the same positions on the opposite side)

6-M40.7 screw holes, depth 6

C mount
Fiber-optic cable mounting position

19 Fiber-optic cable 3 (Emblem)

mounting position

(equal numbers of holes at the same positions on the opposite side)

6-M40.7 screw holes, depth 6 152.5 27

47

Intermediate image position

113.5 89.5

76

247.5

27 20.5

76

(Emblem) 43

106 113.5 Objective (optional)

Fiber-optic cable end position

27

106

27

95 (Parfocal distance)

Objective (optional)

VMU-LB
50 Intermediate image position 17.5

56
Intermediate image position

79.6

Intermediate image position

C mount

13.6

Intermediate image position 23.2 3 Laser mount

6-M40.7 screw holes, depth 6
(equal numbers of holes at the same positions on the opposite side) Fiber-optic cable mounting portion position

14 (Compatible with third-party ber-optic cables) Adapter for Mitutoyo ber-optic cable 10 (Compatible with Mitutoyo ber-optic cable)

50

213.5 101.5

27 27

213.4

3
(Emblem)

47
19

94.5

76

106

27 Objective mount
Objective (optional)

308.4

12

120 Workpiece surface

59.5 19

95 (Parfocal distance)

20.5

43

43.5

Workpiece surface

VMU-L4B
50 Intermediate image position
17.5

214.5 102.5

49.5

C mount 49.5

50

6-M40.7 screw holes, depth 6

(equal numbers of holes at the same positions on the opposite side) Fiber-optic cable mounting portion position

13.6

Intermediate image position

56

27 27

213.4

3
(Emblem)

47
308.4

94.5

Objective (optional)

120 Workpiece surface

59.5 19

95 (Parfocal distance)

20.5

43

Objective mount

43.5

76

106

27

Workpiece surface

79.6

Intermediate image position

Intermediate image position 23.2 3 Laser mount

27

10

(2)

95 (Parfocal distance)

20.5

43

Dimensions

63.5

FS70 series
FS70Z (FS70ZD)

27.2

FS70L

102 229

63.5

324 154 Intermediate image position 38

324 154 Intermediate image position 38 Laser mount Vertical travel 25 25 93.4

79.6

40.4

93.4

212

353

353

Objective mounting surface 95 (Parfocal distance) 82

Objective mounting surface 95 (Parfocal distance) 82 MAX130 153 (Mounting surface) 1 154

MAX 78

MAX130 153 (Mounting surface) 1 154

MAX 78

FS70L4

27.2 38 63.5 4-M4 screw holes, depth 6 30 51

102 229

63.5

208

324 154 Intermediate image position 38 Laser mount Vertical travel 25 25 93.4 14 63.5 94

79.6

Back of standard focus unit (for all models)

31.7

10 +0.05 7.5

+0.1

353

212

Fiber-optic cable end position 14

Objective mounting surface 95 (Parfocal distance) 82

7.5

126.5

109

MAX 78

MAX130 153 (Mounting surface) 1 154

Detail of fiber mount (for all models)

28

10

212

31.7

Vertical travel 25 25

79.6

63.5

102 229

38 63.5

VM-ZOOM series
VMZ40M
100
C mount 42.5

111.5
Intermediate image position

Vertical travel 25

17.5

25

VM Z

40

63.5 94 102

459

95 (Parfocal distance)

Back of standard focus unit (for all models)

HR10X objective 114.5 114.5

Stage 70 80 74

80.6

145

10 +0.05 7.5 Fiber-optic cable end position

+0.1

VMZ40R-BL
100 22

Binocular optical path switching knob

267.4 C mount

111.5 42.5 Intermediate

Vertical travel 25 25

image position

Laser mask position 78

Eye point

Binocular unit
30

Detail of fiber mount (for all models)

459

351.4

Laser mount Laser port

Nosepiece knob
145
(standard accessory)

(Parfocal distance) 95

10

HR10X objective 133.5 114.5

Stage 72

45 (Stroke) 80 74

17.5

80.6

Remote Controller
250

VMZ40R-BL4 (camera mount position)

Other dimensions except for camera mount are same as those for VMZ40R-BL.
image position

25 25

22 Binocular optical path switching knob

C mount
with lter switching mechanism

42.5 Intermediate

17.5

100

267.4

111.5 Vertical travel

30 20

362

C mount back

Jog shuttle
50

7.5 (4)

126.5 140 144

(4)

63.5

5-M4 screw holes, depth 8

L=2000

109 60 29

Glossary

1. N.A. (Numerical Aperture)

N.A. determines resolving power, depth of field, and luminosity of the image. The larger the N.A. the higher is the resolving power and smaller is the depth of field. N.A.=nSin

7. F (Focal Length)

Distance between a principal point and a focal point. f1 is a focal length of an objective, f2 is a focal length of a tube lens. Magnification is determined by the ratio of the focal length of the tube lens to that of the objective. (For an infinity-corrected optical system.) Magnification of objective = (Ex.) 1X = 200 (mm) 200 (mm) Focal length of tube lens Focal length of objective 200 (mm) 20 (mm)

n is the index of refraction of the medium in which the lens is working. n=1.0 for air. is the half-angle of the maximum cone of light that can enter or exit the lens. Objective
Air (n=1) Workpiece Stage glass

(Ex.) 10X =

8. Field number and FOV (Real Field of View)

The field number of an eyepiece is determined by the field stop diameter of the eyepiece and it is expressed in mm. FOV is the area of specimen observable and is determined by the field number of the eyepiece and magnification of the objective.

2. R (Resolving Power)

Minimum distance between points or lines that are just distinguishable as separate entities. Resolving power is determined by N.A. and wavelength . R (m) = 2N.A.

FOV (mm)=

Field number of eyepiece Magnification of objective

(Ex. Using an eyepiece of field number 24) FOV for 1X objective = 24 = 24 (mm) 1 24 FOV for 10X objective = = 2.4 (mm) 10 Area of specimen observable on TV monitor Area of camera image element (VxH) Area of specimen = observable on TV monitor Magnification of objective Indication magnification on TV monitor

3. W.D. (Working distance)

Distance between the surface of the specimen and the front face of the objective when in focus.

4. Parfocal Length

Distance between the surface of the specimen and the objective mounting position when in focus.

Parfocal distance Working distance

5. Infinity-corrected system

An optical system in which the image is formed by an objective and a tube lens with an 'Infinity Space' between them, into which optical accessories can be inserted. Innity space
Objective Imaging (tube) lens Objective focal point (object point) Imaging lens focal point (image point)

Diagonal line length Indication magnification = Magnification x of monitor indication of objective Diagonal line length of on TV monitor camera image element
* Size of camera image element (V x H x Diagonal) 1/3 inch image element: 3.6x4.8x6.0mm 1/2 inch image element: 4.8x6.4x8.0mm 2/3 inch image element: 6.6x8.8x11.0mm

9. DOF (Depth of Field)

f1

f2

Magnication = f2/f1

Vertical distance in the specimen, measured from above and below the exact plane of focus, which still yields an acceptable image. The larger the N.A., the smaller the depth of field. Eyepiece observation (Formula of Berek) x 250.000 + 2x(N.A.)2 N.A. x M

6. Finite-corrected optical system

Objective Object point

An optical system in which the image is formed only by an objective.

Image point

DOF (m) =

= Radiation wavelength

: Resolution of human eye (Visual angle: 5 minute) M: Total magnification (Objective mag. x Eyepiece mag.) TV monitor observation DOF (m) = 2x(N.A.)2 =550nm (Standard wavelength)

L1

L2

Magnication = L2/L1

30

10. Bright field illumination and dark field illumination

Bright field illumination directly lights the specimen with a solid cone of rays and is the simplest method available. Dark field illumination uses a hollow cone of rays formed by an opaque stop at the center of the condenser large enough to prevent direct light from entering the objective. The specimen is placed at the concentration of the light cone, and is seen with light scattered or diffracted by it, therefore scratches and dents on the specimen surface are illuminated while the rest remains dark. An apochromatic objective is corrected for chromatic aberration at the red, blue, and yellow wavelengths. An achromatic objective is corrected for chromatic aberration at the red and yellow wavelengths only. Khler illumination overcomes the disadvantages of other schemes by causing parallel rays to light the specimen so that, because they will not be in focus, the image of the specimen will not include an image of the light source.
Imaging system Beam splitter Aperture Relay lens Field stop diaphragm Condenser lens Fiber-optic cable

16. Plan

Denotes an objective lens that produces a flat (planar) image by correcting the spherical aberration/curvature of the field of an achromatic lens or an apochromatic lens. All Mitutoyo FS series objectives are plan apochromat. This unwanted effect is the reduction of an image's brightness or saturation at the periphery compared to the image center. May be caused by external (lens hood) or internal features (dimensions of a multi-element lens). Lens flare is typically seen as several starbursts, rings, or circles in a row across the image or view, caused by unwanted image formation mechanisms, such as internal reflection and scattering of light. An image degrading a phenomenon in which an image appears as if it is a double image due to redundant light projection and optical interference within the optical system.

17. Vignetting

11. Apochromatic objective and achromatic objective

18. Flare

12. Koehler illumination

19. Double image

20. Pupil Diameter and Spot Diameter of an Objective

Pupil diameter Denotes the maximum diameter of a parallel light flux along the optical axis that can enter an objective from the rear. The pupil diameter is calculated according to the following expression.
Pupil diameter Objective

95

mm=2 x N.A. x f

Illuminated eld of view

Beam spot diameter

13. Telecentric illumination

This illuminating optical system is designed so that principal light passes through the focal point. This system has the advantage of retaining the size of the image center even if it is out of focus (although the circumference of the image is defocused). This illumination system provides an even illumination intensity over the entire field of view.

Spot diameter If a beam of light with a uniformly distributed intensity enters an objective from the rear, the beam is condensed to a spot of finite size. This size is known as the spot diameter. The approximate value of a spot diameter is calculated from the following expression. m=1.22x N.A.

14. Aperture diaphragm

This diaphragm adjusts the amount of light passing through and is related to the brightness and resolving power of an optical system. This diaphragm is especially useful in width dimension measurement of cylindrical objects with contour illumination, and provides the highest degree of correct measurement/observation by suppressing diffraction in an optimal aperture. This diaphragm is used for blocking out unwanted light and thereby preventing it from degrading the image.
31

However, the above expression cannot be applied if the light source is a laser beam of which the intensity forms a Gaussian distribution on the cross section. The diameter of a laser beam is generally indicated by 1/e2 of the peak value, i.e. 13.5% of the peak value. The spot diameter of a laser beam is calculated from the following expression. 4xxf xD

15. Field stop

m =

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Mitutoyo Corporation

20-1, Sakado 1-Chome, Takatsu-ku, Kawasaki-shi Kanagawa 213-8533, Japan T +81 (0)44 813-8230 F +81 (0)44 813-8231 http://www.mitutoyo.co.jp
Note: All information regarding our products, and in particular the illustrations, drawings, dimensional and performance data contained in this pamphlet, as well as other technical data are to be regarded as approximate average values. We therefore reserve the right to make changes to the corresponding designs, dimensions and weights. The stated standards, similar technical regulations, descriptions and illustrations of the products were valid at the time of printing. In addition, the latest applicable version of our General Trading Conditions will apply. Only quotations submitted by ourselves may be regarded as definitive.

116 1003 (9) AeHS, Printed in Japan