Small Vacuum Pumps Catalog Guide

No.
VP-1004
SMALL VACUUM PUMPS

C ATA L O G
Creating the possibilities of vacuum pump technology
www.ulvac-kiko.com/en
ULVAC KIKO Serves a Wide Variety of Industries

We ULVAC KIKO provide vacuum pumping solutions for various industries and applications. We manufacture, sell and provide customer support of small vacuum pumps with high-performance, high-reliability and high-quality. We are one of the member of world' leading vacuum technology group, "ULVAC GROUP"
Head Office & Factory (Miyazaki Japan)
developed by firm reliability achieved through working in the consumer business.
EXPERTISE
through our wide variety of products and reliable support.
CUSTOMER SATISFACTION
As a Manufacturer Specializing in Small Size Vacuum Pumps TOTAL SUPPORT

by ULVAC GROUP
Units conversion table

Temperature
C 0 10 20 30 40 50 60 70 80 90 100 F 32 50 68 86 104 122 140 158 176 194 212
Pressure units
Pa 1 100 133 1.33 104 4.0 104 1.013 105 mbar 10-2 1 1.33 133 400 1.013 103
Dimensions
mm Torr -3 3.1750 7.5 10 6.3500 0.75 9.5250 1 12.70000 100 19.0500 300 25.4000 760 Inches 1/8 1/4 3/8 1/2 3/4 1/1 Inches 0.1250 0.2500 0.3750 0.50000 0.7500 1.0000
Pumping speed units

L/min = L min m3/h = m3 h-1 cfm = cubic feet/min
-1
2|
SMALL VACUUM PUMPS CATALOG
L/min 1.0 16.67 28.32
m3/h 0.06 1.0 1.699
cfm 0.035 0.589 1.0
C
Dry Vacuum Pumps
E
System
Diaphragm Type
DAP-6D6 DAP-12S 6 DA-30D 7 DA-60S 7 DAT-50D 7 DAT-100S 7 DA-20D 8 DA-40S 8 DA-41D 8 DA-81S 8 DA-60D 9 DA-120S 9 DA-121D 9 DA-241S 9
Hight Speed Vacuum coater

VPC-1100 20
Vacuum coater "DEPOX"

VFR-200M/ERH 21 VWR-400M/ERH 21 VTR-350M/ERH 21 VTS-350M/ERH 21
Sputtering System
RFS-200 22 "SCOTT-C3" VTR-150M/SRF 23 Attachment of Oil Rotary Vacuum Pump Optional parts 24 Fore-line Trap25 Vacuum Pump Suction and Exhaust Filter 25 Vacuum Pump Oil 26 Oil-mist Trap 26 In-line Trap 26 Adapter for Trap 26 Oil-mist Separator 26 Clamp 27 Centerring 27 Blank Flange27 Nozzle 27 Nipple27 Elbow27 Tee27 Cross27 Reducer27 KF Flange 27 VCR Adapters 28 Gauge port 28 Leak port 28 Flexible tube 28 Rubber Vacuum Hose 28 Suction and Exhaust Pipes for Oil Rotary Vacuum Pumps 29 Dry pump 30 Oil pump 33 System 35
Optional Parts
High Vacuum Type

DAU-20 10 DTU-20 10
Anti-corrosive Type
DTC-22 11 DTC-41 11 DTC-60 11
Rocking Piston Type

DOP-40D 12 DOP-80S 12 DOP-80SP 12 DOP-300SA 13 DOP-420SA 13
Scroll Type
DIS-90 14 DIS-251 14 DIS-501 14 DISL-101 15 DISL-502 15
Direct Drive Oil-Sealed Rotary Vacuum Pumps
Standard Type
GLD-040 16 GLD-136A16 GLD-136C 16 GLD-201A17 GLD-201B 17 GLD-280A17 GLD-280B 17 GHD-031 18
Outline Drawing
Mechanical Booster Pump

MBS-051 18
Anti-corrosive Type
GCD-051X 19 GCD-136X 19 GCD-201X 19
Pump Selecting Process

Below calculation and Pumping speed curves are available for selecting suitable pump
1. Calculation of Pumping time and Pumping speed.
Pumping time ( min )
V t = S
Tank Volume (L) Pumping speed ( L/min )
P1 2.303 log P2
50Hz
First pressure ( Pa ) Ultimate pressure ( Pa )
t0 = t1 + t2 + t3 +
We want to decrease pressure from atmospheric pressure (100kPa) to 10kPa in 50 liter of 120 tank within 5 minutes. Which pump is suitable?
100 80 140
example
DA-121D
60
DA-60D
40 20
DAT-50D DA-30D DA-20D

110 Pa
4
From calculation, more than 23 L/min pumping speed is required, select faster pumping speed more than DA-30D pump. Please allow safe rate with considering pipe 6 7 7.6 conductance and leak.
(L/min)
S = S
V 50 t 5
2.303 log
P1 100000 P2 10000
23 L /min (at 10000Pa)
example
How long does it take to decrease pressure from atmospheric pressure (100kPa) to 13kPa in 80 liter of tank? DA-121D is used at this case.
S=
v t
2.303Log
P1 First pressure P2 Ultimate pressure 2.303 log 2.303 log 2.303 log 2.303 log 2.303 log 2.303 log 2.303 log 2.303 log 2.303 log 101324 90000 90000 80000 80000 70000 70000 60000 60000 50000 50000 40000 40000 30000 30000 20000 20000 13000 =0.08 =0.08 =0.09 =0.10 =0.13 =0.16 =0.21 =0.34 =0.40
(L/min) 140 120 100 Pumping Speed 80 60 40 20
50Hz
DA-121D
4 Pressure
8 L/min
10 10kPa
Atmospheric 80 pressure 90kPa S1=124L/min t1= 124 90kPa 80kPa S2=123L/min t2= 80 123 80kPa 70kPa S3=122L/min t3= 80 122 70kPa 60kPa S4=120L/min t4= 80 120 60kPa 50kPa S5=116L/min t5= 80 116 50kPa 40kPa S6=111L/min t6= 80 111 40kPa 30kPa S7=108L/min t7= 80 108 30kPa 20kPa S8=96L/min t8= 80 96 20kPa 13kPa S9=86L/min t9= 80 86
t0 = t1 + t2 ~ + t9 = 1.59min
4|
Last process of suction (Bottom dead center) Diaphragm Retainer Exhaust Valve Suction Valve
Movement Principles for Each Type of Vacuum Pumps

Diaphragm Type Dry Vacuum Pumps
Last process of suction (Bottom dead center) Diaphragm Retainer Exhaust Valve Suction Valve Diaphragm Suction Valve completely opens. Exhaust valve keep closed.
Rocking Piston Type Dry Vacuum Pumps
Exhaust port
Suction port
Last process of exhaust (Top dead center)
Piston
Diaphragm Suction Valve completely opens. Exhaust valve keep closed. Last process of exhaust (Top dead center) gas
Suction Valve keeps closed as pressed. Exhaust valve completely open as pressed.
Rotary axis center
Scroll Type Dry Vacuum Pumps

Compression space Suction port Orbiting Scroll Exhaust port
Oil-Sealed Rotary Pumps

exhaust valve suction port
Suction Valve keeps closed as pressed. Exhaust valve completely open Fixed scroll as pressed. (a) Suction completion
Pressure process (b)
Suction process Exhaust process
suction
compression 1
compression 2
exhaust
Exhaust process of 2 stage Oil-Sealed Rotary Pumps
exhaust valve
suction port
(d)
(c)
A Guide to Our Catalog

Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps System Optional Parts Outline Drawing
Type of Pump
CE marked TUV marked CSA marked cTUVus marked (compliance to U.S. and Canadian National Standards) cTUVus is equivalent to UL/CSA standard. Indicates the actual pumping speed in atmospheric pressure. Some other companies show the number of nominal pumping speed. In that case you can compare the speed by increasing our rate 20 %. When the pump achieves this ultimate pressure the pumping speed becomes 0. Indicates the motor rating. Basic machine weight including the power cord. Indicates the standard inlet, outlet diameter. For request on different sizes, please contact us. Use the pump within this atmospheric temperature range. Corresponding voltage and Certificate
DAP Series
Features
DAP-6D DAP-12S
Applications
Vacuum chucks, wafer and tip handling devices. Vacuum tweezers, medical appliances. Printing equipment. Automatic packing machines. Optical appliances. Sterilizer.
DAP-12S
Actual pumping speed The numbers show the actual pumping speed at 50 Hz. The number will increase 20% with 60 Hz.
Diaphragm type pump creates vacuum by reciprocate movement of rubber diaphragms. Pump structure make Oil-free environment and maintenance easy. DAP series is the smallest diaphragm pump from our product ranges and offers pumping speed at 6L and 12 L/min at 50Hz.
DAP-6D
DAP-12S
Specifications
Model Unit Actual pumping speed Ultimate pressure Motor Full load current Weight Inlet, outlet pipe diameter Ambient temperature Overall dimensions A kg mm mm L/min Pa 50Hz 6 6.65 103 Single phase, 100V, 10W, 4P, Capacitor run 0.5 1.9 (Rc 1/8) 0 40 93(W) 163(L) 100.6(H) DAP-6D 60Hz 7 50Hz 12 24.0 103 Single phase , 100V, 10W, 4P, Capacitor run 0.5 1.9 (Rc 1/8) 0 40 93(W) 163(L) 100.6(H) DAP-12S 60Hz 14
Corresponding voltage and Certificate

Model DAP-6D Single phase, 100V Single phase, 200V Single phase, 115V Voltage Applicable Volt CE Marked TUV Marked cTUVus Marked Standard
Pumping speed curves

(L/min) 40 50Hz
Single phase, 220240V Single phase, 100V Single phase, 115V DAP-12S

30
Standard
Single phase, 220240V
Single phase, 200V
Pumping Speed
20
DAP-12S
10
DAP-6D
Pressure
(10kPa)
10
Further details can be refered to our website.
Outside drawing appears in Page 30.
6|
Dry Vacuum Pumps
Oil-Sealed Rotary Vacuum Pumps
System
Optional Parts
Outline Drawing
DAP Series
Features
DAP-6D DAP-12S
Applications
Vacuum chucks, wafer and tip handling devices. Vacuum tweezers, medical appliances. Printing equipment. Automatic packing machines. Optical appliances. Sterilizer.
Diaphragm type pump creates vacuum by reciprocate movement of rubber diaphragms. Pump structure make Oil-free environment and maintenance easy. DAP series is the smallest diaphragm pump from our product ranges and offers pumping speed at 6L and 12 L/min at 50Hz.
DAP-6D
DAP-12S
Specifications
Model Unit Actual pumping speed Ultimate pressure Motor Full load current Weight Inlet, outlet pipe diameter Ambient temperature Overall dimensions A kg mm mm L/min Pa 50Hz 6 6.65 103 Single phase, 100V, 10W, 4P, Capacitor run 0.5 1.9 (Rc 1/8) 0 40 93(W) 163(L) 100.6(H) DAP-6D 60Hz 7 50Hz 12 24.0 103 Single phase , 100V, 10W, 4P, Capacitor run 0.5 1.9 (Rc 1/8) 0 40 93(W) 163(L) 100.6(H) DAP-12S 60Hz 14

Model DAP-6D Single phase, 100V Single phase, 200V Single phase, 115V Voltage Applicable Volt CE Marked TUV Marked cTUVus Marked Standard

(L/min) 40 50Hz
Single phase, 220240V Single phase, 100V Single phase, 115V DAP-12S

30
Standard
Single phase, 220240V
Single phase, 200V
Pumping Speed
20
DAP-12S
10
DAP-6D
Pressure
(10kPa)
10
6|
Dry Vacuum Pumps
System
Optional Parts
Outline Drawing
DA / DAT Series
Features
DA-30D DA-60S DAT-50D DAT-100S

Applications
Vacuum chucks, wafer and tip handling devices. Vacuum tweezers, medical appliances. Printing equipment. Automatic packing machines. Optical appliances. Semiconductor industry. Injection molding machine
Diaphragm type pump creates vacuum by reciprocate movement of rubber diaphragms. Pump structure makes Oil-free environment and maintenance easy. Various pumping speed and two/single stages are selectable depends on your required pressure and pumping volume.
DA-30D
DA-60S
DAT-50D
DAT-100S
Specifications
Model Unit Actual pumping speed Ultimate pressure Motor Full load current Weight Inlet, outlet pipe diameter Ambient temperature Overall dimensions A kg mm mm L/min Pa 50Hz 30 6.7 103 Single phase, 100V, 200W, 4P, Split phase starting 5.6 11.0 O.D. dia.9 I.D. dia.5 (Rc 1/4) 7 40 212(W) 278(L) 224.5(H) 5.0 DA-30D 60Hz 36 50Hz 60 21.3 103 Single phase, 100V, 200W, 4P, Split phase starting 5.6 11.0 O.D. dia.9 I.D. dia.5 (Rc 1/4) 7 40 212(W) 278(L) 224.5(H) 5.0 DA-60S 60Hz 72 50Hz 50 3.3 103 Single phase, 100V, 200W, 4P, Split phase starting 5.6 11.0 O.D. dia.12 I.D. dia.8.5 (Rc 1/4) 7 40 150(W) 232(L) 305(H) 5.0 DAT-50D 60Hz 55 50Hz 100 13.3 103 Single phase, 100V, 200W, 4P, Split phase starting 5.6 11.0 O.D. dia.12 I.D. dia.8.5 (Rc 1/4) 7 40 150(W) 232(L) 305(H) 5.0 DAT-100S 60Hz 110

Model DA-30D Single phase, 100V Single phase, 200V Single phase, 220V DA-60S Single phase, 115V Single phase, 100V Standard Single phase, 115V Voltage Applicable Volt CE Marked TUV Marked cTUVus Marked Standard Standard Standard
Pumping Speed

(L/min) 140 50Hz
DAT-100S
120
100
Single phase, 200V Single phase, 220V Single phase, 115V Single phase, 100V
80
DA-60S
60
DAT-50D
Single phase, 200V Three phase, 200220V Single phase, 100V Single phase, 115V Single phase, 220V
DAT-50D DA-30D
40
20
DAT-100S
Single phase, 200V Three phase, 200220V Single phase, 220V

0 1 2 3 4 5 6 7 8 9 10 (10kPa)
Pressure
Dry Vacuum Pumps
System
Optional Parts
Outline Drawing
DA Series
Features
DA-20D DA-40S DA-41D DA-81S

Applications
Vacuum chucks, wafer and tip handling devices. Vacuum tweezers, medical appliances. Printing equipment. Automatic packing machines. Optical appliances.
DA-20D
DA-40S
DA-41D
DA-81S
Specifications
Model Unit Actual pumping speed Ultimate pressure Motor Full load current Weight Inlet, outlet pipe diameter Ambient temperature Overall dimensions A kg mm mm L/min Pa 50Hz 20 5.33 103 Single phase,100V, 60W, 4P, Capacitor run 1.6 7.2 O.D. dia.9 I.D. dia.5 (Rc 1/4) 7 40 118(W) 240(L) 178(H) DA-20D 60Hz 24 50Hz 40 19.9 103 Single phase, 100V, 60W, 4P, Capacitor run 1.6 7.2 O.D. dia.9 I.D. dia.5 (Rc 1/4) 7 40 128(W) 240(L) 178(H) DA-40S 60Hz 46 50Hz 40 3.3 103 Single phase, 100V, 100W, 4P, Capacitor run 2.5 10.3 O.D. dia.12 I.D. dia.8 (G1/4) 0 40 157(W) 336.5(L) 217(H) 2.7 DA-41D 60Hz 46 50Hz 75 13.3 103 Single phase, 100V, 100W, 4P, Capacitor run 2.5 10.3 O.D. dia.12 I.D. dia.8 (G1/4) 0 40 181(W) 336.5(L) 217(H) 2.7 DA-81S 60Hz 85

Model DA-20D Voltage Single phase, 100V Single phase, 115V Single phase, 200V Single phase, 220V Single phase, 100V Single phase, 115V Single phase, 200V Single phase, 220V Single phase, 100V Single phase, 115V Single phase, 200V Single phase, 220V Single phase, 100V Single phase, 115V Single phase, 200V Single phase, 220V Applicable Volt CE Marked TUV Marked cTUVus Marked Standard Standard Standard Standard

100 (L/min) 50Hz
80
DA-81S
DA-40S
Pumping Speed
60
DA-40S DA-41D
DA-41D
40
DA-20D
20
DA-81S
Pressure
9 10 (10kPa)
8|
Dry Vacuum Pumps
System
Optional Parts
Outline Drawing
DA Series
Features
DA-60D DA-120S DA-121D DA-241S

Applications
Vacuum chucks, wafer and tip handling devices. Vacuum tweezers, medical appliances. Printing equipment. Automatic packing machines. Optical appliances. Semiconductor industry.
DA-60D
DA-120S
DA-121D
DA-241S
Specifications
Model Unit Actual pumping speed Ultimate pressure Motor Full load current Weight Inlet, outlet pipe diameter Ambient temperature Overall dimensions A kg mm mm L/min Pa 50Hz 60 3.32 103 Single phase, 100V, 200W, 4P, Capacitor run 5.0 19.0 O.D. dia.14 I.D. dia.9 (G3/8) 7 40 156(W) 358(L) 238(H) DA-60D 60Hz 72 50Hz 120 13.3 103 Single phase, 100V, 200W, 4P, Capacitor run 5.0 19.0 O.D. dia.14 I.D. dia.9 (G3/8) 7 40 162(W) 358(L) 238(H) DA-120S 60Hz 144 50Hz 120 3.3 103 Single phase, 100V, 400W, 4P, Capacitor run 4.8 26.0 5.8 DA-121D 60Hz 145 50Hz 240 16.0 103 Single phase, 100V, 400W, 4P, Capacitor run 5.2 26.0 6.2 DA-241S 60Hz 260
O.D. dia.16 I.D. dia.12 (G1/2) O.D. dia.16 I.D. dia.12 (G1/2) 0 40 193.5(W) 411(L) 285(H) 0 40 207(W) 411(L) 285(H)
With built-in Unloader valve.

Model DA-60D Voltage Applicable Volt CE Marked TUV Marked cTUVus Marked Single phase, 100V Standard Single phase, 115V Single phase, 200V Single phase, 220V Single phase, 100V Standard Single phase, 115V Single phase, 200V Single phase, 220V Single phase, 100V Standard Single phase, 115V Single phase, 200V Single phase, 220230V Single phase, 100V Standard Single phase, 115V Single phase, 200V Single phase, 220230V

(L/min) 240 50Hz
DA-241S
200
DA-120S
160
Pumping Speed
120
DA-121D DA-120S
DA-121D
80
DA-241S
DA-60D
40
Pressure
10 (10kPa)
Dry Vacuum Pumps
System
Optional Parts
Outline Drawing
DAU/DTU Series
Features
High vacuum type diaphragm pump. Low vibration. High corrosion resistant. (DTU-20)
DAU-20 DTU-20
Applications
Backing pump for TMP. Analytical equipment. Biochemical analysis. Gas charging. Vacuum drying systems. Evaporators etc.
DAU-20
DTU-20
Specifications
Model Unit Actual pumping speed Ultimate pressure Motor Full load current Weight Inlet, outlet pipe diameter Ambient temperature Overall dimensions A kg mm mm L/min Pa 50Hz 20 200 Single phase, 100V, 80W, 4P, Capacitor run 1.46 7.5 O.D. dia.10 I.D. dia.6 (Rc 1/8) 5 40 161(W) 327(L) 217(H) DAU-20 60Hz 23 50Hz 20 200 Single phase, 100V, 80W, 4P, Capacitor run 1.46 7.5 O.D. dia.10 I.D. dia.6 (Rc 1/8) 5 40 161(W) 327(L) 217(H) DTU-20 60Hz 23

Model Voltage Single phase, 100V Single phase, 115V Single phase, 200V Single phase, 220V Single phase, 230V Single phase, 100V Single phase, 115V Single phase, 200V Single phase, 220V Single phase, 230V Applicable Volt CE Marked TUV Marked cTUVus Marked Standard

50 (L/min) 50Hz
DAU-20
40
Standard
Pumping Speed
30
DTU-20
DAU-20 DTU-20
20
10
Pressure
10 (10kPa)
10 |
Dry Vacuum Pumps
System
Optional Parts
Outline Drawing
DTC Series
Features
All contacted parts of the gas are made of PTFE and FPM. Suitable for pumping out corrosive gas or organic solvent. High vacuum down to 1000Pa. Compact.
DTC-22 DTC-41 DTC-60

Applications
Rotary evaporator. Evaporating system. Vacuum Concentrator. Vacuum filtration. Exhaust of gas-transfer tube. Vacuum drying systems. Laser-gas circulation. Centrifuge. Medical/Pharmaceutical equipments. Analysis/scientific equipments.
DTC-22
DTC-41
DTC-60
Specifications
Model Unit Actual pumping speed Ultimate pressure Motor Full load current Weight Inlet, outlet pipe diameter Ambient temperature Overall dimensions A kg mm mm L/min Pa 50Hz 20 1.0 103 Single phase, 100V, 50W, 4P, Capacitor run 1.3 7.1 O.D. dia.10 I.D. dia.6 (G1/4) 0 40 142(W) 288.5(L) 202(H) DTC-22 60Hz 24 50Hz 40 1.0 103 Single phase, 100V, 100W, 4P, Capacitor run 2.2 10.3 O.D. dia.10 I.D. dia.6 (G1/4) 0 40 155(W) 336.5(L) 217(H) 2.3 DTC-41 60Hz 46 50Hz 60 1.0 103 Single phase, 100V, 200W, 4P, Capacitor run 3.6 18.0 O.D. dia.14 I.D. dia.9 (G3/8) 0 40 158(W) 340(L) 242(H) 3.7 DTC-60 60Hz 70

Voltage Single phase, 100V Single phase, 115V Single phase, 200V DTC-22 Single phase, 220V Single phase, 230V Single phase, 100V Single phase, 115V Single phase, 200V DTC-41 Single phase, 220V Single phase, 230V (50Hz) Single phase, 100V Single phase, 115V (50Hz) DTC-60 Single phase, 200V Single phase, 220V Model Applicable Volt CE Marked TUV Marked cTUVus Marked Standard

100 (L/min) 50Hz
80
Standard
Pumping Speed
Standard
DTC-60
60
DTC-41
40
20
DTC-22
Pressure
10 (10kPa)
11
Dry Vacuum Pumps
System
Optional Parts
Outline Drawing
DOP Series
Features
Rocking type piston vacuum pump creates vacuum by reciprocal motion of cup packing inside the cylinder. Pressurized type is available for DOP-80S which can be used as a small compressor. (DOP-80SP)
DOP-40D DOP-80S DOP-80SP

Applications
(Vacuum) Vacuum chuck, vacuum tweezers. Absorption and transfer of automatic machines. Vacuum packing printing machines. Tip mounter. Medical equipments. Oxygen generator. (Pressure) Pressure source for automatic machines. Air pressure unit. Printing machine. Otorhinolaryngology, dental unit. Air pressure meter.
DOP-40D
DOP-80S
DOP-80SP
Specifications
Model Unit Actual pumping speed Ultimate pressure Maximum pressure Motor Full load current Weight Inlet, outlet pipe diameter Ambient temperature Overall dimensions A kg mm mm L/min Pa MPa 50Hz 40 1.2 103 Single phase, 100V, 210W, 4P, Capacitor run 3.2 7.0 O.D. dia.9 I.D. dia.5 (Rc 1/4) 7 40 160(W) 270(L) 179(H) 3.9 DOP-40D 60Hz 44 50Hz 80 5.33 103 Single phase, 100V, 210W, 4P, Capacitor run 3.2 7.0 O.D. dia.9 I.D. dia.5 (Rc 1/4) 7 40 160(W) 270(L) 179(H) 3.9 DOP-80S 60Hz 88 50Hz 80 Only for pressure 0.5 Single phase, 100V, 300W, 4P, Capacitor run 5.0 9.0 O.D. dia.9 I.D. dia.5 (Rc 1/4) 7 40 167.5(W) 288(L) 181(H) 5.5 DOP-80SP 60Hz 84

Model DOP-40D Single phase, 100V Single phase, 200V Single phase, 100V DOP-80S Single phase, 200V Single phase, 115V Single phase, 115V Voltage Applicable Volt CE Marked TUV Marked cTUVus Marked Standard Standard Standard

(L/min) 90 80 70 Pumping Speed 60 50 40 30 20 10 0 1 2 3 4 5 6 7 8 9 10 (10kPa) 0 Pressure 1 2 3 4 5 (10-1MPa) 50Hz
DOP-80S
DOP-80SP
Single phase, 220V
DOP-40D
Single phase, 220V Single phase, 100V Single phase, 115V DOP-80SP
Single phase, 200V
Single phase, 220V
12 |
Dry Vacuum Pumps
System
Optional Parts
Outline Drawing
DOP Series
Features
Rocking type piston vacuum pump creates vacuum by reciprocal motion of cup packing inside the cylinder. Bigger volume of pumping speed with increased number of pump heads.
DOP-300SA DOP-420SA
Applications
Vacuum chuck, vacuum tweezers. Semiconductor industry. (Handler, Mounter) FPD industry. (Bonder) Printing machine. Injection molding. Adsorption and transfer.
DOP-300SA
DOP-420SA
Specifications
Model Unit Actual pumping speed Ultimate pressure Motor Full load current Weight Inlet, outlet pipe diameter Ambient temperature Overall dimensions A kg mm mm L/min Pa 2.5 20.0 O.D. dia.16 I.D. dia.12 (Rc 1/2) 0 40 315(W) 443(L) 231(H) 50Hz 300 8.0 103 Three phase, 200V, 400W, 4P 2.3 3.5 33.0 O.D. dia.26 I.D. dia.20 (Rc 3/4) 0 40 310(W) 523(L) 253(H) DOP-300SA 60Hz 330 50Hz 420 17.3 103 Three phase, 200V, 550W, 4P 3.1 DOP-420SA 60Hz 460

DOP-300SA Model Three phase, 200V Three phase, 200V Voltage Applicable Volt CE Marked TUV Marked cTUVus Marked Standard Standard

500 450
(L/min) 50Hz
DOP-300SB Three phase, 200220V DOP-420SA
DOP-420SA
400 350 300 250 200 150 100 50
DOP-300SA
Pumping Speed
Pressure
10 (10kPa)
13
Dry Vacuum Pumps
System
Optional Parts
Outline Drawing
DIS Series
Features
Double wrap
DIS-90 DIS-251 DIS-501

Applications
Analytical equipment. Gas recovery system. Coating equipment. Back pump for TMP. Helium leak detector. Manufacturing process for semiconductor.
Double wrap type scroll pump which consists of 1 orbiting and 2 fixed scrolls. Operation from atmospheric pressure is possible. High ultimate pressure level is attainable Low vibration and low noise. Maintenance cycle can be controlled by hour meter.
DIS-90
DIS-251
DIS-501
Specifications
Model Unit Nominal pumping speed L/min Ultimate pressure Pa Motor Single phase Three phase Single phase Three phase A 50Hz 90 DIS-90 60Hz 108 50Hz 250 DIS-251 60Hz 300 50Hz 500 DIS-501 60Hz 600
Full load current Weight
Single phase kg Three phase Inlet, outlet pipe diameter Ambient temperature Water vapor handling g/day Single phase Overall mm dimensions Three phase
1.6 1.0 Single phase, 100/115/200/230V, Single phase, 100/115/200/230V, 400W, 4P, Capacitor start & run 600W, 4P, Capacitor start & run Three phase, Three phase, 200/208/230/380/400/415/460V, 400W, 4P 200/208/230/380/400/415/460V, 600W, 4P 2.6/1.3/1.6 2.1/2.2/1.1/1.1 4.8/2.6/2.4 4.8/4.3/2.8/2.4 8.5/4.3/3.9 10.0/8.6/4.8/4.0 (100/200/230V) (100/115/200/230V) (100/200/230V) (100/115/200/230V) (100/200/230V) (100/115/200/230V) 1.6/0.9/0.9/1.0 1.9/1.9/1.8/1.0 2.7/1.57/1.57/1.63 2.8/2.6/2.5/1.47 (200/380/400/415V) (200/208/230/460V) (200/380/400/415V) (200/208/230/460V) 14.0 25.0 44.0 23.0 38.0 Inlet pipe KF-25 Outlet pipe KF-16 Inlet pipe KF-25 Outlet pipe KF-16 Inlet pipe KF-40 Outlet pipe KF-25 5 40 5 40 5 40 5 (AF open) 25 (AF open) 25 (AF open) 214(W) 308(L) 225(H) 252(W) 400(L) 336(H) 290(W) 443(L) 397(H) 252(W) 370(L) 336(H) 292(W) 372(L) 397(H) AF = Air flush
5.0 Single phase, 100/115/200/230V, 150W, 4P, Capacitor start & run

Model DIS-90 Voltage Applicable Volt CE Marked CSA Marked Single phase, 100V Standard Single phase, 115V (60Hz) Standard Single phase, 200230V Standard Single phase, 100V Standard Single phase, 115V (60Hz) Standard Single phase, 200230V Standard Three phase, 200V Standard Three phase, 208V (60Hz) Standard Three phase, 230V (60Hz) Standard Three phase, 380V (50Hz) Standard Three phase, 400V (50Hz) Standard Three phase, 415V (50Hz) Standard Three phase, 460V (60Hz) Standard Single phase, 100V Standard Single phase, 115V (60Hz) Standard Single phase, 200230V Standard Three phase, 200V Standard Three phase, 208V (60Hz) Standard Three phase, 230V (60Hz) Standard Three phase, 380V (50Hz) Standard Three phase, 400V (50Hz) Standard Three phase, 415V (50Hz) Standard Three phase, 460V (60Hz) Standard Further details can be refered to our website.

1000 (L/min) 50Hz
DIS-501 DIS-251
100
DIS-251
Pumping Speed
DIS-90
10
DIS-501
1 1
10
102
Pressure
103
104
105 (Pa)
14 |
Dry Vacuum Pumps
System
Optional Parts
Outline Drawing
DISL Series
Features
Single wrap
DISL-101 DISL-502
Applications
Pick and transfer system. Cleaning and drying. Degassing / deforming. Packaging.
Single wrap type scroll which consists of each 1 orbiting and fixed scroll. Tough type scroll pump than DIS series against incoming particles and suitable for industrial use.
DISL-101
DISL-502
Specifications
Model Unit Nominal pumping speed L/min Ultimate pressure Motor Full load current Weight Inlet, outlet pipe diameter A kg Pa 50Hz 100 20.0 Single phase, 100/115/200/230V, 300W, 2P, Capacitor start & run 3.2/1.6/2.0 (100/200/230V) 15.0 Inlet pipe KF-25 g/day mm Outlet pipe KF-16 3.7/3.4/1.8/1.7 (100/115/200/230V) DISL-101 60Hz 120 50Hz 430 30.0 Three phase, 200/380/400/415V, 900W, 2P 3.6/1.9/1.9/1.8 (200/380/400/415V) 36.0 KF-25 5 40 250 (AF open) 317(W) 491(L) 280(H) AF = Air flush Three phase, 200/208/230/460V, 1100W, 2P 4.2/4.1/3.9/1.95 (200/208/230/460V) DISL-502 60Hz 520
Ambient temperature Water vapor handling Overall dimensions
5 40 100 (AF open) 210(W) 358(L) 215(H)

Model Single phase, 100V Voltage Applicable Volt CE Marked CSA Marked Standard Standard

1000 (L/min) 50Hz
DISL-101 Single phase, 115V (60Hz) Single phase, 200230V Three phase, 200V
DISL-502
Standard
Three phase, 208V (60Hz) DISL-502 Three phase, 380V (50Hz) Three phase, 400V (50Hz) Three phase, 415V (50Hz) Three phase, 460V (60Hz) Three phase, 230V (60Hz)
Standard Standard Standard Standard Standard Standard
Standard
100
DISL-101
Pumping Speed
10 1
101
102
103
104
Pressure
105 (Pa)
15
Dry Vacuum Pumps
System
Optional Parts
Outline Drawing
GLD Series
Features
GLD series features high performance, low vibration and noise and several functions such as gas ballast valve, oil-back-flow prevention mechanism, and large sized oil level gauge. This series equips multi-voltage motor and correspondent to international standard.
GLD-040 GLD-136A GLD-136C

Applications
Chemical, science experiment, Analyzer and Laser system. Backing pumps for the electronic microscope. Semiconductor equipments, sputtering equipment, vacuum evaporation equipment. Vacuum dryer, freeze dryer.
GLD-040
GLD-136A
GLD-136C
Specifications
Model Actual pumping speed Ultimate pressure Motor Unit L/min Pa GLD-040 50Hz 60Hz 40 48 G.V. Closed : 0.67 G.V. Open : 6.7 Single phase, 200W, 4P, Multiple-range motor Capacitor start & run, 100 120V/200 240V 4.20 (100V), 4.40 (110V) 3.60 (100V), 3.40 (110V) 4.60 (115V), 5.05 (120V) 3.40 (115V), 3.60 (120V) 2.10 (200V), 2.20 (220V) 1.80 (200V), 1.70 (220V) 2.30 (230V), 2.60 (240V) 1.70 (230V), 1.80 (240V) 550 800 R-2 16.0 KF-25 7 40 150(W) 427(L) 228.5(H) GLD-136A GLD-136C 50Hz 60Hz 50Hz 60Hz 135 162 135 162 G.V. Closed : 0.67 G.V. Closed : 0.67 G.V. Open : 6.7 G.V. Open : 6.7 Three phase, 400W, 4P, Single phase, 400W, 4P, Multiple-range motor Multiple-range motor 200 240V/380 460V Capacitor start & run, 100 120V/200 240V 2.10 (200V), 2.20 (220V) 2.00 (200V), 1.90 (220V) 2.30 (230V), 2.50 (240V) 1.90 (230V), 2.00 (240V) 6.8 (100 120V) 5.8 (100 120V) 1.30 (380V), 1.30 (400V) 1.10 (380V), 1.10 (400V) 3.5 (200 240V) 2.9 (200 240V) 1.40 (415V) 1.15 (440V), 1.20 (460V) 1,000 1,000 SMR-100 SMR-100 23.0 27.0 KF-25 KF-25 7 40 7 40 170(W) 485.5(L) 240(H) 170(W) 487.5(L) 249.5(H)
Full load current Oil capacity Recommended oil Weight Inlet port diameter Ambient temperature Overall dimensions
A mL kg mm mm
: Ultimate pressure is measured by Pirani gauge. (In case of macleod gauge, the rate is one digit smaller than this rate.)

Voltage Applicable Volt CE Marked TUV Marked cTUVus Marked Single phase, 100120V Standard GLD-040 Single phase, 200240V Standard Three phase, 200240V Standard GLD-136A Three phase, 380460V Standard Single phase, 100120V Standard GLD-136C Single phase, 200240V Standard Model

1000
(L/min)
50Hz
GLD-136A GLD-136C
100
Pumping Speed
GLD-040
10
10-2
10-1
101
102
103
104
Pressure
Gas ballast valve open
105 (Pa)
16 |
Dry Vacuum Pumps
System
Optional Parts
Outline Drawing
GLD Series
Features
GLD-201A GLD-201B GLD-280A GLD-280B

Applications
Chemical science experiment, Analyzer and Laser system. Vacuum pumping system. Back pump for SEM. Semiconductor equipments, sputtering equipment, vacuum evaporation equipment. Vacuum dryer, freeze dryer.
GLD series features high performance, low vibration and noise and several functions such as gas ballast valve, oil-back-flow prevention mechanism, and large sized oil level gauge. This series equips multi-voltage motor and correspondent to international standard.
GLD-201A
GLD-201B
GLD-280A
GLD-280B
This picture is GLD-280A
Specifications
Model Actual pumping speed Ultimate pressure Motor Unit L/min Pa GLD-201A 50Hz 60Hz 200 240 G.V. Closed : 0.67 G.V. Open : 6.7 Three phase, 550W, 4P, Multiple-range motor 200 240V/380 460V 3.00 (200V), 3.10 (220V) 2.70 (200V), 2.70 (220V) 3.30 (230V), 3.60 (240V) 2.70 (230V), 2.80 (240V) 1.80 (380V), 1.90 (400V) 1.50 (380V), 1.60 (400V) 2.00 (415V) 1.70 (440V), 1.70 (460V) 1,100 SMR-100 26.0 KF-25 7 40 170(W) 513.5(L) 240(H) GLD-201B 50Hz 60Hz 200 240 G.V. Closed : 0.67 G.V. Open : 6.7 Single phase, 550W, 4P, Multiple-range motor Capacitor start & run, 100 120V/200 240V
Full load current Oil capacity Recommended oil Weight Inlet port diameter Ambient temperature Overall dimensions
A mL kg mm mm
GLD-280A GLD-280B 50Hz 60Hz 50Hz 60Hz 280 336 280 336 G.V. Closed : 0.67 G.V. Closed : 0.67 G.V. Open : 6.7 G.V. Open : 6.7 Three phase, 750W, 4P, Single phase, 750/900W, 4P, Multiple-range motor Multiple-range motor 200 240V/380 460V Capacitor start & run, 115V/200 240V 3.60 (200V), 3.70 (220V) 3.30 (200V), 3.20 (220V) 11.4 (115V), 5.90 (200V) 12.3 (115V), 6.40 (200V) 8.2 (100-120V) 7.9 (100-120V) 4.00 (230V), 4.20 (240V) 3.20 (230V), 3.20 (240V) 5.80 (220V), 5.70 (230V) 6.30 (220V), 6.20 (230V) 4.1 (200-240V) 3.9 (200-240V) 2.10 (380V), 2.30 (400V) 1.90 (380V), 1.90 (400V) 6.80 (240V) 5.70 (240V) 2.40 (415V) 1.90 (440V), 2.00 (460V) 1,100 700 1,100 700 1,100 SMR-100 R-7 R-7 29.0 34.0 42.0 KF-25 KF-25 KF-25 7 40 7 40 7 40 170(W) 515.5(L) 249.5(H) 181(W) 536(L) 269(H) 182(W) 585(L) 271(H)

Model GLD-201A GLD-201B GLD-280A GLD-280B Voltage Applicable Volt CE Marked TUV Marked cTUVus Marked Three phase, 200240V Standard Three phase, 380460V Standard Single phase, 100120V Standard Single phase, 200240V Standard Three phase, 200240V Standard Three phase, 380460V Standard Single phase, 115V Standard Single phase, 200240V Standard

1000
(L/min)
50Hz
GLD-280A GLD-280B GLD-201A GLD-201B
100
Pumping Speed
10 1 10-2
10-1
101
102
103
104
Pressure
105 (Pa)
17
Dry Vacuum Pumps
System
Optional Parts
Outline Drawing
Mechanical Booster Pump
GHD Series
Features
GHD-031
MBS Series
Features
MBS-051
Wide range voltage motor and correspond to CE, cTUVus. Magnet coupling for no oil leakage from shaft seal and realized longer lifetime. Integrated check valve below the inlet port for backflow prevention.
Lower power consumption. No oil leakage by adoption of magnet coupling. Compact size and light weight. Pumping can be started from atmospheric pressure.
Applications
Helium leak detector. Analytical equipment. (GC/MS, ICP/MS, LC/MS) Laboratory experiment.
Applications
Ideal main pump to support pumping speed of backing pump.
GHD-031
MBS-051
Specifications
Model Actual pumping speed Ultimate pressure Motor Full load current Oil capacity Recommended oil Weight Inlet port diameter Ambient temperature Overall dimensions Unit L/min Pa A mL kg mm mm 50Hz 30 GHD-031 60Hz 36
Specifications
Model Actual pumping speed1 Ultimate pressure2 Motor Power supply Motor speed MBS-051 50 4.0 10-2 DC Brushless motor, 200W Single phase, 100 120V / 200 240V (50/60Hz) r/min 3500 1.1 (100V)/0.7 (200V) (At ultimate pressure) Current A 4.33 (100V)/2.54 (200V) (At maximum load) 50 (At ultimate pressure) Power consumption W 250 (At maximum load) Oil capacity mL 50 Recommended oil SMR-200 Weight kg 11.0 Inlet pipe diameter JIS VG-40 Outlet pipe diameter JIS VF-40 Backing pump Oil rotary vacuum pump 130 200L/min Ambient temperature 0 40 Overall dimensions mm 167(W) 410(L) 130(H) Unit m3/h Pa
0.67 Single phase, 100 120V, 100W, 2P, Capacitor run 2.0 (100 120V) 1.8 (100 120V) 370 R-2 9.3 KF-16 7 40 120(W) 288.5(L) 163(H)
Pumping speed curve

1000
(L/min) 50Hz
1 : Pumping speed varies depends on pumping speed of backing pump. 2 : Measured by ionization vacuum gauge.
Pumping speed curve

100
(m3/h) 70 (W) 280
Pumping Speed
GHD-031
60
Oil-Sealed Rotary Vacuum Pumps (200L/min)
240
50
200 Power consumption
Pumping Speed
10
40
Pumping Speed
160
30
1 10-1
20
Power consumption
120
80
101
Pressure
102
103
104
105 (Pa)
10
40

Model GHD-031 Single phase, 100120V Standard Single phase, 200240V Voltage Applicable Volt CE Marked TUV Marked cTUVus Marked
0 1 10-2
1 10-1
1 100
1 101 1 102 Inlet Pressure
1 103
1 104
0 1 105 (Pa)
: Significantly increases pumping speed in a pressure range where pumping speed of backing pump often drops. Outside drawing appears in Page 34.
18 |
Dry Vacuum Pumps
System
Optional Parts
Outline Drawing
GCD Series
Features
GCD-051X GCD-136X GCD-201X

Applications
Semiconductor industry. Chemical industry. Post chemical-treatment drying. Pharmaceutical industry.
GCD Series, direct drive, oil rotary vacuum pump is corrosion resistant for toxic and corrosive gases which is ideal for chemical, pharmaceutical applications. Surface of gas contacted parts are coated with hard plating. Three different sizes are available from 50L to 200L/min
GCD-051X
GCD-136X
GCD-201X
Specifications
Model Actual pumping speed Ultimate pressure Motor Full load current Oil capacity Recommended oil Weight Inlet port diameter Ambient temperature Overall dimensions A mL kg mm mm
Unit L/min Pa
GCD-051X 50Hz 60Hz 50 60 G.V. Closed : 0.67 G.V. Open : 6.7 Single phase, 100V, 200W, 4P Split phase starting 5.6 4.8 500 800 SO-M 14.1 KF-25 7 40 165.5(W) 419(L) 222.7(H)
GCD-136X 50Hz 60Hz 135 162 G.V. Closed : 0.67 G.V. Open : 6.7 Single phase, 100V, 400W, 4P Capacitor start & run 7.7 6.1 1,000 SO-M 25.4 KF-25 7 40 170(W) 493(L) 241.1(H)
GCD-201X 50Hz 60Hz 200 240 G.V. Closed : 0.67 G.V. Open : 6.7 Three phase, 200V, 750W, 4P 3.3 1,100 SO-M 26.6 KF-25 7 40 170(W) 509.5(L) 241.1(H) 3.6

Model GCD-051X Voltage Single phase, 100V Single phase, 200V Single phase, 220V Single phase, 230V Single phase, 100V Single phase, 200V Single phase, 220V Three phase, 200V Single phase, 100V Single phase, 220V Three phase, 200V Applicable Volt CE Marked TUV Marked cTUVus Marked Standard Standard Standard

(L/min) 1000
50Hz
GCD-201X GCD-136X
100
GCD-136X
GCD-201X
Pumping Speed
GCD-051X
10
10-2
10-1
101
102
103
104
Pressure
105 (Pa)
19
Dry Vacuum Pumps
System
Optional Parts
Outline Drawing
High Speed Vacuum Coater
VPC Series
Features
1. Effective system with high pumping down performance. 10-4Pa from atmospheric pressure in 10 minutes. Cooling water can be stopped after 15 minutes from the system is shut down. 2. Scalable functions with various options. Multi-layer deposition and co-deposition are available with additional evaporation power supply. 3. Compact and easy mobilibity. 4. EB Deposition is available as optional.
VPC-1100
Applications
Basic R&D for Electronic material, Semiconductor, solar cell. R&D of thin film for layer and organic EL.
Optional Parts Conflat flange UFC070 Adapter Optional Parts Ionization vacuum gauge Deposition controller System rack
Standard Specifications
Model Ultimate pressure Evacuation time Belljar size Evaporation power supply Vacuum system Control system Vacuum gauge Power required Water requirement Weight
-4
VPC-1100 1.3 10 Pa (with LN2) 10min to 10-4Pa from atmospheric pressure (with LN2) dia.390mm 350mm(H) 0 10V 150A (Max) Oil diffusion pump (Water cooling) 1100L/sec Oil rotary vacuum pump 200L/min 2 Liquid Nitrogen trap Manual control Pirani vacuum gauge GP-1G Three phase 200V 5.0 kVA Single phase 100V 1.0 kVA 1.5L/min (Water temperature : 20 25 degrees C, Water pressure : 200 kPa) 313kg Three phase 200V Cable 4m Single phase 100V Cable 4m
Evaporation electrode structure 3 points switch (source length : 100mm)
Overall dimensions (W) (D) (H) 1235mm 850mm 2155mm Accessories

Optional Parts Side panel
Optional parts in the picture are not equipped.
VPC-1100
Feedthrough collar
6 4 5 8 4 12 25 3
dia.
Optional Parts
Special components Evaporation Electrode SEREM PSE-150C Deposition Controller CRTM-6000G CRTM-9000G Film thickness sensor CRTS-4 Ionization vacuum gauge GI-M2 Electron beam evaporation source EGK-3M Deposition shield plate Electrode partition Water cooling metal bell-jar UFC070 flange Oil mist trap (OMI-200 OMT-200A) Sample holder Side/back panel Additional shutter Evaporation source/power supply for EB Flow switch, Substrate heating device Gas introduction port for service port System rack, Carbon electrode Evaporation electrode 1 point + 2 points switch 2 points + 2 points switch 2 points + 3 points switch
6
6 25 3 260
80
Special parts
120
7 160 4 9 10 4 11 4
Electrode structure options
1 2 3 4 5 6
Plate Filter Service port (L) Service port (S) Gauge port.1 Hermetic seal port.3 pcs.
7 8 9 10 11 12
Shutter Electrode COM Electrode 1 Electrode 2 Electrode 3 Prop
20 |
Dry Vacuum Pumps
System
Optional Parts
Outline Drawing
Vacuum Coater
DEPOX Series
Features
VFR-200M/ERH VWR-400M/ERH VTR-350M/ERH VTS-350M/ERH

Applications
Basic R&D for Electronic material, Semiconductor, solar cell. R&D of thin film for layer and organic EL.
1. Deposition system for metal and organic material. 2. Variable combination is available for pumping unit. 3. High scalable functions. 4. Enhanced safeness and reliability. 5. Multi-layer deposition and co-deposition(Max: 4 layers) are available with additional evaporation power supply and electrode. 6. Easy viewable through glass bell jar and easy maintenance.
VFR-200M / ERH
VWR-400M / ERH
VTR-350M / ERH
VTR-350M / ERH 4.0 10-4Pa (2.0 10-4Pa LN2) 1 -3 4.0 10 Pa/10min (3.0 10-3Pa/10min LN2) 1 dia.300mm 300mm(H) 1 point (100mm)
VTS-350M / ERH
VTS-350M / ERH 4.0 10-4Pa (2.0 10-4Pa LN2) 1 -3 4.0 10 Pa/10min (3.0 10-3Pa/10min LN2) 1 dia.300mm 300mm(H) 1 point (100mm) 0 10V 150A (Max) Turbo molecular pump 345L/sec Scroll pump 250L/min GP-1G GI-M2 160kg 730mm 584mm 1161mm 480mm 435.3mm 149mm Single phase 100V 0.9kVA Single phase 200V 1.5kVA
Specifications
Model Ultimate pressure Evacuation time Belljar size Evaporation electrode structure (source length) Evaporation power supply VFR-200M / ERH 8.0 10-4Pa (6.0 10-4Pa LN2) 4.0 10-3Pa/15min (3.0 10-3Pa/15min LN2) dia.300mm 300mm(H) 1 point (100mm) VWR-400M / ERH 4.0 10-4Pa (3.0 10-4Pa LN2) 4.0 10-3Pa/10min (3.0 10-3Pa/10min LN2) dia.300mm 300mm(H) 1 point (100mm)
0 10V 150A (Max) 0 10V 150A (Max) 0 10V 150A (Max) Oil diffusion pump (Air cooling) Oil diffusion pump (Water cooling) Turbo molecular pump Main pump 200L/sec 400L/sec 345L/sec Backing pump Oil rotary pump 100L/min Oil rotary pump 200L/min Oil rotary pump 200L/min In-line trap OMI-100 OMI-200 OMI-200 Pirani vacuum gauge GP-1G GP-1G GP-1G Ionization vacuum gauge GI-M2 GI-M2 GI-M2 Weight 145kg 148kg 165kg 730mm 603mm 1161mm 730mm 709mm 1161mm 730mm 584mm 1161mm Overall dimensions (Body) (W) (D) (H) (Power supply) 480mm 435.3mm 149mm 480mm 435.3mm 149mm 480mm 435.3mm 149mm (Body) Single phase 100V 1.4kVA Single phase 100V 1.6kVA Single phase 100V 1.4kVA Power required (Power supply) Single phase 200V 1.5kVA Single phase 200V 1.5kVA Single phase 200V 1.5kVA 1 : LN2trap is optional.
Optional Parts
Electrode structure options Feed through collar Vacuum chamber Accessories for inner vacuum chamber System exterior Pumping system 2 points switch 2 points simultaneously 3 points switch 3 points simultaneously 1 point + 2 points switch 2 points switch + 2 points switch 2 points switch + 1 point + 1 point
Feedthrough collar
6 1 2 6 3 5 1
20 ports (Side 16, Bottom 4) (300 x 100H) Bell jar holder Metal Bell jar Bell jar cover Sample holder UFC070 Adapter Adhesion shield plate KF-25 Adapter Electrode partition Gas introduction port Gauge port set Carbon electrode set Hermetic port set Substrate heating device 350 degrees C Sealing flange set Elevating device Control panel Side panel, Back panel Side panel for control panel Deposition controller Back panel for control panel Automatic leak valve for Oir rotary vacuum pump (VFR-200M/ERH, VWR-400M/ERH) Further details can be refered to our website.
dia
. 90
80
1 Service port 2 Gauge port Hermetic seal 3 port 4 Shutter 5 Electrode Spare port for 6 electrode 7 Prop
6 7
4 5 1 1
21
Dry Vacuum Pumps
System
Optional Parts
Outline Drawing
High frequency Sputtering System
RFS Series
Features
1. Compact and easy mobilibity. 2. High speed pumping is attainable with TMP. 3. Introduction gas can be controlled continuously with flow control valve. 4. Suitable for pre-sputtering. 5. Automatic matching control is available. 6. High accurate thin film.
RFS-200
Applications
Basic R&D for basic material, high melting material, insulating material and semiconductor material.
Specifications
Model Standard target Vacuum chamber Substrate electrode Cathode Shutter RF power supply Power supply for substrate heating Vacuum system dia.80 1 5t 200mm(W) 250mm(D) 150mm(H) SUS-304 Front door dia.80mm Cu attached heating system dia.80mm Cu Water cooling dia.95mm 1 Manual 200W 13.56MHz Digital controller Max 350 degrees C Oil diffusion pump (Water cooling) 150L/sec Oil rotary vacuum pump G-101D 100L/min 200kg Single phase 100V 1.3kVA Single phase 100V 0.5kVA 5 L/min (Water temperature : 25 degrees C, Water pressure : 200-300 kPa) RFS-200
Overall dimensions (W) (D) (H) 800mm 725mm 1635mm Weight Power required Power required for RF Water requirement
Performance
Ultimate pressure Evacuation time 6.6 104Pa 5min to 10-3Pa 101Pa (at Ar)
RFS-200
Sputtering pressure
Optional Parts
Liquid Nitrogen trap Ionization vacuum gauge Magnetron In line trap (OMI-100) Turbo molecular pump DC power supply Introduction gas (2,3 lines) Automatic leak valve for oil rotary pump
Feedthrough collar
1 2 3 4 5 9 6 8 7
dia.64
8 10 241 1 2 3 4 System rack Sample holder Front door Target 5 6 7 8 Viewport Substrate electrode Gauge port Service port 9 Shutter 10 Backing plate 11 Target electrode 11
22 |
Dry Vacuum Pumps
System
Optional Parts
Outline Drawing
High frequency magnetron Sputtering System
SCOTT Series
Features
1. Parallel-plate type RF magnetron discharge method. 2. Turbo molecular pump is used for main pumping. 3. Multiple deposition is available by dia.2 inch , 3 cathodes. 4. All gauges are installed in the rack. 5. Sputtering speed 30nm/min (SiO2) is available by magnetron sputtering. 6. Easy handling for substrate exchange and maintenance from top cover open style. 7. Reactive sputtering is available as optional.
VTR-150M/SRF
Applications
Basic R&D for basic material, high melting material, insulating material and semiconductor material.
Specifications
Model Substrate size Cathode Effective area of sputtering RF power supply Sputtering speed Film thickness distribution Ultimate pressure Evacuation time Substrate heating temperature Substrate turning range Substrate electrode distance Overall dimensions (W) (D) (H) Weight Power required Water requirement 2 inch, 3 ways dia.25 mm Max 300W (Variable from 40 300W) SiO2, More than 30nm/min at deposition SiO2, within 10% at dia.25mm 6.6 10-4 Pa Within 5 min to 6.6 10-3 Pa from atmospheric pressure Max 350 degrees C (Without substrate water cooling function) 3 positions, index turn (Approx 300 degree turn) by manual operation 50mm 90mm (Variable : Half fixed) 1150mm 750.5mm 1070mm 400kg Single phase 100V (50/60Hz) 3.0 kVA 2L/min (Water temperature : Less than 25 degrees C, Water pressure : 200kPa) VTR-150M/SRF dia.2 inch (dia.50.8mm) t 1mm, 1unit
SCOTT-C3
Optional Parts
Etching function (cleaning) Substrate heating 600 degrees C (Water cooling chamber) Mass flow controller In line trap (OMI-100) 4 inch, 1 way DC power supply Introduction gas (2,3 lines) Automatic leak valve for oil rotary pump
Feedthrough collar
1 3
10 3 10
2 3
o
9 8 4
1 2 3 4
5
Trigger electrode Electrode partition Cathode Gas introduction
6
5 6 7 8
dia.64
Sealing flange Viewport Shutter handle Shutter
7
9 Vent valve 10 Gauge port
23
Dry Vacuum Pumps
System
Optional Parts
Outline Drawing
Attachment of Oil Rotary Vacuum Pump Optional parts Suction and Exhaust Trap
GLD-136C+OMT-200A
OMT-200A
Suction and Exhaust Pipe

GLD-136C+Selectable Suction pipe
Hose port Suction pipe dia.27
GLD-136C+Selectable Suction pipe

Hose port Suction pipe dia.12 dia.15 KF-25 Suction pipe O-ring
Standard Exhaust Cap
50 mm sq adapter
GLD-136C+OMT-200A+OFI-200V
OMT-200A OFI-200V Standard Suction pipe
Standard Suction pipe Standard Exhaust Cap
KF Flange Attachment Process

Standard Composition
KF Flange
GCD-136X+OMC-200
OMC-200
Clamp
After Attachment
Centerring
KF Flange
GLD-136C+OMI-200+KF-25 Exhaust pipe

Hose port Exhaust pipe KF-25 Exhaust pipe
Unnecessary case of Centering

KF Flange
O-ring
KF-25 Suction pipe with attached o-ring
Clamp
OMI-200
Standard Exhaust Cap OMI-200 Cap
24 |
Dry Vacuum Pumps
System
Optional Parts
Outline Drawing
Optional Parts Accessories for Oil Rotary Vacuum Pumps

Fore-line Trap (Inlet filter)
Models OFI-050C OFI-200C OFI-050V OFI-200V Applications
Prevent counter flow of oil diffusion Prevent counter flow of oil diffusion Prevent particles or liquid into vacuum pumps Prevent particles or liquid into vacuum pumps
Units: mm.
Applicable models
50L/min or less 200L/min or less 50L/min or less 200L/min or less
A
74 102 74 102
B
114 150 114 150
C
KF-25 KF-25 KF-25 KF-25
KF-25 clamp needed for installation. : Filters are non-replaceable due to closed type. : Pumping speed of applicable models is at 50Hz.
A C
OFI-050
OFI-200
Vacuum Pump Suction and Exhaust Filter

This filter can trap acidic gas, oil mist effectively by using ion-exchanged resin fiber. Filter can be placed both vacuum and exhaust side and filter can be replaceable. Models
Filter system Out In Pass Applicable models 500L/min or less Pressure range 0.1MPa Ambient Ambient humidity temperature 7 40 85% (non condensing) Suction port KF-25 KF-40 Exhaust port KF-25 KF-40 Height 154mm 234mm
SGT-100 SGT-200
Suction port
19
16 Exhaust port
dia. 89.1
SGT-200
SGT-100
25
Dry Vacuum Pumps
System
Optional Parts
Outline Drawing
Optional Parts Vacuum Pump Oil
SMR-100
SO-M
SO-M 4L
R-2/R-7
R-2
R-7
SO-M 1L
Models Mineral oil
Can size
1 L (2 500ml cans) 4L can 18L can
Models Synthetic oil
Can size
1L can 4L can 18L can
Models
Can size
1L can 4L can 20L can 2.2L can 8L can 20L can
SMR-100
SO-M
ULVOIL R-2
Synthetic oil
ULVOIL R-7
Synthetic oil
Oil-mist Trap
Models Applicable models
GLD-040, GHD-031 GLD-136A, GLD-136C GLD-201A, GLD-201B
Units: mm.
A
G3/4 G1 G1
B
dia.65 dia.113 dia.113
C
93 135 135
A C
OMT-050A OMT-100A OMT-200A
OMT-100A OMT-050A
OMT-200A
: Filter replaceable
In-line Trap (Piping connection type oil-mist trap)

GLD-040, GHD-031 GLD-136A, GLD-136C GLD-201A, GLD-201B
Units: mm.
A
G1 G1
B
dia.94 dia.116
C
166 166
D
177 178
E
G1 G1
OMI-100
C D
OMI-100 OMI-200
: Filter replaceable : In-line type
: Adapter for trap is necessary.

A
OMI-200
Adapter for Trap

This Adapter is required to adjust screw diameter from G3/4 to G1.
Type of Adapter G 3/4 male G1 female

GLD-040, GHD-031
Applicable models
Adaptive oil-mist traps
OMI-100 OMT-100A
Oil-mist Separator (Anti-corrosive type)

GCD-051X (Anti-corrosive) GCD-136X, GCD-201X (Anti-corrosive)
Units: mm.
B A
A
KF-25 KF-25
B
dia.66 dia.90
C
116 140.5
D
148 173
E
dia.74 dia.99
OMC-050 OMC-200
C D
: Chemical type (KF-25 clamp needed for installation)

Drain port (PT1/8) A
OMC-050
OMC-200
26 |
Dry Vacuum Pumps
System
Optional Parts
Outline Drawing
Optional Parts Clamp (Material : Aluminium)

Standard Flange size A B
dia
B
Accessories for Oil Rotary Vacuum Pumps

units : mm.
Centerring (Material : SUS304)

SCK-1016 KF-16 45 61 16 22 SCK-1025 KF-25 55 72 16 32 SCK-1040 KF-40 70 90 16 47
dia. A dia. B
Standard Flange size dia.A dia.B C D
SCK-2016 KF-16 17 16 3.9 8
SCK-2025 KF-25 26 24 3.9 8
SCK-2040 KF-40 41 39 3.9 8
.D
C dia.D
Blank Flange (Material : SUS304)

Standard Flange size dia.A dia.B C
dia.A dia.B C
Nozzle (Material : SUS304)

SCK-4025 KF-25 40 26.2 6 SCK-4040 KF-40 55 41.2 6
dia.D
SCK-4016 KF-16 30 17.2 6
Standard Flange size dia.A B C dia.D

C B dia.A
SCK-2512 KF-25 40 6 35 12
SCK-2518 KF-25 40 6 35 18
Nipple (Material : SUS304)

dia. A dia. B dia. C
Elbow (Material : SUS304)

SCK-5016 KF-16 30 20 16 60 SCK-5025 KF-25 40 27.2 24 100 SCK-5040 KF-40 55 42.7 39 100
D D dia.A
Standard Flange size dia.A dia.B dia.C D

D

dia.B dia.C
SCK-6016 KF-16 30 20 16 40
SCK-6025 KF-25 40 27.2 24 50
SCK-6040 KF-40 55 42.7 39 65
dia.A
dia.B
Tee (Material : SUS304)

Standard Flange size dia.A dia.B dia.C
dia. C dia. B dia.A
dia.C
Cross (Material : SUS304)

SCK-7016 KF-16 30 20 16 40 SCK-7025 KF-25 40 27.2 24 50 SCK-7040 KF-40 55 42.7 39 65
dia.A dia. B dia. C
SCK-8016 KF-16 30 20 16 40
SCK-8025 KF-25 40 27.2 24 50
D
D
D D
Reducer (Material : SUS304)

Standard Flange size dia.A
dia.B
KF Flange (Material : SUS304)

SCK-9025 KF-16/25 30 40 20 16 SCK-9040 KF-25/40 40 55 27.2 24
dia.A dia.B E dia.C dia.D
Standard
SCK-3016 KF-16 30 17.2 dia.20 E t=2 16

dia. C
SCK-3025 KF-25 40 26.2 20A 10S 24

dia. D
SCK-3040 KF-40 55 41.2 32A 10S 39 42,7 20
Type a
Flange size dia.A dia.B Connected pipe dia.C dia.D E

dia. A dia. B
Type b
dia.B dia.C dia.D

40
dia. C dia. D
D
20 10
27.2 20
dia.A
27
Dry Vacuum Pumps
System
Optional Parts
Outline Drawing
Optional Parts VCR Adapters (Material : Joint = SUS316, Flange = SUS304)

Female
A
Accessories for Oil Rotary Vacuum Pumps

units : mm.
Male
Standard Flange size Female Tube diameter A dia.B Standard Flange size Male Tube diameter A dia.B
SCA-1614-F KF-16 1/4 inch 35.8 3 SCA-1614-M KF-16 1/4 inch 35.8 3
SCA-1638-F KF-16 3/8 inch 42.1 7.1 SCA-1638-M KF-16 3/8 inch 42.1 7.1
dia.B
dia.B
Gauge port (Material : SUS304)

A
Leak port (Material : SUS304)

A
Standard Flange size Pipe diameter A dia.B Standard Flange size Pipe diameter A dia.B
SCO-1025 KF-25 dia.15 74 25 SCO-2025 KF-25 dia.18 74 28
dia. B
SCO-1040 KF-40 dia.15 58 25 SCO-2040 KF-40 dia.18 58 28
Standard Flange size A
SCO-3016 KF-16 65
SCO-3025 KF-25 66.5
Flexible tube (Material : SUS316)
Rubber Vacuum Hose
Standard STK-016-250 STK-016-500 STK-016-1000 STK-025-250 STK-025-500 STK-025-1000 STK-040-250 STK-040-500 STK-040-1000
Flange size (mm) KF-16/250 KF-16/500 KF-16/1000 KF-25/250 KF-25/500 KF-25/1000 KF-40/250 KF-40/500 KF-40/1000 Size (I.D. O.D.) Adaptable hose port
7.5 20 12 30 15 36 18 42 25 50 9 24
6 18
dia.8 dia.11, dia.12 dia.16, dia.18 dia.20, dia.22 dia.27 dia.15 dia.9
28 |
Dry Vacuum Pumps
System
Optional Parts
Outline Drawing
Optional Parts Suction and Exhaust Pipes for Oil Rotary Vacuum Pumps Suction Pipe
Type Products Material
GHD-031 GLD-040 GCD-051X GLD-136A GLD-136C GLD-201A GLD-201B GCD-136X GCD-201X GLD-280A GLD-280B Photo number
Hose port suction pipe (dia.8 M20) Hose port suction pipe (dia.12 M20) Hose port suction pipe (dia.15 M20) Hose port type Hose port suction pipe (dia.18 M20) Hose port suction pipe (dia.22 M20) Hose port suction pipe (dia.27 40 mm sq) Hose port suction pipe (dia.27 50 mm sq) Hose port suction pipe (dia.30 50 mm sq) For GHD-031 only Hose port suction pipe for GHD-031 (dia.12) Hose port suction pipe for GHD-031 (dia.18) Suction pipe for GHD-031 (KF-16) KF-25 suction pipe (KF-25 M20) KF-25 type KF-25 suction pipe (KF-25 40 mm sq) KF-25 suction pipe (KF-25 50 mm sq) A-type suction pipe (R1/4-L20 Male M20) 1/4 screw type B-type suction pipe (R1/4 Female M20) C-type suction pipe (R1/4-L10 Male M20) Adapter
: Standard type
BS + plate BS + plate BS + plate BS + plate BS + plate ZDC + plate ZDC + plate ZDC + plate BS + plate BS + plate BS + plate BS + plate PPS PPS BS + plate BS + plate BS + plate ZDC ZDC
+ 40 mm sq + 40 mm sq + 40 mm sq + 40 mm sq + 40 mm sq
+ 50 mm sq + 50 mm sq + 50 mm sq + 50 mm sq + 50 mm sq + 50 mm sq + 50 mm sq + 50 mm sq
1 2 3 4 5
6 7
+ 40 mm sq
+ 50 mm sq
+ 50 mm sq
8 9 10
+ 40 mm sq + 40 mm sq + 40 mm sq
+ 50 mm sq + 50 mm sq + 50 mm sq
+ 50 mm sq + 50 mm sq + 50 mm sq
13 15 14 11 12
40 mm sq Adapter (M20 Female) 50 mm sq Adapter (M20 Female)
: Replaceable (no Adapters necessary)
+ 40 mm sq : Replaceable (40 mm sq Adapter required)
+ 50 mm sq : Replaceable (50 mm sq Adapter required)
Suction Pipe
7 6
5 4 3 2 1
Exhaust Pipe
10 9 12 11
13
14 15
17
16
Exhaust Pipe
Type Products Material
GLD-040 GHD-031 GLD-136A GLD-136C GLD-201A GLD-201B GLD-280A GLD-280B GCD-051X GCD-136X GCD-201X Photo number
Hose port exhaust pipe (dia.12 G3/4) Hose port type Hose port exhaust pipe (dia.15 G3/4) Hose port exhaust pipe (dia.18 G3/4) Hose port exhaust pipe (dia.27 G1) KF flange type Exhaust pipe KF-25 exhaust pipes (KF-25 G3/4) KF-25 exhaust pipes (KF-25 G1) KF-16 (G3/4) Exhaust pipes Assy (G3/4) Exhaust pipes Assy (G1)
BS + plate BS + plate BS + plate BS + plate PPS PPS BS + plate PA PA

: Equipped with vacuum pump

16 17
Remarks: Different anti-corrosive quality as standard exhaust pipes.
: Replaceable (no Adapters necessary)
29
Dry Vacuum Pumps
System
Optional Parts
Outline Drawing
Outline Drawing
Dry pump
OUT
DAP-6D (see p.6)

(163) 155 91 (22) IN
Dry pump
M4 Screw (EARTH) 67 45 24 (4)
DAP-12S (see p.6)

(163) 155 91 (22) OUT
M4 Screw (EARTH) (4) 67 45 24 IN
55.5
55.5
96.1 (100.6)
89.6
(94)
(94)
4-M4 Tap
4-M3 Tap
671 801
4-Rubber legs
49 57 CCW
M3 Tap M4 Tap
4-M4 Tap 4-M3 Tap
671 801
4-Rubber legs
49 57 CCW
4 M3 Tap M4 Tap
Dry pump
DA-30D (see p.7)

OUT 278 27.5 212 167 IN 22.5
Dry pump
DA-60S (see p.7)

278 IN 27.5 (30) 212 22.5
95 (30)
95
(165)
(200)
(200) 224.5
91
91
224.5
160 200
60
Rubber legs 4-M4
136 160
12
160 200
60
Rubber legs 4-M4
136 160
Dry pump
DAT-50D (see p.7)

dia.132 173.8
Dry pump
DAT-100S (see p.7)

173.8 dia.132
Lead wire Circle shaped terminals R1.25-5
Lead wire Circle shaped terminals R1.25-5
IN IN 305 OUT 54 305 54 OUT
144
12
10
232
Rubber legs
10
130
4-M5 Depth 10
120 150
130 232
4-M5 Depth 10 Rubber legs
120 150
Dry pump
IN
DA-20D (see p.8)

84 68
Dry pump
IN
DA-40S (see p.8)

OUT 84
(70)
(70)
(178)
(165)
(165)
66.5
66.5
(178)
(11)
(11)
(112) Rubber legs 4-M4
108
70
236 (240)
186
(112) Rubber legs 4-M4
108
70
186 (240) 236
30 |
144
(165)
96.1 (100.6)
89.6
Dry Vacuum Pumps
System
Optional Parts
Outline Drawing
All size unit is mm
Dry pump
(16.5) OUT
DA-41D (see p.8)

320 161 IN 157
Dry pump
(16.5)
DA-81S (see p.8)

320 79.5 IN 181 OUT
217 192
217 10.5
10.5
192
4-M4 Tap
230
90 133
4-M4 Tap
230
133
90
Dry pump
DA-60D (see p.9)

OUT 132 IN 108 (81) 90
Dry pump
DA-120S (see p.9)

IN 132 108 (81) 90 (81) OUT
201.5
(96)
(238)
229
225
201.5
238
229
(92)
225
(9)
(9)
300 340 347 (6)
110 140
(5)
(5)
300 340 347
110 (6)
140
Dry pump
OUT
DA-121D(see p.9)
411 221 IN 193.5
Dry pump
DA-241S (see p.9)

411 95 IN 207 OUT
272 285
272 285 270
270
360 402
13
354
120 144 180
354 360 402
120 144 180
Dry pump
(84)
DAU-20 (see p.10)

77 IN
Dry pump
(84) 13
DTU-20 (see p.10)

77 IN
13
(72)
(72)
13
(217)
(72)
(25)
(25)
(72)
13
103
10
OUT
(97)
49.5 (327)
148
13 10 103 Gas ballast valve
OUT (97)
49.5 (327)
148
Gas ballast valve
(217)
(92)
(96)
31
Dry Vacuum Pumps
System
Optional Parts
Outline Drawing
Outline Drawing
Dry pump
142 OUT
DTC-22 (see p.11)

272 133 IN (16.5)
Dry pump
(16.5) OUT
DTC-41 (see p.11)

320 161 IN 155 133
175.1 202
10.5
217 192
70 118
10.6
186
4-M4 Tap
4-M4 Tap
90 230 133
Dry pump
OUT
DTC-60 (see p.11)

340 185 IN 158
Dry pump
(25.5)
DOP-40D (see p.12)

(270) 219 (25.5) 94 16
OUT
IN
(242)
228
(224)
66.5
162.5 7
(27)
300 330 (14) 280 150 110
(246) Earth screw
192
(27)
1.5
15
15
179
4-M5 Tap
89 104 132
4-M4
Dry pump
(25.5)
DOP-80S (see p.12)

(270) 219 (25.5) 94 16
Dry pump
(25.5)
DOP-80SP (see p.12)

(288) 237 (25.5) 94 16 IN
OUT
IN
OUT
181 66.5
162.5
66.5
1.5
(27)
15
(246) Earth screw
192
15
1.5
15
89 104 132
15 210 (264) (27)
85
164.5
179
(27)
4-M5 Tap
(27)
4-M5 Tap
32
89 104 132 Earth screw
(3.5)
Dry pump
DOP-300SA (see p.13)

Cable diameter dia.6-12mm (443) (315) (155) (160) 180.5 82
Dry pump
DOP-420SA (see p.13)

310 168 IN
180.5
IN 108
(231)
100
107
19
253
102.5
108
OUT 113.5 113.5 120 136.85 136.85
M6
195
48.5
119.5
269
149.5 523
OUT
32 |
18
Dry Vacuum Pumps
System
Optional Parts
Outline Drawing
All size unit is mm
Dry pump
91
DIS-90 (see p.14)

123 85 IN 308
Dry pump
122
DIS-251 [Single phase] (see p.14)

252 IN 400 96
(37)
73.5
(76) 154 180 OUT (10) 90 Air flush port (Rc1/8)

38
225
336 23.5 52 97 121 101
112 140 4-dia. 7

4-dia. 11
136 180 OUT
Air flush port (Rc1/8)
130 170
Dry pump
IN
DIS-501 [Three phase] (see p.14)

372 OUT 99 46 29 36
Dry pump
IN
DISL-101 (see p.15)

120
Air flush port (Rc1/8) 292
215
373 397 372
20
140 210
(50)
OUT
110
177
138 358
90
4-dia. 9
288
42
310
Dry pump
DISL-502 (see p.15)

IN 14 (477)
42
Air flush
Oil pump
Gas ballast valve 35 18
GLD-040 (see p.16)

145 70 Oil level gauge Suction pipe Oil inlet plug 46 64 Exhaust pipe 35 23.5 36.5
207
I O
280
231
140
MAX MIN
317 Air flush
491
20
110
150
20
18
21
220
(76)
OUT
144
252
10
2-dia. 8.5
74
13
228.5
78.5
39
81
17
206
427
17
Drain plug
Rubber legs
Oil pump
GLD-136A (see p.16)

Oil level gauge Suction pipe Exhaust pipe 39 56 Oil inlet plug 181 90 35 29 83 48 212.5
Oil pump
GLD-136C (see p.16)

Oil inlet plug 181 56 90 35 29 83 48 214.5 Oil level gauge Exhaust pipe
Gas ballast valve Suction pipe
37
33
dia. 60 8 88.5 (240)
MAX MIN
MIN
86
20 Drain plug
130 170
20
72
20
260 485.5 Rubber legs
20
20
130 170
20
14 18
14 18
86
249.5
MAX
dia. 60 88
39
49
72
20
20
Drain plug
33
Dry Vacuum Pumps
System
Optional Parts
Outline Drawing
Outline Drawing
Oil pump
GLD-201A (see p.17)

Oil level gauge Suction pipe Exhaust pipe 39 84 Oil inlet plug 209 90 35 29 83 48 212.5
Oil pump
GLD-201B (see p.17)

Oil level gauge Suction pipe Exhaust pipe Oil inlet plug 209 84 90 35 29 83 48 214.5
dia.60 8 88.5 (240)
dia. 60 88 9 100 20 260 513.5 Rubber legs 20 20 Drain plug 130 170 20 14 18 86 249.5 8
MAX MIN
20 Drain plug
130 170
20
14 18
86
39 49
100
20
20
Oil pump
Gas ballast valve
GLD-280A (see p.17)

Suction pipe Oil inlet plug 32 36 75 Exhaust pipe 225 110 33 20 14 83 228
Oil pump
Oil level gauge
GLD-280B (see p.17)

225 75 110 33 2014 83 277
43.5 31.5
Gas ballast valve Suction port 43.5 31.5

32 36
124
269
86
29
20
130 175 181
20
116
20
260 300 536 Rubber legs
20
120
134 174 182
25 29
23
86
271
124
295 335 585
22-dia.10
Oil level gauge
Oil pump
132.5 135
GHD-031 (see p.18)

17 40 23 63.5 106 Oil level gauge 13.5 29 Oil inlet plug 23.5 23.5 23 Suction pipe Exhaust pipe 18
Oil pump
MBS-051 (see p.18)

Oil inlet plug 10.5 123.6 Inlet flange 386 165 13.5
36
83.5
167
83.5
dia.105
38 163
133
130
65
58
65
Rubber legs dia. 4-8 59.5 15 120 288.5 15 71.5 7.5
64 107 120
dia.105
Drain plug Oil level gauge
13
Outlet flange
Drain plug
Oil pump
GCD-051X (see p.19)

Oil inlet plug 175 419 70 Exhaust pipe 145 64 46 29 35 18 Gas ballast valve Suction pipe Oil level gauge 39 36.5 23.5 35 18
Oil pump
GCD-136X (see p.19)

Oil inlet plug 181 56 90 Exhaust pipe 35 29 Suction pipe Oil level gauge 83 48 202
MAX MIN
13 78.5 222.7
10
74
18.2
Rubber legs
17
206 240
17 76 Filtration joint(R3/8)
18.2
15.5
20
150 165.5
110
20
14
86
dia. 60 8 88.5 241.1
39 40.4
20
130 170
20
(27)
72
20
Rubber legs
Drain plug
Filtration joint (R3/8)
Drain plug
260 493
20
34 |
130
Dry Vacuum Pumps
System
Optional Parts
Outline Drawing
All size unit is mm
Oil pump
GCD-201X (see p.19)

Suction pipe Oil level gauge Oil inlet plug 84 209 90 Exhaust pipe 35 29 83 48 190.5 39 40.4
System
VPC-1100 (see p.20)
dia. 60 8 88.5 241.1
2155
14
86
18.2
20
130 170
20
(27)
100
20
Rubber legs
Drain plug
260 509.5
20
Filtration joint(R3/8)
Filtration joint(R3/8)
(90) 1145 750 (40)
System
VFR-200M/ERH (see p.21)
System
VWR-400M/ERH (see p.21)
921
149
377
Pa
760
1161
MAX MIN
730
(83)
520
730
(100)
520
(89)
System
VTR-350M/ERH (see p.21)
System
VTS-350M/ERH (see p.21)
1161
MAX MIN
730
(64)
760
520
730
(64)
520
System
RFS-200 (see p.22)

800 (55) 630 (40)
System
"SCOTT-C3" VTR-150M/SRF (see p.23)
1625.5
(1635)
521 1102
581 704
1070
722
760
1161
760
1161
35
Global Network
GERMANY 5 U.S.A. 4 U.S.A. 3 24 U.K.
25
RUSSIA 26
SHENYANG 20 BEIJING
21
KOREA
12 13 14 23
SHANGHAI
6 22
JAPAN 1 2 TAIWAN 8 9 10 11
INDIA
19
HONG KONG MALAYSIA

7
16 17
THAILAND
18
SINGAPORE
15
ULVAC KIKO, Inc. Sales Division (Overseas Division) 1-10-4 Kitashinyokohama, Kohoku-ku, Yokohama City, Kanagawa 223-0059, Japan TEL (81) 45-533-0206 FAX (81) 45-533-0204
1
ULVAC Group Global Network JAPAN 2 ULVAC Inc. Head Office S M 2500 Hagisono, Chigasaki, Kanagawa 253-8543, Japan TEL: (81) 467-89-2033 FAX: (81) 467-82-9114 U.S.A. 3 ULVAC Technologies, Inc. Headquarters S M 401 Griffin Brook Drive Methuen, MA 01844, U.S.A. TEL: (1) 978-686-7550 FAX: (1) 978-689-6300 4 ULVAC Technologies, Inc. California Sales & Service Center S M 4005 Clipper Court, Fremont, CA 94538, U.S.A. TEL: (1) 510-226-0151 FAX: (1) 510-226-0167 GERMANY 5 ULVAC G.m.b.H. S M Parkring 11, 85748 Garching(Munich), Germany TEL: (49) 89-960909-0 FAX: (49) 89-960909-96 CHINA 6 ULVAC (SHANGHAI) TRADING CO., LTD. S M No.1000 Qixin Rd, Shanghai, 201100, China TEL: (86) 21-6127-6618 FAX: (86) 21-61456821 7 HONG KONG ULVAC CO., LTD. S M Flat L, 9/F., Summit Building, 30 Man Yue Street, Hunghom, Kowloon, Hong Kong TEL: (852) 2523-5940 FAX: (852) 3003-6256 TAIWAN 8 ULVAC TAIWAN Inc. S 8F., No.5, Keji Rd., Hsinchu Science Park, Hsinchu City, 30078, Taiwan, R.O.C. TEL: (886) 3-579-5688 FAX: (886) 3-579-7688 9 ULVAC TAIWAN Inc. Tainan Sales Division S 3F, No.27, Nanke 2nd Rd., Tainan Science Park, Sinshih Township, Tainan Country 74147, Taiwan, R.O.C. TEL: (886) 6-505-3860 FAX: (886) 6-505-3680 10 ULTRA CLEAN PRECISION TECHNOLOGIES CORP. Taoyuan CIP Feb. M No.19-2, Lane 54, Sec. 1, Minsheng N. Rd., Gueishan Township, Taoyuan Country 33391, Taiwan, R.O.C. TEL: (886) 3-358-5481 FAX: (886) 3-358-5286 11 ULTRA CLEAN PRECISION TECHNOLOGIES CORP. Southern Taiwan Science Park Feb. M No.27, Sec. 1, Huandong Rd., Southem Taiwan Science Park, Sinshih Township, Tainan Country 74146, Taiwan, R.O.C. TEL: (886) 6-505-8888 FAX: (886) 6-505-8866 KOREA 12 ULVAC KOREA, Ltd. Head Office S 837-4, HansanRi, Chungbuk-Myeon, Pyongtaek, Kyonggi-Do, Korea 451-830 TEL: (82) 31-683-2922 FAX: (82) 31-683-9033 13 ULVAC KOREA, Ltd. Seoul Branch S 1338-23, 5F Cliford B/D, Seocho-Dong, Seocho-Ku, Seoul, Korea TEL: (82) 2-3473-2920 FAX: (82) 2-3473-0885 14 ULVAC KOREA, Ltd. Gumi Customer Service Center M Jiwon-5Dong, 4F 401, 92-9 Imsoo-Dong, Gumi-City, Kyoung -Buk, Korea TEL: (82)54-471-3567~ 8 FAX: (82)54-471-3569
SINGAPORE ULVAC SINGAPORE PTE LTD S M 30 Loyang Way, #7-10, JTC Building, Singapore 508769 TEL: (65) 6542-2700 FAX: (65) 6542-2755 MALAYSIA 16 ULVAC MALAYSIA SDN. BHD. KL FACTORY S M No.8 Jalan Gitar 33/3, Elite Industrial Eatate, Off Jalan Bukit Kemuning 40350 Shan Alam, Seangor Darul Ehsan, Malaysia TEL: (60) 3-5121 4700 FAX: (60) 3-5122 3755 17 ULVAC MALAYSIA SDN. BHD. Penang Branch S M Unit 2, Lower Level 5, Hotel Equatorial Penang, No.1, Jalan Bukit Jambul, 11900 Penang, Malaysia TEL: (60) 4-643-4700 FAX: (60) 4-644-3755 THAILAND 18 ULVAC (THAILAND) LTD. S M 140/29 Moo 12 T. Rachathewa, A. Bangplee Samutprakarn 10540 Thailand TEL: (66) 2-3124447 FAX: (66) 2-3124474 INDIA 19 ULVAC, Inc. India Branch S 301, Tara Tycoon 12-13-97, Tarnaka Secunderabad-500 017, India TEL: (91) 40-27007006 FAX: (91) 40-27007005
15
Distributor CHINA SKY Technology Development Co., Ltd. CAS S No.1, Xinyuan Street, Hunnan Industrial Zone, Shenyang, 110168, China TEL: (86) 24-23826865 FAX: (86) 24-23826800 21 KYKM Beijing Zhongkekemei Vacuum Technology Co., Ltd. S M No.266 Cheng Fu Road, Zhongguancun, Haidian District, Beijing, 100080, China TEL: (86) 10-62528994 FAX: (86) 10-62548842 22 SHANGHAI WANLAI INDUSTRY LTD. S Suite 601, Mansion Abbrebiation, No.888 YiShan Road, Shanghai, 200233, China TEL: (86) 21-64320612 FAX: (86) 21-64320072 KOREA 23 POONGIL COMMERCIAL CO., LTD S M 4F Woori Bldg, 129-4, Namyoung-Dong, Youngsan-Gu, Seoul, Korea TEL: (82) 2-765-1477 FAX: (82) 2-744-5507 U.S.A. 24 Kurt J. Lesker Company S M PO Box 10, 1925 Route 51, Clairton, PA 15025, U.S.A. TEL: (1) 412-387-9200 FAX: (1) 412-384-2745 Sales (US): 1-800-245-1656 U.K. 25 Kurt J. Lesker Company Ltd. S M 15/16 Burgess Road, Hastings, East Sussex TN35 4NR, England TEL: (44) 1424-458100 FAX: (44) 1424-458103 RUSSIA 26 Alwest-vacuum Ltd. S M Elektrodnaya yl., 11, Moscow, Russia TEL: (7) 495-309-27-38 FAX: (7) 495-309-20-52
20
S = Sales M = Maintenance
The dimensions and specifications of the products listed in this catalog are subject to change without prior notice for improvement of their performance.
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Small Vacuum Pumps Catalog Guide

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SMALL VACUUM PUMPS

Creating the possibilities of vacuum pump technology

ULVAC KIKO Serves a Wide Variety of Industries

developed by firm reliability achieved through working in the consumer business.

through our wide variety of products and reliable support.

As a Manufacturer Specializing in Small Size Vacuum Pumps TOTAL SUPPORT

Units conversion table

Pumping speed units

SMALL VACUUM PUMPS CATALOG

L/min 1.0 16.67 28.32

m3/h 0.06 1.0 1.699

cfm 0.035 0.589 1.0

Hight Speed Vacuum coater

Vacuum coater "DEPOX"

High Vacuum Type

Rocking Piston Type

Direct Drive Oil-Sealed Rotary Vacuum Pumps

Mechanical Booster Pump

Pump Selecting Process

Pumping time ( min )

Tank Volume (L) Pumping speed ( L/min )

First pressure ( Pa ) Ultimate pressure ( Pa )

DAT-50D DA-30D DA-20D

23 L /min (at 10000Pa)

(L/min) 140 120 100 Pumping Speed 80 60 40 20

SMALL VACUUM PUMPS CATALOG

Movement Principles for Each Type of Vacuum Pumps

Rocking Piston Type Dry Vacuum Pumps

Last process of exhaust (Top dead center)

Rotary axis center

Scroll Type Dry Vacuum Pumps

Oil-Sealed Rotary Pumps

Pressure process (b)

Suction process Exhaust process

Exhaust process of 2 stage Oil-Sealed Rotary Pumps

A Guide to Our Catalog

Diaphragm Type Dry Vacuum Pumps

Corresponding voltage and Certificate

Pumping speed curves

Single phase, 220240V

Single phase, 200V

Further details can be refered to our website.

Outside drawing appears in Page 30.

SMALL VACUUM PUMPS CATALOG

Dry Vacuum Pumps

Oil-Sealed Rotary Vacuum Pumps

Diaphragm Type Dry Vacuum Pumps

Corresponding voltage and Certificate

Pumping speed curves

Single phase, 220240V

Single phase, 200V

Further details can be refered to our website.

Outside drawing appears in Page 30.

SMALL VACUUM PUMPS CATALOG

Dry Vacuum Pumps

Oil-Sealed Rotary Vacuum Pumps

Diaphragm Type Dry Vacuum Pumps

DA-30D DA-60S DAT-50D DAT-100S

Corresponding voltage and Certificate

Pumping speed curves

Single phase, 200V Three phase, 200220V Single phase, 220V