Parts List for S/Parts Inventory

S/Parts List
NO
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
27
28
29
30
31
32
33
34
35
36
37
38
39
40
41
42
43
44
45
46
47
48
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
S/L
Mat. Code
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
S1A20230
S1J10005
S1J50007
S2A20050
S2A20051
S4A60003
S4A60012
S5D90005
S5D90015
S5D90018
S5D90019
S5D90020
S5D90021
S5D90032
S5D90038
S5D90039
S5D90042
S5D90043
S5D90050
S5D90051
S5D90056
S5D90060
S5D90061
S5D90062
S5D90068
S5D90075
S5D90076
S5E50020
SZ980111
SZ980118
SZ980246
S1A20235
S1J10003
S1J10004
S1J40004
S1J40008
S1J40009
S1J40010
S2A20001
S2A20002
S2A20003
S2A20005
S2A20006
S2A20007
S2A20009
S2A20010
S2A20011
S2A20012
LOCATION
Model
DJ-802V
AP-612A
AP-612A
AIM801
AIM801
LS6000
LS6000
LS6000
LS6000
LS6000
LS6000
LS6000
LS6000
LS6000
LS6000
LS6000
LS6000
LS6000
LS6000
LS6000
LS6000
LS6000
LS6000
LS6000
LS6000
WI880
IS2000
IS2000
DJ-802V
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
Mat.Description
FLECXIBLE GAS PIPE 3/8in
ROAP
SEQUENCE (SAME:S9Z60154)
CHECK VALVE
CHECK VALVE
STEPPING MOTOR
LASER SENSOR AMP(LX2-60)
IC
IC
IC
IC
IC
THERMAL FUSE 250V 2A 98C
MEASUREMENT HEAD
IC
IC
IC
IC
UDN 2952B
UDN 5712M
IC 74LS06
IC- 74LS377
IC SOCKET- 20PIN DIP-ROUND
RESISTOR ARRAY-1K OHM- 5PIN
IC
IC SOCKET 14PIN- DIP TYPE
IC SOCKET 8PIN - CAN TYPE
MAGNETIC VALVE(PREALIGN/TRANSF
DC MICRO MOTOR
D3142 DISK DRIVE
DI FILTER
PIRANI SENSOR
ROAP
ROAP (SAME:S1K40001)
MOTOR
SERVO MOTOR UNIT
SPEED CONTROL UNIT
PHOTO SENSOR
CONTROL UNIT B/D-D68PC02A
CONTROL UNIT B/D-S68MR01C
O-RING FOR GATE
SERRVO PACK
GAS LINE FILTER
CPU B/D-H68SB04-1
GATE O-RING
BUFFER HEATER
ENCODER
SERVO PACK
Vendor Part. No
321-6-X-6-B2
280J18
C500-ID219
4Z-C4L-1-SS
6Z-C6L-1-SS
UDX5107N
PH0-4129-000
74LS75
74S04N
74HC245N
74HC374E
74LS42N
250V 2A 98C
545-4480
74F74N
74F86N
27C256
27C64A
2952B
5712M
74LS06
74LS377
20PIN
"1K OHM, 5PIN"
6N137
"SOCKET DIP, 14PIN"
"SOCKET CAN, 8PIN"
V030E1
2233F012SG-22/2K
134-500558-669
CWVI010HF
PRM 10K
278J18
315J18
IHT9PF40
4SM-U
4SPC-U
UM-R3TV
D1105750(CPB5)
D1105755(CPB10)
D3125063-1
PACK-10
FILTER-10
D4173779(CPB2)
O-RING-10
BH-6558
ENCODER-10
PACK-11
2
1
2
1
1
1
1
2
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
3
4
2
1
1
1
1
1
2
1
3
1
2
1
3
1
3
2
2
2
2
1
NO
49
50
51
52
53
54
55
56
57
58
59
60
61
62
63
64
65
66
67
68
69
70
71
72
73
74
75
76
77
78
79
80
81
82
83
84
85
86
87
88
89
90
91
92
93
94
95
96
97
98
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
S/L
Mat. Code
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
S2A20013
S2A20014
S2A20015
S2A20016
S2A20017
S2A20018
S2A20019
S2A20020
S2A20021
S2A20022
S2A20023
S2A20024
S2A20025
S2A20027
S2A20029
S2A20047
S2A20048
S2A20052
S2A20054
S2A20055
S2A20058
S2A20060
S2A20063
S2A20064
S2A20065
S2A20067
S2A20074
S2A20075
S2A20076
S2A20077
S2A20078
S2A20079
S2A20080
S2A20081
S2A20082
S2A20083
S2A20085
S2A20087
S2A20088
S2A20090
S2G80033
S2G80036
S2G80037
S2G80038
S2G80039
S2G80040
S2G80041
S2G80042
S2G80043
S2G80044
LOCATION
I-6-3
Model
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
AP-612A
APT-4800
APT-4800
APT-4800
APT-4800
APT-4800
APT-4800
APT-4800
APT-4800
APT-4800
APT-4800
Mat.Description
CONNECTOR FOR MAINTENCE
HEATER COVER
HEATER WIRE
O-RING & BELT KIT
GEAR
GUIDE BLOCK
REVOLUTION BEARING
HEATER FUSE
REFLECTOR MIRROR
REGURATOR
CONTROL UNIT B/D 6
FIBER CABLE
QUARTZ ROD
CAP
HEATER BLOCK UNIT
GAS REGULATOR
AIR VALVE
J815 CONNECTOR(BRACKET)
J801 CONNECTOR CASE(CABLE)
J802 CONNECTOR(CABLE)
804 CONNECTOR
811 CLUMP
815 CONNECTOR
815 CLUMP
PUSHER
HEAT WIRE INNER
CONTROL UNIT B/D D68PC02C
CONTROL UNIT B/D D68PC02B
CONTROL UNIT B/D
CONTROL UNIT B/D S68MR01B
CONTROL UNIT B/D ZSA906
CONTROL UNIT B/D D68L07
CONTROL UNIT B/D D69L09
CONTROL UNIT B/D D68L09A
FORK WIRE
CABLE ASSEMBLY(B)
TERMINAL BAR
ALIGNMENT STAGE CHUCK
REACTOR HEATER
MAGNETIC VALVE CASSETTE STAGE
VACUUM SENSOR
HANDLING ROBOT ARM
THERMO COUPLE / BUBBLER
TWO-WAY VALVE
TWO-WAY VALVE N.C
AC SERVO MOTOR
LM GUIDE
Vendor Part. No
CONNECTOR-10
COVER-10
WIRE-10
BELT-10
D4165513-1
D4144312-A
BEARING-10
FUSE-10
REFLE-10
959100W4RFSMMMM
BOARD-10
PDO-9077-000
PDO-2543-000
CAP-10
OUTSIDE
D3137140-2
D4302815-8
D4223606-141
D4122600-324
D4223543-120
D4039549-2
D4223606-616
D4223606-266
D4138335-106
PUSHER-10
H3305756-B
D4039549-12
D4165863-3
D1105752(CPB 9)
D1105751(CPB 7)
D1105753(CPB 6)
D1105754(CPB 8)
D1105762(CPB11)
D1105697(CPB 12)
D1105757(CPB 18)
D1105758
WIRE-12
D4223606-135
D3125577-B
D4121598-1
CHUCK 2
HEATER 1
STAGE 1
SENSOR 1
ARM 1
TC 1
VALVE 1
VALVE 2
MOTOR 1
GUIDE 1
2
2
1
1
3
3
2
8
1
1
1
1
2
46
5
1
2
6
2
2
2
2
2
2
6
36
3
3
1
1
3
2
1
1
1
1
8
3
2
3
1
1
1
1
1
1
1
3
1
1
NO
99
100
101
102
103
104
105
106
107
108
109
110
111
112
113
114
115
116
117
118
119
120
121
122
123
124
125
126
127
128
129
130
131
132
133
134
135
136
137
138
139
140
141
142
143
144
145
146
147
148
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
S/L
Mat. Code
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
S2G80045
S2G80046
S2G80047
S2G80048
S2G80049
S2G80050
S2G80051
S2G80052
S2G80053
S2G80054
S2G80056
S2Q50108
S2Q50109
S2Q50132
S2Q50133
S2Q50138
S3A30238
S3A30251
S3A90033
S3B40021
S3T10379
S4A50006
S4A50007
S4A50029
S4A50036
S4A60002
S4A60004
S4A60005
S4A60006
S4A60007
S4A60008
S4A60009
S4A60010
S4A60011
S4A60013
S4A60014
S4A60015
S4A60016
S4S10268
S4S10270
S4S10271
S4S10272
S4S10273
S4S10274
S4S10275
S4S10276
S4S10277
S4S10278
S4S10279
S4S10280
LOCATION
Model
APT-4800
APT-4800
APT-4800
APT-4800
APT-4800
APT-4800
APT-4800
APT-4800
APT-4800
APT-4800
APT-4800
ANELVA-1051
ANELVA-1051
ANELVA-1051
ANELVA-1051
ANELVA-1051
PSC
PSC
UVAS
TCA24/25
AIM-630
AIM-630
AIM-630
AIM-630
AIM-801
AIM-801
AIM-801
AIM-801
AIM-801
AIM-801
AIM-801
AIM-801
AIM-801
AIM-801
AIM-801
AIM-801
AIM-801
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
Mat.Description
WAFER TRANAFER ROBOT CHECK
BUBBLER HEATER
REVERSE BOTTLE HEATER
S.S.R
CIRCUIT BREAKER (10A)
CIRCUIT BREAKER (1A)
SUSCETOR GRIPPER
NOZZLE PLATE (A)
MAIN ELIVATOR CYLINDER
SOLENOID V/V
BEARING(ALIGNMENT STAGE)
CATHODE ASS'Y(AL)
HOLDER ASS'Y
MOSI CATHODE/FRONT FRANGE SET
MOSI HOLDER COVER SET
SEP ARM ASS'Y
FRONT HEATING PLATE
ISOLATOR()
LAMP POWER SUPPLY(UV LAMP)
CLAMP RING
TMP BATTERY
OPT PCB
PSE. V1.ADR.V1 PCB
NEW SHUTTER UNIT
DC MOTOR 1/30
STEPPING MOTOR
EXP PCB(APPEX)
LASER SENSOR(LX2-02)
ESU PCB
SOLENOID VALVE(V100EL-LF-DC24V
COUPLING(MST(S)-25C-6 ?)
DETECTOR PCB
COUPLING(MST(S)-20C-6 ?)
EHU PCB
PHOTO SENSOR(PQ-01)
FIBER SENSOR(FU-37)
STEPPING MOTOR-2PHASE(PH266-01
STEPPING MOTOR-2PHASE(PH268-21
DIGI MICRO METOR
DC MOTOR
DC MOTOR
ILLUNINATION DC MOTOR
MOTOR DRIVE UNIT
STAGE DC MOTOR
AIR CYLINDER
AIR CYLINDER
AIR PORT
APPDISP PCB
CLOCK GENERATION PCB
WAFER UP/DOWN UNIT
Vendor Part. No
ROBOT 1
HEATER 3
HEATER 4
SENSOR4
BREAKER 1
BREAKER 2
HG-HTR
PDO-2866-000/B-CAI-AL-001
DA20-150-A
A040-4EI DC24V
PS2-0257-000
A18-05676
A18-00132
M11-5689
M11-785HY
AS-6754
DES-212-304AVL111
UV LAMP POWER SUPPLY

MP-3-00210
12VDC
P13-0910-000
P13-0914-000
PF3-0153-000
PH2-0087-000
UPD533HGI-NA
PH4-0104-01
PH0-4128-000
PH4-0107-01
PT4-1026-000
PS2-7017-000
PH4-0065-01
PS2-7016-000
PH4-0108-01
PH0-4125-000
PH0-4126-000
PH2-0059-000
PH2-0138-000
KBB01700-501
KBB02621-503
W/L-501
505
A01-G6
KBB02100-511
KBB00650-10
KBB00651-10A
KBB00651-13
KBB00600-AE21
PPD-AE1
KBB02100-A05
1
1
1
1
1
1
1
2
6
1
2
2
1
16
16
2
1
2
1
1
3
1
1
1
5
2
3
2
3
4
1
2
2
3
2
2
2
1
1
1
1
1
1
1
1
1
1
1
1
1
NO
149
150
151
152
153
154
155
156
157
158
159
160
161
162
163
164
165
166
167
168
169
170
171
172
173
174
175
176
177
178
179
180
181
182
183
184
185
186
187
188
189
190
191
192
193
194
195
196
197
198
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
S/L
Mat. Code
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
S4S10281
S4S10282
S4S10283
S4S10284
S4S10285
S4S10286
S4S10287
S4S10288
S4S10289
S4S10290
S4S10291
S4S10292
S4S10293
S4S10294
S4S10295
S4S10296
S4S10297
S4S10298
S4S10302
S4S10303
S4S10304
S4S10305
S4S10308
S4S10309
S4S10310
S4S10311
S4S10312
S4S10313
S4S10314
S4S10315
S4S10316
S4S10317
S4S10318
S4S10319
S4S10320
S4S10321
S4S10322
S4S10323
S4S10324
S4S10325
S4S10326
S4S10327
S4S10328
S4S10329
S4S10330
S4S10331
S4S10332
S4S10333
S4S10334
S4S10336
LOCATION
Model
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
Mat.Description
WA MPX PCB
SYSTEM DRIVE UNIT
SHUTTER UNIT
LIGHT GRIDE
SIDE SLIDE
STAGE 62 PCB
STAGE VAC PCB
CABLE
ENDRESS BELT
ENDRESS BELT-G6Inch.
FLAT CABLE
FLEXIBLE FLAT CABLE
TIMING BELT
TIMING BELT
MOTOR
ENDRESS BELT
TUBE
TUBE
TUBE
JOYSTIC-PP420
HE-NE LASER POWER
RECIVER PCB
LD DRIVE PCB
LOAD ARM
OF TABLE
SIDE SLIDE ARM
FLEXBLE COUPLING
FLEXBLE COUPLING
FLEXBLE COUPLING
FLEXBLE COUPLING
FLEXBLE COUPLING
MICRO SWICH
HPOTO SENSOR PCB
POSITION LED
SOLENOID VALVE
SOLENOID VALVE
SOLENOID VALVE
SYNTHETIC MICA
WAFER DECTOR UNIT
B CONT PCB
CONTROL PCB
CONTROL PCB
HINDERED FILTER UNIT
PHOTO MULTI FILTER
PHOTO MULTI FILTER
PHOTO SENSOR PCB
SUB INTERFERENCE FILTER
THERMO STST(SAME:S3B30020)
VAC SENSOR UNIT
AIR CYLINDER
Vendor Part. No
KBB02003-AE08
KBB02100-A04
A01
KBB02003-G07
ARL-FM-A01
KBB02100-AE02
KBB02100-AE03-1
KBB02003-501
KBB02400-14
WL-10
KBB02201-502
KBB02201-501
KBB02201-15
KBB02400-13
KBB00610-502
KBB02400-15
KBB02201-16
KBB02201-17
KBB02600
KBB02700-503
KBB02003-506
526-G6
KBB00127-AE3
KBB02400-A01
KBB00651-A05
KBB00640-A03
KBB00651-08
KBB02100-B06
KBB02201-06
KBB02400-B08
KBB02201-04
KBB02201-B504
KBB02278-AE07
KBB00651-A04
KBB02650-503
KBB02650-504
KBB02650-505
KBB02003-15
KBB060-AL03
KB00795-AE05
KBB00695-AE02
KBB00695-AE03
KBB02003-AL03
504
KBB02003-514
KBB00127-AE5
KBB02003-G04
501
KBB0261-AE01
KBB02003-10
1
2
1
1
1
1
1
1
1
1
1
2
2
1
1
1
1
1
1
3
1
2
1
1
1
1
1
1
1
2
1
1
1
2
2
1
2
1
1
1
1
1
1
5
1
1
1
1
2
1
NO
199
200
201
202
203
204
205
206
207
208
209
210
211
212
213
214
215
216
217
218
219
220
221
222
223
224
225
226
227
228
229
230
231
232
233
234
235
236
237
238
239
240
241
242
243
244
245
246
247
248
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
S/L
Mat. Code
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
S4S10337
S4S10338
S4S10339
S4S10340
S4S10341
S4S10342
S4S10343
S4S10344
S4S10345
S4S10346
S4S10347
S4S10348
S4S10871
S4T30262
S5B70225
S5D80033
S5D80053
S5D80055
S5D90001
S5D90002
S5D90003
S5D90008
S5D90009
S5D90010
S5D90011
S5D90013
S5D90022
S5D90023
S5D90024
S5D90025
S5D90026
S5D90027
S5D90028
S5D90029
S5D90030
S5D90031
S5D90033
S5D90034
S5D90035
S5D90036
S5D90037
S5D90040
S5D90041
S5D90044
S5D90045
S5D90046
S5D90047
S5D90048
S5D90049
S5D90053
LOCATION
Model
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
I8C(NIKON)
S-6000
METRA
METRA
METRA
LS-6000
LS-6000
LS-6000
LS-6000
LS-6000
LS-6000
LS-6000
LS-6000
LS-6000
LS-6000
LS-6000
LS-6000
LS-6000
LS-6000
LS-6000
LS-6000
LS-6000
LS-6000
LS-6000
LS-6000
LS-6000
LS-6000
LS-6000
LS-6000
LS-6000
LS-6000
LS-6000
LS-6000
LS-6000
LS-6000
LS-6000
LS-6000
Mat.Description
AIR CYLINDER
AIR CYLINDER
AIR PISTON
AIR PISTON
P SENSOR PCB
PADIAL BEARING
RADIAL BEARING
SPEED CONTROLLER
THRAST BEARING ASS'Y
VACUUM SENSOR
VACUUM SENSOR(PS4)
VACUUM SENSOR UNIT
WORM GEAR
CYBOR P/R PUMP
POLAROID CARERA
ASS'Y CASSETTE
C-DRIVE
ASS'Y VACUUM(SAME:S5D80111)
ROLL PAPER FOR MINIPRINTER
CERAMIC ARM
SPPINDLE HEAD
DC MOTOR(ARM1)
SPINDLE HEAD
BEARING FOR TURN TABLE
BEARING FOR XY STAGE
CENTERING COLOR
IC-EPROM 512KB
RELAY G3FD-X03S
LITHIUM BATTERY
IC-74LS574BN
IC-74LS541N
IC- 74LS377N
IC- TA75324P
IC- TC9142AP
IC- TA7259P
IC DS 1233
IC 82S123
IC LM358
IC MCT6
TR. MJ15012
TR. D1195
IC
IC
IC
IC
IC
TR
TR
TR
IC- PBL 3771
Vendor Part. No
KBB02003-B11
KBB02600-02
KBB0223-05
KBB02223-05
KBB00795-AE03
KBB02100-11
KBB02100-12
KBB02600-03
KBB02100-B10
WL-505
KBB02003-AE16
KBB02400-AE10
KBB00795-01
5126
PLDCMR
01-13779-00
1/2/1962
01-15245-00
MP-006
1B58051
SH-006
PX245-028
H4311523-1
H3102303-12
DECO
H43114236-1
EPROM 512KB
G3FD-X03S
TL-5135
74574
74541
74377
75324
9142
7259
1233
82S123
LM358
MCT6
MJ15012
D1195
MAX 232
DS1235Y
LT 1054
HLN 2003A
LM 339AN
TIP107
IRF 511
LM 340
3771
1
1
1
1
1
2
2
1
8
1
1
2
1
1
1
1
1
1
65
1
1
3
1
1
1
13
18
3
2
8
8
6
2
2
2
18
3
2
4
6
10
1
3
8
5
5
20
20
10
2
NO
249
250
251
252
253
254
255
256
257
258
259
260
261
262
263
264
265
266
267
268
269
270
271
272
273
274
275
276
277
278
279
280
281
282
283
284
285
286
287
288
289
290
291
292
293
294
295
296
297
298
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
S/L
Mat. Code
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
S5D90054
S5D90055
S5D90057
S5D90058
S5D90059
S5D90063
S5D90066
S5D90067
S5D90069
S5D90070
S5D90071
S5D90072
S5D90073
S5D90077
S5D90078
S5D90079
S5D90080
S5D90081
S5D90082
S5D90083
S5E50002
S5E50004
S5E50005
S5E50006
S5E50007
S5E50008
S5E50009
S5E50010
S5E50011
S5E50021
S5E50022
S5E50023
S5E50025
S5E50029
S5E50033
S5E50036
S5E50037
S5E50039
S5E50040
S5E50042
S5E50043
S5E50044
S5E50046
S5E50047
S5E50048
S5E50049
S5E50050
S5E50051
S5E50052
S5E50056
LOCATION
Model
LS-6000
LS-6000
LS-6000
LS-6000
LS-6000
LS-6000
LS-6000
LS-6000
LS-6000
LS-6000
LS-6000
LS-6000
LS-6000
LS-6000
LS-6000
LS-6000
LS-6000
LS-6000
LS-6000
LS-6000
WI880
WI880
WI880
WI880
WI880
WI880
WI880
WI880
WI880
WI880
WI880
WI880
WI880
WI880
WI880
WI880
WI880
WI880
WI880
WI880
WI880
WI880
WI880
WI880
WI880
WI880
WI880
WI880
WI880
WI880
Mat.Description
IRF 530(SAME:S4T30089)
IRF 9620
IC
IC
GM16C450
EPROM 2716 (16KB)
D8751H- EPROM 32K
IC
IC
IC
IC-MC1488AN
IC-MC1489N
IC- AD7512
IC LH0002H
IC- P8253
IC- DS1488N
IC- DS3486
IC- DS3487
IC- P8251A
IC 62003P
EL DISPLAY
AUTO FLOT ALIGNER (8Inch.)
FD DRIVE
STANDARD WAFER
POLAROID CAMERA
LAMP
WAFER
SERVO PACK(FUSE)
CIRCUIT BOARD(FUSE)
HEPA SENSOR(PRE ALIGN)(SAME;S4
HEPA SENSOR(PRE ALIGN)(SAME:S9
HEPA SENSOR(ELEVATOR UNIT)
MICRO SWITCH(SAME:S3A60433)
PUSH BOTTON SWITCH
PCB-FILTER WHEEL DRIVER
COLOR MONITOR
MINERTIA
ARM CONTROL BOARD
LAMP
SERVO MOTOR CPCR-UGTMEM-01
FDD-412A
LAMP POWER SUPPLY
ROBOTIC HANDLER B/D ASSY
EXTEND/RETRACT MOTOR
EDGE DETECTO BOARD
PMT ASSY
PRINT CATRIDGE BLACK
PRINT CATRIDGE COLOR
PMT TUBE
ADU BOARD
Vendor Part. No
350
9620
74LS148
74LS173
GM16C450
2716
D8751H
LM393N
D8749H
D2764-25
MC1488
MC1489
AD7512
LH0002H
P8253
DS1488N
DS3486
DS3487
P8251A
62003P
ED-2
AFL-6
FD-8
SW-9
PC-10
L-12
W-13
SP-14
CB-15
FT-FM2
FX4-A3R
FU-63
SS-5GL2-F
EHM-3S00MKXP1
347825
CE-9602/9702
UGRMEM-02SA2X7
PCB-101
169-106-G
LB40E
8INCH
XPL-500
398-18674-1
398-19049-1
398-19146-1
398-19355-1
51606A
51606C
R1355
398-19478-15
3
3
2
2
9
2
6
4
3
4
9
9
18
16
10
10
10
10
10
3
1
1
1
1
1
6
1
48
30
3
3
3
3
5
1
1
1
1
2
1
1
1
1
1
1
1
1
1
1
1
NO
299
300
301
302
303
304
305
306
307
308
309
310
311
312
313
314
315
316
317
318
319
320
321
322
323
324
325
326
327
328
329
330
331
332
333
334
335
336
337
338
339
340
341
342
343
344
345
346
347
348
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
A
A
A
A
A
A
A
A
B
B
B
B
B
B
B
B
B
B
B
B
B
B
C
C
C
C
C
C
C
C
C
C
S/L
Mat. Code
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF01
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
S5E50058
S5E50059
SZ980095
SZ980096
SZ980097
SZ980098
SZ980099
SZ980100
SZ980101
SZ980102
SZ980103
SZ980104
SZ980105
SZ980106
SZ980107
SZ980108
SZ980109
SZ980116
S1D30023
S1J50094
S2G40016
S2P80149
S2R10016
S4A40103
S5A30113
SZ980646
S2P80004
S2P80182
S2R10047
S3H40068
S3H40069
S3H40078
S4A40081
S5E20042
S5E20197
S5E20198
S5F30017
SZ983158
SZ983159
SZ983160
S2G40002
S2G40003
S2G40004
S2G40005
S2G40006
S2G40008
S2G40012
S2G40013
S2G40014
S2G40017
LOCATION
Model
WI880
IS-2000
IS-2000
IS-2000
IS-2000
IS-2000
IS-2000
IS-2000
IS-2000
IS-2000
IS-2000
IS-2000
IS-2000
IS-2000
IS-2000
IS-2000
IS-2000
Mat.Description
HARD DISK DRIVE(HDD)
MONITOR
FUSE SET(PS-IS)250V.15A*PL4150
CABLE FOR ROBOT HAND
EDDY SWITCH(SH-302)
INTERLOCK SWITCH(E6-30A)
MAGNETIC SWITCH
AIR FILTER(7PCS)
PALM FOR ROBORT HAND(2PCS)
STAGE CHUCK (CERAMICS)
TOMING BELT(465H100)
TOMING BELT (110MXL6.4)
WAFER CHUCK FOR PRE-ALIGNMENT
VACUUM SWITCH(3PCS)
ANALOGE SWITCH(SAME:S5D90073)
AD CONVERTER(ADC847B)
MULTI PURCURSOR(AD7502JQ)
STAGE CHUCK 125
HALOGEN LAMP(1500W)(SAME:S1J50
CARRIER SENSOR A(TEL)
STEPPING MOTOR UNIT
MANUAL KEY PANEL
PHOTO MICRO SENSOR (SAME:S9Z60
O-RING
INVERTER
LASER ASSY KIT WF730-FO
OPERATION PANEL UNIT (SAME:S2G
MIST PURE FILTER #1
AL SEAT
NUT(H433200)
ELECTRODE SHAFT GUIDE (H433197
O-RING
THETA SPRING EXT 1250DX.020WX1
R AXIS INTERC PCB
YAG LASER
YAG LASER
CPU2
WIRE ROPE(SAME:S4T80388)
DRIVE-AC SERVO (SAME:S2G30028)
DRIVE-AC SERVO MOTOR(SAME:S2Q1
PCB-INTERFACE
CYLINDER UNIT
RADIAL BALL BEARING
SWITCH UNIT FLOW
CYLINDER UNIT
TWIN ROD CYLINDER(SAME:S2Q1007
AC SERVO MOTOR UNIT
ROTARY ACTUATOR (SAME:S2G3005
Vendor Part. No
ST-125
JC/404 HMA-1
FS-0001
CRH-0003
ES-0005
IS-0006
MS-0008
A.F
P-RH-0010/AB-AL-001
SC-0012
TB-0014
TB-0015
WC-PA-0017
VS-0018
AD7512
AC-0020
MP-0023
125
1500W
E3R-5L
EAUM-773400
EAUF-391-900
EE-SX671
P-7
9010038/2213-75SL
EAUF-270700
MOGCN029
G162054
H433200
H433197
G-230
84-15-02210
20006547A-S
532=200/100 H-R
532-50-R
2-F4-39977
2-J4-31192
2-J4-31194
BAMSD023A1X
BA88040LDMB
EAUA-766101
EAUM-783400
MS6804VV-S
EAUM-777600
EAUM-783200
MOENS018
EAUM-773200
MOENS031
1
1
16
1
1
1
1
3
1
1
1
2
1
2
2
2
2
1
2
2
1
2
1
3
1
1
1
4
1
1
1
17
1
1
2
1
1
2
2
2
2
2
1
4
7
2
3
2
1
4
NO
349
350
351
352
353
354
355
356
357
358
359
360
361
362
363
364
365
366
367
368
369
370
371
372
373
374
375
376
377
378
379
380
381
382
383
384
385
386
387
388
389
390
391
392
393
394
395
396
397
398
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
S/L
Mat. Code
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
S2G40018
S2G40019
S2G40023
S2G40024
S2G40025
S2G40026
S2G40028
S2G40029
S2G40030
S2G40031
S2G40032
S2G40033
S2G40034
S2G40035
S2G40037
S2G40040
S2G40041
S2G40043
S2G40044
S2G40045
S2G40047
S2P80024
S2P80026
S2P80151
S2P80152
S2P80154
S2P80155
S2P80156
S2P80157
S2P80162
S2P80163
S2P80164
S2P80168
S2P80169
S2P80170
S2P80171
S2P80172
S2P80177
S2R10012
S2R10081
S2R10085
S2R10089
S2R10090
S2R10091
S3A50179
S3A50180
S3A50181
S3H30114
S3H40075
S3H40079
LOCATION
M-3-2
Model
Mat.Description
DC MOTOR UNIT
BEARING
GROMMET
SWITCH-DOOR INTERLOCK
DRIVER-5PHASE SEPPIN(SAME;S2G3
INVERTER
MONITOR (SAME:S2G30029)
TEXT GRAPHIC B'D(SAME:S2Q10041
4 AXIS MOTOR CONTROL B'D
COLLAR
PIN
PIPE
PACKING-DUCT
CYLINDER
MOTOR
MANUAL KEY BOX UNIT(SAME:S2Q10
OPERATION PANEL UNIT(SAME:S2G3
BLOCK SET-CASSETTE
GUIDE-T-SHUTTER
SWITCH-SELECTER
PCB-RS232C CONVERTER
BALL BEARING (SAME:S2G10079)
BALL BEARING
ADAPTOR
VARI SEAL
PEN CYLINDER
BUSH (SAME:S2G10067)
BRUSH (R) (SAME:S2G10073)
BRUSH (L) (SAME:S2G10074)
VENTURI VALVE
BALL BEARING
BALL BEARING
FUSE(GLASS)
FUSE(GLASS)
VACUUM MEASURE JIG
VACUUM GAUGE
CYLINDER-SPINNER
MOTOR ASS'Y-SPINNER
LIMIT SENSOR
MIST SEPARATER
PULSE GENERATER
FUSE
FUSE
FUSE
GAUGE
PAD
WAFER DETECTION TOWER B.D
PLASMA MONITOR ASS'Y
WAFER SUCTION PAD
O-RING
Vendor Part. No
EAUM-778800
MOENH019
MOENH146
AFHJ1B-82S
BAAK-BX511K
BADV707S200A
BBXC-1498C2
FBPCB-0022
FBPCB-0043
MOENL023-A
MOENL046-A
MOENR095-A
MOENS016
MOENT106
MOGCN02855
EAUF-765600
EAUF-765400
MOENLA-Z
MOENH176
AHAD31K2221U
EAUA-334700'
MSSSRF1030ZZ
MSSSRF1340ZZ
MOGCT044
MOGCT126
MOGCH078
MOGCH057
MOGCH055
MOGCH056
MSVAE-10SU-3
MSLF840ZZ-M
MSRF2280ZZ-M
APG00004A250
APG00005A250
MOGCJ002-DY
MOGCJ023-AY
MOGCS106
MOGCS105..AY
K3
AFM-2000-02B
TMC-301(CPU)
F-7161-1A
F-7161-2A
F-7161-5A
GAUGE
PAD
TOWER
PLASMA MONITOR
H434116
G-325
3
8
18
1
1
1
1
1
1
1
10
1
1
2
1
1
1
1
2
1
2
2
4
10
3
1
4
29
29
3
2
4
4
3
1
5
4
2
2
1
2
1
2
2
3
1
2
1
7
25
NO
399
400
401
402
403
404
405
406
407
408
409
410
411
412
413
414
415
416
417
418
419
420
421
422
423
424
425
426
427
428
429
430
431
432
433
434
435
436
437
438
439
440
441
442
443
444
445
446
447
448
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
S/L
Mat. Code
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
S3H40080
S3H40081
S3H40082
S3H40088
S3H40107
S3H40114
S3H40115
S3H40155
S3H40157
S3H40158
S3H40159
S3H40160
S3H40161
S3H40168
S4A10018
S4A10021
S4A10022
S4A10023
S4A10024
S4A10028
S4A10031
S4A10032
S4A10033
S4A40060
S4A40061
S4A40062
S4A40063
S4A40064
S4A40065
S4A40102
S4A40104
S4A40107
S4A40108
S4A40109
S4A40112
S4A40114
S4A40116
S4A40117
S4A40118
S4A40119
S4A40121
S4A40122
S4A40123
S4A40124
S4A40125
S4A40126
S4A40128
S4A40135
S4A60017
S5D50004
LOCATION
G-1-1
G-1-1
G-1-1
Model
Mat.Description
O-RING
O-RING
O-RING(SAME:S9Z62692)
STEP MOTOR
BULB
VIEW PORT(1)
VIEW PORT(2)
BOX
INSULATION RING(2)
RING RETAINER
BELLOWS FIXING RING
TUBE()
SHAFT FIXING PLATE
DIGITAL FLAT PANEL
CABLE ASSY- RS232C
LED LAMP
PIN(TRS-IFB)
LED LAMP
CATCH CUP CLEANER
TOOL
I/F FINGER
C/S FINGER
STREAM NOZZLE KIT
6Inch. PERICLE
SLAVE DISPLAY
STPR MOTOR DRIVER BOARD
STAGE DRIVER BOARD
FOCUS DRIVER BOARD
GREEN LIGHT SHUTTER
ROBOT COMMUNICATION PCB
POWER SUPPLY
PC BOARD
LAMP FOR MICROSCOPE
RELAY
LED
POWER SUPPLY
FUSE
PO BOARD
CCD CAMERA POWER PCB
MAGNETIC CONTUCTOR
PC BOARD(TOKEN B'D)(SAME:S3C40
FUSE
SENSOR
CCD CAMERA
MOTOR
MOTOR DRIVE
AREA SENSOR
AMP2
MASK
SEJONG-MOTOR DRIVE B'D
Vendor Part. No
G-360
AS568-NO1761
V-185FLORO SI
UPD 566-A
T-15 (C15912)
DWG #H427575
DWG #H427338
H105291-1
H105293-1
H218171-1
H219211-1
H104939-1
H337324-1
FP511-TC21
CAB-2002
APX 850-24R
SETUP PART
APX 850-240W
WDS
TOOL
I/F FINGER
C/S FINGER
STREAM NOZZLE KIT
1/15/2146
03-20-00778
03-20-093002
03-20-00933-03
03-20-019892
04-15-01721
9313-DE11
S82F-2424P
PB-0599-B
SB-10-63X
MY-4N D24V
M2GJ-90A1-Z4EY
NNS-15-5
ES3-5000
CCD-1CH-DRV2
SB-9151A
SC2N
DLCU
ESS-1000
EE-SX673
CCD-M25
RA3BA512L003-E140
DVBA512S382
PJ-50A
CLD-HEAD
PV-001
23
20
10
2
3
3
4
2
1
1
1
1
1
1
1
5
3
1
2
1
1
1
2
10
3
2
6
3
3
1
1
1
1
1
10
1
10
1
2
2
1
10
6
2
1
1
2
1
1
1
NO
449
450
451
452
453
454
455
456
457
458
459
460
461
462
463
464
465
466
467
468
469
470
471
472
473
474
475
476
477
478
479
480
481
482
483
484
485
486
487
488
489
490
491
492
493
494
495
496
497
498
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
A
A
A
A
A
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
S/L
Mat. Code
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
S5D80149
S5D80150
S5D80151
S5E20181
S5E20182
S5E20183
S5E40040
S5F60001
S5F60003
S5F60004
S5F60005
S5F60007
S5F60008
S5F60009
S5F60010
S5F60011
S5F60013
S5F60014
S5F60015
S5F60016
S5F60017
S5F60018
S5F60019
SZ980014
SZ980631
SZ980634
SZ980635
S2A60595
S4T40145
S4T40268
S4T40431
S5B80071
S1K40265
S1K40266
S2A60585
S2A70037
S2A70040
S2J30168
S2J30191
S2J30194
S2J30203
S2J30213
S3H30416
S4A40127
S4A40142
S4A40143
S4A40144
S4A40147
S4A40148
S4A40149
LOCATION
Model
Mat.Description
CASSETTE STAGE
W/F CHUCK
W/F CHUCK
MINERIA MOTOR
KEY B/D
CERAMIC FINGER
MODIFY CHUCK
POWER SUPPLY
PCB
PCB
PCB
NOISE FILTER
NOISE FILTER
SENSOR
SENSOR
SHELF GUIDE
PHOTO FIBER SENSOR(SAME:S2R100
AMP(SAME:S9Z60740)
SENSOR (SAME:S9Z60739)
BCR CONNECT CABLE
LINEAR ENCODER
MOTOR DRIVER
AIR CYLINDER
TUNGSTEN PROBE TIPS
TUNGSTEN PROBE TIP
INDIUM PROBE TIP
FAN PACK 300CFM 115V
VALVE-SOL..VJ3133T-6LOZ-X
Inch.BELT-TIMING..687-3GT-8Inc
PIN
HALOGEN PJT LAMP(12V-50W)
AIR OPERATION VALVE
AIR OPERATION VALVE
GIANT GAP SHIELD(SAME:S9Z62427
FRAME-SUSCEPTOR
GEAR MOTOR-DC
TEFLON TUBE
PHOTO SENSOR
FILTER HOUSING
BP TEMP CHECK COVER
CHUCK SPACER
PROTECT RING
LAMP HEAD WIRE
MOTOR DRIVER
SENSOR
MOTOR
O-RING
LED BOARD
MOTOR SEAL
Vendor Part. No
METRA21XX-R
METRA2100(ALUMINUM)-R
METRA2100(CERAMIC)-R
UTOPI-100MUB-R
TIRUC-R
CERAMIC-M
LG CHUCK
RWS50A
CPU8031
SAE9206-80
SAE9206-81
WYFS10 A3
WYF-T10 A5
FU49
FU34
CH-3N
0
E32-TC200
E3S-X3CE4
E3S-LS20XE4
9-15PIN
E6L-H1000
AGH24A12
SE-TD
PSE-TP(R)
IP-P-O(R)
0190-70066
012-001824-1
023-001280-1
1910-423138-11
567-1488
SAV-3260-131CI
SAV-3260-131CIZ
0200-09405
58MA2249
5601007
6 * 4 (10M)
PM2-LH10
SH5MO21T1 FMNUS F16 NPT
BP TEMP CHECK COVER
CHUCK SPACER
2-822651-1
2441-3141
6000-8426
6000-1940
6000-8464
6000-2565
2808-2181
6000-4339
1
1
1
1
1
1
4
1
1
1
1
1
1
1
1
1
2
1
1
1
1
1
1
3
3
9
7
1
1
1
7
14
1
2
2
5
1
3
4
7
3
3
2
36
2
6
2
5
1
5
NO
499
500
501
502
503
504
505
506
507
508
509
510
511
512
513
514
515
516
517
518
519
520
521
522
523
524
525
526
527
528
529
530
531
532
533
534
535
536
537
538
539
540
541
542
543
544
545
546
547
548
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
B
C
C
C
C
S/L
Mat. Code
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
S4A40150
S4A40151
S4A40152
S4A40153
S4A40155
S4A40156
S4A40160
S4A40161
S4A40162
S4S40006
S4S40354
S4T10018
S4T10019
S4T10020
S4T10021
S4T10044
S4T40004
S4T40157
S4T40158
S4T40266
S4T40267
S4T40426
S4T40634
S4T41174
S5B80076
S5B80085
S5B80090
S5H80013
S5K10001
S5K10002
S5K10003
S5K10004
S5K10005
S5K10006
S5K10007
S5K10008
S5K10009
S5K10010
S5K10011
S5K10012
S5K10013
S5K10014
S5K10016
S5K20002
S5K20003
S5K30003
S1A30642
S1A30670
S1A30671
S1A30672
LOCATION
G-1-3
M-1-1
Model
Mat.Description
SWITCH
RELAY
FAN
AREA SENSOR
SENSOR
CCD CAMERA
TOKEN BOARD
ALIGNMENT STAGE CONTROLLER
TRANSFER CONTROLLER
VACUUM SW UNIT
FAN (USED)
W/F CENTERING TOOL
D15P-D15J CABLE #002
A3P CABLE #015 1500
A3P-A5J CABLE #003 1500
A5P-A3P CABLE #005 1500
BELT- TIMING. 530-2GT-6
Inch.BELT-TIMING..B150S3M207GI
SUPPORT PIN AD
FUSE(8A) UL200T
MOTOR FAN (DISPLAY)
METAL GASKET 953-5016
FUJIFILM THERMAL IMAGE PRINTER
PUSHER RODS 1/2Inch.
ASS'Y- MAIN PCB
GEARMOTOR- MAXON
SOLENOID VALVE(FOR CONTROLLING
SOLENOID VALVE(FOR VACUUM ACTU
O-RING- BROWN- VITON
SOLID STATE RELAY SPADE LUG
FUSE- 250V 2.0 AMP SB
FUSE- 250V 0.125 AMP (20MM*5MM
FUSE- 250V 1.0 AMP(1.25Inch.*2
FUSE- 250V 1.0 AMP(20MM*5MM) S
FUSE- 250V 0.25 AMP(1.25Inch.*
FUSE- 250V 2.0 AMP(20MM*5MM) S
ATOMIZER ORIFICE- SAPPHIRE#242
ELECTRODES REPLACEMENT FOR ANNOZZLE ASEMBLY
LAMP HEATER
ALUMINUM O-RING
MICROPOSITIONER & HOLDERS
CHECK VALVE
BREAKER
BREAKER
BREAKER
Vendor Part. No
6000-0876
6000-6574
6000-7180
6000-0527
6000-44306
6000-8206
6000-8536
6001-1511
6001-1508
BG4-4400-000
MB12Z-BUL (USED)
2985-417703-11
2986-409580-11
2986-409865-11
2986-410363-11
2986-409866-11
023-000049-1
023-000365-1
023-000585-1
023-000831-1
023-001290-1
1910-427632-12
023-000832-1
1380-100350-11
569-6542
2-L468038
2-FT1-500
PRD-024
12-0002
31-0008
31-0027
31-0029
31-0042
32-0100
32-0047
32-0108
32-0109
32-0110
32-0120
32-0121
36-0006
39-0032
39-0014
1.2-5-144
METAL O-RING
725-PLM(PRM)
FUCL-715-6.35-0.07-S1-UP
EB-50C2P5A30MATBL
EB-50C2P30A30MATBL
EB-50C2P50A30MATBL
2
2
2
4
6
2
1
1
1
1
1
4
1
1
1
1
1
2
1
2
3
13
2
2
1
4
7
1
1
1
1
1
3
1
2
2
2
2
2
2
2
1
1
1
10
3
2
2
2
2
NO
549
550
551
552
553
554
555
556
557
558
559
560
561
562
563
564
565
566
567
568
569
570
571
572
573
574
575
576
577
578
579
580
581
582
583
584
585
586
587
588
589
590
591
592
593
594
595
596
597
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
S/L
Mat. Code
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
S1A30675
S1A30676
S1A30677
S1A30678
S1A30679
S1A30712
S1A30730
S1A30733
S1A30734
S1A30735
S1A30737
S1A30738
S1A30739
S1A30740
S1A30741
S1A30743
S1A30744
S1A30746
S1A30747
S1A30748
S1A30749
S1A30750
S2R10124
S2R10128
S2R10136
S2R10137
S2R10141
S2R10144
S2R10145
S2R10146
S2R10148
S2R10157
S3H30438
S4A40139
S4A40140
S4A40145
S4A40146
S4A40159
S4A40163
S4A40175
S4R40246
S4S10417
S4S10449
S4S10450
S4S10487
S4S10523
S4S40085
S4S40323
S4S40359
LOCATION
G-1-2
G-1-2
Model
Mat.Description
BREAKER
BREAKER
BREAKER
BREAKER
BREAKER
PHOTO ELECTRIC SWITCH.USED
APC VALVE USED
NEEDLE VALVE USED
SCV BELLOWSE VALVE(AV72)USED
REGULATOR USED
PERSSURE SWITCH(PG1/PS1)USED
FILTER USED
CHECK VALVE(CV1).1/4.USED
TRANS(30A).USED
CIRCUIT BREAKET(30A)USED
FLOW METER USED
N2 ANL GAS PATTERRN PANEL USED
SOLENOID BLOCK VALVE.USED
HEATER BASE(ANNEAL)USED
CAP BASE(ANNEAL)USED
HIGH VACUUM VALVE(AV53)USED
ANNEAL TUBE FLANGE COOLING P
RELAY
PHOTO MICRO SENSOR
PUSH SPRING
CUTTER PRESSURE PLATE
FIBER SENSOR
PHOTO MICRO SENSOR(SAME:S9Z607
PHOTO MICRO SWITCH(SAME:S5J200
PHOTO MICRO SWITCH(SAME:S9Z619
AIR PRESSURE SWITCH
RELAY
RINS HEATER
MAGNETIC CONTACTOR
POWER SUPPLY
CCD BOARD
CCD DRIVER
LAMP FOR MICRO SCOPE
POWER SUPPLY..6F78
COGNEX UNIT
ZSTGWH BOARD
PUSH BUTTON SWITCH
THEMOSTAT
SIPOCCO
AMMETER
SOLENOID VALVE(SAME:S4S10482)
PHOTO SW PCB
CLEANING PLATE
TH5 () (USED)
Vendor Part. No
EB-50C2P20A30MATBL
EX-100-3P100AAC100-200-30
EX-225-3P225AAC200-30MA-T
EX-225-3P200AAC200-30MA-T
EX-400-3P250AAC200-30MA-T
FE7B-TLB6VG(R/E)
EC52021NI
214
E00775
SQ140E502PFSFFPM
A067974
WGNS2RR2
CV1.1/4
D4EX03995
EB-50C
FLOW METER
T2DD2-15327(ANL)
SOLENOID BLOCK VAVLE
HEATER BASE(ANNEAL)
CAP BASE(ANNEAL)
XLD50
ANNEAL TUBE FLANGE COOL
G2R-1-SND
EE-SFT401
C362013
D113032
E-32-TC200
EE-SX671
EE-SX672
EE-SX673
IS300-02-L5
G2R-232-V-US
WHITE LINE
E-135662
VB3-4483-113
692-6125
KBBO5614 516
KBBO5011 510
KBBO5011 511
KBBO5700 503
KBBO5650-503
BG4-2838-000
BD4-7497-000
Y75-4088 (USED)
2
2
2
2
2
1
1
1
1
2
1
4
1
1
1
3
2
1
1
1
1
1
2
7
2
1
2
3
4
3
2
2
27
2
1
1
1
1
2
1
1
1
1
1
1
1
1
1
1
NO
598
599
600
601
602
603
604
605
606
607
608
609
610
611
612
613
614
615
616
617
618
619
620
621
622
623
624
625
626
627
628
629
630
631
632
633
634
635
636
637
638
639
640
641
642
643
644
645
646
647
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
A
A
A
A
A
B
S/L
Mat. Code
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF03
SF04
SF04
SF04
SF04
SF04
SF04
SF04
SR01
SR01
SR01
SR01
SR01
SR01
S4S50084
S4T10043
S4T40003
S4T40005
S4T40006
S4T40007
S4T40009
S4T40047
S4T40162
S4T40296
S4T40365
S4T41101
S4T41138
S4T41145
S4T41172
S4T41176
S4T41196
S4T41199
S4T41225
S4T41233
S4T41234
S4T41236
S4T41762
S4U10140
S5B80007
S5B80008
S5B80010
S5B80012
S5B80054
S5B80056
S5G70001
S5G70002
S5K20001
S5K20013
S5K20014
S5K30001
S5K30002
S1A20198
S1A20226
S1A30691
S1A30696
S1A30852
S1A30853
S2X40157
S1A30669
S1A80411
S2D50004
S2J30237
S2J30263
S1A30649
LOCATION
G-1-1
Model
Mat.Description
ADP-2A PCB
CABLE ASSY RS232C
Inch.BELT-TIMING..200-XL-037UI
Inch.BELT-TIMING..80-XL-025UIn
Inch.BELT-TIMING..B6053M789GIn
Inch.BELT-TIMING..300-XL-025UI
HPO AIR CYLINDER
Inch.BELT-TIMING..IF-Z-16-0 73
BELT- TIMING 3640-5GT-15
FILTER ZX1-F
FUSE(GP20) 2A-250V
RING-RETAINING C-TYPE-INT..RTW
FM..P-700-1U (TEL83-ASI)
FUSE..GTE 125V 10A
VALVE SOL..T-VV3J3-2-3CL2-B0
VALVE SOL..VZ110-6PS-M5-F-X13
SOL VALVE.VJ3133T-6LOZ-X44(SAM
SOL VALVE..VJ3233T-6LOZ-X43
SOL VALVE..VJ314MY-6LOZ-M5
SOL VALVE..VJ3233Y-6LOZ-X39
THC POWER SUPPLY
ASSY-CPU EPC6-S
DC POWER SUPPLY HR-9-24
DC POWER SUPPLY RT-3-5FR
DC POWER SUPPLY EWS50-5
POWER SUPPLY 175W
POWER SUPPLY 100W
TEST MATERIAL THERMO COUPLE
CERAMIC RING
INDIUM PROBE ELEMENT

PROBE TIPS
PHOTO S/W(CASSETTE LACK ?(SAM
PHOTO SENSOR(CASSETTE LACK)
PHOTO SENSOR
PHOTO SENSOR
T/C FOR CONTROLLER
T/C FOR OVERHEATER
PUSH BUTTON SWITCH
POWER SUPPLY
CONTROLLER PRESSURE..152F-P0-2
PIN.LIFT WAFER 200MM BWCV(SAME
MOTOR DRIVER
Vendor Part. No
BG4-8700-000
041-006888-1
023-000044-1
023-100921-1
023-100917-1
023-000043-1
023-100916-1
024-011385-1
1380-100546-11
023-101162-1
024-006915-1
045-000019-1
021-000340-1
023-000911-1
024-011755-1
045-125276-1
012-002444-1
012-000545-1
012-001824-1
012-001823-1
012-003002-1
012-002312-1
POWER SUPPLY
908149-001
K621546
K621673
K621690
K621717
K621714
K621778
498413-01
498414-01
E52CA
H 337520
K 1.6-150-3M
IP-P-O
SE-TD(SE-T)
EE-SX670
EE-SX670A
EE-SX672
EE-SX673A
NM150SR5/PR-GSS-002
D4EX06095/PR-GSS-003
AH164-SLG11E3
CQM1-PA203
012-002579-1
0200-09614
V-34
P3
DFC1507
1
2
1
2
2
2
2
14
1
2
4
2
1
2
1
3
1
1
10
5
5
1
1
2
1
1
1
1
1
1
1
1
1
2
1
9
9
10
12
2
13
2
2
7
1
1
2
6
4
1
NO
648
649
650
651
652
653
654
655
656
657
658
659
660
661
662
663
664
665
666
667
668
669
670
671
672
673
674
675
676
677
678
679
680
681
682
683
684
685
686
687
688
689
690
691
692
693
694
695
696
697
B
B
B
B
B
B
B
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
S/L
Mat. Code
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
S1A80317
S1M50159
S2J30022
S2N30419
S2N30420
S2N30422
S3A60208
S1A80011
S1A80336
S1A80345
S1A80404
S1A80406
S1A80407
S1A80408
S1A80409
S1A80410
S1A80414
S1A80417
S1A80418
S1A80420
S1A80421
S1A80422
S1A80423
S1A80426
S1C20010
S1C20016
S1L60454
S1Q10109
S1Q10148
S1Q10149
S1Q10150
S1Q10151
S1Q10152
S1Q10154
S1Q10155
S1Q10157
S1Q10158
S1S40021
S1S40022
S1S40023
S1S40024
S1S40025
S1S40026
S1S40031
S1S40033
S1S40034
S1S40035
S1S40037
S1S40038
S1S40039
LOCATION
Model
Mat.Description
HEATER TAPE
FUSE..BLA030(T)
CHEMICAL FILTER
CHEMICAL FILTER
BELLOWS PUMP(20L)
TIMING BELT
BELT TIMING
BELT TIMING..135-L-100 BE(SAME
BELT TIMING..B40S2M190U
CIRCUIT BREAK..NF50-SP-2P-50ACIRCUIT BREAK..NF100-SP-2P-75A
CIRCUIT BREAK..NV50-CP-3P-30ACIRCUIT BREAK..NF50-SP-2P-30ACIRCUIT BREAK..NF100-SP-3P-100
CIRCUIT BREAK..NV50-CP-3P-50ATEMP. CONTROLLER
HEATER TAPE..100V 60W 1.5M LEA
HEATER TAPE..100V 120W 3M(SAME
HEATER TAPE..FHT-0502H
HEATER TAPE..FHT-1020M
HEATER TAPE
(C,C)BAFFLE
PER-HEAT RING
MS BATH(MEGA)
VALVE-SOLENOID-2-WAY-115V
BELTING-POLY-1/4Inch.ORANGE
CONTROLLER-TEMPERATURE
MOTOR-CHAMBER DRIVER REVERSIBL
REGULATOR-PILOT 1/2Inch.
REGULATOR-PILOT3/4Inch.FNPT
VALVE-SOLENOID 4-WAY 24VAC
VALVE-4-WAY-24VAC
OVER TEMP BOARD
THERMO COUPLE-K TYPE-1/8"(SAME
COUPLING-SHAFT 5/8*5/8
BELT-V-GRIPHOTCH-33.5 O/LG
BELT-V-GRIPHOTCH-53.5 O/LG
SEAL-1.771 SHAFT-2.681 OD-0.31
SEAL-2.750 SHAFT-4.336 OD- 0.5
SEAL-5.000 SHAFT- 6.007 OD- 0.
SLIT PLATE
FLUID SENSOR CONTROL UNIT
FLUID SENSOR PTFE ENCAP SENSOR
PRESSURE SWITCH
FLOAT SWITCH
SENSOR FIBER OPTIC FU37
SENSOR KEYENCE
Vendor Part. No
043-000158-1
045-000181-1
P-300
WGFG80P01
WDFV40WOF
PFD2
ZSP-2001
023-000789-1
023-000709-1
023-000725-1
031-001991-1
031-002001-1
031-002031-1
031-001987-1
031-001821-1
031-002039-1
T4M-B3SK4C
043-000232-1
043-000039-1
043-000445-1
043-000452-1
043-000454-1
043-000448-1
043-000095-1
0200-35159
0200-35101
FK20P001
BB0150-01
KK-8738-03
FB8123-01
CJ1427-02
BB8158-02
BB8158-03
BB8071-01
BB9240-01
HA9445-03
FA-9558-01
DS080020
EJ010505
EJ010513
FJ031820
FJ032929
FJ033782
HM280395
HS190000
HS190002
HT170014
HV160001
PU160035
PU160042
2
3
43
1
3
2
1
2
2
2
1
1
2
2
1
3
3
1
1
1
1
1
1
2
1
1
1
1
1
1
1
1
1
1
1
2
1
2
1
1
2
1
1
1
1
1
1
1
1
1
NO
698
699
700
701
702
703
704
705
706
707
708
709
710
711
712
713
714
715
716
717
718
719
720
721
722
723
724
725
726
727
728
729
730
731
732
733
734
735
736
737
738
739
740
741
742
743
744
745
746
747
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
S/L
Mat. Code
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
S1S40040
S1S40041
S1S40043
S1S40044
S1S40045
S1S40046
S1S40047
S1S40048
S1S40049
S1S40050
S1S40051
S1S40052
S1S40055
S1S40057
S2D50014
S2D50016
S2D50017
S2D50019
S2G80104
S2G80106
S2G80107
S2G80113
S2G80114
S2N30421
S2N30423
S2N30426
S2N30428
S2N30429
S2N30430
S2N30431
S2N30432
S2N30433
S2N30434
S2N30435
S2N30437
S2N30439
S2N30440
S2N30441
S2N30442
S2N30443
S2N30444
S2N30446
S2N30448
S2N30452
S2N30457
S2N30458
S2S20046
S2S20140
S2S20144
S2S20146
LOCATION
Model
Mat.Description
PHOTOELECTRIC AMP
SWITCH SENSOR FIBER OPTIC
SOLID STATE SWITCH
SWITCH- SOLID STATE SWITCHES
SWITCH-N.O.-HALL EFFECT
CAPACITIVE PROXIMITY SWITCH
C/B 2-POLE 20AMP
C/B 2-POLE 15AMP
C/B 2POLE 30AMP
C/B 2-POLE 25AMP
OVERLOAD RELAY
RELAY-24VDC
FAN 240 CFM
VARISTOR-250V RMS 50KA SCREW B
SUSCEPTOR-NITRIDE
REFLECTOR-RTP(R-47-1C)
CALPRE-HEAT RING(NIT)
TEMP CAL SUSCEPTOR KIT(NIT)
BUBBLER TANK ASSEMBLY
VACUUM FILTER
ADAPTER-SLOW VACUUM
ARM HANDLING
EXHAUST PRESSURE GAUGE(DIGITAL
CHEMICAL FILTER
CHEMICAL FILTER
3 POLE 40 AMP CB
MALE BRANCH TEE
CAPUCITANCE SWITCH
PORT CONNECTOR OF 1/4
FEMALE CONNECTOR 1/4
BARDED TUBING CONNECTOR
RTD ASSY W/HUPVC
PRESSURE TRANSMITTER
REGULATOR 10-60
33MHZ 486 BASE CPU MOD(SAME:S1
CIRCUIT BREAKER OF 10 AMP
BALL VALVE
BELLOWS VALVE 1/4
FEMALE CONNECTOR OF 3/8(SAME:S
DIAPHRAGM VALVE
FLARETEK STRA10GHT
BELLOWS VALVE N/C
RELAY 24VDC COIL
GAUGE(30PSI)
WAFER TRANSFER SPECIALISTS
4270W O-RING
O-RING ID 28.0X.210 CSD
JIG DC BIAS POST ALIGNMENT
PVD CHAMBER POS C WATER RETURN
PVD CHAMBER LID
Vendor Part. No
PU160047
PU160081
PU670045
PU670046
PU690045
PV380012
QH090096
QH090107
QH090110
QH090124
QP040033
QP070016
RA030037
VR590008
0200-35113
0021-35163
0200-35072
0200-35168
PG6-1461-000
SS-4TF-90U
D20-3089-000
PS5-3029-000
TX-320-AC-A
WDFZATXOF
WGFZ80P01
MG27182
IMP2MBT/FLUOROCARBON
KIE-3015-FEKG
SS-401-PC
SS-600-7-4
12364
A-PX-1-25-3-1-5-X
CDTTSB100-CC-4DCT
R35-02B
EPC-5-33102752/VDO
Q0210E316SQUARED
SS-62TF4
SS-4BK-VP-KM
SS-400-7-2
N/O 695-1.5-039175-2
PANEL MOUNT UNION
SS-6BK-K
AB700-HA32Z25
CFM-01
WTC-01
AS568-448
3700-01426
0270-20070
0040-75313
0040-21289PA
1
1
1
1
1
1
1
1
3
2
1
2
1
3
1
1
1
1
1
5
3
1
1
1
1
1
1
6
2
2
20
1
1
4
1
1
1
1
2
1
5
1
2
1
1
1
2
1
1
1
NO
748
749
750
751
752
753
754
755
756
757
758
759
760
761
762
763
764
765
766
767
768
769
770
771
772
773
774
775
776
777
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
C
S/L
Mat. Code
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
SR01
S3H70050
S3H70051
S3H70052
S3H70074
S4A20002
S4T41401
S4T41402
S4T41405
S4T41407
S4T41441
S4T41442
S4T41443
S4T60008
SZ982237
SZ982247
SZ982250
SZ982251
SZ982252
SZ982253
SZ982254
SZ982263
SZ982264
SZ982265
SZ982266
SZ982269
SZ982271
SZ990069
SZ990071
SZ990072
SZ990073
LOCATION
Model
Mat.Description
MANUAL V/V
10T MANOMETER
MINI CONVECTRON GAUGE
LIFT KIT ASSY
SI APERTURE 2 HOLDER(E-BEAM?
O-RING..BUTYL AS568-162 BLK
O-RING..BUTYL AS568-257 BLK
O-RING..PF S-11.2 BLK
O-RING..PF S-22.4 BLK(SAME:S9Z
O-RING..NBR AS568-223 BLK
O-RING..NBR AS568-218 BLK
O-RING..KALREZ4079 BLK(SAME:S9
WAFERGARD F40 0.1UM FILTER
8Inch. BLADE(SAME:S2D50005)(SA
ANALYZER MOTOR (SAME:SA971950)
ANGLE ENCODER POLARIZER INCL.C
EDA BOARD
EAD BOARD
EMA BOARD
ANGLE ENCODE FOR ANALYZER INCL
OL APERTURE PLATE
PENNING VACUUM GAUGE(C-4)
CERAMIC ARM(TABOT CHUCK)
A POSI SENSOR
PA/TORR METER
O-RING(S25)
DURAN
FC-0901F
FC-0901F
Y2021
Vendor Part. No
TRIKON-01
TRIKON-05
TRIKON-06
0240-34866
1800UM PITCH(593-1198)
027-001485-1
027-001487-1
027-101985-1
027-102595-1
027-000313-1
027-000483-1
027-001131-1
WGVL40S01
0200-35004
E9A170
E9A110
E9A540
E9A550
E9A530
E9A130
3
2/1/1909
UA-0000-3/Y-TAO-CE-001
EE-SX670(JY5)
WSG-65GD-2NN-3S
S25
DURAN
FC-0901F
1B05-200030-11
Y2021
1
1
1
1
3
1
1
8
25
1
1
1
5
2
1
1
1
1
1
1
1
1
1
2
1
3
14
1
1
1
2368
PARTS LIST2
No
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
27
28
29
30
31
32
33
34
35
36
37
38
39
40
41
42
43
44
45
46
47
48
49
50
51
Item no
3101B-001
3101B-002
3101B-003
3101B-004
3101B-051
3101C-021
3101F-002
3101F-104
3101G-001
3101M-001
3101M-021
3101M-105
3101P-002
3101P-104
3101S-051
3101S-155
3101S-158
3103A-006
3103B-007
3103B-021
3103B-024
3103B-025
3103B-026
3103B-027
3103B-032
3103B-036
3103B-038
3103B-043
3103B-053
3103B-055
3103B-056
3103B-057
3103B-058
3103B-059
3103B-060
3103B-066
3103B-067
3103B-068
3103B-070
3103B-101
3103B-104
3103B-106
3103B-109
3103B-110
3103B-111
3103B-113
3103B-118
3103B-121
3103B-125
3103B-131
3103C-002
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
DESCRIPTION
(X)FIRING CIRCUIT BOARD
(X)I/O PC BOARD
(X)MFS END CLOSURE POWER SUPPL
(X)FLOW CONTROL PC BOARD
(X)60 AMP BREAKER
(X)BOAT LOADER CABLE
(X)FILTER ELEMENT
(X)FLUORESCENT DISPLAY
(X)RING GASKET(SILICONE)
(X)BOAT LOADER MOTOR
(X)FLOW METER FOR HYDROGEN
(X)CANTILEVER MOUNT
(X)POWER SUPPLY
(X)PULLEY BOAT LOADER
(X)SEAL RING GRAPHOIL
(X)ELECOATSPRAY
(X)DUAL SCR (3131S-158)
(Y)5"B/L LINE ACTUATOR
(Y)5"OPTO-INPUT MODU
(Y)5"PLUG-IN MODULE +/- 5V PCB
5"PCB HIGH LEVEL AMP 0-10V
(Y)5"BOATLOAD BACK P
(Y)5"DRIVE BOARD
(Y)5"PCB SCANNER HIG
(Y)5"PCA BINARY I/O
5"PCB ASS'Y BINARY I
(Y)5"PCB ASSY SO NO/
(Y)5"PCB PWR SPLY MF
5"IC AD521 FOR AMP/F
(Y)5"CENTRAL MCB PCB
(Y)5"SLAVE DTC PCB A
(Y)5"PCB ASSY AMP MO
(Y)5"MPC INTERFACE B
(Y)5"PCB ASSY SS SCMR/AMP STD
(Y)5"TEMP CONTROLL B
~Y)5"KEYPAD INTERFAC
(Y)5"IBAL CONTROL BO
(Y)5"E2 BATTERY PCB
(Y)5"DRIVER BOARD
(Y)5"MAIN CIRCUIT BOARD
(Y)5"VESTIBLE BLOCK
5"B/L GUIDE BEARING
5"BARATRON 2 TORR
(Y)5"BATTERY 3.6V
(Y)5"BOAT CONTROL PC
(Y)5"VESTIBLE BLOCK(Y)5"VESTIBLE BLOCK(X)5"REPEATABLE POSIT V-BLOCK
CB 2P 480V 100A SQD FAL ST
LOCATION
D-3-5-1
D-3-5-1
J-3-1
D-3-5-1
D-3-5-1
K-9-3-1, D-2-5-1
D-3-5-2
K-9-3-1
M-6-3-3
N-4-3-1
J-1-3-2
J-4-3-4
N-4-3-1
VENDOR PART NO
905053-001
901868-001
902979-001
900830-001
219-2-6882-3
903188-001
P-511-03-O1ZLPO
FG108M1
904298-001
903621-001
5811
905945-001
904603-001
420ML
CD631615
6100012
3161101
3160292
3160301
3161501
3130033
3160332
3160072
3161031
J-1-3-2
N-4-3-1
N-4-3-1
J-1-3-2
N-4-3-1
D-3-1-1
J-1-3-2
J-1-3-2
J-1-3-2
G-1-2
L-6-1-2
J-1-3-2
J-6-4
A-3-1
J-5-3
1560105
B7020-200-1
B7020-320-0
901270-005
3161522
EAS005-001
VEN900-003
3161201
9038-236-009
1805005
2952650
7449042
122AA-00002AB
8760459
FA-IN
HVB003-001
9011239
1
2
1
3
3
1
1
3
67
8
4
6
1
8
5
16
9
1
2
4
1
2
6
3
2
2
2
1
6
1
1
1
2
2
1
2
3
1
1
2
20
5
2
2
17
4
9
3
2
1
4
LOC
VENDOR
T14
T14
T31
T14
AA21
AA21
AA22
AA21
A21
P55,T21
AA21
A21
T21
AA21
AA21
DD23
AA22
A104
W14
W14
W14
W14
W14,T63
W14
W14
W14
W14
W14
W14
W14
W14
W14
W14
W14
U23
W14
W14
W14
W14
C32
L11
A104
B34
W14
A104
DD43
DD43
DD43
C32
DD10
A81
TYLAN
TYLAN
TYLAN
TYLAN
TYLAN
TYLAN
TYLAN
TYLAN
TYLAN
TYLAN
TYLAN
TYLAN
TYLAN
TYLAN
TYLAN
TYLAN
TYLAN
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
BTU
No
52
53
54
55
56
57
58
59
60
61
62
63
64
65
66
67
68
69
70
71
72
73
74
75
76
77
78
79
80
81
82
83
84
85
86
87
88
89
90
91
92
93
94
95
96
97
98
99
100
101
102
103
104
Item no
3103C-004
3103C-061
3103C-063
3103E-021
3103H-002
3103L-001
3103M-021
3103M-025
3103P-019
3103P-022
3103P-023
3103R-016
3103S-003
3103S-005
3103S-007
3103S-021
3103S-022
3103S-024
3103S-025
3103T-011
3103V-017
3103V-020
3105B-002
3105B-022
3105B-024
3105D-001
3105O-003
3105O-006
3105O-017
3105O-018
3105O-029
3105O-032
3105O-033
3105O-036
3105P-003
3105S-025
3105S-026
3105T-011
3106A-001
3106B-006
3106B-008
3106B-009
3106B-013
3106B-015
3106B-016
3106B-019
3106B-020
3106B-029
3106B-031
3106B-042
3106B-045
3106B-048
3106B-051
FURNACE
FURNACE
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
DESCRIPTION
(Y)5"CABLE (20FT)
(Y)5"CABLE
(Y)5"OPTICAL ENCODER
(Y)5"FLEX HOSE 10'W/
(Y)5"LCD DISPLAY W/L
(Y)5"BOAT PLATE MOTO
5"FAN & MOTOR
(Y)5"LPCVD PWR SUPPL
(Y)5"DC-POWER SUPPLY
5"KEY PAD ASSY-LH
(X)5"CERAMIC RING
(Y)5"SFT CONTROL SST
(Y)5"FIBEROPTIC SENS
5"BANNER FIBOROPTIC
5"MICRO S/W
(X)5"LIMIT S/W ASS'Y
(Y)5"THERMOSTAT S/W (230F)
(Y)5"S/W (2 K OHM)
(Y)5" THERMOSTAT OP
(Y)5"VALVE SOL PNEUT
(Y)5"VALVE
(X)5"TERMINATION BOAT
(X)5"SUPPORT ARM BRACKET
(X)5"BELLOWS FEEDTHRU CANTILEV
(X)5"DOOR 200/206 3-RAIL
(X)5"COLD TRAP O-RING
(X)5"O-RING,Q'TZ SHEATH
(X)5"T.C CANTI' SEAL O-RING
(X)5"O-RING
(X)5"LTO DOOR O-RING
(X)5"O-RING SILICON
(X)5"O-RING SILICON
C)5"O-RING(3996O-319)
(X)5"SUPPORT RING PLATE
(X)5"SPRING
(X)5"SWIVEL
(X)5"INJECTOR PROFILE T/C
(Y)5"BOARD, LOAD STA
5"BOARD, GAS INTERFA
(Y)5"A/C FAIL DETECT
(Y)5"BOARD, AUX INTR
(Y)5"BRAIN BOARD
5"B/D, SCR FIRING SO
5"BOARD, BOAT LOADER
5"BOARD H2 ANNEL, AL
5"BOATLOUDER CONTROL
(Y)5"BOARD INDUSTRIA
5"BOARD OVERTEMP DET
(Y)5"BOARD SERVO INT
(Y)5"DISC DRIVE MOTO
(C)5"BEARING DUPLEX
LOCATION
VENDOR PART NO
J-5-2
K-5-5-3
3201552
7006600
M-2-1-3, L-11-3-4 VEN770-001
MH-QF-D10
N-1-1-3
VEN770-011
K-5-5-3
127X635X3T
F-5-1
CL2T2
8196156
L-9-2
31-0010
HAS210-003
J-5-1
K-5-5-3
7670205
K-5-5-3
L-5-4-1
VEN770-004
N-1-1-3, D-8-1
8603219
2057244
K-5-5-3
8609537
K-5-5-3
K-5-5-3
8609539
K-5-5-3
8580730
L-6-1-1
SS-4BMRG-TW
C-2-3
AT-BC
D-2-4-1
4764
3842
C-2-3
4684
2215
3886
G-2-1
G-2-5-4
D-2-4-1
D-2-4-1
D-2-4-1
I-5-3
L-5-1-3
J-4-1-2
L-5-1-3
J-4-1-2
L-5-1-3
D-3-1-1
N-4-3-2
L-5-1-3
L-2-4-3
D-3-1-1
L-5-1-3
L-5-1-3
46X7T
115X6.7T
5611
4882
4775
300X150X45T
124510-001
123970-001
HGK001-005
906539-001
120270-001
117690-001
147050-001
125280-004
905946-002
122630-007
122690-001
131660-001
904031-001
16
1
1
4
1
2
21
7
3
1
2
1
10
1
1
10
1
2
6
1
1
3
20
1
2
1
5
22
224
370
100
300
100
11
1
2
1
4
2
2
1
1
1
2
1
1
1
1
4
2
1
1
5
LOC
VENDOR
A81
A104
L82
T63
B24
V25
A104
L22
W14
V14
W14
A105
A104
A104
D13
V25
Z14
A104
A104
A104
A104
B31
AA23
AA23
AA23
AA23
AA22
B22
B22
A22
AA22
AA41
BB22
BB22
AA23
AA23
AA23
AA23
Z19
A14
U23
W14
A14
W14
A14
U23
W12
A14
A91
U23
A14
A14
B25
BTU
BTU
BTU MANUAL
BTU MANUAL
BTU MANUAL
BTU MANUAL
BTU MANUAL
BTU MANUAL
BTU MANUAL
BTU MANUAL
BTU MANUAL
BTU MANUAL
BTU MANUAL
BTU MANUAL
BTU MANUAL
BTU MANUAL
BTU MANUAL
BTU MANUAL
BTU MANUAL
BTU MANUAL
BTU MANUAL
BTU MANUAL
ASM
ASM
ASM
ASM
ASM
ASM
ASM
ASM
ASM
ASM
ASM
ASM
ASM
ASM
ASM
ASM
THERMCO
THERMCO
"
"
THERMCO
"
"
"
"
"
"
"
"
"
"
No
105
106
107
108
109
110
111
112
113
114
115
116
117
118
119
120
121
122
123
124
125
126
127
128
129
130
131
132
133
134
135
136
137
138
139
140
141
142
143
144
145
146
147
148
149
150
151
152
153
154
155
156
157
Item no
3106B-052
3106B-054
3106B-055
3106B-056
3106B-058
3106B-059
3106B-060
3106B-061
3106B-063
3106B-070
3106B-071
3106B-072
3106B-073
3106B-074
3106B-078
3106B-081
3106B-084
3106B-099
3106B-101
3106B-104
3106B-105
3106B-106
3106B-109
3106B-111
3106B-121
3106B-122
3106B-125
3106B-127
3106B-128
3106B-132
3106B-133
3106B-141
3106B-142
3106C-006
3106C-008
3106C-016
3106C-018
3106C-059
3106C-071
3106C-087
3106C-090
3106C-093
3106E-001
3106E-003
3106E-005
3106F-001
3106F-004
3106F-011
3106F-012
3106F-050
3106F-102
3106F-106
3106G-002
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
DESCRIPTION
(C)5"BEARING, SINGLE
(Y)5"BLOCK, BEARING
(Y)5"RETAINER, BEARI
(Y)5"SEAT, BEARING
(Y)5"BEARING BALL
(Y)5"BEARING MINATUR
(Y)5"BEARING
(Y)5"BLOCK VESTIBULE
(X)5"ENDOCER/HALL BUFFER BD
(Y)5"72-PIN EXT. CAR
(Y)5"BELT, TIMING DR
(Y)5"BELT TIMING
(Y)5"BELT
(Y)5"BELT TIMING
(Y)5"BRAIN BOARD
5"MANDMETER PCB ASSY
5"CIRCUIT BREAKER 1
(X)5"BAM I/O PCB ASSY
(Y)5"VELT BLOCK
(Y)5"SIPPING BLOCK
(Y)5"TERMINAL BLOCK
(Y)5"C,BREAKER,3 POL
(Y)5"BREAKER CIRCUIT
(Y)5"BREAKER
(Y)5"BREAKER
5"DISK HEAT BLOCK
(Y)5"BREAKER MFG-MKS
(X)5"BRACKET SUPPORT
(Y)5"DOSTOP COLLER
(Y)5"BALL SOCKET75/5
(Y)5"COLLAR DUSTOP
(Y)5"TEMP CONTROLLER
(X)5"HEATSINK CONTRO
5"CONTROL PANEL ASSY
(Y)5"TEMPERATURE CONTROLLER
(X)5"COOLAR, SPLIT
5"TEOS MFC 200SCCM
(Y)5"ASSY H2 BURNOFF ELEMENT
(X)5"ENCODER BLOCK A
(X)5"FILTER AIR INTA

(X)5"A PICO FUSE R
(X)5"FUSE 0.8A R
(Y)5"FLATE MTN FAN
(X)5"STANDOFF 3/16
(X)5"FLANGE,BLANK-OFF (NW-50)
(X)5"GASKET VESTIBUL
LOCATION
M-6-4-1
L-5-1-3
L-4-3-4
L-4-3-4
J-3-3
D-3-1-2
L-4-3-4
J-4-1-2
J-4-1-2
L-4-2-4
D-3-1-2
L-4-3-4
L-4-3-4
L-4-2-4
K-3-2-3
L-4-2-4
L-5-5-2
L-5-5-2
L-5-5-2
L-5-5-2
L-5-5-2
L-5-5-2
L-5-5-2
L-4-3-4
M-1-4-1
L-4-2-4
D-3-1-1
L-4-3-4
L-4-3-4
L-5-5-2
L-4-3-4
H-3-3, F-3-2
L-4-3-4
N-2-5-1
M-1-4-1
J-3-1
D-3-1-2
K-5-5-2
L-5-2-1
M-1-4-1
M-1-4-1
L-7-1
VENDOR PART NO
903888-001
121895-001
129348-001
127342-001
903889-004
906609-001
900605-004
125993-003
40261
40064
904033-002
904033-007
904033-003
906387-001
OPT022 B1TYPE
118860-001
900029-013
155770-001
SK18667-01-004
01-432-261
100378-001
903348-001
900862-002
900573-010
900034-007
900034-001
900869-030
900573-005
900573-015
904119-030
900869-060
142893-001
146655-001
904027-060
901034-006
904027-061
906904-001
5400-6070
138611-001
904513-001
03-0062
FTC322
04-267-386
10517
900721-001
321002
1/4X1-1/4 AGC
01-432-132
201300
31-7106
124422-001
4
1
1
1
1
1
1
2
1
1
5
1
1
2
1
5
2
1
2
4
4
2
1
1
1
1
1
2
2
1
1
15
2
1
1
3
1
1
2
2
5
2
1
1
1
3
1
2
4
20
4
6
48
LOC
VENDOR
B25
A140
A94
A94
A94
A94
A94
L82
T31
A94
D12
D12
D12
D12
W14
W14
W14
T31
A94
A94
A14
A15
A14
D12
D12
D12
D12
D12
D12
L82
D12
A94
AA24
A91
A14
A91
U23
A94
A94
D12
A94
L33
A94
W12
AA24
AA44
A93
T31
A93
A93
AA24
AA24
A15
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
No
158
159
160
161
162
163
164
165
166
167
168
169
170
171
172
173
174
175
176
177
178
179
180
181
182
183
184
185
186
187
188
189
190
191
192
193
194
195
196
197
198
199
200
201
202
203
204
205
206
207
208
209
210
Item no
3106G-008
3106G-013
3106G-022
3106G-023
3106G-024
3106H-001
3106I-001
3106I-004
3106I-010
3106J-002
3106K-001
3106L-001
3106L-008
3106L-009
3106M-003
3106M-008
3106M-011
3106M-012
3106M-014
3106M-051
3106M-061
3106M-062
3106M-063
3106M-064
3106M-065
3106M-081
3106M-082
3106N-005
3106P-002
3106P-003
3106P-004
3106P-023
3106P-024
3106P-025
3106P-031
3106P-042
3106P-043
3106P-044
3106P-045
3106P-051
3106P-052
3106R-002
3106R-004
3106R-022
3106R-043
3106R-045
3106R-046
3106R-061
3106R-062
3106S-001
3106S-007
3106S-008
3106S-012
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
DESCRIPTION
DOOR GASKET KIT
GASKET SOLID
(Y)5"GUAGE
(Y)5"GAUGE
(Y)5"GAGE PRESSURE
(X)5"HEATING JACK
(Y)5"INDICATOR GREEN
(Y)5"INDICATOR AMBER 125V
(Y)5"INDICATOR RED 1
(X)5"4-PIN SAFETY JUMPER
(X)5"KEY (X-AXIS)
(X)5"DIODE, LED
(X)5"P.B LAMP R
(Y)5"HEATER COLLAR O
(Y)5"STARTER, MOTOR
(Y)5"MOTOR 3/4 HP 11
(X)5"INPUT MODULE
(X)5"OUTPUT MODULE
(Y)5"MOUNT MOTOR
(Y)5"ASSY SOLID STAT
(Y)5"DC MODULE INPUT
(Y)5"DC MODULE OUTPU
(Y)5"MODULE
(Y)5"MODULE
(Y)5"MONITOR
(Y)5"ROTO METER
(Y)5"MANIFOLD
(X)5"NUT, MAIL SUPRORT
(Y)5"20-GROOVE TIMING PULLEY
(X)5"CHAIN PIN
(X)5"2-PIN SHORTING PLUG
(Y)5"PANEL
(Y)5"PANEL TOP
5"METER DIGITAL PANEL ASSY
(Y)5"TOGGLE PAD
5"POWER SUPPLY 24V,6
(Y)5"POWER SUPPLY 24
(X)POWER SUPPLY,5.12V,TUBE
(Y)5"SUPPLY POWER
(X)5"POT, CER TRIM
(X)5"POT, CER TRIM
(X)5"RING CENTERING
(X)5"RELAY
5"REGULATOR
(Y)5"RELAY 10ADC
(X)5"RECTIFIER BRIDGE
(Y)5"RELAY
(X)5"REDUCER SPEED
(X)5"RES,1/4W 55 3K
(Y)5"LIMIT SWITCH
(Y)5"SWITCHING POWER
(Y)5"HEATER MOTORSTA
(X)5"SWITCH PB MUSHROOM
LOCATION
M-3-3, L-4-1-4
K-4-3-3
K-4-4-3
K-4-4-3
K-4-4-3
C-4-1-3
L-5-1-3
L-4-3-4
L-5-1-3
M-1-4-1
M-1-4-1
E-3-3-3
L-5-5-2
E-1-4
D-3-1-2
L-4-3-4
L-4-3-4
L-5-4-1
L-5-5-3
L-5-5-3
L-5-5-3
L-5-5-3
L-5-5-2
L-5-5-3
M-1-4-1
L-4-2-4
M-1-4-1
M-1-4-1
J-4-2-3
L-4-2-4
L-4-3-4
L-4-2-4
L-4-2-4
B-1-4-1
L-4-2-4
K-5-5-2
K-3-4-2
A-3-5
J-4-1-2
M-1-4-1
L-5-1-3
D-3-1-2
J-4-1-2
J-4-1-2
K-5-5-4
L-4-3-4
VENDOR PART NO
HAS115-001
HGK001-005
905546-006
905546-005
2900-0001
102A-11126
900030-002
900030-006
90030-005
40052
145799-001
900141-001
12V T-3-1/4
220V.250W
900764-001
904246-005
318045
318046
129302-001
124576-001
906540-001
906540-002
1492-2004
1492-2001
1491-4005
2900-0002
1491-2000
03-0060
904032-001
A10610-1825
320082
1492-2003B
1490-1002
903088-001
906559-001
LSS-39-24
LUS-10A-24
LST-39-133
906653-001
903259-006
903259-005
904528-003
K10P-11D15-6
906715-003
904279-001
903245-001
90262-006
906462-001
900674-004
903111-002
139541-001
900765-002
903528-002
10
20
1
1
1
3
2
1
2
2
1
7
3
70
2
1
1
1
1
2
1
1
1
1
1
1
1
1
1
4
2
1
1
1
2
1
2
2
1
2
1
1
1
1
1
2
1
1
2
4
1
2
1
LOC
VENDOR
A14
A13
A14
A14
A14
AA20
A14
A94
A14
AA24
AA24
T13
AA24
L12
D12
P43
T13
T31
A94
A94
D12
D12
D12
D12
D12
D12
D12
AA24
A14
AA24
AA24
A93
A93
A14
A94
A14
A14
T13
A14
T13
T13
A93
C12
R56
W14
AA24
A14
T31
W14
W14
C22
A94
T13
THERMCO
THERMCO
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
THERMCO
"
"
"
"
"
"
"
"
"
"
"
"
"
"
No
Item no
211 3106S-014
212 3106S-015
213 3106S-016
214 3106S-017
215 3106S-022
216 3106S-023
217 3106S-024
218 3106S-025
219 3106S-030
220 3106S-033
221 3106S-035
222 3106S-037
223 3106S-038
224 3106S-039
225 3106S-042
226 3106S-055
227 3106S-105
228 3106S-106
229 3106S-107
230 3106S-108
231 3106S-109
232 3106S-110
233 3106S-121
234 3106T-022
235 3106T-029
236 3106T-030
237 3106T-031
238 3106T-032
239 3106T-034
240 3106T-060
241 3106T-061
242 3106T-091
243 3106T-095
244 3106U-001
245 3106V-001
246 3106V-017
247 3106V-018
248 3106V-031
249 3106W-001
250 3106W-002
251 3106W-007
252 3106W-009
253 3107B-029
254 3107C-015
255 3107P-007
256 3107P-008
257 3107P-031
258 3107P-051
259 3107R-011
260 3107S-024
261 3107S-025
262 3108A-001
263 3108B-003
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
DESCRIPTION
(Y)5"SWITCH TOGGLE
(X)5"SWITCH GUARD HINGED RED
5"SWITCH PB MUSH
(X)5"SWITCH ROCKER
(X)5"SWITCH DISCONNECT MAIN LI
(Y)5"SWITCH POWER
(X)5"SWITCH ADJ FLOW 10-400ML
(X)5"ADAPTOR MICROSWITCH
(X)5"DOOR SWITCH R
(X)5"SWITCH GUARD (E.P.O.2)
(X)5"LIMITCH ASSY UPPER Y-AXIS
(Y)5"SWITCH ASSY
(Y)5"BLACK MOUNTING
(Y)5"SPRING WIRE OPT
(X)THERMAL T/C SW (DRY PUMP)
5"OPTICAL SENSOR
(C)5"3997S-452 SCR,
(X)5"SUPPORT, MALL, 8"
(X)5"SPRING OUTER 3"
(X)5"SPRING CO6PRESSION
(X)5"SCAV, SHIELD-OUTER
(X)5"SCAV SHIELD-INNER
(Y)5"SHAFT-FLEXIBLE
(Y)5"CLOSED EXHUOST TUBE
(X)5"TUBING POLYURAT
(X)5"TUBING POLYURAT
(X)5"TUBING TEFLON,
(X)5"TUBING TEFLON,
(X)5"TUBING POLYURET
(Y)5"TRANSFORMER FB1
(Y)5"TRANSFORMER FB3
(Y)5"TEFLON PTFE TAP
(X)5"TRAP MULTI-NW.50
5"MULTITRAP UNIT
5"SOLENOID VALVE, 3(Y)5"VALVE TEF
(Y)5"VALVE TEF 2-WA
(X)5"VELCRO
(Y)5"WIRE T/C COMP
(X)5"WIRE H2 BURN-OFF COIL
(X)5"ASSY WIRING
(X)5"WASHER #6
(Y)ROHLIX BEARING
TEMP CONTROLLER
(Y)SERVO POWER SUPPLY
(Y)AUXILLARY POWER
(Y)END EFFECTOR PIN SET
(Y)PULLEY SET
(Y)ROLLER (SMALL)
(Y)STACK OVERTEMP SENSOR
(Y)TORCH STACK OVERTEMP SEN
(Y)AMP UNIT TAKCNAKA
(Y)SPHERICAL BEARING
LOCATION
L-4-3-4
M-1-4-1
M-1-4-1
F-4-5-2
L-4-3-4
D-3-1-2
M-1-4-1
M-1-4-1
M-1-4-1
M-1-4-1
L-4-3-4
L-4-3-4
L-6-4-1
D-3-3-2
K-5-5-2
M-1-4-1
M-1-4-1
M-1-4-1
M-1-4-1
L-5-5-2
I-4-2
M-1-4-1
M-1-4-1
M-1-4-1
M-1-4-1
M-1-4-1
N-2-5-1
N-2-5-1
J-6-2
H-7-2
E-2-4
L-5-5-3
N-2-1-4
M-7-2-1
M-1-4-1
M-1-4-1
M-1-4-1
M-1-4-1
L-6-2-2
M-5-3-3
K-5-5-2
D-3-3-2
D-3-3-2
K-5-5-2
K-5-5-2
J-1-2-1
J-1-2-1
VENDOR PART NO
904714-001
903599-001
903528-001
902439-001
900105-025
5104-1000
905264-004
129432-001
40FR1-3
9O5190-001
147724-001
141074-001
154123-001
154127-001
A28702010
134698-001
11-0459
03-0009
03-1700
03-0065
03-2505
03-2504
904104-003
7400-0001
7400-3814
7401-0125
7401-0200
7401-0500
5600-0016
5600-0030
0.5TX25X30000L
906537-001
TRAP-HT2
903822-001
7383-2334
8002-0483
1405-0013
900040-009
07-432-310-1
147219-001
902273-003
4022264
AT-DC-102
4016347
4016348
80096
4016337
4016335
8607539
8609539
TERMINAL BLOCKS
NTN SARI-12
2
2
4
2
1
1
1
1
1
1
2
19
10
10
1
4
10
3
3
2
2
2
1
4
1
1
1
1
1
1
1
7
1
2
3
2
2
1
40
1
1
100
4
1
1
1
1
1
4
4
1
1
3
LOC
VENDOR
A94
AA24
AA24
T13
DD41
A94
T31
T31
AA24
AA24
AA24
A14
A94
A94
C14
W21
A93
AA24
AA24
AA24
AA24
AA24
D12
A93
AA24
AA24
AA24
AA24
AA24
W12
W12
B41
AA43
L11
D12
B43
B43
AA24
A14
AA24
AA24
AA24
A93
A34
V14
V71
A93
W21
W21
A93
A93
A21
A21
"
"
THERMCO
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
THERMCO
"
"
"
THERMCO
THERMCO
"
"
"
"
"
BTU
BTU
"
"
"
"
"
"
"
KOYO
"
No
264
265
266
267
268
269
270
271
272
273
274
275
276
277
278
279
280
281
282
283
284
285
286
287
288
289
290
291
292
293
294
295
296
297
298
299
300
301
302
303
304
305
306
307
308
309
310
311
312
313
314
315
316
Item no
3108B-013
3108B-014
3108B-015
3108B-016
3108B-032
3108B-101
3108C-001
3108C-005
3108C-061
3108C-062
3108G-001
3108G-002
3108G-062
3108G-081
3108J-001
3108M-001
3108M-002
3108M-003
3108N-002
3108O-001
3108P-001
3108P-023
3108P-024
3108R-031
3108R-051
3108R-052
3108R-053
3108R-055
3108R-056
3108R-057
3108R-059
3108S-001
3108S-002
3108S-031
3108S-032
3108S-033
3108S-037
3108S-039
3108S-101
3108S-103
3108T-021
3108T-022
3108T-023
3108V-001
3108V-002
3110B-001
3110B-023
3110B-025
3110B-051
3110B-052
3110C-051
3110F-001
3110H-002
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
LPCVD/DIFF
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
DESCRIPTION
BLOWER
HDFC BOARD
PCB AI/AO BOARD
PCB PAI BOARD
(C)ANGULAR BALL BEAR
(Y)BOLT & SPRING LOC
(Y)AUTO SWITCH CYLIN
(Y)AIR CYLINDER(102-3)
(Y)SPEED CONTROLLER
(Y)EXCESS TEMP CONTR
(Y)GAUGE PORT CAP
GREASE
(Y)GASKET FOR EXHAUS
(Y)PRESSURE GAUGE
(Y)QUARTZ TUBE JOINT
(Y)REVERSIBLE MOTOR
(Y)PULSE MOTOR DRI
(Y)PULSE MOTOR MYCOM
(Y)SLOTTED NUT, KOYO
(Y)O-RING
(Y)POWER PACK
(Y)ROUND PACKING
(Y)SQUARE PACKING
(Y)REGULATOR TESCOM
(Y)BACK UP RING
(Y)SUPER RING
(Y)SUPER RING
(Y)SUPER RING
(Y)SUPER RING
(Y)SUPER RING
(Y)SUPER RING
(Y)COMPRESSI6N SPRIN
(Y)COMPRESSION SPRIN
(Y)PRESSURE SWITCH
(Y)DIGITAL FLOW SWIT
(Y)PHOTO ELECTRIC SW
(Y)LIMIT SWITCH
(Y)HEAT RESISTING MICRO S/W
(Y)FOAM SILICON 10X1
(Y)QUARTZ SHUTTER
(Y)TAPER TUBE FOR FL
(Y)SOLENOID VALVE
(Y)SOLENOID VALVE
(Y)TIMING BELT
(Y)FIRERING BOARD
(Y)S/W PRESS(1ATM,2P
(Y)ROTATOR BEARING(1
(Y)ROTATOR BEARING(2
(Y)ROD-LESS CYLINDER
(Y)BPSG TRAP FILTER
(Y)WAFER HOLDER JIG
LOCATION
H-2-3
L-3-3-3
L-3-3-2
L-3-3-2
N-1-2-1
J-1-2-1
J-1-2-1
J-1-2-1
J-1-2-1
K-5-5-4
J-1-2-1
J-1-2-1
J-1-2-1
K-4-4-3
I-4-2
K-5-4-3
I-6-2
J-1-2-1
J-1-2-1
L-5-4-4
K-3-3-4
K-3-3-4
K-3-3-4
J-1-2-1
J-1-2-1
J-1-2-1
J-1-2-1
J-1-2-1
J-1-2-1
J-1-2-1
N-4-4-3
A-1-4
I-3-1
K-10-2-3
K-10-2-3
J-1-2-1
J-1-2-1
N-2-5-1
K-5-4-3
K-5-5-2
K-5-5-2
B-4-2-3
J-6-2
VENDOR PART NO
VFC-506A
HMSU2328A011
HMSU2481A02
HMSU2480A01
#7002
JS-32-13418
CMK2-00-20-200SD16N50
SMC AS2110F-01
TYPE R, 0-1400C
JS-32-11443-002
BARRIERTA 1S/V
JS-36-1259
50XAT-1SNTP1/4"
JS-37-431DET
2RJ4GB-A
PS5913-AM
KOYO AN02
P-15(V)
MODEL F-070707F
403PK-170311
413PK-497410
44-2261-242-018
JS-36-803-002
JS-36-1047B-041
JS-36-1047B-061
JS-36-1047B-049
JS-36-1047B-058
JS-36-1178-001
JS-35-378
SANESU A12-02
SANESU A12-05
NIHON SEIKI BNDFS-1000 AC100V
TAKENAKA PT02S
TZ-1GV22
V-106-1A4T
JS-36-1178-002
N2-50 SL/M
N2-15 SL/M
O2-15 SL/M
SMC VZ4330-1GZTAIYO SP310-NNO
210 L075
RA8-8900-508
033-5243-A83
51103
6902
CYB 15H-250 SMC
93109-70001
214X340X195.CM
1
1
1
1
2
2
1
1
5
1
2
2
2
2
2
1
1
1
1
6
1
5
4
1
2
2
1
1
1
2
2
5
5
1
1
1
1
1
4
2
1
1
1
4
2
1
2
2
1
1
1
6
1
LOC
VENDOR
Y24
A22
A22
A22
A21
A21
A21
A21
A21
A22
A21
A21
A21
A21
A22
A22
A23
A22
A21
A21
A23
A101
A101
A101
A21
A21
A21
A21
A21
A21
A21
A21
A21
A21
A21
A21
A21
W13
A101
A22
A101
D31
D31
A21
A21
B74
W12
B53
A92
A92
R52
C22
B41
"
"
"
"
"
"
"
KOYO
"
"
"
"
"
"
"
"
"
"
"
KOYO
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
ASM
"
"
"
"
"
"
"
No
317
318
319
475
476
477
478
479
480
481
482
483
484
485
486
487
488
489
490
491
492
493
494
495
496
497
498
499
500
501
502
503
504
505
506
507
508
509
510
511
512
513
514
515
516
517
518
519
520
521
522
523
524
Item no
3110M-002
3110R-002
3110S-001
3112A-007
3112A-022
3112B-003
3112B-006
3112B-042
3112C-011
3112C-012
3112C-034
3112C-041
3112G-001
3112G-002
3112G-003
3112K-001
3112K-002
3112O-010
3112O-018
3112R-002
3112S-005
3112S-006
3112S-007
3112S-008
3112S-009
3112S-010
3112S-011
3112V-007
3113B-001
3113B-002
3113B-003
3113B-005
3113B-006
3113B-007
3113B-009
3113B-010
3113B-011
3113B-012
3113B-013
3113B-014
3113B-015
3113B-015
3113B-019
3113B-022
3113B-023
3113B-051
3113F-002
3113F-033
3113F-052
3113F-053
3113G-001
3113G-002
3113I-001
FURNACE
FURNACE
FURNACE
BPSG
BPSG
BPSG
BPSG
BPSG
BPSG
BPSG
BPSG
BPSG
BPSG
BPSG
BPSG
BPSG
BPSG
BPSG
BPSG
BPSG
BPSG
BPSG
BPSG
BPSG
BPSG
BPSG
BPSG
BPSG
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
DESCRIPTION
(Y)MOTOR Z-AXIS ASSY
(Y)SCR
(Y)LIMIT SWITCH
(X) LOWER HEATER ASS'Y WITH E
(X) CONTACTOR 2 POLE 75 AMP
SCR INTERCONNECT
(X) PROCESS CONTROL BOARD
CARVBON BRUSH FO
CLAMP PUMP LINE
CLAMPS PUMP INTA
INVERTED CRUCIBL
CONTROLLER
(X) GASKETS PUMP INTAKE LINE
GASKETS ISO TO
GASKETS TRAP TO
(X) SYSTEM PANEL KEY
SYSTEM MODE KEY
O-RING
UPPER SEAL 5"
ROTOR STOP POST
(X) SWITCH N.C. 706293-001
(X) SWITCH N.O. 706292-001
SWITCH N.O. 7062
SWITCH N.C. 7062
(X) LIMIT S/W MAG. 706355-001
(X) LIMIT S/W MAG 706330-001
LIMIT S/W REED
(X) SOLENOID VALVE
(Y)BOARD,SENSOR (INT
(Y)BOARD,PROCESSOR
(Y)BOARD,ANALOG INDU
(Y)BOARD,ANALOG OUTP
(Y)BOARD,DIGITAL INP
(Y)BOARD,DIGITAL OUT
(Y)CONTROL INTERFACE
BOARD,COMMUNICATION
(Y)CRT INTERFACE BD
(Y)DISPLAY PANEL BD
KEYBOARD,MCV-EV
(Y)BOARD,LED (MCV-EV
(Y)HRNS SOLENOID GAS
(Y)HRNS SOLENOID GAS
(Y)BOARD,FLAME DETEC
(Y)BOARD,VOLTAGE REG
(Y)BOARD,GAS OPTION
(Y)BREAKER,CIRCUIT (
(X)40 MB CARTRIDGE
FLAG,THETA HOME
(X)FITTING,BUGLE
(Y)FLAG,OXIDE,7000,1
(Y)GAUGE,PRESSURE(0(Y)GAUGE,PRESSURE(0(Y)INDICATOR,LIGHTED
LOCATION
H-1-2
L-5-4-1
N-2-5-1
J-2-3-1, I-7-1
J-2-3-1
G-2-3-4
J-2-3-1
J-2-3-1
J-2-3-1
J-2-3-1
J-2-3-1
G-2-3-3
G-2-3-3
J-2-3-1
G-2-3-3
G-2-3-3
J-2-3-1
J-2-3-1
G-2-3-3
J-2-3-1
J-2-3-1
J-2-3-1
G-2-3-3
J-2-3-1
J-4-3-2
J-4-3-2
D-3-3-1
J-4-3-2
D-8-1
J-4-3-2
J-4-3-2
J-4-3-2
D-8-2-2
E-3-2-4
D-8-2-2
D-8-2-2
D-8-2-2
D-8-2-2
D-8-2-2
VENDOR PART NO
MP-0003
PDT1008
Z-15 GW2-B
070036-001
701020-001
400050-001
734708-001
773016-001
773020-001
950010-001
773060-001
773063-001
773065-001
793828-001
749011
781019-001
781012-001
10503-01
706293-001
706292-001
706286-001
706285-001
706335-001
706330-001
706340-001
791025-001
600043-01
600050-04
600051-01
600053-01
600054-01
600055-01
600057-01
600058-01
600061-01
600062-02
600064-01
600069-01
600143-08
600143-08
600334-01
600404-01
600702-02
700547-001
705835-006
101362-01
101573-01
104543-01
209-068
209-075
100981-01
1
2
4
3
2
1
3
10
1
1
1
3
4
10
5
1
2
5
3
5
2
2
4
2
4
2
1
2
1
2
2
2
1
1
2
1
1
1
2
1
1
1
2
2
1
1
1
4
2
3
1
1
2
LOC
VENDOR
W12
D13
W12
AA11,AA14
AA13
AA11
AA13
AA11
AA11
AA11
AA44
AA11
AA11
AA11
AA11
AA11
AA11
AA11
AA11
AA11
AA11
AA11
AA11
AA11
AA11
AA11
AA11
AA11
W11
V31
V31
V31
V25
V25
V31
V31
V25
V31
V21
V25
A92
A92
V31
V25
V25
A92
AA23
A92
AA23
A92
A92
A92
A92
"
"
"
ANICON
"
ANICON
"
ANICON
ANICON
ANICON
ANICON
ANICON
"
ANICON
ANICON
"
ANICON
ANICON
ANICON
ANICON
"
"
ANICON
ANICON
"
"
ANICON
"
THERMCO
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
No
525
526
527
528
529
530
531
532
533
534
535
536
537
538
539
540
541
542
543
544
545
546
547
548
549
550
551
552
553
554
555
556
557
558
559
560
561
562
563
564
565
566
567
568
569
570
571
572
573
574
575
576
577
Item no
3113I-002
3113L-001
3113L-002
3113L-003
3113L-021
3113L-022
3113M-001
3113M-002
3113M-003
3113M-004
3113M-005
3113M-031
3113P-002
3113R-001
3113R-003
3113R-008
3113R-031
3113R-032
3113R-051
3113S-002
3113S-009
3113S-012
3113S-013
3113S-041
3113T-001
3113T-002
3113V-009
3113V-010
3113V-011
3121B-002
3121B-003
3121B-007
3121B-013
3121B-015
3121B-015
3121B-018
3121B-024
3121B-041
3121B-044
3121B-062
3121B-070
3121B-103
3121C-035
3121C-037
3121C-037
3121C-042
3121C-045
3121C-046
3121C-046
3121C-057
3121C-060
3121D-004
3121D-005
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
DESCRIPTION
(X)INJECTOR,35/25
(Y)LAMP,FLUORESCENT 60 H2
(Y)LAMP,30V,1,2W
(Y)LAMP,NEON
(Y)SLIDE,LINEAR 760
(Y)SLIDE,LINEAR 200R
(Y)MOTOR,STEPPING
MOTOR,STEPPING
(Y)ASSY,BEU MOTOR
MOTOR,WAFER TRANSFER
(Y)MOTOR,THETA AXIS
MONITOR,CRT
POWER SUPPLY(DC)
RELAY,TIME DELAY (10
(Y)RELAY,POWER (90 A
(Y)RELAY,10 AMP (24
(Y)REGULATOR,W/GAUGE
(Y)REGULATOR-VACUUM
(Y)POWER RESISTOR ASSY
(Y)SWITCH,LIGHTED (1
(Y)SWITCH,SUB/MIN,SE
(Y)SWITCH,PUSHBUTTON
(Y)SWITCH,PUSHBUTTON
(Y)SURGE SUPPRESSOR
(X)SPIKE,SING
(X)SPIKE,DUAL
(Y)VALVE ,2W NC,TEF
(Y)VALVE,3-WAY TEFLO
(Y)VALVE (3-WAY POP)
(Y)ASSY PCB DIG I/O
(Y)ASSY PCB D/A
(Y)ASSY PCB DC POWER
(Y)ASSY GEN.INTER PCB
(Y)ASSY PCVB AUX MEM
(Y)ASSY PCVB AUX MEM
(X)SUPPORT PCB
(Y)PET LOGIC BOARD A
(X)PCB ASSY RPS PROCESSOR
(Y)PCB DISPLAY
(Y)BOAT CONTACTOR (1
BOAT 125MM COMP ASS
(Y)COLD JUNCTION
(Y)LATCH CLAMP(DOOR)
(Y)TIE ROD CERAMIC
(Y)TIE ROD CERAMIC
(Y)CONTROLLER CVE
(Y)CERAMIC AXCL
(Y)CERAMIC SPACER
(Y)CERAMIC SPACER
(Y)CERAMIC SPACER(0.
(Y)CERAMIC WHEEL(NEW
(Y)O-RING PRX TUBE D
(Y)BELLOWS TUBE DOOR(BARATRON)
LOCATION
J-4-1-2
F-4-1
D-8-2-2
G-2-5-4
H-3-2, I-7-2
E-3-1
J-4-1-2
D-8-2-2
D-8-2-2
J-4-1-2
J-4-1-2
J-4-1-2
J-4-1-2
J-4-1-2
E-3-2-4
E-3-2-4
K-3-4-2
K-3-4-2
J-4-1-2
J-4-3-4
J-4-3-4
J-4-2-2
J-4-3-4
J-4-3-4
D-3-2-2
N-6-1-2
N-4-3-2
N-1-4-2
L-12-7
B-3-3-3
L-6-5-3
N-4-3-2
L-6-5-3
L-6-5-3
L-6-5-3
L-6-5-3
L-6-5-3
VENDOR PART NO
101490-01
100768-01
10975-01
100-016
100168-1
100169-01
100177-01
100178-01
600257-01
600275-01
600276-01
100592-01
600131-02S
100967-01
101500-01
701545-001
100566-01
209-019
600290-01
100982-01
701899-001
703044-001
703045-001
700169-001
101411-01
101412-01
700154-001
700218-001
700237-001
90-105480A41
90-105480A43
90-105480A49
03-111827D01
90-105480A46
90-105480A46
1302053
1302101
03-110887D01
64-115413A06
60-106554D01
02-110553D01
63-112063A01
68-106216A06
16-110086B04
16-110086B04
03-109964D01
4100
100-015
100-015
700-015
100-013
60-106206A57
16-104124B01
1
2
4
2
1
1
2
1
2
1
3
2
2
1
1
4
1
1
1
2
3
2
2
2
1
1
1
1
2
1
3
2
1
2
1
1
1
3
1
4
1
1
2
19
10
1
7
12
150
7
8
1
4
LOC
VENDOR
DD10
C41
V12
A92
L31
A92
P55
P52
P55
P15
P52
L23
L21
W11
W11
V12
A92
A92
W11
V12
V12
V12
W11
V12
AA23
AA23
C81
C81
V12
T52
T52
W13
V23
W13,T52
W13
W13
W13
F82
W12
E74
Z19
F35
E76
H56
H56
W12
H56
H56
H56
H56
H56
E92
R62
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
ASM
"
"
"
ASM
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
No
Item no
578 3121F-015
579 3121F-031
580 3121F-039
581 3121G-034
582 3121M-002
583 3121M-007
584 3121M-033
585 3121M-034
586 3121N-003
587 3121O-001
588 3121O-002
589 3121O-007
590 3121O-008
591 3121O-008
592 3121O-009
593 3121O-014
594 3121P-001
595 3121P-001
596 3121P-003
597 3121P-004
598 3121P-011
599 3121R-035
600 3121S-003
601 3121S-004
602 3121S-007
603 3121S-008
604 3121S-013
605 3121S-105
606 3121S-106
607 3121T-001
608 3121T-002
609 3121T-003
610 3121T-005
611 3121T-006
612 3121T-031
613 3121V-028
614 3121V-029
615 3121V-036
616 3121W-001
617 3121W-002
618 3121W-003
619 3121W-004
711 3141B-009
712 3141B-011
713 3141B-022
714 3141B-023
715 3141B-105
716 3141C-005
717 3141C-007
718 3141C-016
719 3141C-017
720 3141D-011
721 3141D-011
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
PECVD
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
DESCRIPTION
(Y)FILTER ALUMINA MO
(Y)CAM-FOLLOW
(Y)FAN(SATC)
(Y)GRAHPITE AXLE (4.
(X)MOTOR(1321-1078-G288X)
(Y)G MONITOR
(Y)MUFFLER AIA
(Y)DISPLAY MODULE
(X)NUT CERAMIC(OLD BOAT)
(Y)O-RING WINDOW
(Y)O-RING
(Y)O-RING
(Y)O-RING
(Y)O-RING
(Y)O-RING
(Y)0-RING TUBE DOOR
(Y)POWER SUPPLY-48V
(Y)POWER SUPPLY-48V.DC(0.5A)
(Y)POWER SUPPLY(XP45-12W/OVP)
(Y)POWER SUPPLY +24V
(Y)IC-MC6803L-1
(Y)PUMP RESET ASS'Y
(Y)ALARM SILENCE S/W(OPER PANE
(Y)FLOW S/W(125-B RED WIRE)
(Y)PUSH BUTTON S/W
(Y)PUSH BUTTON S/W(O
(Y)PRESSURE S/W(ATM
(Y)TUBE DOOR CYL.(LA
(Y)TUBE DOOR CYL.(DO
SPIKE T/C ASS'Y
(Y)3-JUNCTION T/C
(Y)SPIKE T/C
(Y)CALIBRATION T/C
(Y)R.F GEN.TRIACGE S
(Y)ASSY-RF FEED THRU
(Y)TEFLON ELECTRIC S
ISOLATOR V/V ASS'Y
(Y)SEAL KIT ISOLATIO
(Y)WHEEL CERAMIC
(Y)CONTACT-125MM WAF
(Y)CONTACT-125MM WAF
(Y)INCO WASHER (.016
(Y)H2O2 MEASURING BATH
(Y)QTZ F/R (1) BATH
5"ROBOT TENSION BOLT
(L)5"N2 BUBBLER
QUARTZ BOTTLE
(Y)COUNTER UNIT
(Y)CHLOFOSILANES
(X)COOLTRON CONTRO
COOLTRON
(Y)ROBOT DRIVER
(Y)ROBOT DRIVER
LOCATION
VENDOR PART NO
48-106661A38
69-106285A07
40-106215A02
100-010
1531-1078-G288X
I-8-3
45-107147A03
M-7-1-1
48-109910A01
N-4-3-2
03-110107D01
L-6-5-3
16-1410263801
60-106206A10
60-106206A15
60-106206A12
60-106206A55
60-106206A55
60-106206A58
60-106206A48
N-8-3-1, L-11-4-3 42-106201A43
N-8-3-1, L-11-4-3 42-106201A43
L-11-4-3
42-106201A30
N-6-1-2
HB24-1.2A
J-4-2-2
36-105211A84
N-2-1-2
44-106648A02
N-6-1-2
60-105224A02
N-6-1-2
60-105243A44
N-6-1-2
33-105243A02
N-6-1-2
33-105243A04
N-6-1-2
33-105243A84
N-8-3-1
50-106742A03
N-3-1-1
50-106742A02
N-6-1-2
K-TYPE-TC
63-106758A10
N-6-1-2, N-8-3-1 K-TYPE
63-106758A18
N-6-1-2
TG 2SC 60
L-6-5-3
16-108824B01
N-8-3-1
802-6112-2-0
16-110129B01
N-6-1-2, N-8-3-1 50-110109A03
L-6-5-3
16-1074180B01
B-3-3-3
16-110619C01
B-3-3-3
16-110619C02
B-3-3-4
125-WSH
F-2-2
C9028518
C9028809
K-4-5-2
TB-01
I-3-3
M-001
I-4-2
421-31-XXXX
K-4-2-3
KCY-2D-G
D-11-3
500MIL NAOCHEM
H-4-3, H-5-2
VC-1203A
H-4-2, H-7-2
VC-663
L-5-2-4
RD-122
L-5-2-4
RD-122
N-6-1-2
D-3-3-2
M-7-1-1
1
4
1
70
1
1
2
1
8
5
17
3
8
13
11
9
1
1
2
1
1
1
1
4
3
3
5
1
1
2
4
5
2
3
4
9
1
3
20
8
8
52
1
1
24
1
2
5
1
3
3
1
1
LOC
VENDOR
F82
F82
W21
F82
AA11
F111
F82
W12
H56
E92
E92
E92
E92
E92
E92
E92
F82
T52
T52
F82
V23
F35
F82
F82
F82
F82
F82
F82
F82
F82
Z19
F82
Z19
F82
H55
F82
F35
F82
H56
E76
E76
E76
Z19
Y11
A102
B102
B106
C23
B24
L62,BB41
L51
D14
D14
"
"
"
"
"
ASM
"
"
"
"
"
"
"
"
"
"
ASM
ASM
"
"
"
"
"
"
ASM
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
MUSASHI
MUSASHI
"
"
"
"
"
"
"
"
"
No
722
723
724
725
726
727
728
729
730
731
732
733
734
735
736
737
738
739
740
741
742
743
744
745
746
747
748
749
750
751
752
753
754
755
756
757
758
759
760
761
762
763
764
765
766
767
768
769
770
771
772
773
774
Item no
3141D-012
3141F-061
3141H-007
3141L-002
3141M-001
3141M-005
3141M-028
3141M-041
3141P-001
3141P-007
3141P-012
3141P-017
3141P-018
3141P-019
3141P-022
3141P-023
3141P-025
3141P-028
3141P-041
3141R-016
3141S-044
3141T-003
3141T-009
3141T-010
3141V-002
3141V-004
3141V-017
3141V-018
3141V-023
3141V-024
3141V-025
3141V-030
3141V-033
3141V-043
3142B-001
3142B-001
3142F-031
3142F-041
3142H-011
3142V-003
3143A-002
3143A-003
3143B-001
3143B-021
3143B-022
3143B-023
3143B-024
3143B-027
3143B-051
3143B-072
3143B-073
3143B-077
3143B-078
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
DESCRIPTION
ROBOT DRIVER
(Y)NOISE FILTER
(Y)IR HEATER QTZ
(Y)UV LAMP
(Y)MOTOR/HEAD
(Y)MOTOR CONTROLLER
(Y)5"RESISTIVITY CON
(Y)5"FLOW METER
(R)5"H2SO4 BATH PLAT
(C)BELLOWS PUMP(PILLAR)
(Y)5"DIW QDR PLATE
(Y)FINE SONIC CARRIE
(L)5"QDR CARRIER PLA
(Y)5"H2SO4 CARRIER P
(Y)5"MEGASONIC SUPPO
(Y)5"MEGASONIC PLATE
(Y)NH40H QUARTZ PLAT
(Y)Q'TZ DIW BATH PLA
(Y)5"POWER SUPPLY
(Y)ROBOT ARM
(Y)SIT THF-51T
(Y)5"TRANSFORMER
5"TIMER (AC100-240V)
5"TIMER (AC100-240V)
(Y)5"AIR VALVE (DI S
(Y)5"3-WAY VALVE
(Y)5"VALVE
5"QDR DRAIN VALVE
5"AIR VALVE
(Y)AIR VALVE
(Y)TREE WAY AIR VALVE
(Y)5"SOLENOID VALVE
5"FINAL BATH DRAIN V
5"AIR SELECTOR VALVE
(Y)QUARTZ BATH(F/R)
(Y)QUARTZ BATH(F/R)
(Y)ORIX AC FAN MOTOR
(Y)ORIX AC FAN
(Y)WELDING M/C HEATE
(Y)AIR OPERATED VALV
(Y)TEMPERATURE ADJUS
(Y)ROTARY ACTUATOR
TIMING BELT(LOADER)
(Y)RULON BALL BEARIN
(C) BALL BEARING
(C) BALL BEARING
(Y)ANGLAR BALL BEARI
(Y)Q'TZ PLATE
(Y)INEAR BUSHING
RIB STAR BELT U
(Y)RIB STAR BELT U
CHUCK SENSOR BELLOWS
SEAL BELT(1) WSH-066
LOCATION
K-4-2-3
K-3-2-2
K-4-2-3
M-2-4
A-2-4
I-2-1
I-4-2
I-2-3, I-3-2
I-4-1
M-2-4
I-2-2
J-5-4.I-4-2
I-4-1
I-3-2
H-3-2, H-5-2, F-1-2
L-6-1-2
K-4-2-3
B-2-1
B-2-1
L-5-1-2
K-3-2-2
K-3-2-2
K-4-5-3
K-4-2-3
L-5-1-2
J-5-4
K-3-2-2
K-3-2-2
L-5-5-3
I-4-3
I-4-3
G-1-3
M-5-1-3
L-5-1-2
L-5-2-2, L-6-4-2
VENDOR PART NO
RD-153
ZGB2203-OUT
208/2000 (S)
100V 650W
2RK6GN-A
SBR31-ZP
SW562-A47
P-400-U
3-C9028801-N
PE-80HA
3-C9028804
3-C9028802
3-C9028801
5X240X365
P-03A
VC-663A
MP10008-1
H5CN-YCN DC24V
H5CN-YBN
AV-6270-114
850-1146-1
AV8290-414-DIA4
AV 250-114A
AV6280-114,ASUM
AV-350-114,ASD-M
4KA110
AV6280-414A
PB-1
MB10Z-B3(100V)
MB10Z-B3
AMD31-12U-10
SC-002A 100V
N-1-3-2, N-4-1-1 20-180S-X105
T5-10-50
B-4-2-3
7-39-20337
M-6-4-1
6002 ZZ
M-6-4-1, D-3-3-2 6004 ZZ
M-6-4-1
7-39-24428
I-4-2
M-6-4-1
7-39-15205
260J-5
220J-5
B-4-2-3
7-F3-22332
K-4-1-3
7-F3-22326
1
7
1
4
2
1
1
19
2
1
1
2
2
3
2
2
1
1
5
2
2
1
2
2
2
4
1
1
1
1
1
2
1
1
1
1
1
2
3
5
2
2
4
2
8
10
4
1
2
1
3
6
3
LOC
VENDOR
C23
"
A24
"
Z19
"
C23
"
P14
"
C23
"
A26
"
Y25
"
A24
"
L54
"
A24
"
A23
"
A23
"
A23
"
B91
"
A23
"
B103
"
A23
"
L53,Z16
"
A26
"
C23
"
A25
"
A24
"
A24
"
A25
"
A24
"
A24
"
A25
"
A25
"
A25
"
A25
"
A24
"
A24
"
A24
MUSASH
Y11
ALPA-SCIENCE
Z18
(ALPA-SCIENCE
B25
ALPHA
W24
"
A25
"
A26
ALPA-SCIENCE
T31
DNS
R52,B25
"
B74
"
B54
"
B25
"
B25
"
B25
"
B85
"
B25
"
B74
"
B74
"
B54
"
C84
"
No
775
776
777
778
779
780
781
782
783
784
785
786
787
788
789
790
791
792
793
794
795
796
797
798
799
800
801
802
803
804
805
806
807
808
809
810
811
812
813
814
815
816
817
818
819
820
821
822
823
824
825
826
827
Item no
3143B-079
3143B-080
3144B-003
3144B-031
3144B-034
3144C-003
3144C-034
3144C-100
3144C-116
3144E-001
3144G-001
3144G-021
3144H-004
3144N-002
3144O-032
3144P-001
3144P-005
3144P-007
3144P-009
3144P-010
3144P-011
3144P-051
3144R-001
3144R-002
3144R-003
3144R-005
3144S-037
3144S-037
3144S-038
3144S-072
3144S-073
3144S-074
3144S-075
3144S-076
3144S-077
3144T-013
3144T-015
3144T-065
3144V-001
3144V-007
3144V-009
3144V-013
3144V-021
3144V-029
3144V-031
3144V-032
3145C-002
3145C-004
3145C-007
3145C-010
3145D-003
3145D-004
3145E-031
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
DESCRIPTION
SEAL BELT(2) WSH-007
(Y)S/D CRADLE BEARIN
(Y)BOE & FH BATH
Q'TZ BUBBLER
(X)TIMING BELT D:
(X)HEATER COIL(R-10) (L)
(Y)GRENT CONTROLER
(Y)COUNTER D
(Y)SPEED CONTROLLER
(Y)HEATING ELEMENT 1
(Y)LOW PRESSURE GAUGE 14 PSI
(Y)QTZ GUIDE D
(Y)GRANT HEATER
(Y)SHOWER NOZZLE D
(X)CLOCK OSCILATOR 1011
(X)DVC PIPE
(Y)ONRON RELAY PLATE
(Y)CIRCUIT PROTECTOR
(Y)CIRCUIT PROTACTOR
(Y)CIRCUIT PROTECTER
(Y)POWER SUPPLY(10A,
(Y)HCL CARRIER
(Y)12V RELAY (5 PIN)
(Y)TIMER RELAY (120V)
(Y)PUSH SWITCH D
(Y)PUSH SWITCH D
(Y)TOGGLE SWITCH D
(Y)SNOK(QDR) D:
(Y)SNOK(F/R) D:
(Y)SNOKE
(Y)H2SO4 SNOK
(Y)F/R SNOK
(Y)Q.D.R SNOK
(Y)DAN CHEMICAL TUBE
(Y)F/R SUPPLY TUBE
(Y)QTZ BATH TANK
(Y)DIW SUPPLY VLAVE (PVC-M) 1
(Y)IPA DRIAN VLAVE
(Y)SOLENOID VALVE(DC-24V)
(Y)QUICK VALVE QDR
(X)AIR OPERATION VALVE D:
(Y)QUICK DRAIN VALVE
(Y)COOL DI SUPPLY VALVE
(Y)AIR OPERATED VALVE
5"3150 PROCESS CONTR
(Y)5"ELECTROIC CONTROLLER
5"3151 TEMP CONTR
(X)1100B QDR CONTROLLER
(Y)5"DIODE IN4005
(Y)5"TEFLON DIAPHRAM
LOCATION
K-4-1-3
M-6-4-1
F-3-3
I-3-3
I-8-2
L-5-5-2
B-4-2-3, D-2-3-2
K-4-5-2
L-5-2-4, L-5-5-2
I-2-3
N-1-3-2
L-5-2-4
L-4-2-3
L-5-2-4
L-5-2-4, L-5-5-2
L-5-2-4
L-5-2-4
I-4-2
L-4-2-3
L-4-2-3
L-4-2-3
L-4-2-3
B-4-2-3
N-1-3-2
I-2-3
I-1-2
I-2-2
I-2-1
I-3-1
I-3-2
I-4-2
I-2-3
L-4-2-3
L-4-2-3
L-4-2-3
B-4-2-3
D-1-1
B-4-2-3
L-4-2-3
L-4-2-3
L-5-5-3
L-5-3-4, L-5-5-3
D-8-2-3
L-5-5-1
H-9-2
VENDOR PART NO
7-F3-22327
SS004ZZ
1/4 PIPE
480H100
KCY-2D-G
AS2200-01
1/8 NJJRPO 20PP
NRC110-10AAA
NRC110-5AAA
NRC110-20AAA
NRC110-30AAA
KUP5D15
CHB-38-70001
AVS 310-NR
AVS 310-NR
M-2011
EW9030704
EW9030763
EW9029727
EW9030723
EW9030753
EW9029705
220X42X170
EW9030754
7484SW
AV-6280-414
AV-7270-114
AV-3242-415
AMD32-16-12
EW9027717
AV-5260-431
ACD-012NC
688-376-4A
583-005-1A
3151
1100B
IN4005
3
5
1
2
2
5
1
2
29
2
26
1
2
6
11
4
3
2
2
1
1
1
1
1
3
1
2
4
20
1
1
3
1
1
1
2
2
1
2
1
1
2
1
2
2
2
1
2
1
1
4
1
8
LOC
VENDOR
C84
B25
DD34
B102
B76
B25
Y23
D14
R52,B25
A102
D14
B81
B25
D14
T31
W15
A15
D14
D14
D14
D14
A23
A15
A15
A15
A15
W15
B54,W15
B25
B92
B82
B81
B82
B102
B92
A102
B84
AA40
A15
A15
A15
B54
AA41
B54
A15
A15
D11
D11
D11
D11
T21
D11
A21
"
"
MAS
MAS
"
"
"
"
"
"
"
"
MAS
"
"
"
"
"
"
"
"
MAS
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
SCP
SCP
"
"
"
"
"
No
Item no
828 3145F-006
829 3145H-009
830 3145H-010
831 3145L-001
832 3145M-004
833 3145O-005
834 3145O-006
835 3145O-031
836 3145P-001
837 3145P-022
838 3145P-026
839 3145P-027
840 3145P-031
841 3145P-032
842 3145P-033
843 3145P-035
844 3145P-036
845 3145P-037
846 3145P-038
847 3145P-039
848 3145P-052
849 3145R-001
850 3145R-101
851 3145S-001
852 3145S-003
853 3145S-006
854 3145S-021
855 3145S-053
856 3145T-003
857 3145T-004
858 3145T-023
859 3145T-084
860 3145T-085
861 3145T-086
862 3145V-001
863 3145V-003
864 3145V-011
865 3145V-012
866 3145V-013
867 3145V-014
868 3145V-021
869 3145W-001
870 3146A-004
871 3146A-005
872 3146B-011
873 3146B-015
874 3146B-023
875 3146B-032
876 3146B-035
877 3146B-044
878 3146B-049
879 3146B-051
880 3146B-066
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
DESCRIPTION
(Y)5"600V AC,FUSE 20
5"HEATER F/M MODULE
(Y)5"POWBR PILOT LAM
(Y)5"MUFFLER 1/8"
(Y)5"O-RING 3/8
(Y)5"O-RING 1/2
(Y)5"ORIFICE NEW PAR
(Y)5"WATER INLET PIN
(X)MARCH PUMPTE-5,5C-MD ASS'Y
(Y)5"DIAPHRAGM PUMP
(Y)5"PUMP
(Y)5"CONTROLLER TOUC
(Y)5"FLUSH PANEL
(Y)5"FLUSH, PANEL
(Y)5"PANEL
(Y)5"SCP W/S PLATE
(Y)5"110C FRONT PANN
(Y)5"FINAL BATH PLAT
(Y)5"PFA QDR PLATE
5"POWER SUPPLY(DC LO
(Y)5"RELAY
(Y)5"REDUCTION 1/4-5
(Y)5"AIR TOGGLE S/W
(Y)5"TEM SENSOR S/W
(Y)5"OPERATION SWITCH ALT
5"LIGUID LEVEL SENSO
(Y)5"AIR OPERATED VA
(X)UNION TEE
(X)MALE BRANCH TEE
(Y)5"AUTONICS TIMER
(Y)5"TOOL 1/4"
(Y)5"TOOL 3/8"
(Y)5" TOOL 1/2"
(Y)5"HIC SOLEOID VAL
(Y)5"1/8 AIR PILOT V
5"24V DC SOLENOID VA
(Y)5"SOLENOID VALVE
5"CHECK VALVE 1/4"
(Y)5"CHECK VALVE 1/8
(Y)5"DRAIN PFA V/V
(Y)5"10ID STANLESS W
(Y)ASPIRATOR
(Y)ASPIRATOR
(Y)PVC BOLT(M8)
ROBOT BEARING
(1)ROBOT UP/DOWN BEA
(Y)HCL BOIL BATH (OL
(R)Q'TZ BATH (FINAL
(X)RING BALL
(Y)S/D MOTOR BELT SM
BELT
H2S04 BATH
LOCATION
D-8-2-3
H-7-1
C-2-1
K-5-5-4
K-5-5-4
K-5-5-4
L-5-5-1
I-3-3
M-1-FRONT
D-2-3-2, D-2-3-3
L-5-5-1
L-5-3-4
L-5-5-1
L-5-2-3
VENDOR PART NO
JJS-45
725988
513-001-1A
KM-11
6 OR
8 OR
14001-009
653-001-4B
151-027-01
DP-25F
GM-24
636-009-1A
636-006-1A
636-004-1A
5060091B-1100
L-5-4-1
I-1-3
L-5-5-1
N-2-1-2
L-5-3-3
L-5-3-3
I-8-1
L-5-5-1
K-5-1-4
F-1-3
L-5-4-1
K-5-5-4
L-5-5-1
K-5-5-4
L-5-3-3
L-5-4-1
K-5-5-4
L-5-3-3
L-5-5-1, D-3-3-2
L-5-5-1, D-3-3-2
H-2-3, H-7-2
M-7-2-3
M-7-2-3
L-4-1-3
L-4-1-3
D-3-3-2
001-284-01
684-011-1AS
709-007-1A
USD 1/4-5/32
891-001-A
789-010-1A
A3PJ-90D12 24EG
789-002-10
TKU-3/4
THB-3/4-6N
FX5S-I
T-8
T-10
T-12
814-004-1A
973-016-2A
180E1-21-DC24V
814-003-1A
CVU-6
CVU-4
WB-2W8P
150-05-10
1/2-1/2
3/8-3/8
JMC CF-8
6001ZZ
Q'TZ-BATH-HCL
L-5-2-3
AUTO ARM
L-7-5
NS-82UO/2
SGI O-1319
8
2
3
50
20
25
8
5
2
1
1
2
8
12
5
5
4
2
1
7
1
3
15
7
1
70
3
16
116
167
1
1
1
1
1
8
5
7
32
36
50
14
4
2
50
7
10
1
1
1
8
4
1
LOC
VENDOR
D11
L14
Z19
D11
A32
A32
A32
D11
D11
B85
Y16
D11
D11
D12
D11
A95
B91
D11
B91
Y22
T21
D11
W15
D11
D11
Y16
D11
D11
L43
L43
D11
A32
D11
A32
D11
D11
A32
D11
D11
D11
Y15,Y22
A93
A53
A53
A53
A53
W21
Z19
Y11
A95
A53
A55
Y11
"
"
"
"
"
"
"
"
"
"
"
SCP
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
SCP
SCP
"
"
"
"
"
"
"
SUGAI
"
"
"
"
"
SUGAI
"
"
"
SUGAI
No
881
882
883
884
885
886
887
888
889
890
891
892
893
894
895
896
897
898
899
900
901
902
903
904
905
906
907
908
909
910
911
912
913
914
915
916
917
918
919
920
921
922
923
924
925
926
927
928
929
930
931
932
933
Item no
3146C-003
3146C-004
3146C-005
3146C-013
3146C-014
3146C-015
3146C-017
3146C-018
3146C-019
3146C-021
3146C-022
3146C-040
3146C-054
3146C-063
3146C-064
3146C-075
3146C-104
3146C-105
3146C-106
3146C-108
3146C-111
3146C-112
3146D-060
3146F-011
3146F-013
3146F-039
3146F-045
3146F-046
3146F-999
3146G-001
3146G-004
3146H-001
3146H-010
3146H-021
3146H-022
3146H-023
3146H-029
3146H-031
3146I-001
3146K-002
3146L-003
3146L-010
3146M-009
3146M-010
3146M-013
3146M-015
3146M-085
3146O-005
3146P-001
3146P-002
3146P-011
3146P-016
3146P-021
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
DESCRIPTION
TEMP CONTROLLER
(Y)MOTOR SPEED CONTR
(Y)2.3 ARM CHUCK
(X)H2SO4 BATH CASSETTE SUPPORT
(Y)HCL BATH CASSETE
(Y)CASSETTE SUPPORT
(Y)ENCORDER CABLE
TEMP CONTROLLER
(X)HCL CASSETTE
(C)CONTROLLER
TEMP CONTROLLER
(Y)AIR CYLINDER
(Y)S/D COVER MASH
(Y)PROGRAM CONTROLLE
(Y)I/O REMOTE CONTRO
(Y)SERVO CABLE
(Y)CONVUM
(Y)CONTROL UNIT
(Y)STAND BY TANK HEA
(Y)SERVO POSITIONER
SHUTTR CYLINDER
PRINTER CABLE
SERVO DRIVER(L/R)
(L)HEPA FILTER
(X)HEPA FILTER HOLDI
(L)HEPA FILTER
(Y)HEPA FILTER
(L)S/D HEPA FILTER
(Y)HEPA FILTER
FINESONIC GENERATOR
LM GUIDE
(Y)PVC ARM2 (CHUCK H
QUARTZ HEATER(HCL)
(Y)NH4OH H/D TANK HEATER(L)
(Y)NH4OH H/D TANK HEATER(M)
(Y)NH4OH H/D TANK HEATER(S)
HEATER ASS'Y
HEAT EXCHANGER
(C)MAGNET PUMP
(Y)10KEY PC ENTRY-10
(Y)END PLATE LIMIT
DB LAMP
(Y)SPIN DRY MOTOR (4
(Y)AC SEVO MOTOR
SERVO MOTOR
(Y)SERVO MOTOR DRIVER
(Y)SERVO MOTOR(L/R)
(Y)O-RING
WILDEN CIRCULATION P
(X)BRAKE PACK
(Y)QDR PLATE
MAGNETIC PUMP
(Y)Q'TZ HESO4 PLATE
LOCATION
K-4-6-1
K-10-2-2
L-4-1-3
I-1-2
I-2-2
K-4-6-1
M-7-2-3
L-6-2-4
L-3-3-1
L-4-1-3
A-3-3
K-11-6-1
K-11-6-1
H-3-3
F-5-4
N-6-1-3
VENDOR PART NO
REX C72F32R
SS371
(H2SO4 BATH)
R88A-CRH010C.
REX-F4FDRV2N
AC-1
DB1150-000
JDAS 50X30
RU230301
ZW-160CU
ZW-32NS4
R88A-CAH010S
CVA-10HS100B
DR-631-A(208V)
O-1529
R88ACPH OR 5NS
ORCA 25X420
SCY-CN201
3F88DHS04
500.500.80
500.500.50
H-10-2
O-1530
I-7-2
K-3-1-2
K-3-1-2
I-7-3
I-7-3
K-3-1-2
H-4-3
K-11-6-1
L-6-3
L-5-2-3
L-2-2-3
B-2-2
H-1-1
F-2-3
K-11-6-1
I-2-3
E-1-2
I-3-3
PT 06M(1)
OZAK GH-25UU
3-KW
H-2-13
H-2-14
H-2-15
AC200V6KW
E-220B-1
MD-55FY
PFA-M
400W
R88M-S10030
R88M-H20030-BS3
R88D-HT04
R88MH10030G10B
PTFE + CARBON
WH25/TF180/H66
SBR31-ZP
0-1318
MD-55FX
0-1319
1
3
3
1
2
3
2
1
2
1
3
2
2
1
2
1
2
1
4
3
2
1
2
1
1
1
4
2
1
1
1
3
1
1
1
1
1
3
1
2
5
20
1
2
1
2
1
8
1
1
2
1
3
LOC
VENDOR
A51
D21
A53
B84
A45
B92
A53
A51
A53
A52
A53
A53
B32
D22
D22
A53
D22
L63
L62
R14
D24
B71
A52
Y22
Y22
Y22
B53
Y24
Y21
Y13
A53
A53
B82
X53
X53
X53
A54
L32
D22
D21
A95
D22
A54
A54
A53
R11
A52
B74
L13
D22
A44
AA25
B85
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
SUGAI
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
SUGAI
"
No
934
935
936
937
938
939
940
941
942
943
944
945
946
947
948
949
950
951
952
953
954
955
956
957
958
959
960
961
962
963
964
965
966
967
968
969
970
971
972
973
974
975
976
977
978
979
980
981
982
983
984
985
986
Item no
3146P-021
3146P-027
3146P-031
3146P-052
3146P-055
3146R-002
3146R-004
3146R-022
3146R-032
3146S-049
3146S-090
3146S-098
3146T-002
3146T-003
3146T-020
3146T-028
3146T-047
3146T-052
3146T-053
3146T-054
3146V-004
3146V-013
3146V-015
3146V-016
3146V-023
3146V-025
3146V-027
3146V-038
3146V-039
3146V-040
3147B-052
3147C-002
3147I-001
3147M-001
3147S-022
3147V-001
3148B-001
3148B-002
3148C-001
3148C-006
3148E-001
3148E-002
3148P-002
3148S-002
3148V-002
3148V-014
3149A-001
3149B-007
3149B-021
3149B-022
3149B-023
3149B-035
3149C-005
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
DESCRIPTION
(Y)Q'TZ HESO4 PLATE
(C)BELLOWS PUMP
(C)BELLOWS PUMP
(Y)FINE SONIC CARRIER PLATE
(Y)Q'TZ PLATE (DNS)
(Y)QUARTZ ROD
(Y)QUARTZ ROD
(Y)TEMP. CONTROLLER
(Y)MEMORY RAM
TOGGLESWITCH
(Y)OIL SEAL
(Y)S/D CARRIER PHOTO SENSOR
(Y)QUARTZ TUBE 2"
(Y)NH40H H/D TANK
(X)UNION TEE
(X)MALE BRANCH TEE
HEATER TOOL ELEMENT
(Y)HOT DI STAND BY
(Y)HOT DIW SUPPLY Q'TZ TANK
(Y)HOT DIW SUPLY SYS QTZ TANK
(C)CONTROLLER
SOLENOID VALVE
(Y)SOLENOID VALVE
(Y)AIR VALVE
(Y)SAME 3146V-013(VA
(Y)SOLENOID VALVE
AIR VALVE
(Y)SOLENOIDE V/V
(Y)SOLENOIDE V/V
SOLENOID VALVE
(Y)H2SO4 PLATE
(Y)CRADLE CYLINDER
(Y)DAN INVFERTER
(Y)SPIN DRYER MOTOR
(Y)FLOW SWITCH
(Y)QUICK DRAIN VALVE
(Y)NH40H BATH
(Y)FINAL RINSE BATH
(L)Q'TZ HEATER COVER
AIR CYLINDER
(Y)HEAT EXCHANGE
(Y)HEAT EXCHCNGE CON
(Y)H2SO4 CARRIER PLA
POWER SUPPLY
SOLENOID VALVE
SOLENOID VALVE(DC24V)
(Y)CHUCK MISS-SENSOR ARM
(L)Q'TZ HEATER
(Y)BEARING
(Y)BEARING
(C)BEARING
(N)H3PO4 BATH 6"
(Y)RT CABLE (10 PIN)
LOCATION
I-3-3
H-6-3
E-1-2
I-3-2
L-5-2-3
I-3-1
K-3-1-2
K-3-1-2
K-11-6-1
N-8-2-2
K-3-1-2
I-8-2
D-1-1
L-2-2-3
VENDOR PART NO
0-1319
FF-10CT1
FF-10BT1
Q-10-2
60X130
60X270
REX-F4FDR-V*2N
C2000H RAM
6P2
MF 13 DF
E3S-R2E4
H-2-9
UT12-F
BT8-6N
IH4511
I-3-3
K-3-1-2
K-5-1-1
K-4-6-1
K-4-6-1
K-5-1-1
K-4-6-1
K-4-6-1
K-3-1-2
K-3-1-2
L-6-2-4
I-4-2
G-2-5-1
N-5-6
K-10-1-1
K-10-1-1
F-2-1
K-7-1
I-2-1
D-12-1
A-5-1, I-8-3
I-8-2, H-10-3
I-3-2
B-2-1
K-5-1-1
K-5-1-1
L-6-2-3
L-6-2-3
L-6-2-3
QEV-8
180-4E1-83-DC24
A150-4E2-25-AC10
NSAVH-123BC
A183-4E2-83-DC24
AV-8289-114
VQ1101Y-5
AQ1301Y-5
180E1(A180E1-2
H2SO4 PLATE
MK2-20-150
VFD-800
SF-JRV
LK31
AV63
CDGIFN40-600-B
VC-803B
VC-803A
522*257*T5
S8VF-3024
A180-4E1-83-PLL
VJ3410-5MZ
388120-A
DES-91018
SS28-38
FLWA676ZZA
6201ZZ
QZ-D15O2
1
1
1
1
1
4
1
1
1
10
1
1
6
1
4
1
6
1
1
6
2
5
3
1
4
3
1
5
5
10
1
1
1
1
1
4
1
1
1
1
2
2
1
3
5
5
2
1
10
20
6
1
4
LOC
VENDOR
T63
L25
L25
A45
B93
A95
A95
A53
A53
D22
B36
W15
A53
DD13
AA41
A53
D22
DD10
Y24
Y24
A53
A32
A51
A51
A32
A51
A51
A53
A53
A52
B85
R42
C73
D49
D43
D43
Z18
Y11
A72
R52
Y23
Y24
A71
R11
A32
A32
A63
D42
A63
A63
A63
Y13
A63
SUGAI
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
DAN
DAN
"
"
DAN
"
WATANABE
WATANABE
WATANABE
"
"
"
"
WATANABE
"
"
KAIJO
"
KAIJO
"
"
KAIJO
"
No
Item no
987
988
989
990
991
992
993
994
995
996
997
998
999
1000
1001
1002
1003
1004
1005
1006
1007
1008
1009
1010
1011
1012
1013
1014
1015
1016
1017
1018
1019
1020
1021
1022
1023
1024
1025
1026
1027
1028
1029
1030
1031
1032
1033
1034
1035
1036
1037
1038
1039
3149C-006
3149C-026
3149C-028
3149C-061
3149C-071
3149C-082
3149C-083
3149C-086
3149C-088
3149C-089
3149C-094
3149C-095
3149C-101
3149G-011
3149G-012
3149H-005
3149I-001
3149L-002
3149M-001
3149M-004
3149M-004
3149M-005
3149M-006
3149M-012
3149N-001
3149P-002
3149P-005
3149P-021
3149R-001
3149S-034
3149S-035
3149S-036
3149S-061
3149S-071
3149U-001
3149U-003
3149U-004
3149U-008
3149U-009
3149U-010
3149U-011
3149V-002
3149V-004
3149V-005
3149V-007
3149V-008
3149V-011
3149V-012
3149V-019
3149V-027
3149V-028
3151B-022
3151B-023
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WASHER
WASHER
DESCRIPTION
(Y)RT CABLE (7-4 PIN)
(Y)DRAIN CYLINDER
(Y)SELECTOR CYLINDER
(Y)Q'TZ CARRIER STAND
(Y)CARRIER STAND (OLD)
(Y)ROBOT CABLE
(Y)ROBOT CABLE
(Y)ROBOT CABLE
(Y)ROBOT CABLE
(Y)ROBOT CABLE
(Y)POWER CABLE
(Y)CABLE
(Y)3OMVOM
(Y)LM GUIDE
(Y)LM GUIDE
(Y)Q'TZ HEATER,PROCESS BATH
(Y)INVERTER
LM GUIDE
(Y)BRUSHLESS DC MOTOR (UP,DOWN
(Y)INDUCTION MOTOR
(Y)INDUCTION MOTOR
SPIN DRYER MAIN MOTO
(Y)L/R SERVO MOTOR
(Y)AC SERVO MOTOR
(Y)SHOWER NOZZLE
(L)QUARTZ PLAT
WILDEN PUMP(LOW)
(Y)GEAR PUMP
SOLID STATE RELAY
(Y)DIGITAL PRESSURE SWITCH
LIMIT SWITCH
(Y)LIMIT SENSOR
(Y)PHOTO SENSOR
(Y)OIL SEAL
NC UNIT
(Y)UNIT SMSE
(Y)UNIT SMSE
(Y)PLC UNIT
(Y)PLC UNIT
(Y)PLC UNIT
(Y)PLC UNIT
(Y)AIR VALVE
(Y)SOLENOID VALVE
(Y)SOLENOID VALVE
SOLENOID VALVE
(Y)MECHANICAL VALVE X80M
SOLENOID VALVE
(C)AIR OPERATED VALV
(C)AIR OPERATED VALVE
SOLENOID VALVE
CHECK VALVE
(Y)5"30 AMP BREAKER
(Y)5"AMP BREAKER
LOCATION
L-9-1
K-9-3-2, F-5-4
I-2-2
I-3-3
N-4-1-2
G-2-2
G-2-2
J-5-1
H-5-1
H-1-1
H-1-1
F-5-5
N-2-1-1
I-1-3
F-2-3
B-1-5-3
L-6-2-3
L-6-2-3
N-4-2-3
L-6-2-3
D-3-3-2
D-3-3-2
B-2-1
M-2-4
N-3-2-3
L-6-2-3
L-6-2-3
G-2-5-1
L-6-2-3
D-3-3-2
L-5-3-4
L-5-4-2
L-6-2-3
L-6-2-3
VENDOR PART NO
MRL-WL-20-700-K2V-D
SCA2-CB-30B0190-D
373732
373787
386316-1.8
386316-2.5
38631-2.5
38631-1.8
38631-2.5M
389502-A-1.8M
389542-2-A-3M
VPA-10QS3B
HRW27CA2UUCI 640L
HRW27GA2UUCI 110L
KAIJO-INVERTER
HRW17CA1UUC1+1
4061N3E15
4RK-25GN-AM
4RK-25GN-AM
FELF-5
R88M-H10030-GP
R88M-H10030-G1
Y32232 B1/8HH
373287
WH25/TF100/H66
MDGL15KAAC100V
US-K50DD
PSI-P10K-6M-FL138264
D4C-1250
PU5
30X40X7
FN515-NC022
20GUU
16GUU
FN515-PS221E
FN515-BC043
FN515-CCH01N3
FN515-CCH01N1
AMD31
F1W180-4E1
F1W180-4KE2
VF3450-5EZ-02
66534-A
VJ5120-5LZ-C4
AMD51-25-25
AMD31-15BUS-10-3
4KB129-00-D2-DC24
BV-DN08
BB-010
BB-004
3
1
2
2
1
1
1
1
1
1
1
1
2
2
4
14
1
2
1
2
1
2
3
2
10
1
1
1
10
2
1
2
1
10
1
2
2
1
1
2
2
1
2
2
1
4
9
1
3
1
2
2
1
LOC
VENDOR
A63
R43
R43
B92
B85
A63
A63
A63
A63
A63
A63
A63
R42
Y27
Y27
A66
Y24
W15
P25
P23
A61
L45,Y21
A62
P34
Q53
B92
L13
C72
D52
A63
R14
A63
A63
A63
A63
W21
W21
A64
A62
R14
A63
A61
A63
A63
R53
A63
W21
B21
A61
A63
A63
AA25
AA25
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
KAIJO
"
"
"
"
"
"
"
"
"
"
"
"
KAIJO
"
"
"
"
KAIJO
KAIJO
"
"
"
KAIJO
"
KAIJO
"
POLY FLOW
"
No
Item no
1040
1041
1042
1043
1044
1045
1046
1047
1048
1049
1050
1051
1052
1053
1054
1055
1056
1057
1058
1059
1060
1061
1062
1063
1064
1065
1066
1067
1068
1069
1070
1071
1072
1073
1074
1075
1076
1077
1078
1079
1080
1081
1082
1083
1084
1085
1086
1087
1088
1089
1090
1091
1092
3151B-024
3151B-041
3151B-042
3151C-003
3151C-031
3151C-041
3151C-061
3151C-065
3151C-067
3151E-001
3151F-002
3151F-041
3151G-001
3151H-001
3151H-003
3151H-004
3151H-005
3151H-006
3151H-007
3151I-002
3151L-001
3151L-002
3151L-003
3151M-001
3151M-004
3151M-005
3151M-022
3151M-023
3151N-001
3151N-002
3151N-003
3151N-004
3151N-005
3151N-006
3151O-001
3151O-003
3151P-003
3151P-025
3151P-026
3151P-041
3151P-042
3151R-003
3151R-005
3151R-006
3151R-021
3151S-001
3151S-002
3151S-003
3151S-004
3151S-005
3151S-007
3151S-008
3151S-021
TUBE WASHER
WASHER
WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
DESCRIPTION
5"CIRCUIT BREAKER
(Y)5"TURBO BOLT-PVDF
(Y)5"TURBO BOLT
(Y)5"TEMPERATURE CONTROL
(Y)5"CLAMP
(Y)5"DOOR LOCK AIR C
(Y)5"CAROUSEL BASE-PVDF
(Y)5"AIR CHAMBER
(X)AIR CYLINDER
(Y)5"FILTER ELEMENT
(Y)5"CAROUSEL MOTOR FAN
(X)MICRONFILTER
(Y)5"PRESSURE GAUGE
(Y)5"N2 HEATER(100W)
(Y)5"N2 HEATER
(Y)5"HEAD (2-342 VIT
(Y)5"N2 HEATER OVERT
(Y)5"AIR FLOW HEATER
(Y)5"HOT N2
(Y)5"INTERLOCKS
5"MANUAL DOOR LOC
(Y)5"LUBRICATOR FOR
(Y)5"MANUAL DOOR LOCK
(Y)5"MOTOR START W/R
(Y)5"PUMP MOTOR AND
(Y)5"CAROUSEL MOTOR
(Y)5"TYMKON MICROPRO
(Y)5"REGULLATOR MONN
(Y)5"CAROUSEL NOZZLES PVDF
(Y)5"CAROUSEL BASE NOZZLES
(Y)5"TURBO NOZZLE
(Y)5"HALD NOZZLE PVC
(Y)5"CAROUSEL SPRAY
(Y)5"CAROUSEL BASE N
(Y)5"T-PISTON O-RING
(Y)5"O-RING
(Y)5"PUMP
(Y)5"POWER SUPPLY
(Y)5"POWER SUPPLY
(Y)5"FINGER PLATE
(Y)5"HOLE PLATE
(Y)5"24 VOLT AC RELA
(X)RELAY
(X)RELAY
(Y)5"FILTER REGULATO
(Y)5"VERSAVALVE SEAL
(Y)5"SEAL FOR 63MM UNION
(Y)5"SEAL FOR 32MM UNION
(Y)5"SEAL FOR 25MM U
(Y)5"TEFLON SEALS FOR 3/4"
(Y)5"CAROUSEL SEAL
(Y)5"SEAL FOR 63MM U
(Y)5"MICRO SWITCH
LOCATION
D-1-2-2
C-3-4
H-10-3
H-10-3
N-7-3-2
E-3-3-1
D-1-2-2
G-2-5-3
G-2-5-3
M-3-4
G-2-3-2
D-1-2-2
G-2-5-3
G-2-5-3
G-2-5-3
D-1-2-2
D-1-2-2
G-2-5-3
G-2-5-3
G-2-5-3
G-2-5-3
G-2-5-3
G-2-5-3
G-2-5-3
VENDOR PART NO
MSZZZ00134
01-7105
BH-004
P89
01-2905
MSZZZ00114
1108
DN50-720PPV
273001
ENZZZ00002
GX01-10
270003
DHYZ30616
01-3400
283003
259002
259001
269007
265001
01-1405
270009
MSZZZ00154
ERZZZ00003
RK-025
BJ-001
251008
270001
FNZZZ00007
MSZZZ00131
FNZZZ00006
AM-202
AM-100
283005
800 X 600
M2PT
KS-200C
WK50S24
01-7312
01-7311
BA-002
KH-103-4C
KH-102-2C
270008
MSZZZ55320
FNZZZ00332
FNZZZ00218
DC-214
FVZZZ90107
DA-224
DC-332
FSZZZ00010
1
2
1
1
10
3
1
3
1
15
2
5
1
1
1
3
1
2
1
1
1
1
3
1
1
1
1
1
3
6
2
4
3
6
3
34
1
1
1
1
1
2
2
2
1
1
1
3
5
2
2
1
1
LOC
VENDOR
AA25
AA25
AA25
T33
AA25
AA25
AA25
AA25
L54
AA25
AA25
AA25
AA25
AA25
AA25
AA25
AA25
AA25
AA25
AA25
AA25
AA25
AA25
AA25
P34
T33
T13
AA25
AA25
AA25
AA25
AA25
AA25
AA25
AA31
AA31
Y25
T33
T33
AA31
AA31
AA31
T33
T33
AA31
AA31
AA31
AA31
AA31
AA31
AA31
AA31
AA31
POLY FLOW
POLY FLOW
"
POLY FLOW
"
"
"
"
POLY FLOW
"
"
"
"
"
"
"
"
"
"
"
POLY FLOW
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
No
Item no
1093
1094
1095
1096
1097
1098
1099
1100
1101
1102
1103
1104
1105
1106
1107
1108
1109
1110
1111
1112
1113
1114
1115
1116
1117
1118
1119
1120
1121
1122
1123
1124
1125
1126
1127
1128
1129
1130
1131
1132
1133
1134
1135
1136
1137
1138
1139
1140
1141
1142
1143
1144
1145
3151S-022
3151S-023
3151S-024
3151S-026
3151S-027
3151S-041
3151S-043
3151T-002
3151T-022
3151T-023
3151V-004
3151V-006
3151V-007
3151V-008
3151V-012
3151V-013
3151V-014
3151V-015
3151V-017
3151V-019
3151V-022
3151V-023
3151V-024
3152M-003
3152M-007
3152S-089
3152T-010
3152V-007
3152V-009
3153A-001
3153B-001
3153B-002
3153B-003
3153B-011
3153B-012
3153B-021
3153B-041
3153B-042
3153B-043
3153C-001
3153C-011
3153C-021
3153C-022
3153C-023
3153C-024
3153D-001
3153D-011
3153F-001
3153F-003
3153F-004
3153G-001
3153H-002
3153H-003
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
TUBE WASHER
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
DESCRIPTION
(Y)5"PRESSURE SWITCH
(Y)5"MICRO SWITCH
(Y)5"2 POLE 24 VOLT
(Y)5"PNEUMATIC ELECT
(Y)5"PUMP SHAFT
(Y)5"MOTOR SCRATER AND RESET
(Y)5"THERMOCOUPLE
(Y)5"24 VOLT AC TRAN
(Y)5"TRANSFORMER
(Y)5"VERSA VALVE KIT
(Y)5"VERSA-VALVE
(Y)5"AIR MINISOLENOID
(Y)5"EPDM SEALS FOR
(Y)5"VERSZ VALVE KIT
(Y)5"VERSA VALVE KIT
(Y)5"DI FILL VALVE
(Y)5" VALVE
(Y)5"T-PISTON DRAIN
(Y)5" TEFLON ACID VA
(Y)5"PNEUMATIC CARRI
(Y)5"PNEUMATIC CARRI
(Y)5"AIR SOLENOID
(Y)SPIN MAIN MOTOR
(Y)MAIN MOTOR
(N)S/D SHAFT ASSEMBL
(N)S/D TURN TABLE ASSY
(Y)SOLENOID VALVE
(Y)SOLENOID VALVE
(Y)ROTARY ACTUATOR
(Y)PCB OPTO 22 IBM-P
(Y)PCB OPTO 22 DIGIT
(Y)PCB LEVEL SONIC P
(Y)ROBOT MOTOR BRUSH
(Y)ROBOT TACH BRUSHE
(Y)BELT FOR MOTIOR
(Y)ZENER BARRIER
(Y)ZENER BARRIER
(Y)LITTLE BOARD
(Y)COOLING COILS MOD
(Y)TEMP CONTROL
(Y)EXT.PORT CAP
DI TRIAC CIRCUIT
DI COMPARITOR CIRCUI
DI OVERTEMP CONTROL
(Y)DRIP RACK SET
(Y)DIAPHAGM ASS'Y KI
(Y)
1A/600V SLOW BELOW F
2A/600V SLOW BELOW F
(Y)H2SO4 BATH GUIDE
(Y)HTR PAD 9"*14" W/
(Y)HTR PAD 9"*14" W/
LOCATION
G-2-5-3
G-2-5-3
D-1-2-2
G-2-5-3
G-2-5-3
G-2-5-3
L-2-1
G-2-5-3
L-10-5-1
G-2-5-3
L-10-5-1
L-10-5-1
G-2-5-3
G-2-5-3, L-10-5-1
L-10-4-1
L-10-4-1
L-10-5-1
L-10-5-1
G-2-5-3
H-1-3
H-3-2
B-3-4-2
N-2-1-2
N-2-5-1
K-3-4-3
N-8-4-1
K-10-4-1
K-10-4-1
K-3-4-3
K-3-4-3
K-5-4-4
N-2-3-1
N-8-1-2
N-8-1-2
I-3-1
N-2-3-1
H-10-1
H-8-1
E-2-1
E-2-1
VENDOR PART NO
ESZZZ00002
ESZZZ00010
BG-036
252018
269008
MSZZZ00046
BA-114
FTZZZ00016
BF-050
MRZZZ00005
MRZZZ00007
FVZZZ84101
VFF90105
RK-002
RK-001
AO-087
2"
286001006
269010
255013
255014
AO-286
SB-JR4P 200V2.2
S/D SHAFT ASSE
CLASSY00-1
030-4E1
030E1
SK-032
PCB5B0002
PCB5B0003
PCB1A0001
RBT1B0002
RBT1B0003
TB20EFG-55
8901/33-293/000/
8901/31-280/165/
A6020830G
MC-10026
SK-0000
1900B0018
TB-1
CC-7
OT-2-A
DR-40026/SET
KTB950
F-1
F-2
W05-FA-110
SK914N-21992
SK914H-21992
4
6
3
3
1
1
2
5
1
2
1
6
4
4
1
1
3
1
2
2
1
1
2
1
1
1
1
1
3
2
1
1
1
4
8
2
1
1
1
3
1
2
1
1
1
2
1
8
2
2
3
1
1
LOC
VENDOR
AA31
AA31
AA31
T33
AA31
AA31
AA31
AA31
AA24
AA24
AA31
AA31
AA31
AA31
AA31
AA31
AA31
AA31
AA31
AA31
AA31
AA31
AA31
Y24
P45
L14
Y26
W15
W15
C54
D54
T22
T22
T22
T22
B74
C54
C54
T22
L74,Z19
C22
B45
T21
D54
D54
A91
B45
L71
T21
T21
L44,D55
D43
D43
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
SUGAI
"
"
"
"
"
SUBMICRO
"
"
"
"
"
"
"
"
"
"
SUBMICRO
"
"
"
"
"
"
"
"
"
"
"
"
No
Item no
1146
1147
1148
1149
1150
1151
1152
1153
1154
1155
1156
1157
1158
1159
1160
1161
1162
1163
1164
1165
1166
1167
1168
1169
1170
1171
1172
1173
1174
1175
1176
1177
1178
1179
1180
1181
1182
1183
1184
1185
1186
1187
1188
1189
1190
1191
1192
1193
1194
1195
1196
1197
1198
3153H-004
3153M-001
3153M-002
3153M-011
3153O-001
3153P-001
3153P-003
3153P-011
3153P-021
3153P-022
3153P-023
3153R-003
3153R-012
3153S-001
3153S-002
3153S-003
3153S-012
3153S-014
3153S-021
3153S-022
3153S-023
3153S-024
3153S-031
3153S-041
3153S-042
3153S-043
3153S-051
3153S-052
3153S-053
3153S-054
3153S-055
3153S-056
3153S-057
3153S-058
3153S-059
3153T-002
3153T-003
3153T-004
3153T-005
3153T-010
3153T-011
3153T-012
3153U-001
3153U-002
3153U-003
3153U-004
3153V-001
3153V-002
3153V-003
3153V-005
3153V-006
3153V-010
3153V-011
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
DESCRIPTION
(Y)HTR PAD 14"*14" W
(Y)STEPPING MOTOR
(Y)FLOW METER WITH V
(Y)MUFFLER MEDIA
(Y)O-RING FKM
(Y)PLATE PUSH
(Y)IPA SUPPLY PUMP
(Y)CHECK PISTON
(Y)CHECK PLUG
(Y)Q.E PORT
(Y)ROBOT BELT
100A 30 MERCURY RELA
(Y)SENSOR L/V SONIC
(Y)SENSOR LEVELITE 1
(Y)SENSOR R/A CAP 24VDC
(Y)MAGNETIC POSITION
(Y)SWITCH, PUSH BUTT
(Y)OPERATOR TOUCH SC
(Y)SUCTION SLEAVE
(Y)DISCHARGE SLEAVE
(Y)SHAFT
(Y)H2SI4 BATH SUPPORT
(Y)SHAFT SEAL
(Y)QUICK EXHAUST SEA
(Y)MAIN SEAL
(Y)SHUTTLE ASS'Y
(Y)SHUTTLE DETANT
(Y)SHUTTLE CAP
(Y)SENSOR QUARTZ TIP
SPDT ALTERNATE ACTIO
DPDT MOMENTARY SWITC
SPDT MOMENTARY S/W
28V SWITCH BULB
14V SWITCH BULB
(Y)SAUCER TRAY ARC
(Y)MULTI-RANGE TIMER
(Y)W-TW303 RDT TRANS
(Y)W-MM1410 OVERTEMP
(Y)THEMOCOUPLE
(Y)LIQUID LEVEL TUBE
(Y)LIQUID LEVEL TUBE
(Y)PLC UNIT
(Y)PLC UNIT
(Y)PLC UNIT
(Y)PLC UNIT
(Y)VLV DILUTION10:1
(Y)VLV PNEU 3 WAY NC
(Y)SOLENOID VALVE
(Y)3/4" 3WAY BANDIT
(Y)PILOT VALVE
(Y)1/2 NPT CHECK V/V
(Y)CHECK V/V 1/2FNPT
LOCATION
E-1-1
L-12-3-2
I-2-1
N-2-3-1
N-2-3-1
N-2-3-1
L-12-3-2
B-1-5-3
K-3-4-3
K-3-4-3
K-3-4-3
N-8-4-1
M-7-2-1
M-7-2-1
M-7-2-1
F-3-1
K-3-4-3
L-12-3-2
K-3-4-3
L-12-3-2
L-12-3-2
I-3-1
K-3-4-3
K-3-4-3
K-3-4-3
L-12-3-2
L-12-3-2
H-3-1
N-2-5-1, N-8-1-2
N-2-5-1
K-3-4-3
I-3-1
I-3-1
D-2-5-2
D-2-5-2
D-2-5-2
N-2-3-2
N-2-2-4
N-8-2-2
N-2-3-1
N-2-3-1
VENDOR PART NO
SK1414TC-21992
BO-6-BW
GGE2A0002
1900A0017
98002240
7020-0010
1900B0046
NDP-5FPT
1900B0007
1900B0010
1900B0016
RBT2B0011
RL3-MC100
SNS1A0002
SNS1B0013
SNS1B0006
1AV2A
AML21CBA2AC
SKVP003
1900B0008
1900B0009
1900B0045
W50-FA-110-1
1900A0037
98001588
98001585
1900B0026-01
1900A0013
1900B0015
SNS1B0014
SW-SDA
SW-DDMN
SW-SDMN
P-28
P-14
ST-1002618
SK-200
SK003
SK001
SNS1B0009
STRAIGHT
C-SHAPED
A61P-UL
A2NCPU-UL
AX71
AY51-UL
VLV2B0151
VLV1B0009
SK-500
VLV2B0013
110012200
VLV2B0107
VLV2B0101
2
1
2
2
5
1
2
1
4
2
2
4
1
1
1
1
2
6
1
2
2
2
1
5
4
2
2
2
1
2
1
1
1
2
2
2
1
1
1
10
2
2
1
1
1
2
2
3
4
4
2
2
1
LOC
VENDOR
D43
Y22
B42
A94
A94
B85
B45
A74
B45
B45
A94
B74
D53
C54
D53
D53
C54
C54
D54
B55
B55
B55
L74
C54
A94
A94
C54
A94
A94
A94
C54
C54
C54
A94
A94
L72
D51
W15
C54
D55
A94
A94
T14
T21
T14
T14
B45
D53
W15
B45
B36
B45
B45
"
"
"
"
"
"
"
SUBMICRO
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
No
Item no
1199
1200
1201
1202
1203
1204
1205
1206
1207
1208
1209
1210
1211
1212
1213
1214
1215
1216
1217
1218
1219
1220
1221
1222
1223
1224
1225
1226
1227
1228
1229
1230
1231
1232
1233
1234
1235
1236
1237
1238
1239
1240
1241
1242
1243
1244
1245
1246
1247
1248
1249
1250
1251
3153V-012
3153V-013
3153V-014
3153V-015
3153V-016
3153V-017
3153V-018
3153V-019
3161C-001
3161F-021
3161G-001
3161G-002
3161G-003
3161G-004
3161H-003
3161L-001
3161M-003
3161O-001
3161O-003
3161O-004
3161O-005
3161O-006
3161O-007
3161O-008
3161O-031
3161O-034
3161O-035
3161O-036
3161O-037
3161P-001
3161R-002
3161S-001
3161S-002
3161S-004
3161S-005
3161S-022
3161T-001
3161T-002
3161T-003
3161T-004
3161T-006
3161V-005
3171B-002
3171B-007
3171B-010
3171B-013
3171B-014
3171B-015
3171B-016
3171B-018
3171H-001
3171H-002
3171M-001
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
APCVD
APCVD
APCVD
APCVD
APCVD
APCVD
APCVD
APCVD
APCVD
APCVD
APCVD
APCVD
APCVD
APCVD
APCVD
APCVD
APCVD
APCVD
APCVD
APCVD
APCVD
APCVD
APCVD
APCVD
APCVD
APCVD
APCVD
APCVD
APCVD
APCVD
APCVD
APCVD
APCVD
APCVD
POLYMIDE STRIP
POLYMIDE STRIP
POLYMIDE STRIP
POLYMIDE STRIP
POLYMIDE STRIP
POLYMIDE STRIP
POLYMIDE STRIP
POLYMIDE STRIP
POLYMIDE STRIP
POLYMIDE STRIP
POLYMIDE STRIP
DESCRIPTION
(Y)QUICK EXH V/V
(Y)3-WAY BANDIT V/V
(Y)WHI BANDIT 3/4FNP
(Y)CHECK V/V 1/2NPT(Y)CHEM DISP BLOCK (
(Y)3/4"NC BANDIT W/O
(X) SEQUNCE MANUAL CONTROLLER
(X) FILTER BG VACUUM
(X) GAS ZONE GAUGE
(X) GAUGE (0-100 PSI)
(X) WATER FLOW GENERATOR
(X) GAUGE (0.30 PSI)
(X) FUSE HOLDER OPEN
(X) STATUS LED
(X) AC TIMER MOTOR
(X) CHAMBER SEAL O-RING
(X) O-RING
(X) O-RING
(X) O-RING
(X) O-RING
(X) O-RING 3/8"
(X) O-RING (1/2")
(X) ORIFICE (41706)
(X) ORIFICE (LINE 1)
(X) ORIFICE (VCR)
(X)THERMOCUPLE PLUG(FEMALE)
(X) REGULATOR(VERIFLO)
(X) MICRO SWITH
(X) LIMIT MICRO S/W
(X) N2 FLOW S/W IN SPRING
(X) N2 INTERLOCK FLOW S/W
(X) SOLENOIDS
(X) THERMOCUPLE
(X) TIME PROP (LIME 120VAC)
(X) FLOWMETER TUBE
(X) FLOWMETER TUBE
(X) FLOWMETER TUBE
(X) SOLENOID VALVE
BRD 4 CHNL SERTAL ASSY
BRD ASSY NTR INTRFCE
BRD ASSY 32BIT OUTPUT
B/D ASSY QUAD SERIAL
32 CHANNEL INPUT ASSY BOARD
ANALOG CONTROL ASSY BOARD
CPU 68000 128K BOARD
QUAD OVER TEMP CONTROL BOARD
(Y)HTR CTG 600W 220V
TEFLON HEATER 200 2K
(X)MOTOR 1/3HP 3000RPM EXP
LOCATION
N-2-1-4
M-7-2-1
M-7-2-1
N-2-3-1
M-7-2-1
N-2-3-1
N-2-3-1
N-2-3-1
D-1-2-2
C-4-2-3
C-4-2-3
C-4-2-3
C-4-2-3
C-4-2-3
C-4-2-3
N-3-3-3, D-1-2-2
C-4-2-3
C-4-2-3
C-4-2-3
C-4-2-3
C-4-2-3
C-4-2-3
C-4-2-3
C-4-2-3
C-4-2-3
E-3-2-3
C-4-2-3
C-4-2-3
E-3-2-3
E-3-2-3
E-3-2-3
E-3-2-3
J-4-1-1
J-4-1-1
J-4-1-1
J-4-1-1
J-4-1-1
J-4-1-1
J-4-1-1
J-4-1-1
K-10-2-4
K-10-2-4
VENDOR PART NO
QEV-22
VLV2B0008
VLV2B0005
VLV2B0002
VLV2B0010
VLV2B0110
VLV2B0012
VLV2B0011
66414
57436
63915
60475
53900
66198
56954
28685
51050
51085
63438
63442
51405
V5-113
41706
37172-01
37172-03
37172-04
37172-06
52903
58598
53799
62931
64879
63830
66041
53171
800-336
63739
63740
63737
63798
14837-01
16753-509
16799-01
16744-503
14830-501
14889-01
14899-501
16801-505
930R0002-03
73004-01
61104
3
2
2
2
1
2
2
2
1
2
3
1
1
2
1
3
1
4
10
10
10
10
10
10
5
10
8
4
10
9
4
1
1
1
2
5
10
3
3
4
2
19
1
1
1
1
1
1
1
1
1
2
1
LOC
VENDOR
B45
B55
B55
B45
B55
B45
B45
B45
T33
AA32
AA32
AA32
AA32
AA32
AA32
T33
AA32
AA32
AA32
AA32
AA32
AA32
AA32
AA32
AA32
AA32
AA32
AA32
AA32
AA32
AA32
AA32
AA32
AA32
AA32
AA32
AA32
T31
AA32
AA32
AA32
AA32
T34
T34
T34
T34
T34
T34
T34
T34
D34
D34
Y25
"
"
"
"
"
"
"
"
TEMPRESS
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
SEMITOOL
"
"
"
"
"
"
"
SEMITOOL
SEMITOOL
"
No
Item no
1252 3171V-001
1253 3171W-001
1254 3172A-001
1255 3172B-001
1256 3172B-003
1257 3172B-004
1258 3172B-005
1259 3172B-006
1260 3172B-007
1261 3172B-032
1262 3172B-033
1263 3172B-037
1264 3172B-038
1265 3172B-039
1266 3172B-040
1267 3172B-045
1268 3172B-047
1269 3172B-048
1270 3172B-049
1271 3172B-050
1272 3172B-051
1273 3172B-052
1274 3172B-053
1275 3172B-055
1276 3172B-056
1277 3172B-057
1278 3172B-058
1279 3172B-059
1280 3172B-060
1281 3172B-061
1282 3172B-062
1283 3172C-005
1284 3172C-005
1285 3172C-007
1286 3172C-009
1287 3172C-013
1288 3172C-015
1289 3172C-016
1290 3172C-017
1291 3172C-019
1292 3172C-020
1293 3172C-021
1294 3172C-023
1295 3172C-025
1296 3172D-001
1297 3172D-004
1298 3172D-005
1299 3172D-006
1300 3172D-007
1301 3172E-001
1302 3172F-001
1303 3172F-003
1304 3172F-032
POLYMIDE STRIP
POLYMIDE STRIP
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
DESCRIPTION
(Y)VALVE SOLENOID
(Y)3INDOW TEMPERED GLAS360-380
(Y)ASIPRATOR ASS'Y
MOTOR CONTROL BOARD
PROCESS CONTROL BOAR
(Y)CPU CARD
POWER SUPPLY BOARD
(Y)PCB CONNECTOR
(Y)IO BOARD
5"240D BOWL
(C)BEARING
(Y)DOOR SWITCH BRACK
(Y)BULB
(Y)TIMING BELT
(Y)TUBE CUTTER BLADE
27OD BOWL ASS'Y
(Y)CIRCUIT BREAKER
(Y)CIRCUIT BREAKER
(Y)BALL BEARING SSR(S)4 CHANNER SEAIL A
(S)4 CHANNER SEAIL A
(S) LIQUID LEVEL SEN
(S)32 CHANNER INPUT
(S)ANALONG CONTROL A
(S)CONVERTER ASS'Y
(S)CONVERTER ASSS'Y
(S)CPU G8000 W/SEAIL
(S)CPU EL ADAPTER
(S)FLOPPY DISC CONTR
(S)OUTPUT ASS'Y
DISPLAY BOARD "BUS"
(Y)CABLE REMOTE 10"
(Y)CABLE REMOTE 10"
(Y)TEFLON END CAP
(X)COMPLETE
(Y)PIN CYLINDER MTG
(Y)PLATE CARD CPU
(Y)PLATE CARD
(Y)POWER CORD
(Y)QUARTZ CRYSTAL
MOTOR CONTROLLER
(Y)EPEED CONTROLLER
(Y)CANISTER CONNECTO
(Y)SEQUENCER MEMORY
(Y)VIBRATION DAMPER
(Y)DISPLAY
(Y)DISPENSER
(S)SPEAKER DRIVER
DOOR FRAME
(Y)MALE ELBOW5/32 TU
(Y)FITTING
(X)GALTEK U6ION B6RR FITTING
(S) FILTER CARTRIDGE
LOCATION
K-10-2-4
K-10-2-4
B-1-3-2
K-5-4-3
L-3-2-3
L-3-2-3
L-3-2-3
M-4-3
J-5-5
L-2-4-2
D-8-2-3
L-2-4-2
K-10-4-1
K-10-4-1
N-1-3-1
L-3-2-3
L-3-2-3
J-5-2
L-3-2-3
L-3-2-3
L-3-2-3
L-3-2-3
L-3-2-3
L-3-2-3
L-3-2-3
L-3-2-3
L-3-2-3
B-1-3-2
L-2-4-2
L-2-4-2
L-2-4-2
L-3-2-1
D-8-2-3
H-9-2
J-2-3-1
J-2-3-1
J-2-3-1
J-2-3-1
J-2-3-1
K-1-2
J-2-3-1
J-2-3-1
B-1-3-2
H-10-2
VENDOR PART NO
61591
123S0005-01
11007-007-012
60701-3
14709-2
14817-501
60801-2
60502
1470-1
12306-1
SSR-4ZZ
10820-01
60706
300117
12888-1
TCBB131-01-041
TCB5131-01-051
1/4"-5/8"
14837-01
14837-501
16761-505
16750-501
14889-01
1486-501
1486-507
16746-01
16836-01
14894-01
16799-01
16707-1
61704-1
61704-1
HET-60814A
6802-2-3
653-007-1A
12008-1
12007-1
61702-1
X005
60710-26
F-ROM-1
62730-1
60452
70738-D
16782-01
10782-501
405-013-1A
70903-01
19
1
6
12
11
4
1
10
8
2
15
2
20
5
8
4
1
1
12
1
4
2
2
1
1
1
1
1
1
1
2
2
1
17
1
9
1
1
1
15
1
1
15
1
2
1
6
1
2
34
4
67
4
LOC
VENDOR
D34
D34
B55
A41
A42,T22
A42,T22
T22
T22
A42
A82
C61
A103
C55
C55
A103
L73
T22
T22
B34
A42
A42,T22
A81
T22
A42
A42
A42
A42
A42
A42
A42
A42
B72
B72
B55
Y23
A103
A103
A103
B72
T22
A82
C55
B55
A41
A41
A41
A41
A41
B53
A41
A41
B55
A81
SEMITOOL
"
SEMITOOL
"
"
"
"
"
"
SEMITOOL
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
No
Item no
1305
1306
1307
1308
1309
1310
1311
1312
1313
1314
1315
1316
1317
1318
1319
1320
1321
1322
1323
1324
1325
1326
1327
1328
1329
1330
1331
1332
1333
1334
1335
1336
1337
1338
1339
1340
1341
1342
1343
1344
1345
1346
1347
1348
1349
1350
1351
1352
1353
1354
1355
1356
1357
3172F-052
3172F-054
3172G-003
3172G-021
3172H-001
3172H-005
3172L-002
3172M-002
3172M-009
3172M-011
3172M-012
3172M-013
3172M-042
3172N-001
3172O-002
3172O-003
3172O-004
3172O-005
3172O-006
3172O-007
3172O-008
3172O-009
3172O-011
3172O-052
3172P-001
3172P-002
3172P-003
3172P-006
3172P-007
3172P-011
3172P-012
3172P-018
3172P-021
3172R-051
3172R-061
3172R-081
3172R-091
3172R-092
3172S-002
3172S-004
3172S-005
3172S-006
3172S-008
3172S-009
3172S-010
3172S-032
3172S-033
3172S-035
3172S-036
3172S-037
3172S-056
3172S-057
3172S-103
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
DESCRIPTION
(Y)DI WATER FLOWMETER ASS'Y
(Y)CAN FOLLOWER
(Y)POWER GENERAL
(Y)5"RPM GAUGE (METER)
(Y)5"N2 HEATER
N2 HEATER(220V)
(Y)DOOR SEAL LIGHT (
(Y)RESISTIVITY MONITOR (THOR
5"H20 MANIFOLD
5"N2 MANIFOLD
(X)SPEED METER S/D
5"BRUSHLESS MOTOR
(Y)DRIVE CONVEROR MO
(Y)NOIZZLE 240
(Y)CENTER BLOCK O-RI
(Y)SHAFT SPACER O-RI
(Y)O-RING
(Y)O-RING
(Y)O-RING
(Y)O-RING
(Y)O-RING
(Y)O-RING
(Y)O-RING (BAN COAT
FERRO-FLUID OIL(10CC
(Y)SPEED CONTROL POT
(Y)VOLTAGE CONTROL P
ROTOR STOP POS ASS'Y
SHAFT PLATE ASS'Y
(Y)STRAIN BELIEF
(Y)PLUG
(Y)PLUG STRAIN RELIE
(Y)STI TEFLON VALVE PLATE
POWER SUPPLY +5VDC,+
(Y)RESISTOR
(Y)RING
(Y)SPONGE ROLLER
(Y)REGULATOR
BEARING RESISTER
(Y)SWITCH
PRESSURE S/W
5"START SWITCH
5"STOP SWITCH
(Y)POWER SWITCH S/D
(Y)POWER BREAK S/W
(Y)POWER SWITCH
REAR BOWL SEAL
(C)DOOR SEAL ST-260D
ADAPT SEAL SHAFT BOW
BLINGER SHAFT SEAL (
(Y)DOOR SEAL 260D
(Y)CYLINDER SENSOR
(Y)RTD SENSOR 8.75"
(Y)PANEL SOCKET
LOCATION
K-4-4-3
J-2-3-1
L-2-2-4
L-2-2-4
N-4-3-3
J-2-3-1
J-2-3-1
L-3-4-2, L-4-1-2
D-8-2-3
N-1-3-1
L-3-4-3, D-8-2-3
L-2-1, J-5-5
H-1-2
L-2-4-2
J-2-3-1
J-2-3-1
J-2-3-1
J-2-3-1
L-2-4-2
K-10-4-1
K-5-3-4
K-5-3-4
J-2-3-1
J-2-3-1
L-6-1-1
J-2-3-1
L-2-4-2
L-2-4-2
J-2-3-1
N-1-3-1
K-5-3-4
K-10-4-1
K-5-3-4
K-5-3-4
K-5-3-4
VENDOR PART NO
16000-006
OF5
60801-02
ME-DVV-100
61501
61501-04
61553-1
10967-1
12564-1
17410-01
KDM30-PFF-8-100
10168-503
62723
EPT,G75,3 .10
EPT,G165,3 .10
EPT,G65,3 .10
S-55
S-65
V0501H01
615520
61402-3
10503-1
12442-501
61714
61741
61742
16710-505
PVA-20X8-215
INA-13-757-2
60272-13
60705-2
61510
61561
61562
K-5-3-4
L-2-4-2
L-2-4-2
N-1-3-1
L-2-4-2
L-2-4-2
D-8-2-1
J-2-3-1
L-2-4-2
60704
10777-1
10722-1
13401-3
10776-1
2022N674-70
CD3B5
61719
1
3
2
19
4
6
7
2
1
1
5
2
1
11
3
2
9
5
4
4
3
2
1
1
4
5
2
4
1
3
2
6
1
2
2
2
8
5
5
2
3
4
4
1
6
4
5
14
1
6
4
3
3
LOC
VENDOR
A41
A41
A41
A41
A41
A41
A41
C93
C55
B34
C55
P44,A82
A41
A103
A41
A41
A41
A41
A103
A41
A41
A41
A41
A103
T22
C55
C55
B35
A41
A41
A41
B31
A41
A103
A103
A41
B34
C55
T22
C55
C55
C55
T22
C55
C54
A103
A103
B34
A103
A103
C54
A41
A103
"
"
"
"
"
"
"
"
"
"
"
"
"
SEMITOOL
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
No
Item no
1358 3172S-104
1359 3172S-122
1360 3172S-123
1361 3172S-124
1362 3172S-127
1363 3172S-128
1364 3172S-129
1365 3172T-006
1366 3172T-013
1367 3172T-015
1368 3172T-043
1369 3172V-003
1370 3172V-006
1371 3172V-007
1372 3172V-010
1373 3172V-011
1374 3172V-016
1375 3172W-002
1376 3172Z-001
1377 3173A-001
1378 3173B-003
1379 3173B-021
1380 3173B-041
1381 3173B-042
1382 3173B-045
1383 3173C-003
1384 3173C-051
1385 3173C-081
1386 3173G-001
1387 3173G-002
1388 3173M-001
1389 3173M-002
1390 3173R-001
1391 3173W-001
1392 3174B-002
1393 3174B-004
1394 3174B-005
1395 3174B-006
1396 3174B-032
1397 3174B-033
1398 3174B-035
1399 3174B-036
1400 3174B-037
1401 3174B-039
1402 3174B-061
1403 3174B-062
1404 3174B-101
1405 3174B-103
1406 3174C-001
1407 3174C-002
1408 3174C-011
1409 3174C-021
1410 3174C-022
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
DESCRIPTION
(X)BATH SUPPORT
(S)TRUN BEAM SENSOR
(S)OPTICAL S/W(TACH)
J TYPE SENSOR
DOOR SEAL 870
SEAL DOOR 260 WHT VT
SEAL DOOR 270 WHT VT
(Y)AZ-3000 TEMP
(Y)PHOTO TRANSISTOR
(Y)PHOTO TRANSISTOR
(S)OVERTEMP ASS'Y
STI TEFLON H2O VALVE
(Y)AIR OPERATED VALV
(Y)ASPIRATOR VALVE W
(Y)SOLENOID VALVE
(X)AIR VLAVE
(S) VALVE SOLENOID 2
(L)600 WINDOW
(Y)MICRO SWITCH
(Y)ROTARY ACTUATOR
BELT
(Y)BEARING
(Y)JOINT BALL
(Y)JOINT BALL
(Y)BEARING SUPORT
(Y)AIR CYLINDER
(Y)PLAT CAPLE
(Y)FLAT CABLE 3795
(Y)GEAR HEAD
(Y)VACUUM GENERATOR
(Y)CLUTCH BREAK MOTO
(Y)INDEX MOTOR
RING PACKING
(Y)LOCK WASHER AW07
(Y)RELAY BOARD
(Y)BEARING
(Y)BEARING
(Y)BEARING
V-BELT
(Y)V-BELT
(Y)V-BELT
(Y)V-BELT
BELT (C-33)
(Y)RADLE MOVER BELT
(Y)BREAKER
(Y)BREAK/CRUTCH
(Y)CONTROL BOX
MAIN SHIFT METALFOR
(Y)AIR CYLINDER
(Y)PEN CYLINDER
(Y)CRADLE
(Y)SPICONSPEED CONTR
(Y)SPEED CONTROLLER
LOCATION
C-2-6
J-2-3-1
J-2-3-1
N-6-5-1
L-2-4-2
L-2-2-4
J-2-3-1
D-8-2-3
L-3-5-3
D-8-2-1
B-1-3-2
J-2-3-1
I-3-3
K-10-4-1
L-5-4-3
L-5-4-3
L-5-4-3
L-5-4-3
J-5-4
L-5-4-3
VENDOR PART NO
610X60X50
16767-01
16730-01
73082
17438-03
121R0001-01
121R0001-501
09234
PT-501
SS-300
16818-527
12020-01
11007-077
050-41E1-01-D02
02G-53106
61591
10892-505
3V-250
33207
14(RIGHT)
14(LEFT)
UCP-205
DA20X250-CS4D2
37PJ
K-5-5-2
4GH-80K
VHL15-8025
122-10-20-DC24V
4RK-25RGN-C
AN-072
M-6-4-1
M-6-4-1
M-6-4-1
N-5-5
N-5-5
N-5-5
N-5-5
N-5-5
REB-2
51309
6206Z
6207Z
B-32 MITSUBOSHI
B-26 MITSUBOSHI
B-29
A-26
C-33
H-1-3
L-6-4-3
DG-33 20A/30MA
122-10-20 MIKI
E-2-4
D-14-4
N-2-3-3
H-8-3
L-10-6-1
L-10-6-1
SD-505S
SCA2-CB-80B-200
SCPS-CB-15-60
SC2-8
SC3G-8-6
8
1
1
2
9
10
10
6
4
5
2
1
2
4
2
1
5
3
6
1
4
5
4
5
5
1
2
2
1
3
2
1
7
10
3
10
10
20
10
5
1
3
10
6
2
1
1
1
5
5
1
3
2
LOC
VENDOR
W24
A41
T22
A41
B61
B61
B61
Q52
T22
A103
A41
A41
C55
A82
C5
B55
A41
B84
T22
A83
A83
A83
A83
A83
A83
C101
A83
A83
A83
A83
A83
A83
A93
A83
T22
B33
C114
B34
B75
B75
B75
B75
B75
B74
C113
C116
Y21
B34
R44,C101
R42,C101
D40
R42
R42
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
ALPHA
ALPHA
"
"
"
"
ALPHA
"
"
"
"
"
"
ALPHA
"
YUKI
"
"
"
"
YUKI
"
"
"
"
"
YUKI
"
"
"
"
"
"
"
No
Item no
1411
1412
1413
1414
1415
1416
1417
1418
1419
1420
1421
1422
1423
1424
1425
1426
1427
1428
1429
1430
1431
1432
1433
1434
1435
1436
1437
1438
1439
1440
1441
1442
1443
1444
1445
1446
1447
1448
1449
1450
1451
1452
1453
1454
1455
1456
1457
1458
1459
1460
1461
1462
1463
3174C-041
3174F-001
3174F-002
3174H-001
3174I-001
3174I-003
3174M-001
3174M-002
3174M-005
3174M-006
3174M-007
3174O-001
3174O-002
3174P-001
3174P-021
3174R-001
3174R-021
3174R-041
3174R-091
3174S-001
3174S-002
3174S-021
3174S-042
3174S-103
3174T-001
3182B-003
3182B-062
3182D-002
3182F-002
3182F-003
3182H-001
3182H-022
3182H-024
3182H-025
3182M-031
3182P-009
3182P-012
3182P-014
3182P-019
3182P-024
3182P-026
3182P-082
3182P-085
3182S-007
3182T-001
3182T-002
3183B-003
3183F-001
3183H-002
3183L-002
3183R-006
3183R-007
3183R-051
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
SPIN DRYER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
DESCRIPTION
(Y)CONVAM
(Y)PRE-FILTER
(L)HEPA FILTER
(Y)T-HANDLE
INVERTOR
INVERTER
(Y)MOTOR
(Y)MOTOR(CRADLE)
(Y)MOTOR FOR GRADLE
(Y)INDEX MOTOR
(Y)525 CRADLEMOTOR &
(Y)OPERATION UNIT
(Y)OPERATION PANEL
(Y)POWER SUPPLY
(Y)MOTOR CONTROL PAC
(Y)REGULATOR
(Y)RUBBER PACKING
(Y)THERMAL RELAY
(Y)ROM
(Y)OIL SEAL
BEARING BLOCK-SEAL
(Y)SWITCH
(Y)SENSOR/CYLINDER
(Y)OPEN SPAMER
(Y)TACHOMETER
(C)5"BEARING & ARM S
(Y)5"MOTOR SHAFT BUS
(Y)5"PHOTO DETECTOR
(Y)5"LENS REDUCER&FI
(Y)5"AC LINE FILTER
(Y)5"MAIN WIRING HAR
(Y)5"SHAFT HOLDER "A"
(Y)5"SHAFT HOLDERC
(Y)5"SHAFT HOLDERD
(Y)5"Q'TZ ADJ. STOP
(Y)5"NEST R.H. STAGE
(Y)5"JAW PAD R.H. ST
(Y)5"JAW PAD R.H. ST
(Y)5"CARDLE PVDF SH
(Y)5"DIFFUSION BOAT
(Y)5"JAW PAD P.V.D.F
(X)Q'TZ TOP PLATE
5"150MM PUSHERS(0.03
(Y)5"SHAFT 1/2" X 19
(Y)5"VACUUM TRAY
(Y)5"LIFTCOMB OF WAF
(Y)5"MOTOR PC BOARD
(Y)5"TEE FITTING 1/1
(Y)5"ORIFICED HOSE B
(Y)MANUAL DOOR LOCK
(Y)5"FRONT RETAINER
(Y)5"REAR RETAINER 5
(Y)5"SHUTTLE RELAY 3
LOCATION
N-3-2-2
N-1-4-2
K-5-1-3, K-5-4-4
M-4-3
K-3-4-2
K-5-3-2
L-6-4-3
K-3-1-4
N-3-3-4
K-5-3-2
K-5-3-2
K-5-3-2
G-2-4-4
L-10-6-1
N-1-4-2
K-10-4-1, D-1-3-2
K-5-5-2
K-5-6-3
D-8-1
K-5-6-3
D-8-1
K-5-5-2
K-5-5-2
K-5-6-3
K-5-5-2
K-5-5-2
K-5-5-2
K-5-6-3
K-5-5-2
K-5-6-3
K-5-5-2
K-5-5-2
K-5-5-2
K-5-5-2
K-5-6-3
K-5-6-3
D-8-1
K-5-5-2
K-5-5-2
K-5-6-3
K-5-5-2
K-5-5-2
K-10-2-3
VENDOR PART NO
VP-10LR
U-600
2BA-610.610.80
VFD-110-2-A02
VM1-22-C04
1.5KW/TFO-K4P
4RK25GK-C2M
4RK-25GM-CM
4RK-25RGK-C2/4G
MBM425-412
OPR-2-DTM
LEFT
ESX24-2R5
SS32-MAJ
V3000-8A-WEG
TH-OH/3 9-11A
505S
505S-YUKI
AD40727
A3PA/LED
SCA2-80-RO
DTM
6010
5040
4031-02
5007-05
4027
4026-01
5018-01
5018-04
5018-03
5030
5027-01
5033-02
5033-04
5069-25
5027
5033-08
5026
6037
3007
PWS-BL-TM-13
082-115
082-124
082-153
076121
076122
D2OSOKOO
18
1
2
8
2
2
3
1
2
2
2
2
2
3
2
3
1
4
3
1
4
3
4
5
3
3
2
7
2
3
1
1
3
3
1
1
4
1
1
2
10
1
1
2
1
1
1
10
4
1
2
4
3
LOC
VENDOR
R41
D40
L44
B35
C114
C114
Y21
P14
P11
P14
P13
C112
C114
C113
P25
R43
R43
C114
T22
C114
C114
R22
R42
B35
T22
A92
A92
V21
A92
V21
A92
A92
A92
A92
A92
A92
A92
A92
A92
A92
A92
A92
A92
A92
A92
A92
V21
A92
A92
A92
A92
A92
D83
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
YUKI
"
"
"
"
"
"
"
"
Q.I
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
Q.I
Q.I
"
Q.I
MGI
"
"
MGI
"
"
"
No
Item no
1464
1465
1466
1467
1468
1469
1470
1471
1472
1473
1474
1475
1476
1477
1478
1479
1480
1481
1482
1483
1484
1485
1486
1487
1488
1489
1490
1491
1492
1493
1494
1495
1496
1497
1498
1499
1500
1501
1502
1503
1504
1505
1506
1507
1508
1509
1510
1511
1512
1513
1514
1515
1516
3183S-002
3183S-011
3183S-021
3183S-022
3183V-001
3183V-021
3184B-003
3184B-004
3184B-006
3184B-007
3184B-008
3184B-009
3184B-010
3184B-011
3184B-013
3184B-014
3184B-051
3184B-052
3184B-071
3184B-081
3184B-082
3184B-083
3184B-084
3184B-085
3184H-001
3184H-004
3184H-005
3184L-003
3184M-001
3184M-001
3184M-002
3184M-002
3184M-004
3184M-007
3184M-021
3184M-021
3184M-022
3184M-022
3184M-023
3184M-024
3184M-026
3184M-027
3184M-031
3184P-021
3184P-022
3184P-023
3184P-024
3184P-025
3184P-026
3184P-027
3184R-001
3184T-001
3184T-002
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
WAFER TRANSFER
DESCRIPTION
(Y)5"RETAINER SENSOR
(Y)5"CARRIER SENSOR
(Y)5"THUMEWHEEL SWIT
(Y)5"POWER SWITCH
(Y)5"SOLENOID VALVE
(Y)5"CEMTER VANES
(Y)5"P.C.B
(Y)5"P.C.B(UP/DOWN S
(Y)5"PROGRAMMED CPU
(Y)5"PCB (25/50 LIMI
5"P.C.B (DISPLAY CNT
(Y)5"PCB(STEPPER MOT
5"P.C.B(UP/DOWN MOTO
(Y)5"P.C.B (DC MOTOR
(Y)5"MAIN PC BOARD
(Y)5"LIMIT SWITCH PC
(Y)5"QUARTZ BAR(BOAT
(Y)5"QUARTZ REFERENC
(Y)5"BOAT ALIGN
(Y)5"BELT(P.SIDE UP/
(Y)5"BELT(STEPPING M
(Y)5"UP-DOWN BELT
(Y)5"SIDE MOTION BEL
(Y)5"BAR (BOAT STOP)
(Y)5"HEAD COMB(DELRI
(Y)5"UP-DOWN COMBS
(Y)5"UP-DOWN COMBS
(Y)5"LIFT COMB(P2)(U
(Y)5"MOTOR
(Y)5"MOTOR
(Y)5"MOTOR(HEAD COMB
(Y)5"MOTOR(HEAD COMB
(Y)5"UP-DOWN MOTOR
(Y)5"WAFER TRANSFER
(Y)5"MODULE(INPUT)
(Y)5"MODULE(INPUT)
(Y)5"MODULE(OUTPUT)
(Y)5"MODULE(OUTPUT)
(Y)5"MICROPROCESSOR(
5"MICROPROCESSOR(DIS
5"MICROPROCESSOR (DI
(Y)5"CPU W/OROGRAMME
(Y)5"SIDE MOTION STE
(Y)5"PULLEY
(Y)5"PULLEY(60)
(Y)5"PULLEY(12)
(Y)5"PULLEY(Q.SIDE U
(Y)5"UP-DOWN PULLEY
(Y)5"SIDE MOTION PUL
(Y)5"PULLEY (STEPPIN
(Y)5"RAIL(QUARTZ)
(Y)5"TIP(QUARTZ SWIT
(Y)5"BOAT DETECT TIP
LOCATION
D-8-1
D-8-1
D-8-1
K-10-2-3
K-5-5-2
N-1-1-1
N-1-1-1
N-1-1-1
N-1-1-1
N-1-1-1
N-1-1-1
N-1-1-1
N-1-1-1
D-2-3-1
N-1-1-1
I-4-2
I-4-2
L-5-2-2
I-4-2
L-5-2-2
L-5-2-2
L-5-2-2
L-5-2-2
J-4-1-2
J-4-1-2
N-2-3-4
J-4-1-2
VENDOR PART NO
082-069
080-068
082-070
082-074
082-123
45114
EPCBZ0222A
EPCBZ0450A
EPGC3I256A
EPCBZ0440A
EPCBZ0530A
EPCBZ0M13A
EPCBZ0M23A
EPCBZ0M33A
EPCB3I255A
ESWH3I259
RQUTQ0300A
RQUTQ0030A
RDELQ0130A
MBLTL0010A
MBLTL0030A
DWG#;111
DWG#;100
RQUTQ0335
RDELH0550B
REDL2I070A
RDEL3I112A
RDELL-P2
EMTRL0400A
EMTRL0400A
EMTRH0800A
EMTRH0800A
DWG#;109
EPGCC0040A
EPGCC0040A
EPGCC0050A
EPGCC0050A
EMCP87492AI
EMCP87492AD
EMCP87493AD
K-6-1-1
K-6-1-1
K-6-1-2
K-6-1-1
K-6-1-1
L-4-3-3, K-6-1-1
K-6-1-1
I-4-2
I-4-2
I-4-2
DWG#;104
MPLY00010A
EPLYL0020A
MPLYL0010A
MPLYL0030A
DWG#;110
DWG#;101
MPLYS0010A
RQUTQ0380A
RQUT0100A
RQUT3I133A
9
3
4
8
5
8
2
4
1
3
1
2
2
3
2
3
4
3
1
3
3
6
6
2
1
1
1
1
3
2
2
2
2
1
2
2
2
2
1
1
2
1
1
1
3
2
3
1
3
3
3
3
1
LOC
VENDOR
V21
V21
V21
V21
D31
A92
V22
V22
V22
V22
V22
V22
V22
V22
V22
V22
A92
A92
A92
A92
A92
A92
A92
A92
A92
A92
A92
A92
P52
P55
V12
V12
P52
V12
V23
V23
V23
V23
V23
V23
V23
V23
P52
A92
A92
A92
A92
A92
A92
A92
A92
A92
A92
"
"
"
"
"
"
ASQ
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
No
Item no
1517
1518
1519
1520
1521
1522
1523
1524
1525
1526
1527
1528
1529
1530
1531
1532
1533
1534
1535
1536
1537
1538
1539
1540
1541
1542
1543
1544
1545
1546
1547
1548
1549
1550
1551
1552
1553
1554
1555
1556
1557
1558
1559
1560
1561
1562
1563
1564
1565
1566
1567
1568
1569
3191A-001
3191A-002
3191A-004
3191A-005
3191B-007
3191B-010
3191B-032
3191B-033
3191B-034
3191B-035
3191B-038
3191B-039
3191B-040
3191B-044
3191C-002
3191C-003
3191C-005
3191C-006
3191C-007
3191C-008
3191C-010
3191C-011
3191C-012
3191C-013
3191C-016
3191C-018
3191C-021
3191C-022
3191D-001
3191D-002
3191E-001
3191E-002
3191E-003
3191E-005
3191E-006
3191E-009
3191E-010
3191E-012
3191F-003
3191F-006
3191F-008
3191F-011
3191F-012
3191F-013
3191F-014
3191F-016
3191F-017
3191F-020
3191F-021
3191F-041
3191G-001
3191G-002
3191G-003
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
DESCRIPTION
(X) SOL ACTUATOR
(X) RIGHT ANGLE HEADR SAT
(X) RIGHT ANGLE HEADER S
(X) ASPIRATOR RETROFIT KIT
(X) COVER CLOSED PCB CON
(X) ASS'Y CST I/F CON B/D
(X) BELT
(X) BELT
(X) BUTTON EM
(X) ASS'Y BEARING CAST
(X) BEARING SEALED
(X) CARBON BRUSH (F.SI)
(X) BRUSH AND LUG
(X) 10" 12" 2.75" PFA BILLET
(X) DYLINDER AIR
(X) CYLINDER COVER INTL
(X) DP END CAP 1 1/2"
(X) CAP HUV(NEW)
(X) CYLINDER COVER
(X) ASS'Y PC COVER OPEN CON
(X) LOCK SGL BIT CAN
(X) CNNECTOR BARD1/8"
(X) FUSE
(X) ASSY COVER (NEW)_
(X) CANISTER CAP SSEMBLY
(X) COUPSING ACETAL 8 PORT
(X) CIRCULT BREAKER 50 AMP
(X) CIRCULT BREAKER 0.5AMP
(X) DIODE BRIDGE
(X) TEMP SNAP DISC
(X) HEAT ELEMENT, HOT
(X) ELBOW UNION 1/4"
(X) ELBOW UNION 8MM
(X) ELBOW UNION 12MM
(X) ELBOW POMALE PIPE1/4"
(X)HEAT EXCHANGER
(X) ELBOW UNION 6MM
(X) ELBOW UNION 10MM
(X) FEMALE SUB-BODY
(X) FEMALE SUB BODY
(X) HOLDER FUSE
(X) TIME DELAY FUSE FNQ2
(X) TIME DELAY DELAY FUSE FNQ3
(X) TIME DELAYE FUSE FNQ5
(X) TIME DELAY FUSE FNQ 1A
(X) TIME DELAY FUSE
(X) 1/8 NPT FITTING METAL
(X) HEAT EXCHANGER FITTING
(X) END CAP GASKET BOTTOM
(X) END CAP GASKET TOP
(X) GAUGE 100PSI
LOCATION
C-3-5
C-3-5
C-3-5
M-7-2-4
C-3-5
C-3-5
C-3-5
C-3-5
C-3-5
N-1-2-1
C-3-5
C-3-5
C-3-2
C-4-3-2
C-4-3-2
C-4-3-2
M-7-2-4
N-3-1-2, F-5-5
D-1-2-2
C-4-3-2
C-4-3-2
C-4-3-2
F-2-1
H-9-2
C-4-3-2
C-4-3-2, D-3-1-2
C-4-3-2
C-2-5
M-7-4-1
M-7-2-3
M-7-4-1
M-7-2-3
C-2-4
M-7-4-1
M-7-2-3
L-10-7-1
L-10-5-2
L-10-4-1
L-10-5-2
L-10-5-2
L-10-5-2
L-10-5-2
L-10-5-2
L-10-5-2
L-10-5-2
L-10-5-2
L-10-5-2
M-2-2-1
M-2-2-1
VENDOR PART NO
300457-001
HIF3BA-50PA-2.5
HIF3BA-34PA-2.5
901066-001
290040-400
290027-400
300328-004
230047-001
901101-001
300010-006
230240-001
119-37-1A-0215
300888-001
300555-001
300482-008
403037-001
300527-001
290030-400
30466-001
BC4-2
600VAC 5AMP
900763-001
901735-001
300893-001
230063-001
230062-001
300511-001
230066-001
300414-002
UE4N
UE8MN
UE12MM
PUE4
301975-001
UE6MN
UE10MN
300897-001
300603-001
230067-001
FNQ 30A
300528-001
300379-006
401600-003
401601-003
300322-001
6
20
10
2
4
1
1
3
2
1
4
8
10
1
5
6
1
3
7
2
2
21
2
1
16
2
1
2
13
7
2
9
5
10
7
1
10
10
13
10
8
2
5
2
7
1
2
2
1
6
4
4
2
LOC
VENDOR
AA33
AA33
AA33
AA33
AA33
AA33
AA33
AA33
AA33
AA33
AA33
AA33
AA33
AA43
AA33
AA33
AA33
AA33
AA33
T33
AA33
AA33
AA33
BB43
AA33
AA33
AA33
AA33
T31,AA33
AA33
AA43
AA34
AA34
AA34
AA34
AA43
AA34
AA34
AA34
AA34
AA34
AA34
AA34
AA34
AA34
AA34
AA34
AA34
AA34
AA34
AA32
AA32
AA32
FSI
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
No
Item no
1570
1571
1572
1573
1574
1575
1576
1577
1578
1579
1580
1581
1582
1583
1584
1585
1586
1587
1588
1589
1590
1591
1592
1593
1594
1595
1596
1597
1598
1599
1600
1601
1602
1603
1604
1605
1606
1607
1608
1609
1610
1611
1612
1613
1614
1615
1616
1617
1618
1619
1620
1621
1622
3191G-004
3191G-005
3191G-006
3191G-009
3191H-006
3191H-007
3191H-008
3191H-009
3191H-012
3191L-001
3191M-001
3191M-004
3191M-005
3191M-006
3191M-007
3191M-009
3191M-010
3191M-011
3191M-012
3191M-012
3191M-013
3191M-014
3191N-004
3191N-005
3191N-005
3191N-006
3191N-008
3191N-009
3191N-010
3191O-004
3191O-005
3191O-006
3191O-009
3191O-010
3191O-011
3191O-012
3191O-013
3191O-014
3191O-018
3191P-003
3191P-004
3191P-005
3191P-007
3191P-009
3191P-011
3191P-013
3191P-014
3191P-015
3191P-017
3191P-019
3191P-022
3191P-023
3191P-025
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
AUTO CLEANER
DESCRIPTION
(X) GAUGE 30 PSI
(X) GAUGE CONT PLATE
(X) SPRAY GUN
(X) GAUGE 60 PSI
(X) HIF 3BA-20PA-2.54DSA
(X) HIF 3BA-20PA-2.54D
(X) HIF 3BA-34PA-2.54DS
(X) HANDLE CONCEALED
(X) S/W WITH LAMP (HOT CON)
(X) MAKE SUB-BODY
(X) TEMP METR, COLD
(X) MOTOR SPEED CONTROL
(X) FLOW METER FOR H2 SO4
(X) FLOW METER FOR H202 HCL
(X) FET MOTOR
(X) FET MOTOR
(X) ASSY PC TACH MOTOR
(X) MOTOR 1 PPM 12V DC
(X) MOTOR 1 PPM 12V DC
(X) MOTOR
(X) MOTOR SPEED CONTRO 10V
(X) NUP PP
(X) NIPPLE 1/2"-1/2" MNPT(SS H
(X) NIPPLE 1/2"-1/2" MNPT(SS H
(X) NIPPLE PIPE 1/4"X1/4
(X) NIPPLE PIPE 3/8"X3/8"
(X) NIPLE PIPE 1/2"X3/8"
(X) NIPPLE PIPE 1/2"X1/2"
(X) O-RING O.D 33 (3.5)
(X) O-RING O.D 40 (3.5)
(X) O-RING O.D 65 (1.8)
(X) O-RING O.D 75 (3.5)
(X) O-RING O.D 75 (3.5)
(X) O-RING O.D 100 (3)
(X) O-RING L365 (5)
(X) O-RING L95 (1.8)
(X) O-RING
(X) PLASTICS CONNECTOR
(X) PC CAN I/F CON
(X) PUMP IMPELLER
(X) PUMP BOASTER
(X) COVER OPEN/CLOSE PANEL
(X) PANEL START/STOP
(X) UNION PIPE 1/2"
(X) PLUG PIPE 1/4"
(X) PLUG PIPE 1/2"
(X) PHOTO COUPLER 4N37
(X) PIPE FITTING
(X) TEMP PROBE
(X) FRONT
LOCATION
VENDOR PART NO
M-2-2-1
M-2-2-1
M-2-2-1
M-2-2-1
M-2-2-1
M-2-2-1
M-2-2-1
M-2-2-1
M-2-2-1
D-3-5-2
D-3-5-2
J-2-1-2
C-2-6
D-3-5-2
D-3-5-2
M-6-1-2
300562-001
280016-002
300514-001
WGP8-2
SY-CAT
SY-CAT-3BA-20PA
SY-CAT-3BA-34PA
300698-001
M-6-1-2
D-3-5-2
D-3-5-2
J-4-3-4
D-3-5-2
D-3-5-2
D-3-5-2
M-7-2-3
M-7-2-3
M-7-2-3
230058-001
FSI300893-001
2593
900180-001G
301178-001
300765-001
MGP20 N 45
9303309TN
902828-001
280010-001
280010-001
2368
230488-001
400815-001
300643-004
300643-004
N4-4
N6-6
N8-6
N8-8
300038-219
300038-226
300838-036
300038-241
300038-335
300038-261
300038-373
300038-034
M-6-1-2
H-9-2
H-9-2
H-9-2
1480-01-03
290033-400
300749-001
300647-001
401021-001
401022-001
PUB
P4
P8
H-9-2
300429-001
402134-001
1
1
1
2
10
25
10
10
1
1
1
1
1
1
1
5
1
17
1
1
1
1
10
5
20
20
8
2
3
2
2
2
4
2
1
3
2
3
10
10
1
3
1
6
6
1
2
2
1
38
28
2
1
LOC
VENDOR
AA32
AA32
AA32
AA32
AA32
AA32
AA32
AA32
AA32
AA35
AA35
T32
T24
AA35
AA35
T32
P32
T32
AA35
AA35
P32
T32
AA35
AA35
AA35
AA35
AA35
AA35
AA35
AA35
AA35
AA35
AA35
AA35
AA35
AA35
AA35
AA35
AA35
AA34
T32
AA34
BB15
AA34
AA34
AA34
AA34
AA34
AA34
T32
AA34
AA34
AA34
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
FSI
"
"
"
"
"
"
"
"
"
"
"
"
No
Item no
DESCRIPTION
1623 3191R-001
AUTO CLEANER
(X) RUBBER SEAL T3,030,
1624 3191R-002
AUTO CLEANER
(X) RUBBER SEAL 53,030 I
1625 3191R-003
AUTO CLEANER
(X) ARUBBER SEAL T3,040,I
1626 3191R-004
AUTO CLEANER
(X) ROTARY UNION OLD
1627 3191R-006
AUTO CLEANER
(X) REGULATOR CAN PR
1628 3191R-007
AUTO CLEANER
(X) RELAY AC 24V
1629 3191R-008
AUTO CLEANER
(X) RELAY AC 100V
1630 3191R-009
AUTO CLEANER
(X) WELD RET ROD
1631 3191R-010
AUTO CLEANER
(X) PROBE RESISTIVITY
1632 3191R-011
AUTO CLEANER
(X) REGULATOR 0-100 PSI
1633 3191R-013
AUTO CLEANER
(X) UNION STRAOGJT REDIC
1634 3191R-015
AUTO CLEANER
(X) UNION STRALGHT REDUC
1635 3191R-016
AUTO CLEANER
1636 3191R-018
AUTO CLEANER
1637 3191R-019
AUTO CLEANER
1638 3191R-020
AUTO CLEANER
(X) RELAY MARCURY 60AMP
1639 3191S-002
AUTO CLEANER
(X) PRESSURE S/W
1640 3191S-003
AUTO CLEANER
(X) PRESSURE S/W HOT SQ
1641 3191S-004
AUTO CLEANER
(X) DOOR INTL S/W HOT
1642 3191S-006
AUTO CLEANER
(X) BRACKER SWITCH
1643 3191S-007
AUTO CLEANER
(X) PRESSURE S/W HOT SQ
1644 3191S-008
AUTO CLEANER
(X) SWITCH INTERLOCK COVER
1645 3191S-009
AUTO CLEANER
(X) BRKT, SPEED SENSOR
1646 3191S-010
AUTO CLEANER
(X) POST-SPEED SENSOR
1647 3191S-012
AUTO CLEANER
(X) SPRAY POST OLD
1648 3191S-016
AUTO CLEANER
(X) SEAL SHAFT
1649 3191S-019
AUTO CLEANER
(X) ASS'Y SHAFT REPL LABY
1650 3191S-020
AUTO CLEANER
(X) MOUNT SENSOR
1651 3191S-023
AUTO CLEANER SWITCH PRESSURE
1652 3191T-001
AUTO CLEANER
(X) PVC OPEN TOOL
1653 3191T-002
AUTO CLEANER
(X) SHAFT REMOVE TOOL
1654 3191T-004
AUTO CLEANER
(X) MINI CASSENTTE TAPE
1655 3191T-012
AUTO CLEANER
(X) FUSE
1656 3191U-011
AUTO CLEANER
(X) UNION STRALGHT 10MM
1657 3191U-013
AUTO CLEANER
(X) UNION STRALGHT PANEL 6MM
1658 3191U-015
AUTO CLEANER
(X) UNION STRALGHT PANEL 10 M
1659 3191U-016
AUTO CLEANER
(X) UNION STRALGHT PANEL 12 M
1660 3191U-020
AUTO CLEANER
(X) ASSY ROTARY UNION
1661 3191V-007
AUTO CLEANER
(X) CHECK VALVE
1662 3191V-028
AUTO CLEANER
(X) BRKT VALVE MOUNT
1663 3191W-005 AUTO CLEANER
(X) HIF SOKET 20P REBON WIRE
1664 3192A-001
SPIN DRYER
(Y)SWITCH PNEU W/ROLLER ARM
1665 3192H-001
SPIN DRYER
HTR IMRSN 2000W
1666 3192M-001
SPIN DRYER
(Y)MOTOR 1/3HP 3000RPM WXP PR
1667 3192N-001
SPIN DRYER
(Y)NOZZLE WATER MODIFIED SS
1668 3192S-002
SPIN DRYER
(Y)SWTCH PRESS ADJ
1669 4111A-003
LASER MARKER
(Y)COOLING ASSEMBLY
1670 4111C-004
LASER MARKER (Y)REFLECTOR CYLINDE
1671 4111S-001
LASER MARKER
(Y)VACUUM SOLENOID SWITCH
1672 4111V-001
LASER MARKER
(Y)SOLENOID VALVE,3-WAY,24V
1673 4121B-002 CASSETTE CLEANER (Y)TIMMING BELT
1674 4122M-005 CASSETTE CLEANER (Y)REVERIBLE MOTOR
1675 4122S-015 CASSETTE CLEANER (Y)LIMIT SENSOR
LOCATION
J-2-3-2
L-11-4-3
H-9-2
M-7-2-3
M-7-2-1
M-7-2-3
M-7-2-3
G-2-4-3
D-3-5-2
G-2-4-3
G-2-4-3
E-3-3-2
G-2-4-3
G-2-4-3
E-3-3-2
C-2-4, G-2-4-4
E-3-3-2
E-3-3-2
H-9-2
H-9-2
H-9-2
E-3-2-2
E-3-3-2
E-3-3-2
L-12-3-2
L-4-5-1
L-12-3-2
L-12-3-2
K-3-4-2
K-3-4-2
K-3-4-2
B-4-2-3
VENDOR PART NO
300815-001
2197
2199
900497-001
300820-001
280026-003
280026-001
402460-003
300435-001
300837-001
SU6-4N
SU8-6N
SU12M-6MN
SU12M-10MN
280012-002
230029-006
2747
230023-002
230130-001
230101-011
300541-001
400156-001
400157-001
401891-002
300783-001
900864-002
400961-001
230029-005
402461-001
402544-001
300712-001
500VAC 10AMP
SU10MN
LM6MN
PM10MN
PM12MN
901880-001
300667-009
400764-002
70913
73004-01
61104
10168-01
61510-03
6154004
3011280
23020001
4401030
240-L-075-U
4RK 25GN-A
ABV162061
10
12
12
2
1
4
1
15
1
1
25
8
4
10
30
2
17
5
10
1
1
10
7
6
15
30
5
3
4
2
2
15
2
25
22
20
30
8
1
10
2
1
2
1
8
1
2
3
1
1
2
1
5
LOC
VENDOR
AA35
AA35
AA35
AA34
AA35
T32
T32
AA35
AA35
AA35
AA34
AA35
B42
AA35
AA35
AA34
AA35
AA34
AA34
AA35
AA35
AA34
AA34
AA35
AA42
AA34
AA34
AA34
AA34
AA35
AA44
AA35
AA35
AA35
AA35
AA35
AA33
AA34
AA35
AA35
AA35
A94
A73
P33
A94
A94
Y16
C12
C12
C12
B74
P11
Q61
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
FSI
"
"
"
"
"
"
"
"
"
"
"
"
SEMITOOL
SEMITOOL
"
"
"
LOMONICS
LUMONICS
LOMONICS
"
NISSO
SUMITOMO
SUMITOMO
No
1676
1677
1678
1679
1680
1681
1682
1683
1684
1685
1686
1687
1688
1689
1690
1691
1692
1693
1694
1695
1696
1697
1698
1699
1700
1701
1702
1703
1704
1705
1706
1707
1708
1709
1710
1711
1712
1713
1714
1715
1716
1717
1718
1719
1720
1721
1722
1723
1724
1725
1726
1727
1728
Item no
DESCRIPTION
4141B-011 CASSETTE CLEANER (Y)BAFFLE PLATE 1

4142A-002
WET STATION
(X)FIBER AMP
4142A-004
WET STATION
(Y)AIR VALVE(1/2)(PV
(Y)(C)ALARMER
4142A-009
WET STATION
4142A-023
WET STATION
(X)ROTARY ACTUATOR
4142B-009
WET STATION
(Y)BUSHING PLUNGER
4142B-021
WET STATION
(Y)BEARING POSITIONE
4142B-031
WET STATION
(Y)(R)LEVEL BOARD
4142B-032
WET STATION
(Y)OVER SPEED BOARD
4142B-055
WET STATION
(Y)TIMING BELT
4142B-056
WET STATION
(Y)TIMING BELT
4142C-005
WET STATION
(Y)CYLINDER DOOR AIR
4142C-006
WET STATION
(Y)SPEED CONTROLLER
4142C-013
WET STATION
(Y)(C)TEMP CONTROLLE
4142C-019
WET STATION
(Y)FLOW CHECKER
4142C-024
WET STATION
(Y)(C)TEMPERATURE CO
4142C-025
WET STATION
(Y)(C)TEMPERATURE CO
4142C-071
WET STATION
(X)CABLE KEY PAD 6M
4142C-072
WET STATION
(X)CABLE R102-R105 3
4142C-073
WET STATION
(X)CABLE POWER R111
4142C-074
WET STATION
(Y)CABLE AUX3 3.5m
4142D-001
WET STATION
(Y)SAME P/N 4142G-00
4142D-002
WET STATION
(Y)DISK OUTER N2 SEAL
4142D-003
WET STATION
(Y)DISK INNER N2 SEAL
4142D-009
WET STATION
(Y)(N)DOOR DRIVE ASS
4142D-011
WET STATION
(Y)SAME P/N 4142S-00
4142E-001
WET STATION
(Y)CAP DRAIN CORE EL
4142F-015
WET STATION
(X)FUSE
4142F-016
WET STATION
(Y)FAN
4142F-018
WET STATION
(Y)FILTER(N2)
4142F-019
WET STATION
(Y)FILTER
4142G-001
WET STATION
(Y)GEAR HEAD
4142G-002
WET STATION
(Y)GASKET MANIFOLD
4142G-006
WET STATION
(Y)ROBOT LM GUIDE
4142H-004
WET STATION
(Y)HEATER N2 ASSY
4142H-013
WET STATION
(X)HOOK(L=357)
4142H-019
WET STATION
HEATER ELEMENT
4142H-020
WET STATION
(Y)RUBBER HEATER
4142H-021
WET STATION
(Y)RUBBER HEATER
4142I-002
WET STATION
(Y)INVERTOR
4142K-001
WET STATION
(Y)KEY MOTOR SUS316
4142L-011
WET STATION
(Y)PILOT LAMP
4142M-001
WET STATION
(Y)RESISTIBLE MONITO
4142M-004
WET STATION
(Y)VALVE MANIFOLD N2
4142M-011
WET STATION
(Y)FLOW METER
4142M-022
WET STATION
(Y)SERVO MOTOR
4142M-023
WET STATION
(Y)FITTING AIR MOTOR
4142M-024
WET STATION
(Y)AC SERVO MOTOR
4142N-031
WET STATION
(Y)NUT,HEXAGON
4142O-001
WET STATION
(Y)O-RING
4142O-003
WET STATION
(Y)O-RING
4142O-004
WET STATION
(Y)O-RING
4142O-006
WET STATION
(Y)O-RING VITON
LOCATION
VENDOR PART NO
I-2-2
K-4-1-1
L-3-1-3
B-2-4
L-3-1-3
L-12-3-2
L-12-3-2
I-4-2
L-4-5-2
L-4-5-2
L-4-5-2
L-4-5-2
L-4-5-2
B-2-3
L-4-5-2
B-2-1
Q'TZ 1
FIR(FA4,5)
CZ41710-B4
K2CU-F40A-E.
RAP20-115-44
PA4-2023-000
1073457-1
H-Q-P-1
PA4-0640-000
R1032030101
RN640170161
4119924
SS-21M
E5C2-R20K(TC5)
FE-SD70-TR
E5ZD-4A02KJ
E5C3-WR20K AC100
1067763-529
1072134-144
1072144-144
1072143-144
1072001-1
1072001-2
1072002-1
1072301-1
SUV 24E
1072033-1(PA4-20
PA4-9001-000
BF-19 DTC
RT9-0032-000
CWUZOS0S3
3GN15K
1072587-1
ABFT045615
1073259-1
DTZ210115-2
AEHT144301-2
#ACCT-162102
#ACCT-162103
FR-U120-0.7K
1063664-1
UPQS 1B 26N-W
871CCA2
4120786(PG4-0614
P-500-20A
HA-SC(HEADLESS)
4120213
R0851330301
4119500
4120203
4119932
4119937
4119927
N-2-3-2, N-7-1
N-2-1-4
N-2-1-4
L-4-2-2
L-6-1-1
I-8-1, H-8-3
H-10-2
L-6-1-1
M-7-2-1
C-3-3
J-5-3
J-5-2
D-11-1
L-4-4-3
L-4-4-3
L-6-1-1
L-6-1-1
J-2-2-2
L-6-1-1
L-6-1-1
L-6-1-1
L-12-3-2
L-12-3-2
2
1
2
1
4
8
2
2
2
1
1
1
2
1
2
1
2
1
1
1
1
4
4
4
1
3
1
3
3
2
3
3
1
4
1
1
1
2
4
1
3
2
4
1
1
1
4
1
3
3
3
3
1
LOC
VENDOR
B92
C33
A34
R22
A34
A94
A94
A43
A34
A34
A34
A34
A34
A34
A34
A43
A34
A34
B71
B71
A34
B43
B43
B43
A42
A36
A35
B74
Y14
B43
A35
A35
B43
W23
A42
B41
Y14
A43
A43
A35
A35
C34
A35
A35
A35
A41
A94
A43
A94
A94
A94
A94
A94
"
SANKYO
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
SANKYO
"
"
"
"
"
"
"
"
SANKYO
"
"
"
"
"
No
Item no
1729
1730
1731
1732
1733
1734
1735
1736
1737
1738
1739
1740
1741
1742
1743
1744
1745
1746
1747
1748
1749
1750
1751
1752
1753
1754
1755
1756
1757
1758
1759
1760
1761
1762
1763
1764
1765
1766
1767
1768
1769
1770
1771
1772
1773
1774
1775
1776
1777
1778
1779
1780
1781
4142P-005
4142P-012
4142P-021
4142R-001
4142R-002
4142R-003
4142R-004
4142R-005
4142R-006
4142R-007
4142R-021
4142S-013
4142S-014
4142S-016
4142S-018
4142S-019
4142S-020
4142S-023
4142S-026
4142S-027
4142S-028
4142S-029
4142S-034
4142S-036
4142S-037
4142S-044
4142S-045
4142S-048
4142S-050
4142S-055
4142S-060
4142S-061
4142S-071
4142S-073
4142S-074
4142S-082
4142S-084
4142S-085
4142S-086
4142S-096
4142S-100
4142T-010
4142T-017
4142T-024
4142T-026
4142T-027
4142U-004
4142U-005
4142V-001
4142V-005
4142V-016
4142V-017
4142V-018
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
DESCRIPTION
(Y)POWER SUPPLY,DC 5
(Y)(N)BOX AC POWER
(Y)HOT PLATE
(X)RETAINER ROTATOR
(Y)SOLID STAY RELAY
(Y)RELAY AC200V-2C
(Y)RELAY AC100V-2C
(Y)RELAY DC24V-4C
(Y)RELAY DC24V-2C
(Y)RELAY
(Y)ROD, CYLINDER UNI
(Y)SENSOR MAGNET
(Y)PLATE DOOR SENSOR
(Y)SENSOR(CKD)
(X)SCREW ACTUATOR
(Y)SENSOR DOOR
(Y)SWITCH PRESSURE
(Y)(C)FIBER SENSOR (
(X)SPRING
(X)C ROTOR SCREW PIL
(X)C ROTOR SCREW PIL
(X)SCREW ROTOR PILOT
(Y)SCREW ROTOR ALLON
(Y)SPEED CONTROLLER
(Y)(C)PUSH SWITCH(10
(X)SCREW
(X)SCREW,FLAT HEAD
(Y)METAL SUPPORTER
(Y)FIBER SENSOR
(Y)HEAT SENSOR
(Y)(C)PRESSURE SWITC
(Y)MANOSTER SWITCH
(Y)ROBOT SHAFT
(Y)SHAFT DRIVEDOOR
(Y)MANOSTAR SWITCH
(Y)OPERATOR PUSHBUTT
(Y)PUSH SWITCH
(Y)PUSH SWITCH
(Y)PUSH SWITCH
(Y)SEAL 8200 SILICON
(Y)POWER SUPPLY ( DC
(Y)COLLAR TUBE PIVOT
IPA QUARTZ TRAY
(Y)TIMER 0.5-10S
(Y)SAME P/N 4142T-02
(Y)4 TRANSFORMER
(Y)JOINT UNIT(MITSUB
(Y)A/D UNIT(MITSUBIS
(Y)SOLENOIDE VALVE
(Y)SOLENOIDE VALVE
(Y)STOP VALVE
(Y)STOP VALVE
(Y)BALL VALVE
LOCATION
K-3-1-1
L-7-2
G-1-4
K-4-1-1
K-5-3-3
K-4-1-1
K-4-1-1
K-4-1-1
K-4-1-1
K-3-4-3
L-6-1-1
K-3-1-1
L-12-3-2
K-3-1-1
L-12-3-2
K-3-1-1
K-4-1-1
N-2-1-2
L-12-3-2
K-3-1-1
N-8-2-2
K-3-1-1
L-12-3-2
N-8-2-2
B-2-5-2
L-12-3-2
L-12-3-2
K-3-1-1
K-4-1-1
B-2-3
K-3-1-1
E-2-1
N-2-5-2, M-5-1-3
B-2-3
B-2-3
B-2-3
N-7-1
K-5-3-3
I-1-2
K-4-1-1
K-5-3-3
K-5-3-3
L-4-2-2
K-4-3-3
K-4-3-3
K-4-3-3
K-4-3-3
N-2-3-2
VENDOR PART NO
EWS25-5
1072418-1(PG41072015-1
USK30 DDTE
AP3125K(R1)
AP3124K(R2)
AP3242
AP3222K(R3)
TH-K12AB-1.7A
PG4-0162-000
1072416-1
1072281-1
KML50-2C-A
1072292-1
1074583-1
1004783
FR-20
4119945(PA4-2025
PA4-0978-000
PA4-0977-000
PA4-0979-000
1069144-3(PA4-20
SCL-1(SC1)
A3PJ-703
4119389
PA4-1537-000
FU715BC
FFH-1EV
E8BW-10C
MS-61L-VT
RS-8527
1072011-3
SM65L-VRL
1072766-1
A3PJ5736-24E(G/G
A3PJ5703-24E(G)
A3PJ5706-24E(O)
PA4-2153-000
EWS-300-24
1072304-1(PA4-20
P-AN0501-24-3
AD 6052(T1)
14748 CAP,300VA
UA-HZ12
A68ADN
10-4E1-PLL-DC24V
110-4E1-J42-PLL DC24V
PSSP-M19A
PSSP-M6A
32(1 1/4)
1
1
1
1
1
5
5
5
5
3
2
6
8
3
2
3
1
3
2
4
4
4
3
1
1
2
2
4
6
4
1
2
2
2
2
1
5
5
3
2
1
3
1
1
1
1
3
2
1
1
1
1
1
LOC
VENDOR
A35
A33
A36
C33
C34
C33
C33
C33
C33
C33
A35
A35
A94
A35
A94
A35
C33
W15
A94
A35
B36
A35
A94
B36
R21
A94
A94
A35
W15
C33
A35
A35,W15
B15
B33
W24
C43
R21
R21
R21
B61
W24
C34
B103
C33
C34
C33
C34
A36
A33
A33
A33
A33
B43
"
SANKYO
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
No
Item no
1782 4142V-026
1783 4142V-029
1784 4142V-032
1785 4142V-033
1786 4142V-034
1787 4142V-036
1788 4142V-045
1789 4142V-047
1790 4142W-001
1791 4142W-002
1792 4143B-006
1793 4143B-042
1794 4143B-043
1795 4143B-044
1796 4143B-046
1797 4143B-048
1798 4143C-004
1799 4143C-005
1800 4143C-011
1801 4143C-011
1802 4143C-013
1803 4143C-015
1804 4143F-001
1805 4143G-002
1806 4143G-010
1807 4143I-001
1808 4143M-006
1809 4143M-007
1810 4143M-011
1811 4143M-012
1812 4143P-008
1813 4143P-017
1814 4143R-005
1815 4143R-011
1816 4143S-048
1817 4143S-049
1818 4143S-050
1819 4143V-018
1820 4143V-018
1821 4144B-008
1822 4144B-012
1823 4144B-015
1824 4144B-016
1825 4144B-017
1826 4144B-018
1827 4144B-019
1828 4144B-021
1829 4144B-022
1830 4144C-001
1831 4144C-002
1832 4144C-005
1833 4144C-007
1834 4144C-008
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
DESCRIPTION
(Y)VALVE FLOW CONTRO
(Y)AIR VALVE
(Y)SAME P/N 4142V-03
(Y)VALVE
(Y)(C)VALVE(4996V-28
(Y)(C)VALVE(4996V-28
(Y)SOLENOID VALVE
(Y)NON-RETURN VALVE
(X)WELDMENT GUIDE CA
(Y)HALOGEN LAMP HEAT
(Y)HF,BOE BATH(PTFE)
(Y)SOLID SLEEV BEARING
(Y)SOLID SLEEV BEARI
(Y)SOLID SLEEV BEARI
(Y)N2 BUBBLER
(Y)S/D BELT
(Y)AIR CYLINDER
(Y)AIR CYLINDER
(R)Q'TZ ROBOT CHUCK
(R)Q'TZ ROBOT CHUCK
(Y)
ROBOT CHUCK(PEEK)
S/D HEAP FILTER
(Y)WAFER GUIDE (S/D)
GEAR HEAD
(Y)IONIZER
(Y)MOTOR CONTROLLER
(Y)S/D MOTOR
(Y)REVERSIBLE MOTOR
(Y)REVERSIBLE MOTOR
(Y)CHECK VALVE
(Y)WAFER HOLDING PIP
(Y)ROBOT CHUCK SPEEK
(Y)MINI POWER RELAY(
LEVEL SENSOR
LEVEL SENSOR
(Y)FIRE SWITCH
(Y)SOLENOIDE VALVE
(Y)SOLENOIDE VALVE
(Y)BREAK PACK
(Y)HF BOE BATH
(Y)TIMING BELT
(Y)TIMING BELT
(Y)TIMING BELT
(Y)TIMING BELT
(Y)TIMING BELT
(Y)TIMING BELT
(Y)TIMING BELT
(Y)Q'TZ ROBOT CHUCK(
(R)Q'TZ ROBOT CHUCK(
(Y)TEMP.CONTROLLER
(Y)TEMP.CONTROLLER
(C)TEMP.CONTROLLER
LOCATION
VENDOR PART NO
N-8-2-2
K-4-3-3
N-2-3-2
4120204
AV-7,8,9
15(1/2)
TS15(1/2)
AMD53-25US-22
AMD53-25US-22-Y
BMF6-50-1
A-058122
1072303-1(PA-202
01RZ 208-2125
107O97
AR1715-LD
ARF1720LD
R-ARF0910
F7-01E
395L9
MDA20 100-140W
TDA6 20
106923-A
106923-A
K-3-4-3
K-4-3-3
N-8-2-2
H-9-3
L-12-3-2
L-12-3-2
L-12-3-2
I-4-2
K-2-2, D-12-3
N-2-5-1
I-1-2
I-1-2
I-1-2
D-10-1
I-1-1, H-10-1
K-4-4-1
K-4-4-1
H-5-3
K-7-2
N-2-5-1
K-4-4-1
K-4-4-1
L-6-2-1
L-3-2-2
IL 600LP
106956-A
4GN25K
9375010
SC3000
MAL 6133A4P 5.5KW
ORK1GK-A3
3RK15GN-AM
FTF-1/2V
F7-03E
106923-8
MY2N AC200V
MLPS-11110
MLPS-11111
VV5F3-50-024-02
VV5F3-50-024-02
SBR501
H-9-3
I-1-3
I-1-2
L-5-1-1
L-5-1-1
S5M-20MM-2800MM
S5M-20MM-2300MM
270XL025U
114XL025U
T5-10-88
325P5M10
440P5M10
MHP00070
MHP00071
STC-40FP11-8
PEX-F400
E5C3-WR20K
LOC
2
B36
1
A33
1
B43
1
B43
2
R31
2
R31
1
C33
1
A33
3
B36
3
C46
1
Y13
4
A94
6
A94
2
A94
1
B91
2
B74
2
C52
1
W15
13
B95
1
B95
1
B93
9
Y13
1
Y15
8 B104,Z19,Y14
3
P15
1
C52
2
Y26
2
Y25
2
P13
2
P12
4
C52
3
A94,Y13
3
C53,Z19
4
W15
1
C52
1
C52
6
C42
5
B81
3
B81
2
P14
1
Y13
4
B74
4
B74
3
B74
3
B74
3
B74
5
B74
5
B74
5
B93
2
B93
1
C53
1
C53
1
R21
VENDOR
"
"
"
"
"
"
"
"
"
"
KAIJO
KAIJO
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
KAIJO
"
"
"
"
"
"
"
"
"
"
SUGAI
"
"
"
"
"
"
"
"
"
"
"
"
"
No
Item no
1835
1836
1837
1838
1839
1840
1841
1842
1843
1844
1845
1846
1847
1848
1849
1850
1851
1852
1853
1854
1855
1856
1857
1858
1859
1860
1861
1862
1863
1864
1865
1866
1867
1868
1869
1870
1871
1872
1873
1874
1875
1876
1877
1878
1879
1880
1881
1882
1883
1884
1885
1886
1887
4144C-011
4144C-022
4144G-006
4144G-007
4144L-001
4144M-001
4144M-002
4144P-013
4144R-011
4144R-012
4144S-003
4144S-004
4144S-019
4144V-010
4144V-013
4144V-014
4146C-001
4146C-002
4146F-002
4146F-003
4146P-001
4146T-002
3201B-032
3201B-042
3201B-108
3201B-111
3201B-112
3201B-124
3211A-003
3211B-001
3211B-002
3211B-002
3211B-005
3211B-006
3211B-007
3211B-008
3211B-010
3211B-013
3211B-014
3211B-016
3211B-017
3211B-018
3211B-020
3211B-021
3211B-031
3211B-032
3211B-033
3211B-034
3211B-035
3211B-036
3211B-051
3211B-052
3211B-054
DESCRIPTION
WET STATION
(Y)AIR CYLINDER
WET STATION
(Y)COOLING COIL
WET STATION
(Y)FR BATH GUIDE
WET STATION
(Y)QDR BATH BUBBLE G
WET STATION
(Y)LAMP
WET STATION
AC SERVO MOTOR
WET STATION
R88M-U20030L-BS1
WET STATION
(Y)PUNCHING PLATE
(C)REMOTE TERMINAL
WET STATION
WET STATION
REMOTE TERMINAL
WET STATION
PHOTO SENSOR
WET STATION
(C)SENSOR AMP
WET STATION
PHOTO SENSOR
WET STATION
(Y)VALVE
WET STATION
(Y)SOLENOID VALVE
WET STATION
(Y)SOLENOID VALVE
WET STATION
(Y)VACUUM PRESSURECO
WET STATION
(Y)OUTLET PRESSURECO
WET STATION
(Y)LIQUID FILTER ELE
WET STATION
(Y)LIQUID FILTER ELE
WET STATION
(Y)VACUUM PUMP
WET STATION
(Y)CONTROL THERMOMET
WET STATION
(Y)5"OUTPUT CONTROL
WET STATION
(Y)5"PCB FRONT PANEL
WET STATION
5"BELLOWS ASSY SST
WET STATION
5"BRACKET X-FER PLAT
WET STATION
5"BRACKET X-FER PLAT
WET STATION
5"BEARING
GOLD EVAPORATOR (X) MOTOR DRIVEN RIGHT ANGLE
GOLD EVAPORATOR (X) PCB LONGTUDNAL FOCUS
GOLD EVAPORATOR (X) REPLACEMENT P.C.B
GOLD EVAPORATOR REPLACEMENT P.C.
GOLD EVAPORATOR (X) PCB E/GUN CONTROL
GOLD EVAPORATOR (X) P.C ASSY BOARD ASS'Y
GOLD EVAPORATOR (X) PCB REGULATOR
GOLD EVAPORATOR (X) ASS'Y PCB TG & PC OPTION
GOLD EVAPORATOR (X) PCB TRANSDUCTOR AMP
GOLD EVAPORATOR (X) REGULATOR PCB
GOLD EVAPORATOR (X) POTS HV CONTROL PCB
GOLD EVAPORATOR (X) POTS LAT SWEEP PCB
GOLD EVAPORATOR (X) CHA HV PANEL PCB
GOLD EVAPORATOR (X) POWER PANEL ASSY PCB
GOLD EVAPORATOR (X) POTS LONG SWEEP CONTRO PC
GOLD EVAPORATOR (X) POTS GUN CONTROL PCB
GOLD EVAPORATOR (X) CIRCUIT BREAKER (15A 250V
GOLD EVAPORATOR (X) IRCUIT BREAKER (10A 250V)
GOLD EVAPORATOR (X) CIRCUIT BREAKER 5A 250V
GOLD EVAPORATOR (X) CIRCUIT BREAKER 3A 250V
GOLD EVAPORATOR (X) MOUNTING BAR
GOLD EVAPORATOR (X) CIRCUIT BEAKER (DIFF PUMP
GOLD EVAPORATOR (X) BEARING FOR PLANEAR
GOLD EVAPORATOR (X) BEARING RETAINING SNAP RI
GOLD EVAPORATOR (X) BEARING INNER RACE OFFSET
LOCATION
N-7-2-3
I-2-2
B-4-3-3
H-1-1
I-3-3
B-2-3
B-2-3
M-6-2-4
M-6-2-4
N-2-5-1
J-5-2
L-5-1-1
L-5-1-1
K-7-3-2
K-5-1-4
H-9-2
J-2-2-1
K-7-3-2
L-6-1-3
L-11-3-3
C-4-1-4, M-1-3-2
M-1-3-2
M-1-3-2
M-1-3-2
M-1-3-2
C-4-1-4, M-1-3-2
C-4-1-4, M-1-3-2
C-4-1-4
M-1-3-2
C-4-1-4
M-1-3-2
M-1-3-2
M-1-3-2
G-2-6-1
G-2-6-1
G-2-6-1, M-1-3-2
M-1-3-2
M-1-3-2
M-6-4-1
M-6-4-1
VENDOR PART NO
MGQL50-75-Z73
Z-AQ0590-101-3
6H206AGB
6H206AGA
1Q 200V 1.5KW
R88M-U10030L-G11BJ
RK-10P004
G71
G72C-VID16
FD-P40
PS2-61
FD-P40
AV-350-21V5D
VQ1301Y-5
VVQ1000-10A-1
KD41
KJ15-634
AB04F00023H1
CS09YF
VP-SVJ-A-310A
EB3A-27303
00-666291-00
00-680749-00
953-0118
00-674488-00
00-674668-00
21-109605-00
FT58-026
0407-3870-0
SN-2-5-K
SN-2-5-K
0408-0840-0
0407-3980-0
0305-7684-0
6101-003
0307-1300-2
C9772
C9788
C9780
C9768
C9776
C9784
C9792
6157-1571
6157-8700
6157-1574-0
6157-1576
0204-0312-0
6157-7199-0
VBDD375875281B
N5100-37H
IR68
2
1
1
1
7
1
1
1
1
2
3
2
2
2
5
5
1
1
5
10
2
1
1
1
3
1
1
20
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
10
3
3
1
50
10
2
LOC
VENDOR
R52
B94
B94
B94
C44
P53
P53
B94
R11
R11
R63
R63
W15
C72
C53
C53
C45
C45
B55
B55
C45,Y12
C47
U11
U11
U11
U11
U11
U11
AA61
T52
T52
AA61
T52
T52
T52
T52
T43
T52
T43
T52
T52
T52
T52
T52
AA61
AA61
T52
T52
AA61
T52
AA61
AA61
AA61
"
"
"
"
"
"
"
"
"
"
"
SUGAI
"
"
"
"
MITSUBISHI
"
"
"
"
"
"
"
"
"
"
"
CHA
CHA
CHA
CHA
CHA
CHA
CHA
CHA
CHA
CHA
"
CHA
CHA
CHA
CHA
CHA
"
"
CHA
CHA
"
CHA
"
"
"
No
Item no
1888
1889
1890
1891
1892
1893
1894
1895
1896
1897
1898
1899
1900
1901
1902
1903
1904
1905
1906
1907
1908
1909
1910
1911
1912
1913
1914
1915
1916
1917
1918
1919
1920
1921
1922
1923
1924
1925
1926
1927
1928
1929
1930
1931
1932
1933
1934
1935
1936
1937
1938
1939
1940
3211B-055
3211B-056
3211B-058
3211B-059
3211B-060
3211B-064
3211B-065
3211B-068
3211B-069
3211B-070
3211B-073
3211C-002
3211C-005
3211C-006
3211C-007
3211C-008
3211C-009
3211C-010
3211C-012
3211C-013
3211C-014
3211C-016
3211C-018
3211C-020
3211C-021
3211C-022
3211C-022
3211C-024
3211C-025
3211C-030
3211C-032
3211C-034
3211C-034
3211C-039
3211C-046
3211C-050
3211C-052
3211D-002
3211D-005
3211D-006
3211D-007
3211D-008
3211D-009
3211D-011
3211D-012
3211D-018
3211D-019
3211D-021
3211D-022
3211D-024
3211D-025
3211D-028
3211D-035
DESCRIPTION
GOLD EVAPORATOR (X) BEARING NEEDLE OFFSET DRI

GOLD EVAPORATOR (X) BEARING PLANETARY HUB ASSY
GOLD EVAPORATOR (X) BEARING HOUSING
GOLD EVAPORATOR (X) BEARING RETAINER
GOLD EVAPORATOR (X) BEARING SHIM
GOLD EVAPORATOR (X) TEFLON BUSHING
GOLD EVAPORATOR (X) BESTIBULE BLOCK
GOLD EVAPORATOR (X) MOUNTING BAR
GOLD EVAPORATOR (X) T.R (2N3055)
GOLD EVAPORATOR (X) 120XL037 BROWNING BELT
GOLD EVAPORATOR (X) MINIATURE LAMP BULBS
GOLD EVAPORATOR (X) COMPLETE FILL SYSTEMS
GOLD EVAPORATOR (X) CLOCK CARD
GOLD EVAPORATOR (X) END ZONE JPRE-AMP CARD
GOLD EVAPORATOR (X) END ZONE PRE-AMP CARD
GOLD EVAPORATOR (X) POWER SUPPLY CARD
GOLD EVAPORATOR (X) OP-AM CARD
GOLD EVAPORATOR (X) ZERO CROSSOVER FIRING CAR
GOLD EVAPORATOR (X) GAUGE CABLE ASSY
GOLD EVAPORATOR (X) THERMO GAUGE CABLE ASSY
GOLD EVAPORATOR (X) PCB CPMMECTOR
GOLD EVAPORATOR (X) COAXLAL CABLE ASSY
GOLD EVAPORATOR (X) CAPACITOR, 0.005 MFD,25K
GOLD EVAPORATOR (X) FILAMENT CLAMP
GOLD EVAPORATOR (X) COIL ASSY
GOLD EVAPORATOR (X) R.H BLOCK CATHODE
GOLD EVAPORATOR (X) R.H BLOCK CATHODE
GOLD EVAPORATOR (X) CRYSTAL LABER
GOLD EVAPORATOR (X) U-CLIPS HOLDS DOMES TOSUP
GOLD EVAPORATOR (X) CAPACITOR (CS4107)
GOLD EVAPORATOR (X) BOREMAN CLIP LEFT
GOLD EVAPORATOR (X) TEMP CONTROLLER
GOLD EVAPORATOR (X) TEMP CONTROLLER
GOLD EVAPORATOR (X) SPACE CRUCIBLE & COVER
GOLD EVAPORATOR (X) TEMPERATURE CONTROLLER
GOLD EVAPORATOR (X) RETAINING RING (SPRING CL
GOLD EVAPORATOR (X) CRUCIBLE CBAIN
GOLD EVAPORATOR (X) SCR (IN2974)
GOLD EVAPORATOR (X) DIODE BRIDGE
GOLD EVAPORATOR (X) DIODE (IN 4722)
GOLD EVAPORATOR (X) DIODE (IN750)
GOLD EVAPORATOR (X) DIODE
GOLD EVAPORATOR (X) U-CLIP
GOLD EVAPORATOR OFFSET DRIVE
GOLD EVAPORATOR (X) DETENT SCREWS OFFSET DRIV
GOLD EVAPORATOR (X) SUBSTRATE DOME 5"
GOLD EVAPORATOR (X) DIFFUER COPPER
LOCATION
M-6-4-1
M-6-4-1
M-6-4-1
M-6-4-1
J-3-3
D-1-4-1
C-4-1-4
D-1-4-1
C-4-1-4
C-4-1-4
D-1-4-1
D-1-4-1
D-1-5-2
VENDOR PART NO
B98
VB-DD-1062
6311-6
6311-17
6311-9
6150
113781-001
0204-0322-0
6823-0550-0
SR10-353250
LC-2/6175
06-262-12
06-262-09
06-262-08
06-262-05
06-262-06
06-262-42
4987-004
260040-100
KEELCC 06-099
007-044
6505-9381-0
0303-9382-0
0312-6923-0
0303-9372-0
0303-9372-0
6475
0307-7293-0
2L
523C-40110-030
523C-40110-030
598A-0110-310-2
5108-106H
M-5-2-2
M-5-2-2
M-1-3-2
6812-9742-0
6842-8193-0
6814-7220-0
6814-7400-0
6847-0062-0
6810-7500-0
6815-3411-0
6814-7411-0
SR10-1N750A
SR10-1N5341
6709
EF75-024
ADB-50785
M-5-2-2
M-5-2-2
ASP-2
SR10-1N5340
M-5-2-2
M-5-2-2
M-5-2-2
M-5-2-2
M-5-2-2
M-5-2-2
M-5-2-2
M-5-2-2
2
3
2
1
2
4
2
4
1
2
30
1
2
2
2
2
2
2
1
1
5
2
6
9
1
1
1
1
5
2
10
1
1
2
1
10
1
5
1
1
1
1
1
1
1
1
1
100
1
8
3
2
1
LOC
VENDOR
AA61
AA61
AA61
AA61
AA61
AA61
AA61
AA61
AA61
AA61
AA61
T43
T43
T43
T43
T43
T43
T43
AA61
AA61
AA61
AA61
AA61
AA61
AA61
AA61
AA62
AA61
AA61
AA61
AA61
AA61
AA61
AA61
AA61
AA61
AA61
AA61
AA61
AA61
AA61
AA61
AA61
AA61
AA61
AA61
AA61
AA61
AA61
T52
AA61
AA61
AA61
"
"
"
"
"
"
"
"
"
"
"
CHA
CHA
CHA
CHA
CHA
CHA
CHA
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
CHA
CHA
"
"
"
No
Item no
1941
1942
1943
1944
1945
1946
1947
1948
1949
1950
1951
1952
1953
1954
1955
1956
1957
1958
1959
1960
1961
1962
1963
1964
1965
1966
1967
1968
1969
1970
1971
1972
1973
1974
1975
1976
1977
1978
1979
1980
1981
1982
1983
1984
1985
1986
1987
1988
1989
1990
1991
1992
1993
3211D-052
3211E-001
3211E-003
3211E-003
3211E-005
3211E-006
3211F-001
3211F-001
3211F-006
3211F-017
3211F-018
3211F-019
3211F-020
3211F-025
3211F-026
3211F-042
3211F-045
3211F-045
3211F-046
3211F-051
3211F-052
3211F-052
3211G-002
3211G-003
3211G-004
3211G-011
3211H-001
3211H-003
3211H-003
3211H-004
3211H-006
3211H-007
3211H-011
3211H-016
3211I-002
3211I-003
3211I-006
3211I-007
3211I-008
3211I-009
3211I-010
3211I-011
3211J-001
3211L-001
3211L-003
3211M-001
3211M-005
3211M-021
3211M-022
3211N-001
3211O-002
3211O-003
3211O-004
DESCRIPTION
GOLD EVAPORATOR (X) DOME HANGER INDIVIDUAL LO

GOLD EVAPORATOR (X) ASS'Y ELECTROMENTER
GOLD EVAPORATOR (X) EXTENSION, POLE
GOLD EVAPORATOR (X) EXTENSION, POLE
GOLD EVAPORATOR (X) SPARE EMITTER ASSY
GOLD EVAPORATOR (X) EXTENDED THUMB NUTS EMITT
GOLD EVAPORATOR (X) SIEVE TRAP HEATER CARTRIDE
GOLD EVAPORATOR (X) SIEVE TRAP HEATER CARTRIDE
GOLD EVAPORATOR
GOLD EVAPORATOR (X) BUIB 6V 0.20A
GOLD EVAPORATOR (X) 12T HI-SPEED FUSE
GOLD EVAPORATOR (X) FUSE KIT
GOLD EVAPORATOR (X) FUSE 100A/250VAC
GOLD EVAPORATOR
GOLD EVAPORATOR (X) LEAD FILAMENT
GOLD EVAPORATOR (X) LEAD FILAMENT
GOLD EVAPORATOR (X) SOURCE FILAMENTS
GOLD EVAPORATOR (X) FEEDTHROUGH MULTIPURPOSE
GOLD EVAPORATOR (X) FEEDTHROUGH SHIELD
GOLD EVAPORATOR (X) FEEDTHROUGH SHIELD
GOLD EVAPORATOR (X) OIL CASEGEGASKET
GOLD EVAPORATOR (X) GATE
GOLD EVAPORATOR (X) GATE
GOLD EVAPORATOR (X) COMPLETE GASKET
GOLD EVAPORATOR (X) CERAMIC STANDOFF
GOLD EVAPORATOR (X) LN2 HEATER CARTRIDGE
GOLD EVAPORATOR (X) LN2 HEATER CARTRIDGE
GOLD EVAPORATOR (X) BAKE OUT HEATER (100V,100
GOLD EVAPORATOR (X) SENSOR HOLDER
GOLD EVAPORATOR (X) STAND/DUAL XTL HOLDER
GOLD EVAPORATOR (X) HYDRAULIC FLUID GALLON
GOLD EVAPORATOR (X) Q'TZ TUBE HOLODER
GOLD EVAPORATOR (X) 8 PIN INSTRUMENT
GOLD EVAPORATOR (X) INDICATOR LIGHT (120)RED
GOLD EVAPORATOR (X) INSULATOR, FLANGE
GOLD EVAPORATOR (X) INSTALLATION FOR CLAROSTA
GOLD EVAPORATOR (X) INSUATOR, LOCATINS
GOLD EVAPORATOR (X) INSULATOR H. V SPACING
GOLD EVAPORATOR (X) INSICON WANDHELD CONT'R
GOLD EVAPORATOR (X) AMP IC
GOLD EVAPORATOR (X) FULL LENGTH BELL JAR LINE
GOLD EVAPORATOR (X) LAT/LONG SWEEP P.C.B ASSY
GOLD EVAPORATOR (X) LATCH ASS'Y
GOLD EVAPORATOR (X) MOTOR CONTROL
GOLD EVAPORATOR (X) ROTATOR MOTER
GOLD EVAPORATOR (X) METER THERMOGAUGE
GOLD EVAPORATOR (X) METER ION CURRENT
GOLD EVAPORATOR (X) HEX NUT
GOLD EVAPORATOR (X)O-RING(3997O-206)
GOLD EVAPORATOR (X) O-RING
LOCATION
D-1-5-2
M-5-2-2
M-5-2-2
M-5-2-2
M-5-2-2
M-5-2-2
M-5-2-2
M-5-2-2
VENDOR PART NO
5935-004
0412-1471-0
0412-1471-0
7638-3
SC373
SC373
M-5-2-2
4490-100
M-5-2-2
4491-100
M-5-2-2
4492-100
G-2-6-1
17-7011
M-1-3-2
G-2-6-1, M-5-2-2
M-5-2-2
M-5-2-2
0303-3292-0
M-5-2-2
0303-3292-0
M-5-2-2
0303-9351-0
M-5-2-2
FT58-003
M-5-2-2
5037
M-5-2-2
5037
N-5-2
41-1496
M-5-2-2
5288-4
5212-7
C-3-1
5-V-50
L-11-3-2
2608
02X2
02X2
M-5-2-2
SC-373
6411-2
L-11-3-2
007-083
C-2-6
28051
L-11-4-4
6537-3
FT58-008
M-5-2-2
900030-005
L-11-3-2
0303-3131-0
L-11-3-2
6990-0017-0
L-11-3-2
0303-6721-0
G-2-5-2
0418-4631-0
1PN-013-094
SQ-10A
D-2-1-1
EF75-047SFL
G-2-6-1
0409-4560-0
L-11-3-2
5810-10
L-11-4-4
EF-75-018
H-1-1
L-11-3-2
6092-004
L-11-3-2
4973-001
L-11-3-2
B-32NC
2-278
6227-19
6230-6
6
1
5
4
1
2
1
5
1
10
8
5
1
1
5
1
2
2
4
3
2
3
1
2
1
1
10
5
5
1
2
2
1
3
1
2
50
1
20
7
1
1
1
3
3
1
1
1
1
10
10
10
1
LOC
VENDOR
AA61
AA61
AA61
AA61
AA61
AA61
AA61
AA61
AA61
AA61
AA61
AA61
T52
T52
T52
AA61
AA61
AA61
AA61
AA61
AA61
AA61
AA63
AA61
AA63
AA63
AA62
AA61
AA62
AA61
AA61
AA62
AA63
AA62
AA61
AA61
AA62
AA62
AA62
AA62
AA62
AA61
AA63
T52
AA62
AA62
P41
AA62
AA62
AA62
AA62
AA62
AA61
"
"
"
"
"
"
"
"
"
"
"
"
CHA
CHA
CHA
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
CHA
"
"
"
"
"
"
"
"
"
No
Item no
1994
1995
1996
1997
1998
1999
2000
2001
2002
2003
2004
2005
2006
2007
2008
2009
2010
2011
2012
2013
2014
2015
2016
2017
2018
2019
2020
2021
2022
2023
2024
2025
2026
2027
2028
2029
2030
2031
2032
2033
2034
2035
2036
2037
2038
2039
2040
2041
2042
2043
2044
2045
2046
3211O-005
3211O-006
3211O-007
3211O-007
3211O-008
3211O-012
3211O-013
3211O-014
3211P-002
3211P-002
3211P-002
3211P-007
3211P-008
3211P-010
3211R-002
3211R-003
3211R-008
3211S-002
3211S-002
3211S-004
3211S-005
3211S-021
3211S-021
3211S-022
3211S-023
3211S-024
3211S-025
3211S-026
3211S-027
3211S-029
3211S-030
3211S-041
3211S-042
3211S-045
3211S-046
3211S-047
3211S-049
3211S-063
3211S-064
3211S-066
3211S-067
3211S-067
3211S-071
3211S-075
3211S-081
3211T-001
3211T-002
3211T-003
3211T-011
3211T-012
3211T-013
3211T-016
3211T-042
DESCRIPTION

GOLD EVAPORATOR (X) O-RING VIEWPORT
GOLD EVAPORATOR (X) FRONT DOOR O-RING
GOLD EVAPORATOR (X) BLANK JOFF PLUG
GOLD EVAPORATOR (X) BALL PLUNGER
GOLD EVAPORATOR (X) RS-10 POWER SUPPLY KIT
GOLD EVAPORATOR (X) POWER SUPPLY
GOLD EVAPORATOR
GOLD EVAPORATOR
GOLD EVAPORATOR (X) RELAY 24V 700 OHM 4PDT 2A
GOLD EVAPORATOR (X) LN2 SENSOR SET
GOLD EVAPORATOR (X) LN2 SENSOR SET
GOLD EVAPORATOR (X) INFICON IC-6000 SOURCE SE
GOLD EVAPORATOR (X) STAND CRYSTAL SENSOR BODY
GOLD EVAPORATOR (X) PRESSURE SWITCH
GOLD EVAPORATOR (X) PRESSURE SWITCH
GOLD EVAPORATOR (X) HOIST UPPEB & LOWER LIMIT
GOLD EVAPORATOR (X) FLUID FLOW SWITCH
GOLD EVAPORATOR (X) SWITCH POWER LIGHTED BUTT
GOLD EVAPORATOR (X) SWITCH FILAMENT
GOLD EVAPORATOR (X) SWITCH AUTO LIGHTED BUTTO
GOLD EVAPORATOR (X) SWITCH DEGAS LIGHTED BUTT
GOLD EVAPORATOR (X) 10(A) SWITCH
GOLD EVAPORATOR (X) 15(A) SWITCH
GOLD EVAPORATOR (X) CAP SCREW (3/8-16+5/8)
GOLD EVAPORATOR (X) CAP SCREW (1/4-20*3/4 LON
GOLD EVAPORATOR (X) VENTED CAP SCREW (8-32*3/
GOLD EVAPORATOR (X) VENT CAP SCREW (1/4+20/4)
GOLD EVAPORATOR (X) SCREW 6-32 NC 2Ax1/
GOLD EVAPORATOR (X) ALLON HOAD SCREW 3/8
GOLD EVAPORATOR (X) SLEEVE
GOLD EVAPORATOR (X) 8 PIN SOCKET
GOLD EVAPORATOR (X) MONO BEAM SHIELD
GOLD EVAPORATOR (X) SCR DEVICE FLAG TYPE
GOLD EVAPORATOR (X) SCR DEVICE FLAG TYPE
GOLD EVAPORATOR SCR (IN2973)
GOLD EVAPORATOR (X) ELECTRON BEAM GUN SHIELD
GOLD EVAPORATOR (X) CONTACT POINT SCREW
GOLD EVAPORATOR (X) TRANSDCTOR AMPLIFIER
GOLD EVAPORATOR (X) TRANSISTOR DTS-423
GOLD EVAPORATOR (X) TEMPERATIURE
GOLD EVAPORATOR (X) DOUBLE T/C
GOLD EVAPORATOR (X) SINGLE T/C
GOLD EVAPORATOR (X) HIGH VOLTAGE 12KV
GOLD EVAPORATOR (X) TRANSDUCTOR
LOCATION
VENDOR PART NO
2627-15
6230-4
6227-10
6227-10
6230-16
6230-21
C-2-5
L-11-3-2
L-11-3-2
L-11-3-2
L-11-3-2
L-11-3-2
6227-8
FT58-041
FT58-041
FT58-041
ADB-50225
SR10-8851
L-11-3-2
2024-102
L-10-5-3
S-1
L-10-5-3
S-1
G-2-6-1
013-0420
B-3-4-4, L-11-4-4 007-088
L-10-5-3
J40-218
L-10-5-3
J40-218
L-10-5-3
BA-2RV-A2
L-10-2
Q-1/3/A
M-1-3-2
0-04-005783
0-04-005786
G-2-6-1
0-04-005808
L-10-5-3
0-04-005784
L-10-5-3
SR10-S10DD-10A
L-10-5-3
SR10-S10DD-15A
L-10-5-3
L-10-5-3
L-10-5-3
L-10-5-3
L-10-5-3
1321-1252-0
L-10-5-3
6-32X3/8
L-10-5-3
5805-7
L-10-5-3
7107
6998
K-4-3-1
900020-001
K-4-3-1
900020-001
L-10-5-3
6821-8471-0
5896
L-10-5-3
6363-5
G-2-5-2
302-1304
G-2-6-1
6840-9423-0
G-2-5-5
5980110-310-200
G-2-5-2
01-415-175
G-2-5-2
01-415-194
G-2-5-2
FT58-009
G-2-6-1
G-2-6-1
6823-9040-0
10
5
6
10
10
5
10
5
5
4
5
10
2
1
4
1
1
2
2
1
1
1
2
2
2
2
1
2
3
1
1
6
10
10
10
20
30
10
4
1
1
1
1
1
50
1
11
1
2
1
2
1
3
LOC
VENDOR
AA62
AA62
AA62
AA62
AA62
AA62
AA62
AA62
AA62
AA62
AA62
AA62
AA62
AA61
AA62
AA61
AA61
AA62
AA62
T52
AA62
AA62
AA62
AA62
AA62
T52
T52
T52
AA62
AA62
AA62
AA62
AA62
AA62
AA62
AA62
AA62
AA62
AA62
AA63
AA62
AA62
AA62
AA62
AA62
AA62
T52
AA62
AA62
AA62
AA62
T52
T52
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
CHA
"
"
"
"
"
CHA
CHA
CHA
"
"
"
"
"
"
"
"
"
"
"
"
"
"
CHA
"
"
"
CHA
"
"
"
"
CHA
CHA
No
Item no
2047
2048
2049
2050
2051
2052
2053
2054
2055
2056
2057
2058
2059
2060
2061
2062
2063
2064
2065
2066
2067
2068
2069
2070
2071
2072
2073
2074
2075
2076
2077
2078
2079
2080
2081
2082
2083
2084
2085
2086
2087
2088
2089
2090
2091
2092
2093
2094
2095
2096
2097
2098
2099
3211T-043
3211T-044
3211T-045
3211T-046
3211T-047
3211T-048
3211T-050
3211T-051
3211T-052
3211T-053
3211T-054
3211T-055
3211T-056
3211T-057
3211T-059
3211T-060
3211T-061
3211T-062
3211T-065
3211T-066
3211T-101
3211V-001
3211V-003
3211V-004
3211V-005
3211V-006
3212B-001
3212C-004
3212C-005
3212C-006
3221B-001
3221B-002
3221B-005
3221B-006
3221B-009
3221B-010
3221B-011
3221B-012
3221B-013
3221B-013
3221B-015
3221B-016
3221B-017
3221B-019
3221B-020
3221B-022
3221B-023
3221B-025
3221B-027
3221B-028
3221B-030
3221B-031
3221B-032
DESCRIPTION

GOLD EVAPORATOR (X) T.R (40373)
GOLD EVAPORATOR (X) TRANSISTOR
GOLD EVAPORATOR (X) TRANS
GOLD EVAPORATOR (X) SOLENOID VALVE 8342B1
GOLD EVAPORATOR (X) CHAMBER VENT VALVE
GOLD EVAPORATOR (X) SOLENOID VALVE
GOLD EVAPORATOR (X) VALVE
GOLD EVAPORATOR
G/A FURNACE
(X) VESTIBULE BLOCK (2/SET)
G/A FURNACE
(X) OP AMP CARD
G/A FURNACE
(X) PREAMP END ZONE CARD TYPE
G/A FURNACE
(X) PRE AMP CENTOR ZONE CARD
B.S GRINDER
(Y)PRINT ASS'Y BOARD
B.S GRINDER
B.S GRINDER
B.S GRINDER
PCB
B.S GRINDER
(Y)PCB
B.S GRINDER
(Y)(C)BALL BEARING
B.S GRINDER
(Y)PCB
B.S GRINDER
(Y)PCB
B.S GRINDER
(Y)PCB
B.S GRINDER
(Y)PCB
B.S GRINDER
(Y)PCB
B.S GRINDER
B.S GRINDER
(Y)PCB
B.S GRINDER
B.S GRINDER
PRINT ASS'Y BOARD
B.S GRINDER
PCB(B)
B.S GRINDER
PCB
B.S GRINDER
PCB
B.S GRINDER
B.S GRINDER
B.S GRINDER
PRINT ASS'Y BOARD
B.S GRINDER
B.S GRINDER
LOCATION
L-10-6-3
G-2-6-1
G-2-6-1
G-2-6-1
G-2-6-1
G-2-6-1
G-2-5-2
G-2-6-1
G-2-6-1
M-1-3-2
G-2-6-1
G-2-6-1
G-2-6-1
G-2-6-1
G-2-6-1
G-2-6-1
G-2-6-1
G-2-6-1
G-2-4-4
C-2-5
G-2-5-2
G-2-5-2
G-2-5-2
J-3-2
D-2-1-3
D-2-1-3
D-2-1-3
L-12-1-2
L-12-1-2
L-12-1-2
L-12-1-2
L-12-1-2
L-12-1-2
J-4-1-3
J-4-1-3
J-4-2-1, D-2-1-3
J-4-2-1
J-4-1-3
J-4-2-1
J-4-1-3
D-2-1-3
D-2-1-3
M-3-4
N-5-2
J-4-1-3
J-4-2-1
L-12-1-2
J-4-1-3
D-2-1-3
D-2-1-3
VENDOR PART NO
6822-9250-0
6823-7030-0
6823-09030-0
6823-0540-0
6820-6970-0
6842-7126-0
6824-4020-0
6822-6460-0
SR10-40373
SR10-2N2646
SR10-2N3741
SR10-2N1671
SR10-2N2925
SR10-2N3906
SR10-2N3904
SR10-2K3620
SR10-2N3055
SR10-2N3494
SR10-2N3441
SR10-2N697
SR10-STT-105
8342B1
8262B-226
83453
113781-001
06-262-06
06-262-09
06-262-08
EAUA003000
EAUA003100
EAUA004000
EAUA004100
EAUA004900
MSSSR830ZZM
EAUA075400
EAUA001700
EAUA001801
EAUA001801
EAUA001901
EAUA002000
EAUA002100
EAUA026000
EAUA002301
EAUA002401
EAUA002900
EAUA082300
EAUA007600
EAUA004800
EAUA002302
EAUA001500
EAUA001600
1
1
2
1
1
1
1
1
2
1
2
1
3
4
2
1
2
2
2
2
1
2
1
1
1
2
2
3
2
1
2
1
1
1
6
1
5
3
6
1
1
1
1
2
1
5
1
1
1
2
1
1
1
LOC
VENDOR
Q11
Q11
T52
T52
T52
T52
Q11
T52
AA62
T52
T52
T52
T52
T52
T52
T52
T52
T52
T52
T52
T52
AA62
AA63
AA62
AA62
AA62
DD42
T11
T11
T11
F74
F74
F74
F74
F74
F74
T11
T11
T15
T15
T11
T15
T11
T11
T11
T15
T33
T11
T15
F74
T11
T11
T11
"
"
CHA
CHA
CHA
CHA
"
CHA
"
CHA
CHA
CHA
CHA
CHA
CHA
CHA
CHA
CHA
CHA
CHA
CHA
"
"
"
"
"
THERMCO
"
"
"
DISCO
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
No
Item no
2100
2101
2102
2103
2104
2105
2106
2107
2108
2109
2110
2111
2112
2113
2114
2115
2116
2117
2118
2119
2120
2121
2122
2123
2124
2125
2126
2127
2128
2129
2130
2131
2132
2133
2134
2135
2136
2137
2138
2139
2140
2141
2142
2143
2144
2145
2146
2147
2148
2149
2150
2151
2152
3221B-033
3221B-034
3221B-035
3221B-036
3221B-037
3221B-039
3221B-041
3221B-049
3221B-052
3221B-054
3221B-059
3221B-061
3221B-061
3221B-068
3221B-069
3221B-072
3221B-076
3221B-077
3221B-078
3221B-080
3221B-081
3221B-083
3221B-086
3221B-093
3221B-096
3221B-097
3221B-098
3221B-100
3221B-101
3221B-102
3221B-103
3221B-104
3221B-105
3221B-106
3221B-107
3221B-108
3221B-109
3221B-112
3221B-113
3221B-114
3221B-115
3221B-116
3221B-117
3221B-122
3221C-004
3221C-014
3221C-023
3221C-024
3221C-029
3221C-030
3221C-035
3221C-063
3221D-009
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
DESCRIPTION
PCB
(Y)DRESSER BOARD
(Y)DRESSER BOARD 5 I
(C)BEARING (3997B-05
(Y)(C)BEARING (3997B
(Y)BRUSH
BRUSH COVER(6")
(Y)ROUND BELT(5)
(Y)WAFER CLEANING BR
(Y)WAFER CLEANING BR
(Y)CHANNEL BRUSH
BUSHING
(C)MINIATURE BALL BE
(Y)PCB
(Y)PCB
(Y)PCB
(Y)BRUSH
(Y)BRUSH
(Y)(C)BALL BEARING
WASHING BRUSH(6")
(Y)REMER BOLT
(X)TIMING BELT
(X)SENSOR BRACKET(4)
(Y)LINEAR BALL BEARI
(Y)BEARING SHAFT
(Y)SENSOR BRACKET
D2 P.M DRIVE BD(A)
(Y)SAME P/N 3221B-00
(Y)BRUSH
(Y)BRUSH
(Y)BRUSH
(Y)BRUSH
(Y)BRUSH
(Y)BRUSH
(Y)MOTOR BRUSH
(Y)OILLESS BUSHING
(C)MINIATURE BALL BEARING
(Y)MINIATURE BALL BEARING
(Y)D1 P.M.C.B-A
(Y)MINI CYLINDER
(Y)COLLAR (2)
(Y)BRUSH COVER(6")
(Y)CUSHION
(Y)COVER
(Y)SPINNER COVER
(Y)SPRING CAP
CYLINDER(SPINNER)
LOCATION
D-2-1-3
D-2-1-3
J-4-1-3
B-4-5-3
J-4-2-1
N-7-3-1
L-12-1-2
N-2-4-2
L-12-1-2
L-12-1-2
L-12-1-2
L-12-1-2
L-12-1-2
L-12-1-2
N-2-4-2
J-4-2-1
J-4-1-3
J-4-1-3
N-7-4-2
N-7-4-2
N-2-4-2
L-12-1-2
L-12-1-2
N-2-4-2
L-12-1-2
N-2-4-2
J-4-2-1
L-12-1-2
N-7-4-2
B-1-4-4
N-7-4-2
N-7-4-2
B-1-4-4
N-3-4-1
N-7-4-2
N-7-4-2
N-2-4-2
N-1-2-1
N-2-4-2
N-2-4-2
J-4-2-1, D-2-1-3
M-7-1-1
L-12-1-2
N-1-2-3
N-7-4-2
C-4-3-1
B-1-4-4
L-12-1-2
C-4-3-1
VENDOR PART NO
EAUA001400
EAUA002303
EAUA092300
MODR060050
EAUA083900
MODV015050
MSSSL1040ZZM
MSSLF1470ZZ
MOGAH 18402
MOGARA19
MOGAL282
MOGALA43
MOGALA43
MOGAR13302
MOGAL097-A
MSLF850ZZ-M
EAUA384881
EAUA685888
EAUA3407988
MOGAH184018
MOGAH184025
MSCF8508ZZM
MOGARA17
MOGAZ223
MOGAL169
MOGALB52
MOGAL119
MOGAL139
MOGAL5201A
EAUA002400
MOGCH057
MOGCH434
MOGCR028
MOGCS183
MOGCT132
MOGCT111
MOGCN506
MOGCR016
MSRF2280ZZ
MSSSRF1030ZZ
MSSSRF1960ZZ
EAUA-002300
MOGAL228
MOGAL058
MOGARA19-A
MOGALA91
MOGAR347
MOGALA03
MOGAL061
MOGCH106-Y
1
1
1
360
2
5
6
4
4
1
2
3
2
2
5
2
1
1
1
3
3
1
4
6
1
2
2
2
2
2
1
2
1
2
2
1
3
8
1
1
4
2
2
4
1
1
2
2
1
1
3
2
3
LOC
VENDOR
T11
T11
T11
F62
T15
F25
F74
E71
F74
F74
E93
F74
F74
F74
F74
E71
T15
T11
T11
F74
F74
E71
F74
F74
BB24
BB24
F74
F74
E71
T14
F74
F74
F72
F74
F74
F72
E82
F74
F74
E71
E71
E71
E71
T15
F73
F74
F24
F74
E31
F72
F74
E31
BB24
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
DISCO
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
No
Item no
2153
2154
2155
2156
2157
2158
2159
2160
2161
2162
2163
2164
2165
2166
2167
2168
2169
2170
2171
2172
2173
2174
2175
2176
2177
2178
2179
2180
2181
2182
2183
2184
2185
2186
2187
2188
2189
2190
2191
2192
2193
2194
2195
2196
2197
2198
2199
2200
2201
2202
2203
2204
2205
3221D-010
3221D-011
3221D-012
3221D-014
3221D-015
3221D-019
3221D-021
3221E-021
3221F-006
3221F-009
3221F-018
3221F-019
3221F-021
3221F-023
3221F-024
3221G-001
3221G-002
3221G-005
3221G-006
3221G-009
3221H-005
3221H-006
3221L-002
3221L-002
3221L-012
3221L-014
3221L-015
3221M-002
3221M-005
3221M-006
3221M-009
3221M-010
3221M-013
3221M-015
3221N-001
3221N-002
3221N-004
3221N-005
3221N-006
3221O-001
3221O-002
3221O-003
3221O-004
3221O-005
3221O-006
3221O-009
3221O-010
3221O-011
3221O-012
3221O-013
3221O-014
3221O-015
3221O-016
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
DESCRIPTION
(Y)MOUNT DISK
(Y)ROTARY ENCODER
(Y)FIRST FILTER B
(Y)FILTER
(Y)FILTER
(Y)FILTER
(Y)BAMBOO FITTING
(Y)FELT(1)
(Y)FELT(2)
CHUCK WITH VACUUM GA
(Y)FRONT SPLASH GAUR
(Y)UNLOADING GUIDE(2
(Y)UNLOADING GUIDE(2
TENSION GAUGE
(Y)SPRING HOLDER
(Y)HOLDER
(Y)LAMP(PUSH BUTTON
(Y)LAMP(PUSH BUTTON
(Y)LEVER(FOR 5", 6")
(Y)LEVER SET
(Y)LEVER MODFA013
DC MOTOR
(Y)STEPPING MOTOR
(X)MAGNET
(Y)REVERSABLE MOTOR
(Y)STEPPING MOTOR
(Y)INDUCTION MOTOR
(Y)STEPPING MOTOR
(Y)LOCK NUT
(X)LOCK NUT
(X)LOCK NUT
(Y)LOCK NUT
LOCK NUT
(X)O-RING
(X)O-RING
(X)O-RING
(X)O-RING
(X)O-RING
(X)O-RING
(X)O-RING
(X)O-RING
(X)O-RING
(X)O-RING
(X)O-RING
(X)SPECIAL O-RING
OIL SEAL
(X)O-RING
LOCATION
B-4-4-2
J-1-1-1
H-10-3
H-10-2
B-4-1-2
L-12-1-2
L-12-1-2
B-4-1-2
I-1-3
N-3-4-1
N-3-4-1
B-4-1-2
B-4-1-2
N-2-4-2
J-2-2-2
J-2-2-2
B-1-5-2
N-2-4-2
N-3-4-1
N-2-4-3
N-2-4-2
N-7-4-2
N-2-4-2
N-2-4-2
N-2-4-2
N-2-4-2
VENDOR PART NO
MAGAZ905-B
MOGAR237
MOGAH17453
MOGCN023
MOGCN035
MOGCN036
MSBF6
MOGAH387
MOGAH388
MOGANA04
MOGAH210
MOGAL28001C
MOGAL280020
MOGAN044
MOGAL060
MOGCR176
AG31-963-24
AG31-963-24
MOGAH365-A
MAGAR901
8479.90-3000
MOGAR205
MOGAZ061
MOGAH192
MOGAL112
MOGAL158
MOGAL114-B
MOGAL038
MOGAZ227-H
MOGAL099
MOGAL057
MOGAZ132
MSC0007AN
MSCO0015AN
MSCO0032AN
MSC00220AN
MSC00015AN
MSC00519AN
MSC00533AN
MSCO0542AN
MSC00549AN
MOGAL175
MOGAL176
MOGAL223
MOGAL121
MSC00052AN
1
1
1
1
1
1
3
1
222
1
1
1
7
2
2
2
1
1
1
1
3
4
10
2
2
1
4
1
2
1
3
1
3
2
3
1
2
2
1
6
1
4
2
8
1
5
1
10
3
2
3
20
1
LOC
VENDOR
BB24
BB24
BB24
BB24
BB24
BB24
F23
P53
I11
F74
F74
F74
F74
F74
F74
F74
X43
E82
E82
F74
F74
E71
F74
F74
E71
E71
E82
P53
P43
BB24
P12
P43
P53
P53
E71
F74
E71
E71
E71
BB24
BB24
BB24
BB24
BB24
BB24
BB24
BB24
BB24
BB24
BB24
BB24
E71
BB24
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
DISCO
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
No
Item no
2206
2207
2208
2209
2210
2211
2212
2213
2214
2215
2216
2217
2218
2219
2220
2221
2222
2223
2224
2225
2226
2227
2228
2229
2230
2231
2232
2233
2234
2235
2236
2237
2238
2239
2240
2241
2242
2243
2244
2245
2246
2247
2248
2249
2250
2251
2252
2253
2254
2255
2256
2257
2258
3221O-017
3221O-018
3221O-019
3221O-020
3221O-021
3221O-023
3221O-024
3221O-025
3221O-026
3221O-027
3221O-028
3221O-029
3221P-002
3221P-008
3221P-009
3221P-010
3221P-011
3221P-012
3221P-016
3221P-017
3221P-019
3221P-021
3221P-022
3221P-023
3221P-024
3221R-001
3221R-005
3221R-006
3221R-041
3221S-001
3221S-002
3221S-006
3221S-008
3221S-009
3221S-010
3221S-013
3221S-017
3221S-020
3221S-022
3221S-024
3221S-026
3221S-027
3221S-029
3221S-033
3221S-035
3221S-036
3221S-036
3221S-039
3221S-045
3221S-046
3221S-047
3221S-048
3221S-054
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
DESCRIPTION
(X)O-RING
(X)O-RING
(X)O-RING
(X)O-RING
(X)O-RING
(X)O-RING
(X)O-RING
(X)O-RING
(X)O-RING
(X)O-RING
(X)O-RING
(X)O-RING
(Y)AIR PORT
(X)PIPING SPARE PART SET
VACUUM PAD
(Y)PLUG
(Y)SLITTING PLATE(FO
(Y)PHOTO SW
(Y)PULLEY
PAD
PAD
(X)BACK PLATE
(Y)PLATE(RUBBER)
(Y)RUBBER PLATE
(Y)RUBBER PLATE
(X)ROTARY JOINT
(Y)RELAY
(Y)RELAY UNIT COOLAN
(Y)GUIDE RAIL
(X)MAGNETIC SWITCH
LEAD SWITCH(S)
(Y)PRESSURE SWITCH A
(Y)SWITCH
(Y)PRESSURE SWITCH
LEAD S/W COVER
STATOR UNIT
(Y)HEAD SCEREW
(Y)SEAL SPINNER SHAF
(Y)AIR SPINDLE ASSY(
(Y)SOC HD SCREW M10X
(Y)VACUUM SWITCH
(Y)PUSH BUTTON SWITC
(Y)SLIDE
(Y)CUTTING WATER FLO
(X)SENSOR SET(MAGNETIC)
(Y)STATOR ASSY
(Y)STATOR ASSY
SPINNER TABLE SET(4"
(Y)SLIDER
(Y)SWITCH (PUSH BUTT
(X)OIL SEAL(2)
(Y)PHOTO SWITCH
PHOTO SWITCH
LOCATION
B-4-2-2
N-2-4-2
B-4-1-2
B-4-1-2, B-4-2-2
N-7-4-2
B-4-2-2
B-4-1-2
C-2-2
B-1-4-4,B-4-5-1
N-8-1-2
B-2-4
B-2-3
C-4-2-2
B-1-3-3
C-4-2-2
C-4-2-2
C-4-2-2
C-4-2-2
C-4-2-2
C-4-2-2
N-1-2-4
C-4-2-2
C-4-2-2
K-10-6-1
B-4-1-2
A-2-1
A-2-1
N-2-4-2
B-4-1-2
B-4-1-2
N-4-4-1
N-7-4-2
VENDOR PART NO
MSC00543AN
MSCO0545AN
MSC00022AN
MSC00000AN
MSCO0002AN
MSCO0005AN
MSCO0013AN
MSCO0222AN
MSCO0224AN
MSCO0507AN
MSCO0526AN
MSCO0538AN
MOGAL096
MOGAH201-E
MOGAL268
MSPF
MOGAL332
MOGAL311
MOGCL336
MOGCS185
MOGCT113
MOGAH080
MOGCH435
MOGCZ209
MOGCZ215
MOGAR047
ACTDV-1161G
AB61F11A3
MOGAL216
MOGAZ146
MODBX068
YEAUJ-GA1501
AHM-2042M
MOGAH090
MOGAH190
MOGAZ901
MOGAL094
MOGAL102
MOGAZ121
MESSM10040U
MOGAH350-B
AH31-21
MOGAH076
YEAUL-GA29
AJK2
MAGAZA05-B
MAGAZA05-B
MAGAL905-C
MOGAH033
AH31-121
MOGAL122
MOGAL311--C
SBEE-SG3M
4
1
1
2
5
1
1
1
1
1
1
1
4
1
5
2
4
4
2
2
1
1
1
1
2
1
1
4
4
1
2
3
2
3
1
1
2
3
1
30
1
2
1
1
4
1
2
1
1
2
10
1
2
LOC
VENDOR
BB24
BB24
BB24
BB24
BB24
BB24
BB24
BB24
BB24
BB24
BB24
BB24
F74
BB24
E93
E71
F74
F74
F74
F74
F74
BB24
E93
F72
F72
F74
R22
E27
E27
BB24
E27
E27
E27
E27
E27
F24
E27
E93
W50
E27
E27
E27
F24
F74
BB24
Z18
Z18
E71
F74
F74
BB24
F74
E27
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
No
Item no
2259 3221S-056
2260 3221S-057
2261 3221S-059
2262 3221S-060
2263 3221S-062
2264 3221S-065
2265 3221S-067
2266 3221S-068
2267 3221S-084
2268 3221S-085
2269 3221S-086
2270 3221S-087
2271 3221S-088
2272 3221S-089
2273 3221S-123
2274 3221S-155
2275 3221T-005
2276 3221T-025
2277 3221T-026
2278 3221T-029
2279 3221T-030
2280 3221U-003
2281 3221V-008
2282 3221V-012
2283 3221V-020
2284 3222W-004
2285 3222W-062
2286 3222W-063
2287 3271B-005
2288 3271B-006
2289 3271B-014
2290 3271B-015
2291 3271B-016
2292 3271B-016
2293 3271B-017
2294 3271B-019
2295 3271B-031
2296 3271B-051
2297 3271B-054
2298 3271C-011
2299 3271C-016
2300 3271C-018
2301 3271C-019
2302 3271C-019
2303 3271C-020
2304 3271C-024
2305 3271E-001
2306 3271F-007
2307 3271F-010
2308 3271F-021
2309 3271F-022
2310 3271H-001
2311 3271J-002
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
B.S GRINDER
BACK GRINDER
BACK GRINDER
BACK GRINDER
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
DESCRIPTION
SILENCER (SL-01)
(N)AIR SPINDLE ASSY
(Y)SENSOR,HOLDER
(Y)SWITCHING POWER S
(X)SOCKET
(Y)COMPRESSION SPRIN
SINNER SUPPORT
(Y)SHAFT(3)
(Y)SPINNER DUCT
(Y)PAD SHAFT
(Y)COVER SUPPORT,R
(Y)COVER SUPPORT,L
(Y)COVER SUPPORT,1
(Y)SPINNER DRIVE UNI
SPONGE HOLDER(6")
(X)CHUCK TABLE (5")
(Y)SPINNER TABLE SET
(Y)THERMISTOR STR-48
CHUCK TABLE ASS'Y
(Y)TRANSISTOR
(Y)DRIVER UNIT SERVO
(Y)VENTURI VALVE
(Y)ELECTRO MAGNETIC VALVE
(Y)SOLENOID VALVE
COMPOUND,DRESS WHEEL
COMPOUND, DRESS WHEE
COMPOUND, DRESS WHEE
(Y)5"PCB MOD SERIAL
(Y)5"PCB MOD ROBOTRO
(Y)5"PCB ZIATECH 880
(Y)5"PCB ZIATECH ZT8
(Y)5"PCB I/O PROLOG
(Y)5"PCB I/O PROLOG
(Y)5"PCB T.C INTERFA
(Y)5"ANALOG I/O BD
(Y)5"BREAKER
(C)5"BEARING
(Y)5"UBUSHING SPFGIAL
(X) CONTACTOR
(Y)5"CLAMP SPLIT
(Y)5"CHAIN DUAL 70 PCH
(Y)5"COUPLING VACUUM
(Y)5"ENCODER
(Y)5"FUSE 100 AMP
(Y)5"FUSE 100A
(Y)5"FITTING
(Y)5"FILTER DI ELEMENT
(Y)5"ACE HEATER
(Y)5"WATER JACKET
LOCATION
B-4-4-3
C-4-2-2
C-4-2-2
N-7-4-2
B-1-3-3
VENDOR PART NO
MOGAR290
MAD-4200
MOGAR255
BDJ100-24V
MOGCN 005-Y
MOGAL062
N-7-3-1
MOGAL093
N-2-4-2
MOGAL186-B
N-3-4-1
MOGALA04
N-2-4-2
MOGAL136
N-2-4-2
MOGAH010
N-2-4-2
MOGAH009
A-1-4
MOGAH06401
N-8-3-2
EAUE-002700
B-4-1-2
MOGAR303
B-1-3-3
MOGTC500
N-2-4-2
MOGAL905
B-4-1-2
RGSTR-4870
B-3-4-3
MOGAR962-A
B-4-1-2
TU280906
EAUE266700
NSVAE-10AL-2
N-8-1-2
MOGAH082-B
N-4-1-1
MOGCH611-AY
M-6-3-4
GC #240
C #240
CG #320
M-6-1-1
091904-01
M-6-1-1
091914-01
M-6-1-1
740753-01
M-6-1-1
740754-01
M-6-1-1
740801-01
M-6-1-1
740801-01
M-6-1-1
661945-03
M-6-1-1
740802-01
B-1-4-4
510431-05
N-1-2-1
570291-01
B-1-4-4
820158-01
4501-0030
N-2-4-2
571900-01
860176-01
860176-04
860176-04
860176-05
B-1-4-4
642033-01
B-1-4-4
642039-01
B-4-5-1
360478-02
B-4-5-1, M-6-1-1 510746-01
B-1-4-4
601931-01
N-3-4-1
860478-02
B-4-5-1
641990-01
B-4-5-1
481925-02
20
1
1
3
1
1
3
2
5
1
1
1
1
1
1
1
6
1
7
10
2
1
4
1
10
2
1
1
2
1
3
3
1
2
1
1
5
16
6
1
9
4
4
3
3
2
1
6
2
12
1
1
1
LOC
VENDOR
Q11
W50
E27
E27
F74
BB24
E93
F21
E71
E82
E71
E71
E71
F24
F62
F74
BB24
E71
F74
F23
F74
T15
F74
F74
F64,R52
F47
F47
F47
V35
V35
V35
V35
V35
V35
V35
V35
F72
E71
F72
F73
E71
F72
F72
F72
F72
F72
F72
F73
F73
F72
F11
F73
F73
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
SHIBAYAMA
"
"
PEAK
PEAK
PEAK
PEAK
PEAK
PEAK
PEAK
PEAK
PEAK
"
"
"
"
"
"
"
"
PEAK
"
"
"
"
"
"
"
No
Item no
2312 3271L-003
2313 3271M-002
2314 3271M-005
2315 3271O-004
2316 3271O-005
2317 3271O-006
2318 3271O-007
2319 3271O-009
2320 3271O-011
2321 3271O-012
2322 3271O-013
2323 3271O-014
2324 3271O-015
2325 3271O-015
2326 3271O-017
2327 3271O-019
2328 3271O-020
2329 3271O-021
2330 3271O-022
2331 3271O-024
2332 3271O-025
2333 3271P-001
2334 3271P-002
2335 3271P-016
2336 3271P-017
2337 3271R-012
2338 3271R-013
2339 3271R-014
2340 3271R-015
2341 3271R-016
2342 3271R-018
2343 3271S-003
2344 3271S-006
2345 3271S-007
2346 3271S-012
2347 3271S-013
2348 3271S-023
2349 3271S-024
2350 3271S-025
2351 3271S-026
2352 3271S-030
2353 3271S-041
2354 3271T-001
2355 3271T-006
2356 3271T-008
2357 3271T-014
2358 3271W-004
2359 3271W-005
2360 3271W-007
2361 3271W-009
2362 3271X-001
2363 3271X-001
2364 3271X-002
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
DESCRIPTION
LOCATION
VENDOR PART NO
5"LAMP HV ARC 35KW

(Y)5"ELEVATOR STEPPER MOTOR
(Y)5"MOTOR STEPPER 200 STEPS
(Y)5"O-RING (DOOR)
(Y)5"O-RING
(Y)5"O-RING
(Y)5"O-RING
(Y)5"O-RING
(Y)5"O-RING
(Y)5"O-RING
(Y)5"O-RING
(Y)5"O-RING
(Y)5"O-RING
(Y)5"O-RING
(Y)5"O-RING
(Y)5"O-RING
520487-05
3500-0030
551904-01
2504-0220
861339-01
861339-02
861339-03
861339-09
861339-07
861339-08
861338-02
861339-10
860828-01
860828-01
860828-04
860828-07
(Y)5"O-RING
(Y)5"O-RING
(Y)5"O-RING BUNA-N
(Y)5"O-RING,SILICONE
(Y)5"DC POWER SUPPLY
(Y)5"DC POWER SUPPLY
(Y)5"GLAND PURGE
(Y)5"PIN QUARTZ SUPP
(Y)5"QUARTZ ROD (COO
(Y)5"QUARTZ ROD (COOLING)
(Y)5"RETAINING RING
(Y)5"RAFLD THERMAL C
(Y)POWER OFF SWITCH
(Y)5"SWITCH
(Y)5"SWITCH LEVER
(Y)5"RCV ELEVATOR SE
(Y)5"SEND ELEVATOR S
(C)5"SCREW
(Y)5"ASM X-AXIS SCRE
(C)5"SCREW
(C)5"SCREW
(Y)5"LEADSCREW/NUT
(Y)5"STNF,SHAFT SPACER.004 THK
(Y)TRIAC
(Y)5"QTZ ISOLATION TUBE
(Y)5"QUARTZ TIP ASSY
(Y)5"ERP QTZ ISOLATI
(Y)5"WINDOW PYROMETER
(Y)5"PRELOAD WASHER
(Y)5"QTZ WINDOW/SCR
(Y)5"QUARTZ WINDOW
(Y)5"XISTOR SIN DARL
(Y)5"XISTOR SIN DARL
(Y)5"XISTOR DUAL DAR
860228-01
860228-02
860828-02
861338-01
4004-0020
4004-0060
480415-01
481901-01
7400-0024-01
7400-0024-02
7400-0024-03
7400-0024-04
590227-01
1908-00
5103-0030
500219-04
501202-01
9830-0560-01
9830-0560-02
581737-03
731857-01
580690-05
580863-03
731858-01
400180-02
4803-0010
7400-0066-01
731561-01
7400-0068-03
481236-01
571462-01
481235-06
481235-05
310732-03
310732-03
311361-01
M-7-3-2
M-7-3-2
B-4-5-1
B-1-4-4
B-1-4-4
B-1-4-4
N-2-4-2
B-1-4-4
B-1-4-4
B-1-4-4
B-1-4-4
K-10-6-1
N-2-4-2
N-2-4-2
D-3-3-2
N-2-4-2
B-1-4-4
H-8-1
B-4-5-1
I-4-1
B-1-4-4
N-2-4-2
K-11-3
K-11-3
B-1-4-4
5
1
2
13
20
3
3
2
4
4
10
7
30
22
11
10
8
4
6
22
2
1
1
4
4
5
5
5
5
12
1
1
7
1
3
3
11
4
2
6
1
9
1
1
2
1
1
12
1
1
1
2
4
LOC
VENDOR
F11
P51
P51
E93
E93
E93
E93
E93
E93
E93
E93
E93
E93
E93
E93
E93
E93
E93
E93
E93
E93
F11
F11
F73
F72
F72
E93
F72
F72
E71
G91
F72
F72
F72
F72
F72
F72
F13
E71
E71
W21
E71
F72
Z16
F73
H42
F72
E71
F11
F11
F72
F72
F72
"
PEAK
PEAK
"
"
"
"
"
"
"
"
"
"
"
"
"
PEAK
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
No
Item no
2365
2366
2367
2368
2369
2370
2371
2372
2373
2374
2375
2376
2377
2378
2379
2380
2381
2382
2383
2384
2385
2386
2387
2388
2389
2390
2391
2392
2393
2394
2395
2396
2397
2398
2399
2400
2401
2402
2403
2404
2405
2406
2407
2408
2409
2410
2411
2412
2413
2414
2415
2416
2417
3272R-002
3281A-011
3281B-001
3281B-023
3281C-001
3281C-002
3281L-001
3281O-011
3281O-012
3281S-001
3281S-002
3281S-003
3281S-011
3282D-003
3282G-001
3282G-002
3282G-003
3282H-001
3282I-001
3291B-001
3291B-002
3291B-004
3291B-005
3291B-023
3291B-041
3291B-042
3291B-043
3291B-061
3291B-062
3291B-063
3291B-064
3291B-065
3291B-066
3291B-067
3291B-070
3291B-072
3291C-001
3291C-002
3291C-003
3291C-011
3291C-041
3291C-071
3291C-072
3291D-001
3291F-002
3291G-001
3291G-021
3291G-024
3291G-025
3291G-028
3291G-041
3291G-042
3291L-001
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
THERMA WAVE
THERMA WAVE
THERMA WAVE
THERMA WAVE
THERMA WAVE
THERMA WAVE
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
DESCRIPTION
(Y)REGISTOR 1.2K 1W
(X) LIFTING LOAD SOCKET ASSY
(X) BEARING TEFLON V15-3
(X) ENTENDER BOARD
(X) CATHODE VH107108-5010
(X) ANODE
(X) LM10
(X)O-RING(3997O-531)
(X) O-RING SILICONE 175
(X) 5-32X7/8 HD CAR SCR
(X) 6-32X3/8 SOCK HCS SS
(X) 4-40X1/4 FLAT HD SS
(X) STABISIL VH107110-501
(Y)XT-1085 DRIVE
(Y)GREASE.WHITE LITHIUM
(Y)GREASE.LUBRICATING STAGE
(Y)DAMPER FLUID SCC
(Y)HOSE BARG
(Y)QUICK DISCONNECT INSERT
(C)BEARING
(C)BEARING
(C)BEARING
(Y)5"LINER BALL BEARING
(Y)5"RING LIFTER BEL
(Y)5"BELT TIMING
(Y)5"BELT TIMING
(Y)5"BELT SILICONRUB
(Y)5"CPU UNIT P.C.BO
(Y)5"D/I UNIT P.C.BO
(Y)5"D/O UNIT P.LC.B
(Y)5"A/I UNIT (8CH)P
(Y)5"A/I UNIT (4CH)P
(Y)5"A/O UNIT (8CH)P
(Y)5"A/O UNIT (4CH)P
(Y)5"BIT BUS LIGHT I
(Y)5"I/O CONTROL
(Y)5"GLAND VCR COUPL
(Y)5"COVERING
(Y)5"COVERRING
(Y)5"BIT BUS LIGHT F
(Y)5"COUPLING
(Y)5"CYLINDER
]Y)5"CYLINDER
(Y)5"DISPLAY UNIT
(Y)5"FILTER ELEMENT
(Y)5"GASKER METAL
(Y)5"ION GAUGE SENSO
(Y)5"OIL LEVEL GAUGE
(Y)5"OILEVEL GAUGE
(Y)5"GAUGE PORT
(Y)5"LACK GEAR
(Y)5"PINION GEAR
(Y)5"LAMP INFRARED
LOCATION
B-3-1-1
B-3-1-1
B-3-1-1
B-3-1-1
B-3-1-1
B-3-1-1
B-3-1-1
M-5-2-3, L-12-1-1
C-1-4
L-3-5-1
L-3-5-1
L-3-5-1
L-3-5-1
L-3-5-1
K-11-4-3
K-11-4-3
K-11-4-3
K-11-4-3
K-11-4-3
VENDOR PART NO
4718-0122-01
1117540
4200118
6000171
AH107114-503
Y1704
3500253
3500280
4400409
400044
4400225
5000541
0515020
18-003617-02
18-003617-03
18-003617-01
59-002742
59-002743
SSL-1260
SSR-1560
3-24-24/16
3-24-22/26
3-24-1-6/6
3-24-17/26
3-24-18/26
IS0148WH
J-2-1-2
C-2-2
I-2-2
C-2-2
J-2-1-2
J-2-1-2
B-3-1-1, F-5-1
M-7-1-3
M-7-1-3
K-11-4-3
G-2-5-1
B-4-2-3, N-4-1-1
E-2-3
H-10-1
K-11-4-3
I-3-1
K-11-4-3
K-11-4-3
K-11-4-3
K-11-4-3
K-11-4-3
FR-1MP
301814-001
1-6-3/4
1-6-4/4
APE-200H
SED-1004-011-09
CDQIB50-40DC-A7
SMC-CQ2A-45DC
GFE-DP
TM-80
3-24-20/26
WI-B
EC-801
D330-D
BPTG 349A
SED-1004-014-12
SED1004-014-13
3-23-10/10
20
11
4
1
2
2
4
2
9
5
6
6
2
1
1
1
1
1
1
12
4
4
6
4
3
3
1
1
1
1
1
1
1
1
1
1
1
1
1
1
2
1
2
1
3
15
2
2
2
1
2
2
2
LOC
VENDOR
T41
G91
G91
T22
G91
G91
T21
G91
G91
G91
G91
G91
G92
Q25
Q43
Q43
Q43
Q43
Q43
I42
I42
I42
I42
I42
H21
H21
G32
G31
G31
T62
G31
G31
G31
G31
T62
T62
X24
H31
H31
G12
I42
R53
R52
G67
G67
I42
H21
I42
I42
I42
I42
I42
H24
AG ASSOCIATE
EATON
"
EATON
"
"
"
"
"
"
"
"
"
THERMA WAVE
"
"
"
"
"
ULVAC
"
"
ULVAC
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
No
Item no
2418
2419
2420
2421
2422
2423
2424
2425
2426
2427
2428
2429
2430
2431
2432
2433
2434
2435
2436
2437
2438
2439
2440
2441
2442
2443
2444
2445
2446
2447
2448
2449
2450
2451
2452
2453
2454
2455
2456
2457
2458
2459
2460
2461
2462
2463
2464
2465
2466
2467
2468
2469
2470
3291M-021
3291M-022
3291M-031
3291O-001
3291O-002
3291O-003
3291O-004
3291O-005
3291O-006
3291O-007
3291O-008
3291O-009
3291O-010
3291O-011
3291O-012
3291O-013
3291O-014
3291O-015
3291O-016
3291O-017
3291O-019
3291O-020
3291O-021
3291O-024
3291O-025
3291O-026
3291O-027
3291O-028
3291O-029
3291O-030
3291O-031
3291O-032
3291O-033
3291O-034
3291P-002
3291P-021
3291P-022
3291P-023
3291P-024
3291P-025
3291R-001
3291S-001
3291S-002
3291S-003
3291S-004
3291S-032
3291S-034
3291S-042
3291S-043
3291S-044
3291S-061
3291S-071
3291S-072
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
DESCRIPTION
(Y)5"REVERSIBLE MOTO
(Y)5"MOTOR & GEAR HE
(Y)5"OIL MIST TREP
(Y)5"O-RING FOR ROTA
(Y)5"O-RING
(Y)5"O-RING
(Y)5"O-RING
(Y)5"O-RING
(Y)5"O-RING
(C)O-RING(3996O-101)
(C)O-RING
(Y)5"O-RING
(Y)5"O-RING
(Y)5"O-RING
(C)O-RING
(Y)5"O-RING
(Y)5"O-RING
(Y)5"O-RING
(Y)5"O-RING
(Y)5"O-RING
(Y)5"O-RING
(Y)5"O-RING
(Y)5"O-RING
(Y)5"O-RING
(Y)5"O-RING
(C)O-RING(3996O-105)
(Y)5"O-RING
(Y)5"O-RING
(Y)5"O-RING
(Y)5"O-RING
(Y)5"O-RING
(Y)5"O-RING
(Y)5"O-RING
(Y)5"GASKET
(Y)5"POWER LOCK
(Y)5"PULLY
(Y)5"PULLY
(Y)5"PULLY
(Y)5"PULLY
(Y)5"PULLY
(Y)5"GLASS.WINDOW RE
(Y)5"SEAL WILSON
(Y)5"SEAL, FERROFIUI
(Y)5"SEAL FERROFLUID
(Y)5"HERMETIC SEALPO
(Y)5"PHOTO SENSOR
(Y)5"SENSOR MAGNET
(Y)5"FLOW SWITCH
(Y)5"ATM PRESSURE SW
(Y)5"SCR UNIT
(Y)5"BESPEL SHAFT
(Y)5"BESPEL SHAFT
LOCATION
K-3-4-1
K-11-4-3
K-11-4-3
K-3-4-1
K-11-4-3
B-1-4-3
K-11-4-3
K-11-4-3
B-3-1-1
B-3-1-1
K-11-4-3
B-3-1-1
B-3-1-1
K-11-4-3
K-11-4-3
VENDOR PART NO
ZRK6GN-AM/ZGN
ZIK6GM-A/KGM
TMX-1
P-38(V)
G-210(V)
P-21(V)
P-24(V)
P-40(V)
P-60(V)
G-200(V)
AS-568A-384(V)
V-55(V)
P-30(V)
P-34(V)
AS-568A-268(V)
P-155(V)
P-25(V)
AS-568A-369(V)
P-29(V)
P-15(V)
AS-568A-260(V)
P-16(V)
V-40(V)
P-49(V)
V-70(V)
G-260(V)
AS-568A-148(S)
G-165(V)
P-52(V)
V-100(V)
V-120(V)
P-14(V)
G-110(V)
6DX1530L/E
PL012x015E
SED-1004-011-12
SED-1004-011-13
SED-1004-011-14
SED-1003-061-06
SED-1003-061-04
3-23-1/10
3-24-11/26
3-24-13/26
3-24-14/26
BPTS306A
PM-K50/CNO3
6132/6001
DTA-002
PS4-102V
PAC30C
SP-1
1
1
1
4
4
2
2
2
2
3
2
4
10
10
4
2
2
2
3
6
2
6
2
2
2
10
16
6
2
4
2
20
2
2
1
1
1
2
1
1
1
4
1
1
1
2
6
1
1
1
1
1
1
LOC
VENDOR
P23
P11
G64
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
I42
H72
I42
I42
H72
I42
H32
H21
I35
I42
I42
G12
G12
I42
G12
G12
G44
I42
I42
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
No
Item no
2471 3291T-001
2472 3291V-003
2473 3291V-004
2474 3291V-005
2475 3291V-006
2476 3291W-001
2477 3291W-002
2478 3291W-021
2479 3292B-002
2480 3292B-006
2481 4211B-012
2482 4211B-014
2483 4211B-031
2484 4211B-031
2485 4211B-032
2486 4211B-034
2487 4211C-005
2488 4211D-002
2489 4211O-001
2490 4211R-001
2491 4211R-001
2492 4211R-003
2493 4211S-002
2494 4211S-002
2495 4211S-008
2496 4211V-010
2497 4211V-010
2498 4242B-033
2499 4242B-035
2500 4242B-039
2501 4242B-063
2502 4242B-065
2503 4242B-067
2504 4242B-069
2505 4242B-070
2506 4242B-071
2507 4242B-081
2508 4242C-051
2509 4242D-001
2510 4242M-011
2511 4242O-088
2512 4242P-042
2513 4242P-061
2514 4242R-001
2515 4242R-003
2516 4242R-004
2517 4242R-006
2518 4242S-061
2519 4242S-062
2520 4242S-064
2521 4242S-101
2555 4271A-032
2556 4271A-033
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
METAL CVD
WAFER MARK
WAFER MARK
SOG COATER
SOG COATER
SOG COATER
SOG COATER
SOG COATER
SOG COATER
SOG COATER
SOG COATER
SOG COATER
SOG COATER
SOG COATER
SOG COATER
SOG COATER
SOG COATER
SOG COATER
SOG COATER
SOG COATER
HIGH ENERGY IMP
HIGH ENERGY IMP
HIGH ENERGY IMP
HIGH ENERGY IMP
HIGH ENERGY IMP
HIGH ENERGY IMP
HIGH ENERGY IMP
HIGH ENERGY IMP
HIGH ENERGY IMP
HIGH ENERGY IMP
HIGH ENERGY IMP
HIGH ENERGY IMP
HIGH ENERGY IMP
HIGH ENERGY IMP
HIGH ENERGY IMP
HIGH ENERGY IMP
HIGH ENERGY IMP
HIGH ENERGY IMP
HIGH ENERGY IMP
HIGH ENERGY IMP
HIGH ENERGY IMP
HIGH ENERGY IMP
HIGH ENERGY IMP
HIGH ENERGY IMP
RTP
RTP
DESCRIPTION
(Y)5"THERMOCOUPLE SH
(Y)5"SOLENOID VLAVE
(Y)5"VARORIABLE COND
(Y)5"TIMING VALVE
(Y)5"VACUUM VALVE (1
(Y)5"LIFTER WAFER
(Y)5"INCH WAFER PICK
(Y)5"HEATER WINDOW (
(X)PCB SUPPORT SYS WMSC
(Y)PCB HANDLER
P.C BOARD I/O
WALKING BEAM
(Y)TIMING BELT
(Y)TIMING BELT
(Y)TIMING BELT
(Y)TIMING BELT
(Y)PRESSURIZING CAP
(Y)PULSE DRIVER (2-P
(Y)O-RING
(Y)NOZZLE RECEIVER
(Y)NOZZLE RECEIVER
(Y)REGULATOR
(Y)WAFER SERCH SENSO
(Y)WAFER SERCH SENSO
(Y)VACUUM SEAL
(Y)VACUUM SEAL
(Y)VACUUM SEAL
(Y)BELT,TIMING
(Y)BELT,TIMING 62 GROVE
(Y)BELT,TIMING
(Y)BEARING,FLUROLOY-G
(Y)BEARING
(Y)BEARING,SEAL
(Y)BEARING,SPHERICAL
(Y)BEARING,THRUST
(Y)BEARING,SLEEVE
(Y)BOARD,ORIENT LOGIC
(Y)CYLINDER
(Y)DIODE,SIGNAL 100V 0.01A
(Y)MOTOR,LINEAR ACTUATOR KIT
(Y)O-RING 2-331 BROWN VITION
(Y)PIN FINGER RELEASE
(Y)PIVOT,FLEXURAL
(Y)RING FEEDER,ROTATION
(Y)RING,RETAINING
(Y)RING,RETAINING
(Y)RING,RETAINING
SWITCH,INDUCTIVE PROXIMITY
(Y)SWITCH,REED
(Y)SWITCH,PROXIMITY
(Y)SPRING EXTENSION
(Y)THERMOCOUPLE AMPL
(Y)SAME P/N (4271A-0
LOCATION
B-3-1-1
G-2-5-1
B-1-4-3
N-7-4-3
K-11-4-3
K-10-3-2
K-4-5-1
L-1-4
J-4-2-3
B-1-3-4
N-2-2-2
N-2-2-2
N-2-2-2
N-2-2-2
B-1-1
N-2-2-2
N-2-2-2
K-5-2-3
L-5-2-1
L-5-2-1
B-3-3-2
N-2-2-2
N-2-2-2
N-1-4-4
N-1-4-4
N-1-4-4
N-1-4-4
N-1-4-4
N-1-4-4
N-1-4-4
N-1-4-4
N-1-4-4
N-1-4-4
N-1-4-4
N-1-4-4
B-3-4-3
N-1-4-4
N-1-4-4
N-1-4-4
N-1-4-2
N-1-4-4
N-1-4-4
N-1-4-4
N-1-4-4
N-1-4-4
N-1-4-4
N-8-1-1
N-8-1-1
VENDOR PART NO
1-4-1/2
BVV304
253A-3-80-2S
BN-109
BVVJ324A
3-23-6/10
SED1003-071-01
A5056
6100425
2015015
EOR05-2023A
TR8171UD-TM(E-3)
K6101003
K6101003
K6102001
K6101040
1E
D7101004
K6201006
TOCK0003
TOCK0003
K8107311
K9136002
K9136002
MR4-0026-1
EMR4-026
EMR4-026
P129218-17
60897-00
P129225-73
40617-00
60186-00
60719-00
60194-00
P127132-02
60718-00
60718-00
50755-00
P12541
P129623
P12008-31
40364-00
P127992-10
P129008-03
P12030-16
P12030-15
P127229-253
50915-02
P129010
60420-02
P12051-355
9812-0010-02
2
1
1
1
1
4
1
2
1
1
1
1
1
3
1
2
2
1
10
3
1
1
2
2
9
1
3
3
1
2
3
4
3
2
6
3
1
1
20
1
5
2
2
1
5
2
3
3
3
1
2
1
1
LOC
VENDOR
G12
R42
I35
I33
I42
H31
H52
I33
T62
T12
K22
Z18
K22
J22
K22
J22
K36
J45
J51
K22
K22
J42
J22
J22
J52
K22
K22
Q61
Q61
Q61
Q61
Q61
Q61
Q61
Q61
Q61
Q61
Q61
Q61
F71
Q61
Q61
Q61
Q61
E75
Q61
Q61
Q61
Q61
Q61
Q61
F61
F61
"
"
"
"
"
"
"
"
LOMONICS
LOMONICS
TOK
TOK
TOK
"
"
"
"
"
"
"
"
"
"
"
"
"
"
GENUS
GENUS
GENUS
GENUS
GENUS
GENUS
GENUS
GENUS
GENUS
GENUS
GENUS
GENUS
"
GENUS
GENUS
GENUS
GENUS
"
GENUS
GENUS
GENUS
GENUS
GENUS
GENUS
AG
"
No
Item no
2557
2558
2559
2560
2561
2562
2563
2564
2565
2566
2567
2568
2569
2570
2571
2572
2573
2574
2575
2576
2577
2578
2579
2580
2581
2582
2583
2584
2585
2586
2587
2588
2589
2590
2591
2592
2593
2594
2595
2596
2597
2598
2599
2600
2601
2602
2603
2604
2605
2606
2607
2608
2609
4271B-003
4271B-004
4271B-006
4271B-009
4271F-001
4271F-006
4271P-002
4271P-002
4271P-041
4271P-042
4271P-104
4271R-006
4271R-007
4271T-003
4271V-004
4271V-005
4272B-031
4272B-032
4272C-003
4272C-004
4272C-005
4272C-007
4272C-008
4272C-009
4272C-021
4272C-022
4272C-023
4272C-041
4272C-061
4272C-071
4272C-082
4272C-082
4272D-001
4272D-002
4272E-001
4272E-002
4272E-003
4272F-001
4272F-002
4272F-007
4272F-008
4272F-009
4272H-001
4272M-002
4272M-003
4272M-003
4272M-021
4272M-081
4272O-008
4272P-001
4272P-001
4272S-003
4272S-004
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
RTP
HF VAPOR SYS
HF VAPOR SYS
HF VAPOR SYS
HF VAPOR SYS
HF VAPOR SYS
HF VAPOR SYS
HF VAPOR SYS
HF VAPOR SYS
HF VAPOR SYS
HF VAPOR SYS
HF VAPOR SYS
HF VAPOR SYS
HF VAPOR SYS
HF VAPOR SYS
HF VAPOR SYS
HF VAPOR SYS
HF VAPOR SYS
HF VAPOR SYS
HF VAPOR SYS
HF VAPOR SYS
HF VAPOR SYS
HF VAPOR SYS
HF VAPOR SYS
HF VAPOR SYS
HF VAPOR SYS
HF VAPOR SYS
HF VAPOR SYS
HF VAPOR SYS
HF VAPOR SYS
HF VAPOR SYS
HF VAPOR SYS
HF VAPOR SYS
HF VAPOR SYS
HF VAPOR SYS
HF VAPOR SYS
HF VAPOR SYS
HF VAPOR SYS
DESCRIPTION
(Y)ATP BOARD
(Y)SIX-GAS INTERLOCK
(Y)CPU MODULE,STD
(Y)PCA RMS ANALOGE 8
(Y)FLTR.ELEMENT.AIR
(Y)BRACKET,FILTER MO
(Y)TRAY SUPPORT PIN
(Y)TRAY SUPPORT PIN
(Y)POWER SUPPLY LAMD
(Y)POWER SUPPLY LAMD
(Y)PROBE QUICK DISCO
(Y)RELAY.4PDT.24V.AC
(Y)RELAY RH4B-U-12VD
(Y)SILCON SEAL.TC FE
(Y)VALVE 1/2 FPT SOL
(Y)VALVE PNEUMATIC
(Y)TEFLON BLOCK
(Y)STANDOFF,CHAMBER BLOCK
(Y)CENTERING DISC 120MM
(Y)CENTERING DISC 100MM
(Y)6" CENTERING KIT (D.I)
(Y)FORK,CENTERING 125MM
(Y)JUMPER CABLE
(Y)CABLE,ALLIGATOR CLIP
(Y)SENSOR CABLE
(Y)CAP,FLARED 1/4" TUBE
(Y)ASSY HF CALIBRATION
(Y)ASSY,CHUCK,1SR-20
(Y)ASSY BACK PROSE C
(Y)ASSY BACK PROSE C
(Y)DIAPHRAM,RINSE BO
(Y)DFTR,ISR-200,200M
(Y)ELEM,HEATING BOTT
(Y)ELEM,HEATING PLAT
(Y)ELEMENT HEATING
(Y)FUSE, MDA, 250V,5
(Y)FUSE, AGC, 250V,
(Y)FITTING 9P FEMALE
(Y)FITTING FEMALE BA
(Y)FITTING MALE BARB
(Y)HEATER,SILICON 36
MEMBRANE 8"
(Y)MOTOR DC STEPPER
(Y)MOTOR DC STEPPER
(Y)MANIFOLD
(Y)CNTL,SERVO,MOTOR
(Y)O-RING VITON TO D
(Y)PROBE,TEMPERATURE
(Y)PROBE,TEMPERATURE
(Y)SW,PRESSURE 20PSI
(Y)SW,PRESSURE 70PSI
LOCATION
N-1-4-1
N-1-4-1
N-1-4-1
N-1-4-1
L-9-1
B-4-5-1
B-3-3-4
B-3-3-4
N-1-4-1
N-8-1-1
N-1-4-1
N-1-4-1
N-1-4-1
N-8-1-1
N-8-1-1
N-8-1-1
B-4-3-2
K-10-3-2
K-10-3-2
E-2-1
B-4-3-2
B-4-3-2
B-4-3-2
K-10-3-2
M-6-1-1
M-6-1-1
B-4-3-2
N-7-1
N-7-4-1
N-7-4-1
N-7-4-1
N-7-4-1
I-1-2
B-3-2-3
N-7-4-1
N-7-4-1
N-7-4-1
N-7-4-1
K-10-3-2
N-7-4-1
K-10-3-2
N-7-4-1
B-4-3-2
L-11-1-2
c-4-2-1
B-3-3-1
B-3-3-1
N-7-4-1
N-7-4-1
VENDOR PART NO
7100-2586-02
7100-5202-03
2100-0307-02
7100-5209-01
2706-0001-01
7310-0551-01
7200-0616-01
7200-0616-01
4000-0012-01
4000-0007-01
2103-0005-01
4502-0008-01
4502-0224-01
7200-0258-02
4502-9063-01
4502-9042-01
415386-001
409333-002
409291-001
409290-001
409334-001
408238-001
408237-001
408211-001
302369-001
230627-004
902474-001
301704-001
904344-001
905100-211
902819-001
902819-001
408249-001
412488-001
301414-001
301417-001
303005-001
230054-032
230088-007
301013-001
301013-007
301012-007
303301-001
411225-001
301816-002
301816-002
303956-001
301776-001
300038-350
301416-001
301416-001
230029-005
230029-006
1
1
1
1
3
3
1
1
1
1
2
3
1
1
1
1
1
3
1
1
1
4
4
4
2
1
1
2
1
2
9
2
1
1
2
2
1
5
5
5
5
5
1
1
1
1
6
5
4
1
3
2
2
LOC
VENDOR
E13
E13
E13
E13
Y13
E72
E74
E82
E13
F61
E13
E13
E13
F61
F61
F61
F62
E82
E82
E82
E81
F62
F62
F62
E82
E92
E92
F62
F61
F61
F61
F61
F61
E81
F33
F61
F61
F61
F61
E82
F61
E82
F61
F62
P23
P23
R63
T41
E92
F61
F61
F61
F61
"
"
"
"
AG
"
AG
AG
"
"
"
"
"
"
"
"
EXCALIBUR FSI
"
"
"
"
"
"
"
"
"
"
"
"
EXCALIBUR FSI
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
No
Item no
2610
2611
2612
2613
2614
2615
2616
2617
2618
2619
2620
2621
2622
2623
2624
2625
2626
2627
2628
2629
2630
2631
2632
2633
2634
2635
2636
2637
2638
2639
2640
2641
2642
2643
2644
2645
2646
2647
2648
2649
2650
2651
2652
2653
2654
2655
2656
2657
2658
2659
2660
2661
2662
4272S-006
4272S-007
4272S-008
4272S-008
4272S-011
4272S-012
4272T-002
4272T-005
4276B-007
4276B-009
4276S-001
4276T-001
3302A-009
3302A-010
3302B-051
3302B-092
3302C-007
3302C-008
3302C-026
3302F-032
3302H-054
3302H-055
3302O-035
3302O-043
3302S-002
3302S-111
3302S-127
3302S-153
3302S-154
3302S-155
3304P-003
3311A-001
3311B-016
3311B-019
3311B-025
3311B-031
3311B-032
3311B-037
3311B-064
3311C-009
3311C-021
3311C-042
3311C-051
3311C-052
3311C-055
3311C-058
3311C-060
3311C-061
3311C-063
3311C-064
3311D-022
3311F-003
3311F-005
DESCRIPTION
HF VAPOR SYS
(Y)SWITCH,MICRO,SPDT
HF VAPOR SYS
(Y)SWITCH,PRXMTY
HF VAPOR SYS
(Y)SWITCH DOOR INTER
HF VAPOR SYS
(Y)SWITCH DOOR INTER
HF VAPOR SYS
(Y)SWITCH MICR6 SPST
HF VAPOR SYS
(Y)PHOTO SWITCH RETR
HF VAPOR SYS
(Y)TIMMER,WATCH DOG
HF VAPOR SYS
(Y)TANDUCER
UV BAKE
(Y)SIGNAL TOWER CONT
UV BAKE
(Y)GRAPHIC FIEXIBLE
UV BAKE
(A)RF SCREEN
U.V BAKE
(Y)TRANSMETER THERMO
ETCHER
(Y)F-AVP125-C
ETCHER
(Y)F-SV100-C
ETCHER
(Y)TIMING BELT
ETCHER
BOLT
ETCHER
(Y)TEMPERATURE CONTROL
M.ETCHER(ECR-308) (Y)DRY PUMP CONTROLL
M.ETCHER(ECR-308) (Y)AIR CYLINDER
M.ETCHER(ECR-308) (X)BELLOW FLANGE
M.ETCHER(ECR-308) HANDLE
M.ETCHER(ECR-308) HOUSING
M.ETCHER(ECR-308) O-RING G135
M.ETCHER(ECR-308) WASHER
M.ETCHER(ECR-308) (Y)VACUUM SWITCH
M.ETCHER(ECR-308) (Y)LEAF SPRING
M.ETCHER(ECR-308) (Y)SUPPORT
M.ETCHER(ECR-308) SHAFT
M.ETCHER(ECR-308) SHAFT
M.ETCHER(ECR-308) SLEEVE BEARING
ETCHER
PIPE,TAPPER EXHAUST
OXIDE ETCHER
(X)ARM PLATEN SUPPORT HSG5"
OXIDE ETCHER
(X) PCB KEYBOARD DISPLAY
OXIDE ETCHER
(X) PCB VOARD ASS'Y ARM MOTOR
OXIDE ETCHER
(X) PCB PRESSURE CONTROLLER
OXIDE ETCHER
(X) PCB (RS 232)
OXIDE ETCHER
(X) S/R 3PC BOARD ASS'Y
OXIDE ETCHER
(X) PCB ASSY,AM100 MODIFIDE
OXIDE ETCHER
(X) BELLOWS MOLDED GANBAL AS
OXIDE ETCHER
(X) CAPACITOR (1000PF)
OXIDE ETCHER
(X) CONNECTOR (6 PIN)
OXIDE ETCHER
(X) CONNECTOR
OXIDE ETCHER
(X) PLATEN SHAFT VAC CHAMBER
OXIDE ETCHER
(X) RF COUPLER
OXIDE ETCHER
(X) DISTRIBUTION BOARD COMPUT
OXIDE ETCHER
(X) COIL AUTOMATCH
OXIDE ETCHER
(X) HOT ELECTRODE 5" CAP
OXIDE ETCHER
(X) ELECTRODE CHUCK
OXIDE ETCHER
(X) CABLE ASSEMBLY E80/COOLER
OXIDE ETCHER
(X) CHUCK WAFER DIP
OXIDE ETCHER
(X) DOOR SHAFT
OXIDE ETCHER
(X) FILTER OPTICAL
OXIDE ETCHER
(X) FILTER RF/UV VACUUM CHAM
LOCATION
N-7-4-1
N-7-4-1
N-7-4-1
N-7-4-1
N-7-4-1
N-7-4-1
N-7-4-1
N-1-3-4
N-1-3-4
L-9-4
N-1-3-4
B-3-4-1
B-3-4-1
B-3-4-1
H-7-3
F-4-5-1
K-3-4-2
N-6-4-3
J-3-4
K-3-4-2
N-2-2-1
N-6-4-3
N-6-4-3
N-6-4-3
L-1-4
E-3-3-3
C-4-1-1
D-1-4-3
D-1-4-3
B-1-1
N-6-4-2
J-4-2-3
N-6-4-2
N-6-4-2
M-7-1-2
B-1-1
K-11-4-2
K-11-4-2
VENDOR PART NO
301333-001
302564-001
230023-001
230023-001
230155-001
230232-001
301778-001
304073-001
238781
248281
099402
069661
F-AVP125-C
F-SV100-C
4-813670-A
3-817406-6
2-818273-B
1-811130
3-820392-A
2-813358-A
3-821952-5
3-821946-A
3-823132-4
3-820476-6
2-809561-A
3-823394-A
3-827895
3-821945-1
4-814231-1
3-820397-Q
412509-002
09918
07164
09675
11020
07095
07660
30050
09671
70087-01
2180-0192
2130-0102
09948
3260
71417-01
12765-01
10296-01
06731
08615
8300-0007
09974
2
4
2
2
3
3
2
2
1
1
1
3
2
2
1
1
1
1
1
1
1
1
5
4
1
1
1
1
1
2
1
1
1
1
1
1
1
1
1
2
1
6
2
1
1
2
7
3
1
2
4
1
1
LOC
VENDOR
F61
F61
F61
F61
F61
F61
F61
F61
F61
F61
Q62
F61
G15
G15
H21
G15
X43
X43
X42
I31
H71
I41
H21
H21
G24
H71
I32
I41
I41
I41
H23
G93
T13
T41
T41
T42
T41
T42
G93
G93
G93
G93
G93
G93
T41
G93
G93
G93
G93
G93
G93
G93
G93
"
"
"
"
"
"
"
"
FUSION
"
FUSION
FUSION
HITACHI
"
HITACHI
"
"
HITACHI
"
HITACHI
"
"
"
"
HITACHI
"
"
"
"
"
FSI
B/IPC
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
No
Item no
2663
2664
2665
2666
2667
2668
2669
2670
2671
2672
2673
2674
2675
2676
2677
2678
2679
2680
2681
2682
2683
2684
2685
2686
2687
2688
2689
2690
2691
2692
2693
2694
2695
2696
2697
2698
2699
2700
2701
2702
2703
2704
2705
2706
2707
2708
2709
2710
2711
2712
2713
2714
2715
3311F-006
3311F-008
3311F-009
3311F-010
3311F-032
3311F-033
3311J-001
3311N-001
3311O-024
3311O-025
3311O-027
3311P-007
3311P-008
3311P-009
3311P-010
3311P-011
3311P-014
3311P-020
3311R-004
3311R-018
3311R-019
3311S-035
3311S-036
3311S-040
3311S-054
3311T-035
3311V-004
3311V-005
3312A-041
3312B-004
3312B-006
3312B-009
3312B-012
3312B-012
3312B-015
3312B-016
3312B-017
3312B-021
3312B-022
3312B-052
3312B-053
3312B-062
3312B-063
3312B-064
3312B-066
3312B-067
3312B-069
3312B-072
3312C-003
3312C-004
3312C-005
3312C-006
3312C-032
OXIDE ETCHER
OXIDE ETCHER
OXIDE ETCHER
OXIDE ETCHER
OXIDE ETCHER
OXIDE ETCHER
OXIDE ETCHER
OXIDE ETCHER
OXIDE ETCHER
OXIDE ETCHER
OXIDE ETCHER
OXIDE ETCHER
OXIDE ETCHER
OXIDE ETCHER
OXIDE ETCHER
OXIDE ETCHER
OXIDE ETCHER
OXIDE ETCHER
OXIDE ETCHER
OXIDE ETCHER
OXIDE ETCHER
OXIDE ETCHER
OXIDE ETCHER
OXIDE ETCHER
OXIDE ETCHER
OXIDE ETCHER
OXIDE ETCHER
OXIDE ETCHER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
DESCRIPTION
(X) VACUUM PUMP FILTER
(X) GASKET FILTER 5"
(X) FILTER 520MM OPTICAL
(X) FILTER 700 NN LOTUCAK
(X) FAN FLATE
(X) FAN FLATE
(X) CASSETTE RECORD JACK
(X) NIPPLE SS 1/8 NPT/M*1.06
(X) O-RING (SEAL306-321)
(X) O-RING 3/16 VITON 2.329
(X) PLATE DIFFUSION HOT ELE
(X) STRIP PLATEN
(X) LOAD COCK PUMP
(X) PLATEN ASS'Y
(X) PLATE DIFFUSION HOT ELEC

(X) SOCKET RELAY
(X) HOUSING SENSOR

(X) CLAMP NUT SENSOR
(X) LIGHT PIPE SENSOR
(X) HOT ELECTRODE, STRIP MATC
(X) FITTING TUBE
(X) SOLENOID VALVE (24VDC)
(X) SOLENOID VALVE
(Y)5"PWA AUTOMATCH
(Y)5"MOTHER BOARD 3000C PCB
(Y)5"PWA EOP/CON PRE
(Y)5"PWA MASS FLOW C
(Y)5"PCB ASSY DISPLA
(Y)5"PCB ASSY DISPLAY 906U
(Y)5"PCB ASS'Y DATEL
(Y)5"PCB VACUUM TRIG
(Y)5"PCB ASS'Y FR CO
(Y)5"TEMP.DISPLAY B/
(Y)5"TEMP.SET B/D
5"BELLOWS (1" SS)
(Y)5"BELLOWS (3/8" S
(Y)5"OPERATOR ILLUMI
(Y)5"S/W CONTACT BLO
(Y)5"S/W CONTACT BLO
(Y)5"BUBBER QUARTZ
(Y)5"PWA MASS FLOW C
(Y)5"PC ASS'Y EGA
(Y)5"PC ASS'Y VIDEO INTERFACE
(Y)5"CAPICTOR
(Y)5"CAPICTOR
(Y)5"CAPACITOR 130 P
(Y)5"CAPACITOR 180 P
LOCATION
H-10-1
K-11-4-2
K-11-4-2
K-11-4-2
K-11-4-2
K-11-4-2
K-11-4-2
K-11-4-2
K-11-4-2
K-11-4-2
K-11-4-2
K-10-5-2
K-10-5-2
K-11-4-2
K-10-5-2
K-11-4-2
K-10-5-2
K-10-5-2
B-1-2-3
B-3-2-4
B-3-2-4
B-3-2-4
B-3-2-4
B-3-2-4
B-3-2-4
B-3-2-4
B-3-2-4
B-3-2-4
L-11-4-1
L-11-4-1
L-11-4-1
L-11-4-1
VENDOR PART NO
72537-01
71773-03
71773-05
52555
52630
06803
5975-0071
71015-01
71005-21
08658
71582-38
09946
09875
10166
10144
10147
10148
08776
10201
72860-03
5930-0099
13284-01
13284-01
15451-01
02892
C-4-3-3
C-4-3-3
L-11-4-1
L-11-4-1
L-11-4-1
C-4-3-3
N-6-4-3
B-4-3-1
B-4-3-1
B-4-3-1
M-7-1-3
L-11-4-1
L-11-4-1
L-11-4-1
B-4-1-1
L-2-4-4
B-4-1-1
B-4-1-1
B-4-3-1
10550
10570
13564-02
B02912A
B02916A
04616
04599
71214-01
71216-01
71216-02
14738-01
13214-01
73221-01
73221-01
70067-05
70065-01
73030-06
73030-07
1
9
2
2
1
1
4
2
2
8
1
3
3
2
3
6
1
7
1
4
10
4
4
5
4
1
1
1
1
1
1
1
5
5
1
2
1
2
1
4
2
4
2
2
1
1
1
1
3
3
1
1
3
LOC
VENDOR
G93
G93
G93
G93
G93
G93
G93
G93
G93
G93
G93
G93
G93
G93
G93
G93
G93
G93
T22
G93
G93
G93
G93
G93
G93
G93
G93
G93
T63
T63
T63
T63
T63
T63
T63
T63
T63
T63
T63
I41
I41
G12
G12
G12
H31
T63
T63
T63
G16
G16
G16
G16
G12
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
B/IPC
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
B/IPC
"
"
"
"
"
"
"
"
No
Item no
2716 3312C-051
2717 3312C-052
2718 3312C-058
2719 3312C-060
2720 3312C-061
2721 3312C-062
2722 3312C-063
2723 3312C-064
2724 3312C-067
2725 3312C-068
2726 3312D-002
2727 3312D-004
2728 3312D-005
2729 3312D-006
2730 3312D-052
2731 3312F-001
2732 3312I-002
2733 3312I-004
2734 3312I-005
2735 3312I-006
2736 3312I-007
2737 3312I-009
2738 3312I-010
2739 3312I-011
2740 3312I-012
2741 3312I-012
2742 3312I-013
2743 3312L-001
2744 3312L-002
2745 3312L-004
2746 3312M-002
2747 3312M-032
2748 3312M-033
2749 3312M-035
2750 3312N-001
2751 3312P-001
2752 3312P-001
2753 3312P-022
2754 3312P-025
2755 3312P-026
2756 3312P-028
2757 3312P-029
2758 3312S-006
2759 3312T-051
2760 3312T-054
2761 3312V-002
2762 3312V-010
2763 3312W-002
2764 3312W-003
2765 3313B-001
2766 3313B-002
2767 3313B-003
2768 3313B-004
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
DESCRIPTION
5"COUPLER ASSY EXHAUST BRASS
(X)5"
(L)5"QTZ CHAMBER
(Y)5"CAP CER .001UF
(Y)5"CAP TUBULAR 25P
(Y)5"CAP TUBULAR 1000PF 5 KVDC
(Y)5"CAP CER 001UF 6
(Y)5"CAP TUBULAR 100
(Y)5"CAP FEED THRU .
(Y)5"METER DIGITAL D
(Y)5"DIODE
(Y)5"DIODE IN 5231 M
(Y)5"HEAD ASSY DETEC
3Y)5"RF FILTER ASSY
(Y)5"IC 40106
LOCATION
04441
B-4-1-1
B-3-3-3
B-4-1-1
B-4-3-1
B-3-3-3
B-4-3-1
J-1-2-2
B-4-1-1
B-4-1-1
J-1-2-2
B-3-3-3
B-3-3-3
(Y)5"IC AD 7503
(Y)5"I.C LM725
(Y)5"I.C LM725
(Y)5"I.C L8013 CCTZ
(Y)5"LAMP RED 115V 5
(Y)5"LAMP AMBER 115V
(Y)5"WEDGE BASE LAMP
(Y)5"GAS MODULE
(Y)5"WETT METER (0-1
(Y)5"WATTMETER MODUTEC 2-1/2"0
(Y)5"FLOWMETER LAUM
(Y)5"MATCHING NETWOR
(Y)5"POWER ONE 5V @6
(Y)5"POWER ONE 5V @6A 12-14
(Y)5"WELD HEATED PLA
(Y)5"METER DIGITAL P
(Y)5"WELD CHAMBER UP
(X)5"TEFLON PLATE
(Y)5"Q'TZ VAC CAP
(Y)5"STANDOFF, COOLI
5"TUNNEL
(Y)5"Q'TZ LATTICE TR
(Y)5"SOLENOID VALVE
(Y)5"MANIFOLD SOLENO
(Y)5"PWA THYUMBWHEEL
(Y)5"WASHER SPHER, S
(X) PADDLE BOARD (50 PIN)
(X) PADDLE BOARD(20 PIN)
(X) P.C BOARD EOP DETCETOR
(X) P.C BOARD WAFER SENSOR
VENDOR PART NO
05361
70056-41
70058-01
70058-07
72991-41
73003-01
70088-02
10429
23220-01
70109-03
70122-11
06534
(5784-01
70716-01
70716-01
70412-01
70412-01
J-2-1-2
J-2-1-2
J-2-1-2
J-5-4
B-4-3-1
B-4-3-1
A-2-2, I-8-1
L-11-3-4
L-11-3-4
J-1-1-2
B-4-3-1
I-7-3
D-3-1
N-6-4-3
I-4-1, D-1-1
I-4-2
B-3-3-3
N-6-4-3
L-11-4-1
N-6-4-3
N-1-1-4
N-1-1-4
N-1-1-4
N-1-1-4
70889-01
70889-01
71303-01
71303-03
72957-06
15147-01
02714
02888-02
72761-01
MW-10D
71255-02
73077-06
16092-99
71321-01
15312-01
02973-002
15372-01
04713
05887
5935-0027
73316-03
02888-02.
73164-01
02888-02
71552-06
71552-02
B-09835
2
2
1
6
5
30
4
2
12
3
34
2
2
2
1
2
10
10
9
10
10
8
10
6
2
2
2
2
2
2
1
1
1
2
2
1
1
1
1
1
1
5
2
2
1
1
4
1
12
1
6
3
4
LOC
VENDOR
R62
G16
X42
G16
G16
I41
G16
G12
I41
G12
T44
G16
G16
T44
I41
I41
T62
T44
T44
T62
T44
T44
T44
T44
T44
T62
T62
G16
G16
H24
I24
G12
G12
G12
X13
T63
T63
I24
G12
I24
X24
G68
I41
X12
H32
I41
I41
T63
I41
T22
T22
T22
T22
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
B/IPC
"
"
"
No
Item no
2769 3313B-005
2770 3313B-006
2771 3313B-013
2772 3313B-014
2773 3313B-020
2774 3313B-021
2775 3313B-024
2776 3313B-027
2777 3313B-029
2778 3313B-052
2779 3313B-056
2780 3313B-057
2781 3313B-059
2782 3313B-060
2783 3313B-060
2784 3313C-028
2785 3313C-029
2786 3313C-031
2787 3313C-032
2788 3313C-033
2789 3313C-050
2790 3313C-054
2791 3313C-055
2792 3313C-057
2793 3313C-058
2794 3313C-059
2795 3313C-060
2796 3313C-062
2797 3313C-064
2798 3313C-065
2799 3313D-012
2800 3313E-003
2801 3313F-016
2802 3313G-002
2803 3313H-002
2804 3313L-004
2805 3313M-004
2806 3313O-051
2807 3313Q-002
2808 3313Q-006
2809 3313S-013
2810 3313S-019
2811 3313S-020
2812 3313S-037
2813 3313S-043
2814 3313S-045
2815 3313S-046
2816 3313S-051
2817 3313T-017
2818 3313T-042
2819 3313T-043
2820 3313V-003
2821 3313W-001
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
METAL ETCHER
DESCRIPTION
(X) BOARD STRIT ROCK S/W
(X) PC BOARD LOAD LOCK S/W
(X) P.C BOARD SWITCH
(X) BOARD STRIP LOCK PRESSURE
(X) P.C BOARD POWER SUPPLY (2
(X) P.C BOARD MOTHER BOARD (F
(X) P.C BOARD ANALOG I/O
(X) COMPUTER BOARD
(X) P.C BOARD REAR PANAL (FLOW
(X)DRIVE BELT S/R ELEVATOR
(X) SHIELD RF GEN B/D
(X) BULKHEAD FEED THRU
(X) BUSHING HOT ELECTRODE
(X) SENSOR,CIRCUIT BOARD
(X) SENSOR,CIRCUIT BOARD
(X) CONNECTOR (6 PIN)
(X) CONNECTOR (3/8"MALE)
(X) CONNECTOR (1/4"MALE)
(X) CONNECTOR (FEMALE QUICK)
(X) CONNECTOR (QUICK)
(X) NUT CLAMP
(X) COVER (PM132)
(X) COOLER ASSY
(X) CLAMP CAP HOT ELECTODE
(X) CLAMP PLATE INNER
(X) CLAMP PLATE INNER
(X) PLATEN SHAFT VAC CHAMBER
(X) CLAMP HOT ELECTRODE
(X) CHUCK WAFER DIP BRAZE
(X) ELECTRODE CLAMP PLATE
(X) LIGHT PIPE E.O.P DETECTOR
(X) ELEMENT OF MOTOR GUARD
(X) OPTICAL FILTER (430 mm)
(X) GROUND START ASS'Y
(X) HARD ANODIZED REF 4654-1H
(X) SOCKET LAMP
(X) METER DIGITAL DISPLAY
(X) PRESS OIL ASS'Y
(X) COLLAR QUARTZ
(X) QUARTZ COLD RING
(X) REFLECTIVE S/W
(X) BRACKET MICRO S/W
(X) FLANGE SWITCH ACTUATOR CAM
(X) LIGHT PIPE SOURCE (0.220)
(X) LIGHT PIPE ENTRAN SOURCE
(X) SENSOR BLOCK ASSY
(X) DISC SPRING AM147235
(X) SENSOR FILTE
(X) HEAT SINK TR
(X)OUTSIDE PORCE TRACK
(X)OUTSIDE PORCE TRACK
(X) SOLENOID VALVE (4-WAY24V)
(X) TEFLON WASHER
LOCATION
VENDOR PART NO
B-3-2-2
B-08630
B-09105
B-06805
D-09570
B-09845
B-09345
C-08710
C-07105
C-08770
7900-0010
11856
09532
08916-01
BM-2522-1
R-2175
71415-07
5975-0172
72551-03
72546-02
72551-04
10147
11859
C-09385
08919-01
09529
09531
09948
08918-01
08615
B-09314
B-09842
M-630
71774-01
A 09450
B-3-2-2
71314-02
72979-04
N-1-1-4
N-1-1-4
N-1-1-4
N-1-1-4
N-1-1-4
N-1-1-4
N-1-1-4
N-1-1-4
K-11-7-3
K-11-7-3
N-7-2-2
N-7-2-2
N-7-2-2
N-7-2-2
B-3-2-2
H-1-2
B-3-2-2
B-3-2-2
B-3-2-2
B-3-2-2
B-3-2-2
B-3-2-2
I-3-3
I-3-3
B-4-1-3
B-4-1-3
B-4-1-3
I-3-3
B-4-1-3
B-4-1-3
B-4-1-3
B-4-1-3
B-4-1-3
B-4-1-3
B-4-1-3
B-08561
08576
71582-12
10198
07067
A 08528
B-08694
09770
71747-01
A402
A 04485
A-4391-1
A-4395-2
72795-01
71582-06
1
1
1
3
3
2
1
1
3
6
1
2
4
12
13
3
10
10
4
10
8
1
1
3
12
12
1
3
3
1
1
1
3
4
1
6
2
2
4
4
1
2
2
2
14
8
36
13
5
4
4
2
30
LOC
VENDOR
T22
T22
T22
T22
T22
T22
T22
T22
T22
G94
G94
G94
G94
G94
G94
G94
I43
I43
I43
I43
G94
G94
G82
G94
G94
G94
G82
G94
G94
G94
G94
G94
G94
G94
G94
G94
G94
G83
B83
B83
G94
G94
G94
B83
B83
G94
G94
G94
G94
G94
G94
G94
G94
"
"
"
"
"
"
"
"
"
B/IPC
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
No
Item no
2822 3313W-002
2823 3313Z-999
2824 3315P-051
2825 3321A-001
2826 3321B-001
2827 3321B-002
2828 3321B-003
2829 3321B-004
2830 3321B-008
2831 3321B-009
2832 3321B-010
2833 3321B-011
2834 3321B-013
2835 3321B-014
2836 3321B-015
2837 3321B-031
2838 3321B-033
2839 3321B-034
2840 3321B-038
2841 3321B-041
2842 3321B-042
2843 3321B-043
2844 3321B-044
2845 3321B-046
2846 3321B-048
2847 3321B-049
2848 3321B-051
2849 3321B-052
2850 3321B-054
2851 3321C-001
2852 3321C-004
2853 3321C-014
2854 3321C-015
2855 3321C-016
2856 3321C-017
2857 3321C-020
2858 3321C-021
2859 3321C-022
2860 3321C-023
2861 3321C-024
2862 3321C-025
2863 3321C-032
2864 3321D-002
2865 3321D-003
2866 3321D-004
2867 3321D-006
2868 3321D-007
2869 3321D-008
2870 3321E-001
2871 3321F-004
2872 3321F-021
2873 3321F-022
2874 3321F-023
METAL ETCHER
METAL ETCHER
PR STRIPPER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
DESCRIPTION
(X) WINDOW VIEW PORT
(X) PLATE
LOCATION
B-4-1-3
B-4-1-3
F-5-2
E-2-3
J-1-2-2
J-2-3-2
J-2-3-2
J-1-2-2
C-4-1-1
D-1-4-3
J-2-3-2
C-4-1-1
J-2-3-2
J-1-2-2
J-1-2-2
C-4-4-4
M-6-4-1
C-4-4-4
C-4-4-4
C-4-4-4
C-4-4-4
J-1-2-2
C-4-4-4
J-2-3-2
C-4-4-4
C-4-4-4
C-4-4-4
C-4-4-4
J-2-3-2
J-2-3-2
J-2-3-2
C-4-1-1, C-4-2-1
C-4-4-4
C-4-4-4
J-2-3-2
C-4-4-4
J-2-3-2
J-2-3-2
C-4-4-4
E-3-3-3
N-1-2-1
C-4-4-4
C-4-4-4
VENDOR PART NO
71582-03
70843-01
1
2
1
23
3
2
14
2
1
1
1
1
1
1
1
6
2
1
1
2
1
8
15
3
6
4
6
1
4
3
4
2
3
4
2
9
13
9
6
2
7
10
8
1
13
10
9
5
1
2
1
8
60
LOC
VENDOR
G94
G94
DD11
G82
T44
T44
T44
T44
T41
T42
T44
T41
T44
T22
T44
G95
T44
W15
G95
G95
G95
W15
G95
G95
W15
G95
G95
G81
T44
G95
T44
G95
G95
G95
G95
T44
T44
T44
T44
T41
G81
G94
T44
G95
T44
T44
G95
T13
X11
G95
G95
G95
G95
"
"
B/IPC
DRYTEK
DRYTEK
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
No
Item no
2875
2876
2877
2878
2879
2880
2881
2882
2883
2884
2885
2886
2887
2888
2889
2890
2891
2892
2893
2894
2895
2896
2897
2898
2899
2900
2901
2902
2903
2904
2905
2906
2907
2908
2909
2910
2911
2912
2913
2914
2915
2916
2917
2918
2919
2920
2921
2922
2923
2924
2925
2926
2927
3321F-024
3321F-026
3321F-030
3321G-001
3321G-001
3321G-002
3321G-002
3321G-003
3321G-006
3321G-007
3321G-009
3321G-009
3321G-011
3321H-002
3321H-002
3321I-001
3321I-002
3321I-003
3321I-004
3321I-005
3321I-006
3321I-007
3321I-008
3321I-009
3321I-010
3321I-011
3321I-012
3321I-013
3321I-014
3321I-016
3321I-016
3321I-017
3321I-018
3321I-019
3321I-020
3321I-021
3321I-041
3321I-042
3321I-043
3321I-044
3321L-003
3321L-004
3321L-007
3321L-022
3321M-006
3321M-007
3321M-011
3321M-012
3321M-012
3321M-013
3321M-022
3321M-037
3321N-001
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
DESCRIPTION
LOCATION
C-4-4-4
C-4-4-4
E-2-3
E-2-3
C-4-4-4, L-7-1
C-4-4-4, L-7-1
C-4-4-4
C-4-4-4
C-4-4-4
B-3-1-4
M-7-1-2
M-7-1-2
J-1-2-2
J-1-2-2
J-1-2-2
J-1-2-2
J-1-2-2
J-1-2-2
J-1-2-2
J-1-2-2
J-1-2-2
J-1-2-2
J-1-2-2
J-1-2-2
J-1-2-2
J-1-2-2
M-7-1-2
M-7-1-2
M-7-1-2
K-8-4
J-1-2-2
D-1-3-2
M-7-1-2
D-1-3-2
M-7-1-2
C-4-4-4
L-9-7
M-7-1-2
K-11-7-3
M-7-1-2
M-7-1-2
VENDOR PART NO
10
2
1
1
4
10
2
2
3
1
10
13
2
4
2
5
5
5
1
5
7
4
4
5
5
5
3
5
5
10
6
10
10
5
5
5
1
1
1
4
5
2
140
9
1
4
1
1
1
4
1
6
9
LOC
VENDOR
G95
G95
G82
G82
G82
G95
G95
G94
G95
G95
G95
G95
G83
G81
G81
T44
T44
T44
G95
T44
T44
T44
T44
T44
T44
T44
T44
T44
T44
T44
T44
T44
T44
T44
T44
T44
G95
G95
G95
G81
T44
T22
G95
T22
G95
G95
P43
P33
P43
G95
G95
G95
G95
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
No
Item no
2928
2929
2930
2931
2932
2933
2934
2935
2936
2937
2938
2939
2940
2941
2942
2943
2944
2945
2946
2947
2948
2949
2950
2951
2952
2953
2954
2955
2956
2957
2958
2959
2960
2961
2962
2963
2964
2965
2966
2967
2968
2969
2970
2971
2972
2973
2974
2975
2976
2977
2978
2979
2980
3321N-002
3321O-001
3321O-005
3321O-006
3321O-007
3321O-008
3321O-009
3321P-001
3321P-002
3321P-003
3321P-004
3321P-005
3321P-024
3321P-025
3321P-026
3321P-033
3321P-034
3321P-036
3321R-001
3321R-003
3321R-012
3321R-016
3321R-018
3321R-019
3321R-021
3321R-022
3321R-024
3321S-001
3321S-004
3321S-005
3321S-005
3321S-006
3321S-007
3321S-008
3321S-008
3321S-009
3321S-010
3321S-012
3321S-013
3321S-021
3321S-021
3321S-022
3321S-023
3321S-025
3321S-027
3321S-029
3321S-030
3321S-030
3321S-031
3321S-031
3321S-032
3321S-032
3321S-032
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
DESCRIPTION
LOCATION
M-7-1-2
J-2-3-2
J-2-3-2
E-2-3
J-2-3-2
B-3-4-4
B-3-4-4
B-3-4-4
E-2-3
B-3-4-4
K-10-4-1, D-1-4-3
J-2-3-2
J-2-3-2
B-3-4-4
B-3-4-4
B-3-4-4
H-9-3
B-3-4-4
B-3-4-4
B-3-4-4
J-1-2-2
J-1-2-2
B-3-4-4
E-3-1
J-1-2-2
J-1-2-2
J-1-2-2
B-1-2-3
B-3-4-4
B-3-4-4
B-3-4-4
B-3-4-4
B-3-4-4
B-3-4-4
J-1-2-2
B-3-4-4
B-3-4-4
B-3-4-4
B-3-4-4
B-3-4-4
B-3-4-4
B-3-4-4
B-3-4-4
B-3-4-4
VENDOR PART NO
3
4
6
1
30
30
20
2
1
1
5
3
18
17
2
2
1
10
6
10
10
16
4
18
2
7
5
1
9
1
6
4
5
25
59
6
5
1
2
1
1
2
1
12
2
5
4
14
4
1
1
1
1
LOC
VENDOR
G95
G95
G95
G95
G95
G95
G95
G83
T44
T44
G82
T44
G95
G95
G95
G82
G95
G95
T42
T44
T44
G95
G95
G95
X23
G95
G95
G95
G95
G95
T44
G95
G96
T44
T44
T44
T22
G96
G96
G96
G96
G96
G96
T44
G96
G96
G96
G96
G96
G96
T21
G96
G95
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
No
Item no
2981 3321S-034
2982 3321S-035
2983 3321S-036
2984 3321S-037
2985 3321S-040
2986 3321S-041
2987 3321S-042
2988 3321T-002
2989 3321T-006
2990 3321T-011
2991 3321T-013
2992 3321T-014
2993 3321T-022
2994 3321T-024
2995 3321T-027
2996 3321T-028
2997 3321T-031
2998 3321T-033
2999 3321T-036
3000 3321U-002
3001 3321V-001
3002 3321V-004
3003 3321V-007
3004 3321V-008
3005 3321V-009
3006 3321V-032
3007 3321W-006
3008 3351B-012
3009 3351B-014
3010 3351B-019
3011 3351B-061
3012 3351B-068
3013 3351C-025
3014 3351C-041
3015 3351C-083
3016 3351C-084
3017 3351C-086
3018 3351C-087
3019 3351C-088
3020 3351C-089
3021 3351E-011
3022 3351F-010
3023 3351F-015
3024 3351F-018
3025 3351F-081
3026 3351G-001
3027 3351G-002
3028 3351G-002
3029 3351H-011
3030 3351H-012
3031 3351L-001
3032 3351L-021
3033 3351M-001
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
ETCHER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
DESCRIPTION
LOCATION
VENDOR PART NO
B-3-4-4
B-3-4-4
B-3-4-4
B-3-4-4
B-3-4-4
B-3-4-4
E-3-3-3
E-3-3-3
M-5-3-2
J-1-2-2
E-2-1
M-5-3-2
L-7-3
J-1-2-2
B-1-2-3
M-5-3-2
M-5-3-2
M-5-3-2
M-5-3-2
M-5-3-2
M-5-3-2
M-5-3-2
M-5-3-2
B-1-2-3
M-5-3-2
(Y)TIMING BELT
(Y)TIMING BELT
TIMING BELT
(Y)PCB INPUT
ROLLER TIMING BELT
TEMP CONTROLLER
SLIP CLATCH
(Y)CN28 (LOADER-CHAR
CN28 SENSE CABLE
CN29 SENSE CABLE
(Y)CN33A (LIFTER ) S
CN33A SENSE CABLE
(Y)CN33B (LIFTER) SE
(Y)ELECTRODE
(X)OIL FILTER ELEMENT
(X)CON INED CHEMICAL
(X)FILTER HOUSING CARTRIDGE
CHAMBER FLANGE 1
GEAR HEAD
(L)WAFER GUIDE(A)6"
(L)WAFER GUIDE(A)6"
HEATER BLOCKET 1
HEATER BLOCKET 2
HALOGEN LAMP
LM GUIDE(PUSHER)
(Y)DC MOTOR
130T-80-6.4K
TID-15-145
T10-15-15-145
D-2-5-2
B-3-4-1
B-3-4-1
L-12-2-2
L-12-2-2
L-12-2-2
B-3-4-1
L-12-2-2
J-5-1
E-2-2
E-2-2
J-4-1-1
K-3-1-4
A-3-6
A-3-6
N-6-4-3
N-6-4-3
D-3-2-1
H-1-2
71-MxL-6.4
REX-P101F4C-RAN*
MSC-2-C-3x6
MC24LSF
MC24SM
MC20SM
MC16SF
MC16LSM
MC12SF
AP3-16688
AT511-00VG2
A223-04-091
AP2-16759-C
2GK-25
AP2-10255-A
AP2-10255-A
AP3-24816
AP2-24817
200V 1.3KW
NSR-15TBA-1UU-2
MH23C LH50 DC12
9
110
5
1
3
3
1
10
10
2
1
1
3
50
2
2
11
1
8
13
5
2
7
2
3
18
7
5
2
1
1
10
1
1
7
3
5
2
3
2
1
1
1
1
4
2
2
14
2
2
1
5
2
LOC
VENDOR
W15
G96
G96
G96
G96
G96
G96
T13
T13
G95
T44
T23
G95
W15
T44
T22
G95
G95
G95
G97
G95
G95
G95
G95
G95
T22
G95
H21
H12
H21
T14
H21
G62
G15
G15
G17
G17
G17
G15
G17
I31
DD14
DD14
G66
H23,Z19
P25
H23
H23
I41
I41
G91
G31,W15
P53
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
PSC
"
"
PSC
"
"
PSC
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
No
Item no
3034
3035
3036
3037
3038
3039
3040
3041
3042
3043
3044
3045
3046
3047
3048
3049
3050
3051
3052
3053
3054
3055
3056
3057
3058
3059
3060
3061
3062
3063
3064
3065
3066
3067
3068
3069
3070
3071
3072
3073
3074
3075
3076
3077
3078
3079
3080
3081
3082
3083
3084
3085
3086
3351M-002
3351M-006
3351M-006
3351M-007
3351M-016
3351M-019
3351M-022
3351P-002
3351P-011
3351P-061
3351R-007
3351S-007
3351S-013
3351S-019
3351S-023
3351S-031
3351S-033
3351S-054
3351S-066
3351T-043
3351V-002
3351V-015
3352A-001
3352A-003
3352A-004
3352A-005
3352A-006
3352B-001
3352B-002
3352B-003
3352B-004
3352B-006
3352B-007
3352B-008
3352B-009
3352B-031
3352B-051
3352B-052
3352B-053
3352B-054
3352C-001
3352C-002
3352C-004
3352C-006
3352C-011
3352C-013
3352C-014
3352C-015
3352C-016
3352C-021
3352D-001
3352D-002
3352E-001
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
DESCRIPTION
DC MOTOR CONTROLLER
DC MOTOR
DC MOTOR
(Y)AC MOTOR
DC MOTOR
DC MOTOR
DC MOTOR MM23E
(Y)POWER SUPPLY PLAS
(Y)CONTROL PACK
PUSHER ASS'Y 6"
(L)REFLECTING PLATE
(Y)TEMP CONVERTER
(Y)DIGITAL PRESSURE SENSOR
BEAM SENSOR
(Y)FLOM SWITCH
POWER SUPPLY
FRONT SEAL
(Y)STOPPER
SCREW SHAFT(PUSHER)
(Y)AL TUNNEL SET
PROMATIC VALVE
(X)5"NEELDE VALVE
(Y)ASSY PC HTC CONT
(Y)ASSY DR VAL/INTLK
(Y)ASSY SYSTEM 1/FACE
(Y)ASSY FLOW CONTROL
(Y)ASSY INLINA F/C L
(Y)BURSH
(Y)BELT POLYURETHANE
(Y)BRUSH, ASSY
(Y)BRACKET, ROTATE
(Y)RECTIFIER BRIDGE
(Y)WELD BOWL
(Y)PNEUMALODIC PCB
(C)BEARING BALL
(Y)SPECAR, BEARING
(Y)BREAKER, FUSE HOL
(Y)BREAKER, FUSAHOLD
(Y)BREAKER,FUSE HOLD
(Y)BREAKER,FUSAHOLDE
(Y)CYLINDER
(Y)CYLINDER
(Y)ASSY,DOOR LOCK CY
(Y)MOTOR SPEED CONTR
(Y)CARD
(Y)CAP HUB
(Y)CONTRACTOR
(Y)COUPLING, 8 PORT
(Y)COUPLING,ACATAL 8
(Y)COLLAR SPRAY POST
(Y)DLAPHRAGM, QUICKD
(Y)BURST DISK 42-47
(Y)ELBOW, PYDF 3/32T
LOCATION
VENDOR PART NO
M-2-1-3
H-1-2
H-1-2
MS-10
MW23E-H1-60
OPT-IN32
MW23E-H1-60
MM23E-LH-2.5
MM32AH2L-12.5
MM23E-H1-60 DC24
PM2501A
SS31MA-J
PSC-304AVL3
AP3-30096
VTI48C O-400C O
MM23E-LH-2.5
RS-520HI
IFW-S10-03-00
FMP05-2RO
AP4-16704
AP4-12229
AP3-11932
AP4-23438
PAV-40
TYPOE 3 CV 0.03
ZT-18-123-3
290062-400
290025-400
900292-002
900662-001
230240-001
301740-006
230300-001
0992-80178
300511-001
402766-001
909-0563
301006-001
405049-001
230201-001
230201-010
230201-006
230201-002
300555-001
300527-001
901032-001
230488-001
300533-001
403037-001
230107-001
300893-002
300893-001
403905-001
302121-001
302898-001
301089-004
H-1-2
H-1-2
N-6-4-3
B-4-1-1
D-2-5-2
D-3-2-1
M-6-2-1
D-3-2-1
A-3-1
N-3-4-4
E-2-2
N-3-4-4
J-2-1-2
L-11-3-4
J-2-1-2
M-2-1-3
E-2-2
L-12-1-3
N-6-4-3
N-2-1-4
N-6-4-3
D-10-3
M-2-1-3
N-6-4-3
N-6-4-3
B-4-2-1
B-4-2-1
B-4-2-1
B-4-2-1
N-6-4-3
M-2-1-3
M-2-1-3
B-4-2-1
B-4-2-1
B-4-2-1
2
2
2
1
2
1
2
1
1
1
4
1
1
3
1
1
4
3
3
3
2
1
1
1
1
1
1
13
2
8
1
2
1
1
2
1
2
3
3
1
1
1
2
1
2
3
1
1
1
1
2
1
5
LOC
VENDOR
T63
P54
P54
P12
P44
P53
P53
V11
G17
G34
I41
G16
T14
W15
R51
W15
H23
I41
G68,W18
X11
G31
I41
T62
T63
T62
T63
G62
G14
H21
I41
I32
I41
X32
T63
I41
I41
G13
G13
G13
G12
I41
I32
G14
T63
T63
H23
G13
G12
G13
H23
H21
H23
H23
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
PSC
"
"
"
"
METRON
METRON
"
"
"
"
"
"
"
"
METRON
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
No
Item no
3087
3088
3089
3090
3091
3092
3093
3094
3095
3096
3097
3098
3099
3100
3101
3102
3103
3104
3105
3106
3107
3108
3109
3110
3111
3112
3113
3114
3115
3116
3117
3118
3119
3120
3121
3122
3123
3124
3125
3126
3127
3128
3129
3130
3131
3132
3133
3134
3135
3136
3137
3138
3139
3352F-002
3352F-003
3352F-021
3352F-031
3352F-032
3352G-001
3352G-002
3352G-011
3352G-012
3352H-002
3352I-001
3352I-003
3352I-004
3352L-001
3352L-002
3352M-001
3352M-002
3352M-003
3352M-004
3352M-006
3352N-001
3352N-002
3352N-003
3352N-004
3352N-005
3352N-021
3352O-002
3352O-003
3352O-004
3352O-005
3352O-006
3352O-007
3352O-008
3352O-009
3352O-010
3352O-011
3352O-013
3352O-014
3352O-015
3352O-016
3352O-017
3352O-018
3352O-019
3352O-020
3352O-021
3352O-022
3352O-023
3352O-024
3352O-025
3352O-026
3352O-027
3352O-028
3352O-029
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
DESCRIPTION
(Y)ELEMENT FILTER
(Y)FILTER ELEM.,YITON
(Y)FITTING, KYNAR 1/
(Y)FILTER HOUSING
(Y)FILTER ELEMENT
(Y)GAUGE
(Y)GAUGE
(Y)GASKET SPRAY POST
(Y)GASKET, TRAMSDUCE
(Y)ELEMENT HEATER
(Y)WTR IMMERSION 200
(Y)IC UA78540PC
(Y)TACH/INDEX
(Y)LIGHT RED 110V
(Y)LED, DL2416MSP
(X)MOTOR 1DDD/3 HP
(Y)STARTER MOTOR
(Y)MOTOR, IRPM 12BDC
(Y)ASSY,AT MOTOR
(Y)MOTOR 1/3 HP90VDC
(Y)NOZZLE
(Y)NOZZLE
(Y)NOZZLE
(Y)NOZZLE,SPRAY (LO
(Y)NOZZLE,SPRAY 1/4P
(Y)NUT,HEX
(Y)O-RING
(Y)O-RING
(Y)O-RING
(Y)O-RING
(Y)O-RING
(Y)O-RING
(Y)O-RING
(Y)O-RING
(Y)O-RING
(Y)O-RING
(Y)O-RING
(Y)O-RING
(Y)O-RING
(Y)O-RING
(Y)O-RING
(Y)O-RING
(Y)O-RING
(Y)O-RING
(Y)O-RING
(Y)O-RING
(Y)O-RING
(Y)O-RING
(Y)O-RING
(Y)O-RING
(Y)O-RING
(C)O-RING
(Y)O-RING
LOCATION
H-10-2
E-1-3
H-10-2
H-9-2
L-12-1-3
L-12-1-3
N-6-4-3
L-7-1
M-2-1-3
B-4-2-1
B-4-1-1
H-1-1
N-6-4-3
VENDOR PART NO
300523-001
301312-005
300834-004
300854-001
300525-001
300562-001
300322-001
402437-001
409165-002
300749-001
300414-002
250114-001
902101-001
0080
250106-001
230130-001
280010-001
909-1005
280030-001
900252-001
900252-002
900252-003
402218-001
302105-001
402008-001
300011-238
300038-010
300916-012
300038-230
300916-010
300038-115
300038-012
300038-117
300038-219
300038-008
300038-114
30038-030
300038-373
300038-241
300896-215
300038-118
300038-022
300038-337
300038-153
300038-108
300038-343
300038-036
300038-018
300916-008
300916-022
300917-008
300917-012
5
3
6
3
3
1
1
4
1
2
1
2
1
1
2
2
1
1
2
2
10
10
10
10
7
1
10
10
10
10
10
6
4
2
5
9
1
4
5
3
4
6
7
6
8
4
2
1
1
3
1
3
1
LOC
VENDOR
G74
G32
H23
G74
G13
G14
G14
H23
H23
I41
I34
T63
G14
G13
G16
P32
T63
V11
P53
P55
H21
H21
H23
H23
H23
I41
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
No
Item no
3140
3141
3142
3143
3144
3145
3146
3147
3148
3149
3150
3151
3152
3153
3154
3155
3156
3157
3158
3159
3160
3161
3162
3163
3164
3165
3166
3167
3168
3169
3170
3171
3172
3173
3174
3175
3176
3177
3178
3179
3180
3181
3182
3183
3184
3185
3186
3187
3188
3189
3190
3191
3192
3352O-030
3352O-031
3352O-032
3352O-033
3352O-034
3352O-035
3352O-036
3352O-037
3352O-038
3352O-039
3352O-040
3352O-041
3352O-042
3352O-043
3352O-044
3352O-045
3352O-046
3352O-047
3352O-048
3352O-049
3352O-101
3352O-102
3352P-005
3352P-011
3352P-012
3352P-013
3352P-015
3352R-001
3352R-002
3352R-003
3352R-004
3352S-007
3352S-008
3352S-011
3352S-012
3352S-014
3352S-015
3352S-016
3352S-019
3352S-020
3352S-032
3352S-035
3352S-037
3352S-041
3352S-061
3352T-001
3352T-002
3352T-003
3352T-004
3352T-005
3352T-006
3352T-007
3352T-021
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
DESCRIPTION
(C)O-RING,KALREZ
(Y)O-RING
(Y)O-RING
(Y)O-RING
(Y)O-RING
(Y)O-RING
(Y)O-RING
(Y)O-RING
(Y)O-RING
(Y)O-RING
(Y)O-RING
(Y)O-RING
(Y)O-RING
(Y)O-RING
(Y)O-RING
(Y)O-RING
(Y)O-RING
(Y)O-RING
(Y)O-RING,VITON-QUAD
(Y)O-RING DOOR
(Y)ORTFICE
(Y)ORTFICE
(Y)ASSY CONTROL PANE
(Y)PLUG VINYL PORT
(Y)PROBE TEMP
(Y)POWER SUPPLY 5V
(Y)PC ASSY 2800 POWE
(Y)REGULATOR
(X)REGULATOR
(Y)REGULATOR
(Y)STRAIN RELIEF
(Y)SWITCH
(Y)SWITCH
(Y)SWITCH
(Y)SWITCH
(Y)SWITCH
(Y)LINITED SWITCH, A
(Y)ASSY,LIMITSWITCH
(Y)ASSY,LIMITED SWIT
(Y)TOGGLE SWITCH (15
(Y)PIN SHAFT
(Y)SEAL BOOT
(Y)BEARING SEALED
(Y)ASSY,CHAIN SENSOR
(Y)SCR, SLFHNYLN
(Y)TIMER 120V
(Y)INDICATOR DIGITAL
(Y)52SY TRAMSDUER DOUBLE 6"
(Y)TRAMSISTOR, 5AMPS
(Y)TRAMSISTOR, RFPWR
(Y)TEE FFMPFA 1/4PNPT1/4
(Y)ASSY TACG FIR IND
(Y)TUBING TRAN
LOCATION
E-2-2
K-3-4-2
B-3-4-1
B-4-1-1
K-3-4-2
B-3-4-1
B-4-2-1
K-3-4-2
B-3-4-1
N-6-4-3
B-3-4-1
B-3-4-1
B-3-4-1
B-4-2-1
B-3-4-1
B-3-4-1
B-3-4-1
N-6-4-3
N-1-2-1
B-4-2-1
B-4-1-1
B-4-1-1
M-3-4
B-4-1-1
B-4-1-1
B-4-2-1
VENDOR PART NO
300917-010
300917-022
300896-335
301442-335
300777-241
300777-219
300777-030
300777-010
300777-022
300777-012
300777-008
300777-373
300917-030
300925-001
300919-231
300919-111
300919-342
300894-001
302120-001
403179-001
401562-002
401562-003
900928-001
300603-001
300429-001
2024
290019-400
300377-001
300837-001
300820-001
300202-019
300541-001
230023-002
230060-001
230082-002
2747
300982-002
900943-001
900943-004
230229-001
402160-001
402746-001
300010-006
989-0001
300842-015
280016-002
2593
909-1313
230696-001
230689-001
3000143-002
901020-001
2436
5
1
1
1
1
1
1
1
1
1
3
1
1
12
5
3
6
2
1
2
7
7
1
7
2
1
1
1
1
1
2
2
2
1
1
1
1
2
2
1
2
1
2
2
10
1
1
1
1
1
20
1
1
LOC
VENDOR
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H21
H23
H23
G15
H72
G15
V11
G16
H72
G15
G13
H72
G15
I41
G15
G15
G15
G13
G15
G15
G15
I41
H21
W15
G13
H23
G16
G16
T15
G16
G16
H23
G13
H23
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
No
Item no
3193 3352U-005
3194 3352V-003
3195 3352V-011
3196 3352V-014
3197 3352V-019
3198 3352V-031
3199 3353A-011
3200 3353B-001
3201 3353B-002
3202 3353B-005
3203 3353B-006
3204 3353C-003
3205 3353C-004
3206 3353C-011
3207 3353C-021
3208 3353C-022
3209 3353D-001
3210 3353D-002
3211 3353D-003
3212 3353E-001
3213 3353F-021
3214 3353L-001
3215 3353L-001
3216 3353L-002
3217 3353O-002
3218 3353O-005
3219 3353O-007
3220 3353O-009
3221 3353O-014
3222 3353O-015
3223 3353P-002
3224 3353P-003
3225 3353P-005
3226 3353P-022
3227 3353P-024
3228 3353R-003
3229 3353S-012
3230 3353S-013
3231 3353S-018
3232 3353S-019
3233 3353S-021
3234 3353S-021
3235 3353S-022
3236 3353S-023
3237 3353T-002
3238 3353V-004
3239 3353W-001
3240 3353W-002
3241 3355B-001
3242 3355B-002
3243 3355B-002
3244 3355B-003
3245 3355B-004
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
DESCRIPTION
(Y)ASSY ROTARY UNION
(Y)VALVE
(Y)NEEDLE VALVE
(Y)VALVE CHECK
(Y)NEEDLE VALVE FOR
(Y)GRAMMET VITON
(Y)5"FLAG ARM ASSY
(Y)5"BREAKET FRONT
(Y)5"BRACKET REAR WA
(Y)5"BRACKET REAR WF
(Y)5"OPTICAL INTERRU
(Y)5"CYLINDER AIR DBL ACT
(Y)5"VACUUM CHUCK
(Y)5"ASSY CABLE HIGH
(Y)5"STOP CYLINDER
(Y)5"AIR CYLINDER SI
(Y)5"QUARTZ DEFFUSIO
(Y)5"DOOR
(Y)5"DIODE MICROWAVE
(Y)5"ASSY AURA MOD E
(Y)5"WAFER FRAME
(Y)5"LAMP-1000W 120V
(Y)5"LAMP-1000W 120V
(Y)5"LAMP 24V
(Y)5"O-RING SILICONE
(C)O-RING(3997O-422)
(Y)5"O-RING TEFLON COATED
(Y)5"O-RING TEFLON COATED
(Y)5"PIN, WAFER SUPP
(Y)5"PIN,WAFER SUPPO
(Y)5"CONN PINS FEMALE MOLEX
(Y)5"ASSY PREFIRE-AU
(Y)5"PLATE LIFTER
(Y)5"RING EMISHIELD
(Y)5"SCREW 2-56X1/8
(Y)5"DOOR SCREW
(Y)5"SET SCREW FULL
(Y)5"SCREW PAN HEAD
(Y)5"SPRING COMPRESS
(Y)5"SPRING COMPRESS
(Y)5"SHOWER HEAD QUARTZ
(Y)5"DOOR SPRING
(Y)5"TUBE, QUARTZ PLASMA
(Y)5"VALVE SOLENOID
(Y)5"WINDOW
(Y)5"WINDOW QUARTZ
(Y)PCB TRANSPORT CON
(Y)PROCESS INTERFACE
(Y)PROCESS INTERFACE
(Y)PCB TRANSPORT INTERFACE
(Y)PCB PROCLSS CONTROLLER
LOCATION
B-4-2-1
B-3-4-1
K-3-4-2
N-6-4-3
N-3-4-4
N-3-4-4
N-3-4-4
N-3-4-4
B-4-1-1
N-3-3-2
N-3-4-4
N-6-4-3
M-7-1-3
N-6-4-3
K-3-4-2
L-12-2-2
N-3-4-4
K-3-4-2
N-3-4-4
N-3-4-4
L-12-2-2
N-6-4-3
N-6-4-3
N-3-4-4
N-6-4-3
N-3-4-4
N-3-4-4
N-3-4-4
N-3-4-4
M-7-1-3
L-12-2-2
M-7-1-3
M-7-1-3
J-4-3-4
J-3-5
N-3-4-4
J-3-5
VENDOR PART NO
901878-001
300457-001
300951-001
300743-009
400995-001
300313-001
A02-064-01
A02-082-01
A02-084-01
A02-084-04
A90-004-01
A07-006-01
A01-102-01
A96-018-01
A01-080-01
A93-022-01
A06-007-01
A01-076-01
A35-002-01
A95-031-01
A02-083-01
A39-001-01
A39-001-01
A39-005-01
A78-003-01
A78-006-01
A78-008-01
A78-015-01
A78-029-01
A78-030-01
A01-071-01
A01-071-02
34-0041-01
A95-027-01
A02-088-01
A01-003-01
18-0273-00
A16-1072-05
A18-006-01
A18-009-01
A17-001-01
A17-001-01
A06-005-01
A17-017-01
A06-004-01
A22-010-03
A06-002-01
A06-001-01
1000-000003
1000-000017
1000-000017
1000-000019
1
1
1
2
1
8
1
8
1
1
7
1
2
1
4
4
3
1
2
1
1
1
6
5
1
3
3
1
1
2
3
1
15
2
2
2
3
15
4
4
6
10
1
11
3
3
1
1
1
1
1
1
1
LOC
VENDOR
G13
G15
H71
I41
H23
H21
I41
I41
I41
I41
G16
W21
I41
G17
I41
I41
H31
I41
H72
G17
I41
W15
W15
G17
H21
H21
H21
H21
H21
H21
H72
I41
I41
G17
I41
I41
I41
I41
I41
I41
I41
I41
H31
I41
H31
G17
H31
H31
V13
W11
W11
T34
T34
"
"
"
"
"
"
GESONIC
"
"
"
"
GESONIC
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
MATRIX
"
"
MATRIX
"
No
Item no
3246
3247
3248
3249
3250
3251
3252
3253
3254
3255
3256
3257
3258
3259
3260
3261
3262
3263
3264
3265
3266
3267
3268
3269
3270
3271
3272
3273
3274
3275
3276
3277
3278
3279
3280
3281
3282
3283
3284
3285
3286
3287
3288
3289
3290
3291
3292
3293
3294
3295
3296
3297
3298
3355B-007
3355B-009
3355B-010
3355B-012
3355B-014
3355B-041
3355B-042
3355B-051
3355B-052
3355B-081
3355B-083
3355B-084
3355C-001
3355C-002
3355C-002
3355C-005
3355C-006
3355C-007
3355C-008
3355C-009
3355C-012
3355C-014
3355C-015
3355C-021
3355C-022
3355C-031
3355C-032
3355C-033
3355C-033
3355C-034
3355C-034
3355C-041
3355C-051
3355C-061
3355C-101
3355C-102
3355C-103
3355C-104
3355D-001
3355D-002
3355D-003
3355D-004
3355D-007
3355D-008
3355E-002
3355E-003
3355E-005
3355E-006
3355F-003
3355F-031
3355F-061
3355G-001
3355G-002
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
DESCRIPTION
(Y)PCB OPERATOR INTERFACE
(Y)PCB, OPERATOR INT
(Y)3NSULATOR,BELLOWS
(Y)ASS'Y BELLOWS CARTRIDGE
ASSY,BELLOWS 1/2
(Y)BAFFLE,QUARTZ INSULATOR
(Y)BAFFLE QZ 1/2"
(Y)BRACKET ROTATE
BRACKET RETPACT
BELLOWS ASSY
(Y)BELLOWS ASSY MOVA
BELLOWS ASSY
(Y)AIR CAP
(Y)CAPACITOR AIR CAP
(Y)CAPACITOR AIR CAP
(Y)CONN.4P 18AWG DISPLAY
(Y)CONN.25P "D"RIBBO
RECEPTACLE.ASSY,37OU
(Y)RECEPTACLE.ASSY,2
(Y)CASSETTE TABLE
(Y)TCHAMBER INSULATE
CABLE.HEATER THERM/P
LAPTOP CABLE(RS232)
PROGRAM CARD
(Y)CLEANER, CARD
(Y)DOOR CYLINDER
(Y)STAND OFF PINS CY
(Y)PLATE MOUNT PINS
(Y)PLATE MOUNT PINS
(Y)CYLINDER PANLAKE
(Y)CYLINDER PANLAKE
(Y)TEMP CONTROLLER
(Y)CARD READER/ENCOD
(R)CHAMBER
CHUCK ASSY
INDEXER CASSET
(Y)CAP ASS'Y TUNE
(Y)CAP ASS'Y SHUNT
(Y)END POINT DETECTO
(Y)PLASMA DOT DISPLA
(Y)ASSY,ENDPOINT DET
(Y)KIT,DOOR UPGRADE TTW
KIT DOOR UPGRADE SA
(Y)PLATE,DOOR
EPRO, SET,VERS 4.07
(Y)ELECTRODE GOUND
EPROM SET, VER 4.07B
ELECTRODE, RF
(Y)ASSY,RF FILTER
(Y)FLEXTURE, EXT/RET
(Y)FITTING, 0.06" DI
(Y)GEAR, 14 TEETH
GEAR, 80 TEETH
LOCATION
J-3-5
J-3-5
N-3-4-4
N-3-4-4
A-5-2
J-3-5
N-3-4-4
N-3-4-4
B-4-2-1
B-4-2-1
B-4-2-1
N-3-4-4
N-3-4-4
K-3-4-2
B-4-2-1
B-4-2-1
B-4-2-1
N-3-4-4
N-2-2-1
B-4-2-1
B-4-2-1
B-4-2-1
B-4-2-1
N-3-4-4
N-3-4-4
N-3-4-4
N-3-4-4
N-3-4-4
N-3-4-4
B-4-2-1
B-4-2-1
M-7-1-3
N-3-4-4
N-3-4-4
N-3-4-4
B-4-1-1
D-1-3-2
B-4-1-1, F-2-1
G-1-4
N-4-4-2
J-2-2-1
B-4-1-1, N-7-2-1
J-2-2-1
N-3-1-4
B-4-2-1
K-3-4-2
B-4-1-1
N-4-4-2
B-4-1-1
VENDOR PART NO
1000-000027
1000-000049
0992-060125
0101-0484
1010-000691
0993-020158
0992-060148
0992-080178
0992-080179
0101-000339
0101-000226
0101-000484
0990-027004
0990-027010
0990-027010
0990-084028
0990-084029
0990-083006
0990-083008
0101-000322
0992-040266
1070-000123
0996-010031
0101-000067
0996-010007
0995-099777
0993-040086
0993-020191
0993-020191
0995-010597
0995-010597
0995-099733
0995-010507
0992-060147
0101-000247
0995-010512
0101-000208
0101-000207
0101-000032
0995-010505
0101-000401
0101-000755
0101-000842
0993-020179
0990-067143
0992-040375
0990-067159
0992-070051
0101-000510
0992-060252
0994-050038
0993-080007
0993-080008
1
3
2
3
3
4
2
6
4
6
4
5
2
1
1
6
2
3
2
2
1
2
2
28
6
7
3
1
3
2
1
2
1
3
1
2
2
2
1
2
1
5
2
2
1
2
1
2
4
1
1
3
2
LOC
VENDOR
T34
W11,T34
H23
I41
I41
H31,X21
W11,T34
I41
I41
G14
G14,I41
I41
G14
I41
I41
H72
G14
G14
G14
I41
I32
G14
G14
G14
G14
I41
I41
I41
I41
I41
I41
G14
G14
H31
I41
G44
I41
I41
G13
T22
G13
X52
G32
I41
T64
G13,G32
T64
I41
G14
H72
G13
I41
G13
"
"
MATRIX
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
No
Item no
3299
3300
3301
3302
3303
3304
3305
3306
3307
3308
3309
3310
3311
3312
3313
3314
3315
3316
3317
3318
3319
3320
3321
3322
3323
3324
3325
3326
3327
3328
3329
3330
3331
3332
3333
3334
3335
3336
3337
3338
3339
3340
3341
3342
3343
3344
3345
3346
3347
3348
3349
3350
3351
3355G-003
3355H-021
3355I-001
3355I-010
3355I-011
3355I-011
3355I-012
3355I-031
3355L-001
3355M-002
3355M-002
3355M-003
3355M-006
3355M-008
3355M-009
3355O-002
3355O-003
3355O-004
3355O-005
3355O-006
3355O-010
3355O-011
3355O-012
3355O-013
3355P-002
3355P-007
3355P-011
3355P-012
3355P-013
3355R-021
3355S-001
3355S-002
3355S-003
3355S-006
3355S-007
3355S-007
3355S-008
3355S-008
3355S-009
3355S-010
3355S-011
3355S-012
3355S-013
3355S-021
3355S-032
3355S-033
3355S-041
3355S-051
3355S-052
3355T-001
3355T-041
3355T-051
3355T-052
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
P.R STRIPPER
P.R STRIPPER
P.R STRIPPER
P.R STRIPPER
P.R STRIPPER
P.R STRIPPER
P.R STRIPPER
P.R STRIPPER
P.R STRIPPER
P.R STRIPPER
P.R STRIPPER
P.R STRIPPER
DESCRIPTION
(Y)GEAR, 9 TEETH PIN
(Y)HEATER ELEMENT,CE
EPROM VERSION 4.01.2
ISOLATION VALVE,STRI
(Y)INSULATOR LOWER R
(Y)INSULATOR LOWER R
(Y)IC,AD7521/DAC1222
INDUCTOR, OUTPUT
(Y)LOCATOR PIRS
(Y)MOTOR, ORBITRON S
(Y)MOTOR, ORBITRON S
(Y)ORBITRON LIFT MOT
(Y)DC MOTOR(RATIO 17
MATCHING NETWORK,RF
MATCHING NET WORK
(Y)O-RING CHAMBER BASE
(Y)O-RING CHAMBER QU
(Y)O-RING CHAMBER TO
(Y)O-RING VAC VALVE
(Y)O-RING SILICONE
(Y)O-RING BALLOWS BO
(Y)O-RING,RED SILICO
(Y)LOCATOR PINS
LAPTOP.NOTE PC
PIN WAFER SUPPORT
(Y)PIN,WAFER POSITIO
PIN,WAFER LIFT SS BE
(Y)RELAY,SOLID STATE,DC POWER
(Y)SENSOR ORBITRON UNIT
(Y)FLOW SWITCH NYRON
(Y)LAMP PUSH BUTTON
(Y)PANEL DISPLAY S/W
(Y)PCB AUTOTUNE SENS
(Y)PCB AUTOTUNE SENS
(Y)ASSY,DOOR POSITTI
(Y)ASSY,DOOR POSITTI
ASSY,ORBITRAN LIFT S
(Y)ASSY,ORBITRAN EX(Y)THERMOSWITCH SURF
(Y)ASSY,COOLING STAG
(Y)ASSY,VAC SPATULA
(Y)SWITCH, HALL EFFECT
(Y)SCREW
(Y)SCREW
(Y)STUD
PIN WAFER SUPPORT
(Y)SPACER,CHUCK CENT
(Y)TERMOCOUPLE ASSY
(Y)ASSY CHUCK TEMP S
(Y)TRANSISTOR 120
(Y)TRANSISTOR 125
LOCATION
N-4-4-2
N-4-4-2
J-2-2-1
B-4-1-1
K-4-5-1
K-4-5-1
J-2-2-1
N-4-4-2
K-4-5-1
B-4-1-1
H-1-1
I-7-2
J-2-1-1
K-4-5-1
K-4-5-1
K-4-5-1
K-4-5-1
B-4-1-1
B-4-1-1
B-4-2-1
B-4-1-1
B-4-2-2
B-4-1-1
B-4-1-1
B-4-1-1
B-4-1-1
B-4-1-1
B-4-1-1
B-4-1-1
E-2-1
N-4-4-2
B-4-1-1
N-4-4-2
N-4-4-2
N-4-4-2
K-4-5-1
B-4-1-1
N-5-2
J-2-2-1
VENDOR PART NO
0993-080009
0995-099782
0990-067129
0101-0385
0992-060126
0992-060126
0990-066002
0992-030034
0992-600092
0995-010556
0995-010556
0995-010521
KBB00101-1816D
0995-099753
0996-010050
0994-060006
0994-060007
0994-060017
0994-060029
0994-060050
0994-060064
0994-060080
0994-060081
0994-060082
0992-060092
0995-010647-HD
0992-060135
0992-060111
0992-060137
0990-094003
0990-053005
0990-094012
0990-095010
0995-010532
1000-000016
1000-000016
0101-000450
0101-000450
0995-010519
0995-010520
0995-099781
0101-000754
0101-000575
0990-095042
0994-010223
0994-010201
0992-040211
0992-060121
0993-040108
0101-000250
0101-000443
0990-053002
0990-053003
8
1
2
3
2
1
10
3
6
6
1
2
4
1
1
2
8
7
11
4
5
3
4
5
5
1
12
8
12
1
2
1
50
4
4
1
2
1
2
4
1
2
2
1
20
3
4
2
3
2
1
6
6
LOC
VENDOR
I41
I41
T64
G13
H51
H51
T64
I41
H51
V12
V12
G16
P53
X22
X32
H21
H21
H21
H21
H21
H21
H21
H21
H21
H51
G34
H51
H51
H51
G13
G13
G13
G13
G12
G16
G16
G13
G13
G16
G16
G13
G44
I41
G13
I41
I41
I41
H51
H23
G13
T21
T64
T64
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
MATRIX
"
"
"
"
"
"
"
"
"
"
"
No
Item no
3352
3353
3354
3355
3356
3357
3358
3359
3360
3361
3362
3363
3364
3365
3366
3367
3368
3369
3370
3371
3372
3373
3374
3375
3376
3377
3378
3379
3380
3381
3382
3383
3384
3385
3386
3387
3388
3389
3390
3391
3392
3393
3394
3395
3396
3397
3398
3399
3400
3401
3402
3403
3404
3355V-001
3355V-002
3355V-003
3355V-004
3355V-006
3355V-008
3355V-009
3355V-010
3355V-021
3356B-004
3356B-021
3356B-022
3356B-024
3356B-025
3356B-026
3356F-002
3356G-001
3356G-002
3356M-001
3356M-002
3356M-003
3356M-004
3356M-005
3356O-001
3356S-001
3356S-002
3356S-003
3356S-004
3356S-021
3357F-002
3357F-033
3357G-003
3357G-004
3357I-001
3357R-002
3357R-031
3358A-001
3358B-002
3358B-004
3358C-001
3358C-002
3358C-003
3358C-007
3358C-008
3358C-009
3358C-010
3358C-011
3358C-012
3358C-013
3358C-021
3358D-001
3358D-011
3358F-011
P.R STRIPPER
P.R STRIPPER
P.R STRIPPER
P.R STRIPPER
P.R STRIPPER
P.R STRIPPER
P.R STRIPPER
P.R STRIPPER
P.R STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
DESCRIPTION
(Y)ISOLATION VALVE
(Y)VALVE CLIPPARD
(Y)BLEED VALVE
(Y)DOOR VALVE
(Y)DLIP VALVE 24V DC
VALVE,ISOLATION VAC
(Y)VALVE, AIR
(Y)VALVE SLIT DOOR E
(Y)ASSY,DOOR/PIN DRI
LOCATION
B-4-1-1
B-4-1-1
B-4-1-1
B-4-1-1
B-4-1-1
N-4-4-2
B-4-1-1
B-4-1-1
B-4-1-1
J-2-1-2
N-1-2-1
M-6-4-1
N-6-4-3
N-6-4-3
N-6-4-3
N-6-4-3
N-6-4-3
N-6-4-3
B-3-2-3
VENDOR PART NO
0101-000095
0995-016510
0995-016512
0995-016514
0995-016521
0995-016519
0995-016526
0995-016546
0101-000425
1000-000042
N-4-5-2
N-4-5-2
N-6-4-3
B-3-2-3
N-6-4-3
N-6-4-3
(Y)FILTER,SHORT STACK
(Y)FUSE,5 AMP,5X20 MM
(Y)GASKET,3 PORT
(Y)GASKET,4 PORT
(Y)INSULATOR,THERMOCOUPLE
(Y)RELAY,10AMP,24VAC,SOC MNT
(Y)KIT,NUPRO REBUILD
(Y)ALARM AVDIBLE SC-110
(Y)PWA SCR CONTROL
(Y)PC ASSY, 1 PHASE-2 SCR 120V
(Y)COLLAR QTZ 1.25 HOLE
(Y)CHAMBER QTZ PLASMA
(Y)COLLAR Q'TZ 1.00" HOLE
(Y)CIRCUIT BREAKER 2 POLE,1AMP
(Y)CIRCUIT BREAKER 2 POLE,15A
(Y)IRCUIT BRKR30A-2P,120/240V
(Y)CIRCUIT BREAKER, 1POLE, 5A
(Y)CIRCUIT BREAKER 1POLE10A,AC
(Y)IRCUIT BREAKER 1POLE, 20AMP
(Y)CB, 2-POLE, 20 AMP
(Y)MODIFIED BRD,GRAPHICS CONT
(Y)DIODE (IN4007)
(Y)FLOPPY DISC,3.5",DRIVE-MOD
(Y)FILAMENT XFMER
H-9-2
B-3-2-3
K-4-5-1
B-3-2-3
G-2-4-1
B-3-2-3
914-91003-00
932-22005-00
914-14012-00
914-14013-00
916-11002-00
933-11004-00
914-11017-00
71353-02
L-12-1-3
B-3-2-3
B-3-2-3
B-3-2-3
B-3-2-3
B-3-2-3
B-3-2-3
73797-05
16337-01
16359-01
16337-02
73185-39
73185-53
70980-01
73185-13
73185-14
73185-21
73797-07
B-4-1-1
B-4-1-1
L-11-3-4
70114-03
16321-01
60-1016
I-2-3, I-4-1
3
6
3
4
3
1
2
2
1
1
1
2
1
1
2
1
4
2
1
1
1
1
1
4
1
1
2
2
1
1
2
1
1
1
1
1
1
2
1
3
3
6
1
1
1
2
1
1
1
1
12
1
1
LOC
VENDOR
G13
G13
G13
G13
G13
I41
G13
G13
G13
T62
I41
I41
I41
I41
I41
I41
I41
I41
G14
P43
P54
P43
P54
H21
I41
G14
I41
I41
G14
G14
G14
H21
H21
H51
G14
R62
G13
T52
T52
X31
X12
X31
G14
G14
G14
G14
G14
G14
G14
T52
G16
G16
T63
"
"
"
"
"
"
"
"
"
PRI
PRI
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
G/IPC
G/IPC
"
"
"
"
"
"
"
"
"
"
"
"
GASONIC
"
G/IPC
No
Item no
DESCRIPTION
3405 3358F-031
PR STRIPPER
(Y)FILTER, GAS VCR, 01M-INLINE
3406 3358G-002
PR STRIPPER
(Y)GASKET
3407 3358G-003
PR STRIPPER
(Y)GASKET, FLANGE-VITON
3408 3358L-004
PR STRIPPER
(Y)INDICATOR LAMP
3409 3358P-011
PR STRIPPER
(Y)POWER SUPPLY 175W
3410 3358R-001
PR STRIPPER
(C)RELAY GP DPDT 240
3411 3358R-003
PR STRIPPER
(Y)RELAY DPST 30A 24
3412 3358R-021
PR STRIPPER
(Y)RECTIFIER HIGH VO
3413 3358S-003
PR STRIPPER
(Y)AIR FLOW SENSOR
3414 3358S-011
PR STRIPPER
(Y)SWITCH, HALL EFFECT
3415 3358S-031
PR STRIPPER
(Y)SPOOL Q'TZ
3416 3358V-001
PR STRIPPER
(Y)SELENOIDE VALVE
3417 3358V-002
PR STRIPPER
(Y)VALVE SOLENOIDE 4PORT
3418 3358W-001
PR STRIPPER
(Y)WINDOW Q'TZ
3419 3358W-011
PR STRIPPER
(Y)REST, WIRE, 10 OHM, 12W
3420 3359T-001
PR STRIPPER
INNER ELECTRODE
3421 3359T-013
P.R STRIPPER
TEMP CONTROL
3422 3360C-001
PR STRIPPER
HARNESS ASS'Y CASSETTE HAND
3423 3360C-002
PR STRIPPER
HARNESS ASS'Y CASSET
3424 3360D-072
PR STRIPPER
DISTRIBUTR PLATE 6"
3425 3360H-001
PR STRIPPER
INSULATOR,HEATER
3426 3360H-002
PR STRIPPER
HEATER
3427 3360S-034
PR STRIPPER
TEMP SENSOR AST-OZON
3428 3391A-001 HF VAPOR ETCH ASSY PC COVER PC
3429 3391B-082 HF VAPOR ETCH (Y)BOARD ANALOG OUTP
3430 3391B-084 HF VAPOR ETCH (Y)BOARD DRIVER
3431 3391B-099 HF VAPOR ETCH (Y)I/O INTERFACE BOARD
3432 3391C-016 HF VAPOR ETCH,200 (Y)FLOW CONTROL 2503433 3391C-021 HF VAPOR ETCH,201 (Y)CONTROLLER,TEMPERATURE
3434 3391C-073 HF VAPOR ETCH,202 (Y)CYL. CHAMBER UP/DOWN
3435 3391C-075 HF VAPOR ETCH,203 (N)ASS'Y ISR200 CHAMBER 6"
3436 3391D-001 HF VAPOR ETCH,204 (Y)KIT GATECH HF DETECTOR
3437 3391E-001 HF VAPOR ETCH,205 (Y)ELBOW PFA EXTD
3438 3391L-021 HF VAPOR ETCH,206 (Y)LOAD CALL
3439 3391M-002 HF VAPOR ETCH,207 (Y)DIGITAL RELAY
3440 3391M-021 HF VAPOR ETCH,208 (Y)MOTOR D.C STAPPER
3441 3391M-024 HF VAPOR ETCH,209 (Y)MOTOR, TILT
3442 3391M-024 HF VAPOR ETCH,210 (Y)MOTOR, TILT
3443 3391M-051 HF VAPOR ETCH,211 (Y)HF CGA 6
3444 3391M-052 HF VAPOR ETCH,212 (Y)MANIFOLD,DEEP PURGE,FEMALE
3445 3391P-034 HF VAPOR ETCH,213 (Y)ASSY,VACUUM PAN 2
3446 3391P-034 HF VAPOR ETCH,214 (Y)ASSY,VACUUM PAN 2
3447 3391P-052 HF VAPOR ETCH,215 (Y)PIN CONTACT
3448 3391P-053 HF VAPOR ETCH,216 (Y)PIN CONTACT TIN
3449 3391P-082 HF VAPOR ETCH,217 (Y)HANDLER POWER SUPPLY
3450 3391R-004 HF VAPOR ETCH,218 (Y)FORK,CENTERING,150MM
3451 3391R-005 HF VAPOR ETCH,219 (Y)FORK,CENTERING ,100MM
3454 3391R-031 HF VAPOR ETCH,222 (Y)N2 REGULATOR
3455 3391R-036 HF VAPOR ETCH,223 (Y)RELAY,PCMT,SPST,1.5A
3456 3391S-001 HF VAPOR ETCH,224 (Y)DI LEVEL SENSOR
3457 3391S-007 HF VAPOR ETCH,225 (Y)HOTO SWITCH RETRO
LOCATION
B-3-2-3
L-12-1-3
B-3-2-3
B-3-2-3
B-3-2-3
K-10-3-2
N-6-4-3
B-3-2-3
L-12-1-3
I-3-2
B-2-1
A-2-1
B-4-2-2
L-12-1-3
L-12-1-3
N-1-2-4
N-1-2-4
N-6-1-2
C-4-2-1
N-6-1-1
N-7-3-1
N-6-1-1
N-6-1-1
N-6-1-1
H-1-1
H-1-1
L-11-1-2
N-6-1-1
N-1-2-4
N-1-2-4
N-6-1-1
N-6-1-1
B-3-3-4
B-3-3-4
B-3-3-4
N-6-1-1
C-4-2-1
N-6-1-1
N-6-1-1
VENDOR PART NO
73313-03
20-0219-01
73337-01
73797-01
16924-01
70964-03
73797-11
73797-03
16875-01
73340-02
16784-02
73526-01
73248-01
71805-01
73797-12
CA-0070
CE-0074
303211
303212
238481
098921
282191
247101
290040-400
230399-001
230584-001
73618-01
301127-002
302012-001
302495-001
901443-306
301913-001
300549-001
301415-001
230560-001
301822-001
301330-001
301330-001
302869-001
303956-001
902822-201
902822-201
230033-003
230037-003
301816-001
408211-001
408237-001
408238-001
408251-001
300377-001
230389-001
301496-001
230232-001
2
1
1
1
1
2
6
11
1
1
1
1
1
3
1
2
1
1
1
4
3
2
2
3
1
2
1
1
1
2
1
1
1
1
3
1
1
1
1
1
2
1
5
5
1
1
1
1
1
1
2
1
1
LOC
VENDOR
G14
G14
H21
G14
T52
G14
G14
G14
G14
G14
H31
I41
G14
H31
G14
X23
R12
G14
G14
H31
G12
G14
G14
E11
E11
F83
T41
F83
R22
F83
Z15
F83
F83
F83
T41
P23
P53
P53
R63
F83
E11
E11
F83
F83
T34
E82
E82
E82
E82
F83
T41
F83
F83
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
RAMCO
RAMCO:85002
FUSION
FUSION
"
"
"
"
EXCALIBER
"
"
EXCALIBER
EXCALIBER
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
No
Item no
3458
3459
3460
3461
3462
3463
3464
3465
3466
3467
3468
3469
3470
3471
3472
3473
3474
3475
3476
3477
3478
3479
3480
3481
3482
3483
3484
3485
3486
3487
3488
3489
3490
3491
3492
3493
3494
3495
3496
3497
3498
3499
3500
3501
3502
3503
3504
3505
3506
3507
3508
3509
3510
3391S-013
3391T-014
3392A-003
3392A-005
3392A-031
3392A-032
3392A-033
3392A-051
3392A-052
3392B-003
3392B-004
3392B-033
3392B-034
3392B-035
3392B-036
3392B-061
3392B-062
3392B-063
3392B-064
3392B-065
3392B-066
3392B-067
3392B-068
3392B-069
3392B-070
3392B-091
3392C-001
3392C-022
3392C-023
3392C-024
3392C-025
3392E-001
3392E-002
3392F-001
3392F-001
3392F-002
3392H-001
3392L-001
3392M-001
3392M-002
3392M-004
3392M-005
3392M-007
3392M-008
3392M-009
3392M-032
3392O-001
3392P-001
3392P-002
3392P-051
3392P-081
3392R-001
3392R-021
DESCRIPTION
HF VAPOR ETCH,226 (Y)S/W,FLOW METER (FIBER OPTIC

HF VAPOR ETCH,227 (Y)TUBING SILICONE 1
HF VAPOR ETCH,228 (X) ANALOG OUTPUT
HF VAPOR ETCH,229 (X) ANALOG INPUT
WAFER POLISHER (X) INOUT MODULE
WAFER POLISHER (X) ENCODER ARM POSITION
WAFER POLISHER (X) 125MM ARM ASSY
WAFER POLISHER (X) SERVO AMPLIFIER
WAFER POLISHER (X) IBM TO BUS ADAPTOR
WAFER POLISHER (X) PRIMARY V-BELT
WAFER POLISHER (X) FINAL V-BELT
WAFER POLISHER (X) KEYPAD INTERFACE PWB
WAFER POLISHER (X) DIODE BOARD ASSY
WAFER POLISHER (X) RAIL #1 BRAIN BOARD
WAFER POLISHER (X) RAIL #2 BRAIN BOARD
WAFER POLISHER (X) SHUTTLE ROTATE BEARING
WAFER POLISHER (X) BEARING
WAFER POLISHER (X) ROLER BEARING
WAFER POLISHER (X) SHUTTLE SLIDR BUSHING
WAFER POLISHER (X) 125MM CARR BASE ASSY
WAFER POLISHER (X) VOLTAGE CONNECTION
WAFER POLISHER (X) SWITCH CONNECTOR
WAFER POLISHER (X) PVC CONNECTOR
WAFER POLISHER (X) PVC CONNECTOR
WAFER POLISHER (X) OPTICAL ENCODER
WAFER POLISHER (X) DISK EMULATOR ASSY
WAFER POLISHER (X) AIR FILTER ELEMENT
WAFER POLISHER (X) HEATER
WAFER POLISHER (X) SIGNAL LAMP
WAFER POLISHER (X) MOTOR CONTROL
WAFER POLISHER (X) SLURRY DRIVE MOTOR
WAFER POLISHER (X) STEPPER MTR CONTROL
WAFER POLISHER (X) STEPPER MOTOR
WAFER POLISHER (X) ARM DRIVE MOTOR
WAFER POLISHER (X) INSERT CARRIER MTR
WAFER POLISHER (X) MOTOR PART
WAFER POLISHER (X) OUTPUT MODULE
WAFER POLISHER (X) O-RING
WAFER POLISHER (X) PUMP SLURRY
WAFER POLISHER (X) POWER SUPPLY 5VDC
WAFER POLISHER (X) PAD SUPORT
WAFER POLISHER (X) IC PINSET
WAFER POLISHER (X) REGULATOR
WAFER POLISHER (X) RELAY
LOCATION
N-6-1-2
N-1-2-4
J-4-1-4
J-4-1-4
N-4-2-1
J-4-1-3
N-4-2-1
B-1-4-1
N-2-4-2
J-4-1-4
J-4-1-3
J-4-1-3
J-4-1-3
M-6-4-1
M-6-4-1
M-6-4-1
M-6-4-1
M-6-4-1
M-6-4-1
M-6-4-1
M-6-4-1
M-6-4-1
M-6-4-1
N-4-2-1
N-4-1-3
N-4-1-3
N-4-1-3
J-4-2-3
N-4-1-3
N-4-1-3
B-1-4-1
J-4-1-4
N-4-1-3
N-4-1-3
B-1-4-1
J-4-1-4
B-1-4-1
N-4-1-3
N-4-2-1
N-4-1-3
VENDOR PART NO
231559-002
301575-001
372-37069
TA230075
TN100013
TN100021
372-45134
372-36020
EJ010205
EJ010214
372-37067
VK440015
372-36005
372-37070
CN120175
CN071337
CL290213
CL290214
CH031081
CJ030100
CF020197
CN040037
CH030580
CN070325
372-67199
372-45126
PB020046
PA020023
JB036733
VF150220
372-37071
HG350373
HG350373
HG350377
QN040027
372-37066
QC060040
QU140123
372-44509
372-36125
QV420182
DS080042
HZ120002
372-72003
WESTEMS
HP100072
TP100014
372-55136
PD020215
HD460125
QP070016
1
2
1
2
1
1
1
1
2
2
2
1
1
1
1
2
1
2
2
3
3
2
2
4
1
2
1
7
3
2
1
1
1
2
2
2
3
1
1
1
1
1
1
2
2
4
4
1
1
1
2
1
2
LOC
VENDOR
F82
E11
T12
T12
AA72
T12
AA72
T13
T12
AA72
AA71
T12
T12
T12
T12
AA72
AA72
AA72
AA72
AA72
AA72
AA72
AA72
AA72
AA72
AA72
AA72
AA71
AA71
AA72
Z18
AA71
T13
AA72
AA71
AA71
T12
T13
"
"
"
"
WESTEMS
"
"
"
"
"
"
"
WESTEMS
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
WESTEMS
"
"
"
"
"
"
P44
T12
P55
P55
AA71
AA71
T13
T11
AA72
T13
AA72
AA71
AA72
AA71
No
Item no
DESCRIPTION
3511 3392R-041 WAFER POLISHER (X) RING 1

3515 3392S-002 WAFER POLISHER (X) AMP LOAD CUP SENSOR
3516 3392S-003 WAFER POLISHER (X) SENSOR LOAD CUP
3517 3392S-004 WAFER POLISHER (X) SENSOR MOUDLE PRS/VAC
3518 3392S-005 WAFER POLISHER (X) SENSOR
3519 3392S-043 WAFER POLISHER (X) LAMP SWITCH
3520 3392S-044 WAFER POLISHER (X) POSITION SWITCH
3521 3392S-045 WAFER POLISHER (X) MAICRO SWITCH
3522 3392S-046 WAFER POLISHER (X) SWITCH
3523 3392S-047 WAFER POLISHER (X) TOGGEL SWITCH
3524 3392S-061 WAFER POLISHER (X) SHUTTLE ROTATE SPRING
3525 3392S-083 WAFER POLISHER (X) SEAL
3526 3392S-101 WAFER POLISHER (X) 45 SUPORT
3527 3392T-001 WAFER POLISHER (X) FEET OF TUBING
3528 3392T-003 WAFER POLISHER (X) MINI TUBE
3529 3392U-001 WAFER POLISHER (X) ROTARY UNION
3530 3392U-002 WAFER POLISHER (X) ROTARY UNION
3531 3392V-002 WAFER POLISHER (X) FLOW CONTROL VALVE
3532 3392V-004 WAFER POLISHER (X) FLOW CONTROL
3533 3392V-005 WAFER POLISHER (X) SOLENOID
3534 3392W-001 WAFER POLISHER (X) THRUST WASHER
3535 3399L-001 WAFER POLISHER (X)LAMP
3536 3399L-002
ETCHER
(X)LAMP (12V)
3537 3399L-003
ETCHER
(X)LAMP (6V)
3538 3399M-001
ETCHER
(X)WATER FLOW METER
3539 3399M-002
ETCHER
(X)N2 FLOW METER
3540 3399O-001
ETCHER
(X)OMRON (EZK-C25MYI)
3541 3399P-001
ETCHER
(X)MAGNET PUMP
3542 3399V-001
ETCHER
(X)VALVE
3543 3399V-002
ETCHER
(X)SHUT / OFF VALVE
3544 4310P-035
ETCHER
SHIELD LOCK PIN
3545 4310P-036
ETCHER
LIFT PIN
3546 4310P-037
ETCHER
SEGMENT PIN
3547 4310R-028
ETCHER
8" LIFT RING
3548 4310S-025
ETCHER
8" JEIDA SEGMENT
3549 4311B-001
ETCHER
(Y)BUSH
3550 4311B-011
ETCHER
(Y)BELLJAR
3551 4311B-013
ETCHER
INNER BELLJAR
3552 4311C-001
ETCHER
CLAMPER
3553 4311C-002
ETCHER
CLAMPER
3554 4311C-004
ETCHER
HOLE COVER (PTFE)
3555 4311C-022
ETCHER
DEPOSITION COVER,PIG PORT
3556 4311C-023
ETCHER
DEPOSITION COVER,PRE-EXHAUST P
3557 4311C-025
ETCHER
DEPOSITION COVER,GATE VALVE
3558 4311C-026
ETCHER
DEPOSITION COVER,R/C
3559 4311C-027
ETCHER
DEPOSITION COVER,UPPER-R/C
3560 4311C-030
ETCHER
(Y)DEPOSITION COVER,LIGHT PORT
3561 4311C-031
ETCHER
(Y)DEPOSITION COVER,PIG PORT
3562 4311C-032
ETCHER
(Y)DEPOSITION COVER,PRE-EXHAUS
3563 4311C-033
OXIDE ETCHER(VIA/PAD)
(Y)DEPOSITION COVER,EXHAUST PO
LOCATION
N-4-1-3
N-4-1-3
VENDOR PART NO
N-4-1-3
L-7-3
N-4-1-3
N-4-2-1
N-4-2-1
N-4-2-1, M-5-2-1
N-4-2-1
N-4-2-1
N-4-2-1
372-72270
372-72271
372-72272
372-72274
QT200264
PU280123
QT370187
PU320258
PC020002
PE010032
372-50054
PE010673
PL100110
372-67095
FJ033506
372-55115
JG130059
PD020218
ED090167
ED090086
HE170121
HD120020
HE430065
CJ030103
J-2-2-2
PJ180067
N-4-2-1
N-4-2-1
J-4-1-4
N-4-1-3
N-4-2-1
N-4-1-3
N-4-2-1
J-4-1-3
J-4-1-4
J-4-1-4
M-5-2-1
M-5-2-1
B-2-4
M-5-2-1
M-5-2-1
M-5-2-1
L-12-2-3
D-8-2-3
N-2-3-2
D-8-2-3
D-8-2-3
N-6-1-1
I-2-1
A-5-3
N-6-1-1
N-6-1-1
N-2-3-2
L-2-5-2
L-2-5-2
K-10-4-2
M-4-3, I-2-1
I-1-1
N-5-4
L-2-5-2
L-2-5-2
N-5-4
MD-20
103836
103092
103835
103827
103834
731-S70612-001
715-S073041-001-00
715-S070212-001-E1
713-S70761-001
713-S70170-001
713-S70670-001
714-S070331-001-02
714-S070333-001-02
714-S073205-001-02
714-S073235-002-00
714-S070476-002-00
714-S070328-001-03
714-S070330-001-02
714-S070332-001-02
714-S070326-001-01
1
1
1
1
1
1
1
1
3
6
2
2
2
1
2
3
1
3
2
1
2
2
2
2
3
6
4
2
1
1
1
4
1
8
8
4
1
1
1
1
1
1
1
26
1
3
3
3
1
1
1
1
1
LOC
VENDOR
AA71
AA71
AA72
AA72
AA72
AA72
T12
AA71
AA72
AA71
AA72
T12
T12
T12
AA72
AA71
AA71
AA71
AA72
AA72
AA72
AA72
AA72
AA72
AA84
T12
T12
AA73
AA73
R23
AA73
AA73
AA73
G17
H62
H24
H62
H62
H74
I83
I82
H74
H74
H24
I81
I81
I45
I82
H42
I81
I81
I81
I81
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
PMT
"
"
"
"
SUMITOMO
SUMITOMO
"
"
"
"
"
"
"
"
"
"
"
"
SUMITOMO
No
Item no
DESCRIPTION
3564 4311C-038
(Y)GATE VALVE DEPO COVER
3565 4311C-039
(Y)DEPOSITION COVER UPPER R/C
3566 4311C-041
(Y)Q'TZ GATE V/V DEPO COVER
3567 4311C-042
(Y)Q'TZ C/M PORT
3568 4311G-001
(Y)GUIDE PIN
3569 4311H-001
HOLDER,BELLJAR
3570 4311L-001
(Y)LIGHT HALOGEN LAMP
3571 4311O-001
(Y)O-RING
3572 4311O-002
(Y)O-RING
3573 4311O-003
(Y)O-RING
3574 4311O-004
(Y)O-RING
3575 4311O-005
(Y)O-RING
3576 4311O-006
(Y)O-RING
3577 4311O-009
(Y)O-RING
3578 4311O-014
(Y)O-RING
3579 4311O-015
(Y)O-RING
3580 4311O-018
(Y)O-RING
3581 4311O-019
(Y)O-RING
3582 4311O-022
(Y)O-RING
3583 4311O-026
(Y)O-RING
3584 4311O-027
O-RING
3585 4311O-030
(Y)O-RING
3586 4311O-031
(Y)O-RING
3587 4311O-032
(Y)O-RING
3588 4311O-036
(Y)O-RING
3589 4311O-037
(Y)O-RING
3590 4311O-039
(Y)O-RING
3591 4311O-040
(Y)O-RING
3592 4311P-021
(Y)CLAMPER PIN
3593 4311P-041
(Y)QUARTZ,MONOCHRO PORT
3594 4311P-042
(Y)QUARTZ LIGHT PORT
3595 4311S-001
(Y)SHIEAD LINE2
3596 4311S-003
(Y)SCREW T/C PLATE
3597 4311S-022
(Y)SCREW,GAS RING
3598 4311S-061
(Y)SEAL KIT
3599 4311T-001
(Y)THERMOCOUPLE
3600 4311W-002
(Y)QUARTZ MICRO WAVE
3601 4321G-002
PR STRIPPER
IN FITTING (1)
3602 4321T-012
PR STRIPPER
(Y)FLEXIBLE TUBE
3603 4321T-012
PR STRIPPER
(Y)FLEXIBLE TUBE
3604 4322B-001
PR STRIPPER
(Y)TIMING BELT (140XL037U)
3605 4322B-002
PR STRIPPER
(Y)TIMING BELT (110XL037U)
3606 4322B-003
PR STRIPPER
(Y)TIMING BELT (240L075U)
3607 4322B-004
PR STRIPPER
(Y)TIMING BELT (120XL037)
3608 4322B-005
PR STRIPPER
(Y)TIMING BELT (80XL037)
3609 4322C-033
PR STRIPPER
(Y)CONTROLLER,TEMP
3610 4322P-002
PR STRIPPER
(Y)Q'TZ PIPE(OUTLET)
3611 4322R-001
PR STRIPPER
(Y)L-RING (D/N;286441)
3612 4322R-002
PR STRIPPER
(Y)AL-RING (D/N;286445)
3613 4322R-003
PR STRIPPER
SAFETY RING
3614 4322V-001
PR STRIPPER
(Y)PILOT VALVE (040-4E1-E1)
3615 4322V-007
PR STRIPPER
(Y)V/V,SOLENOID
3616 4322V-007
PR STRIPPER
(Y)V/V,SOLENOID
LOCATION
VENDOR PART NO
K-10-4-2
I-1-1
B-3-1-1
K-10-3-2
N-2-3-2
C-4-2-4
J-2-2-2
714-S073257-001-01
716-S073258-001-00
716-S073256-001-01
716-S073269-001-00
713-S70611-001
715-S073040-001-00
661-S007056-014-00
733-S1002-004
734-S243-002
734-S243-263
734-S243-278
734-S243-280
734-S243-281
734-S243-508
734-S243-227
734-S243-244
734-S243-376
734-S243-380
734-S9003-028
733-S223-016
733-S29002-003
733-S000223-009-00
733-S000223-008-00
734-S000243-383-00
734-S009002-064-00
734-S009002-054-00
734-S009002-070-00
734-S009002-063-00
716-S070855-001-00
716-S070203-001-02
716-S070389-001-01
739-S9053-001
724-S73037-001
715-S070161-001-00
796-S002951-006-00
666-S009039-015-00
716-S070193-001-00
AP4-42997
VF4009 L=200M
VF4009 L=200M
CA-0052
CA-0053
CA-0054
CA-0055
CA-0056
ZCP-2011
ZCP-1016
PA-0015
PA-0012
ZCP-1012
GC-0029
ZSP-2008
ZSP-2008
E-3-2-1
E-3-2-1
D-8-2-3
M-7-1-3
M-7-1-3
L-12-2-3
K-10-4-2
K-10-4-2
K-4-4-2
L-3-5-2
M-7-1-3
K-10-4-2
K-10-4-2
K-10-4-2
B-2-1, M-7-2-2
K-11-1
A-3-1
A-3-1
L-12-2-1
L-12-2-1
L-12-2-1
2
2
2
2
2
1
3
1
1
1
2
4
4
5
1
1
6
3
5
4
6
3
2
4
4
4
2
4
6
2
2
1
6
32
3
2
1
1
1
5
2
2
2
4
4
6
2
5
1
1
1
5
1
LOC
VENDOR
I45
H42
G91
H31
H24
H42
H24
H22
H22
H22
H22
H22
H22
H22
H22
H22
H22
H22
H22
H22
H22
H22
H22
H22
H22
H22
H22
H22
H62
H31
H31
G17
I45
I45
I82
I82
H31
I45
I45
I45
H22
H22
H22
H22
H22
G83
H44
H22
I81
I81
G17
G17
G17
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
PSC
PSC
"
RAMCO
"
"
"
"
RAMCO
"
"
"
"
"
"
"
No
Item no
3617
3618
3619
3620
3621
3622
3623
3624
3625
3626
3627
3628
3629
3630
3631
3632
3633
3634
3635
3636
3637
3638
3639
3640
3641
3642
3643
3644
3645
3646
3647
3648
3649
3650
3651
3652
3653
3654
3655
3656
3657
3658
3659
3660
3661
3662
3663
3664
3665
3666
3667
3668
3669
4322V-008
4322V-008
4322V-009
4322V-009
4323B-001
4323B-002
4323B-002
4323B-003
4323B-011
4323C-001
4323C-005
4323C-005
4323C-008
4323C-009
4323E-001
4323F-003
4323G-082
4323L-001
4323L-002
4323L-005
4323N-001
4323N-002
4323P-008
4323P-014
4323R-002
4323S-003
4323S-004
4323S-006
4323S-008
4323V-001
4331A-071
4331B-009
4331D-027
4331F-002
4331L-002
4331N-001
4331N-002
4331P-001
4331P-001
4331P-003
4341B-001
4341B-002
4341B-003
4341F-001
4341F-004
4341F-006
4341F-007
4341L-001
4341L-003
4341O-001
4341O-003
4341O-004
4341O-005
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
PR STRIPPER
UV BAKE
UV BAKE
UV BAKE
UV BAKE
UV BAKE
UV BAKE
UV BAKE
UV BAKE
UV BAKE
UV BAKE
METALLIZATION
METALLIZATION
METALLIZATION
METALLIZATION
METALLIZATION
METALLIZATION
METALLIZATION
METALLIZATION
METALLIZATION
METALLIZATION
METALLIZATION
METALLIZATION
METALLIZATION
DESCRIPTION
(Y)V/V,SOLENOID
(Y)V/V,SOLENOID
(Y)V/V,SOLENOID
(Y)V/V,SOLENOID
(Y)BUSHING PLASTIC T
(Y)PWB ASS'Y GAS MON
(Y)CELL-SAMPLE, END
(Y)CHAMBER CONTROLL
(Y)CHAMBER CONTROLL
(Y)THERMOCHUCK ASY-8
(Y)CYLINDER-1.00STRO
(Y)EXHAUST EJECTOR
(Y)FUSE, 15A, 250V D
(Y)QUARTZ PLATE GASK
(Y)BULB, MIDGET, WED
(Y)BULB, MIDGET, WDG
(Y)INDICATOR, LAMP
(Y)RING-RRETAINING,
N2O CELL
(Y)Q'TZ PLATE
(Y)PIN WAFER LIFT 8"
(Y)REFLECT REPLACEME
(Y)SWITCH, AIR-PRESS
(Y)SWITCH-VACUUM
(Y)EXHAUST SWITCH
(Y)CHAMBER SEAL
(Y)V/V,3WAY DELAY
(Y)ALIGNER
(Y)PCB,SYS 286 CONT
(Y)STEPPING MOTOR DR
(Y)FILTER
(Y)LINK MASTER(RORZE
N SHUTTER A
A SHUTTER B
(Y)GLASS PANEL
(Y)GLASS PANEL
(Y)ALIGNER
BELL JAR
(Y)BELL JAR CLAMP
(Y)TIMING BELT
(Y)FILTER
(Y)2A FUSE
(Y)2-1/2A FUSE
(Y)3.15A FUSE
(Y)24V LAMP
(Y)24V LAMP
(Y)O-RING
O-RING
(Y)O-RING
(Y)O-RING
LOCATION
L-12-2-1
L-12-2-1
L-12-2-1
L-12-2-1
VENDOR PART NO
ZSP-2009
ZSP-2009
ZSP-2010
ZSP-2010
058032.
058033.
058033.
K-10-4-2
212081
J-4-3-2
265221
K-10-4-2
239821
J-4-3-2
238441
J-4-3-2
238441
E-3-2-1
204274
L-12-2-1
064745
K-10-4-2
209512
L-12-2-1
025045S
L-12-2-3
069661
023812
N-2-3-2
026261
J-2-2-2
026243
081055
E-2-2
240910
I-1-3
240371
K-10-4-2
202111
G-1-5,6,7
237131
L-12-2-1
026066
L-12-2-1
087144
L-12-2-1
218762
L-7-3
201251
L-12-2-1
203142
E-2-2
RA101A-006
E-2-3
SYS286CONT
L-12-2-1, D-3-2-1 RD-232MS
ATMMG-Z-Q-E
L-12-2-1
RC-002N
K-10-4-2
2300-3809
K-10-4-2
2300-3818
K-9-6-2
2848-4202
K-9-6-2
2848-4202
D-1-3-1
RA101A-006
I-3-1
100228-1
K-10-4-2
100229-1
900-0041
K-10-4-2
420-0004
L-12-2-3
320-0001
N-2-3-2
320-0008
N-2-3-2
320-0007
120-0009
120-0015
470-0018
100854-1
470-0037
470-0016
5
1
5
1
2
4
2
1
1
2
2
1
1
1
2
4
10
7
5
1
2
1
8
4
10
1
1
1
23
2
3
2
3
5
2
2
2
2
7
1
1
2
2
1
1
1
2
3
3
4
1
2
1
LOC
VENDOR
G17
G17
G17
G17
H22
H22
H22
I45
W15
I45
W15
W15
G71
G17
I45
G17
G17
H24
G17
G17
I45
G71
H21
I45
G72
G17
G17
G17
H22
G17
G71
G73
G17,W15
Y12
G17
I45
I45
H44
H44
G71
H31
I45
H22
I45
G17
H24
H24
H24
H24
H22
H22
H22
H22
"
"
"
"
FUSION
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
FUSION
"
"
"
"
"
"
"
"
USHIO
USHIO
"
"
"
"
USHIO
"
"
"
PMT
"
"
"
"
"
"
"
"
"
"
"
"
No
Item no
3670
3671
3672
3673
3674
3675
3676
3677
3678
3679
3680
3681
3682
3683
3684
3685
3686
3687
3688
3689
3690
3691
3692
3693
3694
3695
3696
3697
3698
3699
3700
3701
3702
3703
3704
3705
3706
3707
3708
3709
3710
3711
3712
3713
3714
3715
3716
3717
3718
3719
3720
3721
3722
4341O-006
4341O-007
4341O-008
4341O-009
4341O-010
4341O-011
4341O-013
4341O-019
4341S-001
4342L-001
3401A-004
3401A-005
3401A-006
3401A-041
3401B-001
3401B-002
3401B-003
3401B-007
3401B-008
3401B-009
3401B-012
3401B-013
3401B-014
3401B-016
3401B-017
3401B-018
3401B-019
3401B-021
3401B-022
3401B-022
3401B-023
3401B-024
3401B-025
3401B-026
3401B-028
3401B-030
3401B-031
3401B-032
3401B-034
3401B-034
3401B-035
3401B-036
3401B-036
3401B-037
3401B-038
3401B-039
3401B-040
3401B-041
3401B-042
3401B-044
3401B-046
3401B-047
3401B-048
METALLIZATION
METALLIZATION
METALLIZATION
METALLIZATION
METALLIZATION
METALLIZATION
METALLIZATION
METALLIZATION
METALLIZATION
TEGAL
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
DESCRIPTION
(Y)O-RING
(Y)O-RING
(Y)O-RING
(Y)O-RING
(Y)O-RING
(Y)O-RING
(C)O-RING(CHAMBER TO
O-RING
(Y)RETRO REFLECTOR S
QUARTZ LINER
(Y)5"AHM UNIT
(Y)5"ALIGN ASSY #1 SENSOR
(Y)5"ALIGN ASS'Y #2
(Y)5"HARD DISK CONT
(Y)5"VERTICAL SWEEP BOARD
(Y)5"OUTPUT VIDEO BO
(Y)5"INPUT VIDEO BOA
(Y)5"AU43 BOARD
(Y)5"AW26 BOARD
(Y)5"AU53 BOARD
(Y)5"3W 21 PC ASS'Y(
(Y)5"AW28 BOARD
(Y)5"AU54 BOARD
(Y)5"AW27 BOARD
(Y)5"AU40 BOARD
(Y)5"AU2 BOARD
(Y)5"AX4 BOARD
(X)SAME P/N 3401B-08
(Y)5"AX5 BOARD
(Y)5"AX5 BOARD
(Y)5"AX13 BOARD
(Y)5"AU11 BOARD
(Y)5"AU41 BOARD
(Y)5"AU58 BOARD
(Y)5"AU6 CARD
(Y)5"AU59 LASER COND
(Y)5"AU60 REPLACES A
(Y)5"AW 30 PC ASS'Y
(Y)5"FORK CONTROL BD
(Y)5"COMP ASS'YAX6
(Y)5"COMP ASS'YAX6
(Y)5"AW17 BOARD
(Y)5"PC ASS'Y AX14 H
(Y)5"PCB ALIGNER PRE
(Y)5"AU 63 PC ASS'Y
(Y)5"AU66 BOARD
(Y)5"PC ASS'Y BAR-CO
(Y)5"PC ASS'Y X-X CR
(Y)5"PC ASS'Y Y-Y CR
(Y)5"ASSY AX7
LOCATION
L-12-2-3
VENDOR PART NO
470-0031
470-011
470-0010
470-0012
470-0013
470-0014
AS-384(K)
PT3-0264-000
310-0006
40-606-009
035396G1
L-11-1-4
F-5-2
J-4-2-4
J-4-2-4
J-4-1-3
J-4-1-3
J-4-1-3
J-4-1-3
J-4-1-2
J-4-1-2
J-4-1-2
J-4-1-2
L-10-4-3
J-4-2-4
J-4-1-2
M-7-1-4
M-7-1-4
M-7-1-4
M-7-1-4
M-7-1-4
M-7-1-4
M-7-1-4
J-4-1-2
J-4-3-4
M-6-1-3
M-5-3-1
M-6-1-3
M-6-1-3
J-4-1-2
J-4-1-2
M-5-3-1
M-5-3-1
M-5-3-1
M-5-3-1
M-5-3-1
M-5-3-1
M-5-3-1
M-5-3-1
M-5-3-1
028676G1
038257
028675G1
002621
002622
002618
005631G1
005866G1
005568G1
005648G1
005869G1
077791G1
9262173G1
9262-08G1
002991G1
002967G1
002967G1
035610G1
926244G1
9262177G1
035986G1
926224G1
036041G1
005908G1
039437G1
005878G1
005878G1
028884G1
002970G1
002970G1
002789G1
035543G1
005897G1
037339G1
028564G
028753G1
028755G1
005399G1
1
2
1
1
2
2
1
4
1
24
1
3
2
1
4
7
4
4
4
1
2
2
5
4
5
5
11
2
7
1
3
9
5
6
8
9
3
3
9
1
3
2
4
2
6
8
1
3
2
1
2
2
2
LOC
VENDOR
H22
H22
H22
H22
H22
H22
H22
H22
G17
Y11
CC12
T32
T32
V21
T32
T32
V14
V14
V14
V14
V14
V14
V14
V14
V14,T32
T32
V14
V12
V12
V12
V12
V12
V12
V12
V14
T52
V14
T32
V14
V14
V14,T62
V14
V14
T32
V14,T32
T32
V14
T32
T32
T32
T32
T32
T32
"
"
"
"
"
"
"
"
"
GCA
GCA
GCA
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
No
Item no
3723
3724
3725
3726
3727
3728
3729
3730
3731
3732
3733
3734
3735
3736
3737
3738
3739
3740
3741
3742
3743
3744
3745
3746
3747
3748
3749
3750
3751
3752
3753
3754
3755
3756
3757
3758
3759
3760
3761
3762
3763
3764
3765
3766
3767
3768
3769
3770
3771
3772
3773
3774
3775
3401B-049
3401B-050
3401B-051
3401B-052
3401B-052
3401B-053
3401B-055
3401B-056
3401B-057
3401B-058
3401B-059
3401B-065
3401B-066
3401B-067
3401B-068
3401B-069
3401B-070
3401B-070
3401B-071
3401B-072
3401B-073
3401B-073
3401B-074
3401B-075
3401B-076
3401B-077
3401B-078
3401B-079
3401B-079
3401B-080
3401B-081
3401B-082
3401B-083
3401B-084
3401B-087
3401B-088
3401B-090
3401B-091
3401B-092
3401B-095
3401B-098
3401B-099
3401B-100
3401B-101
3401B-102
3401B-103
3401B-103
3401B-104
3401B-105
3401B-106
3401B-108
3401B-109
3401B-110
DESCRIPTION
WAFER STEPPER (Y)5"AXII PC ASS'Y V

WAFER STEPPER (Y)5"PC ASS'Y AX12 P
WAFER STEPPER (Y)5"PC ASS'Y AX14 H
WAFER STEPPER (Y)5"PC ASS'Y AX15 A
WAFER STEPPER (Y)5"PC ASS'Y AX15 A
WAFER STEPPER (Y)5"PC ASS'Y AX16 W
WAFER STEPPER (Y)5"PC ASS'Y AW18 P
WAFER STEPPER (Y)5"PC ASSY BLADE C
WAFER STEPPER (Y)5"PC ASS'Y BAR CO
WAFER STEPPER (Y)5"PC ASS'Y BLADE
WAFER STEPPER (Y)5"AZ9 PC ASS'Y CO
WAFER STEPPER (Y)5"PC ASS'Y AW9(STD)
WAFER STEPPER (Y)5"PC ASS'Y AW27(R
WAFER STEPPER (Y)5"PC ASS'Y AW28(R
WAFER STEPPER (Y)5"PC ASS'Y AU42 S
WAFER STEPPER (Y)5"AW 31 PC ASS'Y
WAFER STEPPER (Y)5"PC ASSY ELEVTOR
WAFER STEPPER (Y)5"PC ASSY ELEVTOR
WAFER STEPPER (Y)5"AU65 BOARD
WAFER STEPPER (Y)5"PC ASS'Y FORK &
WAFER STEPPER (Y)5"PC ASS'Y ALIGNE
WAFER STEPPER (Y)5"PC ASS'Y ALIGNE
WAFER STEPPER (Y)5"AZ10 BLC519 I/O
WAFER STEPPER (Y)5"COMPONENT ASSY AX3
WAFER STEPPER (Y)5"AZ11 80/25 REWORKED
WAFER STEPPER (Y)5"SAME P/N 3401B-012(BOARD)
WAFER STEPPER (Y)5"AU 46 BOARD
WAFER STEPPER (Y)5"AU48 BOARD(THET
WAFER STEPPER (Y)5"AU48 BOARD(THET
WAFER STEPPER (Y)5"AU-4 BOARD
WAFER STEPPER (Y)5"33DEO DRIVE BOARD
WAFER STEPPER (Y)5"PC ASS'Y PRIM T
WAFER STEPPER (Y)5"PC ASS'Y TEMP C
WAFER STEPPER (Y)5"PC ASS'Y TEMP C
WAFER STEPPER (Y)5"AU 45 PC ASS'Y
WAFER STEPPER (X)5"AW 11 PCB
WAFER STEPPER (Y)5"AU 49 PC ASS'Y
WAFER STEPPER (Y)5"AX 14 PC ASS'Y
WAFER STEPPER (Y)5"AX 14 PC ASS'Y
WAFER STEPPER (Y)5"PC ASS'Y THETA
WAFER STEPPER (Y)5"CHANGE P/N 3401
WAFER STEPPER (Y)5"COMP ASS'Y AX6
WAFER STEPPER (Y)5"PC ASS'Y AX10
WAFER STEPPER (Y)5"VALVE BOARD
WAFER STEPPER (Y)5"LVOT POSITION S
WAFER STEPPER (Y)5"QBUS PARALLER INTERFACE
WAFER STEPPER (Y)5"RSX Q-BUS PARAL
WAFER STEPPER (Y)5"MULTIPLEXER PCB
WAFER STEPPER (Y)5"AW34 PC ASSY
WAFER STEPPER (Y)5"COMPUTER MEMORY BD
WAFER STEPPER (Y)5"KEYBOARD PC ASS
LOCATION
VENDOR PART NO
J-4-2-4
J-4-2-4
M-7-1-4
32
J-4-2-4
M-7-1-4
M-7-1-4
J-4-1-3
J-4-2-4
J-4-2-4
J-4-2-3
J-4-2-4
K-10-4-1
J-4-2-4
J-4-2-4
J-4-2-4
005953G1
005958G1
035543G2
035553G1
035553G1
035707G1
002865G1
028887G1
028890G1
028893G1
028530G1
046366G2
005645G2
005648G2
9262181G1
005708G1
028533G1
028533G1
J-4-2-4
002761G1
N-7-5-1, L-11-1-4 005905G2
J-4-2-3, J-6-1
028881G1
J-4-2-3, J-6-1
028881G1
J-4-2-3
028802G1
J-4-2-4
002973G2
J-4-3-3
046433G1
J-4-3-3
028803G1
J-4-3-3
005568G1.
J-4-3-3
9262247G1
J-4-3-3
9262247G1
J-4-3-3
9262240G1
J-4-3-3
9262-16G1
J-4-3-3
00755601
J-4-3-3
00681801
J-4-3-3
538492
J-4-3-3
9262193G1
J-4-3-3
037186G1
J-4-3-3
9262250G2
J-4-3-3
035543G3
J-4-3-3
035543G4
J-4-3-3
043150G1
J-4-3-3
J-4-3-3
J-4-2-2
J-4-2-3
J-4-2-3, J-4-3-3
J-4-2-3
J-4-2-3
J-4-2-3
J-6-1
C-4-2-4,C-4-3-4
J-4-1-1
L-6-3
002970G2
005969G1
035664
9262205G1
9262244G1
9262244G1
002623
044609G1
044915G3
039751G1
035132G2
036517
7
2
3
1
1
6
2
1
1
2
1
1
2
1
5
5
2
2
5
1
4
4
4
4
4
4
4
1
1
1
2
1
2
2
2
3
1
2
1
2
2
2
3
3
5
2
3
3
2
1
3
4
5
LOC
VENDOR
T32
T32
V12
T33
T33
V12
V12
V21,T31
T33
T33
T31
T33
T33
T33
T33
T33
V21,T52
T52
T33
T32
V21,T31
V21,T31
T33
T33
T31
T31
T31
T31
T31
T31
T31
T31
T31
T31
T31
T31
T31
T31
T31
T31
T24
T31
T31
T31
T31
T31
T31
T31
T31
V21
T62
T63
V12
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
GCA
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
No
Item no
3776
3777
3778
3779
3780
3781
3782
3783
3784
3785
3786
3787
3788
3789
3790
3791
3792
3793
3794
3795
3796
3797
3798
3799
3800
3801
3802
3803
3804
3805
3806
3807
3808
3809
3810
3811
3812
3813
3814
3815
3816
3817
3818
3819
3820
3821
3822
3823
3824
3825
3826
3827
3828
3401B-112
3401B-113
3401B-114
3401B-114
3401B-115
3401B-118
3401B-119
3401B-120
3401B-121
3401B-121
3401B-122
3401B-122
3401B-123
3401B-124
3401B-124
3401B-125
3401B-126
3401B-129
3401B-130
3401B-131
3401B-132
3401B-133
3401B-133
3401B-134
3401B-135
3401B-136
3401B-137
3401B-150
3401B-151
3401B-153
3401B-153
3401B-155
3401B-156
3401B-157
3401B-158
3401B-160
3401B-161
3401B-161
3401B-163
3401C-002
3401C-005
3401C-008
3401C-010
3401C-011
3401C-012
3401C-015
3401C-017
3401C-018
3401C-019
3401C-019
3401C-022
3401C-023
3401C-025
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
DESCRIPTION
(Y)5"QUAD SERIAL POR
(Y)5"RMS POWER SUPPL
(Y)5"COMPUTER CPU B'
(Y)5"COMPUTER CPU B'
(Y)5"FORK PCB
(Y)5"PC ASSY VT-100
(Y)5"ALIGNER CONTROL
(Y)5"PC ASSY ELEV CO
(Y)5"PC ASSY ELEV CO
(Y)5"PC ASS'Y BAR CO
(Y)5"PC ASS'Y BAR CO
(Y)5"AW 32 BOARD(THE
(Y)5"PC ASSY TURNATA
(Y)5"PC ASSY TURNATA
(Y)5"SYNC, FORMER
(Y)5"AW33 PC ASSY
(Y)5"KEY BOARD PC AS
(Y)5"PCB AU75
(Y)5"AX6 PC ASSY
(Y)5"AU52 BOARD
(Y)5"AU52 BOARD
(Y)5"AU 60 PCB LASER
(Y)5"TEMP CTL BD
(Y)5"AU4B PCB
(Y)5"AU10 PCB
(Y)5"IGNITER BOX (MA
(Y)5"FLAT FINDER BLO
(Y)5"BELLOWS HUB
(Y)5"BELLOWS HUB
(Y)5"FINE STAGE BUMP
(Y)5"TURNTABLE BELT
(Y)5"FORK BELT
(Y)5"T A STOP BLADE
(Y)5"S/W BOX ASS'Y OF CONTROL
(Y)5"SHUTTER BLADE (
(Y)5"REV2 CABLE
(Y)5"CAMERA HEAD NEW
(Y)5"CABLE ASSY RMS
(Y)5"CABLE
(Y)5"CABLE
(Y)5"CHAMBER PANNEL
(Y)5"COMPUTER CABLE(TO MONITOR
(Y)5"ELEVATOR MOTOR
(Y)5"MOTOR CABLE ASS
(Y)5"MOTOR CABLE ASS
(Y)5"CABLE ASS'Y AU6
LOCATION
M-5-3-1, L-11-1-4
F-1-1
F-5-2
J-4-3-3
C-4-2-4, C-4-3-4
C-4-2-4, C-4-3-4
C-4-2-4, L-11-1-4
C-4-3-3
C-4-3-3
C-4-3-4
J-2-1-1
L-6-3
J-4-3-4
M-2-1-3
M-2-1-3
J-4-3-3
J-2-1-1
J-4-3-4
J-4-3-4
G-2-3-1
VENDOR PART NO
035131G2
028522G1
038255
038255
028542G1
036702G1
038256
028878G1
028964G1
028964G1
028525G1
028525G1
038090G1
028875G1
028875G1
002620
038087G1
044048G1
045854G1
002979G2
005863G1
005863G1
005908G3
02103813
039718G1
9262-40G2
036107
006108G4
010608
010608
014721G1
028643
028159
003670
J-4-3-4
046939G1
046939G1
045924
L-11-2-4
N-6-2
L-11-2-4
L-2-1
N-6-2
D-2-2-1
D-2-2-1
D-2-2-1
L-11-2-4
L-11-2-4
005576G1
035458
028494G1
005577G1
035743G1
028590
9262113G1
028497G1
028495G1
028495G1
037157G1
037158G1
037161G1
2
1
4
3
1
2
1
5
4
1
1
1
2
2
3
1
2
2
1
3
1
1
3
1
1
1
1
2
5
8
10
3
7
3
1
1
2
2
4
1
4
2
3
2
9
1
1
2
2
1
1
1
1
LOC
VENDOR
T32
DD23
T62
T62
V21
T24
V21
T62
T62
T62
T62
T62
T62
T63
T63
T62
T24
V12
T24
T24
T24
T24
T24
T24
T24
T24
T24
T31
CC13
CC13
CC13
CC13
CC13
CC22
CC13
T24
CC13
CC13
CC13
CC12
CC14
CC21
CC14
CC13
CC13
T34
CC24
T32
T32
T32
CC14
CC14
CC13
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
No
Item no
3829
3830
3831
3832
3833
3834
3835
3836
3837
3838
3839
3840
3841
3842
3843
3844
3845
3846
3847
3848
3849
3850
3851
3852
3853
3854
3855
3856
3857
3858
3859
3860
3861
3862
3863
3864
3865
3866
3867
3868
3869
3870
3871
3872
3873
3874
3875
3876
3877
3878
3879
3880
3881
3401C-027
3401C-029
3401C-030
3401C-031
3401C-033
3401C-036
3401C-037
3401C-038
3401C-038
3401C-039
3401C-040
3401C-041
3401C-043
3401C-044
3401C-045
3401C-046
3401C-048
3401C-049
3401C-050
3401C-051
3401C-052
3401C-053
3401C-054
3401C-056
3401C-057
3401C-058
3401C-059
3401C-060
3401C-061
3401C-062
3401C-064
3401C-065
3401C-066
3401C-068
3401C-069
3401C-071
3401C-072
3401C-073
3401C-073
3401C-074
3401C-075
3401C-079
3401D-003
3401D-004
3401D-007
3401D-011
3401D-014
3401D-015
3401E-002
3401E-003
3401E-004
3401F-001
3401F-002
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
DESCRIPTION
(Y)5"CABLE ASS'Y AU58(J4)
(Y)5"CABLE ASS'Y(COM
(Y)5"TRANSFOMER ASS'
(Y)5"GRAY CODE ASSY
(Y)5"TURN TABLE UP/DOWN CABLE
(Y)5"CABLE ASS'Y A F
(Y)5"CABLE ASS'Y A F
(Y)5"CABLE ASS'Y A&B
(Y)5"CALBE ASS'Y B FORK EXTEND
(Y)5"FORK VACUUM CAB
(Y)5"CONNECTOR ASS'Y
(Y)5"CABLE ASSY. 4LE6. SENS
(Y)5"COUPLING (T/T)
(Y)5"CHUCK VACUUM 150MM
(Y)5"CABLE ASSY FORK MICROSWIT
(Y)5"CABLE ASS'Y COMPUTER INT
(Y)5"CABLE (AWH-CO4P
(Y)5"CABLE ASS'Y
(Y)5"CABLE (AWH-CHASSIS P31)
(Y)5"CABLE (P33/P32)
(Y)5"CABLE ASS'Y
(Y)5"CABLE ASSY
(Y)5"COUPLING (AP)
(Y)5"CABLE ASSY P2 C
(Y)5"CABLE (P21)
(Y)5"CABLE ASS'Y4T/C
(Y)5"CABLE T/C ASS'Y
(Y)5"CABLE ASSY
(Y)5"LIGHT GOURCT CR
(Y)5"PHOTODETECTOR C
(Y)5"COUPLING (ELEV)
(Y)5"WFR SNSR. CABLE
(Y)5"CABLE ASSY
(Y)5"CABLE TV CAMERA
(Y)5"MAXIMUS MICRO S
(Y)5"CALLE (LAMP TO
(Y)5"CALLE (LAMP TO
(Y)5"COUPLING (THETA
(Y)5"PADDLE CHUCK
(N)5"AUTO STEP 200 C
(Y)5"SIGNAL DETECTOR
(Y)5"DLV11-JA QUAD SER
(Y)5"SIGNAL DETECTOR
(Y)5"DIAPHRAM
(Y)5"HARD DISK DRIVE
(Y)5"WAFER DETECTOR
(Y)5"ELEVATOR INDICATOR
(Y)5"ELIPSOIDAL
(Y)5"RMS EMITTER ASS
(Y)5"DOUGLET FILTER
(Y)5"F/F DRIVE ASS'Y
LOCATION
L-11-2-4
L-11-2-4
L-11-2-4
L-11-2-4
L-11-2-4
L-11-2-4
B-3-1-3, N-7-6-2
B-3-1-3, N-7-6-2
L-11-2-4
L-11-2-4
B-3-1-3
B-3-1-3
B-3-1-3
B-3-1-3
L-10-7-1
B-3-1-3
L-10-7-1
H-3-1
L-11-1-3
C-4-1-2, D-3-4-1
L-11-2-4
L-11-1-3
C-4-1-2
N-7-5-1
L-11-1-3
L-11-1-3
L-11-1-3
D-3-4-1
VENDOR PART NO
037164G1
037166G1
037159G1
028920G1
028813G1
028731G1
005982G1
028931G2
028931G2
028931G1
028931G4
028934G1
028942
045197G1
028574
028933G1
002818G6
002818G7
005686G1
002858G1
005661G1
357-0096-436
028870
028961
035741G1
028664G1
045965G1
045964G1
045199G1
00102770
00102771
028603
002876G2
005064G1
00312503
035400G1
035678G1
035678G1
043982
044479G1
036939G1
SN106136
035131G1
002875G1
006096G2
039889
028112G1
044143G1
006193G1
1
1
1
1
1
2
3
8
1
6
5
2
10
2
2
4
1
1
2
1
2
2
1
2
2
2
2
1
1
2
1
1
2
7
1
1
2
2
2
3
6
1
6
2
3
2
2
5
4
1
1
2
1
LOC
VENDOR
CC14
CC14
CC14
CC14
CC14
CC13
CC14
CC14
CC14
CC14
CC14
CC14
CC13
CC12
CC14
CC14
CC14
CC13
CC13
CC13
CC11
CC11
CC14
CC14
CC13
CC13
CC13
CC13
CC13
CC13
CC14
CC13
CC13
CC13
CC13
CC13
CC13
CC13
CC13
CC13
CC13
DD12
CC15
T53
CC14
CC15
T53
CC22
CC15
CC24
CC15
CC15
T21
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
No
Item no
3882
3883
3884
3885
3886
3887
3888
3889
3890
3891
3892
3893
3894
3895
3896
3897
3898
3899
3900
3901
3902
3903
3904
3905
3906
3907
3908
3909
3910
3911
3912
3913
3914
3915
3916
3917
3918
3919
3920
3921
3922
3923
3924
3925
3926
3927
3928
3929
3930
3931
3932
3933
3934
3401F-004
3401F-007
3401F-008
3401F-016
3401F-017
3401F-019
3401F-020
3401F-021
3401G-001
3401G-002
3401G-003
3401G-004
3401G-005
3401G-006
3401G-008
3401G-011
3401G-012
3401J-001
3401K-001
3401K-001
3401L-001
3401L-002
3401L-004
3401L-005
3401L-009
3401L-011
3401L-012
3401L-013
3401L-017
3401L-018
3401L-019
3401L-020
3401L-041
3401M-005
3401M-006
3401M-009
3401M-011
3401M-012
3401M-013
3401M-014
3401M-016
3401M-017
3401M-019
3401M-020
3401M-025
3401M-027
3401M-030
3401M-032
3401M-033
3401M-035
3401M-037
3401O-002
3401O-004
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
DESCRIPTION
(Y)5"PINCHER POSITION FIXTURE
(Y)5"MUFFIN FAN
(Y)5"DICHROIC FILTER
(Y)5"FILTER WAVELENG
(Y)5" FLAT FINDER
(Y)5"FLAT FINDER BLOCK ASSY
(Y)5"COOLING FAN
(Y)5"4:J FIBER (G1,3
(Y)5"GAUGE 0.160
(Y)5"GAUGE 0-60
(Y)5"GAUGE VAC 0-30 PCB
(Y)5"ANTI BACKLASH G
(Y)5"GEAR SPUR
(Y)5"GEAR SPUR
(Y)5"Y GEAR DRIVE AS
(Y)5"NYILON GEAR ASS
(Y)5"GASKET(THETA II)
(Y)5"JOY STICK ASS'Y
(Y)5"OPER MOD KEY
(Y)5"OPER MOD KEY
(Y)5"MAIN LASER ASS'
(Y)5"LASER RECEVER
(Y)5"PICK UP LENS #1
(Y)5"LASER EMITTER A
(Y)5"LIGHT PIPE
(N)5"X AXIS LASER
(Y)5"HALOGEN LAMP
(Y)5"LAMP MOUNT ASS'
(Y)5"PICK UPLENS #3G
(Y)5"PICK UPLENS #5
(Y)5"LENS POS MENISC
(Y)5"AWH ELEVATOR MO
(Y)5"Y-AXIS MOTOR DR
(Y)5"ALIGN MOTOR DRI
(Y)5"THETA MOTOR
(Y)5"X-AXIS MOTOR DR
(Y)5"SCANNER MOTOR A
(Y)5"ALIGN MOTOR DRI
(Y)5"TRANSFER MOTOR
(Y)5"APERTURE BLADE MOTOR
(Y)5"POTENTIOMETERT
(Y)5"FORK MOTOR
(Y)5"TT MOTOR
(Y)5"X GEAR DRIVE AS
(Y)5"KIT CRT/PCB 102
(Y)5"FLAFINDERMOTOR
(Y)5"RADIO METER
(Y)5"ACCELORO METER
(Y)5"STAGE MOTOR
(Y)5"O-RING(BTM OF C
(Y)5"THETA STAGE BELT
LOCATION
L-11-1-3
H-1-2, L-11-2-1
L-11-1-3
L-11-1-3
L-11-1-3
H-1-1
L-11-1-3
L-11-1-3
L-11-1-3
L-11-1-3
D-3-4-1
L-11-1-3
L-11-1-3
C-4-1-2
D-3-4-1
D-3-4-1
L-11-2-4
N-7-5-1
L-11-1-3
L-11-1-3
L-11-1-3
L-10-4-3
J-2-2-2
L-11-1-3
L-11-1-3
L-11-1-3
C-4-3-3,H-1-2
H-1-1, M-5-1-1
B-4-3-3
C-4-3-4,H-1-2
N-3-2-3
B-4-3-3
M-5-1-1
B-4-3-3
B-4-3-3
E-3-2-1
L-9-3
I-6-1
G-2-3-1
G-2-3-1
H-1-1
VENDOR PART NO
SI-12401
001652
100307
100303
036653
035932G1
115V 60HZ 14W
006531G2
010970
035344
035345
013053
010256
010254
035282G2
0061199G1
K10120
037311G1
037285G1
037285G1
045889G1
02105101
037514
037058G1
014675
068528
004048G1S
014864
014767G3
014676
014677
014678
014674
006143G1
035282G1
005527G1
004021
035281G1
037198G1
010713G1
002887G1
002905G1
028566
028123G1
039575
035281G2
028672
003046
028944G1
014725
004099G1
K10121
SN103190
1
5
13
16
1
1
18
1
5
6
7
1
15
15
3
4
1
4
2
1
7
2
11
2
7
2
1
11
1
11
9
9
10
2
2
2
2
3
1
2
1
5
1
5
3
3
2
3
1
3
1
24
2
LOC
VENDOR
CC15
CC22
CC15
CC15
CC15
CC15
CC22
CC15
CC22
CC22
CC22
CC15
CC15
CC15
T21
CC15
CC15
T53
T21
T21
CC14
CC22
CC15
CC15
CC15
CC15
CC15
T21
CC24
CC15
CC15
CC15
CC15
T63
P53,T31
T64
P53
T63
P53
P52
T31
P53
P53
T63
T63
P42,T32
CC10
T31
BB15
T31
P53
CC15
CC15
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
No
Item no
3935
3936
3937
3938
3939
3940
3941
3942
3943
3944
3945
3946
3947
3948
3949
3950
3951
3952
3953
3954
3955
3956
3957
3958
3959
3960
3961
3962
3963
3964
3965
3966
3967
3968
3969
3970
3971
3972
3973
3974
3975
3976
3977
3978
3979
3980
3981
3982
3983
3984
3985
3986
3987
3401O-005
3401O-006
3401P-002
3401P-005
3401P-008
3401P-009
3401P-010
3401P-011
3401P-012
3401P-013
3401P-014
3401P-015
3401P-016
3401P-017
3401P-018
3401P-019
3401P-019
3401P-020
3401P-020
3401P-024
3401P-025
3401P-025
3401P-030
3401P-035
3401P-038
3401Q-002
3401R-001
3401R-002
3401R-003
3401R-006
3401R-009
3401R-011
3401S-002
3401S-003
3401S-007
3401S-008
3401S-012
3401S-013
3401S-014
3401S-015
3401S-017
3401S-018
3401S-019
3401S-020
3401S-021
3401S-021
3401S-024
3401S-025
3401S-026
3401S-028
3401S-029
3401S-030
3401S-031
DESCRIPTION
WAFER STEPPER (Y)5"O-RING BOTTOM OF CHUCK

WAFER STEPPER (Y)5"O-RING(BOTTOM O
WAFER STEPPER (Y)5"15V POWER SUPPL
WAFER STEPPER (Y)5"0.12 PLATE
WAFER STEPPER (Y)5"PHOTO DETECTOR
WAFER STEPPER (Y)5"ILLUMINATOR POW
WAFER STEPPER (Y)5"15VOLT POWER SU
WAFER STEPPER (Y)5"125MM PADDLE CH
WAFER STEPPER (Y)5"POWER SUPPLY MO
WAFER STEPPER
WAFER STEPPER (Y)5"5V POWER SUPPLY
WAFER STEPPER (Y)5"15V POWER SUPPL
WAFER STEPPER (Y)5"AWA POWER SUPPL
WAFER STEPPER (Y)5"5V POWER SYPPLY
WAFER STEPPER (Y)5"BAR 4ODE PHOTOD
WAFER STEPPER (Y)5"PINCHER PRIMARY
WAFER STEPPER (Y)5"PINCHER PRIMARY
WAFER STEPPER (Y)5"PINCHER SECONDA
WAFER STEPPER (Y)5"PINCHER SECONDA
WAFER STEPPER (Y)5"CAMERA CONTROL
WAFER STEPPER (Y)5"POWER SUPPLY 5V
WAFER STEPPER (Y)5"POWER SUPPLY 5V
WAFER STEPPER (Y)5"BACK ALIGNMENT
WAFER STEPPER (Y)5"PRISM MOUNT
WAFER STEPPER (Y)5"FIBER BUNDLE
WAFER STEPPER (Y)5"Q-BUSS PARALLEL INTERFACE
WAFER STEPPER (Y)5"RETRO KIT
WAFER STEPPER (Y)5"LIMIT RELAY
WAFER STEPPER (Y)5"RETICLE KIKER A
WAFER STEPPER (Y)5"REF SIGNAL ASS'
WAFER STEPPER (Y)5"RECEIVER
WAFER STEPPER (Y)5"LASER RECEIVER
WAFER STEPPER (Y)5"PNEUMTIC SENSOR
WAFER STEPPER (Y)5"AIR PROBE
WAFER STEPPER (Y)5"SYSTEM POW SWIT
WAFER STEPPER (Y)5"Z-AXIS SENSOR A
WAFER STEPPER (Y)5"AWA ALIGN BUTTO
WAFER STEPPER (Y)5"SPRING ROLLER
WAFER STEPPER (Y)5"PRE-ALIGN APIND
WAFER STEPPER (Y)5"THATA X-SENSOR
WAFER STEPPER (Y)5"SENSOR GRAY COD
WAFER STEPPER (Y)5"FORK VACUUM MICRO SWITCH
WAFER STEPPER (Y)5"PTURE BLADE OPT
WAFER STEPPER (Y)5"ACTUATOR MICRO
WAFER STEPPER (Y)5"ELE6ATOR ALIGN
WAFER STEPPER (Y)5"ELE6ATOR ALIGN
WAFER STEPPER (Y)5"FORK CCW SENSOR
WAFER STEPPER (Y)5"FORK CW SENSOR
WAFER STEPPER (Y)5"RMS TT ALIGN SE
WAFER STEPPER (Y)5"SEND T/A 6ECEIV
WAFER STEPPER (Y)5"RMS DOOR SENSOR
WAFER STEPPER (Y)5"TI MATERIAL SES
WAFER STEPPER (Y)5"STD THETA STAGE
LOCATION
D-3-4-1
D-2-1-1
M-5-1-2
L-11-1-3
K-9-2-4
N-2-4-1
N-2-4-1
D-3-4-1
L-11-1-3
L-11-1-3
N-2-4-1
N-2-4-1
L-11-1-3
L-11-2-4
D-3-5-3
N-6-4-1
L-11-1-3
L-11-2-1
N-7-5-1
N-6-4-1
D-3-5-3
N-6-4-1
B-3-1-3, N-7-5-1
L-11-2-4
L-11-2-4
N-6-4-1
D-3-5-3
D-3-5-3
VENDOR PART NO
003917
K10122
005318G2
34791193-E
003822G1
066540G1
005318G1
006185G1
036709
036902G1
036904G1
005017G1
002879G1
028895G1
004828
004828
004827
004827
010841
00159120
00159120
038310
03805461
XXXX
013283
039011G1
00134102
028117G1
036958G1
SN10056
002935G1
012433
011470
005054G1
006551G1
037545G1
34790306
004063G1
010264G1
028180G1
011228
00102779
SN10160
028139G1
028139G1
028170G1
028170G2
028744G1
002873G1
028240G1
SN10745
003050G1
3
34
1
2
2
2
5
3
1
1
2
2
3
1
7
16
3
14
12
1
3
3
1
1
1
5
14
1
2
2
3
1
10
2
1
1
2
1
1
1
4
4
6
3
3
3
3
2
1
5
5
2
1
LOC
VENDOR
CC15
CC15
T21
CC15
CC15
T54
T54
CC15
T32
T32
V14
V14
T64
T21
CC15
CC15
CC15
CC15
CC15
T32
T64
T64
CC15
CC15
CC14
T43
CC13
CC15
CC15
CC15
CC22
CC22
CC15
CC13
CC15
T43
CC15
CC15
CC13
CC15
CC15
T43
CC14
CC15
CC14
CC14
CC15
CC13
T43
CC15
T43
CC15
CC15
"
"
"
"
"
"
"
"
"
GCA
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
GCA
"
"
"
"
"
"
"
"
"
"
"
No
Item no
3988 3401S-032
3989 3401S-032
3990 3401S-033
3991 3401S-035
3992 3401S-036
3993 3401S-037
3994 3401S-039
3995 3401S-040
3996 3401S-041
3997 3401S-043
3998 3401S-051
3999 3401T-004
4000 3401T-012
4001 3401T-031
4002 3401V-005
4003 3401V-006
4004 3401W-001
4005 3401W-003
4006 3404A-001
4007 3404A-002
4008 3404B-001
4009 3404B-002
4010 3404B-003
4011 3404B-005
4012 3404B-006
4013 3404B-010
4014 3404B-011
4015 3404B-014
4016 3404B-016
4017 3404B-017
4018 3404B-018
4019 3404B-019
4020 3404B-020
4021 3404B-081
4022 3404B-082
4023 3404B-083
4024 3404B-086
4025 3404B-087
4026 3404B-088
4119 3414B-013
4120 3414B-052
4121 3414B-054
4122 3414B-055
4123 3414C-005
4124 3414C-061
4125 3414D-001
4126 3414D-006
4127 3414H-004
4128 3414M-005
4129 3414M-102
4130 3414S-009
4131 3414S-102
4132 3414T-002
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
WAFER STEPPER
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
DESCRIPTION
(Y)5"RMS ELEVATOR SC
(Y)5"RMS ELEVATOR SC
(Y)5"RMS CASSETTE CH
(Y)5"MAX. 1000 PHOTO
(Y)5"RMS ALIGN LIMIT
(Y)5"CABLE ASSY MICR
(Y)5"SAME P/N 3401S(Y)5"SENSOR ASS'Y
(Y)5"FORK POSITIM SE
(Y)5"FORK POSITION S
(Y)5"TRANSFER ARM
(Y)5"THERMOSTANT
(Y)5"CAMERA TUBE NVC
(Y)5"TABLE VALVE ASS
(Y)5"VALVE ASSY
(Y)5"WORM WHEEL ASSY
(Y)5"WEBER SGUARE
(Y)HOSE FITTING ADAPTER
(Y)ACTUATOR
(Y)XXXX
(Y)BOARD HP 10746A
(Y)BOARD SYS DRIVER
BOARD STAGE DRIVER
(Y)BOARD AIR GAUGE CONTROL
(Y)BOARD FOCUS CONTROL DRIVER
(Y)BOARD 32 BIT UNIV
(Y)AUTO LOADER MAIN PCB
(Y)LEFT WINDOW HOME
(Y)RIGHT WINDOW HOME
(Y)WAS MOTOR RELAY B
(Y)UPPER FLAT FIND B
(Y)LOWER FLAT FIND B
(Y)ENOID RETICLE AIR
(Y)SOLENOID RETICLE
(Y)BALL BEARING
(Y)SHORT AIR BEARING
(Y)LONG AIR BEARING
(Y)FIXED GUIDE BEARI
(X)SHUTULE DR PCB
(X)CIRCUIT BREAKER1 I/O
(X)CKT BREAKER
(X)5"CKT BREAKER
(X)MOTOR CABLE POWER
(X)CUP CYLINDER 3/4-16MT
(X)HOUSING CUP LOWER

(X)150MM MOTOR
(X)BOLCK MONTING DI MONTING
LOCATION
N-6-3
N-6-3
N-6-4-1
D-3-5-3
G-2-3-2
N-6-4-1
D-3-5-3
D-3-5-3
N-6-4-1
N-6-4-1
N-6-4-1
L-11-2-4
N-6-4-1
N-4-5-1
N-4-4-3
J-4-3-1
J-2-2-1
N-4-3-1
J-4-3-1
N-4-4-3
N-4-5-1
N-4-5-1
N-4-5-1
N-4-5-1
N-4-5-1
N-4-5-1
K-4-5-3
K-6-4-3
K-4-5-3
K-4-5-3
D-8-1
K-3-1-3
K-3-1-3
K-3-1-3
K-3-1-3
K-3-1-3
K-3-1-3
H-6-1, H-7-1
C-3-1, F-5-4
K-3-1-3
K-3-1-3
K-3-1-3
VENDOR PART NO
028116G1
028116G1
028506G15
043667G2
010265G1
028943G1
004063G1.
043845G2
028124G1
029515G1
00132050
035459
049529
00166825
006199G1
2522-035002
5107-000002
XXX
0513-496700
BD3-2678-000
0523-58580
03-06-00038
03-06-00035
0553-700340
0553-628000
0563-700427
03-08-00311
0523-701008
0553-678500
0553-700567
0556-594300
0556-594400
2502-000025
0535-577200
0535-577400
0525-358900
1381-664009-11
02017103
S009647
02017100
031429G1
S008390
032425
031405G1
032010
2
1
6
1
2
2
1
1
3
2
1
2
1
2
11
2
6
1
1
1
2
1
1
1
1
2
1
1
1
1
1
2
2
1
1
2
1
5
1
1
1
1
3
1
1
2
2
15
2
4
2
2
1
LOC
VENDOR
CC13
CC13
CC13
CC15
T43
CC15
T43
CC13
T43
T43
CC15
CC13
CC13
T21
CC14
CC13
CC15
CC15
J52
J11
V34
V33
W11
T64
W13
W11
V33
V35
V34
V34
V34
V34
V34
W13
J11
J74
J11
J11
J11
V14
K32
K32
K32
K32
K32
K32
K01
K36
P33
K32
K32
K32
K32
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
UT
"
UT
"
UT
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
GCA
"
"
"
"
"
"
"
"
"
"
"
"
"
No
Item no
4133
4134
4135
4136
4137
4138
4139
4140
4141
4142
4143
4144
4145
4146
4147
4148
4149
4150
4151
4152
4153
4154
4155
4156
4157
4158
4159
4160
4161
4162
4163
4164
4165
4166
4167
4168
4169
4170
4171
4172
4173
4174
4175
4176
4177
4178
4179
4180
4181
4182
4183
4184
4185
3415A-001
3415B-001
3415B-003
3415B-004
3415B-005
3415B-007
3415B-010
3415B-012
3415B-023
3415B-030
3415B-035
3415B-039
3415B-040
3415B-050
3415B-060
3415B-063
3415B-071
3415B-075
3415B-077
3415B-083
3415B-084
3415B-087
3415B-088
3415B-091
3415B-093
3415B-094
3415B-099
3415B-099
3415B-101
3415B-102
3415B-131
3415B-181
3415B-223
3415B-230
3415C-009
3415C-014
3415C-015
3415C-016
3415C-017
3415C-018
3415C-019
3415C-025
3415C-027
3415C-028
3415C-029
3415C-031
3415C-032
3415C-033
3415C-043
3415C-044
3415C-045
3415C-049
3415C-050
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
DESCRIPTION
(Y)ARM,CENTERING DEV
PCB MICROSTEP DRIVE
(Y)ASSY XSISTOR PCB8
PCB HCIU TRK INTFC M
(Y)ASSY HANDLER ELCT PCB
INTERFACE BOARD (88D
(R)PCB HCIU TRK
ASSY CPU PCB (8838VP
(X)BUSHING BALL 1/2"
(X)5"PC BOARD
FRONT PANEL DISPLAY PCB
(Y)ASSY PCB 2 SONV S
(Y)HEATER/CONTROLLER
(C)BEARING, .2500IDX
(Y)PCB ASSY PHOTOTRA
(Y)BELT TIMING
(C)BELT (NEW)
(Y)PCB EMITTER
(Y)PCB ASSY
(X)5"LIGHT BULB
(C)BELLOWS UNIT
(Y)BELLOWS
BEARING, POP-IN 1/4ID
(Y)BELT,TIMING
SHUTTLE TIMING BELT
PCB SYS 90 RS422 COMMUNICATION
(Y)CABLE CHAIN .88PI
(Y)CABLE CHAIN .88PITCH
(Y)BUMPER BUTTON BLK
BATTERY 2.4VOLT
(C)BEARING
BEARING
BELT,.08P TEETH,1/4
PCB,FLOPPY & IDE HD
(Y)CLAMP,SPLIT 3/16
(Y)CLAMP SPLIT
(Y)AIR CYLINDER
(Y)AIR CYLINDER
(Y)CONNECTOR ASSY
(Y)AIR CYLINDER
(Y)CLAMP,HUB
(X)CABLE
(Y)CABLE 40" ENCODER
(Y)CABLE 55" ENCODER
(Y)CABLE CHAIN
(Y)E CHAIN,SPUTTER 3
CENTERING DEVICE
230V TEMP CONTROL, ENCLOSN
COUPLING TORQUE
(Y)COUPLING
ASSY ELEC CLUTCH COU
(X)QUICK COUPLING INSERT
CKT BRKR.SP.GFI.30A.
LOCATION
L-6-1-4, K-5-2-2
D-3-2-2
J-4-3-2
D-3-2-2
L-4-1-4
K-5-2-2
F-5-5
F-5-5
L-4-1-4
L-6-1-4
L-6-1-4, K-5-2-2
L-3-2-3
J-4-3-2
L-6-1-4
L-4-1-4
L-4-1-4
L-4-1-4
L-5-2-3
K-5-2-2
L-6-1-4
L-10-3-1
K-5-2-2
L-6-4-4
K-5-2-2
L-6-1-4
L-6-1-4
L-6-1-4
L-6-1-4
B-3-3-2
J-6-5
L-4-1-4
L-4-1-4
L-6-4-4
L-6-1-4
L-4-1-4
VENDOR PART NO
20768-01
99-14089-02
99-80092-03
99-80122-02
02092201
99-80122-03
99-80122-01
88-18888-06
201-004
99-80125-03
096-00792
99-80089-06
99-80082
201-082
99-80192-01
202-256
202-364
91-80191-01
99-80187-01
99-80073
85-16202-01
208-093
201-198
202-304
202-329
110-002
204-021
204-021
205-252
121-104
201-002
201-156
202-373
130-065
215-067
216-110
203-082
203-097
206-889
203-076
216-096
06769-01
99-20067-02
99-20067-03
202-323
39926-01
38464-01
99-38534-01
215-021
215-156
99-14416-01
206-701
111-139
4
2
1
1
1
1
1
1
2
4
3
2
1
2
1
10
1
2
1
2
1
3
5
2
1
1
2
2
15
1
2
2
6
1
5
2
1
1
1
3
2
1
5
6
1
1
9
1
13
4
24(3ea
1
1
LOC
VENDOR
K32
V32
V24
V24
W15
V31
V24
K11
K32
T24
T24
V24
V24
K11
V24
K11
K11
V24
V24
T24
K32
K32
K33
K32
J25
W15
K32
J25
K32
K11
K11
K11
K11
J25
K32
K32
J25
K32
J25
J24
K32
K32
K32
K32
K32
K32
J53
J21
K11
K11
J25
K32
K11
SVG
"
"
"
SVG
"
"
"
SVG
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
No
Item no
4186
4187
4188
4189
4190
4191
4192
4193
4194
4195
4196
4197
4198
4199
4200
4201
4202
4203
4204
4205
4206
4207
4208
4209
4210
4211
4212
4213
4214
4215
4216
4217
4218
4219
4220
4221
4222
4223
4224
4225
4226
4227
4228
4229
4230
4231
4232
4233
4234
4235
4236
4237
4238
3415C-070
3415C-073
3415C-096
3415C-104
3415C-109
3415C-174
3415D-021
3415E-018
3415F-030
3415F-049
3415F-056
3415F-106
3415G-001
3415G-002
3415G-003
3415G-004
3415G-008
3415G-009
3415G-010
3415H-001
3415H-007
3415H-008
3415H-009
3415H-020
3415H-021
3415H-051
3415H-053
3415H-054
3415I-022
3415K-005
3415L-001
3415L-003
3415L-012
3415M-001
3415M-006
3415M-013
3415M-019
3415M-020
3415M-031
3415M-034
3415M-041
3415N-002
3415N-005
3415N-007
3415N-011
3415N-013
3415N-015
3415O-004
3415O-007
3415O-011
3415O-012
3415O-013
3415O-028
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
DESCRIPTION
(Y)ASSY HI-ACCEL CONTROL
(Y)ASSY HIGH-ACC SPI
(X)5"CHEM.RESIST DSPLY COVER
HARN SHUTTLE E-CHAIN
(Y)CHUCK,90 SERIES C
(Y)PC DRIVER INTERFA
ASSY,E-CHAIN/2 STATION,W/J
(X)5"HEPA FILTER
(X)FILTER (3996F-014)
(Y)ULPA FILTER 99.99
(Y)ELBOW 10-32X1/8T BARB NYLON
(X)5"GASKET
(X)5"GASKET
(X)5"GASKET
(Y)GAUGE
(Y)GAUGE(0-35kg/cm)
(Y)GAUGE (-750mmhg-1
(Y)GAUGE (0-10KG/CM)
(X)5"ASSY PCB HEATER
(Y)H/C HEATER ASSY
CST ELEM HTR.MHP 115
CST ELEM HTR.MHP 115
(Y)HARN SPDL DR 2 MT
(Y)STANDOFF HEX 4-40
(Y)HEATER(HMDS)
(Y)WATER PIPE HATER
(Y)AIR HEATER
(Y)IC,8 INPUR DATA S
(Y)KNOB
(X)5"LAMP
(X)5"LAMP 28VOLT
(Y)LENS CONVEX
(C)GEAR MOTOR 15V
MOTOR HIGH SPEED
ASSY ROTATION MTR TO
(Y)STEPPER MOTOR 883
(Y)KIT,RETRO DISPENS
(Y)SPINDLE MOTOR
MANIFOLD 4 STA
(C)FLOWMETER 5 GAL
(Y)NOZZLE
(Y)NUT,HEX 10-320STD
(Y)DEV SPRAY NOZZLE
(Y)NOZZLE CHISELPOIN
(Y)ASSY SPRAY NOZZLE
(Y)LEAD NUT
(X)5"O-RING
(X)5"O-RING
(Y)O-RING FOR ABOVE
(Y)KIT,SERVICE EPR O
(Y)O-RING
(Y)O-RING,3475IDX275
LOCATION
I-7-1
I-6-3
L-6-1-4
B-3-3-2
J-4-1-2
H-9-1
K-5-2-2
L-6-1-4
K-5-2-2
K-5-2-2
K-4-4-3
K-4-4-3
K-4-4-3
K-4-4-3
D-1-2-2
L-2-3-4
L-5-5-4
K-5-2-3
L-6-1-4
L-2-3-3
L-2-3-4
J-6-4
L-6-1-4
L-6-1-4
N-7-3-3
N-2-3-4
N-7-4-4
N-7-4-4
L-3-4-1
K-4-4-3
L-6-1-4
L-4-1-4
L-6-1-4
L-6-1-4
K-5-2-2
K-5-2-2
K-5-2-2
L-6-1-4
N-8-2-2
VENDOR PART NO
3401M-03001
99-16920-01
200-362
99-42367-10
20384-01
99-80212-01
99-45762-15
GP UNIT
CWF2010S1
303-016
206-666
207-004
207-005
210-020
209-032
P3
P4
P1
203-065
200V 30 3KW
99-15742-03
99-15742-01
99-14394-01
214-016
121-125-01
EH-1
EH-2
104-8409
17276-01
110-004
99-20082
200-225
112-012
112-067
99-11918-02
99-16587-01
17-40492-01
06-20842-02
213-178
209-056
22571-01
205-239-235
207-026
17530-02
99-22600-01
205-644
202-253
202-260
306-010
202-347
202-067
LOC
VENDOR
1
1
1
2
1
1
1
1
2
1
1
10
4
4
4
3
1
1
5
1
2
3
1
7
13
1
2
1
5
1
4
4
1
4
9(4ea
3
1
1
2
2
2
1
18
30
1
1
2
4
7
20
1
1
10
J41
J41
K32
K32
K33
J53
V24
K33
J31
K32
J22
K32
K32
K32
K32
J42
J42
J42
J42
T33
K33
J25
J25
J42
K32
K31
K33
J32
V24
K32
T24
T24
K32
P51
P52
P22
P22
P22
P41
K33
J42
K32
K11
K32
K32
K32
K32
K32
K32
K42
K32
K42
K42
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
SVG
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
No
Item no
4239
4240
4241
4242
4243
4244
4245
4246
4247
4248
4249
4250
4251
4252
4253
4254
4255
4256
4257
4258
4259
4260
4261
4262
4263
4264
4265
4266
4267
4268
4269
4270
4271
4272
4273
4274
4275
4276
4277
4278
4279
4280
4281
4282
4283
4284
4285
4286
4287
4288
4289
4290
4291
3415O-029
3415O-030
3415P-009
3415P-014
3415P-015
3415P-016
3415P-017
3415P-024
3415Q-004
3415R-008
3415R-021
3415S-001
3415S-001
3415S-003
3415S-005
3415S-008
3415S-010
3415S-012
3415S-013
3415S-014
3415S-015
3415S-016
3415S-021
3415S-022
3415S-026
3415S-030
3415S-033
3415S-034
3415S-035
3415S-036
3415S-038
3415S-039
3415S-048
3415S-049
3415S-050
3415S-053
3415S-055
3415S-057
3415S-064
3415S-081
3415S-085
3415S-086
3415S-106
3415S-115
3415T-001
3415T-005
3415T-007
3415T-011
3415T-023
3415T-031
3415T-040
3415T-041
3415T-061
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
DESCRIPTION
(Y)O-RING,3.475ID X
(Y)O-RING,3.475ID X
SYSTEM POWER SUPPLY
(Y)PIN SUPPORTING
(Y)PIN CENTERING DEV
(Y)PIN CENTERING DEV
PIN WAFER LIFT HPO/V
PLATE MTG.FACE.GFI B
(Y)QUICK DISCO PNL
(X)5"RING RETAINING 3/8"
(Y)AIR CYLINDER DBL END ROD
(C)SWITCH
(C)SWITCH
(X)5"SWITCH 5 AMP 25
(Y)SWITCH TEMPERATUR
(C)MICRO SWITCH
(Y)MAG.REED SW 3/4"
(Y)SPACE
(X)5"
(Y)S/W KEYLOCK SO
(X)5"SWITCH PRESSURE
SWITCH PRESSURE
(Y)LINEAR BRG SEAL
(X)5"SPRING COMP
(Y)SPRING EXTENSION
(Y)SPRING
ASSY PCB SINGLE SENS
(Y)SEAL 1/4 IDX1/2 O
(Y)SEAL.8750 OD X .3
(Y)SEAL,O-RING CHEMR
(Y)SENSOR CTR
(Y)SPRING
(Y)VITON O-RING
(Y)VACUUM SENSOR
(Y)TOP SEAL
(Y)SHAFT .375OD X 12.5LG 303
(Y)SPIN TUBE(88 DEV)
(Y)SHAFT
(Y)5GAL,4 LEVEL,SS S
(Y)HARN COND OPT SEN
ENCODER SENSOR
(X)5"EXH,FLOW SENSOR
(X)5"SLEEVE,8826 EBR
(Y)SWITCH,VAC,10"HG
(X)5"TRANSISTOR PNP DARLINGT
(X)5"SOCKET TRANSISTOR TO3
(X)5"TRANSISTER,N-CH MOSFET
(Y)CHILL CORTROL THE
TUBING TEFLON 3/16"OD*1/8"ID
ASSY SPINDLE TUBE (8
SPINDLE TUBE HI-VAC
(Y)THERMOCOUPLE UNGN
(X)5"TUBE RTNR
LOCATION
D-3-2-2
B-3-3-2
L-6-1-4, K-5-2-2
L-6-1-4, K-5-2-2
L-3-4-1
L-3-4-1
L-3-4-1
L-6-1-4
N-3-1-2
N-8-2-2
N-8-2-2
L-6-1-4
L-6-1-4
L-4-1-4
L-6-4-4
L-6-1-4
C-3-3
L-10-3-1
K-5-2-2
L-6-4-4
N-3-1-4
L-3-4-1
N-8-2-2
VENDOR PART NO
202-066
202-280
102-0020
20770-01
20769-02
20769-01
43211-01
111-140
206-740
205-097
203-092
109-001
109-001
109-043
109-095
109-108
109-148
214-269
109-855
109-055
201-085
211-030
211-065
211-061
99-80158-01
L-3-4-1
210-026
L-6-1-4
201-179
N-8-2-2
202-303
K-5-2-2
303-046
K-5-2-2
211-095
202-305
L-6-4-4, K-5-5-1 100-046
L-6-1-4
06719-01
J-5-5
215-153
L-10-3-1, K-5-4-2 99-16113-03
L-3-4-1
01-11706-01
E-3-1
13-0037-04
K-5-2-3
99-18266-02
K-5-2-3
99-06660-02
K-5-2-2
209-003
L-6-1-4
18253-01
L-6-1-4
109-227
F-5-5
99-80194-01
F-5-5
103-6051
F-5-5
116-025
K-5-5-1
THL
212-014
N-3-3-2
99-18415-01
N-3-3-2
99-19960-01
N-3-3-2
121-100
14503-01
10
10
1
3
4
12
10
1
5
11
1
1
1
1
3
2
2
8
2
2
3
2
1
4
3
3
2
2
2
10
1
2
4
3
10
10
12
1
2
1
4
2
1
2
1
4
10
2
1
2
4
3
2
LOC
VENDOR
K42
K32
V32
J53
K32
K32
K33
K33
K33
K32
J25
K42
K42
K32
K32
K11
J25
K32
J54
K32
K32
J25
K32
K33
K42
K42
J42
K33
K32
K42
K32
K32
K32
J25,J42
K32
J31
J25,J42
K33
K42
J42
J42
K32
K32
K32
T24
T24
T24
J42
K32
W21
W21
J25
K32
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
SVG
"
"
"
"
"
"
"
"
"
"
"
"
No
Item no
4292 3415T-063
4293 3415T-067
4294 3415T-068
4295 3415V-051
4296 3415V-055
4297 3415V-066
4298 3415V-069
4299 3415V-080
4300 3415W-014
4301 3415W-015
4302 3415W-015
4352 3418B-001
4353 3418B-005
4354 3418B-006
4355 3418B-010
4356 3418C-001
4357 3418C-020
4358 3418H-001
4359 3418M-001
4360 3418M-002
4361 3418P-001
4362 3418S-001
4363 3418S-002
4364 3418V-003
4365 3421A-022
4366 3421B-002
4367 3421B-025
4368 3421C-023
4369 3421C-032
4370 3421F-001
4371 3421G-004
4372 3421G-051
4373 3421O-028
4374 3421P-011
4375 3421P-042
4376 3421P-043
4377 3421P-044
4378 3421P-045
4379 3421R-001
4380 3421S-001
4381 3421S-011
4382 3421S-015
4383 3421S-017
4384 3421S-021
4385 3421S-035
4386 3421S-041
4387 3421S-051
4388 3421S-062
4389 3421T-047
4390 3421V-014
4391 3422L-001
4392 3422L-002
4393 3422L-003
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
TRACK
WAFER TRACK
WAFER TRACK
WAFER TRACK
TRACK
TRACK
TRACK
TRACK
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
DESCRIPTION
(Y)TABLE FWD
(Y)TEMP CONTROL PID
(Y)TEMP TRANS,RTD,4/
(X)VALVE SUCKBACK LOW VOLUME
(Y)EXPANSION V/V
VALVE,CHECK 3/4 FNPT TRUE UN P
VALVE 2WAY NC 3/8 FNPT TFE
CONVERTER ELEC 2PNU,4SIGNAL V/
(X)WASHER
(X)WASHER
(X)WASHER
(Y)BEARING 3/SIDX7/80D FLG DBL
(Y)BEARING 3/16X1/2OD
(Y)BEARING 3/16IDX3/8OD
(Y)ASSY,VACUUM SENSO
(Y)COUPLING BEL.2500IN OZ
(Y)TOP COATER CATCH
(Y)HEATER 230V,1500W,90
(Y)MOTOR 24DC 30IN 5
(Y)HARNESS GEAR MOTO
(Y)PCB POWER SUPPLY
(Y)LINEAR ERG SEAL.1/4 DIA
(Y)SENSOR,N/C
(X)SOL VALVE,3WAY 24
5"BEAM MONITOR AMP A
(Y)MOLYBDENUN BOARD
5"KEY BORAD ASSY
(Y)CAP
(X)BOARD CASE ASSY
THERMAL FILM
(X)METAL GASKET 4"
(Y)5"GUIDE
(X)5"O-RING
(Y)SILVER PASTE CNX(Y)WINDOW PLATE
(Y)PAKING
(Y)PAKING
(Y)WINDOW PLATE
(Y)LEAD RELAY
(Y)5"LEAF SPRING
(Y)5"MAGNETIC SEAL U
(Y)LEAF SPRING
(Y)5"LEAF SPRING
(Y)SCINTILATOR
(Y)5"VACUUM SWITCH A
(Y)5"FREON GAS SPRAY
(Y)SHAFT
(X)FREON GAS SPRAY
(X)TMP ASSY (STP 300
MAGNETIC VALVE ASSY
LOCATION
L-6-1-4
J-4-3-2
K-5-5-1
L-6-1-4
K-4-3-1
B-1-1
L-10-3-1
L-6-4-4
L-3-4-1
L-6-1-4, K-5-2-2
L-6-1-4, K-5-2-2
B-3-3-2
B-3-3-2
B-3-3-2
D-3-2-2
L-5-2-3
H-1-1
N-2-3-4
N-4-5-1
D-8-2-1
D-8-2-1
L-5-2-3
A-3-5
L-10-5-2
VENDOR PART NO
16279-01
103-6390
303-043
213-116
EXPV
213-216
213-201
114-073
205-453
205-452
205-452
201-008
201-027
201-177
99-80170-01
215-171
41766-01
121-141
112-093
99-20066-01
USAHEM-01AB2
201-085
109-186
114-046
545-0128
533-1337
545-5117
L-2-1, K-9-1, D-11-2 545-5443

A-3-5
777-0179
L536232-4"
580-5546
L456802
L-10-5-2
G370009
L-10-5-2
545-1042
545-1418
545-1458
L-10-5-2
545-1056
A-3-5
531-6070
L-10-5-2
580-5573
A-3-5
545-1003
545-1443
545-1553
A-3-5
533-0286
A-3-5
545-0716
A-3-5
G559004
L-10-5-2
545-1433
A-3-5
HIS2043
580-4655
A-3-5
545-0846
D-2-1-3
1380-000500-11
D-2-1-3
D-2-1-3
LOC
2
K32
1
W15
1
J42
1
K32
2
J42
1
J51
2
J25
2
J25
9
K33
10
K32
10
K32
2
J53
1
J53
4
J53
2
V24,W13
1
K33
1
K33
1
J42
2
P51
1
P52
1
V34
4
K33
2
K33
7
J42
1
Q13
3(1ea
Q43
3
Q10
1
B16
5
DD31
10
Q13
4
DD31
3
B16
3
DD33
2
Q43
1
Q43
2
B63
2
B63
1
Q43
2
Q13
2
Q43
2
Q13
4
B16
2
B16
4
Q13
1
Q13
1
Q13
10
Q43
2
Q13
1
Q13
1
Q13
2
T11
2
T11
2
T11
VENDOR
"
"
"
"
"
"
"
"
"
"
"
SVG
"
"
SVG
"
"
SVG
"
"
SVG
"
"
"
HITACHI
"
"
"
"
HITACHI
"
"
"
"
"
HITACHI
"
"
"
"
"
"
"
"
"
"
"
"
"
"
JEOL
"
"
No
Item no
4394
4395
4396
4397
4398
4399
4400
4401
4402
4403
4404
4405
4406
4407
4408
4409
4410
4411
4412
4413
4414
4415
4416
4417
4418
4419
4420
4421
4422
4423
4424
4425
4426
4427
4428
4429
4430
4431
4432
4433
4434
4435
4436
4437
4438
4439
4440
4441
4442
4443
4444
4445
4446
3422L-051
3422M-001
3422M-052
3422O-001
3422O-002
3422O-003
3422O-004
3422O-005
3422O-006
3422O-007
3422O-008
3422O-009
3422O-010
3422O-011
3422O-012
3422O-013
3422O-014
3422O-015
3422O-016
3422O-017
3422O-018
3422O-019
3422O-020
3422O-021
3422O-022
3422O-023
3422R-001
3422R-002
3422R-051
3422R-052
3422R-053
3442B-001
3442B-002
3442B-006
3442B-009
3442B-011
3442B-012
3442B-014
3442B-017
3442B-023
3442B-035
3442B-037
3442B-038
3442B-040
3442B-041
3442B-051
3442B-055
3442B-081
3442B-133
3442B-151
3442B-152
3442B-155
3442C-008
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
DESCRIPTION
LOCATION
VENDOR PART NO
H-1-1
H-1-1
K-5-3-3
K-5-3-3
K-5-3-3
5"DOUBLE SENSOR PCB

(Y)5"WAFER SENSOR PCB
5"INTERFACE PCB
(Y)5"PCW,PRESSURE EL
(Y)5"INDEX SPEED CON
(Y)5"O-RING SPEED CO
5"CPU BOARD (8132)
5"TRANSISTER BOARD(8
5"ENCODER SENSOR
(Y)5"PCB INTECONNECT
(Y)5"WAFER SENSOR PCB
(Y)5"FRONT PANEL,KEYBOARD
5"MOTHER BOARD AS
5"CONNECTOR IN6ER PC
5"BELT(MOTOR)
(Y)5"INDEX UP-DOWN P
(Y)5"BUSHING 1/4 * 3/8
(X)BRUSH
5"FUSE HOLDER
5"MOTHER PCB (SVG 86
5"CARRIAGE SPEED CON
5"CYLINDER(CENTERING
K-5-6-2
J-4-2-2
J-4-2-2
J-4-2-2
D-3-3-1
J-4-2-2
K-5-1-4
K-3-3-2
J-4-2-2
B-3-3-4
J-4-2-2
J-4-2-2
K-3-3-2
K-3-3-2
N-3-3-2
B-3-3-4
D-3-2-2
J-4-2-2
K-3-3-2
99-80001-02
2-VC-04295-1
99-80072
109-003
99-80068
99-8006S
99-80103-02
99-80054-05
99-06660-02
99-01991-01
99-080074
99-80075
99-80076
202-010
220-029
201-028
21-00712-01
111-005
99-80075B
99-80090
203-045
4
1
2
1
1
1
2
1
1
2
2
1
1
1
1
1
2
1
1
1
1
1
1
2
5
5
2
2
1
2
2
3
2
1
4
2
1
2
1
4
4
4
2
1
5
5
5
2
10
3
2
1
1
LOC
VENDOR
BB13
P53
P53
BB13
BB13
BB13
BB13
BB13
BB13
BB13
BB13
BB13
BB13
BB13
BB13
BB13
BB13
BB13
BB13
BB13
BB13
BB13
BB13
BB13
BB13
BB13
BB13
BB13
BB13
K34,T11
BB13
J43
V23
V24
V23
V23
V32
V24
V23
J43
K34
V23
K34
V23
V23
K34
K34
K34
W21
K42
V24,V32
V23
K34
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
SVG
SVG
"
"
"
"
"
"
"
"
"
SVG
"
"
"
"
"
"
"
"
"
"
No
Item no
4447
4448
4449
4450
4451
4452
4453
4454
4455
4456
4457
4458
4459
4460
4461
4462
4463
4464
4465
4466
4467
4468
4469
4470
4471
4472
4473
4474
4475
4476
4477
4478
4479
4480
4481
4482
4483
4484
4485
4486
4487
4488
4489
4490
4491
4492
4493
4494
4495
4496
4497
4498
4499
3442C-031
3442C-037
3442C-051
3442C-054
3442C-055
3442C-059
3442C-060
3442C-068
3442C-083
3442C-155
3442F-036
3442F-038
3442H-001
3442H-002
3442H-003
3442H-004
3442H-005
3442H-007
3442H-008
3442H-009
3442H-010
3442H-011
3442H-012
3442H-014
3442I-001
3442I-002
3442J-001
3442M-010
3442M-012
3442M-020
3442M-022
3442P-008
3442P-014
3442P-016
3442P-041
3442P-042
3442P-043
3442P-045
3442P-050
3442P-052
3442P-053
3442R-001
3442R-002
3442R-021
3442R-033
3442R-051
3442R-055
3442S-001
3442S-008
3442S-011
3442S-014
3442S-015
3442S-032
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
DESCRIPTION
(Y)5"CARRIAGE CABLE
(Y)5"CABLE
5"TEMPERATURE CONTRO
5"COUPLING SHAFT
5"COUPLING TORQUE
5"HOLD DOWN CABLE
5"IMMERSION CIRCLATO
(X)UPER COVER
5"ASSY ELEC CLUTCH C
(X)CARRIAGE ASSY
(X)DI FILTER
(Y)5"CLUTCH HOUSHING
(Y)5"HEATER ELEMENT (115V)
5"SVG 86 CARRIAGE HA
5"ENCODER HUB
5"CLUTCH HOUSING
5"6" INDEXER HARNESS
5"SPINDLE HARNES
5"SPINDLE PLATE HARN
5"INDEXER HARNESS(5"
5"CARRIAGE HARNESS(8
5"CARRIAGE HARNESS(8
(X)5"HARN,SPDL(88DV)
(C)5"I.C (3996I-167)
(Y)5"POWER SUPPLY TR
(X)P.R JAR
(Y)5"MOTOR MOUNT
5"HIGH MOTOR
5"STEPPING MOTOR
5"NEW HIGH SPEED MOT
(Y)5"LIMIT S/W ,PUMP
MAGNETIC PUMP 150
5"OVER-LAY CONTROL P
5"CON.PANEL O.L 8132
(Y)5"CONTROL PANEL I
(Y)5"FRONT PANEL,KEY
5"OVERLAY,CNTL PNL 8
5"OVERLAY,CNTL PNL 8
(X)5"AIR RING
(X)RETAINING RING
(Y)5"CABLE(INDEX)
(X)REGULATOR, -12 VOLTS
(X)BUSHING FLANGED
(Y)5"SWITCH TEMPERTU
(Y)5"SWITCH, MAGNETI
(Y)5"SWITCH LIQUID
5"SWITCH DOME 3/8"
5"SWITCH DOME 1/2"
(Y)5"AIR SENSOR S/W
LOCATION
K-3-3-2
K-3-3-2
K-5-6-1
B-3-3-4
K-3-3-2
K-5-6-2
L-5-3-2
H-9-1
H-9-1
K-3-3-2
K-3-3-2
K-3-3-2
K-3-3-2
K-3-3-2
B-3-3-4
B-3-3-4
B-3-3-4
B-3-3-4
B-3-3-4
K-3-3-2
L-2-5-1
H-6-1
H-1-1
K-3-3-2
H-1-2
B-3-3-4
K-3-3-2
B-3-3-4
B-3-3-4
B-3-3-4
B-3-3-4
B-3-3-4
K-3-3-2
L-2-5-1
K-3-3-2
D-2-1-3
L-2-5-1
L-2-5-1
K-3-3-2
K-3-3-2
K-3-3-2
B-3-3-4
B-3-3-4
K-5-6-2
VENDOR PART NO
113-003
06739-01
121-067
215-013
215-021
222-001
99-08370-01
99-14416-01
99-05697-02A
217-005
201-014
121-042-01
98-06629-01
01098
201-051
99-03234
99-06660-02(A)
99-01603
99-01563
99-05680
99-06625-01
99-14394-01
104-0002-3
103-5884
200-050
01-00051
99-80065
112-036
112-005M
109-043
219-010
04155-01
04155-04
06871-01
06871-04
99-01993-01
99-80074C-01
18810-11
18810-07
M-10-402460-1
205-190
112-005
201-043
109-093
109-025
109-102
109-051
109-052
109-0003
4
3
3
5
6
1
1
1
3
1
3
1
2
3
3
5
2
1
3
3
2
2
4
3
2
7
6
5
3
1
3
4
1
3
5
3
3
1
1
1
2
4
3
2
2
1
5
3
1
4
5
5
4
LOC
VENDOR
K34
K34
J43
K42
K42
K34
J43
BB13
J43
J25
K34
K34
K34
K34
K34
K34
K34
K42
K42
K42
K42
K42
K34
K34
V24
V24
DD13
K34
P51
V11
P51
K34
BB14
K42
K34
K42
K42
K34
K42
K42
K42
K34
K34
K34
T11
K34
K34
K34
K34
K34
K42
K42
J43
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
SVG
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
No
Item no
4500
4501
4502
4503
4504
4505
4506
4507
4508
4509
4510
4511
4512
4513
4514
4515
4516
4517
4518
4519
4520
4521
4522
4523
4524
4525
4526
4527
4528
4529
4530
4531
4532
4533
4534
4535
4536
4537
4538
4539
4540
4541
4542
4543
4544
4545
4546
4547
4548
4549
4550
4551
4552
3442S-033
3442S-035
3442S-038
3442S-043
3442S-053
3442S-056
3442T-002
3442T-034
3442T-035
3442T-041
3442U-001
3442V-004
3442V-006
3442V-012
3442V-021
3442V-028
3442V-032
3442V-035
3453A-002
3453B-004
3453B-004
3453B-011
3453B-012
3453B-018
3453B-025
3453B-028
3453B-029
3453B-033
3453B-037
3453B-038
3453B-040
3453C-001
3453C-002
3453C-003
3453C-003
3453F-002
3453F-041
3453L-004
3453L-005
3453L-005
3453L-007
3453M-001
3453M-003
3453M-005
3453M-008
3453M-010
3453M-011
3453M-012
3453M-013
3453M-014
3453M-015
3453P-004
3453P-007
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
WAFER SCRUBBER
INSPECTION
INSPECTION
INSPECTION
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
DESCRIPTION
(Y)5"OPTICAL WAFER S
(Y)5"HPOWAFER CARRIE
(Y)5"DUAL INTERRUPTI
(Y)5"SINGLE REFLECTI
(X)SEAL, DISTANT SEPARATOR
(X)KIT, SEAL FLUID SECTION
(C)5"T.R 2N6501
(X)SUS TUBE (3/16")
(X)HIGH PRESSURE TUBE
5"SPIN TUBE ASSY (81 C
(Y)5"TUBE SUPPORT UP
(X)NEEDLE VALVE
5"METERING VALVE
(X)5"SAME P/N 3442V(Y)5"CUT OFF VALVE
(Y)5"VALVE SPEED CON
(Y)5"SOLENOID V/V(SP
(Y)5"VALVE FLOW CONT
(Y)8604 ARM ASS'Y
(Y)PCB
(Y)PCB
(Y)OPTO BUILT FLE X 1
OPTO BUILT FLE X 1
(C)AMPLIFIER FIBRE O
(Y)PCB BUILT
(Y)PCB BUILT
(Y)PCB BUILT
(Y)PCB BUILT
(Y)SERVO MOTOR
BUILT OPTO SHORT
(Y)BELT T2.5/145X6MM
(Y)STAGE CONTROL BAO
(Y)STAGE CONTROL BOARD(MEMSP)
(Y)STAGE VACUUM CONT
(Y)STAGE VACUUM CONT
(Y)FIBRE OPTIC
INPUT FILTER 4A
(Y)LAMP HOLDER
(Y)LINER X/Y PCB
(Y)LINER X/Y PCB
LENS 85MM SAV1000
(Y)MOTOR
(Y)MOTOR
STEPPER MOTOR L163
STEPPER MOTOR A179
(C)OPTIC FIBRE AMPLI
(Y)MOTOR STEPPER L16
(Y)TRACK BALL
(Y)MIRROR
TRACK BALL MOTOR
TILT SERVO MOTOR X/Y
PCB
PCB
LOCATION
K-3-3-2
K-5-6-2
D-3-2-2
K-3-3-2
L-2-5-1
B-3-3-4
K-3-3-2
L-2-5-1
K-3-3-2
L-2-5-1
B-3-3-4
K-3-3-2
K-5-6-2
K-5-6-2
K-3-3-2
L-10-6-3
B-1-2-1
B-1-2-1
N-7-3-2
N-7-3-2
B-1-2-1
B-1-2-1
B-1-2-1
B-1-2-1
N-7-3-2
N-7-3-2
B-1-2-1
B-1-2-1
B-1-2-1
N-7-3-2
N-7-3-2
B-1-2-2
N-7-3-2
M-6-2-4
B-1-2-1
B-1-2-1
L-10-6-3
VENDOR PART NO
100-011
99-04014-02
99-80089-02
99-80089-01
219-009
219-007
103-6501
01-03325
02-01556
99-00771
01550
206-011.
213-015
206-011
213-042
213-020
114-024
213-049
AA8604-MH
B/INDIFIV10
B/INDIFIV10
B/1STS2001L
B/1STS2001S
184015-003
B/INDIFIV10
BB/NCALAMP1V0
BB/NCAPED1V0
BB/VACD1V1
FP-S5/02
B/1STS2201S
183150-061
73000500
73000500
B/INTMSIVO
B/INTMSIVO
184420-001
184610-004
KODEC2
B/LINTOPIVO
B/LINTOPIVO
K085
A078
A179
184400-012
184400-020
184015-002
184400-013
178556
385055-003
184400-014
184400-009
184400-014
B/VAC3
4
1
1
2
2
3
2
2
2
6
1
6
4
5
1
1
8
2
2
1
1
2
2
3
1
1
1
1
1
2
5
3
3
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
2
LOC
VENDOR
K34
J43
V32
V24
K34
K34
K42
K34
K34
W21
K34
K34
K42
K34
J43
K34
J43
K34
Q11
T13
T13
Q41
Q41
R63
T13
T13
T13
T13
T13
Q41
Q41
T13
T13
T13
T13
Q41
Q41
Q41
T13
T13
Q41
P55
P14
P14
P55
R63
P14
T13
Q41
P14
T13
T13
Q11
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
WED ORBISS
WED ORBISS
"
WED ORBIS6
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
WED ORBIS6
"
"
WED ORBIS7
"
"
"
"
"
"
"
"
"
"
"
"
No
Item no
4553
4554
4555
4556
4557
4558
4559
4560
4561
4562
4563
4564
4565
4566
4567
4568
4569
4570
4571
4572
4573
4574
4575
4576
4577
4578
4579
4580
4581
4582
4583
4584
4585
4586
4587
4588
4589
4590
4591
4592
4593
4594
4595
4596
4597
4598
4599
4600
4601
4602
4603
4604
4605
3453P-008
3453P-011
3453P-011
3453P-012
3453P-013
3453P-014
3453R-002
3453S-008
3453S-009
3453S-009
3453S-011
3453S-031
3453S-041
3453S-041
3453S-042
3453S-061
3453S-061
3453T-001
3453T-002
3453V-001
3461A-011
3461F-041
3461I-002
3461I-003
3461L-013
3461M-014
3461P-001
3461S-043
3461S-065
3472A-001
3472B-001
3472B-002
3472B-003
3472B-004
3472B-005
3472B-006
3472C-002
3472C-003
3472C-004
3472H-001
3472H-053
3472I-001
3472I-003
3472M-001
3472R-007
3472S-003
3472S-032
3472S-051
3472S-101
3472V-001
3472V-002
3472V-005
3473A-001
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
AUIO INSPECTION
LASER MARKING
LASER MARKING
LASER MARKING
LASER MARKING
LASER MARKING
LASER MARKING
LASER MARKING
LASER MARKING
LASER MARKING
RETICLE CLEANER
RETICLE CLEANER
RETICLE CLEANER
RETICLE CLEANER
RETICLE CLEANER
RETICLE CLEANER
RETICLE CLEANER
RETICLE CLEANER
RETICLE CLEANER
RETICLE CLEANER
RETICLE CLEANER
RETICLE CLEANER
RETICLE CLEANER
RETICLE CLEANER
RETICLE CLEANER
RETICLE CLEANER
RETICLE CLEANER
RETICLE CLEANER
RETICLE CLEANER
RETICLE CLEANER
RETICLE CLEANER
RETICLE CLEANER
RETICLE CLEANER
MASK CLEANER
DESCRIPTION
PCB BUILT
(Y)STAGER POWER SUPP
(Y)STAGER POWER SUPP
POWER OFF BREAK
(Y)PSU CCTV 115VAC 9
PULLEY
(Y)RING 0 200-005-44
(Y)YELLOW SWITCH LEN
(X)SOLENOLD VALVE
(X)SOLENOLD VALVE
(Y)PSU 24V SWITCH MO
PHOTO DIODE SENSOR
SENSOR-POLARISING FI
SENSOR-POLARISING FI
SENSOR-THROUGH BEAM
(Y)BALL SCREW(SKF)
(Y)BALL SCREW(SKF)
TRACK BALL
TRANSFORMER
(Y)VF COUPLING
(Y)AMMETER EMK1
(Y)FUSE KIT
(Y)IC INTEL 2764 200
(X)IC H2181
LASER, HENE #05LHR111
(Y)STEPPER MOTOR(FOC
(Y)HELIUM NEON LASER POWER SUP
(Y)CASSETTE EMITTER
(Y)SEAL SET FOR HP75
(Y)5"ASPIRATOR(A1-TF
(X)5"MEMORY
(Y)5"INPUT(AX41)
(Y)5"INPUT(AX42)
(Y)5"OUTPUT(AX13)
(Y)5"OUTPUT(AY42)
(Y)5"P.P(A7PU)
(Y)5"TEMP. CONTROLLE
(Y)5"QUARTZ HEATER
(Y)5"SPONGE WITH OUT
(Y)5"INDICATOR(AL6H(Y)5"INDICATOR(AL6H(Y)5"SPEED CONTROL M
(Y)5"RELAY(3810)
(Y)5"SENSOR FOR OVER
(Y)5"V-RING SEAL(V-1
(Y)5"LEVEL SWITCH
(Y)5"WATER SIGNAL CO
(Y)5"AIR VALVE(AV-72
(Y)5"AIR VALVE(AV-7260-414)
(Y)5"SOLENOID VALVE
(X) OPTIC ASSEMBLY
LOCATION
B-1-2-1
B-1-2-1
B-1-2-1
N-7-3-2
N-7-3-2
N-7-3-2
N-7-3-2
N-7-3-2
B-1-2-2
B-1-2-1
N-7-3-2
N-7-3-2
N-4-4-1
N-7-3-2
N-7-3-2
N-7-3-2
C-3-3
N-7-3-2
K-4-4-3
D-1-2-2
D-1-2-2
D-1-2-2
G-1-7
L-10-6-3
D-1-2-2
L-3-4-2
L-3-1-2
L-5-3-2
K-5-2-4
K-5-4-1
K-5-4-1
K-5-4-1
L-6-5-1
L-6-5-1
L-5-3-2
L-6-1-4
L-3-1-2
L-3-1-2
L-3-1-2
L-3-1-2
VENDOR PART NO
B/ORI1C
73000200
73000200
184075-001
184465-008
183450-016
183400-002
332-660
VZ110-5MM-M5
VZ110-5MM-M5
184455-003
184310-055
184515-004
184515-004
184515-005
183050-001
183050-001
184615-001
73015
183880-102
2403153
6201010
137264
184310-055
3001005
2401208
3001006
14F502
HP75SS
A3MCA-2
CN-602-PX
SR10-21P-00011
HR05-151/4 CF
51K40RA-A2
L-5-3-2, K-5-2-4
T55H-300 SUS
L-3-1-2
L-5-3-2
K-5-6-1
L-6-5-1
L-6-5-1
K-5-6-1
L-5-1-4
KS-20-3S-122L
MKCM30-4T7/MIN
PCS-244
13H2181
1
1
1
2
1
5
20
20
1
1
2
2
2
1
6
1
1
1
1
3
2
7
4
10
1
1
1
2
2
2
1
1
1
1
1
1
1
2
5
3
35
5
5
2
2
2
10
3
2
2
1
4
1
LOC
VENDOR
T13
T13
T13
T13
T13
Q41
Q41
Q41
Q41
Q41
Q41
T13
Q41
Q41
R63
Q41
Q41
Q41
T12
Q41
J43
T33
T33
T33
Q12
P23
Q11
T33
K35
K35
J25
J45
J45
J45
J45
J44
J44
J44
J25
K35
K35
K35
K35
P14
J25,J45
J25
K35
J25
J42
J44
J44
J43
K35
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
LIS
"
"
LIS
LIS
"
LIS
"
"
WATANABE
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
WATANABE
"
SSEC
No
4606
4607
4608
4609
4610
4611
4612
4613
4614
4615
4616
4617
4618
4619
4620
4621
4622
4623
4624
4625
4626
4627
4628
4629
4630
4631
4632
4633
4634
4635
4636
4637
4638
4639
4640
4641
4642
4643
4644
4645
4646
4647
4648
4649
4650
4651
4652
4653
4654
4655
4656
4657
4658
Item no
DESCRIPTION
3473A-002
MASK CLEANER
(X) SPRAY NOZZLE ASSEMBLY
3473A-003
MASK CLEANER
(X) ASS'Y CHECK PIN 6"
3473B-001
MASK CLEANER
(X) DRIVER BOARD
3473B-002
MASK CLEANER
(X) SPIN MOTOR BOARD
3473B-003
MASK CLEANER
(X) POWER SUPPLY BOARD
3473B-004
MASK CLEANER
(X) POWER SUPPLY BOARD(SECONDA
3473B-011
MASK CLEANER
(X) BURSH KIT FOR SPIN MOTOR
3473B-021
MASK CLEANER
(X) NYLON BUSHING
3473B-031
MASK CLEANER
(X) BRUSH
3473C-001
MASK CLEANER
(X) SPLIT CLAMP
3473D-001
MASK CLEANER
(X) SPIN MOTOR POWER SUPPLY DI
3473D-011
MASK CLEANER
(X) VACUUM DETECTOR
3473G-001
MASK CLEANER
(X) PRESSURE GAUGE
3473P-001
MASK CLEANER
(X) SUCKBACK PUMP DIAPH
3473P-002
MASK CLEANER
(X) SIPHON PUMPDIAPHRAGM KIT
3473R-001
MASK CLEANER
(X) SOLID STATE RELAY
3473R-011
MASK CLEANER
(X) PRESSURE REGULATOR
3473S-001
MASK CLEANER
(X) TEFLON SHAFT VACUUM SEAL
3473V-001
MASK CLEANER
(X) HPC AIR SOLENOID VALVE
3473V-002
MASK CLEANER
(X) VACUUM SOLENOID VALVESPETE
3475B-003
MASK CLEANER
(Y)MAIN MEMORY CARD
3475B-004
MASK CLEANER
(Y)MAIN-PTO-CARD
3475B-005
PERIPHERAL EXPOSURE
3475B-006
PERIPHERAL EXPOSURE
(Y)SUB-PIO CARD
3475B-007
PERIPHERAL EXPOSURE
3475B-008
PERIPHERAL EXPOSURE
3475B-009
PERIPHERAL EXPOSURE
(Y)POWER CONTROL CAR
3475B-010
PERIPHERAL EXPOSURE
(Y)GRAPHIC DISPLAY C
3475B-011
PERIPHERAL EXPOSURE
(Y)SPINDLE CONTROL C
3475B-012
PERIPHERAL EXPOSURE
(Y)DEVICE NUMBER SIN
3475B-014
PERIPHERAL EXPOSURE
(Y)ERROR DISPLAY CAR
3475B-017
PERIPHERAL EXPOSURE
(Y)SPEED CONTROL CAR
3475M-007
PERIPHERAL EXPOSURE
(Y)MOTOR
3490H-001
PERIPHERAL EXPOSURE
HCT
4405B-001 WAFER STEPPER (Y)STEPPER MOTOR DRI
4405C-001 WAFER STEPPER (Y)CYLINDER,RECTANGU
4405D-001 WAFER STEPPER (Y)BOARD FOCUS DRIVE
4405F-001 WAFER STEPPER (Y)RETICLE FINGER AS
4405M-004 WAFER STEPPER (Y)WTC DRIVE MOTOR A
4405O-010 WAFER STEPPER (Y)O-RING,2-007
4405O-011 WAFER STEPPER (Y)O-RING,2-003
4405S-001 WAFER STEPPER (Y)SWITCH MICRO
4405S-002 WAFER STEPPER (Y)SWITCH VACUUM
4405V-002 WAFER STEPPER (Y)REGULATOR R/T STA
4421B-004 CURING FURNACE (Y)POWER BOARD
4421B-005 CURING FURNACE (Y)DI/DO-1 BOARD
4421B-017 CURING FURNACE (Y)CPU BOARD
4421B-018 CURING FURNACE (Y)CAO HEATER POWER
4421B-019 CURING FURNACE (Y)PAI TEMP CONTROL
4421C-002 CURING FURNACE (Y)TEMP CONTROLLER
4421M-008 CURING FURNACE MOTOR PULSE
4421N-001 CURING FURNACE (Y)ROLET NUT
4421P-005 CURING FURNACE (Y)SAME P/N 4421B-00
LOCATION
L-5-1-4
L-1-2
J-4-1-1
D-2-1-1
D-2-1-1
J-4-1-1
L-5-1-4
L-5-1-4
K-3-2-4
L-5-1-4
K-4-3-1
L-5-1-4
L-5-3-2
L-2-5-1
L-5-1-4
L-5-1-4
L-5-1-4
L-5-1-4
L-4-4-4
J-4-3-1
J-4-3-1
N-4-3-1
J-4-3-1
N-4-3-1
N-4-3-1
J-4-3-1
J-4-3-1
J-4-3-1
J-4-3-1
J-4-3-1
J-4-3-1
J-4-3-1
G-2-1
B-3-3-2
K-3-2-4
N-4-5-2
L-6-1-3
D-2-1-1
G-2-5-1
L-6-1-2
L-5-2-1
N-4-4-3
N-4-4-3
N-4-4-3
N-4-4-3
H-1-2
N-1-3-2
N-4-4-3
VENDOR PART NO
44901545A
356120007
3560004E1
1000110B1
3560007A1
040436016
052346300
56001007A
056013000
00136800M
063214215
066156203
12701015A
12801008A
01302180C
061611000
44901271A
060722018
060310324
USB-M86
USB-P72
1000170A1
USB-PA48
USB-PCT
USB-GDC
USB-SPC
DEV-01
DSP-12
SP-CONT-2
RA3BA112S384-D5
0490003251
03-20-00933-02
10-20-03669
03-20-01989
01-20-02645
01-20-03651
52-20-02761
52-20-02762
5107-000001
61-20-03563
57-15-02790
HMSU2721A01
HMSU2601A07
HMSU2478A01.
HNSU2482A0101
HMSU2480A01
E5EX
BEMT-103-7555-51
MS 15mm OD
HMSU2721A01.
2
1
1
1
1
1
4
2
2
1
4
1
1
2
1
1
1
1
1
2
1
1
4
1
1
1
1
1
2
1
1
3
1
2
2
2
2
3
2
2
2
3
1
2
1
2
1
1
1
2
2
20
1
LOC
VENDOR
K35
Q43
T33
T54
T54
T33
K35
K35
K35
K35
K35
K35
J25
K34
J45
K35
K35
K35
K35
K15
K15
K15
V31
K15
V31
V31
K15
K15
K15
K15
K15
K15
K15
Q12
T61
J53
T61
J12
P54
J74
J74
T54
R53
J15
C72
V35
V35
V35
V35
R21
V35
B16
V35
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
USHIO
"
"
"
"
"
"
"
"
"
"
U.T
"
"
"
"
"
"
"
"
"
KOYO
"
"
"
"
"
"
KOYO
"
No
4659
4660
4661
4662
4663
4664
4665
4666
4667
4668
4669
4670
4671
4672
4673
4674
4675
4676
4677
4678
4679
4680
4681
4682
4683
4684
4685
4686
4687
4688
4689
4690
4691
4692
4693
4694
4695
4696
4697
4698
4699
4700
4701
4702
4703
4704
4705
4706
4707
4708
4709
4710
4711
Item no
DESCRIPTION
4421R-004 CURING FURNACE (L)TEFLON RING

4421R-011 CURING FURNACE SUPER RING (BOTTOM)
4421R-012 CURING FURNACE (Y)SUPER RING
4421R-013 CURING FURNACE (Y)SUPER RING
4421S-004 CURING FURNACE (Y)PRESSURE SWITCH
4421S-009 CURING FURNACE (Y)SCR(BOTTOM)
4421S-010 CURING FURNACE (Y)SCR(CENTER)
4421S-011 CURING FURNACE (Y)SCR(TOP)
4421S-014 CURING FURNACE (Y)SPRING
4421S-015 CURING FURNACE (Y)SPRING
4421S-016 CURING FURNACE (Y)STAINLESS SPRING
4421S-017 CURING FURNACE (Y)SWITCH
4421S-018 CURING FURNACE (Y)SWITCH GUARD
4421S-019 CURING FURNACE (Y)SWITCH
4421V-006 CURING FURNACE (Y)SOLENOID VALVE
4431C-001 POLIMIDE STRIPPER (Y)CAM ROTOR SHAFT 2400
4431C-002 POLIMIDE STRIPPER (Y)CAM ROTOR SHAFT
4431F-002 POLIMIDE STRIPPER (Y)FUSE 1.5A SLW BLW 3AG
4431F-003 POLIMIDE STRIPPER (Y)FUSE 0.5A SLW BLW 3AG
4431F-004 POLIMIDE STRIPPER (Y)FUSE 4A SLW BLW 3AG
4431I-001 POLIMIDE STRIPPER (Y)USER INTERFACE EMERALD SBC
4431R-001 POLIMIDE STRIPPER (Y)RSP 280/309 SLOW ACT
4431R-002 POLIMIDE STRIPPER (Y)REGULATOR,GAS CAST
4431R-003 POLIMIDE STRIPPER (Y)REGULATOR,GAS SS
4431S-001 POLIMIDE STRIPPER (Y)SWITCH PRESS ADJ SS
4431S-003 POLIMIDE STRIPPER (Y)SWITCH PHEU W/ROLLER ARM
4431S-005 POLIMIDE STRIPPER (Y)SWITCH 1PL MOM RND PML MNT
4431S-006 POLIMIDE STRIPPER (Y)SWITCH KEYLCX FPDT
4431S-007 POLIMIDE STRIPPER (Y)SWITCH P5HBTH DPDT LGTD SO
4431S-031 POLIMIDE STRIPPER (Y)SEAL NOZZLE TFE
4451B-002
NANO PATTERNING SYS'
BELT RECIRE FAN-A45
4451C-001
CUP ASSY
4451C-002
CUP WAFER LIFTER
4451C-003
CIRCUIT BR. 40A-PLUG
4451S-001
SEAL WAFER CHUCK
4451V-001
V-BELT, 45.3" PITCH
3512B-027 WAFER PROBER SYSTEM MEMORY OR CON
3516B-002 WAFER PROBER
3516C-002 WAFER PROBER
LOCATION
L-6-4-1
L-6-4-1
L-2-4-2
L-2-4-2
K-4-5-2
B-2-3
K-4-5-2
K-4-5-2
L-5-3-3
L-10-7-3
N-1-3-2
L-10-7-3
L-10-6-3
L-10-6-3
L-10-7-3
L-10-7-3
L-10-7-3
L-10-7-3
L-10-7-3
L-10-7-3
L-10-7-3
L-10-7-3
N-1-2-3
L-10-6-2
N-1-2-3
L-10-6-2
N-1-2-3
J-4-2-1
J-4-2-2
J-4-2-2
D-1-2-3
D-1-2-3
J-4-2-2
J-4-2-3
M-3-4
M-3-4
J-4-2-2
J-4-2-2
J-2-3-2
D-1-2-3
D-1-2-3
G-2-3-2
G-2-6-1
VENDOR PART NO
JS-36-1729
JS26-378-483
JS-35-441A-001
JS-35-441A-002
MS61L
VSCZ-60-N(PK40FVSCZ-100-N(TM90D
VSCZ-30-N
AUS8-30
SASPO 4-20
SA 065-04
A3BJ-90D1-24EW
A3BJ-5050
JS-42-04308
B7P5136-MID
17219-03
17357-01
73165-31
73165-35
73165-51
73300-11
17143-501
70905
70905-01
61518-01
70913
73029
73093-01
43152
18311-01
682-0033-702
879-0089-001
859-2861-001
6810057921
859-2859-001
682-0033-701
247483-001
2
2
4
4
2
1
1
1
4
4
4
3
3
3
1
1
1
5
5
5
1
1
1
1
1
1
1
1
1
16
1
1
1
1
3
1
1
2
2
1
3
2
1
1
1
2
1
1
1
1
1
1
1
LOC
VENDOR
B41
A102
D62
D62
C15
C73
C73
C15
A103
A103
A102
R21
A102
A102
D14
Q11
B16
Q11
Q11
Q11
Q42
Q11
Q11
Q11
Q11
Q11
Q11
Q11
Q11
B25
B63
Q15
B53
Q15
B53
B63
V34
T15
T32
T15
T21
T32
T15
T15
T15
T15
T32
T15
T32
T15
T15
T33
T32
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
SEMITOOL
SEMITOOL
SEMITOOL
SEMITOOL
SEMITOOL
SEMITOOL
SEMITOOL
SEMITOOL
SEMITOOL
SEMITOOL
SEMITOOL
SEMITOOL
SEMITOOL
SEMITOOL
SEMITOOL
SVGL
"
"
"
"
"
EG
ANDO
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
No
4712
4713
4714
4715
4716
4717
4718
4719
4720
4721
4722
4723
4724
4725
4726
4727
4728
4729
4730
4731
4732
4733
4734
4735
4736
4737
4738
4739
4740
4741
4742
4743
4744
4745
4746
4747
4748
4749
4750
4751
4752
4753
4754
4755
4756
4757
4758
4759
4760
4761
4762
4763
4764
Item no
DESCRIPTION

3516N-001 WAFER PROBER
3516P-001 WAFER PROBER
3520R-001 WAFER PROBER (Y)AIR BACK
3651B-001
EVAPORATOR
(X)REGULATOR PCB B/D
3651B-002
EVAPORATOR
(X)POTS GUN CONTROL PCB B/D
3651B-003
EVAPORATOR
(X)POTS HV CONTROL PCB B/D
3651B-004
EVAPORATOR
(X)H.V PANEL PCB B/D
3651B-005
EVAPORATOR
(X)POTS LAT SWOEP CONTROL PCB
3651B-006
EVAPORATOR
(X)POWER PANEL PCB B/D
3651B-007
EVAPORATOR
(X)POTS LONG SWEEP CONTROL PCB
3651B-008
EVAPORATOR
(X)LAT SWEEP CONTROL PCB B/D
3651B-009
EVAPORATOR
(X)GUN CONTROL PCB B/D
3651B-010
EVAPORATOR
(X)CONG CONTROL CAREL PCB B/D
3651B-031E-BEAM EVAPORATOR(C)DOME BEARING
3651B-032E-BEAM EVAPORATOR(X)NEEDLE BEARING OFFSET DRIVE
3651B-033E-BEAM EVAPORATOR(X)INNER RACE BEARING OFFSET
3651B-034E-BEAM EVAPORATOR(X)BEARING(VBDD-1062-1500-281
3651B-061E-BEAM EVAPORATOR(X)SINGLE PHASE AIROUIT BREAKE
3651B-062E-BEAM EVAPORATOR(X)PRINTED AIROUIT BOARD
3651B-063E-BEAM EVAPORATOR(X)CIRCUIT BREAKER,64MP
3651C-001E-BEAM EVAPORATOR(X)CLUTCH ASSEMBLY OFFSET DRIV
3651C-012E-BEAM EVAPORATOR(X)10K E-BEAM POWER
3651C-013E-BEAM EVAPORATOR(X)GP-260 CONTROLLER & CABLE
3651D-001E-BEAM EVAPORATOR(X)BRIDGE DIODE
3651D-002E-BEAM EVAPORATOR(X)BRIDGE DIODE
3651D-003E-BEAM EVAPORATOR(X)DIODE
3651D-021E-BEAM EVAPORATOR(X)DETENT KIT(TEFLON WASHER SC
LOCATION
VENDOR PART NO
D-1-2-3
M-6-1-2
J-4-3-4
H-5-3
L-12-7
L-12-6
L-12-6
L-12-5
L-12-7
L-12-5
L-12-5
L-12-5
D-2-5-2
L-12-5
B-1-4-1
C-4-4-3
C-4-4-3
C-4-4-3
C-4-4-3
C-4-4-3
C-4-4-3
C-4-4-3
E-2-4
L-7-1
B-1-2-1
C-4-4-3
C-4-4-3
C-4-4-3
C-4-4-3
C-4-4-3
148-005
10-7 OF 59
10-1 OF 59
10-2 OF 59
10-3 OF 59
10-4 OF 59
10-5 OF 59
10-6 OF 59
10-8 OF 59
10-9 OF 59
VB-DD-375-875-2
B-98
IR-68
UPL11166F203
10-10 OF 59
45-700-IGI-SIO11337
SR-10-11
GP-260
SN2-5K
250JB10L
1N 2979B
BR 810D
10D10
1N 4749
1N 4749
1N 2974
16R1A40
1N 2972
1N 750A
1N 3322
1N 4740
1N 5341
1
1
1
1
1
1
1
1
2
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
12
2
1
1
2
1
8
2
1
1
2
1
1
2
2
1
1
1
2
1
1
1
1
1
16
LOC
VENDOR
T32
T32
T32
T33
T22
T23
T23
T23
T23
T23
T23
T23
T14
T23
T23
T14
T23
T13
T12
T12
T12
T12
T12
T12
T12
T12
T12
T12
Q42
Q42
Q42
Q42
Q42
T12
Q42
Q42
W22
Q46
T12
T13
Q42
T12
T12
T12
T12
Q42
Q42
T12
T12
Q42
T12
T12
Q42
"
"
"
"
ANDO
"
"
"
"
"
"
"
"
"
"
"
"
XRL
No
4765
4766
4767
4768
4769
4770
4771
4772
4773
4774
4775
4776
4777
4778
4779
4780
4781
4782
4783
4784
4785
4786
4787
4788
4789
4790
4791
4792
4793
4794
4795
4796
4797
4798
4799
4800
4801
4802
4803
4804
4805
4806
4807
4808
4809
4810
4811
4812
4813
4814
4815
4816
4817
Item no
DESCRIPTION
3651F-031E-BEAM EVAPORATOR(X)EB GUN FILAMENTS

3651H-001E-BEAM EVAPORATOR(X)FUSE HOIDER
3651I-001 E-BEAM EVAPORATOR(X)IC8936
3651L-001E-BEAM EVAPORATOR(X)LAMP (125V.1/3W.RED)
3651L-002E-BEAM EVAPORATOR(X)LAMP (125V.1/3W.WHITE)
3651M-001E-BEAM EVAPORATOR(X)METER ASSEMBLY
3651O-005E-BEAM EVAPORATOR(X)O-RING
3651O-010E-BEAM EVAPORATOR(X)O-RING
3651O-025E-BEAM EVAPORATOR(X)COMPLETE O-RING KIT
3651P-001E-BEAM EVAPORATOR(X)MALE CONNECTOR PIN
3651P-002E-BEAM EVAPORATOR(X)FEMALE CONNECTOR PIN
3651P-004E-BEAM EVAPORATOR(X)8-PIN FEEDTHROUGH
3651P-011E-BEAM EVAPORATOR(X)10K E-BEAM POWER SUPPLY WIR
3651R-003E-BEAM EVAPORATOR(X)SOILD STATE RELAY
3651R-007E-BEAM EVAPORATOR(X)RELAY AUTO TECH
3651R-021E-BEAM EVAPORATOR(X)RESISTOR (10M)
3651R-022E-BEAM EVAPORATOR(X)CURRENT LIMIT RESISTOR
3651R-023E-BEAM EVAPORATOR(X)RESISTOR
3651R-031E-BEAM EVAPORATOR(X)WALL RECEPTACLE
3651S-002E-BEAM EVAPORATOR(X)MICRO SWITCH
3651S-003E-BEAM EVAPORATOR(X)SWITCH (5A)
3651S-007E-BEAM EVAPORATOR(X)PRESSURE SWITCH
3651S-008E-BEAM EVAPORATOR(X)VACUUM SENSOR TUBE
3651S-031E-BEAM EVAPORATOR(X)LN2 SENSOR SET
3651S-061E-BEAM EVAPORATOR(X)FUSE & JAK,FOR EB SOURCE
3651S-062E-BEAM EVAPORATOR(X)ION GAUGE SPARD PARTS KIT
3651S-063E-BEAM EVAPORATOR(X)LENCH & BOLT SET FOR EB SOU
3651S-064E-BEAM EVAPORATOR(Y)O-RING KIT FOR EB SOURCE
3651S-065E-BEAM EVAPORATOR(X)PLATE FOR EB SOURCE
3651S-066E-BEAM EVAPORATOR(X)CERAMIC INSULATOR & SPRING
3651S-067E-BEAM EVAPORATOR(X)JAK FOR EB SOURCE
3651S-068E-BEAM EVAPORATOR(X)CABLE CONNECTOR FOR EB SOU
3651S-069E-BEAM EVAPORATOR(X)CABLE FEMALE CONNECTOR FOR
3651S-070E-BEAM EVAPORATOR(X)SAFTY LINE & GROUND C
3651S-072E-BEAM EVAPORATOR(X)SPARE EB DEPOSITION SHIELD
3651S-073E-BEAM EVAPORATOR(X)QUICK CHANGE GUN TURRET & C
3651S-074E-BEAM EVAPORATOR(X)ELECTRON BEAM GUN SOURCE SH
3651S-101E-BEAM EVAPORATOR(X)DETENT SCREWS,DHA EB GUN
3651S-102E-BEAM EVAPORATOR(Y)NYLON SCREWS EB GUN
3651T-001E-BEAM EVAPORATOR(X)TRANSFORMER
3651T-002E-BEAM EVAPORATOR(X)10K E-BEAM POWER SUPPLY TRA
3651T-023E-BEAM EVAPORATOR(X)TRANSISTOR
3651T-029E-BEAM EVAPORATOR(X)TRANSISTOR
3651T-054E-BEAM EVAPORATOR(X)SPARE TRIODE TUBE
3651V-001E-BEAM EVAPORATOR(X)CHAMBER VENT VALVE
3651V-011E-BEAM EVAPORATOR(X)VENT LINE MAINFOLD
3653A-001E-BEAM EVAPORATOR(X)ADAPTER LG26 (DEEP UV)
3653B-011E-BEAM EVAPORATOR(X)PUSH BUTTON WITH LED
3653C-001
MASK ALINER
(X)CABLE NEGATIVE
3653F-001
MASK ALINER
(X)MEDIUM BLOW FUSE 2.5A
3653F-002
MASK ALINER
(X)SLOW BLOW FUSE 6.3A
LOCATION
C-4-4-3
C-4-4-3
VENDOR PART NO
C-1-3
C-4-4-3
C-4-4-3
C-4-4-3
5PER BOX
5PER BOX
1N 5340
342012
972-970A-02-WRN
SQ-10A
6230-20-0105
6230-45-0210
5-V-6
745229-7
745230-7
FT58-008
C-4-4-3
N-7-5-2
N-7-5-2
N-7-5-2
N-7-5-2
N-7-5-2
8525-0390
DO 4A
MAR-115-1Y-20
ROX-6
825F-IRO
5262
BE-2RD-A2
45-700-IGI-SIOD
45-700-IGI SIOD
45-700 IGI SIOD
J40-218
J-2-2-2
N-7-5-2
C-4-4-3
N-7-5-2
N-7-5-2
S-1
C-4-4-3
C-4-4-3
N-7-5-2
M-6-3-1
N-7-5-2
N-7-2-3
N-7-3-4
N-7-3-4
N-7-5-2
C-4-4-3
L-2-1
H-5-3
N-7-5-2
C-4-4-3
N-2-1-1
N-2-1-1
B-4-4-3
B-4-4-3
L50J250K
STT-105
40373
3CX-10000-AT
301-031-93
610-105-96
260-010-55
610-044-05
610-044-99
20
1
1
1
2
1
1
2
2
5
5
2
1
1
1
1
2
2
6
1
2
1
1
1
9
2
2
1
2
1
2
1
4
2
2
2
3
2
2
4
4
1
1
2
1
1
2
2
1
2
2
7
7
LOC
Q42
Q42
T12
Q42
Q42
T12
Q42
Q42
Q51
Q42
Q42
Q42
Q64
T12
T12
T12
T12
T12
Q42
Q42
Q42
Q42
Q42
Q42
Q42
Q42
Q42
Q42
Q42
Q42
Q42
Q42
Q42
Q42
Q42
Q51
Q42
Q42
Q42
Q42
Q42
T12
Q51
T12
T12
X23
Q42
Q42
Q53
Q53
Q11
Q53
Q11
VENDOR
No
Item no
DESCRIPTION
4818 3653F-003
MASK ALINER
4819 3653F-004
MASK ALINER
4820 3653G-001
MASK ALINER
(X)GEAR DRIVE
4821 3653G-011
MASK ALINER
(X)SUSS GREASE 410
4822 3653L-001
MASK ALINER
(X)LAMP CABLE (CD-XE LAMP)
4823 3653L-002
MASK ALINER
(X)350W/S HG-LAMP/LM350
4824 3653L-004
MASK ALINER
(X)NUT FOR HBO LAMP
4825 3653L-006
MASK ALINER
(X)PANEL LAMP 24V 50MA
4826 3653L-007
MASK ALINER
(X)LAMP 24V (PUSH BUTTON)
4827 3653S-011
MASK ALINER
(X)SWITCH BLACK STEP1
4828 3653S-012
MASK ALINER
(X)SWITCH BLACK STEP2
4829 3654C-001
RAPID THERMAL PROCESSOR
(X)SILICONE HEATSINK COMPOUND
4830 3654C-002
(X)CONL,AUXILIARY N/O
4831 3654L-001
(X)LAMPHOLDER TUNG-HALOGEN 10A
4832 3654L-002
(X)LAMP TUNGSTEN-HALOGEN
4833 3654R-001
(X)RELAY,DPDT,24VAC
4834 3654S-001
(X)REPLACEMENT KIT,FLOW SW
4835 3654S-002
RAPID
(X)SWITCH SPDT INTERLOCK 5A
4836 3654T-002
RAPID
(X)THERMOSTAT OPEN=150F,CLOS=1
4837 3655C-001TOXIC GAS SCRUBBER(X)CONTROL THERMO COUPLE
4838 3655C-002TOXIC GAS SCRUBBER(X)FLAME CHECK CANISTER
4839 3655G-001TOXIC GAS SCRUBBER(X)FLANGE GASKET
4840 3655G-002TOXIC GAS SCRUBBER(X)INCONEL FLANGE GASKET
4841 3655H-001TOXIC GAS SCRUBBER(X)HEATER POWER FEED TROUGH
4842 3655P-001
SCRUBBER
(X)PRIMARY UMBRELLA JET (JET:2
4843 3655S-001
SCRUBBER
(X)EXHAUST SECTION TEMP.SENSOR
4844 3655S-002
SCRUBBER
(X)LIQUID LEVEL SENSOR
4845 3656L-001 WAFER SCRUBBER (X)LAMP,6V12W
4846 3656P-001 WAFER SCRUBBER (X)VACUUM LINE PIPING
4847 3656S-001
SCRUBBER
(X)VACUUM SWITCH
4848 3656T-001
SCRUBBER
(X)WAFER TABLE
4849 3657A-001
ALPHA STEP
4850 3657A-002
ALPHA STEP
4851 3657L-001
ALPHA STEP
4852 3658C-001 LD CHIP TESTER (X)CABLE
4853 3658C-002
BAR TESTER
(X)CONNECTOR KIT
4854 3660A-001
LAPPING & POLISHING M/C
(X)0.45KG B-ALUMINIUM OXIDE
4855 3660B-001
(X)DRIVE BELT
4856 3660B-002
(X)REFILLABLE AEROSOL BOTTLE
4857 3660D-002
(X)LIQUID DIAMOND 500ML
4858 3660F-001
(X)65MM DIA GLASS FACING
4859 3660P-002
(X)SPECIMEN MOUNTING PLATE
4860 3660P-004
(X)491004 ELECTRONIC PROBE
4861 3660P-005
(X)POLISHING PLATE
4862 3660P-006
(X)DIAMETER LAPPING POLISHING
4863 3660P-007
(X)PRESSURE PLATE
4864 3660S-002
(X)ON/OFF SWITCH
4865 3660S-003
(X)ETCHANTS AND SLURRIAS
4866 3660W-001
(X)0.25KG LOW TEMP. WAX
4867 3660W-002
(X)4CC GLYCOLPHTHALATE WAX
4868 3901B-021
C-V PLOTTER
(Y)5"SET OF BELT
4869 3901M-003
C-V PLOTTER
(Y)5"MICROPOSITIONER
4870 3901M-004
C-V PLOTTER
(Y)5"BASE MANIPULATO
LOCATION
N-2-1-1
B-4-4-3
N-2-1-1
N-2-1-1
N-2-1-1
N-2-1-1
N-2-1-1
N-2-1-1
B-4-4-3
B-4-4-3
B-4-4-3
B-4-4-3
B-4-4-3
N-2-1-1
N-2-1-1
B-4-4-3
B-4-4-3
B-4-4-3
B-4-4-3
N-2-1-1
B-4-4-3
B-4-4-3
VENDOR PART NO
610-088-85
610-089-76
610-044-05
625-000-15
260-026-20
260-068-47
300-213-40
610-057-03
610-068-07
610-024-37
610-024-61
1612-0040
4501-0040
2109-0080
2451-0010-02
4502-0011-01
0641-0133-01
5107-0020
5300-0091-01
800-132
800-214
855-063
855-063F
857-010
857-1UJ
800-004
857-220
B-4-4-3
N-2-1-1
B-4-4-3
B-4-4-3
B-1-3-4
B-4-4-3
B-4-4-3
N-2-1-1
N-7-2-4
MI 220
N-7-2-4
N-6-5-4
N-2-1-4
N-6-5-4
N-6-5-4
N-6-5-4
N-6-5-4
N-6-5-4
N-6-5-4
N-6-5-4
N-1-2-2
MI 171
MI 247
HT2.5 TP ANVIL
MI 195
M191
MI229
MI 232
MI1558
MI 1041
MI 181
6200-B
MODEL.8-725BRM
550-360MT-6
7
8
1
1
4
10
5
4
4
1
1
1
1
4
1
2
1
2
1
1
4
1
2
2
2
1
1
5
1
1
1
1
1
1
1
1
4
2
3
5
1
3
1
1
1
2
2
1
3
1
1
2
1
LOC
VENDOR
Q53
Q11
Q53
Q53
Q53
Q11
Q53
Q53
Q53
Q53
Q53
Q11
Q11
Q11
Q11
Q11
Q11
Q53
Q53
Q11
Q11
Q11
Q11
Q11
Q53
Q11
Q11
Q11
Q11
Q53
Q11
Q11
T12
Q11
Q11
Q53
Q55
Q55
Q55
Q55
B102
Q55
Q55
Q55
Q55
Q55
Q55
Q55
Q55
Q55
B63
B16
W15
MDC
"
"
No
Item no
DESCRIPTION
4871 3901S-031
C-V PLOTTER
(Y)5"SHIELDED PROBE
4872 3901S-032
C-V PLOTTER
(Y)5"S/PART KINT
4873 3901T-002
C-V PLOTTER
(Y)5"THERMCCOUPLE WI
4874 3902A-001 WAFER INSPECTION (Y)ADJUSTING FOOT
4875 3902A-002 WAFER INSPECTION (Y)ARM
4876 3903A-001
ELLOSOMETER
(Y)LASER ASS'Y
4877 3903A-006
ELLOSOMETER
(Y)ORBITRAN PC BOARD
4878 3903A-014
ELLOSOMETER
(Y)MICROSWITCH ASSY
4879 3903A-018
ELLOSOMETER
(Y)DRUM ANALYZER (WI
4880 3903B-004
ELLOSOMETER
(Y)PHOTO DIODE
4881 3903B-006
ELLOSOMETER
(Y)PHOTO DIODE BOARD
4882 3903B-006
ELLOSOMETER
(Y)PHOTO DIODE BOARD
4883 3903B-022
ELLOSOMETER
(Y)FROG-LEG GEAR BOX
4884 3903C-003
ELLOSOMETER
(Y)C-SLIDE ASSY AUTO
4885 3903C-005
ELLOSOMETER
(Y)INTERFACE CARD &
4886 3903C-006
ELLOSOMETER
(Y)COMPENSATOR,AUTO
4887 3903D-002
ELLOSOMETER
(Y)PHOTODETECTOR
4888 3903F-001
ELLOSOMETER
(Y)FUSE STEPPER BOAR
4889 3903L-003
ELLOSOMETER
(Y)HOUSING FOR INDIC
4890 3903M-006
ELLOSOMETER
(Y)STEPPING MOTOR
4891 3903M-007
ELLOSOMETER
(Y)ROTATING ANALYZER
4892 3903M-008
ELLOSOMETER
(Y)BRUSHES, MOTOR, O
4893 3903P-004
ELLOSOMETER
(Y)KEY TOOK, PRISM
4894 3903P-005
ELLOSOMETER
(Y)PRISM ASSY
4895 3903P-006
ELLOSOMETER
(Y)PIMHOLE
4896 3903S-004
ELLOSOMETER
(Y)A/D ADJUSTMENT SW
4897 3903S-014
ELLOSOMETER
(Y)BEAM SHUTTER
4898 3903W-001
ELLOSOMETER
(Y)CHCEK SAMPLE WAFE
4899 3904B-002
4-POINT PROBE
(Y)5"PCB ASS'Y VIDEO
4900 3904B-004
4-POINT PROBE
(Y)PCB ROM-EROM MODE
4901 3904B-005
5-POINT PROBE
(Y)5"KEY BOARD ASS'Y
4902 3904C-001
6-POINT PROBE
(Y)5"POWER CORD 3FT
4903 3904D-012
7-POINT PROBE
(Y)5"DISC-VACUUM-AFP
4904 3904I-004
PROBE
(C)I.C (3996I-308)
4905 3904M-002
PROBE
(Y)5"MOTOR GEAR
4906 3904M-011
PROBE
(Y)5"MONITOR 12"
4907 3904P-003
PROBE
(Y)5"LOW NOISE BITET
4908 3904P-013
PROBE
(Y)5"WAFER HOLDER PL
4909 3904R-021
PROBE
(Y)5"VOLTAGE REGULATOR 5V, 3A
4910 3904S-004
PROBE
(Y)5"I.C S/W LF 13202D
4911 3904S-005
PROBE
(Y)5"ANALOG S/W SW02 FQ
4912 3904S-011
PROBE
(Y)5"OPTO ELECTRONICAL SENSOR
4913 3904V-002
PROBE
(Y)5"VOLATAGE REE FEF 02EZ
4914 3905C-004
PROBE
(Y)5"CHAMBER
4915 3905F-001
HMDS
(Y)5"FLEXLINE,SS 4"
4916 3905G-001
HMDS
5"CONSISTING 6 DOOR
4917 3905G-002
HMDS
(Y)5"GASKET FLASK ST
4918 3905G-004
HMDS
5"GASKET,DOOR,2020
4919 3905K-001
HMDS
(Y)5"KEY PAD
4920 3905L-001
HMDS
(Y)5"LED DISPALY BACKLITE
4921 3905M-001
HMDS
(Y)5"MICROPROCESSOR
4922 3905O-001
HMDS
(Y)5"O-RING
4923 3905R-002
HMDS
(Y)5"RELAY 24V DC CO
LOCATION
A-3-5
N-1-2-2
N-1-2-3
L-10-6-2
G-2-4-2
L-10-6-2
L-10-6-2
G-2-4-2
G-2-4-2
B-1-1
N-6-1-4
G-2-4-2
N-6-1-4
B-1-1
C-1-1, L-10-6-2
C-1-1
L-10-6-2
L-10-6-2
N-1-3-2
C-1-1
L-10-6-2
N-6-1-4
C-1-1
B-1-1
G-2-4-2
G-2-4-2
L-6-3
B-3-1-2
B-3-1-2
C-4-3-3
D-3-3-2
L-10-7-2
B-3-1-2
C-4-3-3
C-4-3-3
C-4-3-3
C-4-3-3
C-4-3-3
VENDOR PART NO
MODEL.U-S-1-CD
6200-SPK
1260010
2K630-347
MGV13100A1
10026-20EN
0005180-04
7660
16161-A30
10161-D25B
10257-10
10257-10
10161-BA
10161-45G
1061-B5
P7851
P7923
10026-J4A-RE19
UE30PP1000
10161-A35
16161-A40M
10026-110
10026-A10026
9682-15
10026-120
10026-21
L119SW-460
03-110630D01
03-110887D01
02-109891D01
32-106655A11
16-109095C01
912803
30-106660A02
45-107147A02
950101
8295-825-05
9514051
913202
950201
77-106768A02
950202
01-710-010-4389
3005017
B-1-1
K-5-2-4
K-5-1-2
B-1-1
K-5-2-4
3092
3004700
50003007
50003006
3216
4102-15
3006052
1
1
1
3
2
2
1
3
1
2
1
1
1
1
1
1
1
4
9
1
1
1
1
1
1
1
1
1
1
1
1
1
3
2
1
1
1
2
1
2
3
1
2
1
1
11
9
4
1
1
3
1
1
LOC
VENDOR
Q13
B63
B63
B16
B53
Q15
Q15
Q15
Q15
Q15
Q15
Q15
Q14
Q14
Q15
Q14
Q14
Q15
Q14
Q15
Q15
Q14
B16
Q14
Q15
Q14
Q14
Q14
Q15
Q15
Q22
Q44
Q44
T61
W21
Q33
Q14
B53,Q44
T61
T61
T61
T61
T61
X54
J53
J51
J51
J51
J45
J45
J22
J51
J45
"
"
"
NIKON
"
GENERATOR
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
ASM
ASM
"
"
"
ASM
"
"
"
"
ASM
ASM
ASM
ASM
ASM
"
YES
"
"
"
"
YES
"
"
"
No
Item no
4924
4925
4926
4927
4928
4929
4930
4931
4932
4933
4934
4935
4936
4937
4938
4939
4940
4941
4942
4943
4944
4945
4946
4947
4948
4949
4950
4951
4952
4953
4954
4955
4956
4957
4958
4959
4960
4961
4962
4963
4964
4965
4966
4967
4968
4969
4970
4971
4972
4973
4974
4975
4976
3905T-001
3905V-005
3907A-003
3907A-011
3907A-012
3907B-013
3907F-001
3907G-024
3907H-008
3907H-009
3907H-011
3907K-004
3907L-004
3907L-006
3907L-007
3907L-021
3907L-024
3907L-029
3907M-001
3907P-002
3907T-008
3908B-001
3908B-006
3908B-012
3908C-001
3908P-002
3908P-010
3908P-011
3908T-001
3909C-001
3909C-005
3909C-007
3909C-009
3909C-010
3909C-027
3909C-031
3909C-032
3909C-033
3909C-041
3909F-004
3909L-002
3909L-003
3909P-030
3909P-041
3909P-051
3909R-011
3909S-009
3909S-012
3916C-002
3916V-013
3919B-001
3919F-001
3921A-001
HMDS
HMDS
MICROSCOPE
MICROSCOPE
MICROSCOPE
MICROSCOPE
MICROSCOPE
MICROSCOPE
MICROSCOPE
MICROSCOPE
MICROSCOPE
MICROSCOPE
MICROSCOPE
MICROSCOPE
MICROSCOPE
MICROSCOPE
MICROSCOPE
MICROSCOPE
MICROSCOPE
MICROSCOPE
MICROSCOPE
NANOSPEC
NANOSPEC
NANOSPEC
NANOSPEC
NANOSPEC
NANOSPEC
NANOSPEC
NANOSPEC
OMNI MAP
OMNI MAP
OMNI MAP
OMNI MAP
OMNI MAP
OMNI MAP
OMNI MAP
OMNI MAP
OMNI MAP
OMNI MAP
OMNI MAP
OMNI MAP
OMNI MAP
OMNI MAP
OMNI MAP
OMNI MAP
OMNI MAP
OMNI MAP
OMNI MAP
AUTO SORT
AUTO SORT
MFC PART
MFC PART
PHILTEC
DESCRIPTION
(Y)5"THERMOCUPLE,J-T
(Y)5"VARISTOR METAL
(X)F-ARM
(Y)HMX CONNECTION AD
(Y)U-EPI ADAPTER FOR OPTIPHOT
(Y)MPC99001 NI-CD BACK-UP BATT
(X)MICROSCOPE FILTER
(Y)GEAR
(Y)EYEPIECE HEAD
(Y)HOUSING
(Y)LAMPHOUSE HMX
(Y)KNOB
(Y)LAMP MOUNT 307-14
(X)HBO 100W/2 BURNER
(X)REFLECTOR HALOGEN
(Y)STAGE LOCK 026-40
HALOGEN LAMP 6V 20W
(Y)LAMP HOUS LENS
(Y)MOTOR
(Y)NOMARSKI PRISM NI
TRANSFORMER & OTHERS
(Y)MEMORY BOARD
(Y)P.C.B PRE-AMP
PCB I/O
DIGITAL COUNT
(Y)POWER SUPPLY CS2
(Y)UPOWER SUPPLY(UV)
(Y)DIGITAL PANEL INS
(Y)PRINTER HEAD ASSY
(Y)COUPLING INSERT1/4"COMPRESS
(Y)CABLE ASSY
(Y)CABLE ASSY
(Y)CABLE ASSY
(Y)CABLE ASSY
(Y)PCA DISK CONTROLL
(Y)COUPLING INSERT
(Y)COUPLING INSERT
(Y)CYLINDER ODUBLE ACTING
(Y)COUPLING BODY
(Y)OVERLAY, VACUUM FINGER,ONE
(Y)LED SQUARE AMBER
LIGHT BOX ASS'Y
(Y)ASSY POWER SUPPLY
PRINTER EPSON FIX-870
(Y)PLUG,BLAKC,406 DIA
(Y)REGULATOR PRESET
(Y)OPT SENSER, CLR
(Y)SWITCH VACUUM
(Y)5"MINI AIR CYLIND
(Y)SPOT BULB
(Y)5"FILTERS
(X) 4-A2-80-60 TIMER ASS'Y 80
LOCATION
VENDOR PART NO
K-5-4-1
D-1-2-2
3004008
3010067
C-1-2
C-1-2, N-6-1-4
L-10-7-2
MXA20216
MBF29900
UFX-II
N-1-3-2
G-1-4
G-1-5, L-9-6, D-14-5
C-1-1
N-1-3-2
N-8-1-4
AB287700
ER TYPE
DL053800
MAE15001
AA781300
002-000
N-1-2-2
B-1-1
N-1-3-2
G-2-2,M-3-1
N-6-1-4
C-4-1-2
J-2-1-1
N-6-1-4
N-6-1-4
N-6-1-4
N-6-1-4
N-6-1-4
N-6-1-4
N-6-1-4
N-1-2-3
N-1-2-3
N-1-2-2
N-6-1-4
N-6-1-4
E-1-1
L-9-2
N-6-1-4
N-6-1-4
N-6-1-4
N-6-1-4
L-10-6-2
N-1-2-2
D-2-1-2, D-3-5-4
860040
853-031
038-101 131-000
LP105400
DM047600
XVXX
8200-0149
8200-0001
8207-0142
9407-0012
7200-1043
9602-0164
7901-2326
9407-0190
91-0013
55-0111
55-0195
55-0197
55-0210
26-0021
91-0015
91-0016
96-0007
91-0011
77-0162-01
35-0021
SP309P
51-0027
22-0040
47-0169
96-0002
SP3104-1
96-0001
116615
B-100A
B
1
1
1
18
22
3
13
5
1
10
25
20
12
20(20EA
8
2
11
20
1
5
18
2
1
2
3
1
1
4
2
1
2
2
2
2
1
3
4
4
2
1
1
1
1
1
1
1
2
1
1
1
2
3
3
LOC
VENDOR
J45
"
T33
"
Q14
LEITZ
Q15
LEITZ
Q15
LEITZ
Q14
LEITZ
DD33
"
B16
LEITZ
Q21
"
Q21
"
Q21
"
B16
"
Q13
"
DD34
"
Q13
"
B16
"
Q13
"
Q14
"
S14
LEITZ
B16
"
Q21
"
V33
NANOMETRIC
V33
NANOMETRIC
V33
NANOMETRIC
Q13
"
T53
"
Q25
"
Q13
"
Q13
"
Q13
PROMETRICS
Q13
"
Q13
"
Q13
"
Q13
"
V33
PROMETRICS
B53
"
B53
"
B16
"
Q13
"
B53
"
Q13
"
Q32
PROMETRICS
Q32
"
Q32
"
B53
"
Q13
"
Q13
"
Q13
"
Q13
GCA
Q13
GCA
Q15
B16
AA72 JUNCTION DEPTH
No
Item no
4977 3921B-001
4978 3921B-021
4979 3921B-031
4980 3921B-051
4981 3921C-001
4982 3921C-002
4983 3921C-011
4984 3921L-001
4985 3921L-021
4986 3921M-011
4987 3921M-021
4988 3921P-001
4989 3921P-002
4990 3921T-001
4991 3921V-001
4992 3923A-001
4993 3923B-002
4994 3923B-003
4995 3923B-004
4996 3923B-005
4997 3923B-008
4998 3923B-053
4999 3923B-054
5000 3923B-055
5001 3923C-002
5002 3923C-003
5003 3923C-004
5004 3923C-005
5005 3923F-001
5006 3923F-005
5007 3923F-022
5008 3923F-023
5009 3923I-001
5010 3923N-001
5011 3923P-001
5012 3923R-003
5013 3923R-004
5014 3923S-031
5015 3923S-033
5016 3923S-034
5017 3923S-035
5018 3923S-036
5019 3923S-038
5020 3923W-001
5021 3923W-002
5022 3924B-001
5023 3924B-002
5024 3924B-003
5025 3924B-004
5026 3924B-005
5027 3924B-006
5028 3924B-007
5029 3924B-008
JUNCTION DEPTH
JUNCTION DEPTH
JUNCTION DEPTH
JUNCTION DEPTH
JUNCTION DEPTH
JUNCTION DEPTH
JUNCTION DEPTH
JUNCTION DEPTH
JUNCTION DEPTH
JUNCTION DEPTH
JUNCTION DEPTH
JUNCTION DEPTH
JUNCTION DEPTH
JUNCTION DEPTH
JUNCTION DEPTH
INSPECTION
INSPECTION
INSPECTION
INSPECTION
INSPECTION
INSPECTION
INSPECTION
INSPECTION
INSPECTION
INSPECTION
INSPECTION
INSPECTION
INSPECTION
INSPECTION
INSPECTION
INSPECTION
INSPECTION
INSPECTION
INSPECTION
INSPECTION
INSPECTION
INSPECTION
INSPECTION
INSPECTION
INSPECTION
INSPECTION
INSPECTION
INSPECTION
INSPECTION
INSPECTION
INSPECTION
INSPECTION
INSPECTION
INSPECTION
INSPECTION
INSPECTION
INSPECTION
INSPECTION
DESCRIPTION
LOCATION
VENDOR PART NO
M-5-2-2
(X) POLISHING SOLUTION 80Z BO
(X) F SOLID VIPER BLADE FOR M
(X) BOLT & 2 EA
(X) 2"-6"BACK SURFACE CHUCK R
(X) 4" FRONT SURFACE CHUCK E-4
(X) MAGNET COIL
(X) LIVE CENTER
(X) LANS (2BRACK X 2GREEN)
(X) XM MICROPROCESSOR
(X) STAGE MICROMETER
(X) ROLL PAPER
(X) THERMAL CALCULATOR PAPER
(X) TYGON WATER LINE TUBING
(X) MEASURING VIAL
(X) AUTO FOCUS PRE-AMP REV M
(X) COMMUNICATION MULTIPLEXER
(X) SOLENOID DRIVE PCB
(X) FOCUS PCB ASSY Y1
(X) MOTOR CONTROL PCB ASSY J
(X) LOADER MODULE PCB ASSY
(X) AIR BEARING ASS'Y
(X) AIR BEARING ASS'Y
(X) BARRYMOUNT
(X) AIR CYLINDER (7 STROKE)
(X) CASSETTE
(X) SHUCK LEAF
(X) AIR CYL 5/16 BORE SPR RTN
(X) BEARING FLANGE
(X) FING RSTRCTD RED
(X) FUSE (3AG)
(X) FUSE (5A)
(X) I.C
(X) NUT
(X) PHOTORANSISTOR-SIL MT8020
(X) REGULATOR (O-60 PSI)
(X) REGULATOR (0-60 PSI)
(X) VACUUM SWITCH
(X) SPACE SHAFT
(X) SPRING COMPRESION
(X) SPRING PLUNGER
(X) SPRING COMPRESION
(X) SCREW
(X) WASHER
(X) WIRE
(Y)5"PHOTO INTERRUPT
(Y)5"CPU/MEMORY BOAR
(Y)5"CONTROL BOARD
(Y)5"POWER SIGNAL BO
(Y)5"CONNECTING BOAR
(Y)5"CONNECTING BOAR
(Y)5"INTERFACE BOARD
(Y)5"INTERFACE BOARD
D-2-1-2
D-2-1-2
D-2-1-2
D-2-1-2
D-2-1-2
M-7-3-1
M-7-3-1
D-2-1-2
M-7-3-1
M-7-3-1
M-7-3-1
M-7-3-1
J-4-1-4
J-4-1-4
J-4-1-4
J-4-1-4
J-4-1-4
D-3-5-4
D-3-5-4
D-3-5-4
D-3-5-4
D-3-5-4
D-3-5-4
D-3-5-4
D-3-5-4
D-3-5-4
J-4-1-4
J-4-1-4
J-4-1-4
D-3-5-4
J-4-1-4
J-4-1-4
D-3-5-4
D-3-5-4
D-3-5-4
E-2-2
D-3-5-4
E-2-2
D-3-5-4
J-4-1-3
E/F
1-A13
79733
ASMM
1-KK
03-04504-00
03-07871-X2
03-05800-A
03-07797-Y1
03-05984-00
01-04640-00
01-05075-00
27-01119-00
17-00349-00
15-07673-27
15-04520-0C
17-00369-X1
23-00710-00
15-04809-02
42-02606-00
42-02603-00
21-00119-00
54-04102-00
32-01610-A
17-00358-00
17-00352-00
21-00109-00
28-01226-00
28-01230-00
28-01239-00
20-00004-05
21-00138-00
F45-02910-00
2S017-010
2S015-008-2
2S014-008-2
2S003-003-2
2S017-025
2S017-026
2S013-013-2
2S013-014-2
3
8
2
2
1
1
1
2
2
1
2
4
3
2
2
1
1
2
2
2
4
5
4
1
1
3
6
1
2
12
6
5
2
1
5
1
1
1
10
4
2
2
4
5
2
1
1
1
1
1
1
1
1
LOC
VENDOR
T22
AA72
AA72
AA72
AA72
AA72
AA72
AA74
AA74
AA74
AA72
AA74
AA74
AA74
AA74
T11
T11
T11
T11
T11
T11
AA72
AA72
AA72
AA72
AA72
AA72
AA72
AA72
AA72
T11
T11
T11
AA72
T12
T11
AA72
AA72
DD14
DD14
AA72
DD14
AA72
DD14
AA72
DD33
DD33
DD33
DD33
DD33
DD33
DD33
DD33
PHILTEC
"
"
"
"
"
"
"
"
"
"
"
"
"
"
OSI
"
"
"
"
"
OSI
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
MACTRONIX
"
"
"
"
"
"
"
No
Item no
5030
5031
5032
5033
5034
5035
5036
5037
5038
5039
5040
5041
5042
5043
5044
5045
5046
5047
5048
5049
5050
5051
5052
5053
5054
5055
5056
5057
5058
5059
5060
5061
5062
5063
5064
5065
5066
5067
5068
5069
5070
5071
5072
5073
5074
5075
5076
5077
5078
5079
5080
5081
5082
3924B-009
3924B-010
3924B-011
3924B-012
3924B-014
3924B-015
3924B-051
3924C-001
3924C-021
3924G-001
3924G-002
3924G-003
3924H-001
3924H-002
3924O-001
3924S-001
3925B-007
3925C-001
3925C-002
3925G-001
3925G-011
3925H-001
3925H-002
3925M-001
3925O-001
3925S-006
3925S-007
3925V-001
3925V-004
3925V-005
3925V-007
3925V-008
3926B-003
3926B-011
3926B-012
3926B-028
3926B-029
3926B-030
3926B-031
3926B-032
3926B-033
3926B-051
3926C-002
3926C-003
3926C-007
3926C-008
3926C-009
3926C-010
3926C-015
3926C-017
3926F-001
3926F-003
3926F-007
INSPECTION
INSPECTION
INSPECTION
INSPECTION
INSPECTION
INSPECTION
INSPECTION
INSPECTION
INSPECTION
INSPECTION
INSPECTION
INSPECTION
INSPECTION
INSPECTION
INSPECTION
INSPECTION
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
DESCRIPTION
(Y)5"CPU/MEMEORY BOA
(Y)5"CPU/MEMORY BOAR
(Y)5"PERIPHERAL BOAR
(Y)5"POWER SOURCE BO
(Y)5"AF CONTROL BOAR
(Y)5"SENSOR BOARD (S
(Y)5"ENDLESS BELT
(Y)5"REVOLVING NOSEP
(Y)5"CASSETTE SENSOR
(Y)5"GREASE (100G)
(Y)5"GREASE (100G
(Y)5"GREASSE (100G)
(Y)5"WAFER HOLDER
(Y)5"SYRINGE HEAD
(Y)5"O-RING
(Y)5"PHOTO SENSOR
(X) SEX BOLT
(X) CYLANDER
(X) CYLANDER
(X) GEAR
(X) GUAGE
(X) HEATH
(X) HEATER
(X) WATER METER (0-100)
(X) O-RING
(X) DOOR INTERAC S/W
(X) PRESSURE S/W
(X) AIR VALVE (120,50/60)
(X) DIAPHRAM FOR VALVE
(X) SOLENOID VALVE
(X) SOLENOID VALVE FOR C.D.A
(X) SOL VALVE
(X)PC BOARD
(X)ELEVATOR BEARING
(X)BEARING BLOCK ASS
(Y)TIMING BELT
(Y)TIMING BELT
(Y)TIMING BELT
(C)T-BELT (3996B-293)
(C)T-BELT (3996B-296)
(Y)TIMING BELT
BLOWER
(X)P.P. CHAIN
(X)P.P. CHAIN
(X)GASKET GATE CYLIN
(X)SEAL SPRING LOADE
(X)AIR CYLINDER(ELEV
(X)AIR CYLINDER(GATE
(Y)MAIN CONTROLLER
(Y)AIR CYLINDER
(Y)FILTER ELEMENT
(X)FILTER ELEMENT
(Y)FILTER ELEMENT
LOCATION
VENDOR PART NO
2S015-006-2
2S015-005-2
2S1013-011-2
2S050-010
2S020-020-G
2S020-021
L-8-3-4
D-2-4-1
D-2-4-1
D-2-4-1
2S020-007-2
A3
G207
G7826
G8181
2K640-448
2K640-332-2
X2110-131
A2(MGV13100)
LD5030
098-DX
MRS048DXPZ
60T40DP
250EI3102136
N373
B-1-3-1
L-11-4-4
L-11-3-1
L-11-3-1
L-11-3-1
L-11-3-1
L-11-3-1
F-3-1
N-6-3
B-1-3-1
L-5-2-2
L-11-4-4
N-6-1-3
30-125-PSI
PN393N SWITCH
DXXX
240-MXL-9.5
220-MXL-9.5
235-MXL-9.5
190-XL-037
220-XL-037
221-MXL-9.5
VBL-007SE
AB4012-01
BB0371-01
PM-487-PE
CS-DA20X350
L0000
33 TYPE
050-05-CQ
1
1
1
1
1
1
5
1
1
1
1
1
1
1
2
1
4
3
1
1
1
1
1
1
1
2
1
1
2
1
2
1
1
9
2
49
4
4
12
12
10
1
5
3
2
1
2
2
1
2
2
6
10
LOC
VENDOR
DD33
DD33
DD33
DD33
DD33
DD33
DD33
DD33
DD33
DD33
DD33
DD33
DD33
DD33
DD33
DD33
AA73
AA73
AA73
AA73
AA73
AA73
AA73
AA73
AA73
AA73
AA73
AA73
AA73
AA73
AA73
AA73
T11
BB11
BB11
BB11
BB11
BB11
BB11
BB11
A92
X13
BB11
BB11
BB11
BB11
BB12
BB12
T11
BB12
A92
BB11
BB11
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
ATCOR
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
HUGLE
"
HUGLE
"
"
"
"
"
HUGLE
HUGLE
"
"
"
"
"
"
"
"
"
"
"
No
Item no
5083
5084
5085
5086
5087
5088
5089
5090
5091
5092
5093
5094
5095
5096
5097
5098
5099
5100
5101
5102
5103
5104
5105
5106
5107
5108
5109
5110
5111
5112
5113
5114
5115
5116
5117
5118
5119
5120
5121
5122
5123
5124
5125
5126
5127
5128
5129
5130
5131
5132
5133
5134
5135
3926F-008
3926F-009
3926G-001
3926G-002
3926G-003
3926G-004
3926G-005
3926G-022
3926H-001
3926H-001
3926H-001
3926H-002
3926H-006
3926K-001
3926M-005
3926M-007
3926P-003
3926R-002
3926R-010
3926S-001
3926S-002
3926S-004
3926S-006
3926S-011
3926S-012
3926S-013
3926S-014
3926S-015
3926S-017
3926S-022
3926S-026
3926S-027
3926S-028
3926S-051
3926T-005
3926T-007
3926T-012
3926U-001
3926U-002
3926U-003
3926V-001
3926V-002
3926V-003
3926V-004
3926V-005
3926V-006
3926V-007
3926V-008
3926V-009
3926V-010
3926V-011
3926V-012
3926V-013
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
BOX CLEANER
DESCRIPTION
(Y)FILTER ELEMENT ETC
(Y)VANGUARD FILTER
(X)GEAR HEAD
(X)GEAR HEAD
(X)GATE DOOR
(X)GEAR HEAD
(X)GEAR HEAD
(Y)PULSE GENERATOR
(X)HEATER
(X)HEATER
(X)HEATER
(X)HEATER ELEMENT AS
(Y)HEATER ELEMENT
(Y)KEY
(Y)FLOW METER
(Y)REVERSIBLE MOTOR
(Y)POLLER PIN
(Y)ROLLER
(Y)V-RING
(X)CYLINDER SENSOR
(X)PHOTO SENSOR
(X)CYLINDER SENSOR
(X)SENSOR PHOTORESCE
(X)SPROKET
(X)ELEVATOR SHAFT
(X)CHAIN FEEER OR ST
(X)SWITCH DI WATER P
(X)S/W FLOW CHEMICAL
(X)S/W N2 PRESSURE
(X)PRESSURE SWITCH
(Y)POWER SUPPLY
(Y)POWER SUPPLY
(Y)POWER SUPPLY
(Y)SHELF
(X)SEAL O-RING DI SU
(X)LOT TUBING POLYPR
(Y)DI TANK
(Y)ROLLER UNIT FOR MAINFRAME
(X)SOLENOID VALVE
(X)SOLENOID VALVE
(X)SOLENOID VALVE
(X)SOLENOID VALVE
(X)PVC VALVE
(X)PVC VALVE
(X)VALVE 2-WAY SURFA
(X)VALVE 2-WAY N2 DI
(X)VALVE SOLEVENT EX
(X)VALVE PILOT SOLVE
(X)VALVE SOLVENT DISPENSE(W/O)
(X)VALVE EMERGENCY P
(X)VALVE TANK PRESSU
LOCATION
VENDOR PART NO
L-11-2-1
MN02-1DAS
3GK3OK
4GK3OK
I-3-3
N-6-2
N-6-3
N-6-3
N-6-3
N-6-1-3
N-7-6-1
N-6-1-3
N-6-1-3
N-6-1-3
N-6-1-3
L-5-2-2
L-11-3-1
L-11-4-4
L-11-3-1
L-11-3-1
L-11-3-1
L-11-3-1
N-6-1-3
B-1-3-1
B-1-3-1
D-2-1-3
L-11-3-1
N-6-2
N-7-6-1
N-7-6-1
N-6-4-4
N-6-4-4
N-6-4-4
N-6-4-4
3GK30K
4GK30K
4G6100S
HA0992-02
N8A22/NCC-0684
3-2001AV
HA1428-01
V-20S
A0000
CN1275-01
J0000
GXXX
AC0507-01
BB0265-01
BB1929-01
BB0266-01
AIRM401060
5RK 40GN-A
VAR12SD
P15-5
BB0493-01
BB4107-01
PC-70
W-2 PULLY
W-1 PULLY
W/PENETRATION
EXET
CHEMICAL
IONIZER
MANIFOLD
I-205
I-204
BB0150-01
BA1007-01
BB4307-01
BB4031-01
BB4342-01
BB0940-01
BB0134-01
1
1
1
1
8
4
3
1
1
1
1
1
1
10
1
2
1
17
29
5
5
4
2
22
2
2
1
1
1
1
2
1
1
6
2
1
1
2
2
1
3
3
2
3
3
5
2
2
1
1
1
1
1
LOC
VENDOR
CC22
BB12
P22
P22
DD21
P22
P22
BB12
BB12
BB12
BB12
BB11
D31
BB11
BB11
P12
BB11
BB11
A92
BB11
BB11
BB11
BB11
BB11
BB11
BB11
BB11
BB11
BB11
BB11
T11
T11
T11
DD11
BB11
BB11
BB12
D31
D31
Z18
BB11
BB11
BB11
BB11
BB13
BB13
BB13
BB13
BB13
BB13
BB13
BB13
BB13
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
No
Item no
DESCRIPTION
5136 3926V-014
BOX CLEANER
(X)VLAVE 2-WAY PILOT
5137 3926V-015
BOX CLEANER
(X)VALVE 2-WAY SOLENOID
5138 3926V-016
BOX CLEANER
(X)MANIFOLD VALVE
5139 3926V-018
BOX CLEANER
(Y)3-WAY VALVE
5140 3926V-025
BOX CLEANER
(Y)SOLENOID VALVE
5141 3926V-026
BOX CLEANER
(Y)AIR VALVE (FEMATE TYPE)
5142 3926V-027
BOX CLEANER
(Y)3 WAY VALVE
5143 3926W-001
BOX CLEANER
(Y)WIRE TRAY
5151 3928A-003
ELEMINATOR&LAMINATOR
AIR SHOCK ABSOBER
5152 3928B-009
(Y)BELT
5153 3928B-011
(Y)TIMING BELT
5154 3928B-012
(Y)TIMING BELT
5155 3928B-021
(C)T-BELT (3996B-303
5156 3928B-022
(Y)TIMING BELT
5157 3928B-024
(Y)BELT PRESSER
5158 3928B-025
(Y)BELT PRESSOR (1)
5159 3928B-026
(Y)BELT PRESSOR (2)
5160 3928B-027
(Y)BELT BRACKET
5161 3928B-029
(Y)TIMING BELT (U-TY
5162 3928B-030
(Y)TIMING BELT (U-TY
5163 3928B-031
(Y)BELT (3X160)
5164 3928B-032
(Y)BELT (3X160)
5165 3928B-033
(Y)BELT (3X205)
5166 3928B-034
(Y)BELT (3X225)
5167 3928B-035
(Y)BELT (3X367)
5168 3928B-036
(Y)BELT (3X520)
5169 3928B-037
(Y)BELT (3X189)
5170 3928B-038
(Y)BELT (2X152)
5171 3928B-039
(Y)BELT (2X144)
5172 3928B-040
(Y)BELT (3X220)
5173 3928B-050
(Y)BEARING
5174 3928B-051
(Y)BELT (3X171)
5175 3928B-052
(Y)BELT (3X310)
5176 3928B-053
(Y)BELT (3X195)
5177 3928B-054
(Y)POTIMAR BELT
5178 3928B-055
(Y)TIMING BELT
5179 3928B-056
(Y)TIMING BELT
5180 3928B-057
(Y)TIMING BELT
5181 3928B-058
(Y)TIMING BELT
5182 3928B-102
(Y)BUSHING
5183 3928B-111
(Y)GUIDE BAR(1)
5184 3928B-112
(Y)GUIDE BAR(1)
5185 3928B-113
(Y)GUIDE BAR(2)
5186 3928B-114
(Y)GUIDE BAR(2)
5187 3928B-115
(Y)TERMINAL BOARD
5188 3928B-116
(Y)BEARING
5189 3928C-011
(Y)AIR CYLINDER
5190 3928C-023
(Y)TAPE GUIDE COLLAR
5191 3928C-024
(Y)TAPE GUIDE COLLAR
5192 3928C-063
ELEMINATOR
CUTTER BLOCK
5193 3928C-071
ELEMINATOR
(Y)ROLL CAP
5194 3928C-072
ELEMINATOR
(Y)CURL CODE
5195 3928D-001
ELEMINATOR
(Y)DIAPHRAGM
LOCATION
VENDOR PART NO
BB0151-01
BB1398-01
N-6-4-4
N-4-4-1
N-6-4-4
N-7-5-3
B-1-2-4
N-3-1-4
N-3-1-4
N-3-1-4
N-3-1-4
B-1-2-4
B-1-2-4
B-1-2-4
B-1-2-4
B-1-2-4
B-1-2-4
N-3-1-4
N-3-1-4
N-3-1-4
N-3-1-4
N-3-1-4
N-3-1-4
N-3-1-4
N-3-1-4
A110-4E1-83-PL
15A
FDBVT-158
MCC-344-2
RBC-1007
C213098
480-L-060
510-L-050
150-L-050
480-L-050
B321014
C213049
C313024
C213048
173-L-050
187-L-050
B121076
B121077
B121078
B121079
B121090
B121061
B121084
F121059
F121060
F121061
MF63ZZS
F121062
F121063
F121064
5M-307
040S3M507
414XL 037
220XL 037
414XL
J113023
B114016
B114017
B114018
B114019
T20C05
L-520ZZW52
7N-1-D6X5
C113006
C113009
J213007
B121056
CVF100
DA-60D-1
1
1
2
3
1
1
1
1
1
2
2
2
2
5
3
4
4
4
2
2
2
2
2
2
2
2
1
2
2
2
2
2
2
2
2
2
1
1
2
2
2
2
2
2
2
4
2
1
1
1
2
1
3
LOC
VENDOR
BB13
BB11
BB11
R45
BB11
BB12
R31
DD10
Q45
Q45
Q45
Q44
Q44
Q44
Q44
Q44
Q44
Q44
Q45
Q45
Q45
Q45
Q45
Q45
Q45
Q45
Q45
Q45
Q45
Q45
Q45
Q45
Q45
Q45
Q45
Q44
Q44
Q44
Q44
Q45
Q45
Q45
Q45
Q45
Q45
Q44
Q44
Q44
Q44
Q44
Q44
Q44
Q44
"
"
"
"
"
"
"
"
TAKATORI
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
TAKATORI
"
"
"
No
Item no
5196
5197
5198
5199
5200
5201
5202
5203
5204
5205
5206
5207
5208
5209
5210
5211
5212
5213
5214
5215
5216
5217
5218
5219
5220
5221
5222
5223
5224
5225
5226
5227
5228
5229
5230
5231
5232
5233
5234
5235
5236
5237
5238
5239
5240
5241
5242
5243
5244
5245
5246
5247
5248
3928D-001
3928G-002
3928G-003
3928G-005
3928G-025
3928G-032
3928G-034
3928G-036
3928G-043
3928G-046
3928G-061
3928G-062
3928G-063
3928G-065
3928G-066
3928G-067
3928H-001
3928H-002
3928H-003
3928H-011
3928H-012
3928J-001
3928K-001
3928M-005
3928M-009
3928M-046
3928O-001
3928P-042
3928P-043
3928P-044
3928P-072
3928P-073
3928R-005
3928R-006
3928R-008
3928R-009
3928R-041
3928R-042
3928R-043
3928S-013
3928S-014
3928S-016
3928S-017
3928S-018
3928S-019
3928S-020
3928S-024
3928S-025
3928S-026
3928S-027
3928S-028
3928S-030
3928S-031
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
DESCRIPTION
(Y)DIAPHRAGM
(Y)SPUR GEAR
LM GUIDE
LM GUIDE
(Y)GENERATOR
LM GUIDE
(Y)TAPE GUIDE (B)
(Y)TAPE GUIDE (C)
LM GUIDE
(Y)LA GUIDE
(Y)SPUR GEAR(1)
(Y)SPUR GEAR(2)
(Y)SPUR GEAR(A)
(Y)BEVEL GEAR(A)
(Y)BEVEL GEAR(B)
(Y)BEVEL GEAR(C)
(Y)HAND (A)
(Y)HAND (B)
(Y)HAND
(Y)ROLLER HOLDER
(Y)HEATER HOLDER
(Y)ROTARY TUBE JOINT
(Y)KEY
(Y)STEPPING MOTOR
ORIENTAL MOTOR
PHOTO ELECTRIC SWITC
(Y)O-RING
(Y)SUCTION PAD
(Y)SUCTION PIN
(Y)SUCTION PIN TIP
(Y)INDER PLUNGER
(Y)SPRING PLUNGER
RELAY (DC24)
RELAY (AC100V)
RELAY
RELAY
(Y)RAIL BASE
(Y)GUIDE ROLLER(B)
(Y)GUIDE ROLLER (C)
(Y)TOGGLE SWITCH
(Y)SHAFT METAL (B)
(X)PUSH BUTTON SWITC
SPRING
SPRING
(Y)SPRING
(Y)SPRING
(Y)SPRING
(Y)MICRO SWITCH
VACUUM SENSOR
LOCATION
N-3-1-4
N-3-1-4
N-3-1-4
N-3-1-4
L-3-5-1
N-3-1-4
B-1-2-4
N-3-1-4
N-3-1-4
N-3-1-4
N-3-1-4
N-3-1-4
N-3-1-4
N-3-1-4
L-3-5-1
L-3-5-1
N-3-1-4
N-3-1-4
N-3-1-4
N-3-1-4
N-3-1-4
B-4-4-1
L-3-5-1
B-1-2-4
B-1-2-4
N-3-2-3
N-3-2-3
B-1-2-4
L-3-5-1
N-3-1-4
L-3-5-1
B-1-1
B-1-1
B-1-1
B-1-1
B-1-1
B-1-1
B-1-1
B-1-1
B-1-1
VENDOR PART NO
DA-60D-1
5
C113079
1
B121037
4
B121031
4
C-540S
1
J113017
2
C113012
2
C113072
1
D113050
5
D118039
2
C213028
50
C235010
1
C135033
2
C114083
1
C114084
1
C114087
1
D-009
1
D-016
1
F-007
1
C113075
2
D113042
2
TSR4 M5
1
DKW-050570S
2
PXD-34-B02A
1
2RK6GN-AM
1
E32-F7-200
3
CO-0507A
2
B221006
3
B-005
1
B-006
3
DX-10
1
PL-3
1
G2R-112S-V-NO-US
10
G5DN-22427
2
G2R-212S-V-ND-US
10
G2R-112S-V-ND-US
10
F121028
2
C114036
2
C114037
2
8C1049
2
C113077
3
AH164-SLO11E3
2
AH164-SLG11E3
2
AH164-TLR11E3
3
AH164-SFY11
3
AH165-2VLR11E3
1
B121015
2
B135003
2
C135004
1
C135014
1
C213034
1
D2MV-01L111
2
DPX-200
1
LOC
VENDOR
Q44
Q44
Q44
Q44
Q44
Q44
Q44
Q44
Q44
Q44
Q44
Q44
Q44
Q44
Q44
Q44
Q44
Q44
Q44
Q44
Q44
Q44
Q44
P11
P11
R14
Q44
Q44
Q45
Q45
Q45
Q45
R14
R14
R14
R14
Q44
Q45
Q44
Q44
Q44
Q44
Q44
Q44
Q44
Q44
Q44
Q44
Q44
Q44
Q44
Q44
Q44
"
"
"
"
"
"
"
"
"
"
"
TAKATORI
"
"
"
"
"
"
"
"
TAKATORI
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
No
Item no
5249
5250
5251
5252
5253
5254
5255
5256
5257
5258
5259
5260
5261
5262
5263
5264
5265
5275
5276
5277
5278
5279
5280
5281
5282
5283
5284
5285
5286
5287
5288
5289
5290
5291
5292
5293
5294
5295
5296
5297
5298
5299
5300
5316
5317
5318
5319
5320
5321
5322
5323
5324
5325
3928S-037
3928S-045
3928S-050
3928S-067
3928S-068
3928S-072
3928S-073
3928S-074
3928S-080
3928S-081
3928S-082
3928S-083
3928S-084
3928T-011
3928V-016
3928V-017
3928V-018
3930B-001
3930F-001
3930G-001
3930G-002
3930L-001
3930P-001
3930R-001
3930S-001
3930S-051
3930V-001
3933A-002
3933B-002
3933B-003
3933C-002
3933C-003
3933C-004
3933C-021
3933D-001
3933E-001
3933E-002
3933K-001
3933P-001
3933P-002
3933S-002
3933S-003
3933S-004
3940A-001
3940B-043
3940B-044
3940B-047
3940B-071
3940B-074
3940B-077
3940C-003
3940C-004
3940C-005
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
HMDS
HMDS
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
ELEMINATOR
FITR
FITR
FITR
FITR
FITR
FITR
FITR
F.I.T.R
F.I.T.R
F.I.T.R
F.I.T.R
F.I.T.R
F.I.T.R
F.I.T.R
F.I.T.R
F.I.T.R
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
DESCRIPTION
(Y)SAME P/N 3928S-01
PHOTO MICRO SWITCH
(Y)PULL SPRING
SET SCREW
SCREW
(Y)MIST SEPARATER
(Y)SIRENSOR
(Y)6" STOPPER
(Y)ROLLER SHAFT
(Y)GUIDE SHAFT
(Y)GUIDE SHAFT(A)
(Y)SHAFT
(Y)SHAFT
(Y)TRANSFORMER
SOLENOID VALVE
SOLENOID VALVE
SOLENOID V/V
(Y)5"PCB 140 OVERTEM
(Y)5"ASSY FUSE THERM
(Y)5"GASKET DOOR
(Y)5"GASKET VCR
(Y)5"LAMP 24VAC SWIT
(Y)5"POWER SUPPLY 24
(Y)5"RELAY SOLID STA
(Y)5"SWITCH 2 POLE L
(Y)5"SENSOR VACUUM
(Y)5"VALVE AIR OPERA
CROUZET AMPLIFER
(Y)STAGE Z ASSY CARD
STAGE X/Y ASSY CARD
CAMERA MODULE
DC SERVO CONTROL CAR
FPAS POWER CABLE
OPTICS DISTRIBUTION
RS232 MAXIM DRIVE
CAMERA MOTOR ENCODER
ELEVATOR MODULE
KEYCAT KEY BOARD
(Y)POWER SUPPLY UNIT
(Y)MERCURY LAMP POWE
(Y)WAFER SENSOR CARD
STAGE POWER TR X/Y/Z
ELEVATOR MICRO SW
(Y)AMPLIFIER
(Y)PCB
(Y)PCB
(Y)PCB
(Y)MAGNET BRAKE
(Y)ARM S2 BRAKE
(Y)BRAKE PACK
(Y)BCR CONTROLLER
(Y)BCR SOURCE
(Y)I/O CONTROLLER
LOCATION
N-3-1-4
N-3-2-3
N-3-1-4
B-1-1
N-3-1-4
B-1-1
B-1-2-4
B-1-1
L-3-5-1
B-1-1
B-1-1
B-1-1
B-1-1
L-11-2-3
B-1-1
B-1-1
B-1-1
D-1-2-2
K-5-6-1
K-3-1-3
K-5-6-1
K-3-1-3
K-3-1-3
K-5-6-1
N-8-1-4
N-8-2-3
N-8-2-3
N-8-2-3
C-4-3-3
L-10-4-2
E-1-2
I-7-1
C-3-2
G-2-4-1
N-8-2-3
C-4-3-3
N-8-1-4
B-2-5-2
D-1-1
D-1-1
D-1-1
D-1-1
K-11-5-1
K-11-5-1
B-4-5-2
B-4-5-2
B-4-5-2
VENDOR PART NO
AH164-SFY11.
EE-SPZ401Y-01
J113058
KS-0505S
KDS-0415S
AMF-2000-01B
AN-101-01
J114004
C213092
C114004
C114028
F121053
F120083
F617Y1
VZ312-5GSC-M5
VZ3120-5GSC-M5
1170-2282
3004005
3002090
3004011
3005189
3006061
3006075
3006010
3006012
3006064
3005053
PMA52800
L42074
L42073
L42106
Y5304300
Y7600011
Y5304310
L45150
L42441
PMM3000
L42363
L42545
L42548
PER7AXXD
L40845
PMA33100
E3C.JC4P
1SBC544A
1SBC221
3M2COA91526
1400092393800
SBR32-ZP
BCC2600
BCV5056
AF12246CA,KT63-0161
1
3
10
20
20
1
2
2
4
2
2
2
2
1
2
2
1
1
2
3
10
8
1
1
1
1
1
3
1
1
1
1
1
2
1
1
2
3
1
1
1
6
5
1
1
1
1
1
1
1
1
1
1
LOC
VENDOR
Q44
R14
Q44
Q44
Q44
Q44
Q45
Q44
Q44
Q44
Q44
Q44
Q44
Q46
Q44
Q44
Q44
T33
J43
J51
K36
J53
J43
J43
K36
K36
J43
Q13
Q15
Q16
Q14
Q15
Q14
Q15
T61
Q14
Q16
Q16
Q16
Q16
Q15
T61
Q13
R21
T44
T44
T44
T44
D33
D33
D33
D33
D33
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
GENESIS
"
TAKATORI
"
"
"
"
"
"
"
BIO-RAD
"
"
"
"
"
"
BIO-RAD
"
"
"
"
"
"
"
FA
FA
"
"
"
"
"
"
"
"
No
Item no
5326
5327
5328
5329
5330
5331
5332
5333
5334
5335
5336
5337
5338
5339
5340
5341
5342
5343
5344
5345
5346
5347
5348
5349
5350
5351
5352
5353
5354
5355
5356
5357
5358
5359
5360
5361
5362
5363
5364
5365
5366
5367
5368
5369
5370
5371
5372
5373
5374
5375
5376
5377
5378
3940C-041
3940C-042
3940C-043
3940C-044
3940C-045
3940C-071
3940C-081
3940C-091
3940C-101
3940C-102
3940C-103
3940C-104
3940C-105
3940D-001
3940D-052
3940E-001
3940F-010
3940F-031
3940F-032
3940F-033
3940F-034
3940F-035
3940F-036
3940F-071
3940F-071
3940F-073
3940F-081
3940F-082
3940F-084
3940F-085
3940F-086
3940I-002
3940L-001
3940M-001
3940M-001
3940M-024
3940P-002
3940P-003
3940P-004
3940P-005
3940R-001
3940R-002
3940R-003
3940R-006
3940R-007
3940R-008
3940R-009
3940R-010
3940R-011
3940R-031
3940R-061
3940S-001
3940S-002
INTER & INTRA

INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
DESCRIPTION
(Y)ELECTRO-MAGNETIC CONTACTOR
(Y)ELECTRO MAGNETIC CONTACTOR
(Y)SELCOS STATION
(Y)ARM HAND SIDE COVER R
IC CARD READ/WRIT
(Y)RS 232C CABLE 10M
(Y)RS 232C CABLE 5M
(Y)AGV TO STC RS232C 15M
(Y)ETHERNET AUI CABLE 10M
(Y)SCSI CABLE 3M
(Y)DISCONNECTION OF DETECTOR
(Y)FDD
(Y)REVOLVING ENCODER
(Y)FILTER
(Y)FUSE FOR SELIM
(Y)FUSE FOR SELIM
(Y)FUSE LINK
(Y)FUSE LINK
(Y)FUSE
(Y)BF FUSE (BF100)
AC AXIAL FLOW BLOWER
AC AXIAL FLOW BLOWER
(Y)BLOWER
(Y)FAN
(Y)FAN
(Y)POWER SOURCE COOLING FAN
(Y)PRINTED CIRCUIT COOLING FAN
(Y)PRINTED CIRCUIT COOLING FAN
(Y)INVERTER
(Y)NEON LAMP
(Y)LINEAR MOTOR
(Y)LINEAR MOTOR
(Y)ARM S1,S2,S3 MOTOR
(Y)DC POWER SUPPLY
(Y)DC POWER SUPPLY
(Y)DC POWER SUPPLY
(Y)SEQ.POWER SUPPLY
(Y)CONTACTLESS RELAY FOR STRAI
(Y)CONTACTLESS RELAY FOR CURVE
(Y)AUX.RELAY
(Y)AUX.RELAY
(Y)THERMAL RELAY
(Y)THERMAL RELAY
(Y)THERMAL RELAY
(Y)THERMAL RELAY
(Y)THERMAL RELAY
(Y)LINE RECEIVER
(Y)RECTIFIER
(Y)SPEED SENSOR
(Y)PROXIMITY DETECTOR FOR CUR
LOCATION
VENDOR PART NO
B-4-5-2
B-4-5-2
B-4-5-2
B-4-5-2
B-4-5-2
FC-10N
SC-4-1 COIL-AC100V
SC-03 COIL-AC100V
SC-0 COIL-AC100V
SC-03 COIL AC200V
L-2-4-2
K-10-2-1
1400095297501
MCCJ03
K-11-4-1
SPD-G
FD1137C-002
AER14928
ATMC-Z-E6-FD-02438-19
CR2LS-30S
F-7143 6A AC 250V
BLA003
BLA015
FHC-15N-5A
V CODE 726300400
5L-KS
5L-KS
FY-17CWT
MB10Z-D3
MU1225S-41
FBK-06A24H
1400092398300
K-11-4-1
K-11-4-1
D-1-1
K-11-4-1
K-11-4-1
D-1-1
K-11-4-1
K-11-5-3
K-11-5-3
H-8-1
K-11-5-3
K-11-4-1
K-11-4-1
K-11-5-1
J-2-2-2
K-11-6-3
K-11-6-3
D-1-1
B-2-5-1
B-2-5-2
B-2-5-1
K-11-5-1
K-10-1-4
K-10-1-4
K-10-1-4
K-10-1-4
K-10-1-4
K-10-1-4
K-10-1-4
K-10-1-4
K-10-1-4
K-10-1-4
K-10-1-4
K-10-2-1
K-11-6-2
FR-Z024-0.75K
LC-3022F-6A
LC-3022F-6A
1400092392500
S82H-3524
582K-0706
S82H-3024
A61P
SF20DMZ-H3
US-K20SSTELMHZ
MY4N-CR COIL-AC220V
LY2N-D2 COIL-DC24V
TK.ON 1.7A
TK-ON 0.95A
TK-ON 0.48A
G8B-4BND COIL DC24V
FKT-10
ORE-C7L
RBJ-12B-03
KH0239-01
E2E-X14MD1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
10
20
1
5
4
1
1
1
1
1
1
1
1
1
2
20
1
3
3
1
1
1
1
6
1
1
1
1
1
1
1
1
1
1
10
1
LOC
VENDOR
D33
D33
D33
D33
D33
D26
A103
D26
B73
B72
B73
B72
B73
D32
D32
D32
D25
D32
T44
D32
D32
T44
D32
Z11
D26
Y22
D26
W15
D32
D32
W15
D33,Y22
D33
D23
D23
T44
R21
R21
R21
D33
D33
D33
D33
D33
D33
D33
D33
D33
D33
D33
D33
D23
D32
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
FA
FA
FA
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
"
No
Item no
5379 3940S-005
5380 3940S-009
5381 3940S-010
5382 3940S-011
5383 3940S-013
5384 3940S-016
5385 3940S-042
5386 3940S-047
5387 3940S-050
5388 3940S-054
5389 3940S-082
5390 3940S-101
5391 3940T-021
5392 3940U-011
5393 3940V-001
5394 3940V-021
5395 3940W-001
5396 3941B-008
5397 3941B-022
5398 3941B-023
5399 3941C-003
5400 3941M-012
5401 3941S-013
5402 3944C-006
5403 3944S-006
5404 3945B-001
5405 3945D-002
5406 3945M-002
5407 3945M-003
5408 3945S-001
5409 3981A-001
5410 3981A-004
5411 3981A-005
5412 3981B-002
5413 3981B-006
5414 3981B-011
5415 3981B-059
5416 3981B-060
5417 3981B-061
5418 3981B-102
5419 3981B-103
5420 3981B-104
5421 3981B-105
5422 3981C-002
5423 3981C-004
5424 3981C-008
5425 3981C-010
5426 3981C-011
5427 3981C-012
5428 3981C-013
5429 3981C-014
5430 3981D-001
5431 3981D-004
INTER & INTRA

INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
INTER & INTRA
NANOSPEC
NANOSPEC
NANOSPEC
NANOSPEC
PROMETRIX
PROMETRIX
ELLIPSOMETER
ELLIPSOMETER
ELLIPSOMETER
ELLIPSOMETER
ELLIPSOMETER
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
DESCRIPTION
(Y)PHOTO I/O DEVICE
BEAM SENSOR
(Y)PHOTO I/O
(Y)PHOTO I/O
(Y)MAGNETIC GUIDE SENSOR
(Y)GREASE FOR HEIGHT CONTROL S
(Y)PUSH BUTTON SWITCH
(Y)PHOTO ELECTRIC SWITCH
(Y)PHOTO ELECTRIX SWITCH
(Y)EMERGENCY BUTTON
(Y)ARM S2 STARTING POINT LS
(Y)SUSPEN SPRING,RUBBER SPRING
(Y)1-PORT TRANSCEIVER
(Y)ULPA FILTER UNIT
(Y)VACUUM PUMP
(Y)RUBBER FOR VIBRAT
(Y)FLOATING WHEEL
(Y)ASS'Y CABLE PCAT
(Y)CENTER STAGE BOAR
(Y)REAR STAGE BOARD
(Y)COUNTER NON RESET
(Y)MOTOR Y-TROLLEY
(Y)ASS'Y SHUTTERSOLE
(Y)DESICCANT CARTRID
JIG ALIGN FLAT ALIGER SENSOR
(Y)5"X,Y DRIVER BOAR
(Y)5"DRIVER BD X,Z F
(Y)5"ANALYZER MOTOR
(Y)5"STEPPING MOTOR FAST STAGE
5"VACUUM SENSOR
(X) ASB LEVER CHEMICAL
(X) AMELLER
(X) ARTICLE
(X) ROTATIONAL LOCK BEARING
(X) ROLLER BEARING
(X) BEARING
(X) OIL PUMP BLADE
(X) BLADE HV
(X) BLADE HV
(X) SPACER BAR
(X) SIGHT GLASS BEZEL
(X) INT PLATE BUSH
(X) REAR PLATE BUSH 2008AC-12
(X) CIRCSI-SALTERFIX CODE
MAINTENANCE KIT
(X) CAST IRON CAM
(X) STEEL CAM 61606416
OIL CASE
(X) S. FLEXIBLE CONNECXION
(X) KE25 CLAMP
(X) RETINER DISK
(X) DISAPHRAGN
LOCATION
VENDOR PART NO
K-10-5-1
K-10-5-1
K-10-5-1
K-10-5-1
K-10-5-1
K-10-5-1
K-10-5-1
K-10-5-1
K-10-5-1
K-10-5-1
K-10-5-1
K-10-5-1
DM-HB1
1400092398100
DM-MB1
1400092398600
AVS-M-1
1.55/2
AOLS-22611DN-W
PJ7-T3
PJ7-T7
K-11-7-2
K-11-6-2
L-2-4-2
TYPE-I
VP0625
MN-10
1400095819700
8400-0897
8200-0360
8200-0363
9407-0012
9072-0117
7200-1805
28-0086
07-0049
E9A281
E90170
E9A170
E9A291
E9A400
52700
52721
054401
99-104-0045
A204-04-016
61605306
14-A204-02-098
A20402152
A20102091
231-92-160
A20416002
52651
52649
A224-26-004
L-10-7-2
N-1-2-2
L-3-5-1
L-3-5-1
N-8-2-3
N-8-2-3
A-3-5
B-4-4-1
N-8-2-3
M-6-4-1
M-6-4-1
E-1-4
M-3-3
1400092393700
E68 M-24706
14-A365-01-800
61606415
61606416
A52546
C105-14-285
231-05-108
14-A271-59-416
1
3
2
2
2
1
2
1
10
2
1
4
1
2
1
8
2
1
2
3
3
1
1
2
1
1
1
1
1
3
10
5
4
10
5
1
5
20
8
6
2
9
19
8
1
2
1
1
1
3
12
15
1
LOC
VENDOR
D32
D32
D32
D32
D32
D32
D32
D32
D32
D32
D32
D32
D32
D25
D31
A103
W15
Q14
V33
V33
Q14
P55
B16
Q43
Q43
Q15
Q15
Q13
P24
Q15
AA73
AA73
AA73
AA73
AA73
AA73
AA73
AA73
AA73
AA73
AA73
AA73
AA73
AA73
AA84
AA71
AA84
AA84
AA84
AA73
AA73
AA73
AA73
"
"
"
FA
"
"
"
"
"
"
"
"
"
"
"
FA
"
"
"
M-21
"
"
"
SM300
"
PLASMOS
"
"
PLASMOS
"
No
Item no
5432
5433
5434
5435
5436
5437
5438
5439
5440
5441
5442
5443
5444
5445
5446
5447
5448
5449
5450
5451
5452
5453
5454
5455
5456
5457
5458
5459
5460
5461
5462
5463
5464
5465
5466
5467
5468
5469
5470
5471
5472
5473
5474
5475
5476
5477
5478
5479
5480
5481
5482
5483
5484
3981D-005
3981D-007
3981D-008
3981D-009
3981F-003
3981F-004
3981F-006
3981F-008
3981F-009
3981F-012
3981G-001
3981G-002
3981G-002
3981G-006
3981G-007
3981G-008
3981G-009
3981G-010
3981G-012
3981G-013
3981G-014
3981G-015
3981G-017
3981G-018
3981G-019
3981G-020
3981G-021
3981G-022
3981G-023
3981G-025
3981G-026
3981G-027
3981G-028
3981G-029
3981G-030
3981G-031
3981G-033
3981G-034
3981G-035
3981G-037
3981G-038
3981G-054
3981G-055
3981G-057
3981G-058
3981G-059
3981G-104
3981G-104
3981G-106
3981G-107
3981G-109
3981H-001
3981H-002
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
DESCRIPTION
(X) DISTRIBUTOR WEIGHT
(X) VALVE DISK
(X) VACUUM SEALING DISK
(X) VALVE DISK
(X)FILTER ASS'Y (INLET)
(X)FELT BALLAST FILTER
(X)FLTER ELEMENT
(X)FILTER
(X)FILTER
(X)SPRING FILTER
(X) OIL GASING GASKET
(X) GASKET SET
(X) GASKET SET
(X) KNITMESH GASKET
(X) END PLATE GASKET
(X) DISTRIBUTOR GASKET
(X) FLAT GASKET
(X) FLAT GASKET
(X) GASKET
(X) GASKET
(X) GASKET
(X) GASKET
(X) BALLAST GASKET
(X) FLAT GASKET
(X) BODY GASKET
(X) LID GASKET
(X) FLAT GASKET
(X) BODY GASKET
(X) DISCHARGE GASKET
(X) RESERVOIR GASKET
(X) FLAT GASKET
(X) FLAT GASKET
(X) GASKET
(X) GASKET
(X) GASKET
(X) GASKET 23955172
(X) CASE GASKET
(X) CASE GASKET
(X) CASE GASKET
(X) CASE GASKET
(X) CASE GASKET
(X) SIGHT GLASS
(X) SHAFT GLASS
(X) SIGHT GLASS ASSY
(X) SIGHT GLASS
(X) SIGHT GLASS
(X) SIGHT GLASS
(X) SIGHT GLASS
(X) OIL LEVEL SIGHT GLASS
(X) SIGHT GLASS (LEBYOLD)
(X) PRESSURE GUAGE
(X) PISTON RING HOLDER
(X) PISTON RING HOUSING
LOCATION
J-4-3-2
M-3-3
J-4-3-2
J-4-3-2
J-4-3-2
J-4-3-2
J-4-3-2
J-4-3-2
J-4-3-2
J-4-3-2
J-4-3-2
J-4-3-2
J-4-3-2
J-4-3-2
J-4-3-2
J-4-3-2
J-4-3-2
J-4-3-2
J-4-3-2
J-4-3-2
J-4-3-2
J-4-3-2
VENDOR PART NO
A34301037
40050139
882-56-B1
40050137
A223-05-035
A223-05-41
140-A223-04-032
22302016
14-A223-02-006
22162142
52755
19371S
19371S
14-A271-59-627
14-A271-59-621
14-A271-39-413
239-55-165
23375135
61400534
23955174
61608409
61200640
A27159614
23925225
14-A271-59-423
14-A271-59-624
23973137
A27159428
A27159620
427-749-1
23820156
23925226
239-55-174
616-08-409
616-00-640
23955172
54128
23820158
23955420
72590000
72590001
22680139
226-80-140
2001003
29201004
A01601089
085-38-008
085-38-008
83546
LH720 00 115
H01900016
431-31-293
331-88-122
10
12
1
19
1
14
1
28
5
19
30
1
1
5
4
1
7
1
5
1
1
6
5
25
15
3
2
5
5
2
10
2
2
1
5
3
10
1
1
20
10
1
4
4
14
5
5
1
5
3
5
2
2
LOC
AA74
AA73
AA73
AA73
AA73
AA73
AA84
AA73
AA73
AA73
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
VENDOR
No
Item no
5485
5486
5487
5488
5489
5490
5491
5492
5493
5494
5495
5496
5497
5498
5499
5500
5501
5502
5503
5504
5505
5506
5507
5508
5509
5510
5511
5512
5513
5514
5515
5516
5517
5518
5519
5520
5521
5522
5523
5524
5525
5526
5527
5528
5529
5530
5531
5532
5533
5534
5535
5536
5537
3981I-001
3981J-002
3981K-001
3981K-002
3981L-002
3981L-004
3981L-005
3981L-007
3981L-008
3981M-004
3981M-005
3981M-007
3981M-011
3981M-108
3981O-001
3981O-002
3981O-002
3981O-020
3981O-021
3981O-023
3981O-024
3981O-032
3981O-033
3981O-035
3981O-039
3981O-044
3981O-057
3981O-059
3981O-060
3981O-062
3981O-072
3981O-074
3981O-075
3981O-077
3981O-082
3981O-086
3981O-090
3981O-092
3981O-096
3981O-100
3981O-103
3981O-105
3981O-110
3981O-119
3981P-003
3981P-008
3981P-008
3981P-009
3981P-009
3981P-009
3981P-010
3981P-011
3981P-012
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
DESCRIPTION
(X) STOP NUT
(X) OIL JET
(X) KEY
(X) KEY
(X) HV LADE
(X) OIL LEVEL EQUALIZATION
(X) LEVER
(X) EQUIPPED LEVER
(X) LEVER
MAJOR KIT
MINOR PARTS KIT
(X) MAJOR MAINTENANCE KIT
(X) MOTOR FOR 60AC VACUUM PUM
(X) O-RING VITON
(X) O-RING
(X) O-RING
(X) O-RING 1395-30
(X) O-RING
(X) O-RING
(X) O-RING
(X) O-RING
(X) O-RING
(X) O-RING
(X) O-RING
(X) O-RING
(X) O-RING 23963111
(X) O-RING
(X) O-RING
(X) O-RING
(X) O-RING
(X) O-RING
(X) O-RING
(X) O-RING
(X) O-RING
(X) O-RING
(X) O-RING
(X) O-RING H02125260
(X) O-RING H02120165
(X) O-RING
(X) O-RING C3.6-D29.3
(X) O-RING(LEYBOLD) VITON 122
(X) O-RING (LEYBOLD)
(X) O-RING KE25
(X) RETAINING PLATE
(X) VALVE PLATE
(X) VALVE PLATE
(X) VALVE PLATE
(X) VALVE PLATE
(X) VALVE PLATE
(X) VALVE PLATE
(X) VALVE PLATE
(X) VALVE PLATE
LOCATION
M-6-2-1
N-1-3-3
N-1-3-3
D-2-2-2
D-2-2-2
D-2-2-2
D-2-2-2
D-2-2-2
D-2-2-2
VENDOR PART NO
71161
53474
627-03-425
616-06-409
14-A204-02-091
627-03-411
28153102
52750
28153101
424-077-1
424-078-1
58550
99215133M
82033
82056
82056
H021-20-097
14-H021-20-033
14-H021-20-037
08-H021-20-067
08-H021-25-050
08-H021-25-055
H021-26-047
02120112
14-H021-20-011
23963111
H02130101
J-4-3-2
D-2-2-2
D-2-2-2
N-1-3-3
N-1-3-3
N-1-3-3
N-1-3-3
N-1-3-3
N-1-3-3
085-38-990
23970506
23970117
72591000
239-70-415
239-70-403
H02125260
H02120165
79030
82122
LH239 70 411
LH239 70 147
14-A223-08-004
40164114
40164114
40164125
40164125
40164125
40164124
40050135
40164116
22
2
1
2
5
2
2
35
9
1
1
3
2
1
15
2
10
57
15
15
12
9
5
8
16
8
1
30
5
15
10
23
20
14
2
7
4
25
15
25
29
90
8
11
1
19
15
10
30
20
16
12
2
LOC
AA73
AA73
AA74
AA73
AA73
AA74
AA73
AA73
AA73
AA84
AA84
AA73
AA73
BB34
AA75
AA73
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA74
AA73
AA75
AA75
AA75
AA75
AA73
AA73
AA73
AA75
AA75
AA75
AA75
AA75
AA73
AA73
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
VENDOR
No
Item no
5538
5539
5540
5541
5542
5543
5544
5545
5546
5547
5548
5549
5550
5551
5552
5553
5554
5555
5556
5557
5558
5559
5560
5561
5562
5563
5564
5565
5566
5567
5568
5569
5570
5571
5572
5573
5574
5575
5576
5577
5578
5579
5580
5581
5582
5583
5584
5585
5586
5587
5588
5589
5590
3981P-012
3981P-014
3981P-071
3981P-072
3981P-074
3981P-075
3981P-076
3981P-082
3981P-101
3981P-102
3981P-103
3981P-104
3981P-108
3981R-003
3981R-006
3981R-007
3981R-053
3981R-054
3981R-056
3981R-057
3981R-058
3981R-060
3981R-061
3981R-062
3981R-063
3981R-064
3981R-101
3981R-104
3981R-110
3981R-111
3981R-111
3981S-001
3981S-002
3981S-003
3981S-006
3981S-007
3981S-008
3981S-009
3981S-010
3981S-011
3981S-013
3981S-014
3981S-015
3981S-016
3981S-017
3981S-051
3981S-052
3981S-054
3981S-055
3981S-056
3981S-058
3981S-059
3981S-060
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
DESCRIPTION
(X) VALVE PLATE
(X) VALVE PLATE
(X) VALVE PIN
(X) PIN
(X) TAPERED DOWEL PIN
(X) TAPER PIN 14 212 19 2026
(X) PIN
LEYBOLD S60AC
(X) GAS BALLAST PISTON
(X) LOW PRESSURE POTR
(X) EXHAUST PORT
(X) PISTON
(X) PISTON
(X) EXHAUST VALVE RUBBER
(X) DISCHARGE VALVE RUBBER
(X) EXHAUST VALVE RUBBER (HV)
(X) COMPRESSION RING
(X) CENTERING RING
(X) SPLASH RING
(X) PISTON RING
(X) RETAINER RING
(X) RETAINER RING
(X) RING
(X) RETAINER RING
(X) SPACER RING
(X) SPACER RING
(X) SEAL RETAINER
(X) PISTON RING DIA
(X) HIGH PRESSURE ROTOR
(X) NW40/25 REDUCING PIECE S
(X) NW40/25 REDUCING PIECE S
(X) VALVE SPRING
(X) GAS BALLAST SPRING
(X) SPRING
(X) SPRING
(X) OIL PUMP SPRING
(X) SPRING
(X) EXHAUST VALVE SPRING
(X) SPRING
(X) ADJUSTMENT SPRING
(X) SPRING (VANES)
(X) SPRING
(X) VANE SPRING
(X) SPRING OIL FEED
(X) SHAFE SEAL (VITON)
(X) VALVE PLATE
(X) SHAFT SEAL
(X) RADIAL SHAFT SEAL
(X) FILTER SEAL
(X) DOWTY S4AL 1/8" BSP
(X) DOWTY SEAL 1" BSP
(X) DOWTY SEAL 11/4" BSP
LOCATION
N-1-3-3
N-1-3-3
N-1-3-3
N-1-3-3
N-1-3-3
H-1-3
N-1-3-3
N-1-3-3
N-1-3-3
N-1-3-3
N-1-3-3
N-1-3-3
N-1-3-3
N-1-3-3
N-1-3-3
N-1-3-3
N-1-3-3
N-1-3-3
N-1-3-3
N-1-3-3
N-1-3-3
N-1-3-3
N-1-3-3
N-1-3-3
N-1-3-3
N-3-2-4
N-3-2-4
J-4-3-2
J-4-3-2
D-2-2-2
N-4-2-3
VENDOR PART NO
40164116
A52422
52641
71040
241-30-107
14 212 19 2026
52583
10165
52644
52509
52752
32106104
32106131
A271-59-514
14-A271-59-505
A27159503
627-03-426
18322
231-52-110
231-79-259
231-04-145
23103104
23970156
23103111
231-921-60
231-521-10
14-A259-71-002
23179256
A52715
C105-16-449
C105-16-449
52541
52563
A27-02-012
A271-02-013
A271-02-024
A271-02-027
14-A271-02-033
22161236
614-00-750
085-39-480
22162141
53040
085-39-8
82063
54340
23953142
23953110
A014-03-030
H021-04-001
H021-04-008
H021-04-009
11
2
2
8
6
7
10
1
2
1
2
8
10
59
13
2
4
2
4
38
4
4
2
14
2
4
10
47
7
1
1
10
4
1
6
6
2
6
5
1
2
31
10
35
3
49
2
19
13
26
12
6
6
LOC
AA74
AA74
AA74
AA74
AA74
AA74
AA74
BB44
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA74
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA74
AA74
A75
A75
A75
A75
A75
A75
A75
A75
VENDOR
No
Item no
5591
5592
5593
5594
5595
5596
5597
5598
5599
5600
5601
5602
5603
5604
5605
5606
5607
5608
5609
5610
5611
5612
5613
5614
5615
5616
5617
5618
5619
5620
5621
5622
5623
5624
5625
5626
5627
5628
5629
5630
5631
5632
5633
5634
5635
5636
5637
5638
5639
5640
5641
5642
5643
3981S-061
3981S-067
3981S-068
3981S-069
3981S-071
3981S-073
3981S-077
3981S-078
3981S-082
3981S-084
3981S-085
3981S-086
3981S-087
3981S-087
3981S-088
3981S-090
3981S-091
3981S-093
3981S-094
3981S-095
3981S-096
3981S-096
3981S-096
3981S-097
3981S-098
3981S-098
3981S-099
3981S-102
3981S-103
3981S-110
3981S-111
3981S-112
3981S-113
3981S-151
3981S-153
3981S-154
3981S-155
3981S-156
3981S-157
3981S-158
3981S-162
3981S-163
3981S-164
3981S-165
3981S-166
3981S-167
3981S-168
3981S-177
3981S-183
3981S-184
3981S-185
3981S-186
3981S-187
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
DESCRIPTION
(X) DOWTY SEAL 2BA
(X) OIL SEAL
(X) OIL SEAL
(X) DUST SEAL
(X) SEAL
(X) SEALEND
(X) SEAL
(X) OIL SEAL
(X) DUST SEAL
(X) SPIRO SEAL DPSM
(X) SPIRO SEAL
(X) SEAL (LEVER)
(X) SHAFT SEAL
(X) SHAFT SEAL
(X) SEAL
(X) OIL SEAL (FRONT PLATE)
(X) OIL SEAL
(X) RADIAL SHAFT SEAL

(X) SPIRO SEAL-DPSM40527
(X) T.F.E. LIPSEAL-72X55X 10M
(X) DUAL SEAL 22302009
(X) DUAL SEAL 22302009
(X) OIL SEAL 14 H021 09 064
DUST SEAL 14 A22
(X) SHAFT SEAL
(X) SHAFT SEAL
(X) T.F.E LIP SEAL
(X) SPIRO SEAL
(X) OIL SEAL
(X) EXHAUST VLVE SPACER
(X) SHIM 0.2MM THICK
(X) SNIM
(X) SNIM
(X) SNIM
(X) SNIM
(X) SNIM
(X) ELASTIC SHIMPS
(X) SLEEVE DU
(X) VACUUM SEALING DISK DN50
(X) SHIM DIA
(X) SHIM DIA
(X) SHIM DIA
(X) SHIM SET
(X) VALVE STOP
(X) 1ST STAGE VANES
(X) 2ND STAGE VANES
(X) SEAL ASSM REPLACES
(X) ARBOR SHIM .62 THK
LOCATION
D-2-2-2
N-4-2-3
VENDOR PART NO
H021-04-012
14-H021-09-069
14-H021-09-070
22302005
14-H021-04-004
J-4-3-2
23811142
02109052
22302008
40527
H02109076
23973131
23953423
23953423
H02104022
085-39-187
085-37-861
J-4-3-2
J-4-3-2
J-4-3-2
23953420
H02109050
H02109050
H02109050
J-4-3-2
N-4-2-3
D-2-2-2
D-2-2-2
D-2-2-2
D-2-2-2
D-2-2-2
D-2-2-2
D-2-2-2
D-2-2-2
D-2-2-2
D-2-2-2
D-2-2-2
D-2-2-2
D-2-2-2
D-2-2-2
D-2-2-2
D-2-2-2
D-2-2-2
D-2-2-2
D-2-2-2
D-2-2-2
D-2-2-2
D-2-2-2
D-2-2-2
D-2-2-2
22302009
22302009
14 H021 09 064
14 A223 02 005
83645
79101
H02109054
02109048
H02109607
A278-04-004
14-A271-65-008
14-A271-65-010
14-A271-65-009
14-A271-65-011
14-A271-65-001
14-A271-65-002
20013080
27027105
16745
22105147
22105148
22105149
98-264-002
373658107
427-607-4
427-608-1
425-390-1
085-38-843
085-38-844
12
10
11
2
15
2
14
15
12
4
10
40
12
4
5
8
4
30
8
25
4
4
2
1
7
4
15
1
40
29
8
11
15
55
10
10
10
10
5
5
1
1
1
10
5
5
2
4
4
2
6
12
10
LOC
A75
A75
A75
A75
A75
A75
AA74
A75
A75
A75
A75
A75
A75
A75
AA74
AA75
AA74
AA75
AA75
AA75
AA74
AA75
AA75
AA75
AA75
AA75
AA75
AA84
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA75
VENDOR
No
Item no
5644 3981S-188
5645 3981S-189
5646 3981S-190
5647 3981S-191
5648 3981S-192
5649 3981S-192
5650 3981S-193
5651 3981S-194
5652 3981S-195
5653 3981S-196
5654 3981S-197
5655 3981S-198
5656 3981S-200
5657 3981T-001
5658 3981T-002
5659 3981T-003
5660 3981T-004
5661 3981T-005
5662 3981T-006
5663 3981V-002
5664 3981V-002
5665 3981V-005
5666 3981V-006
5667 3981V-009
5668 3981V-010
5669 3981V-011
5670 3981V-051
5671 3981V-054
5672 3981V-055
5673 3981V-057
5674 3981V-058
5675 3981V-059
5676 3981V-060
5677 3981V-061
5678 3981V-062
5679 3981W-001
5680 3981W-002
5681 3981W-003
5682 3981W-004
5683 3981W-005
5684 3981W-006
5685 3986F-001
5686 3986F-002
5687 3986F-003
5688 3986F-004
5689 3986F-005
5690 3986F-006
5691 3986F-009
5692 3986F-010
5693 3986F-011
5694 3986F-012
5695 3986F-014
5696 3986F-015
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
PUMP PART
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
DESCRIPTION
(X) CENTRIFUGAL S/W
(X) CENTRIFUGAL S/W
(X) CENTRIFUGAL S/W
SM-42 DIAPHRAGM
(X) SHIELD RETAINER
(X) SHAFT BUSHING SLEEVE
(X) DISC SPRING TYPE K6013
(X) SAPCER
(X) SHIM SET
(X) DIRT TRAP
(X) OIL LEVEL EQUALIZATION TU
(X) RUBBER TRIM
(X) AIR INLET TUBE
(X) AIR INLET TUBE
SLEEVE TOOL
(X) VALVE
(X) VALVE
(X) VALVE
(X) BALLAST VALVE
(X) EXHAUST VALVE
(X) GAS BALLAST VALVE
(X) VALVE
(X) LOW PRESSURE VANE
(X) VANE
(X) VANE
(X) HIGH PRESSURE VANE
(X) OIL PUMP VANE
(X) RETAINER WASHER
(X) SPRING WASHER
(X) PRELOAD WHVED WASHER
(X) WAVE WASHER
(X) BACK UP WASHER
(X) 3401 AUP WASHER
(Y)1/4 1/8 MALE CONECTORS
1/4 1/4 MALE CONECTORS
1/4 1/4 FEMALE CONECTOR
(Y)1/4 1/4 FEMALE CONECTOR
(Y)1/4 1/8 MALE ELBOW
1/4 1/4 MALE ELBOW
(Y)1/4 1/8 FEMALE ELBOW
(Y)3/8 1/8 FEMALE ELBOW
(Y)1/4 UNION ELBOW
(Y)3/8 UNION ELBOW
(Y)3/8 1/4 UNION
(Y)1/2 1/4 UNION ELBOW
LOCATION
D-2-2-2
D-2-2-2
D-2-2-2
D-2-2-2
J-4-3-2, D-2-2-2
J-4-3-2, D-2-2-2
D-2-2-2
D-2-2-2
D-2-2-2
D-2-2-2
D-2-2-2
E-1-4
VENDOR PART NO
085-38-845
085-38-846
085-38-847
085-38-831
50036128
50036128
50036147
16406 (WS)
627314841
62733509
218985237
70100196
98264002
410-70-116
627-02-412
189-27-112
43131177
43131174
70100259
52655
52655
350-20-158
A259-04-601
52557
52562
53443
83945
41155116
41155154
53106
A83945
87941
87996
54451
83106
221-49-207
221-82-211
218984728
085-37-653
H02109049
H02109051
C4-2GN-1
C4-4GN-1
FC4-2GN-1
FC4-4GN-1
E4-2GN-1
E4-4GN-1
FE4-2GN-1
FE6-4GN-1
UE4GN-1
UE6GN-1
UE6-4GN-1
UE8-4GN-1
10
10
10
10
7
1
5
1
1
1
30
4
10
2
4
1
5
5
1
20
13
8
2
10
20
20
16
6
18
58
2
13
12
8
10
10
8
28
8
7
8
15
10
9
15
25
4
15
15
5
7
10
10
LOC
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA84
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA71
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA75
AA75
O71
O71
O71
O71
O71
O71
O71
O71
O71
O72
O72
O72
VENDOR
No
Item no
5697
5698
5699
5700
5701
5702
5703
5704
5705
5706
5707
5708
5709
5710
5711
5712
5713
5714
5715
5716
5717
5718
5719
5720
5721
5722
5723
5724
5725
5726
5727
5728
5729
5730
5731
5732
5733
5734
5735
5736
5737
5738
5739
5740
5741
5742
5743
5744
5745
5746
5747
5748
5749
3986F-016
3986F-020
3986F-021
3986F-022
3986F-025
3986F-026
3986F-027
3986F-028
3986F-029
3986F-030
3986F-031
3986F-034
3986F-035
3986F-037
3986S-001
3989B-001
3989B-003
3989B-021
3989C-002
3989C-003
3989C-021
3989F-001
3989F-003
3989F-004
3989F-004
3989F-005
3989G-003
3989G-004
3989G-006
3989G-007
3989G-010
3989G-011
3989G-012
3989G-013
3989P-004
3989S-002
3989S-021
3989S-022
3989S-061
3989V-001
3989V-004
3989V-005
3989V-006
3989V-007
3989V-009
3989V-010
3989V-011
3989V-020
3989V-021
3993B-011
3993D-012
3993I-004
3993L-001
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
WET STATION
GAS CABINET
GAS CABINET
GAS CABINET
GAS CABINET
GAS CABINET
GAS CABINET
GAS CABINET
GAS CABINET
GAS CABINET
GAS CABINET
GAS CABINET
GAS CABINET
GAS CABINET
GAS CABINET
GAS CABINET
GAS CABINET
GAS CABINET
GAS CABINET
GAS CABINET
GAS CABINET
GAS CABINET
GAS CABINET
GAS CABINET
GAS CABINET
GAS CABINET
GAS CABINET
GAS CABINET
GAS CABINET
GAS CABINET
GAS CABINET
GAS CABINET
GAS CABINET
GAS CABINET
GAS CABINET
FURNACE
FURNACE
FURNACE
FURNACE
DESCRIPTION
1/2 3/8 UNION ELBOW
(Y)3/4 STRAIGHT UNION
3/8 1/4 STRAIGHTUNION
1/2 3/8 STRAIGHT UNION
(Y)1/4 X UNION TEE
(Y)3/8 UNION TEE
(Y)1/2 UNION TEE
(Y)1/2 1/2 3/8 BRANCH TEE
(Y)1/4 NUT
(Y)1/2 MANUAL D VALVE
(Y)3/8 (N/C) PNEUMAT VALVE
(Y)1/2 ORIFICE CHUCK VALVE
(Y)CYLINDER SENSOR
(Y)5"CKT BOARD
(Y)5"CKT BOARD
(Y)5"JCT BOX
(Y)5"CNTLR GSM-5
(Y)5"CNTLR GSM-5
(Y)5"CORDSET
(Y)5"FILTER MOD 4VI
(Y)5"FILTER
(Y)5"FILTER
(Y)5"FILTER
(X)FILTER ACID SCRUBBER
(Y)5"GAUGE GRP
(Y)5"GAUGE GRP
(Y)5"GAUGE GRP
(Y)5"GAUGE GRP
(Y)5"GAUGE GRP PRESS
(Y)5"GAUGE GRP PRESS
(Y)5"GAUGE GRP
(Y)5"GAUGE GRP
(Y)5"PIGTAIL MANIFOL
(Y)5"MNTR SCALE
(Y)FLOW SENSOR
(Y)5"FLOW SENSOR
(Y)5"FLOW SENSOR
(Y)5"VALVE BALL
(Y)5"VALVE MOD
(Y)5"RLF VALVE GRP
(Y)5"CHK VALVE
(Y)5"CHK VALVE
(Y)5"CHK VALVE
(Y)5"CHK VALVE
(Y)5"CHK VALVE
(Y)5"VALVE MOD
(Y)5"SOLENOID VALVE
BAFFLE SHELL
DUST COVER(L.H)
(B)POLY ON INJECTOR
LINER(FCC)
LOCATION
VENDOR PART NO
UE8-6GN-1
SU12GN-1
SU6-4GN-1
SU8-4GN-1
UT4GN-1
UT6GN-1
UT8GN-1
BT8-6GN-1
BT8-8GN-1
RT8-8GN-1
GN4-1
201-47
202-71
206-0855
M-6-2-1
CS3B
B-1-3-4
0085-0021
B-1-3-4
0085-0042
D-13-4
0088-0010
L-10-1
0081-0243
J-3-3
0081-0277
L-10-7-3
0603-0009
L-10-7-3
0403-0001
L-10-7-3
SHF-V4
C-4-4-1, L-10-7-3 SLF-HV4-EP
C-4-4-1, L-10-7-3 SLF-HV4-EP
L-10-7-3
710235
C-4-4-1
1015-0053
C-4-4-1
1015-0054
L-10-7-3
1015-0032
C-4-4-1
1015-0033
C-4-4-1
1015-0051
C-4-4-1
1015-0052
L-10-7-3
1015-0029
C-4-4-1
1015-0030
C-3-1
CGA J1S
0081-0094
G-2-4-1
1030-0035
G-2-4-1
1030-0036
G-2-4-1
1030-0033
C-4-4-1
0401-0120
0032-0411
N-3-1-4
1011-0001
L-10-7-3
0401-0073
L-10-7-3
0401-0072
N-1-3-2
0401-0074
N-1-3-2
0401-0013
L-10-7-3
0032-0548
L-10-7-3
0032-0361
L-10-7-3
0701-0012
K-9-6-1
HSDF-3020
K-9-6-1
HSDF-2119
HSDF-3076
HSDF-3008
10
7
5
8
5
4
10
20
20
20
9
5
7
5
4
1
1
1
2
1
1
1
2
1
1
6
1
1
1
2
1
1
1
2
2
1
2
1
2
2
1
3
1
2
1
2
1
2
4
1
2
10
1
LOC
VENDOR
O72
O72
O72
O74
O74
O74
O73
O73
O73
O73
O73
O73
O73
O74
O74
T12
T12
Q41
Q63
Q64
Q11
Q11
Q11
Q11
Q22
Q11
Q22
Q22
Q11
Q22
Q22
Q22
Q11
Q22
Q61
Q62
R62
R62
R62
Q22
Q22
Q44
Q11
Q11
B16
B16
Q11
Q11
Q11
H14
H14
Y11
Y11
BTU
"
"
KOKUSAI
No
Item no
5750
5751
5752
5753
5754
5755
5756
5757
5758
5759
5760
5761
5762
5763
5764
5765
5766
5767
5768
5769
5770
5771
5772
5773
5774
5775
5776
5777
5778
5779
5780
5781
5782
5783
5784
5785
5786
5787
5788
5789
5790
5791
5792
5793
5794
5795
5796
5797
5798
5799
5800
5801
5802
3993S-025
3993S-061
3993T-002
3993T-005
3993T-019
3994E-002
3994T-020
3995E-102
3996A-901
3996A-902
3996A-907
3996B-001
3996B-002
3996B-006
3996B-008
3996B-013
3996B-015
3996B-022
3996B-025
3996B-027
3996B-031
3996B-032
3996B-034
3996B-037
3996B-038
3996B-039
3996B-041
3996B-042
3996B-044
3996B-044
3996B-050
3996B-051
3996B-052
3996B-053
3996B-057
3996B-058
3996B-065
3996B-066
3996B-067
3996B-068
3996B-069
3996B-070
3996B-071
3996B-075
3996B-076
3996B-081
3996B-083
3996B-101
3996B-181
3996B-193
3996B-194
3996B-195
3996B-199
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
FURNACE
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
DESCRIPTION
SENSOR(KOYO)
SHUTTER(KOYO)
PROCESS TUBE(KOYO)
PROCESS TUBE(PYRO-R)
(B)INNER TUBE
Q'TZ ELBOW TORCH(B)
TUBE(HI-TEMP)
GAS EXHAUST(R.H:PYRO)
(Y)COATING SPRAY, 16
RTV COATING (3 FL OZ
PERMABOND (1 OZ)
BEARING
BEARING
(Y)BEARING
(Y)BEARING
(Y)BEARING
(Y)BEARING
(Y)BEARING
(Y)BEARING
BEARING
(Y)BEARING
(Y)BEARING
(Y)BEARING
(Y)BEARING
BEARING
(Y)BEARING
BEARING
BEARING
(Y)BEARING
(Y)BEARING
(Y)BEARING
(Y)BEARING
(Y)BEARING
(Y)BEARING
(Y)BEARING
(Y)BEARING
(Y)BEARING
(Y)BEARING
(Y)BEARING
(Y)BEARING
(Y)BEARING
(Y)BEARING
(Y)BEARING
BEARING
(Y)BEARING
(Y)BEARING
(Y)BEARING
(Y)BEARING
TIMING BELT
TIMING BELT
TIMING BELT
TIMING BELT
TIMING BELT
LOCATION
N-1-1-2
I-1-2
VENDOR PART NO
HSDF-3044
HSDF-3043
HSDF-3047
HSDF-3055
HSDF-3031
I-1-3
I-1-3
I-5-1
N-2-4-4
N-2-4-4
N-3-2-1
N-3-2-1
N-3-2-1
N-3-2-1
N-1-2-1
N-3-2-1
N-2-5-3
N-3-2-1
N-3-2-1
N-1-2-1
N-3-2-1
M-6-4-1
M-6-4-1
M-6-4-1
M-6-4-1
N-2-5-3, N-3-2-1
N-2-5-3, N-3-2-1
N-2-5-3, N-3-2-1
N-2-4-4
N-2-4-4
N-1-2-1
N-3-1-1
N-1-2-1
N-1-2-1
N-2-5-3
N-3-2-1
N-3-2-1
N-1-2-1
N-2-5-3
N-1-2-1
L-9-2
N-3-1-1
L-6-4-3
N-3-2-1
N-3-2-1
HSDR-2002
HSDF-4038
1-2577
3140 RTV
910 ADHESIVE
SFR-188
SR-166
B2-14
JJ-6
SA-4
SSRF-1560ZZ
LR-6
R12H401
SSR-2ZZ
SSR-2280HH
6007 ZZ/2AUI
6301Z
72028
7203DB
689ZZ(1790ZZ)
A4812
A61014
A81420SS
A81420SS
SUPER-6
SUPER-8
SUPER-24
SUPER 16
R-12-ZZ
R-20-ZZ
B-47
B-59
B-85
GB-47
HJ122016
J-812
RA008RR+COL
TRB411
NTA411
KAA10AGO
KAA15XLO
MF85ZZS(F850ZZ)
6B3-055037
6B6-081025
6B6-100025
6B6-214025
6B6-392025
3
1
4
1
1
1
1
2
5
1
2
93
30
19
1
2
6
6
1
34
16
5
2
4
10
10
9
21
6
5
1
6
15
4
5
14
6
4
4
2
30
16
10
200
20
5
1
10
2
4
5
3
1
LOC
VENDOR
H14
H14
Y11
Y11
Y11
H15
Y11
H15
O57
N43
N43
N12
N12
N12
N12
N12
N12
N12
N13
N12
N12
N12
N12
N13
N12
N12
N13
N12
N12
N12
N43
N13
N11
N11
N12
N11
N12
N13
N12
N12
N11
N11
N11
N11
N11
N12
N12
N12
N21
N21
N21
N21
N21
"
"
"
KOKUSAI
"
THERMCO
"
TEL
No
Item no
5803
5804
5805
5806
5807
5808
5809
5810
5811
5812
5813
5814
5815
5816
5817
5818
5819
5820
5821
5822
5823
5824
5825
5826
5827
5828
5829
5830
5831
5832
5833
5834
5835
5836
5837
5838
5839
5840
5841
5842
5843
5844
5845
5846
5847
5848
5849
5850
5851
5852
5853
5854
5855
3996B-203
3996B-204
3996B-206
3996B-208
3996B-209
3996B-210
3996B-213
3996B-214
3996B-215
3996B-216
3996B-217
3996B-218
3996B-219
3996B-220
3996B-226
3996B-230
3996B-233
3996B-236
3996B-236
3996B-240
3996B-243
3996B-246
3996B-248
3996B-253
3996B-282
3996B-286
3996B-287
3996B-288
3996B-502
3996C-130
3996C-133
3996C-135
3996C-137
3996C-137
3996C-139
3996C-139
3996C-140
3996C-141
3996C-145
3996C-147
3996C-148
3996C-149
3996C-150
3996C-151
3996C-152
3996C-152
3996C-154
3996C-155
3996C-156
3996C-157
3996C-160
3996C-161
3996C-162
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
DESCRIPTION
TIMING BELT
(Y)TIMING BELT
TIMING BELT
TIMING BELT
TIMING BELT
TIMING BELT
TIMING BELT
TIMING BELT
TIMING BELT
TIMING BELT
TIMING BELT
TIMING BELT
TIMING BELT
(Y)TIMING BELT
TIMING BELT
TIMING BELT
TIMING BELT
(Y)TIMING BELT
(Y)TIMING BELT
TIMING BELT
TIMING BELT
TIMING BELT
TIMING BELT
TIMING BELT
TIMING BELT
TIMING BELT
TIMING BELT
TIMING BELT
BELLOWS
(Y)CYLINDER
(Y)CYLINDER
(Y)CYLINDER
(Y)CYLINDER
(Y)CYLINDER
(Y)CYLINDER
(Y)CYLINDER
(Y)CYLINDER
(Y)CYLINDER
(Y)CYLINDER
(Y)CYLINDER
(Y)CYLINDER
(Y)CYLINDER
(Y)CYLINDER
(Y)CYLINDER
(Y)CYLINDER
(Y)CYLINDER
(Y)CYLINDER
(Y)CYLINDER
(Y)CYLINDER
(Y)CYLINDER
(Y)CYLINDER
(Y)CYLINDER
(Y)CYLINDER
LOCATION
VENDOR PART NO
6B16-095025
6B16-102025
6B16-105037
6B16-145037
6B16-150037
6B16-165037
6B16-190037
6B16-205037
6B16-235025
6B16-270037
6B16-300037
6B16-315037
6B16-360025
6G3-083025
6G6-340031
6G16-085025
6G16-260025
6G16-300025
6G16-300025
6R3-043025
6R3-095037
6R4-040050
6R6-1150310
6Z16-155037
80XL037
120XL037U
130XL037
140XL037
100001687
N-3-1-1
021-D
N-3-1-1
021-DXP
N-3-2-1, L-11-1-4 021-NR
N-3-2-1
021.5-DXDE
021.5-DXDE
N-3-2-1
022-D-V
N-3-2-1
022-D-V
N-3-2-1
024-D
N-3-1-1
040.5-DP
N-3-1-1, N-3-2-1 092-DP
N-3-1-1
D-16097-A-2
D-19556-A
N-3-1-3
D-20310-A-11
N-3-1-1
D-21839-A-2.5
N-3-1-1
D-21839-A-2.75
N-3-2-1
D-27722-A-3
N-3-2-1
D-27722-A-3
N-3-1-1
FCPI
N-3-1-1
FO-04-0.5
C-3-3
FO-311-4RMT
N-3-1-1
FOR-17-0.75-4R-M
N-3-1-1
MRS-023-DXDEZ
N-3-1-1
MRS-041-D
N-3-1-1
MRS-042-DXDEZ
24
3
3
9
9
1
10
6
2
2
7
8
5
5
2
9
5
14
13
7
5
5
3
1
19
1
1
1
8
6
2
5
1
1
1
4
8
4
4
2
2
5
2
8
1
1
6
5
5
1
1
2
7
LOC
N21
N21
N21
N21
N21
N21
N21
N21
N21
N21
N21
N21
N21
N21
N21
N21
N21
N21
N21
N21
N21
N21
N21
N21
N21
N21
N21
N21
N13
N12,O65
N12
N12,O65
N12
N12
N12
N12
N12
N12,O65
N12,O65
N12
N12
N12
O65
N12,O65
N12
N12
N12
N12
N12
N12
N12
N12
N12
VENDOR
No
Item no
5856
5857
5858
5859
5860
5861
5862
5863
5864
5865
5866
5867
5868
5869
5870
5871
5872
5873
5874
5875
5876
5877
5878
5879
5880
5881
5882
5883
5884
5885
5886
5887
5888
5889
5890
5891
5892
5893
5894
5895
5896
5897
5898
5899
5900
5901
5902
5903
5904
5905
5906
5907
3996C-163
3996C-164
3996C-172
3996C-174
3996C-179
3996C-181
3996C-183
3996C-187
3996C-189
3996C-192
3996C-195
3996C-196
3996C-806
3996C-808
3996C-816
3996C-828
3996C-832
3996C-837
3996C-838
3996C-843
3996C-843
3996C-847
3996C-853
3996C-858
3996C-868
3996C-872
3996C-878
3996C-883
3996C-892
3996C-893
3996C-894
3996C-899
3996F-006
3996F-007
3996F-009
3996F-010
3996F-015
3996F-016
3996F-018
3996F-022
3996F-050
3996F-056
3996F-059
3996F-069
3996F-071
3996F-078
3996F-090
3996F-097
3996F-098
3996F-101
3996F-103
3996F-103
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
DESCRIPTION
(Y)CYLINDER
(Y)CYLINDER
(Y)CYLINDER
(Y)CYLINDER
(Y)CYLINDER
CYLINDER
(Y)CYLINDER
(Y)CYLINDER
CYLINDER
CYLINDER
CYLINDER
CYLINDER
(Y)PROGRAM CONTROLLER
PROGRAM CONTROLLER
PROGRAM CONTROLLER
PROGRAM CONTROLLER
PROGRAM CONTROLLER
PROGRAM CONTROLLER
CHEMICAL FILTER
DI FILTER
CHEMICAL FILTER(3EA/
(X)FILTER (3EA/PK)
AT-FLUOROGARD II10"(
CHEMICAL FILTER
(R2)CHEMICAL FILTER
N2 FILTER(10EA/PK)
(Y)GAS FILTER
CHEMICAL FILTER
CHEMICAL FILTER
(F2)CHEMICAL FILTER
WAFERGARD FILTER (2E
WAFERGARD FILTER (2E
LOCATION
B-2-3, N-3-1-1
N-3-1-1
N-3-1-1, L-11-1-4
N-3-1-1
N-3-2-1, L-11-1-4
N-5-6
B-2-3, B-1-5-1
N-2-4-4, L-11-1-4
N-3-1-1
N-3-1-1
N-3-1-2
N-3-1-3
B-2-3
B-2-3
B-2-1
M-6-3-2
B-2-3
B-2-3
B-2-2
B-2-4
B-2-2
B-2-2
B-2-2
B-2-2
B-2-2
B-2-3
B-2-3
B-2-4
B-2-3
J-6-2, H-9-1
H-9-1, H-9-2
H-10-2
H-9-1
E-3-1
H-9-1
H-9-1
H-9-1, H-9-2
H-9-1
H-9-1
H-9-1
H-9-1
H-9-1
H-9-1
H-9-2
H-9-1
H-9-2
H-9-1, H-9-2
H-9-1, H-9-2
VENDOR PART NO
MRS-041-DXPZ
MRS-092-DXPZ
BFH118X212
BHH34X1
Q86-1031-D RE5/9
FPS-386B
D-721-XDR
CN-5348
C5X
203-008
203-067
203-074
3G2A3-ID411
3G2A3-OC221
3G2S6-CPU11
C120-CPU78
C20-CPU12
C200H-BCO81-V1
C200H-OC222
C2OOH-ID215
C2OOH-ID215
C2OOH-OD213
C500-ASC04
C500-LK203
C500-OC224
C500-PR023
C500-RM201
C500-OD211
E5C2-R40K(100/11
E5C2-R40K(200/22
E5C3-WR20P(100/110)
E5C2-R20P(100/11
CVDI 02T PE
CVVI 01T PE
CWFG 004 03
CWFG OS1 S3
CTFA 01T PE
WDFG 40P SF
WDFG 40W 0A
WGFG 01D S0
WGFG 06W R1
WGFG 40D 01
WGFV 16D 01
WGFV 80P 01
WGGB 06S 02
WGGB 06S 02
2
2
6
6
13
40
2
7
3
2
4
5
1
1
1
3
1
1
1
1
1
4
1
2
3
1
1
3
3
2
1
1
5
12
1
1
3
4
1
1
2
4
19
1
2
1
9
4
5
1
11
16
LOC
N12
N12
N12,O65
N12
N12,O65
O55
O43
N43
N12
N12
N12
N12
R13
R13
R12
O57
R12
R11
R13
R14
R14
R13
R13
R12
R12
R12
R12
R14
R13
R12
R12
R12
O12
F36,O44
N32
N31
O33
O43
O22
O13
O24,Q32
O12,O65
N33
N32
O12,O11
N32
O34
N31
O32
O43
N31
N31
VENDOR
No
Item no
5908
5909
5910
5911
5912
5913
5914
5915
5916
5917
5918
5919
5920
5921
5922
5923
5924
5925
5926
5927
5928
5929
5930
5931
5932
5933
5934
5935
5936
5937
5938
5939
5940
5941
5942
5943
5944
5945
5946
5947
5948
5949
5950
5951
5952
5953
5954
5955
5956
5957
5958
5959
5960
3996F-106
3996F-122
3996F-125
3996F-203
3996F-237
3996F-300
3996F-301
3996F-302
3996F-304
3996F-311
3996F-321
3996F-321
3996F-368
3996F-374
3996F-391
3996F-394
3996F-401
3996F-435
3996F-441
3996F-451
3996F-452
3996F-458
3996F-461
3996F-465
3996F-470
3996F-471
3996F-610
3996F-865
3996F-884
3996F-889
3996F-911
3996F-925
3996G-816
3996I-004
3996I-013
3996I-041
3996I-150
3996L-039
3996M-001
3996M-002
3996M-002
3996M-003
3996M-004
3996M-005
3996M-006
3996M-006
3996M-008
3996M-009
3996M-010
3996M-011
3996M-013
3996M-013
3996M-015
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
DESCRIPTION
(Y)WAFER GARD FILTER
DI FILTER
(F4)GAS FILTER
CHEMICAL FILTER
FILTER POLY PRO 20
FILTER SST GAUGE
POLYPRO FILTER 90
(Y)FILTER
(Y)ILTER ELEMENT T-T
(Y)ILTER ELEMENT T-T
(Y)DEIONIZER FILTER
DI CTRG FILTER
CTRG FILTER
(Y)CTRG FILTER
(Y)FITTING
(Y)FITTING
CONNECTOR
FITTING
(X)REDUCING UNION
UNION TEE
REDUCING UNION
FITTING
(Y)CONNECTOR
(Y)TEE INLET
(Y)FUSE
(Y)FUSE
FUSE
(Y)FUSE
(Y)FUSE
CONVECTRON GAUGE
IC
I.C
(Y)I.C
IC
LAMP DEUTER1UM
`OTOR(19.1VDC,187:1)
MOTOR(19.1VDC,187:1)
MOTOR(19.1VDC,187:1)
(Y)MOTOR(12VDC,60.5:
(Y)MOTOR(19.1VDC,187:1)
(Y)MOTOR(19.1VDC,19.
(Y)MOTOR(24VDC)
(Y)MOTOR(12VDC)
(Y)MOTOR(24VDC,5.9:1)
MOTOR(12VDC,19.7:1)
LOCATION
M-7-4-1
N-2-5-3
N-3-3-1
H-10-1
M-7-4-1
K-9-1
F-1-2
A-1-5, A-2-2
G-2-4-1
N-3-1-1
N-3-1-1
H-9-1
K-10-3-4, H-9-1
H-4-2
N-3-1-1, N-3-2-1
N-3-1-1
N-3-1-1
G-2-4-1
N-2-5-3
N-3-1-1
N-3-1-3
G-2-4-1
N-3-1-1
N-3-3-3
N-3-3-3
J-4-3-2
J-4-3-2
J-4-3-2
J-4-3-2
J-4-3-2
N-2-4-4
J-4-3-2
D-1-4-2
D-1-4-2
D-1-4-2
D-1-4-2
VENDOR PART NO
WGGB 12S 02
AB3NI8EH4
DMNK2230FRVMM6/8
DS03B-N
400945
300915
400955
B-8TF2
SS-4F-K4-2
SS-4F-K4-2
D0832
D8951
AP205
AP210-1
304-4-XOA
SS-600-6-1
SS-2-UT-1-2
SS-6-UT-6
SS-6-UT-6-4
SS-8-UT-3
SS-8-UT-6-4
SS-8-UT-A-10
SS-16-UT-A-20
SS-4-VCR-22
AGC-30
FNM-10
FNQ-2
MDA-15
MDL-3/10
275281
AD 521 KD
AD 558 JN
ADADC 8012
MC 3487 P
L2196
GM 8712E826
GM 8712-41
GM 8712E826
GM 8712D784
GM 8712D784
GM 8714D610
GM 8714F700
GM 8714F700
GM 9413E145
GM 9413-2
GM 9413-3
GM 9413-3
GM 9413C292
GM 9413C292
GM 9513B775
1
1
1
6
1
247
76
310
2
1
4
3
2
16
3
6
1
3
1
2
3
18
2
2
60
5
1
3
1
8
2
5
5
9
30
8
8
4
11
4
2
1
13
2
2
6
6
12
7
3
5
6
LOC
N32
N13
O22
N51
N11
N32
O12
N51
N51
R62
N12
N12
O13
O23
O34
N31
N12
N12
N12
R62
N13
N12
N11
R62
N12
R61
R61
T14
T14
T14
T14
T14
N43
T14
T14
T14
T14
O45
S14
S14
S14
S14
S14
S12
S14
S14
S14
S14
S12
S14
S14
S14
S14
VENDOR
No
Item no
5961
5962
5963
5964
5965
5966
5967
5968
5969
5970
5971
5972
5973
5974
5975
5976
5977
5978
5979
5980
5981
5982
5983
5984
5985
5986
5987
5988
5989
5990
5991
5992
5993
5994
5995
5996
5997
5998
5999
6000
6001
6002
6003
6004
6005
6006
6007
6008
6009
6010
6011
6012
6013
3996M-015
3996M-016
3996M-016
3996M-017
3996M-018
3996M-020
3996M-021
3996M-022
3996M-023
3996M-029
3996M-035
3996M-041
3996M-043
3996M-044
3996M-045
3996M-046
3996M-047
3996M-048
3996M-048
3996M-192
3996O-021
3996O-022
3996O-303
3996O-306
3996O-307
3996O-308
3996O-309
3996O-310
3996O-311
3996O-313
3996O-314
3996O-315
3996O-316
3996O-317
3996O-318
3996O-319
3996O-321
3996O-325
3996O-326
3996O-327
3996O-328
3996O-329
3996O-330
3996O-331
3996O-332
3996O-333
3996O-334
3996O-339
3996O-709
3996O-712
3996O-714
3996O-716
3996O-901
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
DESCRIPTION
MOTOR(12VDC,19.7:1)
MOTOR(6VDC,5.9:1)
MOTOR(6VDC,5.9:1)
MOTOR(24VDC,19.7:1)
(Y)MOTOR(30.3VDC,38.
MOTOR(24VDC,218.4:1)
MOTOR
MOTOR(24VDC,60.5:1,2
MOTOR(19.1VDC,512 CP
MOTOR(19.1VDC,19.5:1
MOTOR(24VDC,19.5:1,5
MOTOR(24VDC,96:1,512
MOTOR(24VDC,60.5:1)
MOTOR(24VDC,31:1,512CPR)
MOTOR
MOTOR
(C)O-RING,VITON(3997O-073)
(C)O-RING,VITON(3997O-076)
(F2)O-RING,SILICON
(C)O-RING,SILICON(39
(F2)O-RING,SILICON
(F2)O-RING,SILICON (
(F2)O-RING,SILICON
(F2)O-RING,SILICON
(F2)O-RING,SILICON
(F2)O-RING,SILICON
(F2)O-RING,SILICON
(F2)O-RING,SILICON
(F2)O-RING,SILICON
(F3)O-RING,SILICON
(F2)O-RING,SILICON
O-RING,SILICON
O-RING,SILICON
O-RING,SILICON
O-RING,SILICON
O-RING,SILICON
O-RING,SILICON
(Y)O-RING,SILICON
(F2)SILICON O-RING
(R2)GASKET Q'TZ,FRON
(R2)TRAP GASKET,SILI
(F4)SILICON GASKET
GASKET O-RING
SAM OIL
LOCATION
D-2-4-2
D-2-4-2
D-2-4-2
D-1-4-2
D-1-4-2
D-1-4-2
I-5-2
VENDOR PART NO
GMT 9413E348
GM 9413C315
GM 9513B775
GM 9413C555
GM 9413D109
GM 9413G421
GMT 9413F288
GM 9433G389
GM 9433G804
GM 9413H435
GM 9432E953
GM 8323F743
GM 8712-21
GM 8712F657
GM 8712F660
GM 8714F638
GM 8714F638
GM 8714F659
GM 8714F658
GM 8714F659
AS-568A-124(V)
AS-568A-127(V)
P-205(S)
AS-568A-152(S)
AS-568A-153(S)
AS-568A-236(S)
AS-568A-240(S)
66X59.6X3.5(S)
P-18(S)
210X12.5X1.45(S)
220X7(S)
200X190X5(S)
208X9.5(S)
41.5X18(S)
197X2.6T(S)
210X7(S)
212X7(S)
P-12(S)
V-325(S)
P-23(S)
AS-568A-460(S)
P-45(S)
P-48(S)
P-60(S)
G-55(S)
G-254(S)
AS-568A-442(S)
G-210(S)
250X20X45T
247X271X10T
337X364X2
72542-02
5
6
2
6
3
6
24
1
20
23
4
5
4
5
5
4
5
10
10
1
17
70
39
100
210
180
200
80
100
150
100
90
70
200
70
60
20
6
10
48
100
40
40
60
59
12
100
20
20
30
10
10
2
LOC
S14
S12
S12
S14
S14
S12
S12
S14
S11
S11
S14
S14
S14
S14
S14
S14
S14
S14
S14
P13
N24
N24
N22
N22
N22
N22
N22
N22
N22
N23
N23
N22
N22
N22
N22
N23
N22
N24
N23
N22
N22
N22
N22
N22
N22
N22
N22
N22
N42
N22
N23
N24
Y27
VENDOR
No
Item no
6014
6015
6016
6017
6018
6019
6020
6021
6022
6023
6024
6025
6026
6027
6028
6029
6030
6031
6032
6033
6034
6035
6036
6037
6038
6039
6040
6041
6042
6043
6044
6045
6046
6047
6048
6049
6050
6051
6052
6053
6054
6055
6056
6057
6058
6059
6060
6061
6062
6063
6064
6065
3996O-902
3996O-903
3996P-810
3996R-001
3996R-105
3996R-105
3996R-113
3996R-116
3996R-121
3996R-127
3996R-131
3996R-153
3996R-173
3996R-173
3996R-186
3996R-220
3996R-222
3996R-226
3996R-227
3996R-230
3996R-308
3996R-323
3996R-324
3996R-325
3996R-356
3996S-001
3996S-101
3996S-102
3996S-103
3996S-104
3996S-105
3996S-106
3996S-107
3996S-108
3996S-112
3996S-114
3996S-117
3996S-118
3996S-119
3996S-123
3996S-124
3996S-127
3996S-130
3996S-131
3996S-132
3996S-134
3996S-137
3996S-141
3996S-142
3996S-143
3996S-144
3996S-148
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
DESCRIPTION
DIFF PUMP FLUID
(Y)PUMP OIL (TW-400)
(Y)END PLATE
WAFER ALIGNER ROLLER
(Y)RELAY
(Y)RELAY
RELAY
RELAY
RELAY
(Y)RELAY
RELAY(120VAC)
(Y)RELAY
(Y)RELAY
(Y)RELAY
RELAY
(Y)SOLID STATE RELAY
RELAY(5-24VDC)
RELAY
(Y)CONTACTOR RELAY
RELAY
(Y)RELAY
DOOR SEAL 260D
(Y)BASIC SWITCH
(Y)LIGHTED PUSHBUTTO
(Y)LIGHTED PUSHBUTTON SWITCH
LIGHTED PUSHBUTTON S
(Y)FLOTAGE SWITCH
CHANGE,P/N3996S-149
LOCATION
I-5-1
N-3-2-1
M-6-2-3
M-6-2-3
M-6-2-3
M-6-2-3
M-6-2-3
M-6-2-3
M-6-2-3
M-6-2-3
M-6-2-3
M-6-2-3
M-6-2-3
M-6-2-3
M-6-2-3
M-6-2-3
M-6-2-3
B-2-2
B-2-2, N-2-1-1
B-2-3, B-2-4
N-2-4-4
B-2-3
B-2-4
B-2-4
B-2-4
B-2-4
B-2-4
B-2-4
B-2-4
B-2-4
M-7-4-1
M-7-4-1
K-9-3-2
B-2-3
B-2-4
B-2-3
K-9-3-2
B-2-4
B-2-4
B-2-4
B-2-4
B-2-4
B-2-4
VENDOR PART NO
DC-705(3.9KG)
PFP-M
CRISTAL
KRPA-14DG-24
KRPA-14DG-24
ODC5,3A,60VDC
R10-E1-X2-V700
R50-E2-X1-24VDC
W67-X2Q12-15
CHB-38-70003
KAP-11AY-24
KUMP-14D18-24
KUMP-14D18-24
KUPA-14AN-24
OAC5
ODC5
ODC24
ODC5Q
OAC5-12
G3NH-4075B
LA1-001(12VDC)
CJ7ARN-E9
LA2-002(12VDC)
PFP-100N
10722-1
A3B-014
A3BJ-510A
A3BJ-510G
A3BJ-510R
A3BJ-510W
A3BJ-510Y
A3BJ-5703-24E
A3BJ-7031-3
A3CJ-90A1-24EG
A3DT-90A1-00ER
A3PA-4001
A3PA-4007
A3PA-5011
A3PA-5702-24E
A3PA-5703-24E
A3PA-5716-24E
A3PA-701
A3PA-7010
A3PA-7010-1
A3PA-7020-1
61F-GP-N(100VAC)
A3PJ-5701-24E
A3PJ-5702-24E
A3PJ-5703-24E
A3PJ-5705-24E
A3PJ-701
LOC
4
7
100
20
1
6
2
2
5
1
5
1
1
2
3
3
3
5
4
2
2
2
5
1
9
5
26
10
10
15
20
10
8
22
5
20
5
4
12
5
10
5
10
4
18
3
1
4
10
10
9
6
O13
Y11
N12
O35
O35
O35
O35
O35
O35
O35
O35
O35
O35
O35
O35
O35
O35
O35
O35
O35
R23
Q53
R15
N43
N13
N23
R13
R13
R13
R13,O35
R13
R13
R13
R13
R13
R12
N31
N32
R12,O63
R15
R21
R15
R13
O63
R13
O63
R13
R15
R15
R15
R15
R13
VENDOR
No
Item no
6066
6067
6068
6069
6070
6071
6072
6073
6074
6075
6076
6077
6078
6079
6080
6081
6082
6083
6084
6085
6086
6087
6088
6089
6090
6091
6092
6093
6094
6095
6096
6097
6098
6099
6100
6101
6102
6103
6104
6105
6106
6107
6108
6109
6110
6111
6112
6113
6114
6115
6116
3996S-149
3996S-151
3996S-153
3996S-158
3996S-161
3996S-162
3996S-163
3996S-176
3996S-177
3996S-179
3996S-180
3996S-182
3996S-183
3996S-184
3996S-188
3996S-189
3996S-190
3996S-191
3996S-192
3996S-195
3996S-201
3996S-202
3996S-203
3996S-210
3996S-212
3996S-212
3996S-217
3996S-218
3996S-219
3996S-230
3996S-253
3996S-256
3996S-259
3996S-263
3996S-404
3996S-411
3996S-414
3996S-441
3996S-442
3996S-444
3996S-444
3996S-446
3996S-449
3996S-450
3996S-451
3996S-457
3996S-461
3996S-462
3996S-463
3996S-464
3996S-466
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
DESCRIPTION
FIBER UNIT SWITCH
PROXIMITY SENSOR
CAPACITIVE PROXIMITY
PHOTO SENSER
(Y)PHOTOELECTRIC SW
(Y)PHOTOELECTRIC SW
(Y)PHOTOELECTRIC SWI
(Y)PHOTOELECTRIC SW
PHOTOELECTRIC SWITCH
(Y)PROXIMITY SENSOR
PROXIMITY SENSOR
(Y)PHOTO SENSOR
(Y)SWITCH
(Y)SWITCH
(Y)SWITCH
(Y)PROXIMITY SWITCH
(Y)PROXIMITY SWITCH
(Y)PROXIMITY SWITCH
(Y)FLOATLESS LEVEL SWITCH
(Y)FLOAT SWITCH
AIR FLOW SWITCH
FLOW SWITCH
FLOW SWITCH
(Y)SENSOR
SENSOR
SENSOR
SENSOR
(Y)SENSOR
SENSOR
SENSOR
SENSOR
(Y)SENSOR
(Y)SENSOR
(Y)SENSOR
(Y)SENSOR
SENSOR
(Y)SENSOR
(Y)SENSOR
(Y)SENSOR
(Y)SENSOR
LOCATION
B-2-4
B-2-3
B-2-4
B-2-4
B-2-3
B-2-3
VENDOR PART NO
A3PJ-7010-1
E32-TC200E
A3PJ-90C22-28
A3PT-5011
E2K-C25ME1
E2K-C25ME2
E2E-X5ME1
B-2-3
E39-L2
B-2-3
E39-S1
E3C-S20LW
B-2-4
E3C-GE4
B-2-4
E3H-1C23
B-2-5-1
E3HF-1E1
B-2-3
E3HF-1E2
B-2-3
E3S-5E41
B-2-3
E3S-GS1E4
B-2-3
E3S-GS3E4
B-2-3
E3S-LS20XE4
B-2-5-2
E3S-X3CE4
B-2-5-1
E3C-S20W
B-2-4-1,B-2-5-1 E2K-X15ME1
B-2-1
E2K-F10MC1
B-2-5-1
E3S-DS10E4
B-2-5-1
M2PA-7010-1
B-2-4
M2PJ-7010-1
M2PJ-7010-1
B-2-4
TL-H10ME2
B-2-4
TL-H20ME2
B-2-3, B-2-4
TL-W5E1
B-2-4
61F-GP-NH
B-1-5-1, B-1-5-4 25357
B-1-5-1
55215
B-1-5-1
76141
L-9-2
500C
M-2-2-1, M-6-2-4 FU-4F
M-6-2-4
PS-201
PS-56
K-9-3-2
DS-A1
B-1-5-4, N-8-3-4 DS-L10H
N-8-3-4
SS3-MIR
N-8-3-4
SS3-MIR
N-3-4-3
FX4-A3R
N-3-4-3
GX-8MLB
N-3-4-3
SS-A5
N-3-4-3
IS-T20L
N-3-4-3
PM-K53
N-3-4-3
RS-520H-1
B-1-5-4, N-3-4-3 RS-520L
RS-520L-D
N-3-4-3
RT-410-1
C-4-4-2
RT-410-1R-C5
LOC
6
R13
12
R15
5
R13
5
R15
3
R13
4
R13
3
R15
10
R14
10
R14
1
R15
1
R15
4
R13
8
R21
10
R15
5
R14
3
R14
4
R15
2
R15
2
R21
1
R21
2
R21
8
R15
2
R21
10
R21
4
R15
4
R15
2
R13
2
R15
3
R15
10
R14,O41
5
O43
5
O43
3
O43
5
N12
10
R63
2
R63
9
R63
1
O63
14
O41
15(1ea O41
1
O41
1
O31
19
O31
6
O31
O31
3(1EA
4
O31
1
O31
5(1EA
O31
4(3EA
O31
4
O31
10
O41
VENDOR
No
Item no
6117
6118
6119
6120
6121
6122
6123
6124
6125
6126
6127
6128
6129
6130
6131
6132
6133
6134
6135
6136
6137
6138
6139
6140
6141
6142
6143
6144
6145
6146
6147
6148
6149
6150
6151
6152
6153
6154
6155
6156
6157
6158
6159
6160
6161
6162
6163
6164
6165
6166
6167
6168
3996S-468
3996S-469
3996S-506
3996S-516
3996S-527
3996S-530
3996S-702
3996T-112
3996T-131
3996T-137
3996T-302
3996T-305
3996T-317
3996T-321
3996T-402
3996T-417
3996T-422
3996T-423
3996T-501
3996T-504
3996T-510
3996T-801
3996T-802
3996T-802
3996T-803
3996T-806
3996T-807
3996T-809
3996V-010
3996V-010
3996V-011
3996V-014
3996V-015
3996V-016
3996V-017
3996V-018
3996V-018
3996V-019
3996V-020
3996V-021
3996V-022
3996V-024
3996V-025
3996V-026
3996V-027
3996V-028
3996V-031
3996V-032
3996V-042
3996V-047
3996V-048
3996V-050
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
DESCRIPTION
(Y)SENSOR
SENSOR
(Y)SENSOR EMITTER
SENSOR RECEIVER
SENSOR RECEIVER
SENSOR
N2 LEVEL SWITCH
(Y)FLEXIBLE TUBE
FLEXIBLE TUBE
(Y)FLEXIBLE TUBE
(Y)TIMER
(Y)TIMER
(Y)TIMER
TIMER
(Y)TRANSISTOR
(Y)TRANSISTOR
(Y)TRANSISTOR
(Y)TRANSISTOR
TRANSISTOR
(Y)TRANSISTOR
(Y)TRANSISTOR
(Y)REMOTE TERMINAL
INPUT UNIT
INPUT UNIT
(Y)REMOTE TERMINAL
REMOTE TERMINAL
(Y)LINK TERMINAL
(Y)OFF DELAY TIMER
(Y)DIAPHRAGM V/V,1/2
(Y)DIAPHRAGM V/V,1/2
(X)PFA PILOT V/V,2-W
VALVE,N.C,2-WAY
VALVE,N.O,3-WAY
(Y)VALVE,N.O,3-WAY
PNEUMATIC V/V
(Y)V/V
(Y)V/V
(Y)V/V
AIR V/V
SOL V/V
FAST PLUG V/V
(Y)V/V
(Y)V/V
V/V
(Y)CHECK V/V,1/4NPTx
CHECK V/V,1/4NPTx1/4
(Y)V/V
(X)CHECK V/V,FEMALE 1/2
NEEDLE V/V
(Y)PILOT V/V
SOL V/V,3-WAY
(X)STOPCOCK V/V,1/4 NPT MALE
LOCATION
B-1-5-1
M-2-2-2
C-4-4-2, N-2-5-2
C-4-4-2, N-2-5-2
C-4-4-2
N-8-3-4
M-2-2-2
G-2-4-1
B-2-4
B-2-4
B-2-3
B-2-3
K-9-3-2
K-9-3-2
K-9-3-2
B-2-4
B-2-3
B-2-4
B-2-2
B-2-4
B-2-4
M-7-3-4
M-7-3-4
M-7-3-4
M-7-3-4
M-7-3-4
M-7-3-4
M-7-4-1
M-7-4-1
M-7-4-1
M-7-4-1
M-7-4-1
M-7-4-1
M-7-4-1
M-7-4-1
M-7-4-1
M-7-4-1
M-7-4-1
M-7-4-1
M-7-4-1
K-9-3-2
N-4-2-2
M-7-4-1
VENDOR PART NO
RT-410-4R
6(5EA
RT-410-4
2
LR400
8
PT400
7
SP100R
4
SP320D
1
KML50-0A-A
3
321-4-X-2
5
321-6-X-6-B2
2
321-16-X-3
4
H3BA-FA (24VDC)
1
H3DH (24VDC)
1
H5AN-4DM,100-24
1
H5CN-YBN,100-24
1
2N1671
1
2N3441
2
2N3741
3
2N3792
1
MJ 10007
14
MJ 4035
3
MJE 800
8
G71-OD16(24VDC)
3
G72C-ID16
1
G72C-ID16
1
G71C-ID16(24VDC)
1
G72C-OD16(24VDC)
3
B7A-T6B6
2
RD-2P
1
202-1
2
202-1
3
202-10
3
202-20
10
202-21
10
202-22
3
202-39
10
202-42
3
202-42
2
202-43
2
202-72
6
203-1414-225
3
204-20
3
206-0412-1
1
206-0421-2
2
206-0422-2
1
206-0424-2
5
206-0432-1
4
206-0442-4SN
2
206-0855-2
1
NVT4-T4-2
1
202-01
1
203-3314-215
6
PVA4-T4-2
1
LOC
O41
O62
O41
O41
O41
O41
O62
R62
R62
R62
R13
R13
R12
R15
O63
O63
O63
O63
O63
O63
T14
R13
R13
R12
R12
R12
R13
R13
O11
O11
O11
O11
O11
O11
O11
O11
O11
O11
N31
O41
O41
N32
N32
N32
N32
R42
N32
N31
N32
O63
O21
N31
VENDOR
No
Item no
6169
6170
6171
6172
6173
6174
6175
6176
6177
6178
6179
6180
6181
6182
6183
6184
6185
6186
6187
6188
6189
6190
6191
6192
6193
6194
6195
6196
6197
6198
6199
6200
6201
6202
6203
6204
6205
6206
6207
6208
6209
6210
6211
6212
6213
6214
6215
6216
6217
6218
6219
6220
6221
3996V-064
3996V-091
3996V-115
3996V-116
3996V-131
3996V-132
3996V-134
3996V-137
3996V-137
3996V-139
3996V-140
3996V-147
3996V-150
3996V-152
3996V-153
3996V-160
3996V-161
3996V-162
3996V-162
3996V-164
3996V-200
3996V-201
3996V-207
3996V-211
3996V-212
3996V-212
3996V-214
3996V-218
3996V-226
3996V-247
3996V-251
3996V-255
3996V-256
3996V-266
3996V-266
3996V-304
3996V-305
3996V-308
3996V-311
3996V-313
3996V-315
3996V-317
3996V-321
3996V-322
3996V-354
3996V-365
3996V-368
3996V-372
3996V-373
3996V-374
3996V-375
3996V-377
3996V-378
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
DESCRIPTION
CHECK V/V
NEEDLE V/V
(Y)WATER COOLED TRAP
(Y)SOFT START V/V
SOL V/V
SOL V/V
SOL V/V
(Y)AIR V/V
(Y)AIR V/V
(Y)SOL V/V
SOL V/V
(Y)ELETRIC V/V
(Y)NEEDLE V/V
(Y)METERING V/V
(Y)V/V
(Y)SOL V/V
(Y)ISOLATION V/V
PILOT V/V
PILOT V/V
QDR BATH V/V
AIR V/V
(Y)AIR V/V
(Y)SOL V/V(24VDC)
SOL V/V(24VDC)
SOL V/V(24VDC)
SOL V/V(24VDC)
(Y)SOL V/V(24VDC)
SOL V/V(24VDC)
(Y)SOL V/V(24VDC)
AIR V/V
AIR V/V
(Y)SOL V/V(24VDC)
(Y)SOL V/V(24VDC)
SOL V/V(100VAC)
SOL V/V(100VAC)
SOL V/V,3-WAY(7W,120
SOL V/V(24VDC,8.5W)
SOL V/V(24VDC)
SOL V/V,3-WAY(24VDC,
SOL V/V(12VDC,7.6W)
SOL V/V(24VDC,8.5W)
SOL V/V(120V,7W)
(Y)SOL V/V(12VDC,7.6
SOL V/V(24VDC)
SOL V/V(24VDC)
SOL V/V
(Y)SOL V/V
(X)SOL V/V(24VDC)
SOL V/V(24VDC)
(Y)SOL V/V(120V)
SOL V/V(24VDC)
SOL V/V(24VDC)
SOL V/V(24VDC)
LOCATION
K-11-5-2
VENDOR PART NO
FUCL715-9.52-0.0
FUN-94M-6.35L
C-3-5
FTWA-6-2002-NWB
K-9-3-2
ILVP-0752-NWB
N-2-5-2
ET-3M-12
N-2-5-2
ET-3M-24
N-2-5-2
ETO-3M-24
N-2-5-2
EV-3-24
N-2-5-2
EV-3-24
N-2-5-2
EV-3M-24
N-5-1
EVO-3-24
N-2-5-3
MFC-2
N-2-5-3
MNV-1
N-2-5-3
MNV-1KP
N-2-5-3
MQC-V3
N-4-1-1
R481-6
N-4-1-1
R481-24
N-4-1-1
R482-24
N-4-1-1
R482-24
N-2-2-3
AMD41-20-20-2
N-4-1-1
SA-20T
N-2-3-3, L-10-6-1 AMG20-X20-FL-156
N-3-2-2
4F330-08-DC24V
L-10-6-1
4KA210-06-DC24V
L-10-6-1
4KB129-00-C5-DC2
L-10-6-1
4KB129-00-C5-DC2
N-2-3-3
A4FO10-06-DC24V
AB41-02-5-03A-DC
N-2-2-3
ADK11-08A-D3A-DC
F-5-6, D-12-2
AMD31-15BUS-10-1
L-10-6-1
AMD41-20BU-16-3
G-2-5-1, N-2-2-3 AP11-8A-03A-DC24
G-2-5-1
AP12-10A-03A-DC2
N-3-3-3
M-04-2PV-3-AC100
N-2-2-3
M-04-2PV-3-AC100V
K-9-3-2
31E1
H-1-2
31E1.
N-3-3-1
M401-37
H-1-1
M31E1.
B-1-5-4, N-4-2-2 M42E2
M-6-3-1
MC41E1.
H-1-2
MC41E1
M-6-3-1
062-4E2-21
M-6-3-1
125E1
K-10-3-1
DV3-234
L-10-6-3
NV3-234
M-7-4-1
WB-2W8P-C
K-10-3-1
A2016-S72
C-2-3, N-2-2-2
A3113
N-2-2-2
A3113-BIM-BD-BB
N-2-2-2
B2016-PF-S20
N-2-2-2
B2016-SH
N-2-2-2
B2016-SH-BE
8
2
1
2
8
11
17
2
5
10
29
12
3
1
14
4
6
1
3
1
1
2
6
1
1
3
2
4
2
9
1
2
1
4
1
2
11
3
12
17
13
2
15
4
1
1
1
1
1
2
1
3
3
LOC
O21
R32
N13
O62
O43
O43
O43
O43
O43
O43
O55
N13
N13
N13
N13
O31
O31
O31
O31
R41
O31
R42
R41
R42
R42
R43
R42
R42
R41
R41
R42
R41
R43
R41
R41
O63
O31
O22,O62
O31
O21,O31
O21,O63
O62
O21
O21
O62
Q11
N32
O62
O11
O11
O11
O11
O11
VENDOR
No
Item no
6222 3996V-380
6223 3996V-384
6224 3996V-385
6225 3996V-387
6226 3996V-390
6227 3996V-402
6228 3996V-404
6229 3996V-406
6230 3996V-407
6231 3996V-409
6232 3996V-551
6233 3996V-558
6234 3996V-560
6235 3996V-561
6236 3996V-562
6237 3996V-565
6238 3996V-604
6239 3996V-655
6240 3996V-681
6241 3996V-713
6242 3996V-776
6243 3996V-778
6244 3996V-782
6245 3996W-901
6246 3996W-902
6247 3996W-903
6248 3996W-904
6249 3996W-905
6250 3996W-906
6251 3996W-907
6252 3996W-908
6253 3996W-909
6254 3996W-910
6255 3996W-915
6256 3997N-069
6257 3997N-169
6258 3997O-016
6259 3997O-018
6260 3997O-177
6261 3997O-203
6262 3997O-229
6263 4501A-001
6264 4501B-001
6265 4501B-002
6266 4501C-002
6267 4501C-101
6268 4501O-001
6269 4501P-003
6270 4501T-021
6271 4501V-004
6272 4501V-004
6273 4507G-001
6274 4507M-009
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
COMMON
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
CD SEM
METRA-215
METRA-215
DESCRIPTION
(Y)SOL V/V(24VDC)
(Y)SOL V/V(24VDC)
(Y)SOL V/V(24VDC)
(Y)SOL V/V(24VDC)
(Y)SOL V/V(24VDC)
SOL V/V
(Y)SOL V/V
(Y)SOL V/V(24VDC)
(Y)SOL V/V(12VDC)
(Y)SOL V/V
(Y)SOL VALVE(24VDC)
(Y)SOL VALVE(24VDC)
SOL VALVE(24VDC)
SOL VALVE(110/120V)
SOL VALVE(24VDC)
SOL VALVE(120/60)
SOLENOID VALVE
BELLOWS VALVE
(Y)VALVE FLOW
(Y)CHECK VALVE
BALL V/V,3/8 VCR
(Y)V/V,3-WAY
(Y)BALL V/V
DIAMOND WHEEL (DRSA2029)
DIAMOND WHEEL (DRSC2001)
(Y)DIAMOND WHEEL (DRSA2003)
(Y)DIAMOND WHEEL (DRSA2004)
(Y)DIAMOND WHEEL (DR
(F3)DIAMOND WHEEL(#1
HEX NUT,NKL
CHANGE P/N 4997N-169
CHANGE P/N 4996O-220
CHANGE P/N 4997O-018
(Y)O-RING, VITON
(Y)O-RING, VITON
(Y)O-RING, VITON
(Y)ALIGNMENT SAMPLE
MOLYBDENUM BOARD
(Y)EXTENSION BOARD
(Y)C-TO-C ARM
(Y)PUMP COOLANT
(Y)O-RING,LOADER
(Y)CLEAN POLAROID UN
(Y)M/C LEVEL ADJUST TOOL
(Y)LEAK VALVE(CKD)
(Y)LEAK VALVE(CKD)
(Y)LUBRICANT, LEAD S
(Y)TURRET MOTOR
LOCATION
N-2-2-2
L-2-3-1
H-1-2
L-2-3-1
N-1-3-4
H-1-2
N-4-2-2
N-4-2-2
N-3-3-1
N-3-3-1
H-1-2
N-4-2-2
N-3-3-1
K-11-5-2
L-10-6-3
L-11-2-1
K-10-3-1
G-2-4-1
N-3-1-3
K-11-5-2
N-1-3-4
F-4-1-1
A-1-1
A-1-1
A-1-1
A-1-2
A-1-2
A-1-2
A-1-2
A-1-3
A-1-3
A-1-3
B-3-3-2
N-3-1-3
N-8-2-3
N-1-2-2
B-3-2-1
E-2-2, D-8-1
N-1-2-2
L-11-1-2
L-11-1-2
L-5-2-1
N-7-3-3
VENDOR PART NO
B3215-BE
D2017
D2017-LC
D3415-S2
E3111-MM
2CD8SG
2CD8SYCS
4VS
4VSG
8030G13VM, AFP42
A36-LB-2126
B2-DX-281
MB-D-002
MB-D-002-120V
MB-D-005
V52-LB-2100
SS-4CA-NE-3
SS-4BKT-9AGAA
SS-4MG-VCR
SS-8C-VCR-10
SS-44VCR8
SS-45XF8-BKB
SS-68TF32
RS-01-2-SG-M1
RS-03-2-2/4-P
01-2-40/60-NA
RS-01-2-20/30-NM-B
01-2-20/30-NM-C
01-2-40/60-NA-B
01-2-40/60-NA-C
01-2-40/60-NA-D
01-2-40/60-NM-B
01-2-40/60-NM-C
254B-5W7X75BAX40S
1/4-20X0.218
1/4-20X0.625
AS-568A-016(V)
AS-568A-018(V)
AS-568A-249(V)
AS-568A-275(V)
AS-568A-325(V)
545-1675
533-1337
340-0429
AT247800
13162
L456906
567-6682
566-1742
545-0707
545-0707
01-16500-00
40-02425-00
5
4
3
11
9
4
2
2
3
5
3
1
14
2
10
1
2
1
1
1
1
1
3
3
8
6
3
6
3
11
6
6
12
3
40
50
300
280
93
100
56
34
1
8
4
2
2
2
4
1
1
7
2
LOC
VENDOR
O11
O11
O11
O11
O11
O22
O62
O21,O62
O21,O62
O22
O22,O62
O62
O21,O62
O22
O21
Q11
R63
O62
R62
N13
O21
O13
O32
F46
F41
F41
F41
F43
F44
F44
F44
F46
F37
O15
J52
N13
N23
N23
N23
N23
N23
B16
Q44
Q15
B16
Q44
B63
Q33
B16
R63
R63
J22
P51
HITACHI
"
"
HITACHI
"
"
"
"
"
"
OSI
"
No
6275
6276
6277
6278
6279
6280
6281
6282
6283
6284
6285
6286
6287
6288
6289
6290
6291
6292
6293
6294
6295
6296
6297
6298
6299
6300
6301
6302
6303
6304
6305
6306
6307
6308
6309
6310
6311
6312
6313
6314
6315
6316
6317
6318
6319
6320
6321
6322
6323
6324
6325
6326
6327
Item no
DESCRIPTION
4507O-001
METRA-215
(Y)O-RING,TURRET,700
4507S-001
METRA-215
(Y)PCA, VACUUM SENSO
4507S-002
METRA-215
(Y)PCA, AIR PRESSURE
4507S-003
METRA-215
(Y)LEAD SCREW& NUT(M
4507U-001 METRA-215 ASURE (N)PRE ALIGNER CONTROLLER EQUI
4512B-001 WAFER INSPECTION EXTENDER CARD
4513B-002 WAFER INSPECTION (Y)ROBOT BELT
4513S-004 WAFER INSPECTION (Y)SPRING RETENSION
4514B-001 REVIEW STATION (Y)BATTERY
4514F-001 REVIEW STATION (Y)NEOZED-FUSE 10A
4514I-001 REVIEW STATION (Y)IC TCSS1110
4514L-002 REVIEW STATION HE-HOECHSTDR-LAMP
4514M-001 REVIEW STATION (Y)TRANSMISSION MOTOR
4514M-002 REVIEW STATION (Y)TRANSMISSION MOTOR
4514S-001 REVIEW STATION (Y)SENSOR
4514V-001 REVIEW STATION (Y)MAGNET VLAVE
4521L-001
MICRO SCOPE
(C)HBO LAMP
4533M-001FILM THICKNESS MEAS(Y)MOTOR ASSEMBLY
4533S-001FILM THICKNESS MEASSTYLUS 12.5UM/60
4546I-001 ION DOS MONITOR (Y)ISOLATOR VIBRATIO
4546I-001
"
(Y)ISOLATOR VIBRATIO
4571C-021
ELLISOMETER
CABLE,H62 COMP-U-MOI
4576G-002
IN LINE SEM
(Y)VACUUM GAUGE(SPAC
4597M-002
PROB STATION
(Y)MOTOR ASSEMBLY
4597M-003
PROB STATION
(Y)MOTOR CARD
4597M-005
PROB STATION
(Y)AUTO MICRO POSITONER
4597M-006
PROB STATION
(Y)AUTO MICRO POSITONER
4597M-007
PROB STATION
MICOR POSITIONER(LEF
4597M-008
PROB STATION
MICRO POSITIONER(RIG
4597S-001
PROB STATION
(Y)VACUUM SENSOR
4631B-022
WAFER VISUAL
(Y)PCB BUILT(FLAT AL
4631S-003
WAFER VISUAL
(Y)SENSOR PROXIMITY(
4631S-004
WAFER VISUAL
(Y)PROXIMITY SWITCH(
4637B-013
CLEAN STOKER
PCB BUILT
4637S-001
CLEAN STOKER
(Y)CON PLUG MICROSWI
4637S-006
CLEAN STOKER
SENSOR VACUUM
4641R-008
CLEAN STOKER
ROLLER CHAIN
4701B-001
TESTER
TERADYNE PIB BOARD
4701B-436
TESTER
RATE
4702B-001
TESTER
MCD DAUGHTER BOARD
4702B-223
TESTER
VS BYPASS
4702P-208
TESTER
PS MS 2.5.10V -5+10
4712B-238 WAFER PROBER STAGE DRIVER I/F BOA
4712B-248 WAFER PROBER TIMING BELT U-40T-80
4712B-249 WAFER PROBER TIMING BELT U-45T-80
4712E-206 WAFER PROBER CCD CAMERA
4712J-001 WAFER PROBER JOY STICK
4712P-002 WAFER PROBER VACUUM UPPER PINCETT
4712P-003 WAFER PROBER LOWER PINCETTE
4720B-002
REPAIR
PHOTODIDE, CHUCK BOX
4720B-032
REPAIR
EG PZ-5 ASS'Y SERVICE KIT
4720B-033
REPAIR
(N)ZYGO RECEIVER
4720B-034
REPAIR
MICRO COMPUTER ESD
LOCATION
L-11-4-1
L-11-4-1
J-6-5
D-8-1
N-1-2-2
N-1-2-2
N-8-1-4
N-8-1-4
L-10-7-2
L-10-4-2
D-3-3-2
N-8-1-4
N-1-2-2
E-1-1
N-2-5-2
L-10-7-2
L-10-7-2
L-3-5-1
L-10-4-2
L-10-4-2
L-10-4-2
J-1-1-1
D-8-1
L-10-7-2
N-8-2-3
L-10-7-2
B-2-4
N-8-2-3
N-1-2-3
L-10-7-2
N-1-3-2
J-4-2-1
H-5-2
B-1-3-4
J-4-2-1
I-7-2
G-2-4-2
L-10-6-2
B-1-1, L-10-6-2
L-10-6-2
L-10-6-2
L-10-6-3
L-10-6-3
L-10-6-3
B-1-3-4
VENDOR PART NO
26-08207-00
03-11433-00
03-11433-01
04-20514-00
04-17323-00
2K3818A
90420280A
345288
020-448.041-104
302-029.024-004
302-062.109-243
500138
302-050.129-031
302-050.12-006
302-077.003-004
020-448.803-052
90071003A
153850
014630
56-003022
56-003022
A13424
802488820
2-02-0017
ECA-53
MS1-441R
MS1-441L
MH2-L
MH2-R
2-52-0001
BB/NCA 1V1
184515-001
184600-027
BB/ROBIF1VO
184200-027
184520-001
RS25NP 170LINK
829-413-00
BIR-015398*02
950-658-02
950-696-01
405-158-00
281-500347-A
023-100447-1
023-100561-1
042-000014-1
1287-002779-11
3280-000022-11
3280-000023-11
400-09301
490-06600
597-069
74555
3
3
3
1
1
10
1
5
1
1
1
32(34EA
1
1
1
1
40(40EA
1
1
5
4
3
1
1
1
1
1
1
1
1
2
3
5
1
6
3
1
1
1
3
1
1
1
15
15
1
1
1
1
1
1
1
1
LOC
VENDOR
J51
T63
T63
J53
J33
Q23
B16
B16
Q13
Q13
Q14
Q13
Q14
W21
Q13
B16
Q33
S14
Q43
Q14
Q14
Q43
Q43
Q14
Q14
Q14
Q14
Q33
Q33
Q14
Q15
Q14
R13
Q15
B53
Q14
B16
T15
T15
T12
T15
Q12
Q15
B63
B63
Q15
Q14
Q15
Q15
Q11
Q11
Q11
T12
"
"
"
"
OSI
INSPEX
"
"
LEICA
"
"
"
"
"
"
"
LEICA
THER/WAVE
THER/WAVE
THERMA WAVE
"
RUDOLPH
JEOL
ASSESSI
"
ASSESSI
"
"
"
"
WED
"
"
DAIFUKU
"
"
"
ADVANTEST
"
TERADYNE
"
"
TSK
"
"
"
"
"
"
XRL
"
"
"
No
Item no
6328
6329
6330
6331
6332
6333
6334
6335
6336
6337
6338
6339
6340
6341
6342
6343
6344
6345
6346
6347
6348
6349
6350
6351
6352
6353
6354
4720B-036
4720B-039
4720B-040
4720B-214
4920M-008
4920S-001
4920S-003
4920S-004
4920S-022
4920V-001
4920V-007
4920V-010
4920V-016
4920V-017
4920V-018
4920V-021
4920V-022
4920V-023
4993T-003
4993T-005
4996F-219
4996F-401
4996F-426
4996O-303
4996S-012
4996S-203
4996S-325
REPAIR
REPAIR
REPAIR
REPAIR
CORRECTION PART
CORRECTION PART
CORRECTION PART
CORRECTION PART
CORRECTION PART
CORRECTION PART
CORRECTION PART
CORRECTION PART
CORRECTION PART
CORRECTION PART
CORRECTION PART
CORRECTION PART
CORRECTION PART
CORRECTION PART
QUATRZ WARE
QUATRZ WARE
QUATRZ WARE
QUATRZ WARE
QUATRZ WARE
QUATRZ WARE
QUATRZ WARE
QUATRZ WARE
QUATRZ WARE
DESCRIPTION
CKA THETA
CW INCIDENT DETECTOR
BELT TIMING-BP RAISER
CKA,PULSE DELETE SHUTTER
SENSOR ASS'Y(10-499SCCM)
SEAL NICKEL
SENSOR ASS'Y
SENSOR
VALVE ASS'Y(10-499SCCM)
VALVE 100<Q<500 SCCM
VALVE 2000<Q<5000 SCCM
VALVE
VALVE
VALVE
VALVE
VALVE
VALVE ASSY
(A)OUTER TUBE
(A)INNER TUBE
(F5)DI FILTER
QUICK CONNECT(3300-91175)
(Y)(F5)GAS PURIFIER
(F5)O-RING,F-SILICON
(Y)PHOTO SENSOR
(Y)PHOTO SENSOR
(Y)PHOTO SENSOR
LOCATION
B-1-3-4
B-1-3-4
L-10-6-3
B-1-3-4
G-2-1
L-10-6-3, L-10-7-3
L-10-7-3
L-10-7-3
L-10-7-3
L-10-7-3
L-10-7-3
L-10-7-3
L-10-7-3
L-10-7-3
L-10-7-3
L-10-7-3
L-10-7-3
L-10-7-3
G-2-4-1
B-2-4
VENDOR PART NO
64390
73336
132-020
73463
908858-001
908928-006
908923-001
S-7000
908778-004
ELO-1-UC
ELO-4-UC
909294-002
909294-004
909294-005
ESO-UC
7450UC(NO)
909294-003
HSDF-6055
HSDF-6056
DFA1NIEYNP64M
SS-QC8-B-8PM
01000-VCR-N20-PF
AS-568A-466(S)
EE-SPY412
E3S-DS10E41
EE-SX473
1
1
1
1
1
3
30
4
4
15
1
1
2
4
4
1
1
2
2
1
34
2
5
10
5
3
5
LOC
VENDOR
T12
T12
Q11
T12
Q11
Q11
Q11
Q11
Q11
Q11
Q11
Q11
Q11
Q11
Q11
Q11
Q11
Q11
Y11
Y11
O64
R62
N14
N24
T14
R13
T14
"
"
"
"
MFC
"
"
"
"
"
"
"
"
"
"
"
"
"
NO
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
29
35
36
37
38
39
40
41
42
43
44
45
46
47
48
49
50
51
52
53
54
55
56
57
58
59
60
61
62
NO
1
2
3
4
5
6
7
8
9
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
3TI-001
3TI-002
3TI-003
3TI-004
3TI-005
3TI-006
3TI-007
3TI-008
3TI-009
3TI-010
3TI-011
3TI-012
3TI-013
3TI-014
3TI-015
3TI-016
3TI-017
3TI-018
3TI-019
3TI-020
3TI-021
F3-T-001
F3-T-002
F3-T-003
F3-T-004
F3-T-005
F3-T-008
IF3-P-001
IF3-P-002
IF3-P-004
IF3-P-005
IF3-P-006
IF3-P-007
IF3-P-008
IF3-P-009
IF3-P-010
IF3-P-011
3-M-001
3-M-002
3-M-003
3-M-004
3-M-005
3-M-006
3-M-007
3-M-008
3-M-009
3-M-010
3-M-011
3-M-012
3-M-013
3-M-014
3-M-015
3-M-016
3-M-017
3-M-018

LAMP CTRL ASS`Y
ADI CONTROL ASS`Y
TDI CONTROL ASS`Y
FOCUS DEFL PW SUPLY
T/F
T/F
T/F
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
4-T-1-0001
4-T-1-1002
4-T-1-1003
4-P-1-1001
4-P-1-1002
4-P-1-1003
4-P-1-2001
4-P-1-2003
4-P-1-2004

EDWARD TWO STAGE MOTOR
Preclean Chamber Lower Shield
Car Rail Motor
WAFER STAGE 6" CHUCK
FAN ( EXHAUST )
( 220 -> 110 )
TEL I/F LM GUIDE ( Z )
TEL DEV CATCH CUP
IWAKE AIR PUMP(P/R)
SOURCE&ARC PW SPLY
GSD READ SCREW
GSD VACUUM CASSETTE
GSD ROUGHING BELLOWS
GSD HARD DRIVE
ION GAUGE PORT ADPT
KAISER SYSTEM CTRL
KEY BOARD
KEY BOARD
GAS FLOW CONTROLLER
C-DRIVE POWER SUPPLY
HVV CONTROLLER
TERMINAL DATA LINK
HEAT FAN
HI-VOLTAGE KAISER
HI-VOLTAGE KAISER
SEIKO SHA PRINTER
ATP-4800 TOUCH SCREEN
GAS STATUS PANEL
NOVELLUS BACK MONITOR
ROTARY PUMO (ALCATEL)

PRINTER
P/R FILTER HOUSING (DNS)
VACUUM PUMP(NSR)
PRINTER
DUV RETICLE CASE(MS2)
LWAKI BELLOWS PUMP
MONITOR(KLA5XXX)
FLOPPY DISK(NSR)
SERVO PACK(DNS629)
DC MOTOR(CL4B24)
EYEPIECE
STYLUS ARM ASS'Y
STYLUS 5.0 RADIUS
FSM 8800 PRECISION FLAT
PROBE ARM
MICRO MO DC MOTOR
MOTHER PCB
LEAD SCREW
MOTOR DRIVER
PCB ASS'Y X,Y DECODER
RF PCB STANDARD DUAL
INTERFACE PCB
ANALOG PCB
VACUUM SENSOR ASS'Y
CHUCK ASS'Y
LOCATION
CODE/PART No.
M-2-3-2
K-7-1
1220-0003-0009
1220-0004-0004
5980-0019-0002
L-8-2
3232P-009
S2M20575
S2M20175
K-3-2-1
K-9-4
4053050
M-4-2-3
M-4-2-3
M-4-2-3
L-2-2-3
D-13-1
I-7-3
M-1-4-3
F-5-3
I-6-2
1100003-1
1100046
F3-T-001
F3-T-002
F3-T-003
F3-T-004
F3-T-005
F3-T-008
1102685400
DESKJET600C
M-2-3-4
M-2-1-1
M-2-3-4
L-2-2-3
M-1-1, M-1-2
DESKJET660C
851-9547-006
SB-3SV-ML-S-T05
L-4-3-3
L-4-3-3
L-4-3-3
F-4-2-3
F-4-2-3
F-4-2-3
F-4-2-3
F-4-2-3
F-4-2-3
F-4-2-3
F-4-2-3
9ESA-001
X
X
137901
14621
X
X
X
X
82929
FM-123
FM-120
057320
032875
032840
032824
X
X
X
LOCATION
/SAP CODE/PART No.
K-4-3-1
L-4-3-3
L-4-3-3
L-4-3-3
L-4-3-3
A-2-3, J-6-4
112612002
L-2-2-1
G-1-3
A-2-3
K-10-4-3
NO
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
ETCH
ETCH
ETCH
ETCH
4-P-1-2005
4-P-1-2007
4-P-1-2008
4-P-1-2009
4-P-1-2010
4-P-1-2011
4-P-1-2012
4-P-1-2014
4-P-1-2015
4-P-1-2016
4-P-1-3001
4-P-1-3002
4-P-1-3003
4-E-1-0001
4-E-1-0002
4-E-1-0003
4-E-1-0004
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
27
28
29
30
31
32
33
34
35
36
37
38
39
40
41
42
43
44
45
46
47
48
49
50
51
DIFF
DIFF
DIFF
DIFF
DIFF
DIFF
DIFF
DIFF
DIFF
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
5-D-1-0001
5-D-1-0002
5-D-1-0003
5-D-1-0004
5-D-1-0006
5-D-1-0007
5-D-1-0008
5-D-1-0009
5-D-1-0010
5-T-1-1001
5-T-1-1002
5-T-1-1003
5-T-1-1005
5-T-1-1006
5-T-1-1007
5-T-1-1008
5-T-1-1009
5-T-1-1010
5-T-1-1011
5-T-1-1012
5-T-1-1013
5-T-1-1015
5-T-1-1016
5-T-1-1017
5-T-1-1020
5-T-1-1021
5-T-1-1022
5-T-1-0003
5-T-1-0004
5-T-1-0005
5-T-1-0006
5-T-1-0007
5-T-1-0008
5-T-1-0009
5-T-1-0010
5-T-1-2001
5-T-1-2003
5-T-1-2004
5-T-1-2005
5-T-1-2007
5-T-1-2008
5-T-1-2009
5-T-1-2010
5-T-1-2011
5-T-1-2012
5-T-1-2013
5-T-1-2015
5-T-1-2016
5-T-1-2017
5-T-1-2018
5-T-1-2019
NO

TEL OVEN UP/DOWN CYLINDER
TEL TRACK CABLE COVER
E2 SCAN ARM CONNEC' B/D
SIGNAL TOWER
TEL TRACK M/A
TEL CATCH CUP UP/DOWN CYLINDER
TEL TRACK REGULATOR
DNS S/V ASS'Y
MICRO VOLTAGE AMMETOR
(100 ~ 150 )
LAMP
CCD CAMERA
DEVTERIUM LAMP
GAS FILTER
WALL KINER(:)
GAS INJECTION RING , AL
Psc Vacuum Pump Motor
FUSW UNIT
STOCKER PANEL

RELAY
CABLE (4 CORE)
CABLE (6-8 CORE)
CABLE (15-20 CORE)
CABLE (3 CORE)
CABLE (2 CORE)
AIR FILTER
GAS REGULATOR
SOLENOIDE V/V 4-WAY
GAS BOTTLE PRESSURE GAUGE
VCR TO CGA ADAPTOR
ORIENT CONTROLLER
FAN (100V)
PURGE MANIFOLD
ASSY OPEN/CLOSE ARGON PIPE
STRIKE PLATE(1)
STRIKE PLATE(2)
STRIKE PLATE(4)
APERTURE SUPPORT LINA
POLE SHORT QUAD

APERT QUAD EXIT VG
QUICK CONNECTOR
SOURCE GUIDE, PVD CHAMBER
SOURCE LIFT, PVD CHAMBER
ACL &
CHAMBER PVD (STANDARD)
LIFT HOOP, PVD TiN
PVD MAGNET ROTATION MOTOR
LIFT BELLOWS ASSY, PVD
MODULE SELECT BLACK BOX
RF CABLE
PCW MOTOR
REMOTE BOX
MANUAL V/V
EMO CABLE
HARNESS, SENSOR LINE
ULTRASONIC LEVEL SENSOR
NUPRO V/V (DUAL)
FLOW SWITCH
PRESSURE REGULATOR
VALVE
SENSOR
BARATRON GAUGE (10Torr)
TIMING BELT
SIGNAL CABLE
LOCATION
K-4-1-2
K-10-4-3
K-10-4-3
CODE/PART No.
K-7-3-4
K-7-3-4
K-7-3-4
K-7-3-4
N-5-1
J-6-5
K-7-3-4
K-7-3-4
K-7-3-4
GLFF4000VM4
K-3-5-2
K-3-5-2
LOCATION
M-7-3-3
L-2-4-1, L-8-4-3, K-5-2-1
L-8-3-2, H-9-2
L-8-3-2
K-10-3-3
L-8-3-2
K-10-3-3
K-3-2-1
K-3-2-1
H-1-2
K-3-2-1
K-3-2-1
K-10-5-3
K-10-5-3
K-10-5-3
M-1-3-2
J-5-1
L-2-3-2
L-8-4-1
L-10-3-2
G-1-3
L-12-3-1
4305R-001
No./SAP CODE/PART
No.
STOCKER
E-1000HP
NV-GSD/HE
PI9500
PI9500
PI9500
NV-GSD/HE
NV-GSD/HE
NV-GSD/HE
NV-GSD/HE
NV-GSD/HE
NV-GSD/HE
NV-GSD/HE
NV-GSD/HE
AMAT, E-5500HP
AMAT, E-5500HP
NSK, M2i
AMAT, E-5500HP
AMAT, E-5500HP
AMAT, E-5500HP
AMAT, E-5500HP
NSK, M2000/8
AMK, C-5200
WJ-1000
NSK, C-1 ALTUS
WJ-1000
WJ-1000
K-3-3-3
K-3-3-3
K-3-3-3
K-3-3-3
L-8-4-2
L-8-4-2
NO
52
53
54
55
56
57
58
59
60
61
62
63
64
65
66
67
68
69
70
71
72
73
74
75
76
77
78
79
80
81
82
83
84
85
86
87
88
89
90
91
92
93
94
95
96
97
98
99
100
101
102
103
104
105
106
107
108
109
110
111
112
113
114
115
116
117
118
119
120
121
122
T/F
T/F
T/F
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
5-T-1-2020
5-T-1-2021
5-T-1-2022
5-P-1-0001
5-P-1-0201
5-P-1-0202
5-P-1-0301
5-P-1-0601
5-P-1-0602
5-P-1-1001
5-P-1-1002
5-P-1-1003
5-P-1-1004
5-P-1-1005
5-P-1-1006
5-P-1-1007
5-P-1-1008
5-P-1-1009
5-P-1-1010
5-P-1-1011
5-P-1-1012
5-P-1-1014
5-P-1-1016
5-P-1-1017
5-P-1-1018
5-P-1-1019
5-P-1-1020
5-P-1-2001
5-P-1-2002
5-P-1-2003
5-P-1-2004
5-P-1-2005
5-P-1-2006
5-P-1-2007
5-P-1-2008
5-P-1-2009
5-P-1-2010
5-P-1-2011
5-P-1-2012
5-P-1-2013
5-E-1-1
5-E-1-2
5-E-1-3
5-E-1-4
5-E-1-5
5-E-1-6
5-E-1-8
5-E-1-9
5-E-1-10
5-E-1-11
5-E-1-12
5-E-1-13
5-E-1-14
5-E-1-15
5-E-1-16
5-E-1-17
5-E-1-18
5-E-1-19
5-E-1-20
5-E-1-21
5-E-1-22
5-E-1-23
5-E-1-24
5-E-1-25
5-E-1-26
5-E-1-27
5-E-1-28
5-E-1-29
5-E-1-30
5-E-1-31
5-E-1-32

HOSE
RF CABLE (LF)

VIDEO PRINT
BASH PLATE
FROSTY WAFER
CPU COOLING FAN (A)
BALLSCREW (NEW PART)
CASSETTE PLATE SPRING
NW40 TRAPPED CENTERING RING(VITON)
AIR LINE(50m)
SOG CHEMICAL LINE (10m)
GAS FILTER (WGFG 10H S1*)
MAIN N2 GAS FILTER
5 MICRON FILTER
CHART RECODER PAPER
1/2" SUS NUT
1/2" SUS LINE CAP
CONNECTOR
ARM-1 UP/DOWN CYLINDER
CABLE
110V POWER CABLE

AGV CASSETTE GUIDE
EL CABLE
DRAIN HOSE (L)
DRAIN HOSE (S)
(C)100W HBO BULB
240V SAFETY SWITCH
DIAGNOSTIC KEYBOARD
PC KEYBOARD
20000UF/25V
14500UF/50V
10000UF/100WV
LAMP HALOGEN 15V/150W ASS'Y
BAR CODE READRE
JIG CALIBRATION SENSOR UNIT SEND
OPTICAL SPECIALTIES
TOOL FINGER ALIGN
CABLE KEBOARD
INSERT AL BASE
EXTERNAL CYLINDER
LIFTER CYLINDER
CURRENT DRIVE
PROCESS MODULE ASS'Y
CERAMIC INSULATOR
ESC PROCESS KIT
PID TEMP CONTROLLER
R.F CABLE
BCL3 GAS LINE HEATER
DSQ TOP PLATE
UEL BODY
UPPER ELECT. CLAMP RING
QUADSEAL PLATE
DSQ PADDLE
TEL CHART RECODE
DSQ LEXAN COVER
MINI MATCHER
DSQ MATCHER
DSQ DI TANK ASS'Y
TEL EXHAUST RING
DSQ FUNNEL & SPACER
MIDDLE CHAMBER
VAT V/V HEAT-JACKET
LOWER FILTER RING
ESC
ESC
ESC UPPER CHAMBER KIT
PUMP VAC. GATE V/V
ESC PROCESS KIT ASS'Y
CASS. LOCK CYLINDER
LOCATION
CODE/PART No.
NSK, C-1
D-14-2
L-12-3-1
M-6-3-3
H-1-2
L-12-3-1
L-7-3
L-7-3
L-11-3-3
L-11-3-3
L-11-3-3
L-11-3-3
L-11-3-3
L-11-3-3
L-11-3-3
L-11-3-3
L-11-3-3
L-11-3-3
L-11-3-3
L-11-2-2
L-2-4-1, L-8-3-1
L-6-3
L-2-4-4
L-2-5-3
L-2-5-3
L-5-1-4
L-5-1-4
L-5-1-4
L-5-1-4
L-5-1-4
K-1-3
K-1-2
K-2-4, I-7-3
K-3-3-1
K-3-4-1
I-4-1
M-4-4
M-4-4
M-4-4
K-9-1-1
K-7-4
I-5-1
D-13-4, D-11-4
L-1-2
I-7-3
M-4-1
J-3-5
K-8-3
NIKON I1OC
UT 2244I
UT 2244I
OSI OVERLAY
CANON I2
NIKON STEPPER
CD-SEM
DNS
SOG
COMMOM
COMMOM
COMMOM
COMMOM
COMMOM
COMMOM
COMMOM
MARK-7
COMMOM
COMMOM
COMMOM
MARK-7
SOG
DNS
DNS
TPC85XX
KLA21XX
KLA21XX
FT750
SORTER
SORTER
SORTER
KLA21XX
SORTER
KLA21XX
KLA21XX
FT750
RS-35/C
P-5000
P-5000
P-5000
C-5300
ALLIANCE
C-5300
C-5200
P-5000
ALL M/C
ALL M/C
LAM
TEL
LAM
LAM
LAM
TEL
LAM
LAM
LAM
LAM
TEL
LAM
LAM
LAM
LAM
LAM
TEL
LAM
C-5200
PSC
NO
NO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
6-P-T-1
6-P-T-2
6-P-T-3
6-P-T-4
6-P-T-5
6-P-T-6
6-P-T-7
6-P-T-8
6-P-T-9
6-P-T-10
6-P-T-11
6-P-T-12
6-P-T-13
6-P-T-14
6-P-T-15
6-P-T-16
6-P-T-17
6-P-T-18
6-P-T-19
6-P-T-20
6-P-T-21
6-P-T-22
6-P-T-23
6-P-T-24
6-P-T-25
6-P-T-26
6-P-S-1
6-P-S-2
6-P-S-3
6-P-S-4
6-P-S-5
6-P-S-6
6-P-S-7
6-P-S-8
6-P-S-9
6-P-S-10
6-P-S-11
6-P-S-12
6-P-S-13
6-P-S-14
6-P-S-15
6-P-S-16
6-P-S-17
6-P-S-18
6-P-S-20
6-P-S-21
6-P-S-22
6-P-S-23
6-P-S-24
6-P-S-25
6-P-S-26
6-P-S-27
6-P-S-28
6-P-M-1
6-P-M-2
6-P-M-3
6-P-M-4
6-P-M-5
6-P-M-6
6-P-M-7
6-P-M-8
6-P-M-9
6-P-M-10
6-P-M-11
6-P-M-12
6-P-M-13
6-P-M-14
6-P-M-15
6-P-M-16
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
27
28
29
30
31
32
33
34
35
36
37
38
39
40
41
42
43
44
45
46
47
48
49
50
51
52
53
54
55
56
57
58
59
60
61
62
63
64
65
66
67
68
69
LOCATION
FAB-6 LINE LIST
CODE/PART No.

LOCATION
CD SEM MONITOR
CD SEM WORKSTATION
CD SEM THERMAL PRINT(1)
CD SEM HV CONTROLLER
FILTER SUPPORT SCREEN
TAPE SENSOR BOX
SCRUBBER VACUUM SENSOR
THINNER SYSTEM
TEL TRACK SIGNAL CABLE
1/4" AIR LINE TUBE
SOG EXHAUST TRAP
TOOL BOX
CD SEM POLALOID
AIR ON/OFF VALVE (SOG EBR)
AIR ON/OFF VALVE (SOG DISP.)
AIR ON/OFF VALVE (SOG RINSE)
CLAMP RING
SIGNAL TOWER
RS231 CABLE
GLASE WAFER
MARK-7 CATCH CUP
MARK-8 CATCH CUP UPPER CUP
MARK-7 DRAIN PIPE
THINNER MANAL TANK
NIKON STEPPER MONITOR
KLA P/W INSP. DIGONOSTIC MONITOR
LENS CLEANING IPA
LOCAL PHONE
SIGNAL TOWER
ASML STEPPER LENS CLEANING
ASML STEPPER LENS CLEANING
KLA P/W INSP.
NIKON STEPPER PRINTER(1)
KLA P/W INSP. IMAGE PRINTER
NIKON STEPPER COMPAC TAPE(1)
NIKON STEPPER FILTER
H-10-3
KEY BOARD
KEY BOARD
NIKON STEPPER TOOL
NIKON STEPPER TOOL
KLA OVERLAY PZT TOOL
NIKON STEPPER RCS CONTROL BOX
OSI OVERLAY SIGNAL TOWER
NIKON STEPPER SIGNAL TOWER
NIKON STEPPER R/T STAGE MOTOR UNIT
NIKON STEPPER ILLUMINATION POWER SUPPLY
NIKON STEPPER ILLUMINATION POWER SUPPLY
SIGNAL TOWER
SPEED SENSOR(1)
SPEED SENSOR(2)
SPEED SENSOR(3)
SPEED SENSOR(4)
SPEED SENSOR(5)
LINER MOTOR(1)
LINER MOTOR(2)
ORIENTAL FAN
STOCKER FAN
CABLE
SFS-7600 ARM ASS'Y PART
TPC RORZE RD-021M8(1)
CODE/PART No.
A4033C
715/33
2-39-00312
UPS-50
AMDS00-X0027
AMDS00-X0075
AMDSZ0-X0048
S5E70166
NO
70
71
72
73
74
75
76
77
78
79
80
81
82
83
84
85
86
87
88
89
90
91
92
93
94
95
96
97
98
99
100
101
102
103
104
105
106
107
108
109
110
111
112
113
114
115
116
117
118
119
120
121
122
123
124
125
126
127
128
129
130
131
132
133
134
135
136
137
138
139
140
141
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
6-P-M-17
6-P-M-18
6-P-M-19
6-P-M-20
6-P-M-21
6-P-M-22
6-P-M-23
6-P-M-24
6-P-M-25
6-P-M-26
6-P-M-27
6-P-M-28
6-P-M-29
6-P-M-30
6-P-M-31
6-P-M-32
6-P-M-33
6-P-M-34
6-P-M-35
6-P-M-36
6-P-M-37
6-P-M-38
6-P-M-39
6-P-M-40
6-P-M-41
6-P-M-42
6-P-M-43
6-P-M-44
6-P-M-45
6-P-M-46
6-P-M-47
6-P-M-48
6-P-M-49
6-P-M-50
6-P-M-51
6-P-M-52
6-P-M-53
6-P-M-54
6-P-M-55
6-P-M-56
6-P-M-57
6E001
6E002
6E003
6E004
6E005
6E006
6E007
6E008
6E009
6E010
6E011
6E012
6E013
6E014
6E015
6E016
6E017
6E018
6E020
6E021
6E022
6E023
6E024
6E025
6E026
6E027
6E028
6E029
6E030
6E031
6E032

TPC RORZE RD-023
FE-4D PULLY BELT
FE-4D TIMING PULLY BELT M02
FE-4D TIMING PULLY BELT M01
8" VLSI STD W/F 0.305(1)
8" VLSI STD W/F 0.305(2)
6" VLSI STD W/F (-STEP)
SORTER AUTONEST PORT(1)
EX-520L PANNEL(1)
EX-520L PANNEL(2)
SFS-6200 15000INDEX(1)
SFS-6200 15000INDEX(2)
M SCOPE LENS FILTER
M SCOPE TOOL(1)
M SCOPE TOOL(2)
M SCOPE TOOL(3)
M SCOPE TOOL(4)
M SCOPE TOOL(5)
M SCOPE TOOL(6)
M SCOPE TOOL(7)
M SCOPE TOOL(8)
M SCOPE TOOL(9)
VACUUM PORT(1)
VACUUM PORT(2)
UV SECS SERIAL CABLE
PC INTERCONNECTION CABLE
M SCOPE LENS 6.3X
TPC ARM SCAN B'D(1)
TPC ARM SCAN B'D(2)
TPC ARM SCAN B'D(3)
TPC ARM SCAN B'D(4)
TPC ARM SCAN HOLDER CAP
SFS-7600 G TOWER SENSOR
CIRCUIT PROTECTOR
HPO 100W/2 LAMP
Stepping Motor
Stepping Motor Ass'y
Ozon DC Power Supply
Gas Control Board
5V,15V Power Supply
Oxide Exciter DC Power Supply
Nitride Oxide Exciter DC Power Supply
Gas Exciter Board
Process Chamber Board
CO2 Monitor Interface Board
Interface Board
Gas Control Board(3 Channel)
Gas Monitor W/Catalyst Board
Exciter Control Card
Quartz Lid
Heater Pad
Hoop
Corcom Emi Filter
Chain
Select Control Ass'y
Mapping Cal Tool
TMP Check Valve
TMP Check Valve
Alcatel Hi-Vac Sensor
HDP Post Pin Set
UV Probe Set
DC 24V 10A Power Supply
LED Cable
Dome Lift Cable
Remote Cable
EMO Generator Cable
LOCATION
H-1-2
L-3-3-1
L-3-3-1
L-3-3-1
L-3-3-1
M-4-2-1
M-4-2-1
M-4-2-1
M-4-2-1
M-4-2-1
M-4-2-1
M-4-2-1
M-4-2-1
M-4-2-1
M-4-2-1
M-4-2-1
M-4-2-1
K-1-3
K-6-4-3
K-6-4-3
K-6-4-3
K-6-4-3
K-6-4-3
B-3-1-2
B-3-1-2
M-2-1-4
M-2-2-3
CODE/PART No.
NO
142
143
144
145
146
147
148
149
150
151
152
153
154
155
156
157
158
159
160
161
162
163
164
165
166
167
168
169
170
171
172
173
174
175
176
177
178
179
180
181
182
183
184
185
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
ETCH
6E033
6E034
6E036
6E037
6E038
6E039
6E040
6E041
6E042
6E043
6E044
6E045
6E046
6E047
6E048
6E049
6E050
6E051
6E052
6E053
6E054
6E055
6E056
6E058
6E059
6E060
6E061
6E062
6E063
6E065
6E066
6E067
6E068
6E069
6E070
6E071
6E072
6E073
6E074
6E075
6E076
6E077
6E078
6E079
NO
DIFF
DIFF
DIFF
DIFF
DIFF
DIFF
DIFF
DIFF
DIFF
DIFF
DIFF
DIFF
DIFF
DIFF
DIFF
DIFF
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
7-D-001
7-D-002
7-D-003
7-D-004
7-D-005
7-D-006
7-D-007
7-D-008
7-D-009
7-D-010
7-D-011
7-D-012
7-D-013
7-D-014
7-D-015
7-D-016
7-T-1
7-T-2
7-T-3
7-T-4
7-T-5
7-T-7
7-T-8
7-T-9
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24

Remote Video Cable
RFPP Generator Source Ship Kit
Mercury Lamp
Signal Tower
Orienter Cal Tool
HDP Wall TC
Generator Rack Supply Cable
Signal Cable
Signal Cable
Printer Cable
EMO Interconnect Cable
Turbo Pump Interconnect Cable
Chiller EMO Cable
Target Power Cable
Match 24V Cable
Timming Belt
AGV Interface Cable
RS232 Cable
HDP Wall Heater
Ethernet Interconnector Cable
Grounding Wire
Poly AC Power Cable
Harness EMO Interconnect Cable
Interface Cable
24V AGV Interface Cable
HDP Chamber Cable
Halogen Lamp
Cable
DPS Poly RF Cable
Slit Valve Body
ISO Valve
Cassette Stage
Gas Box
Video Printer
Pump Power Cable
Move Lift Power Supply
Single Strip Qzone
T-Match
HOT Plate
Loadlock Door
Chiller Hose
Poly Chamber Lid
Buffer Chamber Lid Lift
Manual TC

SIC LINER TUBE(TEL)
TEL FURNACE HEATER
TEL FURNACE HEATER
TEL FURNACE HEATER
KE FURNACE HEATER
KE FURNACE HEATER
LIQUID SORUCE CONT'
IONIZER TIP CLEANER
PRESSURE GAUGE
EXH' CONTROLLER
MULTI TRAP HOUSING
TEOS CHARGE SYSTEM
TEOS CHARGE SYSTEM
1 POINT T/C CALIBRATOR
Q'TZ WOOL
Pump
G12(TIN) Adaptor
HTHU(Hot Al) Adaptor
Det Calibration Kit Gasteck
"
Guard Ring(Speed,IMD)
PC
HTHU(Hot Al) Shield
LOCATION
K-6-4-2
K-6-4-2
L-10-3-2
CODE/PART No.
L-12-3-1
L-12-3-1
L-2-2-2
L-8-3-4
D-12-4
L-8-1
D-11-4
K-7-2, D-10-1
K-7-5
C-2-1
L-8-2
K-2-1
L-9-3
L-9-1
No./SAP CODE/PART
No.
VMM-40-104
VMM-40-101
VMM-40-201
LSC 8442
MODEL-900
PHOTOHELIC
SENTRY 1510
LU 8206-A
LU 8209-A
TM-1200 CTL
PJ.10534-8b.4
0020-22982
0020-23042
0820-01040
0820-01022
15-028766-00
S2S40168
NO
25
26
27
28
29
30
31
32
33
34
35
36
37
38
39
40
41
42
43
44
45
46
47
48
49
50
51
52
53
54
55
56
57
58
59
60
61
62
63
64
65
66
67
68
69
70
71
72
73
74
75
76
77
78
79
80
81
82
83
84
85
86
87
88
89
90
91
92
93
94
95
96
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
7-T-10
7-T-11
7-T-12
7-T-13
7-T-14
7-T-15
7-T-16
7-T-17
7-T-20
7-T-21
7-T-22
7-T-23
7-T-24
7-T-25
7-T-26
7-T-29
7-T-30
7-T-31
7-T-32
7-T-33
7-T-34
7-T-35
7-T-36
7-T-C-1
7-T-C-2
7-T-C-3
7-T-C-4
7-T-C-5
7-T-C-6
7-T-C-7
7-T-C-8
7-T-C-9
7-T-C-10
7-T-C-11
7-T-C-12
7-T-C-13
7-T-C-14
7-T-C-15
7-T-C-16
7-T-C-17
7-T-C-18
7-T-I-1
7-T-I-2
7-T-I-3
7-T-I-4
7-T-I-5
7-T-I-6
7-T-I-7
7-T-I-8
7-T-I-9
7-T-I-10
7-T-I-11
7-T-I-12
7-T-I-13
7-T-I-14
7-T-I-15
7-T-I-16
7-T-I-17
7-T-I-18
7-T-I-20
7-T-I-21
7-T-I-22
7-T-I-23
7-T-I-24
7-T-I-26
7-T-I-27
7-T-I-28
7-T-I-29
7-T-I-30
7-T-I-31
7-T-I-32
7-T-I-33

HTHU(Hot Al) Clamp Ring
IMP Ti Shield
Coh-Ti Clamp Ring
G12(TIN) Clamp Ring
Coh-Ti Lower Shield
Shield Treatment Controller
Chamber Insert(Txz)
Edge Ring(Txz)
Lid Insulator(Al)
Lid Insulator(TiN)
Coper Gasket
CVD Tin Interlock B/D
Adaptorr
Hastings Vacuum Gauge
Spindle Motor(Altus)
Clear Lid(Txz)
Clear Lid(PC-2)
Leveller(Txz)
Clamp Ring(509)
Ch# Interconnector B/D
SBC Board(Old Version)
PC
Printer
NW40
PC Key booard
WJ Orifice bellows
Slit V/V plate(Producer)
W/J Ozone cell
Manipulator signal cable
NUPRO V/V
Sus plate
Stepper Motor for PE5000
Trszar variable capacitor
PA Tube (HDP)
Injection V/V
Gas box for PE5000
Conveyor belt - W/J 1000
Heater block - C2 CVD
ADCS L/S level monitor
Microwave cavity
Bellows
7x Gas Bottle Bracket
Auto tilter Motor
Auto tilter Damper
Auto tilter Dummy CASS
Auto tilter align Jig
Auto tilter align Jig
Blanket Pannel
N2 Supply Gauge
Auto tilter bracket
Eprom
Vaporizer
Load buffer CASS
exahust mount
cryo local cont'r
turbo battery
bracket
bracket
damper spring
affinity chiller
ionizer
ana-ch lnr brackt
heat shield
auto tilter ass'y
rf power cleaner
C/B 240VAC 50A
C/B 240VAC 150A
actr rtry aajustable antle
comm mtom fley
on-board cont
sw fitting 3/4"
quick conn 1"
LOCATION
CODE/PART No.
S2S40112
S2S40236
S2S40116
S2S40114
S2S40153
0200-35529
0010-36476
0020-21664
0020-21664
3320-02241
0100-09225
03-00254-00
0021-35989
0020-09680
0020-22509
0100-20004
HP
EPSON
0040-31980
E17059931
E18004811
E18005140
17059430
17033330
17111480
E110890570
E17028520
0040-38663
E11066630
0190-35867
0680-01476
0680-01877
0520-01052
500624
E34000202
NO
97
98
99
100
101
102
103
104
105
106
107
108
109
110
111
112
113
114
115
116
117
118
119
120
121
122
123
124
125
126
127
128
129
130
131
132
133
134
135
136
137
138
139
140
141
142
143
144
145
146
147
148
149
150
151
152
153
154
155
156
157
158
159
160
161
162
163
164
165
166
167
168
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
T/F
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
7-T-I-34
7-T-I-35
7-T-I-36
7-T-I-37
7-T-I-38
7-T-I-39
7-T-I-40
7-T-I-41
7-T-I-42
7-T-I-43
7-T-I-44
7-T-I-45
7-T-I-46
7-T-I-47
7-T-I-48
7-T-I-49
7-P-S-1
7-P-S-2
7-P-S-3
7-P-S-4
7-P-S-5
7-P-S-6
7-P-S-7
7-P-S-8
7-P-S-10
7-P-S-11
7-P-S-12
7-P-S-13
7-P-S-14
7-P-S-15
7-P-S-16
7-P-S-17
7-P-S-18
7-P-S-19
7-P-S-20
7-P-S-21
7-P-T-1
7-P-T-2
7-P-T-3
7-P-T-8
7-P-T-10
7-P-T-14
7-P-T-15
7-P-T-16
7-P-T-19
7-P-M-1
7-P-M-2
7-P-M-3
7-P-M-4
7-P-M-5
7-P-M-6
7-P-M-7
7-P-M-8
7-P-M-9
7-P-M-10
7-P-M-11
7-P-M-12
7-P-M-13
7-P-M-14
7-P-M-15
7-P-M-16
E7-1
E7-2
E7-3
E7-4
E7-5
E7-6
E7-7
E7-8
E7-9
E7-10
E7-11

bracket lower sld
e220 remote pwr rack
EMO cable(100ft)
alcatel pump EMO cable
steag rtp cont'r
vacuum feedthru ass'y
harness w0613
harn autotilter
bottom plt autotilter
pcb ass'y WH control
pcb ass'y WH control
pcb ass'y CASS INF
CASS BTTM PLT
mount loadlock pcb
motor mount plate
hose for gsd
CANON R/T CHANGER ASS'Y
CANON RCS KEYBOARD
CANON CD80-CD B/D(OLD)
EQ-111AD
CANON PRINTER(BJ-30V)
CANON PRINTER(star JT-144CL)
NIKON PRINTER(VP-4500)
CYMER TOOL BOX
CANON CLEANING TOOL BOX
ASML CHUCK COVER
CYMER LNP (5000)
OSI CASS. PLATE
Thinwire Ethernet Multiport Repeater
Local ethernet bridge
B/D
CANON ROBOT
OSI COMPUTER
R/T CHANGER
REGULATOR BOX
CANON MONITOR
EXH DUCT
EXH DUCT 75
THC DUCT
ZIPO TUBE()
EXH DUCT
STEPPER DUCT
TUBE
EXH CHECKER
ZIPO TUBE
LIFTER DRIVER BOARD
LEP RACK POWER SUPPLY
STAGE BELT
OSRAM HBO LAMP 100W/2
FLAT-FINDER ASS'Y
DI FILTER
CHILLER PUMP
(Y)TIMING PULLEY BELT
SOLENOID VALVE
PRECISION REGULATOR
TP-500 REFERENCE BLOCK
SEM LHV2N BOARD
SORTER W/F SCAN SENSOR
PCA EDGE SENSOR FLAT ALIGNER
SORTER P-100 CPU BOARD
MONITIR (CD-SEM)
PURIFIER,CL2
PURIFIER,AR
PURIFIER,O2
PURIFIER,C3F3
PURIFIER,CH3F
PURIFIER,CO
PURIFIER,CO
PURIFIER,CH3F
PURIFIER,C2F6
PURIFIER,O2
PURIFIER,O2
LOCATION
CODE/PART No.
0021-02966
E19004192
0150-10409
0150-10409
E11066680
e16005500
e16065830
e11066650
E15004120
E15004150
e15004140
e17062151
E17130710
J-4-3-3
D-14-1, D-13-3
M-6-2-2
D-12-1
D-14-3, D-14-4
M-3-1, M-3-2
J-5-1
K-2-4
4571B-004
4571P-002
4513B-005
4571B-002
4146V-011
3934R-002
S5G80118
4551S-005
00200-VCR-CL2-PF-C22 RT-5RA
00200-VCR-AR-PF-VAR-RT-5Ra
00200-VCR-O2-PF-RT RA-VAR
00200-VCR-C3F3-PF-RT-3/8*1/4-5Ra-VAR
00200-VCR-CH3F-PF-SS-RT-3/8*1/4-5Ra
00200-VCR-CO-PF-RT-3/8*1/4-5Ra-VCR
00200-VCR-CO-PF-RT-3/8*1/4-5Ra-VCR
00200-VCR-CH3F-PF-RT-3/8*1/4-5Ra-VAR
00200-VCR-C2F6-PF-RT-3/8*1/4-5Ra-VAR
00200-VCR-O2-PF-RT-5Ra-VAR
00200-VCR-O2-PF-RT-5Ra-VAR
NO
169
170
171
172
173
174
175
176
177
178
179
180
181
182
183
184
185
186
187
188
189
190
191
192
193
194
195
196
197
198
199
200
201
202
203
204
205
206
207
208
209
210
211
212
213
214
215
216
217
218
219
220
221
222
223
224
225
226
227
228
229
230
231
232
233
234
235
236
237
238
239
240
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
E7-12
E7-13
E7-14
E7-15
E7-16
E7-17
E7-18
E7-19
E7-20
E7-21
E7-22
E7-23
E7-24
E7-25
E7-26
E7-27
E7-28
E7-29
E7-30
E7-31
E7-32
E7-33
E7-34
E7-35
E7-36
E7-37
E7-38
E7-39
E7-40
E7-42
E7-43
E7-45
E7-46
E7-47
E7-48
E7-49
E7-50
E7-51
E7-52
E7-53
E7-54
E7-55
E7-56
E7-57
E7-59
E7-60
E7-61
E7-62
E7-63
E7-64
E7-65
E7-66
E7-67
E7-68
E7-69
E7-70
E7-71
E7-72
E7-73
E7-74
E7-75
E7-76
E7-77
E7-78
E7-79
E7-80
E7-81
E7-82
E7-83
E7-86
E7-87
E7-88

PURIFIER,AR
PURIFIER,N2
PURIFIER,CH3F
PURIFIER,N2
PURIFIER
PURIFIER,AR
PURIFIER,C3F8
PURIFIER
PURIFIER
PURIFIER,C3F8
PURIFIER
PURIFIER,AR
PURIFIER,O2
MT COOLDOWN CH# TOP COVER
EMPTY LINE
SMALL STORAGE BOX
110V BOX(4)
C-5200 MAGNET COIL
LAM VAT V/V HOUSING(2000)
CHILLER HOSE(PVC)
CHILLER HOSE(SUS)
MFC,02 10sccm,TYLAN
MFC,C4F8 20sccm,TYLAN
MFC,O2 1000sccm,TYLAN
MFC,C4F8 20sccm,TYLAN
MFC,N2 500sccm,TYLAN
MFC,C4F6 50sccm,AERA
AC POWER SERVO DIVER
AC POWER CABLE(110V)
AC CONNECTOR(30V,120/208V,3)
5-PHASE STEPPING MOTOR
CIRCUIT BREAKER(20A)
CH# A/C TRAY,IPS 5200 MCC
CH# B/D TRAY,IPS 5200 MCC
TURBO INTERCONNECT BOARD
STEPPER CONTROLLER BOARD
CONTACTOR INTERLOCK BOARD
BOARD
AC DISTRIBUTION BOARD
CH# INTERFACE BOARD,5200 MCC IPS
BOARD
RS-232 TO RS-485 CONVERTOER
4 AC CABLE
KIT,CHXINTERFACE BE AERO CHILLER
RIBBON CABLE
RIBBON CABLE
RIBBON CABLE,HDD
RIBBON CABLE
HARNESS ASSY,MAG LAMP DRIVER CONTROL
HARNESS ASSY,CENTURA MSM PWB#2
MONTROSE/COT CABLE
MONITOR CABLE,15PIN
CH# INTERCONNECT A-C,Board
CH# INTERCONNECT B-D,Board
ESC CONTROLLER B/D
ESC CONTROLLER POWER SUPPLY,4CH#
AC DISTRIBUTION Board
5200 PERSONALITY Board
MONITOR CABLE,15PIN
KEYBOARD
AIR TUBE, 18Inch
AIR TUBE, 18Inch
CBMAG 3P 240VAC 30A
KIT,N2 PURGE LOW TEMP CATH
CHILLER TEMP READING CABLE
HP LASERJET 4MP PRINTER
MFC,CHF3 100sccm,TYLAN
MFC,CL2 200sccm,TYLAN
MFC,CF4 50sccm,TYLAN
LOCATION
CODE/PART No.
00200-VCR-AR-PF-VAR-RT-5Ra
00600-VCR-N2-PF-SS-RT-5RA-LPD
00200-VCR-CH3F-PF-RT-3/8*1/4-5Ra-VAR
00600-VCR-N2-PF-SS-RT-5Ra-VAR
0224-40008
00200-VCR-AR-PF-SS-RT-(1/4*1/4)
00200-VCR-C3F8-PF-SS-RT-(3/8*1/4)
0225-40005
0225-40471
00200-VCR-C3F8-PF-RT-3/8*1/4-5Ra-VAR
0225-40772
00200-VCR-AR-PF-RT-5Ra-VAR
00200-VCR-O2-PF-SS-RT-5Re-VAR
0020-76181
0010-30533
0242-36143
FC-2902MEP,MA9707317
FC-2902MEP,MM9804154
FC-2902MEP,MM9806015
FC-2902MEP,MM9801030
FC-2902MEP,MA9609363
FC-2902MEP,MM9711213
10RaFC-D980C,A99030519
MODEL:B1583-07120KBL
0010-20932
0680-01124
0100-35212
0100-35213
0100-20051
0100-20173
0110-20027
0090-76133
0090-76114
0100-35207
0660-01743
0242-00897
0150-75197
0150-20038
0150-76099
0150-75198
0140-20214
0140-76625
0150-10505
0150-20187
0100-38083
0100-35083
0100-09196
0100-35064
0660-01641
0150-76190
3860-01112
3860-01105
0680-01199
0242-00889
0150-00404
FC-2900MEP5,MM9603169
FC-2950MEP5,HY9608136
FC-2950MEP5,HY9608146
FC-2900MEP5,MA9509595
FC-2900M,MA98093056
NO
241
242
243
244
245
246
247
248
249
250
251
252
253
254
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
PHOTO
E7-89
E7-90
E7-91
E7-92
E7-93
E7-94
E7-95
E7-96
E7-97
E7-98

MFC,CF4 50sccm,TYLAN
MFC,CO 100sccm,TYLAN
MFC,SF6 200sccm,TYLAN
MFC,N2 50sccm,TYLAN
MFC,N2 200sccm,TYLAN
MFC,O2 20sccm,AERA
MFC,N2 400sccm,AERA
MFC,CL2 100sccm,STEC
MFC,HBR 100sccm,STEC
Western Digital HDD,TEL
E7-99
E7-100
Unity- MAIN Board,TEL
LOCATION
CODE/PART No.
FC-2900M,MA9703085
FC-2902MEP-T,MM9805099
FC-2900MEP5,MA9602316
FC-2900MEP5,MA9608806
FC2950MEP5,MC99123032
10RaFC-D980C,A99040926
TC FC-980,20D1883
SEC-7440MC,2362314
SEC-7440MC,2368507
SVME/AT-486Ea V1 SVA004-1-S
IFAB LIST
NO
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
27
28
29
30
31
32
33
34
35
36
37
38
39
40
41
42
43
44
45
46
47
48
49
50
51
52
53
54
Photo
Photo
Photo
Photo
Photo
Photo
Photo
Photo
Photo
Photo
Photo
Photo
Photo
Photo
Photo
Photo
Photo
Photo
Photo
Photo
Photo
Photo
Photo
Photo
Photo
Photo
Photo
Photo
Photo
Photo
Photo
Photo
Photo
Photo
Photo
Photo
Photo
Photo
Photo
Photo
Photo
Photo
Photo
Photo
Photo
Photo
Photo
Photo
Photo
Photo
Photo
Photo
Photo
Photo
RP-001
RP-002
RP-004
RP-005
RP-006
RP-007
RP-011
RP-012
RP-014
RP-015
RP-016
RP-018
RP-101
RP-102
RP-103
RP-104
RP-105
RP-106
RP-107
RP-108
RP-109
RP-110
RP-111
RP-112
RP-113
RP-114
RP-115
RP-116
RP-117
RP-119
RP-120
RP-121
RP-122
RP-123
RP-124
RP-125
RP-126
RP-127
RP-128
RP-129
RP-130
RP-131
RP-132
RP-133
RP-134
RP-135
RP-136
RP-137
RP-138
RP-139
RP-140
RP-141
RP-142
RP-143
Description
F2 Trap(ELS-4000)
Canon W/F Chuck
E2 Nozzle Arm Ass'y
E2 Nozzle Ass'y
DEV Nozzle Drain Bath (Stream)
Waste Evacuation System Interface Module
Cybor Pump
DEV Top Cover (ACT-8)
Wafer Block (Act-8 IRA)
Tweezers (Act-8 IRA)
8" Pincette (ACT-8 PRA)
5-PHASE DRIVER(A4509-048)
OPC-2505A-4
OPC-2586A(MEC-M1)
OPC-2503B-4
COV-3420B
CLW-3327A(MEC-40V-0)
Bay Networks(Model 800)
LM GUIDE(HSR15R1UUF+640LF)
Network Cable(DIASET-158IB)
OPTICAL TRANS.UNIT(BC-D01H1)
OPTICAL TRANS.UNIT(BC-D01H1)
BALL BUSH(SMK12GWUH)
CLB-3375A(MEC-40V-0)
MUX-CARD & 8T/C(8 X 4 MUX)
COUPLING(E32-12-12)
P.C BOARD(CLS-3261AA)
P.C BOARD(SER-3388A)
MULTI-TAB
4-CHAN MTR DRV B/D
PCA MOTOR CONTROLLER B/D
STAGE DRIVE B/D
DIAGNOSTICS DRIVE B/D
H2 MAIN INTERFACE B/D
SYSTEM STATUS,LED B/D
DOOR INTERCONNECT B/D
F2 CPU B/D
PCA,SERVO CONTROLLER B/D
DUAL STEPPER DRIVER B/D
SBC INTERCONNECT B/D
FLAT ALIGNER INTERFACE B/D
OPERATOR INTERFACE B/D
H2 THETA INTERFACE B/D
X,Y LIMIT B/D
HANDLER SHUTTLE B/D
SERVO MOTOR CONTROLLER DRIVE B/D
LOAD WINDOW INTERFACE B/D
PCA POS SENSOR
TURRET STEPPER MOTOR B/D
Penning Gauge
Chuck PS
ECPU Board
BLK Amp
LOCATION
K-6-4-3
F-4-4-2
F-4-4-1
F-4-4-1
F-4-4-1
N-8-2-1
B-3-1-2
B-3-4-1
B-3-4-1
K-2-3
F-4-2-1
F-4-2-1
F-4-2-1
F-4-2-1
J-4-1-1
J-4-1-1
Vendor P/N
1985-411787-1*
1985-414069-1*
?
2910-446606-11
2910-405112-11
2910-304635-13
2910-305280-11
N-2-1-3
F-4-3-3
F-4-3-3
F-4-3-3
M-6-2-2
F-4-3-3
F-4-3-1
F-4-3-1
F-4-3-1
F-4-3-1
J-4-3-1
F-4-3-1
J-4-2-3
J-4-2-3
J-4-1-1
J-4-1-1
J-4-1-1
J-4-1-1
J-4-1-1
J-4-1-1
J-4-1-1
J-4-1-1
J-1-3-2
J-1-3-2
J-1-3-2
J-1-3-2
J-1-3-2
J-1-3-2
188859
54-0183
54-0287
54-0219
54-0283
54-0276
54-0216
54-0112
54-0095
54-0292
54-0148
54-0273
54-0220
54-0289
54-0221
54-0150
54-0277
54-0275
54-0265
568-5532
271-2860
568-5579
NO
55
56
57
58
59
60
61
62
63
64
65
66
67
68
69
70
71
72
73
74
75
76
77
78
79
80
81
82
83
84
85
86
87
88
89
90
91
92
93
94
95
96
97
98
99
100
101
102
103
104
105
106
107
108
109
110
111
112
113
114
115
116
117
118
119
120
121
122
123
124
125
126
Photo
Photo
Photo
Photo
Etch
Etch
Etch
Etch
Etch
Etch
Etch
Etch
Etch
Etch
Etch
Etch
Etch
Etch
Etch
Etch
Etch
Etch
Etch
Etch
Etch
Etch
Etch
Etch
Etch
Etch
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
RP-144
RP-145
RP-146
RP-147
RE-001
RE-002
RE-003
RE-004
RE-005
RE-006
RE-007
RE-008
RE-009
RE-010
RE-011
RE-012
RE-013
RE-014
RE-015
RE-016
RE-017
RE-018
RE-019
RE-020
RE-021
RE-022
RE-023
RE-024
RE-025
RE-026
RT-001
RT-002
RT-003
RT-004
RT-006
RT-007
RT-008
RT-009
RT-010
RT-012
RT-013
RT-014
RT-015
RT-016
RT-017
RT-018
RT-019
RT-020
RT-021
RT-022
RT-023
RT-024
RT-025
RT-026
RT-027
RT-028
RT-029
RT-030
RT-031
RT-032
RT-033
RT-034
RT-035
RT-036
RT-037
RT-038
RT-039
RT-040
RT-041
RT-042
RT-043
RT-044

Cassette Index
ACL Unit
Gun Chamber Assy
PCA,DIGI-4,CONFIGURED
Wall T.C probe
Gas feed through
Base plate(HDP)
Antenna dome ass'y
Qt'z dome
Qt'z collar(Rev.0)
Post pin(ZrO2)
Grafoil
Si slab(CGF, 18hole)
L/L ISO valve(eMax)
Cassette clamp ass'y
Qt'z cover ring
Focus ring
Shadow ring
Al GDP
ISO valve(DSQ)
Clamp(TCP-9400)
ESC insulator
Edge ring
RF stepped window(TCP-9400)
Sol. Valve, N2 jet
M-Chuck
Ring, Sharoud
RF dip board(DSQ)
SS. Conduction board
Personality board
dry pump interface module
dry pump interface module
dry pump interface cable
Iqdp signal cable
hose flex blws thin NW25
Cable, EMO
harness assy expansion B/D DC power
harness assy system AC CVD option
Cable assy mtr lid left pwr
Cable assy buf/xfer lin in
system ribbon cable
cable harness cd inconnect
hose cable gas/ 0.375id*0.620
Cable assy 75ft dc source
Cable assy lid left mtr ctrl
Cable assy scr driver ctrl
harn assy 24vdc n2 flow
pvd cd target support shelf
exhaust feedthroth
pannel ch2 wtor
cover rf generator cooling
turbo controller support
panel turbo controller
panel controller cover
brkt pcb turbo interconnect
sus pannel (150*150)
pannel blank turbo cntl
blankoff mainframe elbow switch
turbo support shelf
assy power cable iqdp80/500
assy power cable iqdp80 70ft
kit 75f intfl cbl iqdp80
hose hert exchange s/r
hose hert exchange s/r
0224-44246 assy power cable iqdp80
Cable, 9pin signal
RS485 cable
cable harness (chamber signal)
Cable, system remote monitor
Cable, signal
Cable, 64pin signal
LOCATION
N-6-5-3
N-6-5-3
L-7-4
J-4-1-1
N-6-5-3
N-6-5-3
I-4-1
K-3-5-1
D-9-2
I-4-2
N-6-5-3
K-2-4
B-3-4-3
K-3-5-1, I-4-1
I-3-2
K-1-4, D-9-3
D-9-3
D-9-3
D-9-3
D-9-3
N-6-5-3
D-9-3
D-9-3
F-4-2-2
F-4-2-2
F-4-2-2
L-9-1-3
N-8-1-3, D-11-5
F-4-2-2
F-4-2-2
F-4-2-2
F-4-2-2
M-4-2-1
F-4-3-2
F-4-3-2
K-2-3
I-3-2
D-8-3
I-8-3
K-2-2-2
F-4-3-2
K-2-2-2
D-8-3
I-3-2
K-4-3-2
CODE/PART No.
53-0022
0190-40097
0050-40316
0200-40131
0010-40298
0200-40189
0200-40182
0020-41155
0020-40627
0020-35546
0190-13041
0010-20399
0020-36690
0020-09741
0200-10151
0200-10246
716-330915-001
716-011651-008
716-031635-002
853-015770-001
715-031752-208
810-017057-001
0240-38377
0240-38378
0240-39753
0620-02268
0021-21143
0150-20160
0140-20517
0140-21595
0150-20599
0150-20602
0150-22457
0140-21816
3400-01057
0150-20708
0150-20601
0150-00948
0140-20611
0270-20290
0040-76073
0040-21826
0040-23147
0040-22415
0240-20210
0020-20060
0040-00729
0020-70536
0020-20267
0020-20991
0020-75990
0020-21251
0227-04949
0224-44246
0227-04956
0010-13635
0010-13635
0227-04949
0150-21147
0140-76222
0150-76066
0150-36394
0150-20019
NO
127
128
129
130
131
132
133
134
135
136
137
138
139
140
141
142
143
144
145
146
147
148
149
150
151
152
153
154
155
156
157
158
159
160
161
162
163
164
165
166
167
168
169
170
171
172
173
174
175
176
177
178
179
180
181
182
183
184
185
186
187
188
189
190
191
192
193
194
195
196
197
198
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
RT-045
RT-046
RT-047
RT-048
RT-049
RT-050
RT-051
RT-052
RT-053
RT-054
RT-055
RT-056
RT-057
RT-058
RT-059
RT-060
RT-061
RT-062
RT-063
RT-064
RT-065
RT-066
RT-067
RT-068
RT-069
RT-070
RT-071
RT-072
RT-073
RT-074
RT-075
RT-076
RT-077
RT-078
RT-079
RT-080
RT-081
RT-082
RT-083
RT-084
RT-085
RT-086
RT-087
RT-088
RT-089
RT-090
RT-091
RT-092
RT-093
RT-094
RT-095
RT-096
RT-097
RT-098
RT-099
RT-100
RT-101
RT-102
RT-103
RT-104
RT-105
RT-106
RT-107
RT-108
RT-109
RT-110
RT-111
RT-112
RT-113
RT-114
RT-115
RT-116

support bor generator rack
adpter elbow with cryo buffer
WINDOW PROTECTIVE
kit elec terminal lugs
SEAL CENTER RING ASSY
kit floor mount generaor rack
bracket clanp 1/2 ~ 2 1/2)
Cable (di mtd*b/f) ribbon cable
LOCATION
D-8-3
I-8-3
K-4-3-2
K-4-3-2
K-5-5-2
L-8-3-4
K-4-2-2
cable pvd shutter signal
K-4-2-1
brkt gen rack floor mount

Cable
gas line 1/4 vcr
BLOCK WALL-CLAMP SCR
4way 1/4 gas line
brkt gen rack plate
1/4 tube
Cable (5pin ribbon)
cable
heating cable
Cable signal
Cable signal
Cable signal
Cable
chamber shield treatment cable
K-4-2-2
hose gas/lig 0.250id*0.5

Cable ch chield side treatment
Cable power dc
Cable rf coil power supply
roughing v/v
clear cover pc2-cern
g12 pvd ch clear cover
rg ltr air press
gas line 1/2 vcr
hose air 1/4 id 200psi
brkt plumbing motorized lift
DISK HEATER
conn strn-rlf
clamp ar flex 8" gar v/v
clamp end ar flex 8" gate v/v
connecter coaxial
b101 wtr 30x cover plate
plate (50x200x10)
panel sus 150x200x3
blank mac
roughing line (nw40)
Cable signal
Cable emo
Cable emo
Cable emo
Cable 15pin signal
Cable 36pin signal
ion gauge signal cable
hose gas/lig 0.625 x 0.910
plate (Al) 200x450x10
72pin ribbon cable
blanket
g12 afs lid pvd
ribbon cable
clamp nw40 wing
ftp flange blanket nw40
shield upper
(IL) SHIELD LOWER 8" DURA TTN
COVER RING SST 8" 101 COVERAGE
pedestal
chimney ( clean & spray)
shield adaptor
shield sus
K-4-2-2
L-8-3-4
J-5-4
K-3-2-1
I-8-3
J-6-4
D-9-1
K-3-2-1
K-3-2-1
L-4-2-1
L-4-2-1
L-4-2-1
L-4-2-1
L-4-2-1
L-4-2-1
L-4-2-1
L-4-2-1
K-4-2-1
K-4-2-1
K-9-2-4
K-9-2-4
K-9-2-4
D-9-4
K-9-2-4
K-9-2-4
I-3-1
I-3-1
K-1-2, I-8-3
K-1-2
D-8-3
L-1-3
L-10-1
CODE/PART No.
0020-20719
0040-20811
0020-20499
0240-20308
3700-01351
0240-76735
0020-76954
0150-20038
0150-20296
0140-20327
0020-76473
3400-01068
0150-20296
0050-20954
0020-21007
0040-20165
0020-76474
3860-01145
0150-20061
0140-76169
1410-01020
0150-09678
0150-20586
0150-09600
0150-20869
0150-20672
3400-01004
0150-20090
0150-76288
0150-21666
0010-20422
0220-21854
0020-26667
0220-20692
0040-20733
3400-01098
0020-23441
0020-23352
3300-02347
0020-20699
0020-20700
0160-20000
0021-21942
0020-28676
0020-20914
0020-20913
1310-01023
0150-35227
0150-20160
0150-20576
0150-20160
0150-35227
0150-20021
006654
3400-01074
0270-20086
0140-20205
1270-01290
0010-70403
0140-20208
0690-01036
3300-01347
0020-26312
0020-26311
0020-28288
0020-24914
0020-28754
0040-21762
0020-28251
0020-28208
NO
199
200
201
202
203
204
205
206
207
208
209
210
211
212
213
214
215
216
217
218
219
220
221
222
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Thin Film
Diffusion
RT-117
RT-118
RT-119
RT-120
RT-121
RT-122
RT-123
RT-124
RT-125
RT-126
RT-127
RT-128
RT-129
RT-130
RT-131
RT-132
RT-133
RT-134
RT-135
RT-137
RT-138
RT-139
RT-140
RD-001

clamp ring 8"jmf 101 Ti plus
(IL) SHIELD UPPER 8" HI PWR
clamp ring
collimator
NSK stepping driver
pedestal
pedestal shield
SAME 4302W-002(QUZ CLAMP)
key board
chamber (chamber e)
gate v/v
gas line (chamber e)
cooling water line
Wafer detector sensor
CASSETTE SUPPORT
O-ring upper clamp ring inner
O-ring lower base ring
Barrier Top Teflon
O-ring
Liquid line
Liquid line
Thermal TC
Heater Lift Assy
INJECTOR SLEEVE
LOCATION
I-8-3
K-2-3
L-1-3, I-8-3
I-8-3
D-12-4
K-2-1
CODE/PART No.
0020-27718
0020-28206
0020-27217
0020-21528
0020-24434/A
0020-22844
0020-10187
1(4EA
K-10-1-2
K-10-1-2
K-2-1
K-10-1-2
L-9-3
J-6-5
0200-22691,B
3700-01510
3700-01511
0020-35474
0200-35712
912747-001
912584-001-D
MF4-137400-A

1
3
1
3
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
9
1
1
3
1
1
2
6
2
1
3
10
1
1
1
1
1
3
1
1
1
2
1
1
1
2
1
1
1
1
2
1
1
1
1
STEPPER
TRACK

25
1
2
2
3
3
2
1
1
1
19
1
4
64
1
1
4
18
8
1
13
1
1
1
1
1
6
2
6
IMP
3
3
1
2
1
1
4
4
4
1
1
288
90
88
20(20EA) PVD
5(5EA)
12
3(3EA)
5(5EA)
4(4EA)
5(5EA)
1(1EA)
3
CVD
1
2
2
1
1
1
6
6
2
1
2
3
14
1

5
2
1
3
4
2
7
1
20
2
3
5
1
1
1
10
12
17
1
5
1
1
4
20
1
1
1
45
5
1
1
32
34
11
7
2
4
1
1
1
5
5
12
4
2
3
1
2
1
3
17
3
2
1
3
6
3
2
2
1
2
1
1
2
2
2
2
3
3
1
3
STEPPER
TRACK
1
1
1
1
1
1
3
10
5
7
1
100
3
1
3
2
10
4
1
7
1
13
3
6
2
1
1
1
1
2
4
10
8
2
1
1
1
1
18
18
17
32
1
1
1
1
1
1
8
4
7
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1

1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
9
16
7
2
1
2
1
1
1
1
1
1
1
1
2
2
4
4
3
1
1
1
1
1
1
1
1
1
1
1
1
7
Amat
Amat
Fusion
Fusion
Fusion
Fusion
Fusion
Fusion
Fusion
Fusion
Fusion
Fusion
Fusion
Fusion
Fusion
Fusion
Amat
Amat
Amat
Amat
Amat
Lam
Lam
Lam
Amat
Fusion
Amat
Amat
Amat
Amat
Amat

2
1
1
2
1
1
1
1
1
1
1
1
1
1
1
1
1
2
1
1
4
2
1
1
1
1
2
1
4
2
1
6
2
2
1
1
1
2
2
2
1
1
1
7
Amat
Amat
Amat
Amat
Amat
Amat
Amat
Amat
Amat
Amat
Amat
Amat
Amat
Amat
Amat
Fusion
Amat
Amat
Amat
Amat
Amat
Amat
Amat
Amat
Amat
Amat
Amat
Amat
Amat
Lam
Lam
Amat
Amat
Lam
Amat
Amat
Fusion
Lam
Ushio
Amat
Amat
Amat
Amat
Amat
4
1
1
1
1
3
4
2
1
2
3
2
1
1
1
25
1
3(3EA)
9(9EA)
2
2
5
1
12

6
2
10
2
9
3
1
2
3
5
56
4
1
2
1
2
3
3
9
2
1
1
2
5
6
22
14
1
8
8
1
1
1
2
1
1
4
3
1
1
2
3
9
9
3
5
3
2
1
1
15
2
1
5
1
3
1
1
4
1
1
1
4
11
4
3
2
3
2
1
5
1

4
1
1
3
1
11
9
2
12
2
2
6
3
12
30
1
4
5
7
5
5
3
4
3
5
16
2
9
1
6
1
2
2
1
1
3
4
2
10
19
3
4
1
1
3
1
2
1
11
1
1
1
1
2
1
1
1
1
1
2
1
1
1
1
1
1
1
1
1
1
1
1

1
1
1
1
1
1
1
1
2
1
1
1
1
4
20
1
36
3
2
2
1
1
1
1
1
1
1
1
1
14
3
1
2
1
1
3
1
1
1
3
3
1
1
1
2
4
1
1
2
1
1
1
1
1
1
1
1
3
2
2
1
1
1
1
1
1
1
1
1
1
1

1
1
1
1
1
1
1
1
1
7
1
3
2
4
2
1
3
2
1
2
1
2
2
1
1
1
2
1
1
1
3
1
13
4
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
2
1
1
1
2
2
2
1

2
1
1
1
1
1
2
1
1
2
7
2
2
1
2
2
5
10
1
1
1
1
1
1
1
1
1
1
1
2
2
3
2
5
1
1
1
1
1
1
1
1
1
3
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
2
1
1
1
1
1
1
1
1
1
1
1

2
1
4
1
2
1
9
1
1
3
1
4
2
1
1
1
1
2
1
1
1
1
1
1
1
1
1
2
1
1
1
1
1
1
1
1
1
1
2
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
1
2
5
2
3
1
1
1
1
2
1
2
4
1
2
2
1
1
2
1
1(4EA)4EA
1
1
4
1
22
17
4
9
2
22
1
1
15

S/L
Mat.Code
Mat. Description
SF01
SF01
FAB4
FAB4
S9Z62470
S4T20959
S5E20066
S5J10053
NEGA DEVELOPER FILTER

6" DEV CUP ASS'Y
RING OF LIGHTS LAMP
FILAMENT
FAB5
FAB5
FAB5
FAB5
FAB5
FAB5
FAB5
SR01
SR01
SR01
SR01
S1QC0332
S3H40062
S3H40065
S3H40066
S3H40084
S3H40087
S3H40091
S1S40006
S1S40007
S1S40009
S1S40072
(CL)QTZ CAP PLATE(L) 110530086

STAGE SEAL BELLOWS(DMX421P/431P
STAGE SEAL BELLOWS(DMX421P)
DMX431P ISURATOR RING
E/R CHECK STAGE
SHIELD RING (QZ)
BELLOWS(3)
BRUSH(TOP)
BRUSH(BOTTOM)
PRIMARY PAD
WEARING INSERT RING
SR01
SF03
SF03
SF03
SF01
SF01
SF01
SF01
SF01
SF01
SF01
S2A60128
S1B70215
S1D20147
S3T40608
S2K60006
S2K60008
S2K60009
S2K60010
S2K60011
S2K60013
S2K60017
(C,C)SCR SLT SHLDR(SAME:S9Z631

SUSCEPTER UNIT, GRAPHITE(Ta20
RTP TOBOT VACUUM SWITCH
S/R-INNER-TAPER1 T7(CZ-240)
SCREW BOLT (1 1INCH 12)
4WAY MODULE S/V
O-RING 57
O-RING 35
O-RING VITON 2-375
FEEDTHRU COUNET
VALVE POPET
SF01
SF01
SF01
S2K60019
S2K60020
S2K60023
REFLETOR ELECTRON
CONTACTOR-MAGNET P/S D/T
O-RING 1,209 ID BUNA
S/L
Mat.Code
Mat. Description
LOCATION
P-3-2-4
P-3-4
P-3-2-3
P-3-2-3
Vendor Part.No
UOM
DFA1FRESSW44
385-302389-7
90330018A
D2H64J(HISCO)
EA
SET
EA
EA
10
1
1
1
P-3-4
110530000000
MLAKD154601
MLAKD154603
DMX431P-WA-F
# H105290
H 220230
E7866
3900-100919
3900-100918
"CRIC1000-A1,2
0720-718327
EA
EA
EA
EA
EA
EA
EA
EA
EA
EA
EA
2
1
1
1
3
1
2
1
1
10
20
P-3-2-3
P-3-5
P-3-4
P-3-5
P-3-4
P-3-4
P-3-4
P-3-4
P-3-4
P-3-4
P-3-4
0020-10887
30172074
ZSE2-T1-15CN
1810-223992-1
11INCH 12
4020021
2541006
109734001
E35000310
2520055
2560108
EA
EA
EA
EA
EA
EA
EA
EA
EA
EA
EA
8
1
5
2
1
4
1
1
2
1
2
A-ED-509
4500057
2542219
EA
EA
EA
1
1
1
P-3-3
P-3-3
P-3-2-3
P-3-2-3
P-3-1
P-3-2-3
P-3-2-3
P-3-2-3
P-3-4
P-3-4
P-3-4
LOCATION
BIN-NO
SF02
S3H20504
VACUUM SWITCH(ATM)
P-3-2-1
A1-09-02
SF02
SR01
SF02
SF03
SR01
SR01
SF02
SF02
SR01
SF02
SF02
S3H20591
S4T60089
S3H20063
S5A30526
S3H70063
S4T60091
S3H20442
S3M30240
S4T60007
S3H20612
S3M30070
LODE LINEAR ARM PLATE

CABLE VACUUM SENSOR
CAPACITANCE MANO (ASH)
IT CARD ASSEMBLY
VCE-4 PCB LASER ASS'Y(SENS
PROCON PUMP (IMPELLER)
FOCUS RING
LAMP BULB 750W
FILTER
WAFER PUSHIER
GROUND MESH
P-3-3
P-3-2-1
P-3-2-2
P-3-2-1
P-3-2-1
P-3-2-1
P-3-3
P-3-1
P-3-1
P-3-2-1
P-3-2-1
1
1
2
1
1
2
2
22
1
1
5
A1-09-13
A1-10-15
A1-12-15
A1-33-18
A1-36-16
A1-38-11
A1-43-15
A1-56-05
A1-57-15
A1-57-17
A1-59-14
SR01
SR01
SR01
SR01
SF03
SF02
SF03
SF03
SF02
SF02
SR01
S4T60010
S4T60084
S2A60697
S4T60008
S2A90448
S3H20589
S5J10092
S4T41238
S3H20505
S3A20057
S4T60088
VAC ARM KIT-6Inch. 19LG

ASS'Y VAC ARM MKII TAPED 5In
BLOCKER PLATE(134DX)
WAFERGARD F40 0.1UM FILTER
(CL)FILTER UV LEXAN
CLAMP GUIDE ASS'Y(AL)
SOLENOID VALVE(CHILLER)
SENSOR BRACKET
VACUUM SWITCH(VAC)(SAME;S
HEATER COVER
TEFLON SOLENOID ASSEMBLY
P-3-2-1
P-3-2-1
P-3-2-2
P-3-2-1
P-3-2-1
P-3-2-1
P-3-2-1
P-3-2-1
P-3-2-1
P-3-2-1
P-3-2-1
1
1
1
1
1
2
1
1
2
2
1
A1-60-19
A2-07-19
A2-08-20
A2-12-19
A2-13-17
A2-16-02
A2-27-11
A2-28-14
A2-34-20
A2-41-16
A2-43-13
SF01
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SF02
SR01
S5D90004
S3H20533
S3M30237
S3M30219
S3M30195
S3H20568
S3H20414
S3B80080
S3M30024
S3M30167
S1S40079
ARGON LASER TUBE

O-RING RETAINER
SI HOT RING
WALL COVER MARK IV
*(IL)SAC ETCHER SI ROOF
ELECTRON HEAD
ELECTRON HEAD
AL RING(5PK)
COVER 200MM-E-CHUCK-M
RING INSULATOT-DUAL TEF
(CL)CETAMIC WEATING
P-3-1
P-3-3
P-3-5
P-3-3
P-3-6
P-3-6
P-3-6
P-3-1
P-3-1
P-3-1
P-3-1
1
2
3
1
1
1
1
24
1
1
6
A3-02-04
A4-04-05
A4-05-01
A4-07-06
A4-09-02
A4-09-02
A4-10-04
A4-10-05
A4-10-06
A4-12-06
A8-05-02
Motor List( )
Material No
LOCATION
Vendor Part No
S1A20070
I-6-2
D1637-444
ENCODER (E) BOTTOM
KOKUSAI FURNACE
DD-802V,803V
S1A20071
UPX534M-A-A15
ENCODER (E) BOTTOM
KOKUSAI FURNACE
DD-802V,803V
S1A20072
UPH596H-A
UPH569H-A-A5
STEPPING MOTOR
KOKUSAI FURNACE
DD-802V,803V
S1A20110
4RK25RA-30RB
4RK25RA-30RB
MOTOR
KOKUSAI FURNACE
DD-802V,803V
S1A70269
040-000294-1
A3549-9215HGE
MOTOR
TEL FURNACE
ALPHA-605DN
S1A70277
040-395151-1
A3651-9015HGE
MOTOR
TEL FURNACE
ALPHA-605DN
S1A70278
040-566106-1
UPH566-A
MOTOR
TEL FURNACE
ALPHA-605DN
S1A70289
040-000266-1
S43h
SYNCHRONOUS MOTOR
TEL FURNACE
ALPHA-605DN
S1B10004
NTN SARI-12
2GB 50K
SPHERICAL BEARING
KOYO FURNACE
VF4000
10
S1B10055
2RJ4GB-A
2RJ4GB-A
REVERSIBLE MOTOR
KOYO FURNACE
VF4000
11
S1B10057
PS5913-AM
PS5913-AM
PULSE MOTOR
KOYO FURNACE
VF4000
12
S1B10060
I-6-3
R88M-H30030-B
R88M-H30030-B
SERVO MOTOR
KOYO FURNACE
VF4000
13
S1B10061
I-6-3
R88M-H10030
R88M-H10030
SERVO MOTOR
KOYO FURNACE
VF4000
14
S1B40016
AP-0021
SS21M-SSSD
MOTOR CONTROLLER
ASM FURNACE
ASM-100
15
S1B40024
MP-0003
KP56RN2-014
MOTOR
ASM FURNACE
ASM-100
16
S1B40026
MP-0001
KP56GM2-003
MOTOR
ASM FURNACE
ASM-100
17
S1B40027
MP-0002
KP56GM2-003
MOTOR
ASM FURNACE
ASM-100
18
S1B40029
I-6-3
2PK6RGN-A
2RR6RGN-A
SPEED CONTROL MOTOR
ASM FURNACE
ASM-100
19
S1B40030
I-6-3
SS301
SS301
SPEED CONTROL MOTOR
ASM FURNACE
ASM-100
20
S1B40031
I-6-3
SS31-SSSD
SS31-SSSD
SPEED CONTROL MOTOR
ASM FURNACE
ASM-100
21
S1C60015
T4033-02
LA23GGKX-3B
ACTUATOR MOTOR
QI W/F TRANSFER
A5225-150
22
S1L20068
I-6-3
4RK25GEN-AM
4RK25RGN-AM
MOTOR
MUSASHI WETSTATION
M-6000
23
S1L50060
I-6-3
AMP5
AMP5
INDEX MOTOR
SUGAI WETSTATION
S-G-1,2
24
S1L50099
5RK40RA-25RA
5RK40RA-25LA
WARM GEAR MOTOR
SUGAI WETSTATION
S-G-1,2
25
S1L50103
SGI-924
DME60
INDEX MOTOR
SUGAI WETSTATION
S-G-1,2
26
S1Q50054
2.2KW
TFO
3PHASE INDUCTANCE MOTOR
SPW DRYER ALPHA SCIENCE
ALS-7500
27
S1T30091
RHT12S70
SOLENOID VALVE
POLYFLOW TUBE WASHER
S-413
28
S2S30129
00-S0669-011
00-S0669-011
CENTER MOTOR
NOVELLUS SPUTTER
M2000,M2i
29
S2S30133
I-6-3
00-01209-133
00-01209-133
MOTOR ASSY U12
NOVELLUS SPUTTER
M2000,M2i
30
S2S40082
H-1-2
K0043-M
K0043-M
MOTOR 24VAC
AME SPUTTER
E-5500HP
31
S3A50068
257611
PH264-01B-C80
STEPPER MOTOR ASSY
EATON ASHER
M200ACU
32
S3A60022
PK-0029
RM-5685D
PULSE MOTOR
ASE ASHER
RAM 8500 I/Z
33
S3A60023
PK-0040
PH264M-31B-C22
PULSE MOTOR
ASE ASHER
RAM 8500 I/Z
34
S3A60090
PK-0027
RM-5640D
PULSE MOTOR
ASE ASHER
RAM 8500 I/Z
35
S3M10525
I-6-2
1080-01056
RB-35GM-CA35-H114
MOTOR GEAR
AME ETCHER
P5000 MARK-2,MXP
36
S3M10526
I-6-2
1080-01057
RB-35GM-CA35-H114
CVD;MOTOR GEAR 12C DC
AME ETCHER
P5000 MARK-2,MXP
37
S3M10536
0010-20339
PX245M-02AA
MOTOR
AME ETCHER
P5000 MARK-2,MXP
38
S3T10120
886-432131-1
PH544-NB-C2
ROTATION MOTOR
TEL ETCHER
5000
40
S3T30070
1886-425291-11
PX245-01A-C11
CHUCK UP/DOWN MOTOR
TEL ETCHER
UNITY I85TPATC
41
S3T30072
1886-45293-11
PX244M-01A-C4
EDGE SENSOR MOTOR
TEL ETCHER
UNITY I85TPATC
42
S3T30073
1886-455292-11
PX244M-01A-C4
PINSET MOTOR
TEL ETCHER
UNITY I85TPATC
43
S3T30074
1886-455162-13
UPH566-AM
INDEX MOTOR ASS'Y
TEL ETCHER
UNITY I85TPATC
44
S3T30075
I-6-3
1886-455194-11
UPH566H-A
H.A MOTOR
TEL ETCHER
UNITY I85TPATC
45
S3T30119
I-6-3
1886-455158-11
USAREM-A5DTE12
P.C LIFT SENSOR MORTOR
TEL ETCHER
UNITY I85TPATC
46
S4A70038
2-39-36275
PH266-01GK-C5
STEPPING MOTOR
DNS SCRUBBER
SSW-80A/AVR
47
S4A70039
2-39-39645
2CSMGK-101
STEPPING MOTOR
DNS SCRUBBER
SSW-80A/AVR
48
S4R10081
01-06-0199
01-06-0199
SHUTTER MOTOR ASS'Y
UT STEPPER
1100
49
S4R10082
01-08-00159
PX244-03AA
LEFT WINDWOR MOTOR
UT STEPPER
1100
50
S4R10083
01-08-00158
PX244-03AA
RIGHT WINDOW MOTOR
UT STEPPER
1100
51
S4R20030
01-15-02240-01
13D-04A
MOTOR-W/CONN-XL
UT STEPPER
2244i
52
S4R20031
01-15-02240-02
13D-04A
MOTOR-W/CONN-XR
UT STEPPER
2244i
53
S4R20032
01-15-02240-03
10-15-02044-H
MOTOR-W/CONN-YL
UT STEPPER
2244i
54
S4R20033
01-15-02240-04
BD-04A
MOTOR-W/CONN-YR
UT STEPPER
2244i
55
S4S30252
WL2-0021-000
USACEM-02AA2K
AC SERVO MOTOR
CANON STEPPER
FPA-1550M3
I-6-3
I-6-3
Model
MODEL
NO
LOCATION
56
S4S30298
WL1-0079-000
PH569-A
MOTOR STEPPING
CANON STEPPER
FPA-1550M3
57
S4S30306
WL1-5019-000
PH544-NA
MOTOR STEPPING
CANON STEPPER
FPA-1550M3
58
S4S30307
WL1-5024-000
EM564-NA
MOTOR STEPPING
CANON STEPPER
FPA-1550M3
59
S4S30308
WL1-5022-000
PH554-NB
MOTOR STEPPING
CANON STEPPER
FPA-1550M3
60
S4S70194
KBB00650-502
541485
MOTOR
NIKON STEPPER
1505G4D,1505 G6E
61
S4S70197
KBA00600-532
2251R012S
DC MOTOR
NIKON STEPPER
1505G4D,1505 G6E
62
S4T30097
4-4
PH266-01GK
MOTOR STEPPING(PH266-01GK)
TEL TRACK
MARK-5
63
S4T30105
PX243M01A
PX243M-01A
STEPPING MOTOR
TEL TRACK
MARK-5
64
S4T30106
PX243M01A
PX244M-01A
STEPPING MOTOR
TEL TRACK
MARK-5
65
S4T40089
BG10DB13BAABN
3P MAS T MOTOR ASSY
TEL TRACK
MARK-7,8
66
S4T40092
040-000479-1
103H7522-70E3
THETA MOTOR
TEL TRACK
MARK-7,8
67
S4T40093
1386-443498-12
103H7522-70E3
M/A THETA MOTOR
TEL TRACK
MARK-7,8
68
S4T40189
1386-443509-12
103-7555-7043
3P MAS X MOTOR ASSY
TEL TRACK
MARK-7,8
69
S4T50152
112-012
GM9413C316
GEAR MOTOR 15V
SVG TRACK
SVG-88
70
S4T50154
99-13273-01
PH264-01
RAIL MOTOR ASSY
SVG TRACK
SVG-88
71
S4T50157
112-053
PX244-02BA
GEAR MOTOR
SVG TRACK
SVG-88
72
S4T50158
99-16098-01
PK245-02BA-C1
STEP MOTOR
SVG TRACK
SVG-88
73
S4T50162
112-098
GM8714F658
GEAR MOTOR
SVG TRACK
SVG-88
74
S4T50163
112-107
GM8714F638
GEAR MOTOR
SVG TRACK
SVG-88
75
S4T50168
112-088
CYHC-62976-35-1
MOTOR
SVG TRACK
SVG-88
76
S4T50171
112-110
GM8712F660
GEAR MOTOR
SVG TRACK
SVG-88
77
S4T50178
112-083
215033
ENCODER MOTOR
SVG TRACK
SVG-88
78
S4T50182
99-22488-02
CYHC-62976-35-1
ASSY MOTOR
SVG TRACK
SVG-88
79
S4T50382
D-2-2-3
112-085
R32SSNA-R2-NS-NV-05
SPINDLE MOTOR
SVG TRACK
SVG-88
80
S4T70042
I-6-2, I-6-3
2-39-45634
HA-FE23D
AC MOTOR
DNS TRACK
SSW-80B
81
S4T70048
I-6-2
2-39-48727
A4552-9215KHGE
STEPPING MOTOR
DNS TRACK
SSW-80B
82
S4T80413
I-6-2
2-39-38906
PH544-NA-C4
STEPPING MOTOR
DNS TRACK
SSW-80B
83
S5B70065
545-3727
545-3727
DC MOTOR ASSY
HITACHI CD SEM
S-6000 SERISE
84
S5D60191
52-0243
4232B471-R1
MOTOR ASSY
KLA TENCOR OMNIMAP
RS-35C,55
85
S5E20075
20006580A
417-17-12
R-AXIS MOTOR
INSPEX W/F INSPECTION
TPC-9000,8525
86
S5G10051
FP-S5102
L163
SERVO MOTOR
WED SORTER
8602,8604
87
S5H20030
7200-1815
ODV76
MOTOR LINEAR
NANOMETRICS MEASUREMENT
M8000XSE
88
S5H20034
7200-1720
7213C204
ASSY MOTOR
NANOMETRICS MEASUREMENT
M8000XSE
89
S5H30043
39-0061
42-95
MTR-STPR
KLA TENCOR MEASUREMENT
FT-750
90
S5H30072
52-0268
5112B446
MOTOR
KLA TENCOR MEASUREMENT
FT-750
1386-443510-13
I-6-3
I-6-2
Model
Material No
D-2-2-3
Vendor Part No
MODEL
NO
Filter List( )
:
NO
Material No
Vendor Part No
Model
LOCATION
S1B10041
H610XW760XD78
L-7-2
S1B10042
910X540X1.5T
S1K10089
S1T20005
S1T20008
MODEL
MAKER
HEPA FILTER
KOYO FURNACE
VF4000
PRE-FILTER
KOYO FURNACE
VF4000
X
X
WGFV80P01
H-9-1
FILTER
DNS WETSTATION
WSW-8200,820C
MILIPORE
AB04F0103EH1
TQ0128
I-6-3
LIQUID FILTER
MITSUIBISHI IPR
D20S221
DSLK JFRPV
0.2 MICRON
I-6-3
N2 FILTER
MITSUIBISHI IPR
D20S221
PALL
S3A50018
206661
C6AM6925
I-6-3
FILTER-GF502
EATON ASHER
M200ACU
13
MILIPORE
S3L20416
775-009688-001
I-6-3
FILTER-DI
LAM ETCHER
RAINBOW/TCP 9400
S3M10387
0226-32398
I-6-2
FILTER MOTT C.22 POU
AME ETCHER
P-5000 MARK2
MOTT
PALL
S3M30067
APX-X015
AIR FILTER
AME ETCHER
C-5300 HDP
10
S4A70084
2-39-06075
I-6-3
FILTER PALL DFA DFA 0.1UM
DNS SCRUBBER
SSW-80A/AVR
11
S4T20312
024-009250-1
I-6-3
FILTER
TEL TRACK
MARK-2
MILIPORE
12
S4T40367
024-010422-1
2T-110
FILTER UNIT 2T-110-1
TEL TRACK
MARK-8
CAMBRIDGE
13
S4T80151
305 X 305 X 75D
NMPZ-24S
HEPA FILTER
DNS TRACK
629-BW/6
14
S9Z60238
DS03B-N
E2A21 066
IPA FILTER
COMMON
15
S9Z61535
WDFG 40PS
WDFG 40PSF
CHEMICAL FILTER
COMMON
MILIPORE
16
S9Z61574
LDFN1F00113E1
TQ0341
SUPER CHEMICAL FILTER
COMMON
PALL
I-6-3
100
X
PALL
OSHITARI
14
CLEARSET

Parts List for S/Parts Inventory

Uploaded by

Document Information

Original Description:

Original Title

Copyright

Available Formats

Share this document

Share or Embed Document

Sharing Options

Did you find this document useful?

Is this content inappropriate?

Copyright:

Available Formats

Parts List for S/Parts Inventory

Uploaded by

Copyright:

Available Formats

S/Parts List

UV LAMP POWER SUPPLY

INDIUM PROBE ELEMENT

(X)5"FILTER AIR INTA

1/8 NJJRPO 20PP

4141B-011 CASSETTE CLEANER (Y)BAFFLE PLATE 1

GOLD EVAPORATOR (X) BEARING NEEDLE OFFSET DRI

GOLD EVAPORATOR (X) DOME HANGER INDIVIDUAL LO

GOLD EVAPORATOR (X) O-RING

GOLD EVAPORATOR (X) T.R (2N2925)

5"LAMP HV ARC 35KW

(X) PLATE DIFFUSION HOT ELEC

(X) HOUSING SENSOR

HF VAPOR ETCH,226 (Y)S/W,FLOW METER (FIBER OPTIC

3511 3392R-041 WAFER POLISHER (X) RING 1

WAFER STEPPER (Y)5"AXII PC ASS'Y V

WAFER STEPPER (Y)5"O-RING BOTTOM OF CHUCK

(X)HOUSING CUP LOWER

L-2-1, K-9-1, D-11-2 545-5443

5"DOUBLE SENSOR PCB

4421R-004 CURING FURNACE (L)TEFLON RING

3516C-011 WAFER PROBER

3651F-031E-BEAM EVAPORATOR(X)EB GUN FILAMENTS

INTER & INTRA

INTER & INTRA

(X) RADIAL SHAFT SEAL

ROTARY PUMO (ALCATEL)

/SAP CODE/PART No.

POLE SHORT QUAD

110V POWER CABLE

Unity- MAIN Board,TEL

cable pvd shutter signal

brkt gen rack floor mount

hose gas/lig 0.250id*0.5

NEGA DEVELOPER FILTER

(CL)QTZ CAP PLATE(L) 110530086

(C,C)SCR SLT SHLDR(SAME:S9Z631

LODE LINEAR ARM PLATE

VAC ARM KIT-6Inch. 19LG

ARGON LASER TUBE

ENCODER (E) BOTTOM

ENCODER (E) BOTTOM

SPEED CONTROL MOTOR

SPEED CONTROL MOTOR

SPEED CONTROL MOTOR

WARM GEAR MOTOR

3PHASE INDUCTANCE MOTOR

SPW DRYER ALPHA SCIENCE

POLYFLOW TUBE WASHER

MOTOR ASSY U12

STEPPER MOTOR ASSY

RAM 8500 I/Z

RAM 8500 I/Z

RAM 8500 I/Z

CVD;MOTOR GEAR 12C DC

CHUCK UP/DOWN MOTOR

EDGE SENSOR MOTOR

INDEX MOTOR ASS'Y

P.C LIFT SENSOR MORTOR

SHUTTER MOTOR ASS'Y

LEFT WINDWOR MOTOR

RIGHT WINDOW MOTOR