23 16 2012 8

,,
210016

:, 700nm 50mm

,, ;
ANSYS , ,
;,
;,: 2~10N
,1%
:;;;

:
TP212.
12DOI:
10.
3969/
i
s
sn.
1004-132X.
2012.
16.
019
j.
Me
chan
i
c
sAna
l
s
i
so
fSphe
r
i
c
a
lF
i
lmS
e
n
s
i
t
i
v
eComponen
t
y
Ba
s
e
donNano-Newt
onFo
r
c
eDe
t
e
c
t
i
on
LuZhanhaoLuYonghua
Nan
i
ng Un
i
ve
r
s
i
t
fAe
r
onau
t
i
c
sandAs
t
r
onau
t
i
c
s,
Nan
i
ng,
210016
j
yo
j
:
Ab
s
t
r
a
c
tI
no
rde
rt
or
e
a
l
i
z
et
hep
r
e
c
i
s
eme
a
su
r
emen
to
ft
henN-l
eve
lmi
c
r
o-f
o
r
c
ei
nt
hei
ndus

t
r
i
a
lt
e
chno
l
og
i
c
a
lf
i
e
l
d,
ak
i
ndo
fsphe
r
i
c
a
lf
i
lm,
wi
t
habou
t700nmt
h
i
ckanda
r
ound50mmi
nd
i
ame

t
e
r,
wa
sus
eda
ss
ens
i
t
i
vec
omponen
t.
Di
s
t
o
r
twi
l
lbef
o
rmedwhennN-l
eve
lpa
r
t
i
c
l
e
swe
r
epu
tont
he
sphe
r
i
c
a
lf
i
lm.
Ac
c
o
rd
i
ngt
ot
hede
f
o
rma
t
i
ono
fsphe
r
i
c
a
lf
i
lm,
wec
ange
tt
heg
r
av
i
t
ft
hepa
r
t
i
c
l
e.
By
yo
us
i
ngt
heANSYSs
o
f
twa
r
e,
ame
chan
i
c
smode
lo
ft
hesphe
r
i
c
a
lf
i
lm wa
sbu
i
l
t.
Adop
t
i
ngt
heo
r
t
hogo

na
lexpe
r
imen
t
a
lme
t
hodt
ode
s
i
omeexpe
r
imen
t
a
ls
i
t
ua
t
i
ons,
t
henme
chan
i
c
sana
l
i
so
ft
hesphe
r
gns
ys

i
c
a
lf
i
lm wa
sp
r
oc
e
s
s
edi
nt
he
s
es
i
t
ua
t
i
ons.
Andt
hent
heexpe
r
imen
t
a
lr
e
su
l
t
swe
r
eman
i
l
a
t
edbyu
pu

s
i
ngt
hel
e
a
s
ts
r
ef
i
t
t
i
nga
l
r
i
t
hmt
ha
twa
sba
s
edont
hes
i
ngu
l
a
rva
l
uede
compo
s
i
t
i
on.
Fu
r
t
he
r
qua
go

mo
r
e,
f
i
t
t
i
ngf
o
rmu
l
a wa
sob
t
a
i
nedt
o de
s
c
r
i
bet
her
e
l
a
t
i
onsh
i
fde
f
o
rma
t
i
on,
t
he pa
r
ame
t
e
r
so
f
po
sphe
r
i
c
a
lf
i
lm,
andt
heg
r
av
i
t
fpa
r
t
i
c
l
e
s.
Compa
r
i
ngt
heexpe
r
imen
t
a
lda
t
af
r
om s
i
t
ua
t
i
onsandt
he
yo
c
a
l
cu
l
a
t
i
ngda
t
af
r
omf
i
t
t
i
ngf
o
rmu
l
a,
wec
anc
onc
l
udet
ha
twhenc
on
t
r
o
l
l
i
ngt
hef
o
r
c
ei
nt
her
angeo
f
2~10Nt
hede
t
e
c
t
i
nge
r
r
o
rwi
l
lbel
e
s
st
han1%.
Ke
r
d
s:
sphe
r
i
c
a
lf
i
lm de
f
o
rma
t
i
on;
nN-l
eve
lf
o
r
c
e;
sphe
r
i
c
a
lf
i
lm d
i
ame
t
e
r;
sphe
r
i
c
a
lf
i
lm
ywo
t
h
i
ckne
s
s

,,

, MEMS

[4]/

:,;,

;,,

FGP-GS

0
5%
[1]
ZnO
PVDF

MEMS ,

[2]; [3];

,,

0 2N
5N
10N
20N,

,
,

:
20110816

1
,

:(
51005122);

(
2008ZE52049)

(
Y1034-053);

1978

,
2

1mm, ,

,
,

:E=7.
84MPa,

=0
47, =1
3103kg/m3 , d =

50mm,t=0
7m

3
1

,,
,
, CCD
,,
,
CCD

,
,
[6]
,

,
[7],
1

,
,
, ANSYS
,,

2

,
[5],

700nm
,,
,
,
,

(
m)

(
N)

55

0.
8

10

45

(mm)

50

0.
6

0.
7

,,
2

(mm)
1(
45)
1(
45)
1(
45)
2(
55)
2(
55)
2(
55)
3(
50)
3(
50)
3(
50)

(
m)
1(
0.
6)
2(
0.
8)
3(
0.
7)
1(
0.
6)
2(
0.
8)
3(
0.
7)
1(
0.
6)
2(
0.
8)
3(
0.
7)

(
N)
1(
2)
2(
10)
3(
5)
2(
10)
3(
5)
1(
2)
3(
5)
1(
2)
2(
10)

1
2
3
4
5
6
7
8
9
K1
K2
K3
R

108.
76
136.
36
129.
8
27.
6

165.
76
89.
33
119.
83
76.
43

44.
07
220.
67
110.
2
176.
6

1
2
3
3
1
2
2
3
1
115.
63
116.
17
143.
13
27.
5

(
m)
59.
3
160
107
291
76.
6
41.
5
147
31.
4
211

2 ,
Ki(
i=1,
2,
3)
i , ,

R Ki

,
,

1979

 23 16 2012 8

,
,

, (
3)
,

8 , 31
4m, 4

0
02% ,0.
87% ,1% ,

, , ; 4

, 45

, 291m 8
,,

,,

4
,

,
[8] ,

(
1)

r s

y = x1x2x3e
p

, (
1)

,,:
l
ny = pl
nx1 +q
l
nx2 +r
l
nx3 +s

(
2)

l
ny
l
nx1
l
nx2
l
nx3

3 ,

(
1)y x1
x2
x3

p
r
s,
q

, 2

(
3)

b =17
51d-0.154t-2.184f1.003

,
b,
d ,mm;
t
m;
,
f ,
m;
N

(
3): ,
,

2 (
3)

b ,
, , 3

: ,

,

,

,
MATLAB
[9],

, 4~ 6
,

-
100%

(
4)

3 b
(
m)
59.
3

(
m)
59.
59

(% )

107

106.
68

0.
30

160
291

76.
6
41.
5

159.
71
290.
26
77.
27
41.
26

147

146.
97

211

210.
35

31.
4

1980

31.
28

0.
49
0.
18
0.
25
0.
87
0.
58
0.
02
0.
38
0.
31

(
1) 2~10N
, 1%
(
2),40~65mm
,,
,

(
3),
,
,
5

(
4),
; , ,

(
5)
,

:
[
1]Duva
lFFC,Wi
l
s
onSA,
Ens
e
l
lG,
e
ta
l.
Cha
r
a
c
t
e
r

, , 40~

65mm ,
30mm
,,
,

,
,,

,
, 4 ,
2

6 ,

,
,
,
,,
5

,
,
,

i
z
a
t
i
onso
fPZTTh
i
nF
i
lm Mi
c
r
o-a
c
t
ua
t
o
r
sUs
i
nga

S
i
l
i
c
on Mi
c
r
o-f
o
r
c
eSens
o
r[
J].
Sens
o
r
sandAc
t
ua

t
o
r
sA,
2007,
133:
35

44.

[
2]LuZhe,
LuoHong,
ChenPCY,
e
ta
l.
AnI
n
t
eg
r
a
t
ed

Pr
obeSens
o
rf
o
r Mi
c
r
o-f
o
r
c
e Me
a
su
r
emen
t[
J].
Me
a
su
r
emen
tSc
i
enc
eandTe
chno
l
ogy,
2006,
17(
4):

869

875.

[
3] , , . MEMS
[
J]. (
),
2009,
39(
1):
141

145.

[
,
,
.
4] ,
//2
[
C]
0
0
7
.
:
,
2
0
0
7:
3
5
3

3
5
6.

[
5] .
ANSYS12.
0 [M].
:,
2011.

[
6] , .[M]. :
,
2005.

[
7] , .

[
J]. ,
2011,
22(
8):
971

975.

[
8] . C [M]. :
,
1998.

[
9] , , , .MATLAB
[M].:,
2010.

( )

:,,
1986

,,
1977

1981