INTRODUCTION TO MEMS EA C415

Dimensionless Numbers Reynolds No.

LU Re = ; In MEMS Re << 1
All flows are laminar !

Mach No.

U M = ; In MEMS U << C C
flows are in sub-sonic region !

Dimensionless Numbers Knudsen No. Characterizes Slip/No-Slip condition in

flow
Mean free path of molecules kn = gap of the flow channels kn << 0.1 no slip kn ~ > 0.1 slip flow In MEMS gap 1 m, typical - room air free path = 0.1 m kn = 0.1

In effect structure is too small to allow many collisions close to the walls which is the requirement for no-slip condition

FLUIDS (DIFFICULT) Like solids they dont stay where they are put Under shear forces, fluids deforms without limits Many regimes Many Models Governing equations are partial and nonlinear Fluids possess elasticity and inertia In most MEMS application involving liquid compressibility of liquid is neglected

FLUIDS: CONCEPTS/MODELS
1. VISCOCITY Viscosity is the resistance encountered when a material change shape Viscosity can be thought of as an internal friction The amount of clingingness between the two molecules gives rise to what is known as viscosity In micro-domains more no. of available molecules per unit area and larger clingingness increases viscous resistance

du = (Newtonian fluid) dy

FLUIDS: CONCEPTS/MODELS
2. Continuity equation (Conservation of mass)
m = dv
v

dm ds = U n dt s ds = 0; (Control Vol. fix) dv + U n t v s

Using divergence theorem ( ) + U dv = 0 t v + ( U ) = 0 (Continuity equation) t

SCALING EFFECTS
# Ex 1 MICROCHANNEL
50 50(m )
2

One drop of blood = 100 l V = A L 0.1 cm 3 = 50 10 4 cm 50 10 4 cm L L = 4000cm !

SCALING EFFECTS
# Ex 2 Laminar Tubular Flow
8 lQ P = a 4 Q = vol. flow rate, P = pressure drop in the fluid over l a = diameter of tube 1 P 4 a Fluid flow in micro - domains is challanging !

SCALING EFFECTS
# Ex 3 Surface tension-Pressure relation

2r = P r 2

( ) )

Drop

2 P = ; r N / m J / m 2 ; is energy required to create a unit surface

Surface energy 4r 2 3 1 = = 3 Volume r r 4 3r Small drops are energetically unfavorable !

SCALING EFFECTS
# Ex 4 Surface tension-Pressure relation
Attachment to surfaces creates large localized forces

BUBBLE

Collapse of bubble causes cavitations and damage to surface results Smaller bubbles, comparatively with larger bubbles, have higher P (P 1/r) More damage from small bubbles due to cavitations

SCALING EFFECTS
# Ex 5 Laminar Flow
Inertia force Re (Reynold No.) = Viscous force

In MEMS, inertia forces are negligible But viscous forces are increased Hence, Low Reynolds No., Very Laminar flow

SCALING EFFECTS
# Ex 5 Laminar Flow Fluid mixing in microdomains is a problem Passive Solution: Bends and Turns Active Solution: Induce Chaos via pumping

FLUIDS (DIFFICULT) Like solids they dont stay where they are put Under shear forces, fluids deforms without limits Many regimes Many Models Governing equations are partial and nonlinear Fluids possess elasticity and inertia In most MEMS application involving liquid compressibility of liquid is neglected

FLUIDS: CONCEPTS/MODELS
1. VISCOCITY Viscosity is the resistance encountered when a material change shape Viscosity can be thought of as an internal friction The amount of clingingness between the two molecules gives rise to what is known as viscosity In micro-domains more no. of available molecules per unit area and larger clingingness increases viscous resistance

du = (Newtonian fluid) dy

FLUIDS: CONCEPTS/MODELS
2. Continuity equation (Conservation of mass)
m = dv
v

dm ds = U n dt s ds = 0; (Control Vol. fix) dv + U n t v s

Using divergence theorem ( ) + U dv = 0 t v + ( U ) = 0 (Continuity equation) t

Rate of change of momentum

dP d = Udv + U (U n )ds dt dt v s Navier Stokes (Governing equation) d Udv + U (U n )ds = ( P n + )ds + gdv dt v s s v
Net pressure force Body forces

Net shear tangential to surface

Navier Stokes Equation

d ( U ) + ( U ) = P + g + 2U + ( U ) 3 dt ds
s

Energy Conservation
K.E from motion, P.E. from gravitation Frictional dissipation due to shear at boundary Internal dissipation due to viscous forces Heat generation, heat flow

Du P D = J Q + Q Dt Dt dissipation function
heat flux

D u = internal energy/mass; = + U Dt t

U y Uw

( 2 ) U = kn

Types of flows (No Slip condition)

Incompressible
= 0 t

U = 0 (continuity equation) dU = P + g + 2U (Navier stokes) dt Coutte flow (steady viscous flow between moving plates
U = 0 neglecting P + g d 2U = 0 (Navier stokes) LINEAR! 2 dy

Types of flows (No Slip condition)

Poiseulle flow (Pressure driven flow between stationary plates)

dP let = k (constant) dx d 2U k = (Navier stokes) 2 dy 1 [ y(h y )]k Parabolic ! Ux = 2

Stokes flow

du << viscous force dt 2U = P + g +

6rU

shear forces (Viscous)

MICROFLUIDIC PUMPING

1.Electro hydrodynamic using electrophoresis and electro-osmosis (Electrokinetically driven flow)

2.Piezoelectric pumping (uses surface force instead of body forces)

ELECTROKINETIC-DRIVEN FLOW

Electrolytes & Electrokinetic effects: Electrolytes are solutions of ionic species They have special fluidic properties that arise because of possibility of coupling electric field with flow Consider Ci the concentration of ionic specie i, Zi the
charge of the ith specie, then total charge density in the solution is given by:

e = Z i qe C i
i

In normal electrolytes, far away from bounding surface, the charge density is zero Electrostatics obeys Laplace equation
2

=0

Ionic Double Layer:

Electrolyte-Solid surface interacts: Chemicalelectrostatic Interaction Contact layers are produced due to adsorption of ions Layers are called Inner/outer Helmoltz planes Inner Layer polarity (+/-) is a function of specific material and composition of electrolyte

Electrolytes & Electrokinetic effects:

As the ionic strength increases Debye length decreases

Debey length = 1m in pure water; Debey length = 0.3 nm 1 molar solution of monovalent salt.

Fluid flow channels in Lab-on-chip (MEMS) have width ~ 10 m 1 mm which is >> LD

Ionic Double Layer:

Motion of diffusion layer drags the fluid and results in electro-osmotic flow

Ionic Double Layer:

ELECTROPHORESIS:

In addition to electrolyte, low concentration ionic species (like aminoacids/proteins etc.) does not effect basic electroosmotic flow

But drift with velocity:

Vep = ep E x ; ep is electrophoretic mobility

Ionic Double Layer:

ELECTROPHORESIS

ELECTROPHORETIC SEPARATION with ELECTRO-OSMOTIC FLOW

Assume +ve diffusion layer Flow is in the direction of applied voltage

Electro-osmosis (sample plug carried down the sep. channel

Different components separated according to ep

DIFFUSION EFFECT:
Infinitesimal slab of sample will spread out in width due to diffusion
LS Length of separation channel U 0 Speed, then transition time is given by t= LS U0 Ls DLs = U0 w Ex LD

Width of sample = Dt Narrowest band possible Wmin . = D

TO HAVE SHARPEST BAND

Short column Large Electric field

Large LD (Low ionic strength) Small sample width (possible by MEMS technology)

PRESSURE EFFECTS IN MICROFLUIDIC SEPARATION CHANNELS In microfluidic separation channels, two different ionic species travels with two different speeds Different velocities results in pressure drop and consequently a Poiseullie like flow and characteristic curved profile So in case of extreme differences (upcoming high throughput Microfluidic devices) the pressure driven flow must also be accommodated in analysis