RF MEMS Capacitive Switch

http://www.tyndall.ie/print/1662

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RF MEMS Capacitive Switch

(SIMSWITCH)

SEM images of RF MEMS capacitie switches fabricated in Tyndall using post-CMOS surface micromachining process and 3D switch models from FEM software CoventorWare. SEM images of RF MEMS capacitie switches fabricated in Tyndall using post-CMOS surface micromachining process and 3D switch models from FEM software CoventorWare. Capacitive MEMS switches are micron-scale devices that employ the movement of a mechanical component to place a variable capacitance in the path of a radio-frequency transmission line, thereby either blocking or enabling transmission of an RF signal along that line. These surface micromachined devices have the potential to offer substantial advantages over more conventional semiconductor switches, such as high isolation, low loss and low power consumption. They will find applications in areas such as telecommunications, aerospace and defence, automotive and high-performance instrumentation systems. Although this technology is currently the subject of intensive worldwide research, no commercially available switch yet exists. This is largely due to the high operating voltages required by many MEMS switches, reliability concerns associated with the structures, and the high cost and complexity of packaging. Research at Tyndall has developed a low-voltage capacitive shunt microswitch for use at radio frequencies, using a low-temperature, CMOS compatible fabrication process. The switch requires an operating voltage of 10-15 V, which represents a substantial improvement on many current devices that require a voltage of up to 70 V. RF performance is also

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RF MEMS Capacitive Switch

http://www.tyndall.ie/print/1662

promising: the switches have shown an insertion loss of -0.2 dB at 30 GHz and an isolation of -19.3 dB at 30 GHz.. A very high degree of reliability has also been achieved by replacing the usual silicon nitride intermetal dielectric with silicon oxide. To date, measured lifetime has exceeded five billion switching cycles without significant performance degradation or failure.

Switch Operation Switch consists of a metalic electrode (membrane) suspended above a metalic coplanar waveguide (CPW) that is passivated with the dielectric (oxide). When the voltage is applied between the suspended electrode and the signal line the electrode collapses on the CPW due to electrostatic attraction. When the voltage is removed, the

mechanical restoring force causes it to return to the up position. In the up-position the capacitance between the electrode and the signal line is low (1-100 fF), allowing the RF signal to pass to the output port unimpeded. In the down-position the capacitance is high (1-10 pF) and the RF signal is coupled to the ground.

Contact: Further information: Dr. Conor OMahony Funding: Advanced Technical Research Programme (Enterprise Ireland) About Tyndall Overview Strategy Organisation Key figures John Tyndall History How to reach Tyndall Quality Research Research centres Applications of our research Education Overview Programmes Application Procedures Career Opportunities Student Awards and PhD Theses Student Life Module Information 2012/2013 PhD Training - National Collaborations Careers

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RF MEMS Capacitive Switch

http://www.tyndall.ie/print/1662

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