VISVESVARAYA TECHNOLOGICAL UNIVERSITY

BELGAUM, KARNATAKA

A SEMINAR REPORT ON FABRICATION OF ASPHERIC MICRO-LENS ARRAY BY EXCIMER LASER MICRO MACHINING A seminar report submitted in the partial fulfilment for the requirement of Degree in Bachelor of Engineering, MECHANICAL ENGINEERING SUBMITTED BY: TANWEER KHAN 1GA06ME051 Under Guidance Of Dr. M.S.Rajagopal BE, M.tech, PhD, FIE

DEPARTMENT OF MECHANICAL ENGINEERING GLOBAL ACADEMY OF TECHNOLOGY Raja Rajeshwari nagar, Ideal Home Township Bangalore-560098

DEPARTMENT OF MECHANICAL ENGINEERING GLOBAL ACADEMY OF TECHNOLOGY

Ideal Homes Township, Raja Rajeshwari nagar, Bangalore 98

CERTIFICATE

This is to certify that the Seminar report entitled FABRICATON OF ASPHERIC MICRO-LENS ARRAY BY EXCIMER LASER MICRO-MACHINING submitted by TANWEER KHAN bearing 1GA06ME051, bonafide student of GLOBAL ACADEMY OF TECHNOLOGY has successively completed the Seminar work in partial fulfilment for the award of BACHELOR OF ENGINEERING in mechanical Engineering prescribed by Visvesvaraya Technological University, Belgaum.

----------------------Guide and Head of the department Dr M.S. Rajagopal

ACKNOWLEDGMENT

The satisfaction and euphoria that accompany that successful completion of any task would be incomplete without mentioning that the people who made it possible. So with

deep gratitude I acknowledge all those guidance and encouragement served as beacon light and crowned my efforts with success.

I would express my sincere gratitude to Dr. Narendra Viswanath, principal of G.A.T.

With due respect, I sincerely thank to my guide and Head of the Department (HOD) Dr. M.S. Rajagopal BE, M.tech, PhD,FIE, Department of Mechanical Engineering Global Academy of Technology for his encouragement and support during this seminar work.

Lastly, I express my sincere gratitude to all those who directly or indirectly helped throughout this seminar work.

TANWEER KHAN USN: 1GA06ME051

ABSTRACT

This topic presents [1] a unique method for fabrication of aspheric micro-lens array based on a KrF 248 nm excimer laser micromachining with precise surface profile control. Based on a planetary contour scanning laser micro machining method along with a shading metal mask and sample movable stage, an array of micro-lens with precisely controlled surface profiles can be fabricated.

Each lens surface profile can be aspheric and pre-designed. In this experiments have been carried out and the machining accuracy of each lens surface profile is examined. Good surface roughness and profile accuracy are observed.

This paper [2] also demonstrates a newly developed laser scanning method is introduced for machining refractive types of micro lenses, which have pre-designed surface profiles aiming at minimizing the optical focal spot sizes. Optical testing on the fabricated aspheric micro lenses shows significant improvement in focusing capability and the focal spot sizes are approaching optical diffraction limits.

The proposed excimer laser micromachining method is flexible, versatile, and accurate, hence can be very useful and powerful in machining 3D microstructures of complex profiles and demanding profile accuracy.

CONTENTS

Page No 1: Introduction 2: Literature Survey 3: Technological aspects of laser micro machining 3.1: Definition 3.2: Construction 3.3: Operation 4: Components of typical industrial laser machining system 4.1: Process site 4.2: Laser light source5 4.3: Beam delivery system 4.4: Part handling and motion control system 4.5: Control electronics 4.6: Laser support equipment 4.7: Structure and enclosure 5: Comparing with different types of laser [2] 6: Important Parameters 6.1: Absolute Energy 6.2: Laser Power 6.3: Intensity 6.4: Wave length 7: Configurations of UV excimer laser 7.1: UV excimer laser gases 7.2: UV excimer laser discharge 7.3: Extending laser gas life 8: Photo ablation process [2] 9: Fabrication of Micro lenses [3] 10: Application of Excimer Laser Machine 1 2 3-4 3 3 4 4-6 5 5 5 5 5 6 6 6-7 7-8 7 7 8 8 8-10 8 9 10 11 12 13-16

10.1: Laser Eye (or excimer laser) Surgery 10.2: Biological Matter and Organic Compounds 10.3: Manufacturing of Micro Electronic Chip 10.4: Marking 10.5: Drilling 11: Advantages 11.1: Unique Properties of Excimer Laser Radiation 11.2: Resulting Benefits in Materials Processing 12: Disadvantages 12.1: Discharge Circuit 12.2: Toxic Laser Gas 12.3: Managing high-power UV 13: Future technology 14: Conclusion 15: Reference

13 14 14 15 16 16-17 16 17 17 17 17 17 18 19 20

LIST OF FIGURES
1: Fig.1 High intensity of laser beam 2: Fig.2 Operation of excimer laser micromachining 3: Fig.3 comparing different types of laser [2] 4: Fig.4 Typical excimer laser configuration [1] 5: Fig.5 Discharge of laser 6: Fig.6 The photo ablation process [2] 7: Fig.7 Fabricated micro lenses [4] 8: Fig.8 Shows measured 3D profile of lens [5] 9:Fig.9 Experimental setup [5] 10: Fig.10 Concept of eye surgery 11: Fig.11 marking on ceramic chip 12: Fig.12 marking on nail polish cap 13: Fig.13 drill holes on 75 micron thick plastic 11 12 12 14 15 15 16 3 4 6 8 9 11