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Specifications Instruments (AC1) 100 to 240 VAC, 50/60 Hz, 240 W max. consumption Fuse: 250VT 10A Reference vacuum pumps (AC2) 110 V version: 100 120V, 50/60 Hz, 1100 W max. consumption Fuse: 250VT 10A 220 V version: 200 240V, 50/60 Hz, 1100 W max. consumption Fuse: 250VT 10A Utility pump (AC3) 110 V version: 100 120V, 50/60 Hz, 800 W max. consumption Fuse: 250VT 10A 220 V version: 200 240V, 50/60 Hz, 800 W max. consumption Fuse: 250VT 10A Drive air 0.7 to 1 MPa (100 to 150 psi) Pressure supply requirements Test gas Nitrogen or air, 0.45 to 1 MPa (65 to 150 psi), clean and dry (instrument grade minimum, high purity preferred) 20 C to 26 C Reference bench 173 kg (380 lb) approx. (with turbo pump and controller installed) Weight Control cabinet 105 kg (230 lb) approx. Utility and roughing vacuum pumps 19 kg (42 lb) each Reference bench 145 cm H x 122 cm W x 76 cm D (57 in. x 48 in. x 30 in.) Dimensions Control cabinet 124 cm H x 56 cm W x 66 cm D (49 in. x 22 in. x 26 in.) Overall 1 to 380 kPa (0.3 to 120 inHg) Pressure ranges PG7601 10 to 380 kPa (3 to 120 inHg)

Power requirements

Operating temperature range

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FPG8601 1 to 15 kPa (0.2 to 4.5 inHg) Operating medium Nitrogen or air TEST(+) port Quick connector (1/4 in. NUPRO SS-QC4-B1-400) Pressure connections TEST(-) port Quick connector (1/4 in. NUPRO SS-QC4-B1-400) CD conformance PG7601 Piston Gauge Specifications Ambient and piston-cylinder condition measurements Range Ambient: 0 C to 40 C Piston-cylinder module: 0 C to 40 C Temperature Resolution Ambient: 0.1 Piston-cylinder module: 0.01 Measurement uncertainty Ambient: 1 Piston-cylinder module: 0.1 Range 70 kPa to 110 kPa Barometric pressure Resolution 10 Pa Measurement uncertainty 140 Pa Range 5 to 95% RH Relative humidity Resolution 1% RH Measurement uncertainty 10% RH Range 4.5 mm Piston position Resolution 0.1 Mm Available, must be specified

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Measurement uncertainty 0.2 mm Range 2 to 99 rpm Piston rotation (rate and deceleration) Resolution 1 rpm With on-board gauge Range 0 to 20 Pa Resolution 0.01 Pa Measurement uncertainty 0.1 Pa or 10% of reading, whichever is greater Reference vacuum With external capacitance diaphragm gauge Range 0 to 13.3 Pa (100 mTorr) Resolution 0.01 Pa (0.01 mTorr) Measurement uncertainty 0.05 Pa (0.38 mTorr) Piston-cylinder module: PC-7100/7600-10 Nominal pressure to mass Operation Piston material Cylinder material Nominal diameter Nominal area Mounting system Typical drop rate Piston assembly nominal mass Mass set: masses > 50g Material Finish Uncertainty in measured values 304L non-magnetic stainless steel Electropolished 5 ppm or 1 mg, whichever is greater 10 kPa/kg Gas operated, gas lubricated Tungsten carbide Tungsten carbide 35 mm 1,000 mm2 Positive free deformation 0.1 mm/min 0.5 kg

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FPG8601 General Specifications Ambient and piston-cylinder condition measurements Lubrication gas Range: 0 C to 40 C Resolution: 0.1 C Accuracy: 0.2 C Temperature Piston-cylinder Range: 0 C to 40 C Resolution: 0.01 C Accuracy: 0.1 C Relative humidity Range: 5 to 95% RH Resolution: 1% RH Accuracy: 10 %RH Range: 13.3 Pa (100 mTorr) Resolution: 0.001 Pa (0.01 mTorr) Accuracy: 0.06 Pa (0.45 mTorr) Range: 200 kPa Resolution: 1 Pa Accuracy: 0.1 kPa

Vacuum Ambient and lubrication pressure sensor

Pressure measurement and control specifications 10 to 380 KPA, PG7601 and PPC3-700K Sensitivity Precision Measurement uncertainty Control set point increments Stability of set pressure Typical control set point time 0.01 Pa + 0.5 ppm (0.01 Pa + 2 ppm) see the piston-cylinder calibration report and current revision of DHI Technical Note 7920TN01. 1 kPa 1 Pa 60 to 180 seconds

Sensitivity: The smallest variation in input detectable in output. Precision: Combined linearity, hysteresis, repeatability. Measurement uncertainty: Maximum deviation of the indicated pressure from the true value of applied pressure including all sources of uncertainty combined and expanded (k=2) following the ISO "Guide to the Expression of Uncertainty in Measurement." 1 to 15 KPA, FPG8601 and PPC3-100K Resolution Precision 0.01 Pa (2 ppm + 50 mPa)

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Measurement uncertainty Control set point increments Stability of set pressure Typical control set point time

0.008% of reading or 0.3 Pa (0.0001 inHg) , whichever is larger 1 Pa 1 Pa (0.0003 inHg) 60 to 180 seconds