An Emerging Dimension of Internet-ofThings System Chemical MEMS Sensors

Chih-Ting Lin Associate Professor Department of Electrical Engineering National Taiwan University

Outline
Introduction Devices for Internet-of-Thing System CMOS Integrated Chemical Sensing System
MEMS Chemical Sensors CMOS-MEMS Biomolecular Sensors

Conclusion

Introduction
3S in 3C
Simple Secure Smart

IBM: smart planet

Ability to harness data giving competitive advantages

Intel: extended computing technology

Connect and enrich the lives on earth

How to be Smart?
Learning from natures

Proposed Systems
Internet of Things (IoT) Machine-to-Machine (M2M)

Outline
Introduction Devices for Internet-of-Thing System CMOS Integrated Chemical Sensing System
MEMS Chemical Sensors CMOS-MEMS Biomolecular Sensors

Conclusion

Devices for Internet-of-Thing System

Scalable
Orders of magnitude more (volume and variety)

Sustainable
Orders of consumption less

Smart
Autonomous and self-regulated

Technologies in IoT Devices

Nature of de-centralization Trend of miniaturization Ubiquity of installation
Cost/measurement

Sensing

2.5 9

9 90

MCU MCU(MSP430) (MSP430) RF(Zigbee) (Zigbee) RF GasSensor Sensor Gas (Fiagro) (inkjet printed)

Performance

Communication
250 90

Computation

Unit: mW Unit: mW

MEMS Devices
Boost the wave of smart technologies
Acceleration, pressure, and gyros Developed with over 20-year MEMS research Major at the physical quantity sensing

Freescale accelerometer

STMicro gyroscope

MicroSesnorSystem Pressure sensor

Something Missing
Another dimension of worlds: chemical sensing
An emerging research field and market Sensitivity, selectivity, and reliability

In networking system
Limited resources Local calibration Collaborative sensing

10

Outline
Introduction Devices for Internet-of-Thing System CMOS Integrated Chemical Sensing System
MEMS Chemical Sensors CMOS-MEMS Chemical Sensors

Conclusion

Why Chemical Sensing in MEMS?

Harness the momentum of CMOS industries
MEMS

12

MEMS Chemical Sensors

Surface acoustic wave (SAW) sensors
Based on piezoelectric resonators Different recognition materials to promote selectivity

Afzal, et al., Analytica Chimica Acta, 2013

E-Nose Based on SAW Sensors

Multiple sensing devices for different targets

Hao et al., Sensors Actuators B, 2010 Pietrantonio et al., Biosensors Bioelectronics, 2013

MEMS Chemical Sensors

Piezoresistive membrane with recognition polymers

Guo et al., Sensors Actuators B, 2011

MEMS Chemical Sensors

Capacitive micromachined ultrasonic transducer (CMUT)

Park et al., Sensors Actuators B, 2011

CMOS-MEMS Chemical Sensors

CMOS-MEMS capacitive humidity sensors

Lazarus et al., J Microelectromechanical Systems, 2010

CMOS-MEMS Biomolecular Sensors

CMOS compatible biomolecular detection technology
Microcantilever biosensors

Zheng, et al., Nature Biotechnology, 2005 Boisen and Thundat, Materials Today, 2009

Fully Integrated Microcantilever Biosensors

CMOS Integrated Design
Piezoresistor can be used to monitor microcantilever deflection 14430A Au/Ti 3000A+500A M1 : TiN(ARC)/Al/TiN&Ti(glue layer) 6650A ILD-BPTEOS 4280A N+ Poly 2 (Resistance) 1800A Oxide 370A WSix/Poly 1 2750A Etching Field oxide 2900A position P-type (100) Silicon substrate

Fully Integrated Microcantilever Biosensors

Huang et al., Sensors Actuators B, 2013

Fully Integrated Microcantilever Biosensors

Fully integrated with CMOS circuits
Analog interface circuit Full functional micro-controller (8051 core) 433MHz OOK TX/RX Micro-cantilever biosensing capability

Huang et al., Sensors Actuators B, 2013

Conclusion
IoT systems offer a value-up momentum for MEMS technologies A paradigm shift for sensor designs is needed in IoT
Communication promotes collaborative sensing

MEMS platform offers a vehicle for devices in IoT systems

Low cost, low power, and high computational capability

CMOS-MEMS chemical sensor is an emerging direction to enrich IoT systems