4 : PRINSIP DASAR SENSOR

Program Studi Fisika

FI 365 FI 365 FI 365 FI 365 SISTEM INSTRUMENTASI SISTEM INSTRUMENTASI SISTEM INSTRUMENTASI SISTEM INSTRUMENTASI
Waslaluddin, dkk
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PRINSIP DASAR
ISI KULIAH
Sensor Mekanik
Sensor Elektrik
Sensor Temperatur dan Radiasi
Sensor Magnetik dan Kimia
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PRINSIP DASAR
SENSOR MEKANIK
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PRINSIP DASAR
SENSOR MEKANIK:
Velocity and Acceleration Velocity and Acceleration
Capacitive Accelerometers
Piezoresistive Accelerometers
Piezoelectric Accelerometers
Thermal Accelerometers
Heated-Plate Accelerometer
Heated-Gas Accelerometer
Velocity and Acceleration Velocity and Acceleration
Capacitive Accelerometers
Piezoresistive Accelerometers
Piezoelectric Accelerometers
Thermal Accelerometers
Heated-Plate Accelerometer
Heated-Gas Accelerometer
Pressure Sensors Pressure Sensors
Mercury Pressure Sensor
Piezoresistive Sensors
Capacitive Sensors
VRP Sensors
Optoelectronic Sensors
Vacuum Sensors
Pirani Gauge
Pressure Sensors Pressure Sensors
Mercury Pressure Sensor
Piezoresistive Sensors
Capacitive Sensors
VRP Sensors
Optoelectronic Sensors
Vacuum Sensors
Pirani Gauge
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Gyroscopes
Rotor Gyroscope
Monolithic Silicon Gyroscopes
Optical Gyroscopes
Gyroscopes
Rotor Gyroscope
Monolithic Silicon Gyroscopes
Optical Gyroscopes
Force, Strain, and Tactile Sensors Force, Strain, and Tactile Sensors
Strain Gauges
Tactile Sensors .
Piezoelectric Force Sensors
Force, Strain, and Tactile Sensors Force, Strain, and Tactile Sensors
Strain Gauges
Tactile Sensors .
Piezoelectric Force Sensors
Pirani Gauge
Ionization Gauges
Gas Drag Gauge
Pirani Gauge
Ionization Gauges
Gas Drag Gauge
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PRINSIP DASAR
SENSOR MEKANIK:
Flow Sensors Flow Sensors
Thermal Transport Sensors
Ultrasonic Sensors
Electromagnetic Sensors
Microflow Sensors
Breeze Sensor
Coriolis Mass Flow Sensors
Flow Sensors Flow Sensors
Thermal Transport Sensors
Ultrasonic Sensors
Electromagnetic Sensors
Microflow Sensors
Breeze Sensor
Coriolis Mass Flow Sensors
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Coriolis Mass Flow Sensors
Drag Force Flow Sensors
Coriolis Mass Flow Sensors
Drag Force Flow Sensors
Acoustic Sensors Acoustic Sensors
Resistive Microphones
Condenser Microphones
Fiber-Optic Microphone
Piezoelectric Microphones
Electret Microphones
Solid-State Acoustic Detectors
Acoustic Sensors Acoustic Sensors
Resistive Microphones
Condenser Microphones
Fiber-Optic Microphone
Piezoelectric Microphones
Electret Microphones
Solid-State Acoustic Detectors
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PRINSIP DASAR
SENSOR MEKANIK:
Occupancy and Motion Detectors Occupancy and Motion Detectors
Ultrasonic Sensors
Microwave Motion Detectors
Capacitive Occupancy Detectors
Triboelectric Detectors
Optoelectronic Motion Detectors
Visible and Near-Infrared Light Motion Detectors & Far-IR Motion Detectors
Occupancy and Motion Detectors Occupancy and Motion Detectors
Ultrasonic Sensors
Microwave Motion Detectors
Capacitive Occupancy Detectors
Triboelectric Detectors
Optoelectronic Motion Detectors
Visible and Near-Infrared Light Motion Detectors & Far-IR Motion Detectors
Position, Displacement, and Level Position, Displacement, and Level
Potentiometric Sensors
Position, Displacement, and Level Position, Displacement, and Level
Potentiometric Sensors
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Potentiometric Sensors
Gravitational Sensors
Capacitive Sensors
Inductive and Magnetic Sensors
LVDT and RVDT
Eddy Current Sensors & Transverse Inductive Sensor
Hall Effect Sensors & Magnetoresistive Sensors
Optical Sensors
Optical Bridge & Proximity Detector with Polarized Light
Fiber-Optic Sensors & FabryPerot Sensors
Grating Sensors & Linear Optical Sensors (PSD)
Ultrasonic Sensors
Radar Sensors : Micropower Impulse Radar & Ground-Penetrating Radar
Thickness and Level Sensors : Ablation & Thin-Film & Liquid-Level Sensors
Potentiometric Sensors
Gravitational Sensors
Capacitive Sensors
Inductive and Magnetic Sensors
LVDT and RVDT
Eddy Current Sensors & Transverse Inductive Sensor
Hall Effect Sensors & Magnetoresistive Sensors
Optical Sensors
Optical Bridge & Proximity Detector with Polarized Light
Fiber-Optic Sensors & FabryPerot Sensors
Grating Sensors & Linear Optical Sensors (PSD)
Ultrasonic Sensors
Radar Sensors : Micropower Impulse Radar & Ground-Penetrating Radar
Thickness and Level Sensors : Ablation & Thin-Film & Liquid-Level Sensors
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PRINSIP DASAR
SENSOR TEKANAN (PRESSURE SENSOR):
Definisi makroskopis Tekanan (P) = Gaya mengenai permukaan
Satuan luas
P = F/A
Definisi mikroskopis Tekanan (P) berdasar teori kinetik gas =
Total energi kinetik molekul gas mengenai permukaan persatuan volume
P = 2/3 (E /V) = NRT
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P = 2/3 (E
k
/V) = NRT
Ek = energi kinetik molekul gas
V = volume gas
N = jumlah molekul gas
R = konstanta gas
T = temperatur gas
Satuan tekanan (P):
1 Pa=1.4510.4 lb/in
2
=9.86910.6 atm=7.510.4 cm Hg.
1 atm=760 torr=101,325 Pa.
1 psi=6.89103Pa=0.0703 atm.(sistem US)
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PRINSIP DASAR
Bellow & Membran Strain-gage Pressure Sensor
Z : defleksi
r : jari-jari membran
S : tensi pada membran
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77
plat tipis
membran
S : tensi pada membran
g : tebal membran
: stress pada membran
Untuk plat :
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PRINSIP DASAR
Membran/diaprahm Pressure Sensor
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PRINSIP DASAR
Membran/diaprahm Pressure Sensor
Defleksi yang kecil ditengah-tengah membran jari-jari membran r
n
berubah
Untuk
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Untuk

dimana
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PRINSIP DASAR
Capacitive Transduction
d
A
C
r o
=
( )
( )
( )
2 2
3
2
16
1 3
r R
Eh
P r y

=

Bagaimana transduksi P C ?
d
A = r
2
d y(r)
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10 10


=

=
R
r o
R
r o
d
r y
rdr
d
dr
r y d
r
C
0 0
) (
1
2
) (
2


...
) (
1
) (
1
... 1
1
1
+
|

\
|
+ =

+ + =

rdr
d
r y
d
r y
rdr
x
x
Maka:
Ingat pendekatan
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PRINSIP DASAR
Capacitive Transduction
( )
( )
(
(

+ =
(
(

+ =
|

\
|
=

=


P
R R
rdr r y rdr C
rdr
d
r y
d
d
r y
rdr
C
r o
R R
r o
R
r o
R
r o
6 2 2
0 0
1 2 1 2
) (
1
2
) (
1
2



Sehingga:
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11 11
( )
( )
(

+ =
(

+ =

P
Edh d
rdr r y
d
rdr
d
C
r o r o
3
0 0
16 2
atau
( )
P
h Ed
R
d
R
P C
r o r o
3 2
6 2 2
16
1
) (

+ =
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M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
PRINSIP DASAR
Capacitive Pressure Sensor
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
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T
R
U
M
E
N
T
A
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I
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I
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T
E
M

I
N
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T
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M
E
N
T
A
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I
12 12
S
I
S
T
E
M

I
N
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T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
PRINSIP DASAR
Piezoresistive Transduction
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
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T
R
U
M
E
N
T
A
S
I
13 13
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
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I
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I
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T
E
M

I
N
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U
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E
N
T
A
S
I
PRINSIP DASAR
Piezoresistive Transduction
and are the
transversal
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
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T
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U
M
E
N
T
A
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I
14 14
and are the
perpendicular/transversal
and parallel/longitudinal
components of stress
longitudinal
and are the
perpendicular and parallel
piezoresistive coefficients
S
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E
M

I
N
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R
U
M
E
N
T
A
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I
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I
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T
E
M

I
N
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T
R
U
M
E
N
T
A
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I
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I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
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I
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I
S
T
E
M

I
N
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T
R
U
M
E
N
T
A
S
I
PRINSIP DASAR
Piezoresistive Transduction - Circuit
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
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I
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I
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T
E
M

I
N
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M
E
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A
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I
15 15
R
a
& R
c
// stress
R
b
& R
d
stress
S
I
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E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
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I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
PRINSIP DASAR
Piezoresistive Transduction - Circuit
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
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I
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I
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T
E
M

I
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A
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I
16 16
One chip Si-Piezoresistive sensor and signal conditioning
Pressure range: up to 5,2 bar Absolute
Operating temperature: -40 to 125 C
Supply voltage: 5 V 0.25 V
Transfer function: linear, ratiometric
Accuracy over full-scale: 1 % full span (10 to 85 C)
S
I
S
T
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M

I
N
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T
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U
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E
N
T
A
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I
S
I
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T
E
M

I
N
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T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
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T
R
U
M
E
N
T
A
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I
S
I
S
T
E
M

I
N
S
T
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U
M
E
N
T
A
S
I
PRINSIP DASAR
Position, Displacement, and Level Position, Displacement, and Level
Potentiometric Sensors
Gravitational Sensors
Capacitive Sensors
Inductive and Magnetic Sensors
LVDT and RVDT
Eddy Current Sensors & Transverse Inductive Sensor
Hall Effect Sensors & Magnetoresistive Sensors
Optical Sensors
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
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T
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U
M
E
N
T
A
S
I
17 17
Optical Sensors
Optical Bridge & Proximity Detector with Polarized Light
Fiber-Optic Sensors & FabryPerot Sensors
Grating Sensors & Linear Optical Sensors (PSD)
Ultrasonic Sensors
Radar Sensors :
Micropower Impulse Radar & Ground-Penetrating Radar
Thickness and Level Sensors :
Ablation & Thin-Film & Liquid-Level Sensors
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
PRINSIP DASAR
Displacement Sensor
Linear Variable Differential Transformer (LVDT)
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
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E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
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I
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I
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M

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18 18
Basic Principles:
a. AC current flows through primary coil, due to excitation voltage e
ex
.
b. Current is induced through a pair of secondary coils (e
o1
, e
o2
).
c. The frequency of the induced AC current is the same as the excitation
frequency.
d. The amplitude of the induced current in each secondary coil depends
upon the location of the movable core.
S
I
S
T
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M

I
N
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M
E
N
T
A
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I
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I
N
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E
N
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A
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I
S
I
S
T
E
M

I
N
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U
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E
N
T
A
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I
S
I
S
T
E
M

I
N
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U
M
E
N
T
A
S
I
PRINSIP DASAR
Displacement Sensor
Linear Variable Differential Transformer (LVDT)
If core is located in null position then secondary voltages are equal, as
illustrated below.
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
S
I
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E
M

I
N
S
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U
M
E
N
T
A
S
I
S
I
S
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E
M

I
N
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U
M
E
N
T
A
S
I
S
I
S
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E
M

I
N
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R
U
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E
N
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A
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I
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I
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A
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19 19
S
I
S
T
E
M

I
N
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U
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E
N
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A
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I
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I
S
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E
M

I
N
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T
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U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
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T
R
U
M
E
N
T
A
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I
S
I
S
T
E
M

I
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E
N
T
A
S
I
PRINSIP DASAR
Linear Variable Differential Transformer (LVDT)
If the two secondary coils are connected in anti-series (+ + and - -) then the
resulting output is the difference between the outputs of the individual seconary
coils. The amplitude depends upon the position of the rod.
(There is also a Phase shift between e
ex
and e
o
as we will show later)
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
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A
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I
20 20
S
I
S
T
E
M

I
N
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R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
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T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
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T
R
U
M
E
N
T
A
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I
S
I
S
T
E
M

I
N
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E
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A
S
I
PRINSIP DASAR
Linear Variable Differential Transformer (LVDT)
The input, x
i
, is the MOTION of the rod to which the core is connected.
The output, e
o
, is the voltage difference between the induced voltages in the two
secondary loops.
Note: The output is inherently AM modulated
(The carrier is AC excitation of the primary loop).
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
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T
R
U
M
E
N
T
A
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I
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I
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T
E
M

I
N
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T
R
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E
N
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A
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I
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I
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21 21
Note: Phase Shift occurs as x
i
crosses null point
S
I
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T
E
M

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E
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T
A
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I
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I
N
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E
N
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A
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I
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I
S
T
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M

I
N
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T
R
U
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E
N
T
A
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I
S
I
S
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E
M

I
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E
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A
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I
PRINSIP DASAR
Linear Variable Differential Transformer (LVDT)
Simulated Output
Generator00
Y/t Chart00
Generator01
25 50 75 100 125 150 175
1.00
0.75
0.50
0.25
0.00
-0.25
-0.50
-0.75
-1.00
5.0
2.5
0.0
-2.5
-5.0
x
i

e
o

F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
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T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
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T
R
U
M
E
N
T
A
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I
S
I
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T
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22 22
FFT00 Formula00 Y/t Chart01
ms
25 50 75 100 125 150 175
Hz
250 500 750 1000 1250 1500 1750 2000 2250
0.9
0.8
0.7
0.6
0.5
0.4
0.3
0.2
0.1
0.0
2.25
2.00
1.75
1.50
1.25
1.00
0.75
0.50
0.25
0.00
S
I
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M

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N
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U
M
E
N
T
A
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I
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I
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M

I
N
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T
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U
M
E
N
T
A
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I
S
I
S
T
E
M

I
N
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E
N
T
A
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I
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I
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I
PRINSIP DASAR
Linear Variable Differential Transformer (LVDT)
x
i

e
o,1

1.00
0.00
-1.00
1.00
0.00
-1.00
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
S
I
S
T
E
M

I
N
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T
R
U
M
E
N
T
A
S
I
S
I
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M

I
N
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U
M
E
N
T
A
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I
S
I
S
T
E
M

I
N
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E
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T
A
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I
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I
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A
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I
23 23
e
o,2

e
o

ms
25 50 75 100 125 150 175
1.00
0.00
-1.00
1.00
-0.75
S
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E
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A
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I
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I
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N
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E
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A
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I
S
I
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M

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E
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A
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I
S
I
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T
E
M

I
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U
M
E
N
T
A
S
I
PRINSIP DASAR
Linear Variable Differential Transformer (LVDT)
1.00
0.00
-1.00
1.00
Motion
LVDT output
How Do We Recover the LVDT Signal?
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
S
I
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T
E
M

I
N
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T
R
U
M
E
N
T
A
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I
S
I
S
T
E
M

I
N
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T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
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T
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U
M
E
N
T
A
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I
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I
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A
S
I
24 24
ms
25 50 75 100 125 150 175
-0.75
4
0
-4
1.5
0.0
-1.5
Demod LVDT
Recovered Motion

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I
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M

I
N
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T
R
U
M
E
N
T
A
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I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
PRINSIP DASAR
Linear Variable Differential Transformer (LVDT)
Motion
LVDT output
0.8
0.4
0.0
0.35
0.00
LVDT Signal Recover Frequency Domain
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
25 25
Demod LVDT
Recovered
Motion
Hz
250 500 750 1000 1250
Y/t Chart 0 Y/t Chart 1
Y/t Chart 2 Y/t Chart 3
0.00
1.25
0.00
1.25
0.00
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
PRINSIP DASAR
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
26 26
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
PRINSIP DASAR
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
27 27
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
PRINSIP DASAR
Displacement Sensor
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
28 28
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
PRINSIP DASAR
Displacement Sensor
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
29 29
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
PRINSIP DASAR
Displacement Sensor
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
30 30
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
PRINSIP DASAR
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
31 31
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
PRINSIP DASAR
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
32 32
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
PRINSIP DASAR
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
33 33
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
PRINSIP DASAR
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
34 34
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
PRINSIP DASAR
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
35 35
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
PRINSIP DASAR
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
36 36
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
PRINSIP DASAR
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
37 37
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
PRINSIP DASAR
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
38 38
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
PRINSIP DASAR
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
39 39
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
PRINSIP DASAR
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
40 40
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
PRINSIP DASAR
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
41 41
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
PRINSIP DASAR
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
F
I

3
6
5
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
S
I
S
T
E
M

I
N
S
T
R
U
M
E
N
T
A
S
I
42 42