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Mass Flow Controller with Electrical Shut-Off Valve

Datasheet F-201CS

> Introduction
Bronkhorst High-Tech model F-201CS Mass Flow Controllers (MFCs) are suited for precise control of virtually all conventional process gases. The MFC consists of a thermal mass flow sensor, a precise control valve and digital electronics with signal processing, PID control and optional fieldbus conversion. Additionally, the F-201CS features an integrated, electrical shut-off valve. As a function of a setpoint value, the flow controller swiftly adjusts the desired flow rate. The mass flow, expressed in normal litres or millilitres per minute or per hour, is provided as analog signal or digitally via RS232 or fieldbus. The flow range, wetted materials and orifice size for the control valve are determined depending of the type of gas and the process conditions of the application.

> Technical specifications


Measurement / control system
Accuracy (incl. linearity) (Based on actual calibration) Turndown Multiple fluid capability Repeatability Settling time (controller) Max. Kv-value Control stability Temperature range Temperature sensitivity (nominal range) Leak integrity (outboard) Attitude sensitivity Warm-up time : 1 : 50 : storage of max. 8 calibration curves : < 0,2% Rd : 1...2 seconds; option: down to 500 msec -2 : 4,4 x 10 : 0,1% FS (typical for 1 ln/min N2) : -10+70C : zero: < 0,05% FS/C; span: < 0,05% Rd/C : < 2 x 10-9 mbar l/s He : max. error at 90 off horizontal 0,2% FS at 1 bar, typical N2 : 30 min. for optimum accuracy 2 min. for accuracy 2% FS Shut-off valve (N/C) Analog setpoint Analog output : 0,5% Rd plus 0,1% FS

EL-FLOW Mass Flow Controller model F-201CS


Electrical properties
Power supply (MFC) Power consumption (MFC) : +1524 Vdc 10% : max. 320 mA (at15V); max. 215 mA (at 24V); add 50 mA for Profibus, if applicable : 05 (10) Vdc, min. load impedance > 2 k; 0 (4)20 mA (sourcing), max. load impedance < 375 : 05 (10) Vdc, min. load impedance > 100 k; 0 (4)20 mA, load impedance ~250 Digital communication : standard RS232 ; options: PROFIBUS DP, DeviceNet, EtherCAT, Modbus-RTU/ASCII, FLOW-BUS : +24 Vdc, 3 W; using a shut-off control adapter reduces the power consumption

> Ranges (based on Air)


Model
F-201CS-020 F-201CS-050

minimum
0,210 mln/min 0,420 mln/min 0,840 mln/min 1,680 mln/min 4200 mln/min 8400 mln/min 16800 mln/min 0,042 ln/min 0,084 ln/min

nominal
0,220 mln/min 0,450 mln/min 0,8100 mln/min 1,6200 mln/min 4500 mln/min 81000 mln/min 162000 mln/min 0,045 ln/min 0,0810 ln/min

maximum
0,230 mln/min 0,475 mln/min 0,8150 mln/min 1,6300 mln/min 4750 mln/min 81500 mln/min 163000 mln/min 0,047,5 ln/min 0,0815 ln/min

Mechanical parts
Material (wetted parts) Pressure rating Max. P Process connections Seals Ingress protection (housing) : stainless steel 316L or comparable : 10 bar abs : 3 bar dif. : compression type or face seal male : standard : Viton; options: EPDM, Kalrez (N/C shut-off only) : IP40

F-201CS-100 F-201CS-200 F-201CS-500 F-201CS-1K0 F-201CS-2K0 F-201CS-5K0 F-201CS-10K

Although all specifications in this datasheet are believed to be accurate, the right is reserved to make changes without notice or obligation.

Intermediate ranges are available

> Model number identification F


Base 2 Controller

NAA

NNN
Nominal range Factory selected

NN

Pressure rating 0 10 bar

Ranges 1CS 010 / 015000 mln/min

Communication (I/O) A RS232 + analog (n/c control) B RS232 + analog (n/o control) D RS232 + DeviceNetTM (n/c) E RS232 + DeviceNetTM (n/o) M RS232 + Modbus (n/c) N RS232 + Modbus (n/o) P RS232 + PROFIBUS DP (n/c) Q RS232 + PROFIBUS DP (n/o) R RS232 + FLOW-BUS (n/c) S RS232 + FLOW-BUS (n/o) T RS232 + EtherCAT (n/c) U RS232 + EtherCAT (n/o) Analog output A 05 Vdc B 010 Vdc F 020 mA sourcing G 420 mA sourcing

Internal seals V Viton (factory standard) E EPDM K Kalrez (FFKM)

Connections (in/out) 1 1/8 OD compression type 2 OD compression type 3 6 mm OD compression type 8 Face seal male 9 other 0 none

Supply voltage D + 1524 Vdc

> Thermal mass flow measuring principle

The heart of the thermal mass flow meter/controller is the sensor, that consists of a stainless steel capillary tube with resistance thermometer elements. A part of the gas flows through this bypass sensor, and is warmed up heating elements. Consequently the measured temperatures T1 and T2 drift apart. The temperature difference is directly proportional to mass flow through the sensor. In the main channel Bronkhorst High-Tech applies a patented laminar flow element consisting of a stack of stainless steel discs with precisionetched flow channels. Thanks to the perfect flow-split the sensor output is proportional to the total mass flow rate.

Todays EL-FLOW series are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response (settling times t98 down to 500 msec). The basic digital pc-board contains all of the general functions needed for measurement and control. In addition to the standard RS232 output the instruments also offer analog I/O. Furthermore, an integrated interface board provides DeviceNet, PROFIBUS DP, ModbusRTU/ASCII, EtherCAT or FLOW-BUS protocols.

> State of the art digital design

T = k.Cp.m T = T2-T1 in Kelvin Cp = specific heat

m = mass flow

Functional scheme of the thermal mass flow sensor

Functional scheme of the digital PC-board

> Hook-up diagram for analog or RS232 communication

Hook-up solenoid operated valve (Supply voltage 24 Vdc)

Note: For switching the shut-off valve by fieldbus, Bronkhorst offers various solutions: using a split-cable or alternatively a shut-off control adapter with holding voltage principle. Please consult factory or contact your local distributor.

> Hook-up diagrams for fieldbus communication


For the available fieldbus options we refer to the various hook-up diagrams as indicated below. If you are viewing this datasheet in digital format, you may use the hyperlink to each of the drawings. Otherwise please visit the download section on www.bronkhorst.com or contact our local representatives.

Doc. 9.16.062

Doc. 9.16.060

Doc. 9.16.061

Doc. 9.16.098

Doc. 9.16.064

Doc. 9.16.063

> Dimensions (mm) and weight (kg)

Dimension table adapters (RS-type)

Weight: 1,1 kg

> Options and accessories


- Multi-Gas / Multi-Range option, with free configuration software. - Free software support for operation, monitoring, optimizing or to interface between digital instruments and windows software.

- IN-LINE filters for protection against particulates

- BRIGHT compact local Readout/Control modules - E-5700 / E-7000 Power Supply - Interconnecting cables for power and analog/digital communication - PiPS Plug-in Power Supply

- Shut-off Control Adapter with holding voltage principle

> Alternatives
- EL-FLOW series MFC for gases

- LOW-P-FLOW series MFC for low pressure drop applications or corrosive gas service

- Pre-assembled multi-channel solutions: series FLOW-SMS

Nijverheidsstraat 1a, NL-7261 AK Ruurlo The Netherlands T +31 (0)573 45 88 00 F +31 (0)573 45 88 08 I www.bronkhorst.com E info@bronkhorst.com

E.DS.F-201CS.1013.G

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