Microgripper

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Model Library > MEMS Module > Piezoelectric Devices

Microgripper
Introduction
This is a tutorial model of a piezoelectrically actuated microgripper with mechanical contact. The microgripper contains a piezoelectric actuator that operates in the longitudinal mode. Elongation in the longitudinal direction creates a lifting movement to the structure. Simultaneous contraction in the transversal direction closes the gripper and allows it to move objects, Ref. 1.

Model Definition
The model geometry is shown in igure 1.

Figure 1: Microgripper geometry. The part in the middle represents the piezoelectric actuator. The actuator is made of lead zirconate titanate !"#T$%&', and the gripper itself consists of polycrystalline silicon !poly$Si'. (oth materials are available in )*+S*, +ultiphysics- material libraries. The material properties are prescribed using the rotated coordinate system shown in igure ..

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Figure 2: Orientation of the coordinate system for the material. The gripper is operated by applying an electric potential difference at the piezoelectric actuator ends. /hen the arms come together, a mechanical contact is modeled including the contact pressure computations.

Results and Discussion

The applied voltage gradually increases from zero to the value of 0111 2. This causes the gripper arms to close up and eventually come in contact with each other. The final distributions of the stress and displacement magnitude in the deformed microgripper are shown in igure 3 and igure 4, respectively.

Figure 3: Logarithm of the von Mises stress in the gripper for V0 = !!! V.

Figure ": #otal displacement distri$ution at V0 = !!! V. The resulting contact pressure at the end surfaces is shown in igure %.

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Figure %: &ontact pressure at V0 = !!! V.

Notes About the COM O! Implementation

5n this e6ample you learn how to model a piezoelectric material aligned in a user$defined coordinate system and how to include contact modeling. 7ou create the geometry within )*+S*, +ultiphysics. irst, draw a .8 footprint as shown in igure 0, and then apply e6trusion to create the final 38 geometry. 9se a swept mesh as shown in igure :. 7ou set up a contact pair for two end surfaces of the gripper arms and obtain the solution via a parametric sweep over the applied voltage "0.

Figure : 'ntermediate 2( geometry

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Figure ): Meshed final geometry.

References
1. R. ;eosch<erjan and =. /urmus, >& ?ovel +icrogripper with "arallel +ovement of @ripping &rms,A #roc. Actuator $%%$& 'th International Conference on Ne( Actuators, (remen, @ermany, Bune 11C1., .11., pp. 3.1C3.4. Model Library path: MEMS_Module/Piezoelectric_Devices/microgripper

Modeling Instructions
MODEL WIZARD
1 @o to the Model Wizard window. 2 )lic< Next. 5n the Add phy!ic! tree, select "tr#ct#ral Mecha$ic!%&iezoelectric De'ice! (pzd). * )lic< Next. + ind the "t#die! subsection. 5n the tree, select &re!et "t#die!%"tatio$ary.

, )lic< -i$i!h.

.EOME/R0 1
1 5n the Model 1#ilder window, under Model 1 clic< .eo2etry 1. 2 5n the .eo2etry settings window, locate the 3$it! section. rom the Le$gth #$it list, choose 452.

)or* #lane +
1 Right$clic< Model 1%.eo2etry 1 and choose Wor6 &la$e. This gives the default wor< plane aligned with the

xy$plane at z = 1.

Rectangle +
1 5n the Model 1#ilder window, under Model 1%.eo2etry 1%Wor6 &la$e 1 right$clic< &la$e .eo2etry and choose Recta$gle. 2 5n the Recta$gle settings window, locate the "ize section. 5n the Width edit field, type 10. * ,ocate the &o!itio$ section. 5n the x7 edit field, type -5. + 5n the y7 edit field, type -1. , )lic< the 1#ild "elected button. 8 )lic< the Zoo2 Exte$t! button on the @raphics toolbar.

Rectangle $
1 5n the Model 1#ilder window, under Model 1%.eo2etry 1%Wor6 &la$e 1 right$clic< &la$e .eo2etry and choose Recta$gle. 2 5n the Recta$gle settings window, locate the "ize section. 5n the Width edit field, type 2. * 5n the 9eight edit field, type 10.

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+ ,ocate the &o!itio$ section. 5n the x7 edit field, type -1. , )lic< the 1#ild "elected button. 8 )lic< the Zoo2 Exte$t! button on the @raphics toolbar.

Rectangle ,
1 5n the Model 1#ilder window, under Model 1%.eo2etry 1%Wor6 &la$e 1 right$clic< &la$e .eo2etry and choose Recta$gle. 2 5n the Recta$gle settings window, locate the "ize section. 5n the 9eight edit field, type 16. * ,ocate the &o!itio$ section. 5n the x7 edit field, type -6. + 5n the y7 edit field, type -1. , )lic< the 1#ild "elected button. 8 )lic< the Zoo2 Exte$t! button on the @raphics toolbar.

Rectangle 1 5n the Model 1#ilder window, under Model 1%.eo2etry 1%Wor6 &la$e 1 right$clic< &la$e .eo2etry and choose Recta$gle. 2 5n the Recta$gle settings window, locate the "ize section. 5n the 9eight edit field, type 2. * ,ocate the &o!itio$ section. 5n the x7 edit field, type -2. + 5n the y7 edit field, type 19.5. , )lic< the 1#ild "elected button. 8 )lic< the Zoo2 Exte$t! button on the @raphics toolbar.

.illet +
1 5n the Model 1#ilder window, under Model 1%.eo2etry 1%Wor6 &la$e 1 right$clic< &la$e .eo2etry and choose -illet. 2 *n the object r*, select "oint 3 only. 5n the -illet settings window, locate the Radi#! section. * 5n the Radi#! edit field, type 0.2. + )lic< the 1#ild "elected button. ?e6t, use the (Dzier "olygon as instructed below. &lternatively, you can use the Dra7 Li$e tool and clic< on the top $left and top$right corners of r and the bottom$right and bottom$left corners of :il1.

/0zier #olygon +
1 5n the Model 1#ilder window, under Model 1%.eo2etry 1%Wor6 &la$e 1 right$clic< &la$e .eo2etry and choose 1;zier &olygo$. 2 5n the 1;zier &olygo$ settings window, locate the &olygo$ "eg2e$t! section. ind the Added !eg2e$t! subsection. )lic< the Add Li$ear button. * ind the <o$trol poi$t! subsection. 5n row 1, set x7 to -6.

+ 5n row 1, set y7 to 15. , 5n row 2, set x7 to -5. 8 5n row 2, set y7 to 15. = ind the Added !eg2e$t! subsection. )lic< the Add Li$ear button.

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>

ind the <o$trol poi$t! subsection. 5n row 2, set x7 to -1.

1? 5n row 2, set y7 to 19.5. 11 ind the Added !eg2e$t! subsection. )lic< the Add Li$ear button. 12 ind the <o$trol poi$t! subsection. 5n row 2, set x7 to -2. 1 ind the Added !eg2e$t! subsection. )lic< the Add Li$ear button.

1* ind the <o$trol poi$t! subsection. 5n row 2, set x7 to -6. 1+ 5n row 2, set y7 to 15. 1, )lic< the <lo!e <#r'e button. 18 )lic< the 1#ild "elected button.

Mirror +
1 5n the Model 1#ilder window, under Model 1%.eo2etry 1%Wor6 &la$e 1 right$clic< &la$e .eo2etry and choose /ra$!:or2!%Mirror. 2 Select the objects r , :il1, and b1 only. 5n the Mirror settings window, locate the I$p#t section. * Select the @eep i$p#t obAect! chec< bo6. + )lic< the 1#ild "elected button.

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12trude +
1 5n the Model 1#ilder window, under Model 1%.eo2etry 1 right$clic< Wor6 &la$e 1 and choose Extr#de. 2 5n the Extr#de settings window, locate the Di!ta$ce! :ro2 &la$e section. 5n the table, enter the following settingsE DI"/AN<E" (4BM)

2
* )lic< the 1#ild "elected button. + )lic< the .o to De:a#lt D Cie7 button on the @raphics toolbar.

, )lic< the Zoo2 Exte$t! button on the @raphics toolbar. The model geometry is now complete.

.LO1AL DE-INI/ION"

#arameters
1 5n the Model 1#ilder window, right$clic< .lobal De:i$itio$! and choose &ara2eter!. 2 5n the &ara2eter! settings window, locate the &ara2eter! section. 5n the table, enter the following settingsE NAME ED&RE""ION DE"<RI&/ION

V0

6000 V!

"pplied#volt$ge

This is a stac<ed actuator, and V0 corresponds to the number of layers multiplied by the applied potential of the layer.

DE-INI/ION"

Rotated

ystem $

1 5n the Model 1#ilder window, under Model 1 right$clic< De:i$itio$! and choose <oordi$ate "y!te2!%Rotated "y!te2. 2 5n the Rotated "y!te2 settings window, locate the "etti$g! section. ind the E#ler a$gle! (ZEDEZ) subsection. 5n the edit field, type 90 deg!.

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This coordinate system defines the orientation of the piezoelectric material-s main polarization a6is. * 5n the Model 1#ilder window, right$clic< De:i$itio$! and choose &air!%<o$tact &air. + Select (oundaries .1 and .: only. , 5n the &air settings window, clic< Acti'ate "electio$ in the upper$right corner of the De!ti$atio$ 1o#$darie! section. Select (oundaries 31 and 3: only.

MA/ERIAL"
1 5n the Model 1#ilder window, under Model 1 right$clic< Material! and choose Ope$ Material 1ro7!er. 2 5n the Material 1ro7!er window, locate the Material! section. 5n the tree, select MEM"%"e2ico$d#ctor!%&olyE"i. * Right$clic< and choose Add Material to Model from the menu. + 5n the Model 1#ilder window, right$clic< Material! and choose Ope$ Material 1ro7!er. , 5n the Material 1ro7!er window, locate the Material! section. 8 5n the tree, select &iezoelectric%Lead Zirco$ate /ita$ate (&Z/E+A). = Right$clic< and choose Add Material to Model from the menu.

!ead 3irconate Titanate 4#3T56A7

1 5n the Model 1#ilder window, under Model 1%Material! clic< Lead Zirco$ate /ita$ate (&Z/E+A). 2 Select 8omain % only. &ll other domains use polysilicon as the material.

&IEZOELE</RI< DECI<E"

#iezoelectric Material +
1 5n the Model 1#ilder window, e6pand the Model 1%&iezoelectric De'ice! node, then clic< &iezoelectric Material 1. 2 5n the &iezoelectric Material settings window, locate the <oordi$ate "y!te2 "electio$ section. rom the <oordi$ate !y!te2 list, choose Rotated "y!te2 2.

!inear 1lastic Material +

1 5n the Model 1#ilder window, right$clic< &iezoelectric De'ice! and choose the domain setting Li$ear Ela!tic Material. 2 Select 8omains 1C4 and 0CF only.

8round +
1 5n the Model 1#ilder window, right$clic< &iezoelectric De'ice! and choose the boundary condition Electrical%.ro#$d. 2 Select (oundary .3 only.

1lectric #otential +
1 5n the Model 1#ilder window, right$clic< &iezoelectric De'ice! and choose the boundary condition Electrical%Electric &ote$tial. 2 Select (oundary .0 only. 5n the Electric &ote$tial settings window, locate the Electric &ote$tial section. * 5n the

V0 edit field, type V0.

.i2ed Constraint +
1

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5n the Model 1#ilder window, right$clic< &iezoelectric De'ice! and choose the boundary condition "tr#ct#ral%-ixed <o$!trai$t. 2 Select (oundary .0 only.

Contact +
1 5n the Model 1#ilder window, right$clic< &iezoelectric De'ice! and choose the boundary condition &air!%"tr#ct#ral%<o$tact. 2 5n the <o$tact settings window, locate the &air "electio$ section. 5n the &air! list, select <o$tact &air 1.

ME"9 1

.ree Triangular +
1 5n the Model 1#ilder window, under Model 1 right$clic< Me!h 1 and choose More Operatio$!%-ree /ria$g#lar. 2 Select (oundaries 4, F, 1., 1G, .%, 3%, 30, and 44 only. 7ou can do this by selecting all boundaries on top of the geometry.

ize +
1 Right$clic< Model 1%Me!h 1%-ree /ria$g#lar 1 and choose "ize. 2 5n the "ize settings window, locate the Ele2e$t "ize section. rom the &rede:i$ed list, choose Extra :i$e. * )lic< the 1#ild "elected button.

(ept +
5n the Model 1#ilder window, right$clic< Me!h 1 and choose "7ept.

Distribution +
1 5n the Model 1#ilder window, under Model 1%Me!h 1 right$clic< "7ept 1 and choose Di!trib#tio$. 2 5n the Di!trib#tio$ settings window, locate the Di!trib#tio$ section. 5n the N#2ber o: ele2e$t! edit field, type 2. * )lic< the 1#ild "elected button.

"/3D0 1

tep +9

tationary

1 5n the Model 1#ilder window, e6pand the "t#dy 1 node, then clic< "tep 1: "tatio$ary. 2 5n the "tatio$ary settings window, clic< to e6pand the "t#dy Exte$!io$! section. Select the <o$ti$#atio$ chec< bo6. * )lic< Add. + 5n the table, enter the following settingsE <ON/IN3A/ION &ARAME/ER 21 &ARAME/ER CAL3E LI"/

r$%ge&0'600'6000(

, 5n the Model 1#ilder window, right$clic< "t#dy 1 and choose "ho7 De:a#lt "ol'er. (efore setting up the solver, define a plot to display while solving.

RE"3L/"

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,D #lot 8roup +
1 5n the Model 1#ilder window, right$clic< Re!#lt! and choose 2 Right$clic< D &lot .ro#p 1 and choose "#r:ace. D &lot .ro#p.

Right$clic< Re!#lt!% D &lot .ro#p 1%"#r:ace 1 and choose De:or2atio$. * 5n the De:or2atio$ settings window, locate the "cale section. + Select the "cale :actor chec< bo6.

"/3D0 1

tep +9

tationary

1 5n the Model 1#ilder window, under "t#dy 1 clic< "tep 1: "tatio$ary. 2 5n the "tatio$ary settings window, locate the Re!#lt! While "ol'i$g section. Select the &lot chec< bo6.

ol:er +
1 5n the Model 1#ilder window, e6pand the "t#dy 1%"ol'er <o$:ig#ratio$!%"ol'er 1%Depe$de$t Cariable! 1 node, then clic< 2od1FC. 2 5n the -ield settings window, locate the "cali$g section. rom the Method list, choose Ma$#al. * 5n the "cale edit field, type 1000. + 5n the Model 1#ilder window, under "t#dy 1%"ol'er <o$:ig#ratio$!%"ol'er 1%Depe$de$t Cariable! 1 clic< 2od1FpzdF/$Gp1. , 5n the -ield settings window, locate the "cali$g section. 8 rom the Method list, choose Ma$#al.

= 5n the "cale edit field, type 1e6. > 5n the Model 1#ilder window, under "t#dy 1%"ol'er <o$:ig#ratio$!%"ol'er 1%Depe$de$t Cariable! 1 clic< 2od1F#. 1? 5n the -ield settings window, locate the "cali$g section. 11 rom the Method list, choose Ma$#al. 12 5n the "cale edit field, type 1e-6. 1 5n the Model 1#ilder window, right$clic< "t#dy 1 and choose <o2p#te.

RE"3L/"

,D #lot 8roup +
)ompare the finished displacement$field plot with that in igure 4. ollow the steps below to reproduce the plot in igure 3

,D #lot 8roup $
1 5n the Model 1#ilder window, right$clic< 2 5n the Model 1#ilder window, e6pand the D &lot .ro#p 1 and choose D#plicate. D &lot .ro#p 2 node, then clic< "#r:ace 1.

5n the "#r:ace settings window, locate the Expre!!io$ section. * 5n the Expre!!io$ edit field, type log10&pzd.mises)1(. + )lic< the &lot button. ?e6t, reproduce the plot in igure % of the contact pressure at the end surfaces as follows.

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Data

ets

1 5n the Model 1#ilder window, under Re!#lt! right$clic< Data "et! and choose "#r:ace. 2 Select (oundary 31 only.

,D #lot 8roup ,
1 5n the Model 1#ilder window, right$clic< Re!#lt! and choose 2 5n the D &lot .ro#p. D &lot .ro#p settings window, locate the Data section.

rom the Data !et list, choose "#r:ace 1. * Right$clic< Re!#lt!% D &lot .ro#p and choose "#r:ace.

+ 5n the "#r:ace settings window, clic< Replace Expre!!io$ in the upper$right corner of the Expre!!io$ section. rom the menu, choose &iezoelectric De'ice! ("olid Mecha$ic!)%<o$tact%<o$tact pre!!#reH co$tact pair p1 (pzdF/$Gp1). , )lic< the &lot button. 8 )lic< the Zoo2 Exte$t! button on the @raphics toolbar. inally, add a coordinate system plot to verify that the piezoelectric material has the correct orientation.

,D #lot 8roup 1 5n the Model 1#ilder window, right$clic< Re!#lt! and choose 2 Right$clic< D &lot .ro#p. D &lot .ro#p * and choose More &lot!%<oordi$ate "y!te2 Col#2e.

5n the <oordi$ate "y!te2 Col#2e settings window, locate the <oordi$ate "y!te2 section. * rom the <oordi$ate !y!te2 list, choose Rotated "y!te2 2.

+ )lic< the &lot button. , )lic< the Zoo2 Exte$t! button on the @raphics toolbar. )ompare the resulting plot with that in igure ..

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