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Prof. V. Vasudeva Rao Coordinator Vacuum Technology Laboratory Cryogenic Engineering Centre IIT Kharagpur
NATURAL VACUUM
Human beings 740 Torr Respiration / 300 Torr - Suction Octopus 0.1 Torr
Composition Atm. is air. Atomic N & O Appreciable He Neutral atomic H, Protons, electrons etc.
Nature is powerful
1902 Vacuum diode / 1906 triode / 1909 tungsten filament electron & X-ray tubes electronics
As pressure goes down in a vacuum system, a marked change occurs in the following physical parameters. 1. Molecular density 'n': 2. Mean free path '': Average number of molecules per unit volume. For a given temperature and volume n p density p Average distance that a molecule travels in a gas between two successive collisions with other molecules of that gas.
= 1 / (2 n d2).kinetic theory (not interatomic distance) Calcutta population example. For air at room temp. =5.1 x 10-3 / P ( in cm and P in torr). 3. Time to form a monolayer '': Time required for a freshly cleaved surface to be covered by a layer of the gas of one molecule thickness. is very long for UHV (2.2 x 106 sec at 10-12 torr) Gas molecules impinging per sq. cm = (nvavg) P (Torr) 760 1 10-3 10-6 10-9 10-12 10-15 N (mol/cm3) 2.46 x 1019 3.25 x 1016 3.25 x 1013 3.25 x 1010 3.25 x 1017 3.25 x 1014 3.25 x 10 (cm) 6.7 x 10-6 5.1 x 10-3 5.1 5.1 x 103 5.1 x 106 5.1 x 109 5.1 x 1012 (sec) 2.9 x 10-9 2.2 x 10-6 2.2 x 10-3 2.2 2.2 x 103 2.2 x 106 2.2 x 109
By analysing the valves of , , and D (characteristic dimension of the chamber), we can classify vacuum into three regions. Low (medium) Vacuum: The number of molecules of the gas phase is large compared to that covering the surface. 760 - 0.5 Torr Low Force effects can be felt. 0.5 - 10-2 Torr Medium High Vacuum: The gas molecules in the chamber are located principally on surfaces. Viscosity effects disappear. 10-3 to 10-7 Torr. D Ultra High Vacuum: The time to form a monolayer '' is longer than the usual time for laboratory measurements; thus clean surfaces can be prepared and their properties can be studied. 10-7 to 10-15 Torr >> D
<< D
Gas Compositions
Component N2 O2 Ar CO2 Ne He Kr H2 Xe H2O CH4 O3 N2O CO Atmosphere Partial Pr. (Torr) 595 159 7.05 0.25 0.014 0.004 8.4 x 10-4 3.8 x 10-4 6.6 x 10-5 11.9 1.5 x 10-3 5.3 x 10-5 1.8 x 10-4 -----------Ultra High Vacuum Partial Pr (Torr) ---------3 x 10-13 ---------6 x 10-12 ---------------------------2 x 10-11 ---------9 x 10-13 3 x 10-13 ------------------9 x 10-12
In the ultra high vacuum range hydrogen is the dominant component coming mostly from the bulk of the materials (permeation).
Removing chemically active elements : (a) Electric bulb To avoid heated filament oxidation. 10-5 Torr & sealing or Inert gas filling after evacuation (b) Vacuum Metallurgy : To protect active metals from oxidation during melting, casting, sintering etc. (0.1 Torr). (c) Vacuum Packaging : of food materials sensitive to atmospheric reactions (low vacuum - 0.1 Torr). (d) Vacuum encapsulation : of sensitive transistors & capacitors.
3.
Removing humidity from foods & chemicals : (a) Vacuum Concentration (removing water) at low heating of Fruit juice, concentrated milk etc. (b) Freeze drying for storage : Cooling and removing water by sublimation under vacuum, preserving volatile constituents. - instant coffee, blood plasma.
(c) Vacuum impregnation : Removing occluded humidity/ gases, filling their place by other materials. - insulation of motor windings, capacitors, cables etc. 4. Thermal & Electrical insulation : (a) Dewar flasks (LN2 & LHe), Thermos flasks - double walled with evacuated space convection reduced. (b) Electrical insulation - vacuum switches/interuptors, high voltage tubes - Fusion reactors for energy production etc. 5. Avoiding atomic collisions : (a) Oscilloscopes, photo cells, X-ray tubes, Mass spectrometers, Electron microscopes etc. (10-6 Torr). (b) Vacuum coating units : where coating materials evaporated from a source travels straight to the substrate with out collisions to create high quality thin film devices (< 10-8 Torr). (c) Fresh surface analysis equipment - SEM, EDAX, ESCA etc. 10-10 Torr where is very long. 6. Space simulation chambers Ex: space shuttles etc. 10-10 Torr. Simulating the conditions of far space. 7. Molecular distillation of pure fractions by evaporating and condensing. http://acept.la.asu.edu/PiN/rdg/vacuum/vacuum.html
Vacuum Pump
IIT Kharagpur
40 m
20 m
13 m
Cryopump Assembly
Production of Vacuum
Pressure ranges of vacuum pumps: No single pump exits which can cover all ranges Vacuum pumping is based on one of the following
Compression - expansion of gas Drag by viscosity effects Drag by diffusion effects Molecular drag Ionisation effects Physical & chemical sorption Ex:Ex:Ex:Ex:Ex:Ex:Rotary Vapour ejector Vapour diffusion pump Turbo molecular Ion pumps Sorption & Cryopumps Piston Waterjet Rotary Sorption Roots Ejectors Diffusion Molecular Ion Cryogenic
760 102 100 10-2 10-4 10-6 10-8 10-10 10-12 10-14
Pump specifications :- Lowest pressure, Pressure range, Pumping speed, Exhaust pressure etc.
P (Torr)
Pumping Speed: (SP) - Volume of the gas per unit time which the pumping device removes from the system at the pressure existing at the inlet to the pump. (lit/sec, m3/hr). Throughput (Q): - Product of pumping speed and the inlet pressure. Torr lit/sec or atm. Cm3 /sec dm d(NM) Q is proportional to mass flow rate dt = dt
Q = PSp =P
= =
dt KT
dV dt
d MPV M d
KT dt
(PV )
B A
B A
10
11
1
B B
2 9 8 4 7 5 6 3
(a)
(b)
(c)
(d)
1. Inlet tube, 2. Inlet port, 3. Top seal, 4. Vanes, 5. Oil, 6. Rotor, 7. Stator, 8. Exhaust port, 9. Exhaust flap valve with backing plate, 10. Exhaust outlet, 11. Oil splash baffles Stator with eccentric Rotor Inlet & Exhaust Two vanes in diametrical slot
(few degrees either side of vertical line) with filter Neoprene constrained to hinge between stator & metal plate
stator Rotor assembly is submerged in oil since both vanes operate, in one rotation the volume of the gas swept is twice that shown in figure (b). If rotational speed is n/unit time (min) pump displacement (pumping speed) = 2Vn
60 S (L/m) 50 40 30 20 10 0
10-4 10-2 1 102
760 Torr
P (Torr)