Robotics

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HELSINKI UNIVERSITY OF TECHNOLOGY
Control Engineering Laboratory
Microrobotics, Microtelemanipulation
and Microassembly
Introduction to Microsystems Technology
Lecture N-1
Quan Zhou
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Table of Contents, Slide 2
Outline
Microrobotics
Microtelemanipulation
Microassembly
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Definitions
Robot
Word robot was coined by the Czech playwright Karel Capek in his play
Rossum's Universal Robots in 1920s, robota = forced labor, worker
A reprogrammable, multifunctional manipulator designed to move
material, parts, tools, or specialized devices through various programmed
motions for the performance of a variety of tasks, Robot Institute of
America, 1979
Industrial robots vs. service robots
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Definitions ...
Microrobot
reprogrammable behavior (as in industrial robots) or
adaptivity to unpredicted circumstances (as in advanced robots for
unstructured environments, service robots) or
remote controllability (as in teleoperated robots)
Basically the only difference between a macro and microrobot is the
scale of the application domain
Microbots extend human capabilities to the microscale
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Classification
With regard to size/capabilities
miniature robots
microrobots
nanorobots
Functional classification
fixed / mobile
energy source on-board / not on-board
wires / wireless
Task-specific classification
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Classification with regard to size
Miniature robots
size: few cubic centimeters
workspace and forces
comparable to those of fine
human manipulations
fabrication by assembling
conventional miniature
components and micromachines
majority of todays
microrobots belong to this
class
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Classification with regard to size ...
Microrobots
size: few hundred cubic micrometers
fabricated by means of micromachining technologies (such as bulk or
surface micromachining or LIGA technology)
consists of microactuators, sensors and signal processing circuits
scaling effect should be taken into account when designing actuators, for
example
applications: cell manipulation, assembly
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Classification with regard to size ...
Nanorobots
size: few hundred nanometers to a
couple of micrometers, i.e. same as
the scale of biological cells
conventional mechanical principles
(for driving and manipulation) are not
applicable here but electrochemical
means could be used (mimicking
biological organisms)
solid-state technology is not currently
suitable for nano-scale fabrication but
polymer chemistry techniques can
provide a solution
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Functional classification
CU - control unit
PS - power supply
AP - actuators for
positioning
AO - actuators for
operation
Classification criteria
mobility
autonomy
control
(wires)
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Task-specific classification
Ratio C between the physical
dimensions of the microrobot and its
workspace
C >> 1: stationary
micromanipulation systems
C << 1: microscopic mobile robots
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Applications
Biotechnology
Microsurgery
Microassembly
Testing of microelectronic circuits
Process industry
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Actuation principles for microrobots
Actuation principles
Active materials
Piezoelectric actuators
Shape memory alloy
Electrostatic forces
Electromagnetic actuators
Other principles
Drive principles:
Direct actuation
Impact principle
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Piezoelectric micropositioning device
Yamagata et. al., Japan
Steps in nanometer range
Commercially available
Speed 5 mm/s
Positioning accuracy 0.1 m
Transfer force 13 N
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Abalone a micro-crawling machine
Codourey et. al., Switzerland
Two legs: inner and outer leg
Electromagnets fix the legs
Operation sequence
fix outer leg
move inner leg using piezos
fix inner leg and free outer leg
move outer leg using piezos
Motion resolution: 10 nm
Maximum step: 5 m
Dimensions: 60 x 60 mm2
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Swimming microrobot
Fukuda et. al., Japan
Applications: to inspect industrial
pipelines or blood vessels
A 8 m motion of piezoelectric stack
actuators is magnified 250 times to
the motion of 2 mm
Swim motion by 32 mm long fins
Dimensions: 34 mm x 19 mm
One rot and and trans DOF
Speed 30 mm/s
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Levitation microrobots
To avoid the problems of friction, different levitation systems have
been proposed
electromagnetic actuation
electrostatic actuation
ultraviolet light
A platform typically levitates on an air cushion generated by small
nozzles
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Tools
Microknives
Microneedles
Microdosing tools
Microlasers
Microgrippers
grippers with moving parts (piezoelectric, shame memory alloy,
electrostatic )
grippers without moving parts (vacuum, frozen gripper )
non-contact transportation (laser trap, ultrasonic systems )
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Information transmission
With the present technology information transmission from the
microworld is difficult
Visual information is only information that is currently available
Optical stereo microscopes
do not require vacuum
long working distance provides space for the micromanipulator
low resolution
small depth of field
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Information transmission ...
Scanning electron microscope
better resolution
larger depth of view
workspace can be seen from different angles
manipulators must be operable in vacuum and withstand electron radiation
large-chamber SEMs presently available (2 m3)
Force and acoustic information
currently not available
solutions are being sought
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Some Other examples of Mobile
Microrobots
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Microrobot Examples
Nanowalker from MIT
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Microrobot Examples
Desno Inpipe wireless mobile microrobot
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Examples of Microrobot
Underwater Microrobot (Fukuda)
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Microrobots Examples
Flying micro insects (UC Berkerly)
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Telemanipulation
What is telemanipulation?
a way for a human being to extend his operation capability to a remote
location
telemanipulator
a machine which extends a persons sensing and/or manipulating capability to a
remote location.
typically includes
artificial sensors, a vehicle for moving, communication channels
artificial arms and hands to apply forces and perform mechanical work
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Application Areas
Why telemanipulation?
To overcome the barrier to the
world where direct human
involvement is difficult or
impossible
The traditional application areas of
telemanipulation
nuclear plants
subsurface
space
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Why microtelemanipulation?
To overcome the barrier of
dimension and to reach the
microworld
Why tele?
computer assistance
accuracy and performance
human involvement
robustness and intelligence
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Micromanipulator?
A micromanipulator is a device that
is capable of manipulating micro
objects.
micro object
an object having dimensions <
1mm
size of micromanipulator
not necessary micro-sized
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Concept of Microtelemanipulation
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Classification of Micromanipulation
Interaction type
contact
non-contact
Physical basis
electrical
mechanical
magnetic
optical
Environment
dry
wet
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R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

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E
A
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H

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Application Areas
The application areas of
micromanipulation
biotechnological operations
microsurgery
assembly of micro systems
testing of micro chips and
components
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

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E
S
E
A
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C
H

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O
U
P
Applications in Biotechnology
The applications in biotechnological
operations
injections and aspirations
cell toxicology
gene technology
measurement of electrical
quantities inside a cell
e.g. patch clamp technique
separation of particles
e.g. spores
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

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E
S
E
A
R
C
H

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O
U
P
Applications in Microsurgery
The applications in microsurgery
diagnostic surgery
neurosurgery (brain surgery)
micro vascular anastomosis
blood vessels
nerves
ophthalmology (eye surgery)
intracavity interventions (using
endoscopes and microcatheters)
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

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E
S
E
A
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C
H

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O
U
P
Applications in Microassembly
The application areas in
microassembly
optoelectronic devices
wrist watches
micro motors and gears
micro robots
...
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
Applications in Microchips
The applications in microchips testing
electrical probing
mechanical testing
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

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E
S
E
A
R
C
H

G
R
O
U
P
Problems in Micromanipulation
The problems in microtelemanipulation
scaling effect
measurement difficulties
external disturbances
actuator non-linearity
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

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E
A
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Scaling Laws
Time: I
0
van der Waals: I
1/4
Diffusion: I
1/2
Distance: I
1
Velocity: I
1
Surface tension: I
1
Electrostatic force: I
2
Muscle force: I
2
Friction: I
2
Thermal Losses: I
2
Piezo-electricity: I
2
Shape memory alloy: I
2
Mass: I
3
Gravity: I
3
Magnetic: I
3
Torque: I
3
Power: I
3
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

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E
A
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P
Scaling of Some Forces
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

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E
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E
A
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C
H

G
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O
U
P
Other Effects
Other effects became significant in the micro world
surface adhesions
contact electrification
micro/nano friction
break down of continuum assumption

M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

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E
A
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H

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P
Summary of Scaling Effect
What is scaling effect?
The change of dominant physical quantities between different scales is
called scaling effect
gravitational, inertial forces become less effective
van der Waals forces, electrostatic forces, surface tension forces become more
important
other effects
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
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O
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P
Actuator Nonlinearity
Properties
Hysteresis, drift and gain-nonlinearity
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
Classical Preisach Hysteresis Model for
Piezo Actuator
Preisach model:
x(t): output
m(a,b): weighting function
a, b: up and down switching point
gab[u(t)]: binary hysteresis
operator
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
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P
The Micromanipulator
3 DOF tripod-like parallel
manipulator
Joint-free structure
Piezohydraulic actuation
Workspace: 1.2 x 0.6 x
0.3 mm
Resolution:
submicrometers
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
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C
H

G
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P
Actuation System
Tank diameter: 40 mm, Bellow length: 18.8 mm
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
Measurement
Strain gages: deformation of the
piezoelectric actuators
Hall sensors: movement of the
mobile platform
Machine vision: movement of the
tool tip
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
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O
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P
Microassembly
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
Microassembly
Common definition:
Assembly of micro part with
dimension less than 1 mm
Our definition:
Assembly of miniaturized parts
where micro domain phenomena
affect the performance and
precision
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

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E
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E
A
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H

G
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P
Two Types
Serial microassembly
Parts are put together one-by-one
Parallel microassembly
multiple parts are assembled
simultaneously
deterministic microassembly
stochastic microassembly
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
Serial Microassembly
Serial microassembly
Traditional pick and place
procedure
Capable of handling complicated
hybrid micro devices
Techniques required
Microscope
Visual servoing
High precision positioning
Parts handling tools
Tweezers
grippers
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

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E
S
E
A
R
C
H

G
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O
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P
Parallel Microassembly I
Deterministic parallel microassembly
Flip-chip wafer to wafer transfer
Micro gripper array
Mechanical
Thermal

M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
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P
Parallel Microassembly II
Stochastic parallel microassembly
Destination unknown
Self-assembly
Techniques
Fluidic agitation and mating shape
Vibratory agitation and electrostatic
forces
Vibratory agitation and mating shape
Mating patterns of self-assembly
monolayer
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
Applications
Where microassembly is needed?
MEMS devices become
increasingly complicated
The traditional assembly
technology become less effective
because of the scaling down
Application areas
optoelectronic devices
wrist watches
micro motors and gears
micro robots
...
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
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P
Micro Assembly Examples I
University of Karlsruhe, Institute for Real-time Computer System &
Robotics
Micro mobile robot solution
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
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P
Micro Assembly Examples II
Sandia National Laboratories
Micromanipulation lab
Assembly of MEMS components of size
10 to 100 microns
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
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P
Micro Assembly Examples III
University Kaiserslautern
Institute for production automation
3 stage assembly line, assembly precision better
than 1 micron
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
Micro Assembly Examples IV
Technishe Universitat Munchen
Laboratory for Process Control and Real-time Systems
Coarse-fine positioning system and vacuum micro gripper
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
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P
Micro Assembly Examples V
Institute of Microengineering Production (IPM)
Ecole Polytechnique Federale de Lausanne (EPFL)
Assembly of wrist watch and optical sensor, precision 0.5 micron
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
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P
Micro Assembly Examples VI
Micro assembly station at Micro System Technology Group,
TUT/HUT
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
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P
Mini Factory
Hollios
Hollios
Hollis Hollis
Hollis
Virtual mini factory for microphone assembly
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
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C
H

G
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P
Micro Factory
MEL
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

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E
S
E
A
R
C
H

G
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P
Tasks in Micro Assembly
Tasks in microassembly
preparation of parts
transportation of parts
positioning and fixing of parts
connecting the parts
testing and measuring the finished
microsystem
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
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C
H

G
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P
Issues in Microassembly
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
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E
A
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G
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Precision Positioning I
Coarse-fine approach
A macro robot + a precision robot
(micromanipulator)
A precision robot
(micromanipulator) + coarse multi-
axial stage
Micro robots
Microassembly Automation Laboratory, Lawrence Livermore
M
I
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R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
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R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
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G
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Precision Positioning II: Stages
Newport Piezosystem
MIT Nanotechnik
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
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Precision Positioning III: More Stages and
Actuators
X-Y stage from Nanotechnik
Ultrasonic motor by
Nanomotion
X-Y-Z stages from Physik Instrumente X-Z stage from Newport Co.
Stepper motor from Newport Co.
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
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H

G
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Precision Positioning IV: Mobile Micro Robots
University of Karlsruhe, Institute for
Real-time Computer System & Robotics
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
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Micromanipulator
Nanotechnik
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
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C
H

G
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Position Measurement
Measurement methods
Visual servoing
Linear encoding
Laser sensor
Other sensors
Acceleration meter
Hall sensor

M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
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U
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Visual Servoing
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
Micro Griping
Gripping methods
Grippers with moving part
Various shape
Actuation principle
Piezoelectric, SMA, electrostatic
Grippers without moving part
Vacuum gripper
adhesive gripper
Frozen gripper
Water drop gripper
Non-contact transportation system
Laser trap gripper
Dielectrophoretic transportation
Ultrasonic system
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
Micro Grippers
EPFL
Lawrence Livermore National Laboratory
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

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E
S
E
A
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Force Measurement
Sensing methods
Piezoresistive
Optic reflective

Installation
Integrated
Non-contact
Piezolever from Thermomicroscopes
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

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E
S
E
A
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H

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Dispensing and Connection
Micro dispensers
Wire connection
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

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E
A
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Vibration Control I
For vibration control, several aspect should be taken into account:
Construction of the building
Location of site
Away from heavy machinery
A cheap solution
Vibration isolation table
There are several isolation principles used in vibration control:
Passive isolation
Elastomeric
Spring
Pneumatic
Active
Electromagnetic
Piezo
M
I
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R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
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M
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R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

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Vibration Control II
Passive Isolation
No need for connections
electrical
air preassure
Clean room and vacuum compatible
Elastomeric Isolator from
Newport Co.
Passive spring Isolation
M
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R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
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M
I
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R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

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A
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Vibration Control III
Pneumatic Isolation
Consists of a sealed air chamber
Platform floats in a cushion of air
Need for air preassure
Difficult to install in clean room and vacuum environment
VH-isostation from
Newport Co.
M
I
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R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

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E
A
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Vibration Control IV
Active Isolation
Pneumatic with electromegnetic sensors and
actuators
AD500 activator from Newport Co.
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

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Vibration Control V
Active Isolation
An active vibration isolation system measures the vibrations from the floor
and the table itself, and produces a mechanical force contrary to the
vibration.
Piezo actuators from Newport Co Elite 3 Workstation from Newport Co.
M
I
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R
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A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
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R
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A
N
D

N
A
N
O

S
Y
S
T
E
M
S

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A
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Environmental Issues
Environmental control takes
care of issues like:
Temperature control
Humidity control
Air flow
Dust participles
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

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A
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The Environmental Chamber (Design)
Double layer polycarbonate wall
Air duct
Air buffer
Diffuse plate
Aluminum frame
Access Orifices
Vibration Isolation table
Cable passing point
Air inlet (from environmental controller)
Bottom thermal isolation layer
Air outlet (to environmental controller)
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

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The Environmental Chamber: the Controller
ARCTEST Environmental equipment
Temperature
Range: 10 to +40 C
Accuracy:
+/- 0.1 C
Humidity
Range: 5 to 80 %RH
Accuracy: +/- 0.1 %
M
I
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R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

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A
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Benders Tests
Testing Results
Displacement of the benders
Important influence both of T
and humidity could be noticed.
Apart from temperature and
humidity influence, the
amplitude of the movement was
higher with the lower frequency
(0.2 Hz)
M
I
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R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
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R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

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Initial results of
environment effects to microassembly, IV
Displacement and angular error of pick and place operation of a miniaturized gear at
different temperature and humidity settings
M
I
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R
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A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
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Modularization
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

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E
A
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Special Phenomena in Microassembly
Scaling effects:
The change of dominant physical quantities between different scales
gravitational, inertial forces become less effective
van der Waals forces, electrostatic forces, surface tension forces become more
important
other effects
M
I
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R
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A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

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Assembly and Task Planning
Assembly planning (high level)
Assembly representation
Work cell planning
Sequence planning
Task planning (low level, planning of handling operations)
Gross motion planning (path planning)
Fine motion planning
Grasp planning
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

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Differences Between Macro and Micro
Assembly and Task Planning I
The technologies developed for
conventional assembly planning are
largely valid
To be developed in
Grasp planning
Feeding
To take into account of
Micro domain forces
Special uncertainties
Assembly planning
Assembly representation
Work cell planning
Sequence planning
Task planning
Gross motion planning (path
planning)
Grasp planning
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

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E
A
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Differences Between Macro and Micro
Assembly and Task Planning II
Traditional assembly and task
planning
Geometric model is sufficient in
many cases
No special adhesion forces
Many planning methods are based
on disassembly
Reversible operations
Assembly can be based on
common sense
Can use expert experiences
Assembly and task planning in micro
assembly
Physics-based simulation model is
required
Special adhesion forces
Assembly based on disassembly
does not work
Many operations not reversible
Common senses do not always
work
Many experiences expired
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
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G
R
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Model-based Handling and Planning
A potential powerful method in assembly and task planning in micro
assembly is physical model-based virtual reality environment
Benefits
can help task planning: fine motion and grasp planning
can help assembly planning: assembly sequence planning
Model can help design of new tools: model-based design
Drawbacks
computational intensive
require numerical micro domain force models
verification difficulties
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

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E
A
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Modeling of Micro Operations
Global model: rigid body contact
dynamics + micro domain forces
Contact dynamics
Friction
van der Waals forces
electrostatic forces
Dry environment
Simple-shape objects
Fast, real-time simulation capable
unit in micro meter
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

R
E
S
E
A
R
C
H

G
R
O
U
P
M
I
C
R
O

A
N
D

N
A
N
O

S
Y
S
T
E
M
S

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A
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Summary
Microrobotics
Microassembly

Robotics

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