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1) INTRODUCTION

Helium Leak Testing is a sensitive, reliable and most widely used method of leak
detection in manufacturing industries. The typical users are the manufacturers of
electronic tubes and other devices with critical operating conditions. Mostly the heavy
and light fabricated tubes, pressure vessels and assemblies are tested using Helium leak
test. The growth of Helium leak detection technique was accelerated in the late 1!"#s by
the space e$ploration program. %early, everything in space vehicles from hermetically
sealed electronic components to fuel tanks, transfer lines and valves need to be leak free
or nearly so. The commercial market for appliance and other consumer goods spurred on
by the development of the space age began to e$pand in the 1&"#s. These and other
requirements challenged leak detector manufacturers. Helium leak detectors appeared on
production floors testing, beverages can ends, pressure transducers, torque converters,
pressure vessels and heat e$changers. 'n some applications the unit were automated to the
point where the need of operators was virtually nil. (iotech companies use helium leak
detectors to helium leak test implant able medical devices such as pacemakers to insure
that the outer packages are protected from bodily fluids and to protect patients from
possible contamination from leaking batteries and other materials. )utomobile
manufacturers use helium leak testing technology to test items such as air bag initiators,
radiators and air conditioning units. *emiconductor fobs are littered with helium leak
detectors used to leak test process equipment.
)lthough mass spectrometers can be traced as far back as the turn of the century the
helium leak detector mass spectrometer was developed during the Manhattan +ro,ect. The
gaseous diffusion method used to enrich uranium-./! required leak tightness far beyond
available means. +ro,ect scientists were able to improve upon current mass spectrometer
designs and eventually developed what is still the basic formula for most helium leak
detectors. Helium leak testing is used throughout industry to locate leaks in even the
most comple$ pressure, vacuum and hermetic systems and enclosures. The following are
,ust a few e$amples of the most common uses of helium leak testing0
1
1) Steam Turbine and Condenser Air in leakage Helium Leak Testing - 1uickly
locate even the smallest vacuum leaks on the low-pressure side of any steam turbine or
condenser. Helium leak testing is widely recogni2ed as the superior alternative to the
ultrasonic, smoke, and our favorite, the shaving cream method of vacuum leak testing
steam turbine condensers.
2) Chemical and Plastics Production - 3$ygen and other contaminants entering through
leaks in flanges or broken welds can effect many manufacturing processes and result in
lower quality and efficiency or totally unusable product. Helium leak testing of multi
floor vacuum distillation towers, reactors and associated plumbing and pumps is easily
accomplished utili2ing helium leak testing.
3) Heat Exchangers - Helium leak testing large tubular heat e$changers can be e$pensive
and time consuming. 4ith the helium leak testing method thousands of tubes can be
scanned in a short period of time when compared to some of the other methods of
e$amination. 5e-testing after plugging or other repairs are performed can be
accomplished immediately.
4) Underground Pipelines0 - 4ith helium leak testing we can locate leaks in underground
pipes to within a few feet keeping e$cavation to a minimum. 6ue to the versatility of the
helium leak testing method virtually any pressure or vacuum system can be tested with a
high
.
) !U"#A$E"TALS %! LEA& #ETECT'%"
1) Leak detection #e(ined)
) leak may be defined as an unintended crack, hole or porosity in a containing wall that
allows the admission or escape of fluid or gas. The basic function of leak detection is the
location and measurements of leaks in sealed products, which must contain or e$clude
fluids.
) The "eed (or Leak #etection)
7ven with today#s comple$ technology, it is for all practical purposes, impossible to
manufacture a sealed enclosure or system that can be guaranteed to be completely leaking
proof without first being tested. The fundamental question in leak detection is8 what is the
ma$imum acceptable leak rate consistent with reasonable performance life of the
product9
)nyone who manufactures or uses closed vessels needs leak detection. ) partial list of
typical users includes0
a: )ny industrial pressure vessel manufacturer
b: Manufacturers using tubular elements, such as refrigeration equipment
manufacturers, chemical plants etc.
c: ;acuum chamber manufacturers
'n our case coolant carrying tube pipes of *T'( +ro,ect were to be fabricated at the ends
with flanges and so required the Helium leak testing for its leak proof operation.
4hat type of leakage should these products avoid9 <or some, it is leakage, which will
damage the product or impair the process8 for other, it is the loss of material vital to the
product or process.
There are four general classes of leak detection0
A) Hermetic Enclosures *Admission o( material through leaks)
These are tested to prevent entrance of contaminants or loss of fluid that would affect
performance of the enclosed unit. 7$amples0 electronic devices, integrated circuits, sealed
relays, motors, ring pull tab can ends, and multi-pin feed through.
+) Hermetic S,stems
/
These are tested to prevent loss of operating fluid or gas within the system. 7$amples0
Torque converters, hydraulic systems and refrigeration systems.
C) E-acuated Enclosures
These are tested to prevent too-rapid deterioration of vacuum with age. 7$amples0
electron tubes, T; picture tubes, bellows sensing elements, full-panel opening can ends,
etc.
#) .acuum S,stems
These are tested to minimi2e in leakage and allow attainment of better vacuum or higher
gas removal ability at any given vacuum =absolute pressure:.
/) The sources o( leak)
'mperfect ,oints or seals by which various parts are assembled to form the finished
products most commonly cause leaks in newly manufactured products. *till another class
of leaks consists not of holes or cracks in the usual sense. 'nstead the molecular structure
of the containing wall itself is arrayed in such a way as to permit gas diffusion through
the wall.
0) Leak $easurement terminolog,
Most leaks involve gas flow, and the most widely used methods of leak detection depend
upon observation of gas flow. Leaks are measured in units of gas flow per unit time. To
specify a quantity of gas, its pressure as well as its volume must be specified. +ressure is
customarily specified in >Torr? @ a unit of measurement used in barometric
measurements. This gas volume per unit time is typically specified in >standard cubic
centimeters per second.? This practical limit of low-pressure measurement with a mercury
barometer is about 1 Torr.
1 Torr A pressure of 1 machine Hg.
Leak 5ates can be defined in . ways0 -
): 'n terms of application, such as-
1 32. 3f refrigerant 5-1. in . years at B" +si or
&! cc of oil per year at " psig and 1C""
o
<, or
C
(: 'n terms of the leak method detection method used, such as-
. bubblesDsec =1DE? diameter: when pressuri2ed to C" psi =(ubble method:
1.E F 1"
-B
std cc D sec of helium at 1 atm. =Helium method:
. +si pressure decay in ! minutes at &" psi =+ressure decay method:
The generally accepted unit of leak rate for leak detection is that ccDsec, because it
contains the units of flow rate, namely M)**DT'M7. The term >std ccDsec ? is an
abbreviated form of >cubic centimeters of gas =at standard Temperature and +ressure: per
seconds.?
'n vacuum work, where pumping speeds are measured in litersDsec and pressure in Torr,
the term >Torr-litersDsec? is widely used.
1 std ccDsec A ".B& Torr-LitersDsec.
Gonversions0
1 std cc sec ".B& torr-literDsec
1 torr-liter sec 1./ std ccDsec
1 std ccDsec .B $ 1"
-C
micron cubic feet per hour
1 mcfDh +ractically 1"
-!
std ccDsec
1) The si2e o( leaks that A((ect Product Li(e)
The ma$imum acceptable leak rate for a given product depends upon the nature of the
product. *ince the cost of leak detection increases as the specified leak rate decreases.
*ome e$amples of products leak specification0
+roduct or *ystem Leak 5ate *pecification Gomment
Ghemical +rocess 7quipment 1"
-1
to 1 atm ccDsec High +rocess flow
5ates
Torque converter 1"
-/
to 1"
-C
atm ccDsec 5etention of liquid
+acemaker 1"
-
atm ccDsec Long life implanted in
body
)lthough industrial leak rate specification range from 1"
-
atm ccDsec to 1 atm ccDsec, the
ma,ority of products have leak rate specification laying in a narrow range, from 1"
-B
atm
ccDsec to 1"
-1
atm ccDsec. The upper part of this range is covered by bubble testing down
to 1"
-C
std ccDsec. 3ther methods overlap the bubble method and e$tend well below its
lower limit. The helium method can detect leaks smaller by a factor of 1","",""". Leaks
!
larger than 1"
-1
atm ccDsec can usually be spotted visually. !."$1"
-E
*td ccDsec He, means
that ."""""""! cubic centimeters of helium will leak every second given a constant
pressure differential across the leak of one atmosphere. )lso used is atm ccDsec.
*td cc Dsec He Time to leak 1 cc of He Typical +roducts 5emarks
1$1"
-.
1"" seconds 3il from engine +rotect engine
1$1"
-/
1& minutes 4ater tank +revent water loss
1$1"
-C
/ hours *torage tank
+revent loss of product. +rotect
environment
1$1"
-!
.& hours
(everage can top G". 5etention
1$1"
-&
. weeks
1$1"
-B
C months
'G packages +ackage integrity
1$1"
-E
/ years
1$1"
-
/" years
'mplant able
Medical 6evices
+revent malfunction due to
contamination. Long life
1$1"
-1"
/." years
1$1"
-11
/,."" years
1$1"
-1.
/.",""" years
/) HEL'U$ AS A T3ACE3 4AS
&
*ince a mass spectrometer may be tuned to virtually any mass, the choice of a tracer gas
is limitless. However, the particular application of leak testing and desired characteristic
for a tracer gas narrow this choice. ) tracer gas for leak testing should have the following
characteristic0
't should be non-to$ic.
't should diffuse readily through minute leaks
't should be inert
't should be present in not more than trace quantities in the atmosphere.
't should be relatively ine$pensive.
The lighter gases have the highest diffusion rates and will therefore give the best
sensitivity. 3nly hydrogen =mass H
.
A.: is lighter than helium =mass HeAC:. 3f the inert
gases, helium is buy far the lightest and the concentration of helium is only ! parts per
million in the atmosphere.
Helium ;s )ir-
'f helium is used as a tracer gas but air leaks into or out of the product, what is the
relationship between the two9
The mass spectrometer leak detector is capable of indicating leak rates only in the tracer
gas to which it is tuned and calibrated =nearly always helium:. 't cannot indicate leak rates
in air. There is however, an appro$imate relationship that is derived from the kinetic
theory of gases.
Hinetic theory of gases predicts that the relative flow rate of two gases through an ideal
leak under molecular flow conditions =roughly, below one millionth of atmospheric
pressure: will be inversely proportional to the square root of the average molecular
weight. *ince the molecular weight of air about . and helium is C, helium will flow ..B
times as fast as air through this leak. The implication is that the minimum detectable leak
in terms of air is I.B of that for helium.
0) LEA& L%CAT'%" A"# $EASU3E$E"T
B
Leak location)
Leak location is the testing approach used to find the precise location of individual leak.
Leak location is carried out by means of two techniques, termed the detector-probe mode
and tracer-probe mode.
'n the detector-probe mode the test piece is filled with tracer gas and the e$terior is
scanned with a probe that is attached to the inlet of the leak detector. The probe
continuously admits =or >sniff?: some of the air directly in front of the test piece. This air
is inducted to the analytical portion of the leak detector, where any of the tracer gas that
may be leaking from the test piece is detected.
'n the tracer-probe mode, the leak detector is used to evacuate the interior of the test
piece, and a probe is used to discretely spray test gas on suspected leak sites. )ny leaks
are evidenced when the tracer gas flows through the evacuated test piece and is detected
by the leak detector.
Leak measurement)
Leak measurement is the approach used to actually measure the total =ideally: or partial
=as compromise: leakage of a device or system.
The two standards leak measurement techniques are known as the inside-out mode and
the outside-in mode. 4ith either of these approaches, the tracer gas may be allowed to
accumulate before detection, or may be detected continuously. Jenerally continuous
detection yields a faster test with adequate sensitivity8 however, circumstances sometimes
require the accumulation of tracer gas prior to analysis.

1) $ETH%#S %! LEA& #ETECT'%"
E
There is a wide range of methods available for finding and measuring leaks in products or
assemblies. The more commonly used methods are summari2ed below. Leaks are special
types of defects, which can have a ma,or importance in systems where they have
influence on safety and performance. Many ob,ects will have a reduced reliability if they
contain leaks.
Leak testing is a non-destructive e$amination method that is used for detection and
locali2ation of leaks and for measurement of leakage in systems or ob,ects that is under
vacuum or pressure.
(efore a leak test e$amination is performed it is necessary to determine if the
e$amination is to ascertain whether leaks are present or not, overall leak detection, or if
the e$amination is to determine the location of a leak, locali2ing leak detection. 'n some
cases an e$amination for overall leak detection is performed first, and if leaks are
detected, the locali2ing method is applied for pinpointing of the leak. This is however not
always required nor possible.
*econdly it is necessary to determine the leak rate that can be tolerated, as no ob,ects are
1""K tight. That is the requirements to tightness of the ob,ect. 'f for e$ample the ob,ect
have to be watertight, a leak rate below 1"
-C
mbar lDs will be sufficient. (ut if the ob,ect
for e$ample is to be used in the chemical industry the requirements can be a leak rate
below 1"
-&
mbar l D s.
'n leak testing a pressure difference between the outer and the inner side of the ob,ect to
be e$amined is produced. *ubsequently the amount of gas or liquid that is passing
through a leak is measured.
'n principle two methods are applied for leak testing and locali2ation of leaks, the
L;acuum methodL and the L3verpressure methodL.
)t the L;acuum methodL the ob,ect to be e$amined for leaks is evacuated and sprayed
from the outside with a search gas, in this case Helium. The gas enters through any leaks
present in the ob,ect and is detected by a sensor connected to the leak test instrument.
)t the L3verpressure methodL the ob,ect to be e$amined for leaks is filled with a search
gas, Helium, under slight overpressure. The search gas escapes through any leaks present
to the outside and is detected by a detector probe. This detector probe is in most cases
called a LsnifferL acting as a gas-sampling probe.
<or both methods specially developed leak detectors are available.

The ob,ect under test should, if possible, be tested according to its final mode of use, i.e.
if it is used under vacuum, the vacuum method should be applied, if it is finally
pressuri2ed, the overpressure method should be adopted.
7$amples of testing with the two methods are illustrated below. The ;acuum method is
illustrated with the Hood Test and the Tracer +robe Test and the 3verpressure method
with the Hood test, the (ombing test and the 6etector +robe or *niffer test.
1) .acuum method 5 Hood test
The Hood Test is an overall leak test. The evacuated test ob,ect is covered with a =plastic:
hood. The space between the test ob,ect and the hood is filled with Helium from the
search gas reservoir so the total outer surface of the test ob,ect is e$posed to the Helium
search gas. The helium enters through all leaks present at the evacuated test ob,ect and
thus the detector connected to it. The detector now indicates the total leak rate.
The hood test can for e$ample be used for e$amination of small vessels.
<ig .0 Helium Leak Test, ;acuum Method, Hood Test
) .acuum method 5 Tracer probe test
)t the tracer probe test the same set-up as used for the hood test is applied, but without
the hood. ) spray gun is used to spray a fine ,et of helium search gas at areas suspected of
leaking. )gain the helium enters through leaks present at the evacuated test ob,ect and the
detector connected to it. The detector indicates if a leak is present at the area the helium
search gas is e$posed to.
The tracer probe test can for e$ample be used on seals, flange connections, weld seams
etc.
1"
<ig /0 Helium Leak Test, ;acuum Method, Tracer probe test
/) %-erpressure method 5 Hood test
)s in the vacuum hood test the overpressure hood test is an overall leak test. ) test set-up
similar to the vacuum test is used. ) vacuum chamber is used for the hood, which can be
evacuated by a au$iliary pump and to which the leak detector is connected. The leak
detector indicates the helium search gas that is escaping through leaks in the test ob,ect.
The use of a helium leak detector allows detection of e$tremely small leaks and is
suitable for automatic leak detection in industrial equipment.
The hood test can for e$ample be used for e$amination of vessels, heat e$changers etc.
<ig C0 Helium Leak Test, 3verpressure Method, Hood test.
0) %-erpressure method 5 +ombing test
11
The bombing test is a pressureDvacuum method of leak detection used for testing of
hermetically sealed components containing a cavity, which can be gas-filled or evacuated.
The ob,ect to be tested gets in a pressure chamber e$posed to the helium search gas.
6uring an e$posure time of up to several hours at a high helium pressure, the helium will
penetrate through any leaks present in the test ob,ect. This is the part referred to as the
LbombingL. )fter the pressuri2ation or bombing the ob,ects are tested for helium emission
in a vacuum vessel, following the same procedure as in the hood test. This test permits
detection of the smallest leak rates and is especially used for ob,ects, which cannot be
gas-filled by other means. The bombing test can for e$ample be used for e$amination of
transistors, ampoules etc.
<ig !0 Helium Leak Test, 3verpressure Method, (ombing test.
1) %-erpressure method 5 Sni((er test
)t this type of test the suspected areas of the test ob,ect are carefully e$plored by means
of a detector probe, a LsnifferL, which is connected to the leak detector. The ob,ects to be
tested are under helium search gas overpressure. The sensitivity of the method of the
method and the accuracy of locali2ing any leaky points depend on the nature of the search
gas, the design of the sniffer and the time constant of the actual leak-testing device.
The sniffer test can for e$ample be used for e$amination of vessels, heat e$changers,
seals, flange connections, weld seams etc.
1.
<ig &0 Helium Leak Test, 3verpressure Method, *niffer test.
The leak detection system discussed in this 'TJ is a mass spectrometer leak detector
tuned to detect small quantities of helium. 't is utili2ed by pacemaker electronic
component manufacturers to test electronic components =integrated circuits, transistors,
capacitors, etc.: for hermetic loss. The system is typically portable =on casters: or bench
mounted and operates from a 11! volt, &"-Hert2 power source. The system contains one
or more vacuum pumps, a magnetic mass spectrometer and au$iliary components
necessary for proper operation.
'ndustrial users employ mass spectrometer leak detection on all si2es of ob,ects from
miniature components to large systems and there are various detection methods used. The
most popular leak detection method used by pacemaker manufacturers to leak test
electronic components is the bell ,ar or hood method using helium as the tracer gas. 'n
this method, the test ob,ect is placed in a pressure chamber and the chamber is filled with
commercially pure helium at a specified pressure. The test ob,ect is held in the
pressuri2ed chamber =soaked: for a specified time =bomb time:. +ressure and bomb time
vary according to the test specification used. Typically, bomb pressure is four
atmospheres minimum and bomb time is one to four hours. 'f there is an opening in the
test ob,ect, the pressuri2ed helium will be forced through the opening into the test ob,ect.
The chamber pressure is then released and the test ob,ect is transferred to the leak
detector hood or bell ,ar. The bell ,ar interior is connected through a valve to the leak
detector mass spectrometer tube. Transfer time from chamber to bell ,ar should be kept at
a minimum to prevent loss of helium from the test ob,ect. Military and industrial
specifications typically specify a ma$imum time between removals from the pressure
chamber to detection of /" minutes.
1/
4hen the detector test cycle is initiated, the test station automatically evacuates the free
volume under the test dome to a vacuum level compatible with the interior of the mass
spectrometer. The valve then opens allowing any tracer gas leaking from the test ob,ect to
enter the detector spectrometer tube.
3peration of the mass spectrometer is similar to standard mass spectrometer operation. 'n
the described system, the gases entering the spectrometer tube, such as nitrogen, o$ygen,
carbon dio$ide and helium =if a leak occurs: are ioni2ed by an electron beam. The
spectrometer magnetic field separates the resulting ions according to mass. The helium
leak detector magnetic field is arranged such that only helium has the right mass to reach
the detector. )s the helium ions strike the detector, a minute current flow is generated.
The current flow is amplified and the amplified flow =which is proportional to the amount
of helium in the tube: appears as a visual leak rate indication on the leak indicator meter.
& The leak rate indicated on the detector meter is the equivalent air leak rate.
The measured leak rate is the quantity of gas in cubic centimeters that flows through an
aperture or porous wall in one second as determined under specified conditions. ! 't is
assumed that the gas is air at room temperature, and is at one atmosphere pressure on the
high-pressure side of the leak and the low-pressure side =vacuum: has a negligible effect
on the flow rate. Leak rate is commonly given in units of atm-ccDsec. The air leak rate can
be converted roughly to a helium leak rate by multiplying, )ir leak rate $ ..E A helium
leak rate.
The helium leak detector discussed here is used to detect leak rates in the 1"
-C
to 1"
-1"
atm
ccDsec range =fine leak: although units are now being developed to detect gross leaks, 1"
-C
atm ccDsec or greater. There is presently no technical basis for ma$imum allowable leak
rate specifications. The reason for this is that there are no data presently available which
can be used to relate leak to component life. )cceptable leak rates may vary as the
internal free volume of the test ob,ect varies.
The sensitivity of the described system is such that gross leaks, or leaks with flow rates
1"
-C
atm ccDsec or greater cannot be accurately detected. )lso, the tracer gas would be
removed from test ob,ects with gross leaks when the system evacuated the bell ,ar and
little or no helium would reach the spectrometer tube. *ome helium is removed from
ob,ects with fine leaks during evacuation but the evacuation time is small =typically three
seconds: and detector manufacturers state that enough helium remains for detection
purposes. This is a questionable area. 't is obvious that bomb time and pressure become
1C
important. 't is also apparent that test dome or bell ,ar volume should be kept small to
decrease evacuation time.
<or leaks 1"
-C
atm ccDsec and larger =gross leaks: a bubble test is commonly utili2ed. The
test ob,ect is soaked in a pressuri2ed chamber filled with helium or other gas =as done for
fine leak testing: and then the test ob,ect is immersed in a silicone or mineral oil, or
fluorocarbon liquid and observed for bubbles emanating from the ob,ect. Jross leak
testing should not be performed before the fine leak test, as there is a possibility that the
test liquid could temporarily plug a fine leak.
Galibration of the helium leak detector is presently accomplished using a calibrated
helium leak. The calibrated leak is typically in the form of a cylinder charged with helium
at atmosphere pressure. The cylinder contains a filter through which helium e$its at a
fi$ed calibrated rate when the cylinder valve is opened. The temperature at which the
calibrated leak was calibrated is marked on the cylinder =typically ..-./ G: and the
calibrated helium leak cylinder should be at this temperature when calibrating the system
or a temperature compensation factor should be provided and used in calculating the test
ob,ect leak rate. The actual accuracy of calibrated leaks are questionable due to the lack
of standardi2ation in calibration methods and the disagreement between different
calibration labs as to the accuracy of the calibrated leak rate. 4hen using the calibrated
leak to set the sensitivity of the helium leak detector, the detector meter is set for direct
readout at the air leak rate figure marked on the calibrated leak cylinder.
5adioisotope and weighing are two other methods used for leak detection. 5adioisotope
leak testing is generally felt to be a better leak testing method than helium leak detection.
'n this method, the test ob,ect is soaked in a pressuri2ed chamber of radioactive gas. The
ob,ect is then removed and the emissions of gamma rays penetrating the walls of the
ob,ect are counted, thereby measuring the amount of radioactive tracer gas trapped within
the leaking ob,ect. )n )tomic 7nergy Gommission license is necessary for possession
and use of radioisotope test equipment and manufacturers are reluctant to use this method.
5adioisotope leak testing will be covered in more detail in a future 'TJ.
) weight test method is also used in which the test ob,ect is weighed before and after
being pressuri2ed in a test liquid, or before and after an e$tended time period.
The detection of loss of component package integrity is important because entrance of
damaging contaminants will reduce the components effective life. 4ater vapors both
sealed-in and that, which leaks into the package, is a contaminant of ma,or concern.
Moisture inside the package may result from package leaks or the moisture may be sealed
1!
in during component manufacture. *ealed-in moisture may result from improper or
inadequate handling or processing of materials. <or e$ample, the walls of ceramic
packages are a sink for moisture, which may later serve as a moisture source after sealing.
Jlass, epo$ies, shellacs and polyamides are also sinks. ) proper bake-out period and
subsequent sealing in a moisture free environment can minimi2e moisture in these areas.
Hermetically sealed components are typically evacuated or are sealed in a dry nitrogen
atmosphere. *ome component manufacturers are now including helium as part of the
component internal atmosphere to facilitate leak testing. The tubing through which the
sealing gas passes may emit moisture and contaminate the sealing gas. )lso sufficient
moisture may penetrate the tubing to contaminate the package. 6ynamic flow conditions
should e$ist to minimi2e moisture. *ealed-in moisture may be sufficient to block fine
leaks so that they are not detected.
To minimi2e leaks in the package hermetic seals, care should be taken in controlling
sealing materials. <or e$ample, sealing material additives designed to ad,ust the thermal
e$pansion coefficient between metal and glass may be contaminated or not be in proper
balance. 'nadequate control over the mechanical handling of packages can also result in
degradation of the package seal.
There are presently a number of test specifications in use, both military and commercial,
for performing helium fine leak detection and gross leak detection. 'n the absence of a
standardi2ed widely accepted test method, it is important that device manufacturers
a: Hnow the scientific capabilities of the methods being used
b: Gonform to their own stated procedures and specifications and
c: +roperly calibrate and maintain the device
6) THE HEL'U$ $ASS SPECT3%$ETE3
LEA& #ETECT%3 *$SL#)
The Helium mass spectrometer leak detector =M*L6: is a complete system for locating
and D or measuring the si2e of leak into or out of a device or a container. 'n use, this
method of leak detection is initiated when a tracer gas. Helium is introduced to a test art
that is connected to the M*L6 system .The helium leaking from the test part diffuses
through the system, its partial pressure is measured and results are displayed on a meter.
The M*L6 operating principle consists of ioni2ation of gases in a vacuum and
accelerating of the various ions through a voltage drop and a magnetic field. The helium
1&
ions are separated and collected, and the resulting ions current is amplified and indicated
on the meter.
)n M*L6 consists of a spectrometer tube, quantitively sensitive to the pressure of
helium8 a vacuum system, to maintain adequate low operating pressure in the
spectrometer tube8 mechanical pump=s:, to evacuate the part to be tested8 valves to
transfer the connection of the evacuated part from the mechanical roughing system to the
spectrometer vacuum system8 amplifier and readout instrumentation, to monitor the
spectrometer tube output signal8 electrical power supplies and control, for valve
sequencing, protective circuits etc., and fi$ing for attachment to the part be leak tested.
$a7or components)
a) Spectrometer Tube) 5
The heart of the M*L6 is the spectrometer tube, which is essentially a partial pressure
ioni2ation gauge that measures only the helium pressure in the system rather than the total
pressure. 'n spectrometer tube operation electrons produced by a hot filament enters the
ion chamber and collide with gas molecules, creating within the chamber ions
quantitatively proportional to the pressure in the ion chamber. These ions are repelled
out of the ion chamber through the e$it slits by the repeller field. The combined
electrostatic effect of the repeller, e$it slit, focus plates and ground slit collimates the ion
beam so that it enters the magnetic field as a straight >ribbon? of ions.
)t the entrance to the magnetic field, ions of all gas species are present in the ion
chamber and if an ion collector were placed at this point, its voltage would be
proportional to the total pressure in the ion chamber. However, as the ions pass through
this magnet magnetic field, they are deflected in direction proportional to their mass to
-change ration. The spectrometer tube is typically designed and ad,usted so that hydrogen
ions are deflected 1/!
"
, helium ions "
",
and all heavier species less than "
".
Gonsequently, only helium ions pass through the field e$it slits and arrive at the collector.
The collector current is therefore proportional to the partial pressure of helium in the
spectrometer tube and, within the normal operating pressure range of the M*L6, is not
affected by the pressure of the residual gases. The collector current is measured by an
electrometer amplifier and displayed on the meter.
) cold cathode ioni2ation gauge is an integral part of the tube. 't serves two functions
1: To monitor total pressure within the tube to initiate protection of the filament in
case of an e$cessive pressure rise.
1B
.: (ecause of its location between the filament and the vacuum system, to minimi2e
the quantity of gaseous hydrocarbons reaching and damaging the filament.
The ion sources is a replaceable assembly consisting of two tungsten filament that
provides a source of electrons8 an ioni2ation chamber into which the electrons are beamed
to ioni2e gas molecules8 a repeller plate that guides the positive ions through an e$it slit8
and two focus plates that direct the ion beam towards a slit in the ground potential plate.
The magnetic fields are provided by an alnico ; alloy block. The fields are ad,usted by
fi$ed and movable pole pieces. The magnet provides fields for the cold cathode gauge
and ion source as well as the field, which separates the helium ions from the other gases.
The preamplifier assembly contains an ion collector assembly to translate helium ions
into an electrical signal from e$ternal interference and stabili2e the meter reading.
6uring use, the ion source keeps the spectrometer tube assembly at normal high
temperature. 4hen the ion source is turned off, however the 1!-watt cartridge heater is
used to prevent condensation of contaminates in the tube and to keep it normal operating
temperature.
) .acuum s,stem8
'n all conventional helium leak detectors, the spectrometer tube is mounted on the inlet
side of the diffusion pump, which is connected to a mechanical pump =fore pump:. The
diffusion pump keeps the spectrometer tube at the proper vacuum level. 'n addition,
conventional leak detectors utili2e a liquid nitrogen trap to provide additional pumping
for condensable gases, such as water vapors. The trap also keeps the spectrometer tube
clean by collecting condensable contamination from the test pieces. ) second mechanical
pump =roughing pump: may be used to provide faster pump down to the roughing
vacuum in the test port. ) valving manifold used to affect transfer to high vacuum pump
=diffusion pump: and thereby bring the test piece to the same pressure as the spectrometer
tube.
The spectrometer tube pressure is maintained at less than ".. milliTorr during use. )
roughing pump is provided to evacuate the test port to a vacuum level that will not disturb
the diffusion pump#s operation =appro$imately M 1"" milliTorr:. This is typical of most
M*L6#s used in production today.
*upplementary aids to leak detector operation0
1E
/) Helium Spra, Probe) 5
'n order to locate leaks when the leak detector is used to evacuate the test piece, it is
necessary to have a controllable source of helium so that the helium can be directed at the
point of leakage in small quantities. This procedure uses a spray probes and is an
e$amples of the outside-in test technique. The spray probe assembly consists of a fle$ible
hose connected to a regulated helium supply, a spring close valve, and a fine capillary
no22le to direct the helium to a small area.
0) Sni((er Probe) 5
The *niffer probe is used in the leak location technique known as the detector probe
mode. This device attached to the inlet of the leak detector with a long fle$ible tube and is
used to pinpoint leaks from test parts pressuri2ed with helium. The probe at the end of the
tube is a small orifice, which allows vacuum to be maintained in the tube at 1"" milliTorr
in a Gontra-<low system or much lower in a conventional leak detector. This probe may
be a fi$ed orifice matched to the pump si2e or a variable orifice =needle valve: that can be
ad,usted over the operating range of the pumping system. )ny leakage in e$cess of 1"
-!
std. ccDsec can be readily located.
1) Calibration leak) 5
This device is an e$ternal reference standard that permits setting up the leak detector to
read the leak rate directly on the leak rate meter. 't is a necessity if leak rated are to be
measured or if leak rates are to be measured or if the leak detector is to re,ect leaks in
e$cess of a predetermined value. The calibration leaks are normally supplied in the 1"
-B
or
1"
-E
std. ccDsec ranges. The leak can be verified by actuating a switch.
9) TEST5 C:CLE #ESC3'PT'%"
Leak detector capable of detecting leaks from as large as 1 ccDsec to as small as .$1"
-1"
ccDsec =about 1 cc in /" years:. Ma,or assemblies, which comprise the leak detector and
include @ a mass spectrometer tube8 a vacuum diffusion pump8 thermocouple vacuum
gauge8 a series of valves sequenced by an operating handle8 a test port coupling for
connecting the ob,ects to be tested8 and two bar-graph displays, one for use with the
thermocouple gauge to indicate leak rate in the test ob,ect.
'nitially, both the diffusion pump and the mechanical pump are running and the test port
is open =unplugged:. 4ith the operating handle in the ;7%T position, the vent valve is
1
open and the rough valve is closed, so that air and other gases in the inlet manifolds are
vented to the atmosphere. )t the same time, the test valve is open, so that the diffusion
pump evacuates the spectrometer tube and the mechanical pump evacuates the diffusion
pump through the fore line. 4hen the diffusion pump is warned up, the spectrometer tube
is low enough =M . $ 1"
-C
Torr: to permit the ion-source filament in the spectrometer tube
to be energi2ed =there are actually two filaments, but only one is energi2ed at a time.:
4ith the diffusion pump warms up and the ion-source filament energi2es, the test ob,ect
is placed in =or connect to: the poet and secured, establishing a vacuum-tight seal. The
operating handle is then turned to *T)5T position, where upon the vent valve and the
test valve are closed, and the rough calve is opened. Nnder these conditions, the
mechanical pump is diverted from the primary function =as fore pump to the diffusion
pump: long enough to >rough? pump test ob,ect =<ig.: This >rough? pumping action may
take from several seconds to several minutes, depending on test ob,ect volume and
mechanical pump capacity. 4hen the test port pressure is reduced from atmosphere down
to a safe level =appro$imately 1"" milliTorr as indicated by the thermocouple gauge and
its associated hori2ontal bar graph display:, the operating handle can be moved to the
T7*T position. 'n this case, the test valve is opened and the mechanical pump is again
restored to its primary function as fore pump, while continuing to pump the test ob,ect.
;acuum communication is now established between the test port and the spectrometer
tube. )t this point, helium is applied sparingly to the test ob,ects, such as from a spray
probe. 'f there is a leak in the test ob,ect, helium entering through the leak will spread to
all parts of the evacuated system. *ome of this helium will be e$hausted through the
mechanical pump to atmosphere8 the rest of helium will be diffused through the diffusion
pump =against or >contra? the normal flow: and will reach the spectrometer tube is
indicated on the associated vertical bar-graph display and can be monitored on an internal
or optional e$ternal loudspeaker, as desired.
)s long as helium from the spray probe enters a leak in the test ob,ect, the leak rate will
be displayed on the front panel of the leak detector. 4hen the spray probe is removed, the
leak rate will drop rapidly as helium is quickly evacuated from the leak detector by action
of the diffusion and mechanical pumps. The end result is a rise and fall of the leak rate
indication on the display, which is a directly proportional to the leak rate in the test
ob,ect.
."
9) C%"CLUS'%") 5
The helium leak testing is capable of detecting leaks as small as 1"
-11
std ccDsec and it is
also capable of finding leaks as 1 std ccDsec. 't#s e$treme sensitivity in combination with
it#s capability for reliable quantitatively measurement have made it particularly popular in
many industrial application requiring e$acting leak rate specification. 6uring the last
decade this method has been simplified and automated, and it can be easily adapted to
difficult production application.
(y 1B" a number of new developments has given the helium M*L6 far more sensitivity
that was needed for most requirements O hence in subsequent design sensitivity was
traded for speed by simplifying O automating the cycle by integrating it into computer O
microprocessor controlled production line.
'mprovements to simplify manual operations by automation reduced maintenance and
increased productivity of the helium leak detector have made it possible to e$pand it#s
usage and acceptance to areas not previously considered. +harmaceutical, medical and
diagnostic equipments industries are beginning to utili2e helium leak detection techniques
as appliance, automotive, chemical and similar industries have been doing in the past
decade. Meanwhile the electronics, 5 O 6 aerospace and nuclear industries that were,
once the sole domain of the helium leak testing, continues to en,oy the benefits of new
and more sophisticated leak detection equipments.
To summari2e, some of the capabilities of the Helium Leak Test are listed below.
a: Leak rates down to 1"
-1"
mbar l D s can be detected
b: (oth ob,ects with vacuum or overpressure can be e$amined
c: The ob,ects can be e$amined during operation
d: The e$amination can be performed fast and effective
e: %on poisonous, non e$plosive and ine$pensive gasses are applied
f: Leaks can be detected in due time to prevent safety or operational ha2ards
g: Leaks can be detected in due time to prevent unplanned and e$pensive shut downs
.1

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