United S ta tes Pa tent [ 1 9 1

C o l l ins et a l .
| | | | | | l l l l l l l l I I I I l l l l | | | | | l l l l l l l l l l I l l l l l l l l l l l l l l l l l l l l l l l l l l l l l l l l l l l l l
[ 5 4 ]
[ 7 5 ]
[ 7 3 ]
[ 2 1 ]
[ 2 2 ]
[ 6 3 ]
[ 5 1 ]
[ 5 2 ]
[ 5 3 ]
[ 5 6 ]
VARI ABLE RF POWER S PLI TI 'ER
I nv ento r s : K enneth S . C o l l ins ; J o h n R. Tr o w ;
C r a ig A. Ro der ic k , a l l o f S a n J o s e,
C a l if .
As s ig nee: Ap p l ied M a etr ia l s I nc . , S a nta C l a r a ,
C a l if . _
Ap p l . N 0 . : 1 4 0 , 3 3 8
Fil ed: Oc t. 2 2 , 1 9 9 3
Rel a ted US . Ap p l ic a tio n D a ta
C o ntinu a tio n o f S er . N o . 9 7 7 , 3 5 3 , N o v . 1 7 , 1 9 9 2 , a b a n
do ned, w h ic h is a c o ntinu a tio n- in- p a r t o f S er . N o .
8 2 5 , 6 5 8 , J a n. 2 3 , 1 9 9 2 , Pa t. N o . 5 , 1 8 7 , 4 5 4 .
I nt. C l . 5 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . H0 3 H 7 /3 8
US . C l . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3 3 3 /1 3 1 ; 3 3 3 / 1 0 0
Fiel d o f S ea r c h . . . . . . . . . . . . . . . . 3 3 3 /1 0 0 , 1 7 . 3 , 3 2 , 1 2 4 ,
3 3 3 /1 3 1 , 9 9 PC
Ref er enc es C ited
U. S . PATEN T D OC UM EN TS
3 , 6 1 1 , 0 1 6 3 /1 9 7 0 Ro g er s . . . . . . . . . . . . .
3 , 8 9 1 , 9 4 7 5 /1 9 7 5 D eb o s tet a 1 . . . . . . . . . . . . . . . . . . . . . . . . . . 3 3 3 /1 7
L1
1 2
2 5
7 0 Za
1 1 1 7
1 4
US 0 0 5 3 4 9 3 1 3 A
[ 1 1 ] Pa tent N u m b er : 5 , 3 4 9 , 3 1 3
[ 4 5 ] D a te o f Pa tent: S ep . 2 0 , 1 9 9 4
4 , 6 2 6 , 3 1 2 1 2 /1 9 8 6 Tr a c y . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1 5 6 /3 4 5
4 , 6 8 0 , 5 5 9 7 /1 9 8 7 S w a ns o n . . . . . . . . . 3 3 3 /1 0 0
4 , 8 2 3 , 0 9 6 4 /1 9 8 9 Ha s h . . . . . . . . . . . . . . . . . . . . . 3 3 3 /1 0 9
4 , 8 7 1 , 4 2 1 1 0 /1 9 8 9 0 g 1 6 6 1 a 1 . . . . . . . . . . . . . 1 5 6 /3 4 5
4 , 8 8 7 , 0 0 5 1 2 /1 9 8 9 Ro u g h 6 1 1 8 . 1 . . . . . . . . 3 1 5 /1 1 1 2 1
4 , 9 5 1 , 0 0 9 8 /1 9 9 0 0 6 1 1 1 1 1 5 . . . . . . . . . . . . . . . . . . . . . . . . . . . 3 3 3 /1 7 . 3
4 , 9 8 3 , 8 6 5 1 /1 9 9 1 1 1 6 6 1 6 1 . . . . . . . . . . . . . . . . . . . . . . . . . . 3 3 3 /1 0 3
5 , 1 8 7 , 4 5 4 1 /1 9 9 2 C Ol l l nS 6 1 a 1 . . . . . . . . . . . . . . . . . . . . . . . 3 3 3 /1 7 3
Pr im a r y Exa m iner - Ro b er t J . Pa s c a l
As s is ta nt Exa m iner D a r iu s Ga m b ino
Atto r ney, Ag ent, o r Fir m - M ic h a el A. Gl enn
[ 5 7 ] ABS TRAC T
A v a r ia b l e RF p o w er s p l itter inc l u ding th r ee s er ia l l y
c o nnec ted indu c to r s ( 1 4 , 1 5 , 1 6 ) p o w er ed b y a n RF
p o w er s o u r c e ( 1 1 , 1 2 ) . Tw o l o a ds ( 1 7 , 1 8 ) , b etw een
w h ic h th e RF p o w er is to b e s p l it, a r e c o nnec ted to
g r o u nd f r o m tw o dif f er ent p o ints in th e indu c ta nc e
s tr ing . A v a r ia b l e r ea c ta nc e ( 1 9 ) c o nnec ted to g r o u nd
f r o m a no th er p o int in th e indu c ta nc e s tr ing c o ntr o l s th e
RF p o w er s p l itting .
1 5 C l a im s , 7 D r a w ing S h eets
1 5 1 6
L2 L3
Zb Zg
1 8 1 9
US . Pa tent S ep . 2 0 , 1 9 9 4 S h eet 1 o f 7 5 , 3 4 9 , 3 1 3
1 4 1 5 1 6
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2 3
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1 4 1 5 1 6
9 1 5 1 ? 1 . L1 . L2 . L3
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VARI ABLE RF POWER S PLI TTER
RELATED APPLI C ATI ON S
Th is a p p l ic a tio n is a c o ntinu a tio n o f S er . N o .
0 7 /9 7 7 , 3 5 3 , ?l ed 7 N o v em b er 1 9 9 2 a nd no w a b a n
do ned, w h ic h is a c o ntinu a tio n- in- p a r t o f S er . N o .
0 7 /8 2 5 , 6 5 8 , ?l ed J a n. 2 3 , 1 9 9 2 , no w is s u ed a s US . Pa t.
N o . 5 , 1 8 7 , 4 5 4 .
BAC K GROUN D OF THE I N VEN TI ON
1 . Fiel d o f th e I nv entio n
Th e p r es ent inv entio n r el a tes to RF p o w er s p l itter
a p p a r a tu s f o r s p l itting a r a dio f r eq u enc y ( RF) el ec tr ic a l
s ig na l b etw een tw o l o a ds , a nd, m o r e s p ec i?c a l l y, to a n
RF p o w er s p l itter w h ic h p er m its a dj u s ting th e r a tio o f
th e RF v o l ta g e a p p l ied to th e tw o l o a ds .
2 . D es c r ip tio n o f th e Pr io r Ar t
Th er e a r e m a ny a p p l ic a tio ns in w h ic h it is des ir a b l e to
b e a b l e to div ide a h ig h p o w er RF s ig na l b etw een tw o
l o a ds a nd a dj u s t th e r a tio o f v o l ta g e a p p l ied to th e tw o
l o a ds . I n s o m e a p p l ic a tio ns , it is im p o r ta nt th a t th e v o l t
a g e s p l it r a tio a nd p h a s e dif f er entia l b etw een th e tw o
o u tp u ts o f th e s p l itter b e s u b s ta ntia l l y indep endent o f
c h a ng es in im p eda nc e o f th e tw o l o a ds . Fo r exa m p l e,
w h en a n RF p o w er s p l itter is u s ed to s u p p l y p o w er to
tw o el ec tr o des o f a p l a s m a r ea c tio n c h a m b er , th e im p e
da nc e o f th e p l a s m a v a r ies dyna m ic a l l y a s a f u nc tio n o f
c h a ng ing o p er a ting c o nditio ns s u c h a s g a s p r es s u r e in
th e c h a m b er , tem p er a tu r e, a nd RF p o w er l ev el . To
m a xim iz e th e s ta b il ity o f th e p l a s m a , th e tw o o u tp u t
v o l ta g es o f th e RF p o w er s p l itter s h o u l d h a v e a s l ittl e
s ens itiv ity a s p o s s ib l e to c h a ng es in th e tw o l o a d im p ed
a nc es it is dr iv ing .
Exa m p l es o f p l a s m a r ea c to r s h a v ing RF p o w er s p l it
ter s f o r s u p p l ying p o w er to tw o el ec tr o des a r e US . Pa t.
N o . 4 , 8 7 1 , 4 2 1 g r a nted Oc t. 3 , 1 9 8 9 to Og l e et a l . f o r a
S p l it Ph a s e D r iv er f o r Pl a s m a Etc h S ys tem , a nd US .
Pa t. N o . 4 , 8 8 7 , 0 0 5 g r a nted D ec . 1 2 , 1 9 8 9 to Ro u g h et a l .
f o r a M u l tip l e El ec tr o de Pl a s m a Rea c to r Po w er D is
tr ib u tio n S ys tem .
K no w n RF p o w er s p l itter s inc l u de RF tr a ns f o r m er s
in w h ic h w ip er s o r m u l tip l e ta p s p er m it a dj u s tm ent o f
th e v o l ta g e s p l it r a tio . Ho w ev er , th is r eq u ir es th e u s e o f
m ec h a nic a l s w itc h c o nta c ts o r w ip er s w h ic h s u f f er de
ter io r a tio n o v er tim e.
Oth er k no w n RF p o w er s p l itter s c o ns is t o f netw o r k s
o f indu c to r s a nd c a p a c ito r s in w h ic h o ne o r m o r e o f th e
indu c to r s o r c a p a c ito r s is v a r ia b l e s o a s to a dj u s t th e
r a tio o f v o l ta g e a p p l ied to tw o l o a ds . Ho w ev er , in
k no w n netw o r k s o f th is typ e, th e v o l ta g e s p l it r a tio a nd
th e p h a s e dif f er entia l b etw een th e tw o o u tp u t s ig na l s
g ener a l l y a r e v er y s ens itiv e to th e im p eda nc es o f th e
l o a ds . Al s o , in s u c h netw o r k s th e r el a tiv e p h a s e a ng l e
b etw een th e tw o o u tp u t s ig na l s c h a ng es s u b s ta ntia l l y a s
th e p o w er s p l it r a tio is v a r ied.
Th er e is a need f o r a n RF p o w er s p l itter w h ic h c a n
a dj u s t th e r a tio o f v o l ta g e a p p l ied to tw o l o a ds o v er a
w ide r a ng e w ith o u t im p o s ing exc es s iv e c h a ng es in th e
r el a tiv e p h a s es o f th e tw o o u tp u t s ig na l s a nd w ith m ini
m a l s ens itiv ity to c h a ng es in th e im p eda nc es o f th e tw o
l o a ds .
S UM M ARY OF THE I N VEN TI ON
Th e p r es ent inv entio n is a n RF p o w er s p l itter w h ic h
p er m its a dj u s ting th e r a tio o f v o l ta g e a p p l ied to tw o
l o a ds . Th e p r es ent inv entio n c a n b e a dj u s ted s o th a t th e
o u tp u t s ig na l s m a inta in a r el a tiv el y c o ns ta nt p h a s e r el a
5
1 5
2 5
3 0
4 0
4 5
5 0
5 5
6 5
2
tio ns h ip a s th e v o l ta g e r a tio b etw een th e tw o o u tp u t
s ig na l s is a dj u s ted, a nd s o th a t th e v o l ta g e s p l it r a tio is
r el a tiv el y u na f f ec ted b y dyna m ic c h a ng es in th e im p ed
a nc es o f th e tw o l o a ds .
S p ec i?c a l l y, th e no v el RF p o w er s p l itter c o m p r is es
th r ee m u tu a l l y c o u p l ed indu c to r s c o nnec ted in s er ies s o
th a t th e ?r s t indu c to r is c o nnec ted b etw een a ?r s t ter m i
na l a nd a s ec o nd ter m ina l , th e s ec o nd indu c to r is c o n
nec ted b etw een th e s ec o nd ter m ina l a nd a th ir d ter m i
na l , a nd th e th ir d indu c to r is c o nnec ted b etw een th e
th ir d ter m ina l a nd a f o u r th ter m ina l . Th e RF p o w er
inp u t is c o nnec ted b etw een o ne o f th e f o u r ter m ina l s
a nd a ?f th ter m ina l , r ef er r ed to a s th e g r o u nd ter m ina l .
A v a r ia b l e r ea c ta nc e is c o nnec ted b etw een a dif f er ent
o ne o f th e ?r s t f o u r ter m ina l s a nd th e g r o u nd ter m ina l .
Th e ?r s t a nd s ec o nd l o a ds a r e r es p ec tiv el y c o nnec ted
b etw een th e ?r s t a nd s ec o nd o f th e r em a ining tw o ter
m ina l s a nd th e g r o u nd ter m ina l .
I n o p er a tio n, a dj u s ting th e v a r ia b l e r ea c ta nc e
c h a ng es th e r a tio o f v o l ta g e p r o v ided to th e tw o l o a ds .
To a v o id a ny need f o r m ec h a nic a l m o v ing p a r ts , th e
v a r ia b l e r ea c ta nc e c a n b e a ?xed c a p a c ito r in s er ies w ith
a s a tu r a b l e indu c to r w h o s e indu c ta nc e is c o ntr o l l ed b y
a n el ec tr ic a l c o ntr o l c u r r ent.
BRI EF D ES C RI PTI ON OF THE D RAWI N GS
FI GS . 1 a nd 2 a r e el ec tr ic a l s c h em a tic s o f ?r s t a nd
s ec o nd a l ter na tiv e em b o dim ents o f th e RF p o w er s p l it
ter o f th e p r es ent inv entio n.
FI G. 3 is a n el ec tr ic a l s c h em a tic o f a c o nv entio na l
v a r ia b l e indu c to r w h ic h is th e p r ef er r ed im p l em enta tio n
o f th e v a r ia b l e r ea c ta nc e in th e RF p o w er s p l itter s
s h o w n in FI GS . 1 a nd 2 .
FI G. 4 is a s ec tio na l v iew o f th e indu c to r s u s ed to
im p l em ent th e p o w er s p l itter s o f FI GS . 1 a nd 2 .
FI G. 5 is a g r a p h o f th e m a g nitu des o f b o th o u tp u t
v o l ta g es a s a f u nc tio n o f th e v a l u e o f th e v a r ia b l e indu c
to r in th e ?r s t em b o dim ent o f th e p o w er s p l itter . Th e
v o l ta g es in th e g r a p h a r e no r m a l iz ed, a s s u m ing a o ne
v o l t r m s inp u t f r o m th e RF v o l ta g e s o u r c e.
FI G. 6 is a g r a p h o f th e m a g nitu de r a tio a nd p h a s e
dif f er enc e b etw een th e tw o o u tp u t v o l ta g es a s a f u nc
tio n o f th e v a l u e o f th e v a r ia b l e indu c to r in th e ?r s t
em b o dim ent o f th e p o w er s p l itter .
FI G. 7 is a g r a p h o f th e m a g nitu de a nd p h a s e o f th e
inp u t im p eda nc e o f th e ?r s t em b o dim ent o f th e RF
p o w er s p l itter a s a f u nc tio n o f th e v a l u e o f th e v a r ia b l e
indu c to r .
FI GS . 8 - 1 0 a r e g r a p h s c o r r es p o nding to FI GS . 5 - 7 ,
r es p ec tiv el y, f o r th e s ec o nd em b o dim ent o f th e RF
p o w er s p l itter .
D ETAI LED D ES C RI PTI ON OF THE
PREFERRED EM BOD I M EN TS
FI G. 1 is a n el ec tr ic a l s c h em a tic o f th e ?r s t o f tw o
p r ef er r ed em b o dim ents o f a n RF p o w er s p l itter a c c o r d
ing to th e p r es ent inv entio n. An RF s ig na l is p r o v ided
b y a n RF p o w er s o u r c e 1 0 w h ic h is m o del l ed in th e
s c h em a tic a s a n idea l RF v o l ta g e s o u r c e 1 1 in s er ies
w ith a s o u r c e im p eda nc e 1 2 w h o s e c o m p l ex v a l u e is
r ep r es ented a s Z; _ Th e p o w er s o u r c e is c o nnec ted to o ne
end o f ?r s t indu c to r 1 4 , w h ic h in tu r n is c o nnec ted in
s er ies w ith s ec o nd a nd th ir d indu c to r s 1 5 a nd 1 6 , r e
s p ec tiv el y. Th e th r ee indu c to r s 1 4 - 1 6 a r e m u tu a l l y
c o u p l ed a nd a r e s er ies - c o nnec ted in p h a s e. I n FI G. 1 , a
do t a t o ne end o f ea c h indu c to r r ep r es ents indu c to r
ter m ina l s h a v ing c o m m o n p h a s e. Pr ef er a b l y, th e m u tu a l
5 , 3 4 9 , 3 1 3
3
c o ef ?c ient o f c o u p l ing a m o ng th e th r ee indu c to r s is a s
h ig h a s p o s s ib l e, a nd is r o u g h l y 0 . 8 in th e p r ef er r ed
em b o dim ent.
Th e ?r s t l o a d 1 7 is r ep r es ented a s h a v ing a c o m p l ex
im p eda nc e Z, , a nd is c o nnec ted a t o ne end to th e j u nc
tio n o f th e ?r s t a nd s ec o nd indu c to r s a nd a t th e o th er
end to th e g r o u nd ter m ina l o f th e RF p o w er s o u r c e 1 0 .
S im il a r l y, th e s ec o nd l o a d 1 8 h a v ing c o m p l ex im p e
da nc e Z1 , is c o nnec ted b etw een th e j u nc tio n o f th e s ec
o nd a nd th ir d indu c to r s a nd g r o u nd. La s tl y, a v a r ia b l e
r ea c ta nc e 1 9 h a v ing c o m p l ex im p eda nc e Zg is c o n
nec ted b etw een th e o th er w is e u nc o nnec ted end o f th e
th ir d indu c to r 1 6 a nd g r o u nd.
I n o p er a tio n, th e RF v o l ta g e p r o v ided b y th e RF
p o w er s o u r c e 1 0 is c o u p l ed th r o u g h th e RF p o w er
s p l itter netw o r k to th e tw o l o a ds 1 7 a nd 1 8 . Th e r a tio o f
v o l ta g e s u p p l ied to th e tw o l o a ds m a y b e a dj u s ted b y
v a r ying th e r ea c ta nc e o f v a r ia b l e r ea c ta nc e 1 9 .
FI G. 2 s h o w s a n a l ter na tiv e b u t eq u a l l y p r ef er r ed
im p l em enta tio n o f th e RF p o w er s p l itter w h ic h is iden
tic a l to th e em b o dim ent s h o w n in FI G. 1 exc ep t th a t th e
s ec o nd l o a d 1 8 a nd th e v a r ia b l e r ea c ta nc e 1 9 a r e inter
c h a ng ed. Th e dif f er enc e in p er f o r m a nc e o f th es e tw o
im p l em enta tio ns w il l b e a na l yz ed b el o w .
FI GS . 3 a nd 4 s h o w th e p r ef er r ed im p l em enta tio n f o r
th e v a r ia b l e r ea c ta nc e 1 9 . I t is a ?xed c a p a c ito r 2 2 ( h a v
ing c a p a c ita nc e C g ) c o nnec ted in s er ies w ith a c o nv en
tio na l s a tu r a b l e indu c to r 2 0 ( h a v ing indu c ta nc e L8 ) in
w h ic h a n el ec tr ic a l c o ntr o l s ig na l c o ntr o l s th e v a l u e o f
a n indu c to r . A deta il ed des c r ip tio n o f s u c h a v a r ia b l e
indu c to r a p p ea r s in c o m m o nl y a s s ig ned US . Pa t. N o .
4 , 9 5 1 , 0 0 9 b y K enneth S . C o l l ins , o ne o f th e inv ento r s o f
th e p r es ent inv entio n. Th a t p a tent is h er eb y inc o r p o
r a ted b y r ef er enc e into th is des c r ip tio n in its entir ety. I n
p a r tic u l a r , p r ef er r ed im p l em enta tio ns o f th e v a r ia b l e
indu c to r 2 0 a r e des c r ib ed in FI GS . 8 - 1 1 o f th e p a tent
a nd th e c o r r es p o nding text.
Ref er r ing to FI GS . 3 a nd 4 , v a r ia b l e indu c to r 2 0 is
w o u nd a r o u nd a s a tu r a b l e ( i. e. , no n- l inea r ) f er r o m a g
netic c o r e 3 0 . Al s o w o u nd a r o u nd c o r e 3 0 is a c o ntr o l
w inding , w h ic h p r ef er a b l y is im p l em ented a s tw o c o n
tr o l w inding s 3 2 a nd. 3 4 , inter c o nnec ted in s er ies o r in
p a r a l l el , w h ic h a r e w o u nd o n o p p o s ite ends o f c o r e 3 0
w ith indu c to r w inding 2 0 b etw een th em , a s s h o w n in
FI G. 4 . Th e m a g netic p r o p er ties o f s a tu r a b l e c o r e 3 0
a nd th e nu m b er o f w inding s o f ea c h o f th e th r ee c o il s .
2 0 , 3 2 , a nd 3 4 a r e c h o s en s o th a t th e indu c ta nc e o f in
du c to r 2 0 c a n b e a dj u s ted b y v a r ying th e c u r r ent
th r o u g h th e c o ntr o l w inding s 3 2 a nd 3 4 , b u t w il l no t b e
a f f ec ted b y v a r ia tio ns in th e c u r r ent th r o u g h indu c to r
2 0 a t th e intended RF p o w er l ev el s . A c o nv entio na l
a m p l i?er 3 6 c a n b e u s ed to c o ntr o l th e c u r r ent th r o u g h
th e c o ntr o l w inding s to a dj u s t th e v a l u e o f indu c to r 2 0 .
Th is el ec tr ic a l c o ntr o l s ys tem a v o ids a ny need f o r m e
c h a nic a l dev ic es to a dj u s t th e p o w er s p l it r a tio o f th e
RF p o w er s p l itter .
Pr ef er a b l y, th e v a r ia b l e indu c to r 2 0 ( Lg ) a nd ?xed
c a p a c ito r 2 2 ( C g ) h a v e v a l u es c h o s en s o th a t, a t th e
m idp o int o f th e a dj u s tm ent r a ng e f o r th e indu c to r 2 0 ,
th e s er ies r es o na nc e f r eq u enc y o f th e v a r ia b l e r ea c ta nc e
1 9 ( Zg ) eq u a l s th e f r eq u enc y o f th e RF p o w er s o u r c e 1 0 .
Ac c o r ding l y, a s th e indu c ta nc e o f indu c to r 2 0 is a d
j u s ted to v a l u es l o w er a nd h ig h er th a n th is m idp o int,
th e r ea c ta nc e 1 9 r a ng es f r o m c a p a c itiv e ( neg a tiv e r ea c
ta nc e) to indu c tiv e ( p o s itiv e r ea c ta nc e) .
Al th o u g h v a r ia b l e r ea c ta nc e 1 9 a l ter na tiv el y c o u l d
b e im p l em ented a s a ?xed indu c to r in s er ies w ith a c o n
v entio na l v a r ia b l e c a p a c ito r h a v ing a m ec h a nic a l l y
2 0
3 0
4 0
4 5
6 0
6 5
4
a dj u s ta b l e r o to r p l a te, it is p r ef er a b l e to a v o id th e u s e o f
m o v ing p a r ts s o a s to a v o id p r o b l em s o f m ec h a nic a l
w ea r .
FI G. 4 a l s o s h o w s th e p r ef er r ed im p l em enta tio n o f
th e th r ee m u tu a l l y c o u p l ed indu c to r s 1 4 , 1 5 a nd 1 6 . To
m a xim iz e th eir m u tu a l c o ef ?c ient o f indu c tiv e c o u p l ing ,
th ey a r e c o ns tr u c ted a s a tr i?l a r w inding o n a f er r o m a g
netic c o r e 4 0 . Th is c o r e 4 0 is no t m a g netic a l l y c o u p l ed
to s a tu r a b l e c o r e 3 0 . Th ey a r e s h o w n a dj a c ent to ea c h
o th er in FI G. 4 b ec a u s e th a t is a n a c tu a l p r ef er r ed p h ys
ic a l im p l em enta tio n.
To dem o ns tr a te th e p er f o r m a nc e o f th e p r es ent in
v entio n, RF p o w er s p l itter s a c c o r ding to th e ?r s t em
b o dim ent s h o w n in FI G. 1 a nd th e s ec o nd em b o dim ent
s h o w n in FI G. 2 w er e m o del l ed o n a c o m p u ter . Th e RF
p o w er s o u r c e 1 0 w a s a s s u m ed to h a v e a 1 . 8 M Hz f r e
q u enc y a nd a 5 0 o h m s o u r c e im p eda nc e 2 ; . Th e th r ee
m u tu a l l y c o u p l ed indu c to r s 1 4 , 1 5 a nd 1 6 w er e ea c h
a s s u m ed to h a v e a s el f indu c ta nc e ( L1 , L2 a nd L3 ) o f 1 . 5
m ic r o h enr ies a nd a p a ir w is e c o ef ?c ient o f c o u p l ing
( K 1 2 , K 2 3 a nd K 1 3 ) Of 0 . 8 .
FI GS . 5 - 7 s h o w th e r es u l ts f o r th e c o m p u ter m o del
o f th e FI G. 1 em b o dim ent, a nd FI GS . 8 - 1 0 c o r r es p o nd
to th e FI G. 2 em b o dim ent.
I n ea c h g r a p h th e h o r iz o nta l a xis dep ic ts th e v a l u e o f
v a r ia b l e r ea c ta nc e 1 9 b eing v a r ied f r o m - 6 0 o h m s to
+6 0 o h m s ( w h er e neg a tiv e a nd p o s itiv e r ea c ta nc es
r ep r es ent c a p a c ita nc e a nd indu c ta nc e, r es p ec tiv el y) . I n
th e m a th em a tic a l m o del f r o m w h ic h th es e g r a p h s w er e
p r o du c ed, th e indu c to r 2 0 w a s a s s u m ed to h a v e a D C
r es is ta nc e o f 0 . 6 o h m s .
To il l u s tr a te th e r el a tiv e indep endenc e o f th e o u tp u t
p o w er s p l it r a tio a nd p h a s e dif f er entia l a s a f u nc tio n o f
l o a d im p eda nc e, ea c h g r a p h inc l u des f o u r nu m b er ed
c u r v es r ep r es enting dif f er ent l o a d im p eda nc es . I n ea c h
c a s e, th e l o a ds a r e a s s u m ed to b e c a p a c itiv e w ith a n
im p eda nc e p h a s e a ng l e o f 4 5 . S u c h a l o a d im p eda nc e
is a g o o d m o del o f th e im p eda nc e o f th e p l a s m a s h ea th ,
a s s u m ing th e RF p o w er s p l itter is b eing u s ed to dr iv e
tw o el ec tr o des in a p l a s m a c h a m b er . To m o del th e
s ens itiv ity o f th e v o l ta g e s p l it r a tio to c h a ng es in th e
tw o l o a d im p eda nc es r es p ec tiv el y c o nnec ted to th e tw o
o u tp u ts o f th e RF p o w er s p l itter , f o u r c u r v es w er e
c o m p u ted f o r f o u r c o m b ina tio ns o f l o a d im p eda nc es a s
f o l l o w s :
With r es p ec t to th e ?r s t em b o dim ent s h o w n in FI G.
1 , FI GS . 5 a nd 6 s h o w th a t th e v o l ta g e s p l it r a tio a nd
p h a s e dif f er entia l r em a in f a ir l y indep endent o f l o a d
im p eda nc e ( i. e. , th e f o u r c u r v es a r e c l o s e to g eth er )
w h en v a r ia b l e indu c to r 1 9 is a dj u s ted o v er a r a ng e
w h ic h c a u s es th e v o l ta g e s u p p l ied to th e ?r s t l o a d 1 7
( Z, , ) to r a ng e f r o m 3 0 % to 1 0 0 % o f th e v o l ta g e to th e
s ec o nd l o a d 1 8 ( Z] , ) . Al s o , FI G. 6 s h o w s th a t th e p h a s e
dif f er entia l r em a ins w ith in : 4 5 w h en th e p o w er s p l it
r a tio is a dj u s ted w ith in th is r a ng e. Th is is b etter c o n
s ta nc y th a n w a s o b ta ina b l e w ith p r io r a r t LC p o w er
s p l itter netw o r k s . FI G. 7 s h o w s th e inp u t im p eda nc e o f
th e RF p o w er s p l itter o v er th e s a m e r a ng e o f c o ndi
tio ns .
5 , 3 4 9 , 3 1 3
5
With r es p ec t to th e s ec o nd em b o dim ent s h o w n in
FI G. 2 , FI GS . 8 a nd 9 s h o w th a t th e s ens itiv ity o f th e
v o l ta g e s p l it r a tio to c h a ng es in l o a d im p eda nc e is
g r ea ter ( i. e. , w o r s e) th a n in th e ?r s t em b o dim ent. Ho w
ev er , th e s ec o nd em b o dim ent m a inta ins a m o r e c o ns ta nt
p h a s e dif f er entia l b etw een th e tw o o u tp u t s ig na l s w h en
eith er th e p o w er s p l it r a tio o r th e l o a d im p eda nc es a r e
v a r ied. Th er ef o r e, w h ic h em b o dim ent is p r ef er a b l e
dep ends w h eth er it is m o r e im p o r ta nt in a g iv en a p p l ic a
tio n to m a inta in a c o ns ta nt r el a tiv e a m p l itu de o r a c o n
s ta nt r el a tiv e p h a s e dif f er entia l b etw een th e tw o o u tp u t
s ig na l s . FI G. 1 0 s h o w s th e inp u t im p eda nc e f o r th e
s ec o nd em b o dim ent o v er th e s a m e r a ng e o f c o nditio ns .
Al th o u g h o nl y tw o em b o dim ents h a v e b een de~
s c r ib ed, it is c l ea r th a t a dditio na l em b o dim ents c a n b e
c o ns tr u c ted b y inter c h a ng ing th e f o u r c o m p o nents c o n
nec ted to th e th r ee m u tu a l l y c o u p l ed indu c to r s , th a t is ,
b y inter c h a ng ing th e c o nnec tio n p o ints o f th e p o w er
s o u r c e 1 0 , th e tw o o u tp u t l o a ds 1 7 a nd 1 8 , a nd th e v a r i
a b l e r ea c ta nc e 1 9 . Fo r exa m p l e, in FI G. 2 th e p o w er
s o u r c e 1 0 c o u l d b e inter c h a ng ed w ith eith er th e ?r s t
o u tp u t l o a d 1 7 o r th e v a r ia b l e r ea c ta nc e 1 9 . I n a dditio n,
a ny o f th e th r ee indu c to r s 1 4 - 1 6 c a n b e r ev er s ed end- to
end to a l ter th e p h a s e r el a tio ns h ip s o f th e o u tp u t s ig na l s .
As dem o ns tr a ted b y th e p r ec eding des c r ip tio n, a n RF
p o w er s p l itter h a v ing th e no v el LC netw o r k to p o l o g y
o f th e p r es ent inv entio n w h ic h inc o r p o r a tes th r ee m u tu
a l l y c o u p l ed indu c to r s a nd a v a r ia b l e r ea c ta nc e h a s
p er f o r m a nc e a ttr ib u tes no t f o u nd in th e p r io r a r t. S p e
c i?c a l l y, it is s u p er io r w h en dyna m ic a l l y v a r ying l o a ds ,
s u c h a s a p l a s m a in a r ea c tio n c h a m b er , m u s t b e dr iv en
w h il e m a inta ining a n o u tp u t v o l ta g e s p l it r a tio a nd
p h a s e dif f er entia l w h ic h is r el a tiv el y indep endent o f
?u c tu a ting l o a d im p eda nc e. I t a l s o p er m its th e v o l ta g e
s p l it r a tio b e a dj u s ted o v er a w ide r a ng e w ith m inim a l
v a r ia tio n in th e p h a s e a ng l e b etw een th e o u tp u t s ig na l s .
La s tl y, it is s u ita b l e f o r im p l em enta tio n w ith o u t m e
c h a nic a l m o v ing p a r ts o r s w itc h c o nta c ts .
We c l a im :
1 . An a dj u s ta b l e RF p o w er s p l itter f o r c o u p l ing
p o w er r ec eiv ed a t a n inp u t ter m ina l to tw o o u tp u t ter
m ina l s , w h er ein th e r a tio o f RF v o l ta g e to th e tw o
o u tp u ts is a dj u s ta b l e, c o m p r is ing :
?r s t, s ec o nd, a nd th ir d m u tu a l l y c o u p l ed indu c to r s
c o nnec ted in s er ies s o th a t th e ?r s t indu c to r is c o n
nec ted b etw een a ?r s t el ec tr ic a l j u nc tio n a nd a
s ec o nd j u nc tio n, th e s ec o nd indu c to r is c o nnec ted
b etw een th e s ec o nd j u nc tio n a nd a th ir d j u nc tio n,
a nd th e th ir d indu c to r is c o nnec ted b etw een th e
th ir d j u nc tio n a nd a f o u r th j u nc tio n;
a n inp u t ter m ina l a nd a r ef er enc e ter m ina l a da p ted f o r
r ec eiv ing a n RF p o w er inp u t s ig na l th er eb etw een,
th e inp u t ter m ina l b eing c o nnec ted to o ne o f th e
f o u r j u nc tio ns ;
a v a r ia b l e r ea c ta nc e w h o s e im p eda nc e is a dj u s ta b l e
o v er a r a ng e, th e v a r ia b l e r ea c ta nc e b eing c o n
nec ted b etw een o ne o f th e o th er th r ee j u nc tio ns
a nd th e r ef er enc e ter m ina l ;
a ?r s t o u tp u t ter m ina l c o nnec ted t o ne o f th e o th er
tw o j u nc tio ns ; a nd
a s ec o nd o u tp u t ter m ina l c o nnec ted to th e r em a ining
j u nc tio n;
w h er eb y ?r s t a nd s ec o nd o u tp u t v o l ta g es a r e p r o
du c ed b etw een th e ?r s t a nd s ec o nd o u tp u t ter m i
na l s , r es p ec tiv el y, a nd th e r ef er enc e ter m ina l , a nd
w h er eb y a dj u s ting th e v a r ia b l e r ea c ta nc e o p er a tes
to v a r y th e r a tio b etw een th e ?r s t a nd s ec o nd v o l t
a g es .
2 . A p o w er s p l itter a c c o r ding to c l a im 1 , w h er ein th e
j u nc tio n to w h ic h th e inp u t ter m ina l is c o nnec ted is th e
?r s t j u nc tio n.
5
2 0
2 5
4 5
5 5
6 5
6
3 . A p o w er s p l itter a c c o r ding to c l a im 1 , w h er ein th e
?r s t, s ec o nd, a nd th ir d indu c to r s a r e c o ns tr u c ted b y
w inding ?r s t, s ec o nd, a nd th ir d c o il s , r es p ec tiv el y,
a r o u nd a c o m m o n f er r o m a g netic c o r e.
4 . A p o w er s p l itter a c c o r ding to c l a im 1 , w h er ein th e
v a r ia b l e r ea c ta nc e r es o na tes a t th e f r eq u enc y o f th e RF
inp u t s ig na l w h en th e v a r ia b l e r ea c ta nc e is a dj u s ted to a
p o int nea r th e m iddl e o f its a dj u s tm ent r a ng e, w h er eb y
th e v a r ia b l e r ea c ta nc e c a n b e a dj u s ted to a c a p a c itiv e
im p eda nc e a t o ne end o f its a dj u s tm ent r a ng e a nd to a n
indu c tiv e im p eda nc e a t th e o p p o s ite end o f its a dj u s t
m ent r a ng e.
5 . A p o w er s p l itter a c c o r ding to c l a im 4 , w h er ein th e
v a r ia b l e r ea c ta nc e c o m p r is es a ?xed indu c to r in s er ies
w ith a v a r ia b l e c a p a c ito r .
6 . A p o w er s p l itter a c c o r ding to c l a im 4 , w h er ein th e
v a r ia b l e r ea c ta nc e c o m p r is es a ?xed c a p a c ito r in s er ies
w ith a v a r ia b l e indu c to r .
7 . A p o w er s p l itter a c c o r ding to c l a im 6 , w h er ein th e
v a r ia b l e indu c to r c o m p r is es a c o il w o u nd o n a no nl inea r
f er r o m a g netic c o r e, a nd w h er ein a m a g netic ?el d o f
a dj u s ta b l e intens ity is a p p l ied to th e no nl inea r c o r e to
a dj u s t th e indu c ta nc e o f th e v a r ia b l e indu c to r .
8 . A p o w er s p l itter a c c o r ding to c l a im 1 , w h er e s a id
?r s t, s ec o nd, a nd th ir d m u tu a l l y c o u p l ed indu c to r s h a v e
v a l u es o f p a ir w is e m u tu a l c o ef ?c ients o f c o u p l ing K 1 2 ,
K 1 3 , a nd K 3 th er eb etw een o f a t l ea s t 0 . 8 .
9 . An RF p o w er s p l itter , c o m p r is ing :
?r s t, s ec o nd, a nd th ir d m u tu a l l y c o u p l ed indu c to r s
c o nnec ted in s er ies , th e ?r s t indu c to r c o nnec ted
b etw een a ?r s t ter m ina l a nd a s ec o nd ter m ina l , th e
s ec o nd indu c to r c o nnec ted b etw een th e s ec o nd
ter m ina l a nd a th ir d ter m ina l , a nd th e th ir d indu c
to r c o nnec ted b etw een th e th ir d ter m ina l a nd a
f o u r th ter m ina l ;
a n RF p o w er inp u t s ig na l c o nnec ted b etw een o ne o f
s a id f o u r ter m ina l s a nd a r ef er enc e ter m ina l ;
a ?r s t a nd a s ec o nd l o a d, ea c h l o a d c o nnec ted b e
tw een a dif f er ent o ne o f th e o th er th r ee ter m ina l s ,
r es p ec tiv el y, a nd s a id r ef er enc e ter m ina l ; a nd
a v a r ia b l e r ea c ta nc e c o nnec ted b etw een a r em a ining
o ne o f th e f o u r ter m ina l s a nd s a id r ef er enc e ter m i
na l , s a id v a r ia b l e r ea c ta nc e b eing o p er a b l e to v a r y
th e v o l ta g e r a tio b etw een th e ?r s t l o a d a nd th e
s ec o nd l o a d.
1 0 . A p o w er s p l itter a c c o r ding to c l a im 9 , w h er ein
th e j u nc tio n to w h ic h th e inp u t s ig na l is c o nnec ted is th e
?r s t j u nc tio n.
1 1 . A p o w er s p l itter a c c o r ding to c l a im 9 , w h er ein
th e ?r s t, s ec o nd, a nd th ir d indu c to r s a r e c o ns tr u c ted b y
w inding ?r s t, s ec o nd, a nd th ir d c o il s , r es p ec tiv el y,
a r o u nd a c o m m o n f er r o m a g netic c o r e.
1 2 . A p o w er s p l itter a c c o r ding to c l a im 9 , w h er ein
th e v a r ia b l e r ea c ta nc e r es o na tes a t th e f r eq u enc y o f th e
RF inp u t s ig na l w h en th e v a r ia b l e r ea c ta nc e is a dj u s ted
to a p o int nea r th e m iddl e o f its a dj u s tm ent r a ng e,
w h er eb y th e v a r ia b l e r ea c ta nc e c a n b e a dj u s ted to a
c a p a c itiv e im p eda nc e a t o ne end o f its a dj u s tm ent r a ng e
a nd to a n indu c tiv e im p eda nc e a t th e o p p o s ite end o f its
a dj u s tm ent r a ng e.
1 3 . A p o w er s p l itter a c c o r ding to c l a im 1 2 , w h er ein
th e v a r ia b l e r ea c ta nc e c o m p r is es a ?xed indu c to r in
s er ies w ith a v a r ia b l e c a p a c ito r .
1 4 . A p o w er s p l itter a c c o r ding to c l a im 1 2 , w h er ein
th e v a r ia b l e r ea c ta nc e c o m p r is es a ?xed c a p a c ito r in
s er ies w ith a v a r ia b l e indu c to r .
1 5 . A p o w er s p l itter a c c o r ding to c l a im 1 4 , w h er ein
th e v a r ia b l e indu c to r c o m p r is es a c o il w o u nd o n a no n
l inea r f er r o m a g netic c o r e, a nd w h er ein a m a g netic ?el d
o f a dj u s ta b l e intens ity is a p p l ied to th e no nl inea r c o r e to
a dj u s t th e indu c ta nc e o f th e v a r ia b l e indu c to r .
* 1 * it *