Prepared for

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Prepared by : VEC Engineer
Work done on : 1/1-2/2003
4555 Paul Sweet Road
Santa Cruz, CA 95065
Tel: (831) 465-9189
Fax: (831) 465-9341
service@vibeng.com
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Site Survey Report
Vibration, EMI and Acoustics
Sample site survey.doc Page 2 of 9
TABLE OF CONTENTS
Introduction
Instrumentation
Test Procedure
Conclusions
Sample site survey.doc Page 3 of 9
Introduction
The purpose of this measurement survey was to establish the floor vibration, the electromagnetic
interference (EMI) and the acoustic intensity levels at the candidate locations for the proposed
Scanning Electron Microscope.
Instrumentation
The instrumentation utilized to conduct the testing is itemized below:
Spectrum Analyzer: Data Physics ACE DP-104
Accelerometer: Wilcoxon 731 seismic accelerometer,
Serial Number 791, 100 Volt per G.
EMI coil: MSI Magcheck 95, 1.0 millivolt per milligauss
Microphone: RS 33-2050
All instrumentation and the spectrum analyzer are currently calibrated with documentation in
place traceable to the National Institute of Standards and Technology.
The analyzer has a low range sensitivity to -130 DB.
Test Procedures
Vibration measurements were made on the floor in three directions at the locations where the
scanning electron microscope is proposed to be located. The EMI and sound pressure
measurements were made approximately four feet above the floor.
The Peak-Peak acceleration measurements were first made at a bandwidth of 312 hertz. Power
spectra functions of displacement are produced from the acceleration measurements by double
integration. The displacement spectra with 312 hertz bandwidth, were taken and recorded on the
disk of the analyzer.
The RMS EMI measurements were performed at a bandwidth of 625 hertz. Power spectra
functions of EMI in three directions were recorded on disk for later processing and plotting.
The acoustic levels were measured with a calibrated microphone and the dBA and dBC levels
were recorded and reported for each site.
All measurements were recorded on the internal disk of the analyzer for later processing.
Measurements were taken under normal operating conditions.
The integrated displacement is calculated from the acceleration spectra by first dividing each
amplitude value by the circular frequency (omega = 2*Pi*frequency) squared to obtain the
displacement spectra from the acceleration spectra and then integrating by computing the area
Sample site survey.doc Page 4 of 9
under the curve. This method of calculation closely approximates the results obtained from an
integrating analog displacement meter. It also accounts for both the broadband and narrow band
displacement energy present in the floor spectra.
The test results are further summarized in the table(s) via peak to peak displacement, EMI ( rms )
values calculated from the power spectra functions and sound pressure level.
The measurement type, direction and measurement bandwidth are shown on each graph.
Conclusions
Vibration: Meets the published specification.
EMI: Fails to Meet the published specification.
Acoustics: Meets the published specification.
DC field change: Meets the published specification.
Sample site survey.doc Page 5 of 9
Vibration, EMI and Acoustical Levels
Site 1
Vibration Levels
Direction
Largest Displacement
Microns peak-peak
RMS Save
X North - South 0.30 @ 1 hz 0.56 2
Y East West 0.27 @ 1 hz 0.50 3
Z Vertical 0.80 @ 1 hz 0.57 4
EMI
60 RMS
Milligauss
180 Hz RMS
Milligauss
RMS
Milligauss
Save
X 0.27 0.10 0.37 2
Y 0.44 0.07 0.53 3
Z 0.20 0.04 0.21 4
Acoustics
Level 64 dBA 74 dBC 2
DC Magnetic Field change : 0.3 mg
Site 1 Peak-Peak DISPLACEMENT X
50.0 100.0 150.0 200.0 250.0 300.0
1.0p
10.0p
100.0p
1.0n
10.0n
100.0n
1.0u
Hz
L
o
g
M
a
g
,

m
RMS: 5.60702e-007
Sample site survey.doc Page 6 of 9
Site 1 Peak-Peak DISPLACEMENT Y
50.0 100.0 150.0 200.0 250.0 300.0
10.0p
100.0p
1.0n
10.0n
100.0n
1.0u
Hz
L
o
g
M
a
g
,

m
RMS: 5.03471e-007
Site 1 Peak-Peak DISPLACEMENT Z
50.0 100.0 150.0 200.0 250.0 300.0
10.0p
100.0p
1.0n
10.0n
100.0n
1.0u
Hz
L
o
g
M
a
g
,

m
RMS: 5.77663e-007
Sample site survey.doc Page 7 of 9
Site 1 RMS EMI X
100.0 200.0 300.0 400.0 500.0 600.0
1.0u
10.0u
100.0u
1.0m
Hz
L
o
g
M
a
g
,

G
a
u
s
s

r
m
s
RMS: 0.000372706
Site 1 RMS EMI Y
100.0 200.0 300.0 400.0 500.0 600.0
1.0u
10.0u
100.0u
1.0m
Hz
L
o
g
M
a
g
,

G
a
u
s
s

r
m
s
RMS: 0.000534187
Sample site survey.doc Page 8 of 9
Site 1 RMS EMI Z
100.0 200.0 300.0 400.0 500.0 600.0
1.0u
10.0u
100.0u
1.0m
Hz
L
o
g
M
a
g
,

G
a
u
s
s

r
m
s
RMS: 0.000268205
Site 1 DC Field Change
0 1.0 2.0 3.0 4.0
-3.0m
-2.0m
-1.0m
0
1.0m
2.0m
3.0m
sec
R
e
a
l
,

G
a
u
s
s
Sample site survey.doc Page 9 of 9
Site 1 RMS ACOUSTICAL LEVEL
0 500.0 1.0K 1.5K 2.0K
10.0u
100.0u
1.0m
10.0m
100.0m
1.0
Hz
L
o
g
M
a
g
,

(
P
a
)
r
m
s