The SIJ Transactions on Computer Science Engineering & its Applications (CSEA), Vol. 2, No.

3, May 2014
ISSN: 2321-2381 2014 | Published by The Standard International Journals (The SIJ) 82



AbstractA fundamental study of structures fabricated by a 3D-printer is described. We have succeeded in
fabricating beam structure with dimensions of 250m and 200m for the width and thickness, respectively.
Interdigitated single-sided lateral comb structure has also been designed and fabricated. This structure acts as
an electrostatic actuator by suitably masking and subsequently metalizing the structure itself. The design is
based on MEMS (Micro Electromechanical Systems) design concept. The structure performs an in-plane
lateral motion by applying a voltage between the interdigitated comb fingers. It laterally moved about12m
with a drive voltage of 200V at a resonance frequency of 43Hz. The mechanical quality factor has been
estimated to be 11 from the measured frequency characteristic. 3D-printer is widely used for making mockup
models, on the other hand, we have used it for fabricating functional devices which is the originality of this
study. The authors named these novel devices as SMEMS (Sub-Milli Electromechanical Systems), because 1)
the minimum possible fabrication dimension of the 3D-printer is in the order of sub-millimeters, and 2)
electromechanical structure design is based on MEMS design concept. Unlike MEMS fabrication technology,
SMEMS is an environment-clean technology because it does not use any hazardous chemicals or gases.
Keywords3D-Printer; Environment-Clean; MEMS; SMEMS; Sub-Millimeter.
AbbreviationsComputer Aided Design (CAD); Greenhouse Gases (GHG); Micro Electromechanical
Systems (MEMS); Sub-Milli Electromechanical Systems (SMEMS).

I. INTRODUCTION
ECENTLY, 3D-printers are used for fabrication of
3D models or mock-ups in order to assist an
understanding of realistic models. 3D CAD
(Computer Aided Design), CAE (Computer Aided
Engineering), CAM (Computer Aided Manufacturing)
became an active research area for 3D modelling technology
[Wu et al., 2007; Uzun, 2008, Prabhu et al., 2014], where a
data can directly create an object without a complex
fabrication process. Basically, such a technology has been
developed for making a prototype in order to evaluate basic
mechanisms such as component interference, performance
behaviour and appearance check prior to flow into the
production line. This process is called Rapid Prototyping
(RP) since it can be performed at high speed.
Stereolithography, 3D printing, fused deposition modelling
(including inkjet printing and jetted photopolymer) and
laminated object manufacturing are the representative RP
manufacturing methods [Xu et al., 1999; Wu et al., 2001;
Dimitrov et al., 2007; Stopp et al., 2008; Vinodh et al., 2009;
Chang & Long, 2011; Cheng et al., 2012]. Recently, high
performance RP machines are on the market from several
companies [Roberson et al., 2013].
MEMS (Micro Electromechanical Systems) technology
is based on semiconductor microfabrication technology.
MEMS actuators and sensors such as gyroscopes,
accelerometers, gas sensors and micromirrors have been
developed [Lowrie et al., 2009; Esashi, 2012; Bogue, 2013].
One of the key process technology for realizing these devices
is the high aspect ratio etching technology called deep-RIE
(Reactive Ion Etching) based on Bosh process which utilizes
SF
6
(sulfur hexafluoride) and C
4
F
8
(perfluorocyclobutane)
gases [Hynes et al., 1999]. However, such gases, known as
GHG (greenhouse gases), cause global warming [Lashof &
Ahuja, 1990; Morris et al., 1995] which is a huge issue
nowadays. Alternative environment friendly etching gases are
under research although there is no significant progress.
Another key process technology is the supercritical drying
technique [Mulhern et al., 1993], which is used to avoid
R
*Associate Professor, Department of Mechanical Engineering, Ishinomaki Senshu University, Ishinomaki City, Miyagi Prefecture, JAPAN.
E-Mail: mizuno{at}isenshu-u{dot}ac{dot}jp
**Associate Professor, Department of Mechanical Engineering, Ishinomaki Senshu University, Ishinomaki City, Miyagi Prefecture, JAPAN.
E-Mail: s-takahashi{at}isenshu-u{dot}ac{dot}jp
Jun Mizuno* & Satoshi Takahashi**
Characterization of an In-Plane Single-
Sided Lateral Comb Actuator Fabricated
by a 3D-Printer
The SIJ Transactions on Computer Science Engineering & its Applications (CSEA), Vol. 2, No. 3, May 2014
ISSN: 2321-2381 2014 | Published by The Standard International Journals (The SIJ) 83
sticking problem due to surface tension during the device
releasing or post-process drying. In this process, large
quantity of CO
2
, which is also one of a GHG, is used.
Moreover, hazardous chemicals and gases are used during the
fabrication process. It would be desirable an environment-
clean process.
Recently, a fundamental study of structures fabricated by
a 3D-printer has been reported by the authors in the
conference proceeding [Mizuno & Takahashi, 2014]. In this
previous work, the fabricated device was right in the middle
of characterization. This time, the device has been fully
characterized and promising results has been obtained. In this
paper, which is an extended version of our conference
manuscript, we firstly report the previous work with
additionally detailed information about the comb structure
design, as follows: 1) investigation and clarification of the
minimum possible fabrication dimension of a plaster-based
3D-printer by designing and fabricating a test piece consisted
of beam patterns; 2) design and fabrication methods of an
interdigitated single-sided lateral comb structure. Then,
characterization of the device consisted of experimental
setup, results and discussion, which is the new material of
this work, is reported.
In this work, a plaster-based 3D-printer has been used.
Since plaster composite are electrically insulating material,
suitable masking and metallization is needed for electrode
formations in order to achieve an electromechanical function.
The design of such a device is based on MEMS (Micro
Electromechanical Systems) design concept. Furthermore,
since the minimum fabrication dimension is in the order of
sub-millimeters, the authors named these novel devices as
SMEMS (Sub-Milli Electromechanical Systems). Unlike
MEMS fabrication technology, SMEMS is an environment-
clean technology. Another advantage of SMEMS is that
complex structures can be easily fabricated once we have a
3D data. From the device characterization results, we have
demonstrated for the first time that a SMEMS can perform an
electromechanical actuator.
II. DESIGN AND FABRICATION
2.1. I nvestigation of Minimum Possible Fabrication
Dimension
In order to demonstrate the feasibility of SMEMS, we have
designed and investigated the minimum possible fabrication
dimension of an interdigitated comb structure. For this study,
we have used a plaster-based 3D-printer (Z Printer 450, 3D
Systems Corporation). Firstly, we designed a pattern
consisted of several beams with widths varying from 0.05mm
to 1.0mm by step of 0.05mm. The beam length is set at ten
times in relation to its width and the thickness is 0.2mm for
all beams. The 3D-CAD data of the designed test piece is
shown in figure 1, where the left side figure is the overall
view where 3 similar patterns are located side-by-side. The
right side figure is an image zooming of the pattern.
We succeed in fabricating beam with dimensions of
250m and 200m for the width and thickness, respectively
(see figure 2). The layer pitch in the z-axis has been set to
100m.

Figure 1: 3D-CAD Data of a Designed Test Piece

Figure 2: Fabricated Test Piece by a Plaster-based 3D-Printer
2.2. I nterdigitated Single-sided Lateral Comb Structure
Next, we have designed an interdigitated single-sided lateral
comb structure. The structure consists of stationary and
movable comb fingers that are interdigitated to each other
and placed on the same plane. Eleven stationary comb fingers
are connected to a fixed frame. On the other hand, ten
movable comb fingers are connected to a squared perforated
plate which is supported by a pair of beam shaped springs.
Although the comb finger set is connected to only one side of
the plate, the perforated structure has been extended to both
sides in relation to the spring axis in order to get a weight
balance. The dimensions of the comb fingers for both
stationary and movable ones are similar and they are as
follows: width w=500m, thickness t=1,000m, length
L=15mm, and comb gap between the stationary and movable
fingers g=500m. The two stationary fingers located at both
ends are two times thicker in width (w=1mm) in relation to
the other finger width. The reason to make them thicker is
that when the actuator is operating, only one side of the finger
is pulled by electrostatic force so that bending in the actuated
direction would be a problem. In the case of other fingers,
since adjacent fingers are located on both sides of one finger,
electrostatic forces work ambilaterally, so that a well-
balanced actuation is performed. The fingers tip and the
opposed side wall are separated by a distance of 1mm. The
perforated plate thickness is 500m. The beam shaped spring
is 500m in width, 500m in thickness and 15.50mm in
length. The end facets of both springs are anchored to the
same frame where the stationary comb finger set is
Image Zooming
Beam
Width
Length
The SIJ Transactions on Computer Science Engineering & its Applications (CSEA), Vol. 2, No. 3, May 2014
ISSN: 2321-2381 2014 | Published by The Standard International Journals (The SIJ) 84
connected. The overall size of this frame in the parallel and
orthogonal directions of the spring axis is 48mm and 61mm,
respectively. The frame width and thickness is 6mm and
5mm, respectively. The 3D-CAD data of the designed device
is shown in figure 3. After 3D-printing the structure,
polyimide films are used for masking the both side of the
frame in order to get an electrical isolation between the
stationary and movable combs. Then all surfaces including
the side walls are metalized by Au ion sputtering for
formation of electrodes and polyimide films are removed at
the end. Figure 4 shows the fabricated device. The yellow
colour surfaces are the Au sputtered parts, and the white
colour surfaces are bare parts (i.e., plaster composite itself)
that have been masked during metallization process.

Figure 3: 3D-CAD Data of Designed Actuator

Figure 4: Fabricated Actuator by SMEMS Technology
III. DRIVE PRINCIPLE
Since the side walls of the comb fingers are metalized, the
fabricated structure acts as a comb-drive actuator when a
drive voltage is applied between the interdigitated fingers. As
described in the previous section, stationary and movable
comb set are electrically isolated by suitably masking before
metalizing. Applying a voltage between the stationary and
movable combs, electrostatic force pulls the movable comb
part toward the stationary one. Once the voltage is turned off,
the movable comb part moves back by the restoring force of
the springs. Since both stationary and movable combs are
fabricated on the same layer, the actuator performs an in-
plane lateral motion.
IV. CHARACTERIZATION
4.1. Experimental Setup
The experimental setup for the characterization of the
fabricated SMEMS actuator has been conducted. Regarding
the drive voltage for the comb actuator, a 200V peak-to-peak
square-wave pulse at duty cycle of 50% with a positive offset
of 100V has been applied to the stationary comb finger set.
Such a drive voltage has been created from a 4V peak-to-
peak signal at duty cycle of 50% with an offset of 2V
generated by a function generator (WF1948, NF Corporation)
which has been 50 times amplified by a signal amplifier
(9200A, Tabor Electronics Ltd.) as shown in figure 5. The
duty cycle has not been changed after amplification. The
movable part has been connected to the ground. A
schematically electrical connection of the drive voltage and
the ground on the actuator is shown in figure 6. As previously
described, the amplified drive voltage is applied to the
stationary comb finger set through the fixed frame by a
contact pad. The ground is applied to the movable comb
finger set in the same manner to that of the stationary comb
finger set by a contact pad connected to the fixed frame. The
ground reaches the movable comb finger set through the
hinge and perforated structure, which is indicated by ground
path in figure 6. The hatched areas express electrical
isolations. In concrete terms, the drive voltage and ground
have been applied to the actuator by sticking copper wires by
conductive tapes which act as contact pads, as shown in
figure 7. Next, the optical system setup for measuring the
lateral motion shown in figure 8 is described. Firstly a small
right isosceles prims has been placed on the middle area of
the movable plate. An Au coated thin cover glass piece has
been stuck on the hypotenuse facet of the prism in order to
reflect a laser beam as follows. An outgoing laser beam from
a He-Ne laser head (wavelength=632.8nm) is conveniently
deflected by adjusting the position and angle of the steering
mirrors set in order to achieve the prism facet at an angle of
45 degrees in relation to the orthogonal axis of this facet. This
means that the laser beam is aligned parallel with the actuator
top surface. Then, the incoming He-Ne laser beam incidents
on the Au coated glass and right-angled reflected. Therefore,
after reflecting the prism, the laser beam propagates in the
vertical direction. The reflected laser beam is detected by
placing a PSD (position sensitive device, C10443-02,
Hamamatsu Photonics K. K.) in such a way that the window
sensor of the PSD is perpendicular to the beam direction. The
PSD outputs a real-time voltage that is proportional to the
incident beam position on the sensor. By using the above
measurement setup, the beam, which is right-angled reflected
by the isosceles prism, reproduces the in-plane lateral motion
of the actuator. Thus, the displacement x detected by the
PSD is the equivalent value of the lateral displacement of the
actuator as shown in figure 9. Regarding the data collection,
drive voltage and PSD output signal has been captured by a
digital storage oscilloscope (TDS2004C, Tektronix
Company). The drive voltage has been taken from the
monitor signal output of the amplifier. This monitor signal
The SIJ Transactions on Computer Science Engineering & its Applications (CSEA), Vol. 2, No. 3, May 2014
ISSN: 2321-2381 2014 | Published by The Standard International Journals (The SIJ) 85
outputs a 1/100 of the drive voltage. The 1/100 monitor
output has been connected to the oscilloscope by a 50
impedance coaxial cable. In order to calibrate the view of this
voltage, the channel connected to this monitor signal has been
adjusted to 100x probe mode. On the other hand, the output
voltage of the PSD has been connected to a 10x probe. Thus
the view of this signal has been adjusted to a 10x probe
mode. The raw data of the drive voltage and the PSD output
voltage has been saved in a CSV format.

Figure 5: Construction of a Drive Voltage Signal

Figure 6: Schematic of Electrical Connections

Figure 7: Electrical Connections for the Device Characterization

Figure 8: Experimental Setup

Figure 9: In-plane Lateral Motion Measurement Setup
4.2. Results and Discussion
The drive voltage and the PSD output voltage have been
plotted in figure 10 based on the raw data collected by the
oscilloscope. The horizontal and the left vertical axes are time
and the peak-to-peak voltage signal of the drive voltage,
respectively. The right vertical axis is the PSD voltage output
signal. The average peak-to-peak amplitude of the PSD signal
is 12mV at the resonance frequency of 43Hz. This frequency
has been coarsely found by manually sweeping the frequency
of the function generator, and then finely tuned thereafter.
The output voltage and position relation of the PSD is
1V/mm, or 1mV/m by converting it into a more convenient
units. Since the PSD signal amplitude is 12mV, by using the
voltage and position relation mentioned above, the movable
structure laterally moved12m (full-width). From this result,
we demonstrated that the fabricated device works as an
electromechanical actuator. The PSD signal output is a
sinusoidal wave because the actuator responses only at the
fundamental frequency of the driving square-wave input
signal. It means that the actuator works as a mechanical low
pass filter. Figure 11 shows the frequency characteristic
where the peak indicates the resonance frequency which is
consistent with both amplitude and frequency obtained from
the driving experiment shown in figure 10. For data
collection of the frequency response, the frequency of the
function generator has been manually swept. Points have
been collected in small intervals for frequency region around
the resonance peak, and coarse intervals for frequencies far
from the peak. Based on the frequency characteristic, the
Duty=50%
4Vpp
2V
Duty=50%
(Not Changed)
200Vpp
100V
50Amplification
Amplitude: 04Vpp50=200Vpp
Offset: 2V50=100V
Pulse Generated by Function Generator Pulse Amplified by 50Amplifier
(Not in Scale)
Ground
Duty=50%
200Vpp
100V
Ground Path
Hatched Area: Electrical Isolation
Hatched Area: Electrical Isolation
Contact Pad
Contact Pad
Hinge
Perforated Structure
Movable Comb Finger x10
Fixed Comb Finger x11
Fixed Frame
He-Ne Laser
PSD
Steering
Mirrors
Prism
Amplifier
Function
Generator
Oscilloscope
PSD Signal
Monitor
Signal
Drive
Signal
Pulse
Signal
He-Ne Laser
Device
Prisms
0
0
PSD
He-Ne Laser
Prisms
0
0
PSD
Device
x
x
Equivalent
Value
In-Plane Lateral Motion
The SIJ Transactions on Computer Science Engineering & its Applications (CSEA), Vol. 2, No. 3, May 2014
ISSN: 2321-2381 2014 | Published by The Standard International Journals (The SIJ) 86
mechanical quality factor has been estimated to be 11. This
value has been calculated by the division of the resonance
frequency and half-power bandwidth (since voltage is
amplitude instead of power, the half-power bandwidth has
been taken at the maximum amplitude divided by the square
root of 2). The low value of the mechanical quality factor is
due to the air damping loss, which is the predominant
compared to thermoelastic, support, volume and surface
losses.

Figure 10: Actuator Driving Characteristic at Resonance Mode

Figure 11: Frequency Characteristic
V. CONCLUSION
In this paper, a fundamental study of functional structures
fabricated by a 3D-printer has been described. We have
succeeded in fabricating beam structure with dimensions of
250m and 200m for the width and thickness, respectively.
Interdigitated single-sided lateral comb structure has also
been fabricated. The dimensions of the comb finger are as
follows: width=500m, thickness=1,000m, length=15mm,
and comb gap=500m. This structure acts as a comb-drive
actuator by suitably masking and metalizing the structure
itself. The structure performed an in-plane lateral motion by
applying a voltage between the interdigitated comb fingers. It
laterally moved about12m with a drive voltage of 200V at a
resonance frequency of 43Hz. The mechanical quality factor
has been estimated to be 11 from the measured frequency
characteristic. From the device characterization results, we
have demonstrated for the first time that a SMEMS can
perform an electromechanical actuator. Since SMEMS are
environment-clean and complex structure devices are easily
fabricated, in the near future this novel technology is greatly
expected.
Finally, we acknowledge the help and contributions of
Kazuho Takahashi and Masato Tada.
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Dr. Eng. Jun Mizuno is an Associate
Professor in the Department of Mechanical
Engineering at Ishinomaki Senshu University.
He received his Dr. Eng. Degree in 1999 and
his M.E. Degree in 1996 from Tokyo Institute
of Technology (Japan), and his B.E. Degree
in 1994 from University of Sao Paulo
(Brazil). His current research interests include
Micro Electromechanical Systems and
Intelligent Robotics. He gives lectures on Control Engineering,
Mechatronics, Robotics and Precision Machining. He is a member
of Japanese Society of Applied Physics.
Dr. Eng. Satoshi Takahashi is an Associate
Professor in the Department of Mechanical
Engineering at Ishinomaki Senshu
University. He received his Dr. Eng. Degree
in 2011, his M.E. Degree in 2006, and his
B.E. Degree in 2004 from Iwate University
(Japan). His current research interests include
Theoretical Analysis on Thermoelastic
Problem in Thermal Barrier Coatings
(TBCs), Functionally Graded Materials (FGMs), and Effective
Practical Use of 3D-Printers. He gives lectures on Strength of
Materials and Introduction to Computers. He is a member of The
Japan Society of Mechanical Engineers, The Society of Material
Science (Japan), Japan Society for Composite Materials, and Society
of Automotive Engineers of Japan.