International Journal of Exploring Emerging Trends in Engineering (IJEETE)

Vol. 01, Issue 01, Sept, 2014 WWW.IJEETE.COM

All Rights Reserved 2014 IJEETE Page 21

Analytical Modeling and Simulation of MEMS Microstructure-
Microcantilever Using FEM

1
Anuj Kumar Goel,
2
Dr. H.P.Sinha,
3
Dr. Dushyant Gupta

1
M.M.Engineering College,MMU , Mullana ,Haryana
2
M.M.Engineering College,MMU , Mullana ,Haryana
3
Guru Jambheshwar University, Hisar, Haryana

ABSTRACT-MEMS Devices ranges in size
from a few micrometers to millimeters. MEMS
provide very good scope for sensing physical,
chemical and biomedical parameters in an
efficient way which could be integrated with
VLSI chips. MEMS utilize the mechanical
properties of several elements such as
cantilever, beams, combdrive, membrane,
reservoirs and channels etc. In order to
optimally utilize the properties of these micro
mechanical elements, the mechanical behavior
of elements in presence of parameters has to be
study in detail. This paper presents the design
simulations of MEMS based micro-cantilever
made up of single crystal silicon using FEM
(COMSOL Multiphysics).The simulations
results into the stress and displacement
measurements of the cantilever.

Keywords MEMS, FEM, Micro
cantilevers.
I. INTRODUCTION
Now days, MEMS based Micro cantilevers has
been proven as an outstanding platform for
extremely sensitive chemical and biological
sensors [1]. In the past decade micro cantilevers
has become so popular due to its high sensitivity
selectivity, ease of fabrication and flexibility of
on chip circuits. Also it has become interesting
due to convenience to calibrate, readily
deployable into integrated electromechanical
system and does not require external detection
devices [2-5]. Many previous researches
reported attempts made to improve the
cantilever sensitivity using piezoresistive
microcantilevers comprise of a polysilicon
piezoresistor integrated with silicon/ silicon-
nitride cantilever [6-7]. These researches
provided thorough understanding and strong
foundation on silicon- based microcantilevers.
This paper demonstrates the finite element
method to obtain the optimal performance of Si

based microcantilevers sensor by optimizing the
geometrical dimension of cantilever. COMSOL
Multiphysics, a commercial finite element
analysis tool for MEMS was used to develop a
finite element model of the microcantilever.
II. DESIGN PARAMETERS
A cantilever is a beam anchored at only one
end. The beam carries the load to the support
where it is resisted by moment and stress. A
Cantilever structure consists of greater length as
compare to its width with optimal thickness.
Two equations are key to understand the
behavior of MEMS cantilevers. The first is
Stoney's formula, which relates cantilever end
deflection z to applied stress :

(1)
Where d and L are the cantilever beam
thickness and length, respectively; E and are
the elastic modulus and the Poisson ratio of the
cantilever material. Very sensitive optical and
capacitive methods have been developed to
measure changes in the static deflection of
cantilever beams. The second is the formula
relating the cantilever spring constant to
the cantilever dimensions and material
constants:

International Journal of Exploring Emerging Trends in Engineering (IJEETE)
Vol. 01, Issue 01, Sept, 2014 WWW.IJEETE.COM
All Rights Reserved 2014 IJEETE Page 22

(2)
where F is the point load applied at the end of
the cantilever, and z is the resulting end
deflection, E is the Youngs modulus of
elasticity for the cantilever material and w, d, L
are the width, thickness, and length of the
cantilever, respectively.
The movement of the cantilever is effected by
its length, width, thickness and various
properties of the material used to make the
structure. The geometric shape, as well as the
material used to build the cantilever
determines the cantilever's stiffness. The
analysis is done on the structure having
following material properties which is shown
in table 1.
Table 1: Material properties of Silicon
S.No. Material Properties Values
1. Youngs Modulus 0.2GPa
2. Density 2330

3. Poissons ratio 0.33

The Micro cantilever designed using FEM
(COMSOL Multiphysics) as shown in Fig. 1.

Figure 1: Microcantilever model in COMSOL
Also Silicon dioxide, Polysilicon and Silicon
nitride was used as Microcantilever materials
having properties and dimensions as given in
table 2:
Table 2: Material properties of different materials
S.
No.
Materia
l
Propert
ies
Dimen-
sions

PolyS
i.

1.
Youngs
Modulu
s
Length
60E-6,
Width
10E-6,
Thickne
ss 1.5E-
6

160E9

250E
9

70E9

2.

Density

2320

3100

2200

3.
Poisson
s ratio

0.22

0.23

0.17

III. SIMULATION RESULTS
The simulations of micro cantilevers with
varying the dimensions are performed.
Simulations are also performed with use of
different materials for micro cantilevers. The
simulated models of Micro cantilevers are
shown in fig. (2-5).

Figure 2: Simulated model of Microcantilever1
Figure 3: Simulated model of Microcantilever2
International Journal of Exploring Emerging Trends in Engineering (IJEETE)
Vol. 01, Issue 01, Sept, 2014 WWW.IJEETE.COM
All Rights Reserved 2014 IJEETE Page 23


Figure 4: Simulated model of Microcantilever3
The simulated results with varying dimensions
of microcantilevers are shown in table.
Table 3: Increase in resultant stress with increase in
length of Microcantilever
S.No. Dimensions Stress (Pa)
1. 1000*100 50.44
2. 800*100 44.703
3. 600*100 31.022


Figure 5: Simulated model of Micro cantilever 4

Micracantilevers are also designed with
different materials. The simulation results with
varying materials are shown in table
Table 4: Increase in resultant stress with material
S.No. Material Stress (Pa)
1. Polysilicon 34.29
2. SiliconNitride 34.117
3. Silicondioxide 34.727


IV. CONCLUSION

MEMS based Microcantilever has been
designed with varying dimensions and with
different materials.
With increase in length of beams the respective
displacement is increased. With

as
material maximum displacement is achieved as
compare to Polysilicon and Siliconnitride.

V. REFERENCES

[1] Robert Littrell et.al. (2012) Modelling and
Characterization of cantilever based MEMS
piezoelectric sensors and actuators, Journal of
Microelectromechanical Systems
Vol.21No.2pp.406-413.

[2] Antoine Ferreira et.al. (2011) A Survay of
Modeling and Control Techniques for Micro
and Nano Electromechanical Systems, IEEE
Transactions on Systems, man, and Cybernatics
Part C: Applications and Reviews Vol.41 No.3
pp.350-364.

[3] Zabilzham et.al. (2004) dynamic Simulation
of a resonant MEMS Magnetometer in
Simulink, Sensors and Actuators A115 pp.392-
400.

[4] Ankit jain et.al. (2012) A Physics based
Predictive Modeling Framework for Dielectric
Charging and Creep in RF MEMS Capacitive
Switches and varactors, Journal of
Microelectromechanical Systems Vol.21 No.2
pp. 420-430.

[5] I.Gill et.al. (2011) Characterization and
Modeling of switchable stop-band filters based
on RF MEMS and complementary Splitring
resonators. Microelectronics Engineering 88
pp.1-5.

[6] Robert Littrell et.al. (2012) Modelling and
Characterization of cantilever based MEMS
piezoelectric sensors and actuators, Journal of
Microelectromechanical Systems Vol.21, No.2,
pp.406-413.


International Journal of Exploring Emerging Trends in Engineering (IJEETE)
Vol. 01, Issue 01, Sept, 2014 WWW.IJEETE.COM
All Rights Reserved 2014 IJEETE Page 24

[7] Antoine Ferreira et.al. (2011) A Survay of
Modeling and Control Techniques for Micro
and Nano Electromechanical Systems, IEEE
Transactions on Systems, man, and Cybernatics
Part C: Applications and Reviews Vol.41 No.3
pp.350-364.

[8] Zabilzham et.al. (2004) dynamic Simulation
of a resonant MEMS Magnetometer in
Simulink, Sensors and Actuators A115 pp.392-
400.

[9] Ankit jain et.al. (2012) A Physics based
Predictive Modeling Framework for Dielectric
Charging and Creep in RF MEMS Capacitive
Switches and varactors, Journal of
Microelectromechanical Systems Vol.21 No.2
pp. 420-430.

[10] I.Gill et.al. (2011) Characterization and
Modeling of switchable stop-band filters based
on RF MEMS and complementary Splitring
resonators. Microelectronics Engineering 88
pp.1-5.

[11] Francisc Attila Boloni et.al. (2011)
Stochastic Modeling of the pull-in voltage in a
MEMS beam structure. IEEE Transactions on
Magnetics Vol.47 No.5 pp.974-977.

[12] Shivappa Goravar et.al. (2010)
Probabilistic Analysis of a comb drive actuator.
IEEE Sensors Journal Vol.10 No.4 pp.877-882.

[13] E. M. Abdel-Rahman et.al. (2002)
Characterization of the mechanical behavior of
an electrostatically actuated microbeam. Journal
of Micromechanics and Microengineering, 12
pp.759766.

[14] R. C. Ackerberg. (1969) On a nonlinear
differential equation of electrohydrodynamics.
Proc. Roy. Soc. A, 312 pp.129140.

[15] L. Azrar et.al. (2002) Nonlinear forced
vibrations of plates by an asymptotic numerical
method. Journal of Sound and Vibration,
252(4):657674.



AUTHORS BIBLOGRAPHY


Anuj Goel was born in
Haryana, India in 1983.He is
presently pursuing Ph.D. from
M.M. University,India and also
working as Assistant Professor
in ECE Department, MMEC,
M. M. University, Mullana, India. His research
interests include MEMS Modelling, VLSI
Design etc.