Professional Documents
Culture Documents
[3]
c 0
-1
U = U 0.2
x
D
;
[4]
1/ 2 b = 0.106 x . [5]
Equation [3] predicts that the centerline concentration of silane will have dropped to 2.7% at a 3-
ft (0.91-m) distance from the source, i.e., over the width of the ventilated enclosure. It should be
noted that the predicted value depends only on the normalized distance, x/D, and on the initial
concentration in the jet (X
0
= 100%); it is not a function of the jet velocity. With regard to this
latter quantity, Eq. [4] predicts at the same 3-ft (0.91-m) distance a centerline value of 8.1 m/s
(1595 lfpm) for the upper estimate of the exit velocity calculated above (U
0
= 325 m/s
[63,980 lfpm]). Finally, the half-width of the jet (defined as the radial distance at which the
concentration has dropped to half of the centerline value) is estimated by Eq. [5] as being 3.8 in.
(97 mm) when the jet hits the enclosure wall opposite to where the silane is injected.
For the high rate of release, the velocity of the jet is almost an order of magnitude greater than
the ventilation velocity (200 lfpm [1.02 m/s]) even after the jet has traversed the enclosure. The
transverse velocity (lfpm or m/s) associated with the ventilation flow, therefore, would not be
expected to deflect the jet significantly or to affect the entrainment. The entrained flow, however,
would be affected if the ventilation flow (scfm or m
3
/s) is on the same order of or less than the
entrainment requirement. Since the total flow is approximately proportional to the upstream
pressure and to the square of the orifice diameter, the listed equations can be used to calculate jet
characteristics for conditions that are different from those of the example.
It is also of interest to calculate the amount of silane above the lower explosive concentration, X
L
(= 0.014), present in the jet between the source and the point at which the centerline
concentration has dropped to a value equal to X
c
. This quantity is given by the following simple
expression:
4 SiH
3
c
2
L
c
V = 4
D
X
1 -
2
3
X
X
.
[6]
When the jet spans the width of the 3-ft (0.91-m) ventilated enclosure, Eq. [6] predicts a volume
of silane of 343 ml (21 in.
3
). Since the centerline concentration at 2.7% is still above the LEL of
silane (1.4%), flammable mixtures would exist at farther axial locations, in fact as far as 386
diameters (x = 69.5 in. [1.77 m]) from the source (see Eq. [3]), if the jet had more room to
expand and was not constrained by the side wall of the enclosure. The total possible volume of
flammable silane would then be 650 ml (40 in.
3
). On the other hand, this additional volume of
silane would be at lower concentrations than those in the portion of the jet closer to the source
and could be expected to be only mildly reactive.
This estimate of a mixing-controlled upper limit of about 650 ml (40 in.
3
) for the flammable
silane volume suggests that some of the upper values for the silane in the initial discharge were
28
SEMATECH Technology Transfer # 96013067A-ENG
overestimated. The low overpressures recorded in the demonstration tests in the gas cabinet
indicate that the amount of silane that actually reacted was even less than the value calculated.
7.4 Average Silane Concentration in Exhaust Flow
After the initial transient associated with the silane release in the pressurized line, the leak into
the ventilated enclosure continues at a rate determined by the size of the RFO and by the pressure
upstream of it. The hazard associated with this phase of the process is defined by the
concentration of unreacted silane in the stream leaving the ventilated enclosure. This is a relevant
quantity to consider, because its value determines whether an ignition of the mixture in the
enclosure will cause the ensuing explosion to propagate through the exhaust ductwork. Silane
flows through different size orifices and for a range of source pressures are shown in Table 4,
based on the predictions of an equation recommended by ISA [6].
Calculated values of silane concentration, assuming the release mixed perfectly with the
ventilation flow, are shown in Figure 8 for the 0.020 in. (0.51 mm) RFO at four source pressures.
Concentrations for a 0.010 and 0.014 in. (0.25 and 0.36 mm) would be approximately 25 and
49% of the values indicated. The curves in the figure can be used to calculate the minimum
ventilation flow to keep the concentration below the LEL of silane (1.4%). Flows of 895, 540,
220, and 83 scfm (0.42, 0.25, 0.10 and 0.039 m
3
/s) would be needed for source pressures of
1500, 1000, 500, and 200 psig (104, 70, 35.5 and 14.8 bar), respectively. Coincidentally, the
minimum flow requirement for the 1500-psig source corresponds to a ventilation velocity of
200 lfpm (1.02 m/s) in a gas cabinet with a 4.5-ft
2
(0.42-m
2
) cross section. Ventilation velocity,
however, is not a meaningful parameter since it has been found to have a negligible impact on
the ignition characteristics of silane releases. In addition, test results have shown that the forced
jet produced by the release induces its own mixing pattern which, in the case of a leak from a
1/4 in. line, will drop the concentrations to values near the LEL within a few feet from the
source.
If the average concentration in the enclosure is above the LEL value, but does not exceed about
4%, then the silane/air mixture is flammable and stable. In this case, a flame should be expected
to propagate when the mixture ignites. This outcome is not guaranteed, however, as shown by
some of the RFO and cabinet tests performed with the large RFO (0.020 in. [0.51 mm]), at
elevated source pressures and with a low ventilation rate of 450 scfm (0.21 m
3
/s), corresponding
to 100 lfpm (0.51 m/s). In this respect, the most severe test condition was reproduced in RFO
Tests #33 and 34 (see Table 2) and in cabinet Test #49, where the source pressure was 1380 psig
(96 bar) in the first two tests and 1300 psig (91 bar) in the last.
29
Technology Transfer # 96013067A-ENG SEMATECH
Table 4 Silane Flow Rates Through Restricted Flow Orifices Based on the Use of the
ISA Equation
Silane Flow Rate [slpm] (@70F Source Temperature, 0 psig Downstream Pressure)
RFO
Dia. [in.] Source Pressure [psig]
1500 1200 1000 800 600 400 200 100 50
0.020 355 277 214 157 108.5 67.8 32.7 16.6 8.74
0.014 174 136 104.9 76.9 53.2 33.2 16.0 8.13 4.29
0.010 88.8 69.2 53.6 39.3 27.1 16.9 8.18 4.15 2.19
NOTE: The flows through the 0.014 and 0.010 in. RFOs are equal to 49 and 25% of the flow through the 0.020
in. diameter RFO.
Figure 8 Calculated Silane Concentration in the Case of Perfect Mixing of a Release
with a Ventilation Flow
The average silane concentration resulting from these releases is around 2.5%, well within the
range that would support flame propagation into the exhaust duct. Propagation was actually not
observed in the tests because the release did not ignite at shut-off (in Tests #33 and 34) and, in
the one case of ignition (Test #49), this occurred after a 1-second delay, allowing for some
additional dilution of the mixture by the ventilation flow. If these tests were to be repeated with
changes in the internal geometry of the release (by the addition of obstacles in the path of the jet,
for example), the outcome could be different.
30
SEMATECH Technology Transfer # 96013067A-ENG
If the ventilation flow were low enough to allow for the average concentration to exceed about 4
4.5%, then the resulting mixture would be metastable and should be expected to spontaneously
ignite. This condition would clearly be most hazardous and should be carefully avoided.
8 RECOMMENDATIONS
The results from this test program, in combination with the data on stability of silane/air mixtures
obtained by FMRC, provide the basis for a revised approach to the design of ventilation for
silane storage areas. Since ventilation velocity (in lfpm or m/s) does not appear to have a
measurable effect on ignition characteristics, its use as a meaningful design parameter should be
discontinued. Instead, focus should be shifted to ventilation requirements (in scfm or m
3
/s),
which should be set on the basis of dilution calculations aimed at ensuring that the average
concentration from a leak will remain below the LEL of silane (i.e., less than 1.4% by volume).
In addition, the ventilation should be designed to eliminate dead zones near the leakage point to
minimize the likelihood of pockets with high concentrations of silane. Finally, a limit should be
imposed on the maximum amount of silane initially released as a percentage of the volume of the
enclosure to avoid a large pressure increase should the release promptly ignite. Note that the
cabinet tests, where ignition pressures of 0.1-0.3 psig (7-20 mbarg) were measured, involved
initial silane inventories with standard volumes of about 0.2% of that of the cabinet.
More specifically, the following criteria are suggested for gas cabinets or other enclosed areas
that might experience leaks of 100% silane :
1. The ratio between the volume of the enclosed space and the estimated volume at
standard conditions of the released silane inventory should be large enough to
reduce the potential for developing unacceptable pressures leading to prompt
ignition. The silane inventory should be estimated by including the line between
the leakage point and the nearest flow-limiting device. The limited data obtained
during the program indicate that a value of 500:1 for this volume ratio will
generally limit the pressure rise to the range of 0.10.3 psig (720 mbarg).
2. The possibility of explosive concentrations developing in the exhaust duct
should be eliminated by providing a minimum ventilation rate through the
enclosure equal to 75 times the standard volume flow rate of silane through the
flow-limiting device at the maximum pressure available from the source.
Additional ventilation may be provided to add a margin of safety to this
minimum requirement.
3. The ventilation should be arranged so that dead zones cannot form near the sites
where leaks might occur.
31
Technology Transfer # 96013067A-ENG SEMATECH
9 CONCLUSIONS
This study of 100% silane releases into ventilated enclosures has provided new data for designing
safety measures for storage cabinets and other areas where silane leaks might occur. Testing
focused on the behavior of accidental leaks from a 1/4 in. (6.4 mm) outside diameter line filled
with silane at a regulated process pressure or at the full pressure of the supply. In all cases, a
flow-limiting device was present upstream of the leakage point.
The main conclusion of the study is that the ventilation velocity does not have a measurable
effect on the prompt vs. delayed ignition characteristics of the silane. Discharges of silane
initially at high pressure (>200 psig [14.8 bar]) were generally found to form non-reacting jets,
whereas leaks from low-pressure lines (30 psig [3.1 bar]) tended to promptly ignite. Analysis of
the results has pointed to the importance of the dilution of the leak by the ventilation flow. This
is a relevant factor to prevent average concentrations in the exhaust stream from exceeding safe
values. A set of recommendations has been developed based on a dilution criterion.
Further research will be necessary to satisfactorily address some unresolved issues. For example,
the question of the maximum acceptable amount of silane involved in the discharge of the initial
inventory (relative to the size of the receiving volume) cannot be conclusively answered based on
the limited data obtained in the program. Additional tests will be necessary to correlate the
pressure rise from the prompt ignition of a silane discharge, as a function of the amount of silane
released, the initial pressure conditions, and the diameter of the exit cross section. Such pressure
rise should be measured when the enclosure is sealed and when it is vented.
A second outstanding issue involves the effect of changes in geometry on the behavior of the
release (prompt vs. no ignition): priority should be given to situations in which the leak is near to
and the jet impinges on a flat plate (cabinet wall) or on a cylindrical body (the top of a gas
cylinder). In addition, the effects of cylinders in the gas cabinet should also be investigated.
A third issue involves verifying the margin of safety implied by the design recommendations in
this report, which prescribe a minimum dilution for the silane leak. This step should be carried
out by gradually approaching the conditions that would cause an unacceptable outcome, such as
propagation of ignition through the exhaust duct or excessive pressure in the cabinet. The degree
of test repeatability and experimental control achieved in the project provides confidence that
these residual technical questions can be successfully resolved.
32
SEMATECH Technology Transfer # 96013067A-ENG
10 REFERENCES
[1] Rogelstad, T., Mosovsky, J., Valdes, J. and Lichtenvalner, C.P., SEMATECH Silane Safety
Improvement Project S71 Final Report, Technology Transfer #94062405A-ENG, July 28,
1994.
[2] Britton, L. G., "Combustion Hazards of Silane and Its Chlorides," Plant/Operations
Progress, Vol. 9, No. 1, January 1990.
[3] "Effects of Releases of Silane Mixtures in Ambient Air," Hazards Research Corporation
Report 4007, December 1978.
[4] "Leakage of Silane in Cabinets and Ducts," Hazards Research Corporation Report 5038,
May 1982.
[5] "An Analysis of Experimental Results on the Venting of Silane/Air Explosions," Paper
Presented at the SSA International Conference, Scottsdale, AZ, March 31-April 2, 1993.
[6] Viera, M., Personal Communication, Spreadsheet with Implementation of Flow Equation in
ISA Pamphlet S75.01-1985, 1995.
[7] Becker, H. A., Hottel, H. C. and Williams, G. C., "The Nozzle-Fluid Concentration Field of
the Round, Turbulent, Free Jet," J. Fluid Mech., Vol. 30, part 2, pp. 285-303, 1967.
[8] Wygnanski, I. and Fiedler, H., "Some Measurements in the Self-Preserving Jet," J. Fluid
Mech., Vol. 38, part 3, pp. 577-612, 1969.
33
Technology Transfer # 96013067A-ENG SEMATECH
APPENDIX A:
DATA PLOTS
34
SEMATECH Technology Transfer # 96013067A-ENG
35
Technology Transfer # 96013067A-ENG SEMATECH
36
SEMATECH Technology Transfer # 96013067A-ENG
37
Technology Transfer # 96013067A-ENG SEMATECH
38
SEMATECH Technology Transfer # 96013067A-ENG
39
Technology Transfer # 96013067A-ENG SEMATECH
40
SEMATECH Technology Transfer # 96013067A-ENG
41
Technology Transfer # 96013067A-ENG SEMATECH
42
SEMATECH Technology Transfer # 96013067A-ENG
43
Technology Transfer # 96013067A-ENG SEMATECH
44
SEMATECH Technology Transfer # 96013067A-ENG
45
Technology Transfer # 96013067A-ENG SEMATECH
46
SEMATECH Technology Transfer # 96013067A-ENG
47
Technology Transfer # 96013067A-ENG SEMATECH
48
SEMATECH Technology Transfer # 96013067A-ENG
49
Technology Transfer # 96013067A-ENG SEMATECH
50
SEMATECH Technology Transfer # 96013067A-ENG
51
Technology Transfer # 96013067A-ENG SEMATECH
52
SEMATECH Technology Transfer # 96013067A-ENG
53
Technology Transfer # 96013067A-ENG SEMATECH
54
SEMATECH Technology Transfer # 96013067A-ENG
55
Technology Transfer # 96013067A-ENG SEMATECH
56
SEMATECH Technology Transfer # 96013067A-ENG
57
Technology Transfer # 96013067A-ENG SEMATECH
58
SEMATECH Technology Transfer # 96013067A-ENG
59
Technology Transfer # 96013067A-ENG SEMATECH
60
SEMATECH Technology Transfer # 96013067A-ENG
61
Technology Transfer # 96013067A-ENG SEMATECH
62
SEMATECH Technology Transfer # 96013067A-ENG
63
Technology Transfer # 96013067A-ENG SEMATECH
64
SEMATECH Technology Transfer # 96013067A-ENG
65
Technology Transfer # 96013067A-ENG SEMATECH
66
SEMATECH Technology Transfer # 96013067A-ENG
67
Technology Transfer # 96013067A-ENG SEMATECH
68
SEMATECH Technology Transfer # 96013067A-ENG
69
Technology Transfer # 96013067A-ENG SEMATECH
70
SEMATECH Technology Transfer # 96013067A-ENG
71
Technology Transfer # 96013067A-ENG SEMATECH
72
SEMATECH Technology Transfer # 96013067A-ENG
73
Technology Transfer # 96013067A-ENG SEMATECH
74
SEMATECH Technology Transfer # 96013067A-ENG
75
Technology Transfer # 96013067A-ENG SEMATECH
76
SEMATECH Technology Transfer # 96013067A-ENG
77
Technology Transfer # 96013067A-ENG SEMATECH
78
SEMATECH Technology Transfer # 96013067A-ENG
79
Technology Transfer # 96013067A-ENG SEMATECH
80
SEMATECH Technology Transfer # 96013067A-ENG
81
Technology Transfer # 96013067A-ENG SEMATECH
82
SEMATECH Technology Transfer # 96013067A-ENG
83
Technology Transfer # 96013067A-ENG SEMATECH
84
SEMATECH Technology Transfer # 96013067A-ENG
85
Technology Transfer # 96013067A-ENG SEMATECH
86
SEMATECH Technology Transfer # 96013067A-ENG
87
Technology Transfer # 96013067A-ENG SEMATECH
SEMATECH Technology Transfer
2706 Montopolis Drive
Austin, TX 78741
http://www.sematech.org