EE-7V82-501

ADVANCED ELECTRON MICROSCOPY

Syllabus
Fall 2005

Instructor: Moon Kim, ECSN 3.608, 972-883-6635

Class Time: MW 3:30-4:45 PM

Class Room: ECSN 2.112

Course Description: Transmission electron microscopy with nano-analytical capabilities

represents the single most high-resolution experimental method available for the study of the
geometry of atom arrangements in solids, and the distribution of chemical species in solids.
Most research literature discussing deformation or chemical reaction mechanisms in solids at or
near the atomic level is written from the electron microscopy viewpoint, and an increasing
amount of research of this type is being carried out on electronic materials. This class is
intended as the first part of a graduate level introductory course in electron microscopy. The
lecture course is sufficient preparation for those students who expect to interact with solid-state
scientists who study the atomic scale structure of matter. Those students who expect to use
experimental electron microscopy directly in their thesis research should enroll for both lecture
and laboratory courses.

Grading: Lecture - Home work (20%), Mid-term (40%), Final (40%)

Lab – 4 Assignments (25% each)

Textbook and Reference Materials: “Transmission Electron Microscopy” by Williams and

Carter. This book is available from UTD Book store. There is no single textbook generally
considered the best for all topics in electron microscopy. An extended reference list is available
in the textbook. There is a web-site, which is very useful for this class, i.e., www. matter.org.uk.
Students are strongly encouraged to examine this web-site.

Disabilities: The department complies with the Americans with Disabilities Act in making
reasonable accommodation for qualified students with disabilities. If you have a qualifying
disability, please see me and the ADA office immediately.

Academic Integrity: It is the policy of the Erik Jonsson School of Engineering and Computer
Science to have zero tolerance for cheating in any form.
 EE-7V82-501
ADVANCED ELECTRON MICROSCOPY
Fall 2006

Anticipated Schedule of Lectures

Week Date Contents

1 8/22 Introduction / Instrumentation
8/24 Scanning Electron Microscopy (SEM)
2 8/29 Focused Ion Beam (FIB)
8/31 SEM/FIB Lab – Gold thin film coating, SEM imaging
3 9/5 Labor Day – no class
9/7 SEM/FIB Lab – FIB pattering
4 9/12 TEM sample preparation
9/14 Diffraction - 1
5 9/19 Diffraction - 2
9/21 Diffraction - 3
6 9/26 Lab - no lecture
9/28 Kinematical theory
7 10/3 Dynamical theory
10/5 Diffraction contrast imaging - 1
8 10/10 Diffraction contrast imaging - 2
10/12 Midterm
9 10/17 Lab – no lecture
10/19 Lab – no lecture
10 10/24 Lab – no lecture
10/26 Diffraction Lab
11 11/2 Diffraction contrast imaging Lab
11/7 Phase contrast imaging (HREM) - 1
12 11/9 HREM -2
11/14 HREM -3
13 11/16 HREM Lab -1
11/21 HREM Lab -2
14 11//23 Image simulation -1
11/28 Image simulation - 2
15 12/5 Final

Course Content: This is a preliminary course outline. The instructor may change material,
content, pace and item sequence at any time.

Lab:
• Gold thin film coating, SEM imaging, FIB patterning
• TEM - CNT sample preparation and HRTEM imaging
• TEM - Si plane-view and cross-section sample preparation, Diffraction-contrast & phase-
contrast imaging, Diffraction experiments