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Egerton
Ray F. Egerton
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ISBN-10: 0-387-25800-0
paper.
Printed on acid-free
ISBN-13:
978-0387-25800-0
Science+Business Media, Inc.
2005
Springer
9 8 7 6 5 4 3 2 1
Contents
springeronline.com
Preface
xi
1.
An Introduction to Microscopy
1.1
1.2
1.3
1.4
11
1.5
17
1.6
19
2.
1.7
21
1.8
Scanning-Probe Microscopes
21
Electron Optics
27
2.1
27
2.2
30
2.3
34
2.4
41
2.5
43
2.6
44
3.
57
3.1
58
3.2
Electron Acceleration
67Condenser-Lens System
70
3.3
75
3.4
78
3.5
Vacuum System
88
4.
93
4.1
94
4.2
Electron-Electron Scattering
96
4.3
97
4.4
101
4.5
106
4.6
Dark-Field Images
108
4.7
Electron-Diffraction Patterns
108
4.8
112
4.9
5.
Electron Microscope
115
119
The Scanning
125
5.1
125
5.2
129
5.3
Secondary-Electron Images
131
5.4
Backscattcrcd-Electron Images
137
5.5
139
5.6
143
5.7
147
5.8
149
5.9
Electron-Beam Lithography
151
6.
Electron Microscopy
Analytical
155
6.1
155
6.2
158
6.3
161
6.4
165
6.5
167
6.6
167
6.7
169
6.8
171