The development of one simple, high speed and low cost

positioning test system for precision machine

95 08 1 96 7 31

machine tool. The accuracy of our system

was better than 1 m .

1.

() 16

Keywords: Quadrant photodiode, position

sensing detector, positioning test

2.
Tlusty[1]
1959

(coordinate
measurement machine,CMM)
1985 Zhang [2]

1986 Ferriea[3]
Zhang [4]
1988
Kunzmann [5] 1990

Zhang [6] 1991

Lingard [7]

[8][9][11]

Abstract
The positioning test was one very
important test item after the precision
machine fabrication. The conventional test
method takes much time and needs expensive
instrument (laser interferometer). This
project used 16 position sensing detectors
and one laser diode to build one novel
measurement system. The position sensing
detector was frequently used in the
positioning test. Because the commercial
signal conditioning of the position sensing
detector was expensive, using many position
sensing detectors in one instrument was not
the common usage. In order to reduce the
cost, 16 sets position sensing detector signal
conditioning were fabricated in this project.
This project built one position sensing
detector plate and used it to test the 3-axes
1

Sonko 2002

[12][13]

(
1 )

25
75

(a)

(b)

(c)
1 CNC
(a)(b)
(c)

3.

spotdual-lateral tertra- lateral

[14]Spot
QD()
(0.1 m )
( <0.5 mm)
Dual-lateral

tertra-lateral

QD

 QD
QD

VA VB V C V D

(V + VC ) (VB + VD ) ,
X = A
VA + VB + VC +VD
Y=

(1)
(2)
(3)QD
QD QD

3 16 QD

QD

QD /
QD

4 QD
X
Y 4 QD
QD
QD

(VA + VB ) (VC +VD )

VA + VB + VC +VD

QD

B
D

2 QD
16

QD

QD

QD
16

QD

6 QD

4
QD QD
4
QD

XY YZ
XZ 5
XY YZ
XZ 16
16 16 QD
48
QD

QD

QD

QD

P1(x,y)

P2(x,y)

P3(x,y)

P4(x,y)

P8(x,y)

P7(x,y)

P6(x,y)

P5(x,y)

P9(x,y)

P10(x,y)

P11(x,y)

P12(x,y)

P16(x,y)

P15(x,y)

P14(x,y)

P13(x,y)

P2(y,z)

P3(y,z)

P4(y,z)

P8(y,z)

P7(y,z)

P6(y,z)

P5(y,z)

P9(y,z)

P10(y,z)

P11(y,z)

P12(y,z)

P16(y,z)

P15(y,z)

P14(y,z)

P13(y,z)

P2(z,x)

P3(z,x)

P4(z,x)

P8(z,x)

P7(z,x)

P6(z,x)

P5(z,x)

P9(z,x)

P10(z,x)

P11(z,x)

P12(z,x)

P16(z,x)

P15(z,x)

P14(z,x)

P13(z,x)

(c)
5 QD (a)XY (b)XZ
(c)YZ

4.

4.1 QD
QD 16 QD
QD 6
QD1 XY
6(a)(b) QD1
X Y 6(c)(d)
X Y
QD1
1 m 16
QD QD1

1 XY QD
2 YZ QD
3 ZX QD

(a)
P1(y,z)

P1(z,x)

4.2 CNC
7(a)(b)(c) QD
XY YZ ZX
8 QD1 XY
QD
XY 50

8(a)
(c) X Y
8(b)(d)
QD1 X Y
QD1 0.3 m

(b)

 9 XY QD2 QD16
X 50
X
1m
10 XY QD2
QD16 Y 50
Y
2 m

5.
16

XYYZ ZX

1 m
X
1m Y
2 m

(c)

(d)
6 QD1 XY
1. QD (xy )
Numb

x-axis

Stand

y-axis

Stand

er of

f ( x ) = ax + b

deviation

f ( y ) = ay + b

deviation

QPD

(a)

of y-axis

of x-axis

QD1

0.056x+0.000

0.013

0.054y+0.011

0.010

QD2

0.052x+0.007

0.012

0.062y-0.024

0.012

QD3

0.052x+0.065

0.015

0.059y-0.006

0.014

QD4

0.049x+0.063

0.016

0.055y-0.009

0.013

QD5

0.048x+0.047

0.012

0.059y+0.164

0.010

QD6

0.048x-0.014

0.013

0.054y+0.111

0.009

QD7

0.051x-0.003

0.015

0.061y+0.071

0.019

QD8

0.051x+0.021

0.012

0.062y+0.002

0.013

QD9

0.084x-0.032

0.015

0.046y+0.057

0.008

QD10

0.076x-0.026

0.018

0.046y-0.008

0.016

QD11

0.077x-0.026

0.018

0.049y+0.083

0.012

QD12

0.077x-0.058

0.021

0.048y+0.081

0.014

QD13

0.074x-0.026

0.015

0.049y+0.032

0.010

QD14

0.077x-0.016

0.012

0.048y-0.075

0.009

QD15

0.077x-0.068

0.018

0.049y-0.039

0.011

QD16

0.080x-0.011

0.020

0.047y+0.058

0.013

2. QD (yz )

(b)
5

Stand

Number

y-axis

of QPD

f ( y ) = ay + b

deviation

QD1

0.131y-0.073

0.030

of x-axis

z-axis

Stand

f ( z ) = az + b

deviation

-0.091z+0.152

0.027

of z-axis

QD2

0.132y+0.061

0.025

-0.089z+0.265

0.021

QD3

0.129y-0.079

0.023

-0.097z+0.069

0.030

QD4

0.135y-0.071

0.021

-0.097z+0.013

0.030

QD5

0.142y-0.069

0.012

-0.097z+0.383

0.012

QD6

0.117y+0.005

0.014

-0.083z-0.104

0.012

QD7

0.130y+0.229

0.030

-0.087z-0.100

0.018

QD8

0.134y+0.313

0.028

-0.076z-0.054

0.010

QD9

0.136y+0.039

0.015

-0.091z+0.118

0.010

QD10

0.136y-0.057

0.011

-0094z+0.107

0.018

QD11

0.137y-0.392

0.009

-0.096z+0.032

0.013

QD12

0.134y-0.267

0.015

-0.096z+0.087

0.024

QD13

0.124y+0.184

0.010

-0.096z+0.109

0.010

QD14

0.127x+0.027

0.018

-0.093z+0.216

0.014

QD15

0.126x+0.145

0.010

-0.084z-0.007

0.008

QD16

0.134x+0.153

0.009

-0.082z-0.233

0.017

(b)

3. QD (zx )
Stand

Number

z-axis

of QPD

f ( z ) = az + b

deviation

QD1

0.222z-0.324

QD2
QD3

x-axis

Stand

f ( x ) = ax + b

deviation

0.018

0.212x+0.030

0.012

0.243z+0.700

0.025

0.207x+0.050

0.013

0.243z+0.433

0.025

0.216x-0.142

0.027

of z-axis

of y-axis

QD4

0.240z+0.057

0.028

0.213x-0.155

0.027

QD5

0.245z+0.255

0.027

0.217x+0.161

0.021

QD6

0.198z+0.275

0.018

0.207x+0.084

0.018

QD7

0.237z+0.158

0.027

0.212x+0.154

0.017

QD8

0.236z+0.297

0.024

0.213x+0.164

0.024

QD9

0.254z+0.116

0.030

0.219x+0.028

0.016

QD10

0.248z+0.037

0.024

0.219x+0.178

0.024

QD11

0.245z+0.077

0.028

0.226x+0.131

0.024

QD12

0.237z-0.486

0.030

0.219x+0.158

0.013

QD13

0.239z-0.145

0.027

0.220x+0.116

0.019

QD14

0.239z-0.220

0.026

0.224x+0.086

0.015

QD15

0.232z-0.180

0.024

0.226x-0.034

0.029

QD16

0.247z-0.249

0.018

0.218x+0.147

0.015

(c)
7 (a)xy
(b)yz (c)zx

(a)

(a)

(b)

(c)

(d)
8 XY QD1
9 XY QD2~QD16 X

[3]

[4]

[5]

[6]

[7]

[8]

[9]

[10]

[11]

[12]

[13]

[14]

10 XY QD2~QD16 Y

6.
[1]

[2]

J. Tlusty, System and Methods for Testing

Machine Tools, Microtechnic, Vol. 13, pp. 162,
1959
G. Zhang, R. Veale, T. Charlton, B. Borchardt
and R.Hoken, Error compensation of
coordinate measuring machine, Ann CIRP 34
8

(1) (1985) 445-448

P.M. Ferriea, C.R. Liu, A Contribution to the
Analysis and Compensation of the Geometric
Error of a Machining Center, Ann. of CIRP 35
(1) (1986) 259-262
G. Zhang, R. Buyang, B. Lu, R. Hocken, M.A.
Donmez A Displacement Method of Machine
Geometry Calibration, Ann. of CIRP (1) (1988)
515-518
H.Kunzmann, A uniform concept for
calibration acceptance test and periodic
inspection of coordinate measuring machine
using reference object, Ann. CIRP, Vol.39,
No.1, pp.561-564, 1990
G.X. Zhang and Y.F. Zang, A method for
machine geometry calibration using 1-D ball
array, Ann. CIRP, Vol.40, No.1, pp.519-522,
1991
P.S. Lingard, M.E. Purss, C.M. Sona and E.G.
Thwaite, Length-bar and step-stage calibration
using a laser measurement system with a
coordinate measuring machine, Ann. CIRP,
Vol.40, No.1, pp.515-517, 1991
J.F. Ouyang, I.S. Jawahir, Ball array
calibration on a coordinate measuring machine
using a gage block, Measurement 16 (1995)
219-229
Toshiyuki Takatsuji, Sonka Osawa, Tomizo
Kurosawa, Uncertainty analysis of calibration
of geometrical gauges, Precision Engineering,
26 (2002) 24-29
T. Takatsuji, S. Osawa, and T. Kurosawa,
Uncertainty analysis of calibration of
geometrical gauges, Precision Engineering,
Vol.26, pp.24-29, 2002
Sonko Osawa, Toshiyuki Takatsuji, Hironori
Noguchi, Tomizo Kurosawa, Development of a
ball step-gauge and an interferometric stepper
used for ball-plat calibraion Precision
Engineering, 26 (2002) 24-29
Anthony Chukwujekwu Okafor, Yalcin M.
Errekin, Vertical machining center accuracy
characterization using laser interferometer Part1.
Linear positional errors, Journal of materials
Processing Technology 105 (2000) 394-406
Anthony Chukwujekwu Okafor, Yalcin M.
Errekin, Vertical machining center accuracy
characterization using laser interferometer Part2.
Angular errors, Journal of materials Processing
Technology 105 (2000) 407-420
http://www.udt.com

YZ
QD1

Z
QD2

Z
QD3

QD4

10

Z
QD5

11

Z
QD6

QD7

12

Z
QD8

13

Z
QD9

QD10

14

Z
QD11

15

Z
QD12

QD13

16

Z
QD14

17

QD15

Z
QD16

18

19

ZX
QD1

Z
QD2

20

Z
QD3

QD4

21

Z
QD5

22

Z
QD6

QD7

23

Z
QD8

24

Z
QD9

QD10

25

Z
QD11

26

Z
QD12

QD13

27

Z
QD14

28

Z
QD15

QD16

29

30