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MeV %e+ or protons was used to verify compositions. Ionchanneling effects in the RBS spectra were randomized by
azimuthal rotation of the sample during analysis. AlN mole
fractions were extracted from the spectra using the SIMNRA
simulation program.26 We observe XRD compositions that
are systematically less than RBS results by Ax=-O.O9x( 1-x);
this indicates a small, but detectable bowing of the AlXGal-,N
lattice-parameters with x.
The observed composition
deviations are marginally greater than the RBS-analysis error
(-fO.O1) and are consistent within measurement errors with
previous observations of a linear relationship between lattice
parameters and x.226.9210
We report our band-gap measurements for AlXGal-,N as
an integral part of a dissection of previous works. Parabolic
compositional dependence is traditionally assumed for the
band gap of alloys: Eg(x)=fix)-bx(l-x), where the bowing
parameter, b, captures the sign and magnitude of the parabolic nonlinearity, and where fix)=( l-x)E,(O)+xE,( 1) is simply the linear compositional dependence of the band gap in
the absence of bowing. We plot all band-gap results as the
deviation of the band gap from linearity: E,(x)-Ax). The
band gaps of unstrained GaN and AlN at 295 OK
(E,(0)=3.413 eV21v22
and E,(1)=6.20 eV"328) are the endpoints of our linear benchmarkfix). Suppression of the linear
terms illuminates the large differences between reported data
sets. Present and
measurements are summarized
in this format in Fig. 1. Based on reported details,'-'' we
have applied small nominal corrections to the band gaps
bringing all data sets in Fig. 1 to the same reference state: the
band gap of unstrained Al,Gal.,N at =295 O K . Corrections
were made for band-gap shifts due to: (1) the temperature
dependence of the band gap; (2) thermal-expansion-mismatch strain between epilayer and substrate; and (3) epitaxial
coherency strain for thin alloy layers grown on thick GaN.
Consider these three corrections in turn. First, various
temperature-dependent band-gap shifts between 2 O K and
295 OK are reported for Al,Gal-,N, GaN, and AlN: these
shifts span 20-80 meV;2,22*28
shifts in AlXGal-,N do not vary
with x.' We thus applied a constant -50 meV correction to
cryogenic measurements.
Second, thermal-expansionmismatch strains and band-gap shifts are known for GaN;
shifts are =+12 meV for GaN on sapphire and -7 meV for
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,
U
x. Within Group-C, Refs. 12-14, 20, and this work use XRD
to determine x. Inclusion of lattice-parameter bowing in the
XRD analyses increases x by hx=0-0.023; band-gap
29H. Amano, K. Hiramatsu, and I. Akasaki, Jpn. J. Appl. Phys. 27, L1384
(1988).
30 W. G. Perry, T. Zheleva, M. D. Bremser, R. F. Davis, W. Shan, and J. J.
Song, J. Electron. Mat 26,224 (1997).
31 W. W. Chow, A. F. Wright, A. Girndt, F. Jahnke, and S. W. Koch, Mat.
Res. Soc.Symp. Proc.468,487 (1997).
32H. G. Lee, M. Gershenzon, and B. L. Goldenberg, J. Electron. Mat. 20,
621 (1991).
33 A. F. Wright and J. S. Nelson, Appl. Phys. Lett.66,3051 (1995).
FIG. 1. Measured deviations of the band gap from linearity with x for
unstrained Al,Gal.,N at 295 OK. Dashed line: theoretical bowing by Wright
and Nelson?3 Solid reference lines: -bx(l-x). See also Ref. 19.
'
'
*
Fig. 1
GroupA
0 Ref. 7
0 Ref. 17
0 Ref. 18
GroupB
X Ref. 1
Ref.2
Ref.3
0 Ref.4
+ Ref.5
n Ref.6
V Ref. 11
A Ref. 15
Group4
this work
0 Refs.8-10
e Refs.12-14
e Ref. 16
0 Ref. 20
@
-0.8'
'
'
0.2
'
0.4
'
'
0.6
AIN mole fraction, x
*I
0.8
'
1.o
Fig. 2
V."
0.2
0.4
0.6
0.8
AIN mole fraction, x
1.00
0.2
0.4
0.6
0.8
AIN mole fraction, x
1.0
GroupC
0 this work,
type-1
structures
this work,
type-ll
structures
0 Ref.8
0 Ref. 9
0 Ref. 12
A Ref. 13
V Ref. 14
0.1
0.2
0.3
0.4
0.5
0.6
X Ref. 16
Fig. 3