B46.

1 - 2002 Overview
Ted Vorburger
Member, ASME Committee B46
ASME Spring Seminar 2004 - Surface Metrology
Southfield, MI
April 15, 2004
Contact: tvtv@nist.gov

B46.1-2002 Overview

Contents
Whats Old
Whats New
Whats Revised
Whats Anticipated

B46.1-2002 Overview

Collaborators
Editorial Working Group
Ted Vorburger, Don Cohen, Brian Renegar
NanometerStylus Section
Al Hatheway
NanometerMicrosopy Section
Don Cohen
Fractal Section
Chris Brown
Also: Mark Malburg, Alex Tabenkin
B46.1-2002 Overview

Whats Old (unchanged or slightly changed from

1995 revision)
Most of

Terms Related to Surface Texture

(Ex. Definition of Ra)

Classification of Instruments
Profiling, Contact, Skidless Instruments
Contact, Skidded Instruments
Techniques for Area Profiling
Techniques for Area Averaging
Precision Reference Specimens
Roughness Comparison Specimens
B46.1-2002 Overview

Whats Old (unchanged or slightly changed from 1995 revision)

Most of Terms Related to Surface Texture
(Ex. Definition of Ra)
Classification of Instruments

Terminology and Measurement Procedures for Profiling,

Contact, Skidless Instruments
Measurement Procedures for Contact, Skidded
Instruments
But different procedures yield different results for Ra,
Techniques for Area Profiling
Techniques for Area Averaging
Precision Reference Specimens
Roughness Comparison Specimens
B46.1-2002 Overview

B46.1-2002 Overview

Surface Parameters & Functions Defined in Section 1

on Terms and Definitions (changes)
Ra, Rq, Rz, Rt, Wt, Rsk, Rku, other height
parameters
Amplitude Density, Bearing Length, Autocorrelation,
Autocovariance, Power Spectral Density Functions
R q (R a)- root mean square (average absolute)
slope
Area (S) parameters and functions
RSm - mean spacing of profile irregularities

B46.1-2002 Overview

Mean Spacing of Profile Irregularities

RSm = (1/n) Smi
B46.1 allows height and spacing discrimination.
Default height discrimination is 10% Rz. Default
spacing discrimination is 1% of the sampling length

B46.1-2002 Overview

Contents
Whats Old

Whats New
Three New Sections
-Nanometer Surface Texture... Stylus Profiling
-Nanometer Surface Roughness... Phase Measuring
Interferometric Microscopy
-TerminologyFractal Geometry

Two New Appendices

-Appendix - Reference Subroutines
-Appendix- ASME and ISO Surface Texture Parameters
Whats Revised
Whats Anticipated
B46.1-2002 Overview

New Section 7: Nanometer Surface Texture

and Step Height Measurements by Stylus
Profiling
Scope: The measurement ofnanometersized features on surfacesnear the
performance limit of many metrology
instruments

B46.1-2002 Overview

Nanometer Surface Texture and Step height

Measurements by Stylus Profiling
Issues
At least five data points per shortwavelength cutoff
Recommendation for maximum stylus radius
= 2 / (421/22Rq) Typo Error in Sec. 7.4.2.4
Describes calibration specimens OR
calibrated actuators for scale calibration
Cites ultrasmooth surface artifacts for
testing system noise
Specifies reporting data
B46.1-2002 Overview

New Section 8: Nanometer Surface Roughness

as Measured with Phase Measuring
Interferometric Microscopy
Scope: Instruments for the measurement of
surface roughness in the range 0.1 nm to 100
nm Rqusing phase measuring
interferometeric microscopyalong a single
profile

B46.1-2002 Overview

Nanometer Surface Roughness as Measured with

Phase Measuring Interferometric Microscopy

B46.1-2002 Overview

Nanometer Surface Roughness as Measured with

Phase Measuring Interferometric Microscopy
To enable the measurement of very smooth
surfaces, where the instrument noise is about the
same order of magnitude as the surface Rq,
This section cites:
Subtract Reference Method
Absolute Rq Method

B46.1-2002 Overview

Section 10: Terminology and Procedures for Evaluation

of Surface Textures Using Fractal Geometry
Defines Fractal Dimension, D = (log N ) / [ log (1/r ) ]

B46.1-2002 Overview

Nonmandatory Appendix H: Reference Subroutines

Contains subroutines in C for calculation of the
parameters:
Roughness Average - Ra
rms Roughness - Rq
Skewness - Rsk
Kurtosis - Rku
Average Maximum Height of the Profile - Rz

B46.1-2002 Overview

NonMandatory Appendix I: A Comparison of ASME and ISO Surface

Texture Parameters (Excerpts of Table I1 shown here)

B46.1-2002 Overview

Contents
Whats Old
Whats New

Whats Revised
Filtering of Surface Profiles
Whats Anticipated

B46.1-2002 Overview

Filters help to specify the bandwidth limits of the

surface texture measurement

B46.1-2002 Overview

The text
describing
the Gaussian
bandwidth
limits has
been
rewritten to
improve
clarity.

B46.1-2002 Overview

Contents
Whats Old
Whats New
Whats Revised

Whats Anticipated

B46.1-2002 Overview

Whats Anticipated: Possible Future Developments

ASME B46.2 on parameters for stratified surfaces:
Rk et al.
Revision of Y14.36-1996
Revision of Classification of Instruments

B46.1-2002 Overview

From Y14.36-1996
Surface Texture
Symbols
ISO 1302 has moved
the specification of
Ra and other surface
texture parameters
inside the basic
symbol

B46.1-2002 Overview

Proposed Classification of Instruments drafted for new Areal

Surface Texture ISO Standards

Area-Averaging

Areal Topography

Linear Profiling

Senses Z(X,Y)**

Primarily Senses
Z(X)*

Contacting Stylus,
Phase Shifting Interferometry,
Vertical Scanning (White Light) Interferometry,
Focus Sensing Confocal Microscopy,
Chromatic Length Aberration Confocal Microscopy,
Structured Light and Triangulation,
SEM Stereoscopy

Contacting Stylus,
Phase Shifting Interferometry,
Circular Interferometric Profiling***,
Optical Differential Profiling

Total Integrated Scatter,

Angle Resolved Scatter,
Parallel Plate Capacitance

Optical Differential Profiling,

Scanning Tunneling Microscopy,
Atomic Force Microscopy
*Accuracy of Z(Y) profiles often not determined
**Accuracy of Z(Y) profiles should be established
***Relies on circular scanning to produce a Z() profile

B46.1-2002 Overview

Summary:
New ASME B46.1-2002 contains new sections on
Nanometer scale measurements with stylus
Nanometer scale measurements with phase measuring
interferometry
Fractal parameters
Reference subroutines
Table comparing ASME and ISO parameters
More changes on the way, more harmony with
comparable ISO standards

B46.1-2002 Overview