REPUBLIC POLYTECHNIC

QEHS Work Instruction

WIKP-SEG-10 Rev 010

SEG
GAS MANAGEMENT

Effective Date: 19/08/2009

PURPOSE
To specify requirements for purchasing, receiving, storing, handling of gases and the
monitoring of toxic and flammable gas.

SCOPE
This procedure is applicable to all functions and activities involving the use, and
handling of gas and the procedures of the gas monitoring system used for the
detection of toxic and flammable gas leakage.

RESPONSBILITY
3.1
The OES and Schools shall be responsible to ensure that contractors and
employees under their respective management are aware of the hazards associated
with the gases they are handling, and are trained to use, store and handle the gases
responsibly (see Safety Data Sheets on the proper handling of all gases, Hardcopies of
SDS of gases that are available in the laboratories are filed and indexed at designated
storage cabinets at the laboratories. Up-to-date online versions of SDS can also be
found at http://encyclopedia.airliquide.com ).

3.2

All employees who handle gases need to follow the requirements that are laid down in
this procedure.
DEFINITIONS
Hazardous Substance: any substance which owing to its nature, composition or
quantity constitutes a danger to human health or the environment.
A list of controlled and hazardous substances is found in Appendix I.

5
5.1

RELATED DOCUMENTS/REFERENCES
http://www.airproducts.com/nr/rdonlyres/8d35ea4f-b95f-42c6-90876125c1f4123a/0/safetygram10.pdf

6.3

HANDLING & STORAGE OF GAS & GAS CYLINDER

6.3.1 All gas cylinders must be secured in designated areas at all times to prevent tipping. It
may be attached to a bench top, individually to the wall, placed in a holding cage or
have a non-tip base attached. Chains or straps may be used to secure them.

6.3.2 All compressed gas cylinders must be stored in an upright position. It should not be
subjected to any mechanical shock that could cause damage to their valves or
pressure relief devices. It should not be dropped, dragged or permitted to strike each
other or against other hard surfaces. Pressure is one of the greatest hazards
associated with gas system.
6.3.3 Cylinders should be placed with the valve accessible at all times. The main cylinder
valve should be closed as soon as it is no longer necessary (i.e., it should never be left
open when the equipment is not operating for long periods). This is necessary not only
for safety when the cylinder is under pressure, but also to prevent the corrosion and
contamination resulting from diffusion of air and moisture into the cylinder after it has
been emptied.
6.3.4

Cylinder valves should be open slowly. When opening the valve on a cylinder
containing an irritating or toxic gas, the user should position the cylinder with the valve
pointing away from them and warn those working nearby.

6.3.5 Never use oil or grease on the regulator of a cylinder valve. No person, other than the
gas supplier, shall attempt to mix gases in a cylinder.
6.3.6

Empty cylinders should always be labeled to prevent accidental connection of an

empty cylinder to a pressurized system resulting in suck-back.

6.3.7 All empty cylinders must be returned to the supplier. Do not purchase non-returnable
cylinders from suppliers.
6.3.8 Cryogenic Liquid
6.3.8.1

Always protect your eyes and skin. Wear safety glasses whenever you
are working with cryogenic liquid. In addition, also wear a full-face shield
if a cryogenic liquid is poured or if the cryogen may splatter.

6.3.8.2

When transferring cryogenic liquids from one container to another,

always start slowly allowing the vaporization to chill the receiving
container before filling it.

6.3.8.3

Wear cryogenic resistant gloves and cryogenic aprons to prevent

splashed liquid from being absorbed and freezing the skin.

6.3.8.4

Unprotected skin can stick to metal that is cooled by cryogenic liquids.

The skin can then tear when pulled away. Even non-metallic materials
are dangerous to touch at low temperature.

6.3.9 Flammable Gas

6.3.9.1

The basic condition for ignition of flammable gases are concentration of

gas within the flammable limits, presence of air or oxygen, source of
ignition. An absence of any of these conditions will not cause an ignition.

6.3.9.2

All flammable gases have flammable limits known as the Lower

Explosive Limit (LEL) and Upper Explosive Limit (UEL). It is flammable

when it is within the limit. Concentration below or above this limits are
either too lean or too rich to burn.
6.3.9.3

Cylinders containing flammable gases must not be stored in close

proximity to open flames, areas where electrical sparks are generated or
where other sources of ignition may be present.

6.3.9.4

For gas that is ignited when exposed to air, it is considered as

pyrophoric gas. The reason being its auto-ignition temperature is very
low. Silane is an example of pyrophoric gas.

6.3.9.5

All cylinders containing flammable gases should be stored in a well

ventilated area. It should not be stored with oxygen or nitrous oxide
cylinders or adjacent to any oxygen charging facilities.

6.3.9.6

All flammable gas cylinders should be stored in areas equipped with

sprinkler system or by a non combustible barrier or fire wall.

6.3.10 Oxidizer gas

6.3.10.1

Oxygen and other oxidizing gases shall not be stored in the same
vicinity as flammable gases.

6.3.10.2

This type of gas does not burn, but will support and accelerate
combustion of flammable materials or cause combustible materials to
ignite and burn. Increasing the concentration of an oxidizer accelerates
the rate of combustion.

6.3.10.3

Greasy and oily materials shall never be stored around oxygen, nor
should oil or grease be applied to fittings.

6.3.11 Corrosive Gas

6.3.11.1

Corrosive gas can attack various materials including fire resistant

clothing. Some gases are not corrosive in their pure form, but can
become extremely destructive if a small amount of moisture is added.

6.3.11.2

Corrosive gases can cause damage to living tissues and certain metallic
material such as steel including stainless steel.

6.3.11.3

The means of exposure is via inhalation or skin contact. Most corrosive

gases when exposed to the air becomes white or yellowish smoke.

6.3.11.4

Exposure of corrosive gases through inhalation will cause irritation to the

throat. Continued exposure will damage the mucous membrane of the
mouth, throat and lungs by reacting with water inside our body.

6.3.11.5
6.3.12 Toxic Gas

For exposure to metal, it will corrode the material at a very fast rate.

6.3.12.1

The primary hazard of toxic gases is poisoning. Even in small

concentrations, brief exposure to these gases can result in serious
personal injuries or even death.

6.3.12.2

The method of exposure for toxic gases are inhalation, absorption or

ingestion.

6.3.12.3

Acute toxicity in terms of short duration but high concentration will bear
immediate result. However, if the person is exposed to long term,
repeated exposure, the warning may not be immediate and apparent.

6.3.12.4

All toxic gas cylinders must be stored in a gas cabinet connected to

exhaust, sprinkler with leak detection and alarm system.

6.3.12.5

Cylinders in the cabinet must be securely chained and the exterior of the
gas cabinet labeled with the gas name.

6.3.12.6

The Gas cabinet and valve manifold box provide a safe environment
during cylinder change or in the unlikely event of a hazardous gas leak.

6.3.12.7

The gas cabinet also provides a secondary containment for any leak
from the cylinder connection and pigtail, with the capability for cycle
purge and vacuum-assisted vent during cylinder change or maintenance
of the manifold.

6.4

LABELLING OF GAS LINES AND CYLINDERS

6.4.1 All gases, gas cylinders and gas lines must be properly identified or labeled.
6.4.2

The contents of any compressed gas cylinder must be clearly identified. Such
identification are usually stenciled or stamped on the cylinder. No compressed gas
cylinders should be accepted for use that does not legibly identify its contents by
name. If the labeling on a cylinder becomes unclear to the point that contents cannot
be identified, the cylinder should be marked contents unknown and returned back to
the supplier.

6.4.3 Never rely on the color of the cylinder for identification. Color coding is not reliable
because cylinder colors may vary with different supplier.
6.4.4 All gas lines leading from a compressed gas supply should be labeled to identify the
gas. Distribution lines and their outlets should also be clearly labeled as to the type of
gas contained.
6.4.5

Flammable and toxic compressed gases are stored in gas cabinets connected to
emergency shut off system and equipped with sprinkler system. Signs should be
posted in area where these gases are stored.

6.4.6 Always check the SDS if you have any doubts about the gases after reading the label.
6.5

TRANSPORTATION OF GAS CYLINDERS

6.5.1 Before transporting any cylinders, check the Safety Data Sheet (SDS) of the gas for
any safety precaution and preventive measures.
6.5.2

The cylinders that contain compressed gases are primarily shipping containers and
should not be subjected to rough handling or abuse. Such misuse can seriously
weaken the cylinder and render it unfit for further use.

6.5.3

Valve protection cap shall not be used for lifting of cylinders from one position to
another. Cylinder valve must be close before transportation. The valve of the cylinder
should be protected during transportation, with the cover cap screwed on hand tight
and remain capped until the cylinder is in place and ready for use.

6.5.4 Never drag or slide cylinders, even for short distances.

6.5.5 When moving large cylinders, they should be strapped to a properly designed wheeled
cart to ensure stability. Only one cylinder should be moved at a time to prevent
cylinders to strike each other violently.
7
7.1

TOXIC AND FLAMMABLE GAS DETECTION SYSTEM

All toxic and flammable gases are stored in gas cabinets equipped with appropriate
gas leak detectors to detect the presence of flammable and toxic gases at or below the
permissible limit.

7.2

All flammable and toxic gas connections and distribution are enclosed in the ventilated
gas cabinet or valve manifold box (VMB) connected to the gas detection system.

7.3

Exhaust treatment devices such as burn box and scrubber system is installed to
remove specific toxic particles and gases from an exhaust stream for environmental
and safety consideration.

7.4

Ventilated gas cabinets equipped with sprinkler system are installed to house and
contain the toxic and flammable gas cylinder which allows safe delivery of the gas from
cylinder to the process and allows proper purging of the gas so that cylinder change
and maintenance can be performed.

7.5

The gas detection monitoring system is installed to continuously monitor an area for
the presence of hazardous and toxic gases at or below a specific concentration limit,
and if necessary, warn personnel through both visual and audible alarms.

7.6

Detection sensors are connected to the gas cabinets. If a specified gas concentration
or set point is exceeded, alarm will be triggered.

7.7

Detector is also located at or near points where there is the possibility of a gas
release. It is used to detect the presence of gas at or below the permissible exposure
limit. If a specified gas concentration or set point is exceeded, gas detection alarm will
be triggered.

7.8

There are two level of alarm, the first alarm level is to provide an early warning of a
developing hazard and notify the lab personnel to initiate corrective actions. The
second level of alarm is used to warn personnel and automatically shut down the gas
supply.

7.9
7.10

Gas leak alarm can only be reset or stop after deliberate action is taken.
Accidental Release Measures
a.
b.

In cases of accidental release, attempt to shut-off the source of gas but do not
endanger yourself.
Eliminate all sources of ignition, and ventilate the area.

c.

Staff in charge will rectify the cause of leak or with the help and service from the
gas equipment suppliers.

d.

If the situation is beyond control or presents an immediate danger, evacuate

the area immediately. Cordoned off the area and inform the staff in charge and
the campus security and Fire Command Centre giving the name, location and
all related information.

e.

Do not attempt to extinguish a leaking gas flame unless absolutely necessary.

Spontaneous/ explosive re-ignition may occur.

f.

If the gas leak is major and the gas detector is activated, it will shut down the
gas supply and at the same time staff will be alerted through messaging system
connected to the building management system.

g.
h.
i.

Inform the Campus security and fire command centre giving all related
information.
Evacuation will be done and warning to all others in the immediate area.
Gas equipment suppliers and SCDF will be called in for help, and assist them
with the exact location and provision of shut down point, etc.

APPENDIX
Appendix I

List of controlled and hazardous substances

Appendix II

Form for recording inventory of hazardous substances

Appendix III

Amendment History

APPENDIX I
LIST OF CONTROLLED and HAZARDOUS SUBSTANCES
Please refer to http://app2.nea.gov.sg/data/cmsresource/20090629934087284535.pdf
http://app.nea.gov.sg/cms/htdocs/article.asp?pid=1428
for the complete list of hazardous
substances controlled by the Environmental Pollution ControlProtection and Management
Act (EPCAEPMA).

Please refer to http://www.scdf.gov.sg/content/scdf_internet/en/building-professionals/firesafety-licensing-and-enforcement/Petroleum-StorageTpt/_jcr_content/par/download/file.res/Latest%202010%20Copy%20of%20complete

%20list%20of%20licensable
%20chemicals(Revised).xlshttp://www.scdf.gov.sg/downloads/FS_Licensing/Revised_HS_
Code_18Apr2006.xls for a complete list of flammable materials licensable under the
Singapore Civil Defence Force (SCDF).

Please refer to http://www.scdf.gov.sg/content/scdf_internet/en/building-professionals/firesafety-licensing-and-enforcement/Guidebook-App-PetroleumFlammable/_jcr_content/par/download_0/file.res/Exemption_quantities_for_FM.xls http://w

ww.scdf.gov.sg/downloads/FS_Licensing/Exemption_quanties_for_FM.xls
for a list of exemption quantities for flammable materials, located at the SCDF website.

Information on the licensing and type of flammable materials controlled by the SCDF are
found here http://www.scdf.gov.sg/scdf_internet/en/building-professionals/fire-safetylicensing-and-enforcement/Guidebook-App-PetroleumFlammable.htmlhttp://www.scdf.gov.sg/Building_Professionals/Fire_Safety_Licensing_and
_Enforcement/Guidebook_App_P&FM_Licence.html.

Please refer to
http://www.spf.gov.sg/licence/AE/others/Licensing_of_Explosive_Precursors.pdf for a lists
of substance which are classified as explosive precursors and controlled by the Singapore
Police Force.

Information on the frequently asked questions and the exclusion amount of the explosive
precursors are found here
http://www.spf.gov.sg/licence/AE/FAQ/FAQ_on_Licensing_of_Explosive_Precursors.pdf

Please refer to the Register of Permits and Licenses, SEG document for the hazardous
and flammable substance permit issued by NEA, SPF and SCDF.

Commonly used gases in the electronics industries and its classification:

N
o
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
27
28
29
30

Gas
Acetylene
Ammonia
Arsine
Diborane
Boron TriChloride
Boron Trifluoride
Trymethysilane
Octafluorocyclopentemo
Difluorethane
Fluoromethane
Methane
Chlorine
Chloride Trifluoride
Chloride Monoxide
Fluorine mixture
Germane
Hydrogen
Hydrogen Bromide
Hydrogen Chloride
Hydrogen Sulfide
Nitrogen Trifluoride
Nitric Oxide
Phosphine
Silicon
Tetrachloride
Silicon
Tetrafluoride
Dichlorosilane
Disilane
Silane
Trichlorosilane
Tungsten
Hexafluoride

Toxic
C2H2
NH3
AsH3
B2H6
BCl3
BF3
C3H1OSi
C5F8
CH2F2
CH3F
CH4
Cl2
ClF3
CO
<10%F2
GeH4
H2
HBr
HCl
H2S
NF3
NO
PH3
SiCl4
SiF4
SiH2Cl2
Si2H6
SiH4
SiHCl3
WF6

Y
Y
Y
Y
Y
Y

Corrosive

Flammable

Y
Y

Oxidising

Y
Y
Y
Y
Y

Y
Y
Y
Y
Y
Y
Y
Y

Y
Y

Y
Y
Y
Y
Y
Y

Y
Y

Y
Y
Y

Y
Y
Y
Y

Y
Y

Y
Y

Y
Y
Y
Y
Y

APPENDIX II
FORM FOR RECORD OF PURCHASE, STORE AND USE OF HAZARDOUS
SUBSTANCE KEPT BY A PERSON AUTHORISED TO

STORE AND USE HAZARDOUS SUBSTANCES

Name of Hazardous Substance: _____________________________________________

Percentage of purity: ______________________________________________________

Date

Qty
Recd

Invoice /
Delivery
Order No

Name /
Address of
Supplier

Qty
Used

Qty
Stored

Signature
of Permit
Holder

APPENDIX III - AMENDMENT HISTORY

S/No
.
1.

Amendment Description
New Issue

Rev No.
00

Effective Date
(dd/mm/yyyy)
19/08/2009
Approval

2.

Amended URLs for the following clauses: Appendix I

Paragraph 1, Appendix I Paragraph 2, Appendix I
Paragraph 3, Appendix I Paragraph 4

Last amended by: Teoh Kum Weng, Cleanroom Manager, SEG

Approved by: Dr. Wang Jianguo, Deputy Director, SEG

01