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High precision machines require very stable operational environment: temperature control and
vibration isolation. Tight temperature control for machines usually demand high cost to operate air
conditioners. Some of high precision machines require the ambient temperature changes to maintain
within 0.1 degrees. In this paper, we present a thermal error compensation scheme and
experimental results for improving machining accuracy of a high precision lathe. The testbed lathe
has X- and Z-axes and they are driven by linear motors and hydrostatic oil bearing. Due to the
temperature changes of the ambient air and supplied oil to the hydrostatic bearing, thermal
deformation is generated and measured to be around 0.4 m. To identify the dynamic relations
between the temperature changes and the thermal drift, a state-space model is used in which state
variables are constructed from the input measured temperatures and the output thermal drift data.
The identified model is implemented in a servo control loop and the predicted thermal error is
compensated by subtracting the predicted thermal drift from the servo command. In our simulation, a
thermal error of 97 nanometers RMS over 3 hours is reduced to 55 nanometers RMS. Experimental
results show an average of 24% reduction in thermal drift and support the validity of our approach.
1. Introduction
239
D eviation arcsec
D eviation m
0 .1
S tra ig h tn e s s e rro r
0 .0
-0 .1
0 .5
Y a w in g e rro r
0 .0
-0 .5
50
100
150
200
P o s itio n m m
Spindle
Tool holder
240
0.1
0
-0.1
120
Time (minutes)
Spindle Housing
0.2
180
240
Table
0.2
60
Temp. change ( C)
-0.2
0
0
-0.1
240
0
-0.1
-0.2
0
0.2
60 120 180
Time (minutes)
Oil Drain
240
0.4
60 120 180
Time (minutes)
Ambient
Temp. change ( C)
-0.2
0
0.1
0.1
0.2
0
-0.2
-0.4
0
60 120 180
Time (minutes)
240
0.1
0
0.4
-0.2
0
60 120 180
Time (minutes)
240
0.2
0
-0.2
-0.4
0
-0.1
Thermal drift (micron)
Temp. change ( C)
0.2
Temp. change ( C)
0.4
Measured
Predic. by OE
30
60
30
60
Predic. by SS
90
120
150
Time (minutes)
Predictions with perturbed-mean temperature data
180
0.2
0
-0.2
-0.4
0
90
120
Time (minutes)
150
180
241
4. Experimental Results
0.2
Compesation ON
RMS = 45.2 nano
Compesation OFF
RMS = 61.4 nano
Compesation ON
RMS = 51.5 nano
Compesation OFF
RMS = 65.9 nano
0.1
Real-time
Prediction w/o
Compensation
-0.1
10
Amplitude
10
-1
-0.2
0
10
120
Time (minutes)
180
240
-3
10 -6
10
-5
10
-4
10
-3
10
-2
10
-1
10
0
Phase (deg)
60
-2
10
5. Conclusions
-100
-200
-300 -6
10
10
-4
-3
10
10
Frequency (Hz)
-2
10
-1
10
242
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243