Accelerating

Innovative and
Integrated Solutions in
MEMS Sensors

Ian Chen, Freescale Semiconductor

Quick Introduction

Freescale Semiconductor

Sensor Solutions Division

Marketing,
M
k ti
S
Systems,
t
Applications,
A li ti
S
Software
ft
&
Algorithms

Sensor Platforms

20+ years marketing/engineering leadership

EVP, EE Times Top 40 Innovators to Watch

Analogix, Cypress,
C
IC
C Works, Mobius Microsystems,
National, Texas Instruments

University of Illinois, Urbana Champaign

MSEE MBA
MSEE,

TM

External Use

Holds 10+ patents

Agenda

MEMS sensors increasingly serving diverse markets

Examples of innovative applications and solutions
System architecture, software and algorithms
MEMS commercialization challenges

TM

External Use

Sensors provide a Primary Source of Data for the IoT

Sensor data now

outpace social media
50B connected devices
Led by various verticals
Data is money.
Nick Jones, Gartner

TM

External Use

Broad Based Adoption

Smartphone and
tablets

Consumer wearables

Tools and measuring

TM

External Use

Transportation

Industrial control

White goods

Factory automation

Enterprise networking

Building control and

HVAC

Wireless services

Smart metering

Medical

Growing and Diverse Applications

TM

External Use

Connected devices
Business productivity
Quantified health
Environment and context
awareness
Improving quality of life

Less Intrusive and More Cost Effective Care

Non-intrusively monitor and diagnostic tools

Monitor sleep posture: increase comfort and eliminate bed sore

Interprets patient movement and warns attendant before patients get

out of bed to reduce risks of falling

Improving Quality of Life

Qualityy of Life is Driving

g Explosive
p
Growth In Self Care
TM

External Use

Wellness Embedded
More Seamless Integration
into Everyday Life

Shoe inserts

Activity band, watches

Ear buds

Integration into athletic gear

and clothing (smart fabric)

Better integration requires

smaller size
size, lower power and
more sophisticated algorithms

TM

External Use

A Different Breed of Wearable Wellness

Analyze gait and behavior as early warning to health issues

Record performance

Monitor vitals: respiration, heart rate, temperature

Asset tracking
g

TM

External Use

Sensors Embedded in Daily Life

Human interfaces becoming context aware

Smart

appliances
Smart
S
t security
it
Remote patient monitor

The most valuable technologies are invisible

TM

External Use

10

Connected
Cloud

Cellular

3G, LTE, LTEA 4G,

A,
4G 5G
5G, etc.
t
Fiber,
PLC

Edge
g Nodes Sensors,,
Measurements, Monitoring

TM

External Use

11

Local
Gateway

Storage, Analytics

TV White
Space,
Sub Gig etc.
Sub-Gig,
etc

Continuous Improvement

Simplified
Hardware
(Integration)

Simplified
C
Connectivity
ti it
(Software
Framework)

TM

External Use

12

Conserve
Power and
Bandwidth

Improve
Security and
Privacy

Driving Information System

TM

External Use

13

Active Driver Assistance

TM

External Use

14

Striving for Simplicity

A Complete Sensor Solution includes
High level of integration
Sensor data analytics and connectivity
Software / firmware
Monolithic
o o t c Block
oc Diagram
ag a

Dual-Die
ua
e Block
oc Diagram
ag a

TM

External Use

15

Triple-Die
p e e with
t MCU
CU Block
oc Diagram
ag a

System in Package: TPMS Example

Industry Smallest Tire Pressure
Monitoring Sensor
MEMS capacitive pressure cell
MEMS 2-axis accelerometer
CMOS ASIC with

Microcontroller with 16 kB flash,

flash 512 B
SRAM

Temperature sensor and thermal restart

1-channel LF detector and decoder

Integrated RF transmitter: 315/434 MHz

7 x 7mm2 QFN package

TM

External Use

16

Layered Intelligence and Framework

High
Low
L
Intelligence
Transmission
(ConsumerCosts
specific Data)

High
Power
Data fusion
Cloud
Node

Worker management

Cloud
Node

Cloud
Node

Sensor/
Sensor
Hub

Sensor/
Sensor
Hub

Sensor Framework APIs

OS
Wired (Ethernet, Cable, DSL)

Wired
(Internet
Backbone)

Gateway-level Processing
Gateway Framework API
RTOS
Wireless (BT, Zigbee, Z-wave, etc)

Wired/
Wireless

Sensor Fusion and Context

Sensor/
Sensor
Hub

Sensor Adapters
RTOS
I2C,SPI

High
Low
Transmission Intelligence
Costs
(Raw Sensor
Data)

Low
Power

Sensor

Sensor

Smart Sensor

TM

External Use

Sensor

17

Security and Privacy

Security measures lag

connectivity today
D f
Defense
i multiple
in
lti l
layers
Passwords

authentication
Data encryption
Geo-metric security
y
Bio-metric security

Need privacy protocol

standard

TM

External Use

18

Summary
MEMS sensors continue to proliferate rapidly
More diverse markets are being served
More complete solution =
Sensor + Connecitivty + Processing
Continuing innovation: Freescale
has been leading sensor innovation
for almost 35 years

TM

External Use

19

Accelerated Adoption of Sensors

TM

External Use

20

TM

www.Freescale.com

2014 Freescale Semiconductor, Inc. | External Use