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e-mail: hongzhezhao@gmail.com
Bi Shusheng
e-mail: bishusheng@gmail.com
Yu Jingjun
e-mail: jjyu@buaa.edu.cn
Robotics Institute,
Beihang University,
Beijing 100191, P.R. China
Guo Jun
School of Astronautics,
Beihang University,
Beijing 100191, P.R. China
e-mail: guojunbh@buaa.edu.cn
Design of a Family of
Ultra-Precision Linear Motion
Mechanisms
The parasitic motion of a parallel four-bar mechanism (PFBM) is undesirable for designers. In this paper, the rigid joints in PFBM are replaced with their flexural counterparts,
and the center shift of rotational flexural pivots can be made full use of in order to compensate for this parasitic motion. First, three schemes are proposed to design a family of
ultraprecision linear-motion mechanisms. Therefore, the generalized cross-spring pivots
are utilized as joints, and six configurations are obtained. Then, for parasitic motion of
these configurations, the compensation condition is presented, and the design space of
geometric parameters is given. Moreover, the characteristic evaluation of these configurations is implemented, and an approach to improve their performances is further proposed. In addition, a model is developed to parametrically predict the parasitic motion
and primary motion. Finally, the analytic model is verified by finite element analysis
(FEA), so these linear-motion mechanisms can be employed in precision engineering.
[DOI: 10.1115/1.4007491]
Introduction
information can be achieved from Fig. 1(b), according to the qualitative analysis of this mechanism [21]. To be specific, if a flexural
pivot is used, whose center shift makes the distance between the
two stages increase, the parasitic motion of the compliant PFBM
will be eliminated. For example, the mechanism as shown in
Fig. 1(c) can achieve desired performance.
So the objective of this research is to synthesize the compliant
PFBM, and compensate for the parasitic motion by taking advantage of some rotational flexural pivots. As a typical flexural building block, the generalized cross-spring pivot [22,23] is chosen to
implement a quantitative analysis. Then, six configurations are
presented and the compensation condition of parasitic motion is
developed. Meanwhile, the characteristics of these configurations,
such as the range of motion and manufacturing performance, are
evaluated. Furthermore, taking one configuration as an example,
the model is developed to parametrically predict the parasitic
motion and primary motion. Finally, FEA is carried out, in order
to verify the validity of the developed model.
Ll Lyh Ll
h2
1 cos h ll 1 cos h ll
L
L
2
C 2012 by ASME
Copyright V
(1)
Fig. 1 The compliant parallel four-bar mechanism combined by flexural building blocks: (a) leaf spring building
block, (b) cartwheel flexural building block, and (c) generalized cross-spring building block
dyl ll h2
2
4
(2a)
dyl
ll h2
2
4
(2b)
Fig. 2 Three schemes is clarified by the equivalent rigid body model of a single kinematic chain (prismatic joints in the x direction are not shown). The dotted line is the initial position, and Ll is referring to
the dotted line: (a) scheme I, (b) scheme II, and (c) scheme III.
Fig. 3 The generalized cross-spring pivot: (a) nonmonolithic arrangement and (b)
monolithic arrangement
mp
dyp
Mp Lp
;
EI
DY
;
Lp
fp
dxp
Fp L2p
;
EI
DX
;
Lp
Pp L2p
EI
2
Lp
dp 12
Tp
pp
(3a)
(3b)
where Cxh_p and Cyh_p are the coefficients of the dominant terms;
Hxh_p and Hyh_p are the higher order terms; Cxf_p and Cyf_p are the
compliances for the horizontal force fp in the x and y directions,
respectively; Cxp_p and Cyp_p are the compliances for the vertical
force pp in the x and y directions, respectively. All these coefficients can be obtained according to Refs. [21,23]. Each coefficient
has two values when the geometric parameter k is in the different
range, (1, 0.5) and (0.5, 1).
In terms of the center shift dyp, the dominant term of dyp,d can
be expressed as the following form, irrespective of the range of
geometric parameter k.
dyp;d
1 2
9k 9k 1 h2
15 cos a
(4)
Fig. 4
pivot
Lp L=n
(5)
Fig. 5 Six configurations of the compliant linear-motion mechanisms: (a) configuration 1, (b) configuration 2, (c) configuration
3, (d) configuration 4, (e) configuration 5, and (f) configuration 6
dxp ndxno
(6)
Configuration 2
4 30cos2 al2 15 cos2 a2a 1 36a l 36a2 0
(7b)
Configuration 3
4l2 36a 15 cos2 a1 2a l 36a2 0
(7c)
Configuration 4
4 30 cos2 al2 36a 15 cos2 a2a 1 l 36a2 0
(7d)
Configuration 5
4 30 cos2 al2 15 cos2 a2a 1 36a l 36a2 0 (7e)
Configuration 6
4 30 cos2 al2 36a 15 cos2 a1 2a l 36a2 0 (7f )
dyno,d
dy1,d
Constraint conditiona
k 1 a=l
k 1 a=l
3b
k 1 a=l
k a=l
1 2l a 2
h
2
2a l 1 2
h
2
1 2a 2
h
2
1 2a l 2
h
2
2l a 1 2
h
2
1 2l a 2
h
2
b1 < k < b2 c
2b
9a2 9al l2 h2
15l cos2 a
9a2 9al l2 h2
15l cos2 a
2
9a 9al l2 h2
15l cos2 a
9a2 9al l2 h2
15l cos2 a
2
9a 9al l2 h2
15l cos2 a
9a2 9al l2 h2
15l cos2 a
No.
k 1 a=l
k a=l
0 l a < 1=2
k1
a l > 1=2
k1
k0
a l < 1=2
0 k < b1 or b2 < k 1
l a > 1=2
0 k < b1 or b2 < k 1
0 l a < 1=2
The geometric parameters for all six configurations subject to the condition: 0 < l < 1, a 0.
If monolithic
the condition becomes stricter: 0 < l < 1=2.
pmanufacturing ispconsidered,
c
b1 3 5=6, b2 3 5=6.
b
Cxh 11 h311
Cxf
Cxp
h312
(17a)
Hxh 11 Hxh 12
C
11
xf 12 f1 cos h12 p1 sin h12
11 Cxp 12 p1 cos h12 f1 sin h12
(17b)
h211 h212 h221 h222 Hyh 11 Hyh 12 Hyh 21 Hyh
Cyf 11 Cyf 12 Cyf 21 Cyf 22
11
22
(20a)
22
(20b)
T/mm
W/mm
E/Pa
0.5
0.73 1011
Mechanism No.
Mech 1
Mech 2
Mech 3
p/9
p/6
p/6
0.310741
0.269523
0.210280
0.4
0.45
0.210280
Fig. 7 New configuration is design by using complex flexural pivot: (a) configuration 4 is constructed by primitive flexural pivot and (b) configuration 7 is constructed by primitive flexural pivot
2 30 cos2 al2 18a 15 cos2 a2a 1 l 18a2 0
(10)
The constraint condition for the geometric parameters is
a l < 1=2 a > 0;
l > 0
(11)
l > 0
(12)
can also be synthesized. However, the difficulties need to be indicated: if the pivots with different geometric parameters and shape
parameters are utilized to combine the complex flexural pivot, the
rotational angles for these flexural building blocks will not be
identical, and Eq. (8) will not be valid.
Case Study
mno
;
n
fp
fno
;
n2
pp
pno
;
n2
dp
dno
d
2
n
n2
Hxh
no
Cxf
no fno
Cxp
no pno
(13a)
Cyh no h2no
Hyh
no
Cyf
no fno
Cyp
no pno
(13b)
dxno Cxh
dyno
Cxh 11 h311
Cxf
Cxp
h312
(17a)
Hxh 11 Hxh 12
C
11
xf 12 f1 cos h12 p1 sin h12
11 Cxp 12 p1 cos h12 f1 sin h12
(17b)
h211 h212 h221 h222 Hyh 11 Hyh 12 Hyh 21 Hyh
Cyf 11 Cyf 12 Cyf 21 Cyf 22
11
22
(20a)
22
(20b)
T/mm
W/mm
E/Pa
0.5
0.73 1011
Mechanism No.
Mech 1
Mech 2
Mech 3
p/9
p/6
p/6
0.310741
0.269523
0.210280
0.4
0.45
0.210280
Fig. 10 Primary motion versus parasitic motion: (a) Mech 1, (b) Mech 2, and (c) Mech 3
Table 5 Two compliant linear-motion mechanisms are compared according to the FEA data
Mechanism No.
Mech 4
Mech 5
p/3
p/3
0.067406
0
0.16
0.227406
blocks (Fig. 1(b)), which is developed by Duarte and his coworkers [19]; and Mech 6 is constructed by two leaf-springs
(Fig. 1(a)). The geometric parameters for Mech 4 and Mech 5
are listed in Table 5, and the Mech 6 has the same dimension
with the others.
As a result, the parasitic motion of Mech 4 is far less than that
of Mech 5 and Mech 6, even when their dimensions are the same,
as shown in Fig. 11.
Fig. 11 Comparison of parasitic motion for Mech 4Mech 6
Consequently, the parasitic motion and primary motion are modeled to predict the performance of the complaint linear-motion
mechanism. It needs to be emphasized that the internal forces are
entirely eliminated by the load relationship (14a), (14b), and (18),
as well as the geometric condition (19). So the advantages of the
building blocks method are displayed, and this method can be
extensively exploited in the design of complex flexural pivot and
compliant mechanism.
FEA Verification
Conclusions
Acknowledgment
The authors gratefully acknowledge the financial support of
National Natural Science Foundation of China (Grant Nos.
51105014, 50975007) and Ph.D. Programs Foundation of Ministry
of Education of China (Grant No. 20091102110023).
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