You are on page 1of 98

Installation and Operation Manual

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

DeviceNet Supplemental Manual


for GF100 Series Mass Flow Controllers
and Meters

Brooks GF135 Series and GF125 Series

Installation and Operation Manual

Brooks DeviceNet PCs/PMs

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Dear Customer,
We recommend that you read this manual in its entirety as this will enable efficient and proper use of the
DeviceNet MFCs. Should you require any additional information concerning the DeviceNet MFCs, please feel free
to contact your local Brooks Sales and Service Office; see back cover for contact information, or visit us on the
web at www.BrooksInstrument.com. We appreciate this opportunity to service your fluid measurement and control
requirements, and trust that we will be able to provide you with further assistance in future.

Yours sincerely,
Brooks Instrument

ii

Installation and Operation Manual

Contents

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

Contents
1. Introduction..............................................................................................................................................1
1.1. Device Profile Enhanced Mass Flow Controller Device (Type 0x27)......................................3
1.2. Object Model for Mass Flow Controller .....................................................................................3
1.3. How Objects Affect Behavior.....................................................................................................4
2. Identity Object (Class 0x01)....................................................................................................................5
2.1. Instance Attributes.....................................................................................................................5
2.2. Common Services .....................................................................................................................6
3. DeviceNet Object (Class 0x03) ...............................................................................................................7
3.1. Instance Attributes.....................................................................................................................7
3.2. Common Services .....................................................................................................................8
3.3. Semantics ..................................................................................................................................8
3.4. Module Status LED....................................................................................................................9
3.5. NET Status LED ........................................................................................................................9
4. Connection Object (Class 0x05)...........................................................................................................11
4.1. Instance Attributes (Explicit Connection, instance 1 ...............................................................11
4.2. Instance Attributes (Polled Connection, instance 2) ...............................................................12
4.3. Common Services ...................................................................................................................14
5. Assembly Object (Class 0x04) .............................................................................................................15
5.1. Instance Attributes...................................................................................................................15
5.2. Common Services ...................................................................................................................16
5.3. Object Instances......................................................................................................................16
5.4. I/O Assembly Object Instance Data Attribute Format..............................................................17
6. S-Device Supervisor Object (Class 0x30) ...........................................................................................23
6.1. S-Device Supervisor Class Attributes .....................................................................................24
6.2. S-Device Supervisor Instance Attributes (Object/Class 0x30) ................................................25
6.3. Semantics ................................................................................................................................29
6.4. S-Device Supervisor Common Services (Object/Class 0x30) ................................................36
6.5. S-Device Supervisor Object-Specific Services........................................................................36
iii

Contents

Installation and Operation Manual

Brooks DeviceNet PCs/PMs

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

7. S-Analog Sensor Object (Class 0x31) .................................................................................................39


7.1. S-Analog Sensor Class Attributes ...........................................................................................39
7.2. S-Analog Sensor Instance Attributes (Object/Class 0x31)......................................................40
7.3. Semantics ................................................................................................................................45
7.4. S-Analog Sensor Common Services.......................................................................................49
7.5. S-Analog Sensor ObjectSpecific Services ............................................................................49
7.5.1. Zero_Adjust Request Service Data Field Parameters ............................................50
7.5.2. Gain_Adjust Request Service Data Field Parameters ............................................50
7.6. Behavior...................................................................................................................................51
7.7. S-Analog Sensor Object Instance Subclass 01.......................................................................52
7.7.1. Subclass 01 Instance Attributes ..............................................................................52
7.7.2. Subclass 01 Services ..............................................................................................52
7.7.3. Subclass 01 Behavior..............................................................................................53
8. S-Analog Actuator Object (Class 0x32)...............................................................................................55
8.1. S-Analog Actuator Class Attributes .........................................................................................55
8.2. S-Analog Actuator Instance Attributes ....................................................................................56
8.3. Semantics ................................................................................................................................59
8.4. S-Analog Actuator Common Services.....................................................................................62
8.5. S-Analog Actuator ObjectSpecific Services ..........................................................................62
8.6. S-Analog Actuator Behavior ....................................................................................................62
9. S-Single Stage Controller Object (Class 0x33)...................................................................................65
9.1. S-Single Stage Controller Class Attributes..............................................................................65
9.2. S-Single Stage Controller Instance Attributes .........................................................................66
9.3. Semantics ................................................................................................................................69
9.4. S-Single Stage Controller Common Services .........................................................................71
9.5. S-Single Stage Controller ObjectSpecific Services...............................................................72
9.6. Behavior...................................................................................................................................72
10. S-Gas Calibration Object (Class 0x34) ..............................................................................................75
10.1. S-Gas Calibration Class Attributes........................................................................................76
10.2. S-Gas Calibration Instance Attributes ...................................................................................77
10.3. Semantics ..............................................................................................................................79
10.4. S-Gas Calibration Common Services....................................................................................80
10.5. S-Gas Calibration ObjectSpecific Services .........................................................................80
10.6. S-Gas Calibration Object Behavior .......................................................................................81
iv

Installation and Operation Manual

Contents

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

10.7. S-Gas Calibration Object Instance Subclass 01 ...................................................................82


10.7.1. Subclass01 Instance Attributes .............................................................................82
10.7.2. Subclass 01 Instance Services .............................................................................82
10.7.3. Subclass 01 Behavior............................................................................................82
11. Advanced Diagnostics (GF135 Only) ................................................................................................83
11.1. New Communication Protocol Overview ...............................................................................83
11.1.1. Objectives and Problem Statement.......................................................................83
11.1.2. Protocol Description ..............................................................................................83
11.2. Specific Requirements...........................................................................................................84
11.2.1. Introduction............................................................................................................84
11.2.2. Advanced Protocol ................................................................................................84
11.2.3. New Attributes .......................................................................................................84
11.3. Tool Device Communication...............................................................................................87
12. References ...........................................................................................................................................89

Contents

Installation and Operation Manual

Brooks DeviceNet PCs/PMs

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

THIS PAGE WAS


INTENTIONALLY
LEFT BLANK

vi

Installation and Operation Manual

Section 1 - Introduction

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

1. Introduction

This document and the DeviceNet Statement of Compliance (SOC) from the
Open DeviceNet Vendors Association (ODVA) provide a complete
interoperability specification for the GF135 Digital Mass Flow Controller
device from Brooks. This device is defined by the ODVA specification in the
Device Profiles chapter, section entitled Enhance Mass Flow Controller,
Type: 27hex. Information contained in this document was derived from the
following sources:

DeviceNet Specification Enhancements for the S-Device Supervisor


Objects:

S-Device Supervisor Object (DSE-93-01) 1

S-Analog Sensor Object (DSE-93-02) 2


S-Analog Actuator Object (DSE-93-03) 3
S-Single Stage Controller Object (DSE-93-04) 4
S-Gas Calibrator Object (DSE-93-05) 5

ODVA Mass Flow Controller Device Profile (DSE 93-06) 6

ODVA DeviceNet Specifications Version 2.0 7

ODVA Enhanced Mass Flow Controller Device Profile (Edition 3.4, CIP
Spec.)

AMAT (various docs)

This device also complies with the ODVA Semiconductor SIG Interface
Guidelines for DeviceNet Devices on Semiconductor Manufacturing Tools.

Section 1 - Introduction

Installation and Operation Manual

Brooks DeviceNet PCs/PMs

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

The GF100 Series Digital Mass Flow Controller (hereafter referred to as


GF100 Series) supports the following DeviceNet objects: Identity, DeviceNet,
Connection, and Assembly. In addition, support is also provided for the SDevice Supervisor, S-Analog Sensor, S-Analog Actuator, S-Single Stage
Controller, and S-Gas Calibration objects. Supported objects are
summarized in the following table.
Subclass
Object Class

Optional/Required

# of Instances

Required

Required

DeviceNet

Required

Connection

Required
(note 1)

at least
1 I/O Polled and
1 Explicit

Acknowledge Handler
Object

Conditional (note 2) 1

Assembly

Required

at least
1 Input and
1 Output

S-Device Supervisor

Required

S-Gas Calibration

01

Optional
(Supported)

0 or More

S-Analog Sensor

01

Required (note 3)

S-Analog Actuator

Conditional (note 4) 1
(Supported)

S-Single Stage Controller

Conditional (note 4) 1
(Supported)

Class

Inst

Identity

Message Router

Notes:
1. GF100 Series supports one I/O Polled and one Explicit Connection
2. Required for Change-of-State/Cyclic I/O connection support. (Not supported).
3. The GF100 Series supports three instances of the S-Analog Sensor object; instance 1 for
flow, instance 2 for pressure and instance 3 for temperature. This conforms to the
Enhanced MFC profile, device type = 27hex.
4. Required for a Mass Flow Controller, a device that contains a Valve and a Controller. Not
supported in a Mass Flow Meter Device (an MFC without a Valve or a Controller).

Installation and Operation Manual

Section 1 - Introduction

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

1.1. Device Profile Enhanced Mass Flow Controller Device (Type 0x27)

A Mass Flow Controller is a device that measures and controls the mass flow
rate of gas or liquid. The MFC contains three principle components: a mass
flow rate sensor, a metering valve, and a closed-loop controller. The sensor
can consist of a variety of types, including thermal or pressure-based. Flow
can be regulated by a variety of actuator types, including solenoid, voice coil,
or piezoelectric transducer. The closed-loop controller accepts a setpoint
from the host and controls the flow to that setpoint. Control is accomplished
by monitoring the flow and adjusting the valve position to reduce the error
between the setpoint flow value and actual flow value.
1.2. Object Model for Mass Flow Controller

Object Model for the MFC Device

Section 1 - Introduction

Installation and Operation Manual

Brooks DeviceNet PCs/PMs

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

1.3. How Objects Affect Behavior

Object

Effect on behavior

Identity

Supports the Reset service. Upon receipt of a Reset


Service Request of any Type, the Identity Object sends a
Reset Service Request to the S-Device Supervisor.

Message Router

No effect

DeviceNet

Configures port attributes (node address, data rate, and


BOI)

Connection Class

Contains the number of logical ports into or out of the


device

Acknowledge Handler

Used to manage the reception of I/O message


acknowledgements. (Not used or required in the GF100
Series).

Assembly

Defines input/output and configuration data format

S-Device Supervisor

Supports the Stop, Start, Reset, Abort, Recover and


Perform_Diagnostic services for ALL Application Objects
in the device and consolidates the Exception Conditions
and Application Objects Status.
This object behaves differently from the Identity Object in
that the S-Device Supervisor object provides a single point
of access to the Application Objects only; it does not effect
the DeviceNet specific objects (i.e., Identity, DeviceNet,
Connection, etc.).

S-Gas Calibration

Modifies the correction algorithm of the S-Analog Sensor


object which includes the selection mechanism to enable
an S-Gas Calibration object instance.

S-Analog Sensor

Feeds the process variable to the Single Stage Controller


object

S-Single Stage Controller Feeds the control variable to the Analog Actuator object
S-Analog Actuator

Operates the Flow Control Valve of the device

Installation and Operation Manual

Section 2 - Identity Object (Class 0x01)

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

2. Identity Object (Class 0x01)

The Identity Object provides general information about the identity of a


device. This object is summarized in the following tables.
2.1. Instance Attributes

Attribute Need in
ID
implementation

Access
Rule

Name

DeviceNet
Data Type

Description of Attribute

Required

Get

Vendor ID

UINT

ODVA Assigned Vendor


Number
= 41 (0x29)

Required

Get

Device Type

UINT

ODVA Assigned Device


Number
= 39 (0x27)

Required

Get

Product Code

UINT

Brooks Assigned Product


Number = 724

Required

Get

Revision

STRUCT of:

Product Revision

Major Rev

USINT

(byte)

Minor Rev

USINT

(byte)

Required

Get

Status

WORD

DeviceNet Status

Required

Get

Serial Number

UDINT

DeviceNet Device Serial


Number

Required

Get

Product Name

SHORT
STRING

GF100
(1-32 characters)

Section 2 - Identity Object (Class 0x01)

Installation and Operation Manual

Brooks DeviceNet PCs/PMs

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

2.2. Common Services

Service
Code

Need in Implementation
Class

Instance

Service Name

Description of Service

0Ehex
14dec

Conditional

Required

Get_Attributes_Single

Returns the contents of the


specified attribute.

05hex
05dec

n/a

Required

Reset

Resets the device to the SelfTesting state.

RESET Request Service Data Field Parameters

Parameter

Required

Data Type

Description

Semantics of Values

Type

Required

USINT

Type of Reset

0 = Power Cycle type [default if


parameter omitted]
1 = Out-of-Box type

Installation and Operation Manual

Section 3 - DeviceNet Object (Class 0x03)

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

3. DeviceNet Object (Class 0x03)

The DeviceNet Object maintains configuration and status of physical


attachments to DeviceNet. It also allocates and releases connection
instances associated with the Predefined Master/Slave Connection Set.
3.1. Instance Attributes

Attribute Need in
ID
implementation

Access
Rule

Name

DeviceNet
Data Type

Description of Attribute

Required

Set

MAC ID

USINT (byte) Values 0-63 or P


(Programmable MAC ID)
See 3.3. Semantics.

Required

Set

Baud Rate

USINT (byte) Values 0,1,2 or P


See 3.3. Semantics.

Required

Set

BOI

USINT (byte) Bus Off Interrupt

Required

Set

Bus-off
Counter

USINT (byte) Number of times CAN chip


went to bus off state

Required

Get

Allocation
USINT (byte) Indicates whether or not the
Information
Predefined Master/Slave
Connection Set has been
allocated

Conditional
(supported)

Get

MAC ID
switch
changed
(note 1)

BOOL

Indicates the Node ID switches


have changed since last
power-up or reset. 0=no
change, 1=change

Conditional
(supported)

Get

Baud Rate
switch
changed
(note 1)

BOOL

Indicates the baud rate switch


has changed since last powerup or reset. 0=no change,
1=change

Conditional
(supported)

Get

MAC ID
switch
value

USINT (byte) Actual value of the Node


address switches, (0-99)

Conditional
(supported)

Get

Baud rate
switch
value

USINT (byte) Actual value of the baud rate


switch, (0-9)

Note 1: When either one of these two attributes are true (=1), then the module LED will flash red to indicate the
status. See 3.4. Module Status LED for more information.

Section 3 - DeviceNet Object (Class 0x03)

Installation and Operation Manual

Brooks DeviceNet PCs/PMs

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

3.2. Common Services

Service
Code

Need in Implementation
Class

Instance

Service Name

Description of Service

0Ehex
14dec

Conditional

Required

Get_Attributes_Single

Returns the contents of the


specified attribute.

10hex
16dec

n/a

Required

Set_Attributes_Single

Sets the attribute to the specified


value

4Bhex
75dec

n/a

Required

Allocate_Master/Slave_C This is the Service utilized to


onnection_Set
perform the allocation of the
Predefined Master/Slave
Connection Set.

4Chex
76dec

n/a

Required

Release_Master/Slave_C This service is used to deallocate


onnection_Set
the Predefined Master/Slave
Connection Set within a Slave

3.3. Semantics

The Mac ID and Baud Rate are switch selectable. Baud Rate will be 125K,
250K, or 500K baud if the switch is set to 1,2,5 respectively. The Mac Id
switch sets the units DeviceNet address to 0-63, according to the switch
settings. Both switches may be placed in the P position, which selects
programmable Mac Id or Baud Rate. If the switch is placed in the P
position, the Mac Id or Baud Rate will assume the last valid value.
Mac ID and Baud Rate attributes are software settable ONLY when the
switches are in the P position. Behavior related to the Mac ID and the Baud
Rate attributes conforms to the requirements defined in the Open DeviceNet
Vendor Association Semiconductor Special Interest Group (SIG) Interface
Guidelines Conformance Test Procedure (Section 5.6).

Installation and Operation Manual

Section 3 - DeviceNet Object (Class 0x03)

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

3.4. Module Status LED

The module status LED indicates the status of the DFC Module.
Module Status

LED State

Description

Power Off

Off

No Power applied to device

Device Self-test

Flashing
Green-Red

Device is in Self-test. The Module LED will flash


Green for 250mSec, followed by RED for 250mSec.
If the device passes the self-test, LED will stay Green

Device
Operational

Green

Device is operating normally.

Recoverable
Fault

Flashing
Red

The Node (MAC ID) address or baud rate switches have changed
since the last power-up/reset.

Unrecoverable
Fault

Red

Device has detected an unrecoverable fault.

3.5. NET Status LED

The Network status LED indicates the status of the DFC DeviceNet
Connection.
Network Status

LED State

Description

Power Off

Off

No Power applied or device is the only node on the network.

On-line Not
Connected

Flashing
Green

Device is Operating normally. It is on-line, but no connections


have been established to the Device.

Device
Operational

Green

Device is operating normally.

Connection
Timeout

Flashing
Red

One or more connections have timed out.

Unrecoverable
Fault

Red

Device cannot communicate on the network. Duplicate MacId


or Bus-off condition

Installation and Operation Manual

Section 4 - Connection Object (Class 0x05)

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

4. Connection Object (Class 0x05)

The Connection Class allocates and manages internal resources associated


with both I/O and Explicit Messaging connections. The Explicit and I/O
Connection Objects manage the communication aspects associated with a
particular application to application network relationships. The GF100 Series
supports both the Explicit and Polled or I/O Connections.
4.1. Instance Attributes (Explicit Connection, instance 1

Attribute Need in
ID
implementation

Access
Rule

Name

DeviceNet
Data Type

Description of Attribute

Required

Get

State

USINT
(byte)

State of the object

Required

Get

Instance Type

USINT
(byte)

Indicates either I/O or


Messaging Connection

Required

Get

Transport Class Byte


Trigger

Defines behavior of the


Connection

Required

Get

Produced
Connection ID

UINT

Placed in CAN Identifier Field


when connection transmits

Required

Get

Consumed
Connection ID

UINT

CAN Identifier Field value that


denotes message to be
received

Required

Get

Initial Comm.
Characteristics

Byte

Defines the Message Group(s)


across which productions and
consumptions associated with
this
Connection occur

Required

Get

Produced
UINT
Connection Size

Maximum number of bytes


transmitted across this
connection

Required

Get

Consumed
UINT
Connection Size

Maximum number of bytes


transmitted across this
connection

Required

Set

Expected
Packet Rate

Defines timing associated with


this Connection

12

Required

Get

Watchdog time- USINT


out Action
(byte)

Defines how to handle


Inactivity/Watchdog timeouts

13

Required

Get

Produced Path
Length

Number of bytes in the


produced_connection_path
length

UINT

UINT

11

Section 4 - Connection Object (Class 0x05)

Installation and Operation Manual

Brooks DeviceNet PCs/PMs

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Attribute Need in
ID
implementation

Access
Rule

Name

DeviceNet
Data Type
Array of
USINT

Description of Attribute

14

Required

Get

Produced
Connection
Path

Specifies the Application


Object(s) whose data is to be
produced by this Connection
Obj.

15

Required

Get

Consumed Path UINT


Length

Number of bytes in the


consumed_connection_path
attr.

16

Required

Get

Consumed
Connection
Path

Array of
USINT

Specifies the Application Objs


that are to receive data
consumed by this Connection
Obj.

17

Required

Get

Production
Inhibit time

UINT

Defines minimum time between


new data production. This
attribute is required for I/O
Client Connections.

4.2. Instance Attributes (Polled Connection, instance 2)

Attribute Need in
ID
implementation

12

Access
Rule

Name

DeviceNet
Data Type

Description of Attribute

Required

Get

State

USINT (byte) State of the object

Required

Get

Instance
Type

USINT (byte) Indicates either I/O or


Messaging Connection

Required

Get

Transport
Class
Trigger

Byte

Required

Get

Produced
UINT
Connection
ID

Placed in CAN Identifier Field


when connection transmits

Required

Get

Consumed UINT
Connection
ID

CAN Identifier Field value that


denotes message to be
received

Required

Get

Initial
Byte
Comm.
Characteris
tics

Defines the Message Group(s)


across which productions and
consumptions associated with
this Connection occur

Required

Get

Produced
UINT
Connection
Size

Maximum number of bytes


transmitted across this
connection

Defines behavior of the


Connection, (server, class 2)

Installation and Operation Manual

Section 4 - Connection Object (Class 0x05)

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

Attribute Need in
ID
implementation

Access
Rule

Name

DeviceNet
Data Type

Required

Get

Consumed UINT
Connection
Size

Maximum number of bytes


transmitted across this
connection

Required

Set

Expected
Packet
Rate

UINT

Defines timing associated with


this Connection

Required

Get

Watchdog
time-out
Action

USINT (byte) Defines how to handle


Inactivity/Watchdog timeouts

Required

Get

Produced
Path
Length

UINT

Required

Set *

Produced
Array of
Connection USINT
Path

Specifies the Application


Object(s) whose data is to be
produced by this Connection
Obj.

Required

Get

Consumed
Path
Length

Number of bytes in the


consumed_connection_path
attr.

Required

Set*

Consumed Array of
Connection USINT
Path

Specifies the Application Objs


that are to receive data
consumed by this Connection
Obj.

Required

Get

Production
Inhibit time

Defines minimum time


between new data production.
This attribute is required for I/O
Client Connections.

12

13

14

15

UINT

16

17

Description of Attribute

UINT

Number of bytes in the


produced_connection_path
length

* Produced and Consumed Connection Path attributes are settable ONLY when the I/O connection is in the
Configuring State. These attributes must reference consistent data types at the time the I/O connection
transitions to the Established State. See MFC Device Profile, Version J for more information regarding consistent
data types.

13

Section 4 - Connection Object (Class 0x05)

Installation and Operation Manual

Brooks DeviceNet PCs/PMs

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

4.3. Common Services

Service
Code

14

Need in Implementation
Class

Instance

Service Name

Description of Service

0Ehex
14dec

Conditional

Required

Get_Attributes_Single

Returns the contents of the


specified attribute.

10hex
16dec

n/a

Required

Set_Attributes_Single

Sets the attribute to the specified


value

05hex
05dec

n/a

Optional
(supported)

Reset

Dependent on watchdog timeout


action.

Installation and Operation Manual

Section 5 - Assembly Object (Class 0x04)

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

5. Assembly Object (Class 0x04)

The Assembly Object groups attributes of multiple objects into a single block
of data, which can be produced and consumed over an I/O connection.
Various combinations of S-Device Supervisor Attributes are grouped together
to form the assemblies supported by the GF100 Series. Both the MFC and
EMFC device profiles do NOT allow mixed integer and real assemblies to
be allowed at the same time. That is, it is not allowed to produce an integer
assemble and consume a floating-point assembly over a polled connection.
See the EMFC Device Profile in the ODVA DeviceNet specification for more
detail.
5.1. Instance Attributes

Number Required

Supported

Type

# bytes

Name

Input

Flow

Y (default) Y

Input

Status and Flow

Input

Status, Flow and Valve

Input

Status, Flow, and Setpoint

Input

Status, Flow, Setpoint and Valve

Input

Status, Flow, Setpoint, Override and Valve

Y (default) Y

Output

Setpoint

Output

Override and Setpoint

Input

Status

10

(assembly not used)

11

(assembly not used)

12

(assembly not used)

13

Input

FP Flow

14

Input

Status, FP Flow

15

Input

Status, FP Flow and FP Valve

16

Input

Status, FP Flow, and FP Setpoint

17

Input

13

Status, FP Flow, FP Setpoint and FP Valve

18

Input

14

Status, FP Flow, FP Setpoint, Override and FP Valve

19

Output

FP Setpoint

20

Output

Override and FP Setpoint

15

Section 5 - Assembly Object (Class 0x04)

Installation and Operation Manual

Brooks DeviceNet PCs/PMs

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Number Required

Supported

Type

# bytes

Name

21

Input

Status, Flow, Pressure, Temperature

22

Input

Status, Flow, Valve, Pressure, Temperature

23

Input

13

Status, FP Flow, FP Pressure, and FP Temperature

The number of bytes indicates how many data bytes are produced or
consumed for each assembly. The FP abbreviation is for Floating Point, or
real data. Each real data value will consist of 4 bytes of IEEE 754 single
precision data.
5.2. Common Services

Service
Code
0Ehex
14dec

Need in Implementation
Class

Instance

Service Name

Description of Service

Conditional

Required

Get_Attributes_Single

Returns the contents of the


specified attribute.

5.3. Object Instances

Producing Object Instances must be one of the following: 1, 2, 3, 4, 5, 6, 9,


13, 14, 15, 16, 17, 18, 21, 22 or 23. These instances send data to the
master. Consuming Object Instances must be one of the following: 7, 8, 19,
or 20. These instances receive data from the master. As mentioned before,
both the Produced and Consumed Paths must reference either integer OR
real assemblies. The following section details each assembly and its data
type. The FP designation will indicate a real, floating point value. Otherwise,
the data will be an integer or, in the case of the status byte, a bit-mapped
value.

16

Installation and Operation Manual

Section 5 - Assembly Object (Class 0x04)

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

5.4. I/O Assembly Object Instance Data Attribute Format

The manufacturer of a Mass Flow Controller Device must specify which


Assembly instances are supported by the device. The GF100 Series
supports the following assemblies.
The I/O Assembly DATA attribute has the format shown below.
Instance
1

Byte Bit 7

Bit 6

Bit 5

Bit 4

Bit 3

Bit 2

Flow (low byte)

Flow (high byte)

Status

Flow (low byte)

Flow (high byte)

Status

Flow (low byte)

Flow (high byte)

Valve (low byte)

Valve (high byte)

Status

Flow (low byte)

Flow (high byte)

Setpoint (low byte)

Setpoint (high byte)

Status

Flow (low byte)

Flow (high byte)

Setpoint (low byte)

Setpoint (high byte)

Valve (low byte)

Valve (high byte)

Bit 1 Bit 0

17

Section 5 - Assembly Object (Class 0x04)

Installation and Operation Manual

Brooks DeviceNet PCs/PMs

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Instance
6

Bit 6

Bit 5

Bit 4

Bit 3

Bit 2

Bit 1 Bit 0

Status

Flow (low byte)

Flow (high byte)

Setpoint (low byte)

Setpoint (high byte)

Override

Valve (low byte)

Valve (high byte)

Setpoint (low byte)

Setpoint (high byte)

Override

Setpoint (low byte)

Setpoint (high byte)

Status

10

The assembly instances

11

10, 11 and 12

12

are not used in the EMFC implementation.

13

FP Flow (low byte)

FP Flow

FP Flow

FP Flow (high byte)

Status

FP Flow (low byte)

FP Flow

FP Flow

FP Flow (high byte)

14

18

Byte Bit 7

Installation and Operation Manual

Section 5 - Assembly Object (Class 0x04)

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

Instance
15

16

Byte

Bit 7 Bit 6 Bit 5

Bit 4

Bit 3

Bit 2

Status

FP Flow (low byte)

FP Flow

FP Flow

FP Flow (high byte)

FP Valve (low byte)

FP Valve

FP Valve

FP Valve (high byte)

Status

FP Flow (low byte)

FP Flow

FP Flow

Flow (high byte)

FP Setpoint (low byte)

FP Setpoint

FP Setpoint

FP Setpoint (high byte)

Bit 1

Bit 0

19

Section 5 - Assembly Object (Class 0x04)

Installation and Operation Manual

Brooks DeviceNet PCs/PMs

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Instance
17

18

20

Byte Bit 7

Bit 6

Bit 5

Bit 4

Bit 3

Bit 2

Status

FP Flow (low byte)

FP Flow

FP Flow

FP Flow (high byte)

FP Setpoint (low byte)

FP Setpoint

FP Setpoint

FP Setpoint (high byte)

FP Valve (low byte)

10

FP Valve

11

FP Valve

12

FP Valve (high byte)

Status

FP Flow (low byte)

FP Flow

FP Flow

FP Flow (high byte)

FP Setpoint (low byte)

FP Setpoint

FP Setpoint

FP Setpoint (high byte)

Override

10

FP Valve (low byte)

11

FP Valve

12

FP Valve

13

FP Valve (high byte)

Bit 1 Bit 0

Installation and Operation Manual

Section 5 - Assembly Object (Class 0x04)

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

Instance
19

20

21

22

Byte Bit 7

Bit 6

Bit 5

Bit 4

Bit 3

Bit 2

FP Setpoint (low byte)

FP Setpoint

FP Setpoint

FP Setpoint (high byte)

Override

FP Setpoint (low byte)

FP Setpoint

FP Setpoint

FP Setpoint (high byte)

Status

Flow (low byte)

Flow (high byte)

Pressure (low byte)

Pressure (high byte)

Temperature (low byte)

Temperature (high byte)

Status

Flow (low byte)

Flow (high byte)

Valve (low byte)

Valve (high byte)

Pressure (low byte)

Pressure (high byte)

Temperature (low byte)

Temperature (high byte)

Bit 1 Bit 0

21

Section 5 - Assembly Object (Class 0x04)

Installation and Operation Manual

Brooks DeviceNet PCs/PMs

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Instance
23

22

Byte Bit 7

Bit 6

Bit 5

Bit 4

Bit 3

Bit 2

Status

FP Flow (low byte)

FP Flow

FP Flow

FP Flow (high byte)

FP Pressure (low byte)

FP Pressure

FP Pressure

FP Pressure (high byte)

FP Temperature (low byte)

10

FP Temperature

11

FP Temperature

12

FP Temperature (high byte)

Bit 1 Bit 0

Installation and Operation Manual

Section 6 - S-Device Supervisor Object (Class 0x30)

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

6. S-Device Supervisor Object (Class 0x30)

This object models the interface, functions and behavior associated with the
management of application objects for devices within the Hierarchy of
Semiconductor Equipment Devices. Throughout this DeviceNet Standard,
objects belonging to this hierarchy are identified as such by a naming
convention that includes a prefix of S- in the object class name. This
Hierarchy of Semiconductor Equipment Devices is completely defined in
this object definition such that all objects belonging to this hierarchy require
the existence of an S-Device Supervisor object to manage its functions and
behaviors.
The S-Device Supervisor object centralizes application object state
definitions and related status information, exception status indications
(alarms and warnings), and defines a behavior model which is assumed by
objects identified as belonging to the Hierarchy of Semiconductor Equipment
Devices. If a reset is requested of the S-Device Supervisor object instance, it
will reset this object instance as well as all of its associated application
objects.
Similarly, the Identity object provides an interface to the S-Device Supervisor
object. A reset request to the Identity object (of any type) causes a reset
request to the S-Device Supervisor object. Further relationships are specified
in the Behavior section below.
Additionally, some device attributes are defined which are required in order
to specify device models such that they are compliant with the SEMI S/A
Network Standard *, from which the Hierarchy of Semiconductor Equipment
Devices is derived. Objects defined to exist within the Hierarchy of
Semiconductor Equipment Devices are done so in order to simplify the
management and description of object behavior while insuring compliance
with the SEMI Standard.
NOTE: By association with this object, the Start, Stop, Reset, Abort, Recover
and Perform_Diagnostic Services are inherently supported by all objects
within the Hierarchy of Semiconductor Equipment Devices. These services
are not accessible over the network for the associated object instances.

* Semiconductor Equipment and Materials International, Mountain View CA,


Standard E54: Sensor/Actuator Network Common Device Model.

23

Section 6 - S-Device Supervisor Object (Class 0x30)

Installation and Operation Manual

Brooks DeviceNet PCs/PMs

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

6.1. S-Device Supervisor Class Attributes

The Object Class Attribute ID 1-7 are reserved. See DeviceNet Volume II,
Section 5-4.1. for more specification detail on these attributes.

Attribute ID

Need in
Implementation

Access
Rule

Name

DeviceNet
Data Type

Description of Attribute

1 thru 7

These class attributes are either optional or conditional and are described in chapter 5 of this
specification.

97 & 98

Reserved by DeviceNet

99

Conditional *

Get

Subclass

UINT

Identifies a subset of additional


attributes, services and
behaviors. The subclasses for
this object are specified at the
end of this object specification
section.

* If the value of Subclass is 00 which identifies "no subclass", then this attribute is OPTIONAL in implementation,
otherwise, this attribute is REQUIRED.

24

Installation and Operation Manual

Section 6 - S-Device Supervisor Object (Class 0x30)

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

6.2. S-Device Supervisor Instance Attributes (Object/Class 0x30)

DeviceNet reserves Attribute ID 100-199 (64hex-C7hex) for Vendor Defined


Attributes. See Volume II, Section 7 for more information on Object
Definitions.
Note: All required attributes are supported. Optional attributes are indicated
as (Supported) or (Not Supported).

Attr ID

Need in
Implementation

Access
Rule

NV*

Name

DeviceNet
Data Type

Description of Attribute

Optional
(Not Supported)

Get

NV

Number of Attributes USINT (byte)

Number of Attributes supported by


the object instance

Optional
(Not Supported)

Get

NV

Attribute List

Array of USINT List of attributes supported by the


(bytes)
object instance

Required

Get

NV

Device Type

SHORT
STRING

ASCII Text, Max. 8 Characters,


See 6.3. Semantics.

Required

Get

NV

SEMI Standard
Revision Level

SHORT
STRING

Specifies the revision level of the


SEMI S/A Network Standard to
which the device complies.
For this revision, this attribute
must be: E54-0997

Required

Get

NV

Manufacturers
Name

SHORT
STRING

ASCII Text, Max. 20 Characters.


See 6.3. Semantics.

Required

Get

NV

Manufacturers
Model Number

SHORT
STRING

ASCII Text, Max. 20 Characters,


Manufacturer Specified.

Required

Get

NV

Software Revision
Level

SHORT
STRING

ASCII Text, Max. 6 Characters.


See 6.3. Semantics.

Required

Get

NV

Hardware Revision
Level

SHORT
STRING

ASCII Text, Max. 6 Characters,


see Semantics section

Optional
(Supported)

Get

NV

Manufacturers
Serial Number

SHORT
STRING

ASCII Text, Max. 30 Characters,


Manufacturer Specified.
See 6.3. Semantics.

10

Optional
(Supported)

Get

NV

Device Configuration SHORT


STRING

ASCII Text, Max. 50 Characters,


Manufacturer Specified. Optional
additional information about the
device configuration.

11

Required

Get

Device Status

USINT (byte)

See 6.3. Semantics.

12

Required

Get

Exception Status

BYTE

See 6.3. Semantics

25

Section 6 - S-Device Supervisor Object (Class 0x30)

Installation and Operation Manual

Brooks DeviceNet PCs/PMs

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Attr ID
13

Need in
Implementation
Conditional based
on Exception
Status
Bit 7
(Supported)

Access
Rule
Get

NV*
V

Name

DeviceNet
Data Type

Description of Attribute

Exception Detail
Alarm

STRUCT of:

Common
Exception Detail

STRUCT of:

Size

USINT (byte)

Number of Common Detail Bytes


(size = 2)

Detail

ARRAY of:

See 6.3. Semantics.

Detail n

BYTE

See 6.3. Semantics.

Device Exception
Detail

STRUCT of:

Size

USINT (byte)

Number of Device Detail Bytes


(size = 2)

Detail

ARRAY of:

See Device Profile

Detail n

BYTE

See Device Profile

Manufacturer
Exception Detail

STRUCT of:

Size

USINT (byte)

Number of Manufacturer Detail


Bytes (size = 1)

Detail n

BYTE

Manufacturer Specified

A Structure of three Structures


containing a bit mapped
representation of the alarm detail

Note: The Enhanced (Next Generation) MFC Device Profile specifies two
bytes of Common Detail, two bytes of Device Exception Detail, and one byte
of Manufacturer Specified Detail. See 6.3. Semantics for more information.

26

Installation and Operation Manual

Section 6 - S-Device Supervisor Object (Class 0x30)

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

Attr ID
14

Need in
implementation

Access
Rule
NV*

Conditional based
on Exception
Status
Bit 7
(Supported)

Get

Name

DeviceNet
Data Type

Description of Attribute

Exception
Detail
Warning

STRUCT of:

Common
Exception
Detail

STRUCT of:

Size

USINT (byte) Number of Common Detail


Bytes (size = 2)

Detail

ARRAY of:

See 6.3. Semantics.

Detail n

BYTE

See 6.3. Semantics.

Device
Exception
Detail

STRUCT of:

Size

USINT (byte) Number of Device Detail Bytes


(size = 2)

Detail

ARRAY of:

See Device Profile

Detail n

BYTE

See Device Profile

A Structure of three Structures


containing a bit mapped
representation of the warning
detail

Manufacturer STRUCT of:


Exception
Detail
Size

USINT (byte) Number of Manufacturer Detail


Bytes (size = 1)

Detail n

BYTE

Manufacturer Specified

Note: The Enhanced (Next Generation) MFC Device Profile specifies two
bytes of Common Detail, two bytes of Device Exception Detail, and one byte
of Manufacturer Specified Detail. See 6.3. Semantics for more information.

27

Section 6 - S-Device Supervisor Object (Class 0x30)

Installation and Operation Manual

Brooks DeviceNet PCs/PMs

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

28

Attr ID

Need in
implementation

Access
Rule
NV* Name

DeviceNet
Data Type

Description of Attribute

15

Required

Set

NV

Alarm Enable

BOOL

See 6.3. Semantics.

16

Required

Set

NV

Warning
Enable

BOOL

See 6.3. Semantics.

17

Optional
(Not Supported)

Set

**

Time

DATE_AND_
TIME

The value of the devices


internal real-time clock.
See 6.3. Semantics.

18

Optional
(Not Supported)

Get

NV

**
Clock
Behavior

USINT (byte)

0 = [default] clock always


resets during power cycle
1 = clock value is stored in
non-volatile memory at power
down
2 = clock is battery-backed
and runs without device
power.
3-255 - not defined

19

Optional
(Not Supported)

Get

NV

Last
Maintenance
Date

DATE

The date on which the device


was last serviced.

20

Optional
(Not Supported)

Get

NV

Next
Scheduled
Maintenance
Date

DATE

The date on which it is


recommended that the device
next be serviced.

21

Optional
(Not Supported)

Get

NV

Scheduled
Maintenance
Expiration
Timer

INT

See 6.3. Semantics.

22

Conditional
Required if
Calibration
Expiration is
supported
(Not Supported)

Set

NV

Scheduled
Maintenance
Expiration
Warning
Enable

BOOL

See 6.3. Semantics.

23

Optional
(Not Supported)

Get

NV

Run Hours

UDINT

An indication of the number of


hours that the device has had
power applied. It has a
resolution of 1 hour. This
value shall be maintained in
nonvolatile memory.

Installation and Operation Manual

Section 6 - S-Device Supervisor Object (Class 0x30)

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

Attr ID

Need in
implementation

97-98

Reserved by
DeviceNet

99

Conditional **
(Supported)

Access
Rule
NV* Name

DeviceNet
Data Type

Get

UINT

NV

Subclass

Description of Attribute

Identifies a subset of
additional attributes, services
and behaviors. The
subclasses for this object are
specified at the end of this
object specification section.

* NV = Nonvolatile; attribute value is maintained through power cycles; V = Volatile


** If the value of Subclass is 00 which identifies "no subclass", then this attribute is OPTIONAL in
implementation, otherwise, this attribute is REQUIRED.

6.3. Semantics

Device Type
The Device Type attribute identifies the Specific Device Model to which the
device is modeled within the Hierarchy of Semiconductor Equipment
Devices. The value of this string is specified in the SEMI standard suite
referenced in the introduction section of this object definition and is
represented for reference in the applicable device profile where used.
Manufacturers Name
The Manufacturers Name attribute identifies the manufacturer of the device.
It is the responsibility of the manufacturer to insure that this ASCII coded text
string is sufficiently long to insure uniqueness among manufacturers.
The Device Manufacturer attribute is not guaranteed, by specification, to be
unique. Therefore, it is not a substitute for the corresponding attribute of the
Identity Object and should not be used for identification purposes.
Software Revision Level
This is an ASCII coded text string representing the revision of the software
corresponding to the specific device identified by the Identity object and the
S-Device Supervisor object.

29

Section 6 - S-Device Supervisor Object (Class 0x30)

Installation and Operation Manual

Brooks DeviceNet PCs/PMs

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Hardware Revision Level


This is an ASCII coded text string representing the revision of the hardware,
which is identified by the Identity object and the S-Device Supervisor object.
The manufacturer of the device must control this revision such that
modifications to the device hardware may be tracked.
Manufacturers Serial Number
This attribute is a string representation of the manufacturers serial number of
the device, formatted to fit the appropriate manufacturing tracking systems.
This is not the same as the Identity Objects serial number, which is used to
uniquely identify the device in the network environment.
Device Status
This attribute represents the current state of the device. Its value changes as
the state of the device changes. The following values are defined:
Attribute Value

State

Undefined

Self Testing

Idle

Self-Test Exception

Executing

Abort

Critical Fault

7-50

Reserved by DeviceNet

51-99

Device Specific (None Used)

100-255

Vendor Specific (None Used)

Exception Status
A single byte attribute whose value indicates that the status of the alarms
and warnings for the device. This indication may be provided in one of two
methods: Basic or Expanded.
For the Basic Method, bit seven of the Exception Status attribute is set to
zero; all exceptions are reported exclusively through communication of this
Exception Status attribute. The format of bits zero through six in this mode is
device specific; the format may be further specified in an appropriate device
profile specification; if it is not specified, then the format of bits zero through
six is equivalent to that specified for the expanded method.
30

Installation and Operation Manual

Section 6 - S-Device Supervisor Object (Class 0x30)

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

For the Expanded Method, bit seven of Exception Status attribute is set to
one; exceptions are reported through the communication of this Exception
Status attribute, formatted as specified in the table below. In addition, the
Exception Detail attributes are supported. The Exception Status bits are
determined by a logical OR of the related Exception Detail bits, as
indicated.
Exception Status Bit Map, Bit 7 set to 1
Bit

Function

ALARM/device-common*

ALARM/device-specific

ALARM/manufacturer-specific

reserved -- set to 0

WARNING/device-common*

WARNING/device-specific

WARNING/manufacturer-specific

1 == Expanded Method

* The alarm or warning is not specific to the device type or device type manufacturer.

Exception Detail Alarm and Exception Detail Warning


The formats of these two attributes are identical. Therefore, they are
described together here:
Attributes that relate the detailed status of the alarms or warnings associated
with the device. Each attribute is a structure containing three members; these
three members respectively relate the detailed status of exceptions that are
common (i.e., not device-specific), device-specific but not manufacturerspecific, and manufacturer-specific. The common detail is defined below. The
device-specific detail is defined in the appropriate Device Profile. The
manufacturer defines the manufacturer-specific detail. A SIZE value of zero
indicates that no detail is defined for the associated exception detail
structure.

31

Section 6 - S-Device Supervisor Object (Class 0x30)

Installation and Operation Manual

Brooks DeviceNet PCs/PMs

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Each of the three structure members is defined as a structure containing an


ordered list (i.e., array) of bytes of length SIZE, and an unsigned integer
whose value is SIZE. Each of the bytes in each array has a specific mapping.
This mapping is formatted as 8 bits, which represents 8 independent
conditions. A value of 1 indicates that the condition is set (or present), and a
value of 0 indicates that the condition is cleared (or not present). Note that if
a device does not support an exception detail, the corresponding bit is never
set. The bitmaps for alarms and warnings in the corresponding attributes are
structured in parallel so that a condition may have either alarm or warning set
depending on severity. If a condition inherently cannot be both alarm and
warning, then the parallel bit position corresponding to the other state will
remain "0."
The existence of an exception detail variable structure is dependent on the
value of the Exception Status Attribute. The existence of an exception detail
variable structure is only required if bit seven of the Exception Status
attribute is set to 1, indicating the Expanded method reporting. Bits 0-6 of the
Exception Status attribute correspond to the particular exception type.
Common Exception Detail
This structure relates exception conditions (i.e., alarms or warnings) which
are common to all devices within the Hierarchy of Semiconductor Equipment
Devices. The Detail element of the structure is an ordered list (i.e., array) of
bytes of length [SIZE], which is the value of the structure element Size. For
each byte in the Detail field, all bits not identified are reserved for future
standardization.
The first byte in this attribute is CommonExceptionDetail[0]. Additional
exception details, if provided, are named CommonExceptionDetail[1], . . .
CommonExceptionDetail[SIZE]. The specific exception associated with each
of the bitmaps is given in the table below. The SIZE for this revision is two,
(2). The criteria details for each exception condition are outside the scope of
this document. If a device does not support an exception detail, the
corresponding bit is never set.

32

Installation and Operation Manual

Section 6 - S-Device Supervisor Object (Class 0x30)

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

Common Exception Detail Attribute Values

Bit

Common Exception Detail [0]*

Bit

Common Exception Detail [1]*

internal diagnostic exception

power supply overcurrent

Microprocessor exception

reserved power supply

EPROM exception

power supply output voltage (**)

EEPROM exception (**)

power supply input voltage

RAM exception

scheduled maintenance due

Reserved by DeviceNet

notify manufacturer

Internal real-time exception

reset exception

Reserved by DeviceNet

reserved by DeviceNet

** Exception Supported

** Exception Supported

Device Exception Detail


This structure, similar in form to Common Exception Detail, relates exception
conditions, which are specific to individual devices on the network and are
defined in their respective device profiles. The Detail element of the structure
is an ordered list (i.e., array) of bytes of length [SIZE], which is the value of
the structure element size. For a detailed description of this attribute, consult
the appropriate specific device profile.
Note: The MFC profile has been updated and device exception detail has
been modified to accommodate the extra instances in the S-Analog Sensor
Object.
Manufacturer Exception Detail
This structure, similar in form to Common Exception Detail, relates exception
conditions, which are specific to the manufacturers of individual devices on
the network and are defined by them in their product documentation. The
Detail element of the structure is an ordered list (i.e., array) of bytes of length
[SIZE], which is the value of the structure element Size. For a detailed
description of this attribute, consult the appropriate specific device
manufacturer documentation.

33

Section 6 - S-Device Supervisor Object (Class 0x30)

Installation and Operation Manual

Brooks DeviceNet PCs/PMs

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Exception Detail Format Summary


Data Component
MFC Device
Exception Detail Size

Bit 7

Bit 6

Bit 5

Bit 4

Bit 3

Bit 2
0

Bit 1
1

Bit 0
0

MFC Device
Exception Detail
Byte 0

Reserved Reserved
0
0

Valve High
S-Analog
Actuator

Valve Low
S-Analog
Actuator

Flow
Control
S-Single
Stage
Controller

MFC Device
Exception Detail
Byte 1

Reserved Reserved
0
0

Not Reading
Valid
S-Analog
Sensor
temperature

Not
Reading
Valid
S-Analog
Sensor
pressure

Gas Temp
Gas
Pressure Pressure
High
Temp
High
Low
Low
S-Analog
S-Analog S-Analog
Sensor
S-Analog Sensor
Sensor
Instance 3 Sensor
Instance Instance
Instance
2
2
3

Flow
Flow
Not
High
Low
Reading
Valid*
S-Analog S-Analog
Sensor
Sensor S-Analog
Sensor

Manufacturer
Exception Detail Size

Manufacturer
Exception Detail

* Only used in the Warning Exception Detail, this bit is always = 0 in the Alarm Exception Detail.

34

Valve High indicates that the Actuator current has exceeded the upper
alarm or warning limit.

Valve Low condition never occurs, because low valve current is not an
alarm or warning condition.

Flow Control indicates that the closed-loop control system is not able to
control the flow within the desired specification. The GF100 Series only
supports the alarm condition.

Flow High indicates that the sensor resistance has exceeded the upper
alarm or warning limit.

Flow Low indicates that the sensor resistance has fallen below the lower
alarm or warning limit.

Installation and Operation Manual

Section 6 - S-Device Supervisor Object (Class 0x30)

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

Alarm Enable and Warning Enable


These Boolean attributes are used to enable (1) or disable (0) the S-Device
Supervisor objects process of setting Exception bits. When disabled,
corresponding bits are never set; and, if they were set, disabling clears them.
Also, alarm and warning states are not retained; when enabled, bits will be
set only if the corresponding condition is true.
The default-state for these Enable attributes is enabled (1).
Time
This optional attribute represents the value of the time and date as
maintained by the devices realtime clock with a resolution of one
millisecond.
The default value for the Time attribute is zero (0), corresponding to
12:00AM, January 1, 1972, as specified by DeviceNet Volume I, Appendix J.
Scheduled Maintenance Expiration Timer
This attribute, with a resolution of one hour, is used to cause a warning,
which indicates that a device calibration is due. A S-Device Supervisor timer
decrements this attribute once per hour while power is applied. When the
attribute is no longer positive and the Scheduled Maintenance Expiration
Warning Enable attribute is set to enabled, a Scheduled Maintenance
Expiration Warning condition is generated. This causes the Scheduled
Maintenance Due Warning bit to be set.
The attribute will not wrap; when the attribute reaches its most negative
value, it no longer decrements. The attribute will continue to decrement
irrespective of the state of the Scheduled Maintenance Expiration Warning
Enable attribute. The value shall be maintained in nonvolatile memory.
Scheduled Maintenance Expiration Warning Enable
This Boolean attribute is used to enable (1) or disable (0) the S-Device
Supervisor objects process of setting the Scheduled Maintenance Due
Exception bit. When disabled, the corresponding bit is never set; and, if it
was set, disabling clears it. When enabled, the bit will be set only if the
corresponding condition is true.
The default-state for this Enable attribute is enabled (1).

35

Section 6 - S-Device Supervisor Object (Class 0x30)

Installation and Operation Manual

Brooks DeviceNet PCs/PMs

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

6.4. S-Device Supervisor Common Services (Object/Class 0x30)

Service
Code

Need in Implementation
Class

Instance

Service Name

Description of Service

0Ehex
14dec

Conditional

Required

Get_Attributes_Single

Returns the contents of the


specified attribute.

10hex
16dec

n/a

Required

Set_Attributes_Single

Modifies an attribute value.

n/a

Required

Reset

Resets the device to the


Self-Testing state.

n/a

Required

Start

Starts the device execution


by moving the device to the
Executing state. Equivalent
to SEMI S/A Network
Execute Service

n/a

Optional
Stop
Supported

Moves the device to the


Idle state

See the DeviceNet Communication Model and Protocol for definitions of


these common services.
6.5. S-Device Supervisor Object-Specific Services

Service
Code

Need in Implementation
Class

Instance

Service Name

Description of Service

4Bhex
75dec

n/a

Required

Abort

Moves the device to the Abort


state

4Chex
76dec

n/a

Required

Recover

Moves the device out of the


Abort state

4Ehex
78dec

n/a

Required

Perform_Diagnostics

Causes the device to perform


a set of diagnostic routines

DS Object Service Parameter Dictionary

36

Parameter

Form

Description

TestID

USINT (byte)

Type and possibly detail of diagnostic test to be performed

Installation and Operation Manual

Section 6 - S-Device Supervisor Object (Class 0x30)

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

Abort Used to transition the device application objects to the aborted


state. This service request may be (and generally will be) originated
internally, from application objects.
Recover Used to transition the device application objects from the abort
state to the idle state. This service request may be originated internally, from
application objects.
Perform_Diagnostics Used to instruct the S-Device Supervisor object to
perform a diagnostic test. A diagnostic test is either of type common or
device-dependent. Common diagnostic tests include RAM, EPROM, nonvolatile memory, and communications. Common diagnostic tests are
implementation-specific. All detail of device-dependent diagnostics is outside
the scope of this document.
TestID Parameter
The following values are defined for the TestID parameter for the
Perform_Diagnostics Service Request:
Attribute Value

State

Standard

1-63

Reserved

64-127

Device Specific (defined in Device Profile)

128-255

Manufacturer Specific (defined by manufacturer)

Type Standard is specified if there is only one type of diagnostic defined or


if there is more than one including a type standard. Additional diagnostic
types may be defined in the device profile or by the manufacturer.

37

Section 6 - S-Device Supervisor Object (Class 0x30)

Installation and Operation Manual

Brooks DeviceNet PCs/PMs

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

THIS PAGE WAS


INTENTIONALLY
LEFT BLANK

38

Installation and Operation Manual

Section 7 - S-Analog Sensor Object (Class 0x31)

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

7. S-Analog Sensor Object (Class 0x31)

The S-Analog Sensor Object models the acquisition of a reading from a


physical sensor in a device. Associated with an analog sensor is a reading
that has been acquired and corrected with an offset and a gain coefficient,
optionally, settable in the object. Additional correction algorithms may be
specified by other objects identified in the device profile or as extensions
specified by the manufacturer.
The GF100 Series supports three instances of the S-Analog Sensor Object.
Instance 1 is associated with the flow sensor. Instance 2 is associated with
the pressure sensor. Instance 3 is associated with the temperature sensor.
This object is a member of the Hierarchy of Semiconductor Equipment
Devices. The S-Device Supervisor Object manages the behavior of the SAnalog Sensor Object. See Section 6 of this document.
7.1. S-Analog Sensor Class Attributes

The Object Class Attribute ID 1-7 are reserved. See DeviceNet Volume II,
Section 5-4.1. for more specification detail on these attributes.
Attribute Need in
Access
ID
Implementation Rule

Name

DeviceNet
Data Type

Description of Attribute

1 thru 7

These class attributes are either optional or conditional and are described in chapter 5 of
this specification.

97 & 98

Reserved by DeviceNet

99

Conditional *
(Supported)

Get

Subclass

UINT

Identifies a subset of additional


attributes, services and
behaviors. The subclasses for
this object are specified at the
end of this object specification
section.

* If the value of Subclass is 00, which identifies "no subclass", then this attribute is OPTIONAL in implementation,
otherwise, this attribute is REQUIRED.

39

Section 7 - S-Analog Sensor Object (Class 0x31)

Installation and Operation Manual

Brooks DeviceNet PCs/PMs

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

7.2. S-Analog Sensor Instance Attributes (Object/Class 0x31)

Certain minimal implementations may support any optional Set attributes as


Get Only and still be compliant with this object specification. All required
attributes must be supported as specified. Not all attributes are supported for
all instances.
Attr
ID

Need in
Access
Implementation Rule

NV*

Name

Description of
Attribute

Semantics of Values

Optional
Get
(Not Supported)

NV

Number of
Attributes

USINT (byte) Number of


attributes
supported

The number of attributes


supported by this object
instance

Optional
Get
(Not Supported)

NV

Attribute List

ARRAY OF
USINT
(bytes)

List of attributes supported


by this object instance

Optional
(Supported)

Data Type

USINT (byte) Determines the


Data Type of Value
and all related
attributes as
specified in this
table.

See 7.3. Semantics.


[default] = INT
INT and Real
supported

UINT

Determines the
Units context of
Value and all
related attributes.

See 7.3. Semantics.


[default] = Counts
Counts or SCCM
supported
0 = invalid
1 = valid
(invalid: e.g., not warmed up
yet)

See
NV
Semantics
Set 1

40

DeviceNet
Data Type

List of attributes
supported by this
object instance

Optional
(Supported)

See
NV
Semantics
Set 1

Data Units

Required

Get

Reading Valid BOOL

Indicates that the


Value attribute
contains a valid
value.

Required

Get

Value

INT or
specified by
Data Type if
supported

Analog input value The corrected, converted,


calibrated final value of the
sensor.
Range is one of:
0-6000H (0 100%)
0-7FFFH (0-100%)
See 7.3. Semantics.

Required

Get

Status

BYTE

Alarm/Warning
See 7.3. Semantics.
State of this object
instance

Optional
(Supported)

Set

NV

Alarm Enable BOOL

Enables the setting 0 = disable [default]


of the Alarm Status 1 = enable
Bits

Optional
(Supported)

Set

NV

Warning
Enable

Enables the setting 0 = disable [default]


of the Warning
1 = enable
Status Bits

BOOL

Installation and Operation Manual

Section 7 - S-Analog Sensor Object (Class 0x31)

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

Need in
Implementation

Access
Rule
NV*

Name

DeviceNet Data
Type

Description of
Attribute

10

Optional
(Supported)

Get

NV

Full Scale

INT or specified
by Data Type if
supported

The Value of Full The value of attribute


Scale for the
Value corresponding to the
sensor.
Full Scale calibrated
measurement of the
sensor.
[default] = maximum
allowable value for the
Data Type
See 7.3. Semantics.

11

Optional
(Not Supported)

Get

NV

Offset-A
Data Type

USINT (byte)

Determines the
See 7.3. Semantics.
Data Type of
[default] = INT
attribute Offset-A

12

Optional
(Not Supported)

Set

NV

Offset-A

INT or specified An amount added See 7.3. Semantics.


by Offset-A Data prior to Gain to
0 = [default]
Type if supported derive Value

13

Required if
Get
Attribute Gain is
other than REAL
(Not Supported)

NV

Gain Data
Type

USINT (byte)

14

Optional
(Not Supported)

Set

NV

Gain

REAL or
An amount scaled See 7.3. Semantics.
specified by Gain to derive Value
1.0 = [default]
Data Type if
supported

15

Required if
Get
Attribute Gain is
other than REAL
(Not Supported)

NV

Unity Gain
Reference

REAL or
specified by Gain
Data Type if
supported

Specifies the
value of the Gain
attribute
equivalent to a
gain of 1.0

16

Optional
(Not Supported)

NV

Offset-B

INT or specified
by Data Type if
supported

An amount added See 7.3. Semantics.


to derive Value
0 = [default]

Attr ID

Set

Determines the
Data Type of
attribute Gain

Semantics of Values

See 7.3. Semantics.


[default] = REAL

Used for normalizing the


Gain attribute.
[default] = 1.0
e.g., for an UINT type
Gain, a Unity Gain
Reference may be 10000,
allowing a gain of 0.0001
to 6.5535.

41

Section 7 - S-Analog Sensor Object (Class 0x31)

Installation and Operation Manual

Brooks DeviceNet PCs/PMs

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Need in
Implementation

Access
Rule
NV*

17

Optional
(Not Supported)

Set

NV

Alarm Trip
Point High

INT or specified Determines the


by Data Type if Value above
supported
which an Alarm
Condition will
occur

See 7.3. Semantics.


[default] = Maximum value
for its data type.

18

Optional
(Not Supported)

Set

NV

Alarm Trip
Point Low

INT or specified Determines the


by Data Type if Value below
supported
which an Alarm
Condition will
occur

See 7.3. Semantics.


[default] = Minimum value for
its data type.

19

Optional
(Not Supported)

Set

NV

Alarm
Hysteresis

INT or specified Determines the


See 7.3. Semantics.
by Data Type if amount by which [default] = 0
supported
the Value must
recover to clear
an Alarm
Condition

20

Optional
(Not Supported)

Set

NV

Alarm
Settling
Time

UINT

21

Optional
(Not Supported)

Set

NV

Warning Trip INT or specified Determines the


Point High
by Data Type if Value above
supported
which a Warning
Condition will
occur

See 7.3. Semantics.


[default] = Maximum value
for its data type.

22

Optional
(Not Supported)

Set

NV

Warning Trip INT or specified Determines the


Point Low
by Data Type if Value below
supported
which a Warning
Condition will
occur

See 7.3. Semantics.


[default] = Minimum value for
its data type.

23

Optional
(Not Supported)

Set

NV

Warning
Hysteresis

Attr ID

42

Name

DeviceNet
Data Type

Description of
Attribute

Determines the
time that the
Value must
exceed the Trip
Point before the
exception
condition is
generated.

Semantics of Values

Time in milliseconds
See 7.3. Semantics.
[default] = 0

INT or specified Determines the


See 7.3. Semantics.
by Data Type if amount by which [default] = 0
supported
the Value must
recover to clear a
Warning
Condition

Installation and Operation Manual

Section 7 - S-Analog Sensor Object (Class 0x31)

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

Attr ID Need in
Implementation

Access NV*
Rule

Name

DeviceNet
Data Type

Description of
Attribute

Semantics of Values

24

Optional
(Not Supported)

Set

NV

Warning
Settling
Time

UINT

Determines the time Time in milliseconds


that the Value must See 7.3. Semantics.
exceed the Trip Point
before the exception [default] = 0
condition is
generated.

25

Optional
(Not Supported)

Set

NV

Safe State

USINT (byte)

Specifies the
See 7.3. Semantics.
behavior for the
[default] = 0
Value for states other
than Execute

26

Optional
(Not Supported)

Set

NV

Safe Value

INT or specified The Value to be used See 7.3. Semantics.


by Data Type if for Safe State = Safe [default] = 0
supported
Value

27

Optional
(Not Supported)

Set

NV

Autozero
Enable

BOOL

Enables the Autozero See 7.3. Semantics.


0 = disable [default]
1 = enable

28

Optional
(Supported)

Get

Autozero
Status

BOOL

Indicates the status


of the automatic
nulling

See 7.3. Semantics.


[default] = 0

29

Optional
(Not Supported)

Set

NV

Autorange
Enable

BOOL

Enables the
automatic range
switching

See 7.3. Semantics.


0 = disable [default]
1 = enable

30

Optional
(Not Supported)

Get

Range
Multiplier

REAL

Indicates the current See 7.3. Semantics.


range multiplier
[default] = 1.0

31

Optional
(Not Supported)

Set

NV

Averaging
Time

UINT

Specifies the time


over which analog
samples are
averaged.

Time in Milliseconds of a
moving-window average.
0 = disable averaging
[default]
Values less than the
sample rate of the device
also disable averaging.

43

Section 7 - S-Analog Sensor Object (Class 0x31)

Installation and Operation Manual

Brooks DeviceNet PCs/PMs

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Need in
Implementation

Access
Rule
NV*

Name

32

Optional
(Not Supported)

Get

NV

Overrange

33

Optional
(Not Supported)

Get

NV

Underrange INT or specified


by Data Type if
supported

Specifies the lowest


valid Value

34

Optional
(Not Supported)

Set

NV

Produce
INT or specified
Trigger Delta by Data Type if
supported

The amount by which 0 = Disabled [default]


Value must change See 7.3. Semantics.
before a Change of
State Production is
triggered

35

Conditional 2
(Supported)

Set

NV

Gas
Calibration
Object
Instance

UINT

Indicates which Gas 0 = Disabled [default]


Calibration object
See 7.3. Semantics.
instance is active for
this object

Attr ID

97-98

DeviceNet Data Description of


Type
Attribute
INT or specified
by Data Type if
supported

Semantics of Values

Specifies the highest The value above


valid Value
which attribute
Reading Valid is set to
invalid.
[default] = maximum
allowable value for the
Data Type
The value below
which attribute
Reading Valid is set to
invalid.
[default] = minimum
allowable value for the
Data Type

Reserved by DeviceNet

99

Conditional 3
(Supported)

Get

NV

Subclass

UINT

Identifies a subset of 0 = No subclass


additional attributes, n = subclass as
services and
defined herein
behaviors. The
subclasses for this
object are specified
at the end of this
object specification
section.

110

Optional
(Supported)

Get

NV

Full Scale

Struct:
real, uint

Full scale amount


(real) and data units
(uint)

Default = 0, 0.

Data Type and Data Units are ONLY settable under certain conditions (see 7.3. Semantics).
Attribute is settable; however, it should only be set while in the Idle state (see 7.3. Semantics).
3
If the value of Subclass is 00, then this attribute is OPTIONAL in implementation, otherwise, this attribute is REQUIRED.
2

44

Installation and Operation Manual

Section 7 - S-Analog Sensor Object (Class 0x31)

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

7.3. Semantics

Data Type
All Data Type attributes, including Data Type, Offset-A Data Type and Gain
Data Type, use the enumerated values specified in DeviceNet Vol. I,
Appendix J-6.1.
The Data Type attribute is settable only in the Idle State and only if no
attribute belonging to the object instance is the endpoint of an I/O connection
in the Established State.
The Data Type attribute may change automatically based upon established
I/O connections. See 7.6. Behavior for more information on this
mechanism.
Data Units
Specifies the context of Value and related attributes (such as, offset and trip
points) for this object instance. See Appendix K for a list of values. A request
to set attribute to an unsupported value will return an error response.
The Data Units attribute is settable only in the Idle State.
Value, Offset (A and B) and Gain
An S-Analog Sensor object instance derives a reading from a physical
analog sensor. The reading is converted to the data type and units specified
for the Value attribute. The Offset-A, Offset-B and Gain attributes are
applied to the sensor reading as specified by the following formula:
Value = Gain (Sensor Reading + Offset-A) + Offset-B
Typically, the Offset-A or Offset-B attributes are modified by the Zero-Adjust
service and the Gain attribute is modified by the Gain_Adjust services;
particularly, when the device utilizes a non-linear conversion algorithm.
However, support of these services is not required.
See 7.6. Behavior.

45

Section 7 - S-Analog Sensor Object (Class 0x31)

Installation and Operation Manual

Brooks DeviceNet PCs/PMs

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Status
A bit mapped byte, which indicates the Alarm and Warning Exception status
of the object instance. The following definition applies:
Bit

Definition

High Alarm Exception: 0 = cleared; 1 = set

Low Alarm Exception: 0 = cleared; 1 = set

High Warning Exception: 0 = cleared; 1 = set

Low Warning Exception: 0 = cleared; 1 = set

Reserved

Reserved

Reserved

Reserved

Trip Points, Hysteresis and Settling Time


Trip Point High is the level above which the Value attribute will cause an
Alarm or Warning exception condition.
Trip Point Low is the level below which the Value attribute will cause an
Alarm or Warning exception condition.
A Hysteresis value specifies the amount by which the Value attribute must
transition in order to clear an Alarm or Warning condition. For example: A
Trip Point High value of 100 and a hysteresis value of 2 will result in an
exception condition being set when the Value is above 100 and cleared when
the Value drops below 98. Similarly, A Trip Point Low value of 100 and a
hysteresis value of 2 will result in an exception condition being set when the
Value is below 100 and cleared when the Value increases above 102.
The Settling Time determines the amount of time that the Value attribute
must exceed the Trip Point before the exception condition is generated. The
Settling Time also applies to the clearing of the condition.

46

Installation and Operation Manual

Section 7 - S-Analog Sensor Object (Class 0x31)

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

Safe State
This attribute specifies what value will be held in Value for states other than
Executing. See the S-Device Supervisor object definition in Section 6 for a
description of object states. The purpose of this mechanism is to allow other
devices, that may be using this Value, to transition to, or remain in, a safe
state in the event of this device transitioning to a FAULT, IDLE, or ABORT
state. The following values are defined:
Attribute Value

State

Zero

Full Scale

Hold Last Value

Use Safe Value

4-50

Reserved

51-99

Device Specific

100-255

Vendor Specific

Safe Value
For Safe State set to Use Safe Value, this attribute holds the value to which
the Value attribute will be set for object instance states other than Executing.
Autozero Enable and Autozero Status
When the autozero is enabled, the device will automatically invoke a
Zero_Adjust service request (no parameter) contingent upon a set of
conditions specified by the manufacturer. These conditions may be
determined by the value of an attribute (e.g., setpoint) or some other
mechanism defined by the manufacturer. See Zero_Adjust service.
The GF100 Series uses the Autozero Status attribute to convey the
status of the Zero-Adjust Service operation. If the device receives an
explicit message from the host to perform a Zero-Adjust Service, the
GF100 Series will perform the service and set the Autozero Status to 1
for the duration of the service. After the Zero-Adjust service has
completed, the Autozero Status will be set to zero. The MFC Device
Profile appears to indicate that the Autozero Status attribute is only to
be used for an internally triggered Zero-Adjust Service; however, the
GF100 Series uses the Autozero Status to convey the status of the
Zero-Adjust Service, no matter how the service was triggered.

47

Section 7 - S-Analog Sensor Object (Class 0x31)

Installation and Operation Manual

Brooks DeviceNet PCs/PMs

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Autorange Enable and Range Multiplier


When the autorange is enabled, the device will automatically switch full scale
range based on a set of conditions specified by the manufacturer. The Range
Multiplier indicates the range scale.
An example of how Autorange may work is: when the Value is less than 9%
with a Range Multiplier of 1.0, the Range Multiplier switches to 10.0 (the
Value then reads 90% of the 10X range). When the Value then reaches
100% with a Range Multiplier of 10.0, the Range Multiplier returns to 1.0 (the
Value then reads 10% of the 1X range).
Produce Trigger Delta
This attribute is used in conjunction with the "Change of State" production
trigger type. Upon transition of the associated connection object instance
(any Change of State connection pointing to the S-Analog Sensor object
Value attribute) to the established state, a production is immediately
triggered and this reported Value is stored internally for the determination of
the next production trigger. When the Value changes by an amount of at
least the Produce Trigger Delta (i.e., the Value as compared to the internally
stored previously produced Value), a new production is triggered, and this
reported Value becomes the new internally stored Value for the
determination of the next production trigger.
Gas Calibration Object Instance
This attribute is used to select an instance of the S-Gas Calibration object.
The selected S-Gas Calibration object instance provides the data with which
an S-Analog Sensor object instance enacts the appropriate calibration
algorithm for a given gas type.
A Set_Attribute_Single request, specifying a value not supported, will return
an invalid attribute value error response. A list of acceptable values for this
attribute is derived from a class level service request to the S-Gas Calibration
object.
Conditionally Required: If a device profile specifies an S-Gas Calibration
object relationship for an S-Analog Sensor object instance, then this attribute
is required.
See the S-Gas Calibration object definition for more information.
Caution: Care should be taken when changing the gas instance. The
MFC profile allows the user to change the gas instance at any time;
however, the attribute should only be changed when the device is Idle.
Unpredictable results may occur if the gas instance is changed while
the MFC is in the Execute State.

48

Installation and Operation Manual

Section 7 - S-Analog Sensor Object (Class 0x31)

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

7.4. S-Analog Sensor Common Services

The S-Analog Sensor Object provides the following Common Services:


Need in Implementation
Service
Code
Class
Instance

Service Name

Description of Service

0Ehex
14dec

Conditional * Required

Get_Attribute_Single

Returns the contents of


the specified attribute.

10hex
16dec

n/a

Set_Attribute_Single

Modifies an attribute
value.

Required

*The Get_Attribute_Single service is REQUIRED if any attributes are implemented.

See the DeviceNet Communication Model and Protocol for definitions of


these common services.
7.5. S-Analog Sensor ObjectSpecific Services

Service
Code

Need in Implementation
Service Name

Description of
Service

Class

Instance

4Bhex
75dec

N/a

Optional
Zero_Adjust
(Supported)

Causes the device to


modify attribute
Offset-A and/or
Offset-B such that
attribute Value equals
the Target Value sent
with the request.

4Chex
76dec

N/a

Optional
(Not
Supported)

Causes the device to


modify attribute Gain,
such that attribute
Value, equals the
Target Value sent
with the request.

Gain_Adjust

The Zero_Adjust and Gain_Adjust services are used to cause the S-Analog
Sensor Object device to modify its Offset-A and/or Offset-B and Gain
attribute values based upon manufacturer specific algorithms. The target
value specified in the service request represents the actual parametric
measurement that the physical sensor should be reporting at the time of the
request.
49

Section 7 - S-Analog Sensor Object (Class 0x31)

Installation and Operation Manual

Brooks DeviceNet PCs/PMs

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

There are no state transitions associated with the invocation of these


services. It is, therefore, incumbent upon the user to establish the device into
the desired configuration prior to, and during, the execution of these services.
This will generally involve exposing the sensor to a known environment and
treating the values read during execution of the services accordingly.
A success service response indicates that the service was accepted and the
application process started.
7.5.1. Zero_Adjust Request Service Data Field Parameters

Parameter

Required

Data Type

Description

Semantics of Values

Target Value

Optional
(Supported)

Specified
by the
value of
attribute
Data Type

The target value for


the zero calibration

The value to which the Value


attribute will be set.
If not specified, the default value
of zero is used.

7.5.2. Gain_Adjust Request Service Data Field Parameters

Parameter

Required

Data Type

Description

Semantics of Values

Target Value

Required

Specified
by the
value of
attribute
Data Type

The target value for


the gain calibration

The value to which the Value


attribute will be set.

Note: Support of the Zero Adjust Service - target Value must be zero. To
invoke Zero Adjust, the user should put the MFC in a steady-state condition
with zero flow, prior to sending the Service.
ADD DETAILS FOR PRESSURE ZERO!
If Data Type is Integer:
ServiceCode=4BH, Class=31H, Instance=1, Data or Target Value = (00 00).
If Data Type is Real:
ServiceCode=4BH, Class=31H, Instance=1, Data or Target Value = (00 00
00 00).
50

Installation and Operation Manual

Section 7 - S-Analog Sensor Object (Class 0x31)

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

7.6. Behavior

The S-Device Supervisor Object manages the behavior of the S-Analog


Sensor Object. See Section 6 of this document.
An S-Analog Sensor object instance acquires a reading from a physical
sensor, as identified by the application of the object, and applies an algorithm
to modify the reading into the appropriate Data Type and Data Units.
Optionally, additional corrective algorithms are applied to further correct for
various calibration effects. These additional algorithms are specified in other
objects, as identified in the device profile, or as extensions, specified by the
manufacturer.
All Full Scale, Trip Point, Overrange and Underrange calculations, as
specified above, utilize the Value attribute.
Data Type
If the implementation of this object specifies more than one valid Data Type
value, in the device profile or by vendor, then the following behavior with
respect to Data Type applies: The Data Type value will be set automatically
based upon the first valid I/O connection established by the device. This
configuration will then remain in effect for this object instance, even after all
I/O connections are lost. For devices that support only one Data Type, this
behavior is not supported.
If no established I/O connections exist, which include an attribute from this
object, then the Data Type attribute is settable provided that the object is in
the Idle State.
The following example demonstrates this behavior:
A device profile specifies an instance of the S-Analog Sensor object as well
as two static Assembly object instances, both with data attribute components
mapped to this object instance. Assembly object instance ID 1 specifies INT
data types and Assembly object instance ID 2 specifies REAL data types.
After the device is On-Line, it is configured with an I/O connection to
Assembly instance ID 2. When the connection transitions to the Established
State, this object instance attribute Data Type is automatically set with the
value for REAL before any data is communicated to, or from, the object
instance.

51

Section 7 - S-Analog Sensor Object (Class 0x31)

Installation and Operation Manual

Brooks DeviceNet PCs/PMs

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

GF100 Series Implementation


Data Type values supported are Integer (0xC3) and Real (0xCA). Data Units
supported are Counts (0x1001) and SCCM (0x1400). Both Data Type and
Data Units attributes are settable. The supported combinations of Data Type
and Data Units on IntelliFlow are Integer-Counts (default), Real-SCCM,
Integer-SCCM, and Real-Counts. The full-scale range for indicated flow is
determined by the full-scale attribute (31H, 1,10).
7.7. S-Analog Sensor Object Instance Subclass 01

The following specification applies to a subclass of this object for application


in Mass Flow Controller devices.
7.7.1. Subclass 01 Instance Attributes

The following Instance Attributes are specified for this object subclass.

Attr ID

Need in
Access
Implementation Rule
NV* Name

95

Optional
(Supported)

Get

96

Optional
Set
(Not Supported)

DeviceNet
Data Type

Description of
Attribute

Semantics of Values

NV Flow Totalizer ULINT

Total gas flowed


Units are Standard CCs.
through the device See 7.7.3. Subclass 01
since this value was Behavior.
last set to zero
Default = 0.

NV Flow Hours

Total time device


has been powered
and flowing gas
since this value was
last set to zero

UDINT

Resolution is one hour


See 7.7.3. Subclass 01
Behavior.
Default = 0.

* NV = Nonvolatile; attribute value is maintained through power cycles; V = Volatile

7.7.2. Subclass 01 Services

There are no additions or restrictions to the Object Services for this object
subclass.

52

Installation and Operation Manual

Section 7 - S-Analog Sensor Object (Class 0x31)

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

7.7.3. Subclass 01 Behavior

Flow Totalizer and Flow Hours Process


The factory configured out-of-box values for the Flow Totalizer and Flow
Hours attributes are both zero. The attributes are only modifiable with
set_attribute_single service requests; they are not altered by the Reset
service, including power-cycle, of either the Identity or the S-Device
Supervisor objects.
The Flow Totalizer attribute is incremented, at a rate of once every cubic
centimeter of gas flow, by the S-Analog Sensor object instance to reflect the
amount of gas that has flowed through the device. Upon reaching its
maximum value, the Flow Totalizer value is no longer incremented and
remains at its maximum value.
The Flow Hours attribute is incremented, at a rate of once every hour, by the
S-Analog Sensor object instance to reflect the amount of time that gas has
flowed through the device. This condition is determined by the Value attribute
being greater than 0.5% of full scale. Upon reaching its maximum value, the
Flow Hours value is no longer incremented and remains at its maximum
value.

53

Section 7 - S-Analog Sensor Object (Class 0x31)

Installation and Operation Manual

Brooks DeviceNet PCs/PMs

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

THIS PAGE WAS


INTENTIONALLY
LEFT BLANK

54

Installation and Operation Manual

Section 8 - S-Analog Actuator Object (Class 0x32)

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

8. S-Analog Actuator Object (Class 0x32)

The S-Analog Actuator Object models the interface to a physical actuator in a


device. Associated with an analog actuator is a value, which is corrected with
an offset and a gain coefficient, optionally settable in the object before it is
output to the physical actuator. Manufacturers may specify additional
correction algorithms as extensions to this object.
Additionally, the S-Analog Actuator Object provides two sets of trip-point
definitions. The behavior associated with these trip points is described in
sections below.
This object is a member of the Hierarchy of Semiconductor Equipment
Devices. The S-Device Supervisor manages the behavior of the S-Analog
Actuator Object. See Section 6 of this document.
8.1. S-Analog Actuator Class Attributes

The Object Class Attribute ID 1-7 are reserved. See DeviceNet Volume II,
Section 5-4.1. for more specification detail on these attributes.
Attribute Need in
Access
ID
implementation Rule

Name

DeviceNet
Data Type

Description of Attribute

1 thru 7

These class attributes are either optional or conditional and are described in chapter 5 of
this specification.

97 & 98

Reserved by DeviceNet

99

Conditional *
(Supported)

Get

Subclass

UINT

Identifies a subset of additional


attributes, services and
behaviors. The subclasses for
this object are specified at the
end of this object specification
section.

* If the value of Subclass is 00, which identifies "no subclass", then this attribute is OPTIONAL in
implementation, otherwise, this attribute is REQUIRED.

55

Section 8 - S-Analog Actuator Object (Class 0x32)

Installation and Operation Manual

Brooks DeviceNet PCs/PMs

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

8.2. S-Analog Actuator Instance Attributes

Certain minimal implementations may support any optional Set attributes as


Get only and still be compliant with this object specification. All required
attributes must be supported as specified.
Need in
Access
Attr ID Implementation Rule

DeviceNet
Data Type

Description of
Attribute

Optional
(Not Supported)

Get

NV Number of
Attributes

Optional
(Not Supported)

Get

NV Attribute List ARRAY OF


List of supported
USINT (byte) attribute

List of attributes supported


by this object instance

Optional
(Supported)

See 8.3.
Semantics

NV Data Type

USINT (byte) Determines the


Data Type of
Value and all
related attributes
as specified in this
table.

See 8.3. Semantics.


[default] = INT
INT or Real
supported

NV Data Units

UINT

See 8.3. Semantics.


[default] = Counts
Counts or Percent
supported

USINT (byte) Number of


supported
attributes

Semantics of Values

Set

56

NV* Name

The number of attributes


supported by this object
instance

Optional
(Supported)

See 8.3.
Semantics
Set 1

Required

Set

Override

USINT (byte) Specifies an


0 = normal [default]
override for the
See 8.3. Semantics.n
physical actuator.
For values other
than zero (normal
control), the Value
attribute is
ignored.

Required

Set

Value

INT or
specified by
Data Type if
supported

Analog output
value

The uncorrected value.


see Semantics section
[default] = 0

Required

Get

Status

BYTE

Alarm and
Warning State of
this object
instance

See 8.3. Semantics.


[default] = 0

Optional
(Supported)

Set

NV Alarm Enable BOOL

Enables the
setting of the
Alarm Bit

0 = disable [default]
1 = enable

Optional
(Supported)

Set

NV Warning
Enable

Enables the
setting of the
Warning Bit

0 = disable [default]
1 = enable

BOOL

Determines the
context of Value

Installation and Operation Manual

Section 8 - S-Analog Actuator Object (Class 0x32)

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

Need in
Access
Attr ID Implementation Rule

NV* Name

DeviceNet
Data Type

Description of
Attribute

Semantics of Values

10

Optional
(Not Supported)

Set

NV Offset

INT or
specified by
Data Type if
supported

An amount to be See 8.3. Semantics.


added to Value
0 = [default]
prior to the
application of gain

11

Optional
(Not Supported)

Set

NV Bias

INT or
specified by
Data Type if
supported

An amount to be See 8.3. Semantics.


added to Value
0 = [default]
prior to the
application of gain

12

Required if
Get
Attribute Gain is
other than REAL
(Not Supported)

NV Gain Data
Type

USINT (byte) Determines the


Data Type of
attribute Gain

See 8.3. Semantics.


[default] = REAL

13

Optional
(Not Supported)

NV Gain

REAL or
specified by
Gain Data
Type if
supported

An amount by
which Value is
scaled prior to
driving the
physical actuator

See 8.3. Semantics.


1.0 = [default]

14

Required if
Get
Attribute 12 is
other than REAL
(Not Supported)

NV Unity Gain
Reference

REAL or
specified by
Gain Data
Type if
supported

Specifies the
value of the Gain
attribute
equivalent to a
gain of 1.0

Used for normalizing the


Gain attribute.
See 8.3. Semantics.
[default] = 1.0

15

Optional
(Not Supported)

Set

NV Alarm Trip
Point High

INT or
specified by
Data Type if
supported

Determines the
Value above
which an Alarm
Condition will
occur

See 8.3. Semantics.


[default] = Maximum value
for its data type.

16

Optional
(Not Supported)

Set

NV Alarm Trip
Point Low

INT or
specified by
Data Type if
supported

Determines the
See 8.3. Semantics.
Value below which [default] = Minimum value
an Alarm
for its data type.
Condition will
occur

17

Optional
(Not Supported)

Set

NV Alarm
Hysteresis

INT or
specified by
Data Type if
supported

Determines the
See 8.3. Semantics.
amount by which [default] = 0
the Value must
recover to clear an
Alarm Condition

18

Optional
(Not Supported)

Set

NV Warning Trip INT or


Point High
specified by
Data Type if
supported

Set

Determines the
Value above
which a Warning
Condition will
occur

See 8.3. Semantics.


[default] = Maximum value
for its data type.

57

Section 8 - S-Analog Actuator Object (Class 0x32)

Installation and Operation Manual

Brooks DeviceNet PCs/PMs

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Need in
Access
Attr ID Implementation Rule

DeviceNet
Data Type

NV* Name

Description of
Attribute

Semantics of Values

19

Optional
(Not Supported)

Set

NV Warning Trip INT or


Point Low
specified by
Data Type if
supported

Determines the
See 8.3. Semantics.
Value below which [default] = Minimum value
a Warning
for its data type.
Condition will
occur

20

Optional
(Not Supported)

Set

NV Warning
Hysteresis

INT or
specified by
Data Type if
supported

Determines the
See 8.3. Semantics.
amount by which [default] = 0
the Value must
recover to clear a
Warning Condition

21

Optional
(Supported)

Set

NV Safe State

USINT (byte) Specifies the


behavior of the
physical actuator
for states other
than Execute

22

Optional
(Not Supported)

Set

NV Safe Value

INT or
specified by
Data Type if
supported

97-98
99

See 8.3. Semantics.


0 = [default]

The Value to be
See 8.3. Semantics.
used for Safe
0 = [default]
State = Safe Value

Reserved by DeviceNet
Conditional
(Supported)

Get

NV Subclass

UINT

Identifies a subset 0 = No subclass


of additional
n = subclass as defined
attributes, services herein
and behaviors.
The subclasses
for this object are
specified at the
end of this object
specification
section.

NV = Nonvolatile; value is maintained through power cycle. V = Volatile


1
Data Type and Data Units Attribute are settable ONLY under certain conditions (see 8.3. Semantics.)
2
If the value of Subclass is 00, then this attribute is OPTIONAL in implementation, otherwise, this attribute is REQUIRED.

58

Installation and Operation Manual

Section 8 - S-Analog Actuator Object (Class 0x32)

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

8.3. Semantics

Data Type
All Data Type attributes, including Data Type and Gain Data Type, use the
enumerated values specified in DeviceNet Vol. I, Appendix J-6.1.
The Data Type attribute is settable only in the Idle State and only if no
attribute belonging to the object instance is the endpoint of an I/O connection
in the Established State.
The Data Type attribute may change automatically based upon established
I/O connections. See 8.6. S-Analog Actuator Behavior for more information
on this mechanism.
Data Units
Specifies the context of Value and related attributes (such as, offset and trip
points) for this object instance. See Appendix K for a list of values. A request
to set attribute to an unsupported value will return an error response.
The Data Units attribute is settable only in the Idle State.
Value, Offset, Gain, Bias and Unity Gain Reference
The Offset, Gain and Bias attributes are applied to the Value attribute to
derive the actual signal, which drives the physical actuator. The gain is
normalized using the Unity Gain Reference attribute value. (e.g., for an UINT
type Gain, a Unity Gain Reference value may be 10000, allowing an effective
gain of 0.0001 to 6.5535.)
The following formula applies:
physical actuator drive signal = GainN ( Value + Offset ) + Bias
where:
GainN = Gain/Unity Gain Reference
There may be additional nonlinear conversions applied to the drive signal as
specified by the manufacturer.

59

Section 8 - S-Analog Actuator Object (Class 0x32)

Installation and Operation Manual

Brooks DeviceNet PCs/PMs

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Status
A bit mapped byte, which indicates the Alarm and Warning Exception status
of the object instance. The following definition applies:
Bit

Definition

High Alarm Exception: 0 = cleared; 1 = set

Low Alarm Exception: 0 = cleared; 1 = set

High Warning Exception: 0 = cleared; 1 = set

Low Warning Exception: 0 = cleared; 1 = set

Reserved

Reserved

Reserved

Reserved

Trip Points and Hysteresis


Trip Point High is the level above which the Value attribute will cause an
Alarm or Warning exception condition.
Trip Point Low is the level below which the Value attribute will cause an
Alarm or Warning exception condition.
A Hysteresis value specifies the amount by which the Value attribute must
transition in order to clear an Alarm or Warning condition.
For example: A Trip Point High value of 90 and a Hysteresis value of 2 will
result in an exception condition being set when the Value is above 90 and
cleared when the Value drops below 88. Similarly, A Trip Point Low value of
90 and a Hysteresis value of 2 will result in an exception condition being set
when the Value is below 90 and cleared when the Value increases above 92.
Override
This attribute is used to override the function of the Value attribute in driving
the physical actuator. The primary application of this feature is in devices
where the object instance is being driven by another object such as an SSingle Stage Controller object instance.
The Safe State attribute provides a mechanism for override depending upon
object state and will take precedents over this. That is, if an object instance
implements the Safe State attribute and related behavior, then this Override
attribute and related behavior will only function in the Executing State.

60

Installation and Operation Manual

Section 8 - S-Analog Actuator Object (Class 0x32)

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

Attribute Value

State

Normal (Supported)

Off/Closed (Supported)

On/Open (Supported)

Hold

Safe State

5-63

Reserved

64-127

Device Specific

128-255

Vendor Specific

Safe State
This attribute specifies the behavior of the drive to the physical actuator for
states other than Executing. See the S-Device Supervisor object definition in
Section 6-48 for a description of object states. The following values are
defined:
Attribute Value

State

Zero/Off/Closed

Full Scale/On/Open

Hold Last Value

Use Safe Value

4-63

Reserved

64-127

Device Specific

128-255

Vendor Specific

IntelliFlow supports the Safe State Attribute as a Get Only attribute that
returns a value of zero or closed.
Safe Value
For Safe State set to Use Safe Value, this attribute holds the value to which
the actuator will be driven for object instance states other than Executing.
Specifically, this attribute value will become the value of the Value attribute.
Therefore, the correction formula specified above applies.

61

Section 8 - S-Analog Actuator Object (Class 0x32)

Installation and Operation Manual

Brooks DeviceNet PCs/PMs

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

8.4. S-Analog Actuator Common Services

The S-Analog Actuator Object provides the following Common Services:


Need in Implementation
Service
Code
Class
Instance

Service Name

Description of Service

0Ehex
14dec

Conditional*

Required

Get_Attribute_Single

Returns the contents of the


specified attribute.

10hex
16dec

n/a

Required

Set_Attribute_Single

Modifies an attribute value.

*The Get_Attribute_Single service is REQUIRED if any attributes are implemented.

See the DeviceNet Communication Model and Protocol for definitions of


these common services.
8.5. S-Analog Actuator ObjectSpecific Services

The S-Analog Actuator Object provides no ObjectSpecific services.


8.6. S-Analog Actuator Behavior

The S-Device Supervisor Object manages the behavior of the S-Analog


Actuator Object. See Section 6.
An S-Analog Actuator object instance modifies the Value by applying the
formula specified above with the associated attribute values. Value is
specified as Data Type and Data Units. Optionally, additional corrective
algorithms are applied to further correct for various calibration effects. These
additional algorithms are specified in other objects, as identified in the device
profile, or as extensions, specified by the manufacturer.
All Trip Point calculations, as specified above, utilize the Value attribute
before the application of Offset and Gain.

62

Installation and Operation Manual

Section 8 - S-Analog Actuator Object (Class 0x32)

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

Data Type
If the implementation of this object specifies more than one valid Data Type
value, in the device profile or by vendor, then the following behavior with
respect to Data Type applies. The Data Type value will be set automatically
based upon the first valid I/O connection established by the device. This
configuration will then remain in effect for this object instance, even after all
I/O connections are lost. For devices that support only one Data Type, this
behavior is not supported.
If no established I/O connections exist, which include an attribute from this
object, then the Data Type attribute is settable provided that the object is in
the Idle State.
The following example demonstrates this behavior:
A device profile specifies an instance of the S-Analog Actuator object as well
as two static Assembly object instances, both with data attribute components
mapped to this object instance. Assembly object instance ID 1 specifies INT
data types and Assembly object instance ID 2 specifies REAL data types.
After the device is On-Line, it is configured with an I/O connection to
Assembly instance ID 2. When the connection transitions to the Established
State, this object instance attribute Data Type is automatically set with the
value for REAL before any data is communicated to, or from, the object
instance.
GF100 Series Implementation
Data Type values supported are Integer (0xC3) and Real (0xCA). Data Units
supported are Counts (0x1001) and Percent (0x1007). Data Type and Data
Units attributes are settable. The supported combinations of Data Type and
Data Units on Intelliflow are Integer-Counts (default), Real-Percent, IntegerPercent, and Real-Counts. The Real-Percent values range from 0.0 to 100.0,
where the value represents percent of full-scale that the actuator is being
driven. Integer-Percent value range is 0 to 100 integer. Integer-Counts value
range is 0 to 0x7FFF. Typical count range is 0 to 24576, (0x6000).

63

Section 8 - S-Analog Actuator Object (Class 0x32)

Installation and Operation Manual

Brooks DeviceNet PCs/PMs

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

THIS PAGE WAS


INTENTIONALLY
LEFT BLANK

64

Section 9 - S-Single Stage Controller Object


(Class 0x33)

Installation and Operation Manual


X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

9. S-Single Stage Controller Object (Class 0x33)

The S-Single Stage Controller Object models a closed-loop control system


within a device. Associated with a single stage controller is a Process
Variable, a Setpoint and a Control Variable. As normally described by classic
control theory, a closed-loop controller will drive the Control Variable in order
to affect the value of the Process Variable such that it is made to equal the
Setpoint. See the Semantics section, below, for more information regarding
these variable definitions. Manufacturers may specify additional correction
algorithms as extensions to this object.
This object is a member of the Hierarchy of Semiconductor Equipment
Devices. The S-Device Supervisor Object manages the behavior of the SSingle Stage Controller Object. See Section 6.
9.1. S-Single Stage Controller Class Attributes

The Object Class Attribute ID 1-7 are reserved. See DeviceNet Volume II,
Section 5-4.1. for more specification detail on these attributes.
Attribute Need in
Access
ID
implementation Rule

Name

DeviceNet
Data Type

Description of Attribute

1 thru 7

These class attributes are either optional or conditional and are described in chapter 5 of
this specification.

97 & 98

Reserved by DeviceNet

99

Conditional *
(Supported)

Get

Subclass

UINT

Identifies a subset of additional


attributes, services and
behaviors. The subclasses for
this object are specified at the
end of this object specification
section.

* If the value of Subclass is 00, which identifies "no subclass", then this attribute is OPTIONAL in implementation,
otherwise, this attribute is REQUIRED.

65

Section 9 - S-Single Stage Controller Object


(Class 0x33)

Installation and Operation Manual


X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

9.2. S-Single Stage Controller Instance Attributes

Certain minimal implementations may support any optional Set attributes as


Get only and still be compliant with this object specification. All required
attributes must be supported as specified.
Need in
Implementation

Access
Rule

NV*

Name

Optional
(Not Supported)

Get

NV

Number of USINT (byte) Number of


Attributes
supported
attributes

Number of attributes
supported in this object
instance

Optional
(Not Supported)

Get

NV

Attribute
List

ARRAY OF
Attribute List
USINT (byte)

List of attributes
supported in this object
instance

Optional
(Supported)

See 9.3.
NV
Semantics.

Data Type

USINT (byte) Determines the


Data Type of
Setpoint,
Process Variable
and related
attributes

See 9.3. Semantics.


[default] = INT
INT and Real
supported

Attr ID

Set 2

Optional
(Supported)

See 9.3.
Semantics
Set

66

DeviceNet
Data Type

NV

Data Units UINT

Description of
Attribute

Determines the
context of the
Process related
variables such as
Setpoint and
Process Variable

Semantics of Values

See Appendix K.
[default] = Counts
Counts and SCCM
supported

Optional
(Not Supported)

Set

NV

Control
Mode

USINT (byte) Specifies the


See 9.3. Semantics.
operational mode [default] = Normal (0)
of the controller

Required

Set

Setpoint

INT or
specified by
Data Type if
supported

The setpoint to
See 9.3. Semantics.
which the
See 9.6. Behavior.
process variable
will be controlled 0 = [default]
Range is one of:
0-6000H (0 100%)
0-7FFFH (0-100%)

Conditional 2
(Not Supported)

Set

Process
Variable

INT or
specified by
Data Type if
supported

The measured
process
parameter

The device profile must


specify the data
connection for this
attribute. It may be
internally linked to a
sensor. See Semantics
section.
0 = [default]

Section 9 - S-Single Stage Controller Object


(Class 0x33)

Installation and Operation Manual


X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

Need in
Implementation

Access
Rule

NV*

Name

Optional
(Not Supported)

Get

NV

CV Data
Type

USINT (byte) Determines the


Data Type of
Control Variable

See 9.3. Semantics.


[default] = INT

Conditional **
(Not Supported?)

Get

Control
Variable

INT or
specified by
CV Data
Type if
supported

The drive signal


output of this
object. The
algorithm by
which this
attribute is
calculated is
manufacturer
specific.

The device profile must


specify the data
connection for this
attribute. It may be
internally linked to an
actuator.
[default] = 0
See 9.3. Semantics.

10

Required

Get

Status

BYTE

Alarm and
See 9.3. Semantics.
Warning State of [default] = 0
this object
instance

11

Optional
(Supported)

Set

NV

Alarm
Enable

BOOL

Enables the
setting of the
Alarm Status Bit

0 = disable [default]
1 = enable

12

Optional
(Supported)

Set

NV

Warning
Enable

BOOL

Enables the
setting of the
Warning Status
Bit

0 = disable [default]
1 = enable

13

Optional
(Not Supported)

Set

NV

Alarm
Settling
Time

UINT

Number of
Milliseconds
allowed for the
control-loop to
settle to within
the error band

See 9.6. Behavior.


[default] = 0

14

Optional
(Not Supported)

Set

NV

Alarm Error INT or


Band
specified by
Data Type if
supported

See 9.6. Behavior.


The amount by
which the
[default] = 0
Setpoint must
equal the
Process Variable

15

Optional
(Not Supported)

Set

NV

Warning
Settling
Time

Number of
Milliseconds
allowed for the
control-loop to
settle to within
the Error Band

16

Optional
(Not Supported)

Set

NV

Warning
INT or
Error Band specified by
Data Type if
supported

Attr ID

DeviceNet
Data Type

UINT

Description of
Attribute

Semantics of Values

See 9.6. Behavior.


[default] = 0

See 9.6. Behavior.


The amount by
which the
[default] = 0
Setpoint must
equal the
Process Variable

67

Section 9 - S-Single Stage Controller Object


(Class 0x33)

Installation and Operation Manual


X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

Need in
Implementation

Access
Rule

NV*

Name

17

Optional
(Not Supported)

Set

NV

Safe State USINT (byte) Specifies the


See 9.3. Semantics.
Control Variable 0 = [default]
behavior for
states other than
Execute

18

Optional
(Not Supported)

Set

NV

Safe Value INT or


specified by
Data Type if
supported

The value to be
used for Safe
State = Safe
Value

See 9.3. Semantics.


0 = [default]

19

Optional
(Supported)

Set

NV

Ramp Rate UDINT


(4-bytes)

Time in
Milliseconds to
reach Setpoint

0 = Disabled [default]
x = value in milliseconds
Where: 0 < x < 7FFF
DeviceNet specifies 4
bytes of data, but only 2
are used.
See 9.6. Behavior.

NV

Subclass

Identifies a
0 = No subclass
subset of
n = subclass as defined
additional
herein
attributes,
services and
behaviors. The
subclasses for
this object are
specified at the
end of this object
specification
section.

Attr ID

97-98
99

DeviceNet
Data Type

Description of
Attribute

Semantics of Values

Reserved by DeviceNet
Conditional 3
(Supported)

Get

UINT

NV = Nonvolatile; value is retained through power cycle.


1
Data Type is settable ONLY under certain conditions (see semantics)
2
The Process Variable is only optional if this device includes an internal sensor. Otherwise, the Process Variable is
required. Similarly, The Control Variable is only optional if this device includes an internal actuator. Otherwise, the Control
Variable is required.
3
If the value of Subclass is 00, then this attribute is OPTIONAL in implementation, otherwise, this attribute is REQUIRED.

68

Installation and Operation Manual


X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Section 9 - S-Single Stage Controller Object


(Class 0x33)

Brooks DeviceNet PCs/PMs

9.3. Semantics

Data Type
All Data Type attributes, including Data Type and CV Data Type, use the
enumerated values specified in DeviceNet Vol. I, Appendix J-6.1.
The Data Type attribute is settable only in the Idle State and only if no
attribute belonging to the object instance is the endpoint of an I/O connection
in the Established State.
The Data Type attribute may change automatically based upon established
I/O connections. See 9.6. Behavior for more information on this
mechanism.
Data Units
Specifies the context of Setpoint and Process Variable and related attributes
(such as, offset and trip points) for this object instance. See Appendix K for a
list of values. A request to set attribute to an unsupported value will return an
error response.
The Data Units attribute is settable only in the Idle State.
In applications where this object is used in a relationship with an S-Analog
Sensor object, this attribute may be specified as Get only, by the device
profile or the vendor, where the value mirrors that of the S-Analog Sensor
object Data Units attribute.
Setpoint, Process Variable and Control Variable
These three attributes compose the primary aspects of basic closed-loop
control. The Process Variable is the measured parameter of the process or
system being controlled. The Setpoint is the desired value for the measured
parameter. By affecting the value of the Control Variable, the closed-loop
controller drives the process or system to the desired state of:
Process Variable = Setpoint
The Control Variable is, therefore, connected to the process or system in
such a way that it affects the value of the Process Variable. Examples of
Control Variable/Process Variable combinations include: heater/temperature;
valve/flow; or regulator/pressure.

69

Section 9 - S-Single Stage Controller Object


(Class 0x33)

Installation and Operation Manual


X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

Status
A bit mapped byte, which indicates the Alarm and Warning Exception status
of the object instance. The following definition applies:
Bit

Definition

Alarm Exception: 0 = cleared; 1 = set

Warning Exception: 0 = cleared; 1 = set

Reserved

Reserved

Reserved

Reserved

Reserved

Reserved

Control Mode
This attribute is used to override the value of the Control Variable attribute.
Further, it may cause the object to modify the internal control algorithm such
that a smooth, or bumpless transitions occurs upon activating control to
setpoint.
The Safe State attribute provides a mechanism for override depending upon
object state and will take precedents over this. That is, if an object instance
implements the Safe State attribute and related behavior, then this Override
attribute and related behavior will only function in the Executing State.
Attribute Value
0

Normal

Zero/Off/Closed

Full/On/Open

Hold

Safe State

5-63

70

State

reserved

64-127

Device Specific (specified by device profile)

128-255

Vendor Specific

Section 9 - S-Single Stage Controller Object


(Class 0x33)

Installation and Operation Manual


X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

Safe State
This attribute specifies what value will be held in the Control Variable
attribute for states other than Executing. See the S-Device Supervisor object
definition in Section 6-48. for a description of object states. The following
values are defined:
Attribute Value

State

Zero/Off

Full Scale/On

Hold Last Value

Use Safe Value

4-63

Reserved

64-127

Device Specific (specified by device profile)

128-255

Vendor Specific

Safe Value
For Safe State set to Use Safe Value, this attribute holds the value to which
the Control Variable attribute will be set for object instance states other than
Executing.
Ramp Rate
The ramp rate is limited to values 0 through 32,767. See 9.6. Behavior.
9.4. S-Single Stage Controller Common Services

Service
Code

Need in Implementation
Class

Instance

Service Name

Description of Service

0Ehex
14dec

Conditional*

Required

Get_Attribute_Single

Returns the contents of the


specified attribute.

10hex
16dec

n/a

Required

Set_Attribute_Single

Modifies an attribute value.

*The Get_Attribute_Single service is REQUIRED if any attributes are implemented.

See the DeviceNet Communication Model and Protocol for definitions of


these common services.

71

Section 9 - S-Single Stage Controller Object


(Class 0x33)

Brooks DeviceNet PCs/PMs

Installation and Operation Manual


X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

9.5. S-Single Stage Controller ObjectSpecific Services

The S-Single Stage Controller Object provides no ObjectSpecific services.


9.6. Behavior

The S-Device Supervisor Object manages the behavior of the S-Single Stage
Controller Object. See Section 6. Additionally, this object exhibits the
following behavior:
Alarm and Warning Exception Conditions
While in the Executing State as defined by the S-Device Supervisor Object:
Immediately upon detecting that the Setpoint does not equal the Process
Variable by an amount plus-or-minus the associated (alarm or warning) Error
Band, a timer is started. This internal timer is incremented as long as the
above condition exists. If the timer exceeds the amount indicated by the
associated (alarm or warning) Settling Time and the associated (alarm or
warning) Exception Enable is set, then the appropriate (alarm or warning)
Exception Condition is set. Note that two internal timers are required in order
to support both Alarm and Warning Exception reporting.
This behavior is modified for Ramp Rate values not equal to zero. In such
cases, the timer is not enabled until after the expiration of the Ramp Time.
Ramp Rate
For Ramp Rate values other than zero, the S-Single Stage Controller Object
internally modifies the Setpoint value in such a way that the Process Variable
is ramped to its final value. An example follows. A Ramp Rate of 1000 is set
and a new Setpoint is sent to the MFC. The setpoint feed to the controller will
be internally (transparently) modified, in whatever time increments the object
is able to sustain, in order to affect a smooth transition over one second from
the old Setpoint to the new Setpoint, finally reaching the new Setpoint at the
one second mark.
Note: The GF100 Series supports Ramp Rates from 1000ms to 32767ms.
Rates greater than 7FFFh will return an error. Rates below 1000ms will be
accepted; however, the ramping algorithm will not be invoked.

72

Installation and Operation Manual


X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Section 9 - S-Single Stage Controller Object


(Class 0x33)

Brooks DeviceNet PCs/PMs

Data Type
If the implementation of this object specifies more than one valid Data Type
value, in the device profile or by vendor, then the following behavior with
respect to Data Type applies. The Data Type value will be set automatically
based upon the first valid I/O connection established by the device. This
configuration will then remain in effect for this object instance even, after all
I/O connections are lost. For devices that support only one Data Type, this
behavior is not supported.
If no established I/O connections exist, which include an attribute from this
object, then the Data Type attribute is settable provided that the object is in
the Idle State.
The following example demonstrates this behavior:
A device profile specifies an instance of the S-Single Stage Controller object
as well as two static Assembly object instances, both with data attribute
components mapped to this object instance. Assembly object instance ID 1
specifies INT data types and Assembly object instance ID 2 specifies REAL
data types.
After the device is On-Line, it is configured with an I/O connection to
Assembly instance ID 2. When the connection transitions to the Established
State, this object instance attribute Data Type is automatically set with the
value for REAL before any data is communicated to, or from, the object
instance.
GF100 Series implementation
Data Type values supported are Integer (0xC3) and Real (0xCA). Data Units
supported are Counts (0x1001) and SCCM (0x1400). Data Type and Data
Units attributes are settable. The supported combinations of Data Type and
Data Units on the GF100 Series are Integer-Counts (default), Real-SCCM,
Integer-SCCM, and Real-Counts. The full-scale range for Integer-Counts is
either 0x6000 or 0x7FFF, depending on the configuration. The MFC Device
Profile specifies that the full-scale range for the setpoint is 0x7FFF; however,
the default GF100 Series configuration supports a full-scale setpoint range of
0 to 0x6000.
Control
The application of this object is further specified in the applicable device
profile; primarily, the interfaces and object relationships are defined.
Generally, the Process Variable attribute is restricted to "Get Only" access
and an internal connection is defined to another object. Similarly, the Control
Variable is generally not supported due to internal connections.

73

Section 9 - S-Single Stage Controller Object


(Class 0x33)

Brooks DeviceNet PCs/PMs

Installation and Operation Manual


X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

When in the EXECUTING state, this object is running an application process


designed to cause the Process Variable to be driven to the value of the
Setpoint. In any state other than EXECUTING, the application process is
stopped and the Safe State is activated for the output of the object.
Any fault detected by the object application process causes the object to
transition to the appropriate state as defined by the managing S-Device
Supervisor object.

74

Installation and Operation Manual

Section 10 - S-Gas Calibration Object (Class 0x34)

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

10. S-Gas Calibration Object (Class 0x34)

An S-Gas Calibration Object affects the behavior of an associated S-Analog


Sensor object instance; a device profile will show a relationship between
these two objects where an S-Gas Calibration Object is used. The S-Analog
Sensor object uses a selection attribute as the gas type selection
mechanism. The S-Gas Calibration Object provides the data with which a
device enacts the appropriate calibration algorithm for a given gas type. Each
S-Gas Calibration Object Instance contains a set of attribute values for one
particular calibration set; each identified by the Gas Standard Number.
The S-Gas Calibration class level object provides a service for retrieving a
list of all valid object instances. The service response includes a list of
elements. Each element includes the Instance ID, Gas Standard Number and
the valid S-Analog Sensor object instance ID for which the instance is valid.
There may be more than one instance with the same Gas Standard Number.
These instances may be differentiated by Full Scale, Gas Symbol, Additional
Scaler and/or other parametric distinctions, including valid S-Analog Sensor
object instance ID. The distinctions may, or may not, be evident in the
Get_All_Instances service response, depending upon what the distinction is.
S-Gas Calibration Objects most often utilize the region of Manufacturer
Specified Attributes (ID > 100) for specific calibration parameters.
This object is a member of the Hierarchy of Semiconductor Equipment
Devices. As such, its behavior is managed by the Device Supervisor Object.
See Section 6.
The S-Gas Calibration object makes use of a list of Standard Gas Type
Numbers. This list is described in publication:
SEMI E52-95 Practice for Referencing Gases Used in Digital Mass Flow
Controllers, Semiconductor Equipment and Materials International
(SEMI), Mountain View, CA 94043-4080.
Note: It is implied that the reference above is to the latest revision as
specified by SEMI.

75

Section 10 - S-Gas Calibration Object (Class 0x34)

Installation and Operation Manual

Brooks DeviceNet PCs/PMs

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

10.1. S-Gas Calibration Class Attributes

The Object Class Attribute ID 1-7 are reserved. See DeviceNet Volume II,
Section 5-4.1. for more specification detail on these attributes.

Attribute ID

Need in
Access
Implementation Rule

Name

DeviceNet
Data Type

Description of Attribute

1 thru 7

These class attributes are either optional or conditional and are described in chapter 5 of
this specification.

97 & 98

Reserved by DeviceNet

99

Conditional *
(Supported)

Get

Subclass

UINT

Identifies a subset of additional


attributes, services and
behaviors. The subclasses for
this object are specified at the
end of this object specification
section.

170

Optional
(Supported)

Get

Bin ID

INT

Specifies the Device Bin


number. This value is vendor
specific. **

* If the value of Subclass is 00, which identifies "no subclass", then this attribute is OPTIONAL in implementation,
otherwise, this attribute is REQUIRED.
** This class attribute is required for certain customer applications, such as the multi-gas, multi-range
application.

76

Installation and Operation Manual

Section 10 - S-Gas Calibration Object (Class 0x34)

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

10.2. S-Gas Calibration Instance Attributes

Certain minimal implementations may support any optional Set attributes as


Get only and still be compliant with this object specification. All required
attributes must be supported as specified. The GF100 Series supports 9
instances of the S-Gas Calibration Object.
Attr ID Need in
Implementation

Access
Rule

NV*
Name

DeviceNet
Data Type

Description of
Attribute

Semantics of Values

Optional
(Not Supported)

Get

NV

Number of
Attributes

USINT

Number of
Number of attributes
attributes supported supported in this object
instance

Optional
(Not Supported)

Get

NV

Attribute List

ARRAY OF
USINT

List of attributes
supported by this
object instance

List of attributes supported


in this object instance

Required

Get

NV

Gas Standard UINT


Number

Gas Type Number

[default] = 0 (no gas type


specified)
See 10.3. Semantics.

Required

Get

NV

Valid Sensor UINT


Instance

S-Analog Sensor
0 = No Valid Sensor
object instance ID n = Instance ID
for which this object See 10.3. Semantics.
instance is valid
[default] = 0

Optional
(Supported)

Set

NV

Gas Symbol

SHORT
STRING

Gas Type Name

See 10.3. Semantics.


[default] = null

Optional
(Supported)

Get

NV

Full Scale

STRUCT of:

Full Scale of the


device using this
object instance

See 10.3. Semantics.


[default] = 0, 0

REAL

Amount

The amount of measured


parameter corresponding
to full scale.

UINT

Units

The units for the above.


See Data Units Appendix
K.

77

Section 10 - S-Gas Calibration Object (Class 0x34)

Installation and Operation Manual

Brooks DeviceNet PCs/PMs

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Attr ID Need in
Implementation

Access
Rule

NV*
Name

DeviceNet
Data Type

Description of
Attribute

Semantics of Values

Optional
(Not Supported)

Set

NV

Additional
Scaler

REAL

Additional
Correction Factor

In addition to the correction


algorithm, this amount is
multiplied to the reading.
Generally used for Gas
Correction for a gas other
than the type identified for
the object instance by
attribute 3.
(E.g., scale a nitrogen
object instance to measure
argon).
Default = 1.0

Optional
(Supported)

Get

NV

Calibration
Date

DATE

Date of Calibration

The date this object


instance was last
calibrated
[default] = 0

Optional
(Supported)

Get

NV

Calibration
UINT
Gas Number

Calibration Gas

The gas number of the gas


used to calibrate this
object instance.
[default] = 0

10

Optional
(Not Supported)

Get

NV

Gas
Correction
Factor

Gas Correction
Factor
For devices that
support simple
correction factors
(as opposed to
algorithms) for gas
selection.

[default] = 1.0

97-98
99

REAL

Reserved by DeviceNet
Conditional **
(Supported)

Get

NV

Subclass

UINT

Identifies a subset 0 = No subclass


of additional
n = subclass as defined
attributes, services herein
and behaviors. The
subclasses for this
object are specified
at the end of this
object specification
section.

* NV = Nonvolatile; value is maintained through power cycle.


** If the value of Subclass is 00, then this attribute is OPTIONAL in implementation, otherwise, this attribute is REQUIRED.

78

Installation and Operation Manual

Section 10 - S-Gas Calibration Object (Class 0x34)

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

10.3. Semantics

Gas Standard Number


Used to identify a gas standard number, for which the object instance is
currently calibrated. See Instance Application Example below.
The actual coding of the values are described in the following publication:
See 1. Introduction for reference to the SEMI publication: Practice for
Referencing Gases Used in Digital Mass Flow Controllers.
Since the actual attributes, and their context, for the parameterization of
object instances for particular gas types is beyond the scope of this standard
(i.e., vendor specific) the Access Rule for this attribute has been specified as
Get. Vendors may choose to specify an Access Rule of Set for this attribute.
Valid Sensor Instances
This attribute specifies the S-Analog Sensor object instance for which the SGas Calibration object instance is valid. An S-Gas Calibration object instance
will be valid for zero or one S-Analog Sensor object instances.
Gas Symbol
This optional attribute is a string-coded representation of the name of the gas
for which the object instance has been configured. It is coded as a user
defined text symbol or it is coded as defined in the above referenced SEMI
publication.
This attribute may indicate a different gas from the one, which has been
specified by the Gas Standard Number. See Instance Application Example
below.
Full Scale
This optional attribute identifies the amount of measured parameter (e.g.,
Mass Flow) corresponding to the Full Scale of the associated S-Analog
Sensor object. A primary purpose for this attribute is to allow for simple SAnalog Sensor object implementations where the Value is reported in raw
units; this attribute allows a mapping to engineering units.
For example, the Full Scale for a S-Gas Calibration object may be 100
SCCM, while the Full Scale for the associated S-Analog Sensor object may
be 0x6000 counts (i.e., S-Analog Sensor object Data Type = INT and Data
Units = Counts).

79

Section 10 - S-Gas Calibration Object (Class 0x34)

Installation and Operation Manual

Brooks DeviceNet PCs/PMs

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Instance Application Example


The following is an example to demonstrate the usage of Gas Calibration
object instances and their attributes:
A device has been supplied with three gas calibration object instances:
nitrogen (13)*, helium (1)* and argon (4)*. The user wishes to use the device
for silane (39)* and knows that a correction factor of 0.60 will properly
convert a nitrogen calibration for this application. The object instance for
nitrogen would be selected and the Additional Scaler attribute for this
instance would be set to 0.60. To identify this modification, the Gas Symbol
may be set to read silane, SiH4, or 39.
* (Gas Standard Number)
10.4. S-Gas Calibration Common Services

Service
Code

Need in
Implementation
Class

Instance

Service Name

Description of Service

0Ehex
14dec

Required

Required

Get_Attribute_Single

Returns the contents of the


specified attribute.

10hex
16dec

Required

Required

Set_Attribute_Single

Modifies an attribute value.

See the DeviceNet Communication Model and Protocol for definitions of


these common services.
10.5. S-Gas Calibration ObjectSpecific Services

Service
Code
4Bhex
75dec

Need in Implementation
Class

Instance

Service Name

Description of Service

Required

n/a

Get_All_Instances

Requests a list of all available


object instances with their
respective gas numbers

If a gas instance is changed or added, the device must be reset before


performing the get_all_instances service.

80

Installation and Operation Manual

Section 10 - S-Gas Calibration Object (Class 0x34)

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

Success Response Service Data Field Parameters


Parameter

Required

Data Type

Description

Semantics of Values

Size of List

Required

UINT

Specifies the number


of elements in the
Array

Number of gas calibrations


in the list

List of Gas
Calibrations

Required
if Size > 0

ARRAY of

Supported List

The list of gas calibrations

STRUCT of

Supported Gas Type

UINT

S-Gas Calibration
Object Instance ID

[34-n-4], where n is the


instance value 1 9.

UINT

Gas Standard Number

[34-n-3], where n is the


instance value 1 9.

UINT

Valid Sensor Instance

Always =1 for the GF100


Series.

On the GF100 Series: Gas instance 6 is considered the test gas instance.
There are a total of 6 gas instances, (sometimes referred to as gas pages)
available.
10.6. S-Gas Calibration Object Behavior

The behavior of this object is managed by the Device Supervisor Object,


defined in Section 6-48.5.

81

Section 10 - S-Gas Calibration Object (Class 0x34)

Installation and Operation Manual

Brooks DeviceNet PCs/PMs

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

10.7. S-Gas Calibration Object Instance Subclass 01

The following specification applies to a subclass of this object for application


in Mass Flow Controller devices.
10.7.1. Subclass01 Instance Attributes

Attribute Need in
ID
Implementation

Access
Rule

Name

DeviceNet
Data Type

Description of
Attribute

Semantics of Values

95

Optional
(Supported)

Get

Calibration
Pressure

REAL

The gas pressure The Standard Pressure


in KiloPascal
with respect to the
calibration conditions.
Default = 101.32, (14.7
PSIA).

96

Optional
(Not Supported)

Get

Calibration
Temperature

REAL

The Gas
Temperature in
Degrees C

The Standard
Temperature with respect
to the calibration
conditions.
Default = 0.0

10.7.2. Subclass 01 Instance Services

There are no additions or restrictions to the Object Services for this object
subclass.
10.7.3. Subclass 01 Behavior

There are no additions or restrictions to the Behavior for this object subclass.

82

Installation and Operation Manual

Section 11 - Advanced Diagnostics (GF135 Only)

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

11. Advanced Diagnostics (GF135 Only)

11.1. New Communication Protocol Overview

11.1.1. Objectives and Problem Statement

Through the years, issues found in the field on Brooks MFCs have been very
difficult to troubleshoot due to lack of information given to failure analysis
teams. Issues that are random in occurrence and are specific to the field
setup are the most difficult to reproduce therefore troubleshooting takes
longer.
This new communication capability will enable the device to perform a series
of self validation at regular interval and report its status to the tool software.
Some of the self validation will require at least knowing the state of certain
part of the tool over which the device typically had neither control nor access.
The capabilities of the GF135 will enable short interval control of the
upstream isolation valve in a manner consistent with good safety practices.
Those capabilities do not exist in any protocol currently in use in the field.
11.1.2. Protocol Description

The communication protocol shall be implemented over RS485 physical


layer.
The protocol shall be able to handle the following type of communications
between the device and the tool:

Tool request for Commissioning status

Tool request for valve leak status, ROD measurements

These are the minimum requirements to support advanced diagnostics.

83

Section 11 - Advanced Diagnostics (GF135 Only)

Installation and Operation Manual

Brooks DeviceNet PCs/PMs

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

11.2. Specific Requirements

11.2.1. Introduction

The following requirements are a subset of Brooks new communication


protocol definition.
11.2.2. Advanced Protocol

The advanced communication protocol is more fully defined in GF135-SRS011.


11.2.3. New Attributes

Note: Those attributes are valid as of the date of writing. Attribute ID are
subject to change and new attributes will likely be added by the time this
document is finalized.
New attributes for the advanced diagnostic:
Attribute

Access

Class

Instance

Att. ID

Values

isolation valve status

READ ONLY

177

0: Upstream open
1: Upstream closed

ROD delay

Read/Write

177

20

Delay before first ROD measurement after a


setpoint change (seconds).
Minimum = default = 4 sec.

ROD interval

Read/Write

177

21

Interval between ROD measurement when


setpoint is constant (seconds).
Minimum = 5 sec. Default = 10 sec.

ROD enable Default


flag

Read/Write

177

55

0: ROD is disabled
1: ROD is enabled
Non Volatile. Copied to Attribute 62 at power
up.
Default = Enabled

84

Installation and Operation Manual

Section 11 - Advanced Diagnostics (GF135 Only)

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

Attribute

Access

Class

Instance

Att. ID

Values

ROD Error Status

READ ONLY

177

56

0: ROD Error (attribute 11) is not valid


1: ROD Error (attribute 11) is valid

Valve Leak status

READ ONLY

177

57

0: Valve Leak Meas. is not valid


1: Valve Leak Meas. is valid

Valve Leak value

READ ONLY

177

59

Float, fraction of configured range

ROD Current Setpoint

READ ONLY

177

60

Current setpoint at which the ROD is being


measured (see attribute 11) (fraction of
configured range)

ROD error

READ ONLY

177

61

ROD measured flow change (from baseline)


in % SP for the current setpoint. Same as
ROD error N.

ROD enable flag

Read/Write

177

62

0: ROD is disabled
1: ROD is enabled
Volatile

Commissioning status

Read/Write

103

132

0: Not done or failed


1: Commissioning was successful

ROD 0 Status

READ ONLY

177

70

0: ROD Error 0 is not valid


1: ROD Error 0 is valid

ROD 1 Status

READ ONLY

177

71

0: ROD Error 1 is not valid


1: ROD Error 1 is valid

ROD 2 Status

READ ONLY

177

72

0: ROD Error 2 is not valid


1: ROD Error 2 is valid

ROD 3 Status

READ ONLY

177

73

0: ROD Error 3 is not valid


1: ROD Error 3 is valid

ROD 4 Status

READ ONLY

177

74

0: ROD Error 4 is not valid


1: ROD Error 4 is valid

ROD 5 Status

READ ONLY

177

75

0: ROD Error 5 is not valid


1: ROD Error 5 is valid

ROD 6 Status

READ ONLY

177

76

0: ROD Error 6 is not valid


1: ROD Error 6 is valid

ROD 7 Status

READ ONLY

177

77

0: ROD Error 7 is not valid


1: ROD Error 7 is valid

ROD 8 Status

READ ONLY

177

78

0: ROD Error 8 is not valid


1: ROD Error 8 is valid

ROD 9 Status

READ ONLY

177

79

0: ROD Error 9 is not valid


1: ROD Error 9 is valid

ROD 10 Status

READ ONLY

177

80

0: ROD Error 10 is not valid


1: ROD Error 10 is valid
85

Section 11 - Advanced Diagnostics (GF135 Only)

Installation and Operation Manual

Brooks DeviceNet PCs/PMs

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Attribute

Access

Class

Instance

Att. ID

Values

ROD 11 Status

READ ONLY

177

81

0: ROD Error 11 is not valid


1: ROD Error 11 is valid

ROD 12 Status

READ ONLY

177

82

0: ROD Error12 is not valid


1: ROD Error 12 is valid

ROD 13 Status

READ ONLY

177

83

0: ROD Error 13 is not valid


1: ROD Error 13 is valid

ROD 14 Status

READ ONLY

177

84

0: ROD Error 14 is not valid


1: ROD Error 14 is valid

ROD 15 Status

READ ONLY

177

85

0: ROD Error 15 is not valid


1: ROD Error 15 is valid

ROD 16 Status

READ ONLY

177

86

0: ROD Error 16 is not valid


1: ROD Error 16 is valid

ROD 17 Status

READ ONLY

177

87

0: ROD Error 17 is not valid


1: ROD Error 17 is valid

ROD 18 Status

READ ONLY

177

88

0: ROD Error 18 is not valid


1: ROD Error 18 is valid

ROD 19 Status

READ ONLY

177

89

0: ROD Error 19 is not valid


1: ROD Error 19 is valid

ROD Error 0

READ ONLY

177

90

Float, Avg. error for setpoint 0-5%

ROD Error 1

READ ONLY

177

91

Float, Avg. error for setpoint 5-10%

ROD Error 2

READ ONLY

177

92

Float, Avg. error for setpoint 10-15%

ROD Error 3

READ ONLY

177

93

Float, Avg. error for setpoint 15-20%

ROD Error 4

READ ONLY

177

94

Float, Avg. error for setpoint 20-25%

ROD Error 5

READ ONLY

177

95

Float, Avg. error for setpoint 25-30%

ROD Error 6

READ ONLY

177

96

Float, Avg. error for setpoint 30-35%

ROD Error 7

READ ONLY

177

97

Float, Avg. error for setpoint 35-40%

ROD Error 8

READ ONLY

177

98

Float, Avg. error for setpoint 40-45%

ROD Error 9

READ ONLY

177

99

Float, Avg. error for setpoint 45-50%

ROD Error 10

READ ONLY

177

100

Float, Avg. error for setpoint 50-55%

ROD Error 11

READ ONLY

177

101

Float, Avg. error for setpoint 55-60%

ROD Error 12

READ ONLY

177

102

Float, Avg. error for setpoint 60-65%

ROD Error 13

READ ONLY

177

103

Float, Avg. error for setpoint 65-70%

ROD Error 14

READ ONLY

177

104

Float, Avg. error for setpoint 70-75%

ROD Error 15

READ ONLY

177

105

Float, Avg. error for setpoint 75-80%

ROD Error 16

READ ONLY

177

106

Float, Avg. error for setpoint 80-85%

86

Installation and Operation Manual

Section 11 - Advanced Diagnostics (GF135 Only)

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

Attribute

Access

Class

Instance

Att. ID

Values

ROD Error 17

READ ONLY

177

107

Float, Avg. error for setpoint 85-90%

ROD Error 18

READ ONLY

177

108

Float, Avg. error for setpoint 90-95%

ROD Error 19

READ ONLY

177

109

Float, Avg. error for setpoint 95-100%

The following set of attributes is required for the data logging and trending:
Attribute

Access

Class

Instance

Att. ID

Values

Time Synchronization

WRITE ONLY

0x43 (67)

TBD

Time and date information


Not implemented

Data Request

READ ONLY

0x41 (65)

TBD

Trending information
Not implemented

11.3. Tool Device Communication

The following items need to be addressed with the customer to define the
new advanced diagnostic protocol:
Tool to provide status (e.g. isolation valve status upstream and
downstream)
Some operations require knowing the status of the isolation valves on both
sides of the device. The tool shall provide this information by writing to the
isolation valve status attribute whenever the status changes.
Note: At this time, this is not implemented on the customer tool software.
Request from the device to the tool to modify the tool status (e.g.
Operating the isolation valves at the request of the MFC)
Some operations require a specific state of the isolation valves on both sides
of the device. The tool shall read the isolation valve request attribute on a
schedule TBD and satisfy the request of the MFC.
Note: At this time, this is not implemented on the customer tool software.

87

Section 11 - Advanced Diagnostics (GF135 Only)

Installation and Operation Manual

Brooks DeviceNet PCs/PMs

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Time synchronization
In order to provide accurate data logging for the trending diagnostic, the tool
will need to provide accurate time synchronization. The MFC is capable of
running a real time clock, so only occasional synchronization is required (at
least once per power on cycle)
Note: At this time, this is not implemented on the customer tool software.
Request from the tool for some trending information
Data can be logged at regular interval and time stamped using the time
information
Data can be retrieved by the customer to provide long term trend (e.g. zero
information logged once per week)
Note: At this time, this is only supported via the diagnostic port.

88

Installation and Operation Manual

Section 12 - References

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

Brooks DeviceNet PCs/PMs

12. References

S-Device Supervisor Object. Open DeviceNet Venders Association (ODVA)


DeviceNet Specification Enhancement 93-01. Version J. 1/27/1999.
2

S-Analog Sensor Object. Open DeviceNet Venders Association (ODVA)


DeviceNet Specification Enhancement 93-02. Version J. 1/27/1999.
3

S-Analog Actuator Object. Open DeviceNet Venders Association (ODVA)


DeviceNet Specification Enhancement 93-03. Version J. 1/27/1999.
4

S-Single Stage Controller Object. Open DeviceNet Venders Association


(ODVA) DeviceNet Specification Enhancement 93-04. Version J. 1/27/1999.
5

S-Gas Calibration Object. Open DeviceNet Venders Association (ODVA)


DeviceNet Specification Enhancement 93-05. Version J. 1/27/1999.
6

Mass-Flow Controller Device Profile. Open DeviceNet Venders Association


(ODVA) DeviceNet Specification Enhancement 93-06. Version J. 1/27/1999.

Open DeviceNet Venders Association (ODVA) DeviceNet Specification,


Volume 1 and 2. Version 2.0. 12/2/1998.

89

Section 12 - References

Installation and Operation Manual

Brooks DeviceNet PCs/PMs

X-DPT-DeviceNet-GF100-Series-MFC-eng
Part Number: 541B184AAG
March, 2013

THIS PAGE WAS


INTENTIONALLY
LEFT BLANK

90

Installation and Operation Manual


X-DPT-RS485-GF100-Series-MFC-eng
Part Number: 541B183AAG
March, 2013

Brooks DeviceNet PCs/PMs

THIS PAGE WAS


INTENTIONALLY
LEFT BLANK

Installation and Operation Manual


X-DPT-RS485-GF100-Series-MFC-eng
Part Number: 541B183AAG
March, 2013

Brooks DeviceNet PCs/PMs


LIMITED WARRANTY

Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use
and service and that the Software will execute the programming instructions provided by Seller until the expiration of the
earlier of twelve (12) months from the date of initial installation or eighteen (18) months from the date of shipment by Seller.
Products purchased by Seller from a third party for resale to Buyer (Resale Products) shall carry only the warranty extended
by the original manufacturer.
All replacements or repairs necessitated by inadequate preventive maintenance, or by normal wear and usage, or by fault of
Buyer, or by unsuitable power sources or by attack or deterioration under unsuitable environmental conditions, or by abuse,
accident, alteration, misuse, improper installation, modification, repair, storage or handling, or any other cause not the fault of
Seller are not covered by this limited warranty, and shall be at Buyers expense.
Goods repaired and parts replaced during the warranty period shall be in warranty for the remainder of the original warranty
period or ninety (90) days, whichever is longer. This limited warranty is the only warranty made by Seller and can be amended
only in a writing signed by an authorized representative of Seller.
BROOKS SERVICE AND SUPPORT
Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with outstanding
service and support to back it up. We operate first class repair facilities located around the world to provide rapid response and
support. Each location utilizes primary standard calibration equipment to ensure accuracy and reliability for repairs and
recalibration and is certified by our local Weights and Measures Authorities and traceable to the relevant International
Standards.
Visit www.BrooksInstrument.com to locate the service location nearest to you.
START-UP SERVICE AND IN-SITU CALIBRATION
Brooks Instrument can provide start-up service prior to operation when required.
For some process applications, where ISO-9001 Quality Certification is important, it is mandatory to verify and/or (re)calibrate
the products periodically. In many cases this service can be provided under in-situ conditions, and the results will be traceable
to the relevant international quality standards.
CUSTOMER SEMINARS AND TRAINING
Brooks Instrument can provide customer seminars and dedicated training to engineers, end users and maintenance persons.
Please contact your nearest sales representative for more details.
HELP DESK
In case you need technical assistance:
888 275 8946
USA
Netherlands
+31 (0) 318 549290
+49 351 215 2040
Germany
+81 3 5633 7100
Japan

Korea
Taiwan
China
Singapore

+82 31 708 2521


+886 3 5590 988
+86 21 5079 8828
+6297 9741

Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change
without notice.

TRADEMARKS
Brooks .
DeviceNet

Brooks Instrument, LLC


Open DeviceNet Vendors Association, Inc.