Measurement GC 600e71 GB WW 1065-4

M E A S U R E M E N T G E N E R A L C ATA L O G U E
High Precision Measurement

General Catalogue
LK-G5000 Series / LK-G3000 Series / LJ-V7000 Series / LJ-G Series
SI-F1000 Series / SI-F80R Series / LT-9000 Series
LS-9000 Series / LS-7000 Series / TM-3000 Series
E Y
E N C E
M e a s u r e m e n t
KEYENCE Measurement
Technology Evolution
KEYENCE Corporation has continuously developed measurement
technolog y for over 30 years. Each generation of measurement systems
provided additional capabilities and significant improvements in
inspection quality.
E3CMOS 2D Laser
Newly developed high
sensitivity receiver enables
highly stable and accurate
2D measurement.
Surface Scanning
Laser Confocal
Confocal System
Revolutionary system enables
new measurement capabilities for
transparent materials.
Surface scanning provides a new

level of stability and flexibility.
CCD Triangulation
CCD based receiver element
enables stable measurement
on any material.
LED+PSD System
Small sensor head and
robust controller.
LASER+PSD System
Semiconductor laser enables
small sensor head and high
stability on shiny targets.
1980
History of development
2
CCD Optical Micrometer

Innovative CCD based system
enables high repeatability
and high speed.
T e c h n o l o g
E v o l u t i o n
Spectral Interferometry
Original principle provides nanometre
level measurement in a small sensor head design.
High-speed
2D/3D Laser Scanner
64000 profiles per second allow
precision inspection of even the most
difficult parts.
Ultra High Speed Laser

Displacement
Completely original design device achieves
worlds fastest sampling rate (392 kHz).
High-speed Optical Micrometer
High-speed 2D
Optical Micrometer
Inline imaging system measures
2 dimensions in with sub-micron
precision.
Stable measurement thanks to 16000 samples

per second, the fastest in its class.
The original optical design makes possible
long-term stability and high maintainability,
providing the ultimate in on-site usability.
2014
and Beyond
INDEX
Laser Triangulation
LK-G5000 Series
Ultra High-Speed/High-Accuracy
LaserDisplacement Sensor
LK-G3000 Series
High-Speed, High-Accuracy
CCD Laser Displacement Sensor
LJ-V7000 Series
High-speed 2D/3D Laser Scanner
LJ-G Series
High-Accuracy 2D Laser
Displacement Sensor
SI-F1000 Series
Micro-Head Spectral-Interference
Laser Displacement Meter
SI-F80R Series
Spectral-Interference
Wafer Thickness Meter
LT-9000 Series
Surface Scanning Laser

Confocal Displacement Meter
LS-9000 Series
High-Speed Optical Micrometer
LS-7000 Series
TM-3000 Series
High-speed 2D
Optical Micrometer
Spectral Interferometer
Confocal Laser
Optical Micrometer
P.32
I Micro-head size of 2 mm
I Spectral interference method
P.38
I Sampling speed of 5 kHz

I Working distance 80 mm
P.44
I Precise 2 m diameter beam spot

I 0.3 m resolution
P.46
I
I
I
I
P.50
I High repeatability 0.06m

I High speed 2400 samples/second
I Maintenance-free design
P.58
I Multi-point 2D measurement
I Tilt correction for inline measurement
I High-speed sampling of 5.5 ms
P.64
Linearity of 0.1% of F.S.

High-speed sampling of 3.8 ms
Simultaneous measurement/judgement of up to 8 features
Stable measurement for all targets
High-speed 16000 samples/second

Smallest detectable object 10 m
Tilt correction and transmitter/receiver position measurement
Equipped with a wide variety of measurement functions
TM-3000 Series
I
I
I
I
LS-7000 Series
P.24
LS-9000 Series
LT-9000 Series
I An emphasis on inline measurement

I The worlds fastest at 64000 profiles/sec.
I Blue laser optical system
SI-F80R Series
P.18
SI-F1000 Series
Sampling rate of 50 kHz

Repeatability down to 0.01m
Can measure diffuse, specular, transparent or translucent targets
Wide beam spot models are available
LJ-G Series
I
I
I
I
I
LJ-V7000 Series
P.10
LK-G3000 Series
LK-G5000 Series
I Fastest in the World 392 kHz

I Best linearity in its Class 0.02% of F.S.
I Connect up to 12 sensor heads/network capable
PRINCIPLE
PRINCIPLE
LK-G5000 Series Measurement Principle (Triangulation type)
WIDE RANGE
HIGH-SPEED
The semiconductor laser emits the laser beam to the target as shown below. The light reflected off the target is focused by the ernostar
lens and forms an image on the light-receiving element. The position of the beam spot on the receiving element varies with the distance
to the target. This variation is evaluated and converted into a measurement of target position.
At the reference distance
At a short distance
Light-receiving
element
Semiconductor
laser
At a long distance
Light-receiving
element
Semiconductor
laser
Transmitter
lens
Transmitter
lens
Light-receiving
element
Semiconductor
laser
Transmitter
lens
Ernostar
lens
Ernostar
lens
Light-receiving
element
Ernostar
lens
Light-receiving
element
Light-receiving
element
LJ-V7000 Series Measurement Principle

Cylindrical lens
Semiconductor Lasers
Measurement principle
GP64-Processor
2D Ernostar lens
The laser light is projected in a horizontal line by

the cylindrical lens and diffusely reflects on the
target object. This reflected light is formed on
the HSE3-CMOS and by detecting changes in
position and shape, displacement and shapes are
measured.
HSE3-CMOS
SI Series measurement principles (Spectral-Interference type)
micro-head
Spectroscopic unit
SI-F01U3
Polarization maintaining
optical fibre
Light source (SLD)

Spectroscope
Actual size
Waveform
analysis
CCD
Displacement data
Interference light
ultra high accuracy
Sensor head
SI-F01
Emitted light
Reference reflection surface
Diffraction
grating
Target
SLD: Super Luminescent Diode
SLD
Optical interference
Spectroscopic analysis
Part of the broad wavelength light

emitted from the SLD is reflected by
the reference reflector mounted in the
sensor head, while the part that passes
the reference surface is mirror-reflected
on the target and returns into the head.
The two reflected light beams interfere

with each other. The intensity of the light
with a specific wavelength is determined
according to the distance between the
reference surface and the target. The
relative maximum interference is reached
when the determined distance is an
integral multiple of the wavelength.
Splitting the returned light into different

wavelengths with a diffraction grating
produces an optical intensity distribution
for a specific wavelength band. The
distance to the target is obtained by
carrying out waveform analysis on this
distribution.
CLEAR TARGET THICKNESS
LK-G5000 Series
LT-9000 Series Measurement Principle (Confocal type)
HIGH-ACCURACY
High-accuracy measurement method uses the confocal principle and tuning fork
When the focal point is not on the target surface
When the focal point is on the target surface

Semiconductor
laser
Light-receiving
element
Pinhole
The received light
Tuning fork
intensity is low.
Light-receiving
element
Pinhole
The received light
Tuning fork
intensity is low.
Sensor
Sensor
All of the received light passes
through the pinhole.
LS-9000 Series Measurement Principle (Thrubeam type)
HIGH-ACCURACY
LJ-G Series
A small amount of received light

passes through the pinhole.
LJ-V7000 Series
Semiconductor
laser
LK-G3000 Series
The laser beam is focused on the target surface through an objective lens that vibrates up and down at high speed by means of
a tuning fork. The beam reflected off the target surface is converged on a pinhole and then enters the light-receiving element. By
measuring the exact position of the objective lens when the light enters the light-receiving element, the target height can be determined.
The sensor measures the distance to the target surface accurately without being affected by the material, colour, or angle of the target.
LONG LIFE
High-speed exposure CMOS

High-intensity Green-LED
Proprietary designed measurement

CMOS features an integrated
amplifier to maximise performance
and speed.
Target Position CMOS
SI-F1000 Series
High-intensity Green LED lasts longer

than traditional LED light sources
while providing high intensity and
evenly-distributed lighting.
High performance condenser
The CMOS measures the position

between the transmitter and receiver
Lens unit efficiently focuses LED light.
Monitor CMOS
SI-F80R Series
The Monitor CMOS tracks workpiece

inclination to automatically correct
for tilt errors.
Improvement over the laser-scanning method
Light-receiving element
Motor
TM Series measurement principles (2D Thrubeam type)
MICRO-HEAD
LT-9000 Series
Polygon mirror
The green LED light is distributed as a uniform, parallel beam and

is applied to a target. The edges between the bright and dark
areas on the CCD detected and used to calculate a measurement
value. The conventional scanning method as shown in the figure
on the left uses a high speed motor, which limits the sensors
durability and stability. The solid state LS-9000 Series solves this
problem and ensures excellent durability.
ULTRA HIGH ACCURACY

LS-9000 Series
Telecentric optical system

Telecentric lens system ensures that
the target image on the receiver element
does not depend on target position.
Principle of measurement
Telecentric lens
Collimator lens
Mirror
Target
Receiver
TM-3000 Series
The newly developed InGaN LED system

provides consistent, noise resistant
illumination. In addition, because the
system is LED based, there are none
of the optical hazards associated with
lasers.
Mirror
Lens
High luminance InGaN green LED
LS-7000 Series
A collimated green LED beam is used to generate a shadow

on the high precision CMOS receiver. This shadow is then
analysed to produce two dimensional measurements of
distances, angle, etc.
Lens
Diffusion
unit
CMOS
LED
Transmitter
SUCCESSFUL APPLICATION
SUCCESSFUL APPLICATIONS
Thickness
Substrate thickness measurement of

solar cells
LK-G5000 Series
P.10
Measurements of glass sheet thickness,

curvature, and parallelism
Thickness measurement of transparent film
LK-G5000 Series
LT-9000 Series
P.10
P.46
Height and Step Height
HDD arm assembly position
LK-G5000 Series
P.10
Height and width measurement of rubber

overlap
Height control of dispenser
LJ-V7000 Series
LK-G3000 Series
P.24
P.18
Width and Outside Diameter
Drill bit outer diameter measurement
TM-3000 Series
8
Roller outer diameter measurement
P.64
LS-9000 Series
Film width measurement
P.50
LS-7000 Series
P.58
LK-G5000 Series
Eccentricity and Vibration
LK-G3000 Series
LJ-V7000 Series
Disk rotor warpage measurement
P.10
LK-G5000 Series
Ultrasonic welder monitoring
P.10
LK-G5000 Series
LJ-G Series
LK-G5000 Series
Vibration evaluation of cellular phone
P.10
Stroke and Position Measurement

SI-F1000 Series
SI-F80R Series
SI Series
Feedback control of a welder
P.38
LJ-V7000 Series
LT-9000 Series
Wafer position measurement
Position tracking of high temperature steel

pipe
P.24
LK-G3000 Series
P.18
Profile and Contour

LS-9000 Series
LS-7000 Series
LK-G5000 Series
P.10
Thermal expansion of a lithium-ion battery.
Ampoule shape inspection
TM-3000 Series
TM-3000 Series
Warpage measurement of a circuit board
P.64
LJ-V7000 Series
P.24
9
LK-G5000 Series
Ultra High-Speed/HighAccuracy
Laser Displacement Sensor
LK-G5000 Series
Features
Fastest in the World 392 kHz
Best linearity in its Class 0.02% of F.S.
Connect up to 12 sensor heads/network capable
Expert Engineering Sites

A new site with answers to all of your difficult
measurement application questions
http://www.keyence.com/
measure
Best specifications in class

Highest Repeatability in its Class
Highest Accuracy in its Class
Fastest in the World
0.005 m
0.02 %
392 kHz
The need to improve product quality makes

high performance critical. The LK-G5000
Series provides the highest repeatability in its
class and is highly capable in any application.
High-linearity enhances the LK-G5000s

capabilities. By taking advantage of new
technology, the series provides high
performance with the high accuracy that is
increasingly required.
The worlds fastest sampling rate not only

captures displacement of moving or rotating
targets, but also increases stability in all
manner of applications.
Wide spot type

(2.5x conventional models)
Stable measurement on coarse targets
Focused spot type

(25 m)
Optimal for fine or profile measurements
Specular reflection type

Transparent/mirror surface
measurement
Surfaces that may appear flat, once magnified

will often contain minute projections and
depressions. This microscopic surface
roughness can often cause measurement
errors with conventional focused spot
sensors. By using a sensor head with a wide
beam spot, the
effect of the
uneven surface
is averaged
and stable
measurements
of even coarse
targets are
possible.
The smallest spot diameter in its class

of 25m (LK-H022) can measure any
target, from fine components to profile
measurements, with the highest level of
accuracy in the industry.
The LK-G5000 Series includes a group of

heads specifically designed for use on highly
reflective targets such as glass or other mirror
surfaces. These heads are available with wide
or focused beam spots and are ideally suited
for high accuracy measurements on such
surfaces.
Selectable variations
2x wider than
conventional model
10
LK-G5000 Series
LK-G5000 Series
Applications
LK-G3000 Series
Position control of an air knife
LJ-V7000 Series
Active layer measurement of solar modules
Measurements of glass board thickness,

warpage, and parallelism
LJ-G Series
Lineup
Sensor Head
Measurement type
Reference Distance & Measurement Range
Repeatability
Model
80.5 mm
0.005 m
LK-H008W
FOCUSED SPOT TYPE
203 mm
0.02 m
LK-H027
5010 mm
0.025 m
LK-H057
8018 mm
0.1 m
LK-H087
15040 mm
0.25 m
LK-H157
80.5 mm
0.005 m
LK-H008
0.02 m
LK-H022
0.025 m
LK-H052
8018 mm
0.1 m
LK-H082
15040 mm
0.25 m
LK-H152
0.005 m
LK-H008(W)
0.02 m
LK-H027K
46.35.2 mm
0.025 m
LK-H057K
76.7 -17.6 mm/+14.5 mm
0.1 m
LK-H087 & LK-F3
147.5 -39.5 mm /+24.4 mm
0.25 m
LK-H157 & LK-F2
SPECULAR REFLECTION TYPE
Main controller
Separate display type
LK-G5001(P)
Additional head unit

LK-HA100
CC-Link unit
LK-CC100
DeviceNet unit
LK-DN100
Touch panel display

LK-HD1001
Cable
Neutral density filter

Extension cable between
the head and
controller cable
(5, 10 m)
CB-AxxE
Controller-to-display
connection cable
0.33 m: OP-84427
3 m: OP-51655
10 m: OP-51656
I/O Cable and

Connector
OP-51657
Ethernet cable
OP-66843
For LK-H08x
LK-F3
For LK-H15x
LK-F2
TM-3000 Series
Sensor head-tocontroller cable

(0.7, 2, 5, 10, 20, 30 m)
CB-Axx
Compact display
LK-HD500
LS-7000 Series
Configuration
Software
LK-Navigator2
LK-H2
Display
TM
LS-9000 Series
All-in-one type
LK-G5001(P)V
LT-9000 Series
80.5 mm
16.12.8 mm
SI-F80R Series
203 mm
5010 mm
SI-F1000 Series
WIDE SPOT TYPE
11
LK-G5000 Series
Convenient calculation functions

Instantly calculates values based on measurements obtained by more than one head, enabling the user to easily set complicated calculations inside
the controller that were conventionally done with PLCs or PCs.
Standard Step Measurement

Calculates the differences
between a reference
point and each
measuring point.
A
Maximum/Minimum Measurement
Calculates the maximum
and/or minimum values.
Calculates the difference

between the maximum
and minimum values
among the
A
measurement
points.
B
A
Flatness Measurement
B
C
Measured value1=B-A Measured value2=B-C

Measured value3=A-C
Measured value1=MAX (A,B,C...)

Measured value2=MIN (A,B,C...)
Measured value1=MAX (A,B,C...)MIN (A,B,C...)...
Warpage Measurement
Multi-Point Thickness Measurement
Average Height Measurement
Calculates the
amount of warpage.
C
A
Calculates the
average height.
Calculates the
thickness with each
pair of sensors.
B
A
D
Measured value1=B-(A+C)/2
Measured value1=X+ (A+D) Measured value2=Y+ (B+E)

Measured value3=Z+ (C+F)...
Measured value1=Ave (A,B,C,D,...)
Measurement of Velocity (m/s), Acceleration (m/s2)

The LK-G5000 Series is equipped with a function to directly measure the speed (m/s)
and acceleration (m/s2) of targets. Just select the type of measurement: displacement,
speed, or acceleration. Using the differential processing circuit inside the controller, it
is possible to directly output or evaluate measurements that were previously calculated
externally. The LK-G5000 Series is suitable for lightweight, easily deformed, and hightemperature targets which are difficult to measure with contact accelerometers.
Example of measurement of stage movement
Displacement
Speed
Acceleration
Vibration test of high-temperature-muffler
Data filter functions made easy

4 types of easy to use data processing filters are incorporated directly in the controller. The filters are user selectable for ease of use.
Median filter
High pass filter
Removes any intermittent noise in the output.
Captures sudden changes and removes low frequency variations.
Unfiltered wave pattern
Wave pattern when using the high

pass filter
Moving average filter
Low pass filter
Averages the measured values to reduce high the overall noise level in the measurement.
Captures moderate changes while removing high frequency noise.
12
Wave pattern when using the

median filter
Wave pattern when using the

average filter
Wave pattern when using the low

pass filter
LK-G5000 Series
LK-G5000 Series
Specifications
Controller
Main unit/head expansion unit

Model
Single unit type

Separate type
LK-G5001V
LK-G5001PV
LK-G5001/LK-HD500
LK-G5001P/LK-HD500
Main controller
Head expansion unit
Sensor head compatibility
Compatible
No. of connectable sensor heads

Display
(LK-HD500)
Display
interface
Minimum display unit
0.001 m
999.999 m to 9999.99 mm (7 settings selectable)
Display cycle
Approx. 10 times/sec.
N/A
Display port
Either the display unit (LK-HD500) or

dedicated touch panel (LK-HD1001) can be connected
N/A
LED indicator
LASER ON
POWER ON, STABILITY, BRIGHT, DARK
LJ-V7000 Series
Display range
Analogue voltage output
10 V output, Output impedance: 100
Analogue current output
4 to 20 mA, Maximum load resistance: 350
No. of analogue outputs
TIMING1 input*1
Terminal
block
LK-G3000 Series
Designation
LK-HA100
Non-voltage input
Voltage input
Non-voltage input
Voltage input
RESET1 input*1
Auto-zero1 input*1
Laser control input*2
N/A
Laser remote input

NPN open-collector output
PNP open-collector output
Non-voltage input
Voltage input
Non-voltage input
Voltage input
TIMING input
LJ-G Series
Alarm output
Pass/Fail Output
Non-voltage input
RESET input
Auto-zero input
Expansion
connector
Program switch input
N/A
SI-F1000 Series
Binary selection input

Alarm output
Comparator output
Binary output
Baud rate: 9600 to 115200 bps
Data length: 8 bits Stop bit length: 1 bit Parity: None/even/odd
RS-232C interface
Ethernet interface*4
100Base-TX/10Base-T
Expansion unit connector
Environment
resistance
Up to 10 head expansion units can be connected to one main controller

Either of the CC-Link unit (LK-CC100) or DeviceNetTM unit (LK-DN100) can be connected
N/A
24 VDC10%
24 VDC10% (Supplied from the controller)
Power supply voltage

Maximum current consumption
SI-F80R Series
Head expansion unit connector
Power supply
N/A
USB 2.0 Hi-Speed compliant*3
USB interface
0.6 A or less with 1 head/3.5 A or less with 12 heads

When one or less head expansion unit is connected: 0 to 50C
When two or more head expansion units are connected: 0 to 40C
Ambient temperature
Relative humidity
35 to 85%RH (No condensation)
Weight
Approx. 600 g
Approx. 300 g
LT-9000 Series
*1 This input is applied to all of the synchronised OUT.

*2 When the laser class 3B sensor head is connected, a key-operated switch must be used for the input to this terminal. The laser is emitted only when the key-operated switch is set to the ON position.
(Select a key which can be removed only when it is set to the OFF position.) When the laser class 2/3R sensor head is connected, the laser turns on when this terminal is opened and turns off when it is short-circuited.
*3 When a PC supporting USB 1.1 or USB 2.0 full speed is connected, the data refresh cycle and other operations may slow down.
*4 Use the Ethernet interface only for direct connections with a PC or for local network connections with a PC or LK-G5000 Series units.
NPN open-collector output rating: 50 mA max. (40 V max.), Residual voltage: 0.5 V max.
PNP open-collector output rating: 50 mA max. (30 V max.), Residual voltage: 0.5 V max.
Non-voltage input rating: ON voltage: 1 V max., OFF current: 0.6 mA max.
Voltage input rating: Maximum input rating: 26.4 V, ON voltage: 10.2 V, OFF current: 0.6 mA
Part of the input/output circuit of the LK-G5000 Series is internally common. Be careful that no potential difference is generated between the internally common terminals due to the potential difference between the cables/external devices.
For details, refer to "Precautions on wiring" in the User's Manual.
LS-9000 Series
LK-H2 (LK-Navigator2) Operating environment

Pentium III 1 GHz or higher (1.7 GHz or higher recommended)
Supported OS
Windows 7*1 Windows Vista*2 Windows XP*3 Windows 2000 Professional*4
Memory capacity
256 MB or more (1 GB or more recommended)
Display resolution
1024 x 768 pixels, 24-bit full colour or better
Available hard disk space
1 GB or more
Interface
The PC must be equipped with one of these interfaces:

USB: 2.0 Hi-Speed (USB 1.1 compatible full speed)*5
LAN: 100BASE-TX, 10BASE-T*6
RS-232(serial port)
LS-7000 Series
CPU
TM-3000 Series
*1 Editions supported: Ultimate, Professional and Home Premium.

*2 Editions supported: Ultimate, Business, Home Premium, and Home Basic.
*3 Supports Professional SP2 and Home Edition SP2 or later.
*4 Supports SP4 or later.
*5 Does not support connection via a USB hub.
*6 Does not support connection via private LANs or routers. Use in a 1:1 or local connection.
* Windows is a registered trademark of Microsoft Corporation of America.
* Pentium is a registered trademark of Intel Corporation.
13
LK-G5000 Series
Sensor heads
Coarse target measurement (wide spot type)

LK-H008W
Model
Mounting mode
Reference distance
Measurement range*1
Specular reflection
LK-H025
LK-H027
LK-H055
LK-H057
LK-H085
LK-H087
LK-H155
Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection
LK-H157
Diffuse reflection
8 mm
20 mm
20 mm
50 mm
50 mm
80 mm
80 mm
150 mm
150 mm
0.5 mm
3 mm
3 mm
10 mm
10 mm
18 mm
18 mm
40 mm
40 mm
Light source
Red semiconductor laser

655 nm
Wavelength
Laser
class
IEC 60825-1
Class 1
Class 3R
Class 2
Class 3R
Class 2
Class 3R
Class 2
Class 3R
Class 2
FDA (CDRH) Part 1040.10
Class II
Class IIIa
Class II
Class IIIa
Class II
Class IIIa
Class II
Class IIIa
Class II
0.3 mW
4.8 mW
0.95 mW
4.8 mW
0.95 mW
4.8 mW
0.95 mW
4.8 mW
0.95 mW
Output
Spot diameter (at reference distance)
Linearity*2
Repeatability*3
20 m 550 m
0.05% of F.S.
(F.S.=1 mm)
0.005 m (0.001 m)
25 m 1400 m
0.02%of F.S.
(F.S.= 6 mm)
0.02 m (0.01 m)
0.02% of F.S./C
(F.S.=1 mm)
0.01% of F.S./C
(F.S.= 6 mm)
Sampling cycle
Environment resistance
Temperature fluctuation
Enclosure rating
0 to +50C*4
120 m 4200 m
0.02% of F.S.
(F.S.= 80 mm)
0.25 m
2.55/5/10/20/50/100/200/500/1000 s (9 steps selectable)

0.01% of F.S./C
0.01% of F.S./C
(F.S.= 20 mm)
(F.S.= 36 mm)
IP67
0.01% of F.S./C
(F.S.= 80 mm)
Incandescent lamp
or fluorescent lamp:
5000 lux max.
0 to +50C
0 to +50C*4
Relative humidity
10 to 55 Hz, 1.5 mm double amplitude in X, Y, and Z directions, 2 hours respectively
Vibration resistance
Aluminium die-cast
Material
Weight
70 m 2500 m
0.02% of F.S.
(F.S.= 36 mm)
0.1 m
Incandescent lamp or fluorescent lamp: 10000 lux max.
Ambient light
Ambient temperature
50 m 2000 m
0.02% of F.S.
(F.S.= 20 mm)
0.025 m
Approx. 240 g
Approx. 230 g
Approx. 260 g
Approx. 280 g
Approx. 300 g
*1 Measurement range when the sampling cycle is 20 s or more. *2 This value is obtained when the KEYENCE standard target (White diffuse workpiece or workpiece with a metal mirror surface only for the LK-H008W) is measured in the
normal measurement mode. *3 This value is obtained when the KEYENCE standard target (White diffuse workpiece or workpiece with a metal mirror surface only for the LK-H008W) is measured at the reference distance with the number of
averaging measurements set to 16384. The value in parentheses is a typical example of a measurement with the number of averaging measurements set to 65536 and the sampling cycle to 200 s. *4 When the ambient temperature rises to
40C or more, mount this on a metal plate before use.
Fine target measurement (focused spot type)
Light source
Model
Mounting mode
Reference distance
Measurement range*1
Wavelength
Laser IEC 60825-1
class FDA (CDRH) Part 1040.10
Output
Linearity*2
Repeatability*3
Sampling cycle
LK-H008
Specular reflection
8 mm
0.5 mm
Class 1
Class II
0.3 mW
20 m
0.05% of F.S.
(F.S.=1 mm)
0.005 m (0.001 m)
0.02% of F.S./C
(F.S.=1 mm)
Enclosure rating
Ambient light
Ambient temperature
Relative humidity
Material
Weight
0 to +50C*4
Approx. 240 g
LK-H020
LK-H022
LK-H050
LK-H052
LK-H080
LK-H082
LK-H150
LK-H152
Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection Diffuse reflection
20 mm
20 mm
50 mm
50 mm
80 mm
80 mm
150 mm
150 mm
3 mm
3 mm
10 mm
10 mm
18 mm
18 mm
40 mm
40 mm
655 nm
Class 3R
Class 2
Class 3R
Class 2
Class 3R
Class 2
Class 3R
Class 2
Class IIIa
Class II
Class IIIa
Class II
Class IIIa
Class II
Class IIIa
Class II
4.8 mW
0.95 mW
4.8 mW
0.95 mW
4.8 mW
0.95 mW
4.8 mW
0.95 mW
25 m
50 m
70 m
120 m
0.02% of F.S.
0.02% of F.S.
0.02% of F.S.
0.02% of F.S.
(F.S.= 6 mm)
(F.S.= 20 mm)
(F.S.= 36 mm)
(F.S.= 80 mm)
0.02 m (0.01 m)
0.025 m
0.1 m
0.25 m
0.01% of F.S./C
0.01% of F.S./C
0.01% of F.S./C
0.01% of F.S./C
(F.S.= 6 mm)
(F.S.= 20 mm)
(F.S.= 36 mm)
(F.S.= 80 mm)
IP67
Incandescent lamp
or fluorescent lamp:
5000 lux max.
0 to +50C
0 to +50C*4
Aluminium die-cast
Approx. 230 g
Approx. 260 g
Approx. 280 g
Approx. 300 g
*1 Measurement range when the sampling cycle is 20 s or more. *2 This value is obtained when the KEYENCE standard target (White diffuse workpiece or workpiece with a metal mirror surface only for the LK-H008) is measured in the
normal measurement mode. *3 This value is obtained when the KEYENCE standard target (White diffuse workpiece or workpiece with a metal mirror surface only for the LK-H008) is measured at the reference distance with the number of
averaging measurements set to 16384. The value in parentheses is a typical example of a measurement with the number of averaging measurements set to 65536 and the sampling cycle to 200 s. *4 When the ambient temperature rises to
40C or more, mount this on a metal plate before use.
Transparent/mirror target measurement (specular reflection type)
Light source
Model
Mounting mode
Reference distance
Measurement range*1
Wavelength
Laser IEC 60825-1
class FDA (CDRH) Part 1040.10
Output
Linearity*2
Repeatability*3
Sampling cycle
Enclosure rating
Ambient light
Ambient temperature
Relative humidity
Material
Weight
LK-H008
Specular reflection
8 mm
0.5 mm
LK-H008W LK-H022K
LK-H027K
LK-H052K
LK-H057K LK-H082
LK-H087
LK-H152
LK-H157
Specular reflection Specular reflection Specular reflection Specular reflection Specular reflection
Specular reflection*4
Specular reflection*4
8 mm
16.1 mm
16.1 mm
46.3 mm
46.3 mm
76.7 mm
147.5 mm
0.5 mm
2.8 mm
2.8 mm
5.2 mm
5.2 mm
17.6 mm to +14.5 mm
39.5 mm to +24.4 mm
655 nm
Class 1
Class 2
Class II
0.3 mW
0.95 mW
20m
20 m550 m
25 m
25 m1400 m
50 m
50 m2000 m
70 m
70 m 2500 m 120 m 120 m 4200 m
0.05% of F.S. (F.S.= 1 mm)
0.02% of F.S. (F.S.= 6 mm)
0.02% of F.S. (F.S.= 20 mm) 0.02% of F.S. (F.S.= 36 mm) 0.02% of F.S. (F.S.= 80 mm)
0.005 m (0.001 m)
0.02 m (0.01 m)
0.025 m
0.1 m
0.25 m
0.02% of F.S./C (F.S.=1 mm)
0.01% of F.S./C (F.S.= 6 mm)
0.01% of F.S. (F.S.= 20 mm)
0.01% of F.S. (F.S.= 36 mm)*6 0.01% of F.S. (F.S.= 80 mm)*6
IP67
Incandescent lamp or fluorescent
lamp: 5000 lux max.
0 to +50C*5
0 to +50C
0 to +50C*5
35 to 85% RH (No condensation)
Aluminium die-cast
Approx. 240 g
Approx. 230 g
Approx. 260 g
Approx. 280 g
Approx. 300 g
*1 Measurement range when the sampling cycle is 20 s or more. *2 This value is obtained when the KEYENCE standard target (White diffuse workpiece or workpiece with a metal mirror surface only for the LK-H008/LK-H008W) is
measured in the normal measurement mode. *3 This value is obtained when the KEYENCE standard target (White diffuse workpiece or workpiece with a metal mirror surface only for the LK-H008/LK-H008W) is measured at the reference
distance with the number of averaging measurements set to 16384. The value in parentheses is a typical example of a measurement with the number of averaging measurements set to 65536 and the sampling cycle to 200 s. *4 Use one of
the following dark filters when measuring a transparent or mirror surface object: LK-H082/LK-H087: LK-F3, LK-H152/LK-H157: LK-F2 *5 When the ambient temperature rises to 40C or more, mount this on a metal plate before use.
*6 Value measured at the event of diffuse reflection installation. Please contact us for the case of regular reflection installation.
14
LK-G5000 Series
Model
Designation
Ambient temperature
Environment
resistance
Relative humidity
Rated voltage
Current consumption
Weight
LK-G3000 Series
LK-CC100
CC-Link communication unit dedicated to LK-G5000 Series
Ver. 1.10 (Extended cyclic setting: Single) Ver. 2.00 (Extended cyclic setting: Double or more)*2
CLPA-certified master unit (CC-Link Ver. 2.00/Ver. 1.10)
1 to 4
156 kbps, 625 kbps, 2.5 Mbps, 5 Mbps, 10 Mbps
Dedicated CC-Link cable supporting Ver. 1.10 (Shielded 3-core twisted-pair cable: OP-79426, OP-79427)
156 kbps: 1200 m, 625 kbps: 900 m, 2.5 Mbps: 400 m, 5 Mbps: 160 m, 10 Mbps: 100 m
Remote device station
When one or less head expansion unit is connected: 0 to 50C.
When two or more head expansion units are connected: 0 to 40C.
35 to 85 %RH (No condensation)
24 VDC10 % (supplied from controller)
200 mA max.
Approx. 300 g
Supported CC-Link*1 version

Master unit
No. of occupied stations
Communication speed
Connection cable
Maximum total cable extension length
Station type
Network
connection
LK-G5000 Series
LK-CC100 (CC-Link unit)
*1 CC-Link is a registered trademark of Mitsubishi Electric Corporation.

*2 The LK-G5000 Series supports the "extended cyclic transmission" and "station-to-station cable length relaxation" of CC-Link Ver. 2.00.
LJ-V7000 Series
LK-DN100 (DeviceNetTM unit)

Model
Designation
Communication protocol
Master unit
Transmission speed
Device type
Transmission medium
Network
connection
Maximum trunk line cable length

Communication type
Power supply
Current consumption
Ambient temperature
Relative humidity
Rated voltage
Current consumption
Weight
SI-F1000 Series
Environment
resistance
LJ-G Series
LK-DN100
DeviceNetTM communication unit dedicated to LK-G5000 Series
DeviceNetTM*1 compliant
ODVA-certified master unit
500 kbps, 250 kbps, 125 kbps
Generic
Dedicated 5 cables (2 signal cables, 2 power supply cables, 1 shielding cable)
Thick cable: 500 m (at transmission speed of 125 kbps)/250 m (at 250 kbps)/
125 m (at 500 kbps) Thin cable: 100 m (at all transmission speed settings)
I/O communication (Poll) Explicit message communication
11 VDC to 25 VDC
10 mA max. (when network power supply 24 V is applied)
When one or less head expansion unit is connected: 0 to 50C.
When two or more head expansion units are connected: 0 to 40C.
24 VDC 10% (supplied from controller)
200 mA max.
Approx. 300 g
*1 DeviceNetTM is a registered trademark of ODVA (Open DeviceNet Vendor Association).
LK-G5000 Series Touch Panel Display
Storage temperature
Storage humidity
Weight
Rated voltage
Current consumption
CB-A2
2m
Approx. 200 g
LS-7000 Series
Extension cable between the head and

controller cable
Head-to-controller cable
CB-A07
0.7 m
Approx. 100 g
LS-9000 Series
Ambient humidity
LT-9000 Series
LK-HD1001
LK-G5000 Series Touch Panel Display
TFT colour LCD
32,768 colours
640 480
170.9 128.2
Approx. 50,000 hours
White LED
Approx. 50,000 hours
40 x 30 per 1 image
Matrix resistance membrane mode
0.98N or less
More than one million times
Available only with the LK-G5000 Series
Panel built-in type, IP65f equivalent dust-proof, waterjet-proof on only front panel
Limit dust and corrosive gas
0 to 50C
35 to 85%RH (no condensation) When the ambient temperature is higher than 40C,
limit the absolute humidity to 85%RH at 40C.
-10 to +60C (no freezing)
35 to 85%RH (no condensation) When the ambient temperature is higher than 40C,
limit the absolute humidity to 85%RH at 40C.
10 to 57 Hz, 0.3 mm double amplitude/57 to 500 Hz, 2G, 3 hours in each direction (X, Y, and Z)
Approx. 1150 g
24 VDC 10%
1 A or less
Display elements
Display colour
Display panel
Pixels (W x H pixels)
Display area (W x H mm)
Service life (normal temperature and humidity)
Type
Backlight lamp
Service life
Number of switches
Mode
Touch switch
Operating force
Service life
Communication function
Structure
Operating environment
Ambient temperature
Model
Cable length
Weight
SI-F80R Series
Model
Name
CB-A5
5m
Approx. 400 g
CB-A10
10 m
Approx. 750 g
CB-A20
CB-A30
20 m
30 m
Approx. 1400 g Approx. 2000 g
Model
Cable length
Weight
CB-A5E
5m
Approx. 400 g
CB-A10E
10 m
Approx. 750 g
TM-3000 Series
15
LK-G5000 Series
Dimensions
Unit: mm
Head
14
LK-H020/LK-H022/LK-H023
LK-H025/LK-H027/LK-H028
LK-H008/LK-H008W
14
55
500
55
500
11
LASER ON/STABILITY LED
31.2
22.8
7
13.4
15
12.7
13 max.
13.5
13.5 max.
0.5
0.5
62
53.4
20
4.4
57.5
73.5
24.4
Mounting hole
90
11.8
8
9.2
4.4
12.3
66
40
27.5
2x4.4
Mounting hole
12.2
51.4
60
33.4
14
LK-H022K/LK-H027K
LK-H050/LK-H052/LK-H053
LK-H055/LK-H057/LK-H058
75.9
4.6
LK-H052K/LK-H057K
55
74.8
500
66.6
13.4
22.1
2x4.4
Mounting hole
24
7.7 max.
10.1 max.
37.6
0.5
89 max.
77.7
89.9 max.
55.4
68.5
22.8
68
59.9
10.1
40
16.1
35.8
50
30
30
4.4
46.3
9.2
12.2
68
LK-H080/LK-H082/
LK-H085/LK-H087
7.7 max.
37.4
33.4
LK-H150/LK-H152/
LK-H155/LK-H157
14
14
55
55
500
500
80.3

7.7 max.
24
7
13.5
10.1 max.
2x 4.4
Mounting hole
35.4
22.7
20.2
0.5
68
84.3
67.3
6.8
4.2
4.4
24
24
18
8.2
76.7
9.2
12.3
75
16
10.1
33.3
80
20.6
76.2
90.5
max.
69
61.4
86.6
4
2x 4.4
Mounting hole
0.6
70
82.2
7.7
max.
150
17
33.5
38.5
147.5
17
LK-G5000 Series
Extension cable
[To extend the distance between head and controller]
CB-A07/CB-A2/CB-A5/CB-A10/CB-A20/CB-A30
CB-A5E/CB-A10E
7
Cable length (5 m, 10 m)
14
55
14
LK-G3000 Series
7
Cable length
(0.7 m, 2 m, 5 m, 10 m, 20 m, 30 m)
14
55
33
LK-G5000 Series
Unit: mm
Head-to-controller cable
[Cable between the head and controller]
55
26
11.5
LK-G5001(P)
LK-G5001(P)V
65
128
65
(65)
LK-HA100
(65)
105.5
26.3
128
(65)
26.3
(65)
105.5
DIN-rail
mounting
position
124
124
LJ-V7000 Series
Controller
DIN-rail
mounting
position
124
35.9
124
35.9
62.1
62.1
LJ-G Series
34.5
79.5
13.5
47
47
9
4xM4 Depth: 6
14
79.5
9
4xM4 Depth: 6
LK-CC100
M4 Depth: 6
13.5
M4 Depth: 6
114
14
LK-DN100
128
(13.2)
26.3
(13.2)
105.5
26.3
128
(13.2)
26.3
(13.2)
105.5
DIN-rail
mounting
position
124
124
35.9
DIN-rail
mounting
position
124
124
35.9
62.1
6
62.1
M4 Depth: 6
114
(3.2)
13.5
13.5
PANEL CUTOUT DIMENSIONS
LK-HD500
62
46
43
13
Panel
mounting
ring
62 min.
75
128.2
(Effective
display area)
178
91
167
LT-9000 Series
14
114
Panel thickness
0.5 to 5
237
(3.2)
M4 Depth: 6
14
LK-HD1001 Touch Panel Display
170.9(Effective display area)
13.5
13.5
(3.2)
M4 Depth: 6
SI-F80R Series
6
M4 Depth: 6
(3.2)
SI-F1000 Series
26.3
+0.6
0
74.5
80
100 min.
45 +0.6
51
LS-9000 Series
8.5
25
Warning
LS-7000 Series
The LK-G Series conforms to the following FDA and IEC standards:
Model
FDA (CDRH) Part 1040.10
IEC60825-1
LK-H008/
LK-H008W
Class ll Laser Product
Class 1 Laser Product
LK-H022/H022K/H027/H027K/H052/H052K/
LK-H057/H057K/H082/H087/H152/H157
Class ll Laser Product
LK-H020/H025/H050/H055/
LK-H080/H085/H150/H155
Class llla Laser Product
Class 3R Laser Product
TM-3000 Series
17
LK-G3000 Series
High-Speed, High-Accuracy
CCD Laser Displacement Sensor
LK-G3000 Series
Features
Sampling rate of 50 kHz
Repeatability down to 0.01 m
Can measure diffuse, specular, transparent, or translucent targets
Wide beam spot models are available

measure
Algorithms that support various applications

RPD* ALGORITHM
Laser light tends to react differently with translucent targets,
generating diffused reflections, which result in gradual broadening
of the received light waveform. The RPD algorithm cancels the
influence of the broadened waveform and detects the true peak
(Real Peak).
Light from
subduction
Light from
subduction
* RPD=Real Peak Detect
Translucent object
Waveform obtained by optimising
the 1st surface using ABLE
MULTI-ABLE CONTROL
The reflected light at each layer is sensed to optimise the
intensity of laser light. Highly accurate thickness measurements
are enabled by optimising the optical setting for each layer.
Waveform synthesised
by the multi-ABLE
function
The 1st
surface
Glass
The 2nd
surface
Waveform obtained by
optimising the 2nd
surface using ABLE
Saturation
level
MRC* ALGORITHM
When two or more peaks are generated by multiple reflections,
the algorithm compares the waveforms to the most recent
received-light waveform and determines the one with the most
similarity to the correct waveform.
Normal reflection
* MRC=Multiple Reflection Cancel
Light from
multiple reflections
Multiple reflections
18
LK-G3000 Series
LK-G5000 Series
Applications
LK-G3000 Series
Thickness measurement of a glass plate
LJ-V7000 Series
Detecting the runout of a HDD
Height measurement of PCB resin
Lineup
Transmitter/
receiver separate
type
Model
Laser Class
Measuring range
Repeatability
Spot diameter
0.01 m
20 m
LJ-G Series
Type
8 mm
Small spot
LK-G08
Class 1 (IEC)
Measuring range 8 0.8 mm
LK-G10
20 m
10 mm
Class II (FDA)
Class 1 (IEC)
Compact/
Super Precision
Measuring range 10 1 mm
0.01 m
LK-G15
20 x 500 m
Small spot
LK-G32
30 m
25 mm
Wide beam
LK-G37
SI-F80R Series
Wide beam
High Accuracy
SI-F1000 Series
Small spot
0.05 m
30 mm
35 mm
30 x 850 m
70 m
LK-G82
Multi-purpose
0.2 m
65 mm 80 mm 95 mm
Wide beam
LT-9000 Series
Small spot
70 x 1100 m
LK-G87
120 m
LK-G152
Class II (FDA)
Class 2 (IEC)
Long Distance
LK-G157
Small spot
LK-G402
High-speed
Long Distance
0.5 m
110 mm 150 mm 190 mm
290 m
300 mm 400 mm 500 mm

LK-G407
Small spot
LK-G502
Ultra
Long Distance
LK-G507
290 x 8300 m
Measuring range
400 100 mm
300 m
250 mm 500 mm 1000 mm

Wide beam
2 m
TM-3000 Series
Wide beam
120 x 1700 m
Measuring range
150 40 mm
LS-7000 Series
Wide beam
LS-9000 Series
Small spot
Measuring range
500 -250/+500 mm
2 m
300 x 9500 m
19
LK-G3000 Series
Specifications
Sensor heads
Model
LK-G08
LK-G10/G15
Diffused
reflection
Specular
reflection
Reference distance
8 mm
10 mm
30 mm
Measuring range *1
0.8 mm
1 mm
5 mm
Mounting mode
LK-G32/G37
LK-G82/G87
LK-G152/G157
Diffuse
reflection
Specular
reflection
Diffuse
reflection
Specular
reflection
23.5 mm
80 mm
75.2 mm
150 mm
147.5 mm
4.5 mm
15 mm
14 mm
40 mm
39 mm

Wavelength
Light source
Laser Class
655 nm (visible light)

Class II (FDA (CDRH) Part 1040.10), Class 1 (IEC 60825-1)
Output
Linearity *2
0.3 mW
0.95 mW
Approx. 70 x 1100 m (G87), Approx. 120 x 1700 m (G157),
Approx. 120 m (G152)
Approx. 70 m (G82)
Approx. 20 m
Approx. 20 x 500 m (G15),

Approx. 20 m (G10)
Approx. 30 x 850 m (G37),

Approx. 30 m (G32)
0.05% of F.S. (F.S.= 0.8 mm)
0.03% of F.S. (F.S.= 1 mm)
0.05% of F.S. (F.S.= 5 mm) 0.05% of F.S. (F.S.= 15 mm) 0.05% of F.S. (F.S.= 40 mm)
0.02 m (0.01 m)
Repeatability *3
Sampling time
0.05 m *4
0.2 m *4
0.5 m *4
20/50/100/200/500/1000 s (Selectable from 6 levels)
LED display
Near the centre of the measurement: Green lights, Within the measurement area: Orange lights, Outside the measurement area: Orange flashing
Temperature characteristics
Enclosure rating
0.02% of F.S./C
(F.S.= 0.8 mm )
0.01% of F.S./C
(F.S.= 1 mm )
0.01% of F.S./C
(F.S.= 5 mm)
+10 to 40C
0 to 50C
35 to 85%, No condensation
10 to 55 Hz, double amplitude 1.5 mm (0.75 mm for LK-G08); two hours in each direction of X, Y, and Z
Aluminium
Weight (including the cable)
Incandescent lamp or
fluorescent lamp:
5000 lux max.
Relative humidity
Material
0.01% of F.S./C
(F.S.= 40 mm)
IP67 (IEC60529)
Ambient luminance
Ambient temperature
0.01% of F.S./C
(F.S.= 15 mm)
Aluminium die-cast
Approx. 245 g
Approx. 190 g
Approx. 280 g
Approx. 380 g
Approx. 290 g
*1 The value is obtained by measuring KEYENCEs standard target (ceramic).

LK-G08: When the sampling rate is 20 s, the value becomes +0.37 (FAR side) to -0.8 mm (NEAR side).
LK-G10/G15: When the sampling rate is 20 s, the value becomes +0.37 (FAR side) to -1 mm (NEAR side).
LK-G32/G37: When the sampling rate is 20 s, the value becomes +1.8 (FAR side) to -5 mm (NEAR side) for diffuse reflection, and +1.6 (FAR side) to -4.5 mm (NEAR side) for specular reflection.
LK-G82/G87: When the sampling rate is 20 s, the value becomes -9 (NEAR side) to -15 mm (NEAR side) for diffuse reflection, and -8.7 (NEAR side) to -14 mm (NEAR side) for specular reflection.
LK-G152/G157: When the sampling rate is 20 s, the value becomes -22 (NEAR side) to -40 mm (NEAR side) for diffuse reflection, and -22 (NEAR side) to -39 mm (NEAR side) for specular reflection.
*2 The value is obtained by measuring KEYENCEs standard target (ceramic) with the Standard mode.
*3 The value is obtained by measuring KEYENCEs standard(SUS) with 4096 times of averaging at the reference distance. The value in parenthesis is the typical repeatability obtained by measuring the target with 16384.
*4 Consult your nearest KEYENCE representative for the Class IIIa type with increased repeatability.
Model
LK-G402/G407
Mounting mode
LK-G502/G507
Diffused reflection
Specular reflection
Diffused reflection
Reference distance
400 mm
398 mm
500 mm
Specular reflection
497.5 mm
Measuring range*1
100 mm
99 mm
-250 to +500 mm
-249 to +498 mm

Light source
Wavelength
655 nm (visible light)
Laser Class
Output
0.95 mW
Approx. 290 x 8300 m (G407)

Linearity *2
0.05% of F.S.(F.S.= 100 mm)
Approx. 300 x 9500 m (G507)

0.05% of F.S. ( 250 m) *4*5 -250 to +250 mm
<high-accuracy range> 0.02% of F.S. ( 100 m)
-250 to -50 mm
<long range> 0.1% of F.S. ( 500 m)
-250 to +500 mm (F.S. = 250 mm)
Repeatability *3
2 m
Sampling time
20/50/100/200/500/1000 s (Selectable from 6 levels)
LED display
Near the centre of the measurement: Green lights

Within the measurement area: Orange lights
Outside the measurement area: Orange flashing
0.01% of F.S./C (F.S.= 100 mm)
Enclosure rating
Ambient light
Ambient temperature
0 to 50C
Relative humidity
Vibrations resistance
10 to 55 Hz, double amplitude 1.5 mm; two hours in each direction of X, Y, and Z
Material
Weight (including the cable)
*1 The value is obtained by measuring KEYENCEs standard target (ceramic).
<LK-G407/G402>
When the sampling rate is 20 s, the value becomes -70 mm (NEAR side) to -100 mm (NEAR side) for diffuse reflection.
When the sampling rate is 20 s, the value becomes -70 mm (NEAR side) to -99 mm (NEAR side) for specular reflection.
<LK-G507/G502>
*2 The value is obtained by measuring KEYENCEs standard target (ceramic) with the Standard mode.
*3 The value is obtained by measuring KEYENCEs standard (SUS) with 4096 times of averaging at the reference distance.
*4 All are calculated at F.S. = (250 mm).
*5 High accuracy range and long range refer to the linearity when those ranges are used.
20
0.01% of F.S./C (F.S.= 250 mm)

IP67 (IEC60529)
Aluminium die-cast
Approx. 380 g
LK-G3000 Series
LK-G5000 Series
Controller
Type
All-in-one model
Model
LK-G3001V
LK-G3001/LK-GD500
PNP
LK-G3001PV
LK-G3001P/LK-GD500
All LK-G sensor heads are compatible
Number of connectable sensors
Maximum of 2 units
0.01 m
Display range
9999.99 mm to 9999.99 m (Selectable from six levels)

10 times/sec
10 V x 2 outputs, output impedance: 100
4 to 20 mA x 2 outputs, maximum load resistance: 350
Timing/Reset/Auto-zero input
For OUT1, non-voltage or voltage input *3
Laser remote interlock input
Non-voltage input *3
Comparator output
For OUT1, NPN or PNP open-collector output *2
Alarm output
For OUT1, NPN or PNP open-collector output *3 (N.C.)
Timing/Reset/Auto-zero input
For OUT2, non-voltage or voltage input *3
Program switching input
Non-voltage or voltage input *3 x 3 inputs
Laser-Off input
For Head A/Head B, non-voltage or voltage input *3
Comparator output
For OUT2, NPN or PNP open-collector output *2
Alarm output
For OUT2, NPN or PNP open-collector output *2(N.C.)
Binary output
Measured data output (21 bits), OUT1/OUT2 selectable, NPN or PNP open-collector output *2
Strobe output
NPN or PNP open-collector output *2
Binary selector output
NPN or PNP open-collector output *2
Binary selector input
LJ-G Series
Expansion connector
LJ-V7000 Series
Terminal block
Refresh rate
Binary
LK-G3000 Series
Head compatibility
Display
Separate monitor model *1
NPN
Non-voltage or voltage input *3
RS-232C interface
Measured data output and control input/output (Maximum baud rate: 115200 bps, selectable)
USB interface
In conformity with USB Revision 2.0 Full speed (USB1.1 compatible)
Major functions
24 VDC10%, Ripple: 10% (P to P) or less
Current consumption
500 mA or less with 1 head/600 mA or less with 2 heads
Ambient temperature
SI-F1000 Series
2 OUT simultaneous measurement, Operation, Averaging, Filter, Calibration, Measurement, AUTO ZERO,
Sampling frequency setting, Mutual interference prevention, Data storage, 8-program memory, ECO mode,
ABLE setting, Target setting, ABLE tuning, Selection of measurement surface of transparent target,
Statistics processing, Connection of setting support software, Selectable head-mounting, etc.
0 to 50C
Relative humidity
Weight
Approx. 480 g (LK-G3001V/G3001PV), Approx. 370 g (LK-G3001/G3001P), Approx. 60 g (LK-GD500)
SI-F80R Series
*1 LK-G3001(P) can be operated singly. The measured value display and setting modifications can be performed on the display panel (LK-GD500) or via the setting support software (LK-H1W).
*2 The rating of the NPN open-collector: 50 mA max. (40 V max.), residual voltage of 0.5 V max. The rating of the PNP open collector: 50 mA max. (30 V max.), residual voltage of 0.5 V max.
*3 (NPN model) The rating of non-voltage input: 1 V or less ON voltage, 0.6 mA or less OFF current. (PNP model) The rating of voltage input: 10.2 V or more ON voltage (26.4 V max.) 0.6 mA or less OFF current.
Hardware environment
Item
CPU
Supported OS
Memory capacity
Display
Hard disk space
Interface*4
LT-9000 Series
Hardware requirements
Pentium III, 400 MHz or higher
Windows 7*1/Windows Vista*2
Windows XP*3/Windows 2000 Professional
64 Mbytes or more
800 x 600 pixels, 256 colours or more
10 Mbytes or more
RS-232C (serial port) or
USB2.0/1.1*5 must be installed.
*1 Home Premium, Professional and Ultimate editions are supported.

*2 Ultimate, Business, Home Premium, Home Basic editions are supported. For Windows Vista, Ver. 1.5 and later versions are supported.
*3 Professional and Home edition are supported.
*4 Select one for communication. Multiple interfaces cannot be used for communication at the same time.
*5 Operations are not guaranteed when connected through a USB hub. Use under an environment that exceeds the recommended environment of the your OS.
Windows is a registered trademark of Microsoft Corporation of America.
Pentium is a registered trademark of Intel Corporation.
LS-9000 Series
Sensor head-to-controller cable

Model
Cable length
Weight
LK-GC5
LK-GC10
LK-GC20
2m
5m
10 m
20 m
LK-GC30
30 m
Approx. 200 g
Approx. 400 g
Approx. 750 g
Approx. 1400 g
Approx. 2000 g
OP-51654
OP-51655
OP-51656
0.3 m
3m
10 m
LS-7000 Series
LK-GC2
Display panel cable

Model
Cable length
TM-3000 Series
21
LK-G3000 Series
Dimensions
Unit: mm
Sensor heads
14
14
LK-G08
LK-G10/G15
55
55
500
500
7
32
28
54
45
41
26.3
22.8
2-4.4
Mounting hole
3-4.4
(Mounting hole)
51.2
71.7
108
100
24
16
7.4
35 31 27
15
10
11
9 to 11
75
7.2 to 8.8
11.5
27
22
31.5
7 17
10
14
LK-G32/G37
LK-G82/G87
Diffused reflection type mounting
55
55
2-4.5
500
25
Mounting hole
76
7
500
2-4.5
Mounting hole
26
85
14
0.6
67
36
95
25
76 67
40
25 to 35
25
65 to 95
13.5
13
13.5
LK-G152/G157
18
LK-G402/G407/G502/G507
Data in ( ) applies to LK-G407/G402

14
14
55
55
4
500
33.3
20.2
2-4.4
500
82.2
108
Mounting hole
20
0.7
76.2
68
85
4.2
18
8.2
4.5
2 - 4.4
mounting hole
76
8.2
19.2
10.2
110 to 190
17
22
36.2
250 to 1000
(300 to 500)
LK-G3000 Series
LK-G5000 Series
Unit: mm
Controllers
LK-G3001V/LK-G3001PV
62
LK-G3001/LK-G3001P
62
(65)
117
95
(65)
LK-G3000 Series
DIN-rail
mounting position
124
124
35.9
LJ-V7000 Series
66.1
43
43
9.5
9.5
13.5
4-M4 screws,
70
Depth: 6
70
LJ-G Series
33
4-M4 screws,
Depth: 6
SI-F1000 Series
Cable between the head and controller

LK-GC2/LK-GC5/LK-GC10/LK-GC20/LK-GC30
7
Cable length
(2 m, 5 m, 10 m, 20 m, 30 m)
33
14
55
26
SI-F80R Series
11.5
LT-9000 Series
Display panel
Panel cutout dimensions
LK-GD500
62
min.
Panel thickness
0.5 to 5
62
46
13
Panel-mounting ring
91
74.5
80
100
min.
45
LS-9000 Series
75
+0.6
0
+0.6
0
LS-7000 Series
8.5
25
TM-3000 Series
23
LJ-V7000 Series
High-speed 2D/3D Laser Scanner
LJ-V7000 Series
Features
An emphasis on inline multi-point measurement
The worlds fastest at 64,000 profiles/sec.
Blue laser optical system

measure
240 times greater than conventional devices
64,000 profiles/sec. sampling 12,800,000 points/sec.
Worlds fastest
The LJ-V7000 Series has achieved the worlds fastest sampling speed.
Other devices within the 2D laser measuring device market cannot even
come close.
It can measure the shapes of products running on a line or through
equipment at ultra high speeds, with high-resolution and without missing
an item. As an example, it can measure targets moving at 6.4 m/s with
a pitch of 0.1 mm. The LJ-V7000 Series does not allow the passing of
abnormal or defective areas.
64 times the dynamic range of conventional devices
Overwhelming workpiece response capabilities and detection stability
Industrys greatest
Normally, detection stability is inversely proportional to speed. However,

the LJ-V7000 Series has achieved the improvements in both speed and
detection stability. Shapes are accurately measured even in cases where
black surfaces or inclines with low reflectivity and metallic surfaces with
high reflectivity are mixed together under the same optical axis.
24
LJ-V7000 Series
LK-G5000 Series
Applications
LK-G3000 Series
loose seals and perform a variety

of measurements. High-speed
measurement is possible, and in
addition to bearings, the completion
time to inspect shapes for rotating
objects is also greatly improved.
Welding grooves and bead shape

are measured. Can be used on site
without worry due to its strong IP67
structure, shock resistance, and
high-flex cable.
Measuring the contour of

steel sheets
The profile of steel sheets moving
at high-speeds are measured.
Because it is possible to measure
at speeds of up to 64 kHz, you
can perform high-definition
measurement at fine pitches.
LJ-V7000 Series
Measuring loose bearing seals Measuring welding grooves

and bead shapes
Bearings are rotated to detect
Measuring the shapes of

projections and depressions on
extrusion moulded products
LJ-G Series
Measurement is performed to
determine if the shapes of moulded
parts that are extruded at high
speeds are correct or not. Various
targets can be supported, including
rubber, metal, ceramics, concrete,
and food products.
Lineup
High-accuracyHigh-accuracy
LJ-V7060 LJ-V7060
Middle range Middle range

LJ-V7080 LJ-V7080
Long range Long range

LJ-V7200 LJ-V7200
Ultra-long range
Ultra-long range
LJ-V7300 LJ-V7300
(mm)
(mm)
(mm)
(mm)
(mm)
(mm)
(mm)
(mm)
100
100
100
100
450
450
450
450
450
450
50
50
50
400
400
400
400
400
400
350
350
350
350
350
300
300
300
300
300
155 mm
250
250
250
250
250
200
200
200
200
200
17.4 mm
17.4 mmWidth: 6.5 mm
20 mm
20 mm
0
22.6 mm
22.6 mmWidth: 7 mm
Width: 7.5
mm
Measurement rangeMeasurement
range
20 2.6 mm
20 2.6 mm
mm
52 mm
Width: 6.5 52
mm
Width13.5 mm
60 mm
60 mm
0 7 mm
0
Width15 mm
Width:
68 mm
68 mm
Width15 mm
Width: 7.5 Measurement
mm
rangeMeasurement range
60 8 mm
60 8 mm
Width13.5 mm
35015 mm
Width
Width15 mm
20 2.6 Z-axis
mm 20 2.6Measurement
mm
Z-axis
60 8 mm
Z-axis30060 8 mm
Measurement Z-axis
Measurement
Measurement
range
range 7 mm X-axis 7 mm range
range 15 mm X-axis 15 mm
X-axis
X-axis
Repeatability
0.2 m
0.2 mRepeatability
Z-axis
Repeatability Z-axis
X-axis 2.5 m X-axis 2.5 m
0.4 m
0.4 m
Z-axis
Repeatability Z-axis250
X-axis 5 m X-axis 5 m
Ultra high-accuracy
Ultra
specular
high-accuracy
reflectionspecular reflection
High-accuracy specular
High-accuracy
reflection
specular 200
reflection
LJ-V7020K LJ-V7020K
LJ-V7060K LJ-V7060K
(mm)
(mm)
(mm)
(mm)
150
150
150
150
150
150
300 mm
100
100
100
100
100
100
100
100
152 mm
100
100
50
50
50
50
50
50
50
57 mm
Width25 mm
Width25 mm
80 mm
80 mm
47 mm
21.9 mm
21.9Width:
mm 6.5 mm
Width: 6.5 mm47 mm
Width32 mm
Width32 mm
Width8 mm
54.6Width
mm8 mm
24.2 mm 0
24.2Width:
mm 7 mm
Width:07 mm 54.6 mm 0
103 mm 0
103 mm
014 mm
Width
62.2Width
mm14 mm
Width39 mm
Width39 mm
26.5 mm
26.5Width:
mm 7.5 mm
Width: 7.5 mm62.2 mm
Width8 mm
Width8 mm
Measurement
range
Measurement
range
Measurement
range
Measurement
range
Measurement rangeMeasurement range
54.6 7.6 mm
54.6 7.6 mm
80 23 mm
80 23 mm
24.2 2.3 mm
24.2 2.3 mm
Z-axis
80 23 mm
Z-axis 80 23 mm
24.2 2.3Z-axis
mm
24.2 2.3
mm
Z-axis
54.6 7.6Z-axis
mm
54.6 7.6
mm
Measurement
Measurement
Measurement Z-axis
Measurement
Measurement
Measurement
range 32 mm X-axis 32 mm
range
X-axis
X-axis
X-axis
Repeatability
Z-axis 0.2 m Z-axis 0.2 m

Repeatability
Repeatability
X-axis 2.5 m X-axis 2.5 m
Z-axis 0.4 m Z-axis 0.4 m Repeatability

Repeatability
Controller
LJ-V7001(P)
Monitor
Controller
LJ-V7001(P)
Controller variation
Controller variation
LJ-V7001
NPN output type NPN
output type LJ-V7001
Display output
unit
LJ-VM100
Monitor
200 mm
Width62 mm
50
Width62 mm
248 mm 0
Measurement
range
200 48 mm
248 mm
Width73 mm
Measurement
range
200 48 mm
0
445 mm 0
Width73 mm Measurement
range
300 145 mm
300 mm
Width180 mm
Width180 mm
50
445 mm
Width240 mm
Measurement
range
300 145 mm
Width240 mm
200 48 Z-axis
mm
200 48Measurement
mm
Z-axis
300 145Z-axis
mm 300 145 mm
Measurement Z-axis
Measurement
Measurement
range
range 62 mm X-axis 62 mmrange
range 180 mmX-axis 180 mm
X-axis
X-axis
Repeatability
1 m
1 m Repeatability Z-axis
5 m
5 m
Z-axis
Cable connector
Cable connector
Display
output
Touch
panel monitor
Touch panel monitor
unit CA-MP120T
CA-MP120T
LJ-VM100
Head connection extension

Head connection
cable extension
Touch panel
cablemonitorTouch
cablepanel monitor cable
Head connection cable
CB-B5E
5 m
/ CB-B10E
CB-B5E
10
5 m
/ CB-B10E
OP-87258
10 m
3 mOP-87258
3 m
CB-B3
3 m
/ CB-B10
CB-B3
m
/ CB-B10
103m
10
m
CB-B20E
20 mCB-B20E
20 m OP-87259
10 m
OP-87259
10 m
Specialised monitor
Specialised monitor
stand TM
stand
EtherNet/IP
OP-87262
unitOP-87262
CB-EP100
RS-232C
D-sub9 pin connector
Display monitor connection
Display monitor
cable connection
cable cable RS-232C cable D-sub9 pin connector
OP-96368
2.5 m
OP-96368
2.5 m
OP-26401
OP-26401
OP-66842
3 m
/ OP-66842
310m
/ OP-87055
OP-87055
m
10 m
LS-7000 Series
Controller Controller
0.5 m
0.5 m
Z-axis
Width51 mm
200 mm 50
Width110 mm
LS-9000 Series
57 mm
152 mm
Width51 mm
155 mm
Width110 mm
LT-9000 Series
(mm)
SI-F80R Series
(mm)
50
SI-F1000 Series
Ultra high-accuracy
Ultra high-accuracy
LJ-V7020 LJ-V7020
LJ-V7001P
PNP output type PNP
output type LJ-V7001P
PROFINET
unit
CB-PN100
PROFINET
unit
CB-PN100
25
TM-3000 Series
Settings monitor Settings

USB cable
monitor USB
cable
Console
Console
software
software
(LJ-H3 accessory)(LJ-H3
accessory) OP-87504 EtherNet/IPTM
OP-87504
LJ-H3
LJ-H3
OP-66844
OP-66844
unit
CB-EP100
LJ-V7000 Series
Blue laser optical system Forms images of profiles with ultra-stability and high-accuracy
Worlds first
The LJ-V7000 Series is the first 2D laser displacement sensor in the world to adopt a blue laser. A
sharp line beam is formed on the light-receiving element by focusing a short wavelength 405 nm
laser to its maximum limit with a 2D Ernostar lens. This generates a stabilised high-precision profile.
Also, the received light density for the laser has been increased to successfully secure a greater
level of received light intensity. This achieves ultra-stable and highly accurate measurement with all
types of targets that are typically difficult to detect.
Red laser (conventional)
Blue laser (LJ-V)
With a conventional red laser, the

beam that formed the image is thick,
resulting in the generation of variation
in the profile.
With a blue laser, the image forming

beam becomes sharp to enable
the measurement of shapes with
excellent accuracy.
HSE3*-CMOS Can perform stable measurement of any target even at ultra-high-speeds
Worlds greatest
The LJ-V7000 Series is equipped with the HSE3-CMOS. In addition to improved speed, the dynamic
range has been further powered up over the established and conventional E3-CMOS. Even with the
extremely short exposure time of 64 kHz (15.6 s) it has achieved sensitivity that allows it to reliably
measure a range of surfaces from black (small amount of reflection) surfaces to those with lustre
(large amount of reflection) as well a wide dynamic range.
* HS=High Speed E3 =Enhanced Eye Emulation
Measurement is impossible due

to insufficient light intensity.
Could not be measured at all.
All ranges could be measured.
The exposure time is short, so

inclines could not be measured.
All ranges could be measured.
Even though the exposure time

is short, all ranges could be
measured without issue.
CMOS
(General
displacement
metre)
300x
Dynamic range
When using high-speed sampling
Dynamic range
When using low-speed sampling
64x
E3-CMOS
(LJ-G)
Reflectivity and light intensity in the

width direction will change greatly
depending on the shape, colour,
material, or sampling speed (exposure
time) of the target.
HSE3-CMOS
(LJ-V)
GP*64-Processor Achieves 64 kHz ultra-high-speed measurement

We have developed a custom IC that can perform ultra-high-speed pipeline processing that in
addition to reading CMOS image capture data and performing high-resolution subpixel processing,
also performs high-precision linearisation and data output. This allows for the measurement of
objects moving at high-speeds with room to spare.
* G=Generating P=Profiles
CMOS image capture data Reading (1)

reading
Reading (2)
High-resolution
subpixel processing
Subpixel (1)
High-accuracy
linearisation processing
Linearisation (1)
Data output
linearisation (2)
Data output (1)

64 kHz
26
Subpixel (2)
64 kHz
LJ-V7000 Series
LK-G5000 Series
74 types of measurement modes

16-point complete simultaneous measurement
The industrys greatest variety
With 13 types of measurement details and 7 types of measurement target specifications, this single
device can handle a total of 74 types of measurements. This single device achieves the measurement
of a wide variety of target and responds to customer demands without missing a beat.
Types of measurements
LK-G3000 Series
Types of measurement targets for each measurement
LJ-V7000 Series
LJ-G Series
Any 16 points can be measured simultaneously with a measurement mode that has been selected
from the 74 types that are available. Simultaneously completes measurements and inspections that
were considered to be a lost cause until now.
Centre position
SI-F1000 Series
Angle
Height
Distance
Height difference
Width
SI-F80R Series
Bottom height/position
Cross-section area
LT-9000 Series
Profile data
LS-9000 Series
Continuous profile data output at a top speed of 64 kHz
Publicly open communications library
Max. 64,000 profiles/sec.
LS-7000 Series
Giga bit Ethernet
Profile data
Height data that has been
linearised at 20 bits for each point
TM-3000 Series
The LJ-V7000 Series has now been equipped with a TOE (TCP/IP off-load
engine) specifically for processing high-speed communication. This achieves
high throughput that does not affect CPU load. With this it is possible to output
64,000 units of profile data at a top speed of 1 second.
Rather than performing measurements in standard measurement mode, the
LJ-V7000 Series is used as a measuring probe and is effective in cases when
you would like to perform measurements using your own original algorithms. The
communications library is also publicly available as standard.
Pixel pitch
27
LJ-V7000 Series
Specifications
Controller
Model
LJ-V7001
LJ-V7001P
No. of connectable sensors

Display
Max. 2 units
0.1 m, 0.00001 mm2, 0.01
Maximum display range
99999.9 mm, 999999 mm2
Non-voltage input
Encoder input
NPN open-collector output, voltage output (5 V/12 V/24 V), and line-driver output all supported
Trigger inputs
Timing 1, 2 input
Auto-zero1, 2 input
Input terminal
Reset 1, 2 input
block
Start measurement/stop input
Non-voltage input
Voltage input
Start storage/stop input

Clear memory input
Laser OFF input
Non-voltage input x 4 inputs

OUT comparator output
Voltage input x 4 inputs

10 V x 2 outputs, Output impedance: 100
NPN open collector output x 12 outputs

(Can freely assign 16 OUTs x 3 stage judgement results)
PNP open collector output x 12 outputs

(Can freely assign 16 OUTs x 3 stage judgement results)
NPN open collector output
PNP open collector output
Strobe output
Output
terminal block Disable trigger output
Memory FULL output
Ready output
Error output
NPN open collector output (N.C.)
PNP open collector output (N.C.)
Ethernet interface
1000BASE-T/100BASE-TX
USB Interface
USB 2.0 high speed compliant (USB 1.1 Full-SPEED compatible)
RS-232C interface
Rating
Measurement data output and control I/O (Can select a baud rate of up to 115,200 bits/s)
Voltage
Includes 24 VDC 10% ripple (P-P)
1.3 A or less when connected to 1 head/ 1.9 A or less when connected to 2 heads
Environmental Operating ambient temperature

resistance
Operating ambient humidity
0 to +50C
Weight
Approx. 1500 g
The rating for NPN open-collector output is up to 50 mA (40 V or less), residual voltage of up to 1 V
The rating for PNP open-collector output is up to 50 mA (30 V or less), residual voltage of up to 1 V
The rating for non-voltage input is up to 1 V for ON voltage and up to 0.6 mA for OFF current
The rating for voltage input is a maximum input voltage of 26.4 V, a minimum ON voltage of 10.8 V, and up to 0.6 mA for OFF current
Display output unit

Model
LJ-VM100
Monitor output
Analogue RGB XGA (1024 x 768)

Touch panel monitor (CA-MP120T), specialised connector included
Voltage
Supplied from the controller
Power consumption
2.5 W or less

resistance
0 to +50C
Weight
Approx. 400 g
LJ-H3 (LJ-Navigator 2) operation system environment

Item
PC Interface
Minimum system requirements

Ethernet
USB*1
USB 2.0 high speed compliant (USB 1.1 Full-SPEED compatible)
Supported OS*2
Windows7 (SP1) (Home Premium, Professional, Ultimate)

Windows Vista (SP2) (Home Basic, Home Premium, Business, Ultimate)
Windows XP (SP3) (Home Edition, Professional Edition)
Supported languages
Japanese, English, German, French, Simplified Chinese, Traditional Chinese
CPU
Core i3 2.3 GHz or higher
Memory capacity
2 GB or more
2D cache memory
2 MB or more
Free space on hard disk
10 GB or more
Display resolution
XGA (1024 x 768) or higher
Weight
Approx. 400 g
*1 Connections through a USB hub are not covered under warranty.

*2 Windows is either registered trademarks or trademarks of Microsoft Corporation in the United States and/or other countries.
28
LJ-V7000 Series
LK-G5000 Series
Sensor Head/communication unit
EtherNet/IPTM unit
PROFINET unit
CB-PN100
Model
IEEE 802.3u*1
Transmission speed
100 Mbps, full duplex (100BASE-TX)
Transmission media
STP or Category 5e or higher UTP
Maximum cable length
100 m
Ethernet
Data I/O communication

Record data communication
Compliant standards
IEEE 802.3 (10BASE-T), IEEE 802.3u (100BASE-TX)
Transmission speed
10 Mbps (10BASE-T), 100 Mbps (100BASE-TX)
Transmission media
STP or Category 3 or higher UTP (10BASE-T),

STP or Category 5 or higher UTP (100BASE-TX)
100 m (Distance between the unit and Ethernet switch)

4 hubs (10BASE-T), 2 hubs (100BASE-TX)
Number of connectable
PROFINET IO controllers
Maximum number of
connectable hubs*1
Supported functions
Cyclic communication (Implicit messaging),

Message communication (Explicit messaging),
Compatible with UCMM and Class 3
Number of connections
64
RPI
0.5 ms to 10000 ms (in 0.5 ms)

6000 pps
Update time
2 ms to 2048 ms
GSDML
Version 2.25
Conformance class
Conformance Class A compliant
Conformance test version
Based on Version 2.2.4
Applicable protocol
LLDP, DCP
EtherNet/IP
TM
24 V 10%
(supplied from the controller unit of the laser scanner)
Tolerable communication
bandwidth for cyclic
communication
Power consumption
0.12 A max.
Message communication
UCMM, Class 3
Weight
Approx. 470 g
Conformance test
Compatible with Version A9
24 VDC, including 10% ripple (P-P)

Power consumption
0.12 A max.

resistance
0 to +50C
Weight
Approx. 470 g
LJ-G Series
*1 A lthough this unit conforms to IEEE 802.3u and can establish 100 Mbps full duplex communication using
AutoNegotiation function, it does not have AutoCrossOver and AutoPolarity functions that are normally required for the
PROFINET IO standard. Select a straight or cross cable according to the Ethernet port of the device to be connected.
LJ-V7000 Series
PROFINET IO
EtherNet/IPTM and displacement sensor-specific

protocols (socket communication)
Compatible network
Compliant standards
Supported functions
CB-EP100
Model
PROFINET IO communication
LK-G3000 Series
Ethernet
Compatible network
*1 The number of connectable hubs is not limited when using a switching hub.
SI-F1000 Series
Sensor head
Model
Mounting conditions
Z-axis (height)
X-axis
(width)
NEAR side
Reference distance
Far side
LJ-V7020*11
LJ-V7060K
Diffuse reflection
Specular reflection
LJ-V7060
LJ-V7080
LJ-V7200
LJ-V7300
Diffuse reflection
24.2 mm
20 mm
54.6 mm
60 mm
80 mm
200 mm
300 mm
2.3 mm
(F.S.=4.6 mm)
2.6 mm
(F.S.=5.2 mm)
7.6 mm
(F.S.=15.2 mm)
8 mm
(F.S.=16 mm)
23 mm
(F.S.=46 mm)
48 mm
(F.S.=96 mm)
145 mm
(F.S.=290 mm)
6.5 mm
6.5 mm
8 mm
13.5mm
25 mm
51mm
110 mm
7 mm
7 mm
14 mm
15 mm
32 mm
62 mm
180 mm
7.5 mm
7.5 mm
8 mm
15 mm
39 mm
73 mm
240 mm
SI-F80R Series
Measurement range
Reference distance
LJ-V7020K*11
Specular reflection
Blue semiconductor laser

Wavelength
405 nm (visible beam)
Laser class
Light source IEC60825-1
FDA(CDRH)
Part 1040.10*1
Class 2M Laser Product*
Output
10 mW
4.8 mW
10 mW

4.8 mW
Approx. 21 mm x 45 m
Z-axis (height)*3
0.2 m
0.4 m
0.5 m
1 m
5 m
X-axis (width)*4
2.5 m
5 m
10 m
20 m
60 m
50 m
100 m
Z-axis (height)*5
Profile
Data interval
X-axis (width)
Approx. 48 mm x 48 m Approx. 90 mm x 85 m Approx. 240 mm x 610 m
0.1% of F.S.
10 m
0.05 to 0.15% of F.S.*6
20 m
300 m
Top speed: 16 s (high-speed mode)

Top speed: 32 s (advanced function mode)
Sampling cycle (trigger interval)*7
0.01% of F.S./C
Enclosure rating*8
LS-9000 Series
IP67 (IEC60529)
Ambient operating illuminance*
Incandescent lamp: 10000 lux max.
Ambient temperature*10
0 to +45C
Operating Ambient humidity
Impact resistance
15G/6 msec
Aluminium
Approx. 410 g
Approx. 450 g
Approx. 400 g
Approx. 550 g
Approx. 1000 g
110
145
0.05% of F.S.
180
TM-3000 Series
*1 T he laser classification for FDA(CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice No. 50.
*2 T his value is from a case in which measurement has been performed with a reference distance with 4096 times of averaging.
*3 T he measurement targets are KEYENCE standard targets. This value is from a case in which the average height of the default setting area has been measured in height mode. All other
settings are default.
*4 T he measurement target is a pin gauge. This value is from a case in which the position of the intersection between the rounded surface of the pin gauge and the edge level has been
measured in position mode. All other settings are default.
*5 T he measurement targets are KEYENCE standard targets. The profile data is from a case in which measurement has been performed with 64 times of smoothing and 8 times of averaging.
All other settings are default.
*6 T he linearity will differ depending on the measurement area. (See the diagram on the right.)
*7 For high-speed mode, when the measurement area is at its minimum, binning is ON, image capture mode is set to standard, and parallel image capture is ON. All other settings are
default. For advanced function mode, when the measurement area is at its minimum, binning is ON and image capture mode is set to standard. All other settings are default.
*8 T his value is from a case in which the sensor head cable (CB-B*) or extension cable (CB-B*E) has been connected.
*9 T his is the illuminance for the light-receiving surface of the sensor head during white paper measurement when light has been shined onto the white paper.
*10 T he sensor head must be mounted on a metal plate for use.
*11 T he double polarisation function cannot be used.
*12 Do not look into the beam directly using any optical instruments (such as eye loupes, magnifiers, microscopes, telescopes, or binoculars).
Viewing the laser output with an optical instrument may pose an eye hazard.
LS-7000 Series
Material
Weight
Class 2M
Laser Product*12
Approx. 14 mm x 35 m
Linearity
Environmental
resistance
LT-9000 Series
Spot size (reference distance)

Repeatability*2
12
0.1% of F.S.
145
240
0.15% of F.S.
29
LJ-V7000 Series
Dimensions
Unit: mm
Sensor head
Ultra high-accuracy specular reflection model
Ultra high-accuracy model
LJ-V7020K
LJ-V7020
4
11
21
96
11
21
20
20
M4
2 x M4
Effective depth: 4.7
42
16
13
111.3
106.6
4.6
2 x M4
M4
42
16
13
(85)
110
81
4
4 x M3
Effective depth: 3
2 x 4.4
Mounting hole
60.5
10
2.3
18.5
2.6
20
2.6
45
24.2
6.5
7
7.5
2 x 4.4
Mounting hole
20
30
25.9
24.2 18.5
2.3
70
71
30
103.3
4 x M3
Effective depth: 3
6.5
7
7.5
Measurement
area
20
4 12 45
2.6
2.6
2.3
Measurement
area
0.95
0.95
2.3
48.3
High-accuracy specular reflection model
High-accuracy model
LJ-V7060K
LJ-V7060
22
11
21
65
11
21
20
20
M4
Depth: 4.2
2 x M4
Depth: 2.8
M4
Depth: 4.2
114.3
83.5
42
13 16
2 x 4.4
Mounting hole
48.6
110
42
16
13
2 x M4
Depth: 2.8
4 x M3
Depth: 3.5
28
4 x M3
Depth: 3.5
80 71
30
104.1
96.7
25
4
12
18.5
11.3
60
18.5
35
13.5
54.6
54.6
8
14
7.6
7.6
Measurement
area
8
8
7.6
7.6
2.4
2.4
52.6
Middle-range model
LJ-V7080
84
11
21
20
2 x M4
Depth: 6
M4
Depth: 2.8
14
42
16
96
4
4 x M3
Depth: 3.5
71
30
(85)
71
62
20
4
18
25
23
23
32
Measurement
area
23
39
12
2 x 4.4
Mounting hole
24
80
80
30
60
23
15
15
Measurement
area
8
8
35
59
(85)
2 x 4.4
Mounting hole
LJ-V7000 Series
LK-G5000 Series
Unit: mm
38
100
38
173
100
16
25
32
LJ-V7200
Ultra-long range model
105
LJ-V7300
11
16
4 x M4
Depth: 2.8
57
25
4 x M3
Depth: 3.5
20
4 x M4
Depth: 2.8
42
13 16
50
(85)
145
4 x M3
Depth: 3.5
32
79
4
12
30
LJ-V7000 Series
30
(85)
3 x 5.4
Mounting hole
20
3 x 4.4
Mounting hole
105
88
LK-G3000 Series
Long range model
77 68
21.2
25
4
18
12
110
300
300
LJ-G Series
Measurement
area
24.2
200
145
145
200
51
180
48
48
62
145
145
SI-F1000 Series
Measurement
area
48
48
73
240
Multi-function controller
Display output unit
EtherNet/IPTM unit
LJ-V7001(P)
LJ-VM100
CB-EP100
88.8
(70)
SI-F80R Series
Controller
153.5
26.3
26.3
178
DIN rail
mounting unit
35.9
35.9
153
83.3
LT-9000 Series
DIN rail
mounting unit
150.6
DIN rail
mounting unit
35.9
153
83.3
83.3
LS-9000 Series
6
2 x M4
Depth: 6
4 x M4
Depth: 6
2 x M4
Depth: 6
13.2
13.2
60
80
80
16.5
16.5
14.4
80
16.5
Head connection extension cable
CB-B3/CB-B10
CB-B5E/CB-B10E/CB-B20E
41
31
55
14
18
14 16.5
51
7.6
Cable length
(5 m, 10 m, 20 m)
55
18
14 16.5
16.5 14
(CB-B cable side)
TM-3000 Series
32
7.6
LS-7000 Series
(Sensor head side)
13
31
LJ-G Series
High-Accuracy
2D Laser Displacement Sensor
LJ-G Series
Features
High-speed sampling
Simultaneous measurement/judgement of up to 8 features
Stable measurement for all targets

measure
8-point simultaneous measurement/judgement

The LJ-G Series provides 8-point simultaneous measurement in various
measuring modes (height, width, height difference, angle, profile, crosssection area, etc.). Desired measuring points can be specified relative to a
profile waveform. Furthermore, the LJ-G Series provides outputs of individual
measured values and upper/lower tolerance comparator outputs.
Measurement menus
Average
Bottom
STEP
ANGLE/
INTERSECTION
Measures the
angle or
intersection of
detected lines.
32
Bottom height
Average height
Gap
Width/Position
Section area
Angle/Intersection
Profile comparison
Position (XZ coordinate)
Measures width/
position with a
specified
condition.
Width
POSITION ADJUSTMENT FUNCTION

After the adjustment, the LJ-G Series can provide
stable measurements though the targets are not
neatly arranged or positioned.
SECTION AREA
Measured point
Determines the
height difference
between a
measured point
and the reference
point.
Peak height
Useful Adjustment Functions

WIDTH/
POSITION
Peak
Measurements
Step
Measuring
range
PROFILE
COMPARISON
Position of
intersection
(XZ coordinate)
Displacement of target
Reference surface
Reference point
Angle
Section area
Measures the area

on the basis of the
reference surface.
Compares the
target profile with
the master profile
to measure the
largest difference.
Master profile
Measurement value
Adjustment
HEIGHT
Measures height in
a specified range.
Best in its class
Since the workpiece is not in the measuring

range, a precise measurement cannot be
carried out.
Measuring
range
The measuring range moves according to

the displacement of the workpiece for
precise measurement.
LJ-G Series
LK-G5000 Series
Applications
LK-G3000 Series
Confirmation of sealant coating profile
Pre-weld position feedback
LJ-G Series
Confirmation of door/hood mounting accuracy
LJ-V7000 Series
Confirmation of PCB mounting height
SI-F1000 Series
SI-F80R Series
Lineup
Sensor head
LJ-G015K
LJ-G015
LJ-G030
LJ-G080
LJ-G200
(mm)
LT-9000 Series
250
200
LS-9000 Series
150
100
152 mm
w: 51 mm
200 mm
w: 62 mm
Measuring range
15 2.3 mm
12.7 mm
15 mm
17.3 mm
w: 6.5 mm
w: 7 mm
w: 7.5 mm
Measuring range
15 2.6 mm
12.4 mm
15 mm
17.6 mm
w: 6.5 mm
w: 7 mm
w: 7.5 mm
Measuring range
30 10 mm
20 mm
30 mm
40 mm
w: 20 mm
w: 22 mm
w: 25 mm
57 mm
w: 25 mm
Measuring
80 mm
range
80 23 mm
w: 32 mm
103 mm
w: 39 mm
LS-7000 Series
50
Measuring
range
200 48 mm
w: 73 mm
248 mm
15 2.3 mm
15 2.6 mm
30 10 mm
80 23 mm
200 48 mm
X-axis (Width)
7 mm
7 mm
22 mm
32 mm
62 mm
Z-axis
repeatability
0.2 m
0.2 m
1 m
1 m
2 m
X-axis
repeatability
2.5 m
2.5 m
5 m
10 m
20 m
TM-3000 Series
Z-axis (Height)
33
LJ-G Series
E3-CMOS providing ultra-wide dynamic range
First in the world
The E3-CMOS provides ultra-wide dynamic range which is approximately 300 times wider than conventional modes. The LJ-G Series enables target
profile measurement and the measurement of different target materials, such as black rubber (low reflected light intensity) and reflective metal (high
reflected light intensity).
* E3-CMOS sensor: Enhanced Eye Emulation CMOS image sensor
Laser light reflection
Profile measurement
Light intensity
Light-receiving
sensitivity range
High
Sensor
head
Conventional
Out of
measurement
Low
Traditional light receiving elements do not
have enough sensitivity to cover the entire
range.
Target object
Light-receiving
sensitivity range
is 300 times larger.
High
The reflected light intensity

changes according to the
shape, colour, and material
of the target.
The edges of the profile are not measured

because the light intensity is far less on the
angled surfaces than the flat surfaces.
E -CMOS
Low
The dynamic range is 300 times larger than
the conventional model and covers the entire
range.
The entire profile is measured.
ASAP (Automatic Sensitivity Adjustment by Pixel)

This function adjusts the sensitivity and laser power of the E3-CMOS to obtain suitable waveform data for each
measurement position that has a different reflectance. The obtained data is merged as a single measurement profile.
Target with an extremely different

reflectance at each position
Sensitivity: Small
Sensitivity: Medium
High capacity memory for saving data
Dynamic range
6000x
Sensitivity: Largest
Measurement profile
Best in its class
High capacity memory is built into the controller. A memory card slot is included to store the production records of mass-produced products.
Handling many product types
Profile saving
The built-in memory can store up to 16 programs. When the memory card
is used, up to 160 programs can be stored to handle various product
types.
For analyzing NG records or production history.
17.221
15.982
Measure
10.121
Measure
16.382
OK
Measure
14.268
OK
Measure
15.393
OK
OUT01
Program setting
Profile saving
Data storage
Internal memory
16
1024 x 2
65536 x 8
CF(1GB)
160
1024 x 300
65536 x 3200
Program01
30.000mm OUT01
Program01
30.000mm OUT01
Program01
30.000mm OUT01
MemoryCard
X : [ 5.000mm/div]
X : [ 10.000mm/div]
[mm]
X : [ 5.000mm/div]
X : [ 10.000mm/div]
-30.000mm
-20.000mm
-30.000mm
-20.000mm
OK
OUT1 GO
OUT2 GO
OUT3 GO
OUT4 GO
OUT5 GO
OUT6 GO
OUT7 GO
OUT8 GO
ALL OUT
-20.000mm
-30.000mm
-20.000mm
34
X : [ 5.000mm/div]
X : [ 10.000mm/div]
[mm]
-30.000mm
OUT1 GO
OUT2 GO
OUT3 GO
OUT4 GO
OUT5 GO
OUT6 GO
OUT7 GO
OUT8 GO
ALL OUT
OUT1 GO
OUT2 GO
OUT3 GO
OUT4 GO
OUT5 GO
OUT6 GO
OUT7 GO
OUT8 GO
ALL OUT
OUT1 GO
OUT2 GO
OUT3 GO
OUT4 GO
OUT5 GO
OUT6 GO
OUT7 GO
OUT8 GO
ALL OUT
MemoryCard
OK
OUT1 GO
OUT2 GO
OUT3 GO
OUT4 GO
OUT5 GO
OUT6 GO
OUT7 GO
OUT8 GO
ALL OUT
Measure
OK
OUT1 GO
OUT2 GO
OUT3 GO
OUT4 GO
OUT5 GO
OUT6 GO
OUT7 GO
OUT8 GO
ALL OUT
Trg interval
5 ms
20.000mm
Trg interval
Process time
5 ms
5 ms
20.000mm
Trg interval
Process time
5 ms
5 ms
20.000mm
Trg interval
Process time
5 ms
5 ms
20.000mm
Trg interval
Process time
5 ms
5 ms
-30.000mm
-20.000mm
20.000mm
Trg interval
5 ms
-30.000mm
-20.000mm
X : [ 5.000mm/div]
X : [ 10.000mm/div]
[mm]
MemoryCard
GO
GO
ZERO
30.000mm
MemoryCard
GO
ZERO
ZERO
X : [ 5.000mm/div]
X : [ 10.000mm/div]
[mm]
[mm]
X : [ 5.000mm/div]
Measure
X : [ 10.000mm/div]
[mm]
MemoryCard
GO
ZERO
GO
MemoryCard
GO
ZERO
30.000mm OUT01
Program01
Handles 160 types
ZERO
30.000mm OUT01
Program01
Program01
20.000mm
Process time
5 ms
Process time
5 ms
1024 profiles
LJ-G Series
Model
LJ-G015K
Type
Reference distance
LJ-G030
LJ-G200
2.3 mm
2.6 mm
30 mm
80 mm
200 mm
10 mm
23 mm
48 mm
Near
6.5 mm
20 mm
25 mm
51 mm
Reference distance
7.0 mm
22 mm
32 mm
62 mm
Far
7.5 mm
25 mm
39 mm
73 mm
LK-G3000 Series
X-axis
(Width)
LJ-G080
Diffuse reflective
15 mm
Z-axis (Height)
Measuring
range
LJ-G015
Specular reflective
LK-G5000 Series
Specifications

Light source
Wavelength
655 nm (Visible light)
Laser Class
Class II Laser Product (FDA (CDRH) PART1040.10), Class 2 Laser Product (IEC 60825-1)
Output
Approx. 40 m x 25 mm
Z-axis (Height) *2
0.2 m
1 m
1 m
2 m
X-axis (Width) *3
2.5 m
5 m
10 m
20 m
0.1% of F.S.
Linearity Z-axis (Height) *2
3.8 ms
Sampling frequency (Trigger interval) *4

Environmental resistance
0.02% of F.S./C
Enclosure rating
IP67 (IEC60529)
Ambient light *5
Ambient temperature
0 to 50C
Relative humidity
LJ-G Series
Vibration
10 to 55 Hz, double amplitude 1.5 mm, two hours in each direction of X, Y, and Z
Material
Weight
LJ-V7000 Series
Repeatability*1
0.95 mW
Aluminium
Approx. 260 g
Approx. 290 g
Approx. 350 g
Approx. 480 g
*1 The value obtained after 64 times averaging at the reference distance.

*2 The target is KEYENCE standard object. (White diffusing material). The value is the average of the widths in the Height mode.
*3 The target is 10 mm pin gauge. The value is the edge in the Position mode after 16 times of the Smoothing.
*4 With initial setting, minimum measuring range, and single smoothing processing
*5 The illumination on the receiver of the sensor head when targeting an illuminated white paper.
SI-F1000 Series
SI-F80R Series
LT-9000 Series
LS-9000 Series
LS-7000 Series
TM-3000 Series
35
LJ-G Series
Controller
Model
LJ-G5001
LJ-G5001P
Compatible
Number of connectable sensors

Display
2 units max.
0.1 m *1, 0.001 mm2, 0.01
99999.9 mm, 999999 mm2, 99999.9

Input
terminal
block
Trigger input
Timing 1 input
Auto-zero 1 input
Reset input
Non-voltage input
For sensor head A, non-voltage input
For sensor head A, voltage input
Non-voltage input
Voltage input

Output
terminal
block
Total judgement output

Error output
Process output
Trigger input enable output
Adjusted error output
Timing 2 input
Auto-zero 2 input
NPN open-collector output (N.C.)
PNP open-collector output (N.C.)
For sensor head A, NPN open-collector output
For sensor head A, PNP open-collector output
Non-voltage input
Voltage input
For sensor head B, non-voltage input
For sensor head B, voltage input
Non-voltage input, 4 inputs
Voltage input, 4 inputs
Memory card save input
Non-voltage input
Voltage input
For sensor head A/B, non-voltage input
For sensor head A/B, voltage input
3-level judgement output: OUT1 to OUT8, total judgement output

Binary output: OUT1 to OUT8 measured data output (21 bits)

Trigger input
Expansion
connector

Laser-Off input
Judgement/Binary output *2
Strobe output
For sensor head B, NPN open-collector output
Analogue RGB monitor output

RS-232C interface
USB interface
In conformity with USB Revision 2.0 HI-SPEED (USB 1.1 Full-SPEED compatible)
Ethernet interface
Memory card
Environmental
resistance
100BASE-TX/10BASE-T
Compatible with NR-M32 (32 MB), GR-M256 (256MB), and NR-M1G (1GB). (with FAT32)
Sensor heads calculation, Profile adjustment, Filter, Smoothing, Averaging,
Position adjustment, OUT name change, Measurement mode selection
(Height, position, gap, width, centre position, section area, intersection, angle, profile comparison, profile tracking),
Scaling, Average, Measurement, Measured value alarm, Tolerance setting, Auto-zero, Storage (data/profile),
Memory card saving, Program memory, Trigger mode change, Mutual interference prevention, Measuring range change,
Calibration, Laser light adjustment, Sampling time setting, Mask, Profile alarm setting, Inclination adjustment, Height adjustment,
Display language switch, Setting support software connection, Trigger pitch/Measuring time display, etc.
Major functions
Ratings
For sensor head B, PNP open-collector output

SVGA (800 x 600 pixels)
24 VDC 10%, Ripple: 10% (P to P) or less
Current consumption
800 mA or less with 1 sensor head/1 A or less with two sensor heads
Ambient temperature
0 to 50C
Relative humidity
Weight
Approx. 1050 g
*1 When LJ-G015 or LJ-G015K is connected only. When other sensor heads are connected, the minimum display unit is 1 m.
*2 Time-sharing output of judgement results or binary measured data.
The rating of the NPN open-collector output: 50 mA max. (30 V max.), residual voltage of 1 V max. The rating of the PNP open-collector output: 50 mA max. (30 V max.), residual voltage of 1 V max.
The rating of the non-voltage input: 1 V or less ON voltage, 0.6 mA or less OFF current (Trigger input terminal: 1 V or less ON voltage, 1.0 mA or less OFF current)
The rating of the voltage input: 26.4 V maximum rating, 10.8 V or less ON voltage, 0.6 mA or less OFF current (Trigger input terminal: 26.4 V maximum rating, 10.8 V or less ON voltage, 1.0 mA or less OFF current)
Hardware environment for the LJ-H1W (LJ-Navigator)

Model
CPU
Supported OS
Memory capacity
Display
Hard disk space
Interface*3
LJ-H1W
Windows 7*1/Windows Vista*2/Windows XP Professional Edition/
Home Edition/Windows 2000 Professional
128 MB or more
XGA (1024 x 768 pixels) or greater, 256 colours or greater
30 MB or more
Includes one of the following:
USB 2.0/1.1*4, Ethernet*5, RS-232C (Serial port)
Windows is a registered trademark of Microsoft Corporation of America.

*2 Ultimate, Business, Home Premium, Home Basic editions are supported. For Windows Vista, Ver. 1.6 and later versions are supported.
*3 Select one for communication. Multiple interfaces cannot be used for communication at the same time.
*4 Operations are not guaranteed when connected through a USB hub.
*5 Operations are not guaranteed when connected through a router or a LAN connection.
36
LJ-G Series
LK-G5000 Series
Dimensions
Unit: mm
Sensor head
14
Ultra high-accuracy specular reflection
Ultra high-accuracy
LJ-G015K
LJ-G015
55
LK-G3000 Series
500
7
82.6
34
2 x 4.4
(mounting hole)
19.3
34
20.3
68
9.5
9.9
22
2 x 4.4
(mounting hole)
0.7
LJ-V7000 Series
48
82.8
43.5
25
70
25
50
19.5
18
20.8
19.5
6.5
15
7
2.3
6.5
2.3
7
1.3
19.5
2.6
2.6
8
7.5
Z-axis measurement range
LJ-G Series
7.5
15
X-axis measurement range
LJ-G030
LJ-G080
14
14
55
55
500
88
2 x 4.4
(mounting hole)
0.7
34
2 x 4.4
(mounting hole)
42
8.9
0.7
62
62
30 4
10
10
45
4
24
2
25
25
23
32
23
39
14
LJ-G200
Controller
55
3 x 4.4
(mounting hole)
0.7
76
27
138
114.5
4.2
132
82.4
DIN rail
mounting
position
68
35.9
153
9
LS-9000 Series
19
LT-9000 Series
LJ-G5001(P)
500
38
80
SI-F80R Series
25
8.9
10
70
19.5
88
23
70
20
22
23
9
SI-F1000 Series
500
7
83.3
65.3
25
200
117
(65)
200
4 x M4
Depth: 6
51
60
LS-7000 Series
48
62
80
48
73
Cable between the sensor head and the controller
LJ-GC2/GC5/GC10/GC20/GC30
Cable length
Weight
33
LJ-GC2
LJ-GC5
LJ-GC10
LJ-GC20
LJ-GC30
2m
5m
10 m
20 m
30 m
Approx. 200 g
Approx. 400 g
Approx. 750 g
Approx. 1400 g
Approx. 2000 g
7
Cable length: 2 m,
5 m, 10 m,
20 m, 30 m
55
TM-3000 Series
Cable between the sensor head and the controller

Model
17
14
26
11.5
37
SI-F1000 Series
Micro-Head Spectral-Interference
Laser Displacement Meter
SI-F1000 Series
Features
Micro-head size of 2 mm
Spectral interference method

measure
Spectral interface method
First in the Industry
Development of a new principle can meet incompatible needs for small size with high accuracy that was previously impossible.
Spectroscopic unit
SI-F01U
Polarization maintaining
optical fibre
Light source (SLD)

Spectroscope
Waveform
analysis
CCD
Displacement data
Interference light
Diffraction
grating
Sensor head
SI-F01
Emitted light
Reference reflection surface
Target
SLD: Super Luminescent Diode
SLD
Interference light
Spectroscopic analysis
Part of the broad wavelength

light emitted from the SLD
is reflected by the heads
reference surface, while the
part that passes the reference
surface is mirror-reflected on
the target and returns into the
head.
The two reflected light beams interfere

with each other. The intensity of
the interference light with a specific
wavelength is determined according
to the distance between the reference
surface and the target. The relative
maximum interference is reached when
the determined distance is an integral
multiple of the wavelength.
Splitting the interference light into

different wavelengths with the
spectroscope produces an optical
intensity distribution for a specific
wavelength. The distance to the
target is obtained by carrying out
waveform analysis on the
distribution.
No heat generation and no noise

Advantages of the optical fibre head structure
The measurement head consists of only optical fibres and lenses, with no electronic parts.
Small size, light weight, and heat resistant
No heat generation
Not influenced by electromagnetic noise
These features greatly reduce the constraints on selecting an

installation area. A micro-head of this type can be used with
a wider range of measurement applications because it can be
installed in places where conventional units cannot.
An exothermic body is one of the error-causing

factors in high-accuracy measurement. The
optical fibre head structure produces no heat
generation in the head section.
The measurement head contains no electrical circuits.

Because of this, it is not influenced by electromagnetic
noise, which is difficult to isolate and remove.
Resolution of 0.25m
High resolution of 0.25m has been realised by the development of new
principles and the application of sophisticated controllers. This resolution
can fully respond to a variety of needs for high accuracy.
38
Head size of 2mm

The simple fibreoptic structure for the
measurement head has allowed KEYENCE
to develop the world's smallest sensor
head without any heat generation problems
associated with compact electronics.
In addition as the sensor head has no
electronic components, it is immune to
electromagnetic noise.
Worlds smallest
Actual Size
SI-F1000 Series
LK-G5000 Series
Applications
LK-G3000 Series
Positioning of high precision stages
LJ-V7000 Series
Measuring the behaviour of critical

components inside an assembled device
Measuring the thickness of glass discs
Lineup
Type
Model
Major technical data
Best suited for measurements

requiring ultra high-accuracy,
compact spaces, or high
temperatures.
Head size
SI-F01
0.05 to 1.1 mm
Linearity
0.3 m
Head size
2 mm
Measurement range
11.3 to 12.35 mm
8 mm
SI-F10
Measurement
range
Resolution
0.25m
11.3 to
12.35 mm
Linearity
0.3 m
Head size
8 mm
Setting distance
80 to 81.1 mm
Head size
12 mm
SI-F80
Measurable thickness
0.05 to 1.1 mm
Resolution
Setting distance
80 mm
Measurement
thickness
0.25 m
Linearity
0.05 to 1.1 mm
0.3 m
Head size
12 mm
Micro-head type
SI-F01
Optional unit
Long distance type
SI-F10
Thickness measurement type

SI-F80
Spectrum unit
SI-F01U3/
SI-F10U3/
SI-F80U3
LT-9000 Series
Sensor head
SI-F80R Series
High accuracy achieved by

targeting thickness measurement.
0.25 m
SI-F1000 Series
Head size
Long Distance Type
Thickness (Gap) Measurement

Type
Resolution
2 mm
Measurement range
Long-distance measurement with

high accuracy.
0.05 to 1.1 mm
LJ-G Series
Micro-Head Type
Measurement range
Head mounting jig (For SI-F01)

OP-84480
LS-9000 Series
(One spectroscopic unit is needed for each

sensor head.)
Controller
Single unit type
SI-F1003V
Separate type
SI-F1003
Expansion controller
SI-FA103
Spectrum unit spacer

OP-84474
LS-7000 Series
Back surface
(Supplied together with the spectroscopic unit)
Cable
Controller-to-sensor head unit
connecting cable
CB-A07/CB-A2/CB-A5/
CB-A10/CB-A20/CB-A30
Software
Controller-to-spectrum unit
extension cable
CB-A5E/CB-A10E
Display-to-controller cord
0.33 m: OP-84428
3 m': OP-51655
10 m: OP-51656
TM-3000 Series
Display
Display panel
SI-FD500
Dedicated PC software "SI-Navigator"

SI-H13
39
SI-F1000 Series
Specifications
Sensor head
Type
Model
Sensor head
Spectrum unit
Measurement range
Micro-head type
Long distance type
SI-F01
SI-F10
SI-F80
SI-F01U3
SI-F10U3
0.05 to 1.1 mm *1
11.3 to 12.35 mm *1
SI-F80U3
0.05 to 1.1 mm *2
(Possible detection distance : 80 to 81.1 mm)
Infrared SLD Central wavelength 820 nm Output 0.6 mW, Class 1 Laser product (IEC60825-1, FDA (CDRH) Part 1040.10 *8 )
Light source
20 m
40 m
20 m
Linearity
0.3 m *4
0.3 m *4
0.3 m *5
Resolution
0.25 m *6
0.25 m *6
0.25 m *7
Beam spot diameter*3
Sampling cycle
200 s
Red semiconductor laser Wavelength 650 nm Output 0.1 mW, Class 1 Laser product (IEC60825-1, FDA (CDRH) Part 1040.10 *8 )
Light source for guide
Target near centre of measurement range: green lights.

Target within measurement range: orange lights.
Target outside measurement range: Flashes orange.
LED display
Temperature
fluctuation
Spectrum unit
0.01% of F.S./C
Enclosure rating Sensor head
IP67
Ambient light
Environment
resistance
Ambient
temperature
Sensor head
Relative
humidity
Sensor head
Vibration
Material
Weight
0 to +85C
Spectrum unit
IP64
0 to +40C
Spectrum unit
Sensor head
Spectrum unit

SUS
Spectrum unit
Sensor head (including cable)
0 to +50C
0 to +35C
Sensor head
Spectrum unit
IP64
Polycarbonate
Approx. 24 g
Approx. 38 g
Approx. 39 g
Approx. 1 kg
*1 Indicates distance from the front of the sensor head. For long distance type sensor heads there is an individual difference of up to 0.2 mm.
*2 The thickness measurement type sensor head displays the measurement range for the distance between plates of glass. Ensure that the measurement target is within the possible detection distance range.
*3 Indicates the minimum beam spot diameter within the measurement range.
*4 This value is obtained when the measurement target is a glass plate with the number of averaging measurements set to 256.
*5 This value is obtained by measuring the gap between two glass plates with the number of averaging measurements set to 256.
*6 This value is obtained by measuring a glass plate surface located at the centre of the measurement range with the number of averaging measurements set to 4,096.
*7 This value is obtained by measuring a 0.3 mm thick glass target within the possible detection distance with the number of averaging measurements set to 4,096.
*8 The laser classification for FDA(CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice No. 50.
40
SI-F1000 Series
LK-G5000 Series
Controller
Type
Model
Main Controller
Single unit type
SI-F1003V
Separate type*2
SI-F1003/SI-FD500

Display
SI-FA103
0.001 m
Display range
999.999 m to 9999.99 mm
(7 settings selectable)
Display cycle
10 times/sec.
N/A
Non-voltage input
TIMING1 input
Non-voltage input 2
RESET1 input
N/A
Auto-zero1 input
Non-voltage input
Laser control input

10 V x 2 outputs,
Output impedance: 100
4 to 20 mA x 2 outputs,
Maximum load resistance: 350

Alarm output
Non-voltage input 2
RESET input
Alarm output

Binary output
Measured value data output (21 bits) OUT selectable

Strobe output

Non-voltage input
Measured data output and control input/output
(Baud rate selectable to 115,200 bps max.)
USB 2.0 high speed compliant
(USB 1.1 Full-SPEED compatible)
USB interface
Ethernet interface
N/A
100Base-TX/10Base-T

24 VDC10% Ripple 10% (P-P) max.

One head connected: 0.6 A or less. Six heads connected: 1.5 A or less.
Relative humidity
Vibration*4
Supplied from the main controller
0 to +50C
Ambient temperature
*3
Weight
SI-F80R Series
12 Out simultaneous measurement

calculation, average, filter, scaling measurement, measured value alarm,
tolerance setting, auto-zero, data storage, light monitor, 8-program memory,
interferometer mode, mask, connection of setting support software, etc.
Major functions
Environment
resistance
N/A
SI-F1000 Series
Binary selection
output
Binary selection
input
RS-232C interface
LJ-G Series
Non-voltage input
Auto-zero input
Power supply
N/A
TIMING input
Comparator/
binary
output
10 V x 1 output,
Output impedance: 100
4 to 20 mA x 1 output,
Maximum load resistance: 350
General comparator output
Expansion
connector
LJ-V7000 Series
Terminal
block
LK-G3000 Series
No. of connectable spectrum units
Expansion controller*1

Approx. 600 g
Approx. 300 g
LT-9000 Series
*1 Up to four expansion controllers can be connected to the main controller.

*2 The SI-F1003 can be used independently. The measured value display and setting change can be done with the display panel (SI-FD500) and setup support software (SI-H3).
*3 When two or more expansion controllers are connected, the ambient temperature is 0 to 40C.
*4 When two or more expansion controllers are connected, the vibration resistance is "10 to 55 Hz, 0.3 mm double amplitude in X, Y, and Z directions, 2 hours respectively".
NPN open-collector output rating: 50 mA max. (40 V max.), Residual voltage: 0.5 V max.
Non-voltage input rating: ON voltage: 1 V max., OFF current: 0.6 mA max.
Part of the input/output circuit of the SI Series is internally common. Be careful that no potential difference is generated between the internally common terminals due to the potential difference between the cables/external
devices. For details, refer to "Precautions on wiring".
Operating environment required to use SI-H13 (SI-Navigator 3)

Minimum system requirements
CPU
Pentium III, 1 GHz or higher (1.7 GHz or higher is recommended)
OS
Windows 7*1/Windows Vista*2/ Windows XP*3/

Windows 2000 Professional*4
Memory capacity
256 MB or higher (1 GB or more is recommended)
Display resolution
1024 x 768 pixels, 24-bit full colour or higher
Free hard disk space

Interface
LS-9000 Series
Item
1 GB or larger
LS-7000 Series
One of the following interfaces is required.

- USB: Revision 2.0, high-speed (full speed in USB1.1 compatible mode)*5
- LAN: 100BASE-TX or 10BASE-T*6
- RS-232C (serial port)

The other system requirements must meet those recommended for your OS.
*2 Ultimate, Business, Home Premium and Home Basic editions are supported.
*3 Professional SP2 and later versions and Home Edition SP2 and later versions are supported.
*4 SP4 and later versions are supported.
*5 Connections via a USB hub are not supported.
*6 Connections via an in-house LAN or a router are not supported. Direct or local connections must be used.
* Windows is a registered trademark of Microsoft Corporation.
* Pentium is a registered trademark of Intel Corporation.
TM-3000 Series
41
SI-F1000 Series
Dimensions
Unit: mm
Sensor head
Long distance type
Micro-head type
SI-F10
SI-F01
11
0.05 to 1.1
(Measurement range)
11.3 to 12.35
(Measurement range)
+1000
0
11000
42.3
11000
25
(10)
+1000
0
(19.2)
25
8.3
8.3
0.9
(Optical fibre)
0
2 -0.008
0.9
(Optical fibre)
8 -0.01
-0.05
9
1.250.01

SI-F80
0 to 1.1
(Detection range)
21
80
28
(19)
11000
+1000
0
25
0.05 to 1.1
(Measurement range)
8.3
0.9
(Optical fibre)
8-0.01
12 -0.01
-0.05
-0.05
Head mounting jig (For SI-F01)

OP-84480
M2 Set screw
10.5
2 x 2.5
Spot facing: 5, Depth: 2.5
3.5
6
6
12
C1 3
3.1 max.
SUS304
Spectrum unit
SI-F01U3/SI-F10U3/SI-F80U3
(With decorative panel)
127.5
65
(Without decorative panel)

65
(63)
(63)
105
DIN rail
124
124
35.9
62.1
6
47
47
9
9
42
34.5
79.5
4xM4
Depth: 6
13.5
79.5
4xM4
Depth: 6
SI-F1000 Series
LK-G5000 Series
Unit: mm
Controller
Single unit type
Separate type
SI-F1003V
SI-F1003
(65)
65
105.5
LK-G3000 Series
(65)
128
65
DIN rail
124
124
35.9
62.1
LJ-V7000 Series
47
47
9
34.5
79.5
4xM4
Depth: 6
14
4xM4
Depth: 6
79.5
LJ-G Series
Expansion controller
SI-FA103
26.3
SI-F1000 Series
(With decorative panel)
(Without decorative panel)
128
26.3
(65)
105.5
(65)
DIN rail
124
124
SI-F80R Series
35.9
62.1
M4
Depth: 6
13.5
14
LT-9000 Series
114
M4
Depth: 6
13.5
Additional accessories
Display panel
Controller-to-spectroscopic unit connection cable
SI-FD500
LS-9000 Series
Display
CB-A07/CB-A2/CB-A5/CB-A10/
CB-A20/CB-A30
62
46
Panel thickness:
0.5 to 5 mm
62min.
13 Display panel
attachment ring
33
75
74.5
91
80
100min.
+0.6
0
25
14
55
26
11.5
7
55
TM-3000 Series
45
+0.6
0
14
8.5
LS-7000 Series
7
Cable length
(0.7 m, 2 m, 5 m, 10 m, 20 m, 30 m)
Panel cutout
14
55
43
SI-F80R Series
Spectral-Interference
Wafer Thickness Meter
SI-F80R Series
Features
Sampling speed of 5 kHz
Working distance 80 mm

measure
Accurately measure wafer thickness
Not influenced by wafer patterns

Variations from wafer surface patterns and measurement alarms can be
held to a minimum by decreasing the spot beam diameter and surface
aberrations inside the beam spot.
The SI-F80R Series employs a nearinfrared SLD that can penetrate

through Si, GaAs, SiC, InP, a-Si,
and other semiconductors. It can
accurately measure wafer thickness,
even when covered with BG
(backgrind) tape.
Patterned Si wafer thickness profile data
[m]
200
195
Near-infrared light
190
185
Setting distance
80mm
180
175
p-p 1 to 2 m
170
Semiconductor wafer
BG tape
165
Measurement thickness
-150
-100
-50
50
100
Measurement position (mm)
150
160
Min. beam spot

diameter
25 m
Surface pattern
Simple, accurate measurements

in-process
The sensor can easily make
measurements just by being
positioned 80 mm from wafers.
Non-contact, so wafers are not
damaged.
The sensor can directly
measure just wafer thickness,
so measurements are not
influenced by BG tape
thickness.
44
Constant monitoring in process

With a small head that can
be installed 80 mm from the
wafer, wafer thickness can be
constantly monitored inside
equipment while polishing.
Patterned wafer
BG tape
SI-F80R Series
Components
LK-G5000 Series
Lineup
External device
Sensor head
Wafer thickness
measurement type
SI-F80R
Spectrum unit
SI-F80RU3
IR sensor card
LK-G3000 Series
Specifications
Model
Wafer thickness measurement type

Sensor head
SI-F80R
Spectrum unit
SI-F80RU3
Measurement range *1
10 to 310 m (when n=3.5)
Possible detection distance
80 to 81.1 mm
Infrared SLD Output 0.6 mW, Class 1 Laser Product (IEC60825-1, FDA (CDRH) Part 1040.10 *5 )
Light source
25 m
Beam spot diameter *2
0.1 m (when n=3.5)
Linearity *3
200 s
Target near centre of measurement range: green lights. Target within measurement range: orange lights.
Target outside measurement range: flashes orange.
LED display
Spectrum unit
Enclosure rating
0.01% of F.S./C
Sensor head
IP64
Ambient light
Relative humidity
Vibration
Sensor head
0 to +50C
Spectrum unit
0 to +35C
Sensor head
Spectrum unit
Sensor head
Spectrum unit
Sensor head
SUS
Spectrum unit
Polycarbonate
Sensor head (including cable)
SI-F80R Series
Weight
SI-F1000 Series
Ambient temperature
Material
LJ-G Series
0.25 m
Resolution *4
Sampling cycle
Temperature
fluctuation
LJ-V7000 Series
Type
Approx. 70 g
Spectrum unit
Approx. 1.2 kg
The sensor head and spectrum unit are calibrated as a pair. They are not interchangeable.
*1 Indicates the thickness measurement range when the refractive index is 3.5. (The thickness measurement range is 35 to 1100 m when the refractive index is 1.)
*2 Indicates the minimum beam spot diameter within the measurement range.
*3 This value is obtained by measuring the gap between two glass plates with the number of averaging measurements set to 256, converted to a refractive index of 3.5.
*4 This value is obtained by measuring a 0.3 mm thick glass target within the possible detection distance with the number of averaging measurements set to 4096.
*5 The laser classification for FDA (CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice No. 50.
SI-F80R
LT-9000 Series
Dimensions
Unit: mm
0 to 1.1
Detection range
21
80
28
18
(26)
11000 +1000
0
25
0.05 to 1.1
Measurement range
8.3
-0.01
-0.05
-0.01
-0.05
7.50.1
LS-9000 Series
12
2.0
(Optical fibre)
SI-F80RU3
127.5
91.3
(63)
91.3
105
(63)
LS-7000 Series
DIN rail mount

124
124
35.9
62.1
TM-3000 Series
34.5
79.5
22.5
47
47
22.5
5xM4
Depth: 6
13.5
79.5
9
5xM4
Depth: 6
45
LT-9000 Series
Surface Scanning Laser

Confocal Displacement Meter
LT-9000 Series
Features
recise 2 m diameter beam spot
P
0.3 m resolution
X and Z axis scanning

measure
The surface scanning method allows

measurements of all types of targets
Profile measurement
The surface profile can be traced accurately using the oscillation unit.
A tuning fork unit and oscillation unit are combined to create a surface
scanning laser. This results in advanced displacement and profile
measurements that are unaffected by target colour or angle.
Z-axis scanning
RUN PRG0
PROFILE
OUT1:A1
+75.00 GO
UP LIMIT
+40.00
LO LIMIT
-40.00
X-axis scanning
POSITION
A1:DIFF
A2:AVE
Vertical
The surface profile can be traced using the double-scanning method.

The height difference between the two points can be measured.
Horizontal
The coaxial optical system improves
measurement performance.
Wide scanning enables various

measurements.
Transparent object thickness measurement

The surface condition and thickness of transparent objects can be
measured stably by utilising the confocal principle.
High angular
characteristics
Measurement of
film thickness
Profile
measurement
Angular
measurement
OUT1: +100.00
OUT2: +40.00
The first
surface
The second
surface
Angle measurement
An angle can be measured in
increments of 0.01 degrees
based on the measurement
values of two or more points
obtained by scanning the laser
beam spot.
46
The third
surface
The thickness of transparent

disks can be measured. In
addition, the slant correction
function enables more reliable
measurements.
[+1P
RUN PRG0
DISTANCE
+2P]
N
E
A
R
OUT1
THICK
PKx :100
PKx :105
PROG : 80
Multi-surface measurement function

The first surface
The second surface
The third surface
The fourth surface
The peak value of light intensity of

up to four target surfaces can be
detected with one measurement unit.
The selected measurement surface
can be measured with high accuracy.
LT-9000 Series
OUT1:A1
+75.00 GO
RUN PRG0
PROFILE
OUT1: +100.00
OUT2: +40.00
UP LIMIT
+40.00
[+1P
The first
surface
The second
surface
LO LIMIT
-40.00
POSITION
Measuring the thickness of an optical disc
The profile of lead-free solder can be measured for detecting

abnormalities such as cracks, bridges, and insufficient soldering.
The intermediate layer of an optical disc can be measured.
N
E
A
R
OUT1
THICK
PKx :100
PKx :105
PROG : 80
LJ-V7000 Series
Measuring the profile of solder paste on a PWB
RUN PRG0
DISTANCE
+2P]
LK-G3000 Series
The third
surface
A1:DIFF
A2:AVE
LK-G5000 Series
Applications
LJ-G Series
Measuring the cross-sectional area of

liquid sealing material
The inclination of a CCD surface against the

rear surface of the glass can be measured
accurately using relative angle measurement.
The profile and cross-sectional area of

sealing material applied for bonding glass
substrates.
Measuring the height of bond wire
SI-F1000 Series
Measuring the parallelism of a CCD

and cover glass
The height of narrow pitch bonding wire can

be measured reliably.
SI-F80R Series
Lineup (Measuring unit)

Type
Long-range
LT-9011M
LT-9031M
Measurement range
0.3 mm
1 mm
Reference distance
6 mm
30 mm
0 to 1100 m (6 steps)
0 to 560 m (6 steps)
1 to 10 m (4 steps)
1 to 8 m (4 steps)
LT-9000 Series
Model
High-accuracy
Scan width
Interval
0.3 m
0.3 m
0.5% of F.S.
0.3% of F.S.
LS-7000 Series
Resolution
Linearity
LS-9000 Series
Appearance
TM-3000 Series
47
LT-9000 Series
Specifications
Controller
Model
Controller
LT-9501H/LT-9001H
LT-9501HSO(5654)/LT-9001HSO(5655)
LT-9011M/LT-9011
LT-9031M/LT-9031
Measuring unit
Measuring unit compatibility
Measuring units are interchangeable without factory recalibration.

Display range
Display
Microscope function
0.1 m*5 , 1 m2, 0.01
0.1 m*5
9999.99 m, 999999 m2, 9999.99
9999.99 m
Available (LT-9501H/LT-9011M only)
Analogue output
Terminal
block
Timing input/Reset input/Auto-zero input
Non-voltage input
24 VDC, 1 A
Monitor dedicated power supply*2

3-step limits output
Limits mode*3
Binary mode*3
Control I/O
For OUT1 and OUT2, and NPN open collector output
Binary output
Measured data output (21 bits), OUT1/OUT2/PROFILE selectable

Strobe output
Binary selection output
Binary selection input
Non-voltage input
Stability output
Laser remote input
Non-voltage input
Program change input
RS-232C interface
Measured data output and control I/O (Selectable up to baud rate 115200 bps.)
Video output
NTSC compliant (PIN connector)

Distance measurement, Transparent object thickness
Distance measurement, Transparent object thickness
measurement, Angle measurement, Relative angle measurement,
measurement, Surface selection, Dark-out, Mask, Trend graph
Surface selection, Dark-out, Mask, Trend graph display, and Scan
display, and Scan width/interval change
width/interval change
Area selection (Average, Maximum, Minimum, Maximum-tominimum, Area) Area calculation, Scan width/interval change,
Dark-out, Smoothing, Averaging, and Profile data output

Light intensity accumulation, Microscope (LT-9501H, LT-9501HSO(5654) only),
Tolerance judgement, 8-program registration, Calibration, Averaging, Hold modes, Auto-zero, and
interface language selection
Distance mode*4
Main
function
Profile mode*4
Common
Rating
Available (LT-9501HSO(5654)/LT-9031M only)

10 times/sec.
Display cycle*1
100 to 240 VAC 10% 50/60 Hz
Current consumption
110 VA or lower
Overvoltage category
II
Pollution degree
Ambient temperature
0 to 35C, No condensation
Relative humidity
Weight (Controller)
Approx. 2.4 kg
*1 Varies depending on the setting

*2 Dedicated power supply for the monitor specified by KEYENCE.
*3 Select either the Limits mode or the Binary mode.
*4 Select either the Distance mode or the Profile mode. (Distance mode is only available with the LT-9501HSO(5654) and LT-9001HSO(5655).)
The rating of the NPN open-collector output is 30 mA (30 V or lower) maximum, and residual voltage is 0.5 V.
The rating of the Non-voltage input is ON voltage 1 V or lower, and OFF current 0.6 mA or lower.
*5 Display changes every 0.3 m.
Measuring unit
Type
Model
Measurement range
Reference distance
Light source
High-accuracy
LT-9011
Scan width/interval
Resolution*1
Linearity*1
Sampling cycle*2
(20 to 30C)
Field of view
Illumination light source
Approx. 2 m
0 to 1100 m (6 steps)/
1 to 10 m (4 steps)
0.3 m
0.5% of F.S.
640 s to 356 ms (14 steps)
Approx. 7 m
0 to 560 m (6 steps)/
1 to 8 m (4 steps)
0.3 m
0.3% of F.S.
640 s to 187 ms (14 steps)
0.5% of F.S.
0.25% of F.S.
Available
1.3 mm x 1.05 mm
Infrared LED
(wavelength: 870 nm)
Ambient light
Ambient temperature
Relative humidity
Weight
Unavailable
Available
2.5 mm x 2.0 mm
Infrared LED
(wavelength: 870 nm)

Incandescent lamp/fluorescent lamp: 10000 lux max.
0 to 35C, No condensation
Approx. 400 g
*1 The value when the measurement target is a mirrored surface object measured in displacement mode, scan width/interval 120 m/2 m, and 8-times average
*2 Sampling cycle differs according to the manufacturing variation of individual measuring units.
The value when the FINE mode is set to OFF.
Cable between the sensor head and controller

LT-C2
2m
Approx. 200 g
* Up to 3 cables can be connected with a total maximum length of 20 m.
48
LT-9031
1.0 mm
30 mm

655 nm
170 W (IEC 60825-1)/3.0 W (FDA (CDRH) Part 1040.10)
Class IIa Laser Product (FDA (CDRH) Part 1040.10)
Class 1 Laser Product (IEC 60825-1)
Wavelength
Output
Laser Class
Model
Cable length
Weight
LT-9031M
0.3 mm
6 mm
Spot diameter
Microscope
function
Long-range
LT-9011M
LT-C10
10 m
Approx. 700 g
Unavailable
Approx. 500 g
LT-9000 Series
Controllers
LK-G5000 Series
Dimensions
Unit: mm
LT-9501H/9001H, LT-9501HSO(5654)/9001HSO(5655)
60
67
49
220
LK-G3000 Series
177
137
(100)
210
LJ-V7000 Series
Measuring units
Sensor head cable

Cable between the measuring unit and the controller
LT-9011M/9011
65
LT-C2/LT-C10
43
43
56
6.3 Cable length: 500
LJ-G Series
4.5
14
14.7
22
6.3 Cable length:

2 m, 10 m
52.5
94
Remote control console

(Standard OP-51542)
SI-F1000 Series
37
3 x 4.5
mounting hole
28.8
15
47
6 0.5 (Reference distance)

46
2.1
17.1
5.5
33
17.1
15
11.2
SI-F80R Series
78
20
112.7
LT-9031M/9031
LT-9000 Series
65
4.5
Cable length: 3 m
11
56
6.3 Cable length: 500
4.5
22
LS-9000 Series
52.5
135
3 x 4.5
mounting hole
78
LS-7000 Series
30 2 (Reference distance)
15
46
33
26.4
TM-3000 Series
49
LS-9000 Series
High-speed optical micrometer

LS-9000 Series
High-accuracy optical micrometer that
flexibly supports runout and inclination
with the ultimate performance required for
on-site measurement.
Features
High-speed 16000 samples/second
The smallest detectable object 10 m
Equipped with the tilt correction and transmitter/receiver
position measurement, etc.

measure
Principle
3-CMOSGreen-LED system
[Principle] Green-LED light is
emitted as a uniform
collimated beam. The CMOS
detects the position of the
edge between light and dark
edges of the received light
and calculates measured
values.
High-intensity
Green-LED
High performance
condenser
Monitor CMOS
Target Position
CMOS
High-speed exposure
CMOS
Three separate CMOS sensors provide advanced inspection capabilities
High-speed CMOS
50
Monitor CMOS
Target positioning CMOS
16000 Hz sampling
Alignment adjustment*1
Transmitter/receiver direction and

position measurement*2
By integrating the peripheral circuits of the

measurement CMOS into one chip, the S/N
ratio has been dramatically improved and
high-speed sampling achieved. For example,
targets that move at 1000 m/min. can be
measured at a pitch of around 1 mm. Even
parts that vibrate at high speeds can be
measured stably.
Recognises the misalignment of a workpiece

from the image taken by the monitor CMOS.
Inclination error is removed automatically and
does not affect the measurement result.
The captured image can also be checked with
computer software so even novices will have
no problem taking measurements.
With the additional data obtained from the

target positioning CMOS, the LS-9000 can
determine the position of the target in both
the X and Y axes.
*1 Functions of the LS-9006M and LS-9030M heads only.
*2 Functions of the LS-9006 (M) and LS-9030 (M) heads only.
LS-9000 Series
LK-G5000 Series
Applications
Measuring the outer diameter wire moving at high speed
Measuring the outer diameter of a shaft

Misaligned workpieces are adjusted and measured
LK-G3000 Series
Even vibrating targets

are measured with
high-speed
Measured
value
LJ-V7000 Series
Outer diameter measurement in harsh environments
Measuring the position and outer diameter of an optic fibre
LJ-G Series
Enables 2D position measurement

on a single device
Y axis
Detachable air purge unit
SI-F1000 Series
X axis
SI-F80R Series
Lineup
Measuring unit
Type
Large-diameter model
Subtype
With monitor camera
With monitor camera
Without monitor camera
With monitor camera
LS-9120M
LS-9030M
LS-9030
LS-9006M
LS-9006
Model
Standard model
LT-9000 Series
120 mm
Small-diameter model
30 mm
Appearance
6 mm
0.8 to 120 mm
0.08 to 30 mm
0.01 to 6 mm
Smallest detectable
object
8 m
2 m
0.5 m
Measurement accuracy
Monitor function
Type
Model
0.1 m
Not provided
Provided
0.03 m
Not provided
Provided
2-axis standard model
2-axis small-diameter model
LS-9030D
LS-9006D
0.3 to 30 mm
0.04 to 6 mm
Not provided
LS-7000 Series
Subtype
0.3 m
Provided
LS-9000 Series
Measurement range
Appearance
Smallest detectable object
2 m
0.5 m
0.1m
0.03 m
TM-3000 Series
Measurement range
51
LS-9000 Series
Structure
Our proprietary wear-free construction

As a high intensity Green LED is used to generate the measurement
beam, laser degradation typical with traditional systems is completely
avoided. In addition, as the entire beam is generated with no moving
parts, there is no motor or mirror system to wear out or replace.
The LS-9000
transmitter construction
(No moving parts)
The system enclosure maintains an IP67 rated protection for all

internal components. In addition, the LS-9000 Series heads come
standard with a built in air purge mechanism to further enhance
the systems resistance to environmental influence.
Meets the IP67 standard
The laser scanning system

transmitter construction
High-efficiency
High-efficiency
condenser
unit unit
condenser
Best in class environmental resistance design*
Built-in air purge units
Reflective
Reflective
mirror
mirror
Semiconductor
Semiconductor
laserlaser
Polygon
Polygon
mirror
mirror
Diffusion
DiffusionHigh-Intensity
High-Intensity
plateplate Green-LED
Green-LED
* The air purge unit is sold as an optional accessory only for the LS-9120M head.
Functions
Ultra-thin outer diameter and

ultra-thin gap measurement*
16-channel simultaneous measurement
Specialised ultra-fine diameter/gap tool now allows measurement of

gaps and diameters previously undetectable.
Measuring the outer diameter of an ultra-thin wire
Smallest

detectable
object
Standard mode
With up to 16 simultaneous outputs, it is possible to measure any

combination of diameters, position, gaps, etc. to meet your needs.
Measuring the outer diameter and runout of a photocopier roller
Ultra-thin mode
6 mm type
40 m
10 m
30 mm type
300 m
80 m
* Functions of the LS-9006(M) and LS-9030(M) heads only.
Transparent object/two-level edge detection

threshold value setting
Irregular surface cancellation

Irregular surface cancellation allows for proper outer diameter
inspection of parts with complex profiles such as key slots or D-cuts.
Measuring the outer diameter of a motor shaft

Cancel data
Taking dimensional measurements of transparent film and

coating material
Data used for
measurement
Transparent film width

Coating material width
100%
80%
Threshold value
Score
52
Light
intensity
Measured value
Data used for

measurement
Using two-level threshold settings, it is possible to simultaneously

measure two targets of differing transparency.
50%
Threshold
value 1
Threshold
value 2
0%
Width
LS-9000 Series
LK-G5000 Series
Specifications
Measuring unit
Head (Standard model/small-diameter model)
LJ-G Series
Weight
LJ-V7000 Series
Measurement range
Transmitter/receiver distance
Repeatability
Sampling cycle*7
Detection area
Transmitter/receiver Smallest detectable object
direction and
Repeatability
position detection
Sampling cycle
Light source
Monitor camera
Ambient temperature
Relative humidity
Environmental
Ambient light
resistance
Shock resistance
Enclosure rating
Material
LS-9006M
LS-9006
LS-9030M
LS-9030
(with monitor camera)
(without monitor camera)
(with monitor camera)
(without monitor camera)
0.04 mm (0.01 mm) to 6 mm
0.3 mm (0.08 mm) to 30 mm
0.04 mm (0.01 mm)
0.3 mm (0.08 mm)
60 5 mm
160 40 mm
0.03 m*1
0.1 m*2
0.5 m*3
2 m*4
16000 samples/sec.
4 x 5 mm
20 x 24 mm
0.04 mm
0.3 mm
0.2 mm*6
0.02 mm*5
4000 samples/sec.
InGaN green LED
Provided
Not provided
Provided
Not provided
0 to +50C
20 to 85% RH (no condensation)
Incandescent lamp/fluorescent lamp 3000 lux or lower
10 to 55 Hz, double amplitude 1.5 mm, 2 hours in each direction (X,Y, and Z)
15G/6 ms
IP67 (including connector)
Aluminium
Transmitter: Approx. 130 g
Receiver: Approx. 300 g
Base: Approx. 180 g
Base: Approx. 180 g
Base: Approx. 430 g
Base: Approx. 430 g
LK-G3000 Series
Model
SI-F1000 Series
The values in brackets are measured in ultra-thin mode.

*1 2 is the value when the outer diameter of a rod 1.0 mm is measured at the centre of the measuring area while the number of averaging measurements is set to 2048.
*2 2 is the value when the outer diameter of a rod 10 mm is measured at the centre of the measuring area while the number of averaging measurements is set to 2048.
*3 The error when a moving rod 1.0 mm is measured within the measuring area.
*4 The error when a moving rod 10 mm is measured within the measuring area.
*5 The value of 2 when the position of a rod 1.0 mm is measured at the centre of the measuring area while the number of averaging measurements is set to 512.
*6 The value of 2 when the outer diameter of a rod 10 mm is measured at the centre of the measuring area while the number of averaging measurements is set to 512.
*7 The sampling cycle is changed by the number of OUT set, and by the use of the mutual interference prevention function.
Head (2-axis standard model/2-axis small-diameter model)

LS-9006D
0.04 mm to 6 mm
0.04 mm
0.03 m*1
0.5 m*3
LS-9030D
0.3 mm to 30 mm
0.3 mm
0.1 m*2
2 m*4
SI-F80R Series
16000 samples/sec.
InGaN green LED
Not provided
0 to +50C
15G/6 ms
Aluminium
Approx. 4.8 kg
Approx. 9 kg
LT-9000 Series
Model
Measurement range
Repeatability
Sampling cycle*5
Light source
Monitor camera
Ambient temperature
Relative humidity
Environmental
Ambient light
resistance
Shock resistance
Measuring head enclosure rating
Material
Weight
*1 2 is the value when the outer diameter of a rod of 1.0 mm is measured at the centre of the measuring area while the number of averaging measurements is set to 2048.
*2 2 is the value when the outer diameter of a rod of 10 mm is measured at the centre of the measuring area while the number of averaging measurements is set to 2048.
*3 The error when a moving rod 1.0 mm is measured within the measuring area.
*5 The sampling cycle is changed by the number of OUT set, and by the use of the mutual interference prevention function.
LS-9000 Series
Head (Large-diameter model)

LS-9120M
0.8 mm to 120 mm
0.8 mm
400 100 mm
0.3 m*1
8 m*2
16000 samples/sec.
InGaN green LED
Provided
0 to +50C
15G/6 ms
Aluminium
Transmitter: Approx. 1800 g, Receiver: Approx. 2800 g, Base: Approx. 1600 g
LS-7000 Series
TM-3000 Series
Model
Measurement range
Repeatability
Sampling cycle
Light source
Monitor camera
Ambient temperature
Relative humidity
Environmental
Ambient light
resistance
Shock resistance
Enclosure rating
Material
Weight
*1 2 is the value when the outer diameter of a rod 40 mm is measured at the centre of the measuring area while the number of averaging measurements is set to 2048.
53
LS-9000 Series
Specifications
Controller
Model
No. of connectable sensor heads
Head compatibility
Display
Display range
LED display
Encoder input
Synchronous 1, 2 input
Auto-zero 1, 2 input
Reset 1, 2 input
Storage trigger input
Input
terminal block
Storage enable input
Storage data clear input
Statistics 1, 2 input
Statistics clear 1, 2 input
Program selection input
Universal output
Output terminal
Status 1, 2 output
Memory FULL output
Strobe 1, 2 output
Error output
Ethernet interface
USB interface
RS-232C interface
Display and settings panel interface
Rating
Current consumption*1
Environmental
resistance
Ambient temperature
Relative humidity
Weight
LS-9501
LS-9501P
2
Yes
0.01 m
99999.99 m to 9999.9 mm
POWER ON indicator, ERROR indicator
NPN/PNP open-collector output, voltage output (5 V/12 V/24 V), line-driver output
Non-voltage input
Voltage input
Voltage input x 4 inputs

10 V x 2 outputs, output impedance 100
4 to 20 mA x 2 outputs, compatible load max. 350
NPN open-collector output x 10 outputs

Measured value and tolerance judgement output, status output
allocatable
PNP open-collector output x 10 outputs

Measured value and tolerance judgement output, status output
allocatable

USB 2.0 HI-SPEED supported (USB 1.1 Full-SPEED compatible)
Measured value output, control I/O, setting change, baud rate can be selected up to 115200 bps
LS-D1000 Max. four heads connectable
24 VDC 10%, including ripple (P-P)
When LS-HA100 not used: 1.0 A max. when 1 head connected; 1.4 A max. when 2 heads connected
When LS-HA100 in use: 2.0 A max. when 3 heads connected; 2.3 A max. when 4 heads connected
When LS-HA100 not used: 0 to +50C
When LS-HA100 in use: 0 to +45C
Approx. 1500 g
NPN open-collector output rating: 50 mA max. (40 V max.), residual voltage of 1 V max.
PNP open-collector output rating: 50 mA max. (30 V max.), residual voltage of 1 V max.
Non-voltage input rating: ON voltage of 1 V max., OFF current of 0.6 mA max.
Voltage input rating: Input max. voltage 26.4 V, min. ON voltage 10.8 V, OFF current 0.6 mA max.
*1 Add the current consumption values for all units when connecting the display settings panel and expansion units. When the LS-9006D or LS-9030D is connected, it counts as two heads.
Display and settings panel

Model
Display
interface
LS-D1000
Measured value display
Measured value display: 2 colours, 8 digits, 16 segments

OUT number display: Monochrome, 2 digits, 7 segments
Tolerance judgement display: HH, HI, GO, LO, LL. Monochrome
Control status display: TIM, ZERO indicator. Monochrome
Program number display
Monochrome, 2 digits, 7 segments
Position monitor display
1D display: 2 colours, 32 levels

2D display: Monochrome, 7 x 7 matrix display
Display update cycle
5 times/sec.
Operation input interface
Numeric keypad, function key, lock key

timing input key, zero input key, reset input key,
escape key, arrow keys (4)
Display and settings panel connection port

Power supply
Rating
Current consumption
Ambient temperature
Environmental
resistance
Relative humidity
Enclosure rating
Weight
2
0.19 A max.
0 to +50C
IP65 (When panel attached, front surface only)
Approx. 400 g
OS environment for using the LS-H2 (LS-Navigator 2) Setting Support Software

Item
Operating System
Supported languages
CPU
Memory capacity
L2 cache memory
Free space in hard disk
Display
USB
Interface
Ethernet
Required environment
Windows 7*1
Windows Vista*2
Windows XP (SP2 or later)*3
Japanese, English, German, Simplified Chinese, Traditional Chinese
Core 2 Duo 2 GHz or more
2 GB or more
2 MB or more
10 GB or more
XGA (1024 768 pixels) or more, 256 colours or more
USB 2.0 HI-SPEED supported (USB 1.1 Full-SPEED compatible)*4
Ethernet 1000BASE-T/100BASE-TX*5
If you wish to use the send to Excel function, please check that one of the Excel versions listed below is installed on your computer.
Excel 2010 (32 bit/64 bit), Excel 2007, Excel 2003, Excel 2002
*1 Each edition of Home Premium, Professional, and Ultimate are supported. *2 Each edition of Ultimate, Business, Home Premium, and Home Basic are supported.
*3 Home Edition and Professional Edition are supported. *4 Connection via a USB hub is not covered by the warranty. *5 Connection to a LAN and connection via a router is not covered by the warranty.
54
LS-9000 Series
LK-G5000 Series
BCD output unit

Model
LED display
Input terminal
Power source
Rating
Current consumption
Ambient temperature
Relative humidity
Environmental
resistance
Weight
LK-G3000 Series
BCD output *1
Strobe output
OUT selection output
OUT selection input
Output terminal
CB-BD100
POWER-ON LED
NPN open-collector output x 4 ports
0.16 A max.
0 to +50C
800 g
LJ-V7000 Series
Up to 1 unit can be connected to the controller.

NPN open-collector output rating: 30 mA max. (30 V max.), residual voltage of 0.5 V max.
Non-voltage input rating: ON voltage of 1 V max., OFF current of 0.6 mA max.
*1 Selectable from BCD output (29 bits, signed), binary output (25 bits, negative numbers are represented by the twos complement), and judgement output.
EtherNet/IPTM unit
Model
Ethernet
IEEE 802.3 (10BASE-T), IEEE 802.3u (100BASE-TX)
Transmission speed
10 Mbps (10BASE-T), 100 Mbps (100BASE-TX)
Transmission media
STP or Category 3 or higher UTP (10BASE-T),

STP or Category 5 or higher UTP (100BASE-TX)
Supported functions
Number of connections
RPI
Message communication
Conformance test
4 hubs (10BASE-T), 2 hubs (100BASE-TX)

Cyclic communication (Implicit messaging),
Message communication (Explicit messaging),
Compatible with UCMM and Class 3
64
0.5 ms to 10000 ms (in 0.5 ms)
6000 pps
UCMM, Class 3
Compatible with Version A9
24 VDC 10%, including ripple (P-P)

Current consumption
0.12 A max.
Environmental
resistance
Ambient temperature
Relative humidity
0 to +50C
Approx. 470 g
LT-9000 Series
Weight
SI-F80R Series
Tolerable communication bandwidth

for cyclic communication
100 m (Distance between the unit and Ethernet switch)
SI-F1000 Series
Maximum number of connectable

hubs*1
EtherNet/IPTM
EtherNet/IPTM and displacement sensor-specific protocols (socket communication)
Compliant standards
LJ-G Series
CB-EP100
Compatible network
*1 The number of connectable hubs is not limited when using a switching hub.
PROFINET unit
CB-PN100
Compatible network
Ethernet
IEEE 802.3u*1
Transmission speed
100 Mbps, full duplex (100BASE-TX)
Transmission media
STP or Category 5e or higher UTP
Supported functions
Update time
GSDML
Conformance class
Conformance test version
Applicable protocol
Record data communication

1
2 ms to 2048 ms
Version 2.25
Conformance Class A compliant
Based on Version 2.2.4
LLDP, DCP
24 V 10%
TM-3000 Series

Current consumption
100 m
Data I/O communication
LS-7000 Series
Number of connectable PROFINET

IO controllers
Weight
PROFINET IO communication
Compliant standards
PROFINET IO
LS-9000 Series
Model
0.12 A max.
Approx. 470 g
*1 Although this unit conforms to IEEE 802.3u and can establish 100 Mbps full duplex communication using AutoNegotiation function, it does not have AutoCrossOver and AutoPolarity functions that are normally required
for the PROFINET IO standard. Select a straight or cross cable according to the Ethernet port of the device to be connected.
55
LS-9000 Series
Dimensions
Unit: mm
Measuring head
LS-9120M
4 x M3
4 x M3
Effective depth 6
Effective depth 6
4 x M4
25 25
17 1
Measurement position
Effective depth 10
35
162
55.6
Measuring
head
162
4 x 6.5 Through-hole
150
150
14 Spot facing depth 7
8
30.6 16
16
233
Measuring
area
30
30
30.6
175
80
180 168
168
120
180
R2
2
89 1
6
20
59.2
15
145
3 x 7.5
Mounting hole
200
400
15
288
LS-9030/LS-9030M
4 x M6
272
Effective depth 10
35
2 x M3
10.3
Effective depth 3
2 x M3
Effective depth 3
15 15
4 x M4
Effective depth 10
706
(70.5)
55
38.3
Measuring
head
35
(31.5)
55
26
26 0.2
26
3 x 7.5
Mounting hole
125
55
Front surface
of receiver 10.3
4 x 4.5 Through-hole
8 Spot facing depth 4.5
55
26
35
Front surface
10.3
of transmitter
(387.5)
4 x M4
4 x M4
(34)6*2
Effective depth
(12)*1
109
132
222
(12)*1
Measuring
area
118.5
222
112
Effective depth 6
20
30(24)*3
71.5 60
R2
71.5
Measuring
head
60
35.5 0.2
5.5
5.5
19.5
(85)
80
3 x 5.5
(Mounting hole)
50
27
160
27
3 x 5.5
(Mounting hole)
50
*1 With air purge unit attached

*2 LS-9030M only
*3 ( ) is for ultra-thin diameter mode
LS-9006/LS-9006M
2 x M2.5 Effective depth 2.5
12.5
13
12.5
2 x M2.5 Effective depth 2.5 13
21.5
10 10
4 x M4
Through-hole
24
Measuring
head
25
18
3.5
8
4x8
Spot facing depth
20 20
4.5
24
21.5
24
16
12.5 0.2
Front surface
of receiver
4 x 4.5
Through-hole
24
Front surface
of transmitter
(227)
124.5
2.5
48
32
Measuring area
R2
56
(17.5)*1
(23)*1
4(2)*2
8
40 0.2 6(5)*2
4
(30)
(85)
3 x 4
(Mounting hole)
115
4 32.5
38
78
56
Measuring
head
18
2 x 4
(Mounting hole)
(60)
38.5
46

*2 ( ) is for ultra-thin diameter mode
3.5
25
LS-9006D
LS-9030D
36
22.5
36
22.5
62
62
47
47
Air purge unit*1
Air purge unit*1
o point*2
nit*1
(85)
10
epth 8
unting
4 x 7
(Mounting
hole)
93
33.9
2 x M5
Effective depth 8
Fitting mounting
screw
(85)
89 0.5
180
240
260
316
(85)
R22
69.6
13
20
4 x M6
220.4
145 0.5
255
316
330
24
134
56
(85)
M5
Effective depth 8
Fitting mounting
screw
13.5
130
4 x 7
(Mounting
hole)
8
18
(85)
78
89 0.5
180
240
260
4 x M6
215
24
134
(85)
R22
4 x 7
(Mounting hole)
140
360
316
(85)
87
24
17
20
33.9
2 x M5
Effective depth 8
Fitting mounting
screw
200 0.5
180 0.5
147
R22
Zero point*2
R22
10
Effective depth 12
40
24
17
Zero point*2
Air purge unit*1
93
Effective depth 12
pth 12
R22
140
360
87
78
(85)
4 x 7
(Mounting hole)
200 0.5
0.5
147
18
Zero point*2
R22
R22
69.6
13
20
220.4
145 0.5
255
316
330
130
R22
4 x M6
Effective depth 12
*2 The zero point represents the intersection of the optical axis centre of
40
X-axis head and that of the Y-axis head.
13.5
20
215
LS-9000 Series
LK-G5000 Series
Unit: mm
Cable
CB-B3/CB-B10
7.6
Cable length: 3 m, 10 m 55
18
32
7.6
Cable length: 5 m, 10 m, 20 m
55
18
51
14
14 16.5
16.5
LK-G3000 Series
41
31
CB-B5E/CB-B10E/CB-B20E
14
14 16.5
(CB-B cable side)
(Sensor head side)
13
LJ-V7000 Series
Controller
LS-9500/LS-9500P
LS-HA100
(70)
88.8
26.3
153.5
150.6
35.9
153
178
R2
35.9
R2
LJ-G Series
DIN-rail
mounting
position
DIN-rail
mounting
position
2
83.3
83.3
(70)
SI-F1000 Series
6
4 x M4
Depth 6.6
2 x M4
Depth 6.5
60
13.2
14.4
80
80
16.5
16.5
SI-F80R Series
LS-D1000
168
168
LT-9000 Series
Mounting bracket
183
7.9 36.6
75
4 x M4
Depth 8
123
138
18
147
143.6
Outer dimension
of mounting
bracket
138
75
Panel thickness:
1.2 to 4 mm
7.9
75
4 x M4
Depth 8
75
LS-9000 Series
183
Mounting screw
36.6
With mounting bracket attached

168
4 x M4
Depth 8
75
147
Panel thickness:
1.2 to 4 mm
143.6
Outer dimension
of mounting
bracket
138
7.9
75
4 x M4
Depth 8
75
TM-3000 Series
183
Mounting screw
LS-7000 Series
Mounting bracket
18
36.6
57
LS-7000 Series
LS-7000 Series
Features
igh repeatability 0.06 m
H
High speed 2400 samples/second
Maintenance-free design

measure
Optical System Achieving High-speed, Highaccuracy, and High-durability

Speed, accuracy, and durability have been improved by advanced
optical technology, using a high-intensity Green LED, a telecentric lens,
and the HL-CCD in the receiver.
COMS image sensor
Telecentric optical system
High-intensity GaN green LED
Beam splitter
Target
HL-CCD for
measurement
Receiver
Principle diagram of the LS-7000 Series
Controller
A/D
converter
The green LED light is distributed as a uniform, collimated beam and is

applied to a target. The edge between the bright and dark area on the
CCD is detected and used to calculate a measured value, such as an
outer diameter.
Special diffusion
unit
Collimator lens
Transmitter
D.E.
processor
A/D
converter
Input/output
CPU
Frame memory
TFT liquid
crystal
monitor
Video output
Excellent repeatability of 0.06 m, 4 times better than conventional systems

By using LED and CCD technologies, repeatability is four times greater than with a conventional laser scan micrometers.
Easy operation and quick inspection
High-durability
Best in its class
Target viewer for easy position adjustment
CCD without moving parts & Long-life LED
The sensor incorporates a CMOS monitor camera to capture a real-time

image of a target. Measurement conditions can be checked on the LCD
monitor. The target viewer function allows the optical axis to be aligned
exactly with the desired measurement point, even if a target has a
complicated shape or is very small.
The measuring area for the current measurement mode is displayed in
real time. (LS-7070M/LS-7030M/LS-7010M)
The laser scan method was reviewed thoroughly. Resulting in the

combination of Green LED and HL-CCD that solved the problem of motor
durability, which had been the weak point of the laser-scanning method.
Furthermore, the long-life LED achieved continued reliability over the
long term.
Measurement line
Outer-diameter
measurement
Gap
measurement
HL-CCD
Target Viewer
58
Green LED
LS-7000 Series
LK-G5000 Series
Applications
LK-G3000 Series
LJ-V7000 Series
Measuring the width of a sheet
Measuring the outer diameter of a wafer
Measuring the outer diameter of a catheter
LJ-G Series
Measuring the deflection of a crank journal
SI-F1000 Series
SI-F80R Series
Lineup
Measuring head
Model
Wide range
Standard
LT-9000 Series
Type
Super fine
With monitor
No monitor
With monitor
No monitor
With monitor
No monitor
LS-7070M
LS-7070
LS-7030M
LS-7030
LS-7010M
LS-7010
Measuring range
Repeatability
0.5 to 65 mm
0.3 to 30 mm
0.04 to 6 mm
3 m
2 m
0.5 m
0.2 m
0.15 m
0.06 m
LS-9000 Series
Appearance
LS-7000 Series
Controller
Type
Model
High-performance
Standard
LS-7601
LS-7001
Monitor display
Red LED 7-level display
Measurement indicator
TM-3000 Series
Appearance
59
LS-7000 Series
Function
One-head simultaneous measurement
Dual-head mode
Measuring the outer diameter of a metal pipe
This simple, special mode measures large diameter targets or wide sheet
materials. Complicated calculations or other settings are unnecessary.
Measuring both the outer diameter and eccentricity of a

copy roller simultaneously
One measuring head allows simultaneous measurement using two
measurement modes, such as measuring the outer diameter and
eccentricity.
Transparent object measurement
Measuring area designation

Measuring IC lead pitch
Checking the width or edge position of a glass plate
The measuring area can be designated according to the inspection

purpose, such as measurement of the IC lead gap or pitch.
Even transparent objects that were difficult to detect with conventional

micrometers can be measured. The edge detection level can be easily
changed via the controller.
Change in received light intensity
caused by the edge of a glass
object
Lead outer dimension 2
Gap between leads
Lead pitch
Before threshold value adjustment
Threshold value
Lead outer dimension 1
Threshold value
Measuring
range
30 mm
After threshold value adjustment
Air purge unit (Optional) & IP64 Rating

OP-79428 [for LS-7030 (M)]
OP-79429 [for LS-7070 (M)]
Attaching the air purge unit in front of the
measuring head and feeding an air flow
prevents dirt or dust from accumulating
on the head surface.
60
Air purge
unit
Air duct
Controller-compatible IP64 head

The head stores compensation
data to ensure compatibility
with the controller. This greatly
improves Measurement
position accuracy and head
maintainability. In addition, the
measuring head conforms to
IP64. It is dripproof and suitable
for harsh environments.
LS-7000 Series
LK-G5000 Series
Specifications
Controller
Type
Model
Standard
LS-7601
LS-7001
2 (All types)
2 (LS-7070/LS-7030/LS-7010 only)
TFT 5.5-inch LCD display,

Backlight: CCFL (Average life: 40,000 hours)
Main display: 7-segment red LED

(Character height: 20.3 mm)
Sub-display: 7-segment red LED
(Character height: 9.9 mm) x 3
LK-G3000 Series
High-performance
Appearance
No. of connectable measuring heads

Display range
0.01 m to 100 m (7-level selectable)

99.99999 to 9999.9 mm (Linked to minimum display unit setting, mm/inches selectable)
Measurement position monitor
Monitor image (When the measuring head

with the monitor function is connected.)
7-level display with a red LED
Tolerance check output display
5-level LCD indicator
Green LED (GO), Red LED x 2 (HI, LO)

5-level comparator output

Comparator ready output
Strobe output
Synchronous input
Reset input
Auto-zero input
NPN open-collector output for OUT1
Non-voltage input for OUT1
Program selection input

Analogue output
Connector I/O
BCD
mode*1
10 V x 2 outputs
5-level comparator output

Comparator ready output
Strobe output
Statistical processing output
NPN open-collector output for OUT2

Selectable from focus, area check, and difference check, NPN open-collector output x 2 outputs
BCD output
Measurement data output (Sign + 7 digits), OUT1/OUT2 selectable, NPN open-collector output
BCD selection output
BCD selection input
Non-voltage input
Video output

Measurement data output and control I/O, printer (Baud rate can be selected up to 115.200 bps)
Conforming to the NTSC system (RCA connector)
24 VDC 10%
Power supply voltage*2

Current consumption*2
SI-F80R Series
Statistical processing input

RS-232C interface
1.2 A max.
Enclosure rating
0.7 A max.
IP64 (Panel surface only)
Ambient temperature
0 to 40C
LT-9000 Series
Relative humidity
Weight
Function output
Synchronous input
Reset input
Auto-zero input
SI-F1000 Series
SUB
mode*1
LJ-G Series
Terminal block
Alarm output
Statistical processing input
LJ-V7000 Series
Display
Measurement display
Approx. 1010 g
Approx. 820 g
*1 Either SUB mode or BCD mode can be selected.

*2 AC power supply can be used when the LS-S11 (AC power supply stand) is connected.
The rating of the NPN open-collector inside the terminal block is: 100 mA max. (40 V max.), with a residual voltage of 0.5 V max. The rating of the NPN open-collector inside the connector I/O is: 30 mA max. (30 V max.), with a residual voltage of 0.5 V max. The rating of non-voltage input is: ON voltage of 1 V max., OFF current of 0.6 mA max.
LS-9000 Series
LS-7000 Series
TM-3000 Series
61
LS-7000 Series
Specifications
Measuring head
Type
Monitor camera
Model
Large-diameter type
Wide measurement range
Super fine measurement
Provided
Not provided
Provided
Not provided
Provided
Not provided
LS-7070M
LS-7070
LS-7030M
LS-7030
LS-7010M
LS-7010
Appearance
Measuring range
0.5 to 65 mm
0.3 to 30 mm
0.04 to 6 mm
0.5 mm
0.3 mm
0.04 mm
250 50 mm
160 40 mm
60 mm
Light source
GaN green LED
CCD scanning range

Repeatability
Approx. 69 mm
Approx. 33 mm
3 m*1
2 m*3
0.5 m*5
0.2 m*2
0.15 m*4
0.06 m*6
No. of samples*7
Monitor function
2,400 samples/sec.
Provided
Not provided
Provided
Not provided
Provided
Not provided
Transmitter: Approx. 140 g,

Receiver: Approx. 380 g,
Base: Approx. 220 g

Base: Approx. 220 g
IP64
Enclosure rating*8
Ambient temperature
0 to 50C
Relative humidity
Weight
Approx. 7 mm
Base: Approx. 660 g

Base: Approx. 660 g

Base: Approx. 430 g

Base: Approx. 430 g
*1 The error when a moving rod 20 mm in diameter is measured in the measuring area of 20 x 40 mm.
*2 The value of 2 when the outer diameter of a rod 20 mm in diameter is measured at the centre of the measuring area while the number of averaging measurements is set to 512.
*3 The error when a moving rod 10 mm in diameter is measured in the measuring area of 10 x 20 mm.
*4 The value of 2 when the outer diameter of a rod 10 mm in diameter is measured at the centre of the measuring area while the number of averaging measurements is set to 512.
*5 The error when a moving rod 1.0 mm in diameter is measured in the measuring area of 2 x 4 mm.
*6 The value of 2 when the outer diameter of a rod 1.0 mm in diameter is measured at the centre of the measuring area while the number of averaging measurements is set to 512.
*7 1200 samples/sec. when the mutual interference prevention function is used.
*8 The connector section is excluded.
Hardware environment for the LS-H1W (LS-Navigator)

Model
CPU
Supported OS
Cable length
Cable between the controller and measuring head
Windows7*1/Windows Vista*2/Windows XP*3/Windows 2000 Professional
LS-C3A
3m
64 MB or more
LS-C10A
10 m
LS-C30A
30 m
Memory capacity
Display
VGA (800 x 600 pixels) or more, 256 colours or more
Hard disk space
10 MB or more
Camera cable between the controller and measuring head
RS-232C (serial port) interface required
LS-C3AM
3m
Excel 2010/2007/2003/2002/2000
LS-C10AM
10 m
*1 Home Premium, Professional, and Ultimate editions are supported.

*2 Ultimate, Business, Home Premium, and Home Basic editions are supported.
For Windows Vista, Versions 1.2 and above are supported.
*3 Professional and Home Edition editions are supported.
LS-C30AM
30 m
OP-42182
1m
Windows7, Windows Vista, Windows XP, Windows7, Excel 2010/2007/2003/2002/2000 are registered trademarks of Microsoft Corporation in the U.S.A.
OP-42183
3m
Interface
Excel
Cable between the receiver and transmitter
AC power supply stand LS-S11

Model
LS-S11
Applicable controller
LS-7001/LS-7601
100 to 240 VAC 10%, 50/60 Hz
Current consumption
110 VA max.
Ambient temperature
0 to 40C
Relative humidity
Weight
Approx. 1.7 kg
Options
62
Sensor head cables

Model
LS-H1W
AC power supply stand
Air purge unit
Air purge unit
LS-S11
OP-79428
OP-79429
[For LS-7030(M)]
[For LS-7070(M)]
LS-7000 Series
Measuring heads
Unit: mm
LS-7070 (LS-7070M)
30
9
70
LS-7030 (LS-7030M)
4-M2.5,
effective depth: 5
4-5.5, through-hole
9.5 spot facing, d=5.5
Measuring
head
42
15
28
26
115
24 0.3 Measurement
position
Front surface
of a receiver
3-5.5
(Mounting hole)
15 4-M4 effective depth: 10
Measuring area
130
250
31
72
3-5.5
(mounting hole)
Cable length: 260
23
31
312
56
27
160
27
214
50
71.5
5.5
19.5
3-5.5
mounting hole
Cable length: 200
80
Cable length: (500)*

Cable length: 500
60
30
35.50.2
5.5
3-5.5 (Mounting hole)
126.5
LJ-V7000 Series
18
10
4-M2.5
effective
depth: 3
45
13.5
Front surface
of a transmitter
Measuring area
109
71.5 60
104
24
55
Front surface
of a receiver
20
5.5
150
4-M4 effective depth: 10

26
(34)*
56 0.3
15
22 0.2
Measurement position 55
13.5
92.5
15
38
114
65
5.5
* [Cable length: 500]
4-4.5 through-hole
24 8 spot facing, 4.5 (d)
21
Front surface
of a transmitter
92.5
Cable length: 270
4-M2.5 10
effective
depth: 3
45
6.5
65
104
Cable length: 500
30 9 4-M2.5,
effective
depth: 5
70
LK-G3000 Series
21
LK-G5000 Series
Dimensions
50
Cable length: 200
* Figures in parentheses are the values for the LS-7070M.
LS-7010 (LS-7010M)
4-4.5 through-hole
8 spot facing, 4.5 (d)
15 15
4-M4, through
36
46
400.2
2-4 (Mounting hole)
32
46
56
4 18
Cable length: (500)*

Cable length: 500
Cable length:
140
SI-F1000 Series
(227)*
Measuring area
76
51
4
3-4 (Mounting hole)

56
26
24
25 25
16 0.2
LJ-G Series
Measuring head
(30)*
(60) *
81
38
126
3.5
48
Ca ble length: 140
3.5
25
SI-F80R Series
Controllers
LS-7001
LS-7601
23.2
83
Effective
display area
25
(191)
Dimension of mounting bracket
175
60
Panel thickness:
1.2 to 4.0
Mounting screw
25
207
60
169 +1
0
Panel thickness:
1.2 to 4.0
Mounting screw
124 +1
0
200
Mounting bracket
60
Mounting bracket
60
LT-9000 Series
22.3
(191)
Dimension of mounting bracket
175
111
Effective display area
Panel cutout
130
130
(65)
(65)
LS-CxxA
LS-9000 Series
Cables
Cable between the controller and
sensor head
AC power supply stand

43
6.3
LS-S11
43
171
14.7
14
LS-7000 Series
196
60
Camera cable between the

controller and sensor head
LS-CxxAM
OP-4218x
4.8
(35)
35.3
14
178
11.5
11
35
11.5
4.8
216
43.5
148
201
(100)
TM-3000 Series
Cable between the receiver and

transmitter
35
35.3
11
63
TM-3000 Series
High-speed 2D
Optical Micrometer
TM-3000 Series
Features
ulti-point 2D measurement
M
Tilt correction for inline measurement
High-speed sampling of 5.5 ms

measure
Because the system works in two

dimensions it can...
Simultaneously measure dimensions that require both X and Y values.
In addition, inspection time is reduced due to the elimination of motion
components.
Position correction function
[edge correction/pattern correction]

Automatically corrects misalignments and tilt of the target which is directly
linked to measurement errors. Can measure accurately even when
positioning is difficult or objects are conveyed in random orientations.
Because the measurement

area autotracks according to
the position and tilt of objects
within the compensation area,
it can be measured accurately.
Example of measurement
Area
: Hole diameter
Perpendicular
distance
: Centre pitch
: Intersection point coordinates
Angle
: Radius
: Width
Intersection point
coordinates
Centre pitch
Width
Radius
Hole diameter
64
Measured image
Master image
: Angle
: Perpendicular distance
: Area
Position
correction area
Outer diameter
measurement
area
Position
correction area
Correction
Outer
diameter
measurement
area after
correction
TM-3000 Series
LK-G5000 Series
Applications
Unit: mm
Overall length 50.000
Point angle
15.0
Outer diameter 5.000

Overall length
35.000
LK-G3000 Series
Tip angle 45.0

Outer diameter 16.000
Measures outer diameter/tip angle of needle

valves
V groove angle 22.5
Outer diameter Outer diameter Outer diameter

0.300
0.299
0.148
Groove pitch 5.000
Measures pulley groove pitches/V groove

angles
Measures multi-point outer diameter/point

angle of injection needles
Minimum
diameter
6.000
Outer
diameter
12.000
LJ-V7000 Series
Outer thread height

14.000
Maximum
diameter 8.000
Thickness 3.500
Neck ring
height
26.000
Outer
thread
diameter
26.500
LJ-G Series
Roundness 0.020
Measures maximum diameter/minimum

diameter of ampules
Measures outer diameter and threading a PET

bottle
Measures roundness/thickness of O-rings
Sensor head
SI-F1000 Series
Lineup
Controller
Type
Model
6 mm type
Appearance
Type
Model
Appearance
TM-006
Standard type
TM-040
65 mm type
TM-065
PNP Output type
SI-F80R Series
40 mm type
TM-3001
TM-3001P
LT-9000 Series
Features
Diverse measurement modes
A flexible combination of 15 types of basic measurement modes, and 8 types of auxiliary measurement modes, can support a variety of inspections.
Angle
Distance/Intersection Point Distance
Measures a maximum diameter/minimum diameter within

the specified area, and a step/width between the detected
edges.
Maximum diameter
Measures an angle between two detected straight lines,

and a tilt angle from a virtual line.
Measures a centre of the circles and intersection point,

distance between 2 specified points, distance from a
point to a straight line.
Angle
Centre
distance
Step
Intersection point
distance
Tilt angle from a

virtual line.
LS-7000 Series
Minimum
diameter
LS-9000 Series
Outer diameter/Step/Width
Width
Distance between a point
and a straight line
Height / Position/Coordinates
Radius/Roundness
Pitch
Measures height/ position of detected edges and

coordinates of specified points.
Measures radius and roundness of specified arc.
Measures a maximum/minimum/average pitch within the

specified area.
Pitch
Radius
Height (Y direction)
TM-3000 Series
Intersection point position

(X,Y coordinates)
Roundness
Position (X direction)
65
TM-3000 Series
Specifications
Sensor head
Model
Measuring range
Light source
TM-006
TM-040
TM-065
6 mm
40 mm
65 mm
0.04 mm
0.3 mm
0.5 mm
60 mm
180 mm
270 mm
GaN Green LED
InGaN Green LED
0.5 m*1
2 m*3
3 m*5
Repeatability
0.06 m*2
0.15 m*4
0.2 m*6
Sampling cycle (trigger interval) *7

Environmental
resistance
5.5ms (33ms at the initial setting)

IP64
Enclosure rating *8
Ambient temperature
0 to 50C
Relative humidity
35 to 85% (No condensation)
Material
Weight
Aluminium
Transmitter
Approx. 140g
Approx. 560g
Approx. 1280g
Receiver
Approx. 340g
Approx. 720g
Approx. 1460g
Base
Approx. 220g
Approx. 630g
Approx. 1500g
*1 In a measurement area of 2 mm 4 mm error when measuring width of KEYENCE standard object (glass calibration scale).
*2 Value of 2 measuring the width of KEYENCE standard object (glass calibration scale) in the centre of the measurement area, an average 16 times, average 1.3 mm line.
*3 In a measurement area of 10 mm 26 mm error when measuring width of KEYENCE standard object (glass calibration scale).
*4 Value of 2 measuring the width of KEYENCE standard object (glass calibration scale) in the centre of the measurement area, an average 16 times, average 8 mm line.
*5 Error when measuring width of KEYENCE standard object (glass calibration scale) in a measurement area of 20 mm 40 mm.
*6 Value of 2 measuring the width of KEYENCE standard object (glass calibration scale) in the centre of the measurement area, an average 16 times, average 14 mm line.
*7 When measurement area is minimum, others are initial settings
*8 Apart from connector component
Controller
Model
TM-3001
TM-3001P
Compatible
2 units max.
Number of connectable sensors *1

Display
0.01 m, 0.001 mm2, 0.01
9999.99 mm, 99999.9 mm2, 99999.9

Input
terminal
block
Non-voltage input
Trigger input (for Head A)

Timing 1 input
Non-voltage input
Voltage input
Auto-zero 1 input
Reset input
Output
terminal
block

Non-voltage input
Voltage input
Non-voltage input, 4 inputs
Voltage input, 4 inputs
Memory card save input
Non-voltage input
Voltage input


Error output
Process output
Trigger input (for Head A)
Timing 2 input
Auto-zero 2 input
Expansion
connector
Judgement/Binary output*2
Strobe output
Analogue RGB monitor output
RS-232C interface
USB interface
In conformity with USB Revision 2.0 HI-SPEED (USB 1.1 Full-SPEED compatible)
Ethernet interface
1000BASE-T/1000 BASE-TX/10 BASE-T
Memory card
SD card CA-SD4G (4GB), CA-SD1G (1GB) support

Position correction function, OUT name change function, select measurement mode (outer diameter, height, step height, position, width, distance,
intersection distance, angle, radius, roundness, coordinates, area, search, ring test, pitch) functions, OUT function between operators, auxiliary
measurements (straight edge, circular edge, the edge bounding line, centre line, intersection, straight line between two points, any line, any point),
functions, scaling function, average function, measurement function, measurement value alarm setting function, tolerance setting function, auto-zero
function, storage (data/image) function, memory card storage function, program memory function, trigger mode change function, mutual interference
prevention function, adjustable measuring range function, detection threshold
value change function, mask function, attitude correction function, display language switching function, support software setting function, trigger
interval-measurement time display function, others
Major functions
Ratings
Environmental
resistance
SVGA (800 x 600 pixels)

24 VDC 10%, Ripple: 10% (P to P) or less
Current consumption
1 head connected 480mA max./ 2 heads connected 550mA max.
Ambient temperature
Relative humidity
0 to 50C
35 to 85% (No condensation)
Material
Polycarbonate
Weight
Approx. 1120g
*1 1 or 2 units can be connected only with the same head model

*2 OUT 1 to OUT 8 decision result, OUT 9 to OUT 16 decision result, time share output of binary measurement data.
The rating of the NPN/PNP open collector output (output terminal block): 50 mA (30 V or less) max., residual voltage: 1.4 V or less (50 mA) 1.0 V (20 mA)
The rating of the NPN/PNP open collector output (expansion connector): 50 mA (30 V or less) max., residual voltage: 1.0 V or less
Rating for non-voltage input, ON voltage 1V max., OFF current 0.3mA max. (trigger input terminal, ON voltage 5V max., OFF current 1mA max.)
Voltage rating, maximum rating 26.4V, ON voltage 10.8V, OFF current 0.3mA (trigger input terminal maximum rating 26.4V, ON voltage 10.8V, OFF current 1mA)
66
TM-3000 Series
LK-G5000 Series
Operating system environment

CPU
Pentium III 1GHz min. (recommended 1.7GHz min.)

Windows 7 *1 Windows Vista *2
Support OS
Windows XP Professional Edition/Home Edition

Windows 2000 Professional
512MB min. (1GB min. recommended)
Resolution of display
XGA (1024 x 768 pixels) min, 256 colours min.
Free disk space
1GB min.
Interface *3
As described above, all those mounted, USB2.0/1.1 *4, Ethernet *5
LK-G3000 Series
Memory capacity
LJ-V7000 Series
* For your OS, use environments above that recommended.

*1 Supports all editions Home Premium, Professional, Ultimate.
*2 Supports all editions Ultimate, Business, Home Premium, Home Basic. 64 bit versions are not supported.
*3 Communicate selecting any of them. Simultaneous communication is not possible.
*4 Connection through a USB hub is not included in the guarantee.
*5 Connection to LAN and connection via a router is not included in the guarantee.
Windows Vista, Windows XP, Windows 2000 Professional are registered trademarks of US Microsoft Corporation.
Pentium is a registered trademark of intel Corporation.
LJ-G Series
Controller
Sensor head
Sensor head
40mm type
TM-040
Sensor head
65mm type
TM-065
SI-F1000 Series
Sensor head
6 mm type
TM-006
Controller
TM-3001(P)
Controller lineup
TM-3001
PNP Output type
TM-3001P
SI-F80R Series
NPN Output type
Monitor
Console (Optional)
OP-82125
USB cable (Optional)

OP-66844
High-resolution monitor
CA-MP81
LS-9000 Series
Cable - connector
Cable between
head and controller
CB-A
(0.7, 2, 5, 10, 20, 30m)
Monitor stand
OP-42278
LT-9000 Series
Setting and support

software
TM-H1
Option
Transmitter to receiver
expansion cable
OP-87033 (1m)
OP-87034 (3m)
Cable between
controller - monitor
OP-66842 (3m)
Protective cover
OP-87035 (2 per pack)
(for TM-040)
OP-87036 (2 per pack)
(for TM-065)
D-sub25 pin conversion

connector
OP-96369
Memory card
CA-SD4G (4GB)
CA-SD1G (1GB)
LS-7000 Series
I/O connector cable

OP-51657 (3m)
Ethernet cable
OP-66843 (3 m)
D-sub9 pin conversion

connector
OP-26401
TM-3000 Series
RS-232C
communication cable
OP-96368 (2.5m)
67
TM-3000 Series
Dimensions
Sensor heads
Unit: mm
TM-006
4-4.5 through-hole
8 spot facing, 4.5
4-M4 through-hole
15 15
24
36
25
160.2
(227)
3-4 (mounting hole)
56
76
51
46
25
Measurement
area
8
4
400.2
26
32
2-4 (mounting hole)
46 56
18
4
30
Cable length 100
60
Cable length 500

81
3.5
Cable length 190
48
2-M4 through-hole
3.5
38
25
126
Base 35
4.5
26
115
2-M4 through-hole
45
142
70
212
2-M4 Effective depth 5
2-M4 Effective depth 5

16
16
40
92
47
18
TM-040
4-M3 effective depth 3.5
4-M3 effective depth 3.5
Measurement area
48
4-4.5 cut
8 depth 4.5
25
25
48
4-M4
48
48
50
62
310.3
41.5
50
55
55
Front surface of receiver
3-5.5 (mounting hole)
94.8
41.5
76.5
Measurement area
Front surface of transmitter
20
40
97.5 88
88
97.5
65.50.6
5
5
47
29
90
6.5
Cable length: 500
180
58.5
Cable length: 235
17.5
When minimum bend R
Cable length: 175
2.8
20
When minimum bend R
2-M4 effective depth 6

6
50
39.8
68
145
115
115
306
161
31
31
5.5
34
103
103.5
25
TM-3000 Series
LK-G5000 Series
Unit: mm
TM-065
4-M3 Depth 3.5
4-5.5 cut
9.5 depth 5.5
76
4-M3 Depth 3.5
4-M4
Measurement
area
35
LK-G3000 Series
35
76
76
76
70
94
70
470.6
44
44
12
Front surface of receiver
Front surface of transmitter
65
115
Measurement
area
97
30
65
130
115
LJ-V7000 Series
129.7
130
120
820.8
20
8.7
66
When minimum bend R
160
Cable length: 420
11.5
270
9.5
LJ-G Series
Cable
length: 175
Cable length: 500
19
When minimum bend R
33.5
66.5
4-M5 Depth 10

12
47
SI-F1000 Series
47
70
240
49.7
200
130
430
190
53
17
176
92.5
135.5
(15)
241.2
Outer dimension of mounting bracket
230
SI-F80R Series
LCD monitor
CA-MP81
TM-3001(P)
44
131.5
1.0 to 4.0
Panel thickness
Mounting bracket
151
Mounting screw
35.9
153
191.2
180
Outer
129.8
dimension of
Effective
mounting
display area
bracket
106
83.3
156
6
172.4
Effective display area
34
LS-9000 Series
65.3
LT-9000 Series
DIN rail
mounting
position
(60)
4 x M4 Depth:
6
Stand
OP-42278
230
LS-7000 Series
70
236
146
80
17
2-
66.5
TM-3000 Series
.5
R2
21.5
111
8
130
210
69
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WW1-1065
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MeasurementNE-WW-GC3-GB 1065-4 600E71 Printed in Japan

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M E A S U R E M E N T G E N E R A L C ATA L O G U E

High Precision Measurement

Surface scanning provides a new

CCD Optical Micrometer

Ultra High Speed Laser

High-speed Optical Micrometer

Stable measurement thanks to 16000 samples

High-speed 2D/3D Laser Scanner

Surface Scanning Laser

High-Speed Optical Micrometer

CCD Optical Micrometer

I Sampling speed of 5 kHz

I Precise 2 m diameter beam spot

I High repeatability 0.06m

Linearity of 0.1% of F.S.

High-speed 16000 samples/second

I An emphasis on inline measurement

Sampling rate of 50 kHz

I Fastest in the World 392 kHz

LK-G5000 Series Measurement Principle (Triangulation type)

At the reference distance

LJ-V7000 Series Measurement Principle

The laser light is projected in a horizontal line by

SI Series measurement principles (Spectral-Interference type)

Light source (SLD)

ultra high accuracy

Reference reflection surface

SLD: Super Luminescent Diode

Part of the broad wavelength light

The two reflected light beams interfere

Splitting the returned light into different

CLEAR TARGET THICKNESS

LT-9000 Series Measurement Principle (Confocal type)

When the focal point is not on the target surface

When the focal point is on the target surface

LS-9000 Series Measurement Principle (Thrubeam type)

A small amount of received light

High-speed exposure CMOS

Proprietary designed measurement

Target Position CMOS

High-intensity Green LED lasts longer

High performance condenser

The CMOS measures the position

Lens unit efficiently focuses LED light.

The Monitor CMOS tracks workpiece

Improvement over the laser-scanning method

TM Series measurement principles (2D Thrubeam type)

The green LED light is distributed as a uniform, parallel beam and

ULTRA HIGH ACCURACY

Telecentric optical system

The newly developed InGaN LED system

High luminance InGaN green LED

A collimated green LED beam is used to generate a shadow

Substrate thickness measurement of

Measurements of glass sheet thickness,

Thickness measurement of transparent film

Height and Step Height

HDD arm assembly position

Height and width measurement of rubber

Height control of dispenser

Width and Outside Diameter

Drill bit outer diameter measurement

Roller outer diameter measurement