Scanning Electron Microscope

JCM-6000 Series

HV:

25nm at 15kV

Resolution:
LV:
Magnification:

N/A

10X to 60kX (SE)

10X to 30kX (BSE)
(based on 4x5 printout)

Accelerating Voltage:

5kV, 10kV, 15kV

Probe Current:

Low, Standard, High

Basic System

Analytical System

Consisting of the following:

COMPUTER CONTROL:

Dell OptiPlex or equivalent, Windows 7 Pro, 32-bit, Multitouch Monitor

Keyboard/mouse and multitouch control of key SEM functions (magnification, scan rotation, image shift)
Microsoft Office

AUTOMATIC FUNCTIONS:

Vacuum sequencing
Full Auto Executes at startup. Automatic gun alignment, focus, stigmation correction and brightness/contrast
Auto gun alignment (AGA), with manual override
Auto focus, with manual override
Auto stigmation correction, with manual override
Auto brightness/contrast
Auto Filament Off User selectable function to automatically turn filament off if system sits idle
Storage of "recipes" - microscope operating conditions

IMAGING SYSTEM:

Full multi-touch operation with user preference of keyboard/mouse control

SEM Interface image display mode resolution of 1920 x 1080 pixels
Slow scan frame store with 640 x 480 and 1280 x 960 pixels
High speed frame store 640 x 480 pixels
Image formats of BMP, JPEG and TIFF
Frame averaging and pixel integration
On screen measurement includes point-to-point and angle. Export data to CSV file
Six definable preset instant magnifications
Image storage (save to disk) with auto sequencing of file name with six digit extension
Step-by-step graphic guide to sample exchange on venting. Full Auto will generate image after evacuation
Digital scan rotation built in (1 steps)
Low magnification image displayed at bottom of software interface

ELECTRON OPTICS:

Combined tungsten filament and Wehnelt (cartridge type)

Filament current is two stage (standard, high brightness)
Two-stage zoom condenser lens
Fixed OL Aperture, also serves as differential pumping aperture in low vacuum mode
Electromagnetic image shift with drag and drop (90m)
Stigmator memory for changes in kV with manual reset to manufacturers preset

ELECTRON DETECTORS:

Seconcdary electron (SE) detector (scintillator type)

JEOL USA

11 Dearborn Road Peabody MA 01960 978-535-5900 www.jeolusa.com

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Scanning Electron Microscope

JCM-6000 Series

Backscattered electron (BSE) detector (scintillator type)

STAGE AND SPECIMEN CHAMBER:

Manual Stage with X and Y movement: X=70mm, Y=70mm

Option Motorized Tilt/Rotation holder (TRMH)
Specimen holder kit with two holders

25mm diameter x 44mm tall

70mm diameter x 7mm tall

Maximum sample size of 70mm diameter x 50mm tall (full coverage)
Three accessory ports: EDS port, EDS Aperture port, Option TRMH port on stage door

VACUUM SYSTEM:

Turbomolecular Pump
Roughing Pump
Fail-safe vacuum monitor

Operating pressure of 10-3 Pa order

MISCELLANOUS:

Installation and proof of performance guaranteed in customer's laboratory

One year all parts and labor warranty (begins with customer's first use of instrument)
System is compatible with standard electrical outlet (no special electric circuit required)
Remote Live Viewing and Live Remote Control ready

Analytical System Features

X-RAY ANALYSIS:

Integrated Silicon Drift type EDS detector

2
10 mm Silicon Drift Detector; Guaranteed Resolution of 133eV or better
0 20 kV (10 eV per channel)
Ultra Thin window for detection from B to U
Full area, partial area and multiple point EDS analysis as well as active mapping
Up to 32 elemental maps simultaneously acquired at up to 4,096 x 3,072 pixels
Qualitative and quantitative analysis
QBase - Spectral Database matching
Chemical typing classification of data according to pre-determined classification conditions.
Active mapping mapping of all detectable elements (reconstruction of element distribution from live acquisition or stored
data)
Probe tracking corrects for image position changes over time.
Quantitative mapping built in
Multiple Map Display overlays of up to 3 elements and SEM image
VID EDS spectrum reconstruction
X-ray data export formats of EMSA/MAS, JPEG, EMF

OPTIONAL ITEMS
Motorized Tilt/Rotation Holder
Range of Tilt is from -15 to +45. Rotation = 360 continuous
Sample Size: 25mm diameter x 10mm (height)
Off Line EDS Software user license

JEOL USA

11 Dearborn Road Peabody MA 01960 978-535-5900 www.jeolusa.com

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