University of Windsor

Electrical and Computer Engineering

Winter 2015

06-88-552: Advanced Topics in MEMS

Course Outline
Course Objective:
The objective of this course is to review the advanced topics related to the
theory, design, modeling, and fabrication of MEMS-based sensors and actuators.
Topics to be covered include: linear and nonlinear electrostatic sensing and actuation
principles, design methodology of MEMS based sensors and actuators, static and
dynamic device modeling, microfabrication techniques, microfluidics, MEMS reliability
and failure analysis, material case studies, packaging, and system integration.
Course Style:
Students perform assignments and oral presentation throughout the course to
demonstrate their progress. Students complete a final MEMS design project which
includes: device concept, material selection, lumped element modeling, 3-D multidomain finite element modeling, development of a fabrication process table, and finally
verification of the 3-D model for desired geometry and behavior. Students perform an
oral presentation and submit a written report on the final project.
Course Assessment:
The course will be assessed by assignments, student presentations, final project,
and semester-end course and instructor evaluation.
Learning Outcome:
After successful completion of the course:
1. The students will be able to effectively apply the knowledge and skills learnt
throughout the course in the design of MEMS devices that are in demand,
specifically, in the automotive, telecommunications, and bio-medical sectors.
2. The students will be able to design a MEMS device from scratch and carry
out necessary mathematical modeling and FEA analysis using industry
standard MEMS modeling tools for device behavior and proof-of-concept
verification.
3. The students will be able to develop a fabrication process sequence and
mask sets that can be used to fabricate a MEMS device using process
parameters available in a standard fabrication facility.
4. Acquire a sound knowledge of advanced modeling and simulation tools
applicable in MEMS and in some cases in the Nanotechnology area.

5. An ability to work effectively as a member and leader in teams, preferably in a

multi-disciplinary setting.
6. A recognition of the need for, and an ability to engage in life-long learning
CEAB Graduate Attributes Criteria:
The Canadian Engineering Accreditation Board (CEAB) criteria for engineering
courses are available at (http://www.engineerscanada.ca/e/files/report_ceab_08.pdf). The CEAB
criteria are intended to provide a broad basis for identifying acceptable
undergraduate engineering programs, to prevent over-specialization in curricula,
to provide sufficient freedom to accommodate innovation in education, to allow
adaptation to different regional factors, and to permit the expression of the
institutions individual qualities, ideals, and educational objectives. They are
intended to support the continuous improvement of the quality of engineering
education.
This course will develop the following CEAB Graduate Attributes Criteria via
Learning Outcomes as described in page 1 of this document.

CEAB Graduate Attributes Criteria

Course
Learning
Outcomes
(See
above)

1. A knowledge base for engineering

Demonstrated competence in University level mathematics,
natural sciences, engineering fundamentals, and specialized
engineering knowledge appropriate to the program.

1,2,3,4

2. Problem analysis
An ability to use appropriate knowledge and skills to identify,
formulate, analyze, and solve complex engineering problems in
order to reach substantiated conclusions.

4. Design
An ability to design solutions for complex, open-ended engineering
problems and to design systems, components or processes that
meet specified needs with appropriate attention to health and
safety risks, applicable standards, economic, environmental,
cultural and societal considerations.

2,3

5. Use of engineering tools

An ability to create, select, apply, adapt, and extend appropriate
techniques, resources, and modern engineering tools to a range of
engineering activities, from simple to complex, with an
understanding of the associated limitations.

2, 4

6. Individual and team work

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An ability to work effectively as a member and leader in teams,

preferably in a multi-disciplinary setting.
12. Life-long learning
An ability to identify and to address their own educational needs in
a changing world, sufficiently to maintain their competence and
contribute to the advancement of knowledge.

Course Instructor:
Dr. Sazzafdur Chowdhury
Office: 3054 CEI
Phone: 253-3000, Ext. 4794
Email: sazzadur@uwindsor.ca
Office hours: 3:00-4:30 PM, except Monday and Friday. The general rule is: if the
door is open, students should feel free to come in any time. If the door is closed,
that means either I am not in my office or I prefer not to be disturbed.
Additionally, students can make an appointment by sending an email or by
calling me at Extension 4794.
Text Book:
1. Microsystem Design, Stephen Senturia, Springer, 2001 (Reprint)
Reference Books:

Muller, Howe, Senturia, Smith, White, Microsensors, IEEE Press

Marc Madou, Fundamentals of Microfabrication, CRC
Elwenspoek and Jansen, Silicon Micromachining, Cambridge
Kovacs, Micromachined Transducers Sourcebook, McGraw-Hill
Maluf, An Introduction to Microelectromechanical Systems Engineering,
Artech House
Sze, Semiconductor Sensors, Wiley

Journal of Microelectromechanical Systems (IEEE/ASME )

Sensors and Actuators A and B
Journal of Micromechanics and Microengineering
Journal of Electrochemical Society
Sensors and Materials
Springer Microsystem Technologies.

Serials:

Course URL:
Follow the link http://www.uwindsor.ca/classnotes to get to 88-552
Username: uwindsor ID
Password: uwindsor PW

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(Students are encouraged to visit the course website frequently. Changes,

announcements, lectures and support materials will be posted on the course
website.)
Design tools:
1. IntelliSuite,

2. Matlab

Course Evaluation Segments:

Assignments

20 %

Final project report

60 %

Final project Oral presentation

20%

Total

100 %

The Student Evaluation of Teaching (SET)

The SET will be administered in the course during the last two weeks of the
semester.
Final project report and presentation date: April 22, 3:30-6:20 PM
Grade Conversion:
Letter grades will be assigned based on the following senate approved criteria:
Letter
%
Range

A+ A
AB+ B
BC+ C
CD+ D
DF
90- 85- 80- 77- 73- 70- 67- 63- 60- 57- 53- 50- 0100 89.9 84.9 79.9 76.9 72.9 69.9 66.9 62.9 59.9 56.9 52.9 49.9

Academic Integrity:
All incidents of academic dishonesty will be documented with the Associate Dean
of Engineering Academic. University procedures will be followed. Such
incidents may include, but are not limited to: submission of assignments other
than your own, receiving or sharing prior knowledge of test questions, sharing or
receiving information during a test by any means (including electronic),
possession of any electronic device (including cell phones) during a test except
for an approved calculator, sharing or receiving knowledge of a test with students
who have not yet written the test, sharing a calculator or formula sheet during the
test, using a solutions manual to prepare submitted assignments. Relevant
sections of Senate bylaw 31 will be followed if any incidence occurs.
Plagiarism:
The act of copying, reproducing or paraphrasing portions of someone else's
published or unpublished material (from any source, including the internet),
without proper acknowledgement. Plagiarism applies to all intellectual endeavors:
creation and presentation of music, drawings, designs, dance, photography and
other artistic and technical works. In the case of oral presentations, the use of

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material that is not ones own, without proper acknowledgment or attribution,

constitutes plagiarism and, hence, academic dishonesty. (Students have the
responsibility to learn and use the conventions of documentation as accepted in
their area of study.) The University believes in the right of all students to be part
of a University community where academic integrity is expected, maintained,
enforced, and safeguarded; it expects that all students will be evaluated and
graded on their own individual work; it recognizes that students often have to use
the ideas of others as expressed in written, published, or unpublished work in the
preparation of essays, papers, reports, theses, and publications. However, it
expects that both the data and ideas obtained from any and all published or
unpublished material will be properly acknowledged and sources disclosed.
Failure to follow this practice constitutes plagiarism. The University, through the
availability of Turnitin, desires to encourage responsible student behavior, deter
plagiarism, improve student learning, and ensure greater accountability.
Turnitin.com may be used in this course.

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Final Project Guidelines and Marking Scheme

1. Final project report submission: Online. On or before April 22, 2015
2. Final project presentation (oral presentation and Q&A): April 22, 3:30-6:20 PM
3. The final project report must include:
a.

Abstract (no more than 350 words)

[5 Marks]

b. Introduction

[5 Marks]

c. Device concept and target application

[10 Marks]

d. Literature survey

[5 Marks]

e. Target design specifications

[5 Marks]

f.

[10 Marks]

Design methodology

g. Material selection

[10 Marks]

h. Mathematical modeling

[15 Marks]

i.

3-D finite element modeling

[10 Marks]

j.

Fabrication process simulation

[10 Marks]

k. Discussions

[5 Marks]

l.

[5 Marks]

Conclusions

m. References (follow IEEE style)

TOTAL

[5 Marks]
[100 Marks]

5. Submissions will include:

a. An electronic copy of the final project report in PDF format.
b. An electronic copy of the final project presentation in PDF format.
c. Electronic copies can be emailed as attachments or submitted in a CD.
Oral Presentation Guidelines:
a. Each group will have 20 minutes presentation time followed by a 10 minutes
question and answer session.
b. Presentations should be converted to Acrobat PDF.
c. Movies, animations can be used. However they should be tested beforehand
for proper functioning.

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