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Multi-layer setup
hi
E
zdz
h
i =1
i 1
zn =
Nl
(Eiti )
Nl
Nl
Dm :=
i = 1
i =1
Neutral plane
= jt j
j =1
Acoustic modeling
M p (V ) = e31, f
Rout
Rin
M
h4
(
)
z
z
dz
n
Effective mass of
the membrane:
h3
We let the acoustic impedance relate the force needed to generate the
acoustic radiation to the time derivative of the average velocity of the
membrane, F = Z y avg Furthermore we approximate the displacement of the
membrane by the displacement of a piston defined by the average
displacement. Then, we can calculate the acoustic impedance Z(f) [3] :
Si
Rm
M p (V ) R ln
Rin
y (V ) =
2 Dm
2
in
Rm
192
k=
Dm
2
Rm
F = P A = k yavg
neutral plane
Flexural rigidty
Nl
V
t4
d
z
hi
2
E
z zn)
i
(
h i1
Transfer function
and lumped model
Using the effective mass of the membrane and the surrounding water we get a
lumped element model of the frequency of the first eigenmode:
Rm
k M (V0 ) R ln
Rin
y0
H ( ) = =
2
V0 2 Dm (k + j Z ( ) mm )
2
in
k
mm + mw
1
f0
2
FEM
Analytic
Guide
810
110
510
FEM
Analytic full thickness
Analytic reduced thickness
910
710
610
510
410
310
210
110
0
20
10
10
20
0
6
5010
1.510
1010
Frequency (Hz)
210
110
110
6
7510
10010
12510
15010
17510
20010
Analytic
FEM
110
110
110
Frequency (Hz)
The comparison of the results shows only minor deviations between the analytic and finite element models. The FE models,
however, show additional effects (e.g. higher order eigenfrequencies) compared to the applied analytical models. By using
both types of models a cross check of the validity of results is possible, which is highly important for such real
multiphysics models.
References
&
Acknowledgements
References:
[1] Muralt, P. et al., PMUT based on PZT thin films, IEEE Transactions on
Ultrasonics, Ferroelectrics and Frequency control, 52 (12) 2005
[2]Bakke, Th, et al. , A novel ultra-planar, long-stroke, and low voltage
piezoelectric micromirror , J of Micromechanics and Microengineering, 20(6),
2010
[3] Kinsler, L. E:, Fundamentals of acoustics, 4 th. Ed. Wiley, 2000, 548p.
Acknowledgements:
The research leading to these results is part of the piezoVolume project
(www.piezovolume.com), which has received funding from the European
Community's Seventh Framework Programme (FP7/2010-2013) under grant
agreement n 229196.